JP2008102019A - Oscillation device and oscillation method for tuning fork type piezoelectric transducing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress generation of a time lag and delay in generation stabilization time by quickening the oscillation of a tuning fork type transducing device, at oscillation inspection. <P>SOLUTION: An oscillation device 4 for a tuning fork type crystal resonator 2 is employed for making the crystal resonator 2 oscillate and is equipped with an exciting oscillator 41 for outputting the oscillation signal of a frequency equal or close to the resonance frequency of the crystal resonator 2 to the crystal oscillator 2, for exciting the crystal resonator 2, and an inspecting oscillator 42 for oscillating the crystal resonator 2. In this oscillation device 4, the crystal resonator 2 is excited by the exciting oscillator 41, and this crystal resonator 2 in the excited state is oscillated by the resonance frequency of the crystal resonator 2 by the inspecting oscillator 42. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an oscillation device and an oscillation method for a tuning fork type piezoelectric vibration device, and more particularly to an oscillation device and an oscillation method used for an oscillation tester for a tuning fork type piezoelectric vibration device for inspecting the presence or absence of oscillation of the tuning fork type piezoelectric vibration device.

  Among the steps of manufacturing a piezoelectric vibrating device such as a quartz resonator, there is a step of inspecting the oscillation characteristics of the piezoelectric vibrating device (see, for example, Patent Document 1).

  The crystal resonator quality determination method described in Patent Document 1 described below uses a crystal oscillation circuit having at least one amplifier circuit whose amplification factor changes according to a DC input voltage and to which a crystal resonator to be determined is connected. In this method, the DC input voltage is increased and the maximum value of the DC input voltage when the crystal oscillation circuit starts oscillating is measured, and the quality of the crystal resonator is judged according to the measured value.

According to the crystal resonator quality determination method described in Patent Document 1, the operation when the crystal resonator oscillates in an actual oscillation circuit is quantitatively measured, and the quality of the crystal resonator is reliably and accurately determined. Can be determined.
JP 2001-242209 A

  By the way, regarding the oscillation characteristics of this piezoelectric vibration device, a time lag (non-oscillation time) occurs from when the power supply of the oscillator is turned on to when it actually oscillates (rising of the oscillation signal) during the oscillation inspection of the piezoelectric vibration device. That is, the rise time of the oscillation signal with respect to the power ON of the oscillator is slow. In addition, the time taken for oscillation to stabilize after oscillation oscillates in proportion (oscillation stabilization time) is also slow. That is, the oscillation operation of the piezoelectric vibration device is slow. Specifically, at present, the oscillation stabilization time is 1 to 3 mSEC in the case of an AT-cut crystal resonator, whereas the oscillation stabilization time is 300 to 500 mSEC in the case of a tuning fork type piezoelectric vibration device.

  Accordingly, in order to solve the above-described problems, the present invention provides a tuning fork type piezoelectric device that accelerates the oscillation of the tuning fork type piezoelectric vibration device during the oscillation inspection of the tuning fork type piezoelectric vibration device and suppresses the generation of a time lag and the delay of the oscillation stabilization time. An object is to provide an oscillation device and an oscillation method for a vibration device.

  In order to achieve the above object, an oscillation device for a tuning fork type piezoelectric vibration device according to the present invention is an oscillation device for a tuning fork type piezoelectric vibration device that oscillates a tuning fork type piezoelectric vibration device, and the resonance frequency of the tuning fork type piezoelectric vibration device. Or, an oscillation oscillator for exciting the tuning fork type piezoelectric vibration device by outputting an oscillation signal having a frequency near the resonance frequency to the tuning fork type piezoelectric vibration device and an inspection oscillator for oscillating the tuning fork type piezoelectric vibration device are provided. The tuning fork type piezoelectric vibration device is excited by the excitation oscillator, and the excited tuning fork type piezoelectric vibration device is oscillated at the resonance frequency of the tuning fork type piezoelectric vibration device by the inspection oscillator.

