JP2008057384A - Fluid forcible circulation device and fluid forcible circulation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid forcible circulation device and a fluid forcible circulation method capable of forcibly circulating fluid between electric potential plates to a predetermined direction without using a fan. <P>SOLUTION: The fluid forcible circulation device includes the two opposing electric potential plate on which different electric potential is applied, a vibration body put between the two electric potential plates and having a plurality of electrodes provided in a same direction as a predetermined circulation direction of the fluid between the electric potential plates, and a control part controlling to apply electric potential of a predetermined polarity on the plurality of electrodes respectively at predetermined timing. The vibration body is vibrated by static electric power generated among the plurality of electrodes provided on two electric potential plates and the vibration body. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a fluid forced flow device and a fluid forced flow method for forcibly flowing a fluid between two opposing potential plates.

  Computers such as personal computers and electronic devices such as power supply devices include components that generate heat such as arithmetic processing chips such as a CPU (Central Processing Unit) and semiconductor elements such as transistors.

  In these electronic devices, heat transferred from the heat generating component is radiated by a heat sink (heat radiating plate) in close contact with the heat generating component, and air heated by the heat radiated using a fan is sent to the outside. Some heat-generating components are cooled by cooling the heat sink by circulating (discharging).

A technique related to a cooling mechanism of an electronic device using a heat sink is disclosed in, for example, Japanese Patent Application Laid-Open No. 2006-85422.
JP 2006-85422 A

  However, the above-described conventional technology using a heat sink and a fan has a problem that noise due to sound (motor sound, wind noise) generated from the fan and a space for installing the fan are necessary.

  In addition, it is possible to improve the heat dissipation efficiency by narrowing the spacing between the radiating fins and increasing the number of radiating fins. However, if the spacing between the radiating fins is narrowed, the air in the gap (heat radiated) Air heated by heat becomes difficult to circulate and stays in the gap. Therefore, in this case, it is necessary to have a structure in which air that has been warmed and retained by the radiated heat is forcibly discharged to the outside by a large fan. However, as the size of the fan increases, motor noise and wind noise generated from the fan also increase, and there is a problem that these sounds (noise) are always generated from the electronic device.

  At the same time, as the fan becomes larger, more installation space is required, and it is difficult to reduce the size of the electronic device.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a fluid forced flow device and a fluid forced flow method capable of forcibly flowing a fluid between potential plates in a predetermined direction without using a fan.

  In order to solve the above-mentioned problem, the fluid forced flow device of the present invention according to claim 1 is interposed between two opposing potential plates to which different potentials are applied, and between the two potential plates. A vibrating body in which a plurality of electrodes are arranged in the same direction as a predetermined flow direction of the fluid between the potential plates, and a potential having a predetermined polarity is given to each of the plurality of electrodes at a predetermined timing. Control means for controlling, and vibrating the vibrating body by electrostatic force generated between the two potential plates and a plurality of electrodes disposed on the vibrating body.

  As a result, the vibrating body can be vibrated as it moves in the direction of one of the two potential plates facing each other due to electrostatic force, so that the potential can be reduced without using a fan. The fluid between the plates can be forced to flow in a predetermined direction.

  According to a second aspect of the present invention, in the first aspect of the invention, in the two potential plates, one potential plate is given a negative or positive potential, and the other potential plate is given. A potential having a polarity different from the polarity of the potential applied to the one potential plate or a zero potential is applied.

  As a result, a predetermined potential difference can be reliably generated between the two potential plates facing each other.

  According to a third aspect of the present invention, in the first or second aspect of the present invention, the vibrating body includes a flexible substrate, and the plurality of electrodes on the flexible substrate are in the same direction as the predetermined flow direction. It is arranged in that.

  As a result, the flexible substrate can be vibrated as the plurality of electrodes move toward one of the two potential plates facing each other due to electrostatic force.

  According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, a plurality of the two potential plates disposed on a side facing the vibrating body or on the vibrating body. The electrode is subjected to a coating treatment related to insulation.

  As a result, it is possible to ensure insulation between the potential plate and the plurality of electrodes disposed on the vibrating body.

  According to a fifth aspect of the present invention, in the invention according to any one of the first to fourth aspects, the plurality of electrodes are grouped for every three or more electrodes, and a plurality corresponding to one or more groups. The control means controls so that AC voltages having different phases are applied to each of the plurality of electrodes in each group.

  As a result, the vibrating body vibrates with periodicity as each of the plurality of electrodes corresponding to one or more groups is moved in the direction of one of the two potential plates facing each other by electrostatic force. Can be made.

  According to a sixth aspect of the present invention, in the fifth aspect of the present invention, when the control unit is provided with a plurality of electrodes corresponding to a plurality of groups in the vibrating body, Control is performed so that an in-phase AC voltage is applied to the electrodes in the same order in the arrangement order of the electrodes in the group.

  Thereby, when the length of the predetermined distribution direction of the vibrating body is constant, the direction of any one of the two potential plates sequentially facing each of the plurality of electrodes corresponding to the plurality of groups by electrostatic force As it moves to, the vibrating body can be vibrated with a short period.

