JP2008071547A - High-energy particle generating device, non-destructive test device of tube-shaped member, and high-energy particle generating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-energy X-ray generating device capable of irradiating high-energy X rays at a narrow place where a number of pipings are congested, as well as a non-destructive test device of a tube-shaped member, and to provide a high-energy X-ray generating method. <P>SOLUTION: The device is provided with a laser beam generating part 10 creating pulsated laser beams, a high-energy particle generating part 100 having high-energy particles generated by irradiating pulsated laser beams on a sample, and a light guide tube group 50 coupling the laser beam generating part and the X-ray generating part and leading the pulsated laser created by the laser beam generating part to the high-energy X-ray generating part. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a high energy particle generating apparatus, a tubular member nondestructive inspection apparatus and a high energy particle generating method using a pulsed laser beam.

  Conventionally, non-destructive inspection methods have been used to inspect internal structures such as structures. As a nondestructive inspection method, in general, an ultrasonic wave is irradiated to an object to be inspected to find a flaw inside the object to be inspected, an ultrasonic flaw detection inspection method to detect a flaw in the appearance, or an X-ray inspection. There are known X-ray transmission inspection methods for irradiating an inspection object to find a flaw inside the inspection object, and finding an appearance flaw.

  At present, the ultrasonic flaw detection method is mainly used. However, the ultrasonic flaw detection method has a problem that the inspection object is limited because the inspection is performed using ultrasonic waves. For example, when inspecting a pipe or the like to which a pipe heat insulating material is attached using an ultrasonic flaw detection inspection method, there is a problem that the pipe heat insulating material must be removed. In addition, the ultrasonic flaw detection inspection method has a problem in that it cannot inspect a welded portion of a structure, a small-diameter pipe, or a structure made of a nickel alloy containing chromium, iron, silicon, or the like. there were.

  On the other hand, the X-ray transmission inspection method has no problem as described above. However, iridium 192 or the like used as an X-ray source for the X-ray transmission inspection method has a problem that its size is only about 2 mm and high spatial resolution cannot be obtained.

  In order to solve this problem, several laser X-ray sources that can be used as an X-ray source for the X-ray transmission inspection method have been proposed in addition to the discharge tube X-ray source. For example, as an X-ray source, a soft X-ray is generated using a Kα ray induced in a laser plasma (see, for example, Patent Document 1), a fast electron is generated, and bremsstrahlung is used to generate a megaelectron volt. There are those that generate high-energy X-rays of a certain degree (for example, see Patent Document 2).

JP 2001-035688 A JP 2002-107499 A

  However, since the discharge tube X-ray source and the laser X-ray source as described above are large in size, they cannot be used for nondestructive inspections such as narrow portions where piping in a plant is densely packed. It was.

  In view of the above-described circumstances, the present invention provides a high-energy particle generator, a tubular member nondestructive inspection device, and a high-energy particle generation method capable of irradiating a high-energy particle to a narrow portion where many pipes are densely packed. For the purpose. In the present invention, high energy particles include high energy X-rays.

  A first aspect of the present invention that solves the above-described problems is a laser beam generation unit that generates a pulsed laser beam, and a pulsed laser beam generated from the laser beam generation unit is incident on a sample to generate high-energy particles. A high energy particle generation unit, and a light guide tube group that connects the laser beam generation unit and the high energy particle generation unit to guide the pulsed laser created from the laser beam generation unit to the high energy particle generation unit. The light guide tube group includes a plurality of light guide tubes through which the pulsed laser beam passes and an end portion of each light guide tube that is foldable in an arbitrary plane, And a joining tube having a built-in reflecting mirror that reflects the pulsed laser beam incident from the end of the light guide tube to the end of the other light guide tube. In the energy particle generator.

  In the first aspect, the high energy particle generating unit can be downsized, and the high energy particle generating unit can be freely arranged with respect to the laser beam generating unit.

  According to a second aspect of the present invention, in the high-energy particle generator according to the first aspect, the laser beam generator creates an auxiliary laser beam that travels in parallel with the traveling direction of the pulsed laser beam together with the pulsed laser beam. In addition, the pulsed laser beam and the auxiliary laser beam reflected from the light guide tube connected to the high energy particle generating unit to the high energy particle generating unit are incident on the high energy particle generating unit. A steering mirror for changing the incident angle of the laser beam and the auxiliary laser beam, and a laser beam detecting means for detecting the incident angle of the auxiliary laser beam with respect to the high energy particle generating unit, and further, the data detected by the laser beam detecting means Based on the attitude of the steering mirror Please to in high-energy particles generating apparatus characterized by comprising a control unit for controlling the angle of incidence of the pulsed laser and the auxiliary laser beam incident on the high-energy particles generating unit.

  In the second aspect, it is possible to optimize the incident angle of the pulsed laser beam incident on the high energy particle generation unit through the light guide tube group.

  According to a third aspect of the present invention, in the high-energy particle generator according to the first or second aspect, the high-energy particle generator is configured to face a mirror surface that reflects a pulsed laser beam, and the mirror surface. And a deformable mirror whose shape of the mirror surface is deformed by applying a voltage to the electrode, and the laser beam reflected by the deformable mirror is reflected by the sample and collected. An off-axis parabolic mirror to be illuminated, a scintillation detector or X-ray photodiode for measuring X-rays generated when high-energy electrons are generated from the sample, the plurality of electrodes and the scintillation detector or X-ray photo A plurality of electrodes connected to a diode based on data measured by the scintillation detector or the X-ray photodiode; In high-energy particles generating apparatus characterized by having a genetic algorithm optimization means for optimizing to generate high energy electrons with the highest energy using a genetic algorithm combinations of voltages pressure.

  In the third aspect, the shape of the mirror surface of the deformable mirror can be optimized so that a laser beam that generates high-energy electrons having the highest energy can be reflected.

  According to a fourth aspect of the present invention, in the high-energy particle generator according to the third aspect, the genetic algorithm includes a plurality of chromosomes that specify the shape of the mirror surface from a combination of voltages applied to the plurality of electrodes. A first generation step to be generated and X-rays generated when high-energy electrons are generated using the high-energy particle generation unit corresponding to the chromosome are measured by the scintillation detector or the X-ray photodiode. A step of assigning a rank to the chromosome by evaluating a peak-to-peak value of the voltage, a step of determining whether the chromosome to which the rank is assigned satisfies a convergence condition, and the rank A gene manipulation is performed on the assigned chromosome based on the assigned rank, thereby generating a new generation of chromosomes. A generation step, and first, sequentially performing the assigning step and the determination step on the chromosome generated by the first generation step, and the determination step determines that the chromosome does not satisfy the convergence condition In addition, the high energy particles are characterized by repeatedly executing the assigning step and the determining step on the new generation of chromosomes generated by the second generating step until it is determined that the convergence condition is satisfied. In the generator.

  In the fourth aspect, the shape of the mirror surface of the deformable mirror can be more easily optimized so that a laser beam that generates high-energy electrons having the highest energy can be reflected.

  According to a fifth aspect of the present invention, in the high energy particle generator according to any one of the first to fourth aspects, the sample provided in the high energy particle generator is a solid that can be ionized by a pulsed laser beam. A sample, a pulsed pre-laser beam is incident before the pulsed laser beam is incident on the solid sample to generate a plasma having a critical plasma density or less from the surface or a part of the solid sample, and the plasma A high-energy particle generator is characterized in that a pulsed laser beam is incident. Here, the critical plasma density is the density of plasma that is necessary and sufficient not to transmit the pulsed laser beam when the pulsed laser beam is incident on the plasma, that is, the transmittance of the pulsed laser beam. The plasma density at 0%.

  In the fifth aspect, a large number of high energy electrons having high energy can be generated.

  According to a sixth aspect of the present invention, in the fifth aspect, the high energy particle generating apparatus is characterized in that the pulsed pre-laser beam comprises a plurality of pulsed laser beams.

  In the sixth aspect, more high energy electrons can be generated.

  According to a seventh aspect of the present invention, in the high-energy particle generator according to any one of the first to fourth aspects, the sample is a gaseous sample, and the high-energy particle generator is the gaseous energy. A high energy particle generating apparatus having a gas sample injection means for injecting a sample and injecting the gaseous sample in timing with a pulsed laser beam incident on the high energy particle generating unit .

  In the seventh aspect, the same effect as described above can be obtained.

  According to an eighth aspect of the present invention, in the high-energy particle generator according to any one of the first to fourth aspects, the sample is a gaseous sample, and the high-energy particle generator has a predetermined density. The high-energy particle generator is filled with the gaseous sample.

  In the eighth aspect, the same effect as described above can be obtained.

  According to a ninth aspect of the present invention, in the high energy particle generator according to any one of the first to sixth aspects, the sample has a tape-like shape that can be wound, and the high energy particle generator has a tape-like shape. The high energy particle generator further includes a sample winding means for winding the sample.

