JP2008045573A - Rolling sliding member and its manufacturing method as well as rolling device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rolling sliding member having improved lubricating performance and a longer service life even under conditions in which great contact stress acts thereon, and to provide its manufacturing method as well as a rolling device having improved lubricating performance with the rolling sliding member. <P>SOLUTION: A deep-groove ball bearing has an inner ring 1, an outer ring 2, and a plurality of rolling elements 3. To the contact faces of the inner ring 1 and the outer ring 2 with the rolling elements 3, namely rolling sliding surfaces, micromachining is applied with the irradiation of a short pulse laser having a pulse width of 1-5ps to form fine recessed portions. Portions of the rolling sliding surfaces to which the micromachining is applied are covered with lubricating coats of solid lubricant. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a rolling sliding member having a rolling sliding surface in which a relative rolling contact, a sliding contact, or a contact including the both contacts occurs, for example, like a bearing ring of a rolling bearing, and its manufacture. Regarding the method. Moreover, this invention relates to the rolling device comprised by the said rolling sliding member.

In a rolling bearing, lubricity may be imparted by covering a raceway surface of a bearing ring or a rolling surface of a rolling element with a lubricant film made of a solid lubricant. For example, Patent Document 1 describes a rolling bearing in which a lubricant film made of a solid lubricant is coated on surfaces of an inner ring, an outer ring, and rolling elements that are in contact with each other. And this lubricating film is formed by making a work material collide with the solid lubricant apply | coated to the surface which forms the said lubricating film by spraying at high speed.
JP 2005-282734 A JP-A-2005-32148 JP-A-6-313430 JP 2002-310157 A JP 2004-125049 A JP 2004-340248 A JP-A-2005-325961 M. Wakuda et al., "Effect of surface texturing on friction reduction between ceramic and steel materials under lubricated sliding contact", Wear, 254, 2003, p.356-363

However, the lubricating coating made of a solid lubricant may be peeled off when a large contact stress acts or slides. Therefore, in order to extend the life of the rolling bearing, an improvement has been desired so that the lubricant film is less likely to be peeled off.
Accordingly, the present invention provides a rolling sliding member that is excellent in lubricity and has a long life even under conditions in which a large contact stress acts, and a method for manufacturing the same, which solves the above-described problems of the prior art. The task is to do. Another object of the present invention is to provide a rolling device having such a rolling sliding member and having excellent lubricity and a long life.

  In order to solve the above problems, the present invention has the following configuration. That is, the rolling sliding member according to claim 1 according to the present invention is a rolling sliding member having a rolling sliding surface in which relative rolling contact or sliding contact occurs with a counterpart member. At least a part of which is subjected to micromachining to form a fine recess, and at least a part of the rolling sliding surface which is subjected to the micromachining is coated with a lubricant film made of a solid lubricant. It is characterized by.

  Fine recesses are formed on the rolling sliding surface by microfabrication, and a lubricating coating made of a solid lubricant is coated thereon, so that the adhesion between the rolling sliding surface and the lubricating coating is improved. Therefore, even if a large contact stress acts or slides, the lubricating coating is difficult to peel off from the rolling sliding surface, so that the rolling sliding member is excellent in lubricity and has a long life. In addition, the lubricating film may be coated on a portion of the rolling sliding surface that has not been subjected to the fine processing, but the lubricating coating that has been coated on the portion that has not been subjected to the fine processing is relatively easy to peel off. Therefore, it is preferable to cover the lubricating film only on the portion where the fine processing is performed.

  Further, in the case where a concave portion corresponding to the fine concave portion formed by the above-described micromachining is formed on the surface of the lubricating coating (depending on the thickness of the lubricating coating formed on the rolling sliding surface, The surface of the lubricating coating may have a concave portion at the position where the concave portion is present), and the oil film forming ability is high and good compared to the case where the microfabrication is not performed and the concave portion is not formed on the surface of the lubricating coating. A lubricating oil film can be formed. Therefore, when lubrication is performed with lubricating oil or grease, it is possible to suppress the occurrence of surface contact between the rolling sliding member and the mating member, while improving load resistance and reducing torque. Figured.

  In addition, when the concave portion formed on the surface of the lubricating coating becomes an oil reservoir and lubricating oil and grease are effectively supplied to the contact surface with the mating member, friction is suppressed and friction occurs Since it functions as a trap for trapping wear powder, it improves load resistance, reduces friction torque, and improves wear resistance. Furthermore, when lubrication is performed with lubricating oil or grease, dynamic pressure is generated in the lubricating oil or grease due to the recesses formed on the surface of the lubricating coating, so the surface between the rolling sliding member and the mating member Contact is unlikely to occur, and as a result, reduction of friction torque is promoted.

In addition, when wear occurs on the rolling sliding surface when used in a harsh lubricating environment, the lubricating coating inside the fine recesses spreads over the rolling sliding surface and is used for lubrication. Further wear is suppressed.
The rolling sliding member according to claim 2 according to the present invention is the rolling sliding member according to claim 1, wherein a part of the rolling sliding surface is covered with a mask material to perform shot peening. The microfabrication is performed on an exposed portion of the rolling sliding surface that is not covered with the mask material. Such a rolling sliding member is easy to mass-produce and inexpensive.

  Furthermore, the rolling sliding member according to claim 3 according to the present invention is the rolling sliding member according to claim 2, wherein a minute recess having a depth of 100 μm or less is formed by the shot peening, and the entire rolling sliding surface is formed. Among them, the ratio of the area of the portion where the minute recesses are formed is 5 area% or more.

  If the depth of the minute recess is more than 100 μm, there may be a disadvantage that it is difficult to obtain the effect of lubricating oil film formation and dynamic pressure. Further, if the ratio of the area of the portion where the minute concave portion (corresponding to the fine concave portion formed by micromachining) is formed in the entire rolling sliding surface is less than 5 area%, the formation of the lubricating oil film and the dynamic pressure It is difficult to obtain the effect, and inconvenience that the torque reduction effect is particularly reduced may occur. However, if minute recesses are formed in too many parts, there may be a disadvantage that the part that supports the load becomes relatively small and surface damage is likely to occur when the oil film becomes thin. It is more preferable that the ratio of the area of the part where the minute recesses are formed in the entire surface is 70 area% or less. The shape of the minute recess is preferably circular, but may be rectangular or strip-shaped.