  According to a seventh aspect of the present invention, the fluid forced flow device of the present invention has two first potential plates that are each given a zero potential, and a positive or negative potential interposed between the two potential plates. A second potential plate to be applied, and one of the two first potential plates, which is interposed between the first potential plate and the second potential plate, and the fluid between these potential plates A first vibrating body having a plurality of electrodes arranged in the same direction as a predetermined flow direction, the other first potential plate of the two first potential plates, and the second potential plate; A second vibrating body having a plurality of electrodes disposed in the same direction as a predetermined flow direction of the fluid between the potential plates, the first vibrating body, and the second vibrating body A potential having a predetermined polarity is applied to each of the plurality of electrodes disposed on each of the vibrating bodies at a predetermined timing. And a control means for controlling the electrostatic force generated between the one first potential plate and the second potential plate and a plurality of electrodes disposed on the first vibrating body. To vibrate the first vibrating body, and the second vibrating body is caused by electrostatic force generated between the other first potential plate and the second potential plate and the second vibrating body. It is made to vibrate.

  Accordingly, the first vibrating body can be vibrated as the plurality of electrodes move toward the first potential plate or the second potential plate by the electrostatic force, and the plurality of electrodes can be vibrated by the electrostatic force. Since the second vibrating body can be vibrated as the electrode moves in the direction of the other first potential plate or the second potential plate, the fluid between the potential plates can be obtained without using a fan. Can be forcibly distributed in a predetermined direction.

  The method for forcibly circulating a fluid according to the present invention according to claim 8 generates a predetermined potential difference between two opposing potential plates to which different potentials are applied, and is interposed between the two potential plates. A predetermined AC voltage is applied to a vibrating body having a plurality of electrodes arranged in the same direction as a predetermined flow direction of the fluid between the potential plates, and a predetermined potential difference is generated between the two potential plates. In this state, the vibrating body is vibrated by electrostatic force generated due to the predetermined AC voltage being applied to the plurality of electrodes, and the fluid between the two potential plates is forced in the predetermined flow direction. It is made to distribute to.

  As a result, the vibrating body can be vibrated as it moves in the direction of one of the two potential plates facing each other due to electrostatic force, so that the potential can be reduced without using a fan. The fluid between the plates can be forced to flow in a predetermined direction.

  According to the fluid forced flow device and the fluid forced flow method of the present invention, as the plurality of electrodes are moved in the direction of one of the two potential plates facing each other by electrostatic force, the vibrating body is moved. Since it can be vibrated, the fluid between the potential plates can be forced to flow in a predetermined direction without using a fan.

  Hereinafter, the best mode for carrying out the present invention will be described more specifically with reference to the drawings. Here, in the accompanying drawings, the same components are denoted by the same reference numerals, and redundant description is omitted. In addition, since description here is the best form by which this invention is implemented, this invention is not limited to the said form.

  (Embodiment 1)

  FIG. 1 is a diagram illustrating the principle of a fluid forced flow device according to the present invention.

  As shown in FIG. 1, the fluid forced flow device is interposed between two opposing potential plates 11, 12 to which different potentials are applied, and between the two potential plates 11, 12, and between these potential plates. And a vibrating body 20 in which a plurality of electrodes (details will be described later) are arranged in the same direction as a predetermined flow direction of the fluid, for example, gas.

  The two potential plates 11 and 12 are formed of a conductive material, for example, a metal such as copper or aluminum, and an interval (separation distance) L between the potential plate 11 and the potential plate 12 is 10 depending on the application of the fluid forced flow device. It is set to be [μm] to 3 [mm].

  In the two potential plates 11, 12, one potential plate, for example, the potential plate 11 is given a negative or positive potential, and the other potential plate, for example, the potential plate 12 is given to the one potential plate 11. A potential having a polarity different from the polarity of the potential or a zero potential is applied.

  A potential having a predetermined polarity is applied to each of the plurality of electrodes (details will be described later) disposed on the vibrating body 20 at a predetermined timing under the control of a control unit described later. .

  In the present invention, it occurs due to a predetermined potential being applied to the plurality of electrodes disposed in the vibrating body 20 in a state where a predetermined potential difference is generated between the two potential plates 11 and 12. The plurality of electrodes are moved in the direction of one of the two potential plates 11 and 12 facing each other by electrostatic force to vibrate the vibrator 20. By vibrating the vibrating body 20 in this manner, a fluid, for example, a gas between the two potential plates 11 and 12 is forcibly circulated in a predetermined flow direction indicated by an arrow A in the figure, for example.

  Incidentally, the predetermined potential difference between the potential plates 11 and 12 is, for example, several tens [V] depending on the distance L between the potential plate 11 and the potential plate 12 and the conditions of the system to which the fluid forced flow device is applied. It is set to be several thousand [V].

  Both ends 20a and 20b of the vibrating body 20 are fixed in a state where the vibrating body 20 is slackened along the longitudinal direction (predetermined flow direction). That is, when the vibrating body 20 is arranged approximately in the middle between the potential plate 11 and the potential plate 12, a plurality of electrodes arranged on the vibrating body 20 should be brought close to the potential plate 11 or the potential plate 12 by electrostatic force. The end 20a and the end 20b of the vibrating body 20 are fixed so as to be movable.

  As shown in FIG. 2, the vibrating body 20 has a flexible substrate 21, a plurality of electrodes 1a to 8a on one surface 21a of the flexible substrate 21, and a plurality of electrodes 1b to 1b on the other surface 21b. 8b are respectively arranged. A plurality of electrodes 1a to 8a disposed on the one surface 21a and a plurality of electrodes 1b to 8b disposed on the other surface 21b are provided with a predetermined fluid such as a gas between the two potential plates 11 and 12, respectively. The vibrating body 20 is arranged so as to be arranged in the same direction as the distribution direction.

  Here, the flexible substrate 21 is formed of, for example, polyimide, and the thickness t1 thereof is, for example, 6 to 7 [μm].