  In the ninth aspect, after generating high-energy electrons, another portion of the sample can be irradiated with a pulsed laser beam by winding the sample by a predetermined distance. Can be generated.

  A tenth aspect of the present invention is the high energy particle generator according to any one of the first to ninth aspects, wherein the laser beam is an ultrashort pulse laser beam or a femtosecond laser beam. In the device.

  In the tenth aspect, high energy particles having higher energy can be generated.

  An eleventh aspect of the present invention is the high energy particle generating apparatus according to any one of the first to tenth aspects, wherein the high energy particle generating unit samples a pulsed laser beam created from the laser beam generating unit. The high-energy particle generator is characterized in that high-energy electrons generated by being incident on the X-ray are further incident on an X-ray conversion material to generate high-energy X-rays.

  In the eleventh aspect, the high energy X-ray can be effectively generated without using a thick sample by dividing the high energy electron generation in the thin sample and the bremsstrahlung in the X-ray conversion material. .

  According to a twelfth aspect of the present invention, a rail is disposed around the tubular member, and the high energy particle generating unit of the high energy particle generating device according to the eleventh aspect is movably disposed on the rail, The high energy particle detector for detecting the high energy particles emitted from the high energy particle generation unit is arranged so as to be movable in symmetry with the high energy particle generation unit with respect to the axis of the tubular member. The tubular member non-destructive inspection apparatus is characterized.

  In the twelfth aspect, the state of the entire periphery inside the tubular member can be inspected.

  According to a thirteenth aspect of the present invention, there is provided a high energy particle generating unit that generates a high energy particle by causing a pulsed laser beam generated from the laser beam generating unit to enter a sample, the laser beam generating unit, and the generation of the high energy particle. And a light guide tube group that guides the pulsed laser created from the laser beam generation unit to the high energy particle generation unit, and the light guide tube group includes the pulsed laser beam inside. A plurality of light guide tubes passing through the light guide tube and end portions of the respective light guide tubes so as to be freely bent in an arbitrary plane, and the pulsed laser beam incident from the end portion of one of the light guide tubes is connected to the other. A high-energy particle generator having a reflecting tube reflecting at the end of the light guide tube, and the high-energy particle generator at an arbitrary location from the laser beam generator. By placing the particle generating portion is in a high-energy particle generation method for generating high energy particles.

  In the thirteenth aspect, high-energy particles can be generated at a location away from the laser beam generator.

  According to a fourteenth aspect of the present invention, in the high energy particle generating method according to the thirteenth aspect, the laser beam generation unit creates an auxiliary laser beam that travels in parallel with the traveling direction of the pulsed laser beam together with the pulsed laser beam. In addition, the pulsed laser beam and the auxiliary laser beam reflected from the light guide tube connected to the high energy particle generating unit to the high energy particle generating unit are incident on the high energy particle generating unit. A steering mirror for changing the incident angle of the laser beam and the auxiliary laser beam, and a laser beam detecting means for detecting the incident angle of the auxiliary laser beam with respect to the high energy particle generator, and further, based on the data detected by the laser beam detecting means The attitude of the steering mirror Controlled and in the high-energy particle generation method characterized by optimizing the incidence angle of the pulsed laser beam and the auxiliary laser beam incident on the high-energy particles generating unit.

  In the fourteenth aspect, it is possible to optimize the incident angle of the pulsed laser beam incident on the high energy particle generation unit through the light guide tube group.

  According to a fifteenth aspect of the present invention, in the high energy particle generation method according to the thirteenth or fourteenth aspect, the high energy particle generation unit is connected to a mirror surface that reflects a pulsed laser beam and the mirror surface. A deformable mirror having a plurality of electrodes and deforming the shape of the mirror surface by applying a voltage to the electrodes, and the pulsed laser beam reflected by the deformable mirror is reflected by the sample and collected. An off-axis parabolic mirror for light emission, and a scintillation detector or an X-ray photodiode for measuring X-rays generated when high-energy electrons are generated from the sample, the scintillation detector or the X-ray photodiode Based on measured data, a genetic algorithm is used to generate high energy electrons with the highest energy In high-energy particles generating method characterized by optimizing the combination of the voltage applied to the plurality of electrodes Te.

  In the fifteenth aspect, high energy particles having higher energy can be generated.

  According to a sixteenth aspect of the present invention, in the high energy particle generating method according to claim 15, the genetic algorithm generates a plurality of chromosomes that specify the shape of the mirror surface from a combination of voltages applied to the plurality of electrodes. X-rays generated when high-energy electrons are generated using the high-energy particle generator corresponding to the first generation step and the chromosome are measured by the scintillation detector or the X-ray photodiode. An evaluation step of assigning a rank to the chromosome by evaluating a peak-to-peak value of the voltage, a determination step of determining whether the chromosome to which the rank is assigned satisfies a convergence condition, and the rank is assigned A genetic manipulation is performed on the assigned chromosome based on the assigned rank, thereby generating a new generation of chromosomes. First, the application step and the determination step are sequentially performed on the chromosome generated by the first generation step, and the determination step determines that the chromosome does not satisfy the convergence condition. In this case, the high energy is characterized in that the application step and the determination step are repeatedly performed on a new generation of chromosomes generated by the second generation step until it is determined that the convergence condition is satisfied. In the particle generation method.

  In the sixteenth aspect, high energy particles having higher energy can be generated.

  According to a seventeenth aspect of the present invention, in the high energy particle generating method according to any one of the thirteenth to sixteenth aspects, the sample is a solid sample that can be ionized by a pulsed laser beam, and the pulsed laser beam. Before entering the solid sample, a pulsed pre-laser beam is incident to generate a plasma having a critical plasma density or less from the surface or part of the solid sample, and the pulsed laser beam is incident on the plasma. The feature is a high energy particle generation method. Here, the pulsed pre-laser beam is a kind of pulsed laser beam, which is incident on the solid sample before the pulsed laser beam is incident on the solid sample and has an intensity smaller than the intensity of the pulsed laser beam. It is what you have.

  In the seventeenth aspect, a large number of high energy particles having high energy can be easily generated.

  An eighteenth aspect of the present invention is the high energy particle generating method according to the seventeenth aspect, wherein the pulsed pre-laser beam comprises a plurality of pulsed laser beams. .

  In the eighteenth aspect, more high-energy electrons can be generated.

  According to a nineteenth aspect of the present invention, in the high energy particle generating method according to any one of the thirteenth to sixteenth aspects, the sample is a gaseous sample, and the high energy particle generating unit is the gaseous energy. A method for generating high energy particles, comprising gas sample injection means for injecting a sample, and jetting the gaseous sample in synchronization with a pulsed laser beam incident on the high energy particle generator. .

  In the nineteenth aspect, the same effect as described above can be obtained.

  According to a twentieth aspect of the present invention, in the high energy particle generation method according to any one of the thirteenth to sixteenth aspects, the sample is a gaseous sample, and the high energy particle generation unit has a predetermined density. In the high energy particle generating method, the gaseous sample is filled.

  In the twentieth aspect, the same effect as described above can be obtained.

  According to a twenty-first aspect of the present invention, in the high-energy particle generation method according to any one of the thirteenth to twentieth aspects, the high-energy particle generation unit samples a pulsed laser beam created from the laser beam generation unit. The high-energy particle generation method is characterized in that high-energy electrons generated by being incident on the X-ray are further incident on an X-ray conversion material to generate high-energy X-rays.

  In the twenty-first aspect, by dividing the high energy electron generation in the thin sample and the bremsstrahlung in the X-ray conversion material, high energy X-rays can be generated effectively without using a thick sample. .

  According to the high energy particle generator according to the present invention, the laser beam generator and the high energy particle generator can be physically separated, so that the high energy particle generator can be downsized. In addition, since the light guide tube group can be deformed in various shapes, the high energy particle generating unit can be freely arranged with respect to the laser beam generating unit, and as a result, a narrow portion where a large number of pipes are concentrated, etc. The effect of being able to irradiate with high energy particles.

  Hereinafter, the best mode for carrying out the present invention will be described. The description of the present embodiment is an exemplification, and the present invention is not limited to the following description.

(Embodiment 1)
FIG. 1 is a schematic diagram showing a high-energy X-ray generator according to Embodiment 1 of the present invention. As shown in FIG. 1, a high-energy X-ray generator 1 according to this embodiment includes a laser beam generator 10 that creates a pulsed laser and an X-ray that generates high-energy X-rays from an incident pulsed laser beam. The generator 100, the light guide tube group 50 connecting the laser beam generator 10 and the X-ray generator 100, and the incident position of the pulsed laser beam that passes through the light guide tube group 50 and enters the X-ray generator 100 And a control unit 70 for controlling the above. In the present embodiment, the X-ray generation unit 100 corresponds to a high energy particle generation unit.