  According to the present invention, the excitation oscillator and the inspection oscillator are provided, and the tuning fork type piezoelectric vibration device is excited by the excitation oscillator, and the excited tuning fork type piezoelectric vibration device is used as the inspection oscillator. Oscillates at the resonance frequency of the tuning fork type piezoelectric vibration device, so that at the time of oscillation inspection of the tuning fork type piezoelectric vibration device, the oscillation of the tuning fork type piezoelectric vibration device can be accelerated so that time lag (non-oscillation time) occurs and It becomes possible to suppress the delay. As a result, productivity can be improved in the manufacture of a tuning fork type piezoelectric vibration device. It should be noted that the target for detecting the oscillation of the tuning fork type piezoelectric vibration device in the oscillation inspection of the tuning fork type piezoelectric vibration device may be the frequency of the tuning fork type piezoelectric vibration device or the series resonance resistance value of the tuning fork type piezoelectric vibration device.

  In the above configuration, the excitation oscillator and the inspection oscillator are connected via a switching unit, the connection between the excitation oscillator and the tuning fork type piezoelectric vibration device by the switching unit, the inspection oscillator and the tuning fork type piezoelectric device. The connection with the vibration device may be switched.

  In this case, the excitation oscillator and the inspection oscillator are connected via a switching unit, the connection between the excitation oscillator and the tuning fork type piezoelectric vibration device by the switching unit, and the inspection oscillator and the tuning fork type piezoelectric vibration. Since the connection with the device can be switched, in order to oscillate the tuning fork type piezoelectric vibration device excited by the excitation oscillator by the inspection oscillator, the switching between each oscillator and the tuning fork type piezoelectric vibration device is facilitated. It becomes possible.

  In the above configuration, the switching of the connection with the tuning fork type piezoelectric vibration device by the switching unit from the excitation oscillator to the inspection oscillator may be performed continuously.

  In this case, since switching of the connection with the tuning fork type piezoelectric vibration device by the switching unit from the excitation oscillator to the inspection oscillator is continuously performed, power supply by the inspection oscillator (supply signal is in an ON state) It is suitable for suppressing a time lag that occurs from when the oscillation signal is actually oscillated (rising of the oscillation signal (oscillation detection signal)).

  In the above configuration, the oscillation device may be detachably attached to the oscillation tester of the tuning fork type piezoelectric vibration device.

  In the above configuration, the oscillation oscillator for excitation may be provided with an arbitrary oscillation source that outputs an arbitrary oscillation signal.

  In this case, the excitation oscillator is provided with an arbitrary oscillation source that outputs an arbitrary oscillation signal so that it can be replaced. Therefore, it can be adapted to any tuning fork type piezoelectric vibration device corresponding to an arbitrary frequency. The degree of freedom of the oscillation device can be increased.

  In order to achieve the above object, an oscillation method of a tuning fork type piezoelectric vibrating device according to the present invention is an oscillation method of a tuning fork type piezoelectric vibrating device that oscillates a tuning fork type piezoelectric vibrating device. An oscillation process for excitation for exciting the tuning fork type piezoelectric vibration device by outputting an oscillation signal having a resonance frequency or a frequency near the resonance frequency to the tuning fork type piezoelectric vibration device; and an oscillation process for testing for causing the tuning fork type piezoelectric vibration device to oscillate. The tuning fork type piezoelectric vibration device is excited in the oscillation step for excitation, and the tuning fork type piezoelectric vibration device excited in the oscillation step for inspection is oscillated at the resonance frequency of the tuning fork type piezoelectric vibration device. It is characterized by.

  According to the present invention, the tuning fork type includes the excitation oscillation step and the inspection oscillation step, wherein the tuning fork type piezoelectric vibration device is excited in the excitation oscillation step and is excited in the inspection oscillation step. Since the piezoelectric vibrating device is oscillated at the resonance frequency of the tuning fork type piezoelectric vibrating device, the tuning fork type piezoelectric vibrating device is oscillated earlier and the time lag (non-oscillation time) is generated or oscillated. It becomes possible to suppress the delay of the stabilization time. As a result, productivity can be improved in the manufacture of a tuning fork type piezoelectric vibration device. Further, it is suitable for a tuning fork type piezoelectric vibration device that requires oscillation at short time intervals. In particular, the present invention can be used in the manufacturing process of a tuning fork type piezoelectric vibration device, and is suitable for use in the frequency adjustment process, its pre- and post-processes, or the final inspection process before shipment. is there. It should be noted that the target for detecting the oscillation of the tuning fork type piezoelectric vibration device in the oscillation inspection of the tuning fork type piezoelectric vibration device may be the frequency of the tuning fork type piezoelectric vibration device or the series resonance resistance value of the tuning fork type piezoelectric vibration device.