  The plurality of electrodes 1a to 8a and the plurality of electrodes 1b to 8b are formed of a conductive material, for example, a metal foil such as a copper foil (Cu foil) or a conductive plastic, and a thickness t2 thereof is, for example, 1 to 8 [μm]. It is.

  In such a plurality of electrodes, for example, the electrode 1 a disposed on one surface 21 a and the electrode 1 b disposed on the other surface 21 b are electrically connected through a through hole 21 c formed in the flexible substrate 21. It is connected. In this case, one electrode 1 is formed by the electrode 1a and the electrode 1b.

  Similarly, the electrodes 2a to 8a disposed on the one surface 21a and the electrodes 2b to 8b disposed on the other surface 21b are electrically connected through a through hole formed in the flexible substrate 21. Each of the electrodes 2 to 8 is formed.

  In the present embodiment, the electrodes 1 to 8 are grouped into a first group GR1 having four electrodes 1 to 4 and a second group GR2 having four electrodes 5 to 8.

  One group only needs to have three or more electrodes, and such one or more groups may be formed on the flexible substrate 21.

  That is, when a plurality (k) groups each having a predetermined number (m) of electrodes are formed on the flexible substrate 21, a plurality (n) corresponding to a value n obtained by calculating “m × k = n”. These electrodes need to be disposed on the flexible substrate 21.

  In the present embodiment, the four electrodes 1 to 4 in the group GR1 are referred to as electrodes # 1 to # 4, and the four electrodes 5 to 8 in the group GR2 are also referred to as electrodes # 1 to # 4.

  By the way, a plurality (n) of electrodes 1 to 8 disposed on the flexible substrate 21, that is, a plurality of electrodes 1a to 8a disposed on one surface 21a and a plurality of electrodes 1b disposed on the other surface 21b. As shown in FIG. 3, coatings 31 and 32 made of, for example, polyimide related to insulation are applied to .about.8b.

  In the present embodiment, a coating process related to insulation is performed on a plurality of electrodes. However, the present invention is not limited to this, and the vibrating body 20 in the two potential plates 11 and 12 is used. You may make it perform the said coating process to the side which opposes. That is, when a part of the vibrating body 20 comes close to the potential plate 11 or the potential plate 12 due to the vibration of the vibrating body 20, the vibration between the plurality of electrodes and the two potential plates 11 and 12. It is only necessary to ensure insulation.

  FIG. 4 shows a main part diagram of a control system of the fluid forced flow device.

  In FIG. 4, the flexible substrate 21 has shown the state seen from the one surface 21a side of the flexible substrate 21 shown in FIG.

  As shown in FIG. 4, the electrode 1a (electrode # 1) of the group GR1 and the electrode 5a (electrode # 1) of the group GR2 are electrically connected by a pattern wiring 41 provided on one surface 21a of the flexible substrate 21. It is connected and is electrically connected to the terminal 51.

  The electrode 3a (electrode # 3) of the group GR1 and the electrode 7a (electrode # 3) of the group GR2 are electrically connected by a pattern wiring 43 provided on one surface 21a of the flexible substrate 21 and a terminal 53 And are electrically connected.

  The electrode 2a (electrode # 2) of the group GR1 and the electrode 6a (electrode # 2) of the group GR2 are a pattern wiring 42a provided on one surface 21a of the flexible substrate 21 and a through hole 42c provided on the flexible substrate 21. , And the pattern wiring 42 b provided on the other surface 21 b of the flexible substrate 21 and the terminal 52. The pattern wiring 42a and the pattern wiring 42b are electrically connected through the through hole 42c.

  The electrode 4a (electrode # 4) of the group GR1 and the electrode 8a (electrode # 4) of the group GR2 are a pattern wiring 44a provided on one surface 21a of the flexible substrate 21 and a through hole 44c provided on the flexible substrate 21. , And the pattern wiring 44 b provided on the other surface 21 b of the flexible substrate 21 and is also electrically connected to the terminal 54. The pattern wiring 44a and the pattern wiring 44b are electrically connected through a through hole 44c.

  In FIG. 4, the power supply unit 60 supplies a predetermined potential (voltage) to a plurality of electrodes provided in the vibrating body 20, and supplies a predetermined potential (alternating voltage) to the electrode # 1. AC power supply AC1, AC power supply AC2 that supplies a predetermined potential (AC voltage) to electrode # 2, AC power supply AC3 that supplies a predetermined potential (AC voltage) to electrode # 3, and electrode # 4 AC power supply AC4 for supplying a predetermined potential (AC voltage), switches sw1 to sw4 corresponding to the AC power supplies AC1 to AC4 and turned on and off, and potentials from the corresponding AC power supply when the switches sw1 to sw4 are turned on ( Terminals 61 to 64 from which (AC voltage) is output.

  The terminals 51 to 54 of the vibrating body 20 (flexible 21) and the terminals 61 to 64 of the power supply unit 60 are electrically connected via a flexible cable 65, for example.

  The control unit 70 controls on / off of the switches sw1 to sw4, and a plurality of electrodes 1 to 8, more specifically, a potential having a predetermined polarity, that is, an AC voltage is applied to each of the electrodes # 1 to # 4 at a predetermined timing. To control.

  As shown in FIG. 5, the control unit 70 applies a square wave AC of a predetermined frequency to the plurality of electrodes # 1 to # 4 corresponding to the plurality of groups GR1 and GR2 formed on the vibrating body 20, that is, the flexible substrate 21. Control is performed so that a voltage is applied. That is, the control unit 70 vibrates the vibrating body 20 by four-phase driving.