  FIG. 2 shows an enlarged external view of the portion X shown in FIG. As shown in FIG. 2, the light guide tube group 50 includes a plurality of light guide tubes 51 and a joining tube 55 that connects end portions of the respective light guide tubes 51. The light guide tube 51 is formed of a cylindrical hollow member so that a pulsed laser beam can pass therethrough. And the joining pipe | tube 55 connected to the edge part of each light guide pipe 51 so that rotation with respect to the circumferential direction of the light guide pipe 51 is possible with respect to the light guide pipe 51 is connected. The joining tube 55 is formed of a cylindrical hollow member having a bent portion 56 bent at 90 degrees, and inside the bent portion 56 is an axis of a light guide tube 51 to be connected as shown in FIG. The reflecting mirror 52 is provided so as to form 45 degrees with respect to the angle. Therefore, the joining tube 55 can reflect the pulsed laser beam incident from one connected light guide tube 51 and enter the other light guide tube 51. Further, as shown in FIG. 4, the light guide tube 51 connected to the X-ray generation unit 100 is provided with a steering mirror 20 to which the movable unit 25 is attached so that the movable unit 25 can be moved. Thus, the attitude of the steering mirror 20 can be changed. The reflecting mirror 52 is provided inside the light guide tube 51 so as to form 45 degrees with respect to the axis of the light guide tube 51 to be connected. By configuring the light guide tube group 50 in this way, the light guide tube group 50 can be deformed into various shapes, and the X-ray generation unit 100 passes through the light guide tube group 50 as described later. It is possible to optimize the incident angle of the pulsed laser beam incident on.

  And since the laser beam generation part 10 and the X-ray generation part 100 can be physically separated by comprising the high energy X-ray generator 1 as mentioned above, the X-ray generation part 100 is reduced in size. be able to. Further, since the light guide tube group 50 can be deformed into various shapes, the X-ray generation unit 100 can be freely arranged with respect to the laser beam generation unit 10. That is, by configuring the high energy X-ray generator 1 as described above, there is an effect that it is possible to irradiate high energy X-rays to a narrow portion where a large number of pipes are densely packed.

  Next, the components constituting the high energy X-ray generator 1 will be described. First, the laser beam generator 10 will be described. The laser beam generator 10 is not particularly limited as long as it can create an auxiliary laser beam that travels in parallel with the traveling direction of the pulsed laser beam together with the pulsed laser beam. Examples of the laser beam generation unit 10 include a device that combines a laser device that generates a pulsed laser beam and an auxiliary laser device that generates an auxiliary laser beam. And as a laser device that creates a pulsed laser beam, a laser device that can irradiate an ultrashort pulse laser beam or a femtosecond laser beam is preferable. For example, a titanium sapphire laser device that can irradiate a laser beam having an energy of 10 mJ with a pulse width of 30 fs. It is done. Moreover, as an auxiliary | assistant laser apparatus which produces an auxiliary | assistant laser beam, what can irradiate the laser which has a wavelength in visible region is preferable, For example, the Nd-YAG laser apparatus etc. which can irradiate a laser beam with a wavelength of 532 nm are mentioned. By using a laser device capable of emitting a laser beam having a wavelength in the visible light region as the auxiliary laser device, the locus of the auxiliary laser beam can be visually recognized. Therefore, since the optical axis alignment between the laser beam generator 10 and the X-ray generator 100 can be easily performed, the high energy X-ray generator 1 can be easily manufactured. Further, since the wavelength of the auxiliary laser beam (532 nm) is far away from the wavelength of the pulsed laser beam (about 800 nm), it is easy to synthesize and divide the beam with a laser beam splitter (dichroic mirror, etc.) described later, and to detect the laser described later The auxiliary laser beam can be detected with high sensitivity by means, and as a result, high-energy X-rays can be easily generated. The auxiliary laser beam is not a pulsed laser beam but a continuously irradiated laser beam.

  Next, the X-ray generator 100 will be described. FIG. 5 is a schematic diagram of an X-ray generation unit according to the present embodiment. As shown in FIG. 5, the X-ray generator 100 includes a laser beam splitter 120 that reflects an incident pulsed laser beam and transmits an auxiliary laser beam, and a laser beam detector 121 that detects an auxiliary laser beam that has passed through the laser beam splitter 120. A deformable mirror 130 that can change the shape of the mirror surface that further reflects the pulsed laser beam reflected by the laser beam splitter 120 by applying a voltage to a plurality of electrodes connected to the mirror surface; An off-axis paraboloid 140 that collects the light by reflecting the pulsed laser beam, and ionizes and emits high-energy electrons by irradiating the focused pulsed laser beam. A tape-shaped sample 150 to be produced, a sample winding means 151 that can wind up the sample 150 each time a pulsed laser beam is irradiated and shift the portion that the laser beam hits, and when high-energy electrons are generated from the sample 150 X-ray detection means 160 for measuring the X-rays generated in the sample, and an X-ray conversion material 170 for generating high-energy X-rays by irradiation with high-energy electrons generated from the sample 150, which are vacuum chambers. 101 is provided. The vacuum chamber 101 is provided with a laser beam incident window 110 on which a pulsed laser beam is incident, and an X-ray emission window 190 for emitting generated high energy X-rays to the outside of the X-ray generator 100. Yes. In addition, the X-ray generator 100 can optimize the combination of voltages applied to the plurality of electrodes of the deformable mirror 130 connected to the X-ray detection means 160 and the deformable mirror 130 based on a genetic algorithm. Deformation mirror control means 180 is further provided.

  Then, the X-ray generation unit 100 uses a genetic algorithm so that the mirror surface of the deformable mirror 130 forms an optimal mirror surface that generates high-energy X-rays based on the data obtained from the X-ray detection unit 160. The combination of voltages applied to each electrode can be optimized using the.

  The deformable mirror 130 is not particularly limited as long as it can deform the mirror surface that reflects the laser beam. As the deformable mirror 130, for example, as shown in FIG. 6, a mirror surface 131 that reflects a laser beam and a substrate 136 that is connected so as to face the mirror surface 131 through a spacer 133 and that has a plurality of electrodes 132 on the surface. And a power supply 135 connected to the mirror surface 131 and each electrode 132, and a voltage regulator 134 provided between the power supply 135 and each electrode 132, respectively. FIG. 7 is a schematic view when the deformable mirror 130 of FIG. 6 is viewed from the A direction. As shown in FIG. 7, hexagonal electrodes 132 are arranged radially from the center of the deformable mirror 130. Such a deformable mirror 130 controls the electrostatic force acting between the mirror surface 131 and each electrode 132 by changing the voltage applied to each electrode 132 using the voltage regulator 134, and the mirror surface 131. The shape of can be changed.

  An example of such a deformable mirror 130 is OKO mirror (manufactured by Flexible Optical BV (aka OKO Technologies)).

  Based on the data obtained from the X-ray detection means 160, the deformable mirror control means 180 uses a genetic algorithm so that the mirror surface 131 of the deformable mirror 130 forms an optimum mirror surface 131 that generates high-energy electrons. There is no particular limitation as long as it functions so as to optimize the combination of voltages applied to each electrode 132, and for example, a general personal computer may be used. In this embodiment, as shown in FIG. 5, the deformable mirror control means 180 is provided outside the vacuum chamber 101, but may be provided inside the vacuum chamber 101.

  The off-axis parabolic mirror 140 is not particularly limited in material and shape as long as it can collect a pulsed laser beam. For example, a gold-deposited mirror or a dielectric multilayer film is similar to the mirror surface 131 of the deformable mirror 130. Examples include mirrors.

  The material of the sample 150 is not particularly limited as long as it can generate high-energy electrons with a pulsed laser beam. The sample 150 may be, for example, a metal or plastic, but is preferably made of atoms having a higher atomic number. When an atom having a larger atomic number is used, more high-energy electrons can be generated. The shape of the sample 150 is not particularly limited as long as it can generate high-energy electrons with a pulsed laser beam. However, it is preferable to have a thinner tape shape so that high energy electrons with higher energy can be obtained. Effective generation of high-energy X-rays cannot be expected with only a thin sample, but by dividing the structure into high-energy electron generation in the sample and bremsstrahlung in the X-ray conversion material, it is effective without using a thick sample. High energy X-rays can be generated. Examples of the sample 150 include a Cu metal film.

  The sample winding means 151 is not particularly limited as long as it can wind the sample 150 without damaging the sample 150. When the sample winding means 151 is used, after irradiating a pulsed laser beam to generate high energy electrons, the sample 150 is wound by a predetermined distance to irradiate another part of the sample 150 with the laser beam. Therefore, high energy electrons can be generated continuously.

  The X-ray detection means 160 is not particularly limited as long as it can detect the generated high energy X-rays. Examples of the X-ray detection means 160 include a scintillation detector or an X-ray photodiode (XPD).