  Furthermore, the manufacturing method of the rolling sliding member of Claim 4 which concerns on this invention is a method of manufacturing the rolling sliding member which has a rolling sliding surface in which a relative rolling contact or a sliding contact arises between the other members. Micro-fabrication in which a part of the rolling sliding surface is covered with a mask material to perform shot peening, and a micro concave portion having a depth of 100 μm or less is formed in an exposed portion of the rolling sliding surface that is not covered with the mask material And a coating step of coating a lubricant film made of a solid lubricant on at least a portion of the rolling sliding surface where the minute recesses are formed.

  With such a method, since it is possible to form a micro-recess by colliding hard particles at a high speed with the rolling sliding surface coated with the mask material, mass production of the rolling sliding member is easy. A rolling sliding member can be manufactured at low cost. Ceramic particles or steel particles can be used as the hard particles. The mask material is preferably a hard material such as ceramics, cemented carbide, steel, etc. When an exposed portion having a fine pattern is formed by machining, laser processing, photolithography, etching or the like. Good. Alternatively, ceramics, metal, or the like may be formed on the sliding surface by sputtering or vapor deposition, and the film may be patterned by photolithography or the like. In this case, only the film formed as a mask material can be peeled off by selective wet etching or the like.

Furthermore, the rolling sliding member manufacturing method according to claim 5 of the present invention is the rolling sliding member manufacturing method according to claim 4, wherein the solid lubricant powder is applied to the rolling sliding surface at a high speed. The lubricating coating is formed by collision.
Furthermore, the manufacturing method of the rolling sliding member of Claim 6 which concerns on this invention is a method of manufacturing the rolling sliding member which has a rolling sliding surface in which a relative rolling contact or a sliding contact produces between the other members. Then, a part of the rolling sliding surface is covered with a mask material to perform shot peening, and after forming a minute recess having a depth of 100 μm or less in an exposed portion of the rolling sliding surface that is not covered with the mask material, The rolling sliding surface provided with the mask material is allowed to collide with a powder of solid lubricant at a high speed, and a portion of the rolling sliding surface where the minute recesses are formed is coated with a lubricating coating made of the solid lubricant. It is characterized by that.

  The lubricating coating is also preferably formed by causing the solid lubricant powder to roll against the sliding surface at high speed. Then, it is possible to form a lubricating film having excellent adhesion and a uniform film thickness in a short time and easily, and mass production of the rolling sliding member is easy, and the rolling sliding member can be manufactured at low cost. it can. In particular, if the solid lubricant powder is sprayed subsequent to the formation of the micro-recesses (that is, if the powder of the solid lubricant is sprayed as it is in the state of covering the mask material used for forming the micro-recesses), The lubricating film can be easily formed only on the minute recesses.

Furthermore, the rolling sliding member according to claim 7 of the present invention is the rolling sliding member according to claim 1, wherein at least a part of the rolling sliding surface is irradiated with a short pulse laser having a pulse width of 1 ps or more and 5 ps or less. By doing so, the microfabrication is performed.
According to the irradiation of the short pulse laser, the fine processing can be performed easily, surely and at low cost, so that the rolling sliding member can be manufactured at low cost. Although microfabrication can be performed by machining, photolithography, etching, normal laser processing, etc., the irradiation of short pulse lasers allows the formation of minute recesses that are difficult to obtain by ordinary mechanical surface processing. Can be formed. For example, it is possible to form a fine recess while controlling the formation position on the nanometer order.

Short pulse laser is a general term for lasers with a very small pulse width, such as femtosecond lasers. If such a laser is used, it is finer periodically at a pitch that is approximately the same as or shorter than the laser wavelength. A concave portion can be formed.
Furthermore, the rolling sliding member according to an eighth aspect of the present invention is the rolling sliding member according to the seventh aspect, wherein a plurality of grooves are periodically formed by the fine processing.

When the concave portion corresponding to the fine concave portion (the groove) by the fine processing described above is formed on the surface of the lubricating coating, the lubricating oil film is formed with a particularly high capability, and therefore lubrication is performed with lubricating oil or grease. In this case, the friction torque can be reliably reduced and the occurrence of surface contact can be suppressed.
Furthermore, the rolling sliding member according to claim 9 of the present invention is the rolling sliding member according to claim 8, wherein the groove extends in a direction parallel to the rolling sliding direction and the rolling sliding member. The ratio of the area of the portion where the groove is formed in the entire moving surface is less than 100 area%.

  When the groove is formed extending in a direction parallel to the rolling sliding direction, the load of the mating member can be stably received, and a strong lubricating oil film is formed in the rolling sliding direction. be able to. For this reason, it is possible to further reduce the friction torque and suppress the occurrence of surface contact. However, a certain effect can be obtained even when the groove has an angle other than parallel, such as when the groove extends in a direction having an angle with respect to the rolling and sliding direction.

  Further, since the ratio of the area of the portion where the groove is formed in the entire rolling sliding surface is less than 100 area%, that is, the entire rolling sliding surface is not subjected to the fine processing but is applied to a part. In this case, since the plane portion that has not been subjected to the fine processing remains, the load is supported by the remaining plane portion. Therefore, the rolling sliding member of Claim 9 which concerns on this invention is excellent in load resistance. Further, when a recess corresponding to the groove is formed on the surface of the lubricating coating, the recess becomes an oil reservoir, and the lubricating oil and grease are effectively supplied to the sliding surface by rolling, thereby suppressing friction. In addition, when friction occurs, it functions as a trap for trapping wear powder, which promotes improved load resistance, reduced friction torque, and improved wear resistance.

  Furthermore, the rolling sliding member according to claim 10 of the present invention is the rolling sliding member according to claim 8 or 9, wherein the inner surface of the groove is irradiated with the fine pulse by irradiation with the short pulse laser. The concave portions and the linear convex portions are alternately and repeatedly formed in a stripe shape, and the linear concave portions and the linear convex portions extend in a direction perpendicular to the rolling sliding direction. With such a configuration, the above-described effect of the groove is further promoted.

