JP2008030384A - Manufacturing method of a plurality of sets of long laminates having metal foil/resin film structure - Google Patents

Manufacturing method of a plurality of sets of long laminates having metal foil/resin film structure Download PDF

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JP2008030384A
JP2008030384A JP2006208295A JP2006208295A JP2008030384A JP 2008030384 A JP2008030384 A JP 2008030384A JP 2006208295 A JP2006208295 A JP 2006208295A JP 2006208295 A JP2006208295 A JP 2006208295A JP 2008030384 A JP2008030384 A JP 2008030384A
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resin film
long
thermocompression bonding
laminate
manufacturing
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JP5242030B2 (en
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Yoshitaka Mineki
義孝 嶺木
Kazuo Yasuda
一雄 安田
Katsuzo Kato
勝三 加藤
Toshinori Hosoma
敏徳 細馬
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Ube Exsymo Co Ltd
Ube Corp
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Ube Industries Ltd
Ube Nitto Kasei Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/70General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/71General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined

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  • Laminated Bodies (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the mutual local sticking of adjacent sets of long laminates having a metal foil/resin film structure in the case where a plurality of sets of the long laminates are simultaneously and continuously manufactured using a thermocompression bonding device. <P>SOLUTION: In the manufacturing method of a plurality of sets of the long laminates having the metal foil/resin film structure at the same time using the thermocompression bonding device, thermocompression bonding operation is performed in a state that the positions of the side end parts of the respective resin films of mutually adjacent sets are not overlapped with each other. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体を同時に製造する方法に関する。   The present invention relates to a method for simultaneously producing a long laminate having a structure composed of a plurality of sets of metal foil / resin film.

芳香族ポリイミドフィルムに代表される高耐熱性で熱圧着性を有する樹脂フィルムと銅箔に代表される高導電性金属箔とを積層熱圧着した積層体は、たとえば、各種電子部品のプリント配線基板の製造に利用されている。この積層体の代表的な構成としては、金属箔/樹脂フィルム/金属箔の構成の三層積層体および金属箔/樹脂フィルムの構成の二層積層体がある。後者の二層積層体は、その製造と使用の際の便宜を考慮して、通常は、樹脂フィルムの表面側(金属箔の側とは反対側表面)に離型性の表面を持つ離型フィルムが積層されている。   A laminated body obtained by laminating a highly heat-resistant and heat-bondable resin film typified by an aromatic polyimide film and a highly conductive metal foil typified by a copper foil is, for example, a printed wiring board for various electronic components. It is used for manufacturing. Typical configurations of this laminate include a three-layer laminate having a metal foil / resin film / metal foil configuration and a two-layer laminate having a metal foil / resin film configuration. The latter two-layer laminate is usually a mold release that has a releasable surface on the surface side of the resin film (the surface opposite to the metal foil side) for the convenience of its manufacture and use. Films are laminated.

上記のような金属箔/樹脂フィルムの構造の積層体は、その積層体自体の製造の効率、そして積層体を利用するプリント配線基板などの各種部品の製造の効率を考慮して、長尺状積層体として製造するのが一般的である。このための方法としては、ロール状に巻かれた長尺状の金属箔と同じくロール状に巻かれた長尺状の樹脂フィルム、そして必要により、同じくロール状に巻かれた長尺状の離型フィルムのそれぞれを連続的に、上側ロールと下側ロールとを含む一対の加熱圧着装置に対して、互いに重ね合わせた状態で、あるいは加熱圧着装置の入口で重ね合わされるようにして供給し、次いで加熱圧着装置により積層圧着された長尺状の積層体を巻き取りロールにより巻き取る方法が一般的に利用されている。加熱圧着装置としては、上側ロールと下側ロールのそれぞれを単ロールとした従来タイプの加熱圧着装置、そして上側ドラムと下側ドラムのそれぞれを前方ドラムと後方ドラム、そして両ドラムの周囲をドラムと同期して回転するベルトから構成したダブルベルトプレスが代表的である。   The laminate having the structure of the metal foil / resin film as described above has a long shape in consideration of the efficiency of manufacturing the laminate itself and the efficiency of manufacturing various parts such as a printed wiring board using the laminate. It is common to manufacture as a laminated body. For this purpose, there are a long resin film wound in the same manner as a long metal foil wound in a roll shape, and a long release film that is also wound in a roll shape if necessary. Each of the mold films is continuously supplied to a pair of thermocompression bonding apparatuses including an upper roll and a lower roll in a state where they are overlapped with each other or overlapped at the entrance of the thermocompression bonding apparatus, Next, a method of winding a long laminate that is laminated and pressure-bonded by a thermocompression bonding apparatus with a winding roll is generally used. As the thermocompression bonding apparatus, a conventional thermocompression bonding apparatus in which each of the upper roll and the lower roll is a single roll, and each of the upper drum and the lower drum is a front drum and a rear drum, and the periphery of both drums is a drum. A double belt press composed of belts that rotate synchronously is typical.

上記のように、金属箔/樹脂フィルムからなる構造の積層体は、加熱圧着装置を用い、実際は金属箔/樹脂フィルムからなる構造の長尺状積層体として連続的に製造されるが、近年、金属箔/樹脂フィルムからなる構造の長尺状二層積層体の需要の増加に応じて、そしてまた、その製造コストの低減を図るために、二組もしくはそれ以上の複数組の積層体を同時に製造することが検討されている。   As described above, a laminate having a structure composed of a metal foil / resin film is manufactured continuously as a long laminate having a structure composed of a metal foil / resin film using a thermocompression bonding apparatus. In response to an increase in demand for a long two-layer laminate having a metal foil / resin film structure, and in order to reduce its manufacturing cost, two or more sets of laminates are simultaneously used. Manufacturing is under consideration.

特許文献1には、ダブルベルトプレス装置に熱圧着性の多層ポリイミドフィルムと金属箔との二組以上を供給して、加圧下に熱圧着と冷却を行なうことにより多層ポリイミドフィルムと金属箔とを同時に貼り合わせることによって、二組以上のフレキシブル金属箔積層体を製造する方法が記載されている。   In Patent Document 1, two or more sets of a thermocompression-bonding multilayer polyimide film and a metal foil are supplied to a double belt press apparatus, and the multilayer polyimide film and the metal foil are obtained by performing thermocompression bonding and cooling under pressure. A method is described in which two or more sets of flexible metal foil laminates are manufactured by bonding together.

