JP2008008356A - Piezoelectric drive mechanism, valve, and brake device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric drive mechanism capable of precisely moving a driven body by increasing the displacement of an piezoelectric element and transmitting it to the driven body. <P>SOLUTION: The piezoelectric drive mechanism 10 comprises a case 2 and a drive mechanism body 11. The drive mechanism body 11 has first and second piezoelectric elements 17, 18, a first displacement increasing mechanism for increasing the displacement of the piezoelectric element 17, an abutting part moved perpendicularly to the elongating direction of the piezoelectric element 17 by the first displacement increasing mechanism for abutting on the inner face of the case, and a second displacement increasing mechanism for increasing the displacement of the piezoelectric element 18 to move the driven body. When a voltage applied to the piezoelectric element 17, the abutting part abuts on the inner face of the case via the first displacement increasing mechanism and the drive mechanism body 11 is stopped non-movably relative to the case 2. When a voltage is applied to the piezoelectric element 18, the second displacement increasing mechanism is displaced to move the driven body. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention can be used for a piezoelectric drive device using a piezoelectric element as a drive source, and a valve and a brake device using the piezoelectric drive device.

Piezoelectric elements have characteristics of being small and excellent in high-speed response performance and having extremely high conversion efficiency from electrical energy to mechanical energy, and therefore have been attempted to be used as mechanical drive sources.
For example, since a generated displacement of a piezoelectric element is small, a piezoelectric air valve that opens and closes an air discharge port by enlarging the displacement and applying it to a valve body has been proposed (see Patent Document 1).

JP 2004-316835 A

  However, in Patent Document 1, when a voltage is applied to the piezoelectric element, the valve body is moved by the lever principle to move away from the valve seat, and when the voltage application to the piezoelectric element is released, the valve body is returned to its original position. Therefore, there is a problem that the position of the valve body with respect to the valve seat must be adjusted accurately.

Further, in Patent Document 1, the valve body is brought into close contact with the valve seat using the pressure difference between the air pressure chamber and the air discharge port. If there is no such pressure difference, the valve closing force is increased. There was a problem that it was difficult to do.
In Patent Document 1, an attempt is made to support the valve body with a spring member and increase the force for bringing the valve body into contact with the valve seat. However, when the valve body is brought into contact with the valve seat, a spring is used. If the member is greatly bent and the contact force is increased, when a voltage is applied to the piezoelectric element, the valve body does not move away from the valve seat until the spring member has been bent. Will occur.

  In addition, when opening and closing the valve by pressing an elastically deformable member such as a tube valve or a diaphragm valve, it is relatively easy to apply a voltage to the piezoelectric element to close the valve. It has been difficult to realize a configuration in which the valve is closed when voltage application to the piezoelectric element is released, that is, to realize a normally closed type valve with the piezoelectric element.

  Such a problem is not limited to the case where the valve is opened and closed by the piezoelectric element, but is a problem common to various drive devices that utilize the displacement of the piezoelectric element.

  An object of the present invention is to enlarge a displacement of a piezoelectric element and transmit it to a driven body, to move the driven body with high accuracy, and to normally close using the piezoelectric driving apparatus Another object of the present invention is to provide a valve capable of realizing the above operation and a brake device using the piezoelectric driving device.

  The piezoelectric drive device of the present invention includes a case and a drive device main body that is movably provided in the case. The drive device main body includes first and second piezoelectric elements, and the first piezoelectric element. When a voltage is applied to the piezoelectric element and the piezoelectric element expands, the displacement is expanded, and the first displacement expanding mechanism displaces the piezoelectric element in a direction orthogonal to the extending direction of the piezoelectric element. An abutting portion that moves in a direction perpendicular to the extending direction of the element and contacts the inner surface of the case, and when a voltage is applied to the second piezoelectric element and the piezoelectric element expands, its displacement is enlarged to be covered. A second displacement magnifying mechanism that moves the driving body, and when a voltage is applied to the first piezoelectric element, the abutting portion abuts against the inner surface of the case via the first displacement magnifying mechanism. The drive device body is stopped immovably with respect to the case, Serial when a voltage is applied to the second piezoelectric element, characterized in that the driven body with the second displacement enlarging mechanism is displaced is moved.

  The piezoelectric driving device of the present invention includes a case and a driving device main body that is movably provided in the case. The driving device main body applies a voltage to the piezoelectric element and the piezoelectric element to apply piezoelectricity. When the element is extended, the displacement is enlarged, and a first displacement enlargement mechanism that displaces the element in a direction orthogonal to the extension direction of the piezoelectric element, and the first displacement enlargement mechanism orthogonally intersects the extension direction of the piezoelectric element. A contact portion that moves in the direction and contacts the inner surface of the case, and a second displacement expansion that expands the displacement and moves the driven body when the piezoelectric element expands when a voltage is applied to the piezoelectric element. The second displacement magnifying mechanism is set to be higher in rigidity than the first displacement magnifying function, and when the piezoelectric element is extended, the first displacement magnifying mechanism is displaced. The abutting portion abuts on the inner surface of the case and the driving device Body is stopped so as not to move relative to the case, when further piezoelectric element is continuously extended may characterized in that the second displacement enlarging mechanism displacement to the driven member is moved.

In each of such inventions, the drive device main body is provided so as to be movable with respect to the case, and the contact portion is brought into contact with the inner surface of the case via the first displacement enlarging mechanism as the piezoelectric element expands. The position of the drive device main body can be fixed by driving the piezoelectric element.
For this reason, when the driven body is moved via the second displacement magnifying mechanism by extending the piezoelectric element, the second displacement magnifying mechanism is displaced after the drive device body is moved to a position serving as a reference for movement. Thus, the driven body can be moved, and the driven body can always be accurately moved from the predetermined reference position.

In addition, since the contact portion is moved via the first displacement enlarging mechanism, the displacement amount can be enlarged even when the expansion amount of the piezoelectric element is small, and the amount is significantly larger than the displacement amount of the piezoelectric element. The abutting portion can be moved only by this amount. For this reason, a contact part can be press-contacted to a case inner surface with comparatively big pressure, and a drive device main body can fully be made into a movement stop state with the frictional force.
Furthermore, since the driven body is moved via the second displacement enlarging mechanism, the amount of movement of the driven body can be increased as compared with the amount of expansion of the piezoelectric element. For this reason, the piezoelectric drive device of the present invention can be used to move various driven bodies.

  Furthermore, in the first aspect of the present invention, each displacement enlarging mechanism is displaced by driving a separate piezoelectric element, so that the drive device by the first displacement enlarging mechanism is controlled by controlling the drive timing of each piezoelectric element. After the main body movement stop processing, the driven body can be reliably moved by the second displacement magnifying mechanism, and the driven body can be moved after the position of the driving device main body is determined. Driving can be performed.

  On the other hand, since the invention according to claim 2 is configured so that it can be driven by only one piezoelectric element by controlling the displacement timing of each displacement magnification mechanism using the difference in rigidity of each displacement magnification mechanism. Cost can be reduced and the structure and control of the piezoelectric drive device can be simplified.

  Here, in the piezoelectric driving device according to claim 1, the driving device main body includes an integrally formed displacement magnifying plate, and a first piezoelectric element and a second piezoelectric element attached to the displacement magnifying plate, The displacement enlarging plate includes a base end portion provided at a substantially central portion in the longitudinal direction, and a first piezoelectric element formed continuously from the base end portion to which the first end portion of the first piezoelectric element is attached. An element first end mounting portion, and a first end portion of the second piezoelectric element, which is continuously formed from the base end portion to the opposite side of the first piezoelectric element first end mounting portion, is attached. Two piezoelectric element first end mounting portions, a pair of first connecting portions extending from the base end portion along the longitudinal direction of the first piezoelectric element and sandwiching the first piezoelectric element, and each first A pair of first drive parts formed continuously from the end of the connecting part via the first hinge part, and each first A first piezoelectric element second end mounting portion formed continuously from the drive portion via the second hinge portion and having the second end portion of the first piezoelectric element attached thereto; and a second end portion from the base end portion. A pair of second connecting portions extending along the longitudinal direction of the piezoelectric element and sandwiching the second piezoelectric element, and formed continuously from the end of each second connecting portion via the third hinge portion, respectively. A pair of second drive parts formed, and a second piezoelectric element second formed continuously from each second drive part via a fourth hinge part to which the second end of the second piezoelectric element is attached An end mounting portion, a pair of third drive portions formed continuously from the end portion of each second connecting portion via a fifth hinge portion, and from each third drive portion via a sixth hinge portion; A driven body mounting portion formed continuously, and when the first piezoelectric element is extended, the first hinge portion, 1 drive part and 2nd hinge part function as a 1st displacement expansion mechanism, the contact part provided in the 1st connection part or the 1st drive part is made to contact | abut to the said case inner surface, and said 2nd piezoelectric element The third hinge portion, the second drive portion, the fourth hinge portion, the fifth hinge portion, the third drive portion, and the sixth hinge portion function as a second displacement magnifying mechanism and are driven. It is preferable to move the body mounting portion in the longitudinal direction of the piezoelectric element.

  3. The piezoelectric drive device according to claim 2, wherein the drive device main body includes an integrally formed displacement magnifying plate and a piezoelectric element attached to the displacement magnifying plate. A pair of connecting portions extending along the longitudinal direction of the element and sandwiching the piezoelectric element, and a pair of first drives continuously formed from one end of each connecting portion via the first hinge portion A piezoelectric element first end attachment portion formed continuously from each first drive portion via a second hinge portion to which the first end portion of the piezoelectric element is attached; A pair of second driving portions formed continuously from the end portions via the third hinge portions, respectively, and a second driving portion of the piezoelectric element formed continuously from the second driving portions via the fourth hinge portions. A piezoelectric element second end mounting portion to which the end portion of the piezoelectric element is attached; A pair of third drive portions formed continuously from the other end portion of the third drive portion via the fifth hinge portion, and a driven body attachment portion formed continuously from the third drive portion via the sixth hinge portion. When the piezoelectric element extends, the first hinge portion, the first drive portion, and the second hinge portion function as a first displacement enlarging mechanism, and the connection portion or the first drive When the abutting portion provided on the portion abuts the inner surface of the case and the piezoelectric element further expands, the third hinge portion, the second driving portion, the fourth hinge portion, the fifth hinge portion, It is preferable that the 3 drive part and the 6th hinge part function as a second displacement magnifying mechanism, and the driven body attaching part is moved in the longitudinal direction of the piezoelectric element.

According to each of these inventions, since the displacement enlarging plate is integrally formed, the displacement amount of the drive unit corresponding to the expansion and contraction of the piezoelectric element can be set with high accuracy.
That is, since the extension amount of the piezoelectric element is very small, if there is a pin, a cam, or the like in the middle of the path for transmitting the displacement, the displacement may be sucked by the “back” of that portion. In contrast, in the present invention, the displacement enlarging plate is integrally formed by wire cutting or the like, so that the displacement is not sucked, and the displacement enlarging portion can be reliably displaced by a predetermined amount as the piezoelectric element expands. it can.

