JP2008090071A - Magnifying observation apparatus, method and program for operating magnifying observation apparatus, computer-readable recording medium, and recorded apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a Fourier transformation interface which makes the relation between a Fourier-transformed image and a frequency filter easy to understand. <P>SOLUTION: A magnifying observation device comprises: a Fourier transforming means for generating the Fourier-transformed image of an input image acquired by an image acquiring means; a display means 4 for displaying the Fourier-transformed image; a filter setting means for setting a range wherein frequency filter processing is applied and the kind of the frequency filter as settings for frequency filter processing associated with the Fourier-transformed image displayed on the display means 4; a highlighting means for highlighting and displaying the application range of a frequency filter set by the filter setting means in the Fourier-transformed image displayed on the display means 4; a filter arithmetic means for performing the frequency filter processing associated with the Fourier-transformed image according to the settings of the frequency filter; and an inverse Fourier-transforming means for inversely Fourier-transforming the Fourier-transformed image after the frequency filter processing by the filter arithmetic means. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a magnification observation apparatus that performs Fourier transform, a method for operating a magnification observation apparatus, a magnification observation apparatus operation program, a computer-readable recording medium, and a recorded device.

  In various microscopes and observation devices such as observation microscopes, measurement microscopes, microscopes, etc., taking images of the measurement object (work), and then performing various image processing to perform the desired observation, analysis, and measurement This is a generally well-known method. The purpose of image processing is to remove unnecessary noise from the target image, extract only the part you want to focus on, raise the contrast, change the color for easy viewing, etc. It is to prepare for improvement. Examples of such image processing include smoothing, edge enhancement, noise removal, contour extraction, frequency filter, brightness adjustment, contrast adjustment, and the like. Among them, the frequency filter is one of the main technologies often used.

As the name suggests, the frequency filter is a filter that decomposes the target image into frequency components in the X-axis and Y-axis directions, emphasizes only specific frequency components, removes them by masking, and returns them to the image again. For example, if periodic fringes appear on the image due to periodic vibrations, only the fringes are selectively removed from the original image by masking the frequency portion corresponding to the fringes with the frequency filter described above. can do. Such an example is an example in which the frequency filter is remarkably effective. In addition, a so-called low-pass filter that cuts a high-frequency part to remove noise components, a so-called high-pass filter that cuts a low-frequency part to extract only contour information, and the like are often used as filters.
JP 2004-157410 A

  The frequency filter normally displays a Fourier transform image (power spectrum image) in order to leave the user with the setting of what to do with a specific frequency component. While viewing the Fourier transform image, the user obtains a desired image processing result by masking a necessary portion. However, the low-pass filter and the high-pass filter that are often used as frequency filters, the above-described Fourier transform image becomes a barrier for users who want to use them. This is because it is difficult for a user who has never seen a Fourier transform image to understand what the image is. I just wanted to use a low-pass filter or just want to try a high-pass filter, but I had to understand the meaning and handling of Fourier transform images. As a proposal for solving this problem, a method of completely separating the Fourier transform image and the low-pass / high-pass filter on the interface and handling them as separate image processing is also performed in image processing software or the like. This method certainly makes it easy to use a low-pass / high-pass filter. However, on the other hand, the opportunity to know effective usage of the frequency filter and the Fourier transform image is lost, and the functions of the software cannot be used up effectively. For this reason, a filter using a Fourier transform image (frequency filter) is conventionally used only by a specific skilled user, or can only be used as a filter for a specific application without showing a Fourier transform image. there were.

  The present invention has been made to solve such conventional problems. A main object of the present invention is to provide an interface that makes it easy to understand the relationship between a Fourier transform image and a frequency filter, and facilitates the use of frequency filter processing. Operation method of the magnification observation device, operation of the magnification observation device It is an object to provide a program, a computer-readable recording medium, and a recorded device.

Means for Solving the Problems and Effects of the Invention

  To achieve the above object, a first magnification observation apparatus of the present invention includes an image acquisition unit for acquiring an input image obtained by imaging a measurement object, and a Fourier transform for the input image acquired by the image acquisition unit. And a Fourier transform means for generating a Fourier transform image, a display means for displaying the Fourier transform image, and a setting for performing frequency filter processing on the Fourier transform image displayed on the display means Filter setting means for setting the frequency filter processing range and frequency filter type, and the frequency filter application range set by the filter setting means for the Fourier transform image displayed on the display means The frequency transform processing is performed on the Fourier transform image in accordance with the highlight means for highlighting and the frequency filter setting. It may comprise a fit of filter operation unit, and an inverse Fourier transform means for inverse Fourier transform of the Fourier transform image after frequency filtering by the filtering unit. As a result, the range to which the frequency filter is applied can be highlighted on the Fourier transform image, making it easier to visually understand the frequency filter processing, especially for users who are not familiar with frequency filter processing and Fourier transform. This makes it easy to grasp and allows the use of a frequency filter.

  In the second magnifying observation device, the highlight unit can display the masked area in a shaded manner on the Fourier transform image displayed on the display unit. Thereby, the mask area is shaded and displayed, and the remaining area and the area to be cut can be easily distinguished imagewise.

  In the third magnification observation apparatus, the type of the frequency filter set by the filter setting unit includes a high-pass filter and a low-pass filter, and the range to which the frequency filter processing is applied is the X direction, the Y direction, and the XY of the two-dimensional Fourier transform image. Any of the directions can be included.

  In the fourth magnifying observation apparatus, when the XY direction is selected as the range to which the frequency filter processing is applied by the filter setting unit, the highlight unit sets the mask region as the center and the origin of the XY coordinates of the two-dimensional Fourier transform image. When the X direction is selected by the filter setting unit, the highlight unit displays the mask area in a rectangular shape defined by straight lines symmetrical and parallel to the Y coordinate axis, and the filter setting unit displays Y. When the direction is selected, the highlight means can display the mask area in a rectangular shape defined by straight lines symmetrical and parallel to the X coordinate axis.

  The fifth magnifying observation apparatus can be configured to sequentially present setting items for frequency filter processing by the filter setting means and prompt the user to input setting items in an interactive manner. As a result, even a user who is not familiar with the setting of the frequency filter processing is given guidance by prompting the user to input items to be set and prompting input, and setting can be easily performed by setting according to this.

  In the sixth magnifying observation device, the image acquisition means can be a confocal microscope. Thereby, since the application range of the frequency filter with respect to a confocal image is displayed visually, even if the meaning of the applied filter is not understood, it can be made to grasp | ascertain a user imagely.

