JP2008102697A

JP2008102697A - Two dimensional positioning device and method for correcting deviation of magnetic pole position during rotation

Info

Publication number: JP2008102697A
Application number: JP2006284041A
Authority: JP
Inventors: Mamoru Takagi; 護高木; Toru Shikayama; 透鹿山; Hironobu Yoshitake; 博信吉武
Original assignee: Yaskawa Electric Corp
Current assignee: Yaskawa Electric Corp
Priority date: 2006-10-18
Filing date: 2006-10-18
Publication date: 2008-05-01

Abstract

<P>PROBLEM TO BE SOLVED: To provide a two-dimensional positioning device for generating a thrust necessary for θ control by accurately correcting the deviation of the magnetic pole position of a motor and a magnetic pole position shown by a sensor during rotation, and for canceling torque insufficiency due to thrust insufficiency during rotation, to remain static. <P>SOLUTION: This two-dimensional positioning device is provided with a magnetic pole position correction quantity arithmetic unit 6 for calculating the deviation between the magnetic pole position of each motor and a magnetic pole position shown by each sensor to be generated during forcer rotation. The magnetic pole position correction quantity arithmetic unit 6 calculates magnetic pole position correction quantity δ<SB>x1</SB>, δ<SB>x2</SB>, δ<SB>y1</SB>, and δ<SB>y2</SB>, and inputs the magnetic pole position correction quantity to thrust control units X<SB>1</SB>, X<SB>2</SB>, Y<SB>1</SB>, and Y<SB>2</SB>, and drives motors 11 to 14 at the corrected magnetic pole positions. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、二次元位置決めを行うシステムにおいて、回転駆動時のモータ推力低下を防ぐために、磁極位置補正を行い、二次元位置決めを行う、二次元位置決め装置およびその回転時の磁極位置ずれ補正方法に関する。 The present invention relates to a two-dimensional positioning apparatus and a method of correcting a magnetic pole position deviation during rotation, in which a magnetic pole position is corrected and two-dimensional positioning is performed in order to prevent a reduction in motor thrust during rotational driving in a system that performs two-dimensional positioning. .

従来の二次元位置決め装置は、第１にＸ軸方向、Ｙ軸方向、θ方向をそれぞれ独立に制御を行い、図４に示すような平面サーボを駆動するための推力指令を生成し、推力指令を平面サーボを構成するモータの推力指令に変換して、それぞれ独立に推力制御を行うことで、θ方向のサーボ剛性が向上して、フォーサの回転ずれにより制御不能に陥ることを防止して、二次元の位置決めを行っているものが提案されている（例えば、特許文献１参照）。
第２に２つのＸ軸センサの検出信号について和と差をとり、スライダ部のＸ軸方向の位置検出信号およびスライダ部のヨーイング角θの検出信号に変換して、変換した信号をもとにスライダ部のＸ軸方向移動およびθ方向移動についてそれぞれ独立にフィードバック制御して、θ方向制御の制御方式やサーボゲインをＸ軸方向のそれとは独立に設定して、θ方向のサーボ剛性が向上して、スライダ部の回転ずれにより制御不能に陥ることを防止して、二次元の位置決めを行っているものが提案されている（例えば、特許文献２参照）。 The conventional two-dimensional positioning device firstly controls the X-axis direction, the Y-axis direction, and the θ-direction independently, generates a thrust command for driving a planar servo as shown in FIG. Is converted into a thrust command of the motor that constitutes the planar servo, and the thrust control is independently performed, so that the servo rigidity in the θ direction is improved, and it is prevented from becoming uncontrollable due to the rotation deviation of the forcer, One that performs two-dimensional positioning has been proposed (see, for example, Patent Document 1).
Secondly, the sum and difference of the detection signals of the two X-axis sensors are taken and converted into the position detection signal of the slider portion in the X-axis direction and the detection signal of the yawing angle θ of the slider portion, and based on the converted signals Feedback control is independently performed for the X-axis direction movement and the θ-direction movement of the slider, and the control method and servo gain of the θ-direction control are set independently from those in the X-axis direction, improving the servo rigidity in the θ direction. Thus, there has been proposed one that performs two-dimensional positioning while preventing the slider portion from becoming uncontrollable due to rotational deviation of the slider portion (see, for example, Patent Document 2).

ここで、図４は従来手法１の二次元位置決め装置のモータ構成図、図５は従来手法１の二次元位置決め装置の制御ブロック図である。
図４において、２０はプラテン、１５２はＸＹスケール、１９はフォーサである。フォーサ１９はギャップを介してプラテン２０と対向しているが、そのギャップ中のプラテン２０上にＸＹスケール１５２が配置されている。ＸＹスケール１５２は、その厚さが一様に薄く製造されており、Ｘ軸とＹ軸に平行な格子状のスリットが設けられている。
図５において、フォーサ１９は第１Ｘ軸モータ１４４、第２Ｘ軸モータ１４５、第１Ｙ軸モータ１４６、第２Ｙ軸モータ１４７、第１Ｘ軸センサ１４８、第２Ｘ軸センサ１４９、第１Ｙ軸センサ１５０、第２Ｙ軸センサ１５１が搭載されている。第１Ｘ軸モータ１４４、第２Ｘ軸モータ１４５、第１Ｙ軸モータ１４６、第２Ｙ軸モータ１４７は卍字状に配置されている。第１Ｘ軸モータ１４４、第２Ｘ軸モータ１４５、第１Ｙ軸モータ１４６、第２Ｙ軸モータ１４７は、電機子巻線、永久磁石、鉄心歯（図示無し）から構成され、ギャップを介してプラテン２０上に形成された格子状鉄心歯との電磁力によってＸ軸方向推力とＹ軸方向推力を発生させるようになっている。 Here, FIG. 4 is a motor configuration diagram of the two-dimensional positioning device of the conventional method 1, and FIG. 5 is a control block diagram of the two-dimensional positioning device of the conventional method 1.
In FIG. 4, 20 is a platen, 152 is an XY scale, and 19 is a forcer. The forcer 19 is opposed to the platen 20 through a gap, and an XY scale 152 is disposed on the platen 20 in the gap. The XY scale 152 is manufactured with a uniform thin thickness, and is provided with lattice-like slits parallel to the X axis and the Y axis.
In FIG. 5, the forcer 19 includes a first X-axis motor 144, a second X-axis motor 145, a first Y-axis motor 146, a second Y-axis motor 147, a first X-axis sensor 148, a second X-axis sensor 149, a first Y-axis sensor 150, A 2Y-axis sensor 151 is mounted. The first X-axis motor 144, the second X-axis motor 145, the first Y-axis motor 146, and the second Y-axis motor 147 are arranged in a square shape. The first X-axis motor 144, the second X-axis motor 145, the first Y-axis motor 146, and the second Y-axis motor 147 are composed of armature windings, permanent magnets, and iron core teeth (not shown), and on the platen 20 via a gap. The X-axis direction thrust and the Y-axis direction thrust are generated by the electromagnetic force with the grid-like iron core teeth formed in the above.