  The valve according to the present invention includes the piezoelectric driving device, a valve body attached to a second displacement enlarging mechanism of the piezoelectric driving device, a valve seat with which the valve body can come into contact, and the valve body and the valve seat. A flow path, a biasing means for biasing the valve body or the drive device main body in a direction in which the valve body is brought into contact with a valve seat, and a drive control means for controlling the driving of the piezoelectric element, In a state where the piezoelectric element is not extended, the valve body is brought into contact with the valve seat by the urging force of the urging means, the flow path is closed, and the drive control means applies a voltage to the piezoelectric element. Then, the first displacement magnifying mechanism is displaced to stop the drive device body from moving relative to the case, and then the second displacement magnifying mechanism is displaced to resist the urging force of the urging means. And opening the flow path by separating the valve body from the valve seat. .

With such a valve, the valve body as a driven body driven by the piezoelectric drive device can be accurately moved from a predetermined reference position.For example, by setting the reference position to a position where it abuts the valve seat, The valve can be opened and closed reliably. Further, since the amount of movement of the valve element can be adjusted by the expansion amount of the piezoelectric element, that is, the applied voltage value of the piezoelectric element, the opening amount of the valve can be easily and accurately controlled.
Furthermore, for example, when moving the valve body as the driven body, the valve body can be brought into contact with the valve seat by urging the drive device body with a spring or the like with respect to the case. For this reason, the valve body can be separated from the valve seat by driving the piezoelectric element with reference to the position where the valve body is in contact with the valve seat. Therefore, the position of the valve body with respect to the valve seat can be adjusted easily and accurately, and a normally closed type valve can be easily configured.
Further, since the valve body is brought into contact with the valve seat using the biasing force of the biasing means, the valve closing force can be easily increased, and the valve closed state can be reliably maintained. In addition, since the valve body is separated from the valve seat after the drive device body is stopped immovably, the valve body can be reliably separated from the valve seat even if the biasing means is used. The opening operation can be performed reliably.

Here, it is preferable that the second displacement enlarging mechanism and the valve body are detachably provided by an interlocking biasing means or a magnet set to a biasing force weaker than the biasing force of the biasing means. .
If comprised in this way, a valve body can be easily removed from a drive device main body, and maintenance operations, such as washing | cleaning, can also be performed easily.

  The brake device according to the present invention includes the piezoelectric driving device, a rotating body, a friction member provided so as to be able to be pressed against the rotating body by the piezoelectric driving device, and a drive control unit that controls driving of the piezoelectric element. And the drive device body is biased by a biasing means with respect to the case in a direction in which the second displacement enlarging mechanism protrudes to the outside of the case, and the friction member is attached to the second displacement enlarging mechanism. In a state where no voltage is applied to the piezoelectric element and the piezoelectric element is not extended, the second displacement magnifying mechanism is displaced in the direction in which the second displacement enlarging mechanism protrudes to the outside by the biasing force of the biasing means. As a result, the friction member is pressed against the rotating body to generate a braking force, and a voltage is applied to the piezoelectric element by the drive control means to displace the first displacement enlarging mechanism, so that the drive device main body is moved. After the second displacement magnifying mechanism is displaced in the direction toward the inside of the case, the friction member is separated from the rotating body and the brake is released. To do.

If the piezoelectric drive device of the present invention is used as a drive source for such a brake device, the biasing means causes the second displacement enlarging mechanism to protrude in the direction of the outside of the case when no voltage is applied to the piezoelectric element. Since it is biased, the reference position can be a state in which the friction member driven by the piezoelectric driving device is in contact with a rotating body such as a drum or a disk. Therefore, it is possible to provide a brake device that can apply a braking force by applying a brake without applying a voltage to the piezoelectric element.
In addition, since the driving device main body is urged by the urging means and each friction member is pressed against the rotating body, the friction material (lining) in the friction member is worn or replaced with a new friction material, and its thickness dimension Even when is changed, the friction member can be automatically adjusted to be pressed against the rotating body by the urging force of the urging means.
Further, the piezoelectric element consumes electric power only while it is displaced in the expansion / contraction direction, and no current flows and no electric power is consumed while the voltage is continuously applied and the piezoelectric element is maintained in the expanded state. For this reason, even when the voltage is continuously applied to the piezoelectric element and the brake is released, there is no power consumption, and the power consumption can be greatly reduced compared to the case where the friction member is displaced by the solenoid.
Moreover, the brake device of the present invention is suitable for a brake device in a brake motor, for example, because it is a non-excitation type, and can be small in size and can reduce power consumption. Furthermore, in addition to the brake motor, it can be widely used as a brake device for various rotating bodies such as cars, lifts, and conveyors.

  Here, the rotating body is constituted by a drum, and the friction member is a pair of brake shoes that are disposed inside the drum, one end side of which is rotatably attached to a support plate, and a friction material is provided. And a spring for moving each brake shoe in a direction in which the friction material of each brake shoe separates from the drum inner surface is provided between each brake shoe, and the piezoelectric driving device is disposed between the other ends of each brake shoe. In the state where the second displacement enlarging mechanism is attached to one brake shoe, the case is attached to the other brake shoe, and the piezoelectric element is not extended, the biasing force of the biasing means is applied to the case. On the other hand, the second displacement magnifying mechanism is displaced in the direction of projecting to the outside, so that the interval between the other ends of each brake shoe is widened and the friction material of the brake shoe A braking force is generated by being pressed against the inner surface of the drum, and a voltage is applied to the piezoelectric element by the drive control means to displace the first displacement magnifying mechanism to stop the drive device body from moving relative to the case. Then, when the second displacement enlarging mechanism is displaced in the direction toward the inside of the case, it is preferable that the friction material of each brake shoe is separated from the inner surface of the drum by the spring and the brake is released.

  According to the brake device having such a configuration, it is possible to provide a brake device that can be used as a leading trading shoe type drum brake and that makes use of drum brake characteristics such as a servo effect (self-boosting effect).

[First Embodiment]
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows a valve 1 of the present embodiment. In the following description, for the sake of convenience, the upper side of FIG. 1 will be described as the upper side, and the lower side will be the lower side. However, the orientation when the valve 1 is used is not limited to that of FIG. You may use it upside down.

  The valve 1 is a diaphragm valve, and includes a drive unit case 2, a flow path block 3 attached to one end of the drive unit case 2, and a lid 4 attached to the other end of the drive unit case 2.

  As shown in FIG. 2, the lid 4 is fixed to the drive unit case 2 with screws 41. Further, a connector 43 is fixed to the lid 4 with screws 42. An external control device (not shown) as drive control means is connected to the connector 43, and each piezoelectric element described later is driven by a drive signal output from the control device.

As shown in FIG. 3, the flow path block 3 has mounting holes 31 for mounting the valve 1 on various machines and mounting holes 32 into which screws for mounting the flow path block 3 to the drive unit case 2 are inserted. Is formed.
Further, as shown in FIG. 1, ports 33 and 34 to which a pipe for supplying a liquid is attached are formed in the flow path block 3. Each port 33, 34 is opened to a valve surface 37 formed in the flow path block 3 through a communication hole 35, 36. That is, the communication hole 36 is opened at the central axis portion of the valve surface 37. Further, the communication hole 35 is opened in a concave groove 38 formed in a ring shape around the opening of the communication hole 36 on the valve surface 37.

As shown in FIG. 4, a space that is substantially rectangular in cross section and continuous along the longitudinal direction (vertical direction) of the drive unit case 2 is formed inside the drive unit case 2, and a pair of guides is formed in this space. A member 5 is arranged.
Each guide member 5 is composed of a plate formed in a rectangular parallelepiped shape. A concave groove 51 is opened on the opposing surface of each guide member 5. Further, the guide member 5 is configured such that the position of the guide member 5 can be adjusted in a direction close to each other by a push screw 52 screwed into the drive unit case 2.

[Configuration of Piezoelectric Drive Device]
The piezoelectric driving device 10 of the valve 1 includes a driving unit case 2 and a driving device main body 11 built in the driving unit case 2.
The drive device main body 11 includes a displacement enlarging plate 12, a first spring seat 13, a second spring seat 14, a pressing spring 15 disposed between the spring seats 13, 14, a magnet holder 16, and a displacement. A first piezoelectric element 17 and a second piezoelectric element 18 fixed to the enlargement plate 12 are provided.

[Structure of displacement expansion plate]
The displacement enlarging plate 12 is composed of a member capable of bending deformation (elastic deformation) such as maraging steel, stainless steel, and invar material, and is manufactured by cutting one plate material into a predetermined shape described below by wire cutting or the like. Has been.
That is, approximately half (upper half) of the displacement enlarging plate 12 on the lid 4 side is, as shown in FIG. 5, a base end portion 121 provided at a substantially central portion in the longitudinal direction (vertical direction) and a base end. A pair of first connecting portions 122 extending from both ends of the portion 121 in the direction orthogonal to the axis, that is, the width direction, to the lid 4 side (upward), and ends of the first connecting portions 122 on the lid 4 side (upper end portion 122A). A pair of first drive units 124 formed continuously from the first drive unit 124 via the first hinge unit 123, and a first piezoelectric element formed continuously from the first drive unit 124 through the second hinge unit 125, respectively. An upper end side mounting portion 126 that is a second end portion mounting portion is provided.

On the other hand, on the end surface of the base end portion 121 on the lid 4 side, a base end upper side mounting portion 127 that is a first piezoelectric element first end mounting portion is continuously formed via a narrow width portion 127A. . A first end portion (lower end) in the axial direction of the first piezoelectric element 17 is attached to the base end upper side attaching portion 127.
Further, the second end portion (upper end) of the first piezoelectric element 17 in the axial direction is attached to the upper end side attaching portion 126 via the spacer 128.
Accordingly, each first connecting portion 122 is provided with the first piezoelectric element 17 interposed therebetween, and is extended along the longitudinal direction of the first piezoelectric element 17.

  As shown in FIGS. 1 and 6, approximately half (lower half) of the displacement enlarging plate 12 on the flow channel block 3 side is the flow path block 3 side from the base end portion 121 and both widthwise end portions of the base end portion 121. A pair of second connecting portions 132 extended downward (downward) and end portions of the second connecting portions 132 on the flow channel block 3 side (lower end portion 132A) from the portions extending in the directions close to each other, respectively. A pair of second drive parts 134 formed continuously via the three hinge parts 133, and a second piezoelectric element second end formed continuously from each second drive part 134 via the fourth hinge part 135 And a lower end side attachment portion 136 which is a portion attachment portion. In other words, the first hinge portion 123, the first drive portion 124, and the second hinge portion 125 are configured in substantially the same manner as the upper end portion of the displacement magnifying plate 12 formed thereon.