  The seventh magnifying observation device receives light from the measurement object via the confocal optical system by the light receiving element, acquires height information and light amount information of the surface of the measurement object based on the light reception information, A magnifying observation apparatus capable of displaying an image of the surface of a measurement object as a confocal image, and at each measurement point, the focal point position is changed based on the brightness while changing the optical system or the measurement object in the height direction. A confocal optical system that acquires and synthesizes a confocal image by scanning measurement points, a display means for displaying the confocal image captured by the confocal optical system, and a Fourier transform for the confocal image And a Fourier transform means for generating a Fourier transform image, and a range and frequency filter to which the frequency filter process is applied as a setting for performing the frequency filter process on the Fourier transform image displayed on the display means. Filter setting means for setting the type of data, highlight means for highlighting the application range of the frequency filter set by the filter setting means with respect to the Fourier transform image displayed on the display means, And a filter operation means for performing frequency filter processing on the Fourier transform image according to the setting of the frequency filter, and an inverse Fourier transform means for performing inverse Fourier transform on the Fourier transform image after the frequency filter processing by the filter operation means. Can do. As a result, since the range to which the frequency filter is applied can be highlighted on the Fourier transform image, the frequency filter processing can be easily grasped visually, and even users who are not familiar with frequency filter processing and Fourier transform can use the frequency filter. Easy to use.

  In the eighth operation method of the magnification observation apparatus, light from a measurement object is received by a light receiving element, light amount information of the measurement object is acquired based on the received light information, and an enlarged image of the measurement object is displayed. A method of operating a magnifying observation apparatus that can be observed, the step of acquiring an input image obtained by imaging a measurement object, and performing a Fourier transform on the input image obtained by the imaging unit, and displaying the generated Fourier transform image As a setting for performing the frequency filter processing on the step of displaying on the means and the Fourier transform image, the range to which the frequency filter processing is applied and the type of the frequency filter are set, and the set frequency filter application range is A step of highlighting the Fourier transform image displayed on the display means, and a step of performing frequency filter processing on the Fourier transform image according to the setting of the frequency filter. It may include a step of outputting the inverse Fourier transform of the Fourier transform image after frequency filtering. As a result, since the range to which the frequency filter is applied can be highlighted on the Fourier transform image, the frequency filter processing can be easily grasped visually, and even users who are not familiar with frequency filter processing and Fourier transform can use the frequency filter. Easy to use.

  The ninth magnification observation apparatus operation program receives light from the measurement object by the light receiving element, acquires light amount information of the measurement object based on the received light information, displays an enlarged image of the measurement object, and observes it A magnifying observation apparatus operation program capable of acquiring an input image obtained by imaging a measurement object, and performing Fourier transform on the input image obtained by the imaging unit, and using the generated Fourier transform image as a display means As a setting for performing the frequency filter processing on the Fourier transform image and the function to display, the range to which the frequency filter processing is applied and the type of the frequency filter are set, and the set frequency filter application range is displayed. Performs frequency filter processing on the Fourier transform image according to the function to highlight the Fourier transform image displayed above and the frequency filter settings. Function and, thereby realizing the function of outputting to the inverse Fourier transform of the Fourier transformed image after the frequency filtering to the computer. As a result, since the range to which the frequency filter is applied can be highlighted on the Fourier transform image, the frequency filter processing can be easily grasped visually, and even users who are not familiar with frequency filter processing and Fourier transform can use the frequency filter. Easy to use.

  The computer-readable recording medium or the recorded device that stores the tenth program stores the program. CD-ROM, CD-R, CD-RW, flexible disk, magnetic tape, MO, DVD-ROM, DVD-RAM, DVD-R, DVD + R, DVD-RW, DVD + RW, Blu-ray (registered) Trademarks), HD DVD and other magnetic disks, optical disks, magneto-optical disks, semiconductor memories and other media that can store programs. The program includes a program distributed in a download manner through a network line such as the Internet, in addition to a program stored and distributed in the recording medium. Further, the recorded devices include general-purpose or dedicated devices in which the program is implemented in a state where it can be executed in the form of software, firmware, or the like. Furthermore, each process and function included in the program may be executed by computer-executable program software, or each part of the process or hardware may be executed by hardware such as a predetermined gate array (FPGA, ASIC), or program software. And a partial hardware module that realizes a part of hardware elements may be mixed.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment described below includes a magnifying observation apparatus, a magnifying observation apparatus operation method, a magnifying observation apparatus operation program, a computer-readable recording medium, and a recorded apparatus for embodying the technical idea of the present invention. The present invention does not specify the magnification observation apparatus, the operation method of the magnification observation apparatus, the magnification observation apparatus operation program, the computer-readable recording medium, and the recorded device as follows. Further, the present specification by no means specifies the members shown in the claims to the members of the embodiments. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are not intended to limit the scope of the present invention unless otherwise specified, and are merely explanations. It is just an example. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

Hereinafter, as an example of an image processing apparatus, an example in which a Fourier filter is applied to a confocal image obtained with a confocal microscope and a frequency filter is applied will be described. Note that the image acquisition means for acquiring the input image is not limited to the confocal microscope or the confocal optical system, and other microscopes or magnification observation apparatuses can also be used. For example, the present invention can be applied to electron microscopes such as SEM, TEM, and other charged particle beam devices, optical microscopes, atomic force microscopes, electrostatic force microscopes, near-field microscopes, digital microscopes, and the like.
(Embodiment 1)

  Since the confocal microscope scans the surface of the measurement object using laser light, it is also called a confocal laser microscope, a confocal scanning microscope, or the like. A confocal image obtained with a confocal microscope is also called a laser image. In a confocal microscope, light from a measurement object such as a sample or workpiece is received by a light receiving element via a confocal optical system, and an ultra-deep image of a sample (an image with a very deep depth of focus) based on the amount of received light. ) And height distribution. When the relative distance between the sample placed on the stage and the objective lens is changed in the direction of the optical axis, the amount of light incident on the light receiving element via the confocal optical system, that is, the amount of received light changes, and the surface of the sample is changed. The amount of light received is maximized when the subject is in focus. Therefore, the height information of the surface of the sample is calculated from the relative distance between the sample and the objective lens when the maximum amount of received light is obtained, and the height distribution of the surface of the sample is acquired by scanning the surface of the sample with light. be able to.

  The acquired height distribution is displayed on the screen of the display device by, for example, three-dimensional display. Alternatively, the height distribution replaced with a luminance distribution or a color distribution is displayed on the screen. A CRT (Cathode Ray Tube) or LCD (Liquid Crystal Display) is used as a display device, and a confocal microscope is configured by connecting a control controller, a display device, a console, and the like to the confocal microscope.

  Also, by combining the information on the amount of light received when each point (pixel) on the sample surface is in focus (that is, the maximum luminance information of each pixel), a black and white image of the sample surface with a very deep focal depth can be obtained. Can do. This image is a so-called ultra-deep image.

