JP2008014140A - Flow control air-driven pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flow-rate control air-driven pump, controlling fluctuation in discharge flow rate and optionally and accurately setting the discharge flow rate. <P>SOLUTION: An air-driven pump constituted of an air motor and a fluid pump comprises: a direction selector valve changing a direction of air flowing into the air motor; a detection sensor outputting a signal of changing the direction to the direction selector valve; a suction-side drive air pressure regulating valve; a discharge-side air pressure regulating valve; and a discharge-side air flow-rate controller. For example, high pressure discharge of 50-200 MPa can be performed at a constant discharge flow rate, and the discharge flow rate can be optionally and accurately set and controlled. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an air-driven pump that discharges an accurate flow rate, and more particularly, in an air-driven pump composed of an air motor and a fluid pump, the air flow rate of the air motor is changed by an air flow regulator, The present invention relates to a flow rate control air drive pump capable of changing the discharge flow rate of the pump. The present invention provides a flow rate control air pump capable of controlling the fluctuation of the discharge flow rate in an air driven pump and arbitrarily and accurately setting the discharge flow rate.

  In recent years, air-driven pumps have been widely used for liquid injection into high-pressure containers. Conventionally, various fluid pump devices driven by a fluid operated motor such as an air motor have been developed. For example, a modular pump assembly has been proposed that includes a fluid-operated motor that drives a fluid pump and first and second fluid pumps that can be interchangeably attached thereto (Patent Document 1).

  A conventional air-driven pump is composed of an air motor and a fluid pump. A motor piston of an air motor is reciprocated by driving air, and a pump piston of a fluid pump is mounted coaxially with the motor piston. Therefore, it has a mechanism that repeats suction and discharge of fluid. Several types of air-driven pumps have been developed due to differences in the intake and discharge methods of drive air.

  Such a conventional air-driven pump can discharge fluid from the fluid pump at a high discharge flow rate. However, this type of air-driven pump has a problem that it is difficult to maintain the discharge flow rate of the fluid pump at a constant level, and the discharge flow rate from the fluid pump cannot be accurately controlled. Such a fluid pump has no major problem in maintaining the fluid at a constant high pressure by discharging the fluid, but for example, when trying to obtain a high pressure of about 50 to 200 MPa, the discharge flow rate is accurate. Therefore, it is difficult to control the discharge flow rate of the conventional air-driven pump.

Special table 2000-506581

  Under such circumstances, the present inventors have conducted intensive research with the goal of developing an air-driven pump capable of accurately controlling the discharge flow rate in view of the above-described prior art. The inventors have found that the discharge flow rate of the fluid pump can be controlled by adjusting the driving air flow rate of the air motor, and have completed the present invention. An object of the present invention is to provide a new type of flow-controlled air-driven pump capable of accurately controlling a fluid discharge flow rate in an air-driven pump used for injecting liquid into a high-pressure vessel. It is.

The present invention for solving the above-described problems comprises the following technical means.
(1) In an air-driven pump composed of an air motor and a fluid pump, an air flow rate regulator that adjusts the amount of air driven by the air motor is provided to control the discharge flow rate of the fluid pump by changing the air flow rate of the air motor. A flow-controlled air-driven pump characterized by being configured to do so.
(2) The apparatus according to (1), further including a direction switching valve that switches a direction of air entering the air motor, a detection sensor that outputs a direction switching signal to the direction switching valve, an air pressure adjustment valve, and an air flow rate regulator. Flow control air driven pump.
(3) The flow rate control air drive pump according to (1), wherein the air flow rate adjuster is disposed between the discharge side air pressure adjustment valve and the air motor.
(4) The flow control air-driven pump according to (1) or (2), wherein the air flow rate regulator is a mass flow controller.
(5) The flow control air-driven pump according to (1) or (2), wherein the air flow regulator is a needle valve with a vernier scale.
(6) With the air flow rate regulator, the reciprocating speed of the motor piston of the air motor and the discharge flow rate of the liquid pump are changed to predetermined values by setting the flow rate of the driving air to a predetermined value. ) Flow control air driven pump described.
(7) The flow rate control air drive pump according to (1), wherein the discharge flow rate of the air drive pump is controlled by setting the flow rate of drive air with an air flow rate regulator.