  According to the oscillation device and the oscillation method of the tuning fork type piezoelectric vibration device according to the present invention, in the oscillation inspection of the tuning fork type piezoelectric vibration device, the oscillation of the tuning fork type piezoelectric vibration device is accelerated so that the time lag is generated and the oscillation stabilization time is delayed. It becomes possible to suppress.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiment, a case where the present invention is applied to a tuning fork type crystal resonator as a tuning fork type piezoelectric vibration device is shown.

  As shown in FIG. 1, the oscillation tester 11 according to the present embodiment is incorporated in a production line of a production apparatus (not shown) of the tuning fork type crystal resonator 2, and is an oscillation examination apparatus 3 arranged on the production line. Used.

  The tuning fork type crystal resonator 2 is manufactured by a tuning fork type crystal resonator in which a manufacturing process by each manufacturing device is performed while a carrier 31 on which twelve tuning fork type crystal resonators 2 can be placed moves on a line 32. 2 is manufactured. FIG. 1 is a schematic diagram showing an oscillation inspection apparatus 3 used in an oscillation inspection process that is one process of the manufacturing process. In the oscillation tester 11 shown in FIG. 1, the tuning fork crystal resonator 2 on the carrier 31 is oscillated one by one by the oscillation device 4 connected to the oscillation tester 11, and the oscillation state of the tuning fork crystal resonator 2 ( The oscillation checker 11 checks whether or not there is oscillation. In the oscillation tester 11, the tuning fork type crystal resonator 2 determined to be a non-defective product is unloaded to the non-defective case 34 through the unloading path 33, and the tuning fork type crystal resonator 2 determined to be defective is unloaded. It is carried out to the defective product case 35 through 33.

  As shown in FIG. 1, an oscillation device 4 that oscillates the tuning fork crystal resonator 2 is detachably attached to the oscillation tester 11. Further, the oscillation tester 11 is provided with an external device connection unit (I / O port, not shown) to which an external device can be connected. The external device mentioned here includes a controller that controls the entire automatic machine for automatically inspecting, and in this embodiment, a sequencer controller (the control unit 12 shown in FIG. 2) is used. ing. When a start signal is input from the sequencer controller 12, the oscillation test is continued. Further, when a start signal is input from the sequencer controller 12, the start signal is output to the switching control unit 44 (see below). The sequencer controller 12 controls not only the oscillation device tester 11 and the oscillation device 4 but also other external devices such as a frequency selection mechanism and a conveying device of the tuning fork type crystal resonator 2.

  As shown in FIG. 2, the oscillation device 4 detachably attached to the oscillation tester 11 is a device that oscillates the tuning fork crystal resonator 2 and outputs an oscillation signal to the tuning fork crystal resonator 2. The excitation oscillator 41 for exciting the tuning fork type crystal resonator 2, the inspection oscillator 42 for oscillating the tuning fork type crystal resonator 2, the excitation oscillator 41, the inspection oscillator 42, and the tuning fork type crystal resonator 2 A switching unit 43 that switches connection and a switching control unit 44 that controls switching of the switching unit 43 are included. Specifically, as shown in FIG. 2, the excitation oscillator 41 and the inspection oscillator 42 are connected via a switching unit 43 (relay switch (RL) shown in FIG. 2), and switching control by the switching control unit 44. The switching unit 43 switches the connection between the excitation oscillator 41 and the tuning fork type crystal resonator 2 and the connection between the inspection oscillator 42 and the tuning fork type crystal resonator 2 by the signal. The excitation oscillator 41 is supplied with power depending on whether the switching unit 43 is connected to the tuning fork type crystal resonator 2 and the supply signal is in an ON state. Further, the inspection oscillator 42 is supplied with power via the switching control unit 44 in conjunction with the ON / OFF of the input of the start signal, and the supply signal is turned on / off.

