JP2008090071A5 - - Google Patents

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JP2008090071A5
JP2008090071A5 JP2006272058A JP2006272058A JP2008090071A5 JP 2008090071 A5 JP2008090071 A5 JP 2008090071A5 JP 2006272058 A JP2006272058 A JP 2006272058A JP 2006272058 A JP2006272058 A JP 2006272058A JP 2008090071 A5 JP2008090071 A5 JP 2008090071A5
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fourier transform
frequency filter
image
setting
measurement object
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JP4928894B2 (en
JP2008090071A (en
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Claims (7)

測定対象物を撮像した入力画像を取得するための画像取得手段と、
前記画像取得手段で取得した入力画像に対してフーリエ変換を行い、フーリエ変換画像を生成するためのフーリエ変換手段と、
前記フーリエ変換画像を表示するための表示手段と、
前記表示手段上で表示されたフーリエ変換画像に対して、周波数フィルタ処理を行うための設定として、周波数フィルタ処理を適用する範囲及び周波数フィルタの種別を設定するためのフィルタ設定手段と、
前記フィルタ設定手段で設定される周波数フィルタの適用範囲を、前記表示手段上で表示されるフーリエ変換画像に対してハイライト表示するためのハイライト手段と、
周波数フィルタの設定に従い、フーリエ変換画像に周波数フィルタ処理を行うためのフィルタ演算手段と、
前記フィルタ演算手段による周波数フィルタ処理後のフーリエ変換画像を逆フーリエ変換するための逆フーリエ変換手段と、
を備えることを特徴とする拡大観察装置。
Image acquisition means for acquiring an input image obtained by imaging the measurement object;
Fourier transform for performing Fourier transform on the input image acquired by the image acquisition means, and generating a Fourier transform image;
Display means for displaying the Fourier transform image;
Filter setting means for setting a frequency filter processing range and frequency filter type as settings for performing frequency filter processing on the Fourier transform image displayed on the display means;
Highlighting means for highlighting the application range of the frequency filter set by the filter setting means with respect to a Fourier transform image displayed on the display means;
Filter operation means for performing frequency filter processing on the Fourier transform image according to the setting of the frequency filter;
Inverse Fourier transform means for performing inverse Fourier transform on the Fourier transform image after the frequency filter processing by the filter operation means;
A magnifying observation apparatus comprising:
請求項1に記載の拡大観察装置であって、
前記フィルタ設定手段により設定する周波数フィルタの種別が、ハイパスフィルタ、ローパスフィルタを含み、周波数フィルタ処理を適用する範囲が、2次元フーリエ変換画像のX方向、Y方向、XY方向のいずれかを含むことを特徴とする拡大観察装置。
The magnification observation device according to claim 1,
The type of the frequency filter set by the filter setting means includes a high-pass filter and a low-pass filter, and the range to which the frequency filter processing is applied includes any of the X direction, Y direction, and XY direction of the two-dimensional Fourier transform image. Magnifying observation device characterized by
請求項に記載の拡大観察装置であって、
前記フィルタ設定手段により周波数フィルタ処理を適用する範囲としてXY方向が選択される際、前記ハイライト手段がマスク領域を、2次元フーリエ変換画像のXY座標の原点を中心とする同心円状に表示し、
前記フィルタ設定手段によりX方向が選択される際、前記ハイライト手段がマスク領域をY座標軸に対して対称かつ平行な直線で区画される矩形状に表示し、
前記フィルタ設定手段によりY方向が選択される際、前記ハイライト手段がマスク領域をX座標軸に対して対称かつ平行な直線で区画される矩形状に表示してなることを特徴とする拡大観察装置。
The magnification observation apparatus according to claim 2 ,
When the XY direction is selected as a range to which the frequency filter processing is applied by the filter setting unit, the highlight unit displays the mask region in a concentric circle centered on the origin of the XY coordinates of the two-dimensional Fourier transform image,
When the X direction is selected by the filter setting means, the highlight means displays the mask area in a rectangular shape defined by straight lines symmetrical and parallel to the Y coordinate axis,
When the Y direction is selected by the filter setting means, the highlight means displays the mask area in a rectangular shape defined by straight lines symmetrical and parallel to the X coordinate axis. .
共焦点光学系を介して測定対象物からの光を受光素子で受光し、その受光情報に基づいて前記測定対象物の表面の高さ情報及び光量情報を取得し、前記測定対象物の表面の画像を共焦点画像として表示可能な拡大観察装置であって、
各測定点において、光学系もしくは測定対象物を高さ方向に変化させながら合焦点位置を明るさに基づいて取得し、測定点を走査して共焦点画像を合成する共焦点光学系と、
前記共焦点光学系で撮像された共焦点画像を表示するための表示手段と、
前記共焦点画像に対してフーリエ変換を行い、フーリエ変換画像を生成するためのフーリエ変換手段と、
前記表示手段上で表示されたフーリエ変換画像に対して、周波数フィルタ処理を行うための設定として、周波数フィルタ処理を適用する範囲及び周波数フィルタの種別を設定するためのフィルタ設定手段と、
前記フィルタ設定手段で設定される周波数フィルタの適用範囲を、前記表示手段上で表示されるフーリエ変換画像に対してハイライト表示するためのハイライト手段と、
周波数フィルタの設定に従い、フーリエ変換画像に周波数フィルタ処理を行うためのフィルタ演算手段と、
前記フィルタ演算手段による周波数フィルタ処理後のフーリエ変換画像を逆フーリエ変換するための逆フーリエ変換手段と、
を備えることを特徴とする拡大観察装置。
Light from the measurement object is received by the light receiving element via the confocal optical system, and height information and light amount information of the surface of the measurement object are acquired based on the light reception information, and the surface of the measurement object is measured. A magnification observation apparatus capable of displaying an image as a confocal image,
At each measurement point, a confocal optical system that acquires an in-focus position based on brightness while changing the optical system or a measurement object in the height direction, scans the measurement point, and synthesizes a confocal image;