Next, the present invention will be described in more detail.
The present invention relates to an air-driven pump composed of a flow-controlled air-driven pump, wherein an air flow regulator that adjusts the amount of air driven by the air motor is installed, and the air flow regulator is disposed between the air pressure regulating valve and the air motor. And a mass flow controller and a vernier needle valve are used as the air flow rate regulator, thereby changing the drive air amount of the air motor and controlling the discharge flow rate of the fluid pump. It is characterized by that.

  Hereinafter, the present invention will be specifically described with reference to the drawings. First, a conventional air-driven pump (first type) will be described with reference to FIGS. 1 and 2, the air-driven pump includes an air motor 8 and a fluid pump 9. The air motor includes a front end plate 18, a rear end plate 19, a motor cylinder 14 held therebetween, and the motor. A motor piston 15 is provided in the cylinder. The fluid pump also includes a pump head 22, an inlet check valve 23, and an outlet check valve 24.

  Drive air is supplied from the discharge side air inlet / outlet 17 to the air motor via the air inlet 1, the air filter 2, the suction side drive air pressure adjustment valve 3, the discharge side drive air pressure adjustment valve 4, and the discharge side air direction switching solenoid valve 7. When entering, the air pushes the motor piston 15 and the motor piston moves to the right in the drawing.

  When the motor piston reaches a position where the suction side proximity switch 11 can be detected, a signal from the suction side proximity switch opens the suction side air direction switching solenoid valve 6 and the drive air is sucked into the suction side of the motor piston 15. Enter from side air inlet / outlet 16. At the same time, in response to a signal from the suction side proximity switch 11, the discharge side air direction switching electromagnetic valve 7 forms a flow path on the exhaust side, and the motor piston 15 that has moved in the right direction in the figure starts moving in the left direction in the figure. .

  When the motor piston 15 moves to the left in the drawing and reaches a position that can be sensed by the discharge side proximity switch 10, the discharge side air direction switching solenoid valve 7 is opened by the signal of the discharge side proximity switch 10 and the drive air is The suction side air direction switching solenoid valve 6 is supplied to the opposite side of the motor piston 15 and at the same time forms a flow path on the exhaust side, and the motor piston 15 moves again in the right direction in the figure and performs a reciprocating motion.

  A pump piston 21 is coaxially mounted on the motor piston 15. When the pump piston reciprocates due to the reciprocating motion of the motor piston, and the pump piston 21 moves in the left direction in the figure, the inlet check valve When the liquid flows into the space formed in the pump head 22 through 23 and the pump piston 21 moves to the right in the figure, the liquid in the pump head 22 is discharged through the outlet check valve 24.

  Next, another air drive pump (second type) using a conventional technique will be described with reference to FIG. In FIG. 3, when driving air entering from the air inlet 1 is supplied to the right side of the motor piston 3 through a flow path formed in the air direction switching valve 2, the motor piston moves to the left in the figure. The pump piston 4 attached to the motor piston also moves leftward, and the liquid is sucked into the space formed in the pump head 6 through the inlet check valve 5.

  When the motor piston 3 reaches the position of the discharge side air pilot valve 7 and pushes the valve rod of the air pilot valve, the flow path to the pilot air exhaust port 14 opens and the pilot air pressure decreases, so the air direction is switched. The force that has pushed the valve 2 downward is reduced, and the air direction switching valve 2 moves upward in the figure and stops at a position where drive air is introduced into the space on the left side of the motor piston 3. At the same time, at this position, a flow path is formed in which air on the right side of the motor piston 3 is discharged from the exhaust muffler 10 through a flow path formed inside the air direction switching valve 2.

  The drive air introduced to the left side of the motor piston 3 pushes the motor piston 3 to move the motor piston 3 to the right, and the pump piston 4 attached to the motor piston 3 moves to the right, and the pump head 6 The liquid in the space formed inside is discharged through the outlet check valve 12. Thus, the pump piston 4 repeats reciprocating motion, and the air-driven pump repeatedly sucks and discharges liquid.

  The air pumps of the first type and the second type described above have a problem that the discharge flow rate of the pump cannot be set arbitrarily and accurately. On the other hand, the present invention is intended to solve the problems of such a conventional air-driven pump, and is a flow-control air-driven pump that can set and control the discharge flow rate arbitrarily and accurately. It was developed for the purpose of realizing.

  First, a flow control air-driven pump of the first type of the present invention will be described with reference to FIGS. In the figure, the basic configuration of the air-driven pump is basically the same as that of the conventional air-driven pump (first type), and is composed of an air motor 8 and a fluid pump 9, which is the front end. A plate 18, a rear end plate 19, a motor cylinder 14 held therebetween, and a motor piston 15 in the motor cylinder are provided.