A second end portion (lower end) in the axial direction of the second piezoelectric element 18 is attached to the lower end side attachment portion 136.
In addition, a base end lower side mounting portion 129 that is a second piezoelectric element first end mounting portion is continuously formed on the end surface of the base end portion 121 on the flow channel block 3 side via a narrow width portion. Yes. One end of the second piezoelectric element 18 in the axial direction is attached to the base end lower side attaching portion 129 via a spacer 128.
Accordingly, each second connecting portion 132 is provided with the second piezoelectric element 18 interposed therebetween, and is extended along the longitudinal direction of the second piezoelectric element 18.

In addition, a pair of third driving units 138 are continuously formed at the end of the lower end portion 132A of each second connecting portion 132 on the case 2 side via a fifth hinge portion 137, and each third driving unit is formed. A holder mounting portion 140 that is a driven body mounting portion is formed continuously from 138 through a sixth hinge portion 139.
The first displacement enlargement mechanism includes the first hinge part 123, the first drive part 124, and the second hinge part 125, and includes a third hinge part 133, a second drive part 134, and a fourth hinge part 135. The second displacement magnifying mechanism includes the fifth hinge portion 137, the third drive portion 138, and the sixth hinge portion 139.

  In addition, the connection portions of the first connecting portion 122 and the second connecting portion 132 that are arranged along the piezoelectric elements 17 and 18 are connected to the other ends of the first connecting portion 122 and the second connecting portion 132. The narrow width portions (hinge portions) 122B and 132B are smaller in width than the portion, and the upper end portion 122A of the first connection portion 122 and the lower end portion 132A of the second connection portion 132 are caused by the action of each displacement enlarging mechanism. When pushed to the case 2 side, the first connecting portion 122 and the second connecting portion 132 are set to bend from the narrow width portions 122B and 132B.

  In the present embodiment, the control device is configured to be able to apply a voltage from the first set value for the first piezoelectric element to the second set value for the first piezoelectric element to the first piezoelectric element 17. A voltage from the first set value for the second piezoelectric element to the second set value for the second piezoelectric element can be applied to the two piezoelectric elements 18. Further, in the present embodiment, each first set value is set to a voltage value “0”, and the second set value is set according to the piezoelectric elements 17 and 18 to be used and the displacement amount required for the piezoelectric elements 17 and 18. ing.

In addition, the piezoelectric elements 17 and 18 have a thermal expansion coefficient of “0” or a negative numerical value. For this reason, the spacers 128 made of a material such as aluminum having a large thermal expansion coefficient are sandwiched between the mounting portions 126 and 129 and the piezoelectric elements 17 and 18, and the temperature changes to change the length of the piezoelectric elements 17 and 18. Even if the dimensions change, the change is compensated by the change in the length of the spacer 128, and the length of the piezoelectric elements 17 and 18 with the spacer 128 added is always constant regardless of the temperature change. The effect of temperature change is reduced.
In order to cope with the temperature change as described above, the piezoelectric elements 17 and 18 and the spacer 128 need to be maintained at the same temperature. Therefore, the gaps between the piezoelectric elements 17 and 18 and the spacer 128 and the displacement magnifying plate 12 are filled with a heat transfer material such as silicon so that the piezoelectric elements 17 and 18 and the spacer 128 are maintained at the same temperature. It is devised to.

Each of the hinge portions 123, 125, 133, 135, 137, and 139 has a narrow width that is smaller than that of other portions, and is formed to be elastically deformable when a force is applied.
Further, since the first hinge portion 123 and the second hinge portion 125 are displaced in the width direction, in the initial state, the hinge portions 123 and 125 are provided obliquely so as to be arranged on a substantially straight line. ing. Similarly, the third hinge portion 133 and the fourth hinge portion 135, and the fifth hinge portion 137 and the sixth hinge portion 139 are also provided obliquely so as to be arranged on a substantially straight line.

  The first spring seat 13 is formed in a substantially ring shape, and its upper end surface is disposed in contact with the guide member 5. A recess is formed in the lower end surface of the spring seat 13 and the upper end of the spring 15 is accommodated.

The second spring seat 14 is formed in a substantially cylindrical shape, and its lower end surface is disposed in contact with the magnet holder 16. A recess is also formed on the upper end surface of the spring seat 14, and the lower end of the spring 15 is accommodated.
The spring seat 14 is formed with a thin portion 14A near the lower end portion, and, as will be described later, the second piezoelectric element 18 is driven to bend so that the lower end portion 132A of the second connecting portion 132 spreads toward the case 2 side. At this time, the spring seat 14 is also configured to bend at the thin-walled portion 14 </ b> A so as to follow the deformation of the second connecting portion 132.
Further, the spring seat 14 is formed with an opening groove 14B having an open lower end, and a plate-like displacement enlarging plate 12 and a holder mounting portion 140 are disposed in the opening groove 14B. For this reason, the spring seat 14 is in direct contact with the magnet holder 16 without interfering with the displacement enlarging plate 12 or the holder mounting portion 140.

Since the spring 15 is interposed between the spring seats 13 and 14, the magnet holder 16 is urged downward by the spring 15 via the spring seat 14, and a diaphragm, which will be described later, is connected to the flow path block 3. The valve 1 is configured to be closed by contacting the valve surface. Accordingly, the biasing means of the present invention is constituted by the spring 15.
In addition, since the holder attaching part 140 of the displacement magnifying plate 12 is attached to the magnet holder 16, the displacement magnifying plate 12 and the magnet holder 16 move together. However, as will be described later, a voltage is applied to the piezoelectric element 17. Since the displacement magnifying plate 12 is in a free state that can move with respect to the case 2 unless it is applied and extended, the urging force (stress) of the spring 15 is applied to the displacement magnifying plate 12 while the valve 1 is closed. Are not added to the hinge portions 137, 139, etc. or the piezoelectric elements 17, 18.

  The magnet holder 16 is screwed to the holder mounting portion 140 of the displacement magnifying plate 12. A magnet 161 is embedded in the lower end of the magnet holder 16. In addition, a packing and a packing presser (not shown) are disposed between the magnet holder 16 and the case 2 and are sealed so as not to leak to the drive device main body 11 even if liquid leaks from the diaphragm 20. This seal structure is also provided in the following embodiments although not shown.

A diaphragm 20 is disposed between the drive unit case 2 and the flow path block 3. The diaphragm 20 is formed in a substantially disk shape, and a thick clamping part 201 is provided around the diaphragm 20. The diaphragm 20 is fixed by clamping the clamping unit 201 between the drive unit case 2 and the flow path block 3.
A thick valve opening / closing part 202 is also provided at the center of the diaphragm 20. A diaphragm fitting 203 is screwed to the valve opening / closing portion 202. The diaphragm fitting 203 is attracted to the magnet 161 by the magnetic force of the magnet 161, and the valve opening / closing portion 202 operates integrally with the magnet holder 16, that is, the holder mounting portion 140. Further, since the magnet 161 and the diaphragm fitting 203 can be easily separated, the operator can disassemble and easily maintain the flow path block 3 and the diaphragm 20.

Since the thickness between the sandwiching portion 201 and the valve opening / closing portion 202 of the diaphragm 20 is thin and curved and displaced, the holder mounting portion 140 moves upward with respect to the flow path block 3. As shown in FIG. 8, a gap is formed between the valve surface 37 of the flow path block 3 and the diaphragm 20, so that the communication holes 35 and 36 can communicate with each other.
On the other hand, when the holder mounting portion 140 moves downward with respect to the flow path block 3 and the valve opening / closing portion 202 comes into contact with the valve surface 37, the opening of the communication hole 36 is blocked by the diaphragm 20, and each communication The holes 35 and 36 are configured so as not to communicate with each other.
Accordingly, the ports 33 and 34, the communication holes 35 and 36, and the concave groove 38 constitute a flow path that is opened and opened and closed by the diaphragm 20.
The diaphragm 20 forms a valve body of the valve 1, and the valve surface 37 forms a valve seat.
Further, the drive unit case 2 is formed with an air vent hole 21 that communicates the space in which the diaphragm 20 is disposed to the outside so that the diaphragm 20 can be smoothly displaced.

[Valve drive operation]
Next, operation | movement of the valve | bulb 1 of such a structure is demonstrated.

[Valve operation: Initial state]
In the initial state, the control device does not apply a voltage to the piezoelectric elements 17 and 18. In other words, the control device applies the voltage of the first set value to the piezoelectric elements 17 and 18, but in this embodiment, the first set value is the voltage value “0”, so that the drive signal is not input. In this state, as shown in FIGS. 1, 5, and 6, the hinge portions 123, 125, 133, 135, 137, and 139 are configured not to be deformed. In this state, a slight gap 53 having a dimension L is formed between the first connecting portion 122 and the groove 51 of the guide member 5 as shown in FIG.

The displacement magnifying plate 12 is provided so as to be movable with respect to the drive unit case 2 provided with the guide member 5 by the gap 53, and the magnet holder 16 fixed to the displacement magnifying plate 12 is moved downward by the spring 15, that is, the flow. It is biased toward the road block 3 side.
For this reason, the valve opening / closing portion 202 of the diaphragm 20 is also urged downward via the magnet holder 16 and the diaphragm fitting 203, and the valve opening / closing portion 202 of the diaphragm 20 is in close contact with the valve surface 37 where the communication hole 36 is opened. Is in a closed state. That is, the valve 1 of the present embodiment is a normally closed type valve that is closed by the urging force of the spring 15 as the urging means in an undriven state where no voltage is applied to the piezoelectric elements 17 and 18. .

[Valve drive operation: Valve open operation]
Next, when a voltage of the second set value is applied to the piezoelectric element 17, the piezoelectric element 17 expands and its longitudinal dimension increases as shown in FIG. At this time, the hinge portions 123 and 125 are smaller in width and easier to deform than the narrow width portion 127A of the base end upper mounting portion 127. Therefore, when the longitudinal dimension of the piezoelectric element 17 is increased, the hinge portions 123 and 125 are increased. Is deformed. At this time, since each hinge part 123 is disposed outside the hinge part 125 and is connected to the first connecting part 122, when the piezoelectric element 17 is displaced, the first driving part 124 is interposed via the hinge part 125. Is inclined such that the upper side is inclined outward, and further, the upper end portion 122A of the first connecting portion 122 is inclined via the hinge portion 123 so as to be inclined outward. Then, the upper end portion 122 </ b> A of the first connecting portion 122 comes into pressure contact with the concave groove 51 of the guide member 5. For this reason, the displacement magnifying plate 12 is fixed to the guide member 5, that is, the drive unit case 2 so as not to move in the vertical direction.
Therefore, as described above, the first displacement enlarging mechanism is configured by including the hinge portions 123 and 125 and the first driving portion 124, and the abutting portion is configured by the upper end portion 122 </ b> A of the first connecting portion 122.
Further, when the voltage of the second set value is applied to the piezoelectric element 17, the gap dimension L is set in consideration of the movement amount of the upper end 122 </ b> A so that the upper end 122 </ b> A is pressed against the concave groove 51 with sufficient pressure. Is set. For example, the dimension L is 100 μm or less, for example, about 50 μm, and is set by moving the screw 52 back and forth.

