JP2007336685A5 - - Google Patents
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- JP2007336685A5 JP2007336685A5 JP2006165345A JP2006165345A JP2007336685A5 JP 2007336685 A5 JP2007336685 A5 JP 2007336685A5 JP 2006165345 A JP2006165345 A JP 2006165345A JP 2006165345 A JP2006165345 A JP 2006165345A JP 2007336685 A5 JP2007336685 A5 JP 2007336685A5
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- surface portion
- electrode
- liquid
- reinforcing plate
- vibrating body
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- 230000003014 reinforcing effect Effects 0.000 claims 13
- 239000007788 liquid Substances 0.000 claims 11
- 239000002245 particle Substances 0.000 claims 10
- 239000011344 liquid material Substances 0.000 claims 5
- 230000002787 reinforcement Effects 0.000 claims 3
- 238000001035 drying Methods 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000003475 lamination Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Claims (15)
前記圧電素子および補強板による積層体の積層方向両端側における積層体表面部と積層体裏面部とはそれぞれ、電極が形成された電極平面部とされ、
前記電極平面部の一方と前記各圧電素子それぞれの圧電素子側面部と前記電極平面部の他方とを含む前記積層体の体表面部には、前記各電極平面部における前記電極同士を互いに電気的に接続する導通部が配置されており、
前記導通部は、常温では液状であり導電性粒子を含有した液状物を前記体表面部に設けた後、当該液状物を常温より高い温度で乾燥固化させることにより前記導電性粒子を相互接触させて形成されている
ことを特徴とする振動体。 Two piezoelectric elements having a substantially plate shape are laminated via a reinforcing plate ,
Wherein the piezoelectric element and the reinforcing plate electrode plane portions respectively and the laminate surface portion and the laminate back surface, electrodes were formed in the stacking direction end sides of the laminate by,
On the body surface portion of the laminate including one of the electrode plane portions, each piezoelectric element side surface portion of each of the piezoelectric elements, and the other of the electrode plane portions, the electrodes in the electrode plane portions are electrically connected to each other. Conductive part to be connected to is arranged ,
The conducting part is liquid at normal temperature and after providing a liquid material containing conductive particles on the body surface part, the liquid particles are dried and solidified at a temperature higher than normal temperature to bring the conductive particles into mutual contact. A vibrating body characterized by being formed.
前記表面部および前記裏面部のいずれかにおける一部には、部分電極が形成され、
前記部分電極とこの部分電極が形成された側とは反対側に形成された前記電極とを圧電素子側面部を介して互いに電気的に接続する導通部が配置されており、
前記導通部は、前記互いに導通される前記部分電極および前記電極がそれぞれ形成された電極平面部と前記圧電素子側面部とを含む前記圧電素子の体表面部に、常温では液状であり導電性粒子を含有した液状物を設けた後、当該液状物を常温より高い温度で乾燥固化させることにより前記導電性粒子を相互接触させて形成される
ことを特徴とする振動体。 A piezoelectric element having a substantially plate shape and electrodes formed on the front surface portion and the back surface portion,
A partial electrode is formed on a part of either the front surface portion or the back surface portion,
The partial electrodes and are arranged conducting portion for electrically connecting to each other and said electrode formed on the opposite side via the pressure conductive element side portion and the partial electrode are formed side,
The conducting portion is a liquid that is liquid at normal temperature on the body surface portion of the piezoelectric element including the partial electrode and the electrode plane portion on which the electrodes are formed and the side surface portion of the piezoelectric element. A vibrating body, wherein the conductive particles are formed by bringing the liquid particles into contact with each other by drying and solidifying the liquid material at a temperature higher than room temperature after providing the liquid material containing the liquid.
前記２つの圧電素子の間に介装される補強板は導電性の補強板であり、
前記体表面部は、補強板側面部を含み、
前記導通部と前記補強板側面部との間には、絶縁層が介装されている
ことを特徴とする振動体。 The vibrator according to claim 1 ,
A reinforcing plate which is interposed between the two piezoelectric elements is a conductive reinforcement plate,
The surface portion includes a reinforcement plate side portions,
An insulating layer is interposed between the conduction portion and the side surface portion of the reinforcing plate.
