JP2008110593A - Disk-shaped blade and cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting device which exerts excellent cutting performance stably on target materials composed of hard and brittle materials, and is easy to design. <P>SOLUTION: A fixed-side rotary transformer 9a is attached to a case containing a rotation shaft, a bearing, etc. A rotation drive mechanism and a bearing mechanism are not illustrated. Then, a rotation-side rotary transformer 9b integrated with a sleeve 10 and a flange 2a is attached with unillustrated screws. An unillustrated ultrasonic wave oscillator is connected to the fixed-side rotary transformer 9a through a lead wire. A cutting blade 1 and the flange 2b are put in the sleeve 10, and the resultant body is clamped with a flange nut 12 to integrate together. The integrated sleeve 10 is put in the rotation shaft 3 and attached to the rotation shaft 3 with a nut 4. The flanges 2a and 2b have eight slits 13 which penetrate the flanges 2a and 2b from the front to the back side. With respect to slits 13, the angle between the line passing through the central axes of the flanges 2a and 2b and the center line of the slits 13 is 45°. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a disk-shaped blade and a cutting device that can be advantageously used for cutting or grooving a workpiece formed of a brittle material such as glass or silicon.

  A cutting device with a disk-like blade is generally used for cutting or grooving a workpiece formed of a hard and brittle material such as glass, silicon, silicon nitride, rare earth magnet material or super hard metal. It is used.

  FIG. 1 is a front view showing a configuration example of a conventional cutting device 5 described in Patent Document 1, and FIG. 2 is a side view of the cutting device 5 of FIG. The cutting device 5 shown in FIGS. 1 and 2 includes a first flange 2a attached to the rotary shaft 3 of the rotary drive device 6, a disc-shaped cutting blade 1, a second flange 2b, and these flanges 2a, It comprises a nut 4 for fastening and fixing the cutting blade 1 by 2b. Then, the workpiece is cut or grooved while the rotary drive device 6 of the cutting device 5 is operated to rotate the disc-shaped cutting blade 1.

  On the other hand, a method of cutting an object to be processed while applying ultrasonic vibration to a tool such as a tool of a machine tool is known. Such a cutting method is called ultrasonic cutting, and is described in detail in Non-Patent Document 1. Ultrasonic cutting has the advantages that the frictional resistance between the workpiece and the tool is reduced, so that the thermal distortion of the machined surface is reduced, the machining accuracy is increased, and the life of the cutting tool is extended. ing.

Patent Document 2 discloses a cutting device having a configuration in which an ultrasonic vibrator is attached to a rotating shaft that rotates a disk-shaped blade. This cutting device rotates at the outer edge of the blade while rotating the disk-shaped blade and applying the ultrasonic vibration generated by the ultrasonic vibrator to the disk-shaped blade via the rotating shaft. Cut the object. The disk-shaped blade of this cutting device is fixed to the tip of the rotating shaft in a state of being tightened by a vibration transmission direction changer and a nut. The ultrasonic vibrator attached to the rotating shaft generates ultrasonic vibration that vibrates in the axial direction of the rotating shaft, and this ultrasonic vibration is supersonic that vibrates in the direction in which the diameter of the blade is expanded or contracted by the vibration transmission direction converter. It is converted into sonic vibration and applied to the blade. In order to convert the transmission direction of the ultrasonic vibration, the rotating shaft and the vibration transmission direction converter are designed in a predetermined shape by numerical calculation using a finite element method or the like.
JP-A-8-127003 JP 2000-210928 A Ultrasonic Handbook Editorial Committee, “Ultrasonic Handbook”, Maruzen Co., Ltd., August 1999, p679-684

  In the cutting apparatus described in Patent Document 2, a Langevin type ultrasonic transducer is joined to the rotating shaft in order to apply ultrasonic vibration to the cutting blade. In order to apply ultrasonic vibration to the cutting blade, it is necessary to ultrasonically vibrate a rotating shaft having a much larger mass.

