JP2008000765A - X-y stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-Y stage device which can be made compact and lightweight. <P>SOLUTION: This device is provided with a holding part 2 for holding an object 1 to be held, first supporting arms 73, 74 for supporting the holding part 2 and imparting movement in the direction of the X-axis and second supporting arms 37, 38 for supporting the holding part 2 and imparting movement in the direction of the Y-axis. A stand part 3 for supporting the first supporting arms 73, 74 swingably in the X-axis and the Y-axis directions and also supporting the second supporting arms 37, 38 swingably in the X-axis and Y-axis directions is provided to the device. A first actuator 4 for imparting driving power for swinging in the X-axis direction to the first supporting arms 73, 74 and a second actuator 5 for imparting driving power swinging in the Y-axis direction to the second supporting arms 37, 38 are provided to the device. The holding part 2 is supported turnably in all directions to the first supporting arms 73, 74 with the first supporting arms 73, 74 and the holding part 2 is supported turnably in all directions to the second supporting arms 37, 38 with the second supporting arms 37, 38. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an XY stage apparatus.

  Generally, a marking head part for marking on a steel material or the like is mounted, and the marking head part is moved by moving the marking head part in the X-axis direction and the Y-axis direction (in the same plane as the X axis and perpendicular to the X axis). The XY stage device that gives the character trajectory is configured to move the marking head portion linearly in the X-axis and Y-axis directions, respectively, and adjust the amount of movement in the X-axis direction and Y-axis direction as appropriate. By doing so, the marking head portion is moved to a desired position.

  The drive mechanism in such an XY stage apparatus is configured to include a ball screw, a rotary ball spline, and the like.

  14 is a plan sectional view showing the configuration of a conventional XY stage apparatus 200, FIG. 15 is a side sectional view of the XY stage apparatus 200, and FIG. 16 is a front sectional view of the XY stage apparatus 200.

  As shown in FIGS. 14 to 16, the XY stage apparatus 200 includes a Y-axis motor 201 that generates power in the Y-axis direction, a timing pulley 207 provided on the rotation shaft of the Y-axis motor 201, and a timing. A timing pulley 208 connected to the timing pulley 207 via the belt 202, a power of the rotation shaft of the Y-axis motor 201 transmitted through the timing belt 202, and a ball screw 203 that rotates in the same direction as the rotation shaft; Y is a long member extending in a direction orthogonal to the longitudinal direction of the ball screw 203, and is engaged with the ball screw 203 and moves in the longitudinal direction (Y-axis direction) of the ball screw 203 in conjunction with the rotation of the X-axis motor 201. The shaft slide block 204 is a long member arranged in parallel to the longitudinal direction of the ball screw 203 (Y-axis direction) and is a Y-axis slide Is inserted into the lock 204 includes a pair of guide shafts 205, 206 for guiding the Y-axis slide block 204 in the moving direction thereof.

  Further, the XY stage apparatus 200 includes an X-axis motor 211 that generates power in the X-axis direction, a miter gear 212 provided on the rotation shaft of the X-axis motor 211, a miter gear 213 that meshes with the miter gear 212, A ball screw 214 to which a miter gear 213 is fixed at one end and a long member extending in a direction perpendicular to the longitudinal direction of the ball screw 214 are screwed into the ball screw 214 and interlocked with the rotation of the X-axis motor 211. An X-axis slide block 215 that moves in the longitudinal direction (X-axis direction) of 214, and a long member that is arranged in parallel (X-axis direction) with the longitudinal direction of the ball screw 214 and is inserted into the X-axis slide block 215. A pair of guide shafts 216 and 217 for guiding the X-axis slide block 215 in the moving direction thereof.

  Further, the XY stage apparatus 200 includes a center slide plate 220. The center slide plate 220 includes an LM guide 222 (FIGS. 15 and 16) for guiding the center slide plate 220 in the X-axis direction along the X-axis slide block 215, and the center slide plate 220 as the Y-axis slide block. LM guides 223 (FIGS. 15 and 16) for guiding in the Y-axis direction along 204 are provided. For this reason, the center slide plate 220 always moves in the X-axis direction in conjunction with the movement of the X-axis slide block 215 and the Y-axis slide block 204 so as to be positioned at the intersection of the X-axis slide block 215 and the Y-axis slide block 204. Move in the Y-axis direction.

  Furthermore, the XY stage apparatus 200 includes a center slide plate 220 and a marking head part (not shown) provided outside the XY stage apparatus 200 via a opening 221 (FIG. 15). And a connecting member (not shown) for connecting to.

  Accordingly, the marking head portion moves in the same manner as the center slide plate 220.

  However, in the XY stage apparatus 100 having the above-described structure, the Y-axis slide block 204, the X-axis slide block 215, the LM guide 222, and the like along the ball screws 203 and 214 and the guide shafts 205, 206, 216, and 217. It is necessary to move components such as 223, the center slide plate 220, and a connecting member (not shown).

  For this reason, there are problems that the number of parts is large, the apparatus is heavy, and the operability is poor because the moment of inertia is large.

  For this reason, the production speed in the production line may deteriorate due to the longer time required for marking.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an XY stage apparatus that can be made smaller and lighter than conventional ones.

  In order to solve the above problems, an XY stage apparatus of the present invention holds an object to be held and moves it to an arbitrary position in the X-axis direction and the Y-axis direction orthogonal to the X-axis direction. In the apparatus, a holding unit that holds a holding object, a first support arm that supports the holding unit and imparts movement in the X-axis direction to the holding unit, and supports the holding unit, A second support arm that imparts movement in the Y-axis direction; and the first support arm is supported so as to be able to swing in the X-axis direction and the Y-axis direction, and the second support arm is supported in the X-axis direction and A pedestal portion that is supported so as to be able to swing in the Y-axis direction, a first actuator that applies power for swinging in the X-axis direction to the first support arm, and power for swinging in the Y-axis direction are the second A second actuator applied to the support arm of The first support arm supports the holding portion so as to be rotatable in all directions with respect to the first support arm, and the second support arm is attached to the second support arm. In contrast, the holding portion is supported so as to be rotatable in all directions.

  In the XY stage apparatus according to the present invention, the first support arm supports the holding part via a spherical bearing so that the holding part can be rotated with respect to the first support arm. The second support arm preferably supports the holding portion via a spherical bearing so that the holding portion can be rotated in all directions with respect to the second support arm.

  In the XY stage apparatus of the present invention, the first support arm bearing pivotally supported on the gantry so as to be rotatable about the axis in the Y-axis direction, and rotated about the axis in the X-axis direction A second support arm bearing pivotally supported by the pedestal so that the first support arm can be made perpendicular to the Y-axis direction. A direction parallel to the plane and perpendicular to the longitudinal direction of the first support arm is defined as an axial direction, and the first support arm is supported by being swingable about the axis. The second support arm bearing is supported by the gantry through a first support arm bearing, the second support arm is parallel to a plane orthogonal to the X-axis direction, and the The direction perpendicular to the longitudinal direction of the second support arm is the axial direction, By the swivelably supported about an axis, said second support arm, through the second support arm bearing, it is preferable that supported by the gantry.

