JP2008031558A5 - - Google Patents
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- JP2008031558A5 JP2008031558A5 JP2007268190A JP2007268190A JP2008031558A5 JP 2008031558 A5 JP2008031558 A5 JP 2008031558A5 JP 2007268190 A JP2007268190 A JP 2007268190A JP 2007268190 A JP2007268190 A JP 2007268190A JP 2008031558 A5 JP2008031558 A5 JP 2008031558A5
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- shower head
- substrate
- gas shower
- processing
- gas
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Description
一方、前記隙間への対策としては、拡散板の接合時に当該拡散板の接合面にろう材を塗布しておくことで前記隙間を塞ぐという手法もある。しかしながら、この手法は、ろう材を用いているので、各拡散板を分解することが困難となるため、洗浄作業を行う場合に不便であるという問題もある。 On the other hand, as a countermeasure against the gap, there is a method of closing the gap by applying a brazing material to the joining surface of the diffusion plate when the diffusion plate is joined. However, since this method uses a brazing material, it is difficult to disassemble each diffusion plate, and there is a problem that it is inconvenient when performing a cleaning operation.
本発明はこのような事情に基づいてなされたものであり、その目的は、容易に分解することができるガスシャワーヘッドを提供することにある。他の発明の目的は、前記ガスシャワーヘッドを用いた処理装置を提供することにある。本発明の更に他の目的はガスシャワーヘッドの分解を容易に行うことのできるメンテナンス方法を提供することにある。 The present invention has been made based on such circumstances, and an object thereof is to provide a gas shower head that can be easily disassembled. Another object of the present invention is to provide a processing apparatus using the gas shower head. Still another object of the present invention is to provide a maintenance method capable of easily disassembling a gas shower head.
また本発明に係る処理方法は、処理容器内の載置台に載置された基板に対して、当該基板に対向するガスシャワーヘッドからガスを供給し、処理を行う処理方法において、
前記ガスシャワーヘッドは、複数の金属部材を重ね合わせた状態で、これを加熱して各金属部材の接触面同士の金属拡散接合をして構成され、
このガスシャワーヘッドからガスを基板に供給し、当該基板の表面に処理を行うことを特徴とする。
また本発明は、処理容器内の載置台に載置された基板に対して、当該基板に対向するガスシャワーヘッドからガスを基板に供給し、当該基板の表面に処理を行う処理装置をメンテナンスする方法において、
ガスシャワーヘッドを構成する複数の金属部材を重ね合わせた状態で、これを加熱して各金属部材の接触面同士を金属拡散接合してガスシャワーヘッドを組み立てる工程を含むことを特徴とする。
また上述の処理装置のメンテナンス方法において、ガスシャワーヘッドを組み立てる工程は、前記各金属部材の接触面同士を金属拡散接合する工程に加えて更に複数の金属部材を重ね合わせてネジ止めを行う工程を設けるようにしてもよい。さらに基板に対して処理を行った後、金属拡散接合による結合力が弱まったときに、前記ネジ止めされている下段側の金属部材が自重で上段側の金属部材から離脱するように当該ネジ止めに用いられているネジを緩めた状態でガスシャワーヘッドを保持し、この状態でガスシャワーヘッドを加熱して、複数の金属部材を互いに分離する工程を設けるようにしてもよい。
Further, the processing method according to the present invention is a processing method in which a gas is supplied from a gas shower head facing the substrate to the substrate placed on the mounting table in the processing container, and the processing is performed.
The gas shower head is configured by metal diffusion bonding between the contact surfaces of each metal member by heating the metal member in a state where a plurality of metal members are overlapped,
A gas is supplied from the gas shower head to the substrate, and the surface of the substrate is processed.
In addition, the present invention maintains a processing apparatus that supplies a gas to a substrate from a gas shower head facing the substrate and processes the surface of the substrate placed on a mounting table in a processing container. In the method
In a state in which a plurality of metal members constituting the gas shower head are overlapped, the process includes heating the metal members and bonding the contact surfaces of the metal members to each other by metal diffusion bonding to assemble the gas shower head.
Moreover, in the maintenance method of the processing apparatus described above, the step of assembling the gas shower head includes a step of screwing by overlapping a plurality of metal members in addition to the step of metal diffusion bonding of the contact surfaces of the metal members. You may make it provide. Further, after the processing is performed on the substrate, when the bonding force by metal diffusion bonding is weakened, the screw member is screwed so that the screwed lower metal member is detached from the upper metal member by its own weight. A step may be provided in which the gas shower head is held in a state where the screws used in the above are loosened, and the gas shower head is heated in this state to separate the plurality of metal members from each other.
本発明によれば、複数の金属部材を上下に重ね合わせた状態で加熱することにより、各金属部材の接触面同士を金属拡散接合してシャワーヘッド本体を構成しているので、容易に接合面を分離することができ、例えばガスシャワーヘッド内に形成されているガス流路の洗浄を容易に行うことができる。
According to the present invention, since the plurality of metal members are heated in a state where they are stacked one on top of the other, the contact surfaces of the metal members are diffusion-bonded to each other to form the shower head body. For example, the gas flow path formed in the gas shower head can be easily cleaned.