特許文献2には、ダブルベルトプレス装置を用いて外観が良好なフレキシブル金属箔積層体を安定的に製造する方法の記載があり、その記載中に、複数の長尺状金属箔/樹脂フィルム積層体を同時に製造することが可能であることの記載がある。また、ダブルベルトプレス装置の具体的構成の記載もある。
特開2001−270039号公報 特開2005−306002号公報
In Patent Document 2, there is a description of a method for stably producing a flexible metal foil laminate having a good appearance using a double belt press apparatus. In the description, a plurality of long metal foil / resin film laminates are described. There is a description that the body can be manufactured simultaneously. There is also a description of a specific configuration of the double belt press device.
JP 2001-270039 A JP 2005-306002 A

一方、近年の各種電子部品の小型化への要求に答えて、積層体を構成する金属箔と樹脂フィルムの双方を薄膜化して、積層体の薄膜化を図る動向が一般的になっている。   On the other hand, in response to the recent demand for miniaturization of various electronic components, there is a general trend of reducing the thickness of the laminated body by thinning both the metal foil and the resin film constituting the laminated body.

本発明者は、上記の薄膜積層体の近年の需要の動向を考慮して、これまでに利用されている加熱圧着装置を用いて複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体を同時に製造する技術の検討を行なった。   The present inventor has taken into consideration the recent trend of demand for the above-mentioned thin film laminate, and uses a thermocompression bonding apparatus that has been used so far to form a long laminate having a structure composed of a plurality of sets of metal foil / resin film. We examined the technology to manufacture the body at the same time.

その検討の過程で、本発明者は、一般的な加熱圧着装置を用いて金属箔/樹脂フィルムの構成の長尺状積層体の複数組を同時に製造した場合に、加熱圧着操作の実施の際に厚み方向に互いに隣接していた金属箔同士、特に圧延銅箔同士がそれぞれの両側端部近傍にて噛み込み等による剥離(分離)不良が発生し、各組の長尺状積層体を互いに分離しにくくさせる現象が発生することを見出した。   In the course of the study, the present inventor conducted a thermocompression operation when a plurality of long laminates having a metal foil / resin film configuration were simultaneously manufactured using a general thermocompression bonding apparatus. The metal foils that were adjacent to each other in the thickness direction, especially the rolled copper foils, had peeling (separation) defects due to biting in the vicinity of both side ends, and the long laminates of each set were It has been found that a phenomenon that makes separation difficult occurs.

次に、本発明者の上記検討結果を、添付図面の図1を参照しながら説明する。
図1は、加熱圧着装置の一例であるダブルベルトプレスを用いて金属箔/樹脂フィルム/離型フィルムの構成の長尺状積層体を同時に二組を製造する過程で現われるダブルベルトプレスの上側ベルトと下側ベルト(ダブルベルトプレスの構成は公知であり、本明細書において後に詳しく述べる)、そして互いに積層された二組の金属箔/樹脂フィルム/離型フィルムの構成の長尺状積層体(離型フィルムは、その長尺状積層体の使用時に剥離される)の幅方向に沿った層構成を示す模式図である。すなわち、図1には、離型フィルム1a、樹脂フィルム2a、そして金属箔3aの構成の上側長尺状積層体(離型フィルムは、その長尺状積層体の使用時に剥離される)4aと、金属箔1b、樹脂フィルム2b、そして離型フィルム3bの構成の下側長尺状積層体(離型フィルムは、その長尺状積層体の使用時に剥離される)4bとが重ね合わされた積層体を形成し、その上下をダブルベルトプレス(図示なし)の上側ベルト5aと下側ベルト5bで挟んだ状態が示されている。この積層体構造は、金属箔と樹脂シートとがダブルベルトプレスにて加熱圧着されて、冷却されて、その後に各長尺状積層体毎に互いに分離されるまで維持される。
Next, the result of the above examination by the inventor will be described with reference to FIG. 1 of the accompanying drawings.
FIG. 1 shows an upper belt of a double belt press appearing in the process of simultaneously producing two pairs of long laminates having a structure of metal foil / resin film / release film using a double belt press which is an example of a thermocompression bonding apparatus. And a lower belt (the construction of a double belt press is well known and will be described in detail later in this specification), and a long laminate of two metal foil / resin film / release film constructions laminated together ( The release film is a schematic view showing a layer configuration along the width direction of the release laminate when the elongated laminate is used. That is, FIG. 1 shows an upper elongated laminate (a release film is peeled off when the elongated laminate is used) 4a having a configuration of a release film 1a, a resin film 2a, and a metal foil 3a. Laminate in which the lower long laminate (the release film is peeled off when the long laminate is used) 4b is superimposed on the metal foil 1b, the resin film 2b, and the release film 3b. A state is shown in which a body is formed and its upper and lower sides are sandwiched between an upper belt 5a and a lower belt 5b of a double belt press (not shown). This laminate structure is maintained until the metal foil and the resin sheet are heated and pressure-bonded by a double belt press, cooled, and then separated from each other for each long laminate.

図1は、金属箔と樹脂シートそして離型フィルムがダブルベルトプレスにて加熱圧着された状態の積層体の原理的な構造を示している。樹脂フィルム側端部の位置において、各積層体に局部的な強い圧力がかかり、その局部的な強い圧力が、中央部にて互いに接触し、重ねられた状態にある上側積層体の金属箔3aと下側積層体の金属箔1bとの間の噛み込みが発生することが判明した。   FIG. 1 shows the principle structure of a laminate in which a metal foil, a resin sheet, and a release film are heat-pressed by a double belt press. At the position of the resin film side end portion, a strong local pressure is applied to each laminate, and the strong local pressure is in contact with each other at the center, and the metal foil 3a of the upper laminate in a stacked state. It has been found that biting occurs between the metal foil 1b of the lower laminate and the lower laminate.

上記の知見に基づいて、本発明者は、さらに検討を続けた結果、上記加熱圧着操作を、厚み方向に互いに隣接する組のそれぞれの樹脂フィルムの幅方向の側端部の位置を互いに少しずらして、それぞれの樹脂フィルムの側端部の位置が重ならないように配置した状態にて実施することにより、互いに接触し、重ねられた状態にある上側積層体の金属箔と下側積層体の金属箔との間の噛み込みが回避できることを見出した。この好ましい現象は、樹脂フィルムの側端部の位置が重ならないように配置した状態にて加熱圧着操作を実施すると、金属箔間に局所的に掛る圧力が分散され、各積層体への圧力の不均一性が緩和されることによるものと理解される。   Based on the above findings, the present inventor has further studied, and as a result, the thermocompression bonding operation is performed by slightly shifting the positions of the side end portions in the width direction of the respective resin films of the groups adjacent to each other in the thickness direction. The metal foil of the upper laminated body and the metal of the lower laminated body that are in contact with each other and overlapped by performing in a state where the positions of the side end portions of the respective resin films do not overlap each other It has been found that biting between the foils can be avoided. This preferable phenomenon is that, when the thermocompression operation is performed in a state where the positions of the side edges of the resin film do not overlap, the pressure applied locally between the metal foils is dispersed, and the pressure applied to each laminate is reduced. It is understood that this is due to the mitigation of non-uniformity.

