JP4994126B2 - Piezoelectric drive device and liquid discharge device - Google Patents

Description

  The present invention relates to a piezoelectric driving device using a piezoelectric element as a driving source, and a liquid ejection device using the piezoelectric driving device.

Diaphragm pumps and tube pumps that use diaphragms and tubes can be made of synthetic resin for the diaphragms and tubes, so that liquids containing various fillers can be discharged without damaging the liquid to be sent. There is no need to use a sealing material for prevention, and there is an advantage that a structure in which the liquid does not touch the metal is possible, and it is used in a wide range of fields such as chemicals / chemicals, semiconductors, and printing.
In such a pump, a plurality of pressure rods are sequentially reciprocated with respect to the diaphragm or tube to press the diaphragm or tube, or release the pressure to repeat liquid suction, metering, and discharge operations. Is being discharged. In addition, although the use of an air cylinder is also known for driving the pressing rod, it can be driven at a higher speed than the air cylinder drive, and therefore, the one using a cam rotated by a motor is also used. (See Patent Document 1).

JP 2006-29314 A

  The cam drive system can be driven at a higher speed than the air cylinder drive, but it is difficult to make it compact, and there is a problem that the pump becomes large. In particular, in the production line for various products such as LEDs, there is a case where a pump is attached to the tip of the arm of a production robot and the liquid is discharged while being moved. Then, there was a problem that such a request could not be met.

  As described above, the driving device that can reciprocate the driven body such as the pressing rod at high speed and can be configured to be compact and lightweight is not limited to the driving source of the diaphragm pump and the tube pump, but various devices. Conventionally, it has been requested as a drive source for the above.

  An object of the present invention is to provide a drive device that can drive a driven body at high speed and that can be configured to be compact and lightweight, and a liquid discharge device that uses this drive device.

  The piezoelectric drive device of the present invention includes a case and a drive device main body provided to be movable with respect to the case. The drive device main body includes a displacement enlarging plate, an urging means, and the displacement enlarging plate. A piezoelectric element attached thereto, and the displacement enlarging plate is attached to the case so as to be rotatable or slidable with respect to the case and biased by the biasing means, and a voltage is applied to the piezoelectric element. When the piezoelectric element expands when applied, the displacement is expanded, and a displacement expanding portion that is displaced in a direction perpendicular to the extending direction of the piezoelectric element with respect to the main body portion is provided, and a voltage is applied to the piezoelectric element. When not applied, the first driven body is moved by the body portion biased by the biasing means, and when a voltage is applied to the piezoelectric element, the second driven body is moved by the displacement enlarging portion. Body moved, second driven When a voltage is further applied to the piezoelectric element from the state in which the moving body is in contact with the object to increase the displacement of the displacement expanding portion, the main body portion and the first driven body are resisted against the biasing force of the biasing means. It is moved in the direction opposite to the direction moved by the urging force of the urging means.

In the present invention, since the driven body is driven using the piezoelectric element, the size and weight can be reduced to the same extent as when the air cylinder is used, and the servo motor, solenoid, cam, etc. Compared with the case of using, the drive device can be easily downsized.
In addition, the first driven body moved by the main body reciprocates using an urging means that urges the main body and a piezoelectric element that moves the second driven body by displacing the displacement expanding portion. Since movement is possible, when two driven bodies are moved, one piezoelectric element and displacement magnifying portion may be provided in addition to the main body portion. For this reason, the number of piezoelectric elements can be reduced as compared with the case where each driven body is driven by providing a piezoelectric element. In this respect as well, the drive device can be made compact and the cost can be reduced.

Further, since the piezoelectric element can be driven at a high speed, the driven body can be driven at a higher speed than the air cylinder drive.
Furthermore, since the piezoelectric element has a larger generation force than the air cylinder driving, the driven body can be driven reliably.
In addition, since the displacement amount of the piezoelectric element can be easily adjusted by the voltage value applied to the piezoelectric element, the movement amount of the driven body can be adjusted accurately and easily.

  In addition, since the driven body is moved via the displacement enlarging unit, the displacement amount can be increased even when the piezoelectric element has a small expansion amount, and the amount of movement of the driven body is smaller than the displacement amount of the piezoelectric element. Can be greatly increased.

  Here, the piezoelectric element includes a first piezoelectric element and a second piezoelectric element, and the displacement magnifying portion extends in a direction in which the first piezoelectric element extends with respect to the main body as the first piezoelectric element expands. A first displacement enlarging portion that is displaced in an orthogonal direction, and a second displacement enlarging portion that is displaced in a direction orthogonal to the extending direction of the second piezoelectric element with respect to the main body as the second piezoelectric element expands. The first driven body is moved in the main body, the second driven body is moved in the first displacement enlarging section, and the third driven body is moved in the second displacement enlarging section. Is preferred.

  In the present invention, since the first and second piezoelectric elements and the first and second displacement expansion portions are provided in addition to the main body portion, the first to third three covered members are provided. The driving body can be moved. For this reason, compared with the piezoelectric drive device which moves two to-be-driven bodies, more complicated operation | movement can be performed.

  Here, the main body portion includes a base end portion and an arm portion extended from the base end portion, and is formed in a substantially L-shaped plane, and the displacement expanding portion is formed from the base end portion of the main body portion. A first hinge part and a second hinge part which are continuously formed and arranged in parallel to each other, and a piezoelectric element which is continuously formed on the first hinge part and to which the first end of the piezoelectric element is attached An element first end mounting portion; a displacement portion formed continuously with the second hinge portion and extending along the longitudinal direction of the piezoelectric element to the second end side of the piezoelectric element; A third hinge part formed from the displacement part toward the second end side of the piezoelectric element, and a piezoelectric element formed continuously from the third hinge part and to which the second end part of the piezoelectric element is attached The arm portion, the piezoelectric element, and the displacement portion are arranged substantially parallel to each other. It is preferable to be placed.

According to such a configuration, since the displacement enlarging plate is integrally formed, the displacement amount of the drive unit corresponding to the expansion and contraction of the piezoelectric element can be set with high accuracy.
That is, since the extension amount of the piezoelectric element is very small, if there is a pin, a cam, or the like in the middle of the path for transmitting the displacement, the displacement may be sucked by the “back” of that portion. In contrast, in the present invention, the displacement enlarging plate is integrally formed by wire cutting or the like, so that the displacement is not sucked, and the displacement enlarging portion can be reliably displaced by a predetermined amount as the piezoelectric element expands. it can.

  In addition, the main body portion includes a base end portion and an arm portion extended from the base end portion, and is formed in a substantially plane L shape, and the displacement expanding portion is continuous from the base end portion of the main body portion. A first hinge portion and a second hinge portion which are formed in parallel to each other, and a piezoelectric element which is formed continuously with the first hinge portion and to which the first end of the piezoelectric element is attached A second end portion of the piezoelectric element is formed continuously with the first end mounting portion and the second hinge portion, and extends along the longitudinal direction of the piezoelectric element to the second end side of the piezoelectric element. The arm portion, the piezoelectric element, and the displacement portion may be arranged substantially parallel to each other.

Even in such a configuration, since the displacement enlarging plate is integrally formed, the displacement amount of the drive unit corresponding to the expansion and contraction of the piezoelectric element can be set with high accuracy.
Furthermore, since the third hinge portion is not provided, the shape of the displacement enlarging plate is simplified, and processing when the displacement enlarging plate is integrally formed by wire cutting or the like is facilitated.

  Furthermore, each said driven body is comprised with the press member provided so that it could move to the direction and the direction opposite to the direction moved by the urging | biasing force of the said urging | biasing means by the guide block, Urging force releasing means for releasing urging force by the urging means; and urging the pressing member against the guide block in a direction opposite to a direction moved by the urging force of the urging means, It is preferable to include a return spring that moves each pressing member to a position where the tip of each pressing member does not protrude from the end face of the guide block when the urging force by the means is released.

According to such a configuration, since the urging force releasing means and the return spring are provided, when the urging force releasing means releases the urging force of the pressing member that is each driven body, each urging member is urged by the return spring. It moves in the direction opposite to the biasing direction by the means. Each pressing member is moved to a position where the tip (tip in the direction biased by the biasing means) does not protrude from the end face of the guide block that guides the pressing member. For this reason, since the pressing member does not protrude from the end face of the guide block in a state where the urging force is released, the diaphragm can be set flat when the diaphragm is disposed along the end face of the guide block. Accordingly, it is possible to reduce an error in the discharge amount that occurs because a part of the diaphragm is deformed and set. Similarly, when a tube is used as the elastic body, a part of the tube is not deformed and set, and an error in the discharge amount caused by the deformation can be reduced.
Furthermore, when the liquid ejection device is stopped, the urging force releasing means can release the urging force of the pressing member, so that the diaphragm or the tube can be prevented from being always urged by the pressing member, and the diaphragm or the tube can be prevented from being urged. Permanent deformation can be reduced. For this reason, it is possible to extend the period until the diaphragm or tube is replaced, and the replacement cost can be reduced.

  The piezoelectric drive device of the present invention includes a case and a drive device main body provided to be movable with respect to the case. The drive device main body includes a displacement magnifying plate and a piezoelectric element attached to the displacement magnifying plate. The displacement magnifying plate includes a fixed portion fixed to the case, a main body portion continuously provided from the fixed portion via a spring portion, and a piezoelectric element that applies a voltage to the piezoelectric element. When the element is extended, the displacement is enlarged, and a displacement expanding portion that is displaced in a direction perpendicular to the extending direction of the piezoelectric element with respect to the main body portion is provided, and no voltage is applied to the piezoelectric element. In the state, the first driven body is moved by the main body portion biased by the spring portion, and when a voltage is applied to the piezoelectric element, the second driven body is moved by the displacement enlarging portion, From the state where the second driven body is in contact with the object Further, when a voltage is applied to the piezoelectric element to increase the displacement of the displacement expanding portion, the main body portion and the first driven body are moved by the biasing force of the spring portion against the biasing force of the spring portion. It may be characterized by being moved in the opposite direction.

According to such a configuration, since the spring portion is provided on the displacement enlarging plate itself, it is not necessary to separately provide a biasing means such as a coil spring, and the number of parts can be reduced.
Further, when an urging means such as a coil spring is provided, it is necessary to support the displacement enlarging plate so as to be rotatable or slidable with respect to the case. In this case, there are portions that cause sound generation such as a rolling portion and a sliding portion that support the displacement enlarging plate. On the other hand, in the present invention, since the spring portion is formed on the displacement enlarging plate itself, it is possible to reduce the generation of sound by eliminating the rolling portion and the sliding portion, and it is possible to configure a piezoelectric driving device with a small operating noise.

