JP2008108403A - Transfer method and device, and recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transfer method to correctly reproduce irregularities formed on a master carrier for record or the transfer irregularity information to a slave medium, and also provide a transfer device. <P>SOLUTION: This method puts the master disks 10A, 10B in close contact with both sides of the slave disk 14, and simultaneously applies pressure to the master disks 10A, 10B through sheets 4A, 4B by using fluid pressure to transfer the irregularity information formed on the master disks 10A, 10B at the same time to the slave disk 14. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a transfer method, a transfer device, and a recording medium for transferring either a concavo-convex shape or transfer information represented by the concavo-convex shape to a slave medium from a master carrier having a fine concavo-convex shape. .

  In recent years, various information recording media such as a magnetic disk, an optical disk, and a magneto-optical disk are required to be smaller and have a larger capacity. In addition, electronic devices, optical devices, and the like have been downsized due to the widespread use of portable terminals and the like, and mass production demand has increased. From such a background, for example, in the recording medium, the track width of the recorded recording signal bit, the magnetization reversal length in the linear recording direction, and the like are as small as several hundreds and tens of nanometers.

  In order to accurately extract information from such a narrow-track recording medium, it is necessary to accurately scan the head for reading and writing information within a narrow track width. Servo signals, address information signals, reproduction clock signals, and the like are preformatted and recorded for tracking servo of the magnetic head.

  Although this recording can be performed by a magnetic head, a method of batch transfer from a master disk as a master carrier in which format information and address information are written is efficient and preferable. For example, a master disk having a magnetic layer with a concavo-convex pattern corresponding to information to be transferred is prepared on a slave disk as a slave medium serving as a high-density magnetic recording medium, and the magnetic layer of the slave disk is previously placed in one direction of the track. There has been proposed a magnetic transfer method in which an initial magnetic field is applied, and then a magnetic field for transfer substantially opposite to the initial magnetization direction is applied in a state where the slave disk and the master disk that have been initially magnetized are in close contact (for example, Patent Documents). 1).

  In addition, there is a problem with erasing noise and crosstalk noise between adjacent tracks due to improved track density, or demagnetization due to thermal fluctuation of recorded magnetization due to improved linear recording density. Magnetic recording media called discrete track media and patterned media have also been proposed.

  In a magnetic recording medium called a discrete track medium or a patterned medium, it is necessary to pattern the surface of the magnetic recording medium into a predetermined shape. In patterning, since it is difficult to finely process the entire recording medium, a master disk (stamper) on which a predetermined shape pattern is formed, as in the case of mass production of small electronic devices and optical devices. An imprint method is used in which the shape of the master disk is transferred to the slave disk by pressing the key onto the slave disk.

In any of the above recording medium transfer methods, it is important that the master disk and the slave disk are pressed and brought into close contact with each other over the entire surface. When there is poor adhesion, a signal loss occurs in the transferred information, and the signal quality is lowered. For example, when the recorded signal is a servo signal, the tracking function cannot be sufficiently obtained, and there is a problem that the reliability is lowered. In order to cope with such a problem, for example, a holder of a magnetic transfer apparatus has been proposed in which a buffer material is provided on a holder that holds a master disk to improve adhesion (for example, Patent Document 2).
JP 2001-14667 A JP 2004-86995 A

  However, as mentioned above, in recent years, various information recording media have been downsized due to downsizing and large capacity, and downsizing of electronic devices, optical devices, etc. has been progressing. However, depending on the processing accuracy of these members, the slave medium is deformed when pressed. When the slave medium is bent, the surface outside the neutral surface is stretched and the inner surface is shrunk, which causes a problem in that a difference occurs between the transferred information pattern on the master carrier and the transferred pattern.

  The present invention has been made in view of such a problem. Regardless of the flatness of the master carrier and the processing accuracy of the holder, the uneven shape formed on the master carrier or the transfer information represented by the uneven shape is slaved. It is an object of the present invention to provide a transfer method, a transfer device, and a recording medium for faithfully reproducing on a medium.

  In order to achieve the above object, the invention according to claim 1 is characterized in that a master carrier on which minute irregularities are formed is brought into close contact with both surfaces of a slave medium to be transferred by the pressure of a fluid, Further, either the concavo-convex shape or the transfer information represented by the concavo-convex shape is transferred to both surfaces of the slave medium.

  According to the first aspect of the present invention, the slave carrier is in close contact with both surfaces of the master carrier on which the concavo-convex shape is formed. The slave medium with the master carrier in close contact with both sides is placed in a sealed container, and a fluid such as compressed air is sealed in the container. The master carrier is uniformly pressed over the entire surface by the sealed fluid and is in close contact with the slave medium.