図５において、フォーサ１９を駆動する場合、フォーサ１９のＸ軸方向の位置指令ＸｉとＹ軸方向の位置指令Ｙｉとθ指令（回転角指令）θiをそれぞれ、Ｘ軸制御器１３５、Ｙ軸制御器１３６、θ制御器１３７に入力し、Ｘ軸、Ｙ軸、θをそれぞれ独立に制御を行い、各指令どおりにフォーサ１９が移動するような推力指令を生成する。このとき、フォーサ１９の移動量検出値は、フォーサ１９を構成する４つのモータの移動量を検出する第１Ｘ軸センサ１４８、第２Ｘ軸センサ１４９、第１Ｙ軸センサ１５０、第２Ｙ軸センサ１５１の信号ｘ₁、ｘ₂、ｙ₁、ｙ₂をもとに、移動量変換器１３９にて作成される、フォーサ１９のＸ軸方向、Ｙ軸方向、θ方向の移動量ｘ、ｙ、θを使用する。例えば、フォーサ１９をＸ軸方向のみ移動させる場合は、Ｘ軸位置指令Ｘｉを入力し、Ｘ軸制御器１３５にて位置制御および速度制御を行い、Ｘ軸位置指令Ｘｉに従いフォーサ１９が動作するような推力指令Ｆｘを出力する。この時、Ｙ軸制御器１３６及びθ制御器１３７からはフォーサ１９がＹ軸方向に動作しないようなＹ軸推力指令Ｆｙとフォーサ１９が回転しないようなθ推力指令Ｆθを出力する。Ｘ軸制御器１３５、Ｙ軸制御器１３６、θ制御器１３７から出力される推力指令Ｆｘ、Ｆｙ、Ｆθは、指令変換器１３８にて、フォーサ１９を構成する４つのモータ、第１Ｘ軸モータ１４４、第２Ｘ軸モータ１４５、第１Ｙ軸モータ１４６、第２Ｙ軸モータ１４７の推力指令Ｆｘ₁、Ｆｘ₂、Ｆｙ₁、Ｆｙ₂に変換される。各推力指令は、フォーサ１９を構成する４つのモータの推力を制御する推力制御器Ｘ₁１４０、推力制御器Ｘ₂１４１、推力制御器Ｙ₁１４２、推力制御器Ｙ₂１４３にそれぞれ入力され、推力指令値どおり各モータが駆動するように必要な電流をモータに与える。以上の処理により、フォーサ１９を駆動していた。 In FIG. 5, when the forcer 19 is driven, a position command Xi in the X-axis direction, a position command Yi in the Y-axis direction, and a θ command (rotation angle command) θi of the forcer 19 are respectively supplied to the X-axis controller 135 and the Y-axis control. Input to the controller 136 and the θ controller 137, the X axis, the Y axis, and θ are controlled independently, and a thrust command is generated so that the forcer 19 moves according to each command. At this time, the movement amount detection value of the forcer 19 is obtained from the first X-axis sensor 148, the second X-axis sensor 149, the first Y-axis sensor 150, and the second Y-axis sensor 151 that detect the movement amounts of the four motors constituting the forcer 19. Based on the signals x ₁ , x ₂ , y ₁ , y ₂ , movement amounts x, y, θ of the forcer 19 generated in the movement amount converter 139 in the X axis direction, Y axis direction, and θ direction are calculated. use. For example, when the forcer 19 is moved only in the X-axis direction, an X-axis position command Xi is input, position control and speed control are performed by the X-axis controller 135, and the forcer 19 operates according to the X-axis position command Xi. A correct thrust command Fx is output. At this time, the Y-axis controller 136 and the θ controller 137 output a Y-axis thrust command Fy that prevents the forcer 19 from moving in the Y-axis direction and a θ-thrust command Fθ that prevents the forcer 19 from rotating. Thrust commands Fx, Fy, Fθ output from the X-axis controller 135, the Y-axis controller 136, and the θ controller 137 are four motors constituting the forcer 19 and the first X-axis motor 144 by the command converter 138. The second X-axis motor 145, the first Y-axis motor 146, and the second Y-axis motor 147 are converted into thrust commands Fx ₁ , Fx ₂ , Fy ₁ , and Fy ₂ . Each thrust command is input to a thrust controller X ₁ 140, a thrust controller X ₂ 141, a thrust controller Y ₁ 142, and a thrust controller Y ₂ 143 that control the thrusts of the four motors that constitute the forcer 19, respectively. A necessary current is applied to the motor so that each motor is driven according to the thrust command value. The forcer 19 is driven by the above processing.

図６は従来手法２の二次元位置決め装置の制御ブロック図である。
図６において、Ｘ軸センサ１０１は、スライダ部の移動方向を判別し、判別した方向に応じてアップパルスまたはダウンパルスを発生する。発生パルス数はスライダ部の移動量に応じた数になる。アップダウンカウンタ１０２は、アップパルスまたはダウンパルスに応じてアップカウントまたはダウンカウントを行う。アップダウンカウンタ１０２のカウントがスライダ部の検出位置になる。
補正手段１０３は、ミラーの曲がりに依存するスライダ部の位置とスライダ部のヨーイングを除去するための補正量を対応させた補正テーブル１０４を保持している。補正手段１０３は、与えられた指令位置をもとに補正テーブル１０４から補正量を読み出し、読み出した補正量でアップダウンカウンタ１０２の検出位置を補正する。補正テーブル１０４のデータはキャリブレーションによって得たデータである。補正手段１０３は、Ｘ軸ミラーと、Ｙ軸ミラーの機械的誤差による曲がりを補正するために設けられている。Ｘ軸ミラーとＹ軸ミラーの曲がりが位置検出に影響しない程度の曲がりであれば、補正手段１０３は設けなくてもよい。Ｘ軸センサ１０５についてもＸ軸センサ１０１と同様にアップダウンカウンタ１０６、補正手段１０７、補正テーブル１０８が設けられている。変換回路１０９は、補正手段１０３および１０７から得たＸ軸方向の検出位置Ｘ１およびＸ２の信号を受け、これらの信号をスライダ部中心のＸ軸方向位置ｘおよびスライダ部のヨーイング角θの信号に変換する。変換式は次のとおりである。
ｘ＝（Ｘ１＋Ｘ２）／２
θ＝（Ｘ２−Ｘ１）／２Ｌｄ
Ｌｄ：スライダ部の中心からＸ軸センサ１０１、１０５の光軸までの距離。
Ｘ軸位置制御部１１０はＸ軸位置指令Ｘｉと検出位置ｘの偏差をもとにスライダ部のＸ軸方向の位置をフィードバック制御するための制御信号を出力する。
Ｘ軸速度演算回路１１１は、検出位置の変化速度からスライダ部のＸ軸方向の移動速度を検出する。
Ｘ軸速度制御部１１２は、Ｘ軸位置制御部１１０の制御信号とＸ軸速度演算回路１１１の検出速度の偏差をもとにスライダ部のＸ軸方向の移動速度をフィードバック制御するための制御信号を出力する。この制御信号は、スライダ部をＸ軸方向に移動させる推力指令Ｉｒ０になる。
θの制御についても同様にθ位置制御部１１３、θ速度演算回路１１４、θ速度制御部１１５が設けられている。θ速度制御部１１５の制御信号がスライダ部をθ方向に回転させる推力指令Ｉｒθになる。
リミッタ１１６は、Ｘ軸方向の推力指令値Ｉｒ０のリミット値を
Ｉｍａｘ − ｜Ｉｒθ｜（Ｉｍａｘは最大推力指令値）
に制限し、制限後の推力指令値Ｉｒｘを出力する。これによって、θ方向の推力指令値Ｉｒθに応じてＸ軸方向の推力指令値Ｉｒ０のリミット値を制限している。
指令値変換回路１１７は、Ｘ軸方向の推力指令値Ｉｒｘ、θ方向の推力指令値Ｉｒθを次式により、Ｘ軸モータ１１８および１１９の推力指令値Ｉｒ１およびＩｒ２に変換する。
Ｉｒ１＝Ｉｒｘ − Ｉｒθ
Ｉｒ２＝Ｉｒｘ＋Ｉｒθ
推力指令値Ｉｒ１およびＩｒ２はリミッタ１１６の作用により−Ｉｍａｘ〜Ｉｍａｘの範囲におさまる。 FIG. 6 is a control block diagram of the two-dimensional positioning apparatus of the conventional method 2.
In FIG. 6, the X-axis sensor 101 discriminates the moving direction of the slider part, and generates an up pulse or a down pulse according to the discriminated direction. The number of generated pulses is a number corresponding to the amount of movement of the slider portion. The up / down counter 102 counts up or down according to the up pulse or the down pulse. The count of the up / down counter 102 becomes the detection position of the slider portion.
The correction means 103 holds a correction table 104 that associates the position of the slider portion that depends on the bending of the mirror and the correction amount for removing yawing of the slider portion. The correction means 103 reads the correction amount from the correction table 104 based on the given command position, and corrects the detection position of the up / down counter 102 with the read correction amount. The data in the correction table 104 is data obtained by calibration. The correcting means 103 is provided for correcting a bending due to a mechanical error between the X-axis mirror and the Y-axis mirror. If the bends of the X-axis mirror and the Y-axis mirror do not affect the position detection, the correcting unit 103 may not be provided. Similarly to the X-axis sensor 101, the X-axis sensor 105 is provided with an up / down counter 106, a correction unit 107, and a correction table 108. The conversion circuit 109 receives the signals of the detection positions X1 and X2 in the X-axis direction obtained from the correction means 103 and 107, and converts these signals into signals of the X-axis direction position x at the center of the slider part and the yawing angle θ of the slider part. Convert. The conversion formula is as follows.
x = (X1 + X2) / 2
θ = (X2−X1) / 2Ld
Ld: distance from the center of the slider portion to the optical axes of the X-axis sensors 101 and 105.
The X-axis position control unit 110 outputs a control signal for performing feedback control of the position of the slider unit in the X-axis direction based on the deviation between the X-axis position command Xi and the detection position x.
The X-axis speed calculation circuit 111 detects the moving speed of the slider portion in the X-axis direction from the change speed of the detection position.
The X-axis speed control unit 112 is a control signal for performing feedback control of the moving speed of the slider unit in the X-axis direction based on the deviation between the control signal of the X-axis position control unit 110 and the detection speed of the X-axis speed calculation circuit 111. Is output. This control signal is a thrust command Ir0 for moving the slider portion in the X-axis direction.
Similarly, for θ control, a θ position control unit 113, a θ speed calculation circuit 114, and a θ speed control unit 115 are provided. The control signal of the θ speed control unit 115 becomes a thrust command Irθ that rotates the slider unit in the θ direction.
The limiter 116 sets the limit value of the thrust command value Ir0 in the X-axis direction as Imax− | Irθ | (Imax is the maximum thrust command value)
And the thrust command value Irx after the limit is output. Thus, the limit value of the thrust command value Ir0 in the X-axis direction is limited according to the thrust command value Irθ in the θ direction.
The command value conversion circuit 117 converts the thrust command value Irx in the X axis direction and the thrust command value Irθ in the θ direction into the thrust command values Ir1 and Ir2 of the X axis motors 118 and 119 according to the following equations.
Ir1 = Irx−Irθ
Ir2 = Irx + Irθ
The thrust command values Ir1 and Ir2 fall within the range of −Imax to Imax due to the action of the limiter 116.