従って、本発明は、加熱圧着装置、該加熱圧着装置の前方に設けられた複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体の製造に必要な複数の長尺状金属箔そして複数の長尺状樹脂フィルム(そして必要により、さらに複数の長尺状離型フィルム)を該加熱圧着装置に供給する複数の巻き出しロール、該加熱圧着装置での加熱圧着操作の終了後に生成した複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体のそれぞれを巻き取る複数個の巻き取りロールからなる積層体製造装置を用いて、複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体を同時に製造する方法において、上記加熱圧着操作を、厚み方向に互いに隣接する組のそれぞれの樹脂フィルムの側端部の位置が重ならないように配置した状態にて実施することを特徴とする製造方法にある。   Accordingly, the present invention provides a thermocompression bonding apparatus, a plurality of long metal foils necessary for manufacturing a long laminate having a structure composed of a plurality of metal foil / resin films provided in front of the thermocompression bonding apparatus, and A plurality of unwinding rolls for supplying a plurality of long resin films (and, if necessary, a plurality of long release films) to the thermocompression bonding apparatus, produced after completion of the thermocompression operation in the thermocompression bonding apparatus Using a laminate manufacturing apparatus consisting of a plurality of winding rolls each winding a long laminate having a structure consisting of a plurality of sets of metal foils / resin films, a structure consisting of a plurality of sets of metal foils / resin films In the method for producing a long laminate at the same time, the thermocompression bonding operation is performed in a state in which the positions of the side end portions of the respective resin films in the set adjacent to each other in the thickness direction are not overlapped. In the manufacturing method characterized by and.

本発明はまた、複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体であって、厚み方向に互いに隣接する組のそれぞれの樹脂フィルムの側端部の位置が重ならないような配置にある積層体にもある。   The present invention is also a long laminate having a structure composed of a plurality of sets of metal foils / resin films so that the positions of the side end portions of the respective resin films adjacent to each other in the thickness direction do not overlap. It is also in the laminated body in.

加熱圧着装置、該加熱圧着装置の前方に設けられた複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体の製造に必要な複数の長尺状金属箔そして複数の長尺状樹脂フィルム(そして必要によりさらに複数の長尺状離型フィルム)を該加熱圧着装置に供給する複数の巻き出しロール、該加熱圧着装置での加熱圧着操作の終了後に生成した複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体のそれぞれを巻き取る複数個の巻き取りロールからなる積層体製造装置を用いて、複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体を同時に製造する方法において、本発明の改良方法を用いることにより、上側積層体の金属箔と下側積層体の金属箔とが互いに接触し、重ねられた状態にある場合には、それらの間の噛み込みの発生が回避でき、重ねられた積層体の分離がしやすくなる。本発明では、隣接する金属箔が共に圧延銅箔同士である場合に特に効果が大きい。   Thermocompression bonding apparatus, a plurality of long metal foils and a plurality of long resin necessary for manufacturing a long laminate having a structure composed of a plurality of sets of metal foil / resin film provided in front of the thermocompression bonding apparatus A plurality of unwinding rolls for supplying a film (and, if necessary, a plurality of further long release films) to the thermocompression bonding apparatus, and a plurality of sets of metal foils / resins generated after completion of the thermocompression operation in the thermocompression bonding apparatus Using a laminate manufacturing apparatus consisting of a plurality of winding rolls each winding a long laminate having a structure made of a film, a long laminate having a structure made of a plurality of sets of metal foil / resin film is simultaneously produced. In the manufacturing method, by using the improved method of the present invention, when the metal foil of the upper laminate and the metal foil of the lower laminate are in contact with each other and are in a stacked state, the bite between them Included There can be avoided, easily to separate the superimposed laminate. The present invention is particularly effective when the adjacent metal foils are rolled copper foils.

本発明の好ましい態様を次に記載する。
(1)厚み方向に互いに隣接する組のそれぞれの樹脂フィルムの側端部の位置のずれが、一方の樹脂フィルムの側端部と他方の樹脂フィルムの側端部との相対距離として、0.5〜5mm(さらに好ましくは1〜3mm)の範囲にある。
(2)同時に製造される金属箔/樹脂フィルムからなる構造の長尺状積層体が二組である。
(3)複数組の積層体の金属箔が互いに隣接して配置される場合において、金属箔が共に圧延銅箔である。
(4)長尺状樹脂フィルムが長尺状芳香族ポリイミドフィルムである。
(5)長尺状樹脂フィルムが、非熱圧着性芳香族ポリイミドフィルムとその片側表面に形成された熱圧着性芳香族ポリイミド層とを含む長尺状の熱圧着性多層ポリイミドフィルムである。
(6)加熱圧着装置が、ダブルベルトプレスである。
Preferred embodiments of the invention will now be described.
(1) The shift of the position of the side end portion of each resin film in the set adjacent to each other in the thickness direction is expressed as a relative distance between the side end portion of one resin film and the side end portion of the other resin film. It exists in the range of 5-5 mm (more preferably 1-3 mm).
(2) Two sets of long laminates having a structure made of metal foil / resin film manufactured simultaneously.
(3) When metal foils of a plurality of sets of laminated bodies are arranged adjacent to each other, both metal foils are rolled copper foils.
(4) The long resin film is a long aromatic polyimide film.
(5) The long resin film is a long thermocompression-bonding multilayer polyimide film including a non-thermocompression-bonding aromatic polyimide film and a thermocompression-bonding aromatic polyimide layer formed on one surface thereof.
(6) The thermocompression bonding apparatus is a double belt press.

次に本発明の複数組の金属箔/樹脂フィルム構造の長尺状積層体の製造方法を、添付図面の図2を参照しながら説明する。なお、図2では、金属箔として銅箔を用いて、金属箔/樹脂フィルム/離型フィルム構造の長尺状積層体を二組同時に製造する方法を代表例として説明する。   Next, the manufacturing method of the elongate laminated body of multiple sets of metal foil / resin film structure of this invention is demonstrated, referring FIG. 2 of an accompanying drawing. In addition, in FIG. 2, the method of manufacturing 2 sets of elongate laminated bodies of metal foil / resin film / release film structure simultaneously using copper foil as metal foil is demonstrated as a representative example.