  In the XY stage apparatus of the present invention, the first actuator generates a rotational force around an axis in the Y-axis direction, while the second actuator has a rotational force around an axis in the X-axis direction. The XY stage apparatus receives a rotational force of the first actuator and swings around an axis in the Y-axis direction, and the first drive The transmission member and the first support arm are connected to each other so as to be rotatable in a plane perpendicular to the Y-axis direction, and the first movement transmission member is swung in the same direction as the first movement. A first link that transmits to one support arm, a second drive transmission member that swings around an axis in the X-axis direction under the rotational force of the second actuator, and the second drive transmission member And the second support a Are connected to each other in a plane perpendicular to the X-axis direction so that the swing motion of the second drive transmission member is transmitted to the second support arm as swing motion in the same direction. It is preferable to further include two links.

  In the XY stage apparatus of the present invention, a pair of the first link and the first support arm and a pair of the second link and the second support arm are provided, and a total of 4 It is preferable that four holding arms support the holding portion at four points.

  In the XY stage apparatus according to the present invention, it is preferable that a pair of the first support arm and the second support arm are provided, and the holding unit is supported at four points by the four support arms.

  In the XY stage apparatus according to the present invention, it is preferable that the first and second actuators are motors.

  In the XY stage apparatus of this invention, it is preferable that the holding target object hold | maintained by the said holding | maintenance part is a marking apparatus which marks a printing target.

  According to the present invention, as the first support arm receives the power from the first actuator and is swung in the X-axis direction with respect to the gantry, the second support arm is swung in the same direction. The holding part is moved in the X-axis direction while maintaining its posture constant. Similarly, as the second support arm receives the power from the second actuator and is swung in the Y-axis direction with respect to the gantry, the first support arm is swung in the same direction as the holding unit. Is moved in the Y-axis direction while keeping its posture constant.

  Accordingly, the holding object can be moved in the X-axis direction and the Y-axis direction while keeping the posture of the holding object held by the holding unit constant. Further, by appropriately adjusting the drive amounts of the first and second actuators, the swing amount (swing angle) of the first and second support arms is set to a desired amount, and the object to be held is set in the X-axis direction. And can be moved to a desired position in the Y-axis direction.

  The holding unit, the first and second support arms, the gantry unit, the first and second actuators, and the mechanism for transmitting the power of the first and second actuators to the first and second support arms ( For example, since only the first and second links and the first and second drive transmission members are required, the number of parts can be reduced as compared with the conventional apparatus, and the weight of each part is also light. Therefore, the entire apparatus can be reduced in weight and size. Specifically, for example, an LM guide or a ball screw is unnecessary.

  In addition, since it is lightweight, the moment of inertia is small and the follow-up performance is good.

  Embodiments according to the present invention will be described below with reference to the drawings.

  1 to 12 are diagrams showing an XY stage apparatus 100 according to the present embodiment.

  Of these, FIG. 1 is a perspective view seen from the upper left front, FIGS. 2 and 10 are side views seen from the left side, FIGS. 3 and 11 are top views, FIGS. 4 and 12 are front views, and FIG. FIG. 6 is a rear view, FIG. 7 is a side view seen from the right side, and FIGS. 8 and 9 are side sectional views.

  8 is a sectional side view of the four support arms 37, 38, 73, 74 included in the XY stage apparatus 100 as viewed from the left side with the center of 37 located on the leftmost side as a cut surface. FIG. 4 is a side sectional view of the XY stage apparatus 100 as viewed from the right side with a central portion in the left-right direction as a cut surface.

  Among these drawings, FIGS. 1 and 9 to 12 show a state in which the marking head portion (holding object: marking device) 1 is mounted on the XY stage apparatus 100, while FIGS. The illustration of the head unit 1 is omitted.

  10 to 12, the marking head unit 1, the holding unit 2, the support arms 37, 38, 73, 74, the Y-axis drive transmission bracket 31, the X-axis drive transmission bracket 67, the link bars 34, 35, 70, 71 and the like (both described later) are shown.

  FIG. 13 is a control block diagram of the XY stage apparatus 100.

  The XY stage apparatus 100 according to the present embodiment moves, for example, the marking head unit 1 as a suitable example of the object to be held in the X axis direction and the Y axis direction (direction orthogonal to the X axis direction). Thus, a character trajectory is given to the marking head unit 1.

  Here, the X-axis direction is the left-right direction (L direction (left direction) and R direction (right direction) shown in FIG. 1 and the like) of the XY stage apparatus 100, and the Y-axis direction is the vertical direction (in FIG. 1 and the like). U direction (upward direction) and D direction (downward direction).

  The XY stage apparatus 100 according to the present embodiment functions as a holding structure 2 that holds the marking head unit 1 and a support structure for various components of the XY stage apparatus 100, as shown in FIG. A gantry unit 3 to be moved, an X-axis motor (first actuator) 4 and a Y-axis motor (second actuator) 5 (see FIGS. 5 to 7, etc.) for generating power for moving the holding unit 2, An X-axis drive transmission mechanism 6 that transmits the power of the X-axis motor 4 to the holding unit 2 and moves the holding unit 2 in the X-axis direction, and a power of the Y-axis motor 5 is transmitted to the holding unit 2 to transmit the holding unit 2 to the holding unit 2. A Y-axis drive transmission mechanism 7 that moves in the Y-axis direction, an X-axis position detection mechanism 8 that detects the origin position of the marking head unit 1 in the X-axis direction, and an origin position of the marking head unit 1 in the Y-axis direction. Y-axis position detector to detect 9 is configured to include an X-axis motor 4 and the Y-axis motion controller control unit 10 that performs like the motor 5 (Fig. 13), the.

  Among these, the holding part 2 is formed in a ring shape as shown in FIG. 1, for example, and holds the marking head part 1 on the front side thereof.

  Here, for example, as shown in FIG. 1, the marking head unit 1 includes a nozzle case 12 having a nozzle 11 on the front surface side that discharges paint toward a printing target, and an upper and lower portions that support the nozzle case 12 at the upper end. The nozzle support arm 13 is fixed to the front surface of the holding unit 2 with, for example, screws or other appropriate fixing methods so that the nozzle 11 faces forward. Has been.

  The gantry 3 includes, for example, a flat plate-like bottom plate portion 14 that is horizontally disposed, and a flat plate-like side wall portion 15 and a front surface that are erected on the upper surface of the bottom plate portion 14 so as to be orthogonal to the bottom plate portion 14. A wall 16, an upper wall 17 that extends horizontally across the upper end surface of the side wall 15 and the upper end of the front wall 16, a bearing body 18 that is fixed to the front side of the front wall 16, It is configured with.

  Of these, for example, as shown in FIG. 1 and the like, the side wall portion 15 is a portion on the left side of the bottom plate portion 14 so that the plate surface direction of the side wall portion 15 is orthogonal to the X-axis direction (towards the side). Is established.