  The X-ray conversion material 170 is not particularly limited as long as it can generate X-rays when high-energy electrons are incident, but is preferably composed of atoms having a large atomic number, particularly W, Cu, Those composed of Pb are preferred. More high-energy X-rays can be generated by using atoms composed of atoms having a large atomic number, particularly those composed of Pb.

The laser beam incident window 110 is not particularly limited as long as it can transmit a pulsed laser beam, and it is needless to say that a high transmittance and a thin one are preferable. Examples of the laser beam incident window 110 include crystal pieces made of synthetic sapphire (Al ₂ O ₃ ), synthetic quartz (SiO ₂ ), and the like.

  The laser beam splitter 120 is not particularly limited as long as it can reflect a pulsed laser beam and transmit an auxiliary laser beam. Examples of the laser beam splitter 120 include an optical base material (for example, BK7) having a dielectric multilayer film on the surface, a dichroic mirror, and the like.

  The laser beam detection means 121 is not particularly limited as long as it can detect the incident angle of the laser beam incident on the X-ray generation unit 100. Examples of the laser beam detection means 121 include a combination of a convex lens and a laser beam position sensor.

  The X-ray exit window 190 is not particularly limited as long as it can transmit the generated high energy X-rays and can be emitted to the outside of the X-ray generation unit 100. However, the X-ray exit window 190 is composed of atoms having a small atomic number. Particularly preferred are those made of Al, plastic, quartz or the like. Further, by configuring the X-ray exit window 190 with a metal such as Al or an opaque plastic, it is possible to further shield the laser beam leaking from the X-ray exit window. Needless to say, the X-ray exit window 190 is preferably thin.

The vacuum chamber 101 is not particularly limited as long as it does not break or change its shape even if the internal atmospheric pressure decreases, but it is preferable that the internal pressure can be reduced to 10 ⁻² mbar or less.

  Next, in the X-ray generation unit 100 shown in FIG. 5, based on the data obtained from the X-ray detection unit 160, the mirror surface 131 of the deformable mirror 130 generates high energy X-rays using a genetic algorithm. A method for optimizing the combination of voltages applied to the electrodes 132 so as to form a smooth mirror surface 131 will be described. Hereinafter, in order to simplify the description, it is assumed that the deformable mirror 130 uses nine electrodes.

  The genetic algorithm used in the present embodiment is one of optimization methods that mathematically imitates that living organisms are evolving with increasing environmental adaptability while repeating spider, chromosome mating or mutation.

  The outline is that the initial value is set to the variable that determines the system to be mathematically optimized, the objective of the optimization is to improve the variable while evaluating the evaluation function calculated from the variable. It will be going. In the genetic algorithm, a variable that determines a system to be optimized is represented by a number sequence (a number sequence is a chromosome, a part of the number sequence is a gene), and a system determined by this is a group of individuals (one individual) ( Generation), the fitness is evaluated from the evaluation function calculated from the sequence, the number of individuals with low fitness is reduced, the number of individuals with high fitness is increased accordingly (淘汰), and then several groups from the population The two individuals are selected stochastically and an operation (mating) is performed to replace a part of the sequence corresponding to each of the two individuals, or several individuals are selected probabilistically from the individual group, An operation (mutation) is performed in which a part of the number sequence corresponding to the individual is replaced with another numerical value.

  When these operations are repeated and the population is updated (generation change), the proportion of individuals with high fitness in the population gradually increases. Therefore, an optimal solution can be obtained by setting a calculation end determination condition when the proportion of individuals having high fitness exceeds a preset limit proportion or when a predetermined number of generations have passed.

  The optimization method using a genetic algorithm can define variables and evaluation functions to be optimized discretely, does not require sensitivity analysis, and is global for problems with many local optimal solutions. It has the property that the reliability of optimization is high, such as the possibility of reaching an optimal solution.

  In this embodiment, for example, the voltage applied to each electrode 132 is set to 16 levels, the voltage numbers are expressed in binary numbers as genes, and the genes are arranged in the order of the numbers of the electrodes 132 as chromosomes. Specifically, as shown in FIG. 8, a gene consisting of a numerical sequence expressed by four numerical values combining “0” or “1” described in one frame is arranged in the order of the number of the electrodes 132. Nine (A1 to A9) are arranged as one chromosome. Here, “A1” or the like written on the frame indicates the electrode 132 having the gene. In addition, the numerical sequence in the frame sets 16 levels from 0 to the maximum voltage that can be applied to each electrode 132 according to the present embodiment, and assigns numbers to each electrode 132 in order from the lowest applied voltage. The number of the voltage to be applied is displayed in binary. For example, “0011” of A1 indicates that the fourth voltage from the bottom is applied to the electrode 132 of A1. Therefore, the combination of voltages applied to each electrode 132 can be shown by the chromosome shown in FIG. Then, genetic manipulation, that is, mating, mutation, and selection are performed on such chromosomes.

  Next, chromosome crossing according to this embodiment will be described. The mating in the present embodiment refers to exchanging a part of the chromosome. In order to cross chromosomes, as shown in FIG. 9, two chromosomes X and Y are selected, and X and Y are divided into X1, X2 and Y1, Y2 at the same place D where they are randomly selected. Then, new chromosomes X ′ and Y ′ as shown in FIG. 10 are created by exchanging X2 and Y2. In this way, chromosome mating can be performed.

  Furthermore, the chromosome mutation according to the present embodiment will be described. The mutation in the present embodiment is to change numerical values with a predetermined probability for all numerical values in the chromosome. Here, changing the numerical value means changing to “1” when the numerical value is “0” and changing to “0” when the numerical value is “1”. Specifically, as shown in FIG. 11, the presence / absence of mutation is determined for each numerical value in chromosome Z, and when it is determined that numerical value W causes mutation, as shown in FIG. A new chromosome Z ′ in which “1” of the numerical value W of Z is changed to “0” is created. In this way, chromosomal mutations can be made.

  Next, chromosome wrinkles according to this embodiment will be described. The selection in the present embodiment means that a chromosome is not selected as a parent of the next generation chromosome. Specifically, first, a plurality of chromosomes are ranked using an evaluation function, which will be described later, and according to the rank, a higher-ranked chromosome has a higher probability of being selected as a parent of the next generation, and a lower rank. As it becomes, the probability of being selected is lowered. Then, a random number is generated, and a parent chromosome is selected based on the random number. Then, a chromosome with a higher rank is often selected as the parent of the chromosome of the next generation, and a chromosome with a lower rank is less likely to be selected as the parent of the chromosome of the next generation. The chromosome is no longer selected as the parent of the next chromosome. In this way, chromosome selection can be performed. In this embodiment, even if the chromosome has the lowest rank, the probability of selection is not 0%, so the chromosome with the lowest rank may not be deceived. On the other hand, when the chromosome with the highest rank appears. Ensures that its chromosomes are protected. Furthermore, the same chromosome may be selected as the chromosome selected as the parent.

  Next, the evaluation function of the high energy X-ray generator 1 in this embodiment will be described. In this embodiment, when the sample 150 is irradiated with a pulsed laser beam, a part of the sample 150 is ionized by the electric field of the laser beam, and charged particles such as electrons and positive ions (nuclei) are accelerated and X-rays are emitted. Radiated. At that time, when the X-rays generated using the XPD 51 are measured, a measurement result as shown in FIG. 13 can be obtained. In the present embodiment, as shown in FIG. 13, the peak-to-peak value d (peak-to-valley voltage) of the voltage measured by XPD 51 is used as an evaluation function, and the one that maximizes d is determined as the optimum solution.

  Next, the optimization procedure of the high energy electron generation method using the X-ray generation unit 100 according to the present embodiment will be specifically described with reference to FIG. First, 15 chromosomes are created (S1-1). The chromosomes created here may be expressed by only “1” or only “0” even if all the genes or a part thereof are duplicated. This is because chromosomes change as generations are repeated.

  Next, for each chromosome, a voltage corresponding to the gene of that chromosome is applied to each electrode 132 to deform the shape of the mirror surface 131 of the deformable mirror 130, and the X-ray generation unit 100 at that time has a pulse-like shape. A laser beam is incident to generate high energy electrons (S1-2). At that time, the peak-to-peak value d of the voltage measured by the XPD 51 is calculated (S1-3). When d is calculated for all chromosomes, ranking is performed in descending order of the value of d based on d (S1-4).

  Next, it is determined whether or not the number of generations has reached a predetermined number of generations (S1-5). Then, when the number of generations, for example, the number of generations reaches 100, this optimization is terminated. When the number of generations has not been reached, ranking is performed as shown below. Among the 15 chromosomes, the following gene manipulation is performed for other chromosomes while preserving the chromosome having the largest d as the elite chromosome (S1-6).