Claims (9)
複数の金属部材を上下に重ね合わせた状態で加熱することにより、各金属部材の接触面同士を金属拡散接合したシャワーヘッド本体と、
このシャワーヘッド本体内の前記接触面を横切るように貫通し、独立して形成される複数のガス流路と、を備えることを特徴とするガスシャワーヘッド。 With a number of holes in the substrate opposite to the surface with provided in the surface facing the substrate, the Ruga scan fed from the gas supply passage, the gas shower head supplied to the substrate through these holes at the same time In
By heating in a state where a plurality of metal members are stacked one above the other, a shower head body in which the contact surfaces of each metal member are metal diffusion bonded,
The penetrating across the contact surface, the gas shower head is characterized in that it comprises a plurality of gas passages formed by independent of the shower head body.
前記処理容器内を排気する真空ポンプと、
前記処理容器に設けられる請求項１または２記載のガスシャワーヘッドと、を備えたことを特徴とする処理装置。 A processing vessel provided with a mounting table for mounting the substrate;
A vacuum pump for exhausting the inside of the processing vessel;
Processing apparatus characterized by comprising a gas shower head according to claim 1 or 2, wherein provided in the processing vessel.
前記ガスシャワーヘッドは、複数の金属部材を重ね合わせた状態で、これを加熱して各金属部材の接触面同士を金属拡散接合して構成され、このガスシャワーヘッドからガスを基板に供給し、当該基板の表面に処理を行うことを特徴とする処理方法。 Against substrate mounted on the mounting table in the processing chamber, supplying a gas shower head or Laga scan opposed to the substrate, the processing method for performing processing,
The gas shower head is in a state of superimposing a plurality of metal members, which is configured to contact surfaces of the heating to the metal member by a metal diffusion bonding, supplying the gas shower head or Laga scan the substrate and, processing method and performing a process on the surface of the substrate.
ガスシャワーヘッドを構成する複数の金属部材を重ね合わせた状態で、これを加熱して各金属部材の接触面同士を金属拡散接合してガスシャワーヘッドを組み立てる工程を含むことを特徴とする処理装置のメンテナンス方法。 A processing apparatus comprising a step of assembling a gas shower head by metal diffusion bonding the contact surfaces of each metal member by heating the plurality of metal members constituting the gas shower head in an overlapped state. Maintenance method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007268190A JP4816616B2 (en) | 2007-10-15 | 2007-10-15 | Gas shower head, processing apparatus, processing method, and maintenance method of processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007268190A JP4816616B2 (en) | 2007-10-15 | 2007-10-15 | Gas shower head, processing apparatus, processing method, and maintenance method of processing apparatus |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002043483A Division JP4288036B2 (en) | 2002-02-20 | 2002-02-20 | Gas shower head, film forming apparatus and film forming method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008031558A JP2008031558A (en) | 2008-02-14 |
| JP2008031558A5 true JP2008031558A5 (en) | 2009-04-09 |
| JP4816616B2 JP4816616B2 (en) | 2011-11-16 |
Family
ID=39121297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007268190A Expired - Fee Related JP4816616B2 (en) | 2007-10-15 | 2007-10-15 | Gas shower head, processing apparatus, processing method, and maintenance method of processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4816616B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4864057B2 (en) * | 2008-09-04 | 2012-01-25 | シャープ株式会社 | Vapor growth apparatus and vapor growth method |
| JP6146840B1 (en) | 2016-08-04 | 2017-06-14 | 日本新工芯技株式会社 | Electrode plate |
| JP7308637B2 (en) * | 2018-05-29 | 2023-07-14 | 東京エレクトロン株式会社 | Vacuum processing apparatus, shower head, and method for assembling vacuum processing apparatus |
| DE102018126617A1 (en) * | 2018-10-25 | 2020-04-30 | Aixtron Se | Screen plate for a CVD reactor |
| JP2024021368A (en) * | 2022-08-03 | 2024-02-16 | 日本発條株式会社 | Head for ejecting reactive gas for depositing film and method for manufacturing the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09256153A (en) * | 1996-03-15 | 1997-09-30 | Anelva Corp | Substrate processor |
| JPH10226885A (en) * | 1997-02-17 | 1998-08-25 | Ebara Corp | Gas injection head |
| US6302964B1 (en) * | 1998-06-16 | 2001-10-16 | Applied Materials, Inc. | One-piece dual gas faceplate for a showerhead in a semiconductor wafer processing system |
| JP2001064777A (en) * | 1999-08-30 | 2001-03-13 | Ebara Corp | Gas jet head |
| JP4717179B2 (en) * | 2000-06-21 | 2011-07-06 | 日本電気株式会社 | Gas supply device and processing device |
-
2007
- 2007-10-15 JP JP2007268190A patent/JP4816616B2/en not_active Expired - Fee Related
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