JPS62233578A - Piezoelectric element type valve - Google Patents

Piezoelectric element type valve

Info

Publication number
JPS62233578A
JPS62233578A JP7460486A JP7460486A JPS62233578A JP S62233578 A JPS62233578 A JP S62233578A JP 7460486 A JP7460486 A JP 7460486A JP 7460486 A JP7460486 A JP 7460486A JP S62233578 A JPS62233578 A JP S62233578A
Authority
JP
Japan
Prior art keywords
valve
piezoelectric element
valve seat
movable body
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7460486A
Other languages
Japanese (ja)
Other versions
JPH0481665B2 (en
Inventor
Takeo Kojima
健夫 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyoda Automatic Loom Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Automatic Loom Works Ltd filed Critical Toyoda Automatic Loom Works Ltd
Priority to JP7460486A priority Critical patent/JPS62233578A/en
Publication of JPS62233578A publication Critical patent/JPS62233578A/en
Publication of JPH0481665B2 publication Critical patent/JPH0481665B2/ja
Granted legal-status Critical Current

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  • Electrically Driven Valve-Operating Means (AREA)

Abstract

PURPOSE:To make a setting pressure alteration performable at high speed, by receiving reaction force at a time when a valve body moves in a direction closing a valve seat by extension of a piezoelectric element laminated body for valve body control use, with a position device. CONSTITUTION:When there is no voltage command for a piezoelectric element laminated body 10, a valve body 15 has no pressing force to a valve seat 3, whereby pressure oil to be fed out of an input port 4 flows into an outlet port 6 after passing through a space between the valve seat 3 and the valve body 15. From this state, first at adjusting screw 16 is operated, setting the regulating position of a movable body 9, and afterward, when voltage is impressed on the piezoelectric element laminated body 10 by a pressure setter 17, the right side of the movable body 9 is positioned by the adjusting screw 16 so that the movable body 9 is extended to the side of the valve seat 3 centering on this spot.

Description

【発明の詳細な説明】 発明の目的 (産業上の利用分野) この発明は各種弁においてその通路開閉用可動機構の改
良に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Field of Industrial Application) This invention relates to improvements in movable mechanisms for opening and closing passages in various valves.

(従来の技術) 弁は流体を通したり止めたり制御したりするために通路
を開閉することができる可動機構を持つ機器の総称であ
り、特に流れの形を変えたり圧力または流量を制御した
りする制御弁は機能上方向制御弁、圧力制御弁、流が制
御弁に大別されている。
(Prior art) A valve is a general term for equipment with a movable mechanism that can open and close a passage to pass, stop, or control fluid, and in particular to change the shape of flow or control pressure or flow rate. Functionally, control valves can be broadly divided into directional control valves, pressure control valves, and flow control valves.

従来、弁体の可動機構としては比例ソレノイド方式が多
く利用されている。その−例として第5図に示す圧力制
御弁においては、弁室2に弁座3が設けられ、入口ポー
ト4側の通路5と出口ポート6側の通路7とがこの弁座
3及び弁室2を介して連通されている。弁室2内には可
動子25が移動可能に嵌め込まれ、この可動子25の外
周にはソレノイド26が配設されている。可動子25の
弁体保持部25aには弁体27が圧縮コイルばね28を
介して取付けられ、この弁体27が弁座3に対し開閉可
能に圧接されている。そして、ソレノイド26に電流が
印加されると、可動子25が移動して圧縮コイルばね2
8が圧縮され、弁座3に対する弁体27の圧接力が増加
する。この電流値に応じてソレノイド推力は比例的に変
化する。
Conventionally, a proportional solenoid system has been widely used as a mechanism for moving a valve body. As an example, in the pressure control valve shown in FIG. 5, a valve seat 3 is provided in the valve chamber 2, and a passage 5 on the inlet port 4 side and a passage 7 on the outlet port 6 side are connected to the valve seat 3 and the valve chamber. 2. A movable element 25 is movably fitted into the valve chamber 2, and a solenoid 26 is disposed around the outer periphery of the movable element 25. A valve body 27 is attached to the valve body holding portion 25a of the movable element 25 via a compression coil spring 28, and the valve body 27 is pressed against the valve seat 3 so as to be openable and closable. When a current is applied to the solenoid 26, the movable element 25 moves and the compression coil spring 2
8 is compressed, and the pressing force of the valve body 27 against the valve seat 3 increases. The solenoid thrust changes proportionally according to this current value.

このソレノイド推力と圧縮コイルばね28とが釣り合っ
たところで可動子25が停止して圧縮コイルばね28の
撓み伍が決まり、弁座3に対する弁体27の圧接力も決
まる。入口ポート4側の圧力が上昇して弁体27に働く
ノコが圧縮コイルばね28の弾性力に打ち勝つと、弁体
27が弁座3を開いて入口ポート4側と出口ポート6側
とが連通し、入口ポート4側の圧力が下がる。従って、
入口ポート4側の過度な昇圧を防止する。弁体27に働
く力と圧縮コイルばね28の弾性力とが釣り合ったとこ
ろで弁体27は弁座3を閉じる。この動作が繰り返され
て入口ポート4側の圧力がほぼ一定になる。このように
して入口ポート4側の設定圧力をソレノイド26の電流
値の変更により調節することができる。
When the solenoid thrust and the compression coil spring 28 are balanced, the movable element 25 stops, the degree of deflection of the compression coil spring 28 is determined, and the pressing force of the valve body 27 against the valve seat 3 is also determined. When the pressure on the inlet port 4 side increases and the saw acting on the valve body 27 overcomes the elastic force of the compression coil spring 28, the valve body 27 opens the valve seat 3 and the inlet port 4 side and the outlet port 6 side communicate with each other. Then, the pressure on the inlet port 4 side decreases. Therefore,
Prevents excessive pressure rise on the inlet port 4 side. When the force acting on the valve body 27 and the elastic force of the compression coil spring 28 are balanced, the valve body 27 closes the valve seat 3. This operation is repeated and the pressure on the inlet port 4 side becomes approximately constant. In this way, the set pressure on the inlet port 4 side can be adjusted by changing the current value of the solenoid 26.