  As a result, for example, a minute uneven shape or minute unevenness formed on the master carrier on the surface of the slave medium that becomes an initially magnetized high-density recording disk or a slave medium coated with a resin that is cured by heat or light. Transfer information such as a servo signal represented by the shape is transferred.

  When transferring, unlike the case of pressing with a rigid body by pressing with a fluid, there is no influence of the processing accuracy of the surface of the rigid body, and the bending of the slave medium in a pressurized state is suppressed. Alternatively, it is possible to faithfully transfer the transfer information represented by the uneven shape onto the slave medium on the nanometer order.

  According to a second aspect of the present invention, in the first aspect of the invention, when the master carrier is brought into close contact with both sides of the slave medium, the flexible film gripped at the end is brought into close contact with both sides of the slave medium. The master carrier is closely attached to each other, and a fluid pressure is applied to the master carrier through the flexible film.

  According to the second aspect of the present invention, the flexible film formed of stainless steel, pet resin or the like is in close contact with the master carrier in close contact with both surfaces of the slave medium. The end of the flexible membrane is gripped by a seal member made of nitrile rubber or the like. In the gap formed by the container, the seal member, and the flexible membrane, fluid is sealed from a pipe branched and connected from a common pipe, and thereby each flexible film in close contact with the master carrier on both sides is Both sides of the master carrier are pressed uniformly over the entire surface with a common pressure.

  As a result, the bending of the slave medium in the pressurized state is suppressed, so that the transfer information on the master carrier can be faithfully transferred on the slave medium on the nanometer order.

  According to a third aspect of the present invention, in the first aspect of the invention, when the master carrier is brought into close contact with both surfaces of the slave medium, the master carrier held at the end is pressurized with the pressure of the fluid. Thus, it is characterized in that it is brought into close contact with both surfaces of the slave medium at the same time.

  According to the invention of claim 3, the end portion of the master carrier having a diameter larger than that of the slave medium that is in close contact with both surfaces of the slave medium is held by the seal member. The gap formed by the container, the seal member, and the master carrier is filled with fluid from a pipe that is branched and connected from a common pipe, so that the master carrier on both sides is uniformly transferred to the slave medium over the entire surface with a common pressure. Pressed.

  As a result, the bending of the slave medium in the pressurized state is suppressed, so that the transfer information on the master carrier can be faithfully transferred on the slave medium on the nanometer order.

  In the invention of claim 1 or claim 2, the thickness of the slave medium is db, the slave medium Young's modulus is Eb, the total thickness of the two flexible films is ds, and the Young of the flexible film is It is also characterized by Eb × db3 ÷ (Es × ds3 + Em × dm3)> 0.18, where the rate is Es, the total thickness of the two master carriers is dm, and the Young's modulus of the master carrier is Em. It is said.

  Further, in the invention of claim 1 or claim 3, the thickness of the slave medium is db, the slave medium Young's modulus is Eb, the total thickness of the two master carriers is dm, and the Young's modulus of the master carrier is Em. (Ed × db3) ÷ (Em × dm3)> 0.18.

  As a result, the master carrier is optimally pressed and adhered to the slave medium, and the bending of the slave medium in a pressurized state is suppressed, so that the transfer information on the master carrier is faithfully printed on the slave medium on the nanometer order. It becomes possible to transfer.

  As described above, according to the transfer method, transfer apparatus, and recording medium of the present invention, the master carrier that is in close contact with both surfaces of the slave medium can be applied to the entire surface at the same time without depending on the processing accuracy. It is pressed and comes into close contact with the slave medium. As a result, the bending of the slave medium in the pressurized state is suppressed, so that the transfer information on the master carrier can be faithfully transferred on the slave medium on the nanometer order.

  Hereinafter, preferred embodiments of a transfer method and a transfer apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

  First, a magnetic transfer method, which is a production technique for a hard disk or the like, to which the transfer method and transfer device of the present invention are applied, will be described. FIG. 1 is a perspective view of a main part of a magnetic transfer apparatus 20 for performing magnetic transfer using a master disk 10 as a master carrier.

  At the time of magnetic transfer, the slave surface (magnetic recording surface) of the slave disk 14 as the slave medium after the initial DC magnetization described later shown in FIG. 3A is used as the information carrying surface 13 of the master disk 10 as the master carrier. And are brought into close contact with a predetermined pressing force. Then, with the slave disk 14 and the master disk 10 in close contact with each other, a magnetic field for transfer is applied by the magnetic field generating means 30, and the uneven pattern P as transfer information formed on the master disk 10 is magnetically applied to the slave disk 14. Transcript.