  The liquid ejection device of the present invention is moved by the piezoelectric driving device, a first pressing member that is a first driven body that is moved by the main body of the piezoelectric driving device, and a displacement enlarging unit of the piezoelectric driving device. A second pressing member as a second driven body, and a tube pressed by the first pressing member and the second pressing member are provided.

In such a liquid ejecting apparatus, when a voltage is not applied to the piezoelectric element, the first pressing member, which is the first driven body, is applied to the tube by the urging force of the urging means that urges the main body. The tube is closed by pressing, and the second pressing member, which is the second driven body, does not crush the tube. When a voltage is applied to the piezoelectric element, the second pressing member moves to crush the tube. When a voltage is applied to the second pressing member, the second pressing member squeezes the tube and cannot move any further, so that the reaction force can move the main body and the first pressing member away from the tube.
Therefore, if one of the first pressing member and the second pressing member is an outlet valve of the liquid ejection device and the other is an inlet valve of the liquid ejection device, the liquid is pumped into the tube and the opening and closing of each valve is switched. Thus, a liquid discharge operation can be realized. For example, if the first pressing member is an outlet valve and the second pressing member is an inlet valve, the first pressing member squeezes the tube by the biasing force of the biasing means when no voltage is applied to the piezoelectric element, and the outlet The valve is kept closed, while the second pressing member keeps the inlet valve open. If the liquid is pumped into the tube in this state, the outlet valve is closed, so that the tube on the upstream side (inlet valve side) of the outlet valve swells and stores the liquid. Then, when a voltage is applied to the piezoelectric element to extend the piezoelectric element, and the second pressing member is moved to crush the tube and close the inlet valve, the liquid is partitioned in the expanded tube between the inlet valve and the outlet valve. The Further, when the voltage application to the piezoelectric element is continued and the piezoelectric element is extended, the second pressing member crushes the tube and cannot move any further, so that the main body portion and the first pressing member are biased by the biasing means. In contrast, the outlet valve moves in the direction opposite to the biasing direction, and the outlet valve that has been blocked by the first pressing member is opened. Then, the tube swelled with the liquid tries to return to its original state by its own elastic force, so that the liquid inside is discharged from the discharge valve.
Next, when the voltage application to the piezoelectric element is stopped and the piezoelectric element is reduced to the original state, the first pressing member crushes the tube by the urging force of the urging means, and the outlet valve is closed. Furthermore, since the second pressing member returns to the original position, the tube is opened and the inlet valve is opened.

As described above, the state in which only one pressing member is blocking the tube is changed from the state in which both pressing members are blocking the tube to the state in which only the other pressing member is blocking the tube. Therefore, a liquid ejection apparatus capable of ejecting a small amount of liquid can be configured by combining with liquid feeding.
Since each pressing member is driven by a piezoelectric driving device using a piezoelectric element, high-speed driving is possible, and the liquid ejection device can be easily reduced in size and thickness.

  The liquid ejection device of the present invention is moved by the piezoelectric driving device, a first pressing member that is a first driven body that is moved by the main body of the piezoelectric driving device, and a first displacement enlarging unit of the piezoelectric driving device. A second pressing member that is a second driven body, a third pressing member that is a third driven body that is moved by a second displacement expansion portion of the piezoelectric driving device, the first pressing member, and a second pressing member. A tube or a diaphragm pressed by the pressing member and the third pressing member is provided.

In such a liquid ejection device, in addition to the first pressing member moved by the main body portion and the second pressing member moved by the operation of the first piezoelectric element and the first displacement expanding portion, the second piezoelectric member is used. A third pressing member that is moved by the operation of the element and the second displacement expanding portion can be provided.
Therefore, one of the first pressing member and the second pressing member is an outlet valve that presses and opens and closes the tube and the diaphragm, the other is an inlet valve, and the third pressing member is a tube and a diaphragm between the inlet valve and the outlet valve. If the metering member that changes the metering space defined by each valve by pressing is used, the inlet valve can be opened with the outlet valve closed, and the metering member can be used to expand the metering space so that liquid can be sucked. And if an inlet valve is closed, a liquid will be divided in the measurement space formed between each valve. Next, when the outlet valve is opened and the measuring space is narrowed by pressing the tube or diaphragm with the measuring member, the liquid corresponding to the change is discharged from the outlet valve, thereby realizing the liquid discharging operation.

Also, since the liquid is sucked and discharged by changing the volume of the measuring space by the third pressing member, there is no need to pressurize and supply the liquid, and the liquid discharge device can be used as a tube pump or a diaphragm pump. Can do.
Furthermore, since each of the first to third pressing members is driven by a piezoelectric driving device using a piezoelectric element, high-speed driving is possible and the liquid ejection device can be easily downsized. Furthermore, since the piezoelectric element and the displacement enlarging plate can be formed thin, the liquid ejection device itself can also be thinned, and when a plurality of liquid ejection devices are arranged side by side in the production line, the interval between the liquid ejection devices is reduced. it can.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows a liquid ejection apparatus 1 according to this embodiment. In the following description, for the sake of convenience, the upper side of FIG. 1 will be described as the upper side, and the lower side will be the lower side. However, the direction of use of the liquid ejection device 1 is not limited to that of FIG. Or you may use it upside down.

  The liquid ejection device 1 is a diaphragm pump, and includes a piezoelectric drive device 2 of the liquid ejection device 1 and a pump unit 3.

[Configuration of Piezoelectric Drive Device]
The piezoelectric driving device 2 includes a driving unit case 4, a pump case 5 screwed to the driving unit case 4, and a driving device main body 6.
The drive device main body 6 includes a displacement magnifying plate 10 built in the cases 4 and 5, an urging means 15, and a first piezoelectric element 17 and a second piezoelectric element 18 fixed to the displacement magnifying plate 10. ing.

[Configuration of displacement expansion plate]
The displacement enlarging plate 10 is composed of a thin plate material that can be bent (elastically deformed), such as maraging steel, stainless steel, invar material, and the like, by cutting one plate material into a predetermined shape described below by wire cutting or the like. It is manufactured.
Further, as shown in FIG. 2, the displacement enlarging plate 10 supports the case 4, 5 by supporting the shaft 11 provided on the displacement enlarging plate 10 with a bearing 12 attached to the pump case 5. It is arranged so that it can rotate freely. The bearing 12 is attached to the pump case 5 so as not to drop off by a stop ring (not shown).

The displacement magnifying plate 10 includes a main body 110, a first displacement magnifying part 120, and a second displacement magnifying part 130.
The main body 110 includes a base end portion 111 provided on an upper portion of the displacement magnifying plate 10 and an arm portion 112 extending downward from one end side (drive unit case 4 side) of the base end portion 111. Are formed in a substantially L-shaped plane. The shaft 11 is provided on the other end side (pump case 5 side) of the base end portion 111.

The first displacement enlargement section 120 includes a first hinge section 121, a second hinge section 122, a piezoelectric element first end mounting section 123, a displacement section 124, a third hinge section 125, and a piezoelectric element second end. Part attaching part 126 is provided.
The first hinge part 121 and the second hinge part 122 are formed so as to protrude downward from the lower surface of the base end part 111 and are arranged in parallel to each other.

The piezoelectric element first end attaching portion 123 is formed continuously with the first hinge portion 121. A first end (upper end) in the axial direction of the first piezoelectric element 17 is attached to the first end attachment portion 123 of the piezoelectric element.
The displacement part 124 is formed continuously with the second hinge part 122 and extends along the longitudinal direction (vertical direction) of the first piezoelectric element 17 and to the second end part (lower end) side of the first piezoelectric element 17. It has been extended. That is, the displacement portion 124 is extended in the horizontal direction (first piezoelectric element 17 at a position below the second end portion of the first piezoelectric element 17 and the extension portion 1241 formed to extend downward from the second hinge portion 122. 1), and a planar shape is formed in an approximately L shape as shown in FIG. 1.

The third hinge portion 125 is formed to protrude from the connecting portion 1242 of the displacement portion 124 toward the second end portion side of the first piezoelectric element 17.
The piezoelectric element second end attaching portion 126 is formed continuously with the third hinge portion 125, and the second end side of the first piezoelectric element 17 is attached thereto.
A spacer 127 is interposed between the attachment portion 126 and the first piezoelectric element 17. Moreover, since each hinge part 121,122,125 is made into the narrow part whose width dimension is small compared with other parts, such as the displacement part 124, it is comprised so that elastic deformation is possible when stress is added.

The second displacement magnifying unit 130 has the same structure as the first displacement magnifying unit 120 except that it is provided at a position one step lower than the first displacement magnifying unit 120.
That is, the second displacement enlargement unit 130 includes the first hinge part 131, the second hinge part 132, the piezoelectric element first end attaching part 133, the displacement part 134, the third hinge part 135, and the piezoelectric element first. Each of which includes a first hinge part 121, a second hinge part 122, a piezoelectric element first end part attachment part 123, and a displacement part. 124, the third hinge part 125, and the piezoelectric element second end attaching part 126. Therefore, the displacement part 134 is also formed in a substantially plane L shape including the extension part 1341 and the connecting part 1342.

  Also in the second displacement enlargement unit 130, the first end of the second piezoelectric element 18 is attached to the piezoelectric element first end attaching part 133, and the piezoelectric element second end attaching part 136 is interposed via the spacer 137. A second end of the second piezoelectric element 18 is attached.

Accordingly, the arm part 112 of the main body part 110, the displacement part 124 (extension part 1241) of the first displacement enlargement part 120, the displacement part 134 (extension part 1341) of the second displacement enlargement part 130, the first piezoelectric element 17, the second. The piezoelectric elements 18 are arranged along the vertical direction, and are arranged substantially parallel to each other.
A connector 8 for connecting a control device (not shown) for driving and controlling the piezoelectric elements 17 and 18 is provided at the upper end of the pump case 5.

[Configuration of biasing means]
As shown in FIG. 1, the biasing means 15 includes a lower spring case 151, an upper spring case 152, a connecting member 153, a screw spring seat 154, an adjustment spring seat 155, a distance adjustment screw 156, a coil spring 157, and a spring pressing member 158. Yes.
The lower spring case 151 and the upper spring case 152 are attached to the case 4 by, for example, screwing a fixing screw into the drive unit case 4 from the upper spring case 152 via the lower spring case 151.
The connecting member 153 is provided so as to be slidable in the vertical direction within the lower spring case 151. An engaging groove 153A is formed in the connecting member 153, and the engaging groove 153A is engaged with a pin 113 provided on the base end portion 111 of the displacement enlarging plate 10.

