JP2008049230A - Atomizer - Google Patents

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JP2008049230A
JP2008049230A JP2006225620A JP2006225620A JP2008049230A JP 2008049230 A JP2008049230 A JP 2008049230A JP 2006225620 A JP2006225620 A JP 2006225620A JP 2006225620 A JP2006225620 A JP 2006225620A JP 2008049230 A JP2008049230 A JP 2008049230A
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piezoelectric element
atomization
circuit
vibration
tip
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Tsutomu Ouchi
努 大内
Kunihiro Hashimoto
邦寛 橋本
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Tamura Corp
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Tamura Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an atomizer which prevents a reduction in atomizing capacity and/or keeps a stability in atomization. <P>SOLUTION: A vibration part 12 is intermittently vibrated by applying a signal exciting a piezoelectric element 11 constituting a vibrator 10 to the piezoelectric element 11 intermittently at a predetermined cycle through cooperating the burst circuit 21 of an exciting circuit 20 and a switch circuit 22. Stopping due to intermittent operation of the vibration part 12 avoids a deposit of excess water W on a top end 12F to prevent excessive loads to the vibration part 12, not to reduce the atomizing capacity and to stably continue atomization. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、圧電素子を用いて振動子を振動させて液体を霧化する霧化装置に関する。
特に、本発明は霧化性能の低下、および/または、霧化の不安定さを改善する技術に関する。
The present invention relates to an atomization apparatus that atomizes a liquid by vibrating a vibrator using a piezoelectric element.
In particular, the present invention relates to a technique for improving a decrease in atomization performance and / or instability of atomization.

特許文献1は、超音波加湿器などに用いる超音波加湿器用振動子を開示している。   Patent Document 1 discloses an ultrasonic humidifier vibrator used in an ultrasonic humidifier or the like.

図1は、振動子を用いて超音波により霧を発生させる(霧化)方法を図解した図である。
振動子10は、圧電素子11と振動部12と固定部(または基部)13とを有する。圧電素子11と振動部12とは固定部(または基部)13を介して接続されている。
圧電素子11は、たとえば、PZTであり、電圧が印加されると矢印A1で示した方向に、PZTの固有振動数で振動する。
振動部12は、たとえば、断面が湾曲している湾曲部12Aと、断面が平坦な円筒状部12Bとを有し、圧電素子11の振動に応じて振動し、矢印A2の方向で示した、その長手方向に振動する。
振動部12の円筒状部12Bの先端12Fの下部には水供給用綿50が接触している。水供給用綿50からの水Wが円筒状部12Bの先端12Fの面には、振動部12の振動によって、水がはい上がる。
円筒状部12Bの先端12Fの面に付着した水Wは、振動部12の高速な振動によって霧化される。
FIG. 1 is a diagram illustrating a method of generating mist (atomization) with ultrasonic waves using a vibrator.
The vibrator 10 includes a piezoelectric element 11, a vibrating part 12, and a fixed part (or base part) 13. The piezoelectric element 11 and the vibration part 12 are connected via a fixed part (or base part) 13.
The piezoelectric element 11 is, for example, PZT, and vibrates at a natural frequency of PZT in a direction indicated by an arrow A1 when a voltage is applied.
The vibration part 12 has, for example, a curved part 12A having a curved cross section and a cylindrical part 12B having a flat cross section, vibrates according to the vibration of the piezoelectric element 11, and is shown in the direction of the arrow A2. It vibrates in the longitudinal direction.
The water supply cotton 50 is in contact with the lower portion of the tip 12F of the cylindrical portion 12B of the vibrating portion 12. The water W from the water supply cotton 50 rises on the surface of the tip 12F of the cylindrical portion 12B by the vibration of the vibrating portion 12.
The water W adhering to the surface of the tip 12F of the cylindrical part 12B is atomized by the high-speed vibration of the vibration part 12.

上述した霧化原理に従って製造された、超音波霧化装置、超音波攪拌装置、超音波洗浄器などの装置が実用されている。
特許第2,652,440号
Devices such as an ultrasonic atomizer, an ultrasonic agitator, and an ultrasonic cleaner manufactured according to the atomization principle described above are in practical use.
Patent No. 2,652,440

図1を参照して述べた霧化方法において、連続的に霧化を行うと、霧化の性能が低下する、および/または、霧化が不安定になることを見出した。
たとえば、連続的に霧化を行っていくと、霧化によって発生する霧が減少していき、やがては、安定して霧化が継続できなくなる可能性がある。
In the atomization method described with reference to FIG. 1, it has been found that when atomization is continuously performed, the atomization performance is deteriorated and / or the atomization becomes unstable.
For example, if the atomization is continuously performed, the fog generated by the atomization decreases, and eventually, there is a possibility that the atomization cannot be continued stably.