  Furthermore, by separating the light from the sample irradiated with white light from the confocal optical system and receiving it with a color imaging device, a color image of the sample surface in the same range as the ultra-deep image can be obtained. Unlike the ultra-deep image, this color image has a shallow depth of focus, but by connecting pixel data at the in-focus position of the color image based on the height distribution information, a color image (color It is also possible to obtain a color image with a deep focal depth by performing a synthesis process that replaces the luminance signal of the color peak image with the luminance signal of the ultra-deep image.

  FIG. 1 shows a schematic configuration of the confocal microscope system according to the first embodiment of the present invention. 2 is an external perspective view of this system configuration, and FIG. 3 is a perspective view of the confocal microscope main body. The confocal microscope system 100 includes a confocal microscope main body 1 having a confocal optical system 10 and a non-confocal optical system 50, and analog signals obtained by the confocal optical system 10 and the non-confocal optical system 50, respectively, as digital signals. A controller 2 including a first AD converter 41, a second AD converter 42, a control unit 43 that performs digital signal processing, and the like, and an operation unit 3 and a display unit 4 connected to the controller 2. ing. The operation means 3 is connected to an input means 3A.

  First, the confocal optical system 10 of the confocal microscope and its signal processing will be described. The confocal optical system 10 includes a light source 11 for irradiating a sample WK with monochromatic light (for example, laser light), a first collimating lens 12, a polarizing beam splitter 13, a quarter wavelength plate 14, a horizontal / vertical deflecting device 15, A first relay lens (fθ lens) 16, a second relay lens (tube lens) 17, an objective lens 18, an imaging lens (pinhole lens) 19, a pinhole plate 20, a light receiving element 21 and the like are included.

  As the light source 11, for example, a semiconductor laser that emits violet laser light or red laser light is used. The light source 11 is driven by a laser driving circuit. The laser driving circuit is controlled by the control unit 43 of the controller 2. The laser light emitted from the light source 11 passes through the first collimating lens 12, the optical path is bent by the polarization beam splitter 13, and passes through the quarter wavelength plate 14. Thereafter, the light is deflected in the horizontal (lateral) direction and the vertical (longitudinal) direction by the horizontal / vertical deflecting device 15, passes through the first relay lens 16 and the second relay lens 17, and is placed on the stage 30 by the objective lens 18. It is condensed on the surface of the placed sample WK.

  The horizontal / vertical deflecting device 15 is composed of a galvanometer mirror, and scans the surface of the sample WK with the laser light by deflecting the laser light in the horizontal and vertical directions. For convenience of explanation, the horizontal direction is referred to as the X direction, and the vertical direction is referred to as the Y direction. The objective lens 18 is driven in the Z direction (optical axis direction) by the objective lens moving mechanism. The objective lens moving mechanism is also controlled by the control unit 43. Thereby, the relative position in the optical axis direction of the focus of the objective lens 18 and the sample WK can be changed.

  Note that scanning of a sample by light is not limited to two-dimensional scanning by horizontal deflection and vertical deflection, and various scanning methods can be considered. For example, if a cylindrical lens is used to generate light that is elongated in the X direction (slit light) and is deflected in the Y direction, two-dimensional scanning is possible.

  Further, the relative position of the focal point of the objective lens 18 and the sample WK in the optical axis direction can be changed by other methods. For example, instead of or in addition to driving the objective lens 18 in the Z-axis direction, the stage 30 may be driven in the Z-axis direction. Alternatively, a configuration in which the focal point of the objective lens 18 is moved in the Z-axis direction by inserting a lens whose refractive index changes between the objective lens 18 and the sample WK is also possible.

  The stage 30 can be displaced in the X, Y, and Z directions by manual operation. In the present embodiment, a stage manual operation mechanism 31 for manually moving the stage is provided. Specifically, as shown in FIG. 3, an X direction moving knob 32 and a Y direction moving knob 33 for moving the stage in the XY direction, and a Z direction moving knob 34 for moving the stage in the Z direction are provided. The X-direction moving knob 32 and the Y-direction moving knob 33 are configured in dial shapes having different diameters with the knob rotating as the same axis, making it easy to adjust the X-Y directions together. On the other hand, the Z-direction moving knob 34 has a dial with a large amount of movement and a dial with a small amount of movement arranged on the same axis so that rough focus adjustment and fine focus adjustment can be easily performed.

  The laser beam reflected by the sample WK follows the above optical path in reverse. That is, it passes through the objective lens 18, the second relay lens 17, and the first relay lens 16, and again passes through the quarter wavelength plate 14 via the horizontal / vertical deflection device 15. As a result, the laser beam passes through the polarization beam splitter 13 and is collected by the imaging lens 19. The condensed laser light passes through the pinhole of the pinhole plate 20 disposed at the focal position of the imaging lens 19 and enters the light receiving element 21. The light receiving element 21 is composed of, for example, a photomultiplier tube (PMT: photomultiplier tube) or a photodiode (PD), and converts the amount of received light into an electrical signal. An electric signal corresponding to the amount of received light is given to the first AD converter 41 via the first received light signal processing circuit 22 that constitutes an output amplifier and a control circuit for the received light sensitivity (PMT gain) of the PMT, and is converted into a digital value. The Further, the pinhole plate 20 can be provided with a slit instead of the pinhole. A pseudo confocal image can also be obtained by combining a slit and a light receiving element such as a CCD.

  With the confocal optical system 10 configured as described above, the height (depth) information of the sample WK can be acquired. The principle will be briefly described below. As described above, when the objective lens 18 is driven in the Z direction (optical axis direction) by the objective lens moving mechanism 40, the relative distance between the focal point of the objective lens 18 and the sample WK in the optical axis direction changes. Then, when the focal point of the objective lens 18 is focused on the surface of the sample WK, the laser light reflected by the surface of the sample WK is condensed by the imaging lens 19 through the optical path described above, and most of the laser light is pinned. Passes through the pinhole of the hall plate 20. Accordingly, at this time, the amount of light received by the light receiving element 21 is maximized. On the contrary, in a state where the focus of the objective lens 18 is deviated from the surface of the sample WK, the laser light condensed by the imaging lens 19 is focused at a position deviated from the pinhole plate 20, and therefore, some lasers. Only light can pass through the pinhole. As a result, the amount of light received by the light receiving element 21 is significantly reduced.

  Therefore, if the received light amount of the light receiving element 21 is detected while driving the objective lens 18 in the Z direction (optical axis direction) at any point on the surface of the sample WK, the objective lens 18 when the received light amount becomes maximum. The position in the Z direction (the relative position of the focal point of the objective lens 18 and the sample WK in the optical axis direction) can be uniquely determined as height information.