電流センサ１２０は、Ｘ軸モータ１１８のコイルに流れる電流を検出する。転流・電流制御回路１２１は、Ｘ軸モータ１１８の転流制御とコイルに流れる電流の制御を行う。転流角演算回路１２２は、アップダウンカウンタ１０２のカウンタとsin値が対応して格納されたsinテーブルを持っている。Ｘ軸モータ１１８が３相モータである場合は、アップダウンカウンタ１０２のカウンタが与えられると、転流角演算回路１２２はsinテーブルからsinφとsin(φ＋１２０°)の値を読み出す。φはアップダウンカウンタ１０２のカウンタに応じて変わる角度である。
マルチプライング・デジタル・アナログ変換回路（ＭＤＡとする）１２３，１２４は、推力指令値Ｉｒ１をアナログ入力信号、sinテーブルから読み出したsinφとsin(φ＋１２０°)の値をゲイン設定信号として、Ｉｒ１sinφとＩｒ１sin(φ＋１２０°)なる電流指令値を出力する。ここで、２つの指令値の位相が１２０°ずれているのは、モータが３相モータであるためである。相数が異なる場合は位相ずれは他の値になる。
Ｘ軸電流制御回路１２５は、電流指令値Ｉｒ１sinφ、Ｉｒ１sin(φ＋１２０°)と電流センサ１２０の電流検出値の偏差をもとにＸ軸モータ１１８のコイルに流れる電流を制御する。Ｘ軸モータ１１９についても同様に電流センサ１２６と転流・電流制御回路１２７が設けられている。Ｙ軸方向のサーボ制御系についても、Ｘ軸方向およびθ方向のサーボ制御系と同様に、アップダウンカウンタ１２８、補正手段１２９、補正テーブル１３０、Ｙ軸位置制御部１３１、Ｙ軸速度演算回路１３２、Ｙ軸速度制御部１３３、転流・電流制御回路１３４が設けられている。Ｙ軸方向のサーボ制御系では、変換回路１０９で行ったような制御量の変換を行わないで制御を実行している。
このように、従来の二次元位置決め装置は、２つのＸ軸センサの検出信号について和と差をとり、スライダ部のＸ軸方向の位置検出信号およびスライダ部のヨーイング角θの検出信号に変換して、変換した信号をもとにスライダ部のＸ軸方向移動およびθ方向移動についてそれぞれ独立にフィードバック制御して、θ方向制御の制御方式やサーボゲインをＸ軸方向のそれとは独立に設定して、θ方向のサーボ剛性が向上して、スライダ部の回転ずれにより制御不能に陥ることを防止して、二次元の位置決めをするのである。
特開２００６−７１５３６（第３−５頁、図７）特許第３５４３７０１号（第６−１０頁、図１） The current sensor 120 detects a current flowing through the coil of the X-axis motor 118. The commutation / current control circuit 121 performs commutation control of the X-axis motor 118 and control of current flowing through the coil. The commutation angle calculation circuit 122 has a sin table in which counters of the up / down counter 102 and sin values are stored correspondingly. When the X-axis motor 118 is a three-phase motor, when the counter of the up / down counter 102 is given, the commutation angle calculation circuit 122 reads the values of sinφ and sin (φ + 120 °) from the sin table. φ is an angle that changes according to the counter of the up / down counter 102.
The multiplying digital-to-analog converters (MDA) 123 and 124 use the thrust command value Ir1 as an analog input signal, and the values of sinφ and sin (φ + 120 °) read from the sin table as gain setting signals. A current command value of Ir1sin (φ + 120 °) is output. Here, the reason why the phases of the two command values are shifted by 120 ° is that the motor is a three-phase motor. When the number of phases is different, the phase shift has another value.
The X-axis current control circuit 125 controls the current flowing through the coil of the X-axis motor 118 based on the deviation between the current command values Ir1sinφ and Ir1sin (φ + 120 °) and the current detection value of the current sensor 120. Similarly, the X-axis motor 119 is provided with a current sensor 126 and a commutation / current control circuit 127. For the Y-axis servo control system, as with the X-axis and θ-direction servo control systems, the up / down counter 128, the correction means 129, the correction table 130, the Y-axis position control unit 131, and the Y-axis speed calculation circuit 132 are used. A Y-axis speed control unit 133 and a commutation / current control circuit 134 are provided. In the servo control system in the Y-axis direction, control is performed without performing control amount conversion as performed by the conversion circuit 109.
Thus, the conventional two-dimensional positioning device takes the sum and difference of the detection signals of the two X-axis sensors and converts them into a position detection signal of the slider portion in the X-axis direction and a detection signal of the yawing angle θ of the slider portion. Based on the converted signal, feedback control is independently performed for the X-axis direction movement and θ-direction movement of the slider section, and the control method and servo gain for θ-direction control are set independently of those in the X-axis direction. The servo rigidity in the θ direction is improved, and it is prevented from becoming uncontrollable due to the rotational deviation of the slider portion, and two-dimensional positioning is performed.
JP 2006-71536 A (page 3-5, FIG. 7) Japanese Patent No. 3543701 (page 6-10, FIG. 1)

従来手法１の二次元位置決め装置は、フォーサを構成するモータを駆動する推力制御器において、センサの示す値をそのまま磁極位置として使用するので、回転時に、回転により生じる、モータの磁極位置とセンサの示す磁極位置のずれを補正できず、θ制御に必要な推力を発生させることができないので、静止保持ができないという問題があった。
また、従来手法２の二次元位置決め装置の補正手段では、回転時に、回転により生じる、モータの磁極位置とセンサの示す磁極位置のずれを補正できないという問題もあった。
本発明はこのような問題点に鑑みてなされたものであり、回転時にモータの磁極位置とセンサの示す磁極位置のずれを正確に補正することで、θ制御に必要な推力を発生させることができ、回転時の推力不足に伴うトルク不足を解消し、静止保持することができる二次元位置決め装置を提供することを目的とする。 The two-dimensional positioning device of the conventional method 1 uses the value indicated by the sensor as the magnetic pole position as it is in the thrust controller that drives the motor that constitutes the forcer. There is a problem that the magnetic pole position shown cannot be corrected and the thrust required for the θ control cannot be generated, so that the stationary holding cannot be performed.
Further, the correction means of the two-dimensional positioning device of the conventional method 2 has a problem in that it cannot correct the deviation between the magnetic pole position of the motor and the magnetic pole position indicated by the sensor caused by the rotation.
The present invention has been made in view of such problems, and can generate thrust necessary for θ control by accurately correcting the deviation between the magnetic pole position of the motor and the magnetic pole position indicated by the sensor during rotation. An object of the present invention is to provide a two-dimensional positioning device that can solve the torque shortage caused by the lack of thrust during rotation and can be held stationary.