本発明の目的は、長時間運転しても、霧化性能が低下しない、および/または、霧化が安定に継続可能な霧化装置を提供することにある。   An object of the present invention is to provide an atomizing device in which the atomization performance does not deteriorate even when operated for a long time and / or the atomization can be stably continued.

本願発明者の考察と実験によれば、上述した霧化の性能の低下、および/または、霧化の不安定さは、霧化の連続動作により、図2に図解したように、水供給用綿50から円筒状部12Bの先端12Fの面に付着する水Wの量が増加する場合があることを見出した。すなわち、振動部12の振動によって、水供給用綿50から供給された水が過剰に先端12Fの面をはい上がる。
先端12Fの表面に付着した水の量が増加すると、振動部12にとって過剰な負荷となる。つまり、先端12Fの表面に付着した水の量が増加すると、振動部12の振動力では増加した水を霧化することができず、振動部12の振動力が不足し、霧化の能力が低下する、および/または、霧化が不安定になることを本願発明者が見出した。
According to the inventor's consideration and experiment, the above-described degradation of the atomization performance and / or instability of the atomization is due to the continuous operation of the atomization, as illustrated in FIG. It has been found that the amount of water W adhering from the cotton 50 to the surface of the tip 12F of the cylindrical portion 12B may increase. That is, the water supplied from the water supply cotton 50 excessively moves up the surface of the tip 12F due to the vibration of the vibration unit 12.
When the amount of water adhering to the surface of the tip 12F increases, an excessive load is applied to the vibration unit 12. That is, when the amount of water adhering to the surface of the tip 12F increases, the increased water cannot be atomized by the vibration force of the vibration part 12, and the vibration force of the vibration part 12 is insufficient, and the atomization ability is reduced. The present inventors have found that the atomization is reduced and / or the atomization becomes unstable.

振動部12を大型にすれば上述した問題は克服できるが、当然、圧電素子11を大型にする必要がある。圧電素子11の大型化は、圧電素子11の励起電力の増大を招き、励起回路も大型になるという不具合がある。または、駆動周波数が制限される。   Although the above-mentioned problem can be overcome by making the vibration part 12 large, naturally the piezoelectric element 11 needs to be large. Increasing the size of the piezoelectric element 11 causes an increase in the excitation power of the piezoelectric element 11, resulting in a problem that the excitation circuit becomes larger. Alternatively, the drive frequency is limited.

上述した新たな課題の発生を回避して、上述した問題を克服するためには、水供給用綿50から円筒状部12Bの先端12Fの面に付着する水Wの量が霧化する量以上に増加させないことが望ましい。
そのためには、霧化状態を実質的に継続させた状態でありながら、振動部12の振動を間欠的に停止し、円筒状部12Bの先端12Fに過剰な水Wを付着させないことが望ましいことが判った。
In order to avoid the occurrence of the above-described new problem and overcome the above-described problem, the amount of water W adhering to the surface of the tip 12F of the cylindrical portion 12B from the water supply cotton 50 is more than the amount to be atomized. It is desirable not to increase it.
For that purpose, it is desirable that the vibration of the vibrating part 12 is intermittently stopped while the atomized state is substantially continued, so that excessive water W does not adhere to the tip 12F of the cylindrical part 12B. I understood.

本発明者の実験によれば、振動部12の振動を瞬間的に停止させると、実質的に霧化が行われながら、過剰な水が振動部12の先端12Fの面に付着しないので、霧化の性能が低下しない、および/または、霧化が安定することを見出した。   According to the inventor's experiment, when the vibration of the vibration part 12 is stopped instantaneously, excessive water does not adhere to the surface of the tip 12F of the vibration part 12 while the atomization is substantially performed. It has been found that the atomization performance does not deteriorate and / or the atomization is stable.