  The front wall portion 16 is erected at the front portion of the bottom plate portion 14 so that the plate surface direction of the front wall portion 16 is along the X-axis direction and the Y-axis direction (facing forward).

  Further, as shown in FIG. 1, the bearing body 18 of the gantry 3 has four plate-shaped members 21, 22, 23, and 24, respectively, in a front wall so as to form a saddle shape that opens toward the front. It is erected vertically from the front surface of the portion 14 toward the front.

  As will be described later, the bearing body 18 supports the support arm bearings 39, 40, 75, and 76.

  Next, the X-axis motor 4 and the Y-axis motor 5 are, for example, servo motors.

  Among these, the Y-axis motor 5 is fixed to the side wall 15 so as to extend rightward from the side wall 15 of the gantry 3 as shown in FIGS. 5 and 6, for example.

  As shown in FIG. 8, the rotation shaft 25 of the Y-axis motor 5 is disposed horizontally along the X-axis direction (left-right direction: from the back to the front in the drawing of FIG. 8).

  The rotating shaft 25 is connected to a main body 26 of the Y-axis motor 5 (located on the right side of the side wall 15 as shown in FIGS. 5 and 6) through an opening (not shown) formed in the side wall 15. It protrudes from the side to the left side of the side wall 15.

  When the Y-axis motor 5 is driven, the rotary shaft 25 rotates forward or backward around the axis. That is, the Y-axis motor 5 generates a rotational force around the axis in the X-axis direction.

  The rotational direction and rotational speed of the rotary shaft 25 of the Y-axis motor 5 are controlled by a Y-axis motor control signal input to the Y-axis motor 5 as will be described later.

  For example, as shown in FIGS. 6 and 7, the X-axis motor 4 is fixed to the upper wall portion 17 so as to hang down from the upper wall portion 17 of the gantry 3.

  As shown in FIG. 9, the rotation shaft 27 of the X-axis motor 4 is arranged along the Y-axis direction (vertical direction), and through the opening 28 formed in the upper wall portion 17, It protrudes from the main body 29 (located below the upper wall 17 as shown in FIG. 9) to the upper side of the upper wall 17.

  When the X-axis motor 4 is driven, the rotary shaft 27 rotates forward or backward around the axis. That is, the X-axis motor 4 generates a rotational force around the axis in the Y-axis direction.

  The rotational direction and rotational speed of the rotary shaft 27 of the X-axis motor 4 are controlled by an X-axis motor control signal input to the X-axis motor 4 as will be described later.

  Next, the Y-axis drive transmission mechanism 7 includes a Y-axis motor speed reducer 30, a Y-axis drive transmission bracket 31 connected to the rotary shaft 25 of the Y-axis motor 5 via the Y-axis motor speed reducer 30, A Y-axis drive bar 32 fixed to the upper surface of the Y-axis drive transmission bracket 31 and extending in the X-axis direction (left-right direction), and a pair of left and right connected to the Y-axis drive bar 32 via a spherical bearing 33 Link bars (second links) 34, 35, a pair of left and right support arms (second support arms) 37, 38 connected to the link bars 34, 35 via spherical bearings 36, And a pair of left and right support arm bearings (second support arm bearings) 39 and 40 that rotatably support the support arms 37 and 38, respectively.

  Among these, a Y-axis drive transmission bracket 31 is connected to the Y-axis motor speed reducer 30 at its rotating shaft portion 41.

  The Y-axis motor speed reducer 30 decelerates the rotational speed of the rotary shaft 25 of the Y-axis motor 5 by a predetermined reduction ratio and transmits the rotational operation of the rotary shaft 25 to the Y-axis drive transmission bracket 31.

  That is, assuming that the reduction ratio of the Y-axis motor speed reducer 30 is (1 / NY), the Y-axis drive transmission bracket 31 is the same as the rotation shaft 25 with the rotation shaft portion 41 as the rotation center every time the rotation shaft 25 makes one rotation. Rotate (1 / NY) in the direction (arrow A direction or B direction in FIG. 1). NY is an arbitrary positive number greater than 1.

  For example, as shown in FIG. 1, the Y-axis drive transmission bracket 31 is a member having an L-shaped cross section composed of two flat plate portions 42 and 43 that are integrally formed with each other and orthogonal to each other.

  Among these, one flat plate portion 42 is connected to the Y-axis motor speed reducer 30 in the rotary shaft portion 41 and is disposed in parallel with the side wall portion 15, and the other flat plate portion 43 is positioned above the flat plate portion 42. Are arranged as follows.

  The Y-axis drive transmission bracket 31 receives the rotational force of the rotary shaft 25 of the Y-axis motor 5 via the Y-axis motor speed reducer 30, thereby rotating around the axis in the X-axis direction (the direction of arrow A or B in FIG. 1). Swing to the top.

  One end of the Y-axis drive bar 32 (for example, the left end as shown in FIG. 1) is fixed to the upper surface of the flat plate portion 43 on the upper side of the Y-axis drive transmission bracket 31.

  Therefore, the Y-axis drive transmission bracket 31 and the Y-axis drive bar 32 operate integrally. The Y-axis drive transmission bracket 31 and the Y-axis drive bar 32 constitute a second drive transmission member.

  The Y-axis drive bar 32 is a long flat plate member provided such that its longitudinal direction extends in the X-axis direction (left-right direction). Thus, the link bars 34 and 35 are rotatably connected.

  Here, the spherical bearing 33 includes, for example, a spherical portion 45 (FIG. 8) formed at the upper end of a protruding portion 44 (FIGS. 2 and 8) that protrudes upward from the upper surface of the Y-axis drive bar 32, and the spherical portion. And a bearing portion 46 for bearing 45. The bearing portion 46 has a spherical concave curved surface formed so as to open downward at one end portion (rear end portion) of the link bars 34 and 35, and the spherical portion of the Y-axis drive bar 32 is formed on the concave curved surface portion. 45 is held in the mouth.

  As shown in FIG. 1 and the like, the link bars 34 and 35 are linear rod-shaped members, and bearing portions 46 and 47 having the same shape are formed at both ends thereof.

  Of these, the rear end side bearing portion 46 supports the spherical portion 45 of the Y-axis drive bar 32 as described above.

  Further, the bearing portion 47 on the front end side constitutes a spherical bearing 36 together with a spherical portion 48 (described later; FIG. 8) of the support arms 37 and 38 as will be described below, and supports the spherical portion 48.

  As shown in FIG. 1 and the like, the support arms 37 and 38 are, for example, an arm portion 49 configured to have a long rod shape and hold the holding portion 2, and a support arm bearing configured to have a rod shape shorter than the arm portion 49. And a shaft portion 50 that is supported by the bearings 39 and 40. The arm portions 49 and the shaft portions 50 of the support arms 37 and 38 are orthogonal to each other and connected to each other in a T shape.