Subsequently, when a voltage having a second set value is applied to the second piezoelectric element 18, as shown in FIG. 8, the second piezoelectric element 18 expands and its longitudinal dimension increases. Then, the lower end side attachment portion 136 moves downward, and the third hinge portion 133 and the fourth hinge portion 135 are displaced outward (case 2 side) with the movement, and the lower end portion 132A of the second connecting portion 132 is also moved. Displace to the outside.
When the lower end portion 132A is displaced outward, the holder mounting portion 140 moves upward via the fifth hinge portion 137, the third drive portion 138, and the sixth hinge portion 139.

  Here, as shown in FIGS. 6 and 8, the movement direction of the drive device body 11 of the third hinge part 133, the second drive part 134, and the fourth hinge part 135, that is, the length in the axial direction is la, and the length in the width direction. When the height is La and the downward movement amount of the lower end side attachment portion 136 due to the extension of the second piezoelectric element 18 is a, the movement amount b of the lower end portion 132A in the width direction is expressed by the equation 1: b = (la / La ) Xa.

Further, as shown in FIGS. 6 and 8, when the length in the axial direction of the fifth hinge portion 137, the third drive portion 138, and the sixth hinge portion 139 is Lb and the length in the width direction is lb, the holder mounting portion The upward movement amount c of 140 is obtained by Expression 2: c = (lb / Lb) × b.
Substituting Equation 1 into b in Equation 2 yields c = (lb / Lb) × (la / La) × a, and the output c is the displacement a expanded by the ratio of each length.
That is, the displacement amount of the holder mounting portion 140 is expanded from several times to about ten times the displacement amount of the second piezoelectric element 18. The displacement amount of the second piezoelectric element 18 is adjusted by the voltage value applied to the second piezoelectric element 18.
Therefore, as described above, the second displacement magnifying mechanism includes the third hinge part 133, the fourth hinge part 135, the fifth hinge part 137, the third drive part 138, and the sixth hinge part 139.

When the holder mounting portion 140 moves upward, the valve opening / closing portion 202 of the diaphragm 20 also moves upward via the magnet holder 16 and the diaphragm fitting 203, and leaves the valve surface 37 as shown in FIG. For this reason, the ports 33 and 34 communicate with each other through the communication holes 35 and 36, and the valve is opened. Therefore, in this embodiment, the valve can be opened by sequentially applying a voltage to the piezoelectric elements 17 and 18.
That is, since the magnet holder 16 is biased by the spring 15, the first piezoelectric element 17 is driven to press the first connecting portion 122 against the guide member 5 to prevent the movement of the displacement magnifying plate 12, that is, to fix it. Otherwise, when the second piezoelectric element 18 is driven and the holder mounting portion 140 is moved upward, the magnet holder 16 and the displacement enlarging plate 12 are moved downward by the spring 15 to open the valve. Can not. On the other hand, in this embodiment, when opening the valve, first, the first piezoelectric element 17 is driven to fix the displacement enlarging plate 12, and then the second piezoelectric element 18 is driven to move the holder mounting portion 140. Since it is moving upward, the holder mounting part 140, the magnet holder 16, the valve opening / closing part 202, etc. can be moved upward relative to the flow path block 3, and the valve can be opened reliably.

[Valve drive operation: Valve close operation]
Next, when the valve 1 is closed, the control may be performed in the reverse order to the case where the valve 1 is opened. That is, first, voltage application to the second piezoelectric element 18 is eliminated, and the holder mounting portion 140 is returned to the original position. As a result, the diaphragm 20 is brought into close contact with the valve surface 37 and the valve 1 is closed.

Subsequently, the voltage application to the first piezoelectric element 17 is eliminated, and the state where the upper end portion 122A of the first connecting portion 122 is in pressure contact with the concave groove 51 is released.
Then, the displacement magnifying plate 12 can move with respect to the guide member 5 and the drive unit case 2, and is biased downward by the spring 15, thereby increasing the force with which the diaphragm 20 comes into close contact with the valve surface 37, thereby ensuring the valve 1. Can be closed.
By repeating the above operation, the opening and closing of the valve 1 can be controlled. The opening amount of the valve 1 can be accurately controlled by the extension amount of the second piezoelectric element 18, that is, the applied voltage value.
In order to eliminate the voltage application to the piezoelectric elements 17 and 18, the terminals for applying a voltage to the piezoelectric elements 17 and 18 may be short-circuited and discharged.

[maintenance]
Further, when the liquid flow path is to be washed, for example, in order to change the type of liquid supplied via the valve 1 or when a day of work is completed, the flow path block 3 is removed from the drive unit case 2. The diaphragm 20 attached to the magnet holder 16 by the magnet 161 may be taken out. In this embodiment, since only the flow path block 3 and the diaphragm 20 are in contact with the liquid, if these are removed and washed, the drive device main body 11 does not need to be disassembled and maintenance work can be easily performed. Can do.

According to this embodiment, there are the following effects.
(1) Since the valve 1 is opened and closed by driving the diaphragm 20 using the piezoelectric elements 17 and 18, the valve 1 can be reduced in size and weight. That is, the valve 1 can be easily reduced in size and weight as compared with a case where a drive mechanism such as a servo motor, a solenoid, or a cam is employed.
Accordingly, in the production line for various products, the arrangement space can be reduced even when the valve 1 of the present embodiment is used for the flow paths of adhesives and various liquids.

(2) Further, when no voltage is applied to the piezoelectric elements 17 and 18, the magnet holder 16 is biased downward by the biasing force of the spring 15, and the diaphragm 20 is brought into close contact with the valve surface 37. The valve 1 is closed by the spring force of the spring 15. For this reason, even if the thickness dimension of the valve opening / closing portion 202 of the diaphragm 20 varies or the position of the valve surface 37 slightly changes, the spring 15 is urged until the diaphragm 20 contacts the valve surface 37. Therefore, the valve 1 can be closed reliably.
That is, the valve 1 can be a normally closed type valve that closes when no voltage is applied. Further, the contact force of the diaphragm 20 to the valve surface 37 when the valve is closed can be set only by the spring force of the spring 15, and the closed state of the valve 1 can be stably maintained.

(3) Further, since the force for pressing the diaphragm 20 against the valve surface 37 can be set only by the spring force of the spring 15, for example, when the diaphragm 20 or the flow path block 3 is removed and reattached for cleaning, The mounting position may be slightly different depending on the tightening amount or the like, but even if there is such a small difference, the diaphragm 20 is pressed against the valve surface 37 by the spring 15, so that the pressing force of the diaphragm 20 is substantially constant. In this respect, the valve 1 can be stably closed. For this reason, the replacement work of the diaphragm 20 can also be easily performed. In particular, since the diaphragm 20 which is a wetted part is also a consumable part, the replacement work is indispensable. However, since the work can be easily performed, the maintainability can be improved.

(4) Further, when opening the valve 1, first, a voltage is applied to the first piezoelectric element 17 to press the upper end 122 </ b> A of the first connecting portion 122 against the concave groove 51 of the guide member 5 and the displacement magnifying plate 12 does not move. Since the valve 1 is opened by applying a voltage to the second piezoelectric element 18 on the basis of the fixed position and moving the magnet holder 16, the diaphragm fitting 203, and the valve opening / closing part 202 upward, the valve 1 is always stable. Open / close operation can be performed.

(5) In addition, the opening / closing timing of the valve 1 and the opening / closing amount, that is, the amount of movement of the diaphragm 20 relative to the valve surface 37 are the timing at which the drive voltage is applied to each piezoelectric element 17, 18 and the voltage value applied to the second piezoelectric element 18. Can be adjusted easily. Therefore, remote setting of the valve opening amount and feedback control can be realized, and the user-friendly valve 1 can be provided.

(6) Since the piezoelectric elements 17 and 18 can be driven at a high speed, for example, the opening and closing operations can be performed 100 times or more per second, and a valve switching operation that is faster than the air cylinder driving can be realized.

(7) Since only the flow path block 3 and the diaphragm 20 are in contact with the liquid, the inside of the drive unit case 2 does not need to be disassembled if these are removed and cleaned, and maintenance work such as cleaning is easily performed. be able to.
Further, since the magnet 161 is used, the flow path block 3 can be removed from the drive unit case 2 and the diaphragm 20 attached to the magnet holder 16 can be taken out by the magnetic force of the magnet 161, so that the maintenance work is further facilitated. be able to.

(8) Unless the spring seat 14 is in contact with the magnet holder 16 and is not in direct contact with the displacement enlarging plate 12 and the piezoelectric element 17 is not expanded by applying a voltage, the displacement enlarging plate 12 is a case. 2, the urging force of the spring 15 is applied to the hinge portions 123, 125, 133, 135, 137, 139 of the displacement expansion plate 12 while the valve 1 is closed, Without being applied to the piezoelectric elements 17, 18, it is possible to reduce the influence of the biasing force of the springs applied to the hinge parts 123, 125, 133, 135, 137, 139 and the piezoelectric elements 17, 18.

[Second Embodiment]
Next, a second embodiment of the present invention will be described with reference to FIGS. Note that, in the following embodiments, the same or similar configurations as those of the above-described embodiments are denoted by the same reference numerals, and description thereof is omitted or simplified.
In the valve 1A of the second embodiment, as shown in FIG. 9, the valve 1 of the first embodiment uses a drive device body 11 using two piezoelectric elements 17 and 18, whereas The difference is that the drive device main body 11A using only the piezoelectric element 19 is used and the structure of the displacement magnifying plate 12A is slightly different from that of the displacement magnifying plate 12 of the first embodiment. .

That is, the displacement enlarging plate 12A does not have the base end portion 121, and the first connecting portion 122 and the second connecting portion 132 are directly connected to form the connecting portion 142. The piezoelectric element 19 is arranged so as to span between the attachment portion 126 and the attachment portion 136.
In addition, the third hinge portion 133 and the fourth hinge portion 135 are set to be harder to deform than the hinge portions 123 and 125 because the rigidity (strength) is increased, for example, by making the width dimension larger than the hinge portions 123 and 125. Has been. In other words, the second displacement magnifying mechanism is set to be more rigid and hard to deform than the first displacement magnifying mechanism.

In such a valve 1A of the second embodiment, the valve is opened and closed by the same operation as the valve 1 of the first embodiment.
That is, when no voltage is applied to the piezoelectric element 19, the displacement enlarging plate 12 </ b> A is biased downward by the spring 15, and the valve opening / closing portion 202 of the diaphragm 20 is brought into close contact with the valve surface 37 to close the valve. Yes.