  Furthermore, the rolling sliding member according to claim 11 according to the present invention is the rolling sliding member according to claim 7, wherein a rectangular recess having a side of 0.01 μm or more and 0.5 μm or less is predetermined by the fine processing. And the ratio of the area of the portion where the rectangular recess is formed in the entire rolling sliding surface is less than 100% by area. If a concave portion corresponding to a rectangular concave portion is formed on the surface of the lubricating coating, leakage of the lubricating oil or grease from the rolling sliding surface is suppressed by the concave portion, so that the lubricating oil film is retained for a longer period of time. Is done. Further, since the dynamic pressure is generated in the lubricating oil or grease due to the recesses formed on the surface of the lubricating coating, surface contact is unlikely to occur. Therefore, reduction of friction torque and suppression of surface contact are promoted. Further, due to the recesses formed on the surface of the lubricating coating, lubricating oil and grease are effectively supplied to the rolling sliding surface when starting and stopping the rolling sliding member.

  Furthermore, the rolling sliding member according to claim 12 according to the present invention is the rolling sliding member according to claim 11, wherein the inner surface of the rectangular recess is irradiated with the short pulse laser to form a fine linear shape. The concave portions and the linear convex portions are alternately and repeatedly formed in stripes, and the linear concave portions and the linear convex portions extend in a direction orthogonal to the rolling sliding direction. With such a configuration, the effect of the above-described rectangular recess is further promoted.

Furthermore, the rolling sliding member according to claim 13 according to the present invention is the rolling sliding member according to claim 7, wherein a circular recess having a diameter of 0.01 μm or more and 0.5 μm or less is predetermined by the fine processing. And the ratio of the area of the portion where the circular concave portion is formed in the entire rolling sliding surface is less than 100% by area.
When a concave portion corresponding to a circular concave portion is formed on the surface of the lubricating coating, leakage of the lubricating oil or grease from the rolling sliding surface is suppressed by the concave portion, so that the lubricating oil film is retained for a longer period of time. Is done. Further, since the dynamic pressure is generated in the lubricating oil or grease due to the recesses formed on the surface of the lubricating coating, surface contact is unlikely to occur. Therefore, reduction of friction torque and suppression of surface contact are promoted. Further, due to the recesses formed on the surface of the lubricating coating, lubricating oil and grease are effectively supplied to the rolling sliding surface when starting and stopping the rolling sliding member.

  Furthermore, the rolling sliding member according to claim 14 of the present invention is the rolling sliding member according to claim 13, wherein the inner surface of the circular recess is finely linearly irradiated by the short pulse laser. The concave portions and the linear convex portions are alternately and repeatedly formed in stripes, and the linear concave portions and the linear convex portions extend in a direction orthogonal to the rolling sliding direction. With such a configuration, the effect of the circular recess described above is further promoted.

Furthermore, the rolling sliding member of Claim 15 which concerns on this invention is a rolling sliding member as described in any one of Claims 7-14. WHEREIN: The said lubricating film was distribute | arranged on the said rolling sliding surface. The solid lubricant is formed by machining.
Furthermore, the rolling sliding member of Claim 16 which concerns on this invention is a rolling sliding member as described in any one of Claims 7-14. WHEREIN: The said lubricous coating film is sprayed with the powder of the said solid lubricant. The solid lubricant formed on the rolling sliding surface is formed by colliding a workpiece with high speed.

Such a rolling sliding member is easy to mass-produce and inexpensive. In addition, the lubricating coating has excellent adhesion and a uniform film thickness, and can be easily formed in a short time.
Furthermore, the manufacturing method of the rolling sliding member of Claim 17 which concerns on this invention is a method of manufacturing the rolling sliding member which has a rolling sliding surface in which a relative rolling contact or sliding contact arises between the other members. Irradiating with a short pulse laser under irradiation conditions of laser wavelength of 700 nm to 900 nm, pulse width of 1 ps to 5 ps, and fluence of 28 J / cm ² to form fine concave portions on at least a part of the rolling sliding surface. And a coating step of coating a lubricant film made of a solid lubricant on at least a portion of the rolling sliding surface where the minute recesses are formed.

  Furthermore, the rolling device of claim 18 according to the present invention has an inner member having a raceway surface on the outer surface and a raceway surface opposite to the raceway surface of the inner member, and is disposed outside the inner member. In the rolling device comprising: an outer member, and a rolling element that is arranged so as to be freely rollable between the both raceway surfaces, at least one of the inner member, the outer member, and the rolling element. The rolling sliding member according to any one of claims 1 to 3 and claims 7 to 16 is provided.

  With such a configuration, the lubricating film of the rolling sliding member constituting the rolling device is not easily damaged or peeled off even when a large contact stress is applied. Long life. In addition, when the concave portion corresponding to the fine concave portion formed by the above-mentioned micromachining is formed on the surface of the lubricating coating, compared with the case where the concave portion is not formed on the surface of the lubricating coating because the fine processing is not performed. The oil film forming ability is high, and a good lubricating oil film can be formed when lubrication is performed with lubricating oil or grease. Therefore, the occurrence of surface contact between the inner and outer members and the rolling elements can be suppressed, and the load resistance of the rolling device can be improved and the torque can be reduced.

  Furthermore, the recesses formed on the surface of the lubricating coating serve as an oil reservoir, and the lubricating oil and grease are effectively supplied to the contact surface between the inner and outer members and the rolling elements, so that friction is suppressed. In addition, when friction occurs, it functions as a trap for trapping wear powder, which promotes improved load resistance, reduced friction torque, and improved wear resistance. Furthermore, since the dynamic pressure is generated in the lubricating oil and grease due to the recesses formed on the surface of the lubricating coating, surface contact between the inner and outer members and the rolling elements is less likely to occur, resulting in the friction torque of the rolling device. Is reduced.

  Examples of the rolling device of the present invention include a rolling bearing, a linear motion guide bearing (linear guide device), a ball screw, and a linear motion bearing. The inner member means an inner ring when the rolling device is a rolling bearing, a guide rail when it is a linear guide bearing, a screw shaft when it is a ball screw, and a shaft when it is also a linear bearing. . The outer member means the outer ring when the rolling device is a rolling bearing, the slider when it is a linear guide bearing, the nut when it is a ball screw, and the outer cylinder when it is also a linear bearing. To do.

  The rolling sliding member and rolling device of the present invention are excellent in lubricity and have a long life even under conditions where a large contact stress acts. Moreover, the manufacturing method of the rolling sliding member of this invention is easy to mass-produce, and can manufacture a rolling sliding member at low cost.

  DESCRIPTION OF EMBODIMENTS Embodiments of a rolling sliding member, a manufacturing method thereof, and a rolling device according to the present invention will be described in detail with reference to the drawings.