上記問題を解決するため、本発明は、次のように構成したのである。
請求項１に記載の発明は、請求項１記載の二次元位置決め装置に係り、フォーサをＸ軸方向に移動させる２台の第１、第２Ｘ軸モータと、前記フォーサをＹ軸方向に移動させる２台の第１、第２Ｙ軸モータと、前記第１、第２Ｘ軸モータの移動量を検出する２つの第1、第２Ｘ軸センサと、前記第１、第２Ｙ軸モータの移動量を検出する２つの第１、第２Ｙ軸センサと、前記フォーサのＸ軸方向の移動を制御するＸ軸制御器と、前記フォーサのＹ軸方向の移動を制御するＹ軸制御器と、前記フォーサのθ移動を制御するθ制御器と、前記Ｘ軸制御器と前記Ｙ軸制御器と前記θ制御器の出力する推力指令を前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータの各推力指令に変換する推力指令変換器と、前記各推力指令を前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータに与える推力制御器と、前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータの移動量をＸ軸方向、Ｙ軸方向及びθ方向の移動量に変換する移動量変換器を備えた二次元位置決め装置において、前記フォーサ回転時に生じる前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータの磁極位置と前記第1、第２Ｘ軸センサ及び前記第１、第２Ｙ軸センサの示す磁極位置とのずれを算出する磁極位置補正量演算器を備えたことを特徴としている。
請求項２記載の発明は、請求項１記載の二次元位置決め装置において、前記磁極位置補正量演算器が、前記θ制御器に入力されるθ指令値を基に磁極位置補正量を算出することを特徴としている。
さらに、請求項３記載の発明は、請求項２記載の二次元位置決め装置において、前記磁極位置補正演算器が、前記第１、第２Ｘ軸モータと前記第１、第２Ｙ軸モータの前記磁極位置補正量をδｘ₁、δｘ₂、δｙ₁、δｙ₂[°（電気角）]、前記第１、第２Ｘ軸モータと前記第１、第２Ｙ軸モータの各々の中心から、前記第1、第２Ｘ軸センサと前記第１、第２Ｙ軸センサの各々の検出部までの距離をＬｘ₁、Ｌｘ₂、Ｌｙ₁、Ｌｙ₂[mm]、前記θ制御器に入力されるθ指令値をθi[°（電気角）]、前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータの極ピッチを同じλ[mm]とした場合、次式を使用して、
δ_x1＝Ｌ_x1×ｓｉｎ（θｉ）／λ×１８０°
δ_x2＝Ｌ_x2×ｓｉｎ（θｉ）／λ×１８０°
δ_y1＝Ｌ_y1×ｓｉｎ（θｉ）／λ×１８０°
δ_y2＝Ｌ_y2×ｓｉｎ（θｉ）／λ×１８０°
前記第１、第２Ｘ軸モータ及び第１、第２Ｙ軸モータの前記磁極位置補正量を算出することを特徴としている。
請求項４記載の発明は、請求項３記載の二次元位置決め装置において、前記磁極位置補正量演算器が、前記の式から算出した磁極位置補正量を前記推力制御器に入力し、補正後の磁極位置にて前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータを駆動することを特徴としている。 In order to solve the above problem, the present invention is configured as follows.
The invention according to claim 1 relates to the two-dimensional positioning apparatus according to claim 1, wherein the first and second X-axis motors move the forcer in the X-axis direction, and the forcer moves in the Y-axis direction. Two first and second Y-axis motors, two first and second X-axis sensors for detecting movement amounts of the first and second X-axis motors, and detection of movement amounts of the first and second Y-axis motors Two first and second Y-axis sensors, an X-axis controller that controls movement of the forcer in the X-axis direction, a Y-axis controller that controls movement of the forcer in the Y-axis direction, and the θ of the forcer A θ controller for controlling movement, and thrust commands output from the X-axis controller, the Y-axis controller, and the θ controller, for each of the first, second X-axis motors, and the first and second Y-axis motors. A thrust command converter for converting to a thrust command, and each of the thrust commands to the first and second X-axis modules. Data, a thrust controller applied to the first and second Y-axis motors, and movement amounts of the first and second X-axis motors and the first and second Y-axis motors in the X-axis direction, the Y-axis direction, and the θ-direction. In a two-dimensional positioning device including a movement amount converter for converting movement amount, the magnetic pole positions of the first and second X-axis motors and the first and second Y-axis motors generated during the forcer rotation and the first and second X A magnetic pole position correction amount calculator for calculating a deviation from the magnetic pole position indicated by the axis sensor and the first and second Y-axis sensors is provided.
According to a second aspect of the present invention, in the two-dimensional positioning apparatus according to the first aspect, the magnetic pole position correction amount calculator calculates a magnetic pole position correction amount based on a θ command value input to the θ controller. It is characterized by.
Further, the invention according to claim 3 is the two-dimensional positioning device according to claim 2, wherein the magnetic pole position correction calculator is the magnetic pole positions of the first and second X-axis motors and the first and second Y-axis motors. Correction amounts are set to δx ₁ , δx ₂ , δy ₁ , δy ₂ [° (electrical angle)], and the first and second X-axis motors from the centers of the first and second Y-axis motors. Lx ₁ , Lx ₂ , Ly ₁ , Ly ₂ [mm] are the distances between the 2X-axis sensor and each of the first and second Y-axis sensors, and the θ command value input to the θ controller is θi [ ° (electrical angle)], where the pole pitches of the first and second X-axis motors and the first and second Y-axis motors are the same λ [mm],
δ _x1 = L _x1 × sin (θi) / λ × 180 °
δ _x2 = L _x2 × sin (θi) / λ × 180 °
δ _y1 = L _y1 × sin (θi) / λ × 180 °
δ _y2 = L _y2 × sin (θi) / λ × 180 °
The magnetic pole position correction amounts of the first and second X-axis motors and the first and second Y-axis motors are calculated.
According to a fourth aspect of the present invention, in the two-dimensional positioning apparatus according to the third aspect, the magnetic pole position correction amount calculator inputs the magnetic pole position correction amount calculated from the above equation to the thrust controller, The first and second X-axis motors and the first and second Y-axis motors are driven at the magnetic pole positions.