  The slave disk 14 is a disk-shaped recording medium such as a hard disk or a flexible disk having a magnetic recording layer formed on the surface. Before the slave disk 14 is brought into close contact with the master disk 10, surface projections and adhering dust by a glide head, a polishing body, or the like. A cleaning process (burnishing, etc.) is removed as necessary.

  As the magnetic recording layer of the slave disk 14, a coating type magnetic recording layer, a plating type magnetic recording layer, or a metal thin film type magnetic recording layer can be employed. Magnetic materials for the metal thin film type magnetic recording layer include Co, Co alloys (CoPtCr, CoCr, CoPtCrTa, CoPtCrNbTa, CoCrB, CoNi, etc.), Fe, Fe alloys (FeCo, FePt, FeCoNi, etc.), Ni, Ni alloys (NiFe Etc.) can be used. These are preferable because the magnetic flux density is large and the magnetic field anisotropy in the same direction as the magnetic field application direction (in-plane direction for in-plane recording) enables clear transfer. In order to provide the necessary magnetic anisotropy under the magnetic material (on the support side), it is preferable to provide a nonmagnetic underlayer. This underlayer needs to match the crystal structure and lattice constant to the magnetic layer 12. For that purpose, it is preferable to use Cr, CrTi, CoCr, CrTa, CrMo, NiAl, Ru or the like.

  The magnetic field generating means 30 for applying the transfer magnetic field includes electromagnet devices 34, 34 each having a coil 33 wound around a core 32 having a gap 31 extending in the radial direction between the slave disk 14 and the master disk 10 held in close contact with each other. A magnetic field for transfer having a magnetic force line G (see FIG. 2) parallel to the track direction is applied in the same direction vertically. FIG. 2 shows the relationship between the circumferential tracks 40A, 40A...

  When a magnetic field is applied, a magnetic field for transfer is applied by the magnetic field generating means 30 while rotating the slave disk 14 and the master disk 10 together, and the transfer information represented by the uneven pattern of the master disk 10 is transferred to the slave surface of the slave disk 14. Magnetically transferred to In addition to this configuration, the magnetic field generation means may be rotated.

  The transfer magnetic field does not have any magnetic field strength exceeding the maximum value in the optimum transfer magnetic field strength range (0.6 to 1.3 times the coercive force Hc of the slave disk 14) in any of the track directions. There are at least one portion having a magnetic field strength within the range in one track direction, and the magnetic field strength in the opposite track direction is less than the minimum value in the optimum transfer magnetic field strength range at any position in the track direction. A magnetic field having a certain magnetic field intensity distribution is generated in a part of the track direction.

  FIG. 3 is an explanatory diagram for explaining the basic steps of the magnetic transfer method using in-plane recording.

  First, as shown in FIG. 3A, initial magnetization (DC demagnetization) is applied to the slave disk 14 in advance by applying an initial magnetic field Hi in one direction in the track direction. Next, as shown in FIG. 3B, the recording surface (magnetic recording portion) of the slave disk 14 is brought into close contact with the information carrying surface 13 on which the concave / convex pattern P of the master disk 10 is formed. Magnetic transfer is performed by applying a transfer magnetic field Hd in the direction opposite to the initial magnetic field Hi in the track direction. As shown in FIG. 3C, the transfer magnetic field Hd is sucked into the convex magnetic layer 12 of the concavo-convex pattern P so that the magnetization of this part is not reversed and the magnetic field of the other part is reversed. The transfer information represented by the concavo-convex pattern P of the master disk 10 is magnetically transferred and recorded on the magnetic recording surface 14.

  Next, the transfer method, transfer apparatus, and recording medium according to the present invention will be described. FIG. 4 is a sectional view showing a first embodiment of a transfer method and a transfer apparatus according to the present invention.

  The transfer device 1A is separated into a container upper part 2 and a container lower part 3, and is integrated by fastening means 9 such as a bolt or an air cylinder. The upper part 2 of the container is provided with a joint 8A that serves as an inlet for the fluid supplied to bring the master carrier into close contact with the slave medium, and the lower part 3 of the container is provided with a joint 8B in the same manner as the upper part of the container.