(発明が解決しようとする問題点) ところが、この比例ソレノイド方式においては、(イ)
電流比例の推力を得るための構造上の原因によりソレノ
イド推力が余り大きくなく、又ソレノイドのインダクタ
ンス等による消磁遅れのため、弁体の切換えが遅くなっ
て応答性が悪い、(ロ)ソレノイドの推力特性は熱影響
により変わり易いため、設定圧力にばらつきが生ずる、
(ハ)ソレノイドの吸引作用は可動子ばがりではなくボ
ディにも働くため、ヒステリシス損が発生し、ソレノイ
ド推力が低下して可動子の動作遅れの原因になる、(ニ
)比例ソレノイドは磁気回路に特殊な加工が必要である
、等の特有の欠点がある。
(Problems to be solved by the invention) However, in this proportional solenoid system, (a)
The solenoid thrust is not very large due to the structure of obtaining a thrust proportional to the current, and due to the demagnetization delay caused by the solenoid's inductance, the switching of the valve body is slow and the response is poor. (b) Solenoid thrust Characteristics tend to change due to thermal effects, resulting in variations in set pressure.
(c) The suction action of the solenoid acts not only on the mover but also on the body, which causes hysteresis loss, which reduces the solenoid thrust and causes a delay in the mover's operation. (d) The proportional solenoid is a magnetic circuit. It has its own drawbacks, such as the need for special processing.

そこで、このように種々の欠点を有する比例ソレノイド
方式を採用せず、それらに代えて新規な圧電素子方式を
採用したものが本発明である。
Therefore, the present invention does not employ the proportional solenoid system which has various drawbacks as described above, but instead employs a novel piezoelectric element system.

発明の構成 (問題点を解決するための手段) すなわち、第一発明は、弁室に弁座を設けて入口ポート
側の通路と出口ポート側の通路とをこの弁座及び弁室を
介して連通し、弁室には弁座に対し開閉可能な弁体を有
する可動機構を内装した弁において、前記可動機構には
弁体制御用圧電素子積層体により伸縮可能な可動体と、
この可動体に取付けた弁体が可動体の伸長により弁座を
閉じる方向へ動くときその反力を受ける位置決め手段と
を設けたものである。
Structure of the Invention (Means for Solving Problems) That is, the first invention provides a valve seat in the valve chamber, and connects the passage on the inlet port side and the passage on the outlet port side through the valve seat and the valve chamber. A valve that includes a movable mechanism that communicates with the valve chamber and has a valve body that can open and close with respect to a valve seat, wherein the movable mechanism includes a movable body that is expandable and retractable by a piezoelectric element laminate for controlling the valve body;
A positioning means is provided which receives a reaction force when the valve body attached to the movable body moves in the direction of closing the valve seat due to the extension of the movable body.

又、第二発明は、弁室に弁座を設けて入口ポート側の通
路と出口ポート側の通路とをこの弁座及び弁室を介して
連通し、弁室には弁座に対し開閉可能な弁体を有する可
動機構を内装した弁において、前記可動機構には弁体制
御用圧電素子積層体により伸縮可能で且つその伸縮方向
へ弁室内を移動可能な可動体と、この可動体に取付けた
ばねにより弁座に対し圧接された弁体と、弁室内面に圧
接固定可能で且つ可動体に固定されてこれとともに移動
可能なクランプ用圧電素子積層体を有する位置決め手段
とを設け、弁室内にはこの可動体及6一 び位置決め手段により区画して、弁座に対応する弁体収
容室とその反対側の背圧室とを設け、この背圧室と入口
ポート側の通路とをパイロット通路により連通したもの
である。
Further, in the second invention, a valve seat is provided in the valve chamber, a passage on the inlet port side and a passage on the outlet port side are communicated through the valve seat and the valve chamber, and the valve chamber can be opened and closed with respect to the valve seat. The movable mechanism includes a movable body that can be expanded and contracted by a piezoelectric element laminate for controlling the valve body and that can move within the valve chamber in the direction of expansion and contraction, and a spring that is attached to the movable body. A positioning means having a piezoelectric element laminate for clamping which can be fixed to the inner surface of the valve chamber under pressure and which is fixed to a movable body and can be moved together with the valve body is provided. A valve body housing chamber corresponding to the valve seat and a back pressure chamber on the opposite side are separated by the movable body, the positioning means 6, and the valve seat, and the back pressure chamber and the passage on the inlet port side are connected by a pilot passage. It is connected.

(作用) そして、第一発明に係る圧N累子式弁を圧力制御弁とし
て利用した場合について説明すると、弁体制御用圧電素
子積層体に電圧指令がない場合には、入口ポートから供
給される圧油は弁座と弁体との間を通って出口ポートへ
流れる。弁体制御用圧電素子積層体に電圧を印加すると
、この圧電素子fim体は印加電圧に応じた寸法だけ伸
長し、この伸長寸法により弁座と弁体との間のim+、
又は弁座に対する弁体の圧接力が決まる。従って、この
印加電圧を変更すれば、入日ポート側の圧力を任意の設
定値に保つことができる。
(Function) Then, to explain the case where the pressure-N accumulator type valve according to the first invention is used as a pressure control valve, when there is no voltage command to the piezoelectric element stack for controlling the valve body, the voltage is supplied from the inlet port. Pressure oil flows between the valve seat and the valve body to the outlet port. When a voltage is applied to the piezoelectric element laminate for controlling the valve body, this piezoelectric element fim body expands by a dimension corresponding to the applied voltage, and due to this expansion dimension, the distance between the valve seat and the valve body im+,
Or the pressure force of the valve body against the valve seat is determined. Therefore, by changing this applied voltage, the pressure on the incoming port side can be maintained at an arbitrary set value.