請求項５記載の発明は、二次元位置決め装置の回転時の磁極位置ずれ補正方法に係り、フォーサをＸ軸方向に移動させる２台の第１、第２Ｘ軸モータと、前記フォーサをＹ軸方向に移動させる２台の第１、第２Ｙ軸モータと、前記第１、第２Ｘ軸モータの移動量を検出する２つの第1、第２Ｘ軸センサと、前記第１、第２Ｙ軸モータの移動量を検出する２つの第１、第２Ｙ軸センサと、前記フォーサのＸ軸方向の移動を制御するＸ軸制御器と、前記フォーサのＹ軸方向の移動を制御するＹ軸制御器と、前記フォーサのθ移動を制御するθ制御器と、前記Ｘ軸制御器と前記Ｙ軸制御器と前記θ制御器の出力する推力指令を前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータの各推力指令に変換する推力指令変換器と、前記各推力指令を前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータに与える推力制御器と、前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータの移動量をＸ軸方向、Ｙ軸方向及びθ方向の移動量に変換する移動量変換器を備えた二次元位置決め装置の運転中において、前記フォーサ回転時に生じる前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータの磁極位置と前記第1、第２Ｘ軸センサ及び前記第１、第２Ｙ軸センサの示す磁極位置とのずれを補正するようにしたことを特徴としている。
請求項６記載の発明は、請求項５記載の二次元位置決め装置の回転時の磁極位置ずれ補正方法において、前記磁極位置補正方法が、前記θ制御器に入力されるθ指令値を基に磁極位置補正量を算出することを特徴としている。
請求項７記載の発明は、請求項６記載の二次元位置決め装置の回転時の磁極位置ずれ補正方法において、前記磁極位置補正方法が、前記第１、第２Ｘ軸モータと前記第１、第２Ｙ軸モータの前記磁極位置補正量をδｘ₁、δｘ₂、δｙ₁、δｙ₂[°（電気角）]、前記第１、第２Ｘ軸モータと前記第１、第２Ｙ軸モータの各々の中心から、前記第1、第２Ｘ軸センサと前記第１、第２Ｙ軸センサの各々の検出部までの距離をＬｘ₁、Ｌｘ₂、Ｌｙ₁、Ｌｙ₂[mm]、
前記θ制御器に入力されるθ指令値をθi[°（電気角）]、前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータの極ピッチを同じλ[mm]とした場合、次式を使用して、
δ_x1＝Ｌ_x1×ｓｉｎ（θｉ）／λ×１８０°
δ_x2＝Ｌ_x2×ｓｉｎ（θｉ）／λ×１８０°
δ_y1＝Ｌ_y1×ｓｉｎ（θｉ）／λ×１８０°
δ_y2＝Ｌ_y2×ｓｉｎ（θｉ）／λ×１８０°
前記第１、第２Ｘ軸モータ及び第１、第２Ｙ軸モータの前記磁極位置補正量を算出することを特徴としている。
請求項８記載の発明は、請求項７記載の二次元位置決め装置の回転時の磁極位置ずれ補正方法において、前記磁極位置補正方法が、前記の式から算出した磁極位置補正量を前記推力制御器に入力し、補正後の磁極位置にて前記第１、第２Ｘ軸モータ及び前記第１、第２Ｙ軸モータを駆動することを特徴としている。 The invention according to claim 5 relates to a magnetic pole position deviation correction method during rotation of the two-dimensional positioning device, and includes two first and second X-axis motors that move the forcer in the X-axis direction, and the forcer in the Y-axis direction. Two first and second Y-axis motors to be moved, two first and second X-axis sensors for detecting movement amounts of the first and second X-axis motors, and movement of the first and second Y-axis motors Two first and second Y-axis sensors for detecting the amount, an X-axis controller for controlling movement of the forcer in the X-axis direction, a Y-axis controller for controlling movement of the forcer in the Y-axis direction, A θ controller for controlling the θ movement of the forcer; and the thrust commands output from the X-axis controller, the Y-axis controller, and the θ controller are the first and second X-axis motors and the first and second Y-axes. A thrust command converter for converting each of the thrust commands of the motor; 1. Thrust controller for the second X-axis motor and the first and second Y-axis motors, and the movement amounts of the first and second X-axis motors and the first and second Y-axis motors in the X-axis direction and the Y-axis direction. And the magnetic pole positions of the first and second X-axis motors and the first and second Y-axis motors that are generated during the rotation of the forcer during the operation of the two-dimensional positioning device including the movement amount converter that converts the movement amount to the θ direction movement amount. And the magnetic pole positions indicated by the first and second X-axis sensors and the first and second Y-axis sensors are corrected.
According to a sixth aspect of the present invention, in the magnetic pole position deviation correction method during rotation of the two-dimensional positioning device according to the fifth aspect, the magnetic pole position correction method is based on a θ command value input to the θ controller. It is characterized in that a position correction amount is calculated.
According to a seventh aspect of the present invention, in the magnetic pole position deviation correction method during rotation of the two-dimensional positioning device according to the sixth aspect, the magnetic pole position correction method includes the first and second X-axis motors and the first and second Y. The magnetic pole position correction amount of the shaft motor is calculated from the centers of δx ₁ , δx ₂ , δy ₁ , δy ₂ [° (electrical angle)], the first and second X-axis motors, and the first and second Y-axis motors. , Lx ₁ , Lx ₂ , Ly ₁ , Ly ₂ [mm], distances between the first and second X-axis sensors and the detection units of the first and second Y-axis sensors,
When the θ command value input to the θ controller is θi [° (electrical angle)] and the pole pitches of the first and second X-axis motors and the first and second Y-axis motors are the same λ [mm] , Using the following formula:
δ _x1 = L _x1 × sin (θi) / λ × 180 °
δ _x2 = L _x2 × sin (θi) / λ × 180 °
δ _y1 = L _y1 × sin (θi) / λ × 180 °
δ _y2 = L _y2 × sin (θi) / λ × 180 °
The magnetic pole position correction amounts of the first and second X-axis motors and the first and second Y-axis motors are calculated.
The invention according to claim 8 is the magnetic pole position deviation correction method during rotation of the two-dimensional positioning device according to claim 7, wherein the magnetic pole position correction method uses the thrust controller to calculate the magnetic pole position correction amount calculated from the above equation. The first and second X-axis motors and the first and second Y-axis motors are driven at the corrected magnetic pole positions.

以上の構成によって、回転時にモータの磁極位置とセンサの示す磁極位置のずれを正確に補正することができ、その結果、θ制御に必要な推力を発生させることができ、回転時の推力不足に伴うトルク不足を解消し、静止保持することができる二次元位置決め装置が得られることとなる。 With the above configuration, it is possible to accurately correct the deviation between the magnetic pole position of the motor and the magnetic pole position indicated by the sensor during rotation, and as a result, it is possible to generate thrust necessary for θ control, resulting in insufficient thrust during rotation. Thus, a two-dimensional positioning device that can eliminate the torque shortage and can be held stationary is obtained.

以下、本発明の実施の形態について図を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の二次元位置決め装置の制御ブロック図である。図において、１は、フォーサ１９のＸ軸方向移動を制御するＸ軸制御器、２はフォーサ１９のＹ軸方向移動を制御するＹ軸制御器、３はフォーサのθ移動（回転移動）を制御するθ制御器、４はＸ軸制御器１、Ｙ軸制御器２、θ制御器３から出力される推力指令を、フォーサ１９を構成する各モータに与える推力指令に変換する推力指令変換器、５はフォーサ１９を構成する各モータの移動量を、フォーサ１９のＸ軸方向の移動量、Ｙ軸方向の移動量、θ移動量に変換する移動量変換器、６はθ指令に応じて、磁極位置補正量を算出する磁極位置補正量演算器、７はフォーサ１９を構成するモータの第１Ｘ軸モータ１１の推力を制御する推力制御器Ｘ₁、８はフォーサ１９を構成するモータの第２Ｘ軸モータ１２の推力を制御する推力制御器Ｘ₂、９はフォーサ１９を構成するモータの第１Ｙ軸モータ１３の推力を制御する推力制御器Ｙ₁、１０はフォーサ１９を構成するモータの第２Ｙ軸モータ１４の推力を制御する推力制御器Ｙ₂、１１はフォーサ１９を構成し、フォーサのＸ軸方向駆動を実現する第１Ｘ軸モータ、１２はフォーサ１９を構成し、フォーサ１９のＸ軸方向駆動を実現する第２Ｘ軸モータ、１３はフォーサ１９を構成し、フォーサ１９のＹ軸方向駆動を実現する第１Ｙ軸モータ、１４はフォーサ１９を構成し、フォーサ１９のＹ軸方向駆動を実現する第２Ｙ軸モータ、１５は、第１Ｘ軸モータ１１の移動量を検出する第１Ｘ軸センサ、１６は、第２Ｘ軸モータ１２の移動量を検出する第２Ｘ軸センサ、１７は、第１Ｙ軸モータ１３の移動量を検出する第１Ｙ軸センサ、１８は、第２Ｙ軸モータ１４の移動量を検出する第２Ｙ軸センサである。 FIG. 1 is a control block diagram of the two-dimensional positioning apparatus of the present invention. In the figure, 1 is an X-axis controller for controlling the movement of the forcer 19 in the X-axis direction, 2 is a Y-axis controller for controlling the movement of the forcer 19 in the Y-axis direction, and 3 is for controlling the θ movement (rotational movement) of the forcer. A thrust controller 4 for converting a thrust command output from the X-axis controller 1, the Y-axis controller 2, and the θ controller 3 into a thrust command to be given to each motor constituting the forcer 19; 5 is a movement amount converter for converting the movement amount of each motor constituting the forcer 19 into the movement amount of the forcer 19 in the X-axis direction, the movement amount in the Y-axis direction, and the θ movement amount. A magnetic pole position correction amount calculator for calculating the magnetic pole position correction amount, 7 is a thrust controller X ₁ for controlling the thrust of the first X-axis motor 11 of the motor constituting the forcer 19, and 8 is a second X of the motor constituting the forcer 19. Thrust controller X ₂ that controls the thrust of the shaft motor 12 , 9 is a thrust controller Y ₁ for controlling the thrust of the first Y-axis motor 13 of the motor constituting the forcer 19, and 10 is a thrust controller Y ₂ for controlling the thrust of the second Y-axis motor 14 of the motor constituting the forcer 19. , 11 constitutes a forcer 19 and is a first X-axis motor that realizes driving of the forcer in the X-axis direction, 12 constitutes a forcer 19, second X-axis motor that realizes driving of the forcer 19 in the X-axis direction, and 13 is a forcer 19. The first Y-axis motor for realizing the Y-axis direction drive of the forcer 19, 14 constitutes the forcer 19, the second Y-axis motor for realizing the Y-axis direction drive of the forcer 19, and 15 the first X-axis motor 11. The first X-axis sensor for detecting the amount of movement of the first Y-axis motor 13, the first X-axis sensor for detecting the amount of movement of the first Y-axis motor 13. 18 is a first 2Y axis sensor for detecting the movement amount of the 2Y axis motor 14.