本発明によれば、圧電素子と、該圧電素子に接続された振動部とを有する振動子と、前記圧電素子を励起する励起回路とを有し、前記振動部において液体を霧化する霧化装置であって、前記励起回路は、所定の周期で間欠的に、前記圧電素子を励起する間欠励起回路を有する、霧化装置が提供される。   According to the present invention, the atomization includes a vibrator having a piezoelectric element, a vibration part connected to the piezoelectric element, and an excitation circuit for exciting the piezoelectric element, and atomizes the liquid in the vibration part. An atomization apparatus is provided, wherein the excitation circuit includes an intermittent excitation circuit that excites the piezoelectric element intermittently at a predetermined period.

好ましくは、前記間欠励起回路は、前記圧電素子を励起開始するとき、バースト状のパルス信号が前記圧電素子に印加するように構成されている。   Preferably, the intermittent excitation circuit is configured to apply a burst pulse signal to the piezoelectric element when the excitation of the piezoelectric element is started.

本発明によれば、霧化が実質的に継続されながら、霧化性能が低下しない、および/または、霧化が安定して継続できる。
なお、霧化性能が低下しない、および/または、霧化が安定して継続できるという意味は、霧化性能が低下しないこと、霧化性能が低下せずに霧化が安定して継続できること、または、霧化が安定して継続できることを意味する。
According to the present invention, the atomization performance does not decrease and / or the atomization can be stably continued while the atomization is substantially continued.
The meaning that the atomization performance does not decrease and / or the atomization can be stably continued means that the atomization performance does not decrease, the atomization performance can be stably continued without deterioration, Or it means that atomization can be continued stably.

本発明の実施の形態の霧化装置は、図1または図2に図解した振動子10と、図3に図解した励起回路20と、水供給用綿50とを有する。   The atomization apparatus according to the embodiment of the present invention includes the vibrator 10 illustrated in FIG. 1 or 2, the excitation circuit 20 illustrated in FIG. 3, and the water supply cotton 50.

振動子10は、図1または図2に図解したように、圧電素子11と、振動部12と、固定部(または基部)13とを有する。振動部12は、湾曲部12Aと、円筒状部12Bとを有し、円筒状部12Bの下面に水供給用綿50が接触して先端12Fの面に水Wを供給可能になっている。   As illustrated in FIG. 1 or FIG. 2, the vibrator 10 includes a piezoelectric element 11, a vibrating part 12, and a fixed part (or base part) 13. The vibration part 12 has a curved part 12A and a cylindrical part 12B, and the water supply cotton 50 contacts the lower surface of the cylindrical part 12B so that water W can be supplied to the surface of the tip 12F.

図3は本発明の霧化装置に適用する励起回路の1実施の形態の回路を示す図である。
振動子10の圧電素子11を励起する励起回路20は、バースト回路21と、スイッチ回路22と、昇圧トランス23と、駆動電流検出器24と、分圧器25と、比較器26と、基準電圧発生器27と、電圧制御型発振器(VCO:Voltage Controlled Oscillator))28とを有する。
励起回路20は、図4に図解した負荷に応じて周波数制御が可能な励起回路である。そのため、駆動電流検出器24、分圧器25、比較器26、基準電圧発生器27およびVCO28を用いた負帰還回路を構成している。
FIG. 3 is a diagram showing a circuit of an embodiment of an excitation circuit applied to the atomization apparatus of the present invention.
The excitation circuit 20 that excites the piezoelectric element 11 of the vibrator 10 includes a burst circuit 21, a switch circuit 22, a step-up transformer 23, a drive current detector 24, a voltage divider 25, a comparator 26, and a reference voltage generator. And a voltage controlled oscillator (VCO) 28.
The excitation circuit 20 is an excitation circuit capable of frequency control according to the load illustrated in FIG. Therefore, a negative feedback circuit using the drive current detector 24, the voltage divider 25, the comparator 26, the reference voltage generator 27, and the VCO 28 is configured.