又、第二発明に係る圧電素子式弁を圧力tfiljlJ
弁として利用した場合について説明すると、弁体#II
御用及びクランプ用圧電素子積層体に電圧指令がない場
合には、可動体及びクランプ用圧電素子積層体は弁室内
を移動可能であり、又入口ポートから供給される圧油は
弁座と弁体との間を通って出口ポートへ流れる。まず、
クランプ用圧電素子積層体に電圧を印加すると、クラン
プ用圧電素子積層体は伸長して弁室の内面に固定される
。次いで、弁体制御用圧電素子積層体に電圧を印加する
と、この圧M素子積層体は印加11圧に応じた寸法だけ
伸長し、この伸長寸法によりばねの弾性力が変わって弁
座に対する弁体の圧接力が決まる。クランプ用圧電素子
積層体の印加電圧が短時間切られると、入口ポート側か
らパイロット通路を通って背圧室に流入された圧油によ
り、可動体及びクランプ用圧電素子積層体は弁座側へ移
動し、弁座に対する弁体の圧接力が増大する。短時間の
後再びクランプ用圧電素子積層体に電圧が印加されると
、この圧電素子積層体が伸長して弁室の内面に固定され
、可動体はこの移動位四で位置決めされる。
Moreover, the piezoelectric element type valve according to the second invention has a pressure tfiljlJ
To explain when used as a valve, valve body #II
When there is no voltage command for the piezoelectric element stack for use and clamping, the movable body and the piezoelectric element stack for clamping can move within the valve chamber, and the pressure oil supplied from the inlet port is applied to the valve seat and the valve body. and to the exit port. first,
When a voltage is applied to the piezoelectric element stack for clamping, the piezoelectric element stack for clamping expands and is fixed to the inner surface of the valve chamber. Next, when a voltage is applied to the piezoelectric element laminate for controlling the valve body, this piezoelectric M element laminate expands by a dimension corresponding to the applied pressure, and the elastic force of the spring changes depending on this expansion dimension, causing the valve body to move against the valve seat. The pressure welding force is determined. When the voltage applied to the piezoelectric element stack for clamping is cut off for a short time, the movable body and the piezoelectric element stack for clamping move toward the valve seat side due to the pressure oil flowing into the back pressure chamber from the inlet port side through the pilot passage. The pressure of the valve body against the valve seat increases. When a voltage is again applied to the clamping piezoelectric element stack after a short period of time, the piezoelectric element stack expands and is fixed to the inner surface of the valve chamber, and the movable body is positioned at this movement position.

従って、弁体制御用圧電素子積層体の印加電圧の変更及
びクランプ用圧電素子41iWi体の印加電圧の大切調
節により、入口ボー!・側の圧力を任意の設定値に保つ
ことができる。
Therefore, by changing the voltage applied to the piezoelectric element stack for controlling the valve body and carefully adjusting the voltage applied to the piezoelectric element 41iWi body for clamping, the inlet bow can be fixed. - Side pressure can be maintained at any set value.

(実施例) まず、第一発明を圧り制御弁に具体化した第一実施例を
第1図及び第2図に従って説明する。
(Embodiment) First, a first embodiment in which the first invention is embodied in a pressure control valve will be described with reference to FIGS. 1 and 2.

ボディ1内には弁室2が設けられ、その左側に弁fA3
が形成されている。ボディ1の左側には入口ポート4及
び出口ポート6がIQGプられ、入口ポート4側の通路
5と出口ポート6側の通路7とは弁F!3及び弁室2を
介して連通されている。
A valve chamber 2 is provided in the body 1, and a valve fA3 is provided on the left side of the valve chamber 2.
is formed. An inlet port 4 and an outlet port 6 are connected to the left side of the body 1, and a passage 5 on the inlet port 4 side and a passage 7 on the outlet port 6 side are connected to a valve F! 3 and the valve chamber 2.

前記弁室2内には弁座3を開閉する可動機構8が内装さ
れている。すなわち、その可動体9は伸縮可能な弁体制
御用圧電素子積層体10(1+u+厚前後の圧I!素子
をその伸縮方向が同一となるように積層したもの)と、
これを一体向に挟着する左右一対のガイド11.12と
からなり、この両ガイド11,12は弁室2の内周面に
摺接されて圧電素子積層体10の伸縮方向へ移動可能に
なっている。弁座3に対応する左側ガイド11には0リ
ング13が嵌め込まれ、このガイド11と弁座3との間
には弁体収容室2aが設けられている。このガイド11
には弁座3へ向けて弁体保持部14が突設され、これに
形成された嵌合孔14aに対し、弁体15に形成された
嵌合軸5I115aが移動可能に嵌挿されている。この
弁体15は弁座3を開閉することができるとようになっ
ている。右側ガイド12に対応してボディ1の右側には
Ilmねじ16が螺合され、その内端がこのガイド12
に当接し得るようになっている。この調節ねじ16は弁
体15が圧電素子積層体10の伸長(矢印へ方向)によ
り弁座3を閉じる方向へ動くときその反力を受けるよう
に可動体9の右方への移動を炭制する。
A movable mechanism 8 for opening and closing the valve seat 3 is installed inside the valve chamber 2. That is, the movable body 9 includes a piezoelectric element laminate 10 for controlling a valve body that is expandable and retractable (pressure I! elements having a thickness of about 1+u+ are stacked so that their expansion and contraction directions are the same),
It consists of a pair of left and right guides 11 and 12 that sandwich this in one direction, and these guides 11 and 12 are in sliding contact with the inner circumferential surface of the valve chamber 2 and are movable in the direction of expansion and contraction of the piezoelectric element laminate 10. It has become. An O-ring 13 is fitted into the left guide 11 corresponding to the valve seat 3, and a valve body housing chamber 2a is provided between the guide 11 and the valve seat 3. This guide 11
A valve body holding portion 14 is provided to protrude toward the valve seat 3, and a fitting shaft 5I115a formed on the valve body 15 is movably fitted into a fitting hole 14a formed in the holding portion 14. . This valve body 15 is designed to be able to open and close the valve seat 3. An Ilm screw 16 is screwed onto the right side of the body 1 corresponding to the right side guide 12, and its inner end is connected to this guide 12.
It is designed so that it can come into contact with the This adjustment screw 16 controls the rightward movement of the movable body 9 so that when the valve body 15 moves in the direction of closing the valve seat 3 due to the expansion of the piezoelectric element laminate 10 (in the direction of the arrow), it receives the reaction force. do.