[First embodiment]
FIG. 1 is a partial longitudinal sectional view of a deep groove ball bearing which is an embodiment of a rolling device according to the present invention. 2 is a view showing an inner ring constituting the deep groove ball bearing of FIG. 1, and FIG. 3 is an enlarged view of a part of a raceway surface (A portion of FIG. 2) of the inner ring shown in FIG. It is.
The deep groove ball bearing shown in FIG. 1 includes an inner ring 1 having a raceway surface 1a, an outer ring 2 having a raceway surface 2a opposite to the raceway surface 1a, and a plurality of rolling elements disposed between the raceway surfaces 1a and 2a. A moving body (ball) 3 and a cage 4 that holds a plurality of rolling bodies 3 between the both raceway surfaces 1a and 2a at equal intervals over the circumferential direction of the bearing are provided. In addition, the holder | retainer 4 does not need to be provided.

  The inner ring 1, outer ring 2 and rolling element 3 are in rolling contact or sliding contact with each other, and the raceway surface 1a of the inner ring 1, the raceway surface 2a of the outer ring 2, and the rolling surface 3a of the rolling element 3 correspond to rolling and sliding surfaces. To do. At least a part of these rolling sliding surfaces is subjected to fine processing for forming fine concave portions by irradiation with a short pulse laser having a pulse width of 1 ps or more and 5 ps or less. Then, at least a portion of the rolling sliding surface that has been subjected to the fine processing is covered with a lubricating coating (not shown) made of a solid lubricant.

  First, a minute recess formed by fine processing by irradiation with a short pulse laser will be described with an example. A plurality of grooves 10, 10,... Extending in a direction parallel to the rolling sliding direction are periodically formed on at least a part of the raceway surface 1a of the inner ring 1 (see FIGS. 2 and 3). More specifically, for example, by irradiating a short pulse laser with linearly polarized light, a groove in which a recess extending from the bottom toward the opening is elongated is formed, and as a result, a plurality of grooves 10, 10,. Formed in parallel.

  On the inner surfaces of these grooves 10,..., Fine linear concave portions and linear convex portions are alternately and repeatedly formed in a stripe shape by irradiation with the short pulse laser described above. The convex portion extends in a direction orthogonal to the rolling sliding direction (see FIG. 4 showing an enlarged inner surface of the groove 10 in FIG. 3). The linear concave portions and the linear convex portions are arranged in parallel with an interval of a nanometer order, and the average value of the distance L7 between two adjacent linear concave portions is, for example, when a laser having a wavelength of 800 nm is used. It is preferable that the wavelength is 400 to 800 nm which is slightly shorter than or similar to the wavelength of 800 nm. If this distance is too close or too far away, there is a risk that the retention of the lubricating coating described below will be insufficient. The distance L7 is preferably 10 nm or more, and can be appropriately adjusted depending on the laser wavelength and the degree of polarization. In addition, the distance L1 between the grooves 10 and the width L2 of the grooves 10 can be appropriately adjusted according to the laser wavelength of the short pulse laser used, and each is preferably 0.1 μm or more. Moreover, it is preferable that ratio of L1 and L2 is 0.1 or more and 10 or less.

  In addition, the entire raceway surface 1a is not subjected to micromachining, but is applied to a part, and a plane portion 13 (a portion where the surface before micromachining remains) is not subjected to micromachining. Yes. And the ratio of the total area of the part in which the groove | channel 10, 10, ... was formed among the track surface 1a is less than 100 area%. Since the load is supported by the flat portion 13, the inner ring 1 of this embodiment is excellent in load resistance.

  The ratio of the area can be obtained from the distance L1 between the adjacent grooves 10 and the width L2 of the grooves 10 when the grooves 10 are regularly formed as shown in FIG. That is, it can be obtained from the equation L1 / (L1 + L2) × 100 (%). And when the groove | channel is formed irregularly etc., it can obtain by measuring the ratio of the area per unit area using an electron microscope etc.

  Next, a lubricating coating made of a solid lubricant will be described. The method for forming the lubricating coating on the rolling sliding surface is not particularly limited, but the solid lubricant is applied to the portion of the rolling sliding surface that is to be covered with the lubricating coating including the portion where the fine recesses are formed. Can be formed by machining the solid lubricant. For example, by spraying solid lubricant powder onto the rolling sliding surface, placing the solid lubricant powder on the rolling sliding surface and causing the workpiece to collide with the solid lubricant at high speed A lubricating coating can be formed. Since the rolling sliding surface is formed with a minute recess such as the groove 10 by microfabrication, the adhesion between the rolling sliding surface and the lubricating coating is improved, and the lubricating coating is difficult to peel off from the rolling sliding surface. .

  The lubricating coating may be applied only to a portion of the rolling sliding surface where a fine recess is formed, or in addition, a portion where a fine recess is not formed may be covered. Therefore, the entire surface of the rolling sliding surface may be coated with a lubricating film. In addition, when the lubricating film is coated only on the portion where the fine concave portion is formed, the inside of the fine concave portion may be just filled with the lubricating coating, or the inside of the fine concave portion may be completely buried. Instead, the recess may remain. The surface of the lubricating coating may be subjected to the same fine processing as described above by short pulse laser irradiation or shot peening described later.

  The type of solid lubricant is not particularly limited, but molybdenum disulfide, polytetrafluoroethylene, graphite, lead, tin, zinc, gold, silver, bismuth, tungsten disulfide, boron nitride and the like are preferable. These solid lubricants may be used alone or in combination of two or more. Moreover, you may mix and use it with a binder. Furthermore, although the kind of processed material is not specifically limited, bearing steel, stainless steel, etc. are preferable.

  Such an inner ring 1 can be manufactured, for example, as shown in FIG. That is, first, an annular material 20 (see FIG. 5A) made of Japanese Industrial Standard SUJ2 which is a high carbon chrome bearing steel is turned to provide a raceway surface 21a, an end surface 21b, and an inner circumference. The surface 21c and the like are processed into a predetermined shape (see FIG. 5B), and the obtained intermediate material 21 is subjected to heat treatment such as quenching and tempering.

  Subsequently, the raceway surface 21a, the end surface 21b, the inner peripheral surface 21c, and the like of the intermediate material 21 subjected to the heat treatment are subjected to processing such as grinding and polishing to finish each surface with a predetermined accuracy. At this time, the surface roughness (Ra) of the raceway surface 21a of the intermediate material 21 is preferably set to 0.3 μm or less. If the surface before laser irradiation is too rough, there is a possibility that the fine processing may be hindered. In addition, the material of the rolling sliding member such as the inner ring 1 is not limited to bearing steel, and may be steel such as iron, carbon steel, and stainless steel, or non-ferrous metal such as copper and aluminum. Or nonmetals, such as ceramics and resin (for example, ultrahigh molecular weight polyethylene), may be sufficient.