励起回路20の動作を述べる。
図示しない交流電源がバースト回路21に印加される。
バースト回路21は、図5に例示したように、所定の周期τで間欠的に動作してバースト状のパルス信号を出力する。
バースト回路21の出力信号に応じて、スイッチ回路22がVCO28からの出力信号を昇圧トランス23に出力する。
昇圧トランス23にVCO28からの信号が印加されると、昇圧トランス23はその信号を圧電素子11を駆動可能な電圧レベルまで昇圧して、圧電素子11に印加する。
それにより、圧電素子11が励起されて振動し、圧電素子11の駆動に応じて振動部12が、たとえば、図1を参照して述べたように振動する。それにより、水供給用綿50から振動部12の先端12Fの表面に供給された水Wが霧化される。
The operation of the excitation circuit 20 will be described.
An AC power supply (not shown) is applied to the burst circuit 21.
As illustrated in FIG. 5, the burst circuit 21 intermittently operates at a predetermined cycle τ and outputs a burst-like pulse signal.
In response to the output signal of the burst circuit 21, the switch circuit 22 outputs the output signal from the VCO 28 to the step-up transformer 23.
When a signal from the VCO 28 is applied to the step-up transformer 23, the step-up transformer 23 boosts the signal to a voltage level at which the piezoelectric element 11 can be driven and applies it to the piezoelectric element 11.
Thereby, the piezoelectric element 11 is excited and vibrates, and the vibration unit 12 vibrates as described with reference to FIG. 1 according to the driving of the piezoelectric element 11. Thereby, the water W supplied from the water supply cotton 50 to the surface of the tip 12F of the vibrating portion 12 is atomized.

駆動電流検出器24が圧電素子11の負荷に応じた駆動電流を検出し、分圧器25に出力する。圧電素子11の負荷とは、圧電素子11に接続されている振動部12の先端12Fに付着した水Wの量を意味している。先端12Fに付着した水Wの量が多ければ、振動部12、すなわち、圧電素子11の負荷が重いことを意味する。他方、先端12Fに付着した水Wの量が少なければ、振動部12、すなわち、圧電素子11の負荷が軽いことを意味する。励起回路20は、このように、圧電素子11、換言すれば、振動部12の負荷に応じた、圧電素子11に印加される周波数、換言すれば、VCO28の発振周波数の制御を行う。   The drive current detector 24 detects a drive current corresponding to the load of the piezoelectric element 11 and outputs it to the voltage divider 25. The load of the piezoelectric element 11 means the amount of water W adhering to the tip 12F of the vibration unit 12 connected to the piezoelectric element 11. If the amount of water W adhering to the tip 12F is large, it means that the load on the vibrating part 12, that is, the piezoelectric element 11 is heavy. On the other hand, if the amount of water W adhering to the tip 12F is small, it means that the load on the vibrating part 12, that is, the piezoelectric element 11 is light. In this way, the excitation circuit 20 controls the frequency applied to the piezoelectric element 11 according to the load of the piezoelectric element 11, in other words, the vibration unit 12, in other words, the oscillation frequency of the VCO 28.

駆動電流検出器24で検出した電流を整流した電圧と、VCO28で発生される発振周波数の関係は、図4に図解したようになる。
frは共振周波数である。基準電圧発生器27は共振周波数frに対応する基準電圧VrをVCO28に出力する。
図4において、曲線CV1は、負荷が基準状態の周波数特性を示し、曲線CV2は負荷が重いときの周波数特性を示し、曲線CV3は負荷が軽いときの周波数特性を示す。
The relationship between the voltage obtained by rectifying the current detected by the drive current detector 24 and the oscillation frequency generated by the VCO 28 is as illustrated in FIG.
fr is the resonance frequency. The reference voltage generator 27 outputs a reference voltage Vr corresponding to the resonance frequency fr to the VCO 28.
In FIG. 4, a curve CV1 indicates the frequency characteristic when the load is in the reference state, a curve CV2 indicates the frequency characteristic when the load is heavy, and a curve CV3 indicates the frequency characteristic when the load is light.

分圧器25は励起回路20において必須の回路ではないが、駆動電流検出器24の検出電流に相当する電圧を分圧して、比較器26に出力する。
比較器26は基準電圧発生器27からの共振周波数frに対応する基準電圧Vrと分圧器25からの出力信号との差の電圧をVCO28に出力する。
VCO28は、入力電圧に応じた周波数の発振信号を生成し、スイッチ回路22に出力する。
以上から圧電素子11は、振動部12の負荷に応じた、VCO28で発生された発振周波数で励起されることになる。
Although the voltage divider 25 is not an essential circuit in the excitation circuit 20, a voltage corresponding to the detection current of the drive current detector 24 is divided and output to the comparator 26.
The comparator 26 outputs to the VCO 28 the difference voltage between the reference voltage Vr corresponding to the resonance frequency fr from the reference voltage generator 27 and the output signal from the voltage divider 25.
The VCO 28 generates an oscillation signal having a frequency corresponding to the input voltage and outputs the oscillation signal to the switch circuit 22.
From the above, the piezoelectric element 11 is excited at the oscillation frequency generated by the VCO 28 according to the load of the vibration unit 12.