  According to the oscillation device 4, the excitation oscillator 41 and the tuning fork crystal resonator 2 are connected by the switching unit 43 until the start signal is input, and the tuning fork crystal resonator 2 is excited by the excitation oscillator 41. To do. When an input signal is input from the sequencer controller 12 to the oscillation device 4 via the oscillation tester 11, this input signal is input to the switching control unit 44 and the test oscillator 42. When the input signal is input to the switching controller 44, the switching controller 44 outputs a switching control signal for switching the connection of the tuning fork type crystal resonator 2 to the switching unit 43, and the switching unit 43 outputs the tuning fork type crystal. The connection with the vibrator 2 is switched from the excitation oscillator 41 to the inspection oscillator 42. Simultaneously with this switching, the tuning fork type crystal resonator 2 is oscillated by the inspection oscillator 42. Here, “simultaneous” means that the connection with the tuning fork type crystal resonator 2 is switched instantaneously and continuously. However, this switching operation is a preferred example, and the switching operation of the connection with the tuning fork type crystal resonator 2 can be arbitrarily set.

  Next, an oscillation test of the tuning fork type crystal resonator 2 in the oscillation tester 11 using the oscillation device 4 described above will be described below.

  First, when the start signal is not input to the oscillation device 4, the switching unit 43 connects the excitation oscillator 4 and the tuning fork type crystal resonator 2. In this embodiment, the excitation oscillator 41 outputs (ON state) an excitation signal of 32.768 kHz. Therefore, the excitation oscillator 41 outputs an excitation signal of 32.768 kHz to the tuning fork crystal resonator 2, and the tuning fork crystal resonator 2 is excited by the output of this excitation signal (excitation oscillation step in the present invention). In this embodiment, an excitation signal is output to the tuning fork type crystal resonator 2 by about 20 mSEC in this oscillation process for excitation. However, the output time of the excitation signal may be arbitrarily set according to each condition, and is not limited to about 20 mSEC.

  When a start signal is output from the sequencer controller 12 to the oscillation checker 11, power is supplied to the oscillation device 4 according to the set conditions (start signal is turned on), and the excitation oscillator 41 is turned off.

  Specifically, when a start signal is input from the sequencer controller 12 (the start signal is in an ON state), the input signal is transmitted from the sequencer controller 12 via the oscillation tester 11 and the switching control unit 44 of the oscillation device 4 and the test. Is input to the generator oscillator 42. In response to the input signal switching controller 44, the switching controller 44 outputs a switching control signal for switching the connection with the tuning fork crystal unit 2 to the switching unit 43, and the switching unit 43 outputs the tuning fork type crystal. The connection with the vibrator 2 is switched from the excitation oscillator 41 to the inspection oscillator 42. At the time of this switching, the power source of the excitation oscillator 41 is turned off, and at the same time, the power source is supplied to the inspection oscillator 42 (supply signal ON state). When power is supplied to the inspection oscillator 42, the tuning fork crystal resonator 2 is oscillated by the inspection oscillator (inspection oscillation step in the present invention), and the tuning fork type is determined depending on the presence or absence of an oscillation detection signal in the ON time. The oscillation of the crystal unit 2 is inspected. Note that the switching of the tuning fork crystal resonator 2 in the switching unit 43 from the excitation oscillator 41 to the inspection oscillator 42 is performed simultaneously with the oscillation of the tuning fork crystal resonator 2 by the inspection oscillator 42.

  In the inspection oscillation process, the description is based on the premise that the tuning fork type crystal resonator 2 oscillates. In this inspection oscillation step, whether the tuning fork type crystal resonator 2 is oscillating is also inspected. Then, based on the result of the oscillation inspection of the tuning fork type crystal resonator 2 by the oscillation tester 11, the tuning fork type crystal resonator 2 determined to be a non-defective product is carried out to the non-defective case 34 through the carry-out path 33 and defective. The tuning-fork type crystal resonator 2 that has been determined to pass through the carry-out path 33 is carried out to the defective product case 35.