前記絶縁層は、常温では液状である絶縁体を前記補強板側面部に設けた後、当該絶縁体を常温より高い温度で乾燥固化させることにより形成されている
ことを特徴とする振動体。 The vibrating body according to claim 3,
The insulating layer is formed by providing an insulator that is liquid at room temperature on the side surface of the reinforcing plate, and then drying and solidifying the insulator at a temperature higher than room temperature.
前記補強板側面部には、前記積層方向と交差する方向に窪んだ凹部が形成されている
ことを特徴とする振動体。 The vibrating body according to claim 4,
The vibrating body is characterized in that a concave portion that is recessed in a direction intersecting the stacking direction is formed on the side surface of the reinforcing plate.
前記電極平面部と前記圧電素子側面部との間の角部には、断面略Ｌ字入隅状の段差部が形成されている
ことを特徴とする振動体。 The vibrating body according to claim 4,
A step portion having a substantially L-shaped cross section is formed at a corner portion between the electrode plane portion and the side surface portion of the piezoelectric element.
前記電極平面部と前記圧電素子側面部との間の角部は、前記圧電素子の厚み方向に対して斜めに面取りされている
ことを特徴とする振動体。 The vibrating body according to claim 4,
A corner portion between the electrode plane portion and the side surface portion of the piezoelectric element is chamfered obliquely with respect to the thickness direction of the piezoelectric element.
前記２つの圧電素子の間に介装される補強板は絶縁性の補強板であり、
前記体表面部は、補強板側面部を含んでいる
ことを特徴とする振動体。 The vibrator according to claim 1 ,
A reinforcing plate which is interposed between the two piezoelectric elements is a reinforcing plate of insulating,
The surface portion, the vibrating body, characterized in that it contains reinforcement plate side portions.
前記圧電素子において前記電極が形成される前記電極平面部と前記圧電素子を保持する補強板の表面部とに亘る前記振動体の体表面部には、前記電極を前記圧電素子の外部に電気的に接続する導通部が配置されており、 In the piezoelectric element, the electrode is electrically connected to the outside of the piezoelectric element on the body surface portion of the vibrating body extending from the electrode plane portion on which the electrode is formed and the surface portion of the reinforcing plate holding the piezoelectric element. Conductive part to be connected to is arranged,
前記導通部は、常温では液状であり導電性粒子を含有した液状物を前記体表面部に設けた後、当該液状物を常温より高い温度で乾燥固化させることにより前記導電性粒子を相互接触させて形成されている The conducting part is liquid at normal temperature and after providing a liquid substance containing conductive particles on the body surface part, the liquid particles are dried and solidified at a temperature higher than normal temperature to bring the conductive particles into mutual contact. Formed
ことを特徴とする振動体。 A vibrating body characterized by that.
前記振動体の振動を被駆動体に伝達することにより当該被駆動体を駆動する
ことを特徴とする圧電アクチュエータ。 A vibration body according to any one of claims 1 to 9,
A piezoelectric actuator, wherein the driven body is driven by transmitting the vibration of the vibrating body to the driven body.
前記振動体の振動を被駆動体に伝達することにより当該被駆動体を駆動する圧電アクチュエータであって、
前記補強板の側面部には、前記被駆動体に向かって突出する突起が形成され、
前記突起が形成された側とは反対側の前記補強板の側面部には、当該側面部と前記導通部との間に、絶縁性のモールド部材が設けられている
ことを特徴とする圧電アクチュエータ。 A vibration body according to any one of claims 1 and 3 to 9 , comprising:
A piezoelectric actuator that drives the driven body by transmitting the vibration of the vibrating body to the driven body,
A protrusion projecting toward the driven body is formed on a side surface portion of the reinforcing plate,
A piezoelectric actuator characterized in that an insulating mold member is provided between the side surface portion and the conducting portion on the side surface portion of the reinforcing plate opposite to the side on which the protrusion is formed. .
ことを特徴とする電子機器。 Vibrator according to any one of claims 1-9, or electronic device comprising the piezoelectric actuator according to any one of claims 10 and 11.
計時部と、この計時部で計時された情報を表示する計時情報表示部とを備えた時計である
ことを特徴とする電子機器。 The electronic device according to claim 1 2,
An electronic device, comprising: a timepiece; and a timepiece information display section for displaying information timed by the timepiece.