図5に図解したように、本発明の間欠励起回路を構成している、バースト回路21とスイッチ回路22との協働によって、VCO28の発振周波数信号を周期τで間欠的(周期的に)に昇圧トランス23に出力することにより、特に、圧電素子11の励起を停止させ振動部12の振動を停止することにより先端12Fの面に付着する水が適切に維持されるので、霧化の性能が低下しない、および/または、霧化が安定に継続して行われる。
その理由は、振動部12が連続的に振動すると、その振動により水供給用綿50からの水Wが先端12Fの面をはい上がるが、振動部12の振動の停止により、水供給用綿50から先端12Fの面にはい上がる水Wの量が低下し、先端12Fの面に付着する水Wの量が適切に維持されるためである。換言すれば、先端12Fの面に過剰な水Wが供給されないためである。よって、過剰な水による振動部12の性能低下、および/または、霧化の不安定さが回避できる。
As illustrated in FIG. 5, the oscillation frequency signal of the VCO 28 is intermittently (periodically) with a period τ by the cooperation of the burst circuit 21 and the switch circuit 22 constituting the intermittent excitation circuit of the present invention. By outputting to the step-up transformer 23, the water adhering to the surface of the tip 12F is properly maintained by stopping the excitation of the piezoelectric element 11 and stopping the vibration of the vibration part 12, and thus the atomization performance is improved. It does not decrease and / or atomization is performed stably and continuously.
The reason is that when the vibration part 12 continuously vibrates, the water W from the water supply cotton 50 rises up the surface of the tip 12F due to the vibration, but when the vibration of the vibration part 12 stops, the water supply cotton 50 This is because the amount of water W rising from the surface of the tip 12F to the surface of the tip 12F is reduced, and the amount of water W adhering to the surface of the tip 12F is appropriately maintained. In other words, excessive water W is not supplied to the surface of the tip 12F. Therefore, it is possible to avoid the performance degradation of the vibration unit 12 and / or the instability of atomization due to excessive water.

特に、図5に図解したよう、周期τでバースト状の信号を用いることにより、圧電素子11の立ち上がり時の過渡応答を利用して圧電素子11に印加される電圧が大きくなり、安定に霧化させることができる。すなわち、振動子10の発熱を抑制し、安定して振動子10を動作させることができる。
なお、周期τは、たとえば、数十Hz〜100Hzである。
In particular, as illustrated in FIG. 5, by using a burst-like signal with a period τ, the voltage applied to the piezoelectric element 11 using the transient response at the time of rising of the piezoelectric element 11 is increased, and stable atomization is achieved. Can be made. That is, the heat generation of the vibrator 10 can be suppressed and the vibrator 10 can be operated stably.
The period τ is, for example, several tens Hz to 100 Hz.

振動子10は、図1および図2を参照して例示した構造の振動子10には限定されないことは勿論である。
同様に、先端12Fの面の部分に水が供給されればよいので、綿状の水供給用綿50を用いる場合には限定されない。たとえば、毛細管現象により水を先端12Fの面に供給するようにしてもよい。
Needless to say, the vibrator 10 is not limited to the vibrator 10 having the structure illustrated with reference to FIGS. 1 and 2.
Similarly, since water should just be supplied to the part of the surface of the front-end | tip 12F, when using the cotton-like water supply cotton 50, it is not limited. For example, water may be supplied to the surface of the tip 12F by capillary action.

図3に図解した励起回路20において、バースト状のパルス信号は、圧電素子11に印加されればよいので、図3に例示した部分ではなく、たとえば、昇圧トランス23の後の部分にバースト状の電圧を圧電素子11に印加する回路を設けてもよい。   In the excitation circuit 20 illustrated in FIG. 3, the burst-like pulse signal only needs to be applied to the piezoelectric element 11, so that the burst-like pulse signal is not provided in the portion illustrated in FIG. A circuit for applying a voltage to the piezoelectric element 11 may be provided.

図5には好適な例として、バースト状の信号を間欠的に圧電素子11に印加する場合について述べたが、圧電素子11が周期的に停止する時間があればよいので、バースト状の信号ではなく、所定の周期でオン・オフする矩形パルス信号でもよい。   FIG. 5 shows a case where a burst signal is intermittently applied to the piezoelectric element 11 as a preferred example. However, since it is sufficient that the piezoelectric element 11 is stopped periodically, Alternatively, it may be a rectangular pulse signal that is turned on / off at a predetermined cycle.