  As described above, according to the present embodiment, at the time of the oscillation test of the tuning fork type crystal resonator 2, the oscillation of the tuning fork type crystal resonator 2 is accelerated so as to generate a time lag (non-oscillation time) or delay the oscillation stabilization time. Can be suppressed. For example, it is possible to suppress a time lag that occurs from the power supply (the supply signal is in the ON state) to the actual oscillation (rising edge of the oscillation signal (oscillation detection signal)) from the inspection oscillator 42. As a result, productivity can be improved in the production of the tuning fork crystal unit 2. Further, it is suitable for the tuning fork type crystal resonator 2 that requires oscillation at short intervals. In particular, the present embodiment can be used in the manufacturing process of the tuning fork type crystal resonator 2 and is preferably used in the frequency adjustment process, its pre- and post-processes, or the final inspection process before shipment. is there.

  In addition, since the switching device 43 and the switching control unit 44 are provided in the oscillation device 4, each oscillator is used to oscillate the tuning fork type crystal resonator 2 excited by the excitation oscillator 41 by the inspection oscillator 42. Switching between 41 and 42 and the tuning fork type crystal resonator 2 can be facilitated.

  In addition, since the switching unit 43 from the excitation oscillator 41 to the inspection oscillator 42 is continuously switched to the tuning fork type crystal resonator 2, power is supplied from the inspection oscillator 42 (the supply signal is in the ON state). ) To actual oscillation (rising edge of oscillation signal (oscillation detection signal)).

  Since an external device such as a sequencer controller 12 for automatically supplying power to the oscillation device 4 is externally attached to the oscillation tester 11, an external device used based on oscillation under various conditions It becomes easy to cope with various conditions by replacing.

  In the present embodiment, only the oscillation inspection process which is one process of the oscillation inspection apparatus 3 has been described with reference to FIG. 1, but the line 32 and the cases 34 and 35 shown in FIG. 1 are limited to this. is not. Therefore, for example, the oscillation tester 11 according to the present embodiment can be provided in any form of the oscillation tester 3 as shown in FIG.

  The oscillation test apparatus 3 shown in FIG. 3 includes an oscillation tester 11, an inspection chuck 36 that holds or releases an external connection terminal 21 (hereinafter referred to as a lead) of the tuning fork crystal resonator 2, and an oscillation tester 11. A classification unit 37 that classifies the tuning fork type crystal resonator 2 based on the inspection determination result of the tuning fork type crystal resonator 2, and a line conveyance unit 38 that conveys a plurality of tuning fork type crystal resonators 2 to a holding position by the inspection chuck 36. And are provided. A sequencer controller 12 is used as an external device.

  As shown in FIG. 3, the line transport unit 38 aligns a large number of randomly inserted tuning fork type crystal resonators 2 with the leads 21 of the tuning fork type crystal resonators 2 facing upward. 381, a linear feeder 383 that continuously feeds each tuning-fork type crystal resonator 2 that is sent from the parts feeder 381, and the lead 21 faces upward, and a tuning-fork type crystal vibration that is continuously conveyed from the linear feeder 383. It is comprised from the positioning part 382 which divides | segments and arrange | positions the child 2 separately one by one.

  The positioning portion 382 has a storage pocket 384 in a part thereof, has an elongated shape as a whole, and has a slide mechanism. When one tuning-fork type crystal resonator enters the storage pocket 384, the positioning portion 382 slides, and the storage pocket moves to a point A described later. At this time, the front end (carrying outlet) of the linear feeder 383 is blocked by the side wall of the positioning portion 382, and the conveyance of the tuning fork type crystal resonator 2 is stopped.