２つの前記圧電素子を補強板を介して積層し、前記圧電素子および補強板による積層体の積層方向両端側における積層体表面部と積層体裏面部とを、それぞれ前記電極が形成された電極平面部とする積層工程と、
常温では液状であり導電性粒子を含有した液状物を、前記電極平面部の一方と前記各圧電素子それぞれの圧電素子側面部と前記電極平面部の他方とを含む前記積層体の体表面部に設けた後、当該液状物を常温より高い温度で乾燥固化させることにより前記導電性粒子を相互接触させて、前記各電極平面部における前記電極同士を電気的に接続する導通部を形成する導通部形成工程とを備える
ことを特徴とする振動体の製造方法。 An electrode forming step of forming an electrode, respectively in a substantially plate-shaped two piezoelectric elements forming the vibrating body,
An electrode plane on which the electrodes are formed by laminating the two piezoelectric elements via a reinforcing plate, and forming a laminated body surface portion and a laminated body rear surface portion at both ends in the lamination direction of the laminated body of the piezoelectric elements and the reinforcing plate. Laminating process to be a part,
A liquid material that is liquid at normal temperature and contains conductive particles is applied to the body surface portion of the laminate including one of the electrode plane portions, the side surface portion of each piezoelectric element, and the other of the electrode plane portions. After providing, the conductive material is dried and solidified at a temperature higher than normal temperature to bring the conductive particles into contact with each other, thereby forming a conductive portion that electrically connects the electrodes in each of the electrode plane portions. And a forming step. A method for manufacturing a vibrating body.
前記導通部形成工程では、前記液状物としてのインクを前記体表面部に噴射することによって前記導通部を形成する
ことを特徴とする振動体の製造方法。 In the manufacturing method of the vibrator according to claim 14,
In the conducting part forming step, the conducting part is formed by ejecting ink as the liquid material onto the body surface part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006165345A JP2007336685A (en) | 2006-06-14 | 2006-06-14 | Vibrator, piezoelectric actuator, electronic apparatus, and manufacturing method of vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006165345A JP2007336685A (en) | 2006-06-14 | 2006-06-14 | Vibrator, piezoelectric actuator, electronic apparatus, and manufacturing method of vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007336685A JP2007336685A (en) | 2007-12-27 |
| JP2007336685A5 true JP2007336685A5 (en) | 2009-07-30 |
Family
ID=38935612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006165345A Withdrawn JP2007336685A (en) | 2006-06-14 | 2006-06-14 | Vibrator, piezoelectric actuator, electronic apparatus, and manufacturing method of vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007336685A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009254198A (en) | 2008-04-10 | 2009-10-29 | Sharp Corp | Ultrasonic motor and ultrasonic oscillator |
| JP2013101020A (en) | 2011-11-08 | 2013-05-23 | Seiko Epson Corp | Sensor element, force detection device and robot |
| TWI574439B (en) * | 2011-12-30 | 2017-03-11 | 晶緻材料科技私人有限公司 | Multi-stake actuator, and method of manufacturing the same, and derivative equipment, piezoelectric motors, and micro motors using the multi-stake actuator |
| JP6954007B2 (en) * | 2017-10-30 | 2021-10-27 | セイコーエプソン株式会社 | Piezoelectric drive devices, piezoelectric motors, robots, electronic component transfer devices, printers and projectors |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3102481B1 (en) * | 1998-06-08 | 2000-10-23 | セイコーエプソン株式会社 | Ink jet recording head and ink jet recording apparatus |
| JP2001308401A (en) * | 2000-04-19 | 2001-11-02 | Tokin Ceramics Corp | Piezoelectric ceramic component |
| JP2004320980A (en) * | 2003-04-03 | 2004-11-11 | Seiko Epson Corp | Driving device and electric equipment |
| JP3988676B2 (en) * | 2003-05-01 | 2007-10-10 | セイコーエプソン株式会社 | Coating apparatus, thin film forming method, thin film forming apparatus, and semiconductor device manufacturing method |
-
2006
- 2006-06-14 JP JP2006165345A patent/JP2007336685A/en not_active Withdrawn
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