The upper side (lid 4 side) hinges 123 and 125 have lower rigidity (strength) than the lower side (flow path block 3 side) hinges 133 and 135 and are easily bent. When a voltage is applied to extend the piezoelectric element 19, first, the upper hinge portions 123 and 125 are bent, and the upper end portion (contact portion) 142 A of the connecting portion 142 is recessed in the guide member 5 as shown in FIG. The displacement enlarging plate 12A is fixed in contact with the groove 51.
Further, when the voltage application to the piezoelectric element 19 is continued and the piezoelectric element 19 is further extended, the upper hinge portions 123 and 125 cannot be further deformed because the connecting portion 142 is in contact with the guide member 5.
For this reason, as the piezoelectric element 19 expands, the lower end side attachment portion 136 moves downward, and along with the movement, the third hinge portion 133 and the fourth hinge portion 135 are displaced outward (case 2 side), respectively. The lower end 142B of the portion 142 is also displaced outward.
When the lower end portion 132A is displaced outward, the holder mounting portion 140 moves upward via the fifth hinge portion 137, the third drive portion 138, and the sixth hinge portion 139, as in the first embodiment.

When the holder mounting portion 140 moves, the valve opening / closing portion 202 of the diaphragm 20 moves upward via the magnet holder 16 and the diaphragm fitting 203 and separates from the valve surface 37 as in the first embodiment. For this reason, the valve is opened so that the liquid can flow.
Therefore, the opening amount of the valve is adjusted by the expansion amount of the piezoelectric element 19, that is, the voltage value applied to the piezoelectric element 19.

Next, when the voltage application to the piezoelectric element 19 is canceled and the piezoelectric element 19 shrinks, the bent hinge parts 133 and 135 first return to the original state, and the lower end part 142B of the connecting part 142 that has spread left and right. Accordingly, the hinges 137 and 139 and the third drive unit 138 are also returned to the original state. For this reason, the holder attaching part 140 and the magnet holder 16 are also moved downward, the valve opening / closing part 202 of the diaphragm 20 is brought into close contact with the valve surface 37, and the valve is closed.
Subsequently, the upper hinge portions 123 and 125 and the first driving portion 124 are also returned to the original state, and the upper end portion 142 </ b> A of the connecting portion 142 is separated from the concave groove 51 of the guide member 5. For this reason, the magnet holder 16 is urged downward by the urging force of the spring 15, the adhesion force of the diaphragm 20 to the valve surface 37 is increased, and the valve is reliably closed.

  As described above, since the valve 1A is opened and closed by applying a voltage to the piezoelectric element 19 or releasing the application, the normally closed type valve 1A that is closed when no voltage is applied is provided. can do.

In this embodiment as well, the same effects as the first embodiment can be obtained, and the following effects can also be obtained.
That is, since only one piezoelectric element 19 needs to be provided, the structure can be simplified, the size can be easily reduced, and the cost can be reduced as compared with the first embodiment using the two piezoelectric elements 17 and 18. Moreover, since the object to be controlled is one piezoelectric element 19, the drive can be controlled more easily than when the two piezoelectric elements 17 and 18 are controlled. Furthermore, the valve can be controlled on / off simply by controlling the voltage application to one piezoelectric element 19 as compared to the first embodiment in which a voltage is sequentially applied to each piezoelectric element 17, 18. The operating speed of the valve can also be improved.
However, in this embodiment, the setting of the timing at which the hinge portions 123, 125, 133, and 135 are bent must be set by the difference in rigidity between the hinge portions 123, 125, 133, and 135. The design of 12A and the adjustment of the piezoelectric element 19 are difficult. In this respect, the two piezoelectric elements 17 and 18 are provided as in the first embodiment, and the piezoelectric element 17 for performing the operation of fixing the displacement magnifying plate 12 to the guide member 5, and the valve opening and closing after the fixing. If the piezoelectric element 18 for performing is provided separately and separately, there is an advantage that the displacement magnifying plate 12 can be easily designed and each operation can be executed reliably.

[Third Embodiment]
Next, a third embodiment of the present invention will be described with reference to FIGS.
As shown in FIG. 12, the valve 1B of the third embodiment is a poppet valve type valve that is driven by a drive device body 11B.
The valve 1B is configured to open and close the valve by bringing the valve body 310 into close contact with or away from the valve seat 300 formed in the flow path block 3B having the flow path.

For this reason, the drive device main body 11B is designed to increase the displacement when the voltage is applied to the piezoelectric element 19 so that the holder mounting portion 140 can move downward to push the valve body 310 downward. A plate 12B is provided. Specifically, the displacement enlarging plate 12B has the same structure as the displacement enlarging plate 12A on the upper side.
On the other hand, on the lower side, the hinge portions 137 and 139 and the third drive portion are arranged such that when the lower end portion 142B of the connecting portion 142 is opened to the left and right as the piezoelectric element 19 extends, the holder mounting portion 140 moves downward. 138 is set. Each of the hinge portions 137 and 139 and the third driving portion 138 is obliquely upward from a portion connected to the connecting portion 142 to a portion connected to the holder mounting portion 140, unlike the displacement magnifying plate 12A of the above embodiment. The hinge portions 137 and 139 are designed to face each other.

In the displacement enlarging plate 12B, the third hinge part 133 is formed to extend from the lower end part 142B of the connecting part 142 in a direction close to each other, and the second driving part 134 is located above the third hinge part 133 ( 4th hinge part 135 is formed in the part mutually connected in the upper end part of the 2nd drive part 134, and is formed toward the base end part 121 side, ie, the lid | cover 4 side.
The hinge parts 133 and 135 are larger in rigidity than the hinge parts 123 and 125 and thus have high rigidity. When the piezoelectric element 19 is extended, the hinge parts 123 and 125 are deformed first. Is set to

  The holder attaching portion 140 is attached with an interlocking holder 16A for transmitting the displacement of the holder attaching portion 140 to the valve body 310, and the lower end of the interlocking holder 16A is contacted with the valve body holder 320 holding the valve body 310. It is touched.

A spacer member 7 is interposed between the drive unit case 2B in which the displacement magnifying plate 12B is built and the flow path block 3B in which a flow path opened and closed by the valve body 310 is formed. The valve body holder 320 is disposed through the central axis portion of the spacer member 7 and is biased upward by a coil spring 330 as a biasing means disposed between the spacer member 7 and the valve body holder 320. It is in contact with the interlocking holder 16A.
Further, a diaphragm 340 is sandwiched between the spacer member 7 and the flow path block 3B. The diaphragm 340 is provided to seal the liquid that passes through the flow path block 3B from flowing into the drive unit case 2B.

  The valve body 310 is attached to the valve body holder 320 and the diaphragm 340 by bolts screwed into the valve body holder 320 through the diaphragm 340. The valve body 310 is biased upward by the biasing force of the coil spring 330 so that the valve body holder 320 is biased upward, and the valve seat 300 is formed on the lower surface of the flow path block 3B. The valve is configured to abut from below and close the valve.

In this embodiment, in a state where no voltage is applied to the piezoelectric element 19, the displacement enlarging plate 12B is urged downward by the interlocking spring 150, and the interlocking holder 16A abuts on the valve element holder 320. ing. Here, the interlocking spring 150 is set to be smaller than the urging force of the coil spring 330 that is the urging means, and is provided so that the interlocking holder 16A is always brought into contact with the valve body holder 320.
The valve body holder 320 is moved upward to a position where the valve body 310 abuts the valve seat 300 by the biasing force of the coil spring 330. Therefore, the valve 1B is also a normally closed type valve (poppet valve).

  In the present embodiment, the spring seat 14 is disposed in contact with the lower end 142B formed on the connecting portion 142 of the displacement enlarging plate 12B. In this case, the stress of the interlocking spring 150 is applied to the hinge portions 137, 139, etc., but since the biasing force of the interlocking spring 150 is small, there is almost no influence.

Next, when a voltage is applied to the piezoelectric element 19 to extend, the hinge portions 123 and 125 are first bent and the upper end portion 142A of the connecting portion 142 comes into contact with the guide member 5 as in the second embodiment. The displacement magnifying plate 12B is fixed.
Further, when a voltage is applied to the piezoelectric element 19 to expand, the hinge portions 133 and 135 are bent and the lower end portion 142B of the connecting portion 142 is expanded to the left and right as shown in FIG. 137 and 139 are deformed, and the holder mounting portion 140 moves downward. Then, the valve element holder 320 and the valve element 310 are moved downward against the biasing force of the coil spring 330 via the interlocking holder 16A, and the valve element 310 is separated from the valve seat 300 and the valve is opened.
The amount of movement of the valve body 310, that is, the amount of opening of the valve, is controlled by the amount of expansion of the piezoelectric element 19, that is, the applied voltage value applied to the piezoelectric element 19, as in the second embodiment.

  Further, when the applied voltage applied to the piezoelectric element 19 is decreased, the hinge portions 133 and 135 and the lower end portion 142B of the connecting portion 142 return to the original state, the holder mounting portion 140 moves upward, and the valve body is moved by the coil spring 330. The holder 320 moves upward, the valve body 310 contacts the valve seat 300, and the valve is closed. Further, the upper hinge portions 123 and 125 return to the original state, and the fixation of the displacement enlarging plate 12B is released.

In this embodiment as well, the same effects as the first and second embodiments can be obtained, and the following effects can also be obtained.
That is, since the poppet valve 1B using the valve element 310 that moves in the direction perpendicular to the opening surface of the valve seat 300 can be driven by the piezoelectric element 19, the valve 1B that takes advantage of the feature of the poppet valve that can reduce liquid leakage is provided. Can be configured.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described with reference to FIG.
As shown in FIG. 15, the valve 1 </ b> C of the fourth embodiment is a pinch valve that is driven by the drive device main body 11 </ b> C.
The drive device main body 11C has a displacement magnifying plate 12C arranged in the same direction as the displacement magnifying plate 12A with respect to the displacement magnifying plate 12B of the drive device main body 11B. Only the points are different, and the other configurations are the same.
Further, a tube block 401 into which the tube 400 is inserted is attached to the drive unit case 2 of the valve 1C. A tube pushing guide 403 is interposed between the tube block 401 and the drive unit case 2, and a tube pushing 404 guided by the guide 403 is disposed.

The tube push 404 is made of metal and is attached to the magnet holder 16 by the magnetic force of the magnet 161.
The tip (lower end) of the tube push 404 is formed in a triangular shape (mountain shape) in cross section, and the valve is closed by moving the tube push 404 downward and crushing the tube 400 with the tip, and the tube push 404 is moved upward. The valve is opened by moving and releasing the crushing of the tube 400.
Since other configurations are the same as those in the above embodiment, description thereof is omitted.