  The inspection chuck 36 is provided with a contact electrode 361 at a portion where the lead 21 is sandwiched, and conducts the contact electrode 361 by sandwiching the lead 21 of the tuning-fork type crystal resonator 2 disposed at the positioning portion 382. . The contact electrode 361 is connected to the terminal of the oscillation device 4 and is supplied with power according to the set conditions as described above. Further, the inspection chuck 36 is attached to a handling device (not shown) and can be arbitrarily operated. To illustrate a specific configuration, the inspection chuck 36 is moved to the storage pocket 384 of the positioning portion 382 at the point A, and the lead 21 of the tuning fork type crystal resonator 2 is clamped. Thereafter, the tuning fork type crystal resonator 2 is moved to the point B while being held, and the characteristic inspection is executed at the position B. The positioning unit 382 returns to the position of the tip of the original linear feeder 383 when the inspection chuck 36 moves to the point B.

  The classification unit 37 includes a sorting shooter 371 that operates based on the inspection result, and a non-defective product case 34 and a defective product case 35 that are located at the input destination of the sorting shooter 371. The sorting shooter 371 has a groove-like surface on which the tuning fork type crystal resonator 2 slides, and the lower end 372 of the sorting shooter 371 is positioned at the position of the good product case 34 or the defective product case 35 around the point B according to the inspection result. After the turning, the inspection chuck 36 releases the nipping and inserts the tuning fork type crystal resonator 2 into the sorting shooter 371, and is stored in the cases 34 and 35 determined by sliding.

  The tuning fork type crystal resonator 2 shown in FIG. 3 exemplifies the operation when the oscillation inspection is finished and it is determined that the product is defective. The inspection chuck 36 is at the position B, and the sorting shooter 371 is at the lower end 372. Is located in the upper part of the case 35 for defective products. Further, the holding of the inspection chuck 36 is released in order to carry the tuning fork type crystal resonator 2 to the defective product case 35. The tuning fork crystal unit 2 slides on the sliding surface of the sorting shooter 371 and is carried out to the defective product case 35. When the non-defective product is determined, the sorting shooter 371 turns to the non-defective product case 34 and is carried out to the good product case 34.

  According to the oscillation inspection device 3, the tuning fork type crystal resonator 2 of any oscillation (oscillation such as fundamental wave or triple wave) can be inspected without limiting the oscillation of the tuning fork type crystal resonator 2. . In particular, since the oscillation device 4 is detachably attached to the oscillation tester 11 of the tuning fork type crystal resonator 2, it is suitable for dealing with oscillation of a fundamental wave or a triple wave.

  In this embodiment, the crystal resonator is used as the piezoelectric vibration device. However, the present invention is not limited to this, and any medium that performs piezoelectric vibration may be used.

  In this embodiment, the start signal is input from the outside. However, the present invention is not limited to this, and a power supply unit may be provided in the oscillation tester to supply power to the oscillation device.

  In this embodiment, the object for detecting the oscillation of the tuning fork type crystal resonator 2 is the frequency of the tuning fork type crystal resonator 2, but the present invention is not limited to this. Other characteristics may be used as long as they are related to characteristics, for example, a series resonance resistance value, a series resonance resistance voltage value, or a series resonance resistance voltage value and frequency.

  In this embodiment, the excitation oscillator 41 outputs an excitation signal of 32.768 kHz to the tuning fork type crystal resonator 2 for about 20 mSEC to excite the tuning fork type crystal resonator 2, but this is not limitative. However, the frequency and the excitation time of the excitation signal by the excitation oscillator 41 may be arbitrarily changed. Therefore, it is preferable to modularize the oscillation source (not shown) of the excitation oscillator 41 of the oscillation device 4 of the present embodiment, and an arbitrary oscillation source that outputs an arbitrary oscillation signal to the excitation oscillator 41 is provided in a replaceable manner. May be. For example, a unit using a direct digital synthesizer (DDS) may be used. In this case, any tuning fork type crystal resonator 2 corresponding to an arbitrary frequency can be supported, and the degree of freedom of the oscillation device 4 can be increased.

  In the above-described embodiment, the frequency of 32.768 kHz is used. However, the present invention is not limited to this, and an arbitrary frequency may be used. For example, frequencies such as 38.4 kHz, 40.0 kHz, 60.0 kHz, 75.0 kHz, 77.503 kHz, 150 kHz, and 250 kHz may be used.