  Here, as shown in FIG. 1 and the like, the support arm bearings 39 and 40 are, for example, members having a U-shaped cross section formed by sequentially connecting three plate-like portions 51, 52, and 53 so as to be orthogonal to each other. is there.

  That is, the plate-like portion 51 and the plate-like portion 52, and the plate-like portion 52 and the plate-like portion 53 are joined to each other at one side and orthogonal to each other, and the plate-like portion 51 and the plate-like portion 53. Are spaced apart and parallel to each other.

  The central plate-like portion 52 of the left support arm bearing 39 is pivotally supported with respect to the plate-like member 21 of the bearing body 18 of the gantry 3 and is rotatable around the X-axis direction axis. That is, the central plate-like portion 52 constituting the support arm bearing 39 has a shaft portion 54 (FIG. 9) protruding toward the side opposite to the opening side (that is, the right side) of the U-shape of the support arm bearing 39. Since the shaft portion 54 is supported by the bearing portion 55 formed on the plate-like member 21 of the bearing body 18 of the gantry 3, the support arm bearing 39 is supported with respect to the bearing body 18 of the gantry 3. , And can be rotated around an axis in the X-axis direction.

  Similarly, the central plate-like portion 52 of the right support arm bearing 40 is pivotally supported with respect to the plate-like member 23 of the bearing body 18 of the gantry 3 and is rotatable about the axis in the X-axis direction. Yes. That is, the central plate-like portion 52 constituting the support arm bearing 40 has a shaft portion 54 (FIG. 1) that protrudes toward the side opposite to the opening side (that is, the left side) in the U-shape of the support arm bearing 40. Since the shaft portion 54 is supported by a bearing portion 55 formed on the plate-like member 23 of the bearing body 18 of the gantry 3, the support arm bearing 40 is supported with respect to the bearing body 18 of the gantry 3. , And can be rotated around an axis in the X-axis direction.

  In addition, as shown in FIG. 1 etc., one plate-like part 53 is located in the upper side among the plate-like parts 51 and 53 of the both ends which comprise the support arm bearings 39 and 40, while the other plate-like part. 51 is arrange | positioned so that it may be located below.

  These plate-like portions 53 and 51 are formed with bearing portions 56 and 57 for bearing the shaft portions 50 of the support arms 37 and 38.

  In the shaft portions 50 of the support arms 37 and 38, both side portions with respect to the connection portion with the arm portion 49 are supported by bearing portions 56 and 57, respectively.

  Thereby, the support arms 37 and 38 can be rotated with respect to the support arm bearings 29L and 29R with the longitudinal direction of the shaft portion 50 as the central axis.

  In other words, the support arm bearings 39 and 40 have the support arms 37 and 38 parallel to the plane orthogonal to the X-axis direction and orthogonal to the longitudinal direction of the support arms 37 and 38 (the arm portion 49). The direction (longitudinal direction of the shaft portion 50) is the axial direction, and is pivotally supported around the axis so as to be able to swing.

  Further, as described above, the support arm bearings 39 and 40 are pivotally supported on the gantry 3 (the bearing body 18) so as to be rotatable around the axis in the X-axis direction. For this reason, the support arms 37 and 38 are supported by the gantry 3 (the bearing body 18 thereof) so as to be able to swing in the X-axis direction and the Y-axis direction.

  The shaft portions 50 of the support arms 37 and 38 protrude above the plate-like portion 53 above the support arm bearings 39 and 40 and are formed at the upper ends of the front ends of the link bars 34 and 35. A spherical portion 48 (FIG. 8) constituting the spherical bearing 36 is formed together with the bearing portion 47, and the spherical portion 48 is supported by the bearing portion 47.

  Thus, the left link bar 34 is connected to the left end portion of the Y-axis drive bar 32 via the spherical bearing 33 at the rear end portion thereof, while being connected to the left side via the spherical bearing 36 at the front end portion thereof. As a result, the Y-axis drive bar 32 and the support arm 37 are linked. Similarly, the right link bar 35 is connected to the right end portion of the Y-axis drive bar 32 via a spherical bearing 33 at the rear end portion thereof, while the right link bar 35 is connected to the right end portion via the spherical bearing 36 at the front end portion thereof. By being connected to the support arm 38, the Y-axis drive bar 32 and the support arm 38 are linked.

  For this reason, the pair of left and right link bars 34 and 35 transmit the movement of the Y-axis drive bar 32 to the pair of left and right support arms 37 and 38.

  In other words, the link bars 34 and 35 are rotatable with respect to the Y-axis drive bar 32 and the support arms 37 and 38 in planes perpendicular to the X-axis direction (in this embodiment, for example, they rotate in all directions). The movement of the Y-axis drive bar 32 accompanying the swing motion of the Y-axis drive transmission bracket 31 is transmitted to the support arms 37 and 38 as the swing motion in the same direction.

  The front end portion of the arm portion 49 of the left support arm 37 holds the left end portion of the holding portion 2 via the spherical bearing 58.

  That is, the spherical bearing 58 includes, for example, a spherical portion 60 (FIG. 1 and the like) formed at the tip end of a protruding portion 59 (FIG. 4) that protrudes to the left from the left end portion of the holding portion 2, and the spherical portion 60 as a bearing. Bearing part 61 (FIG. 1 etc.) to be configured. The bearing portion 61 is formed at the front end portion of the arm portion 49 of the support arm 37, has a concave curved surface along the outer periphery of the spherical portion 60, and supports the spherical portion 60.

  As described above, the support arm 37 supports the holding portion 2 via the spherical bearing 58, so that the holding portion 2 can be rotated in all directions with respect to the support arm 37.

  Similarly, the front end portion of the arm portion 49 of the right support arm 38 holds the right end portion of the holding portion 2 via the spherical bearing 62.

  That is, the spherical bearing 62, for example, has a spherical portion 64 (FIG. 4) formed at the distal end portion of the protruding portion 63 (FIG. 4) protruding rightward from the right end portion of the holding portion 2, and this spherical portion 60 is supported. Bearing part 65 (FIG. 1 etc.). The bearing portion 65 is formed at the front end portion of the arm portion 49 of the support arm 38, has a concave curved surface along the outer periphery of the spherical portion 64, and supports the spherical portion 64.

  As described above, the support arm 38 supports the holding unit 2 via the spherical bearing 62, thereby enabling the holding unit 2 to rotate in all directions with respect to the support arm 38.

  The Y-axis drive transmission mechanism 7 is configured as described above. The Y-axis motor speed reducer 30, the Y-axis drive transmission bracket 31, the Y-axis drive bar 32, and the left and right pairs The link bars 34 and 35 and the pair of left and right support arms 37 and 38 are sequentially transmitted to the holding unit 2, whereby the Y-axis direction (the U direction (upward direction shown in FIG. ) And D direction (downward)).

  Next, the X-axis drive transmission mechanism 6 will be described.

  The X-axis drive transmission mechanism 6 has a configuration in which the Y-axis drive transmission mechanism 7 is rotated by 90 ° in the XY plane, and is in the X-axis direction (L direction ( Left direction) and R direction (right direction)).