Also in the fourth embodiment, when no voltage is applied to the piezoelectric element 19, the displacement enlarging plate 12C is biased downward by the spring 15, and the tube push 404 is moved downward by the biasing force. The tube 400 is crushed and the valve is closed. For this reason, the valve 1 </ b> C of the present embodiment is also a normally closed type valve.
Next, when a voltage is applied to the piezoelectric element 19, the piezoelectric element 19 is extended, the upper hinge parts 123 and 125 are bent, the upper end part 142A of the connecting part 142 is in contact with the guide member 5, and the displacement enlarging plate 12C is fixed. Is done. Further, when voltage application to the piezoelectric element 19 is continued and the piezoelectric element 19 is further extended, the hinge parts 133 and 135 are opened to the left and right, and the lower hinge parts 137 and 139 are bent as in the second embodiment. As a result, the holder mounting portion 140 moves upward.

  When the holder mounting portion 140 moves, the tube push 404 moves upward via the magnet holder 16 as in the above embodiment, the closed state of the tube 400 is released, the valve is opened, and the liquid can flow. . Therefore, the opening amount of the valve 1 </ b> C is also adjusted by the voltage value applied to the piezoelectric element 19.

Next, when the voltage application to the piezoelectric element 19 is released and the piezoelectric element 19 shrinks, the hinge parts 133 and 135, the lower end part 142B, the hinge parts 137 and 139, and the third drive part 138 are also in their original states. For this reason, the holder mounting portion 140 and the tube push 404 also move downward, and the tube 400 is crushed to close the valve.
Subsequently, the upper hinge parts 123 and 125 and the first driving part 124 also return to the original state, and the upper part of the connecting part 142 is separated from the concave groove 51 of the guide member 5. For this reason, the displacement magnifying plate 12C is urged downward by the urging force of the spring 15, and the force with which the tube push 404 crushes the tube 400 increases, and the valve is reliably closed.

  Such a pinch valve 1 </ b> C of the present embodiment can also provide the same operational effects as the previous embodiment.

[Fifth Embodiment]
Next, a fifth embodiment of the present invention will be described with reference to FIG.
As shown in FIG. 16, the valve 1D of the fifth embodiment is a dispensing valve driven by the drive device body 11C.
That is, the flow path block 500 is attached to the drive unit case 2 of the valve 1D. A through hole 501 is formed in the flow path block 500 in the vertical direction of FIG. 16, that is, in the advance / retreat direction of the magnet holder 16, and a needle valve 502 is inserted into the through hole 501.

The needle valve 502 is a metal material configured to include a large-diameter base end portion 502A and a small-diameter needle portion 502B, and the base end portion 502A is attached to the magnet holder 16 by the magnetic force of the magnet 161.
Further, a guide seal 503 for sealing between the large diameter portion of the through hole 501 and the needle valve 502 and a guide seal presser 504 are disposed in the through hole 501. The guide seal presser 504 is sandwiched and fixed between the drive unit case 2 and the flow path block 500.

A valve seat 506 fixed by a valve seat receiver 505 is disposed at the lower end of the through hole 501. The valve seat 506 is formed with a tapered valve surface with which the tip of the needle valve 502 can abut, and the discharge hole 507 opened in the valve surface can be closed with the needle valve 502.
The discharge hole 507 communicates with a nozzle 509 attached to the lower surface of the valve seat 506 by a nozzle cap nut 508.

  The flow path block 500 is formed with a communication path 510 that communicates between the side surface of the flow path block 500 and the through hole 501. The communication path 510 is a syringe attached to the flow path block 500 by a syringe holder bag nut 511. It communicates with the holder 512.

  In this embodiment, in a state where no voltage is applied to the piezoelectric element 19, the displacement enlarging plate 12 </ b> C is biased downward by the spring 15, the needle valve 502 abuts on the valve seat 506, and the discharge hole 507. The valve is closed. Therefore, this valve 1D is also a normally closed type valve.

When the syringe containing the liquid to be supplied is attached to the syringe holder 512 and a voltage is applied to the piezoelectric element 19, the displacement magnifying plate 12C is fixed and the magnet holder is operated in the same manner as in the above embodiments. 16 and the needle valve 502 move upward, the needle valve 502 is separated from the valve seat 506, the discharge hole 507 is opened, and the valve is opened. Then, the liquid is discharged from the syringe through the communication path 510, the through hole 501, and the discharge hole 507.
On the other hand, when the voltage application of the piezoelectric element 19 is released, the magnet holder 16 and the needle valve 502 move downward, the needle valve 502 comes into contact with the valve seat 506, and the discharge hole 507, that is, the valve is closed. Since the displacement enlarging plate 12C is also fixed, the needle valve 502 is brought into contact with the valve seat 506 by the biasing force of the spring 15, the valve is closed, and the liquid discharge is also interrupted. Therefore, the liquid can be discharged intermittently by controlling the voltage application to the piezoelectric element 19 and opening and closing the valve.

Also in the dispensing valve 1D of this embodiment, the same operational effects as those of the above embodiment can be obtained.
Further, since the valve is closed by bringing the needle valve 502 into contact with the valve seat 506 and closing the discharge hole 507, it is possible to improve the drainage of the discharged liquid and to prevent the liquid from dripping when the valve is closed. .

[Sixth Embodiment]
Next, a sixth embodiment of the present invention will be described with reference to FIG.
In the sixth embodiment, the present invention is used for a dispenser valve (dispensing valve) 1E. That is, the first adapter 601 is attached to the drive unit case 2 of the dispenser. A substantially cylindrical second adapter 602 is disposed inside the first adapter 601, and a third adapter 603 is disposed further inside.
The upper end portion of the needle valve 605 is inserted into the through hole 604 formed in the central axis portion of the third adapter 603.

The needle valve 605 is a metal material that includes large-diameter base end portions 605A and 605B and a small-diameter needle portion 605C, and the base end portion 605A is attached to the magnet holder 16 by the magnetic force of the magnet 161. Yes.
Further, a needle packing 606 is disposed between the base end portions 605A and 605B, and seals so that liquid does not leak out from the gap between the through hole 604 and the needle valve 605 to the drive unit case 2 side.
Further, an upper O-ring 607 and a lower O-ring 608 are interposed between the third adapter 603 and the case 2 and between the second adapter 602 and the first adapter 601, respectively, to prevent liquid leakage. .

The upper end portion of the syringe 610 is attached to the first adapter 601. The second adapter 602 is inserted into the upper opening of the syringe 610, and a syringe O-ring 611 is interposed between the second adapter 602 and the inner surface of the syringe 610 to prevent liquid leakage.
A valve seat nozzle 612 having a tapered valve surface is attached to the lower end opening of the syringe 610. The tip (lower end) of the needle portion 605C of the needle valve 605 is disposed so as to be able to contact the valve surface of the valve seat nozzle 612 through the lower end opening of the syringe 610. The discharge hole 613 opened in the valve surface can be closed with the needle valve 605.

  In this embodiment, the syringe 610 storing the liquid to be supplied is attached to the first adapter 601 in advance. When no voltage is applied to the piezoelectric element 19, the displacement enlarging plate 12C is urged downward by the spring 15, the needle valve 605 contacts the valve surface of the valve seat nozzle 612, and the discharge hole 613 is blocked. The valve is closed to remove. Therefore, this valve 1E is also a normally closed type valve.

Next, when a voltage is applied to the piezoelectric element 19, the displacement enlarging plate 12C is fixed and the magnet holder 16 and the needle valve 605 are moved upward by the same action as in the above embodiments, and the needle valve 605 is moved to the valve. The discharge hole 613 opens away from the sheet nozzle 612, and the valve is opened.
On the other hand, when the voltage application of the piezoelectric element 19 is released, the magnet holder 16 and the needle valve 605 move downward, the needle valve 605 contacts the valve seat nozzle 612, and the discharge hole 613, that is, the valve is closed. Since the displacement enlarging plate 12C is also fixed, the needle valve 605 is brought into contact with the valve seat nozzle 612 by the urging force of the spring 15 to close the valve.

  When a voltage is applied to the piezoelectric element 19 and the valve is opened, the liquid in the syringe 610 is discharged from the discharge hole 613. When the voltage application is released and the valve is closed, the liquid discharge is interrupted. Therefore, by controlling the voltage application and release to the piezoelectric element 19, it can function as a dispenser that ejects liquid.

Also in the dispensing valve 1E of this embodiment, the same operational effects as in the above embodiment can be obtained.
Further, since the valve is closed by bringing the needle valve 605 into contact with the valve seat nozzle 612 and closing the discharge hole 613, it is possible to improve the drainage of the discharged liquid and prevent the liquid from dripping when the valve is closed. it can.

In addition, this invention is not limited to the structure of the said Example, The deformation | transformation of the range which can achieve the objective of this invention is included in this invention.
For example, the valve of the present invention is not limited to those described in the above embodiments. For example, as shown in FIG. 18, the present invention may be applied to a mushroom valve (poppet valve) used for an intake valve or an exhaust valve of various engines.
In short, the piezoelectric drive device of the present invention can move the driven body forward and backward, and therefore can be applied to various valves that open and close the valve using such forward and backward drive.

  Further, in each of the above embodiments, a normally closed type valve that closes the valve in a state where no voltage is applied to the piezoelectric elements 17 to 19 is used. However, the valve is not applied to the piezoelectric elements 17 to 19. The piezoelectric drive device of the present invention can also be applied to a normally open type valve that opens the valve. For example, in the diaphragm valves 1 and 1A of the first and second embodiments, the drive device main body 11B of the third embodiment is incorporated, and the valve opening and closing unit is interposed via the magnet holder 16 and the like as in the coil spring 330 of the third embodiment. By incorporating an urging means for urging 202 upward, the valve opening / closing portion 202 is moved upward by the urging means in a state where no voltage is applied to the piezoelectric elements 17 to 19, and the valve is opened. When a voltage is applied to the elements 17 to 19, the valve opening / closing portion 202 may be moved downward to come into contact with the valve surface 37 and the valve may be closed.

  Further, although the push screw 52 for adjusting the position of the guide member 5 is provided, the position adjusting means such as the screw 52 is eliminated by accurately processing and assembling the displacement enlarging plates 12, 12A, 12B, and 12C. Also good. Further, the position adjusting means is not limited to the configuration of the above embodiment, and the position of the guide member 5 with respect to the displacement enlarging plate 12 is changed at the upper ends of the first connecting portion 122 and the connecting portion 142 by deforming the hinge portions 123 and 125. Any portion that can be adjusted according to the amount of deformation or the like when the portion (contact portion) is bent outward and brought into contact with the guide member 5 may be used.

  In the embodiment, the voltage of the first set value applied to the piezoelectric elements 17, 18, and 19 is “0”, but a voltage of a predetermined value may be applied. In short, each voltage value may be set such that the length dimension of the piezoelectric elements 17, 18, and 19 changes between the state where the first set value is applied and the state where the second set value is applied.