  Actually, every time the objective lens 18 is moved by one step (one pitch), the horizontal / vertical deflection device 15 scans the surface of the sample WK to obtain the amount of light received by the light receiving element 21. When the objective lens 18 is moved in the Z direction from the lower end to the upper end of the moving range in the height direction, received light amount data that changes in accordance with the position in the Z direction is obtained for each point (pixel) in the scanning range.

  FIG. 4 is a graph showing an example of received light amount data that changes according to the position of the objective lens 18 in the Z direction. Based on such received light amount data, the maximum received light amount and the position in the Z direction at that time are obtained for each point (pixel). Therefore, the distribution of the surface height of the sample WK on the XY plane can be obtained. This process is executed by an external computer of the operation means 3.

  The obtained surface height distribution information can be displayed on the display means 4 of the operation means 3 by several methods. For example, the height distribution (surface shape) of the sample can be displayed three-dimensionally by three-dimensional display. Alternatively, it can be displayed as a two-dimensional distribution of brightness by converting the height data into luminance data. By converting the height data into color difference data, the height distribution can also be displayed as a color distribution.

Further, a surface image (black and white image) of the sample WK is obtained from a luminance signal that uses the received light amount obtained for each point (pixel) in the XY scanning range as luminance data. If a luminance signal is generated by using the maximum amount of received light in each pixel as luminance data, an ultra-deep image having a very deep focal depth in focus at each point having a different surface height can be obtained. In addition, when the height (Z-direction position) at which the maximum light reception amount is obtained at any target pixel is fixed, the light reception amount of the pixel of the target pixel portion and the portion having a large difference in height is significantly reduced. A bright image is obtained only at the same height.
(Non-confocal optical system 50)

  Next, the non-confocal optical system 50 provided in the confocal microscope and its signal processing will be described. The non-confocal optical system 50 includes a white light source 51, a second collimating lens (condenser lens) 52, a first half mirror 53, and a second half for irradiating the sample WK with white light (illumination light for photographing a color image). A mirror 54, a second light receiving element 55, and the like are included. Further, the non-confocal optical system 50 shares the objective lens 18 of the confocal optical system 10, and the optical axes of the two optical systems 10 and 50 are partially coincident.

  For example, a white lamp is used as the white light source 51, but natural light or room light may be used without providing a special light source. The white light emitted from the white light source 51 passes through the second collimating lens 52, the optical path is bent by the first half mirror 53, and is condensed on the surface of the sample WK placed on the stage 30 by the objective lens 18.

  The white light reflected by the sample WK passes through the objective lens 18, the first half mirror 53, and the second relay lens 17, is reflected by the second half mirror 54, and enters the second light receiving element 55 to form an image. . The second light receiving element 55 is provided at a position conjugate to or close to the conjugate with the pinhole of the pinhole plate 20 of the confocal optical system 10. As the second light receiving element 55, an image sensor such as a color CCD or CMOS or an area sensor can be used. A color optical image (hereinafter referred to as “camera image”) picked up by the second light receiving element 55 is read by the second light receiving signal processing circuit 56, and its analog output signal is given to the second AD converter 42. , Converted to a digital value. The camera image obtained in this way is displayed on the display means 4 of the operation means 3 as an enlarged color image for observation of the sample WK.

  Further, by combining the ultra-deep image obtained by the confocal optical system 10 and the normal camera image obtained by the non-confocal optical system 50, a color super-depth with a deep focus depth that is in focus at all pixels. Images can also be generated and displayed. For example, a color ultra-deep image can be easily generated by replacing the luminance signal constituting the camera image obtained by the non-confocal optical system 50 with the luminance signal of the ultra-deep image obtained by the confocal optical system 10. Can do.

  The operation means 3 also controls processing related to the camera image as described above. The operation means 3 is connected to an input means such as a console (display console) and a display means 4 such as a CRT (cathode ray tube) and an LCD (liquid crystal display device). A pointing device such as a mouse is also connected as input means.

The controller 2 of the confocal microscope system 100 is provided with an interface for connecting an external computer system such as a personal computer. By connecting an external computer system in which dedicated software for controlling the microscope system 100 is installed to the controller 2 as the operation means 3, an ultra-depth image, a color ultra-depth image, and a height are obtained from the acquired image data of the sample WK. Distribution information and the like can be obtained.
(Embodiment 2)

  In the first embodiment, the non-confocal image is acquired using the white light source 51 and the second collimating lens 52. On the other hand, the present invention is not limited to this example, and a monochrome non-confocal image can be obtained without using a white light source or the like in the non-confocal optical system. FIG. 5 shows a block diagram of a confocal microscope system 200 according to the second embodiment that employs such a configuration. In this figure, the same members as those in FIG.

  In the example of FIG. 5, a white light source is not used to acquire a non-confocal image, and a laser light source used to acquire a confocal image is also shared to acquire a non-confocal image. . Thereby, the white light source and the condenser lens can be omitted, and the optical system can be designed compactly.

  In the example of FIG. 1, the non-confocal optical system 50 is disposed between the second relay lens 17 and the objective lens 18, but in the example of FIG. 5, the non-confocal optical system 50 is replaced with the polarization beam splitter 13. A second half mirror 54 is disposed between the imaging lenses 19. In this way, the non-confocal optical system 50 is brought close to the confocal optical system 10, more specifically, the second light receiving element 55 is brought close to the light receiving element 21, and the optical system used by both is shared. Optical axis alignment and image alignment are not required, and characteristics such as aberration coincide with each other, so that there is substantially no mismatch between the two images.

  In the confocal microscope systems 100 and 200 according to the first and second embodiments, the confocal microscope main body 1 is connected to the controller 2, and an external computer is connected to the controller 2 as the operation means 3 to perform data communication. A confocal image and a camera image measured by the microscope main body 1 are captured by an external computer, processed and processed, and a confocal microscope is set and operated from the external computer. An external computer monitor can be used as the display means 4. A general-purpose computer can be used as the external computer, and a confocal microscope operating program can be installed to function as a confocal microscope operating device. In the above example, the confocal microscope main body and the controller are separate members, but they can also be integrated. Or you may comprise a controller integrally with an operation means.