  The coil spring 157 is disposed between the screw spring seat 154 and the adjustment spring seat 155. Further, the distance between the screw spring seat 154 and the adjustment spring seat 155 is such that the height of the screw spring seat 154 is determined by a nut 159 provided on the lower side of the screw spring seat 154 and a distance adjustment screw 156 screwed into the nut 159. It is adjusted by adjusting the position. The lower end of the distance adjusting screw 156 is in contact with the connecting member 153.

  A parallel pin 158A is attached to the spring pressing member 158. On the other hand, in the upper spring case 152, a groove through which the parallel pin 158A can be inserted is formed continuously from the upper end of the upper spring case 152. Accordingly, the spring pressing member 158 is inserted from the upper side of the upper spring case 152 while the parallel pin 158A is inserted through the groove portion, and then the spring pressing member 158 is rotated by 90 degrees, thereby causing the parallel pin 158A to rotate. The spring pressing member 158 is configured to be attached to the upper spring case 152 by being engaged with the upper flange 152.

Accordingly, when the spring pressing member 158 is rotated 90 degrees from the state shown in FIG. 1 and removed from the upper spring case 152, the adjustment spring seat 155 can be moved upward, and the interval between the spring seats 154 and 155 is widened. Thus, the urging force applied to the main body 110 is released.
On the other hand, when the spring pressing member 158 is attached to the upper spring case 152 as shown in FIG. 1, the interval between the spring seats 154 and 155 is reduced, so that the urging force corresponding to the interval is applied by the coil spring 157 via the connecting member 153. Added to the main body 110.
The biasing force at this time is adjusted by turning the distance adjusting screw 156 to move the screw spring seat 154 up and down and adjusting the distance between the spring seats 154 and 155 when the spring pressing member 158 is mounted. Is done.

By the urging means 15 having the above-described configuration, the displacement enlarging plate 10 is urged to rotate clockwise in FIG.
In addition, biasing force releasing means that includes the spring pressing member 158 and releases the biasing force of the biasing means 15 is configured.

[Configuration of pump section]
On the other hand, the pump case 5 is provided with a pump unit 3 driven by the piezoelectric driving device 2. The pump case 5 is formed with an opening that opens to the outside of the case 5, and a guide block 20 is inserted into the opening. The guide block 20 is formed with three through holes, and cylindrical guide members 21, 22, and 23 are arranged in the respective through holes.
The guide block 20 is fixed with a screw 25 screwed into the pump case 5 via a height adjustment shim 24.

The first to third pressing members 31, 32, and 33 are inserted into the guide members 21, 22, and 23, respectively.
Each pressing member 31, 32, 33 includes pressing rods 311, 321, 331 and rod receivers 312, 322, 332 attached to the end portions of the pressing rods 311, 321, 331.
Return springs 313, 323, and 333 are interposed between the guide members 21, 22, 23 and the rod receivers 312, 322, and 332, respectively.

The first pressing member 31 is in contact with the lower end of the side surface of the arm portion 112 in the main body 110 of the displacement magnifying plate 10 by the return spring 313. Accordingly, the first pressing member 31 is moved back and forth in conjunction with the rotation of the arm portion 112, that is, the main body portion 110.
The second pressing member 32 is in contact with the lower end of the side surface of the displacement portion 124 of the first displacement expansion portion 120 of the displacement expansion plate 10 by the return spring 323. Accordingly, the second pressing member 32 is moved back and forth in conjunction with the displacement of the displacement portion 124, that is, the first displacement enlargement portion 120.
Similarly, the third pressing member 33 is in contact with the lower end of the side surface of the displacement portion 134 in the second displacement expansion portion 130 of the displacement expansion plate 10 by the return spring 333. Accordingly, the third pressing member 33 is moved back and forth in conjunction with the displacement of the displacement portion 134, that is, the second displacement enlargement portion 130.
The spring force of the coil spring 157 of the biasing means 15 is made larger than the total spring force of the return springs 313, 323, 333, and the return springs 313, 323, 333 affect the bias of the biasing means 15. It is not given.

The lower end of the arm portion 112 rotates about the shaft 11 of the displacement magnifying plate 10 as the rotation center, but the rotation angle is slight and the lower end of the arm portion 112 is away from the shaft 11. The movement of the lower end of the arm portion 112 can be regarded as a movement in a substantially horizontal direction. Further, the end surface of the rod receiver 312 that comes into contact with the arm portion 112 is a curved surface and is configured to be in point contact with the arm portion 112.
Therefore, even if the movement locus of the lower end of the arm portion 112 is an arc, the first pressing member 31 is linearly moved in the horizontal direction along the guide member 21.

Similarly, the lower ends of the displacement portions 124 and 134 are also moved in an arc shape with the second hinge portions 122 and 132 as fulcrums, but the rotation angle is slight and the lower ends of the displacement portions 124 and 134 Is away from the second hinges 122 and 132, the movement of the lower ends of the displacement parts 124 and 134 can be regarded as a movement in a substantially horizontal direction (a direction perpendicular to the vertical direction in which the piezoelectric elements 17 and 18 expand and contract). . The end surfaces of the rod receivers 322 and 332 that are in contact with the displacement portions 124 and 134 are configured to be curved so as to be in point contact with the displacement portions 124 and 134.
Therefore, even if the movement locus of the lower ends of the displacement portions 124 and 134 is an arc, the second pressing member 32 and the third pressing member 33 are linearly moved along the guide members 22 and 23 in the horizontal direction.

A flow path block 40 is attached to the pump case 5. A diaphragm 50 is interposed between the flow path block 40 and the guide block 20.
As shown in FIG. 6, the flow path block 40 is formed in a substantially rectangular parallelepiped shape, and a case contact surface 41, a case insertion surface 42, and a recess formation surface 43 are formed on the surface facing the guide block 20. . The case insertion surface 42 is formed so as to protrude from the case contact surface 41, and the recess forming surface 43 is formed so as to protrude from the case insertion surface 42.

Three concave portions 431 to 433 arranged in a line in the vertical direction are formed on the concave portion forming surface 43. Furthermore, the groove | channel 444 which connects each recessed part 431-433 is formed. In this embodiment, since the groove 444 is formed by milling, the bottom surface of the groove 444 is formed deeper than the central recess 433.
In addition, a suction flow path 441 communicating with the liquid suction port 44 formed on the upper end surface of the flow path block 40 is opened in the recess 432. On the other hand, in the recess 431, a discharge channel 451 communicating with the liquid discharge port 45 formed on the lower end surface of the channel block 40 is opened.
In the present embodiment, as shown in FIG. 1, a syringe holder 442 for attaching a syringe filled with a liquid is attached to the liquid suction port 44. A liquid discharge nozzle 452 is attached to the liquid discharge port 45.

  Furthermore, a concave portion 47 is formed on the outer peripheral surface 46 facing the respective surfaces 41 to 43 of the flow path block 40. As shown in FIG. 1, a push bush 471 and a washer 472 are disposed in the recess 47 and are fixed by a stop ring (not shown).

In addition, as shown in FIGS. 7 to 9, two side plates 60 are disposed opposite to and fixed to the pump case 5. The flow path block 40 is disposed between the side plates 60. Each side plate 60 has an opening 61 formed therein.
In the opening 61, a stay 63 screwed to the block mounting screw 62 is disposed. The stay 63 has a substantially rectangular plane shape, and its short side is formed in an arc shape. The openings 61 of the side plates 60 are formed so as to be displaced in the vertical direction so that the stay 63 can be removed from the openings 61 when the block mounting screw 62 is rotated.
The tip of the block mounting screw 62 is configured to be fitted into the hole of the push bush 471.

Therefore, with the case insertion surface 42 of the flow path block 40 inserted into the opening of the pump case 5, the tip of the block mounting screw 62 is inserted into the hole of the bush 471, and the block mounting screw 62 is further rotated. By disposing the stay 63 in the opening 61 of each side plate 60, the flow path block 40 can be attached to the pump case 5.
Conversely, if the block mounting screw 62 is rotated to remove the stay 63 from the opening 61 of each side plate 60 and the block mounting screw 62 is pulled out from the side plate 60 and removed from between the side plates 60, the flow path block 40 is removed from the pump case 5. It can be easily removed.

The diaphragm 50 is made of elastically deformable rubber (synthetic rubber, natural rubber) or the like, and has the same planar shape as the case insertion surface 42. The diaphragm 50 is sandwiched between the guide block 20 and the flow path block 40.
In particular, since the gap between the recess forming surface 43 protruding from the case insertion surface 42 and the guide block 20 is the narrowest, the diaphragm 50 is pressed against and closely adhered to the recess forming surface 43.
Therefore, by changing the thickness dimension of the height adjustment shim 24, the distance between the guide block 20 and the recess forming surface 43 can be adjusted, and the adhesion force of the diaphragm 50 to the recess forming surface 43 can be easily set. it can.

The tip of each pressing rod 311, 321, 331 is formed in a spherical shape according to the recesses 431-433, and the diaphragm 50 is moved by moving each pressing rod 311, 321, 331 toward the flow path block 40. When pressing the diaphragm 50, the diaphragm 50 is configured to be in close contact with the inner surfaces of the respective recesses 431-433.
That is, when the diaphragm 50 is pressed by the pressing rod 311, the diaphragm 50 comes into close contact with the concave portion 431, and the discharge channel 451 and the groove 444 are blocked and do not communicate with each other. Accordingly, the outlet valve is closed.
Further, when the diaphragm 50 is pressed by the pressing rod 321, the diaphragm 50 comes into close contact with the concave portion 432, and the space between the suction flow path 441 and the groove 444 is blocked so as not to communicate with each other. Accordingly, the inlet valve is closed.
In addition, since the diaphragm 50 is elastically deformed by pressing by the pressing rods 311, 321, and 331, when the pressing is released, the diaphragm 50 returns to the original state, that is, the state away from the recesses 431 to 433.

Further, when the diaphragm 50 is pressed by the pressing rod 331, the volume of the measurement space (measurement chamber) defined by the recess 433 and the diaphragm 50 is reduced. Accordingly, the liquid in the concave portion 433 moves through the groove 444.
Accordingly, the pump drive can be realized by operating the pressing members 31, 32, 33.