前記圧電素子1illi体10の各圧電素子は圧力設定
器17に接続されている。この圧力設定器17は入口ポ
ート4側の圧力を検出する圧力センサ(図示せず)から
の入力に基づき所定の電圧指令を圧電素子に出力するよ
うになっている。なお、圧電素子積層体10の一部を感
圧センサとして使い、前記圧力センサの代用とすること
も可能である。
Each piezoelectric element of the piezoelectric element body 10 is connected to a pressure setting device 17. The pressure setting device 17 outputs a predetermined voltage command to the piezoelectric element based on input from a pressure sensor (not shown) that detects the pressure on the inlet port 4 side. Note that it is also possible to use a part of the piezoelectric element laminate 10 as a pressure sensor in place of the pressure sensor.

さて、圧電素子積層体10に電圧指令がない場合には、
弁体15は弁座3に対する圧接力がなく弁座3に対して
離れているか、又は離間可能な状態で可動体9の弁体保
持部14に保持されている。
Now, if there is no voltage command for the piezoelectric element stack 10,
The valve body 15 is either separated from the valve seat 3 without any pressing force against the valve seat 3, or is held by the valve body holding portion 14 of the movable body 9 in a state where it can be separated.

入力ポート4から供給される圧油は弁座3と弁体15と
の間を通って出口ポート6へ流れる。
Pressure oil supplied from the input port 4 passes between the valve seat 3 and the valve body 15 and flows to the outlet port 6.

この状態から、まず調節ねじ16を操作して可動体9の
移動規制位置を決め、その後圧力設定器17により圧電
素子積層体10に電圧を印加すると、圧電素子積層体1
0は印加電圧に応じた寸法だけA矢印方向へ伸ばされる
。このとき、可動体9の右側は調節ねじ16により位置
決めされているため、可動体9はここを中心にして弁座
3側へ伸長される。この伸長により、弁体15は弁座3
を閉じる方向へ動き、これに圧接される。弁体15によ
り弁座3が閉じられると、入口ポート4側から出口ポー
ト6側への流れは遮断され、入口ポート4側の圧力は上
昇する。入口ポート4側の圧力は前記圧力センサにより
検出され、この検出圧力は圧力設定器17に入力される
。この検出圧力が入口ポート4側の圧力の設定値よりも
高くなると、それらの圧力差に応じて印加電圧が変更さ
れ、圧電素子積層体10が反A矢印方向へ収縮する。
From this state, first operate the adjustment screw 16 to determine the movement restriction position of the movable body 9, and then apply voltage to the piezoelectric element laminate 10 using the pressure setting device 17.
0 is extended in the direction of arrow A by a dimension corresponding to the applied voltage. At this time, since the right side of the movable body 9 is positioned by the adjustment screw 16, the movable body 9 is extended toward the valve seat 3 with this as the center. Due to this expansion, the valve body 15
moves in the direction of closing and is pressed against it. When the valve seat 3 is closed by the valve body 15, the flow from the inlet port 4 side to the outlet port 6 side is blocked, and the pressure on the inlet port 4 side increases. The pressure on the inlet port 4 side is detected by the pressure sensor, and this detected pressure is input to the pressure setting device 17. When this detected pressure becomes higher than the set value of the pressure on the inlet port 4 side, the applied voltage is changed according to the pressure difference, and the piezoelectric element stack 10 contracts in the direction opposite to the arrow A.

この収縮により、第2図に示すように弁座3と弁体15
との間に隙間Sができ、入口ポート4側の圧油はこの隙
間Sを通って出口ポート6側へ流れ、入口ポート4側の
圧力が減少する。この圧力が設定値に近付くと、それら
の圧力差に応じて印加電圧が変更され、再び圧電素子積
層体10が伸長して弁座3が弁体15により閉じられる
か、又は弁座3と弁体15との間の隙間Sが狭くなる。
Due to this contraction, the valve seat 3 and the valve body 15 as shown in FIG.
A gap S is formed between the two, and the pressure oil on the inlet port 4 side flows through this gap S to the outlet port 6 side, and the pressure on the inlet port 4 side decreases. When this pressure approaches the set value, the applied voltage is changed according to the pressure difference, and the piezoelectric element stack 10 expands again and the valve seat 3 is closed by the valve body 15, or the valve seat 3 and the valve The gap S between the body 15 becomes narrower.

このように、入口ポート4側の圧力に応じて印加電圧を
変更することにより、圧電素子積層体10の伸縮寸法を
変更し、弁座3の閉塞又は弁座3と弁体15との間の隙
間Sの増減調節を行って、入口ポート4側の圧力を任意
の設定値に保つことができる。
In this way, by changing the applied voltage according to the pressure on the inlet port 4 side, the expansion and contraction dimensions of the piezoelectric element laminate 10 are changed, and the valve seat 3 is closed or the valve seat 3 and the valve body 15 are closed. By increasing or decreasing the gap S, the pressure on the inlet port 4 side can be maintained at an arbitrary set value.