Display means for displaying a confocal image captured by the confocal optical system;
Fourier transform means for performing a Fourier transform on the confocal image and generating a Fourier transform image;
Filter setting means for setting a frequency filter processing range and frequency filter type as settings for performing frequency filter processing on the Fourier transform image displayed on the display means;
Highlighting means for highlighting the application range of the frequency filter set by the filter setting means with respect to the Fourier transform image displayed on the display means;
Filter operation means for performing frequency filter processing on the Fourier transform image according to the setting of the frequency filter;
Inverse Fourier transform means for inverse Fourier transforming the Fourier transform image after the frequency filter processing by the filter operation means;
A magnifying observation apparatus comprising:
測定対象物からの光を受光素子で受光し、その受光情報に基づいて前記測定対象物の光量情報を取得し、前記測定対象物の拡大画像を表示して観察可能な拡大観察装置の操作方法であって、
測定対象物を撮像した入力画像を取得する工程と、
前記撮像部で取得した入力画像に対してフーリエ変換を行い、生成されたフーリエ変換画像を表示手段に表示する工程と、
フーリエ変換画像に対して、周波数フィルタ処理を行うための設定として、周波数フィルタ処理を適用する範囲及び周波数フィルタの種別を設定し、設定された周波数フィルタの適用範囲を、前記表示手段上で表示されるフーリエ変換画像に対してハイライト表示する工程と、
周波数フィルタの設定に従い、フーリエ変換画像に周波数フィルタ処理を行う工程と、
周波数フィルタ処理後のフーリエ変換画像を逆フーリエ変換して出力する工程と、
を含むことを特徴とする拡大観察装置の操作方法。
A method of operating a magnification observation apparatus capable of receiving light from a measurement object by a light receiving element, obtaining light amount information of the measurement object based on the light reception information, and displaying an enlarged image of the measurement object for observation Because
Obtaining an input image obtained by imaging the measurement object;
Performing a Fourier transform on the input image acquired by the imaging unit, and displaying the generated Fourier transform image on a display means;
As a setting for performing the frequency filter processing on the Fourier transform image, a range to which the frequency filter processing is applied and a type of the frequency filter are set, and the set frequency filter application range is displayed on the display means. A step of highlighting the Fourier transform image,
Performing a frequency filter process on the Fourier transform image according to the setting of the frequency filter;
A process of inverse Fourier transforming and outputting the Fourier transform image after the frequency filter processing;
The operation method of the magnification observation apparatus characterized by including.
測定対象物からの光を受光素子で受光し、その受光情報に基づいて前記測定対象物の光量情報を取得し、前記測定対象物の拡大画像を表示して観察可能な拡大観察装置操作プログラムであって、
測定対象物を撮像した入力画像を取得する機能と、
前記撮像部で取得した入力画像に対してフーリエ変換を行い、生成されたフーリエ変換画像を表示手段に表示する機能と、
フーリエ変換画像に対して、周波数フィルタ処理を行うための設定として、周波数フィルタ処理を適用する範囲及び周波数フィルタの種別を設定し、設定された周波数フィルタの適用範囲を、前記表示手段上で表示されるフーリエ変換画像に対してハイライト表示する機能と、
周波数フィルタの設定に従い、フーリエ変換画像に周波数フィルタ処理を行う機能と、
周波数フィルタ処理後のフーリエ変換画像を逆フーリエ変換して出力する機能と、
をコンピュータに実現させることを特徴とする拡大観察装置操作プログラム。
A magnification observation device operation program that receives light from a measurement object by a light receiving element, acquires light amount information of the measurement object based on the received light information, and displays an enlarged image of the measurement object to allow observation There,
A function for acquiring an input image obtained by imaging a measurement object;
A function of performing Fourier transform on the input image acquired by the imaging unit and displaying the generated Fourier transform image on a display means;
As a setting for performing the frequency filter processing on the Fourier transform image, a range to which the frequency filter processing is applied and a type of the frequency filter are set, and the set frequency filter application range is displayed on the display means. A function for highlighting the Fourier transform image,
A function for performing frequency filter processing on the Fourier transform image according to the setting of the frequency filter,
A function to output the Fourier transform image after the frequency filter processing by performing an inverse Fourier transform;
Magnifying observation apparatus operating program, characterized in that a computer is realized.
請求項に記載されるプログラムを格納したコンピュータで読み取り可能な記録媒体又は記録した機器。 A computer-readable recording medium or a recorded device storing the program according to claim 6 .
JP2006272058A 2006-10-03 2006-10-03 Magnification observation apparatus, operation method of magnification observation apparatus, magnification observation apparatus operation program, computer-readable recording medium, and recorded apparatus Expired - Fee Related JP4928894B2 (en)

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JP2015039059A (en) * 2010-08-27 2015-02-26 株式会社東芝 Stereoscopic vision image processor, stereoscopic vision image processing method and stereoscopic vision image processing program
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