  That is, the X-axis drive transmission mechanism 6 includes an X-axis motor speed reducer 66, an X-axis drive transmission bracket 67 connected to the rotary shaft 27 of the X-axis motor 4 via the X-axis motor speed reducer 66, An X drive bar 68 fixed to the right side surface of the shaft drive transmission bracket 67 and extending in the Y-axis direction (vertical direction) is connected to the X-axis drive bar 68 via a spherical bearing 69 (FIG. 7 and the like). A pair of upper and lower link bars (first links) 70, 71 (FIG. 7 and the like) and a pair of upper and lower support arms 73, 74 (to each of the link bars 70, 71 connected via a spherical bearing 72, respectively) 7) and a pair of upper and lower support arm bearings 75 and 76 (first support arm bearings: FIG. 7 and the like) for rotatably supporting the support arms 73 and 74, respectively. .

  Among these, as shown in FIG. 3 and the like, the X-axis motor speed reducer 66 is connected to an X-axis drive transmission bracket 67 at a rotating shaft portion 77 thereof.

  The X-axis motor speed reducer 66 decelerates the rotational speed of the rotary shaft 27 of the X-axis motor 4 by a predetermined reduction ratio, and transmits the rotational operation of the rotary shaft 27 to the X-axis drive transmission bracket 67.

  That is, assuming that the reduction ratio of the X-axis motor speed reducer 66 is (1 / NX), the X-axis drive transmission bracket 67 is the same as the rotation shaft 27 with the rotation shaft portion 77 as the rotation center every time the rotation shaft 27 makes one rotation. It rotates in the direction (arrow C direction or D direction in FIG. 3) (1 / NX). Note that NX is an arbitrary positive number greater than 1.

  For example, as shown in FIG. 1, the X-axis drive transmission bracket 67 is a member having an L-shaped cross section composed of two flat plate portions 78 and 79 that are integrally formed with each other and orthogonal to each other.

  One flat plate portion 78 is connected to the X-axis motor speed reducer 66 at the rotary shaft portion 77 and arranged parallel to the upper wall portion 17 (that is, horizontally), and the other flat plate portion is disposed on the right side of the flat plate portion 78. It arrange | positions so that the part 79 may be located.

  The X-axis drive transmission bracket 67 receives the rotational force of the rotary shaft 27 of the X-axis motor 4 via the X-axis motor speed reducer 66, thereby rotating around the axis in the Y-axis direction (the arrow C direction or D direction in FIG. 1). Swing to the top.

  One end of the X-axis drive bar 68 (for example, the upper end as shown in FIG. 1) is fixed to the right side surface of the flat plate portion 79 of the X-axis drive transmission bracket 67.

  Therefore, the X-axis drive transmission bracket 67 and the X-axis drive bar 68 operate integrally. The X-axis drive transmission bracket 67 and the X-axis drive bar 68 constitute a first drive transmission member.

  The X-axis drive bar 68 is a long flat plate member provided such that its longitudinal direction extends in the Y-axis direction (vertical direction). The link bars 70 and 71 are connected to each other via the vias.

  Here, the spherical bearing 69 includes, for example, a spherical portion (not shown) formed at the tip of a protruding portion 80 (FIG. 3) that protrudes from the right side surface of the X-axis drive bar 68 toward the right side, and the spherical portion. And a bearing portion 81 for bearing the bearing. The bearing portion 81A has a spherical concave curved surface formed so as to open leftward at one end portion (rear end portion) of the link bars 70 and 71, and the spherical portion of the X-axis drive bar 68 is formed in the concave curved surface portion. Is held so as to hold in.

  As shown in FIG. 7 and the like, the link bars 70 and 71 are linear rod-like members, and bearing portions 81 and 82 having the same shape are formed at both ends thereof.

  Of these, the rear end side bearing portion 81 supports the spherical portion of the X-axis drive bar 68 as described above.

  The bearing 82 on the front end side constitutes a spherical bearing 72 together with the spherical portions (not shown) of the support arms 73 and 74 as will be described below, and supports the spherical portions.

  The link bars 70 and 71 are formed shorter than the link bars 34 and 35, for example.

  As shown in FIG. 7 and the like, the support arms 73 and 74 are, for example, an arm portion 83 configured in a long rod shape and holding the holding portion 2, and a support arm bearing configured in a rod shape shorter than the arm portion 83. And a shaft portion 84 (FIG. 3 and the like) that is supported by the shafts 75 and 76. The arm portion 83 and the shaft portion 84 of the support arms 73 and 74 are orthogonal to each other and connected to each other in a T shape.

  Note that the length of the arm portion 83 of the support arms 73 and 74 is the same as the length of the arm portion 49 of the support arms 37 and 38.

  Here, as shown in FIG. 1 and the like, the support arm bearings 75 and 76 are, for example, members having a U-shaped cross section formed by sequentially connecting three plate-like portions 85, 86, and 87 so as to be orthogonal to each other. is there.

  That is, the plate-like portion 85 and the plate-like portion 86, and the plate-like portion 86 and the plate-like portion 87 are joined to each other at one side and orthogonal to each other, and the plate-like portion 85 and the plate-like portion 87. Are spaced apart and parallel to each other.

  The central plate-like portion 86 of the upper support arm bearing 75 is pivotally supported with respect to the plate-like member 24 of the bearing body 18 of the gantry 3 and is rotatable about the axis in the Y-axis direction. That is, the central plate-like portion 86 constituting the support arm bearing 75 has a shaft portion 88 (FIG. 9) protruding toward the opposite side (that is, the lower side) of the U-shaped opening side of the support arm bearing 86. ) And the shaft portion 88 is supported by a bearing portion 89 formed on the plate-like member 24 of the bearing body 18 of the gantry 3, so that the support arm bearing 75 is supported by the bearing body 18 of the gantry 3. Thus, it can be rotated around an axis in the Y-axis direction.

  Similarly, the central plate-like portion 86 of the lower support arm bearing 76 is pivotally supported with respect to the plate-like member 22 of the bearing body 18 of the gantry 3 and can be rotated around the axis in the Y-axis direction. ing. That is, the central plate-shaped portion 86 constituting the support arm bearing 76 has a shaft portion 88 (FIG. 9) protruding toward the side opposite to the opening side (that is, the upper side) in the U-shape of the support arm bearing 86. Since the shaft portion 88 is supported by a bearing portion 89 formed on the plate-like member 22 of the bearing body 18 of the gantry 3, the support arm bearing 76 is supported with respect to the bearing body 18 of the gantry 3. , And can be rotated around an axis in the Y-axis direction.

  In addition, as shown in FIG. 1 etc., one plate-like part 85 is located in the right side among the plate-like parts 85 and 87 of the both ends which comprise the support arm bearings 75 and 76, while the other plate-like part. 87 is arranged to be located on the left side.

  The plate-like portions 87 and 85 are formed with bearing portions 90 (FIGS. 1 and 5) and 91 (FIG. 9) for bearing the shaft portions 84 of the support arms 73 and 74, respectively.