  The pipe connected to the joint 8A and the joint 8B is branched from one common pipe connected to a fluid supply source (not shown) as a pressurizing means for generating a fluid such as compressed air. As a result, fluid of equal pressure is supplied to the container upper part 2 and the container lower part 3 from the joint 8A and the joint 8B.

  Inside the container upper part 2 and the container lower part 3, the master disks 10A and 10B as the master carrier and the slave disk 14 as the slave medium are information on the master disks 10A and 10B on both sides of the slave disk 14, respectively. The gripping surface is stored in a close contact.

  A cylindrical center spacer 5 and a ring-shaped outer spacer 6 are provided at the center and outer periphery of the slave disk 14 and the master disks 10A and 10B for alignment.

  Seal members 7A and 7B formed of nitrile rubber or the like are provided above and below the outer peripheral spacer 6, respectively. Between the outer peripheral spacer 6 and the seal members 7A and 7B, sheets 4A and 4B, which are flexible films for pressing the master disks 10A and 10B formed of stainless steel, pet resin, or the like, are respectively held. ing. Between the sheets 4A and 4B, the master disks 10A and 10B are stored in close contact with both sides of the slave disk 14, and the sheets 4A and 4B are in close contact with the master disks 10A and 10B, respectively.

  At this time, the thickness of the slave disk 14 is db, the Young's modulus of the slave disk 14 is Eb, the total thickness of the sheets 4A and 4B is ds, the Young's modulus of the sheets 4A and 4B is Es, and the total thickness of the master disks 10A and 10B is dm. When the Young's modulus of the star disks 10A and 10B is Em, the numerical values are adjusted so that the relationship of Eb × db3 ÷ (Es × ds3 + Em × dm3)> 0.18 is established.

  In the transfer device configured as described above, when the information carrying surfaces of the master disks 10A and 10B on which transfer information such as track signals is recorded are brought into close contact with the slave disk 14 with a predetermined pressing force, first, the fastening means 9 is used. Let the container upper part 2 and the container lower part 3 be made. Thereby, the space | gap by the container upper part 2, the sealing member 7A, and the sheet | seat 4A and the space | gap by the container lower part 3, the sealing member 7B, and the sheet | seat 4B are formed.

  In this state, by supplying a fluid (in this embodiment, compressed air of 0.2 MPa) that is pressurized to the respective gaps through the joints 8A and 8B from a fluid supply source (not shown), the sheets 4A and 4B are supplied. Is pressed with a uniform force over the entire surface. Thereby, the pressing force of the fluid is transmitted to the master disks 10A and 10B via the sheets 4A and 4B, and the pressed master disks 10A and 10B are in close contact with the slave disk 14 with a predetermined pressing force. The pressing force is uniform over the entire surface due to the pressurization by the fluid, and the pressing force of the master disks 10A and 10B that are in close contact with both surfaces of the slave disk 14 is equal because the fluid is sent from the same piping system. .

  When manufacturing a recording medium in this state, magnetic transfer is performed by the magnetic transfer procedure described above, and the transfer information represented by the concave and convex shapes formed on the master disks 10A and 10B is magnetically transferred to the slave disk 14. Transcript.

  Next, a second embodiment of the transfer method, transfer device, and recording medium according to the present invention will be described. FIG. 5 is a cross-sectional view showing the second embodiment.

  The transfer device 1 </ b> B is divided into a container upper part 2 and a container lower part 3, and is integrated by fastening means 9. The upper part 2 of the container is provided with a joint 8A serving as a fluid inlet, and the lower part 3 of the container is provided with a joint 8B in the same manner as the upper part of the container.

  The pipe connected to the joint 8A and the joint 8B is branched from one common pipe connected to a fluid supply source (not shown). As a result, fluid of equal pressure is supplied to the container upper part 2 and the container lower part 3 from the joint 8A and the joint 8B.

  Inside the container upper part 2 and the container lower part 3, master disks 40A and 40B as master carriers and a slave disk 14 as a slave medium have master disks 40A and 40B on both sides of the slave disk 14, respectively. Stored in close contact.

  A cylindrical center spacer 5 is installed at the center of the slave disk 14 and the master disks 40A and 40B. A ring-shaped outer peripheral spacer 6 is provided on the outer peripheral portion of the slave disk 14, and seal members 7A and 7B are provided on the upper and lower sides of the outer peripheral spacer 6, respectively, and a master is formed by the outer peripheral spacer 6 and the seal members 7A and 7B. The ends of the disks 40A and 40B are gripped.