  In the above-described embodiment, the driving device main bodies 11 to 11B and the driven body (valve body) are connected so as to be easily detachable using the magnet 161 or the interlocking spring 150. You may do it. However, it is advantageous that maintenance such as cleaning can be easily performed if it can be easily attached and detached as in the above embodiment.

Further, the specific configurations of the displacement enlarging plates 12, 12A, 12B, and 12C in the drive device bodies 11 to 11B are not limited to those exemplified in the above embodiments.
For example, a displacement magnifying plate 12D as shown in FIGS. 19 to 21 may be used as the displacement magnifying plate.
The displacement magnifying plate 12D includes a pair of connecting portions 242 arranged with the piezoelectric element 19 interposed therebetween. A first displacement magnifying mechanism and a second displacement magnifying mechanism are provided at one end (upper end in FIG. 19) and the other end of each connecting portion 242, respectively.
The first displacement enlarging mechanism includes a pair of first hinge portions 223 formed continuously at one end of the connecting portion 242, and a pair of first drive portions 224 formed continuously from the first hinge portion 223. And a pair of second hinge portions 225 formed continuously with each first drive portion 224. An upper end side attachment portion 226 that is a piezoelectric element first end attachment portion is continuously formed on the second hinge portion 225. One end (first end) of the piezoelectric element 19 is attached to the upper end side attaching portion 226 via a spacer 128.

  The second displacement magnifying mechanism includes a pair of third hinge portions 233 formed continuously at the other end of the connecting portion 242 and a pair of second drive portions 234 formed continuously from the third hinge portion 233. , A pair of fourth hinge parts 235 formed continuously with the second drive part 234, a pair of fifth hinge parts 237 successively formed at the tip of each second drive part 234, and a pair of third parts. A drive unit 238 and a pair of sixth hinge portions 239 are provided. Each sixth hinge portion 239 is connected to a mounting portion 240 that is coupled to the driven body. Further, a lower end side attaching portion 236 that is a piezoelectric element second end attaching portion is continuously formed on the fourth hinge portion 235. The other end (second end) of the piezoelectric element 19 is attached to the lower end side attaching portion 236.

In the displacement magnifying plate 12 </ b> D having such a configuration, the total axial dimension of the piezoelectric element 19 to which no voltage is applied, the spacer 128, the upper end side attaching part 226, and the lower end side attaching part 236, and the axial dimension of the connecting part 242. Are substantially the same, and the first hinge portion 223 and the second hinge portion 225, and the third hinge portion 233 and the fourth hinge portion 235 are provided in parallel to each other.
The dimension between the first hinge part 223 and the second hinge part 225 is set longer than the dimension between the third hinge part 233 and the fourth hinge part 235. For this reason, the second displacement magnifying mechanism has higher rigidity than the first displacement magnifying mechanism, and when the piezoelectric element 19 is extended, the first displacement magnifying mechanism is displaced first. .
Further, each of the first driving unit 224 and the second driving unit 234 is extended obliquely outward from a base portion where the hinge units 223, 225, 233, and 235 are joined.

In such a displacement magnifying plate 12D, when a voltage is applied to the piezoelectric element 19 and extended, the first hinge part 223 and the third hinge part 233 serve as fulcrums and the second hinge part 225 as shown in FIGS. Since the fourth hinge portion 235 serves as a power point, the distal ends of the first driving portion 224 and the second driving portion 234 are displaced so as to be inclined outward. At this time, since the dimension between the hinge parts 233 and 235 in the second displacement magnifying mechanism is shorter than the dimension between the hinge parts 223 and 225 in the first displacement magnifying mechanism, the rigidity of the hinge part is the second displacement. The enlargement mechanism is larger than the first displacement enlargement mechanism. For this reason, when the piezoelectric element 19 expands, first, the first drive unit 224 of the first displacement enlarging mechanism tilts as shown in FIG. Therefore, as in the above embodiments, the displacement enlarging plate 12D can be fixed so as not to move in the axial direction by pressing the tip (contact portion) of the first drive unit 224 against the case side.
When the first drive unit 224 comes into contact with the case side, the first displacement magnifying mechanism cannot be deformed any further. Therefore, as shown in FIG. The second drive unit 234 is tilted. Then, since the distance between the tips of the second drive unit 234 increases, the fifth hinge unit 237, the third drive unit 238, the sixth hinge unit 239, and the attachment unit 240 provided between the tips are displaced upward.
Therefore, even when the displacement magnifying plate 12D is used, the same operation as in each of the above embodiments can be performed.

  Since the fifth hinge 237, the third drive 238, and the sixth hinge 239 can be displaced while being substantially linear, the thickness dimension of the third drive 238 is changed to the hinges 237 and 239. It is not necessary to make it thicker. In this case, the hinge portions 237 and 239 and the third drive portion 238 are not substantially distinguished from each other, and the hinge portion is configured as a whole.

Furthermore, the configuration of the displacement magnifying plate is not limited to that described above.
In short, a first displacement enlarging mechanism that expands its displacement as the piezoelectric element expands, and an abutting portion that abuts against the case by the first displacement enlarging mechanism and fixes the displacement enlarging plate so as not to move. And a second displacement enlargement mechanism that enlarges the displacement of the piezoelectric element as it expands. For example, when two piezoelectric elements 17 and 18 are used, the upper side where the piezoelectric element 17 and the contact portion are provided and the lower side where the piezoelectric element 18 and the driven body mounting portion are provided are formed of different plate materials. In addition, the plate materials may be joined and used.

  In the third to fifth embodiments, the spring seat 14 is brought into contact with the displacement magnifying plate. However, the spring seat 14 may be brought into direct contact with the magnet holder 16 as in the first and second embodiments. Conversely, in the first and second embodiments, the spring seat 14 may be brought into contact with the displacement enlarging plate. However, when the spring seat 14 is brought into contact with the displacement magnifying plate, the biasing force of the spring is applied to the hinge portions 137, 139 and the like, so that the spring seat 14 is preferably brought into contact with the driven body side such as the magnet holder 16.

  In the above embodiment, the piezoelectric elements 17, 18, and 19 are controlled by the applied voltage value. For example, a strain gauge is provided at the displacement portion of the displacement expansion plates 12, 12A, and 12B, or the position of the valve body of the valve. It is possible to provide a sensor or the like for detecting the drive state, detect the drive state, and perform feedback control based on the detected value.

Furthermore, the piezoelectric drive device of the present invention is not limited to the driving of the valve as in the above-described embodiments, and can be used as a drive source of the brake device 700 as shown in FIGS.
The brake device 700 is a so-called leading trading shoe type drum brake, and includes a piezoelectric driving device 710, a support plate 720, a pair of brake shoes 730, a spring coil (spring) 740, and a drum 750 that is a rotating body. ing.

One end side of each brake shoe 730 is rotatably supported with respect to the support plate 720 by a fixing pin 731.
Further, the spring coil 740 is stretched over the other end side of each brake shoe 730, and the other end of each brake shoe 730 is attached in a direction close to each other, that is, in a direction in which the interval between the other end is reduced. It is fast.
Further, a guide portion 732 protrudes from the opposing surface of each brake shoe 730, and a friction material (lining) 733 is provided on the outer peripheral surface of the brake shoe 730 facing the drum 750.

The piezoelectric driving device 710 is disposed between the guide portions 732.
The piezoelectric drive device 710 has substantially the same structure as the piezoelectric drive device of the second embodiment.
The lid 4 is formed with a recess into which the guide portion 732 of one brake shoe 730 is inserted. In addition, a holder 711 is attached to the holder attaching portion 140 of the displacement magnifying plate 12A, and a concave portion into which the guide portion 732 of the other brake shoe 730 is inserted is formed in the holder 711.

In the brake device 700 having such a configuration, when no voltage is applied to the piezoelectric element 19, the holder 711 is urged by the internal spring 15 in a direction in which the holder 711 protrudes from the case 2. Since the urging force of the spring 15 is larger than the urging force of the spring coil 740, each brake shoe 730 is pressed against the drum 750, and the friction material 733 is pressed against the inner surface of the drum 750 as shown in FIG. The power is activated and the brake is applied.
On the other hand, when a voltage is applied to the piezoelectric element 19, the holder 711 moves in the direction toward the inside of the case 2 by the action of the displacement enlarging plate 12C. Therefore, the brake shoes 730 are displaced toward each other by the urging force of the spring coil 740, and as shown in FIG. 23, the friction material 733 is separated from the inner surface of the drum 750, and the brake state is released.

According to the brake device 700 having such a configuration, it is possible to provide a brake device that can be used as a leading trading shoe type drum brake and that makes use of drum brake characteristics such as a servo effect (self-boosting effect).
Further, since each brake shoe 730 is pressed against the inner peripheral surface of the drum 750 by the urging force of the spring 15, even if the friction material 733 is worn and the thickness dimension changes, the change is automatically adjusted. Thus, the friction material 733 can be reliably pressed against the drum 750 to obtain a predetermined braking force.
Furthermore, the piezoelectric element 19 consumes electric power only while it is displaced in the expansion / contraction direction, and no current flows and no electric power is consumed while the voltage is continuously applied and the piezoelectric element 19 is maintained in the expanded state. For this reason, even when the voltage is continuously applied to the piezoelectric element 19 and the brake is released, there is no power consumption, and the power consumption can be greatly reduced as compared with the case where the brake shoe 730 is displaced by a solenoid.
Furthermore, since the brake device 700 is a non-excitation type, and is small in size and can reduce power consumption, it is suitable for a brake device in a brake motor, for example. Furthermore, in addition to the brake motor, it can be widely used as a brake device for various rotating bodies such as cars, lifts, and conveyors.

Note that the brake device is not limited to a drum brake, and may be a disc brake. In short, any braking device that can obtain a braking force by pressing a friction member against a rotating body such as a drum or a disk with the piezoelectric driving device of the present invention. Good.
Furthermore, the piezoelectric drive device of the present invention can be used not only as a drive source for the valve and brake device but also as a drive source for various machines. In particular, since a piezoelectric element is used and a certain amount of displacement can be secured by a displacement magnifying mechanism, it is suitable for a drive source of a small device.