  That is, in the shaft portions 84 of the support arms 73 and 74, the portions on both sides with respect to the connection portion with the arm portion 83 are supported by the bearing portions 90 and 91, respectively.

  Thus, the support arms 73 and 74 are rotatable with respect to the support arm bearings 75 and 76 with the longitudinal direction of the shaft portion 84 as the central axis.

  That is, the support arm bearings 75 and 76 have the support arms 73 and 74 parallel to the plane orthogonal to the Y-axis direction and orthogonal to the longitudinal direction of the support arms 73 and 74 (the arm portion 83). The direction (longitudinal direction of the shaft portion 84) to be used is the axial direction, and is supported so as to swing around the axis.

  Further, as described above, the support arm bearings 75 and 76 are pivotally supported on the gantry 3 (the bearing body 18) so as to be rotatable around the axis in the Y-axis direction. For this reason, the support arms 73 and 74 are supported by the gantry 3 (the bearing body 18 thereof) so as to be able to swing in the X-axis direction and the Y-axis direction.

  Further, the shaft portion 84 of the support arms 73 and 74 protrudes to the right side from the plate-like portion 87 of the support arm bearings 75 and 76, and a bearing formed at the front end of the link bars 70 and 71 at the right end portion thereof. A spherical portion (not shown) constituting the spherical bearing 72 is formed together with the portion 82, and the spherical portion is supported by the bearing portion 82.

  As described above, the upper link bar 70 is connected to the upper end portion of the X-axis drive bar 68 via the spherical bearing 69 at the rear end portion, and is connected to the upper end via the spherical bearing 72 at the front end portion. As a result, the X-axis drive bar 68 and the support arm 73 are linked. Similarly, the lower link bar 71 is connected to the lower end portion of the X-axis drive bar 69 via a spherical bearing 69 at the rear end portion thereof, while being lowered via the spherical bearing 72 at the front end portion thereof. By connecting to the support arm 74 on the side, the X-axis drive bar 68 and the support arm 74 are linked.

  Therefore, the pair of upper and lower link bars 70 and 71 transmit the movement of the X-axis drive bar 68 to the pair of upper and lower support arms 73 and 74.

  That is, the link bars 70 and 71 are rotatable with respect to the X-axis drive bar 68 and the support arms 73 and 74 in planes perpendicular to the Y-axis direction (in this embodiment, for example, they can rotate in all directions). The movement of the X-axis drive bar 68 accompanying the swing motion of the X-axis drive transmission bracket 67 is transmitted to the support arms 73 and 74 as a swing motion in the same direction.

  Further, the front end portion of the arm portion 83 of the upper support arm 73 holds the upper end portion of the holding portion 2 via the spherical bearing 92.

  That is, the spherical bearing 92 includes, for example, a spherical portion 94 formed at the distal end portion of the protruding portion 93 (FIG. 7) protruding leftward from the upper end portion of the holding portion 2, and a bearing portion 95 that supports the spherical portion 94. , And is configured. The bearing portion 95 is formed at the front end portion of the arm portion 83 of the support arm 73, has a concave curved surface along the outer periphery of the spherical portion 94, and supports the spherical portion 94.

  As described above, the support arm 73 supports the holding unit 2 via the spherical bearing 92, so that the holding unit 2 can be rotated in all directions with respect to the support arm 73.

  Similarly, the front end portion of the arm portion 83 of the lower support arm 74 holds the lower end portion of the holding portion 2 via the spherical bearing 96.

  That is, the spherical bearing 96 includes, for example, a spherical portion 98 formed at the distal end portion of the protruding portion 97 that protrudes below the lower end portion of the holding portion 2, and a bearing portion 99 that supports the spherical portion 98. Configured. The bearing portion 99 is formed at the front end portion of the arm portion 83 of the support arm 74, has a concave curved surface along the outer periphery of the spherical portion 98, and supports the spherical portion 98.

  As described above, the support arm 74 supports the holding unit 2 via the spherical bearing 96, thereby enabling the holding unit 2 to rotate in all directions with respect to the support arm 74.

  The X-axis drive transmission mechanism 6 is configured as described above, and the driving force of the rotary shaft 27 of the X-axis motor 4 is supplied to the X-axis motor speed reducer 66, the X-axis drive transmission bracket 67, the Y-axis drive bar 68, the upper and lower pairs. The link bars 70 and 71 and a pair of upper and lower support arms 73 and 74 are sequentially transmitted to the holding unit 2, so that the X axis direction (the L direction (left direction shown in FIG. ) And R direction (right direction)).

  Since the XY stage apparatus 100 includes the X-axis drive transmission mechanism 6 and the Y-axis drive transmission mechanism 7 configured as described above, a pair of upper and lower support arms 73 and 74 are provided as shown in FIGS. As the arm receives the power from the X-axis motor 4 and swings in the X-axis direction with respect to the gantry 3, the pair of left and right support arms 37 and 38 are also swung in the same direction, and the holding unit 2 is in its posture. Is moved in the X-axis direction while being kept constant. Similarly, as shown in FIGS. 10 to 12, as the pair of left and right support arms 37 and 38 receive the power from the Y-axis motor 5 and swing in the Y-axis direction with respect to the gantry 3, The pair of support arms 73 and 74 are also swung in the same direction, and the holding unit 2 is moved in the Y-axis direction while keeping its posture constant.

  Accordingly, as shown in FIGS. 10 to 12, the marking head unit 1 can be moved in the X-axis direction and the Y-axis direction while keeping the posture of the marking head unit 1 held by the holding unit 2 constant. it can. Further, the swing amounts (swing angles) of the support arms 37, 38, 73, and 74 are controlled by appropriately controlling the rotation amounts of the rotation shafts 25 and 27 of the X-axis motor 4 and the Y-axis motor 5 individually. The marking head unit 1 can be moved to desired positions in the X-axis direction and the Y-axis direction with a desired amount.

  Next, for example, as shown in FIG. 2, the Y-axis position detection mechanism 9 is fixed to the Y-axis drive transmission bracket 31, and a detected member 101 that operates integrally with the Y-axis drive transmission bracket 31. The first to fourth detection sensors 102, 103, 104, and 105 that are fixed to the left surface of the side wall 15 of the gantry 3 and detect the member to be detected 101 are configured.

  Among these members, the member 101 to be detected is, for example, a substantially fan-shaped plate member as shown in FIG. 2 and the like, and rotates in the same direction as the Y-axis drive transmission bracket 31 rotates in the arrow A direction. On the other hand, the Y-axis drive transmission bracket 31 rotates in the same direction as it rotates in the arrow B direction.

  The first to fourth detection sensors 102, 103, 104, and 105 each have an irradiation unit (not shown) that emits light toward the X-axis direction (which may be either the R direction or the L direction); A light receiving unit (not shown) that is disposed facing the irradiation unit and receives light from the irradiation unit, and the detected member when the light from the irradiation unit is blocked by the detected member 101 101 is detected.