Next, the short pulse laser 24 is irradiated onto the track surface 21a of the intermediate material 21 (see FIG. 5C). More specifically, the short pulse laser 24 is irradiated on the orbital surface 21a under irradiation conditions of a laser wavelength of 700 nm to 900 nm, a pulse width of 1 ps to 5 ps, and a fluence of 28 J / cm ² or less. Thereby, the irradiated part is ablated, and the recessed part (groove 10) which is a process trace is formed. Since the concave portion is formed by a non-thermal process, the thermal effect due to ablation is small and highly accurate.

  When fine processing is performed by irradiating a laser, burrs may be generated, or those removed by the laser may be scattered and deposited as particles on the track surface 21a. The burrs and particles on the track surface 21a may be removed by cleaning or the like. Thereafter, the surface roughness (Ra) of the entire raceway surface 21a is set to 0.02 μm or less by performing grinding or the like. However, fine processing by laser irradiation may be performed after setting the surface roughness (Ra) of the entire raceway surface 21a to 0.02 μm or less.

Then, for example, molybdenum disulfide powder was sprayed and adhered to the raceway surface 21a, and a lubricating film was formed by colliding the workpiece with the workpiece at a high speed.
In the present embodiment, fine linear concave portions and linear convex portions extending in a direction orthogonal to the rolling sliding direction are alternately formed in stripes, thereby forming the grooves 10, so that a constant wavelength Linearly polarized light is used. Further, the laser may be scanned a plurality of times in order to set the groove 10 sandwiched between the portions not irradiated with the short pulse laser 24 to a desired depth and a specific surface roughness (Ra). In this way, the inner ring 1 having the raceway surface 1a having a specific surface roughness (Ra) and having fine linear concave portions and linear convex portions formed with a cycle shorter than or equal to the laser wavelength. Can be manufactured (see (c) of FIG. 5).

  In the inner ring 1 of the present embodiment manufactured as described above, when the recess corresponding to the groove 10 is formed on the surface of the lubricant film, and the recess 10 is not completely filled with the lubricant film. If it remains, the lubricating oil and grease can be retained satisfactorily, and as a result, a satisfactory lubricating oil film can be formed. Therefore, the occurrence of surface contact between the inner and outer rings 1, 2 and the rolling element 3 can be suppressed, and the load resistance of the bearing can be improved and the torque can be reduced.

  Also, since the lubricating oil and grease enter the recesses formed on the surface of the lubricating coating, and dynamic pressure is generated on the raceway surface 1a when the entering lubricating oil and grease are discharged, the inner and outer rings 1 and 2 and the rolling element 3 Surface contact between the two is less likely to occur. As a result, reduction of friction torque is promoted. In addition, the effect of reducing the amount of lubricating oil and grease used, the effect of trapping and removing wear powder from the raceway surface 1a, the effect of suppressing the temperature rise of the raceway surface 1a, and the lubricating oil and grease are the most. Even when the bearing is started and stopped, which has a severe frictional condition due to the lack, an effect of effectively supplying lubricating oil or grease to the raceway surface 1a can be obtained.

Even when the surface of the lubricant film is finely processed to form a minute recess, the recess 10 corresponding to the groove 10 is formed on the surface of the lubricant film, and the groove 10 is completely filled with the lubricant film. The above-described effects obtained when the concave portions remain without being formed can be similarly obtained.
Furthermore, such an inner ring 1 contributes to energy saving of various devices in which a deep groove ball bearing using the inner ring 1 is used. Further, since fine processing can be easily performed by irradiation with a short pulse laser, there is an advantage that it can be manufactured at low cost. The groove 10 extends in a direction parallel to the rolling sliding direction, and the fine linear recesses and linear protrusions are perpendicular to the groove 10 (that is, the direction orthogonal to the rolling sliding direction). When the portion is extended, the above various effects can be obtained most, but a certain effect can be obtained even at other angles.

[Second Embodiment]
FIG. 6 is an enlarged view of a part of the raceway surface of the inner ring for the deep groove ball bearing according to the second embodiment. Since the configuration and operation of the inner ring of the second embodiment are substantially the same as those of the first embodiment, only different parts will be described, and description of the same parts will be omitted. In FIG. 6, the same or corresponding parts as those in FIG. 3 are denoted by the same reference numerals as those in FIG.

The raceway surface 1a of the inner ring 1 is finely processed by irradiating a short pulse laser having a pulse width of 1 ps or more and 5 ps or less, and a rectangular recess having sides L5 and L6 of 0.01 μm or more and 0.5 μm or less. 11, 11,... Are formed at a predetermined interval.
More specifically, if the short pulse laser is condensed and irradiated to a desired portion of the track surface 1a, and the inner ring 1 or the laser is moved while intermittently irradiating the short pulse laser with the shutter, the rectangular shape as described above is obtained. .., Can be formed. The distances L3 and L4 between the adjacent rectangular recesses 11 are preferably 0.1 μm or more and 15 μm or less.

  As in the case of the first embodiment, fine linear concave portions and linear convex portions are alternately and repeatedly formed in stripes on the inner surfaces of these rectangular concave portions 11, 11,. The concave and linear convex portions extend in a direction orthogonal to the rolling sliding direction (see FIG. 4). About the effect of this linear recessed part and a linear convex part, since it is the same as that of the case of 1st embodiment, the description is abbreviate | omitted.

  The entire raceway surface 1a is not subjected to micromachining, but is applied to a part, and a flat surface portion 13 (a portion where the surface before micromachining remains) is not subjected to micromachining. And the ratio of the total area of the part in which the rectangular-shaped recessed part 11, 11, ... was formed among the track surface 1a is less than 100 area%. Since the load is supported by the flat portion 13, the inner ring 1 of this embodiment is excellent in load resistance.

  When the concave portions 11 are regularly formed as shown in FIG. 6, the ratio of the areas is the distances L3 and L4 between the adjacent rectangular concave portions 11 and one side L5 of the rectangular concave portion 11. It can be obtained from L6. Moreover, when the concave part 11 of the same shape is formed irregularly, or when the concave part 11 is irregular, etc., it can be obtained by measuring the ratio of the area per unit area using an electron microscope or the like. it can.