  In addition, the cutting blade excites only the vibration of expanding the diameter, but the circumferential vibration also increases the acceleration in the cutting direction, which is expected to improve the cutting speed and cutting accuracy. Circumferential vibration cannot be excited.

  An object of the present invention is to provide a cutting device that stably exhibits excellent cutting performance and is easy to design.

  The present invention is to provide a cutting device having a disk-shaped blade having a torsional ultrasonic transducer and having a slit in the disk-shaped blade.

  Another object of the present invention is to provide a cutting apparatus having a disk-shaped blade having a torsional ultrasonic transducer and a slit in a flange.

  Another object of the present invention is to provide a cutting apparatus having a disk-shaped blade having a torsional ultrasonic transducer and a slit in a support plate.

  The cutting device having a disk-shaped blade according to the present invention can improve cutting accuracy. Also, blade consumption can be reduced.

  A first embodiment of the present invention will be described with reference to FIG. 3 which is a front view of FIG. 3 and a cross-sectional view taken along line AA of FIG. Eight slits penetrating from the front to the back are provided in the flange. In the slit, the angle between the straight line passing through the center axis of the flange and the center line of the slit is 45 degrees. Here, the angle is 45 degrees, but in order to convert the torsional vibration into the expansion / contraction vibration, the torsional vibration can hardly be converted into the expansion / contraction vibration outside the above range, which may be an angle of 10 degrees to 80 degrees.

  Here, the piezoelectric element 8 for exciting the torsional vibration used in FIG. 6 will be described with reference to the perspective view of FIG. It is polarized in the direction of the arrow in the figure. And it vibrates in the direction of the arrow by applying an AC electric field in a direction perpendicular to the polarization direction.

  The cutting device 5 using the flange is shown using the front view of FIG. 5 and the cross-sectional view of FIG. 6 cut along the line AA of FIG. Note that the slits in FIG. 5 are omitted to simplify the drawing. First, the fixed-side rotary transformer 9a is attached to the case 11 that houses the rotating shaft 3, a bearing (not shown), and the like. Here, the rotation drive mechanism, the bearing mechanism, and the like are not shown. Next, the rotary rotary transformer 9b is attached to the structure in which the sleeve 10 and the flange 2a are integrated with screws (not shown). An ultrasonic oscillator (not shown) is connected to the fixed rotary transformer 9a by a lead wire.

  Piezoelectric elements 8a and 8b are placed in the sleeve 10 and tightened and integrated with the flange 2a. Next, the cutting blade 1 and the flange 2 b are put into the sleeve 10 and fixed to the sleeve 10 with the flange nut 12. Then, the integrated sleeve 10 is put into the rotating shaft 3 and attached to the rotating shaft 3 by the nut 4.

  Here, the cutting blade 1 is composed of a circular substrate and an electrodeposited abrasive layer. The circular substrate is made of, for example, a steel plate having a thickness of about 0.06 mm and an outer diameter of about 100 mm, or a metal plate such as aluminum, and a mounting hole for mounting on the rotating shaft is formed at the center.

  Moreover, in order to form an electrodeposited abrasive grain layer on a circular substrate, a normal electroplating method can be used. That is, diamond abrasive grains are mixed with nickel sulfate liquid contained in a plating tank, and the diamond abrasive grains are nickel-plated by nickel plating on a circular substrate in a plating liquid in which diamond abrasive grains are mixed with the nickel sulfate liquid. An electrodeposited abrasive layer composed of a fixed composite plating layer can be formed.

  Next, the operation method of the cutting device 5 will be described with reference to the sectional view of FIG. First, the power of a motor (not shown) is turned on to rotate the rotary shaft 3. Next, an ultrasonic alternating voltage of about 25 KHz from an ultrasonic oscillation circuit (not shown) is applied to the piezoelectric ceramic piezoelectric elements 8a and 8b via the rotary transformers 9a and 9b. By applying the ultrasonic alternating voltage, the cutting blade 1 is excited to vibrate at about 25 KHz. Next, cooling water is supplied from a nozzle to the rotating cutting blade 1 and the workpiece (not shown), and the workpiece is cut or grooved.