  At this time, when the thickness of the slave disk 14 is db, the Young's modulus of the slave disk 14 is Eb, the total thickness of the master disks 40A and 40B is dm, and the Young's modulus of the star disks 40A and 40B is Em, , (Eb × db3) ÷ (Em × dm3)> 0.18 is adjusted.

  In the transfer device configured as described above, when the information carrying surfaces of the master disks 40A and 40B are brought into close contact with the slave disk 14 with a predetermined pressing force, the container upper part 2 and the container lower part 3 are first brought into contact with the fastening means 9. . Thereby, the space | gap by the container upper part 2, the sealing member 7A, and the star disk 40A and the space | gap by the container lower part 3, the sealing member 7B, and the star disk 40B are formed.

  In this state, by supplying a fluid (in this embodiment, compressed air of 0.2 MPa) that is pressurized to the respective gaps from the fluid supply source (not shown) through the joints 8A and 8B, the master disk 40A, It is pressed with a uniform force over the entire surface in contact with the fluid of 40B.

  As a result, the pressed star disks 40A and 40B are brought into close contact with the slave disk 14 with a predetermined pressing force. The pressing force is uniform over the entire surface due to the pressurization by the fluid, and the pressing force of the master disks 40A and 40B that are in close contact with both surfaces of the slave disk 14 is equal because the fluid is sent from the same piping system. .

  When manufacturing a recording medium in this state, magnetic transfer is performed by the magnetic transfer procedure described above, and the transfer information represented by the concavo-convex shape formed on the master disks 40A and 40B is magnetically transferred to the slave disk 14. Transcript.

  Next, a third embodiment of the transfer method, transfer device, and recording medium according to the present invention will be described. FIG. 6 is a sectional view showing the third embodiment.

  The transfer device 1 </ b> C is separated into a container upper part 2 and a container lower part 3, and is integrated by fastening means 9. The upper part 2 of the container is provided with a joint 8A serving as a fluid inlet, and the lower part 3 of the container is provided with a joint 8B in the same manner as the upper part of the container.

  The pipe connected to the joint 8A and the joint 8B is branched from one common pipe connected to a fluid supply source (not shown). As a result, fluid of equal pressure is supplied to the container upper part 2 and the container lower part 3 from the joint 8A and the joint 8B.

  Inside the container upper part 2 and the container lower part 3, the master disks 41A and 41B as the master carrier and the slave disk 42 as the slave medium are in close contact with both sides of the slave disk 42, respectively. It is stored in the shape.

  At this time, unlike the slave disk 14, a transfer layer 43 is formed on both surfaces of the slave disk 42. The transfer layer 43 is formed of a resin that is cured by light, heat, or the like, or glass having a low melting point. Accordingly, the uneven shape on the master disks 41A and 41B corresponding to the recording bit shape and the like is irradiated with light and heated while pressing the master disks 41A and 41B against the transfer layer 43 or after peeling off the master disks 41A and 41B. Or is transferred well by cooling.

  A ring-shaped outer peripheral spacer 6 is installed on the outer peripheral portions of the slave disk 42 and the master disks 41A and 41B. Seal members 7A and 7B are provided above and below the outer peripheral spacer 6, respectively. Sheets 4A and 4B, which are flexible films, are held between the outer peripheral spacer 6 and the seal members 7A and 7B, respectively.

  Between the sheets 4A and 4B, the master disks 41A and 41B are stored in close contact with the transfer layers 43 on both sides of the slave disk 42, and the sheets 4A and 4B are in close contact with the master disks 41A and 41B, respectively.

  At this time, the thickness of the slave disk 14 is db, the Young's modulus of the slave disk 42 is Eb, the total thickness of the sheets 4A and 4B is ds, the Young's modulus of the sheets 4A and 4B is Es, and the total thickness of the master disks 41A and 41B is dm. When the Young's modulus of the star disks 41A and 41B is Em, the numerical values are adjusted so that the relationship of Eb × db3 ÷ (Es × ds3 + Em × dm3)> 0.18 is established.

  In the transfer device configured as described above, when the information carrying surfaces of the master disks 41A and 41B are brought into close contact with the transfer layers 43 on both sides of the slave disk 42 with a predetermined pressing force, first, the fastening means 9 and the container upper portion 2 are connected. Let the container lower part 3 be. Thereby, the space | gap by the container upper part 2, the sealing member 7A, and the sheet | seat 4A and the space | gap by the container lower part 3, the sealing member 7B, and the sheet | seat 4B are formed.