A portion of the raceway surface 1a that has been finely processed is covered with a lubricating coating. When the concave portion corresponding to the concave portion 11 is formed on the surface of the lubricating coating, and when the concave portion 11 is not completely filled with the lubricating coating and the concave portion remains, the concave portion makes the lubricating oil Since dynamic pressure is generated, surface contact is unlikely to occur. Therefore, reduction of friction torque and suppression of surface contact are promoted.
Furthermore, it becomes possible to hold the lubricating oil and grease well in the recesses formed on the surface of the lubricating coating, and as a result, a good lubricating oil film can be formed. Therefore, the occurrence of surface contact between the inner and outer rings 1, 2 and the rolling element 3 can be suppressed, and the load resistance of the bearing can be improved and the torque can be reduced.

Even when the surface of the lubricant film is finely processed to form a minute recess, the recess 11 corresponding to the recess 11 is formed on the surface of the lubricant film, and the recess 11 is completely filled with the lubricant film. The above-described effects obtained when the concave portions remain without being formed can be similarly obtained.
Further, even if a circular recess 12 having a diameter of 0.01 μm or more and 0.5 μm or less as shown in FIG. 7 is formed instead of the recess 11, the same effect as that of the recess 11 can be obtained.

[Third embodiment]
FIG. 8 is an enlarged cross-sectional view of a part of an inner ring for a deep groove ball bearing according to the third embodiment. Since the configuration and operation of the inner ring of the third embodiment are substantially the same as those of the first embodiment, only different parts will be described, and description of the same parts will be omitted. In FIG. 8, the same reference numerals as in FIG. 3 are assigned to the same or corresponding parts as in FIG.

  The raceway surface 1a of the inner ring 1 is finely processed by shot peening, and a plurality of minute recesses 14 having a depth of 100 μm or less are formed. When performing shot peening, a part of the raceway surface 1a is covered with a mask material 16 as shown in FIG. 9, and a shot material 17 is projected there. If it does so, the shot material 17 will be projected only to the exposed part 18 which is not covered with the mask material 16 among the track surfaces 1a, and the micro recessed part 14 will be formed. At this time, the mask material 16 is coated so that the ratio of the area of the portion where the minute recesses 14 are formed in the entire raceway surface 1a (that is, the portion subjected to the fine processing) is 5 area% or more. Is preferred.

Shot peening can be performed using a shot peening apparatus or the like. As the shot material 17, steel balls, SiC, SiO ₂ , Al ₂ O ₃ , glass beads and the like having an average particle diameter of 45 μm specified in JIS R6001 can be used. Moreover, as for the processing conditions of shot peening, the injection pressure is preferably 196 to 882 kPa, and the injection time is preferably 10 to 20 min.

  A lubricant film 19 made of a solid lubricant is coated on at least a portion of the raceway surface 1a where the minute recesses 14 are formed. The method for forming the lubricating coating 19 is not particularly limited, and the same method as described above can be adopted. However, a method of causing the solid lubricant powder to collide with the raceway surface 1a at a high speed is preferable. By adopting this method, it is possible to easily form a lubricating film having excellent adhesion and a uniform film thickness in a short time.

  At that time, if the solid lubricant powder is collided at a high speed following the formation of the minute recesses 14 by shot peening (that is, in the state where the mask material 16 used for the formation of the minute recesses 14 is covered, the solids are directly solid If the powder of the lubricant is sprayed), the lubricating coating 19 can be easily formed only on the inner surface of the minute recess 14. However, the lubricating coating 19 may cover not only the inner surface of the minute recess 14 but also a portion where the minute recess 14 is not formed. Therefore, the entire surface of the rolling sliding surface may be coated with the lubricating coating 19.

  The surface of the lubricating coating 19 may also be subjected to the same fine processing as described above by short pulse laser irradiation or shot peening. In addition to the shot peening, laser processing, etching, electric discharge processing, deposition processing, or the like can be used to form the minute recesses 14. Furthermore, it is also possible to use a film forming method such as CVD or vapor deposition for forming the lubricating film 19.

  If the inner ring 1 is manufactured in this way, mass production is easy and it can be manufactured at low cost. In addition, since the minute recesses 14 are formed on the raceway surface 1a, when lubrication is performed with lubricating oil or grease, dynamic pressure is generated by the minute recesses 14, so that surface contact is unlikely to occur. Therefore, reduction of friction torque and suppression of seizure are promoted. Further, since the minute recess 14 functions as an oil reservoir and the lubricating oil and grease are effectively supplied to the contact surface with the mating member, even when the rolling bearing is started and stopped, the lubricating oil and grease are likely to be deficient. , Friction is suppressed. In addition, when friction occurs, it functions as a trap for trapping wear powder, which promotes improved load resistance, reduced friction torque, and improved wear resistance. Furthermore, when the track surface 1a is worn under severe lubrication environment, the lubricating coating 19 formed on the minute recess 14 spreads over the track surface 1a and is used for lubrication. Wear is suppressed.

  In addition, 1st-3rd embodiment showed an example of this invention, Comprising: This invention is not limited to said each embodiment. For example, in the first to third embodiments, the inner ring of the deep groove ball bearing has been described as an example of the rolling sliding member, but the present invention can also be applied to an outer ring, a rolling element, and a cage. Moreover, it is applicable not only to a deep groove ball bearing but also to bearing components of other types of rolling bearings. For example, radial ball bearings, cylindrical roller bearings, tapered roller bearings, needle roller bearings, spherical roller bearings such as self-aligning roller bearings, and thrust-type rolling bearings such as thrust ball bearings and thrust roller bearings.

  Furthermore, in 1st-3rd embodiment, although the rolling bearing was illustrated and demonstrated as a rolling device, the rolling device of this invention is applicable with respect to other various types of rolling devices. it can. For example, the present invention can be suitably applied to other rolling devices such as a linear motion guide bearing, a ball screw, and a linear motion bearing.

〔Example〕
Hereinafter, the present invention will be described more specifically with reference to examples. Rolling sliding members with fine processing were manufactured and their performance was evaluated. The contents will be described below.
[Example of microfabrication by short pulse laser irradiation]
The SUJ2 annular material was turned into a predetermined shape and subjected to heat treatment such as quenching and tempering. Subsequently, the end face of the intermediate material that becomes the rolling sliding surface was finished to a predetermined accuracy by grinding, polishing, or the like. In addition, the surface roughness (Ra) of the end surface of the intermediate material was 0.25 μm.