図2は、複数組の銅箔/樹脂フィルム/離型フィルムからなる構造の長尺状積層体の製造方法を、公知のダブルベルトプレスを用いて実施する場合を説明するための図面である。すなわち、図2では、銅箔/樹脂フィルム/離型フィルムからなる構成の長尺状積層体の二組をダブルベルトプレスを用いて、同時にかつ連続的に製造する方法が示されている。   FIG. 2 is a drawing for explaining a case where a method for producing a long laminate having a structure comprising a plurality of sets of copper foil / resin film / release film is carried out using a known double belt press. That is, FIG. 2 shows a method of simultaneously and continuously producing two sets of long laminates composed of copper foil / resin film / release film using a double belt press.

図2において、ダブルベルトプレス11は、一対の前方上側ドラム12aと前方下側ドラム12bそして一対の後方上側ドラム13aと後方下側ドラム13b、そして更に、二個の上側ドラムの組と二個の下側ドラムの組のそれぞれの周囲に張り渡されたベルト14a、14bから構成されている。図2のダブルベルトプレス11では、二個の前方ドラム12a、12bが加熱ドラムであり、二個の後方ドラム13a、13bが冷却ドラムである。図2のダブルベルトプレスでは、積層体への加圧を確実に実施するためにドラムとは別に加圧装置が設けられている。この加圧装置は、上下に設けられた加熱加圧具15a、15bから構成されており、ダブルベルトプレス内を上下のベルト14a、14bにより挟まれて搬送される積層体に対して上下の加熱加圧具15a、15bの互いの接近により圧力を付与するように構成されている。図2のダブルベルトプレスではさらに、加圧冷却装置16a、16bが加圧装置の後方に備えられており、高温にて加圧処理が施された積層体を冷却するようにしている。   In FIG. 2, a double belt press 11 includes a pair of front upper drum 12a and front lower drum 12b, a pair of rear upper drum 13a and rear lower drum 13b, and a set of two upper drums and two upper drums. It comprises belts 14a and 14b stretched around each of the lower drum sets. In the double belt press 11 of FIG. 2, the two front drums 12a and 12b are heating drums, and the two rear drums 13a and 13b are cooling drums. In the double belt press of FIG. 2, a pressurizing device is provided separately from the drum in order to reliably pressurize the laminated body. This pressurizing device is composed of heating and pressurizing tools 15a and 15b provided at the top and bottom, and the top and bottom heating is performed on the laminated body conveyed between the upper and lower belts 14a and 14b in the double belt press. It is comprised so that a pressure may be provided by the approach of the pressurizing tools 15a and 15b. Further, in the double belt press of FIG. 2, pressure cooling devices 16a and 16b are provided at the rear of the pressure device so as to cool the laminate subjected to the pressure treatment at a high temperature.

ダブルベルトプレス11の前方には、一組の離型フィルム/樹脂フィルム/銅箔構成の長尺状積層体を製造するための、離型フィルム21a、樹脂フィルム22a、そして銅箔23aがそれぞれ巻かれている、離型フィルムロール31a、樹脂フィルムロール32a、そして銅箔ロール33aが配置され、さらに他の一組の銅箔/樹脂フィルム/離型フィルム銅箔構成の長尺状積層体を製造するための、銅箔21b、樹脂フィルム22b、そして離型フィルム23bがそれぞれ巻かれている、銅箔ロール31b、樹脂フィルムロール32b、そして離型フィルムロール33bが配置されている。   In front of the double belt press 11, a release film 21a, a resin film 22a, and a copper foil 23a for manufacturing a long laminate having a release film / resin film / copper foil configuration are wound respectively. A release film roll 31a, a resin film roll 32a, and a copper foil roll 33a are arranged, and a long laminate of another set of copper foil / resin film / release film copper foil is manufactured. A copper foil roll 31b, a resin film roll 32b, and a release film roll 33b around which a copper foil 21b, a resin film 22b, and a release film 23b are wound are arranged.

ダブルベルトプレス11の後方には、製造された一組の離型フィルム/樹脂フィルム/銅箔構成の長尺状積層体41aを巻き取るための巻き取りロール51aが補助ロール52aを介して配置されており、さらに製造された他の一組の銅箔/樹脂フィルム/離型フィルム構成の長尺状積層体41bを巻き取るための巻き取りロール51bが補助ロール52bを介して配置されている。   Behind the double belt press 11, a take-up roll 51a for taking up the long laminate 41a having a set release film / resin film / copper foil structure is disposed via an auxiliary roll 52a. In addition, a winding roll 51b for winding up the long laminate 41b having another set of manufactured copper foil / resin film / release film is disposed via an auxiliary roll 52b.

図2において、例えば、銅箔23aは電解銅箔であって、樹脂フィルム22aは、熱圧着性多層芳香族ポリイミドフィルムであり、銅箔21bは圧延銅箔であって、樹脂フィルム22bは、熱圧着性多層芳香族ポリイミドフィルムとする。すなわち、23aの銅箔と21bの銅箔とが、一方の銅箔が電解銅箔であって、他方の銅箔が圧延銅箔であるように組合わせることが好ましい。このような組合わせにより、23aの銅箔と21bの銅箔との間の噛み込みによる相互の接着(離脱困難な状態)の発生を低減できるという利点がある。あるいは、銅箔の全て、すなわち、銅箔23aと銅箔21bを圧延銅箔とすることも有利である。ただし、このような金属箔の特定の組合わせ配置は本発明の製造方法においては必須ではない。   In FIG. 2, for example, the copper foil 23a is an electrolytic copper foil, the resin film 22a is a thermocompression-bonding multilayer aromatic polyimide film, the copper foil 21b is a rolled copper foil, and the resin film 22b is a heat A pressure-bonding multilayer aromatic polyimide film is used. That is, it is preferable to combine the copper foil of 23a and the copper foil of 21b so that one copper foil is an electrolytic copper foil and the other copper foil is a rolled copper foil. By such a combination, there is an advantage that the occurrence of mutual adhesion (a state in which separation is difficult) due to the biting between the copper foil of 23a and the copper foil of 21b can be reduced. Alternatively, it is also advantageous to use all of the copper foil, that is, the copper foil 23a and the copper foil 21b as rolled copper foil. However, such a specific combination arrangement of metal foils is not essential in the production method of the present invention.