The operation means 3 functions as an image processing device. Here, the operation unit 3 includes an image data input unit 44 for inputting image data such as a confocal image from the outside, an image processing calculation unit 45 for performing various image processes, and image data to the display unit 4. A display image generation unit 46 for display is provided. By using a computer in which the confocal microscope operation program is installed as the operation means 3, the functions of the image data input unit 44, the image processing calculation unit 45, and the display image generation unit 46 can be realized by the computer.
(Confocal microscope operation program)

In this specification, a confocal microscope is a system that performs measurement and display of confocal images, as well as an apparatus that performs input / output, display, calculation, communication, and other processing related to confocal image measurement and display in hardware. It is not limited to the method. An apparatus and method for realizing processing by software are also included in the scope of the present invention. For example, software or programs, plug-ins, objects, libraries, applets, scriptlets, compilers, modules, macros that run on specific programs, etc. are incorporated into general-purpose circuits or computers, or text display and text display format assignment settings themselves or this A general-purpose or dedicated computer, workstation, portable electronic device, or other electronic device that can perform the processing related to the above is also included in at least one of the confocal microscope and the confocal microscope operation program of the present invention. In this specification, the program itself is also included in the confocal microscope. In addition, this program is not limited to the one used alone, but is provided as a service in an environment that functions as a part of a specific computer program, software, service, etc., an aspect that is called and functions when necessary, and an environment such as an OS. It can also be used as a mode, a mode that operates resident in the environment, a mode that operates in the background, and other support programs.
(Connection, communication form)

Computers and controllers used in the embodiments of the present invention, microscopes and other computers connected for operation, control, input / output, display, various processing, etc., or connection with other peripheral devices such as printers, For example, IEEE1394, RS-232x, RS-422, RS-485, RS-232x, RS-422, RS-423, RS-485, serial connection such as USB, parallel connection, or 10BASE-T, 100BASE-TX, 1000BASE It is possible to communicate by electrically connecting via a network such as -T. The connection is not limited to a physical connection using a wire, but may be a wireless connection using a wireless LAN such as IEEE 802.1x or OFDM, radio waves such as Bluetooth, infrared rays, optical communication, or the like. Furthermore, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like can be used as a recording medium for exchanging data or storing settings.
(Image processing program)

6 to 22 show an example of a user interface screen of an image processing program that applies a frequency filter to a Fourier transform image as an example of the magnification observation apparatus operation program. This image processing program applies a frequency filter such as a high-pass filter and a low-pass filter to a Fourier transform image obtained by performing a Fourier transform on an input image such as a confocal image in advance, and further performs an inverse Fourier transform to input the image. Convert to image. As a result, image processing such as noise removal and smoothing can be performed on an input image such as a confocal image.
(Image display area 61)

In the example of FIG. 6, the user interface screen of the image processing program includes an image display area 61 arranged on the left side of the screen and an operation area 62 arranged on the right side thereof. In the image display area 61, a Fourier transform image FG is displayed. Here, the frequency is indicated by XY coordinates, and the color is displayed for each pixel so that the higher the power spectrum at the frequency, the higher the red, and the lower the power spectrum. In the example of FIG. 6, it can be seen that there are many red dots near the center of the coordinate axis, and the frequency distribution is concentrated in a low band.
(Operation area 62)

The operation area 62 includes a mask field 110 for selecting a mask type, a detailed setting field 111 for displaying setting items in accordance with the selected mask type, and a portion designated by the mouse cursor on the image display area 61. An enlarged display column 112 for enlarged display and a calculation execution column 113 for calculation execution are provided. In the mask column 110, either a frequency filter or a mask shape designation can be selected with a radio button as a mask means for designating a mask region.
(Mask area designation means)

  When the mask shape designation is selected here, as shown in FIG. 7, a mask shape designation field 114 is displayed, and a specific area of the Fourier transform image FG is masked by the mask area designation means. Here, concentric circles, rectangles, and brushes can be selected as the shape of the mask region. As mask region designation means provided in the mask shape designation column 114, a “concentric circle” button 114a, a “rectangular” button 114b, and a “brush” button 114c are used. By pressing one of them, the mask shape corresponding to the image display area 61 is displayed. For example, when the “rectangular” button 114b is pressed, a rectangular mask region MR appears symmetrically with respect to the origin of the coordinate axes as shown in FIG. The size of the mask region MR can be arbitrarily adjusted by operating the mouse. For example, methods such as operating handles appearing at the four corners of a rectangular mask region or dragging and moving the mask region can be used as appropriate. The “concentric circle” button 114a can apply a concentric mask region having the origin as the central axis. Further, with the “brush” button 114c, a locus traced with the mouse cursor can be set as a mask area. As described above, since the mask area can be set by the pointing device, the area desired by the user can be easily set as the mask area without setting a difficult mathematical formula or setting a large number of parameters. The function of simultaneously displaying the inverse Fourier transform image to which the mask region is adapted, that is, the image to which the filter is applied will be described later. Needless to say, the present invention can also be applied to the setting of a low-pass filter or the like.

  Further, in the lower part of the mask area designating means, the set mask area is selected in reverse, that is, an “invert” button 114d for switching from the inside of the mask area to the designation outside the frame, in order to release the set mask area "Clear" button 114e and "Add" button 114f for further adding a mask area are provided. By using these, the mask region setting operation can be facilitated.

  In addition, in the lower part of these, a “file save” button 114g for saving the data (size and position) of the set mask area as a file and saving it, and for calling up the data of the saved mask area A “file read” button 114h is also provided. Thereby, the mask area once set can be reused, and convenience such as selecting and using a mask area registered in advance can be improved.

When the mask area is designated, the “filtering” button 113a in the calculation execution column 113 is pressed to execute the frequency filter process, and the processed Fourier transform image FG is displayed in the image display area 61. If the “Preview” button 113b is pressed even before the “Calculation execution” button 113a is pressed, an image image subjected to frequency filter processing is previewed on the original image. The preview display can be displayed by providing a preview field in another window or the like in addition to the image display field. If the “reset” button 113c is pressed, the original Fourier transform image FG can be restored even after the mask region setting and frequency filter processing.
(Power spectrum adjustment means)

On the other hand, in the lower part of the image display area 61, a power spectrum adjustment slider 115a is provided in the power spectrum column 115 as power spectrum adjustment means for adjusting the color display of the power spectrum of the Fourier transform image FG. The power spectrum represents the intensity for each frequency in the Fourier transform image FG. For example, when displayed in monochrome, the intensity is higher as it is brighter and the intensity is lower as it is darker. In order to make this state easier to understand, in the example of FIG. 8 and the like, the high intensity portion is colored and displayed so that the low portion is blue. By adjusting the power spectrum adjustment slider 115a, it is possible to adjust to which range of the power spectrum intensity the blue to red gradation is assigned. For example, it is adjusted so that it slides to the right and turns red overall, and slides to the left to turn blue. Thereby, the user can freely adjust the visibility of the power spectrum.
(Scale switching means)

  Further, on the right side of the power spectrum adjustment slider 115a, a pull-down menu 115b is provided as scale switching means for switching the scale of the XY axes for displaying the Fourier transform image FG, and “linear scale” or “Log scale” can be selected. In the Fourier transform image FG displayed in the image display area 61, the horizontal axis and the vertical axis are displayed as frequencies, and the frequency axis is switched between linear scale display and log (logarithmic) scale display. be able to.