  Here, in FIG. 5, (a) shows the waveform of the alternating voltage (applied voltage) applied to the electrode # 1 in the groups GR1 and GR2, and (b) shows the waveform applied to the electrode # 2 in the groups GR1 and GR2. (C) shows an AC voltage (applied voltage) waveform applied to the electrode # 3 in the groups GR1 and GR2, and (d) shows an electrode in the groups GR1 and GR2. The waveform of the alternating voltage (applied voltage) applied to # 4 is shown.

  As shown in FIG. 5A, the control unit 70 applies the square wave AC voltage V1 to the electrode # 1, and the AC voltage V1 to the electrode # 2 as shown in FIG. 5B. A square wave AC voltage V2 having a phase different by π / 2 from the AC voltage V3 is different from the electrode # 3 by a square wave AC voltage V3 having a phase different from the AC voltage V2 by π / 2 as shown in FIG. As shown in FIG. 5D, the electrode # 4 is controlled such that a square wave AC voltage V4 having a phase different by π / 2 from the AC voltage V3 is applied thereto.

  That is, as described above, the control unit 70 performs control so that AC voltages having different phases (phases different from each other by π / 2) are applied to each of the plurality of electrodes # 1 to # 4 in the group.

  In addition, when the plurality of electrodes # 1 to # 4 corresponding to the plurality of groups GR1 and GR2 are disposed on the vibrating body 20, that is, the flexible substrate 21, the control unit 70 includes a plurality of electrodes # in each group. 1 to # 4, an in-phase AC voltage is applied to the electrodes in the same order in the arrangement order of electrodes in the group (electrode # 1, electrode # 2, electrode # 3, electrode # 4). Control.

  In addition, when the frequency of the alternating voltage applied to the electrodes # 1 to # 4 is increased, the repeated movement operation of the plurality of electrodes due to the electrostatic force is accelerated, and accordingly, the vibration of the vibrating body 20 is also accelerated. Become.

  FIG. 6 shows a case where four groups GR1 to GR4 having a plurality of electrodes # 1 to # 4 as described above are formed on the vibrating body 20, that is, the flexible substrate 21 interposed between the two potential plates 11 and 12. The schematic block diagram of the fluid forced flow apparatus is shown. In this case, the vibrating body 20 has the same configuration as that of the example shown in FIGS.

  In the vibrating body 20 illustrated in FIG. 6, for convenience of explanation, the flexible substrate 21 is omitted, and a plurality of electrodes # 1 to # 4 corresponding to the four groups GR1 to GR4 are illustrated.

  The potential plate 11 is given a negative potential (voltage) E1, while the potential plate 12 is given a positive potential (voltage) E2. Assume that AC voltages V1 to V4 corresponding to the electrodes shown in FIG. 5 are applied to the electrodes # 1 to # 4 of the vibrating body 20, respectively.

  Under such a precondition, the fluid forced flow device shown in FIG. 6 corresponds to the groups GR1 to GR4 of the vibrating body 20 in a state where a predetermined potential difference is generated between the two potential plates 11 and 12. FIG. 7 shows how the vibrating body 20 vibrates due to the electrostatic force generated due to the application of the square-wave AC voltage as shown in FIG. 5 to the plurality of electrodes # 1 to # 4. I will explain.

  FIG. 7 shows the movement of each electrode according to the electrostatic force when an AC voltage for one cycle is applied to the electrodes # 1 to # 4 in the groups GR1 to GR4 from the AC power supply corresponding to these electrodes. The state of is shown.

  In FIG. 7, the display of the electrodes # 1 to # 4 in the groups GR1 to GR4 is omitted, but these electrodes # 1 to # 4 have the same configuration (electrode arrangement) shown in FIG. ing.

  5A to 5D, time t0 to time t1, time T1, time t1 to time t2, time T2, time t2 to time t3, time T3, and time t3 to time Let t4 be time T4.

  First, at time T1, as shown in FIGS. 5 (a) and 5 (d), positive voltage V1 and voltage V4 are applied to electrode # 1 and electrode # 4, respectively, and FIG. 5 (b). , (C), negative voltage V2 and voltage V3 are applied to electrode # 2 and electrode # 3.

  The electrodes # 1 to # 4 in the group GR1 are connected to the potential plate 11 by an electrostatic force between the potential plate 11 to which a negative potential is applied or the potential plate 12 to which a positive potential is applied. Alternatively, it moves toward the potential plate 12.

  That is, in the electrodes # 1 to # 4 in the group GR1, as shown in FIG. 7A, the electrodes # 1 and # 4 to which the positive voltage is applied are given a negative potential. On the other hand, the electrode # 2 and the electrode # 3 to which the negative voltage is applied move toward the potential plate 12 to which the positive potential is applied.

  Note that the electrodes # 1 to # 4 in the groups GR2 to GR4 also move in the same manner as the electrodes # 1 to # 4 in the loop GR1 due to the electrostatic force between these electrodes and the potential plates 11 and 12. Is done.

  Next, at time T2, as shown in FIGS. 5A and 5B, positive voltage V1 and voltage V2 are applied to electrode # 1 and electrode # 2, respectively, and FIG. , (D), negative voltage V3 and voltage V4 are applied to electrode # 3 and electrode # 4.

  Therefore, in the electrodes # 1 to # 4 in the group GR1 in the state shown in FIG. 7A, as shown in FIG. 7B, the electrode # 2 to which the negative voltage V2 was applied during the time T1. Since the positive voltage V2 is applied to the electrode 2, the electrode # 2 moves toward the potential plate 11 to which a negative potential is applied.