  The consumption of the cutting blade when the workpiece was made of glass was about ½ compared to when the ultrasonic vibration was not applied, and the chipping size was about ½.

  Here, the vibration mode of the flange 2 will be described. Torsional vibration of the piezoelectric element 8 propagates to the flange 2, and a part of the torsional vibration is converted into radial vibration as shown by a two-dot chain line shown in FIG. 7 by the slit 13. It can be inferred that the cutting ability is enhanced by the addition of the circumferential acceleration to the radial acceleration by the vibration of the combined torsional vibration and expansion / contraction vibration propagating to the tip of the cutting blade.

  A second embodiment of the present invention will be described with reference to FIG. 9 which is a front view of FIG. 9 and a sectional view taken along the line AA. The support plate 7 is provided with eight slits penetrating from the front to the back. In the slit 13, the angle between the straight line passing through the center axis of the support plate 7 and the center line of the slit 13 is 45 degrees.

  Eight piezoelectric elements 8 are joined to the support plate 7 using an epoxy resin. The piezoelectric element 8 for exciting the torsional vibration used here has the same configuration as that shown in the perspective view of FIG.

  The cutting device 5 using the support plate 7 is shown using the front view of FIG. 11 and the cross-sectional view of FIG. 12 cut along the line AA of FIG. In order to simplify the drawing, the slits in FIG. 11 are omitted. First, the fixed-side rotary transformer 9a is attached to the case 11 that houses the rotating shaft 3, the bearings, and the like. Here, the rotation drive mechanism, the bearing mechanism, and the like are not shown. Next, the rotary rotary transformer 9b is attached to the sleeve 10 with screws (not shown). An ultrasonic oscillator (not shown) is connected to the fixed rotary transformer 9a by a lead wire.

  The support plate 7b, the cutting blade 1, and the support plate 7a are put into the sleeve 10 and tightened and integrated with the nut 4b. And the integrated sleeve 10 is put in the rotating shaft 3, and it attaches to the rotating shaft 3 with the nut 4a.

  Next, the operation method of the cutting device 5 will be described with reference to the sectional view of FIG. First, the power of a motor (not shown) is turned on to rotate the rotary shaft 3. Next, an ultrasonic alternating voltage of about 25 KHz from an ultrasonic oscillation circuit (not shown) is applied to the piezoelectric ceramic piezoelectric elements 8a and 8b via the rotary transformers 9a and 9b. By applying an ultrasonic alternating voltage, the cutting blade 13 is excited to vibrate at about 25 KHz. Next, cooling water is supplied from a nozzle to the rotating cutting blade 13 and the workpiece not shown, and the workpiece is cut or grooved.

  The consumption of the cutting blade when the workpiece was made of glass was about ½ compared to when the ultrasonic vibration was not applied, and the chipping size was about ½.

  Here, the vibration mode of the support plate 7 joined with the piezoelectric element is the same as that shown in FIG. It can be inferred that the cutting ability is enhanced by adding the acceleration in the circumferential direction to the acceleration in the radial direction due to the propagation of the combined vibration of the torsional vibration and expansion / contraction vibration to the tip of the cutting blade.

  A third embodiment of the present invention will be described with reference to FIG. 13 which is a front view of FIG. 13 and a sectional view taken along the line AA. The slit is provided with eight slits penetrating from the front to the back. In the slit, the angle between the straight line passing through the central axis of the cutting blade and the center line of the slit is 45 degrees.

  Eight piezoelectric elements 8 are joined to the cutting blade provided with the slits using epoxy resin. The piezoelectric element 8 for exciting the torsional vibration used here has the same configuration as that shown in the perspective view of FIG.