Thereafter, the end face serving as a rolling sliding surface was subjected to fine processing by irradiating a short pulse laser with linearly polarized light under the conditions of a laser wavelength of 800 nm, a pulse width of 3 ps, and a fluence of 28 J / cm ² . The portion irradiated with the short pulse laser is ablated to form a fine recess. When the end surface of the intermediate material is observed with a scanning electron microscope, a plurality of grooves are formed in parallel and regularly, and fine linear concave portions and linear convex portions are alternately and repeatedly striped on the inner surface of the grooves. Was formed. And this linear recessed part and the linear convex part were located in parallel with the space | interval, and when the laser wavelength was 800 nm, the space | interval was an average of 600 nm.

Then, the end face having been subjected to the fine processing as described above was sprayed with molybdenum disulfide powder to cover the entire end face with a lubricating coating, thereby obtaining an annular specimen.
Here, by controlling the spot diameter of the short pulse laser, a plurality of grooves extending in a direction orthogonal to the rolling sliding direction are regularly formed, and the total of the portions where the grooves are formed on the entire end face Those having an area ratio of 10 to 80 area% were designated as Examples 1 to 6 (see Table 1).

  In addition, by controlling the spot diameter of the short pulse laser and controlling the shutter speed to intermittently irradiate the short pulse laser, a plurality of rectangular recesses with sides of 0.01 μm to 0.5 μm are formed on the end face Examples where the ratio of the total area of the portions where the rectangular concave portions were formed in the entire end face were 20 to 80 area% were designated as Examples 7 to 11 (see Table 1).

  Furthermore, by controlling the spot diameter of the short pulse laser and controlling the shutter speed to intermittently irradiate the short pulse laser, multiple circular recesses with a diameter of 0.01 μm or more and 0.5 μm or less are formed on the end face. In addition, Examples in which the ratio of the total area of the portions where the circular concave portions are formed in the entire end face are 20 to 80 area% are referred to as Examples 12 to 16 (see Table 1).

  Furthermore, the following annular specimens were prepared as comparative examples. Comparative Example 1 is the same as Example 1 described above except that fine processing by irradiation with a short pulse laser and coating of a lubricating film are not performed. Moreover, the comparative example 2 is the same as that of said Example 1 except that the fine process by irradiation of a short pulse laser is not given. Further, Comparative Example 3 is the same as Example 4 except that the lubricating coating is not applied.

  The end surfaces of the annular specimens of Examples 1 to 16 and Comparative Examples 1 to 3 are subjected to ordinary quenching of the flat member made of steel (the flat member made of SCM415), and the surface roughness Ra is set to 0. 0. (Finished to 02 μm) was slid in an oil bath (engine oil was used as the lubricating oil), and the coefficient of friction μ was measured over time. The time when the friction coefficient μ exceeded 0.2 was defined as the life. The results are shown in Table 1. In addition, the numerical value of the lifetime shown in Table 1 is shown as a relative value when the lifetime of Comparative Example 1 is 1.

In addition, Table 1 shows the friction coefficient μ at the initial stage of sliding. However, the friction coefficient μ of the comparative example 1 is set to 100, and the reduction rate from the friction coefficient μ of the comparative example 1 is shown. For example, the friction coefficient μ of Example 1 is 66 when the friction coefficient μ of Comparative Example 1 is set to 100, so 34, which is a reduction rate, is shown.
From Table 1, Example 8 in which a plurality of rectangular concave portions are formed and the ratio of the total area of the portions where the rectangular concave portions are formed in the entire end face is 40 area% is the most durable. I understand that.

[Example of fine processing by shot peening]
The SUJ2 annular material was turned into a predetermined shape and subjected to heat treatment such as quenching and tempering. Subsequently, the end face of the intermediate material that becomes the rolling sliding surface was finished to a predetermined accuracy by grinding, polishing, or the like. Note that the surface roughness (Ra) of the end face of the intermediate material was 0.04 μm.

  Then, after covering the end face which becomes a rolling sliding surface with a mask material, the shot peening which injects a hard particle was performed, and the fine process which forms a circular minute recessed part was performed. Further, by changing the pattern of the mask material, the ratio of the total area of the portions where the minute recesses were formed in the entire end face and the diameter of the minute recesses were changed (see Table 2). Then, by spraying the molybdenum disulfide powder onto the end face subjected to the fine processing as described above while covering the mask material, the inner surface of the minute recesses was covered with a lubricating film to obtain an annular specimen.

  The depth of the minute recess is 10 μm. The spray pressure of the molybdenum disulfide powder is 441 kPa, the spray time is 10 minutes, and the thickness of the obtained lubricating coating is 5 μm.

  As a comparative example, the following annular specimen was prepared. Comparative Example 1 is the same as Example 1 except that the fine processing by shot peening and the coating of the lubricating coating are not performed. In Comparative Example 2, fine processing by shot peening is not performed, and the entire end face is covered with a lubricating coating. Further, Comparative Example 3 is the same as Example 4 except that the lubricating coating is not applied.

  Using the annular specimens of Examples 1 to 9 and Comparative Examples 1 to 3 as a bearing ring of a thrust needle bearing, a rotation test was performed under lubrication with white kerosene. The thrust load is 882 N and the rotation speed is 1000 rpm. Then, the friction torque during rotation of the thrust needle bearing and the temperature of the race were measured, and the time when the friction torque was doubled from the initial value or the temperature of the race was increased by 30 ° C. from the initial value was regarded as the life. The results are shown in Table 2. In addition, the numerical value of the lifetime shown in Table 2 is shown as a relative value when the lifetime of Comparative Example 1 is 1. Table 2 also shows the initial value of the friction torque. This friction torque is also shown as a relative value when the friction torque of Comparative Example 1 is 1.

  From Table 2, it can be seen that Example 5 in which the diameter of the minute recesses is 100 μm and the ratio of the total area of the portions where the minute recesses are formed in the entire end face is 20 area% is most excellent in durability. . Further, in any case of the diameter of the minute recesses, the friction torque was lowest when the ratio of the total area of the portions where the minute recesses were formed in the entire end face was 20 area%.