[Description of operation]
Next, the operation of the liquid ejection apparatus 1 will be described. In the following description of the operation, FIGS. 10 to 16 will also be used. However, FIGS. 12 to 16 schematically illustrate the movement of each member with a larger amount of movement than in actuality. It is described.
In the present embodiment, the liquid discharge device 1 is driven by controlling the driving of the piezoelectric elements 17 and 18 by a control device (not shown) connected via a connector 8 provided at the upper end of the pump case 5. . Here, the control device is configured to be able to apply a voltage from the first set value for the first piezoelectric element to the second set value for the first piezoelectric element to the first piezoelectric element 17. 18, a voltage from the first set value for the second piezoelectric element to the second set value for the second piezoelectric element can be applied. Further, in the present embodiment, each first set value is set to a voltage value “0”, and the second set value is set according to the piezoelectric elements 17 and 18 to be used and the displacement amount required for the piezoelectric elements 17 and 18. ing.

In addition, the piezoelectric elements 17 and 18 have a thermal expansion coefficient of “0” or a negative numerical value. For this reason, the spacers 127 and 137 made of a material such as aluminum having a large thermal expansion coefficient are sandwiched between the mounting portions 126 and 136 and the piezoelectric elements 17 and 18, and the temperature changes so that the piezoelectric elements 17 and 18 Even if the length changes, the change is compensated by the change in the length of the spacers 127 and 137, and the length of the piezoelectric elements 17 and 18 added with the spacers 127 and 137 is almost constant regardless of the temperature change. In order to reduce the influence of temperature changes.
In order to cope with the temperature change as described above, the piezoelectric elements 17 and 18 and the spacers 127 and 137 need to be maintained at the same temperature. Therefore, the gaps between the piezoelectric elements 17 and 18 and the spacers 127 and 137 and the displacement expanding plate 10 are filled with a heat transfer material such as silicon so that the piezoelectric elements 17 and 18 and the spacers 127 and 137 have the same temperature. It is devised to be maintained.

[Origin state]
Before starting the operation, that is, when the liquid ejection device 1 is stopped (origin state), the control device does not apply a voltage to the piezoelectric elements 17 and 18. In other words, the control device applies the voltage of the first set value to the piezoelectric elements 17 and 18, but in this embodiment, the first set value is the voltage value “0”, so that the drive signal is not input. In this state, as shown in FIGS. 1 and 12, the hinge portions 121, 122, 125, 131, 132, and 135 are configured not to be deformed.
In this state, the displacement magnifying plate 10 is urged clockwise in FIG. 1 by the urging force of the urging means 15, and the arm portion 112 of the main body portion 110 rotates in the clockwise direction to cause the first pressing. The member 31 presses the diaphragm 50. For this reason, the diaphragm 50 is brought into close contact with the recess 431, and the outlet valve is closed.

At this time, the second pressing member 32 and the third pressing member 33 are arranged at positions where the diaphragm 50 is not pressed, the inlet valve is opened, and the measuring chamber formed between the recess 433 and the diaphragm 50 is a predetermined one. The volume of is secured.
That is, in the liquid ejection apparatus 1 according to the present embodiment, when the voltage is not applied to the piezoelectric elements 17 and 18, the outlet valve is closed by the biasing force of the biasing means 15, and the inlet valve is opened and metered. The liquid can be supplied to the chamber.

[Weighing process]
Next, the control device applies a preset voltage to the first piezoelectric element 17. When a predetermined voltage is applied to the first piezoelectric element 17, the first piezoelectric element 17 expands by a dimension corresponding to the applied voltage.
When the longitudinal dimension of the first piezoelectric element 17 is increased, the first piezoelectric element 17 is separated from the attachment parts 123 and 126 to which the piezoelectric element 17 is attached, but each of the attachment parts 123 and 126 includes the hinge parts 121, 122, 125 and the displacement part 124. Therefore, the hinge portions 121, 122, and 125 are elastically deformed, and the displacement portion 124 and the piezoelectric element 17 are inclined so that the lower end side moves to the displacement portion 124 side, that is, the second pressing member 32 side. For this reason, as shown in FIGS. 10 and 13, the second pressing member 32 moves to the diaphragm 50 side, brings the diaphragm 50 into close contact with the recess 432, and closes the inlet valve.
Accordingly, since both the outlet valve and the inlet valve are closed, the liquid in the measuring chamber is also partitioned from the liquid supply side and the discharge side. For this reason, the liquid is measured according to the volume of the measuring chamber.

[Valve switching process]
Further, the control device continues to apply a voltage to the first piezoelectric element 17. As a result, when the first piezoelectric element 17 is further extended, the second pressing member 32 is already pressed by the diaphragm 50 and cannot move further to the diaphragm 50 side. The entire displacement enlarging plate 10 moves against the force in the counterclockwise direction, that is, the direction opposite to the direction in which it is moved by the biasing force of the biasing means 15.
Therefore, as shown in FIGS. 11 and 14, the first pressing member 31 moves in a direction away from the diaphragm 50, and the diaphragm 50 is separated from the recess 431, so that the outlet valve is opened. Accordingly, since the inlet valve is closed and the outlet valve is opened, the valve switching operation is performed.

[Discharge process]
Next, the control device applies a predetermined voltage to the second piezoelectric element 18 while applying a voltage to the first piezoelectric element 17. Then, the second piezoelectric element 18 expands according to the applied voltage, and with this operation, the hinge parts 131, 132, 135 are elastically deformed, and the lower end side of the displacement part 134 and the piezoelectric element 18 is on the displacement part 134 side. That is, it inclines so that it may move to the 3rd press member 33 side. For this reason, as shown in FIG. 15, the 3rd press member 33 moves to the diaphragm 50 side, and the volume of the measurement space between the diaphragm 50 and the recessed part 433 reduces with the movement. Then, the liquid partitioned in the measuring space moves to the concave portion 431 side through the groove 444 because the inlet valve is closed and only the outlet valve is opened. The liquid is discharged from the nozzle 452 through the nozzle 45.
Since the discharge amount is adjusted by the change in volume of the measurement space, that is, the movement amount of the third pressing member 33, it can be easily controlled by controlling the voltage applied to the second piezoelectric element 18.

[Valve switching & intake process]
When the discharge of a predetermined amount of liquid is completed, first, the voltage application to the first piezoelectric element 17 is stopped, and the piezoelectric element 17 is returned to the original length dimension. Then, since the displacement part 124 moves counterclockwise, the displacement magnifying plate 10 is rotated clockwise by the urging force of the urging means 15 correspondingly.
As the displacement enlarging plate 10 is rotated in the clockwise direction, as shown in FIG. 16, the first pressing member 31 is moved and pressed toward the diaphragm 50, and the outlet valve is closed. Even after the outlet valve is closed, the displacement portion 124 is displaced counterclockwise, and the second pressing member 32 moves away from the diaphragm 50. Therefore, the diaphragm 50 is separated from the recess 432, and the inlet valve is opened. It is. Accordingly, the outlet valve is changed from open to closed, and the inlet valve is changed from closed to open, so that the valves are switched.

Further, the control device stops the voltage application to the second piezoelectric element 18 in accordance with the timing when the outlet valve is closed. Then, the second piezoelectric element 18 also returns to its original length dimension, and the third pressing member 33 moves away from the diaphragm 50 as the displacement portion 134 is displaced counterclockwise. Then, the diaphragm 50 that has been pressed by the third pressing member 33 is separated from the recess 433, and the volume of the measurement space is increased. At this time, as described above, since the inlet valve is also switched from closed to open, the liquid is sucked from the liquid suction port 44 into the concave portion 433, that is, into the measurement space as the third pressing member 33 moves.
And each member returns to the origin position shown in FIG.1 and FIG.12.

By repeating the above operation, a predetermined amount of liquid is discharged. The liquid discharge amount can be accurately controlled by the extension amount of the second piezoelectric element 18, that is, the applied voltage value.
In order to eliminate the voltage application to the piezoelectric elements 17 and 18, the terminals for applying a voltage to the piezoelectric elements 17 and 18 may be short-circuited and discharged.

Note that when a voltage is applied to the first piezoelectric element 17 and the displacement magnifying plate 10 moves counterclockwise, a voltage may or may not be applied to the second piezoelectric element 18. If no voltage is applied, the third pressing member 33 is also moved in a direction away from the diaphragm 50, similarly to the first pressing member 31. For this reason, when a voltage is applied to the second piezoelectric element 18 and the third pressing member 33 is moved to the diaphragm 50 side to discharge the liquid, the discharge may be slightly delayed.
Therefore, in order to discharge the liquid without delay, when the voltage is applied to the first piezoelectric element 17 and the displacement magnifying plate 10 moves counterclockwise, the third pressing member 33 of the third pressing member 33 is rotated. A voltage is applied to the second piezoelectric element 18 to cancel the movement amount, and the third pressing member 33 is moved to the diaphragm 50 side, and the position of the third pressing member 33 with respect to the diaphragm 50 is controlled to be constant. Also good.

  Further, when the liquid ejection is completed by the movement of the third pressing member 33, the voltage application to the first piezoelectric element 17 is controlled to reduce the length of the first piezoelectric element 17, and the urging force of the urging means 15. The displacement magnifying plate 10 may be rotated clockwise to move the first pressing member 31 so that the outlet valve is closed at the same time.

Furthermore, in the above description, as shown in FIG. 14, after the valve is switched, a voltage is applied to the second piezoelectric element 18 to move the third pressing member 33 to discharge the liquid, and the second piezoelectric element 18. The amount of discharge was adjusted by controlling the amount of movement of the third pressing member 33 with the voltage value applied to the.
On the other hand, the liquid discharge amount may be adjusted by adjusting the time (timing) from when the voltage is applied to the first piezoelectric element 17 to when the voltage is applied to the second piezoelectric element 18.
That is, immediately after the voltage is applied to the first piezoelectric element 17 and the second pressing member 32 starts to move, if the voltage is applied to the second piezoelectric element 18 and the third pressing member 33 is moved, the second pressing member 33 is moved. Before the inlet valve is closed by the member 32, the third pressing member 33 presses the diaphragm 50, and the volume of the measuring space is reduced. For this reason, the amount of liquid partitioned between the valves when the inlet valve is closed is smaller as the time from when the voltage is applied to the first piezoelectric element 17 to when the voltage is applied to the second piezoelectric element 18 is shorter. Become. Therefore, the discharge amount of the liquid can be adjusted by these voltage application timings.
In this case, when the inlet valve is closed and the outlet valve is opened instead, the diaphragm 50 in the measurement space portion is pushed by the third pressing member 33. Therefore, the liquid in the measurement space is immediately discharged from the nozzle 452 through the discharge flow path 451 and the discharge port 45. Accordingly, it is possible to prevent the liquid from being sucked back from the nozzle 452 due to the negative pressure when the outlet valve is opened.