  A discharge side air inlet / outlet port 17 is connected via an air inlet 1, an air filter 2, a suction side drive air pressure adjustment valve 3, a discharge side drive air pressure adjustment valve 4, an air flow rate regulator 5, and a discharge side air direction switching electromagnetic valve 7. When driving air enters from the air, the air pushes the motor piston 15, and the motor piston moves to the right in the drawing.

  When the motor piston reaches a position where the suction side proximity switch 11 can be detected, a signal from the suction side proximity switch opens the suction side air direction switching solenoid valve 6 and the drive air is sucked into the suction side of the motor piston 15. Enter from side air inlet / outlet 16. At the same time, in response to a signal from the suction side proximity switch 11, the discharge side air direction switching electromagnetic valve 7 forms a flow path on the exhaust side, and the motor piston 15 that has moved in the right direction in the figure starts moving in the left direction in the figure. .

  When the motor piston 15 moves to the left in the drawing and reaches a position that can be sensed by the discharge side proximity switch 10, the discharge side air direction switching solenoid valve 7 is opened by the signal of the discharge side proximity switch 10 and the drive air is The suction side air direction switching solenoid valve 6 is supplied to the opposite side of the motor piston 15 and at the same time forms a flow path on the exhaust side, and the motor piston 15 moves again in the right direction in the figure and performs a reciprocating motion.

  A pump piston 21 is coaxially mounted on the motor piston 15. When the pump piston reciprocates due to the reciprocating motion of the motor piston, and the pump piston 21 moves in the left direction in the figure, the inlet check valve When the liquid flows into the space formed in the pump head 22 through 23 and the pump piston 21 moves to the right in the figure, the liquid in the pump head 22 is discharged through the outlet check valve 24.

  Next, a flow control air-driven pump according to the second type of the present invention will be described with reference to FIG. In the figure, the drive air that has entered the air motor via the air inlet 1, the discharge-side air pressure adjustment valve 15, and the air flow rate regulator 16 passes through the flow path formed in the air direction switching valve 2, and the motor piston 3. When the motor piston is supplied to the right side, the motor piston moves to the left in the figure, and the pump piston 4 mounted on the motor piston also moves to the left. Inhaled into the space formed.

  When the motor piston 3 reaches the position of the discharge side air pilot valve 7 and pushes the valve rod of the air pilot valve, the flow path to the pilot air exhaust port 14 opens and the pilot air pressure decreases, so the air direction is switched. The force that has pushed the valve 2 downward is reduced, and the air direction switching valve 2 moves upward in the figure and stops at a position where drive air is introduced into the space on the left side of the motor piston 3. At the same time, at this position, a flow path is formed in which air on the right side of the motor piston 3 is discharged from the exhaust muffler 10 through a flow path formed inside the air direction switching valve 2.

  The drive air introduced to the left side of the motor piston 3 pushes the motor piston 3 to move the motor piston 3 to the right, and the pump piston 4 attached to the motor piston 3 moves to the right, and the pump head 6 The liquid in the space formed inside is discharged through the outlet check valve 12. Thus, the pump piston 4 repeats reciprocating motion, and the air-driven pump repeatedly sucks and discharges liquid.

  In the present invention, in the air-driven pump composed of the air motor and the fluid pump, a discharge side air pressure adjustment valve is installed between the air inlet and the air motor, and an air flow rate regulator is installed downstream thereof. The flow control air drive pump which can change the discharge flow rate of a fluid pump arbitrarily by changing the drive air flow rate of an air motor is constructed.

  In the flow control air-driven pump according to the present invention, the air flow regulator and the operation thereof are as follows. That is, in the present invention, as shown in FIG. 4, by providing an air flow rate regulator 5 between the discharge side drive air pressure regulating valve 4 and the discharge side air direction switching electromagnetic valve 7, the flow rate of the drive air can be arbitrarily set. Therefore, it is possible to set accurately. The air flow rate regulator 5 is preferably a precise flow rate control means capable of adjusting a minute air flow rate, for example, a needle valve with a vernier scale, a mass flow controller, or a combination of both, but these are equivalent or similar. If it has a function, it can be used similarly.

