JP2007333442A5 - - Google Patents

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Publication number
JP2007333442A5
JP2007333442A5 JP2006162988A JP2006162988A JP2007333442A5 JP 2007333442 A5 JP2007333442 A5 JP 2007333442A5 JP 2006162988 A JP2006162988 A JP 2006162988A JP 2006162988 A JP2006162988 A JP 2006162988A JP 2007333442 A5 JP2007333442 A5 JP 2007333442A5
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JP
Japan
Prior art keywords
shape
probe
measurement
correction table
measuring method
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JP2006162988A
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Japanese (ja)
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JP5064725B2 (en
JP2007333442A (en
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Priority to JP2006162988A priority Critical patent/JP5064725B2/en
Priority claimed from JP2006162988A external-priority patent/JP5064725B2/en
Publication of JP2007333442A publication Critical patent/JP2007333442A/en
Publication of JP2007333442A5 publication Critical patent/JP2007333442A5/ja
Application granted granted Critical
Publication of JP5064725B2 publication Critical patent/JP5064725B2/en
Expired - Fee Related legal-status Critical Current
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Claims (6)

プローブの倣い走査により特定の測定条件で被測定物の三次元形状を測定する形状測定工程と、
前記形状測定工程と同じ測定条件に基づく解析によって、前記被測定物の設計形状のシミュレーション測定を行い、得られたシミュレーション計算値と前記設計形状とを比較して誤差を補正するための補正テーブルを作成する補正テーブル作成工程と、
前記補正テーブルを用いて、前記形状測定工程において得られた前記プローブによる形状測定値を補正する工程と、を有することを特徴とする形状測定方法。 A shape measuring step for measuring the three-dimensional shape of the object under specific measurement conditions by scanning the probe;
A correction table for performing simulation measurement of the design shape of the object to be measured by analysis based on the same measurement conditions as the shape measurement step, and comparing the obtained simulation calculation value with the design shape to correct an error. A correction table creation process to be created;
And a step of correcting the shape measurement value obtained by the probe obtained in the shape measurement step using the correction table. 前記プローブに、接触式のプローブを用いることを特徴とする請求項１記載の形状測定方法。   The shape measuring method according to claim 1, wherein a contact type probe is used as the probe. 前記プローブに、非接触式のプローブを用いることを特徴とする請求項１記載の形状測定方法。   The shape measuring method according to claim 1, wherein a non-contact type probe is used as the probe. 前記補正テーブル作成工程において、倣い走査中の前記プローブの弾性変形および倒れによる測定誤差を、前記シミュレーション計算値に基づいて算出することを特徴とする請求項２記載の形状測定方法。   3. The shape measuring method according to claim 2, wherein, in the correction table creating step, a measurement error due to elastic deformation and tilting of the probe during scanning scanning is calculated based on the simulation calculation value. 前記補正テーブル作成工程を、前記プローブによる前記形状測定工程と並行して行うことを特徴とする請求項１ないし４いずれか１項記載の形状測定方法。   The shape measurement method according to claim 1, wherein the correction table creation step is performed in parallel with the shape measurement step by the probe. 前記被測定物は光学素子成形用の金型もしくは光学素子であることを特徴とする請求項１ないし５いずれか１項記載の形状測定方法。 The object to be measured according to claim 1 to 5 shape measuring method according to any one characterized in that it is a mold or the optical element for the optical element molding.
JP2006162988A 2006-06-13 2006-06-13 Shape measurement method Expired - Fee Related JP5064725B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006162988A JP5064725B2 (en) 2006-06-13 2006-06-13 Shape measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006162988A JP5064725B2 (en) 2006-06-13 2006-06-13 Shape measurement method

Publications (3)

Publication Number Publication Date
JP2007333442A JP2007333442A (en) 2007-12-27
JP2007333442A5 true JP2007333442A5 (en) 2009-07-30
JP5064725B2 JP5064725B2 (en) 2012-10-31

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Family Applications (1)

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JP2006162988A Expired - Fee Related JP5064725B2 (en) 2006-06-13 2006-06-13 Shape measurement method

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JP (1) JP5064725B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013007669A (en) * 2011-06-24 2013-01-10 Ulvac Japan Ltd Stylus jump suppression method in stylus type step profiler for surface shape measurement
JP2013019835A (en) * 2011-07-13 2013-01-31 Olympus Corp Shape measurement method
ITMI20121061A1 (en) 2012-06-18 2013-12-19 Clay Paky Spa STAGE PROJECTOR, IN A PARTICULAR PROJECTOR FOLLOWS BY STAGE

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3215325B2 (en) * 1996-06-07 2001-10-02 株式会社東京精密 Measuring machine calibration method and device
JPH10253346A (en) * 1997-01-07 1998-09-25 Nikon Corp Apparatus for measuring aspheric shape and manufacture of aspheric optical member
JP3679582B2 (en) * 1997-12-08 2005-08-03 キヤノン株式会社 Shape measuring apparatus and method
JP3722464B2 (en) * 2000-05-01 2005-11-30 株式会社リコー Lens surface shape evaluation method and shape evaluation device
JP4794753B2 (en) * 2001-06-04 2011-10-19 パナソニック株式会社 Shape measurement method
JP2005037197A (en) * 2003-07-18 2005-02-10 Ricoh Co Ltd Contact type surface shape measuring device and measuring method
JP2005055282A (en) * 2003-08-04 2005-03-03 Tokyo Seimitsu Co Ltd Measuring method and measuring device
JP2006098251A (en) * 2004-09-30 2006-04-13 Canon Inc Shape measuring instrument and shape measuring method

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