[maintenance]
In order to change the type of liquid supplied via the liquid ejection apparatus 1 or when the liquid flow path is washed, such as when one day of work is completed, the block 63 is rotated to rotate the stay 63. The flow path block 40 and the diaphragm 50 may be removed from the pump case 5 by removing them from the openings 61 of the side plates 60. In this embodiment, since only the flow path block 40 and the diaphragm 50 are in contact with the liquid, if these are removed and cleaned, other parts do not need to be disassembled and maintenance work can be easily performed. it can.
The replacement of the diaphragm 50 can be easily performed by the same operation. Further, when replacing the diaphragm 50 with a different thickness dimension, the distance between the guide block 20 and the flow path block 40 can be adjusted easily by replacing the height adjusting shim 24 as appropriate. Can do.

According to this embodiment, there are the following effects.
(1) Since the diaphragm 50 is driven using the piezoelectric elements 17 and 18 to discharge the liquid, the liquid discharge apparatus 1 can be reduced in size, weight, and thickness. That is, the liquid ejection device 1 can be easily made smaller, lighter, and thinner than when a drive mechanism such as a servo motor, solenoid, or cam is employed.
Therefore, when using the liquid discharge apparatus 1 of the present embodiment for discharging adhesives and various pastes in various product production lines, it can be attached to a robot arm and moved at high speed and high acceleration. The tact time of the production line can be shortened and it can contribute to productivity improvement. Furthermore, even when a plurality of liquid ejection devices 1 are arranged side by side, the arrangement space can be reduced.

(2) Since the piezoelectric elements 17 and 18 can be driven at a high speed, for example, the discharging operation can be performed 10 to 100 times or more per second, and the liquid discharging operation can be realized at a higher speed than the air cylinder driving. Furthermore, since the piezoelectric elements 17 and 18 generate a larger force than that of air cylinder driving, even if the nozzle 452 is thinned and the resistance is increased, the liquid can be discharged and discharged. For this reason, for example, even 0.01 microliters of water can be blown cleanly, and a stable operation can be realized.
In addition, since the operation of each pressing member 31, 32, 33 can be controlled by voltage control to each piezoelectric element 17, 18, at the end of the ejection process by voltage application to the second piezoelectric element 18, the first piezoelectric element 17. It is also possible to easily control the application of the voltage to the valve so as to simultaneously move the first pressing member 31 by the biasing means 15 and simultaneously close the outlet valve. And by performing such control, it is possible to improve the drainage of the discharged liquid, to cleanly discharge the liquid, to improve the accuracy of the discharge amount and to realize a stable discharge operation, and even a very small amount of liquid can be discharged. .

(3) The liquid amount of the discharge liquid can be easily changed by adjusting the amount of movement of the third pressing member 33 in the discharge process by the voltage value applied to the second piezoelectric element 18. For this reason, even during the discharge operation, the discharge amount for each discharge operation can be automatically adjusted. Therefore, for example, in the step of attaching a plurality of electronic components on the substrate, in order to apply a different amount of adhesive for each mounting location of each electronic component, when changing the amount of liquid discharged on the substrate, In a production line in which a plurality of products are sent in a mixed manner, even when the amount of liquid discharged must be changed for each product, it is possible to provide a liquid discharge apparatus 1 that can be easily handled and is easy to use.

(4) The driving of the second pressing member 32 and the third pressing member 33 is controlled by the operation of the two piezoelectric elements 17 and 18, and the displacement enlarging plate 10 that supports the piezoelectric elements 17 and 18 is biased by the biasing means 15. The displacement enlarging plate 10 is attached by energizing the first pressing member 31 to the diaphragm 50 side by urging in the clockwise direction and extending the piezoelectric element 17 even after the second pressing member 32 presses the diaphragm 50. It rotates counterclockwise against the urging force of the urging means 15 and the first pressing member 31 moves away from the diaphragm 50 to control the driving of the first pressing member 31.
Thus, in the present embodiment, the displacement enlarging plate 10 is rotatably provided with respect to the cases 4 and 5 by the urging means 15, and the first pressing member 31 is pressed against the diaphragm 50 in the middle of the stroke, By utilizing the reaction force, it is possible to control the driving of the three members (first to third pressing members 31, 32, 33) only by controlling the driving of the two piezoelectric elements 17, 18. Therefore, there is no problem that the arrangement and drive control of the piezoelectric elements are complicated as in the case where the three members are driven by three piezoelectric elements, and the manufacturing cost of the liquid ejection apparatus 1 can be reduced.
In addition, since the piezoelectric elements 17 and 18 are inclined with the displacement parts 124 and 134 when the piezoelectric elements 17 and 18 are expanded by voltage application, the first displacement enlargement part 120 and the second displacement enlargement part. The configuration of 130 can be made very simple, manufacturing is easy, and cost can be reduced.

(5) Since the displacement enlarging plate 10 is rotated about the shaft 11, the positioning accuracy can be easily improved and the assemblability can be improved as compared with the case of sliding.

(6) Since the displacement enlarging plate 10 to which the piezoelectric elements 17 and 18 are fixed is integrally formed, the displacement amounts of the displacement portions 124 and 134 corresponding to the expansion and contraction of the piezoelectric elements 17 and 18 can be set with high accuracy. For this reason, the movement amount of each of the first to third pressing members 31, 32, 33 can be set with high accuracy, and even a very small amount of liquid can be discharged with high accuracy.

(7) Since the liquid ejection device 1 is set to the origin state (stop state) when the voltage applied to the piezoelectric elements 17 and 18 is set to “0”, the piezoelectric elements 17 and 18 are stopped while the operation is stopped. Does not generate heat and the temperature does not rise. For this reason, it is possible to prevent the displacement of the displacement of the piezoelectric elements 17 and 18 due to the influence of the temperature change, and it is possible to improve the accuracy of the displacement of the piezoelectric elements 17 and 18, that is, the accuracy of the liquid discharge amount.

(8) In this embodiment, since the liquid discharge amount is set only by the stroke of the third pressing member 33, the accuracy of the discharge amount is affected even if the cases 4, 5, etc. expand due to the outside air temperature or the like. In addition, a liquid amount with high accuracy can be discharged even with a very small amount.

(9) In order to eject a high-viscosity liquid at high speed, it is necessary to extrude the liquid at a high pressure. However, since the mechanical driving force of the piezoelectric elements 17 and 18 is used as the driving source, the air cylinder is used as the driving source. Compared with the case, the driving force is increased, and the liquid can be discharged at a high speed.
Further, since the liquid can be discharged from above the adherend such as the substrate, it is possible to confirm whether or not the discharge has been performed by providing a sensor such as an infrared ray outside the liquid discharge apparatus 1.
Since the liquid ejection apparatus 1 is not provided with a check valve, the liquid can be sent under pressure. Therefore, even a highly viscous liquid can be easily supplied into the liquid ejection apparatus 1.

(10) Further, when no voltage is applied to the piezoelectric elements 17, 18, the displacement enlarging plate 10 is urged by the urging force of the urging means 15 and pressed by the first pressing member 31, and the diaphragm 50 is pressed. The outlet valve is closed by the spring force of the biasing means 15 because it is in close contact with the recess 431. For this reason, even if the thickness dimension of the diaphragm 50 varies or the position of the concave portion forming surface 43 slightly changes, the biasing means 15 urges the diaphragm 50 until it contacts the concave portion forming surface 43. The outlet valve can be reliably closed.
That is, the outlet valve can be a normally closed type valve that closes when no voltage is applied. Further, the contact force of the diaphragm 50 to the recess forming surface 43 when the valve is closed can be set only by the spring force of the urging means 15, and the closed state of the outlet valve can be stably maintained.

(11) Since the force for pressing the diaphragm 50 against the recess forming surface 43 can be set only by the spring force of the urging means 15, for example, when the diaphragm 50 and the flow path block 40 are removed and attached again for cleaning. The mounting position may be slightly different, but even if there is such a slight difference, the pressing force of the diaphragm 50 is made almost constant because the urging means 15 presses the diaphragm 50 against the recess forming surface 43. In this respect, the outlet valve can be stably closed. For this reason, the replacement | exchange operation | work of the diaphragm 50 can also be performed easily. In particular, since the diaphragm 50 which is a wetted part is also a consumable part, the replacement work is indispensable. However, since the work can be easily performed, the maintainability can be improved.

(12) Since only the flow path block 40 and the diaphragm 50 are in contact with the liquid, if these are removed and cleaned, the inside of the cases 4 and 5 need not be disassembled, and maintenance work such as cleaning can be easily performed. be able to.
Further, since the flow path block 40 is pressed against the pump case 5 using the block mounting screws 62, the flow path block 40 and the diaphragm 50 are removed by rotating the block mounting screws 62 and removing the stays 63 from the side plates 60. Therefore, the maintenance work can be performed more easily.

(13) Unless a voltage is applied to the piezoelectric elements 17 and 18 to expand the piezoelectric elements 17 and 18, the biasing force of the biasing means 15 causes the hinge portions 121, 122, 125, 131, 132, 135 of the displacement magnifying plate 10, , 18, and the influence of the biasing force of the biasing means 15 on the hinge portions 121, 122, 125, 131, 132, 135 and the piezoelectric elements 17, 18 can be reduced.

(14) When the outlet valve is closed, the second pressing member 32 extends to press the diaphragm 50 to close the inlet valve, and then the first pressing member 31 opens the outlet valve. In a state in which the valve is closed, the inlet valve is opened by the second pressing member 32 after the second pressing member 32 is contracted and the outlet valve is closed. Therefore, one of the valves is always closed, and the liquid suction port 44 and the liquid discharge port 45 are not directly communicated with each other, and the pump operation can be realized with certainty.