電解銅箔および圧延銅箔は共に市販されており、目的に応じて任意の厚みの電解銅箔と圧延銅箔を製造業者から入手して本発明の積層体の製造に用いることができる。   Both the electrolytic copper foil and the rolled copper foil are commercially available, and an electrolytic copper foil and a rolled copper foil of any thickness can be obtained from the manufacturer according to the purpose and used for the production of the laminate of the present invention.

また、金属箔は銅箔に限定されるものではなく、アルミ箔などの各種の金属箔(特に導電性の金属箔)を目的に応じて用いることができる。そして、銅箔などの金属箔として、ポリイミド、エポキシ樹脂などの熱圧着性或は接着性の樹脂被覆層を表面に有する金属箔を用いることができる。これらの樹脂被覆層を表面に有する金属箔は、通常、その表面の樹脂被覆層が樹脂フィルムと対面するようにして配置して用いる。   Moreover, metal foil is not limited to copper foil, Various metal foils (especially electroconductive metal foil), such as aluminum foil, can be used according to the objective. As the metal foil such as copper foil, a metal foil having a thermocompression-bonding or adhesive resin coating layer such as polyimide or epoxy resin on the surface can be used. The metal foil having such a resin coating layer on the surface is usually used by being arranged so that the resin coating layer on the surface faces the resin film.

熱圧着性多層芳香族ポリイミドフィルムは、非熱圧着性芳香族ポリイミドフィルムとその一方もしくは両方の表面に形成された熱圧着性芳香族ポリイミド層とからなるフィルムであって、例えば、宇部興産株式会社から市販されており、容易に入手できる。熱圧着性多層芳香族ポリイミドフィルムについての詳しい記載は、前述の特許文献1に見られる。   The thermocompression bonding multilayer aromatic polyimide film is a film comprising a non-thermocompression bonding aromatic polyimide film and a thermocompression bonding aromatic polyimide layer formed on one or both surfaces thereof, for example, Ube Industries, Ltd. And is readily available. A detailed description of the thermocompression-bonding multilayer aromatic polyimide film can be found in the aforementioned Patent Document 1.

前述のように、金属箔(銅箔)/樹脂フィルムの構成の二層積層体を製造する際に、樹脂フィルムの表面側に離型フィルムを配置することは一般的に利用されている方法であり、そのような方法に用いられる離型フィルムは既に知られている。すなわち、離型フィルムとしては、耐熱性が高く、かつ離型性が良い柔軟な材料が一般的に用いられている。離型フィルムの材料としては、非熱圧着性の耐熱性芳香族ポリイミド、フッ素樹脂、あるいはシリコーン樹脂などが一般的に用いられる。   As described above, when a two-layer laminate having a metal foil (copper foil) / resin film structure is produced, it is a commonly used method to dispose a release film on the surface side of the resin film. There are already known release films used in such methods. That is, as the release film, a flexible material having high heat resistance and good release properties is generally used. As the material for the release film, non-thermocompression-resistant heat-resistant aromatic polyimide, fluorine resin, silicone resin, or the like is generally used.

なお、図2に関する説明では、樹脂フィルムとして熱圧着性多層芳香族ポリイミドフィルムを用いた例をとり挙げたが、樹脂フィルムは、加熱条件下で金属箔と圧着可能な樹脂フィルムであれば特に限定はない。目的に応じて使用することが可能な樹脂フィルムとしては、単層の熱圧着性芳香族ポリイミドフィルム、熱圧着性ポリエステルフィルム、熱圧着性ビニルエステルフィルム、熱圧着性フッ素樹脂フィルムなどを挙げることができる。   In the description regarding FIG. 2, an example in which a thermocompression-bonding multilayer aromatic polyimide film is used as the resin film has been described, but the resin film is particularly limited as long as it is a resin film that can be crimped to a metal foil under heating conditions. There is no. Examples of the resin film that can be used according to the purpose include a single-layer thermocompression bonding aromatic polyimide film, a thermocompression bonding polyester film, a thermocompression bonding vinyl ester film, and a thermocompression bonding fluororesin film. it can.

図2に示したダブルベルトプレスを用いて本発明の長尺状積層体を製造する方法を次に説明する。   Next, a method for producing the long laminate of the present invention using the double belt press shown in FIG. 2 will be described.

長尺状樹脂フィルム22a、22b、長尺状銅箔23a、21b、そして長尺状離型フィルム21a、23bは、それぞれのロールから巻き出されダブルベルトプレス11の一対の前方加熱ドラム12a、12bの間にベルト14a、14bにより送り込まれる。樹脂フィルムと銅箔は、送り込まれた上下関係にて、前方ドラム12a、12bにより積層されて加熱され、さらにベルト14a、14bに挟まれた状態にて、そのまま後方ドラム13a、13bに向かって搬送される。そして、その搬送の途中で、加熱加圧具15a、15bにより熱圧着処理が施され、その後、加圧冷却装置16a、16bにより冷却される。積層体はさらに後方に搬送され、後方ドラム13a、13bを通過した後、補助ロール52bの位置にて、上側長尺状積層体41a(離型フィルム21a/樹脂フィルム22a/銅箔23aの構成を持つ積層体)と下側長尺状積層体41b(銅箔21b/樹脂フィルム22b/離型フィルム23bの構成を持つ積層体)とに分離される。   The long resin films 22a and 22b, the long copper foils 23a and 21b, and the long release films 21a and 23b are unwound from the respective rolls, and a pair of front heating drums 12a and 12b of the double belt press 11. Between the belts 14a and 14b. The resin film and the copper foil are stacked and heated by the front drums 12a and 12b, and are conveyed toward the rear drums 13a and 13b as they are sandwiched between the belts 14a and 14b, in a vertical relationship. Is done. And in the middle of the conveyance, a thermocompression-bonding process is performed by the heating and pressurizing tools 15a and 15b, and then it is cooled by the pressurizing and cooling devices 16a and 16b. The laminated body is further conveyed rearward, and after passing through the rear drums 13a and 13b, at the position of the auxiliary roll 52b, the upper elongated laminated body 41a (the structure of the release film 21a / resin film 22a / copper foil 23a). And a lower elongated laminate 41b (a laminate having a configuration of copper foil 21b / resin film 22b / release film 23b).