  Of the first to fourth detection sensors 102, 103, 104, and 105, the third detection sensor 104 detects that the marking head unit 1 has reached the origin position in the Y-axis direction. The detection sensor 102 detects that the marking head unit 1 has reached the upper limit position in the Y-axis direction, and the fourth detection sensor 105 detects that the marking head unit 1 has reached the lower limit position in the Y-axis direction. The second detection sensor 103 detects that the marking head unit 1 has reached the deceleration position in the Y-axis direction.

  When the first to fourth detection sensors 102, 103, 104, and 105 detect the detected member 101, the first to fourth detection signals (FIG. 13) are output to the arithmetic processing unit 111 (FIG. 13), respectively. .

  Further, the X direction detection mechanism 8 is configured in the same manner as the Y direction detection mechanism 51.

  That is, for example, as shown in FIG. 3 and the like, the X-direction detection mechanism 8 is fixed to the X-axis drive transmission bracket 67 and detects a member 106 that operates integrally with the X-axis drive transmission bracket 67. 3 to 8 and detection sensors 107, 108, 109, and 110 that detect the member 106 to be detected.

  Among these members, the detected member 106 is, for example, a substantially fan-shaped plate member as shown in FIG. 3 and the like, and rotates in the same direction as the X-axis drive transmission bracket 67 rotates in the arrow C direction. On the other hand, the X-axis drive transmission bracket 67 rotates in the same direction as it rotates in the arrow D direction.

  In addition, the fifth to eighth detection sensors 107, 108, 109, and 110 respectively irradiate light (irrespective of illustration) that irradiates light in the Y-axis direction (which may be either the U direction or the D direction); A light receiving unit (not shown) that is disposed facing the irradiation unit and receives light from the irradiation unit, and the detected member when the light from the irradiation unit is blocked by the detected member 106 106 is detected.

  Of the fifth to eighth detection sensors 107, 108, 109, and 110, the seventh detection sensor 109 detects that the marking head unit 1 has reached the origin position in the X-axis direction. The detection sensor 107 detects that the marking head unit 1 has reached the limit position in the right direction, and the eighth detection sensor 110 detects that the marking head unit 1 has reached the limit position in the left direction. The sixth detection sensor 108 detects that the marking head unit 1 has reached the deceleration position in the X-axis direction.

  When the fifth to eighth detection sensors 107, 108, 109, 110 detect the member 106 to be detected, the fifth to eighth detection signals (FIG. 13) are output to the arithmetic processing unit 111 (FIG. 13), respectively. .

  Next, as shown in FIG. 13, the control unit 10 includes an arithmetic processing unit 111, an X-axis motor driver 112 that controls driving of the X-axis motor 4 in accordance with commands from the arithmetic processing unit 111, and the arithmetic processing unit 111. And a Y-axis motor driver 113 for driving and controlling the Y-axis motor 5 in accordance with the command.

  Among these, the arithmetic processing unit 111 receives print data indicating the type and arrangement of characters to be printed by the marking head unit 1.

  The arithmetic processing unit 111 performs coordinate conversion on the arrangement indicated by the print data, and outputs a command signal to the X-axis motor driver 112 and the Y-axis motor driver 113 in accordance with the data after the coordinate conversion. 112 and the Y-axis motor driver 113 appropriately drive the X-axis motor 4 and the Y-axis motor 5 to appropriately drive the holding unit 2 via the drive transmission mechanism 6, and the marking held by the holding unit 2 A character locus is given to the head unit 1.

  That is, the X-axis motor driver 112 that receives the command signal from the arithmetic processing unit 111 outputs an X-axis motor control signal corresponding to the command signal to the X-axis motor 4, and rotates the rotary shaft 27 of the X-axis motor 4. Control quantity and rotation speed.

  Similarly, the Y-axis motor driver 113 that has received the command signal from the arithmetic processing unit 111 outputs a Y-axis motor control signal corresponding to the command signal to the Y-axis motor 5, and the rotation axis 25 of the Y-axis motor 5. Control the amount and speed of rotation.

  In addition, the marking head unit 1 discharges paint from the nozzle 11 in synchronization with the movement of the marking head unit 1 under the control of the arithmetic processing unit 111 or under the control of a separate control unit (not shown). The characters corresponding to the print data are printed on the print target.

  Here, when the XY stage apparatus 100 is powered on, the marking head unit 1 performs an origin return operation.

  That is, when power is turned on to the XY stage apparatus 100, the arithmetic processing unit 111 controls the movement of the holding unit 2 in the X-axis direction and the Y-axis direction (the rotation of the X-axis motor 4 and the Y-axis motor 5). When the seventh detection signal from the seventh detection sensor 109 and the third detection signal from the third detection sensor 104 are input, the movement of the holding unit 2 is performed. Is stopped (control to stop the rotation of the rotary shafts 25 and 27 of the X-axis motor 4 and the Y-axis motor 5), and the holding unit 2 is moved to the origin position in the X-axis direction and the Y-axis direction.

  Here, when the sixth detection signal from the sixth detection sensor 108 is input, the arithmetic processing unit 111 decelerates the moving speed of the holding unit 2 (the rotation axes of the X-axis motor 4 and the Y-axis motor 5). 25 and 27 are decelerated).

  In addition, the arithmetic processing unit 111 receives the first detection signal from the first detection sensor 102, the fourth detection signal from the fourth detection sensor 105, or the fifth When the fifth detection signal from the detection sensor 107 is input, or when the eighth detection signal from the eighth detection sensor 110 is input, the movement of the holding unit 2 is urgently stopped (X The rotation of the rotary shafts 25 and 27 of the shaft motor 4 and the Y-axis motor 5 is stopped). Thereby, the overrun of the holding part 2 is prevented.

  According to the above embodiment, since the X-axis drive transmission mechanism 6 and the Y-axis drive transmission mechanism 7 configured as described above are provided, a pair of upper and lower support arms 73 are provided as shown in FIGS. , 74 receive power from the X-axis motor 4 and swing in the X-axis direction with respect to the gantry 3, the pair of left and right support arms 37, 38 are also swung in the same direction, and the holding unit 2 is The posture is moved in the X-axis direction while being kept constant. Similarly, as shown in FIGS. 10 to 12, as the pair of left and right support arms 37 and 38 receive the power from the Y-axis motor 5 and swing in the Y-axis direction with respect to the gantry 3, The pair of support arms 73 and 74 are also swung in the same direction, and the holding unit 2 is moved in the Y-axis direction while keeping its posture constant.

  Accordingly, as shown in FIGS. 10 to 12, the marking head unit 1 can be moved in the X-axis direction and the Y-axis direction while keeping the posture of the marking head unit 1 held by the holding unit 2 constant. it can. In addition, the support arms 37, 38, 73, 74 are adjusted by individually adjusting the rotation amounts of the rotation shafts 25, 27 of the X-axis motor 4 and the Y-axis motor 5 under the control of the arithmetic processing unit 111 of the control unit 10. Thus, the marking head unit 1 can be moved to desired positions in the X-axis direction and the Y-axis direction.