  First, we perform chromosome selection. Specifically, 14 chromosomes that are parents of chromosomes of the next generation are selected from 15 chromosomes, and numbers 1 to 14 are assigned in the selected order. Next, the selected chromosomes are combined in order and mated. Specifically, a combination of (1, 2), (3,4), (5, 6), (7, 8), (9, 10), (11, 12), (13, 14) is created. Then, the chromosomes of the combination are crossed to create 14 new generations of chromosomes. Furthermore, mutation is performed on all newly created chromosomes. Then, the chromosomes that have undergone such genetic manipulation and the elite chromosomes that have not undergone genetic manipulation are combined into 15 new generation chromosomes.

  These genetic manipulations are repeated for a predetermined number of generations, and a chromosome having the largest d is obtained to be applied to each electrode 132 of the deformable mirror 130 that can generate high-energy electrons having the highest energy. A combination of voltages can be determined.

  As described above, the mirror surface 131 of the deformable mirror 130 is capable of reflecting a pulsed laser beam that generates high-energy electrons having the highest energy in the X-ray generation unit 100 according to the present embodiment. Can be optimized.

  Next, the light guide tube group 50 will be described. The light guide tube 51 constituting the light guide tube group 50 is not particularly limited. Examples of the light guide tube 51 include a cylindrical aluminum tube whose cross-sectional shape of the light guide tube 51 is a polygon such as a circle or a rectangle.

  The light guide tube 51 connected to the X-ray generation unit 100 is provided with the steering mirror 20 connected to the control unit 70 as described above. By controlling the movable portion 25, the angle (posture) of the steering mirror 20 can be adjusted.

  The joining tube 55 is not particularly limited as long as it has a reflecting mirror 52 in which a pulsed laser beam incident from one connected light guide tube 51 can be incident on the other light guide tube 51. Not. In the present embodiment, a hollow member having a bent portion 56 having a circular cross-sectional shape and bent at 90 degrees is used as the joining tube 55, but the cross-sectional shape may be a polygon such as a quadrangle, and the bent portion 56. The angle is not limited to 90 degrees. Further, in the present embodiment, as the joining tube 55, a tube having an angle of the bent portion 56 fixed to 90 degrees is used, but a movable tube that can change the angle of the bent portion 56 is used. Good. When a movable joint tube is used, a reflecting mirror is used so that a pulsed laser beam incident from one connected light guide tube can enter the other light guide tube according to the angle. Needless to say, the angle can be moved. By constructing the light guide tube group 50 using such a movable joint tube 55, the light guide tube group 50 can be deformed into various shapes.

  The light guide tube group 50 composed of these is preferably capable of supporting the weight of the X-ray generation unit 100 connected to the light guide tube group 50, and the inside is further evacuated, Those capable of preventing the deterioration of the quality of the pulsed laser beam passing through is preferable. In this case, since the inside of the light guide tube group 50 is in a vacuum state as well as the inside of the X-ray generation unit 100, the laser beam incident window 110 is not necessary.

  Further, the control unit 70 will be described. As shown in FIG. 15, the control unit 70 is connected to the laser beam detection means 121 and is connected to the movable unit 25 provided inside the light guide tube 51 connected to the X-ray generation unit 100. Then, the control unit 70 adjusts the attitude of the steering mirror 20 by controlling the movable unit 25 based on the data detected by the laser beam detection means 121, and makes a pulsed laser beam incident on the X-ray generation unit 100. The incident angle can be optimized. As the control unit 70, the attitude of the steering mirror 20 is adjusted by controlling the movable unit 25 based on the data detected by the laser beam detection unit 121, and the pulsed laser beam incident on the X-ray generation unit 100 is adjusted. Although it will not specifically limit if it functions so that an incident angle can be optimized, For example, a general personal computer, a microcomputer, etc. provided with such a function are mentioned.

  Next, referring to FIG. 16, the attitude of the steering mirror 20 is adjusted by controlling the movable unit 25 based on the data detected by the laser beam detecting means 121, and the pulse shape incident on the X-ray generation unit 100. An example of a method for optimizing the incident angle of the laser beam will be described. The steering mirror 20 has axes orthogonal to each other at the center thereof, and can be rotated in two directions around the orthogonal axes, or includes two mirrors disposed so as to face each other. It is assumed that the rotation axes can be rotated in directions orthogonal to each other. Further, it is assumed that the laser beam detection means 121 can detect the incident position of the auxiliary laser beam using orthogonal coordinates whose center is the origin. The rotation angle of the steering mirror 20 is (X, Y), and the incident position of the auxiliary laser beam detected by the laser beam detection means 121 at the rotation angle is P (x, y).

  First, the initial rotation angle (X0, Y0) of the steering mirror 20 is set (S2-1), the auxiliary laser beam incident position P0 (x0, y0) at the rotation angle is measured, and the origin of the laser beam detection means 121 is measured. To P0 (x0, y0) is calculated (S2-2).

  Next, laser beam incident positions P1 (x1, y1) and P2 (x2, y2) at the rotation angles (X0 + Δ, Y0) and (X0, Y0 + Δ) are measured (S2-3). Here, Δ may be an arbitrary minute angle, but the minimum driving angle (resolution) of the movable portion 25 attached to the steering mirror 20 is preferable.

  Further, from the displacement from P0 (x0, y0) to P1 (x1, y1) and the displacement from P0 (x0, y0) to P2 (x2, y2), P0 (x0, y0) is converted into the laser beam detection means 121. The displacement rotation angle (α, β) required to be displaced to the origin is calculated (S2-4).

  Then, the calculated displacement rotation angle (α, β) is added to the initial rotation angle (X0, Y0) to correct the rotation angle of the steering mirror 20 to (X0 + α, Y0 + β) (S2-5).

  Here, since the pulsed laser beam and the auxiliary laser beam travel in parallel, the incident position of the auxiliary laser beam is optimized by setting the incident position of the auxiliary laser beam detected by the laser beam detecting means 121 as the origin. In addition, the incident angle of the pulsed laser beam can be indirectly optimized. If the incident position of the auxiliary laser beam detected by the laser beam detecting means 121 cannot be set as the origin by the above-described operation, S2-1 to S2-5 are repeated until the incident position of the auxiliary laser beam becomes the origin. Also good.

  In this way, the attitude of the steering mirror 20 is adjusted by controlling the movable unit 25 based on the data detected by the laser beam detection means 121, and the incident of the pulsed laser beam incident on the X-ray generation unit 100 is performed. The angle can be optimized.

  As described above, according to the high energy X-ray generator 1 according to the present embodiment, the laser beam generator 10 and the X-ray generator 100 can be physically separated. It can be downsized. Further, according to the high energy X-ray generator according to the present embodiment, the light guide tube group 50 can be deformed into various shapes, so that the X-ray generator 100 can be freely arranged with respect to the laser beam generator 10. can do.

(Embodiment 2)
In the first embodiment, as described above, the deformable mirror 130 is used to reflect the pulsed laser beam to finally generate high-energy X-rays. However, the pulse-shaped incident light to the X-ray generation unit 100 is generated. When the laser beam is high quality, the high energy X-ray generator may be configured without using the deformable mirror 130. Specifically, a high energy X-ray generator as shown in FIGS. 17 and 18 may be configured. FIG. 17 is a schematic diagram showing a high-energy X-ray generator according to this embodiment, and FIG. 18 is a schematic diagram showing an X-ray generator according to this embodiment. Note that the high quality of the pulsed laser beam means that the pulsed laser beam is sufficiently condensed so that the sample 150 can be ionized when it enters the sample 150, and the pulsed laser beam is This means that the aberration of the wavefront is in a state where the second and higher terms can be ignored in the ZERNIKE polynomial.

  As shown in FIG. 17, the high energy X-ray generator 1A according to the present embodiment is different from the high energy X-ray generator 1 according to the first embodiment only in the X-ray generator 100A. Therefore, hereinafter, the same components as those of the first embodiment, including components not shown, will be described with the same reference numerals as those of the first embodiment.

  As shown in FIG. 18, the X-ray generator 100A of this embodiment differs from the X-ray generator 100 of Embodiment 1 in that a reflecting mirror 130A is provided instead of the deformable mirror 130, and further off-axis is provided. Although the sample position adjusting means 155 for adjusting the distance of the sample 150 with respect to the parabolic mirror 140 is provided, the deformable mirror control means 180 is not provided. The sample position adjusting means 155 can adjust the distance of the sample 150 with respect to the off-axis parabolic mirror 140 so that a large amount of high-energy electrons are generated.

  Even when the high-energy X-ray generator is configured in this way, high-energy electrons are generated when the pulsed laser beam incident on the X-ray generator 100 is of high quality, that is, when it enters the sample 150. In the case of a high-quality pulsed laser beam, high-energy X-rays can be easily generated without controlling the deformable mirror as in the first embodiment.