  In the present invention, for example, a mass flow controller is preferably used as the air flow rate regulator. The air introduced from the inlet of the mass flow controller is divided into the sensor part and the bypass part, merges again, and is controlled to the set flow rate by the flow rate control valve. The amount of air flowing through the sensor unit is detected as an actual flow rate. Examples of the control valve include a thermal valve system, an electromagnetic valve system, and a piezo valve system. Other than this, for example, a thermal mass flow meter (thermal flow meter) having the same or similar function can be used similarly.

  The pressure and flow rate of the driving air flowing into the air motor 8 can be accurately adjusted by adjusting the flow rate of the driving air by the air flow rate regulator 5 in a state where the driving pressure is precisely adjusted by the discharge side driving air pressure regulating valve 4. It is possible to set the reciprocating speed of the motor piston 15 to be constant. Since the pump piston 21 is attached to the motor piston 15, the reciprocating speed of the pump piston 21 is constant.

  In the present invention, with the driving pressure of the air introduced from the air inlet being adjusted, the flow rate of the driving air is adjusted and the pressure and flow rate of the driving air are set to predetermined levels, whereby the motor piston It is important to keep the reciprocating motion speed constant. Since the discharge flow rate of the fluid pump 9, that is, the discharge amount per unit time, is proportional to the reciprocating speed of the pump piston 21, the air flow rate regulator 5 can arbitrarily and accurately set the pump flow rate. Become. In addition, since both the air pressure adjusting valve and the direction switching valve on the suction side and the discharge side are also used, as shown in FIG. 7, there is one air pressure adjusting valve, and the direction switching valve is replaced with two two-way switching valves. In addition, the same effect can be expected when one four-way switching valve is installed.

  Further, as shown in FIG. 5, in the flow control air driven pump of the second type of the present invention, in the conventional second type air driven pump (FIG. 3), after the air inlet 1, the discharge side An air pressure adjustment valve 15 and an air flow rate regulator 16 are installed. The pressure of the driving air supplied to the air motor is precisely adjusted by the discharge-side air pressure adjustment valve 15, so that the flow rate of the driving air is adjusted by the air flow rate regulator 16 with the driving pressure adjusted. This makes it possible to accurately set the pressure and flow rate of the driving air flowing into the air motor, thereby arbitrarily changing the reciprocating speed of the motor piston 3 and arbitrarily changing the discharge flow rate of the liquid pump. It becomes possible.

  In the present invention, the air flow regulator can precisely adjust the driving flow, that is, control the flow of the driving air in cooperation with the precise adjustment of the driving pressure by the discharge side driving air pressure regulating valve. It is important to use a proper air flow regulator, but if it satisfies these conditions, the specific configuration of the air flow regulator, such as the installation position, drive system, performance and type, should be It can be arbitrarily designed according to the type of pump, purpose of use, and the like.

  In the conventional air drive pump, in order to drive the motor piston of the air motor, the pressure of the drive air introduced into the air motor has been adjusted, but the flow rate of the drive air has not been adjusted. It has been difficult to keep the flow rate of the liquid discharged from the fluid pump constant. On the other hand, in the present invention, in the air drive pump composed of the air motor and the fluid pump, the pressure of the drive air introduced into the air motor is precisely adjusted by the discharge side drive air pressure adjusting valve, and the flow rate is adjusted to the air. By precisely adjusting the flow rate with the flow regulator, the pressure and flow rate of the drive air is accurately set and controlled, thereby keeping the drive of the air motor motor piston and the fluid pump constant so that the fluid pump can It is possible to make the discharge amount of the liquid constant.

  The general air-driven pump of the prior art is designed to have a device configuration capable of discharging a constant pressure liquid from a fluid pump, for example, and development of a device capable of handling a high pressure discharge by controlling a constant flow rate is assumed. There was no actual situation. On the other hand, the present invention introduces these media into a reactor under high temperature and high pressure conditions using a subcritical fluid or supercritical fluid as a medium, for example, by controlling the flow rate at a constant flow rate by high pressure discharge of 50 to 200 MPa. A fluid-controlled air-driven pump according to the present invention is a new subcritical fluid that requires high-pressure discharge and flow rate control of 50 to 200 MPa as described above. The development of technology for utilizing supercritical fluids became necessary for the first time.