It is a fragmentary longitudinal cross-section which shows the structure of the deep groove ball bearing which is one Embodiment of the rolling device which concerns on this invention. It is a figure which shows the inner ring | wheel which comprises the deep groove ball bearing of FIG. It is the figure which expanded and showed the A section of FIG. It is the figure which expanded and showed the inner surface of the groove | channel of FIG. It is a figure explaining the manufacturing process of an inner ring. It is the figure which expanded and showed a part of raceway surface of the inner ring | wheel for deep groove ball bearings which are 2nd embodiment. It is the figure which expanded and showed a part of track surface of an inner ring | wheel which shows the modification of 2nd embodiment. It is sectional drawing which expanded and showed a part of inner ring for deep groove ball bearings which are 3rd embodiment. It is a figure explaining the method of shot peening.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inner ring 1a Raceway surface 2 Outer ring 2a Raceway surface 3 Rolling body 3a Rolling surface 10 Groove 11 Rectangular recessed part 12 Circular recessed part 14 Micro recessed part 16 Mask material 17 Shot material 18 Exposed part 19 Lubrication coating

Claims (18)

  In a rolling sliding member having a rolling sliding surface that causes relative rolling contact or sliding contact with a mating member, fine processing is performed to form a fine recess in at least a part of the rolling sliding surface. The rolling sliding member is characterized in that a lubricating coating made of a solid lubricant is coated on at least a portion of the rolling sliding surface on which the fine processing is performed.   A part of the rolling sliding surface is covered with a mask material, and shot peening is performed, so that the exposed portion of the rolling sliding surface not covered with the mask material is subjected to the fine processing. The rolling sliding member according to claim 1.   3. A minute recess having a depth of 100 μm or less is formed by the shot peening, and a ratio of an area of the portion where the minute recess is formed in the entire rolling sliding surface is 5 area% or more. The rolling sliding member as described in 2. In a method of manufacturing a rolling sliding member having a rolling sliding surface in which relative rolling contact or sliding contact occurs with a counterpart member,
A micro-machining step of covering a part of the rolling sliding surface with a mask material and performing shot peening, and forming a micro concave portion having a depth of 100 μm or less in an exposed portion of the rolling sliding surface not covered with the mask material When,
A coating step of coating a lubricant film made of a solid lubricant on at least a portion of the rolling sliding surface where the minute recesses are formed;
A method for producing a rolling sliding member, comprising:   5. The method of manufacturing a rolling sliding member according to claim 4, wherein the lubricant film is formed by causing the powder of the solid lubricant to collide with the rolling sliding surface at a high speed. In a method of manufacturing a rolling sliding member having a rolling sliding surface in which relative rolling contact or sliding contact occurs with a counterpart member,
A portion of the rolling sliding surface is covered with a mask material to perform shot peening, and after forming a minute recess having a depth of 100 μm or less in an exposed portion of the rolling sliding surface that is not covered with the mask material, A solid lubricant powder is caused to collide with the rolling sliding surface provided with a mask material at a high speed, and a portion of the rolling sliding surface on which the minute recesses are formed is coated with a lubricating coating made of the solid lubricant. A manufacturing method of a rolling sliding member characterized by the above.   2. The rolling sliding member according to claim 1, wherein the microfabrication is performed by irradiating at least a part of the rolling sliding surface with a short pulse laser having a pulse width of 1 ps or more and 5 ps or less.   The rolling sliding member according to claim 7, wherein a plurality of grooves are periodically formed by the fine processing.   The groove extends in a direction parallel to the rolling sliding direction, and the ratio of the area of the portion where the groove is formed in the entire rolling sliding surface is less than 100 area%. The rolling sliding member according to claim 8.   On the inner surface of the groove, fine linear concave portions and linear convex portions are alternately and repeatedly formed in stripes by the irradiation of the short pulse laser, and the linear concave portions and the linear convex portions are rolling. The rolling sliding member according to claim 8 or 9, wherein the rolling sliding member extends in a direction orthogonal to the moving direction.   By the fine processing, a plurality of rectangular recesses having a side of 0.01 μm or more and 0.5 μm or less are formed at predetermined intervals, and the rectangular recesses are formed in the entire rolling sliding surface. The rolling sliding member according to claim 7, wherein a ratio of the area of the portion is less than 100 area%.   On the inner surface of the rectangular concave portion, fine linear concave portions and linear convex portions are alternately and repeatedly formed in stripes by the irradiation of the short pulse laser, and the linear concave portions and the linear convex portions are formed. The rolling sliding member according to claim 11, wherein the rolling sliding member extends in a direction orthogonal to the rolling sliding direction.   By the fine processing, a plurality of circular recesses having a diameter of 0.01 μm or more and 0.5 μm or less are formed at predetermined intervals, and the circular recesses are formed in the entire rolling sliding surface. The rolling sliding member according to claim 7, wherein a ratio of the area of the portion is less than 100 area%.   On the inner surface of the circular concave portion, fine linear concave portions and linear convex portions are alternately and repeatedly formed in stripes by irradiation with the short pulse laser, and the linear concave portions and the linear convex portions are formed. The rolling sliding member according to claim 13, wherein the rolling sliding member extends in a direction orthogonal to the rolling sliding direction.   The said lubricating film is formed by performing a machining process on the solid lubricant disposed on the rolling sliding surface, according to any one of claims 7 to 14. Rolling sliding member.   The lubricating coating is formed by causing a workpiece to collide at high speed with the solid lubricant disposed on the rolling sliding surface by spraying the powder of the solid lubricant. The rolling sliding member according to any one of claims 7 to 14. In a method of manufacturing a rolling sliding member having a rolling sliding surface in which relative rolling contact or sliding contact occurs with a counterpart member,
A fine structure that forms a fine concave portion on at least a part of the rolling sliding surface by irradiating a short pulse laser under irradiation conditions of a laser wavelength of 700 nm to 900 nm, a pulse width of 1 ps to 5 ps, and a fluence of 28 J / cm ² or less. Processing steps,
A coating step of coating a lubricant film made of a solid lubricant on at least a portion where the fine concave portion is formed in the rolling sliding surface;
A method for producing a rolling sliding member, comprising:   An inner member having a raceway surface on the outer surface, an outer member having a raceway surface opposite to the raceway surface of the inner member and arranged on the outer side of the inner member, and freely rollable between the both raceway surfaces A rolling device comprising: a rolling element disposed on the at least one of the inner member, the outer member, and the rolling element. A rolling device comprising the rolling sliding member according to claim 1.

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