一方、別の制御方法としては、弁座3と弁体15との間
に任意の隙間Sを常時確保することができるように圧電
索子w4層体10の伸縮を圧力設定器17により制御す
れば、この隙間Sの絞り抵抗により圧力制御及び流量制
御が可能になる。
On the other hand, as another control method, the expansion and contraction of the piezoelectric cord w4 layer body 10 is controlled by the pressure setting device 17 so that an arbitrary gap S can always be secured between the valve seat 3 and the valve body 15. For example, the restricting resistance of this gap S enables pressure control and flow rate control.

次に、第−及び第二発明を圧力制御弁に具体化した第二
実施例を前記第一実施例との相違点を中心に第3図に従
って説明する。
Next, a second embodiment in which the first and second inventions are embodied in a pressure control valve will be described with reference to FIG. 3, focusing on the differences from the first embodiment.

可動体9内において、弁体制御用圧電素子積層体10と
右側ガイド12との間に別のクランプ用圧電素子積層体
18が一体的に挟着され、可動体9とともに弁室2内を
移動可能である。このクランプ用圧電素子積層体18の
各圧電素子は圧力設定器17に接続されている。この圧
力設定器17からの印加電圧により、この圧電素子積層
体18は伸長して弁室2の内面に圧接固定可能になって
いる。このクランプ用圧電素子積層体18は弁体15が
弁体制御用圧電素子積層体10の伸長により弁座3を閉
じる方向へ動くときその反力を受けるように可動体9の
右方への移動を一規制する。弁室2のうち弁体収容室2
aにおいて、弁体15はこれと可動体9の左側ガイド1
1との間に介在された弁体用圧縮コイルばね19により
弁座3に圧接されている。この弁体収容室2aにはその
内面と左側ガイド11との間において可動体リターン用
圧縮コイルばね20が介在されている。可動体9の右側
ガイド12には0リング21が嵌め込まれ、可動体9及
びその内部のクランプ用圧電素子積層体18により弁室
2内が区画されて、前記弁体収容室2aとその反対側の
背圧室2bとが設けられている。この背圧室2bと入口
ポート4側の通路5とはパイロット通路22により連通
されている。このパイロット通路22と入口ポート4と
の間において入口ポート4側の通路5には絞り23が設
けられている。
Inside the movable body 9, another piezoelectric element laminate 18 for clamping is integrally sandwiched between the piezoelectric element laminate 10 for controlling the valve body and the right side guide 12, and is movable within the valve chamber 2 together with the movable body 9. It is. Each piezoelectric element of this clamping piezoelectric element stack 18 is connected to a pressure setting device 17. The piezoelectric element laminate 18 is expanded by the applied voltage from the pressure setting device 17 and can be fixed to the inner surface of the valve chamber 2 under pressure. This piezoelectric element laminate 18 for clamping prevents the movable body 9 from moving to the right so that it receives a reaction force when the valve body 15 moves in the direction of closing the valve seat 3 due to the expansion of the piezoelectric element laminate 10 for controlling the valve body. One regulation. Valve body housing chamber 2 in valve chamber 2
In a, the valve body 15 is connected to this and the left guide 1 of the movable body 9.
1 and is pressed against the valve seat 3 by a compression coil spring 19 for the valve body. A compression coil spring 20 for returning the movable body is interposed between the inner surface of the valve body housing chamber 2a and the left side guide 11. An O-ring 21 is fitted into the right guide 12 of the movable body 9, and the inside of the valve chamber 2 is partitioned by the movable body 9 and the piezoelectric element laminate 18 for clamping therein, and the inside of the valve chamber 2 is divided into the valve body housing chamber 2a and the opposite side thereof. A back pressure chamber 2b is provided. This back pressure chamber 2b and the passage 5 on the side of the inlet port 4 are communicated through a pilot passage 22. A throttle 23 is provided in the passage 5 on the inlet port 4 side between the pilot passage 22 and the inlet port 4.

さて、弁体制御用及びクランプ用圧電素子積層体10.
18に電圧指令がない場合には、可動体9及びクランプ
用圧電素子積層体18は弁室2内を移動可能であり、弁
体15は弁座3に対する圧接力がなく弁座3に対して離
れているか、又は離間可能な状態になっている。入口ポ
ート4から供給される圧油は弁座3と弁体15との間を
通って出口ポート6へ流れる。
Now, piezoelectric element laminate 10 for valve body control and clamping.
When there is no voltage command in 18, the movable body 9 and the piezoelectric element laminate for clamping 18 are movable within the valve chamber 2, and the valve body 15 has no pressure contact force against the valve seat 3. Separated or ready to be separated. Pressure oil supplied from the inlet port 4 passes between the valve seat 3 and the valve body 15 and flows to the outlet port 6.

この状態から、まず1節ねじ16を操作して可動体9の
移動規制位置を決め、その後圧力設定器17によりクラ
ンプ用圧電素子積層体18に電圧を印加すると、クラン
プ用圧電素子積層体18は伸長して弁室2の内面に固定
される。次いで、圧力設定器17により弁体制御用圧電
素子積層体10に電圧を印加すると、弁体制御用圧電素
子積層体10は印加電圧に応じた寸法だけA矢印方向へ
伸ばされる。このとき、可動体9はクランプ用圧電素子
積層体18により位置決めされているため、可動体9は
ここを中心にして弁座3側へ伸長される。この伸長によ
り、弁体用圧縮コイルばね19が圧縮され、弁体15が
弁座3に圧接される。弁体15により弁座3が閉じられ
ると、入口ポート4側から出口ポート6側への流れは遮
断され、入口ポート4側の圧力は上背する。
From this state, first operate the one-bar screw 16 to determine the movement restriction position of the movable body 9, and then apply voltage to the clamping piezoelectric element laminate 18 using the pressure setting device 17. It is extended and fixed to the inner surface of the valve chamber 2. Next, when a voltage is applied to the valve body control piezoelectric element stack 10 by the pressure setting device 17, the valve body control piezoelectric element stack 10 is expanded in the direction of arrow A by a dimension corresponding to the applied voltage. At this time, since the movable body 9 is positioned by the clamping piezoelectric element stack 18, the movable body 9 is extended toward the valve seat 3 with this as the center. Due to this expansion, the valve body compression coil spring 19 is compressed, and the valve body 15 is pressed against the valve seat 3. When the valve seat 3 is closed by the valve body 15, the flow from the inlet port 4 side to the outlet port 6 side is blocked, and the pressure on the inlet port 4 side increases.