  Further, since the negative voltage V4 is applied to the electrode # 4 to which the positive voltage V4 was applied during the time T1, this electrode # 4 is a potential to which a positive potential is applied. It will move toward the plate 12.

  Since the voltage having the same polarity as that of the voltage applied at time T1 is applied to the electrode # 1 and the electrode # 3, the electrode # 1 and the electrode # 3 are left as they are. Yes.

  Also in this case, the electrodes # 1 to # 4 in the groups GR2 to 4 are the same as the electrodes # 1 to # 4 in the loop GR1 due to the electrostatic force between these electrodes and the potential plates 11 and 12. A move is made.

  Subsequently, at time T3, as shown in FIGS. 5A and 5D, the negative voltage V1 and the voltage V4 are applied to the electrode # 1 and the electrode # 4, respectively, and FIG. , (C), negative voltage V2 and voltage V3 are applied to electrode # 2 and electrode # 3.

  Therefore, in the electrodes # 1 to # 4 in the group GR1 in the state shown in FIG. 7B, as shown in FIG. 7C, the electrode # to which the positive voltage V1 was applied during the time T2. Since the negative voltage V1 is applied to 1, the electrode # 1 moves toward the potential plate 12 to which the positive potential is applied.

  In addition, since the positive voltage V3 is applied to the electrode # 3 to which the negative voltage V3 was applied during the time T2, this electrode # 3 is a potential to which a negative potential is applied. It moves toward the plate 11.

  Since the voltage having the same polarity as that of the voltage applied at time T2 is applied to the electrode # 2 and the electrode # 4, the electrode # 2 and the electrode # 4 are left as they are. Yes.

  Also in this case, the electrodes # 1 to # 4 in the groups GR2 to 4 are the same as the electrodes # 1 to # 4 in the loop GR1 due to the electrostatic force between these electrodes and the potential plates 11 and 12. A move is made.

  Further, at time T4, as shown in FIGS. 5 (a) and 5 (b), negative voltage V1 and voltage V2 are applied to electrode # 1 and electrode # 2, respectively. As shown in (d), positive voltage V3 and voltage V4 are applied to electrode # 3 and electrode # 4.

  Therefore, in the electrodes # 1 to # 4 in the group GR1 in the state shown in FIG. 7C, as shown in FIG. 7D, the electrode # where the positive voltage V2 was applied during the time T3. Since the negative voltage V2 is applied to the electrode 2, the electrode # 2 moves toward the potential plate 12 to which a positive potential is applied.

  Further, since the positive voltage V4 is applied to the electrode # 4 to which the negative voltage V4 was applied during the time T3, the electrode # 4 is a potential to which a negative potential is applied. It moves toward the plate 11.

  In addition, since the voltage of the same polarity as the voltage applied at time T3 is applied to the electrode # 1 and the electrode # 3, the electrode # 2 and the electrode # 4 are left as they are. Yes.

  Also in this case, the electrodes # 1 to # 4 in the groups GR2 to 4 are the same as the electrodes # 1 to # 4 in the loop GR1 due to the electrostatic force between these electrodes and the potential plates 11 and 12. A move is made.

  As described above, when a square wave AC voltage for one period is applied to the electrodes # 1 to # 4 in the groups GR1 to GR4, these electrodes # 1 to # 4 are connected to each other as shown in FIG. , The state shown in FIG. 7B, the state shown in FIG. 7C, and the state shown in FIG. Then, for the next one cycle, the state is sequentially changed to the four states described above.

  Thereby, the gas between the potential plate 11 and the potential plate 12 flows from the electrode # 1 side to the electrode # 2 side of each group GR1 to GR4, then from the electrode # 2 side to the electrode # 3 side, and further to the electrode # 3. It is distributed from the 3 side toward the electrode # 4 side.

  In the present embodiment, the plurality of electrodes in the vibrating body 20 are arranged on both the one surface 21a and the other surface 21b of the flexible substrate 21, but the present invention is limited to this. Instead, the plurality of electrodes may be arranged on either one of both surfaces of the flexible substrate 21.

  That is, as shown in FIG. 8, the vibrating body 20 is provided with, for example, a plurality of electrodes # 1 to # 4 corresponding to a plurality of groups, for example, two groups GR1 and GR2, on one surface 21a of the flexible substrate 21. You may do it.

  In the present embodiment, the potential plate 11 is given a negative potential and the potential plate 12 is given a positive potential. However, the present invention is not limited to this. The following may also be used.

  (1) That is, a positive potential may be applied to the potential plate 11 and a negative potential may be applied to the potential plate 12. In other words, a positive or negative potential may be applied to the potential plate 11, and a potential having a polarity opposite to the polarity of the potential applied to the potential plate 11 may be applied to the potential plate 12.

  (2) Alternatively, either the potential plate 11 or the potential plate 12 may be given a positive or negative potential, and the other potential plate may be given a zero potential (ground level).

  (3) Further, the potential plate 11 and the potential plate 12 may be given a potential having the same polarity that causes a potential difference between the potential plate 11 and the potential plate 12.

  However, the most preferable method from the viewpoint of generating electrostatic force between the two potential plates 11 and 12 and the plurality of electrodes # 1 to # 4 is the method of applying the potential in the case (1). . Next, it is preferable to apply the potential in the case (2).

  Furthermore, in the present embodiment, the alternating voltage as the applied voltage applied to the electrodes # 1 to # 4 in each group is a square wave alternating voltage, but the present invention is not limited to this, The applied voltage may be a sinusoidal AC voltage.