図２において、１９はフォーサであり、４つのモータ第１Ｘ軸モータ１１、第２Ｘ軸モータ１２、第１Ｙ軸モータ１３、第２Ｙ軸モータ１４と各モータの位置を検出する第１Ｘ軸センサ１５、第２Ｘ軸センサ１６、第１Ｙ軸センサ１７、第２Ｙ軸センサ１８で構成される。第１Ｘ軸センサ１５、第２Ｘ軸センサ１６、第１Ｙ軸センサ１７、第２Ｙ軸センサ１８は、プラテン２０上に設置されたＸＹスケールの格子状スリット検出することで第１Ｘ軸モータ１１、第２Ｘ軸モータ１２、第１Ｙ軸モータ１３、第２Ｙ軸モータ１４の位置を得ることができる。ＸＹスケールはプラテン２０上の全面をカバーしており、フォーサ１９に搭載された第１Ｘ軸センサ１５、第２Ｘ軸センサ１６、第１Ｙ軸センサ１７、第２Ｙ軸センサ１８はフォーサ１９の移動に伴いプラテン２０からその移動量を検出することができる。また、ここで駆動する二次元位置決め装置は、図４で示す平面サーボである。
本発明が従来技術と異なる部分は、フォーサ回転時に生じる各モータの磁極位置と各センサの示す磁極位置とのずれを算出する磁極位置補正量演算器を備え、前記磁極位置補正量演算器で、磁極位置補正量を算出し、磁極位置補正量を前記推力制御器に入力し、補正後の磁極位置にて各モータを駆動することである。 In FIG. 2, reference numeral 19 denotes a forcer, which includes four motors, a first X-axis motor 11, a second X-axis motor 12, a first Y-axis motor 13, a second Y-axis motor 14, and a first X-axis sensor 15 that detects the position of each motor. The second X-axis sensor 16, the first Y-axis sensor 17, and the second Y-axis sensor 18 are configured. The first X-axis sensor 15, the second X-axis sensor 16, the first Y-axis sensor 17, and the second Y-axis sensor 18 detect the XY scale grid slits installed on the platen 20 to detect the first X-axis motor 11 and the second X-axis. The positions of the shaft motor 12, the first Y-axis motor 13, and the second Y-axis motor 14 can be obtained. The XY scale covers the entire surface of the platen 20, and the first X-axis sensor 15, the second X-axis sensor 16, the first Y-axis sensor 17, and the second Y-axis sensor 18 mounted on the forcer 19 are moved along with the movement of the forcer 19. The amount of movement can be detected from the platen 20. The two-dimensional positioning device driven here is a planar servo shown in FIG.
The present invention is different from the prior art in that it includes a magnetic pole position correction amount calculator that calculates a deviation between the magnetic pole position of each motor and the magnetic pole position indicated by each sensor that occurs during forcer rotation. The magnetic pole position correction amount is calculated, the magnetic pole position correction amount is input to the thrust controller, and each motor is driven at the corrected magnetic pole position.

図２のフォーサ１９を駆動する場合、フォーサ１９のＸ軸方向の位置指令ＸｉとＹ軸方向の位置指令Ｙｉとθ指令（回転角指令）θiをそれぞれ、Ｘ軸制御器１、Ｙ軸制御器２、θ制御器３に入力し、Ｘ軸、Ｙ軸、θをそれぞれ独立に制御を行い、各指令どおりにフォーサ１９が移動するような推力指令を生成する。このとき、フォーサ１９の移動量検出値は、フォーサ１９を構成する４つのモータの移動量を検出する第１Ｘ軸センサ１５、第２Ｘ軸センサ１６、第１Ｙ軸センサ１７、第２Ｙ軸センサ１８の信号ｘ₁、ｘ₂、ｙ₁、ｙ₂をもとに、移動量変換器５にて作成される、フォーサ１９のＸ軸方向、Ｙ軸方向、θ方向の移動量ｘ、ｙ、θを使用する。
例えば、フォーサ１９をＸ軸方向のみ移動させる場合は、Ｘ軸位置指令Ｘｉを入力し、Ｘ軸制御器１にて位置制御および速度制御を行い、Ｘ軸位置指令Ｘｉに従いフォーサ１９が動作するような推力指令Ｆｘを出力する。この時、Ｙ軸制御器２及びθ制御器３からはフォーサ１９がＹ軸方向に動作しないようなＹ軸推力指令Ｆｙとフォーサ１９が回転しないようなθ推力指令Ｆθを出力する。
Ｘ軸制御器１、Ｙ軸制御器２、θ制御器３から出力される推力指令Ｆｘ、Ｆｙ、Ｆθは、指令変換器４にて、フォーサ１９を構成する４つのモータ、第１Ｘ軸モータ１１、第２Ｘ軸モータ１２、第１Ｙ軸モータ１３、第２Ｙ軸モータ１４の推力指令Ｆｘ₁、Ｆｘ₂、Ｆｙ₁、Ｆｙ₂に変換される。各推力指令は、フォーサ１９を構成する４つのモータの推力を制御する推力制御器Ｘ₁７、推力制御器Ｘ₂８、推力制御器Ｙ₁９、推力制御器Ｙ₂１０にそれぞれ入力され、推力指令値どおり各モータが駆動するように必要な電流をモータに与える。以上の処理により、フォーサ１９は駆動される。しかし、図３に示すように、θ方向に移動する場合、つまりフォーサ１９がＣ−Ｃ‘からＤ−Ｄ’の位置にθiだけ回転する場合は、プラテン２０に対しフォーサが傾くため、第１Ｘ軸モータ１１では、第１Ｘ軸モータ１１の磁極位置Ａ−Ａ‘に対して、第１Ｘ軸センサ１５の示す磁極位置Ｂ−Ｂ’には、Ｌｘ１×sin(θi)（ここで、Ｌｘ１は第１Ｘ軸モータ１１の中心から第１Ｘ軸センサ１５の検出部までの距離である。単位は[mm]）のずれが生じる。そのため、磁極位置補正量演算器６にて、式１を用いて第１Ｘ軸モータの磁極位置補正量δｘ１（°（電気角））を算出する。
δ_x1＝Ｌ_x1×ｓｉｎ（θｉ）／λ×１８０° ・・・・・（１） When the forcer 19 of FIG. 2 is driven, the position command Xi in the X-axis direction, the position command Yi in the Y-axis direction, and the θ command (rotation angle command) θi of the forcer 19 are respectively supplied to the X-axis controller 1 and the Y-axis controller. 2. Input to the θ controller 3 to control the X-axis, Y-axis, and θ independently, and generate a thrust command so that the forcer 19 moves according to each command. At this time, the movement amount detection value of the forcer 19 is obtained from the first X-axis sensor 15, the second X-axis sensor 16, the first Y-axis sensor 17, and the second Y-axis sensor 18 that detect the movement amounts of the four motors constituting the forcer 19. Based on the signals x ₁ , x ₂ , y ₁ , y ₂ , movement amounts x, y, θ of the forcer 19 in the X-axis direction, Y-axis direction, and θ-direction created by the movement amount converter 5 are calculated. use.
For example, when the forcer 19 is moved only in the X-axis direction, the X-axis position command Xi is input, the position control and the speed control are performed by the X-axis controller 1, and the forcer 19 operates according to the X-axis position command Xi. A correct thrust command Fx is output. At this time, the Y-axis controller 2 and the θ controller 3 output a Y-axis thrust command Fy that prevents the forcer 19 from moving in the Y-axis direction and a θ-thrust command Fθ that prevents the forcer 19 from rotating.
Thrust commands Fx, Fy, Fθ output from the X-axis controller 1, the Y-axis controller 2, and the θ controller 3 are converted into four motors constituting the forcer 19 by the command converter 4, and the first X-axis motor 11. is converted first 2X axis motor 12, the 1Y axis motor 13, thrust command Fx ₁ of the 2Y axis motor 14, Fx _2, the Fy _1, Fy _2. Each thrust command is thrust controller X ₁ 7 for controlling the thrust of the four motors constituting the forcer 19, thrust controller X ₂ 8, propulsive force controller Y ₁ 9, are input to the propulsive force controller Y ₂ 10, A necessary current is applied to the motor so that each motor is driven according to the thrust command value. The forcer 19 is driven by the above processing. However, as shown in FIG. 3, when the forcer 19 moves in the θ direction, that is, when the forcer 19 rotates from CC ′ to DD ′ by θi, the forcer tilts with respect to the platen 20, so the first X In the shaft motor 11, the magnetic pole position BB ′ indicated by the first X-axis sensor 15 is Lx1 × sin (θi) (where Lx1 is the first relative to the magnetic pole position AA ′ of the first X-axis motor 11). This is the distance from the center of the 1X-axis motor 11 to the detection part of the first X-axis sensor 15. The unit is shifted [mm]. Therefore, the magnetic pole position correction amount calculator 6 calculates the magnetic pole position correction amount δx1 (° (electrical angle)) of the first X-axis motor using Equation 1.
δ _x1 = L _x1 × sin (θi) / λ × 180 ° (1)