It is a longitudinal cross-sectional view which shows the valve | bulb of 1st Embodiment of this invention. It is a top view of the valve of the first embodiment. It is a bottom view of the valve of the first embodiment. It is a plane sectional view of the valve of the 1st embodiment. It is a figure which shows the upper part side of the drive device main body in the said 1st Embodiment. It is a figure which shows the lower part side of the drive device main body in the said 1st Embodiment. It is a figure which shows the drive state at the time of the valve opening in the said 1st Embodiment. It is a figure which shows the drive state at the time of the valve opening in the said 1st Embodiment. It is a longitudinal cross-sectional view which shows the valve | bulb of 2nd Embodiment of this invention. It is a figure which shows the drive state at the time of the valve opening in the said 2nd Embodiment. It is a figure which shows the drive state at the time of the valve opening in the said 2nd Embodiment. It is a longitudinal cross-sectional view which shows the valve | bulb of 3rd Embodiment of this invention. It is a figure which shows the state at the time of the valve closing in the said 3rd Embodiment. It is a figure which shows the drive state at the time of the valve opening in the said 3rd Embodiment. It is a longitudinal cross-sectional view which shows the principal part of 4th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the principal part of 5th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the principal part of 6th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the modification of this invention. It is a figure which shows the displacement expansion board of the other modification of this invention. It is a figure which shows the displacement state of the displacement expansion board of FIG. It is a figure which shows the displacement state of the displacement expansion board of FIG. It is a figure which shows the brake device which is the other modification of this invention. It is a figure which shows the brake device which is the other modification of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,1A ... Diaphragm valve, 1B ... Poppet valve, 1C ... Pinch valve, 1D ... Dispensing valve, 1E ... Dispensing valve, 2, 2B ... Drive part case, 4 ... Cover, 10 ... Piezoelectric drive device, 11, 11A , 11B, 11C ... drive device body, 12, 12A, 12B, 12C, 12D ... displacement expansion plate, 13, 14 ... spring seat, 15 ... spring, 16 ... magnet holder, 17, 18, 19 ... piezoelectric element, 20 ... Diaphragm 37 ... Valve face 121 ... Base end 122 ... First connection 122A ... Upper end 123, 223 First hinge 124, 224 First drive 125, 225 Second hinge 126, upper end side attachment portion, 127, proximal end upper side attachment portion, 129, proximal end lower side attachment portion, 132, second connection portion, 133, 233, third hinge portion, 134, 23 ... 2nd drive part, 135, 235 ... 4th hinge part, 136, 236 ... Lower end side attachment part, 137, 237 ... 5th hinge part, 138, 238 ... 3rd drive part, 139, 239 ... 6th hinge part , 140 ... Holder mounting part, 142 ... Connection part, 161 ... Magnet, 202 ... Valve opening / closing part, 203 ... Diaphragm fitting, 242 ... Connection part, 300 ... Valve seat, 310 ... Valve body, 340 ... Diaphragm, 400 ... tube, 500 ... flow path block, 502,605 ... needle valve, 700 ... brake device, 710 ... piezoelectric drive device, 730 ... brake shoe, 733 ... friction material (lining), 740 ... spring coil (spring), 750 ... drum.

Claims (8)

A case, and a drive device body provided movably in the case,
The drive device body is
First and second piezoelectric elements;
A first displacement magnifying mechanism for enlarging the displacement of the piezoelectric element when the voltage is applied to the first piezoelectric element and expanding the piezoelectric element, and for displacing the piezoelectric element in a direction perpendicular to the extending direction of the piezoelectric element;
A contact portion that moves in a direction perpendicular to the extending direction of the piezoelectric element by the first displacement enlarging mechanism and contacts the inner surface of the case;
A second displacement enlarging mechanism for enlarging the displacement and moving the driven body when the piezoelectric element expands by applying a voltage to the second piezoelectric element;
When a voltage is applied to the first piezoelectric element, the abutting portion abuts against the inner surface of the case via the first displacement enlarging mechanism, and the drive device body is stopped so as not to move with respect to the case.
2. A piezoelectric driving device according to claim 1, wherein when a voltage is applied to the second piezoelectric element, the second displacement magnifying mechanism is displaced and the driven body is moved. A case, and a drive device body provided movably in the case,
The drive device body is
A piezoelectric element;
A first displacement enlarging mechanism for enlarging the displacement of the piezoelectric element when the voltage is applied to the piezoelectric element and expanding the piezoelectric element, and for displacing the piezoelectric element in a direction perpendicular to the extending direction of the piezoelectric element;
A contact portion that moves in a direction perpendicular to the extending direction of the piezoelectric element by the first displacement enlarging mechanism and contacts the inner surface of the case;
A second displacement enlarging mechanism for enlarging the displacement and moving the driven body when a voltage is applied to the piezoelectric element and the piezoelectric element expands;
The second displacement magnifying mechanism is set to have higher rigidity than the first displacement magnifying function,
When the piezoelectric element is extended, the first displacement magnifying mechanism is displaced, the contact portion comes into contact with the inner surface of the case, and the drive device main body is stopped so as not to move with respect to the case.
Further, when the piezoelectric element continues to be extended, the second displacement enlarging mechanism is displaced and the driven body is moved. The piezoelectric drive device according to claim 1,
The drive device body includes an integrally formed displacement magnifying plate, and a first piezoelectric element and a second piezoelectric element attached to the displacement magnifying plate,
The displacement enlarging plate includes a base end portion provided at a substantially central portion in the longitudinal direction, and a first piezoelectric element formed continuously from the base end portion to which the first end portion of the first piezoelectric element is attached. An element first end mounting portion, and a first end portion of the second piezoelectric element, which is continuously formed from the base end portion to the opposite side of the first piezoelectric element first end mounting portion, is attached. Two piezoelectric element first end mounting portions, a pair of first connecting portions extending from the base end portion along the longitudinal direction of the first piezoelectric element and sandwiching the first piezoelectric element, and each first A pair of first drive parts formed continuously from the end of the connecting part via the first hinge part, respectively, and the first drive part continuously formed from the first drive part via the second hinge part. A first piezoelectric element second end mounting portion to which the second end of the piezoelectric element is mounted, and a longitudinal direction of the second piezoelectric element from the base end And a pair of second driving parts formed continuously from the end of each second connecting part via the third hinge part, respectively. A second piezoelectric element second end attaching portion formed continuously from each second driving portion via a fourth hinge portion and having the second end of the second piezoelectric element attached thereto, A pair of third drive parts formed continuously from the end of each second connecting part via the fifth hinge part, and a cover formed continuously from each third drive part via the sixth hinge part. Formed with a drive body mounting portion,
When the first piezoelectric element is extended, the first hinge part, the first driving part, and the second hinge part function as a first displacement enlarging mechanism, and are provided in the first connecting part or the first driving part. Abutting the contacted portion to the inner surface of the case,
When the second piezoelectric element is extended, the third hinge part, the second drive part, the fourth hinge part, the fifth hinge part, the third drive part, and the sixth hinge part serve as a second displacement enlargement mechanism. And a driven body mounting portion that moves in the longitudinal direction of the piezoelectric element. The piezoelectric drive device according to claim 2,
The drive device body is configured to include an integrally formed displacement magnifying plate and a piezoelectric element attached to the displacement magnifying plate,
The displacement magnifying plate is extended along the longitudinal direction of the piezoelectric element and is continuously provided via a first hinge portion from one end portion of each connecting portion and a pair of connecting portions provided across the piezoelectric element. A pair of formed first drive parts, and a piezoelectric element first end attachment in which the first end of the piezoelectric element is attached continuously from each first drive part via a second hinge part And a pair of second drive parts formed continuously from the other end of the connecting part via a third hinge part, and continuously formed from each second drive part via a fourth hinge part. A second end attachment portion of the piezoelectric element to which the second end portion of the piezoelectric element is attached, and a pair of second elements formed continuously from the other end of each of the connecting portions via the fifth hinge portion. 3 driving parts and driven body mounting parts formed continuously from each third driving part via the sixth hinge part Formed with a,
When the piezoelectric element expands, the first hinge portion, the first drive portion, and the second hinge portion function as a first displacement enlarging mechanism, and abutment provided on the connection portion or the first drive portion The part is brought into contact with the inner surface of the case,
When the piezoelectric element further expands, the third hinge portion, the second drive portion, the fourth hinge portion, the fifth hinge portion, the third drive portion, and the sixth hinge portion function as a second displacement enlargement mechanism. And a driven body mounting portion is moved in the longitudinal direction of the piezoelectric element. A piezoelectric driving device according to any one of claims 1 to 4,
A valve body attached to a second displacement enlarging mechanism of the piezoelectric drive device;
A valve seat with which the valve body can come into contact;
A flow path opened and closed by the valve body and the valve seat;
A biasing means for biasing the valve body or the drive device main body in a direction in which the valve body is brought into contact with the valve seat;
Drive control means for controlling the drive of the piezoelectric element,
In a state where the piezoelectric element is not extended, the valve body is brought into contact with the valve seat by the biasing force of the biasing means, and the flow path is closed.
The drive control means applies a voltage to the piezoelectric element to displace the first displacement magnifying mechanism to stop the drive device body from moving relative to a case, and then the second displacement magnifying mechanism. And the valve body is separated from the valve seat against the biasing force of the biasing means to open the flow path. The valve according to claim 5,
The second displacement enlarging mechanism and the valve body are detachably provided by an interlocking biasing means or a magnet set to a biasing force weaker than the biasing force of the biasing means. . A piezoelectric driving device according to any one of claims 1 to 4,
A rotating body,
A friction member provided to be able to be pressed by the piezoelectric driving device with respect to the rotating body;
Drive control means for controlling the drive of the piezoelectric element,
The drive device body is biased in a direction in which the second displacement enlarging mechanism protrudes to the outside of the case by a biasing unit with respect to the case,
The friction member is attached to the second displacement magnifying mechanism;
In a state where no voltage is applied to the piezoelectric element and the piezoelectric element is not extended, the second displacement enlarging mechanism is displaced in a direction in which the second displacement expansion mechanism protrudes outward with respect to the case by the biasing force of the biasing means. The friction member is pressed against the rotating body to generate a braking force,
After the voltage is applied to the piezoelectric element by the drive control means to displace the first displacement enlarging mechanism and the drive device body is stopped so as not to move with respect to the case, the second displacement enlarging mechanism is The brake device according to claim 1, wherein the friction member is separated from the rotating body to release the brake when displaced in a direction toward the inside of the case. The brake device according to claim 7,
The rotating body is composed of a drum,
The friction member is arranged on the inner side of the drum, and one end side is rotatably attached to a support plate, and includes a pair of brake shoes provided with a friction material,
Between each brake shoe, there is provided a spring that moves each brake shoe in a direction in which the friction material of each brake shoe moves away from the drum inner surface,
The piezoelectric drive device is disposed between the other ends of each brake shoe, the second displacement enlarging mechanism is attached to one brake shoe, and the case is attached to the other brake shoe,
In a state where the piezoelectric element is not extended, the second displacement magnifying mechanism is displaced with respect to the case by the urging force of the urging means so as to protrude to the outside. The friction material of the brake shoe is pressed against the inner surface of the drum to generate a braking force,
After the drive control means applies a voltage to the piezoelectric element to displace the first displacement enlarging mechanism and the drive device main body is stopped so as not to move with respect to the case, the second displacement enlarging mechanism is When displaced in a direction toward the inner side of the case, the friction material of each brake shoe is separated from the inner surface of the drum by the spring, and the brake is released.

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