(15) Since the urging force by the coil spring 157 can be released by operating the spring pressing member 158, the diaphragm 50 can be set in a state where the pressing members 31 to 33 do not protrude from the guide block 20. For this reason, since the diaphragm 50 is set in a state where the pressing members 31 to 33 protrude, the liquid ejection device 1 of the present embodiment flattens the diaphragm 50 with respect to the conventional diaphragm pump that is difficult to set the diaphragm. Since it can be set, the diaphragm 50 can be easily attached, and the replacement work of the diaphragm 50 can be easily performed.
Further, when the urging force by the coil spring 157 is released when the liquid ejection device 1 is not used, it is possible to release the pressing force applied by the pressing members 31 to 33 to the diaphragm 50. For this reason, when the diaphragm 50 is always pressed by the pressing members 31 to 33, the diaphragm 50 is permanently deformed, and the period for replacing the diaphragm 50 is also shortened. However, in the present embodiment, the liquid ejection device 1 is used. When not used, the pressing force by the pressing members 31 to 33 is not applied, and the diaphragm 50 can be hardly permanently deformed. For this reason, the period until the diaphragm 50 is replaced can be lengthened, and the replacement cost of the diaphragm 50 can be reduced.

[Second Embodiment]
Next, a second embodiment of the present invention will be described with reference to FIGS. In the following embodiments, the same or similar configurations as those of the above-described embodiments are denoted by the same reference numerals as appropriate, and description thereof is omitted or simplified.
The liquid ejection device 1 </ b> B of the second embodiment is a tube pump that uses a tube 70 instead of the diaphragm 50. And although the structure and shape of the 1st-3rd pressing members 31B-33B for pressing the tube 70, the displacement expansion board 10B, and the urging | biasing means 15B also have a part different from the said 1st Embodiment, the operation | movement is The same as in the first embodiment.

The displacement magnifying plate 10B has substantially the same configuration as the displacement magnifying plate 10. However, the first hinge parts 121B and 131B are provided closer to the second hinge parts 122 and 132 than the first hinge parts 121 and 131 of the first embodiment, and the third hinge parts 125B and 135B are the first hinge parts 121B and 131B. The third hinge portions 125 and 135 of the embodiment are provided farther from the displacement portions 124B and 134B than the third hinge portions 125 and 135.
For this reason, even when the piezoelectric elements 17 and 18 are extended by the same dimension, the displacement parts 124B and 134B and the piezoelectric elements 17 and 18 of the second embodiment have a larger inclination angle due to the positional relationship of the hinge parts, and accordingly, The amount of movement of the second and third pressing members 32B and 33B is also increased.
Moreover, in the arm part 112B and each displacement part 124B, 134B, the part contact | abutted to the 1st-3rd press members 31B-33B is made into the circular arc-shaped recessed part.

  On the other hand, the first to third pressing members 31B to 33B that press the tube 70 include push rods 315, 325, 335, tube push members 316, 326, 336, push rods 315, 325, 335, and tube push members 316, Connecting rods 317, 327, 337 for connecting 326, 336, spring seats 318, 328, 338, return springs 319, 329, arranged between push rods 315, 325, 335 and spring seats 318, 328, 338, 339.

Here, the tube pressing members 316, 326, and 336 are formed in a plate shape and configured to be able to press the tube 70 with certainty.
Further, in the push rods 315, 325, and 335, a portion where the arm portion 112B and the displacement portions 124B and 134B are in contact with the arm portion 112B and the displacement portions 124B and 134B is formed, and the bottom surface of the groove is It is formed in a circular arc shape and is in contact with the concave portion of the arm portion 112B and the displacement portions 124B and 134B.

  A pair of tube receiver mounting plates 71 are fixed to the pump case 5B, and a tube receiving block 72 is fixed to the mounting plate 71 with mounting screws 73. A pair of tube sets 74 are arranged with the tube receiving block 72 interposed therebetween, and the tube 70 is inserted therethrough.

Further, the biasing means 15B includes a spring case 151B, a connecting member 153B, an adjustment spring seat 155B, a coil spring 157, and a spring pushing member 158B.
In such an urging means 15B, the distance between the connecting member 153B and the adjustment spring seat 155B is adjusted by turning the spring pushing member 158B screwed into the spring case 151B and adjusting its axial position. The urging force by the coil spring 157 can be adjusted.

Also in the liquid ejection apparatus 1B having such a configuration, the first to third pressing members 31B to 33B can be moved forward and backward by the biasing force of the biasing means 15B and the operations of the piezoelectric elements 17 and 18, and the tube 70 can be moved back and forth. Liquid discharge can be realized by sequentially pressing.
For example, if the first pressing member 31B is used to open and close the outlet valve, the second pressing member 32B is used to open and close the inlet valve, and the third pressing member 33B is set to press the tube between the valves, that is, the measuring chamber, Liquids can be sequentially discharged by the same operation as in the first embodiment.

  The liquid ejection apparatus 1B according to the second embodiment can achieve the same effects as the liquid ejection apparatus 1 according to the first embodiment.

In addition, this invention is not limited to the structure of the said 1st, 2nd embodiment, The deformation | transformation of the range which can achieve the objective of this invention is included in this invention.
[First Modification]
For example, in the first and second embodiments, the displacement magnifying plates 10 and 10B are arranged so as to be rotatable about the shaft 11, but may be provided so as to be slidable. For example, as shown in FIG. 20, in the liquid ejection device 1 </ b> C that is a diaphragm pump, a guide rail 80 that guides the displacement enlarging plate 10 is provided, and the displacement enlarging plate 10 is disposed between the case 4 and the displacement enlarging plate 10. What is necessary is just to provide the spring 81 as a biasing means which biases to 50 side. Also in such a liquid ejection device 1 </ b> C, when no voltage is applied to the piezoelectric elements 17, 18, the displacement enlarging plate 10 moves to the diaphragm 50 by the biasing force of the spring 81, and the diaphragm 50 is moved by the first pressing member 31. To close the outlet valve. In addition, when a voltage is applied to the piezoelectric element 17, the second pressing member 32 that moves according to the displacement of the displacement portion 124 presses the diaphragm 50 to close the inlet valve, and then the piezoelectric element 17 is further moved. The displacement enlarging plate 10 is moved in the direction away from the diaphragm 50 against the biasing force of the spring 81 by the reaction force due to the extension, and therefore the first pressing member 31 is moved in the direction away from the diaphragm 50 to enter the entrance. The valve can be opened. If a voltage is applied to the second piezoelectric element 18 to extend in this state, the diaphragm 50 can be pressed by the third pressing member 33 and the liquid can be discharged. Accordingly, the liquid can be ejected by the same operation as in the first embodiment, and the same effect as the first embodiment can be obtained.

[Second Modification]
In the liquid ejection device 1B of the second embodiment, the two pressing elements 31B to 33B are operated by providing the two piezoelectric elements 17 and 18, but when the tube is used, the third pressing member 33B is moved. Even if it is not provided, the liquid discharge operation is possible. That is, as shown in FIG. 21, as the liquid ejection device 1D, the two piezoelectric elements 18 and the displacement magnifying unit 130 are not provided, and one piezoelectric element 17, the displacement magnifying part 120, and the main body part 110 are You may comprise so that the pressing members 31B and 32B may be driven.
In such a liquid ejection apparatus 1D, if one of the first pressing member 31B and the second pressing member 32B is an outlet valve of the liquid ejection apparatus 1D and the other is an inlet valve of the liquid ejection apparatus 1D, the inside of the tube 70 Liquid discharge operation can be realized by pressure-feeding the liquid and switching the opening and closing of each valve.
For example, if the first pressing member 31B is an outlet valve and the second pressing member 32B is an inlet valve, the first pressing member 31B is moved by the biasing force of the biasing means 15B when no voltage is applied to the piezoelectric element 17. The tube is crushed and the outlet valve is kept closed, while the second pressing member 32B keeps the inlet valve open. If the liquid is pumped into the tube 70 in this state, the outlet valve is closed, so that the tube 70 on the upstream side (inlet valve side) of the outlet valve swells and stores the liquid. Then, when a voltage is applied to the piezoelectric element 17 to extend the piezoelectric element 17 and the second pressing member 32B is moved to crush the tube 70 and close the inlet valve, the inside of the expanded tube 70 between the inlet valve and the outlet valve is closed. The liquid is partitioned into Further, when the voltage application to the piezoelectric element 17 is continued and the piezoelectric element 17 is extended, the second pressing member 32B crushes the tube 70 and cannot move any more. Therefore, the main body 110 and the first pressing member 31B are The urging force of the urging means 15B moves against the urging direction, and the outlet valve closed by the first pressing member 31B is opened. Then, since the tube 70 swelled with the liquid tries to return to the original state by its own elastic force, the liquid inside the tube 70 is discharged from the discharge valve.
Next, when the voltage application to the piezoelectric element 17 is stopped and the piezoelectric element is reduced to the original state, the first pressing member 31B crushes the tube 70 by the urging force of the urging means 15B, and the outlet valve is closed. Further, since the second pressing member 32B returns to the original position, the tube 70 is opened and the inlet valve is opened. Therefore, in the liquid ejection apparatus 1D, the liquid ejection operation can be realized even when the two pressing members 31B and 32B are operated.