  The cutting device 5 using the cutting blade 1 is shown using the front view of FIG. 15 and the cross-sectional view of FIG. 16 cut along the line AA of FIG. In order to simplify the drawing, the slits in FIG. 15 are omitted. First, the fixed-side rotary transformer 9a is attached to the case 11 that houses the rotating shaft 3, the bearings, and the like. Here, the rotation drive mechanism, the bearing mechanism, and the like are not shown. Next, the rotary rotary transformer 9b is attached to the sleeve 10 with screws (not shown). An ultrasonic oscillator (not shown) is connected to the fixed rotary transformer 9a by a lead wire.

  The sleeve is integrated with the cutting blade 1 and the nut 4b. And the integrated sleeve 10 is put in the rotating shaft 3, and it attaches to the rotating shaft 3 with the nut 4a.

  Next, the operation method of the cutting apparatus will be described with reference to the cross-sectional view of FIG. First, the power of a motor (not shown) is turned on to rotate the rotary shaft 3. Next, an ultrasonic alternating voltage of about 25 KHz from an ultrasonic oscillation circuit (not shown) is applied to the piezoelectric ceramic piezoelectric elements 8a and 8b joined to the cutting blade 1 via the rotary transformers 9a and 9b. By applying the ultrasonic alternating voltage, the cutting blade 1 is excited to vibrate at about 25 KHz. Next, cooling water is supplied from a nozzle to the rotating cutting blade 1 and the workpiece (not shown), and the workpiece is cut or grooved.

  The consumption of the cutting blade when the workpiece was made of glass was about ½ compared to when the ultrasonic vibration was not applied, and the chipping size was about ½.

  Here, the vibration mode of the cutting blade 1 to which the piezoelectric element 8 is bonded is the same as that shown in FIG. It can be presumed that the cutting ability is enhanced by the addition of the circumferential acceleration to the radial acceleration by the propagation of the combined torsional vibration and expansion / contraction vibration to the tip of the cutting blade 1.

  In the above embodiment, a metal blade is used. However, the same effect can be obtained with a resin blade.

  The disk-shaped blade and cutting device of the present invention can be advantageously used for cutting or grooving a workpiece formed from a brittle material such as glass or silicon.

It is a front view which shows the structural example of the conventional cutting device. It is a side view of the cutting device of FIG. It is a front view which shows the flange of the 1st Embodiment of this invention. It is sectional drawing cut | disconnected by the AA line of FIG. It is the front view which attached the flange of the 1st Embodiment of this invention to the rotating shaft. It is sectional drawing cut | disconnected by the AA line of FIG. It is a figure explaining the vibration mode of the flange of FIG. It is a perspective view of the piezoelectric element which is a torsional vibrator. It is a front view which shows the support plate of the 2nd Embodiment of this invention. It is sectional drawing cut | disconnected by the AA line of FIG. It is the front view which attached the support board etc. of the 2nd Embodiment of this invention to the rotating shaft. It is sectional drawing cut | disconnected by the AA line of FIG. It is a front view which shows the cutting blade of the 3rd Embodiment of this invention. It is sectional drawing cut | disconnected by the AA line of FIG. It is the front view which attached the cutting blade etc. of the 3rd Embodiment of this invention to the rotating shaft. It is sectional drawing cut | disconnected by the AA line of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cutting blade 2 Flange 3 Rotating shaft 4 Nut 5 Cutting device 6 Rotation drive device 7 Support plate 8 Piezoelectric element 9 Rotary transformer 10 Sleeve 11 Case 12 Flange nut 13 Slit

Claims (3)

  A cutting device having a disk-shaped blade is characterized by having a torsional ultrasonic transducer and having a slit in the disk-shaped blade.   A cutting device having a disk-shaped blade has a torsional ultrasonic transducer and has a slit in a flange.   A cutting device having a disk-shaped blade is characterized by having a torsional ultrasonic transducer and having a slit in a support plate.

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