  Here, the sample position adjusting means 155 is not particularly limited as long as it can control the distance of the sample 150 with respect to the off-axis parabolic mirror 140. Examples of the sample position adjusting unit 155 include a device that moves the sample 150 including the tape winding unit 151 with respect to the off-axis parabolic mirror 140 using a motor or the like.

  In the present embodiment, the reflecting mirror 130A used in place of the deformable mirror is not particularly limited as long as it can reflect a pulsed laser beam, such as a gold vapor deposition mirror or a dielectric multilayer mirror. Can be mentioned.

  In the present embodiment, the high-energy X-ray generator is configured by using the reflecting mirror 130A instead of the deformable mirror. However, this is a case where the pulsed laser beam incident on the X-ray generator 100 is of high quality. However, it goes without saying that it may be configured using a deformable mirror.

(Embodiment 3)
In the first embodiment, the pulsed laser beam created from the laser beam generation unit 10 is incident on the X-ray generation unit 100 to finally generate high energy X-rays. A pulsed pre-laser beam may be incident before entering the line generation unit 100. Specifically, a high energy X-ray generator as shown in FIG. 19 may be configured. FIG. 19 is a schematic view showing a high-energy X-ray generator according to this embodiment.

  As shown in FIG. 19, the high energy X-ray generator 1B according to this embodiment is different from the high energy X-ray generator 1 according to Embodiment 1 only in the laser beam generator 10B. Therefore, hereinafter, the same components as those of the first embodiment, including components not shown, will be described with the same reference numerals as those of the first embodiment.

  The laser beam generation unit 10B of the present embodiment can generate a pulsed laser beam created from the laser beam generation unit 10B and a pulsed pre-laser beam created before the pulsed laser beam. . In addition, by configuring the high energy X-ray generator in this way, it is possible to generate high energy X-rays having higher energy compared to the high energy X-ray generator according to the first embodiment. It has become. Note that the pulsed pre-laser beam is a kind of pulsed laser beam, which is incident on the sample 150 before the pulsed laser beam is incident on the sample 150 and has an intensity smaller than the intensity of the pulsed laser beam. It is what you have. Below, the component which comprises the high energy X-ray generator 1B of this embodiment is demonstrated.

  The laser beam generator 10B is not particularly limited as long as it can create a pulsed pre-laser beam and can subsequently generate a pulsed laser beam, but can generate an ultrashort pulse laser beam or a femtosecond laser beam. preferable. High energy electrons having higher energy can be generated by using a laser capable of generating an ultrashort pulse laser beam or a femtosecond laser beam.

  The pulsed laser beam and the pulsed prelaser beam created by the laser beam generator 10B are not particularly limited as long as the intensity of the pulsed prelaser beam is smaller than the intensity of the pulsed laser beam.

  The time from when the pulsed pre-laser beam enters the sample 150 of the X-ray generation unit 100 to when the pulsed laser beam enters the sample 150 is such that the pulsed pre-laser beam is incident on the sample 150. Is not particularly limited as long as a pulsed laser beam can be incident when plasma is generated from the surface or a part of the plasma and the plasma density is equal to or lower than the critical plasma density, but the time is 0.01 to 100 ns. Those within the range are preferred. When a pulsed laser beam is incident on the sample 150 so as to satisfy this range, more high-energy electrons can be generated.

  Here, the critical plasma density is the density of plasma that is necessary and sufficient not to transmit the pulsed laser beam when the pulsed laser beam is incident on the plasma, that is, the transmittance of the pulsed laser beam. The plasma density at 0%.

  In addition, since the component which comprises the high energy X-ray generator 1B which concerns on this embodiment is the same as what comprises the high energy X-ray generator 1 which concerns on Embodiment 1, description is abbreviate | omitted.

  Next, the operation of the high energy X-ray generator 1B shown in FIG. 19 will be described. First, the pulsed laser beam created by the laser beam generating unit 10 </ b> B and the pulsed prelaser beam created before the pulsed laser beam enter the X-ray generating unit 100 through the light guide tube group 50. Then, the incident pulsed laser beam and the pulsed pre-laser beam are reflected by the deformable mirror 130 toward the off-axis parabolic mirror 140. Then, the pulsed laser beam and the pulsed pre-laser beam incident on the off-axis parabolic mirror 140 are reflected and condensed and enter the sample 150.

  Here, as described above, since the pulsed pre-laser beam is created before the pulsed laser beam, the pulsed laser beam is incident on the sample 150 before entering the sample 150. Then, the surface or a part of the state of the sample 150 is changed by the incidence of the pulsed pre-laser beam, and plasma is generated. When a pulsed laser beam is incident when the plasma density is equal to or lower than the above-mentioned critical plasma density, high-energy electrons having high energy can be generated. Then, the high energy electrons are incident on the X-ray conversion material 170, and high energy X-rays having higher energy can be generated.

  As described above, according to the high energy X-ray generator 1B according to the present embodiment, the pulsed pre-laser is incident on the sample 150 before the pulsed laser beam is incident on the sample 150. By generating a plasma having a critical plasma density or less from the surface or a part thereof, and making a pulsed laser incident on the plasma, finally, high energy X-rays having a large number of higher energies can be generated.

(Embodiment 4)
Although Embodiment 1-3 demonstrated the high energy X-ray generator which is an example of a high energy particle generator, this invention is not limited to this. Examples of the high energy particle generator include a high energy electron generator, a high energy proton generator, and a high energy cation generator. Such a high energy particle generator can be configured by providing a high energy particle generator as shown below instead of the X-ray generator 100 according to the first embodiment, for example. Therefore, hereinafter, the same components as those of the first embodiment, including components not shown, will be described with the same reference numerals as those of the first embodiment.

  FIG. 20 is a schematic diagram of a high-energy particle generation unit 100C of a high-energy electron generation device that is an example of a high-energy particle generation device. As shown in FIG. 20, the high energy particle generation unit 100 </ b> C is mainly different from the high energy X-ray generation unit 100 according to the first embodiment in that the X-ray conversion material 170 is not provided. In the first embodiment, the sample 150 is ionized by irradiation with a pulsed laser beam to generate high energy electrons, and the high energy electrons are incident on the X-ray conversion material to generate high energy X-rays. In this embodiment, since the X-ray conversion material is not provided, it is possible to use the high energy electrons generated from the sample 150C by the irradiation of the pulsed laser beam as they are.

  By configuring the high energy particle generating apparatus 1C in this manner, the laser beam generating unit 10 and the high energy particle generating unit 100C can be physically separated, so that the high energy particle generating unit 100C can be downsized. it can. In addition, since the light guide tube group 50 can be deformed in various shapes, the high energy particle generating unit 100 </ b> C can be freely arranged with respect to the laser beam generating unit 10.

  Here, as the sample 150C, a sample similar to the sample 150 of Embodiment 1 can be used. Further, quartz material or the like may be used as the exit window 190C, or the exit window 190C may be removed and the high energy particle generating unit 100C may be directly connected to another vacuum apparatus (such as a container charged with an evaluation sample). .

  Such a high energy particle generating unit 100C can be applied to pulse radiolysis, pulse electron beam radiography, and the like.

  As described above, by configuring the high-energy particle generator, a large number of high-energy electrons can be emitted, but the high-energy particle generator that can emit other particles also changes the sample 150C, etc. By doing so, it can be configured similarly.

  For example, the above-described sample 150C is made of a material containing hydrogen such as plastic, and the emission window 190C is made of a material that can transmit high-energy protons, thereby enabling high-energy particles that can emit high-energy protons. A generator can be constructed. By configuring the high-energy particle generator in this way, as described above, when the sample 150C is ionized by irradiation with a pulsed laser beam and high-energy electrons are generated, the protons generated simultaneously are emitted as high-energy protons. The light can be emitted from the window 190C.

  For example, when emitting high energy carbon, the sample 150C is made of a material containing carbon, and the emission window 190C is made of a material that can transmit high energy carbon, thereby emitting the high energy carbon. The high energy particle generator which can be made can be comprised. By configuring the high energy particle generator in this way, high energy carbon can be generated in the same manner as the high energy protons described above.

  Note that the high-energy particle generator capable of emitting these other cations can be similarly configured by changing the sample 150C.

(Other embodiments)
In the high energy X-ray generators of Embodiments 1 to 3, high energy X-rays are generated using an X-ray generator provided with a tape-shaped sample, but the X-ray generator is not limited to this. For example, you may comprise a high energy X-ray generator using the X-ray generation part shown below.