  In this state, a fluid (not shown) is supplied to the air gaps through the joints 8A and 8B from a fluid supply source (not shown), and the sheets 4A and 4B are supplied. Is pressed with a uniform force over the entire surface. Thereby, the pressing force of the fluid is transmitted to the master disks 41A and 41B via the sheets 4A and 4B, and the pressed master disks 41A and 41B are in close contact with the transfer layer 43 with a predetermined pressing force. The pressing force is uniform over the entire surface due to the pressurization by the fluid, and the pressing force of the master disks 41A and 41B that are in close contact with the transfer layer 43 is equal because the fluid is sent from the same piping system.

  The concavo-convex shape on the master disks 41A and 41B is transferred to the transfer layer 43 on which the master disks 41A and 41B are pressed. After the master disks 41A and 41B are peeled off, the transfer layer 43 is pressed. The transfer layer 43 is cured by light irradiation, heating, or cooling, and the shape as transfer information is transferred to the slave disk 42 to form a recording medium.

  Next, a fourth embodiment of a transfer method, a transfer apparatus, and a recording medium according to the present invention will be described. FIG. 7 is a cross-sectional view showing the fourth embodiment.

  The transfer device 1 </ b> D is separated into a container upper part 2 and a container lower part 3, and is integrated by fastening means 9. The upper part 2 of the container is provided with a joint 8A serving as a fluid inlet, and the lower part 3 of the container is provided with a joint 8B in the same manner as the upper part of the container.

  The pipe connected to the joint 8A and the joint 8B is branched from one common pipe connected to a fluid supply source (not shown). As a result, fluid of equal pressure is supplied to the container upper part 2 and the container lower part 3 from the joint 8A and the joint 8B.

  Inside the container upper part 2 and the container lower part 3, master disks 44A and 44B as master carriers and a slave disk 42 as a slave medium have master disks 44A and 44B on both sides of the slave disk 42, respectively. Stored in close contact.

  At this time, a transfer layer 43 formed of a resin that is cured by light, heat, or the like, or a glass having a low melting point is provided on both surfaces of the slave disk 42. As a result, the uneven shape on the master disks 44A and 44B corresponding to the recording bit shape and the like is irradiated with light and heated while pressing the master disks 44A and 44B against the transfer layer 43 or after peeling off the master disks 41A and 41B. Or is transferred well by cooling.

  A ring-shaped outer peripheral spacer 6 is provided on the outer peripheral portions of the slave disk 42 and the master disks 44A and 44B. Seal members 7A and 7B are provided above and below the outer peripheral spacer 6, respectively, and the end portions of the master disks 44A and 44B are held by the outer peripheral spacer 6 and the seal members 7A and 7B.

  At this time, when the thickness of the slave disk 42 is db, the Young's modulus of the slave disk 42 is Eb, the total thickness of the master disks 44A and 44B is dm, and the Young's modulus of the star disks 44A and 44B is Em, , (Eb × db3) ÷ (Em × dm3)> 0.18 is adjusted.

  In the transfer device configured as described above, when the information carrying surfaces of the master disks 44A and 44B are brought into close contact with the slave disk 42 with a predetermined pressing force, the container upper part 2 and the container lower part 3 are first brought into contact with the fastening means 9. . Thereby, the space | gap by the container upper part 2, the sealing member 7A, and the master disk 44A and the space | gap by the container lower part 3, the sealing member 7B, and the master disk 44B are formed.

  In this state, by supplying a fluid (in this embodiment, compressed air of 0.1 MPa) that is pressurized to the respective gaps from the fluid supply source (not shown) through the joints 8A and 8B, the master disk 44A, 44B is pressed with a uniform force over the entire surface in contact with the fluid.

  Thus, the pressed star disks 44A and 44B are in close contact with the slave disk 42 with a predetermined pressing force. The pressing force is uniform over the entire surface due to the pressurization by the fluid, and the pressing force of the master disks 44A and 44B in close contact with the transfer layer 43 is equal because the fluid is sent from the same piping system.

  The concavo-convex shape on the master disks 44A and 44B is transferred to the transfer layer 43 on which the master disks 44A and 44B are pressed, and the transfer layer 43 is pressed against the transfer device 43 after the master disks 44A and 44B are peeled off. The transfer layer 43 is cured by light irradiation, heating, or cooling, and the shape as transfer information is transferred to the slave disk 42.

  Next, specific examples of the transfer method, transfer device, and recording medium according to the present invention will be described.

  FIG. 8 is a chart showing data when the transfer information represented by the concavo-convex shape formed on the master disks 10A and 10B is transferred by the transfer apparatus 1A shown in FIG.