式１において、θiはθ制御器３に入力されるθ指令値（単位[°]）、λｘ１は第１Ｘ軸モータの極ピッチ（単位[mm]）である。
磁極位置補正量演算器６にて算出した磁極位置補正量δｘ１は、第１Ｘ軸センサ１５の検出値ｘ₁より減算し、減算した値を用いて、推力制御器ｘ１にて推力制御を行う。第２Ｘ軸モータ１２、第１Ｙ軸モータ１３、第２Ｙ軸モータ１４でも同様に磁極位置補正量（第２Ｘ軸モータ１２の場合δｘ２、第１Ｙ軸モータ１３の場合δｙ１、第２Ｙ軸モータ１４の場合δｙ２）を式２、式３、式４を用いて算出し、磁極位置補正を行い推力制御を行う。
δ_x2＝Ｌ_x2×ｓｉｎ（θｉ）／λ×１８０° ・・・・（２）
δ_y1＝Ｌ_y1×ｓｉｎ（θｉ）／λ×１８０° ・・・・（３）
δ_y2＝Ｌ_y2×ｓｉｎ（θｉ）／λ×１８０° ・・・・（４） In Equation 1, θi is a θ command value (unit [°]) input to the θ controller 3, and λx1 is a pole pitch (unit [mm]) of the first X-axis motor.
The magnetic pole position correction amount δx1 calculated by the magnetic pole position correction amount calculator 6 is subtracted from the detection value x1 of the _first X-axis sensor 15, and the thrust controller x1 performs thrust control using the subtracted value. Similarly for the second X-axis motor 12, the first Y-axis motor 13, and the second Y-axis motor 14, the magnetic pole position correction amount (δx2 for the second X-axis motor 12, δy1 for the first Y-axis motor 13, and the second Y-axis motor 14) δy2) is calculated using Equation 2, Equation 3, and Equation 4, and the magnetic pole position is corrected and thrust control is performed.
_{_{δ x2 = L x2 × sin (}} θi) / λ × 180 ° ···· (2)
δ _y1 = L _y1 × sin (θi) / λ × 180 ° (3)
δ _y2 = L _y2 × sin (θi) / λ × 180 ° (4)

上記手順にて処理を行うと、回転時にモータの磁極位置とセンサの示す磁極位置のずれを正確に補正することで、θ制御に必要な推力を発生させることができ、回転時の推力不足に伴うトルク不足を解消し、静止保持することができる、二次元位置決めが可能になる。
以上のように、磁極位置補正量の計算には、θ制御器３に入力されるθ指令であるθiを用いたが、第１Ｘ軸センサ１５、第２Ｘ軸センサ１６、第１Ｙ軸センサ１７、第２Ｙ軸センサ１８の信号をもとに移動量変換器６で生成されたθ方向の移動量θを使用してもよい。 When processing is performed according to the above procedure, the thrust necessary for θ control can be generated by accurately correcting the deviation between the magnetic pole position of the motor and the magnetic pole position indicated by the sensor during rotation, resulting in insufficient thrust during rotation. The two-dimensional positioning which can eliminate the torque shortage and can be kept stationary becomes possible.
As described above, θi which is the θ command input to the θ controller 3 is used for the calculation of the magnetic pole position correction amount, but the first X-axis sensor 15, the second X-axis sensor 16, the first Y-axis sensor 17 The movement amount θ in the θ direction generated by the movement amount converter 6 based on the signal from the second Y-axis sensor 18 may be used.

磁極位置補正することによって、静止保持することができるので、超精密という用途にも適用できる。 By correcting the magnetic pole position, it can be held stationary, so it can be applied to ultra-precision applications.

本発明の第１実施例を示す二次元位置決め装置の制御ブロック図である。It is a control block diagram of the two-dimensional positioning device showing the first embodiment of the present invention. 本発明の第１実施例を示す二次元位置決め装置のモータの構成図である。It is a block diagram of the motor of the two-dimensional positioning apparatus which shows 1st Example of this invention. 本発明の二次元位置決め装置の回転時の動作を示すモータ構成図である。It is a motor block diagram which shows the operation | movement at the time of rotation of the two-dimensional positioning device of this invention. 従来手法１の二次元位置決め装置のモータ構成図である。It is a motor block diagram of the two-dimensional positioning device of the conventional method 1. 従来手法１の二次元位置決め装置の制御ブロック図である。It is a control block diagram of the two-dimensional positioning apparatus of the conventional method 1. 従来手法２の二次元位置決め装置の制御ブロック図である。It is a control block diagram of the two-dimensional positioning device of the conventional method 2.