  Based on the above-described embodiments and modifications, an oscillation test experiment of the tuning fork type crystal resonator 2 was performed. The results are shown in FIGS. In the experiment described below, the time when the oscillation was detected (ON time of the oscillation detection signal) and the undetected time until the oscillation was stabilized from the power supply time (supply signal ON time) in the test oscillator 42 were measured. . Further, in the following experiments (Examples 1 and 3), as a comparative example (Comparative Examples 1 and 3), an oscillation device consisting only of a conventional inspection oscillator that does not use an excitation oscillator is used, and power is supplied to the inspection oscillator. The non-detection time (also referred to as oscillation stabilization time) from the time (ON time of the supply signal) to the time when oscillation was detected (ON time of the oscillation detection signal) was measured.

  In Example 1 and Comparative Example 1 shown in FIG. 4, the target for detecting the oscillation of the tuning fork crystal resonator 2 is the series resonance resistance voltage of the tuning fork crystal resonator 2, and the excitation signal of the excitation oscillator 41 is 32. The oscillation signal (oscillation detection signal) of the inspection oscillator 41 is 32.768 kHz. The dimensions of the tuning-fork type crystal vibrating piece of the tuning-fork type crystal resonator 2 to be subjected to the oscillation test are a length of 3.2 mm, a width of 0.56 mm, and a thickness of 0.12 mm. As shown in FIG. 4A, in Example 1, the oscillation started up at about 20 mSEC from the start of power supply and stabilized at about 80 mSEC. On the other hand, as shown in FIG. 4B, in Comparative Example 1, it took about 350 mSEC from the start of power supply until the oscillation stabilized. From this, it is clear that according to the first embodiment, the oscillation of the tuning fork type crystal resonator 2 can be accelerated compared to the first comparative example at the time of the oscillation inspection of the tuning fork type crystal resonator 2.

  In Example 2 shown in FIG. 5, a tuning fork type crystal resonator 2 of a different form from Example 1 described above is used, and the dimensions of the tuning fork type crystal resonator element of the tuning fork type crystal resonator 2 of Example 2 are as follows: A tuning-fork type crystal vibrating piece having a length of 4.5 mm, a width of 1.00 mm, and a thickness of 0.24 mm, which is larger than that of the first embodiment, is used. Other configurations are not different from each other and will not be described here. As shown in FIG. 5, in Example 2, the oscillation started up at about 10 mSEC from the start of power supply and stabilized at about 80 mSEC. As described above, according to the second embodiment, compared with the first embodiment (see FIG. 4A), the tuning-fork crystal resonator 2 can be oscillated faster in terms of the rising speed of oscillation. preferable.

  In Example 3 and Comparative Example 3 shown in FIG. 6, the target for detecting the oscillation of the tuning fork crystal resonator 2 is the oscillation frequency of the tuning fork crystal resonator 2 (specifically, the oscillation frequency is 3σ (frequency variation)). It is assumed that oscillation is stable when 3σ is 10.00 or less. Further, the excitation signal of the excitation oscillator 41 is 32.768 kHz, and the oscillation signal (oscillation detection signal) of the inspection oscillator 41 is 32.768 kHz (in the third embodiment, it is set to 98.3040 MHz by multiplication by 3000). The measurement was performed 30 times for the same tuning fork type crystal resonator 2 under the same conditions. The dimensions of the tuning-fork type crystal vibrating piece of the tuning-fork type crystal resonator 2 to be subjected to the oscillation test are 4.5 mm in length, 1.00 mm in width, and 0.24 mm in thickness. As shown in FIG. 6, in Example 3, the oscillation stabilized at about 20 mSEC from the start of power supply. On the other hand, in Comparative Example 3, it took about 250 mSEC from the start of power supply until oscillation was stabilized. From this, according to Example 3, it is clear that the oscillation of the tuning fork type crystal resonator 2 can be accelerated in comparison with the comparative example 3 at the time of the oscillation test of the tuning fork type crystal resonator 2.