  After performing frequency filter processing in this way, inverse Fourier transform is performed to reconvert to the original input image (here, a confocal image), thereby obtaining a confocal image subjected to specific processing. For example, when the low pass filter is applied to the original image CI1 of the confocal image of FIG. 9, the image CI2 of FIG. 10 is obtained, and when the high pass filter is applied, the image CI3 of FIG. 11 is obtained.

  Microscope images represented by confocal microscope images are often subjected to image processing for noise removal after acquisition. As one of the methods, there is a frequency filter, but since it is difficult to determine which frequency should be removed, a Fourier transform image has been displayed conventionally.

However, even a Fourier transform image is difficult to understand for beginners, and it was impossible to grasp which frequency should be cut. Therefore, in this embodiment, it is easy to visually understand which part of the Fourier change image is subjected to the filter with respect to the setting such as low pass and high pass.
(Frequency filter)

When a frequency filter is selected in the mask column 110, a screen as shown in FIG. 6 is switched. The detailed setting field 111 of the operation area 62 changes, and a frequency filter field 116 is provided as a mask area designating means. In the frequency filter column 116, a frequency filter selection unit 116a, a filter direction selection unit 116b, and a filter strength adjustment unit 116c are provided. In the frequency filter selection unit 116a, the type of frequency filter such as a high-pass filter and a low-pass filter can be selected from a pull-down menu. Further, the filter direction selection unit 116b can select a direction to apply the frequency filter from the pull-down menu, such as the X direction, the Y direction, and all directions. Further, the filter strength adjustment unit 116c can continuously adjust the strength of the frequency filter with a slider.
(High pass filter)

  In the example of FIG. 6, all directions of the high-pass filter are selected in the frequency filter column 116, and in the image display area 61 according to this setting, the application range of the frequency filter, that is, the area to be cut by masking is shaded. Is displayed. Here, since it is a high-pass filter, the low-frequency region, that is, the region near the origin of the coordinate axis is masked. In FIG. 6, since the slider of the filter strength adjustment unit 116c is set near weak, the filter application range (mask region MR) is displayed in a small circle centered on the origin of the coordinate axis. As shown in FIG. 14, it can be confirmed that the concentric radius indicating the filter application range increases as the slider is operated in a stronger direction, and the filter application range becomes wider. Thereby, since the user can visually confirm the application range of the frequency filter, the user can use the filter without knowing the meaning of the filter. When the high-pass filter is applied, the confocal image changes from the image CI1 shown in FIG. 9 to the image CI3 shown in FIG. 11, and the edge portion is emphasized and the other portions are cut. Note that a high-pass filter that is set may be applied in accordance with the movement of the slider, and the image after inverse Fourier transform may be displayed simultaneously in synchronization with the setting. This makes it easier for the user to set a more optimal filter accurately.

Here, an example in which the concentric mask region MR is designated has been described. However, the mask shape is not limited to this as long as it is an equivalent mask shape in the X direction and the Y direction. For example, a rhombus whose apex is located on the X axis and the Y axis Shapes can also be used.
(Low-pass filter)

  On the other hand, FIGS. 15 to 18 show examples in which the low-pass filter is applied in all directions. In contrast to the high-pass filter, the low-pass filter is a filter that removes high-frequency components. In the example of FIG. 15, a position far from the coordinate axis, that is, a region outside the concentric circle centered on the origin is cut. This is indicated by a shaded display in the image display area 61 of FIG. Also in this example, the closer the slider of the filter strength adjustment unit 116c is from weak to strong, the wider the cut range, that is, the smaller the concentric circle and the wider the filter range outside the circle visually. I can confirm. When the low-pass filter is applied, the confocal image changes from the image CI1 shown in FIG. 9 to the image CI2 shown in FIG. 10, and becomes a smoothed image with the noise portion removed.

In this way, the range in which each filter is applied can be visually shown to the user, and the user can obtain an advantage of grasping the effect of the filter in an image without knowing the meaning of the filter.
(Filters in the X-axis and Y-axis directions)

  In the above description, the example in which the filter is applied to the two-dimensional image symmetrically with respect to the X axis and the Y axis, that is, in all directions has been described. However, the present invention is not limited to this, and the frequency filter can be applied only in either the X-axis or Y-axis direction. FIG. 19 shows an example in which the low-pass filter is applied only in the X direction. Thus, if a low-pass filter that passes only a low frequency component and cuts a high frequency component is applied only in the X direction, a component having a high frequency in the X axis direction is cut, that is, symmetrical with respect to the Y axis of the coordinate axis. It can be confirmed by shading in the image display area 61 that the outer side is cut while leaving the area partitioned by straight lines parallel to the Y axis. Similarly, in the example in which the low-pass filter is applied only in the Y-axis direction as shown in FIG. 20, a high frequency component in the Y-axis direction is cut, that is, symmetrical with respect to the X-axis, with a straight line parallel to the X-axis. It can be confirmed by shading in the image display area 61 that the outside area is cut while leaving the partitioned area.

  On the other hand, the example of FIG. 21 shows an example in which a high-pass filter that passes only high-frequency components and cuts low-frequency components is applied in the X direction. Thereby, the image display area 61 is cut so that the low frequency component is cut in the X-axis direction, that is, the inside of the area partitioned by the straight line parallel to the Y-axis is cut symmetrically with respect to the Y-axis and the outside is left. Is shaded. The example of FIG. 22 shows an example in which a high-pass filter is applied in the Y direction. Here, the low frequency component in the Y axis direction, that is, the inner side divided by straight lines parallel to the X axis and symmetrical to the X axis is shown. The state of cutting can be visually confirmed on the image display area 61. In this way, the low-pass filter and the high-pass filter can be applied independently only in either the X-axis or Y-axis direction.

As described above, the mask region MR is displayed so as to overlap the Fourier transform image FG in the image display region 61, so that the correlation between the strength of the frequency filter and the size of the mask region MR on the Fourier transform image FG is intuitive. It is easy to understand, and even a user who does not understand the meaning of the frequency filter can easily use these filters. Furthermore, since the Fourier transform image can be handled naturally, there is a possibility that a more advanced mask region MR can be specified in the future.
(Frequency filter processing procedure)

  The procedure for applying a frequency filter to the Fourier transform image FG will be described below based on the flowchart of FIG. Here, a procedure from applying the low-pass filter to the confocal image CI1 shown in FIG. 9 and applying the low-pass filter to the image shown in FIG. 10 or applying the high-pass filter to the image shown in FIG. First, in step S1, an input image to be processed is read. Here, the confocal image observed with the confocal microscope is read by the image data input unit 44 of the image processing unit and loaded into the memory of the image processing calculation unit 45. Next, in step S2, the read image data is Fourier transformed to create a Fourier transform image (power spectrum image) FG. In step S3, a mask region MR is designated on the Fourier transform image FG. The mask area MR is designated by the mask area designation means described above. In step S4, a process for removing data in the designated mask region MR is performed. In the example of FIG. 6 etc., the image processing calculation part 45 performs a frequency filter process. Further, in step S5, the image processing calculation unit 45 performs inverse Fourier transform on the processed Fourier transform image FG to return to the original confocal image, and displays the processed image data on the display unit 4 in step S6. In this way, the frequency analysis is performed on the input image CI1 of FIG. 9 which is a confocal image, and after the frequency component of the image data is detected, the inverse Fourier transform is further performed as the Fourier transform image FG to which the frequency filter is applied. Perform image processing.