  As described above, according to the first embodiment, a potential plate 11 to which a positive or negative potential is applied and a potential to which a potential opposite to the polarity of the potential applied to the potential plate 11 is applied. The plate 12, or one of the potential plates 11 and 12 to which a positive or negative potential is applied, the other potential plate to which a zero potential is applied, and the flexible body 20 (to which the AC voltage is supplied). The plurality of electrodes # 1 to # 4 are either one of the two potential plates 11 and 12 due to the electrostatic force generated between the plurality of electrodes # 1 to # 4 disposed on the substrate 21). The vibrator 20 can be vibrated as it moves in the direction of.

  As the vibrating body 20 vibrates in this way, the gas (fluid) between the potential plates can be forced to flow in a predetermined direction without using a fan. Thereby, the warmed gas (air) between the potential plates can be quickly discharged out of the potential plates.

  (Embodiment 2)

  FIG. 9 shows a schematic configuration diagram of the fluid forced flow device according to the second embodiment.

  The fluid forced flow device includes two first potential plates 110 and 120, a second potential plate 130, a first vibrating body 210, a second vibrating body 220, a power supply unit 140, and a control unit. 150.

  The two first potential plates 110 and 120 are made of a conductive material, for example, a metal such as copper or aluminum, and are opposed to each other and given a zero potential.

  The second potential plate 130 is made of a conductive material, for example, a metal such as copper or aluminum, and is interposed between the two potential plates 110 and 120 to give a positive or negative potential. In the present embodiment, it is assumed that the potential plate 130 is given a positive potential E3.

  When the second potential plate 130 is interposed between the first potential plates 110 and 120, the interval (separation distance) L between the second potential plate 130 and each of the potential plate 110 and the potential plate 120 is determined by the fluid forced force. It is set to be 10 [μm] to 3 [mm] according to the application of the distribution apparatus.

  The first vibrating body 210 is interposed between one first potential plate of the two first potential plates 110 and 120, for example, the potential plate 110 and the second potential plate 130, and these potential plates. A plurality of electrodes are arranged in the same direction as a predetermined flow direction of the fluid between them, for example, gas.

  The second vibrating body 220 is interposed between the other first potential plate of the two first potential plates 110, 120, for example, between the potential plate 120 and the second potential plate, and between these potential plates. A plurality of electrodes are arranged in the same direction as a predetermined flow direction of the fluid.

  The vibrating body 210 and the vibrating body 220 have the same configuration and function as those of the above-described vibrating body 20 of the first embodiment (see FIGS. 2 to 4), and thus detailed description thereof is omitted here. To do.

  The power supply unit 140 supplies a predetermined potential (alternating voltage) to a plurality of electrodes provided in each of the first vibrating body 210 and the second vibrating body 220. That is, power supply unit 140 has the same configuration and function as power supply unit 60 of the first embodiment described above.

  The control unit 150 is configured to apply a potential (AC voltage) having a predetermined polarity to each of the plurality of electrodes disposed in each of the first vibrating body 210 and the second vibrating body 220 at a predetermined timing. Control. That is, the control unit 150 has the same control function as the control unit 70 of the first embodiment described above (see FIG. 5).

  In the present embodiment, as shown in FIG. 10, a predetermined AC voltage is supplied to the vibrating body 210 and the vibrating body 220 from a common power supply section 140 that operates according to the control of a single control section 150. ing.

  That is, the common terminals 201 to 204 when the terminals of the vibrating body 210 and the terminals of the vibrating body 220 are electrically connected in parallel, and the terminals 141 to 144 corresponding to the AC power supplies AC1 to AC4 of the power supply unit 140. Are electrically connected by a flexible cable 145, for example.

  Of course, a power supply unit 140 and a control unit 150 are provided corresponding to each of the vibrating body 210 and the vibrating body 220, and a predetermined AC voltage is applied to each vibrating body from the power supply unit 140 that operates according to the control of the corresponding control unit 150. It may be supplied.

  Now, with respect to the vibrators 210 and 220 shown in FIG. 9 to which the AC voltage is supplied in the state shown in FIG. 10, the respective vibrators, that is, the flexible substrates when the square wave AC voltage shown in FIG. 5 is supplied. The movement of the plurality of electrodes # 1 to # 4 arranged on the substrate will be described with reference to FIG. Here, only the period T1 of the square wave AC voltage shown in FIG. 5 will be described.

  As shown in FIG. 11, the electrode to which the positive voltage is supplied moves toward the potential plate 110 or the potential plate 120 at the ground (GND) level. For example, in the vibrating body 210, the electrodes # 1 and # 4 move toward the potential plate 110, and in the vibrating body 220, the electrodes # 1 and # 4 move toward the potential plate 120.

  On the other hand, the electrode supplied with the negative voltage moves toward the potential plate 130 supplied with the positive voltage. For example, in the vibrating body 210 and the vibrating body 220, the electrodes # 2 and # 3 move toward the potential plate 130.

  FIG. 12 shows an application example of the fluid forced flow device.

  In the example shown in FIG. 12, the structure shown in FIG. 9, that is, the two first potential plates 110 and 120, the second potential plate 130 interposed between these potential plates 110 and 120, and the potential plate 110. And a plurality of structures having a first vibrating body 210 interposed between the second potential plate 130 and a second vibrating body 220 interposed between the potential plate 120 and the second potential plate. It has a structure. Incidentally, in the example shown in FIG. 12, four structures shown in FIG. 9 are arranged.

  Also in the fluid forced flow device shown in FIG. 12, as described with reference to FIG. 11, the fluid forced flow device is arranged in each vibrating body according to the square wave AC voltage applied to the vibrating bodies 210 and 220. A plurality of electrodes move toward a predetermined potential plate.