  In the transfer, a master carrier formed of a nickel (Ni) material and initially DC magnetized is used for an aluminum (Al) or glass slave medium manufactured by a known manufacturing method. The material of the flexible film is stainless steel (SUS304). As shown in FIG. 8, six combinations of the slave medium, the master carrier, the thickness of the flexible film, and the Young's modulus are prepared. To this, magnetic transfer is performed by the transfer method of the present invention, and the track signal is transferred from the master carrier to the slave medium.

  Evaluation of the slave medium after the transfer is performed by an electromagnetic conversion characteristic measuring apparatus (SS-60 manufactured by Kyodo Denshi). For the head, an inductive head having a head gap of 0.32 μm and a track width of 3.0 μm is used. As a result, the signal at the radius 25 mm position of the slave medium is read for one round, and based on the signal, the true position is obtained from the head position information obtained by removing components such as head vibration and spindle eccentricity. Calculate the amount of deviation from the circle.

  As a result, No. 1 satisfying the relationship of Eb × db3 ÷ (Es × ds3 + Em × dm3)> 0.18. 1 to No. In the slave media up to 4, the deviation from the perfect circle is about 500 nm or less, which is a good product standard, and good results are obtained.

  Further, when the transfer information represented by the concavo-convex shape formed on the master disks 40A and 40B is transferred by the transfer device 1B shown in FIG. 5, the slave medium is made of glass material, the thickness is 0.5 mm, and the master carrier is When nickel material, thickness 0.1 mm (total thickness 0.2 mm), (Eb × db 3) ÷ (Em × dm 3) = 5.08, the deviation from the perfect circle is 328 nm, and the same good results Have been gained.

  Further, in the transfer apparatus 1C shown in FIG. 6, a circumferential pattern concentric with the nickel substrate is provided on a nickel substrate having a thickness of 0.2 mm and a diameter of 65 mm with a line width of 100 nm and a height of 100 nm. A slave medium was obtained by spin-coating a photocurable resin on a glass substrate having a thickness of 0.5 mm and a diameter of 65 mm. For this, PET resin with a thickness of 0.1 mm (total thickness 0.2 mm) is used as a flexible film, and Eb × db 3 ÷ (Es × ds 3 + Em × dm 3) = 5.01, and the master carrier is used as a slave medium. The circumferential pattern was transferred to the slave medium by pressing. As a result, the deviation of the transferred circumferential pattern from the perfect circle measured by the roundness measuring device was 280 nm, and a good result was obtained.

  Similarly, in the transfer apparatus 1D shown in FIG. 7, a master carrier is formed by providing a circumferential pattern concentric with a nickel substrate on a nickel substrate having a thickness of 0.3 mm and a diameter of 65 mm with a line width of 100 nm and a height of 100 nm. A slave medium was obtained by spin-coating a photocurable resin on a glass substrate having a thickness of 0.5 mm and a diameter of 65 mm. Then, (Eb × db 3) ÷ (Em × dm 3) = 1.51, and the master carrier was pressed against the slave medium to transfer the circumferential pattern to the slave medium. As a result, the amount of deviation from the perfect circle of the transferred circumferential pattern measured by the roundness measuring device was 460 nm, and a good result was obtained.

  As described above, according to the transfer method, the transfer device, and the recording medium according to the present invention, the master carrier that is in close contact with both surfaces of the slave medium can be simultaneously applied to the entire surface without being affected by the processing accuracy of the pressing member. Pressed with a uniform pressure to adhere to the slave medium. As a result, the bending of the slave medium in the pressurized state is suppressed, so that the transfer information on the master carrier can be faithfully transferred on the slave medium on the nanometer order.

The principal part perspective view of the magnetic transfer apparatus which implements magnetic transfer. The top view which shows the application method of the magnetic field for transcription | transfer. Process drawing which shows the basic process of the magnetic transfer method. Sectional drawing which showed the 1st Embodiment of this invention. Sectional drawing which showed the 2nd Embodiment of this invention. Sectional drawing which showed the 3rd Embodiment of this invention. Sectional drawing which showed the 4th Embodiment of this invention. The figure which showed the data at the time of transferring transcription | transfer information by 1st Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1A, 1B, 1C, 1D ... Transfer apparatus, 2 ... Container upper part, 3 ... Container lower part, 4A, 4B ... Sheet (flexible film), 5 ... Center spacer, 6 ... Outer periphery spacer, 7A, 7B ... Sealing member, 8A, 8B ... Joint, 9 ... Fastening means, 10, 10A, 10B, 40A, 40B, 41A, 41B, 44A, 44B ... Master disk (master carrier), 12 ... Magnetic layer, 14, 42 ... Slave disk (slave medium) ), 20 ... Magnetic transfer device, 30 ... Magnetic field generating means, 31 ... Gap, 32 ... Core, 33 ... Coil, 34 ... Electromagnet device, 43 ... Transfer layer, P ... Uneven pattern