  It should be noted that the present invention can be implemented in various other forms without departing from the spirit, gist, or main features. For this reason, the above-described embodiment is merely an example in all respects and should not be interpreted in a limited manner. The scope of the present invention is indicated by the claims, and is not restricted by the text of the specification. Further, all modifications and changes belonging to the equivalent scope of the claims are within the scope of the present invention.

  The present invention can be applied to an apparatus used in the oscillation inspection of a tuning fork type piezoelectric vibration device such as a tuning fork type crystal resonator.

FIG. 1 is a schematic diagram showing an oscillation device used in an oscillation inspection process, which is one process of a tuning fork crystal resonator manufacturing process, according to the present embodiment. FIG. 2 is a schematic configuration diagram of an oscillation tester and an oscillation device for a tuning-fork type crystal resonator according to the present embodiment. FIG. 3 is a schematic view showing an oscillation inspection process, which is one process of a tuning fork type crystal resonator manufacturing apparatus, according to a modification of the present embodiment. FIG. 4 is a data diagram showing experimental results in Example 1 and Comparative Example 1. FIG. 4A is a data diagram showing the experimental results of the first embodiment. FIG. 4B is a data diagram showing the experimental results of Comparative Example 1. FIG. 5 is a data diagram showing experimental results in the second embodiment. FIG. 6 is a table showing the experimental results in Example 3 and Comparative Example 3.

Explanation of symbols

2 Tuning fork type crystal resonator (tuning fork type piezoelectric vibration device)
4 Oscillator 41 Excitation Oscillator 42 Inspection Oscillator 43 Switching Unit

Claims (6)

An oscillation device for a tuning fork type piezoelectric vibration device that oscillates a tuning fork type piezoelectric vibration device,
An excitation oscillator for exciting the tuning fork type piezoelectric vibration device by outputting an oscillation signal having a resonance frequency of the tuning fork type piezoelectric vibration device or a frequency near the resonance frequency to the tuning fork type piezoelectric vibration device;
An inspection oscillator for oscillating a tuning fork type piezoelectric vibration device, and
A tuning fork type piezoelectric vibration device is excited by the excitation oscillator, and the excited tuning fork type piezoelectric vibration device is oscillated at a resonance frequency of the tuning fork type piezoelectric vibration device by the inspection oscillator. Oscillator of piezoelectric vibration device. The excitation oscillator and the inspection oscillator are connected via a switching unit,
2. The tuning fork type piezoelectric device according to claim 1, wherein the switching unit switches the connection between the excitation oscillator and the tuning fork type piezoelectric vibration device and the connection between the inspection oscillator and the tuning fork type piezoelectric vibration device. Oscillator of vibration device.   The oscillation of the tuning-fork type piezoelectric vibration device according to claim 2, wherein the switching of the connection from the excitation oscillator to the inspection oscillator by the switching unit with the tuning-fork type piezoelectric vibration device is continuously performed. apparatus.   4. The oscillation device for a tuning-fork type piezoelectric vibration device according to claim 1, wherein the oscillation device is detachably attached to an oscillation tester for the tuning-fork type piezoelectric vibration device.   5. The tuning fork type piezoelectric vibration device according to claim 1, wherein an arbitrary oscillation source that outputs an arbitrary oscillation signal is replaceably provided in the excitation oscillator. Oscillator. An oscillation method of a tuning fork type piezoelectric vibration device for oscillating a tuning fork type piezoelectric vibration device,
An oscillation process for excitation for exciting the tuning fork type piezoelectric vibration device by outputting an oscillation signal having a resonance frequency of the tuning fork type piezoelectric vibration device or a frequency near the resonance frequency to the tuning fork type piezoelectric vibration device, and oscillating the tuning fork type piezoelectric vibration device An oscillation process for inspection,
A tuning fork type piezoelectric vibration device is excited in the excitation oscillation step, and the tuning fork type piezoelectric vibration device excited in the inspection oscillation step is oscillated at a resonance frequency of the tuning fork type piezoelectric vibration device. Method of a piezoelectric vibration device of a type.

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