[Third Modification]
In each of the above embodiments, the third hinge portions 125 and 135 and the piezoelectric element second end attachment portions 126 and 136 are provided in the displacement portions 124 and 134, and the attachment portions 123 and 136 are interposed via the spacers 127 and 137. The piezoelectric elements 17 and 18 were attached. On the other hand, as shown in FIG. 22, the piezoelectric elements 17 and 18 may be attached to the displacement portions 124 </ b> A and 134 </ b> A via the spacers 127 and 137 without providing the third hinge portions 125 and 135. Even in such a configuration, since the first hinge parts 121 and 131 and the second hinge parts 122 and 132 are formed, when the piezoelectric elements 17 and 18 are extended, the hinge parts 121, 122, 131, and 132 are elastically deformed. The displacement portions 124A and 134A and the piezoelectric elements 17 and 18 are inclined, and the pressing members 31A to 33A are moved to the diaphragm 50 side.
Furthermore, as shown in FIG. 22, a coil spring 241 may be disposed between the pump case 5 and the guide block 20 </ b> A, and the diaphragm 50 may be brought into close contact with the recess forming surface 43 by the urging force of the coil spring 241. In this case, the force for bringing the diaphragm 50 into close contact with the recess forming surface 43 can be easily set by the biasing force of the coil spring 241. Even if the thickness dimension of the diaphragm 50 varies, the variation can be absorbed by the coil spring 241 so that the diaphragm 50 can be securely adhered to the recess forming surface 43.
Moreover, in the said embodiment, although the length of the press rod 311,321,331 differs, as shown in FIG. 22, you may use the press rod of the same length. In this case, the size and shape of the first to third pressing members 31A, 32A, and 33A can be made the same, and the types of components can be reduced.
Furthermore, in the said embodiment, although the pressing members 31 and 32 were made to contact | abut directly to the arm part 112 and the displacement part 134, it is not restricted to the structure. For example, as shown in FIG. 22, a cap member 141 may be attached to the arm portion 112A and the displacement portion 134A, and the pressing members 31A and 32A may be brought into contact with the cap member 141. That is, the cap member 141 is configured by a cylindrical member having a first end opened and a second end closed. Then, after filling the cap member 141 with the adhesive 142, the insertion portion 143 formed in the arm portion 112A and the displacement portion 134A is inserted into the cap member 141, and the position of the cap member 141 is adjusted. In FIG. 22, the position of the cap member 141 is adjusted and fixed by the adhesive 142 so that the surfaces contacting the pressing members 31 </ b> A, 32 </ b> A, 33 </ b> A are aligned in the displacement portion 124 </ b> A and the cap member 141. With such a configuration, even when the dimensional accuracy of the arm portion 112A and the displacement portions 124A and 134A of the displacement enlarging plate 10 is low, the displacement portion 124A and the cap member 141 can be adjusted by adjusting the mounting position of the cap member 141. It is possible to prevent displacement of the pressing members 31A, 32A, and 33A that are in contact with each other.

[Fourth Modification]
In each of the above-described embodiments and modifications, the displacement enlarging plates 10 and 10B are rotatably supported by the shaft 11 and the bearing 12 with respect to the case 5 or slidably supported by the guide rail 80. In this case, there are portions that cause noise such as the shaft 11 and the bearing 12 portion, the rolling portion of the pin 113 and the connecting member 153 portion, and the sliding portion of the guide rail 80 portion. For this reason, for example, in an infusion pump used for a medical infusion device or the like that transports a chemical solution stored in a container such as a medical solution bag to a human body or the like via a tube, the infusion device uses the infusion device. It may be burdensome and burdensome for the sick.
Therefore, in the liquid ejection apparatus 1E according to the present modification, as shown in FIG. 23, a spring portion is formed on the displacement enlarging plate 10E itself, and the generation of sound is reduced by eliminating the rolling portion and the sliding portion. In addition, in this modification, the tube pump using the tube 70 is illustrated as the liquid discharge apparatus 1E.

As shown also in the bottom view of FIG. 24, the liquid ejection device 1E includes a pair of side plates 201, and a displacement enlarging plate 10E is screwed between the side plates 201 via a spacer 202.
Similar to the displacement enlarging plate 10 shown in FIG. 22, the displacement enlarging plate 10 </ b> E includes a main body portion 110, a first displacement enlarging portion 120, and a second displacement enlarging portion 130.
The main body 110 includes a base end portion 111 provided on an upper portion of the displacement magnifying plate 10 and an arm portion 112A extending downward from one end portion side of the base end portion 111. Further, the main body 110 includes a spring portion 114 that is formed continuously upward from the other end of the base end portion 111 and a fixing portion 115 that is formed continuously with the spring portion 114. Has been.

  The spring portions 114 are formed in a zigzag shape by alternately forming cuts. A plurality of screw holes 116 are formed in the fixing portion 115. The displacement enlarging plate 10E is disposed between the spacers 202 provided corresponding to the fixing portions 115, and is fixed by screwing screws 203 into the screw holes 116 from the side plates 201 through the spacers 202.

An outlet finger 231 serving as a first pressing member is bonded to the insertion portion 143 of the arm portion 112A with an adhesive 142 such as epoxy.
An inlet finger 232 as a second pressing member is fixed to the displacement portion 124A of the first displacement enlargement portion 120 with a spring pin.
A measuring finger 233 as a third pressing member is bonded to the insertion portion 143 of the displacement portion 134A of the second displacement enlargement portion 130 with an adhesive 142.

As shown in FIG. 24, the outlet finger 231 and the inlet finger 232 are formed in a flat plate shape, and the tip thereof is formed in a mountain shape as shown in FIG. 23 so that the tube 70 can be easily crushed. It is configured.
On the other hand, the tip of the measuring finger 233 is formed flat and has a larger area in contact with the tube 70 than the other fingers 231 and 232. For this reason, when the tube 70 is pushed with the measuring finger 233, the tube 70 can be pushed with a relatively large area.

A pair of tube guides 205 are screwed to each side plate 201. Each tube guide 205 is formed in a substantially plate shape, and is arranged at a predetermined interval in the vertical direction and fixed to the side plate 201 as shown in FIG. The tube guide 205 is formed with a guide groove 205 </ b> A for guiding the tube 70.
A tube presser 206 is disposed between the tube guides 205. A shaft 207 is spanned between the tube presser 206 and each tube guide 205. For this reason, the tube retainer 206 is rotatable about the shaft 207 as a rotation axis. A knurled screw 208 is attached to the side of the tube presser 206 opposite to the side where the shaft 207 is disposed. The knurled screw 208 passes through the tube presser 206 and is screwed into a nut block (not shown). The nut block is fixed to the side plate 201, and when the knurled screw 208 is tightened, the tube presser 206 can hold the tube 70 and be arranged at a predetermined position as shown in FIGS. Further, when the knurled screw 208 is removed, the tube presser 206 can be rotated, so that the tube 70 can be easily set and removed.

In this modification, only the outlet finger 231 crushes the tube 70 in the initial state where no voltage is applied to the piezoelectric elements 17 and 18. At this time, the mounting position of the displacement enlarging plate 10E and the mounting position of the exit finger 231 are adjusted so that the spring portion 114 of the displacement enlarging plate 10E bends and an urging force is applied to the outlet finger 231 to press the tube 70. ing.
Accordingly, as in the above-described embodiment, liquid is ejected by applying appropriate voltages to the piezoelectric elements 17 and 18 and moving the fingers 231 to 233.

According to this modification, since the spring portion 114 is formed directly on the displacement enlarging plate 10E and the rolling portion and the slip portion are eliminated, the generation of sound when the liquid ejection apparatus 1E is driven can be greatly reduced. For this reason, if this modification is used as an infusion pump for a patient, the operating noise can be greatly reduced.
Further, since the spring portion 114 is provided, it is possible to prevent an excessive pressing force from being applied to the tube 70 and to extend the life of the tube 70.

[Fifth Modification]
As shown in FIGS. 25 to 28, the liquid ejection device 1F according to the fifth modification increases the capacity of the measurement chamber by increasing the number of measuring fingers 233 from one to two with respect to the liquid ejection device 1E according to the fourth modification. The point is different. The displacement enlarging plate includes a valve displacement enlarging plate 10F for driving the outlet finger 231 and the inlet finger 232, and a measuring displacement enlarging plate 10G for driving the two measuring fingers 233.
The displacement enlarging plate 10F has the same configuration as the displacement enlarging plate 10E except that the second displacement enlarging unit 130 is not provided.
Therefore, in the initial state, the outlet finger 231 crushes the tube 70 by the spring portion 114. Further, when the piezoelectric element 17 is extended by applying a voltage, the displacement portion 124A is inclined and the inlet finger 232 is moved to the tube 70 side. When the piezoelectric element 17 further expands in a state where the inlet finger 232 crushes the tube 70 and cannot move any more, the spring portion 114 is bent by the reaction, and the arm portion 112A and the outlet finger 231 move away from the tube 70.
Further, when the piezoelectric element 17 returns to its original length by stopping the voltage application, the outlet finger 231 crushes the tube 70 by the biasing force of the spring portion 114, and the inlet finger 232 opens the tube 70 and returns to its original state. .

The displacement magnifying plate 10G includes a main body portion 250, a first displacement magnifying portion 260, and a second displacement magnifying portion 270. The main body 250 is fixed to the side plate 201 via the spacer 202.
Each displacement expanding portion 260, 270 includes a first hinge portion 261, 271, a second hinge portion 262, 272, piezoelectric elements 263, 273, and a displacement portion 264, 274, respectively.
A first measuring finger 233 is attached to the displacement portion 264 by a spring pin. An insertion portion 143 is formed in the displacement portion 274, and the second measuring finger 233 is fixed by the adhesive 142. The displacement enlarging plate 10G is provided with piezoelectric elements 263 and 273 for driving the respective measuring fingers 233, so that it is not necessary to apply an urging force for pressing each measuring finger 233 against the tube 70, and the displacement enlarging plate. There is no need to provide the spring portion 114 as in 10F.
Therefore, when a voltage is applied to each piezoelectric element 263, 273, each measuring finger 233 moves independently of each other. Therefore, the amount of movement of each measuring finger 233 may be adjusted individually according to the amount of change in the volume of the measuring chamber. For example, when the discharge amount is small, only one measurement finger 233 may be moved, and when the discharge amount is large, both measurement fingers 233 may be moved.

Also according to this modification, since the spring portion 114 is provided on the displacement magnifying plate 10F, the operation sound of the liquid ejection device 1F can be made very small.
Further, since the plurality of measuring fingers 233 can be arranged and driven, the amount of change in the measuring chamber, that is, the discharge amount can be increased as compared with the case where there is one measuring finger 233.

[Other variations]
Furthermore, the present invention is not limited to the above embodiments and modifications.
For example, the shape and configuration of the displacement enlarging plate, the urging means, the pressing member, the flow path block, etc. in the liquid discharge devices 1 to 1F such as a diaphragm pump and a tube pump are not limited to those of the above-described embodiment, You only have to set it.
In the embodiment, the outlet valve is opened and closed by the first pressing members 31 and 31B biased by the biasing means 15 and 15B, and the inlet valve is opened by the second pressing members 32 and 32B moved by the piezoelectric element 17. In contrast, the inlet valve may be opened and closed by the first pressing members 31 and 31B, and the outlet valve may be opened and closed by the second pressing members 32 and 32B.

  In the above-described embodiment, the piezoelectric elements 17 and 18 are controlled by the applied voltage value. For example, a strain gauge is provided at a displacement portion of the displacement expansion plates 10 and 10B, or a sensor for detecting the position of the pressing member is used. It may be provided so that the drive state is detected and feedback control is performed based on the detected value.