この状態で、クランプ用圧電素子li層体18の印加電
圧が短時間切られると、入口ポート4側からパイロット
通路22を通って背圧室2bに流入された圧油は可動体
9の右側ガイド12に作用する。これにより、可動体9
及びクランプ用圧電素子積層体18は可動体リターン用
圧縮コイルばね20の付勢力に抗して弁座3側へ移動し
、弁座3に対する弁体15の、圧接力が増大する。短時
間の後再びクランプ用圧電素子積層体18に電圧が印加
されると、クランプ用圧電素子積層体18が伸長して弁
室2の内面に固定され、可動体9はこの移動位置で位置
決めされる。
In this state, when the voltage applied to the clamping piezoelectric element li layer body 18 is cut off for a short time, the pressure oil flowing from the inlet port 4 side through the pilot passage 22 into the back pressure chamber 2b guides the right side of the movable body 9. Acts on 12. As a result, the movable body 9
The clamping piezoelectric element stack 18 moves toward the valve seat 3 against the biasing force of the movable body return compression coil spring 20, and the pressing force of the valve body 15 against the valve seat 3 increases. When voltage is applied to the piezoelectric element stack 18 for clamping again after a short time, the piezoelectric element stack 18 for clamping expands and is fixed to the inner surface of the valve chamber 2, and the movable body 9 is positioned at this movement position. Ru.

入口ポート4側の圧力は圧力センサにより検出され、こ
の検出圧力は圧力設定器17に入力される。この検出圧
力が入口ポート4側の圧力の設定値よりも高くなると、
弁体15に働く力が弁体用圧縮コイルばね19の弾性力
に打ち勝ち、弁体15が弁座3を開いて入口ポート4側
と出口ポート6側とが連通し、入口ポート4側の圧力が
下がる。
The pressure on the inlet port 4 side is detected by a pressure sensor, and this detected pressure is input to the pressure setting device 17. When this detected pressure becomes higher than the pressure setting value on the inlet port 4 side,
The force acting on the valve body 15 overcomes the elastic force of the compression coil spring 19 for the valve body, and the valve body 15 opens the valve seat 3 to communicate the inlet port 4 side and the outlet port 6 side, and the pressure on the inlet port 4 side is reduced. goes down.

従って、入口ポート4側の過度な昇圧を防止し、入口ポ
ート4側の圧力を任意の設定値に保つことができる。
Therefore, excessive pressure rise on the inlet port 4 side can be prevented, and the pressure on the inlet port 4 side can be maintained at an arbitrary set value.

弁体制御用圧電素子積層体10への印加電圧が変更され
ると、その印加電圧に応じて弁体制御用圧電素子積層体
10が伸縮し、弁体用圧縮コイルばね19の撓み量が変
わる。この撓み量に応じて弁座3に対する弁体15の圧
接力が決まり、入口ポート4側の設定圧力を変更するこ
とができる。
When the voltage applied to the valve body control piezoelectric element stack 10 is changed, the valve body control piezoelectric element stack 10 expands and contracts in accordance with the applied voltage, and the amount of deflection of the valve body compression coil spring 19 changes. The pressing force of the valve body 15 against the valve seat 3 is determined according to this amount of deflection, and the set pressure on the inlet port 4 side can be changed.

前記クランプ用圧電素子積層体18の切時間を変更する
と、クランプ用圧電素子積層体18の固定位置が変わる
。従って、弁体制御用圧電素子積層体10による弁体1
5の圧接力の調節に加えて、このクランプ用圧電素子積
層体18によっても弁体15の圧接力を調節することが
できる。
When the cutting time of the piezoelectric element laminate 18 for clamping is changed, the fixing position of the piezoelectric element laminate 18 for clamping is changed. Therefore, the valve body 1 by the piezoelectric element laminate 10 for controlling the valve body
In addition to adjusting the pressure contact force of the valve body 15, the pressure contact force of the valve body 15 can also be adjusted by this piezoelectric element laminate 18 for clamping.

弁体制御用及びクランプ用圧電素子積層体10゜18の
印加電圧を切ると、弁体制御用圧電素子積層体10が反
A矢印方向へ収縮し、弁座3が開いて入口ポート4側の
圧油は出口ポート6側へ流れる。この入口ポート4側の
通路5には絞り23があるため、この絞り23と弁座3
との間が低圧になり、背圧室2bの圧油がパイロット通
路22を通って入口ポート4側の通路5に逆流する。こ
れにより、可動体9及びクランプ用圧電素子積層体18
は可動体リターン用圧縮コイルばね20により右方へ戻
されて調節ねじ16に当接したところで止まる。
When the voltage applied to the valve body control and clamping piezoelectric element stack 10°18 is cut off, the valve body control piezoelectric element stack 10 contracts in the direction of the arrow A, the valve seat 3 opens, and the pressure oil on the inlet port 4 side is released. flows to the exit port 6 side. Since there is a throttle 23 in the passage 5 on the side of the inlet port 4, this throttle 23 and the valve seat 3
The pressure becomes low between the two, and the pressure oil in the back pressure chamber 2b passes through the pilot passage 22 and flows back into the passage 5 on the inlet port 4 side. As a result, the movable body 9 and the clamping piezoelectric element laminate 18
is returned to the right by the movable body return compression coil spring 20 and stops when it comes into contact with the adjustment screw 16.