The present invention has the following effects.
(1) An air-driven pump composed of an air motor and a fluid pump is provided with an air flow rate regulator that adjusts the amount of air driven by the air motor, and the amount of air driven is set so that the reciprocating speed of the air motor and liquid The discharge flow rate of the pump can be arbitrarily changed.
(2) The discharge flow rate of the liquid pump can be arbitrarily set by setting the flow rate of the driving air with the air flow rate regulator.
(3) With a conventional air-driven pump composed of an air motor and a fluid pump, it has been difficult to set the discharge flow rate of the liquid pump to be constant, but with the air-driven pump of the present invention, The discharge flow rate of the fluid pump can be arbitrarily set by changing the drive air flow rate of the air motor.
(4) According to the present invention, for example, it is possible to provide a new flow rate control air-driven pump capable of performing high-pressure discharge of a liquid of 50 to 200 MPa by controlling the flow rate.
(5) The fluid-controlled air-driven pump of the present invention can be suitably used as a new air-driven pump that enables discharge by controlling the high pressure and flow rate of subcritical and supercritical fluids.

  Next, the present invention will be specifically described with reference to preferred examples of the present invention, but the present invention is not limited to the following examples.

  Hereinafter, as a preferred embodiment of the present invention, an example of a first type fluid controlled air driven pump and a second type fluid controlled air driven pump will be described in detail with reference to FIGS. In addition to the configuration of the air flow regulator 5, it can be arbitrarily designed according to the configuration of a conventional air-driven pump.

  FIG. 4 is an example using the first type of air-driven pump. In FIG. 4, the fluid control air-driven pump of the present invention includes an air inlet 1, an air filter 2, and a suction-side drive air pressure adjusting valve 3. An air flow rate regulator 5 installed downstream of the discharge side drive air pressure regulating valve 4, and further, a suction side air direction switching solenoid valve 6, a discharge side air direction switching solenoid valve 7, an air motor 8, When it has a fluid pump 9 and a discharge side proximity switch 10 and reaches a position that can be detected by the motor piston 15, an electric signal for direction switching is supplied to the suction side air direction switching solenoid valve 6 and the discharge side air direction switching solenoid valve 7. Put out.

  Further, when the suction side proximity switch 11 reaches a position where the motor piston 15 can detect, the suction side proximity switch 11 outputs a direction switching electric signal to the suction side and discharge side air direction switching electromagnetic valves. The flow rate of the fluid pump can be set by setting the flow rate of the driving air with the air flow rate regulator 5.

  FIG. 5 shows an example in which the second type air-driven pump is used. In FIG. 5, the fluid control air-driven pump of the present invention includes a discharge-side air pressure adjustment valve 15 installed downstream of the air inlet 1. And an air flow rate regulator 16, and further includes an air direction switching valve 2, a motor piston 3, a pump piston 4, an inlet check valve 5, an outlet check valve 12, a discharge side air pressure adjustment valve 15, and an air flow rate regulator 16. Have. When the motor piston 3 moves to the left in the figure, the pump piston 4 also moves to the left, and the liquid is sucked into the space formed in the pump head 6 through the inlet check valve 5.

  When the motor piston 3 reaches the position of the discharge side air pilot valve 7 and pushes the valve rod to open the valve, the pilot air is exhausted through the pilot air exhaust port 14, so the air direction switching valve 2 is The air pressure of the pilot air that has been pushed to the side decreases, the air direction switching valve 2 moves upward in the figure, and the air direction switching valve 2 is moved to a position where drive air is supplied to the left side of the motor piston 3. At the same time, a drive air on the right side of the motor piston 3 passes through the exhaust muffler 10 to form an exhaust circuit.

  When driving air is supplied to the left side of the motor piston 3, the motor piston 3 is pushed by the driving air and starts moving in the right direction in the figure, and the motor piston 3 reaches the position of the suction side air pilot valve 11. When the valve rod is pushed and the valve is opened, the pilot air pressure of the air direction switching valve 2 rises. Therefore, the air direction switching valve 2 is pushed downward in the figure, and driving air is supplied to the right side of the motor piston 3. The reciprocating motion is repeated.

  FIG. 6 is a diagram showing the performance of the pump having the device configuration shown in FIG. 4. The horizontal axis represents the driving air flow rate adjusted by an air flow rate regulator (mass flow controller), the vertical axis represents the discharge pressure of the liquid pump of 50 MPa, The discharge flow rate when changed to 100 MPa, 150 MPa, and 200 MPa is shown. As is apparent from the figure, it is understood that the discharge flow rate of the air drive pump can be arbitrarily and accurately controlled by setting the drive air flow rate by the air flow rate regulator.