Further, the liquid ejection apparatus of the present invention may be used by being incorporated in an electronic component manufacturing apparatus. That is, an electronic component manufacturing apparatus includes the above-described liquid ejection device, a liquid supply unit that supplies a liquid to the liquid ejection device, and a control device that controls a driving unit of the liquid ejection device. The liquid supplied from the liquid supply means may be discharged from the nozzle 452 through the liquid discharge device to manufacture the electronic component.
In such an electronic component manufacturing apparatus, the above-described liquid discharge device that can accurately transfer a very small amount of liquid can be used, so that a very small amount of liquid can be discharged from the nozzle 452 with high accuracy.

  Furthermore, the piezoelectric drive device of the present invention can be used not only as a drive source for the liquid ejection device but also as a drive source for various machines. That is, the piezoelectric drive device can be widely used as a drive source for driving a plurality of driven bodies. In particular, one driven body is moved by the urging force of the urging means, and when the other driven body moves with the expansion of the piezoelectric element and comes into contact with the object, the reaction force Since it is moved in the direction opposite to the urging direction of the urging means, it is particularly suitable for a drive source that drives each driven body alternately. In addition, since the piezoelectric driving device uses a piezoelectric element and can secure a certain amount of displacement by the displacement magnifying mechanism, the piezoelectric driving device is suitable as a driving source for a small device.

It is a longitudinal cross-sectional view which shows the liquid discharge apparatus of 1st Embodiment of this invention. It is an enlarged view which shows the piezoelectric drive device of the said 1st Embodiment. It is an enlarged view which shows the pump part of the said 1st Embodiment. It is the side view which looked at the pump case and displacement expansion plate of the 1st embodiment from the drive part case side. FIG. 3 is a side view of a drive unit case side in the liquid ejection device according to the first embodiment. It is a figure which shows the flow-path block of the said 1st Embodiment, (A) is a front view, (B) is sectional drawing. It is a side view by the side of the pump case in the liquid discharge apparatus of the said 1st Embodiment. FIG. 3 is a top view of the liquid ejection device according to the first embodiment. It is sectional drawing along the AA line of FIG. It is a figure which shows the measurement process in the said 1st Embodiment. It is a figure which shows the valve | bulb switching process in the said 1st Embodiment. FIG. 3 is an explanatory diagram showing an origin state in the first embodiment. FIG. 5 is an explanatory diagram showing a weighing process in the first embodiment. FIG. 5 is an explanatory view showing a valve switching step in the first embodiment. FIG. 5 is an explanatory view showing a discharge process in the first embodiment. FIG. 3 is an explanatory view showing a valve switching & suction process in the first embodiment. It is a longitudinal cross-sectional view which shows 2nd Embodiment of this invention. It is a side view of 2nd Embodiment of this invention. It is sectional drawing along the BB line of FIG. It is a longitudinal cross-sectional view which shows the 1st modification of this invention. It is a longitudinal cross-sectional view which shows the 2nd modification of this invention. It is a longitudinal cross-sectional view which shows the 3rd modification of this invention. It is a longitudinal cross-sectional view which shows the 4th modification of this invention. It is a bottom view which shows the 4th modification of this invention. It is a longitudinal cross-sectional view which shows the 5th modification of this invention. It is a longitudinal cross-sectional view which shows the 5th modification of this invention. It is a side view which shows the 5th modification of this invention. It is a bottom view which shows the 5th modification of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,1B, 1C, 1D, 1E, 1F ... Liquid discharge device, 2 ... Piezoelectric drive device, 3 ... Pump part, 4 ... Drive part case, 5 ... Pump case, 6 ... Drive apparatus main body 10, 10B ... Expansion of displacement Plate 11, shaft 15, 15 B biasing means 17 first piezoelectric element 18 second piezoelectric element 20 guide block 24 height adjustment shim 31, 31 B first pressing member 32 , 32B ... second pressing member, 33, 33B ... third pressing member, 40 ... flow path block, 43 ... concave portion forming surface, 44 ... liquid suction port, 45 ... liquid discharge port, 50 ... diaphragm, 60 ... side plate, 62 ... Block mounting screw, 63 ... Stay, 70 ... Tube, 71 ... Tube receiving mounting plate, 72 ... Tube receiving block, 80 ... Guide rail, 81 ... Spring as biasing means, 110 ... Main body, 111 ... Base end , 112 112B: Arm portion, 120: First displacement enlargement portion, 130: Second displacement enlargement portion, 121, 122, 125, 131, 132, 135 ... Hinge portion, 157 ... Coil spring, 311, 321, 331 ... Pressure rod, 312 , 322, 332 ... Rod receiver, 313, 323, 333 ... Return spring, 315, 325, 335 ... Rod, 317, 327, 337 ... Connection rod, 319, 329, 339 ... Return spring, 431-433 ... Recess, 441 ... Suction channel, 451 ... Discharge channel, 452 ... Nozzle.

Claims (8)

A case, and a drive device body provided to be movable with respect to the case;
The drive device body is
A displacement magnifying plate, biasing means, and a piezoelectric element attached to the displacement magnifying plate,
The displacement enlarging plate is
A main body attached to the case so as to be rotatable or slidable and urged by the urging means;
When the piezoelectric element is expanded by applying a voltage to the piezoelectric element, the displacement is expanded, and a displacement expanding portion that is displaced in a direction perpendicular to the extending direction of the piezoelectric element with respect to the main body portion,
In a state where no voltage is applied to the piezoelectric element, the first driven body is moved by the main body portion biased by the biasing means,
When a voltage is applied to the piezoelectric element, the second driven body is moved by the displacement enlarging unit,
When a voltage is further applied to the piezoelectric element from the state in which the second driven body is in contact with the object to increase the displacement of the displacement expanding portion, the main body portion and the first portion are resisted against the biasing force of the biasing means. The piezoelectric driving apparatus is characterized in that the driven body is moved in a direction opposite to the direction in which the driven body is moved by the urging force of the urging means. The piezoelectric drive device according to claim 1,
The piezoelectric element includes a first piezoelectric element and a second piezoelectric element,
The displacement enlargement part is
Along with the extension of the first piezoelectric element, a first displacement expansion part that is displaced in a direction orthogonal to the extension direction of the first piezoelectric element with respect to the main body part,
Along with the extension of the second piezoelectric element, a second displacement expansion part that is displaced in a direction perpendicular to the extension direction of the second piezoelectric element with respect to the main body part,
The first driven body is moved in the main body,
A second driven body is moved by the first displacement enlargement unit;
A piezoelectric driving device, wherein a third driven body is moved by the second displacement enlarging portion. In the piezoelectric drive device according to claim 1 or 2,
The main body portion includes a base end portion and an arm portion extended from the base end portion, and is formed in a substantially plane L shape.
The displacement enlargement part is
A first hinge part and a second hinge part, which are continuously formed from the base end part of the main body part and arranged in parallel to each other;
A piezoelectric element first end attaching portion formed continuously with the first hinge portion and having the first end of the piezoelectric element attached thereto;
A displacement part formed continuously with the second hinge part and extending along the longitudinal direction of the piezoelectric element and to the second end side of the piezoelectric element;
A third hinge portion formed from the displacement portion toward the second end side of the piezoelectric element;
A piezoelectric element second end mounting portion formed continuously with the third hinge portion and having the second end portion of the piezoelectric element attached thereto;
The piezoelectric drive device, wherein the arm portion, the piezoelectric element, and the displacement portion are arranged substantially in parallel. In the piezoelectric drive device according to claim 1 or 2,
The main body portion includes a base end portion and an arm portion extended from the base end portion, and is formed in a substantially plane L shape.
The displacement enlargement part is
A first hinge part and a second hinge part, which are continuously formed from the base end part of the main body part and arranged in parallel to each other;
A piezoelectric element first end attaching portion formed continuously with the first hinge portion and having the first end of the piezoelectric element attached thereto;
Displacement formed continuously with the second hinge portion and extending along the longitudinal direction of the piezoelectric element and extending to the second end side of the piezoelectric element to which the second end portion of the piezoelectric element is attached And formed with a portion,
The piezoelectric drive device, wherein the arm portion, the piezoelectric element, and the displacement portion are arranged substantially in parallel. In the piezoelectric drive device according to any one of claims 1 to 4,
Each of the driven bodies is constituted by a pressing member that is guided by a guide block and that is provided so as to be movable in a direction opposite to the direction moved by the urging force of the urging means,
Urging force releasing means for releasing the urging force by the urging means;
When the pressing member is urged against the guide block in a direction opposite to the direction moved by the urging force of the urging means, and the urging force by the urging means is released, each pressing member A return spring that moves each pressing member to a position where the tip of the guide block does not protrude from the end face of the guide block;
A piezoelectric drive device comprising: A case, and a drive device body provided to be movable with respect to the case;
The drive device body is
A displacement magnifying plate, and a piezoelectric element attached to the displacement magnifying plate,
The displacement enlarging plate is
A fixing portion fixed to the case;
A main body provided continuously from the fixed part via the spring part;
When the piezoelectric element is expanded by applying a voltage to the piezoelectric element, the displacement is expanded, and a displacement expanding portion that is displaced in a direction perpendicular to the extending direction of the piezoelectric element with respect to the main body portion,
In a state where no voltage is applied to the piezoelectric element, the first driven body is moved by the main body portion biased by the spring portion,
When a voltage is applied to the piezoelectric element, the second driven body is moved by the displacement enlarging unit,
When a voltage is further applied to the piezoelectric element from the state in which the second driven body is in contact with the object to increase the displacement of the displacement expanding portion, the main body portion and the first portion are resisted against the biasing force of the spring portion. A piezoelectric driving device, wherein the driven body is moved in a direction opposite to a direction in which the driven body is moved by the biasing force of the spring portion. A piezoelectric driving device according to any one of claims 1 to 6,
A first pressing member that is a first driven body that is moved in the main body of the piezoelectric driving device;
A second pressing member that is a second driven body moved by a displacement enlarging portion of the piezoelectric driving device;
A liquid ejection apparatus comprising: a tube pressed by the first pressing member and the second pressing member. A piezoelectric drive device according to claim 2;
A first pressing member that is a first driven body that is moved in the main body of the piezoelectric driving device;
A second pressing member which is a second driven body moved by the first displacement enlarging portion of the piezoelectric driving device;
A third pressing member which is a third driven body moved by the second displacement enlarging portion of the piezoelectric driving device;
A liquid ejection apparatus comprising: a tube or a diaphragm pressed by the first pressing member, the second pressing member, and the third pressing member.

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