分離される前の上側長尺状積層体41aと下側長尺状積層体41bとの積層体の構成を図3に示す。この積層体は、圧延銅箔23aと圧延銅箔21bとが接触した状態で積層されている。   The structure of the laminated body of the upper elongate laminated body 41a and the lower elongate laminated body 41b before being separated is shown in FIG. This laminated body is laminated | stacked in the state which the rolled copper foil 23a and the rolled copper foil 21b contacted.

上側長尺状積層体41aは、ついで、補助ロール52aを介して巻き取りロール51aに巻き取られる。同様に、下側長尺状積層体41bは、ついで、補助ロール52bを介して巻き取りロール51bに巻き取られる。   The upper elongate laminate 41a is then wound around a winding roll 51a via an auxiliary roll 52a. Similarly, the lower elongate laminated body 41b is then wound around the winding roll 51b via the auxiliary roll 52b.

なお、ダブルベルトプレスを用いる複数組の長尺状銅箔/樹脂フィルム積層体の製造に際してのダブルベルトプレスの種々の形態や改良、そしてダブルベルトプレスを用いての積層体の製造条件については、前掲の特許文献1と特許文献2の記載を参考にすることができる。   In addition, regarding the various forms and improvements of the double belt press in the production of multiple sets of long copper foil / resin film laminate using a double belt press, and the production conditions of the laminate using the double belt press, The descriptions of Patent Document 1 and Patent Document 2 described above can be referred to.

また、図3の説明では、上側長尺状積層体41aと下側長尺状積層体41bとは、互いに銅箔23aと銅箔21bとが接触した状態で積層している構成を示したが、これとは逆に、それぞれの積層体の離型フィルムと銅箔の位置を入れ替えた構成であってもよい。   In the description of FIG. 3, the upper elongate laminate 41a and the lower elongate laminate 41b have been configured so that the copper foil 23a and the copper foil 21b are in contact with each other. On the contrary, a configuration in which the positions of the release film and the copper foil of the respective laminates are replaced may be employed.

次に、本発明の特徴的な要件である長尺状金属箔と長尺状樹脂フィルムとの幅方向(長尺状シートの長さ方向に直角な方向)の積層条件を図3を用いて説明する。   Next, the lamination conditions in the width direction (direction perpendicular to the length direction of the long sheet) of the long metal foil and the long resin film, which are characteristic requirements of the present invention, are described with reference to FIG. explain.

図3は、図2で説明した銅箔/樹脂フィルム/離型フィルムからなる構成の長尺状積層体の二組が積層されて形成された本発明の積層体(すなわち、二組の長尺状積層体が互いに分離される前に現われる積層体)に従う構成を示す模式図である。すなわち、積層体は、離型フィルム21a、樹脂フィルム22a、そして銅箔23aとからなる上側積層体41aと銅箔21b、樹脂フィルム22b、そして離型フィルム23bとからなる下側積層体41bの二組の積層体から構成されている。そして、上側積層体41aの樹脂フィルム22aと下側積層体41bの樹脂フィルム22bとは、それらの幅方向の位置が互いにずらされて、それぞれの樹脂フィルムの側端部の位置が重ならないように配置した状態にある。樹脂フィルム22aの側端部と樹脂フィルム22b側端部とのずらしの距離(互いに隣接する組のそれぞれの樹脂フィルムの幅方向の位置のずれが、一方の樹脂フィルムの側端部と他方の樹脂フィルムの側端部との相対距離)は、0.5〜5mmの範囲にあることが好ましく、1〜3mmの範囲にあることが特に好ましい。   FIG. 3 shows a laminate of the present invention formed by laminating two pairs of long laminates composed of copper foil / resin film / release film described in FIG. 2 (that is, two pairs of long laminates). It is a schematic diagram which shows the structure according to the laminated body which appears before a laminated body is isolate | separated from each other. That is, the laminated body is composed of an upper laminated body 41a composed of a release film 21a, a resin film 22a, and a copper foil 23a, and a lower laminated body 41b composed of a copper foil 21b, a resin film 22b, and a release film 23b. It is composed of a set of laminated bodies. And the resin film 22a of the upper laminated body 41a and the resin film 22b of the lower laminated body 41b are shifted from each other in the width direction so that the positions of the side end portions of the respective resin films do not overlap. It is in the state of arrangement. The shift distance between the side end of the resin film 22a and the end of the resin film 22b (the shift in the position in the width direction of each resin film in the set adjacent to each other is determined by the side end of one resin film and the other resin. The relative distance to the side edge of the film is preferably in the range of 0.5 to 5 mm, particularly preferably in the range of 1 to 3 mm.

次に、銅箔/樹脂フィルム/離型フィルムからなる構成の長尺状積層体の三組を同時に連続的に製造する場合の本発明に従う積層体の構成を図4により説明する。   Next, the structure of the laminate according to the present invention in the case where three sets of long laminates composed of copper foil / resin film / release film are simultaneously and continuously manufactured will be described with reference to FIG.

図4は、図3で説明した長尺状積層体の二組が積層されて形成された積層体に更に一組の長尺状積層体が下側に積層された積層体の構成を示す合計三組の積層体からなる積層体の模式図である。すなわち、図4の積層体は、離型フィルム21a、樹脂フィルム22a、そして銅箔23aとからなる上側積層体41aと銅箔21b、樹脂フィルム22b、そして離型フィルム23bとからなる中間積層体41b、そして銅箔21c、樹脂フィルム22c、そして離型フィルム23cとからなる下側積層体41cの三組の積層体から構成されている。そして、上側積層体41aの樹脂フィルム22aと中間積層体41bの樹脂フィルム22b、そして下側積層体41cの樹脂フィルム22cとは、それらの幅方向の位置が互いにずらされて、それぞれの樹脂フィルムの側端部の位置が重ならないように配置した状態にある。ただし、樹脂フィルム22aと樹脂フィルム22cとの関係においては幅方向の位置は必ずしもずれていなくてもよい。樹脂フィルム22aの側端部と樹脂フィルム22b側端部とのずらしの距離(互いに隣接する組のそれぞれの樹脂フィルムの幅方向の位置のずれが、一方の樹脂フィルムの側端部と他方の樹脂フィルムの側端部との相対距離)、そして樹脂フィルム22bの側端部と樹脂フィルム22cの側端部とのずらしの距離はいずれも0.5〜5mmの範囲にあることが好ましく、1〜3mmの範囲にあることが特に好ましい。   FIG. 4 is a total showing the configuration of a laminate in which a pair of long laminates are further laminated on the laminate formed by laminating two pairs of the elongated laminates described in FIG. It is a schematic diagram of the laminated body which consists of three sets of laminated bodies. That is, the laminate of FIG. 4 includes an upper laminate 41a composed of a release film 21a, a resin film 22a, and a copper foil 23a, and an intermediate laminate 41b composed of a copper foil 21b, a resin film 22b, and a release film 23b. And, it is composed of three sets of laminates of a lower laminate 41c comprising a copper foil 21c, a resin film 22c, and a release film 23c. And the resin film 22a of the upper laminated body 41a, the resin film 22b of the intermediate laminated body 41b, and the resin film 22c of the lower laminated body 41c are shifted from each other in the width direction, and the respective resin films It exists in the state arrange | positioned so that the position of a side edge part may not overlap. However, the position in the width direction is not necessarily shifted in the relationship between the resin film 22a and the resin film 22c. The shift distance between the side end of the resin film 22a and the end of the resin film 22b (the shift in the position in the width direction of each resin film in the set adjacent to each other is determined by the side end of one resin film and the other resin. The relative distance between the side edge of the film) and the shifting distance between the side edge of the resin film 22b and the side edge of the resin film 22c are preferably in the range of 0.5 to 5 mm. A range of 3 mm is particularly preferable.