図1は圧電素子と振動部とを有する振動子を用いた霧化の原理を示す図である。FIG. 1 is a diagram showing the principle of atomization using a vibrator having a piezoelectric element and a vibrating part. 図2は圧電素子と振動部とを有する振動子を用いた霧化の性能低下を示す図である。FIG. 2 is a diagram illustrating a decrease in atomization performance using a vibrator having a piezoelectric element and a vibrating portion. 図3は振動子の圧電素子を励起する励起回路の回路図でである。FIG. 3 is a circuit diagram of an excitation circuit for exciting the piezoelectric element of the vibrator. 図4は振動子の周波数特性を示す図である。FIG. 4 is a diagram showing the frequency characteristics of the vibrator. 図5は励起回路内のバースト回路によるバースト信号の波形図である。FIG. 5 is a waveform diagram of a burst signal by the burst circuit in the excitation circuit.

符号の説明Explanation of symbols

10…振動子、11…圧電素子、12…振動部、12A…湾曲部、12B…円筒状部、12F…先端、20…励起回路、21…バースト回路、22…スイッチ回路、23…昇圧トランス、24…駆動電流検出器、25…分圧器、26…比較器、27…基準電圧発生器、28…電圧制御型発振器(VCO)   DESCRIPTION OF SYMBOLS 10 ... Vibrator, 11 ... Piezoelectric element, 12 ... Vibrating part, 12A ... Curve part, 12B ... Cylindrical part, 12F ... Tip, 20 ... Excitation circuit, 21 ... Burst circuit, 22 ... Switch circuit, 23 ... Step-up transformer, 24 ... Drive current detector, 25 ... Voltage divider, 26 ... Comparator, 27 ... Reference voltage generator, 28 ... Voltage controlled oscillator (VCO)

Claims (2)

圧電素子と、該圧電素子に接続された振動部とを有する振動子と、
前記圧電素子を励起する励起回路と
を有し、
前記振動部において液体を霧化する霧化装置であって、
前記励起回路は、所定の周期で間欠的に、前記圧電素子を励起する間欠励起回路を有する、
霧化装置。
A vibrator having a piezoelectric element and a vibrating portion connected to the piezoelectric element;
An excitation circuit for exciting the piezoelectric element,
An atomizing device for atomizing a liquid in the vibration unit,
The excitation circuit includes an intermittent excitation circuit that excites the piezoelectric element intermittently at a predetermined period.
Atomization device.
前記間欠励起回路は、前記圧電素子を励起開始するとき、バースト状のパルス信号が前記圧電素子に印加するように構成されている、
請求項1に記載の霧化装置。
The intermittent excitation circuit is configured to apply a burst-like pulse signal to the piezoelectric element when excitation of the piezoelectric element is started.
The atomization apparatus of Claim 1.
JP2006225620A 2006-08-22 2006-08-22 Atomizer Pending JP2008049230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
JP2008049230A true JP2008049230A (en) 2008-03-06

Family

ID=39233765

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013000679A (en) * 2011-06-17 2013-01-07 Optnics Precision Co Ltd Atomization spray device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876157A (en) * 1981-10-31 1983-05-09 Matsushita Electric Works Ltd Spray apparatus
JPH05212331A (en) * 1992-02-04 1993-08-24 Koji Toda Ultrasonic device driving circuit
JPH05277413A (en) * 1992-04-01 1993-10-26 Tdk Corp Ultrasonic atomizing device
JP2000177118A (en) * 1998-12-18 2000-06-27 Mitsubishi Electric Corp Apparatus and method for liquid jetting drive device
JP2003136005A (en) * 2001-11-05 2003-05-13 Inst Of Physical & Chemical Res Immobilizing device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876157A (en) * 1981-10-31 1983-05-09 Matsushita Electric Works Ltd Spray apparatus
JPH05212331A (en) * 1992-02-04 1993-08-24 Koji Toda Ultrasonic device driving circuit
JPH05277413A (en) * 1992-04-01 1993-10-26 Tdk Corp Ultrasonic atomizing device
JP2000177118A (en) * 1998-12-18 2000-06-27 Mitsubishi Electric Corp Apparatus and method for liquid jetting drive device
JP2003136005A (en) * 2001-11-05 2003-05-13 Inst Of Physical & Chemical Res Immobilizing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013000679A (en) * 2011-06-17 2013-01-07 Optnics Precision Co Ltd Atomization spray device

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