  FIG. 21 is a schematic diagram showing an X-ray generation unit 100D provided with a gas sample injection means 151D for injecting a gaseous sample 150D in place of the X-ray conversion material and the sample winding means. The gas sample ejecting means 151D shown in FIG. 21 is in a gaseous state in synchronism with the pulsed laser beam incident on the X-ray generation unit 100D so that the pulsed laser beam is incident on the ejected gaseous sample 150D. The sample 150D can be ejected. Even when the high-energy X-ray generator is configured using the X-ray generator 100D, the same effects as those of the high-energy X-ray generator according to the first to third embodiments can be obtained.

The gas sample injection unit 151D is not particularly limited as long as it can inject the gaseous sample 150D. For example, a solenoid type injector may be used. The gaseous sample 150D ejected from the gas sample ejecting means 151D is not particularly limited as long as it can generate X-rays. For example, hydrogen (H ₂ ), nitrogen (N ₂ ), helium ( He) and the like, and nitrogen is particularly preferable. Since hydrogen has only one ionization state, when hydrogen is used as the sample 150D, the phenomenon in the X-ray generation unit 100D can be accurately grasped.

  FIG. 22 is a schematic view showing an X-ray generation unit 100E filled with a gaseous sample (not shown) instead of the X-ray conversion material and the sample winding means. In such an X-ray generation unit 100E, by controlling the density of the gaseous sample, the pulsed laser beam incident on the X-ray generation unit 100E hardly reacts with the gaseous sample as it is. Only after being reflected and collected by the parabolic mirror 140, it reacts with the gaseous sample. Even if the high-energy X-ray generator is configured using the X-ray generator 100E, the same effects as those of the high-energy X-ray generator according to the first to third embodiments can be obtained, and the X-ray generator can be further reduced in size. Can be

The gaseous sample (not shown) is not particularly limited as long as it can generate X-rays. Examples thereof include hydrogen (H ₂ ), nitrogen (N ₂ ), and helium (He). The density of these gaseous samples is preferably such that the electron density is about 1.0 × 10 ¹⁸ / cc. That is, the density of hydrogen is preferably about 0.5 × 10 ¹⁸ pieces / cc, and the density of nitrogen is preferably about 0.07 × 10 ¹⁸ pieces / cc.

  Moreover, in the high energy X-ray generator of Embodiments 1-3, the high energy electrons generated from the tape-shaped sample were converted into high energy X-rays using the X-ray conversion material, but as shown in FIG. In addition, instead of providing the X-ray conversion material, the X-ray emission window 190F may be made of the same material as the X-ray conversion material described above so that the X-ray emission window 190F itself functions as the X-ray conversion material. . By configuring the high-energy X-ray conversion device in this way, it is not necessary to provide the X-ray conversion material in the X-ray generation unit, so that the number of parts constituting the X-ray generation unit can be reduced, and as a result There is an effect that a high-energy X-ray converter can be easily manufactured.

  Furthermore, as shown in FIG. 24, instead of providing the X-ray conversion material, the vacuum chamber 101G is made of the same material as the X-ray conversion material described above so that the vacuum chamber 101G itself functions as the X-ray conversion material. May be. By configuring the high-energy X-ray conversion device in this way, it is not necessary to provide the X-ray conversion material in the X-ray generation unit, so that the number of parts constituting the X-ray generation unit can be further reduced. As a result, it is possible to produce a high-energy X-ray converter more easily. Note that the X-ray exit window 190F and the vacuum chamber 101G in these cases have sufficient rigidity to withstand the pressure difference between the inside and outside of the vacuum chamber and have a thickness that can generate more high-energy X-rays. Needless to say, one is preferable.

<Application example>
As an application example using the high-energy particle generator described above, for example, a non-destructive cross-sectional inspection apparatus for tubular members as shown in FIG. FIG. 25 is a schematic top view of the tubular member nondestructive inspection apparatus.

  As shown in FIG. 25, in the tubular member nondestructive inspection device 300, a rail 310 is disposed around a tubular member 500 to be inspected such as a boiler and piping installed in a nuclear reactor. Then, the X-ray generation unit 100 according to the first embodiment is movably disposed on the rail 310, and high-energy X-rays are detected on the rail 310 positioned symmetrically about the tubular member 500 with the tubular member 500 interposed therebetween. The X-ray detector 320 is movably disposed, and the high-energy X-ray emitted from the X-ray generator 100 and transmitted through the tubular member 500 is detected by using the X-ray detector 320 to form a tubular shape. The state inside the member 500 can be inspected.

  In such a tubular member nondestructive inspection apparatus 300, the X-ray generation unit 100 can be freely arranged with respect to the laser beam generation unit 10 as described above, and therefore the X-ray generation unit 100 is moved along the rail 310. Can be made. Therefore, the X-ray generation unit 100 is moved and the X-ray detector 320 is moved according to the position of the X-ray generation unit 100 to irradiate the X-ray from the X-ray generation unit 100 at every predetermined angle. By detecting the high-energy X-rays that have passed through the inside using the X-ray detector 320, the state of the entire periphery inside the tubular member 500 can be inspected as a result.

  In this application example, the high energy X-ray generator according to the first embodiment is used as the high energy particle generator, but it goes without saying that the high energy particle generator according to the other embodiments can be similarly applied. .

It is the schematic which shows the high energy X-ray generator which concerns on Embodiment 1. FIG. FIG. 3 is a schematic view illustrating a part of the light guide tube group of the first embodiment. It is a schematic sectional drawing of the light guide tube group shown in FIG. FIG. 3 is a schematic cross-sectional view of a light guide tube connected to the laser beam generation unit of the first embodiment. 2 is a schematic diagram illustrating an X-ray generation unit according to Embodiment 1. FIG. FIG. 3 is a schematic side view showing the deformable mirror of the first embodiment. It is the schematic when the deformable mirror shown in FIG. 6 is seen from the A direction. 1 is a schematic diagram of a chromosome according to Embodiment 1. FIG. It is the schematic of the chromosome before the mating which concerns on Embodiment 1. FIG. 2 is a schematic diagram of chromosomes after mating according to Embodiment 1. FIG. It is the schematic of the chromosome before the mutation which concerns on Embodiment 1. FIG. It is the schematic of the chromosome after the mutation which concerns on Embodiment 1. FIG. 3 is a graph showing a relationship between voltage and time measured by XPD according to the first embodiment. It is a flowchart which shows the optimization procedure of the high energy electron generation method using the high energy X-ray generator which concerns on Embodiment 1. FIG. FIG. 2 is a schematic diagram illustrating a control unit according to the first embodiment. 3 is a flowchart illustrating a procedure for optimizing the incident position of a laser beam according to the first embodiment. It is the schematic which shows the high energy X-ray generator which concerns on Embodiment 2. FIG. It is the schematic which shows the X-ray generation part of Embodiment 2. It is the schematic which shows the high energy X-ray generator which concerns on Embodiment 3. FIG. It is the schematic which shows the high energy particle generation part of Embodiment 4. It is the schematic which shows the X-ray generation part of other embodiment. It is the schematic which shows the X-ray generation part of other embodiment. It is the schematic which shows the X-ray generation part of other embodiment. It is the schematic which shows the X-ray generation part of other embodiment. It is a schematic top view of the tubular member nondestructive inspection device of an application example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 1A, 1B X-ray generator 10, 10A Laser beam generation part 20 Steering mirror 25 Movable part 50 Light guide tube group 51 Light guide tube 52, 130A Reflective mirror 55 Joining tube 56 Bending part 70 Control part 100, 100A, 100D- 100G X-ray generator 100C High energy particle generator 101, 101G Vacuum chamber 110 Laser beam entrance window 120 Laser beam splitter 121 Laser beam detector 130 Deformable mirror 131 Mirror surface 132 Electrode 133 Spacer 134 Voltage regulator 135 Power source 136 Substrate 140 Off-axis paraboloid Surface mirror 150 Sample 150D Gas sample 151 Sample winding means 151D Gas sample injection means 160 X-ray detection means 170 X-ray conversion material 180 Deformable mirror control means 190 X-ray emission window 190C Emission window

Claims (21)