上記の図4では、樹脂フィルム22bを樹脂フィルム22aの左側に配置し、ついで樹脂フィルム22cを樹脂フィルム22bの更に左側に配置しているが、このような上側から順に下側へと一方の方向にずれる配置の代わりに、樹脂フィルム22bを樹脂フィルム22aの右側に配置し、次に樹脂フィルム22cを樹脂フィルム22bの左側に配置するようなジグザグ型の配置を利用することもできる。   In FIG. 4 above, the resin film 22b is arranged on the left side of the resin film 22a, and then the resin film 22c is arranged on the further left side of the resin film 22b. A zigzag type arrangement in which the resin film 22b is arranged on the right side of the resin film 22a and then the resin film 22c is arranged on the left side of the resin film 22b can be used instead of the arrangement.

なお、図2では、本発明の長尺状積層体の製造方法を、ダブルベルトプレスを用いる方法として説明したが、本発明の長尺状積層体の製造方法は、上側ロールと下側ロールとを含む一対の加熱圧着装置(特に表面が弾性材料からなるロールを用いる加熱圧着装置)を含む公知の加熱圧着装置、あるいは公知の加熱圧着装置の変形もしくは改良からなる加熱圧着装置を用いて同様に実施することができることは勿論である。また、同時に製造する長尺状積層体は二組に限られることはなく、三組あるいは四組の同時製造も可能である。   In addition, in FIG. 2, although the manufacturing method of the elongate laminated body of this invention was demonstrated as a method using a double belt press, the manufacturing method of the elongate laminated body of this invention includes an upper side roll, a lower side roll, Similarly, using a known thermocompression bonding device including a pair of thermocompression bonding devices (particularly a thermocompression bonding device using a roll whose surface is made of an elastic material), or a thermocompression bonding device comprising a modification or improvement of a known thermocompression bonding device Of course, it can be implemented. Moreover, the long laminated body manufactured simultaneously is not restricted to 2 sets, The simultaneous manufacture of 3 sets or 4 sets is also possible.

ダブルベルトプレスを用いて金属箔/樹脂フィルム/離型フィルムの構成の長尺状積層体を同時に二組を製造する過程で現われるダブルベルトプレスの上側ベルトと下側ベルト、そして互いに積層された二組の金属箔/樹脂フィルム/離型フィルムの構成の長尺状積層体の幅方向に沿った層構成を示す模式図である。The upper belt and the lower belt of the double belt press appearing in the process of manufacturing two pairs of long laminates of metal foil / resin film / release film at the same time using a double belt press, and two laminated It is a schematic diagram which shows the layer structure along the width direction of the elongate laminated body of a structure of a set of metal foil / resin film / release film. 本発明の複数組の金属箔/樹脂フィルム/離型フィルム構造の長尺状積層体の製造方法を説明するための図である。It is a figure for demonstrating the manufacturing method of the elongate laminated body of multiple sets of metal foil / resin film / release film structure of this invention. 図2で説明した長尺状積層体の二組が積層されて形成された本発明の積層体に従う構成を示す模式図である。It is a schematic diagram which shows the structure according to the laminated body of this invention formed by laminating | stacking two sets of the elongate laminated body demonstrated in FIG. 長尺状積層体の三組が積層されて形成された本発明の積層体に従う構成を示す模式図である。It is a schematic diagram which shows the structure according to the laminated body of this invention formed by laminating | stacking 3 sets of elongate laminated bodies.

符号の説明Explanation of symbols

1a 離型フィルム
1b 金属箔
2a 樹脂フィルム
2b 樹脂フィルム
3a 金属箔
3b 離型フィルム
4a 長尺状積層体
4b 長尺状積層体
5a ベルト
5b ベルト
11 ダブルベルトプレス
12a 前方上側ドラム
12b 前方下側ドラム
13a 後方上側ドラム
13b 後方下側ドラム
15a 加熱加圧具
15b 加熱加圧具
16a 加圧冷却装置
16b 加圧冷却装置
21a 離型フィルム
21b 銅箔
21c 銅箔
22a 樹脂フィルム(熱圧着性多層芳香族ポリイミドフィルム)
22b 樹脂フィルム(熱圧着性多層芳香族ポリイミドフィルム)
22c 樹脂フィルム(熱圧着性多層芳香族ポリイミドフィルム)
23a 銅箔
23b 離型フィルム
23c 離型フィルム
31a 離型フィルム巻き出しロール
31b 銅箔巻き出しロール
32a 樹脂フィルム巻き出しロール
32b 樹脂フィルム巻き出しロール
33a 銅箔巻き出しロール
33b 離型フィルム巻き出しロール
41a 長尺状積層体
41b 長尺状積層体
41c 長尺状積層体
51a 巻き取りロール
51b 巻き取りロール
52a 補助ロール
52b 補助ロール
DESCRIPTION OF SYMBOLS 1a Release film 1b Metal foil 2a Resin film 2b Resin film 3a Metal foil 3b Release film 4a Long laminated body 4b Long laminated body 5a Belt 5b Belt 11 Double belt press 12a Front upper drum 12b Front lower drum 13a Rear upper drum 13b Rear lower drum 15a Heating pressure tool 15b Heating pressure tool 16a Pressure cooling device 16b Pressure cooling device 21a Release film 21b Copper foil 21c Copper foil 22a Resin film (thermocompression-bonding multilayer aromatic polyimide film )
22b Resin film (Thermo-compressible multilayer aromatic polyimide film)
22c Resin film (Thermo-compressible multilayer aromatic polyimide film)
23a Copper foil 23b Release film 23c Release film 31a Release film unwinding roll 31b Copper foil unwinding roll 32a Resin film unwinding roll 32b Resin film unwinding roll 33a Copper foil unwinding roll 33b Release film unwinding roll 41a Long Laminate 41b Long Laminate 41c Long Laminate 51a Winding Roll 51b Winding Roll 52a Auxiliary Roll 52b Auxiliary Roll