  Further, the holding unit 2, the support arms 37, 38, 73, 74, the gantry unit 3, the X axis motor 4 and the Y axis motor 5, and the power of the X axis motor 4 and the Y axis motor 5 are supported by the support arms 37, 38, 73, 74, X axis drive transmission bracket 67, X drive bar 68, Y axis drive transmission bracket 31, Y axis drive bar 32, support arm bearings 39, 40, 75, Since the number of components can be reduced as compared with the conventional device and the weight of each component can be reduced, the entire device can be reduced in weight and size. Specifically, for example, an LM guide, a ball screw, or the like is unnecessary, and the weight and size can be reduced.

  Furthermore, since it is lightweight, the moment of inertia is small and the follow-up performance is good.

  Further, the operating range of the holding unit 2 can be easily changed by simply changing the lengths of the support arms 37, 38, 73, and 74. In addition, when changing the operation | movement range of the holding | maintenance part 2, it is good to change the X-axis motor 4 and the Y-axis motor 5 into a high power thing as needed.

  In the above embodiment, an example in which the X-axis motor 4 and the Y-axis motor 5 are servo motors has been described. However, any motor that can adjust the amount of movement of the holding unit 2 may be used. There may be.

  Further, the first and second actuators are not limited to motors, and may be, for example, cylinders or other actuators.

  In the above embodiment, the example in which the object to be held by the XY stage apparatus 100 is the marking head unit 1 has been described. However, other objects may be used as the object to be held.

It is the perspective view which looked at the XY stage apparatus which concerns on embodiment from the upper left front. It is the side view which looked at the XY stage apparatus which concerns on embodiment from the left side. It is a top view of the XY stage apparatus which concerns on embodiment. It is a front view of the XY stage apparatus which concerns on embodiment. It is the perspective view which looked at the XY stage apparatus which concerns on embodiment from upper left back. It is a rear view of the XY stage apparatus which concerns on embodiment. It is the side view which looked at the XY stage apparatus which concerns on embodiment from the right side. It is a sectional side view of the XY stage apparatus which concerns on embodiment. It is a sectional side view of the XY stage apparatus which concerns on embodiment. It is the side view which looked at the XY stage apparatus which concerns on embodiment from the left side. It is a top view of the XY stage apparatus which concerns on embodiment. It is a front view of the XY stage apparatus which concerns on embodiment. It is a control block diagram of the XY stage apparatus which concerns on embodiment. It is a cross-sectional view of a conventional XY stage apparatus. It is a sectional side view of the conventional XY stage apparatus. It is front sectional drawing of the conventional XY stage apparatus.

Explanation of symbols

100 XY stage device 1 Marking head (holding object, marking device)
2 Holding part 37 Support arm (1st support arm)
38 Support arm (first support arm)
73 Support arm (second support arm)
74 Support arm (second support arm)
3 Mounting unit 4 X-axis motor (first actuator)
5 Y-axis motor (second actuator)
92 Spherical bearing 96 Spherical bearing 58 Spherical bearing 62 Spherical bearing 75 Support arm bearing (first support arm bearing)
76 Support arm bearing (first support arm bearing)
39 Support arm bearing (second support arm bearing)
40 Support arm bearing (second support arm bearing)
67 X-axis drive transmission bracket (first drive transmission member)
68 X drive bar (first drive transmission member)
31 Y-axis drive transmission bracket (second drive transmission member)
32 Y-axis drive bar (second drive transmission member)
70 Link bar (first link)
71 Link bar (first link)
34 Link bar (second link)
35 Link bar (second link)

Claims (8)

In an XY stage apparatus that holds a holding object and moves it to an arbitrary position in the X-axis direction and the Y-axis direction orthogonal to the X-axis direction,
A holding unit for holding a holding object;
A first support arm that supports the holding portion and gives the holding portion movement in the X-axis direction;
A second support arm that supports the holding portion and imparts movement in the Y-axis direction to the holding portion;
A pedestal that supports the first support arm so that it can swing in the X-axis direction and the Y-axis direction, and supports the second support arm so that it can swing in the X-axis direction and the Y-axis direction;
A first actuator that imparts power for swinging in the X-axis direction to the first support arm;
A second actuator that imparts power to swing the head in the Y-axis direction to the second support arm;
With
The first support arm supports the holding portion so as to be rotatable in all directions with respect to the first support arm,
The XY stage apparatus, wherein the second support arm supports the holding portion so as to be rotatable in all directions with respect to the second support arm. Since the first support arm supports the holding portion via a spherical bearing, the holding portion can be rotated in all directions with respect to the first support arm;
The second support arm supports the holding part via a spherical bearing so that the holding part can be rotated in all directions with respect to the second support arm. The XY stage apparatus of 1. A first support arm bearing pivotally supported on the gantry so as to be rotatable about an axis in the Y-axis direction;
A second support arm bearing pivotally supported by the gantry so as to be rotatable about an axis in the X-axis direction;
Further comprising
The first support arm bearing has an axial direction in which the first support arm is parallel to a plane orthogonal to the Y-axis direction and orthogonal to the longitudinal direction of the first support arm. And by supporting it so that it can swing around its axis,
The first support arm is supported by the gantry through the first support arm bearing,
The second support arm bearing has an axial direction in which the second support arm is parallel to a plane orthogonal to the X-axis direction and orthogonal to the longitudinal direction of the second support arm. And by supporting it so that it can swing around its axis,
The XY stage apparatus according to claim 1, wherein the second support arm is supported by the gantry through the second support arm bearing. The first actuator generates a rotational force around an axis in the Y-axis direction, while the second actuator generates a rotational force around an axis in the X-axis direction,
The XY stage apparatus is
A first drive transmission member that swings around an axis in the Y-axis direction under the rotational force of the first actuator;
The first drive transmission member and the first support arm are pivotally connected in a plane perpendicular to the Y-axis direction, respectively, and the first drive transmission member swings in the same direction. A first link that transmits to the first support arm as a swing motion;
A second drive transmission member that swings around an axis in the X-axis direction under the rotational force of the second actuator;
The second drive transmission member and the second support arm are pivotably coupled in a plane orthogonal to the X-axis direction, respectively, and the second drive transmission member swings in the same direction. A second link that transmits to the second support arm as a swing motion;
The XY stage apparatus according to any one of claims 1 to 3, further comprising:   A pair of the first link and the first support arm and a pair of the second link and the second support arm are provided, and the holding portion is supported at four points by a total of four support arms. The XY stage apparatus according to claim 4, wherein the apparatus is an XY stage apparatus.   The first support arm and the second support arm are provided in pairs, and the holding portion is supported at four points by the four support arms. XY stage device.   The XY stage apparatus according to claim 1, wherein the first and second actuators are motors.   The XY stage apparatus according to claim 1, wherein the holding object held by the holding unit is a marking apparatus that performs marking on a printing object.

Images