  Thus, a predetermined potential difference is generated between one first potential plate 110 and second potential plate 130 and between the other first potential plate 120 and second potential plate 130. This is because a predetermined potential (AC voltage) is applied to the plurality of electrodes # 1 to # 4 corresponding to the plurality of groups arranged in the first vibrating body 210 and the second vibrating body 220, respectively. The first vibrating body 210 and the second vibrating body 220 are vibrated by the electrostatic force generated in this manner, and between the first potential plate 110 and the second potential plate 120 and the other first potential. A fluid such as a gas (air having reached a predetermined temperature) between the plate 120 and the second potential plate 130 can be forced to flow in a predetermined flow direction.

  FIG. 13 shows a schematic diagram of an example to which the fluid forced circulation device shown in FIG. 12 is applied.

  In FIG. 13, a heat sink (heat radiating plate) H10 is disposed in close contact with a heat generating component (heat generating component) H20 provided in an electronic device such as a computer such as a personal computer or a power supply device.

  Examples of the heat generating component H20 include an arithmetic processing chip such as a CPU (Central Processing Unit) and a semiconductor element such as a transistor.

  The heat sink (heat radiating plate) H10 is provided with a plurality of (N) fins H1-1, H1-2, H1-3, H1-4, and H1-N with a predetermined interval.

  A potential plate H2 to which a potential of a predetermined polarity is applied is disposed between two opposing fins, for example, the fin H1-1 and the fin H1-2, and the vibrating body H3a is disposed between the fin H1-1 and the potential plate H2. Is disposed, and a vibrating body H3b is disposed between the fin H1-2 and the potential plate H2.

  The potential plate H2 is disposed at a predetermined distance from the heat sink H10 so as to ensure insulation with the heat sink H10.

  The vibrating body H3a and the vibrating body H3b have the same configuration and function as the above-described vibrating body 20 of the first embodiment, similarly to the above-described vibrating body 210 and the vibrating body 220 (see FIGS. 2 to 4). ).

  Similarly, the potential plate H2 and the vibrating bodies H3a and H3b are also arranged between the fins H1-2 and H1-3 and between the fins H1-3 and H1-4.

  FIG. 14 shows a schematic electrical configuration in addition to the heat sink H10 of FIG. 13 viewed from the direction of arrow B in FIG.

  As shown in FIG. 14, the heat sink H10 including the fins H1-1 to H1-N is set to the ground (GND) level. In these fins H1-1 to H1-N, when the two opposing fins are, for example, the fin H1-1 and the fin H1-2, the former corresponds to the first potential plate 110 shown in FIG. The latter corresponds to the first potential plate 120 shown in FIG. When the two opposing fins are the fin H1-2 and the fin H1-3, the former corresponds to the potential plate 110 and the latter corresponds to the potential plate 120. The other two opposing fins have the above-described relationship.

  The plurality of potential plates H2 correspond to the first potential plate 130 shown in FIG. 9, and are given a positive or negative potential. Here, for example, a positive potential is applied.

  The vibrating body H3a corresponds to the vibrating body 210 shown in FIG. 9, while the vibrating body H3b corresponds to the vibrating body 220 shown in FIG. 9, and the vibration bodies H3a and H3b have a plurality of groups. A plurality of electrodes # 1 to # 4 are supplied with a square-wave AC voltage as shown in FIG. 5 from a power supply unit 140 (see FIG. 10) that operates according to the control of the control unit 150 (see FIG. 10). .

  In this case, as described with reference to FIG. 12 above, the vibrating body H3a and the vibrating body H3b are vibrated by electrostatic force, and between one fin (for example, the fin H1-1) and the potential plate H2 and the other fin (for example, A fluid such as a gas (air that has reached a predetermined temperature) between the fin H1-2) and the potential plate H2 can be forced to flow in a predetermined flow direction, for example, in the direction of arrow C in FIG.

  As described above, according to the second embodiment, even in a state where a predetermined potential (voltage) cannot be applied to the heat sink (heat radiating plate), two opposing fins of zero potential level, positive polarity or The electrodes # 1 to # 4 are caused by electrostatic force generated between the potential plate H2 to which a negative potential is applied and the plurality of electrodes # 1 to # 4 of the vibrating bodies H3a and H3b to which an AC voltage is applied. It can be moved toward one of the two fins or the potential plate H2, whereby the vibrating body H3a and the vibrating body H3b can be vibrated.

  As a result, between one of the two fins facing each other and the potential plate H2 and the other fin, the fluid of the potential plate interposed between these fins, for example, gas (air that has reached a predetermined temperature) is supplied to the predetermined fin. It can be forcibly distributed in the distribution direction. For example, the warmed gas (air) between the fins can be quickly discharged out of the heat sink, and as a result, the heat generating component can be efficiently cooled.

  The present invention can be applied to various devices that have components that generate heat and need to cool the components, such as air conditioners, and is limited to cooling the devices described in the above embodiments. is not.