Claims (13)

加熱圧着装置、該加熱圧着装置の前方に設けられた複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体の製造に必要な複数の長尺状金属箔そして複数の長尺状樹脂フィルムを該加熱圧着装置に供給する複数の巻き出しロール、該加熱圧着装置での加熱圧着操作の終了後に生成した複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体のそれぞれを巻き取る複数個の巻き取りロールからなる積層体製造装置を用いて、複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体を同時に製造する方法において、上記加熱圧着操作を、厚み方向に互いに隣接する組のそれぞれの樹脂フィルムの側端部の位置が重ならないように配置した状態にて実施することを特徴とする製造方法。   Thermocompression bonding apparatus, a plurality of long metal foils and a plurality of long resin necessary for manufacturing a long laminate having a structure composed of a plurality of sets of metal foil / resin film provided in front of the thermocompression bonding apparatus A plurality of unwinding rolls for supplying a film to the thermocompression bonding apparatus, and each of the long laminates having a structure composed of a plurality of sets of metal foil / resin film generated after completion of the thermocompression bonding operation in the thermocompression bonding apparatus. In the method of simultaneously manufacturing a long laminate having a structure composed of a plurality of sets of metal foil / resin film using a laminate manufacturing apparatus comprising a plurality of take-up rolls, the thermocompression bonding operation is performed in the thickness direction. The manufacturing method characterized by implementing in the state arrange | positioned so that the position of the side edge part of each resin film of the mutually adjacent group may not overlap. 厚み方向に互いに隣接する組のそれぞれの樹脂フィルムの側端部の位置のずれが、一方の樹脂フィルムの側端部と他方の樹脂フィルムの側端部との相対距離として、0.5〜5mmの範囲にある請求項1に記載の製造方法。   The shift of the position of the side end of each resin film in the set adjacent to each other in the thickness direction is 0.5 to 5 mm as a relative distance between the side end of one resin film and the side end of the other resin film. The manufacturing method of Claim 1 which exists in the range of these. 金属箔/樹脂フィルムからなる構造の長尺状積層体を二組同時に製造する方法である請求項1もしくは2に記載の製造方法。   The manufacturing method according to claim 1 or 2, which is a method of manufacturing two sets of long laminates having a structure of metal foil / resin film simultaneously. 厚み方向に隣接する組の金属箔同士が共に圧延銅箔である請求項1乃至3のうちのいずれかの項に記載の製造方法。   The manufacturing method according to any one of claims 1 to 3, wherein a pair of metal foils adjacent to each other in the thickness direction is a rolled copper foil. 長尺状樹脂フィルムが長尺状芳香族ポリイミドフィルムである請求項1乃至4のうちのいずれかの項に記載の製造方法。   The manufacturing method according to any one of claims 1 to 4, wherein the long resin film is a long aromatic polyimide film. 長尺状樹脂フィルムが、非熱圧着性芳香族ポリイミドフィルムとその片側表面に形成された熱圧着性芳香族ポリイミド層とを含む長尺状の熱圧着性多層ポリイミドフィルムである請求項1乃至5のうちのいずれかの項に記載の製造方法。   The long resin film is a long thermocompression-bonding multilayer polyimide film including a non-thermocompression bonding aromatic polyimide film and a thermocompression bonding aromatic polyimide layer formed on one surface thereof. The manufacturing method in any one of items. 加熱圧着装置が、ダブルベルトプレスである請求項1乃至6のうちのいずれかの項に記載の製造方法。   The manufacturing method according to claim 1, wherein the thermocompression bonding apparatus is a double belt press. 複数組の金属箔/樹脂フィルムからなる構造の長尺状積層体であって、厚み方向に互いに隣接する組のそれぞれの樹脂フィルムの側端部の位置が重ならないような配置にある積層体。   A long laminate having a structure composed of a plurality of sets of metal foils / resin films, wherein the laminates are arranged such that the positions of the side end portions of the respective resin films in the set adjacent to each other in the thickness direction do not overlap. 厚み方向に互いに隣接する組のそれぞれの樹脂フィルムの幅方向の側端部の位置のずれが、一方の樹脂フィルムの側端部と他方の樹脂フィルムの側端部との相対距離として、0.5〜5mmの範囲にある請求項8に記載の積層体。   The shift of the position of the side end in the width direction of each of the resin films in the set adjacent to each other in the thickness direction is expressed as a relative distance between the side end of one resin film and the side end of the other resin film. The laminate according to claim 8, which is in the range of 5 to 5 mm. 金属箔/樹脂フィルムからなる構造の長尺状積層体が二組積層されている請求項8もしくは9に記載の積層体。   The laminate according to claim 8 or 9, wherein two pairs of long laminates having a structure of metal foil / resin film are laminated. 隣接する組の金属箔同士が互いに隣接して配置され、その隣接して配置されている金属箔が共に圧延銅箔である請求項8乃至10のうちのいずれかの項に記載の積層体。   The laminated body according to any one of claims 8 to 10, wherein adjacent sets of metal foils are arranged adjacent to each other, and both of the adjacent metal foils are rolled copper foils. 長尺状樹脂フィルムが長尺状芳香族ポリイミドフィルムである請求項8乃至11のうちのいずれかの項に記載の積層体。   The laminate according to any one of claims 8 to 11, wherein the long resin film is a long aromatic polyimide film. 長尺状樹脂フィルムが、非熱圧着性芳香族ポリイミドフィルムとその両側表面に形成された熱圧着性芳香族ポリイミド層とを含む長尺状の熱圧着性多層ポリイミドフィルムである請求項8乃至12のうちのいずれかの項に記載の積層体。   The long resin film is a long thermocompression bonding multilayer polyimide film including a non-thermocompression bonding aromatic polyimide film and a thermocompression bonding aromatic polyimide layer formed on both side surfaces thereof. The laminate according to any one of the above.
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JP2014128971A (en) * 2012-11-29 2014-07-10 Panasonic Corp Method for manufacturing metal-clad laminate, and printed wiring board
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