第4図に示す第三実施例は前記第二実施例における可動
体リターン用圧縮コイルばね20に代えて、背圧室2b
に可動体リターン用引張コイルばね24を設け、その両
端を可動体9の右側ガイド12及び背圧室2bの内面に
固着したものであり、この第三実施例の作用は第二実施
例の場合と同様である。
The third embodiment shown in FIG. 4 replaces the movable body return compression coil spring 20 in the second embodiment with a back pressure chamber 2b.
A tension coil spring 24 for returning the movable body is provided, and both ends thereof are fixed to the right side guide 12 of the movable body 9 and the inner surface of the back pressure chamber 2b.The function of this third embodiment is the same as that of the second embodiment. It is similar to

発明の効果 要するに第一発明によれば、従来の比例ンレノイド方式
を採用せず、それに代えて圧電素子方式を採用したので
、比例ンレノイド方式特有の欠点を解消することができ
るばかりではなく、(イ)設定圧力変更が高速で行えて
応答性が良くなるとともに、脈動防止も良好である、(
ロ)消費電力が低減でき、オーバーヒートの心配がない
とともに、小形化が可能である、(ハ)部品点数の削減
及び構造の簡素化が図れる、(ニ)制御方法を変えれば
、同一構造のままで、減圧弁等としての使用が可能であ
る、(ホ)制御方法によっては、弁体と弁座との接触の
ないリリーフ弁が可能であって弁騒音低減、製品寿命の
向上が図れる、等の種々の利点がある。
Effects of the Invention In short, according to the first invention, since the conventional proportional lenoid system is not adopted and a piezoelectric element system is adopted instead, it is possible not only to eliminate the drawbacks peculiar to the proportional lenoid system, but also to ) The set pressure can be changed quickly, resulting in better responsiveness and better prevention of pulsation.
(b) Power consumption can be reduced, there is no need to worry about overheating, and miniaturization is possible. (c) The number of parts can be reduced and the structure simplified. (d) The same structure can be maintained by changing the control method. (e) Depending on the control method, it is possible to create a relief valve without contact between the valve body and the valve seat, reducing valve noise and improving product life. There are various advantages.

又、第二発明によれば、前記第一発明の効果のうち(ホ
)を除く(イ)〜(ニ)と同様な効果があり、しかも弁
体制御用圧電素子積層体による弁体圧接力の調節に加え
て、パイロット通路及びクランプ用圧電素子積層体によ
る弁体圧接力のM節が行えるので、細かく広範囲の圧力
制御が可能であり、制御性が良くなる効果がある。
Further, according to the second invention, there are effects similar to those in (a) to (d) except for (e) among the effects of the first invention, and in addition, the valve body pressure contact force by the piezoelectric element laminate for controlling the valve body is reduced. In addition to the adjustment, M nodes of the pressure contact force of the valve body by the pilot passage and the piezoelectric element stack for clamping can be performed, so that fine pressure control over a wide range is possible, which has the effect of improving controllability.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は第一実施例に係る圧力制御弁を示す高面図、第
2図は第一実施例においてその弁座及び弁体を示す部分
拡大断面図、第3図は第二実施例に係る圧力制御弁を示
す断面図、第4図は第三実施例に係る圧力制御弁を示す
断面図、第5図は従来の圧力制御弁を示す断面図である
。 図中、2は弁室、2aは弁体収容室、2bは背圧室、3
ば弁座、4ば入口ポート、6は出口ポート、8は可動機
構、9は可動体、10は弁体制御用圧電素子積層体、1
5は弁体、16は調節ねじ(位置決め手段)、18はク
ランプ用圧電素子積層体く位置決め手段)、19は弁体
用圧縮コイルばね、20は可動体リターン用圧縮コイル
ばね、22はパイロット通路、24は可動体リターン用
引張コイルばねである。
Fig. 1 is a top view showing the pressure control valve according to the first embodiment, Fig. 2 is a partially enlarged sectional view showing the valve seat and valve body in the first embodiment, and Fig. 3 is a top view showing the pressure control valve according to the first embodiment. FIG. 4 is a sectional view showing a pressure control valve according to a third embodiment, and FIG. 5 is a sectional view showing a conventional pressure control valve. In the figure, 2 is a valve chamber, 2a is a valve body storage chamber, 2b is a back pressure chamber, 3
1 is a valve seat, 4 is an inlet port, 6 is an outlet port, 8 is a movable mechanism, 9 is a movable body, 10 is a piezoelectric element laminate for controlling the valve body, 1
5 is a valve body, 16 is an adjustment screw (positioning means), 18 is a piezoelectric element stack for clamp (positioning means), 19 is a compression coil spring for the valve body, 20 is a compression coil spring for movable body return, and 22 is a pilot passage. , 24 are tension coil springs for returning the movable body.

Claims (1)