  As described above in detail, the present invention relates to a flow-controlled air-driven pump. According to the present invention, in an air-driven pump composed of an air motor and a fluid pump, the flow rate of driving air is set by an air flow regulator. By doing so, the discharge flow rate of the liquid pump can be set arbitrarily and accurately. According to the present invention, for example, it is possible to provide a flow-controlled air-driven pump that can inject liquid into a high-pressure vessel at a constant discharge flow rate. The present invention provides a new flow-controlled air-driven pump capable of arbitrarily controlling the discharge flow rate of an air-driven pump, thereby controlling high-pressure discharge of 50 to 200 MPa to a constant flow rate. The present invention provides a new technique suitable for controlling a high-pressure fluid that can be performed.

1 shows an air driven pump using a first type of prior art. 1 shows an air driven pump using a first type of prior art. Figure 2 shows an air driven pump using a second type of prior art. The air drive pump provided with the air flow regulator of Example 1 is shown. The air drive pump provided with the air flow regulator of Example 2 is shown. The performance of the pump of the apparatus structure shown in FIG. 4 is shown. The horizontal axis is the driving air flow rate, and the vertical axis is the discharge flow rate. The air drive pump provided with the air flow rate regulator in the case of using both the suction side and the discharge side is shown.

Explanation of symbols

(Reference numerals of FIGS. 1, 2, and 4)
DESCRIPTION OF SYMBOLS 1 Air inlet 2 Air filter 3 Suction side drive air pressure adjustment valve 4 Discharge side drive air pressure adjustment valve 5 Air flow regulator 6 Suction side air direction switching solenoid valve 7 Discharge side air direction switching solenoid valve 8 Air motor 9 Fluid pump 10 Discharge Side proximity switch 11 Suction side proximity switch 12 Liquid inlet 13 Liquid outlet 14 Motor cylinder 15 Motor piston 16 Suction side air inlet / outlet 17 Discharge side air inlet / outlet 18 Front end plate 19 Rear end plate 20 Motor piston seal 21 Pump piston 22 Pump head 23 Inlet check Valve 24 Outlet check valve 25 Pump packing 26 O-ring (reference numerals in FIGS. 3 and 5)
DESCRIPTION OF SYMBOLS 1 Air inlet 2 Air direction switching valve 3 Motor piston 4 Pump piston 5 Inlet check valve 6 Pump head 7 Discharge side air pilot valve 8 Rear end plate 9 Motor cylinder 10 Exhaust muffler 11 Intake side air pilot valve 12 Outlet check valve 13 Front end plate 14 Pilot air exhaust port 15 Discharge side air pressure adjustment valve 16 Air flow rate regulator (reference numeral in FIG. 7)
DESCRIPTION OF SYMBOLS 1 Air inlet 2 Air filter 4 Air pressure regulating valve 5 Air flow regulator 6 Four-way electromagnetic switching valve 8 Air motor 9 Fluid pump 10 Discharge side proximity switch 11 Suction side proximity switch 12 Liquid inlet 13 Liquid outlet 14 Motor piston 15 Pump piston

Claims (7)

  In an air-driven pump composed of an air motor and a fluid pump, an air flow rate regulator for adjusting the drive air amount of the air motor is provided, and the discharge flow rate of the fluid pump is controlled by changing the drive air flow rate of the air motor. A flow-controlled air-driven pump characterized by that.   The flow control air drive according to claim 1, further comprising: a direction switching valve that switches a direction of air entering the air motor; a detection sensor that outputs a direction switching signal to the direction switching valve; an air pressure adjustment valve; pump.   The flow control air drive pump according to claim 1, wherein the air flow regulator is disposed between the discharge side air pressure regulating valve and the air motor.   The flow control air drive pump according to claim 1 or 2, wherein the air flow regulator is a mass flow controller.   The flow control air-driven pump according to claim 1 or 2, wherein the air flow regulator is a needle valve with a vernier scale.   The flow rate according to claim 1, wherein the flow rate of the driving air is set to a predetermined value by the air flow rate regulator so that the reciprocating speed of the motor piston of the air motor and the discharge flow rate of the liquid pump are changed to a predetermined value. Control air driven pump.   The flow control air-driven pump according to claim 1, wherein the discharge flow rate of the air-driven pump is controlled by setting the flow rate of the drive air with an air flow rate regulator.

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