It is a figure explaining the principle of the fluid forced flow apparatus which concerns on this invention. 3 is a structural diagram (cross-sectional view) illustrating a structure of a vibrating body according to Embodiment 1. FIG. 3 is a structural diagram (cross-sectional view) illustrating a structure of the vibration body in a state where a coating process is performed on the vibration body illustrated in FIG. 2. FIG. 3 is a diagram illustrating a main configuration of a control system of the fluid forced flow device according to Embodiment 1. 6 is a diagram illustrating a waveform of an AC voltage applied to a plurality of electrodes provided in the vibrating body according to Embodiment 1. FIG. 2 is a schematic configuration diagram illustrating a schematic configuration of a fluid forced flow device when a plurality of groups having a plurality of electrodes are formed on the flexible substrate of the vibrator according to the first embodiment. FIG. In the state shown in FIG. 6, when an AC voltage corresponding to one cycle from an AC power source corresponding to these electrodes is applied to a plurality of electrodes in a plurality of groups, the movement of each electrode according to the electrostatic force FIG. 6 is a structural diagram (cross-sectional view) illustrating another structural example of the vibrator according to the first embodiment. FIG. FIG. 5 is a schematic configuration diagram showing a schematic configuration of a fluid forced flow device according to a second embodiment. FIG. 6 is a diagram illustrating a configuration of a main part of a control system of a fluid forced circulation device according to a second embodiment. The figure explaining the mode of the movement of the several electrode arrange | positioned at the flexible substrate of the said each vibration body at the time of supplying the square-wave alternating voltage shown in FIG. 5 with respect to the two vibration bodies which concern on Embodiment 2. FIG. It is. It is a figure which shows the application example of the fluid forced flow apparatus which concerns on Embodiment 2. FIG. It is the schematic which shows the structure of an example to which the fluid forced flow apparatus shown in FIG. 12 is applied. It is a figure explaining the electrical schematic structure in addition to a mode that the heat sink of FIG. 13 was seen from the direction of arrow B in the figure.

Explanation of symbols

1 to 8, 1a to 8b, 1a to 8b, # 1 to # 4 Electrodes 11 and 12 Potential plate 20 Vibrator 21 Flexible substrate 21a One surface 21b of the flexible substrate Other surfaces 31a and 31b of the flexible substrate Coatings 41 and 41a , 41b 42a, 42b, 43, 44a, 44b Pattern wiring 42c, 44c Through hole 51-54, 61-64 Terminal 60, 140 Power supply unit 70, 150 Control unit 110, 120 First potential plate 130 Second potential plate 210 First vibrating body 220 Second vibrating body AC1 to AC4 AC power supply H1-1 to H1-N Fin (first potential plate)
H2 potential plate (second potential plate)
H3a first vibrating body H3a second vibrating body H10 heat sink H20 heat generating component sw1 to sw4 switch

Claims (8)

Two opposing potential plates each provided with a different potential,
A vibrator that is interposed between the two potential plates, and in which a plurality of electrodes are arranged in the same direction as a predetermined flow direction for the fluid between the potential plates;
Control means for controlling so that a potential of a predetermined polarity is applied to each of the plurality of electrodes at a predetermined timing;
Have
Vibrating the vibrating body by electrostatic force generated between the two potential plates and a plurality of electrodes disposed on the vibrating body;
A fluid forced flow device characterized by that. In the two potential plates, a negative potential or a positive potential is applied to one potential plate, and a potential having a polarity different from the polarity of the potential applied to the one potential plate or zero is applied to the other potential plate. Given a potential,
The fluid forced flow device according to claim 1. The vibrator is
It has a flexible substrate, and the plurality of electrodes are arranged on the flexible substrate in the same direction as the predetermined flow direction.
The fluid forced flow device according to claim 1 or 2. A coating process related to insulation is performed on a side of the two potential plates facing the vibrating body or a plurality of electrodes disposed on the vibrating body,
The fluid forced flow device according to any one of claims 1 to 3. The plurality of electrodes are:
A plurality of electrodes grouped into three or more electrodes and corresponding to one or more groups;
The control means includes
Control so that AC voltages having different phases are applied to each of the plurality of electrodes in each group.
The fluid forced flow device according to any one of claims 1 to 4, wherein The control means includes
When a plurality of electrodes corresponding to a plurality of groups are disposed on the vibrator, a plurality of electrodes in each group are in phase with respect to electrodes in the same order in the arrangement order of the electrodes in the group. To control the AC voltage of
The fluid forced flow device according to claim 5. Two opposing first potential plates each of which is given a zero potential;
A second potential plate interposed between the two potential plates and provided with a positive or negative potential;
One of the two first potential plates is interposed between the first potential plate and the second potential plate, and is in the same direction as a predetermined flow direction for the fluid between these potential plates. A first vibrating body provided with a plurality of electrodes;
It is interposed between the other first potential plate of the two first potential plates and the second potential plate, and in the same direction as a predetermined flow direction for the fluid between these potential plates. A second vibrating body provided with a plurality of electrodes;
Control means for controlling so that a potential of a predetermined polarity is applied to each of the plurality of electrodes disposed in each of the first vibrating body and the second vibrating body at a predetermined timing;
Have
While vibrating the first vibrating body by electrostatic force generated between the one first potential plate and the second potential plate and a plurality of electrodes disposed on the first vibrating body, Vibrating the second vibrating body by electrostatic force generated between the other first potential plate and the second potential plate and the second vibrating body;
A fluid forced flow device characterized by that. A predetermined potential difference is generated between two opposing potential plates to which potentials of different values are applied, and the fluid is interposed between the two potential plates in the same direction as a predetermined flow direction for fluid between these potential plates. A predetermined alternating voltage is applied to a vibrating body provided with a plurality of electrodes,
The vibrating body is vibrated by an electrostatic force generated due to the predetermined alternating voltage being applied to the plurality of electrodes in a state where a predetermined potential difference is generated between the two potential plates, and the 2 Forcing the fluid between two potential plates to flow in the predetermined flow direction,
A forced flow method of fluid.

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