【特許請求の範囲】 1、弁室に弁座を設けて入口ポート側の通路と出口ポー
ト側の通路とをこの弁座及び弁室を介して連通し、弁室
には弁座に対し開閉可能な弁体を有する可動機構を内装
した弁において、 前記可動機構には弁体制御用圧電素子積層体により伸縮
可能な可動体と、この可動体に取付けた弁体が可動体の
伸長により弁座を閉じる方向へ動くときその反力を受け
る位置決め手段とを設けてなる圧電素子式弁。 2、可動体はその弁体制御用圧電素子積層体の伸縮方向
へ弁室内を移動可能であり、位置決め手段は弁体が可動
体の伸長により弁座を閉じる方向へ動くときその反力を
受けるように可動体に当接し得る調節ねじである特許請
求の範囲第1項に記載の圧電素子式弁。 3、可動体はその弁体制御用圧電素子積層体の伸縮方向
へ弁室内を移動可能であり、位置決め手段は弁室内面に
圧接固定可能なクランプ用圧電素子積層体であり、可動
体に固定されてこれとともに移動可能である特許請求の
範囲1項に記載の圧電素子式弁。 4、弁室に弁座を設けて入口ポート側の通路と出口ポー
ト側の通路とをこの弁座及び弁室を介して連通し、弁室
には弁座に対し開閉可能な弁体を有する可動機構を内装
した弁において、 前記可動機構には弁体制御用圧電素子積層体により伸縮
可能で且つその伸縮方向へ弁室内を移動可能な可動体と
、この可動体に取付けたばねにより弁座に対し圧接され
た弁体と、弁室内面に圧接固定可能で且つ可動体に固定
されてこれとともに移動可能なクランプ用圧電素子積層
体を有する位置決め手段とを設け、弁室内にはこの可動
体及び位置決め手段により区画して、弁座に対応する弁
体収容室とその反対側の背圧室とを設け、この背圧室と
入口ポート側の通路とをパイロット通路により連通して
なる圧電素子式弁。
[Scope of Claims] 1. A valve seat is provided in the valve chamber, and a passage on the inlet port side and a passage on the outlet port side are communicated via the valve seat and the valve chamber, and the valve chamber is configured to open and close with respect to the valve seat. In this valve, the movable mechanism includes a movable body that can be expanded and contracted by a piezoelectric element stack for controlling the valve body, and the valve body attached to this movable body moves the valve seat by the expansion of the movable body. A piezoelectric element type valve comprising positioning means that receives a reaction force when the valve moves in the closing direction. 2. The movable body is movable within the valve chamber in the direction of expansion and contraction of the piezoelectric element laminate for controlling the valve body, and the positioning means is configured to receive the reaction force when the valve body moves in the direction of closing the valve seat due to the expansion of the movable body. The piezoelectric element type valve according to claim 1, which is an adjustment screw that can come into contact with the movable body. 3. The movable body is movable within the valve chamber in the direction of expansion and contraction of the piezoelectric element laminate for controlling the valve body, and the positioning means is a piezoelectric element laminate for clamping that can be fixed to the inner surface of the valve chamber by pressure, and is fixed to the movable body. A piezoelectric element valve according to claim 1, which is movable together with the piezoelectric valve. 4. A valve seat is provided in the valve chamber to communicate the passage on the inlet port side and the passage on the outlet port side via the valve seat and the valve chamber, and the valve chamber has a valve body that can be opened and closed with respect to the valve seat. In a valve equipped with a movable mechanism, the movable mechanism includes a movable body that can be expanded and contracted by a piezoelectric element laminate for controlling the valve body and that can be moved within the valve chamber in the direction of expansion and contraction, and a spring attached to the movable body that moves the movable body against the valve seat. A pressure-welded valve body and a positioning means having a piezoelectric element stack for clamping which can be fixed to the inner surface of the valve chamber by pressure contact and which is fixed to a movable body and can be moved together with the movable body are provided. A piezoelectric element valve comprising a valve body housing chamber corresponding to a valve seat and a back pressure chamber on the opposite side, which are divided by a means, and the back pressure chamber and a passage on the inlet port side are communicated by a pilot passage. .
JP7460486A 1986-03-31 1986-03-31 Piezoelectric element type valve Granted JPS62233578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7460486A JPS62233578A (en) 1986-03-31 1986-03-31 Piezoelectric element type valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7460486A JPS62233578A (en) 1986-03-31 1986-03-31 Piezoelectric element type valve

Publications (2)

Publication Number Publication Date
JPS62233578A true JPS62233578A (en) 1987-10-13
JPH0481665B2 JPH0481665B2 (en) 1992-12-24

Family

ID=13551932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7460486A Granted JPS62233578A (en) 1986-03-31 1986-03-31 Piezoelectric element type valve

Country Status (1)

Country Link
JP (1) JPS62233578A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0455607U (en) * 1990-09-14 1992-05-13
US5138885A (en) * 1990-03-16 1992-08-18 Matsushita Electric Industrial Co., Ltd. Piezoelectric-type pressure sensor
JP2005155878A (en) * 2003-11-28 2005-06-16 Asahi Organic Chem Ind Co Ltd Flow rate adjustment valve
JP2008008356A (en) * 2006-06-28 2008-01-17 Noiberuku Kk Piezoelectric drive mechanism, valve, and brake device
CN104879549A (en) * 2015-04-10 2015-09-02 孟书芳 Multi-head-control high-sensitive air valve

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496043A (en) * 1971-06-04 1974-01-19
JPS6078179A (en) * 1983-10-04 1985-05-02 Shoketsu Kinzoku Kogyo Co Ltd Hydraulic control valve
JPS60129482A (en) * 1983-12-13 1985-07-10 Nippon Denso Co Ltd Piezoelectric element drive control valve
JPS60129481A (en) * 1983-12-13 1985-07-10 Nippon Denso Co Ltd Piezoelectric element drive control valve

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496043A (en) * 1971-06-04 1974-01-19
JPS6078179A (en) * 1983-10-04 1985-05-02 Shoketsu Kinzoku Kogyo Co Ltd Hydraulic control valve
JPS60129482A (en) * 1983-12-13 1985-07-10 Nippon Denso Co Ltd Piezoelectric element drive control valve
JPS60129481A (en) * 1983-12-13 1985-07-10 Nippon Denso Co Ltd Piezoelectric element drive control valve

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5138885A (en) * 1990-03-16 1992-08-18 Matsushita Electric Industrial Co., Ltd. Piezoelectric-type pressure sensor
JPH0455607U (en) * 1990-09-14 1992-05-13
JP2005155878A (en) * 2003-11-28 2005-06-16 Asahi Organic Chem Ind Co Ltd Flow rate adjustment valve
JP2008008356A (en) * 2006-06-28 2008-01-17 Noiberuku Kk Piezoelectric drive mechanism, valve, and brake device
CN104879549A (en) * 2015-04-10 2015-09-02 孟书芳 Multi-head-control high-sensitive air valve

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