  Although the reflection type confocal microscope has been described above, the present invention can also be applied to a transmission type confocal microscope. In the case of a transmission type microscope, laser light from the confocal optical system 10 and white light from the non-confocal optical system 50 are irradiated from the back surface of the sample. The light source of the confocal optical system 10 may include not only a monochromatic light source including a laser light source but also a plurality of wavelengths. The light source of the non-confocal optical system 50 can be replaced with natural light or room light.

  Furthermore, the present invention is not limited to confocal microscope images, and is a normal optical microscope, a digital microscope, a charged particle beam device such as a laser scanning microscope or a length measuring SEM, a scanning tunneling microscope (STM) or an interatomic device. It can also be used for electron microscope images obtained with a force microscope (AFM).

  A transmission electron microscope or a scanning electron microscope using an electron beam is a charged particle beam apparatus that obtains an observation image by detecting a signal obtained by irradiating a sample to be observed with a charged particle beam. For example, an electron microscope freely refracts the traveling direction of electrons, and an imaging system such as an optical microscope is designed electro-optically. Electron microscopes include a transmission type that forms an image of electrons that have passed through a sample or specimen using an electron lens, a reflection type that forms an image of electrons reflected on the sample surface, and scans the sample surface with a focused electron beam. There are a scanning electron microscope that forms an image using secondary electrons from each scanning point, and a surface emission type (field ion microscope) that forms an image of electrons emitted from a sample by heating or ion irradiation.

  As an example of an electron microscope (EM), a scanning electron microscope (SEM) scans secondary electrons and reflected electrons generated when a sample to be observed is irradiated with a thin electron beam (electron probe). This is an apparatus for taking out mainly using a detector such as a secondary electron detector or a backscattered electron detector and displaying it on a display screen such as a cathode ray tube or an LCD to mainly observe the surface form of the sample. On the other hand, a transmission electron microscope (TEM) transmits an electron beam through a thin film sample, and at that time, electrons scattered and diffracted by atoms in the sample are obtained as an electron diffraction pattern or a transmission electron microscope image. Can mainly observe the internal structure of the substance.

  When an electron beam is irradiated onto a solid sample, it is transmitted through the solid by the energy of the electrons. At that time, due to the interaction with the nuclei and electrons that make up the sample, elastic collision, elastic scattering, and energy loss occur. Causes elastic scattering. By inelastic scattering, electrons in the shell of the sample element are excited, X-rays are excited, secondary electrons are emitted, and the corresponding energy is lost. The amount of secondary electrons emitted varies depending on the angle of collision. On the other hand, the reflected electrons scattered back by elastic scattering and emitted again from the sample are emitted in an amount specific to the atomic number. The SEM uses these secondary electrons and reflected electrons. The SEM irradiates a sample with electrons and detects emitted secondary electrons and reflected electrons to form an observation image.

  In addition, a fine surface shape measuring device such as a scanning probe microscope (SPM) such as a scanning tunnel microscope (STM) or an atomic force microscope (AFM) is supported by a probe approaching or contacting a sample surface. The fine shape of the sample surface is observed from the displacement of the probe to be scanned while keeping the current, atomic force, etc. constant or the surface of the sample to be inspected. At this time, some have an observation optical system for knowing the position of the probe with respect to the sample. As an example, there is a type in which the probe and the objective lens of the observation optical system are switched and used. In this apparatus, an index (reticle) indicating the position of the probe is provided in the field of view of the observation optical system, thereby enabling optical observation of the observation position of the probe.

  The image processing of the present invention can also be applied to image data such as an electron microscope image and an atomic force microscope image obtained by a sample display device such as an electron microscope or an atomic force microscope.

  The magnifying observation apparatus, the magnifying observation apparatus operating method, the magnifying observation apparatus operating program, the computer-readable recording medium, and the recorded apparatus of the present invention can be suitably used for partial inspection or imaging of biological cells.

It is a block diagram which shows schematic structure of the confocal microscope system which concerns on Embodiment 1 of this invention. It is an external appearance perspective view which shows the confocal microscope system of FIG. It is a perspective view which shows a confocal microscope main body. It is a graph which shows the light reception amount data which change according to the Z direction position of an objective lens. It is a block diagram which shows the confocal microscope system which concerns on Embodiment 2 of this invention. It is an image figure which shows the user interface screen which set the high-pass filter to all directions by the image processing program. It is an image figure which shows the user interface screen which sets a mask area | region designation | designated means with an image processing program. FIG. 8 is an image diagram showing a user interface screen in which a rectangular mask region is selected in FIG. 7. It is an image figure which shows the confocal image which is an input image. It is an image figure which shows the result of having applied the low-pass filter with respect to the confocal image of FIG. It is an image figure which shows the result of having applied the high pass filter with respect to the confocal image of FIG. It is an image figure which shows the result of having adjusted the filter strength adjustment part in the strong direction in FIG. It is an image figure which shows the result of having further adjusted the filter strength adjustment part in the stronger direction in FIG. It is an image figure which shows the result of having adjusted the filter strength adjustment part in the stronger direction in FIG. It is an image figure which shows the user interface screen which set the low-pass filter to all directions by the image processing program. It is an image figure which shows the result of having adjusted the filter strength adjustment part to the strong direction in FIG. It is an image figure which shows the result of having further adjusted the filter strength adjustment part in the stronger direction in FIG. It is an image figure which shows the result of having adjusted the filter strength adjustment part in the stronger direction in FIG. It is an image figure which shows the user interface screen which set the low pass filter to the X direction with the image processing program. It is an image figure which shows the user interface screen which set the low-pass filter to the Y direction with the image processing program. It is an image figure which shows the user interface screen which set the high pass filter to the X direction with the image processing program. It is an image figure which shows the user interface screen which set the high pass filter to the Y direction with the image processing program. It is a flowchart which shows the procedure which applies a frequency filter to a Fourier-transform image.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100, 200 ... Confocal microscope system 1 ... Confocal microscope main body 2 ... Controller 3 ... Operation means 3A ... Input means 4 ... Display means 10, 10B ... Confocal optical system 11 ... Light source 12 ... 1st collimating lens 13 ... Polarized beam Splitter 14 ... 1/4 wavelength plate 15 ... Horizontal / vertical deflection device 16 ... First relay lens 17 ... Second relay lens 18 ... Objective lens 19 ... Imaging lens 20 ... Pinhole plate Non-confocal optical system 21 ... Light receiving element DESCRIPTION OF SYMBOLS 22 ... 1st received light signal processing circuit 30 ... Stage 31 ... Stage manual operation mechanism 32 ... X direction moving knob 33 ... Y direction moving knob 34 ... Z direction moving knob 41 ... 1st AD converter 42 ... 2nd AD converter 43 ... Control Unit 44 ... Image data input unit 45 ... Image processing calculation unit 46 ... Display image generation unit 50, 50B ... Non-confocal optical system 51 ... White light 52 ... 2nd collimating lens 53 ... 1st half mirror 54, 54B ... 2nd half mirror 55 ... 2nd light receiving element 56 ... 2nd received light signal processing circuit 61 ... Image display area 62 ... Operation area 110 ... Mask column 111 ... Details Setting column 112 ... Enlarged display column 113 ... Calculation execution column 113a ... "Calculation execution" button 113b ... "Preview" button 113c ... "Reset" button 114 ... Mask shape designation column 114a ... "Concentric circle" button 114b ... "Rectangle" button 114c ... "Brush" button 114d ... "Invert" button 114e ... "Clear" button 114f ... "Add" button 114g ... "Save file" button 114h ... "Read file" button 115 ... Power spectrum column 115a ... Power spectrum adjustment slider 115b ... Pull-down menu 116 ... Frequency fill Column 116a ... Frequency filter selection unit 116b ... Filter direction selection unit 116c ... Filter strength adjustment unit WK ... Sample FG ... Fourier transform image MR ... Mask region CI1 ... Original image CI2 of confocal image ... Confocal image CI3 after applying low-pass filter ... Confocal image after applying high-pass filter