Claims (15)

  A master carrier on which a minute concavo-convex shape is formed is brought into close contact with both surfaces of a slave medium to be transferred by fluid pressure, and either the concavo-convex shape or the transfer information represented by the concavo-convex shape is transferred from the master carrier. A transfer method comprising transferring to both sides of a slave medium.   When the master carrier is brought into close contact with both surfaces of the slave medium, the flexible film gripped at the end is brought into close contact with the master carrier that is in close contact with both surfaces of the slave medium, and the flexible film is interposed through the flexible film. The transfer method according to claim 1, wherein a fluid pressure is applied to the master carrier.   When the master carrier is brought into close contact with both surfaces of the slave medium, the master carrier held at the end is pressed against the both sides of the slave medium by pressurizing the master carrier with the pressure of the fluid. The transfer method according to claim 1.   In the transfer method, the thickness of the slave medium is db, the slave medium Young's modulus is Eb, the total thickness of the two flexible films is ds, and the Young's modulus of the flexible film is Es. The total thickness of the master carrier is dm, and the Young's modulus of the master carrier is Em, where Eb × db3 ÷ (Es × ds3 + Em × dm3)> 0.18. Item 3. The transfer method according to Item 2.   In the transfer method, when the thickness of the slave medium is db, the slave medium Young's modulus is Eb, the total thickness of the two master carriers is dm, and the Young's modulus of the master carrier is Em, (Ed × 4. The transfer method according to claim 1, wherein db3) ÷ (Em × dm3)> 0.18. A master carrier on which minute irregularities are formed;
A slave medium that receives the transfer,
And a pressurizing unit for bringing the master carrier into close contact with both surfaces of the slave medium by fluid pressure.   The transfer device includes a flexible film that is gripped at an end portion thereof and is in close contact with the master carrier that is in close contact with both surfaces of the slave medium and applies the pressure of the fluid to the master carrier. The transfer device according to claim 6.   The transfer apparatus according to claim 6, wherein an end portion of the master carrier is gripped and pressed by the pressure of the fluid, thereby being brought into close contact with both surfaces of the slave medium at the same time.   The slave medium thickness is db, the slave medium Young's modulus is Eb, the total thickness of the two flexible films is ds, the Young's modulus of the flexible film is Es, and the total thickness of the two master carriers is Is dm, and the Young's modulus of the master carrier is Em, Eb × db3 ÷ (Es × ds3 + Em × dm3)> 0.18 Transfer device.   When the thickness of the slave medium is db, the slave medium Young's modulus is Eb, the total thickness of the two master carriers is dm, and the Young's modulus of the master carrier is Em, (Ed × db3) ÷ (Em 9. The transfer apparatus according to claim 6, wherein xdm3)> 0.18.   A master carrier on which a minute concavo-convex shape is formed is brought into close contact with both surfaces of a slave medium to be transferred by fluid pressure, and either the concavo-convex shape or the transfer information represented by the concavo-convex shape is transferred from the master carrier. A recording medium which is transferred onto both sides of a slave medium.   When the master carrier is brought into close contact with both surfaces of the slave medium, the flexible film gripped at the end is brought into close contact with the master carrier that is in close contact with both surfaces of the slave medium, and the flexible film is interposed through the flexible film. The recording medium according to claim 11, wherein a fluid pressure is applied to the master carrier.   When the master carrier is brought into close contact with both surfaces of the slave medium, the master carrier held at the end is pressed against the both sides of the slave medium by pressurizing the master carrier with the pressure of the fluid. The recording medium according to claim 11.   The slave medium thickness is db, the slave medium Young's modulus is Eb, the total thickness of the two flexible films is ds, the Young's modulus of the flexible film is Es, and the total thickness of the two master carriers is Is dm, and the Young's modulus of the master carrier is Em, Eb × db3 ÷ (Es × ds3 + Em × dm3)> 0.18. recoding media.   When the thickness of the slave medium is db, the slave medium Young's modulus is Eb, the total thickness of the two master carriers is dm, and the Young's modulus of the master carrier is Em, (Ed × db3) ÷ (Em The recording medium according to claim 11 or 13, wherein xdm3)> 0.18.

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