A laser beam generator that creates a pulsed laser beam;
A high energy particle generator that generates high energy particles by causing a pulsed laser beam created from the laser beam generator to enter a sample; and
A light guide tube group for connecting the laser beam generation unit and the high energy particle generation unit to guide the pulsed laser created from the laser beam generation unit to the high energy particle generation unit;
The light guide tube group includes:
A plurality of light guide tubes through which the pulsed laser beam passes; and
The end portions of the respective light guide tubes are connected so as to be bent in an arbitrary plane, and the pulsed laser beam incident from the end portion of one light guide tube is reflected to the end portion of the other light guide tube. A high-energy particle generator comprising: a joining tube having a reflecting mirror. In the high energy particle generator of Claim 1,
The laser beam generator creates an auxiliary laser beam that travels in parallel with the traveling direction of the pulsed laser beam together with the pulsed laser beam,
A pulsed laser beam that reflects a pulsed laser beam and an auxiliary laser beam and enters the high-energy particle generating unit at a portion from the light guide tube connected to the high-energy particle generating unit to the high-energy particle generating unit. And a steering mirror for changing the incident angle of the auxiliary laser beam, and a laser beam detecting means for detecting the incident angle of the auxiliary laser beam with respect to the high energy particle generating unit,
And a controller that controls the incident angle of the pulsed laser beam and the auxiliary laser beam incident on the high-energy particle generator by controlling the attitude of the steering mirror based on the data detected by the laser beam detector. A high-energy particle generator. In the high energy particle generator according to claim 1 or 2,
The high energy particle generating part is
A mirror surface that reflects the pulsed laser beam;
A deformable mirror having a plurality of electrodes provided facing the mirror surface and deforming the shape of the mirror surface by applying a voltage to the electrodes;
An off-axis parabolic mirror that reflects and focuses the laser beam reflected by the deformable mirror on the sample;
A scintillation detector or an X-ray photodiode for measuring X-rays generated when high-energy electrons are generated from the sample;
A combination of voltages applied to the plurality of electrodes is genetically connected to the plurality of electrodes and the scintillation detector or the X-ray photodiode, and based on data measured by the scintillation detector or the X-ray photodiode. A high-energy particle generator comprising genetic algorithm optimizing means for optimizing so as to generate high-energy electrons having the highest energy using an algorithm. The high energy particle generator according to claim 3, wherein the genetic algorithm is:
A first generation step of generating a plurality of chromosomes that specify the shape of the mirror surface from a combination of voltages applied to the plurality of electrodes;
X-rays generated when high-energy electrons are generated using the high-energy particle generator corresponding to the chromosome are evaluated for the peak-to-peak value of the voltage measured by the scintillation detector or the X-ray photodiode. A granting step for assigning a rank to the chromosome;
A determination step of determining whether or not the chromosome to which the rank is assigned satisfies a convergence condition;
A second generation step of performing genetic manipulation based on the assigned rank to the chromosome to which the rank is assigned, thereby generating a new generation of chromosomes, and
First, for the chromosome generated by the first generation step, the application step and the determination step are executed in order,
If it is determined by the determination step that the chromosome does not satisfy the convergence condition, the grant is performed on the new generation of chromosomes generated by the second generation step until it is determined that the convergence condition is satisfied. The high energy particle generator characterized by repeatedly performing a process and the said determination process. In the high energy particle generator in any one of Claims 1-4,
The sample provided in the high-energy particle generator is a solid sample that can be ionized by a pulsed laser beam,
Before the pulsed laser beam is incident on the solid sample, a pulsed pre-laser beam is incident to generate a plasma having a critical plasma density or less from the surface or part of the solid sample, and the pulsed laser beam is applied to the plasma. A high-energy particle generator characterized by making the light incident. 6. The high-energy particle generator according to claim 5, wherein the pulsed pre-laser beam comprises a plurality of pulsed laser beams. In the high energy particle generator in any one of Claims 1-4,
The sample is a gaseous sample;
The high energy particle generation unit has a gas sample injection means for injecting the gaseous sample,
A high-energy particle generating apparatus that ejects the gaseous sample in synchronization with a pulsed laser beam incident on the high-energy particle generating unit. In the high energy particle generator in any one of Claims 1-4,
The sample is a gaseous sample;
The high-energy particle generator is filled with the gaseous sample having a predetermined density. The high energy particle generator according to any one of claims 1 to 6, wherein the sample has a tape-like shape that can be wound, and a sample winding means for winding the sample in the high energy particle generator. Furthermore, the high energy particle generator characterized by providing. The high energy particle generator according to any one of claims 1 to 9, wherein the laser beam is an ultrashort pulse laser beam or a femtosecond laser beam. In the high energy particle generator according to any one of claims 1 to 10,
The high-energy particle generator generates high-energy X-rays by causing the high-energy electrons generated by causing the pulsed laser beam created from the laser beam generator to enter the sample and further entering the X-ray conversion material. A high-energy particle generator. Arranging a rail around the tubular member;
A high-energy particle detector for detecting a high-energy particle emitted from the high-energy particle generator while movably disposing the high-energy particle generator of the high-energy particle generator according to claim 11 on the rail. A non-destructive inspection apparatus for a tubular member, wherein the apparatus is movably arranged so as to be axially symmetric with the high-energy particle generating portion with respect to the axis of the tubular member. A high energy particle generator that generates high energy particles by causing a pulsed laser beam created from the laser beam generator to enter a sample; and
A light guide tube group for connecting the laser beam generation unit and the high energy particle generation unit to guide the pulsed laser created from the laser beam generation unit to the high energy particle generation unit;
The light guide tube group includes:
A plurality of light guide tubes through which the pulsed laser beam passes; and
The end portions of the respective light guide tubes are connected so as to be bent in an arbitrary plane, and the pulsed laser beam incident from the end portion of one light guide tube is reflected to the end portion of the other light guide tube. Using a high energy particle generator having a junction tube with a built-in reflector,
A high energy particle generating method for generating high energy particles by arranging the high energy particle generating unit at an arbitrary position from the laser beam generating unit. In the high energy particle generating method according to claim 13,
The laser beam generator creates an auxiliary laser beam that travels in parallel with the traveling direction of the pulsed laser beam together with the pulsed laser beam,
A pulsed laser beam that reflects a pulsed laser beam and an auxiliary laser beam and enters the high-energy particle generating unit at a portion from the light guide tube connected to the high-energy particle generating unit to the high-energy particle generating unit. And a steering mirror for changing the incident angle of the auxiliary laser beam and a laser beam detecting means for detecting the incident angle of the auxiliary laser beam with respect to the high energy particle generating unit,
Furthermore, the incident angle of the pulsed laser beam and the auxiliary laser beam incident on the high energy particle generating unit is optimized by controlling the attitude of the steering mirror based on the data detected by the laser beam detecting means, To generate high energy particles. In the high energy particle generation method according to claim 13 or 14,
The high energy particle generating part is
A deformable mirror having a mirror surface that reflects a pulsed laser beam and a plurality of electrodes connected to the mirror surface, the shape of the mirror surface being deformed by applying a voltage to the electrode;
An off-axis parabolic mirror that reflects and focuses the pulsed laser beam reflected by the deformable mirror on the sample;
A scintillation detector or an X-ray photodiode that measures X-rays generated when high-energy electrons are generated from the sample;
Based on data measured by the scintillation detector or X-ray photodiode, a genetic algorithm is used to optimize the combination of voltages applied to the plurality of electrodes to generate the highest energy electrons with the highest energy A method for generating high-energy particles. The high energy particle generating method according to claim 15,
The genetic algorithm is:
A first generation step of generating a plurality of chromosomes that specify the shape of the mirror surface from a combination of voltages applied to the plurality of electrodes;
X-rays generated when high-energy electrons are generated using the high-energy particle generator corresponding to the chromosome are evaluated for the peak-to-peak value of the voltage measured by the scintillation detector or the X-ray photodiode. A granting step for assigning a rank to the chromosome;
A determination step of determining whether or not the chromosome to which the rank is assigned satisfies a convergence condition;
A second generation step of performing genetic manipulation based on the assigned rank to the chromosome to which the rank is assigned, thereby generating a new generation of chromosomes, and
First, for the chromosome generated by the first generation step, the application step and the determination step are executed in order,
If it is determined by the determination step that the chromosome does not satisfy the convergence condition, the grant is performed on the new generation of chromosomes generated by the second generation step until it is determined that the convergence condition is satisfied. The high energy particle generation method characterized by repeatedly performing a process and the said determination process. In the high energy particle generation method in any one of Claims 13-16,
The sample is a solid sample that can be ionized by a pulsed laser beam,
Before the pulsed laser beam is incident on the solid sample, a pulsed pre-laser beam is incident to generate a plasma having a critical plasma density or less from the surface or part of the solid sample, and the pulsed laser beam is applied to the plasma. A method for generating high energy particles, wherein The high energy particle generating method according to claim 17,
The method of generating high-energy particles, wherein the pulsed pre-laser beam comprises a plurality of pulsed laser beams. In the high energy particle generation method in any one of Claims 13-16,
The sample is a gaseous sample;
The high energy particle generation unit has a gas sample injection means for injecting the gaseous sample,
A method for generating high-energy particles, characterized in that the gaseous sample is jetted in synchronism with a pulsed laser beam incident on the high-energy particle generator. In the high energy particle generation method in any one of Claims 13-16,
The sample is a gaseous sample;
The high energy particle generating part is filled with the gaseous sample having a predetermined density. In the high energy particle generating method according to any one of claims 13 to 20,
The high-energy particle generator generates high-energy X-rays by causing the high-energy electrons generated by causing the pulsed laser beam created from the laser beam generator to enter the sample and further entering the X-ray conversion material. A method for generating high-energy particles.

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