Claims (10)

Image acquisition means for acquiring an input image obtained by imaging the measurement object;
Fourier transform for performing Fourier transform on the input image acquired by the image acquisition means, and generating a Fourier transform image;
Display means for displaying the Fourier transform image;
Filter setting means for setting a frequency filter processing range and frequency filter type as settings for performing frequency filter processing on the Fourier transform image displayed on the display means;
Highlighting means for highlighting the application range of the frequency filter set by the filter setting means with respect to a Fourier transform image displayed on the display means;
Filter operation means for performing frequency filter processing on the Fourier transform image according to the setting of the frequency filter;
Inverse Fourier transform means for performing inverse Fourier transform on the Fourier transform image after the frequency filter processing by the filter operation means;
A magnifying observation apparatus comprising: The magnification observation device according to claim 1,
An enlargement observation apparatus, wherein the highlighting means displays a masked area in a shaded manner on a Fourier transform image displayed on the display means. The magnification observation apparatus according to claim 1 or 2,
The type of the frequency filter set by the filter setting means includes a high-pass filter and a low-pass filter, and the range to which the frequency filter processing is applied includes any of the X direction, Y direction, and XY direction of the two-dimensional Fourier transform image. Magnifying observation device characterized by The magnification observation apparatus according to claim 3,
When the XY direction is selected as a range to which the frequency filter processing is applied by the filter setting unit, the highlight unit displays the mask region in a concentric circle centered on the origin of the XY coordinates of the two-dimensional Fourier transform image,
When the X direction is selected by the filter setting means, the highlight means displays the mask area in a rectangular shape defined by straight lines symmetrical and parallel to the Y coordinate axis,
When the Y direction is selected by the filter setting means, the highlight means displays the mask area in a rectangular shape defined by straight lines symmetrical and parallel to the X coordinate axis. . The magnification observation apparatus according to any one of claims 1 to 4,
A magnification observation apparatus configured to sequentially present setting items for frequency filter processing by the filter setting means and prompt the user to input setting items in an interactive manner. A magnification observation device according to any one of claims 1 to 5,
A magnification observation apparatus, wherein the image acquisition means is a confocal microscope. Light from the measurement object is received by the light receiving element via the confocal optical system, and height information and light amount information of the surface of the measurement object are acquired based on the light reception information, and the surface of the measurement object is measured. A magnification observation apparatus capable of displaying an image as a confocal image,
At each measurement point, a confocal optical system that acquires an in-focus position based on brightness while changing the optical system or a measurement object in the height direction, scans the measurement point, and synthesizes a confocal image;
Display means for displaying a confocal image captured by the confocal optical system;
Fourier transform means for performing a Fourier transform on the confocal image and generating a Fourier transform image;
Filter setting means for setting a range for applying frequency filter processing and a type of frequency filter as a setting for performing frequency filter processing on the Fourier transform image displayed on the display means;
Highlighting means for highlighting the application range of the frequency filter set by the filter setting means with respect to the Fourier transform image displayed on the display means;
Filter operation means for performing frequency filter processing on the Fourier transform image according to the setting of the frequency filter;
Inverse Fourier transform means for performing inverse Fourier transform on the Fourier transform image after the frequency filter processing by the filter operation means;
A magnifying observation apparatus comprising: A method of operating a magnification observation apparatus capable of receiving light from a measurement object by a light receiving element, obtaining light amount information of the measurement object based on the light reception information, and displaying an enlarged image of the measurement object for observation Because
Obtaining an input image obtained by imaging the measurement object;
Performing a Fourier transform on the input image acquired by the imaging unit, and displaying the generated Fourier transform image on a display means;
As a setting for performing the frequency filter processing on the Fourier transform image, a range to which the frequency filter processing is applied and a type of the frequency filter are set, and the set frequency filter application range is displayed on the display means. A step of highlighting the Fourier transform image,
Performing a frequency filter process on the Fourier transform image according to the setting of the frequency filter;
A process of inverse Fourier transforming and outputting the Fourier transform image after the frequency filter processing;
The operation method of the magnification observation apparatus characterized by including. A magnification observation device operation program that receives light from a measurement object by a light receiving element, acquires light amount information of the measurement object based on the received light information, and displays an enlarged image of the measurement object to allow observation There,
A function for acquiring an input image obtained by imaging a measurement object;
A function of performing Fourier transform on the input image acquired by the imaging unit and displaying the generated Fourier transform image on a display means;
As a setting for performing the frequency filter processing on the Fourier transform image, a range to which the frequency filter processing is applied and a type of the frequency filter are set, and the set frequency filter application range is displayed on the display means. A function for highlighting the Fourier transform image,
A function for performing frequency filter processing on the Fourier transform image according to the setting of the frequency filter,
A function to output the Fourier transform image after the frequency filter processing by performing an inverse Fourier transform;
Magnifying observation apparatus operating program, characterized in that a computer is realized.   A computer-readable recording medium or a recorded device storing the program according to claim 9.