Explanation of symbols

１Ｘ軸制御器
２Ｙ軸制御器
３ θ制御器
４推力指令変換器
５移動量変換器
６磁極位置補正量演算器
７推力制御器Ｘ₁
８推力制御器Ｘ₂
９推力制御器Ｙ₁
１０推力制御器Ｙ₂
１１第１Ｘ軸モータ
１２第２Ｘ軸モータ
１３第１Ｙ軸モータ
１４第２Ｙ軸モータ
１５第１Ｘ軸センサ
１６第２Ｘ軸センサ
１７第１Ｙ軸センサ
１８第２Ｙ軸センサ
１９フォーサ
２０プラテン
１０１Ｘ軸センサ
１０２アップダウンカウンタ
１０３補正手段
１０４補正テーブル
１０５Ｘ軸センサ
１０６アップダウンカウンタ
１０７補正手段
１０８補正テーブル
１０９変換回路
１１０Ｘ軸位置制御部
１１１Ｘ軸速度演算回路
１１２Ｘ軸速度制御部
１１３ θ位置制御部
１１４ θ速度演算回路
１１５ θ速度制御部
１１６リミッタ
１１７指令値変換回路
１１８Ｘ軸モータ
１１９Ｘ軸モータ
１２０電流センサ
１２１転流・電流制御回路
１２２転流角演算回路
１２３マルチプライング・デジタル・アナログ変換回路
１２４マルチプライング・デジタル・アナログ変換回路
１２５Ｘ軸電流制御回路
１２６電流センサ
１２７転流・電流制御回路
１２８アップダウンカウンタ
１２９補正手段
１３０補正テーブル
１３１Ｙ軸位置制御部
１３２Ｙ軸速度演算回路
１３３Ｙ軸速度制御部
１３４転流・電流制御回路
１３５Ｘ軸制御器
１３６Ｙ軸制御器
１３７ θ制御器
１３８推力指令変換器
１３９移動量変換器
１４０推力制御器Ｘ₁
１４１推力制御器Ｘ₂
１４２推力制御器Ｙ₁
１４３推力制御器Ｙ₂
１４４第１Ｘ軸モータ
１４５第２Ｘ軸モータ
１４６第１Ｙ軸モータ
１４７第２Ｙ軸モータ
１４８第１Ｘ軸センサ
１４９第２Ｘ軸センサ
１５０第１Ｙ軸センサ
１５１第２Ｙ軸センサ
１５２ＸＹスケール 1 X-axis controller 2 Y-axis controller 3 θ controller 4 Thrust command converter 5 Movement amount converter 6 Magnetic pole position correction amount calculator 7 Thrust controller X ₁
8 Thrust controller X ₂
9 Thrust controller Y ₁
10 Thrust controller Y ₂
11 1st X-axis motor 12 2nd X-axis motor 13 1st Y-axis motor 14 2nd Y-axis motor 15 1st X-axis sensor 16 2nd X-axis sensor 17 1st Y-axis sensor 18 2nd Y-axis sensor 19 forcer 20 platen 101 X-axis sensor 102 up Down counter 103 Correction unit 104 Correction table 105 X-axis sensor 106 Up / down counter 107 Correction unit 108 Correction table 109 Conversion circuit 110 X-axis position control unit 111 X-axis speed calculation circuit 112 X-axis speed control unit 113 θ Position control unit 114 θ Speed calculation circuit 115 θ speed control unit 116 Limiter 117 Command value conversion circuit 118 X-axis motor 119 X-axis motor 120 Current sensor 121 Commutation / current control circuit 122 Commutation angle calculation circuit 123 Multiplexing digital / analog conversion circuit 124 Multipling Digital / analog conversion circuit 125 X-axis current control circuit 126 Current sensor 127 Commutation / current control circuit 128 Up / down counter 129 Correction means 130 Correction table 131 Y-axis position control unit 132 Y-axis speed calculation circuit 133 Y-axis speed control unit 134 Commutation and current control circuit 135 X-axis controller 136 Y-axis controller 137 θ controller 138 Thrust command converter 139 Movement amount converter 140 Thrust controller X ₁
141 Thrust controller X ₂
142 propulsive force controller Y ₁
143 Thrust controller Y ₂
144 1st X axis motor 145 2nd X axis motor 146 1st Y axis motor 147 2nd Y axis motor 148 1st X axis sensor 149 2nd X axis sensor 150 1st Y axis sensor 151 2nd Y axis sensor 152 XY scale

Claims

Two first and second X-axis motors that move the forcer in the X-axis direction, two first and second Y-axis motors that move the forcer in the Y-axis direction, and the first and second X-axis motors Two first and second X-axis sensors for detecting the amount of movement, two first and second Y-axis sensors for detecting the amount of movement of the first and second Y-axis motors, and movement of the forcer in the X-axis direction. An X-axis controller for controlling, a Y-axis controller for controlling movement of the forcer in the Y-axis direction, a θ controller for controlling θ movement of the forcer, the X-axis controller, and the Y-axis controller; A thrust command converter for converting a thrust command output from the θ controller into thrust commands for the first and second X-axis motors and the first and second Y-axis motors; A thrust controller applied to a 2X-axis motor and the first and second Y-axis motors; In the two-dimensional positioning apparatus including a movement amount converter that converts the movement amount of the second X-axis motor and the first and second Y-axis motors into movement amounts in the X-axis direction, the Y-axis direction, and the θ-direction,
Deviations between the magnetic pole positions of the first and second X-axis motors and the first and second Y-axis motors and the magnetic pole positions indicated by the first and second X-axis sensors and the first and second Y-axis sensors that occur during the forcer rotation. A two-dimensional positioning device comprising a magnetic pole position correction amount calculator for calculating

2. The two-dimensional positioning apparatus according to claim 1, wherein the magnetic pole position correction amount calculator calculates a magnetic pole position correction amount based on a θ command value input to the θ controller.

The magnetic pole position correction calculator is
The magnetic pole position correction amounts of the first and second X-axis motors and the first and second Y-axis motors are expressed as δx ₁ , δx ₂ , δy ₁ , δy ₂ [° (electrical angle)],
The distance from the center of each of the first and second X-axis motors and the first and second Y-axis motors to the detection unit of each of the first and second X-axis sensors and the first and second Y-axis sensors is expressed as Lx. ₁ , Lx ₂ , Ly ₁ , Ly ₂ [mm],
When the θ command value input to the θ controller is θi [° (electrical angle)] and the pole pitches of the first and second X-axis motors and the first and second Y-axis motors are the same λ [mm] , Using the following formula:
δ _x1 = L _x1 × sin (θi) / λ × 180 °
δ _x2 = L _x2 × sin (θi) / λ × 180 °
δ _y1 = L _y1 × sin (θi) / λ × 180 °
δ _y2 = L _y2 × sin (θi) / λ × 180 °
3. The two-dimensional positioning apparatus according to claim 2, wherein the magnetic pole position correction amounts of the first and second X-axis motors and the first and second Y-axis motors are calculated.

The magnetic pole position correction amount calculator inputs the magnetic pole position correction amount calculated from the above formula to the thrust controller, and the first and second X-axis motors and the first and second Y at the corrected magnetic pole position. 4. The two-dimensional positioning apparatus according to claim 3, wherein the shaft motor is driven.

Two first and second X-axis motors that move the forcer in the X-axis direction, two first and second Y-axis motors that move the forcer in the Y-axis direction, and the first and second X-axis motors Two first and second X-axis sensors for detecting the amount of movement, two first and second Y-axis sensors for detecting the amount of movement of the first and second Y-axis motors, and movement of the forcer in the X-axis direction. An X-axis controller for controlling, a Y-axis controller for controlling movement of the forcer in the Y-axis direction, a θ controller for controlling θ movement of the forcer, the X-axis controller, and the Y-axis controller; A thrust command converter for converting a thrust command output from the θ controller into thrust commands for the first and second X-axis motors and the first and second Y-axis motors; A thrust controller applied to a 2X-axis motor and the first and second Y-axis motors; During operation of the two-dimensional positioning device including a movement amount converter that converts the movement amount of the second X-axis motor and the first and second Y-axis motors into movement amounts in the X-axis direction, the Y-axis direction, and the θ-direction, Deviations between the magnetic pole positions of the first and second X-axis motors and the first and second Y-axis motors, and the magnetic pole positions indicated by the first and second X-axis sensors and the first and second Y-axis sensors, which occur when the forcer rotates. A magnetic pole position deviation correction method during rotation of a two-dimensional positioning device, wherein correction is performed.

The magnetic pole position correction method according to claim 5, wherein the magnetic pole position correction method calculates a magnetic pole position correction amount based on a θ command value input to the θ controller. Method.

The magnetic pole position correction method is:
The magnetic pole position correction amounts of the first and second X-axis motors and the first and second Y-axis motors are expressed as δx ₁ , δx ₂ , δy ₁ , δy ₂ [° (electrical angle)],
The distance from the center of each of the first and second X-axis motors and the first and second Y-axis motors to the detection unit of each of the first and second X-axis sensors and the first and second Y-axis sensors is expressed as Lx. ₁ , Lx ₂ , Ly ₁ , Ly ₂ [mm],
When the θ command value input to the θ controller is θi [° (electrical angle)] and the pole pitches of the first and second X-axis motors and the first and second Y-axis motors are the same λ [mm] , Using the following formula:
δ _x1 = L _x1 × sin (θi) / λ × 180 °
δ _x2 = L _x2 × sin (θi) / λ × 180 °
δ _y1 = L _y1 × sin (θi) / λ × 180 °
δ _y2 = L _y2 × sin (θi) / λ × 180 °
7. The magnetic pole position deviation correction method during rotation of the two-dimensional positioning device according to claim 6, wherein the magnetic pole position correction amounts of the first, second X-axis motor and first, second Y-axis motor are calculated.

In the magnetic pole position correction method, the magnetic pole position correction amount calculated from the above formula is input to the thrust controller, and the first and second X-axis motors and the first and second Y-axis motors at the corrected magnetic pole positions. The method of correcting a magnetic pole position deviation during rotation of the two-dimensional positioning device according to claim 7.