JP2007331026A - Joined body, and joining brazing filler metal - Google Patents

Joined body, and joining brazing filler metal Download PDF

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JP2007331026A
JP2007331026A JP2006169218A JP2006169218A JP2007331026A JP 2007331026 A JP2007331026 A JP 2007331026A JP 2006169218 A JP2006169218 A JP 2006169218A JP 2006169218 A JP2006169218 A JP 2006169218A JP 2007331026 A JP2007331026 A JP 2007331026A
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alloy
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JP5204958B2 (en
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Shinko Ogusu
真弘 小楠
Atsushi Kikuchi
敦 菊地
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NHK Spring Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a joined body and a joining brazing filler metal which can be easily joined with each other in the atmosphere while joined members have the consistent joining airtightness after keeping the high temperature of 1,073K in the hydrogen reducing atmosphere at the temperature of 1,073K. <P>SOLUTION: In the joined body 6, a ceramic (ring) 4 and metal (cylinders) 1a, 1b are brazed with each other with a brazing filler metal consisting of Ag and at least one of an oxide of a non-reducing metal and a non-reducing metal. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、セラミックス同士またはセラミックスと金属とが接合された接合体、及び接合に使用される接合用ろう材に関する。本発明の接合体及びろう材は、特に固体酸化物型燃料電池の気体封止部の接合に使用される。   The present invention relates to a joined body in which ceramics or ceramics and a metal are joined, and a joining brazing material used for joining. The joined body and brazing material of the present invention are particularly used for joining a gas sealing portion of a solid oxide fuel cell.

従来、セラミックス同士、あるいはセラミックスと金属を接合する方法として、セラミックス表面に金属メタライズを施すモリブデン−マンガン（Ｍｏ−Ｍｎ）法や、活性金属ろう付け法が採用されている。   Conventionally, a molybdenum-manganese (Mo-Mn) method for applying metal metallization to a ceramic surface or an active metal brazing method has been employed as a method for joining ceramics or ceramics and metals.

Ｍｏ−Ｍｎ法は、まず、セラミックス表面にＭｏおよびＭｎ酸化物とＭｎおよびＭｎ酸化物の混合粉末を塗布したものを、酸素分圧を制御した水素雰囲気で焼結して金属層を形成し、次いで、この金属層上にＮｉメッキを施し、この後Ａｇろう等のろう材でろう付けするものである。   In the Mo-Mn method, first, a ceramic layer coated with a mixed powder of Mo and Mn oxide and Mn and Mn oxide is sintered in a hydrogen atmosphere with a controlled oxygen partial pressure to form a metal layer, Next, Ni plating is performed on the metal layer, and then brazing is performed using a brazing material such as Ag brazing.

一方、活性金属ろう付け法は、ＡｇろうやＣｕろうに、ＴｉやＺｒ等の活性金属を添加したものをろう材としてろう付けする方法である。活性金属は、セラミックスと酸化還元反応を起こして反応相を生成することによりセラミックスに接合される。この方法は、セラミックスの表面にメタライズ処理を施す必要がなく、１回の熱処理で接合することができ、しかもセラミックスの種類を問わないことから、セラミックス同士やセラミックスと金属のろう付けに広く適用されている。   On the other hand, the active metal brazing method is a method of brazing a brazing material obtained by adding an active metal such as Ti or Zr to Ag brazing or Cu brazing. The active metal is bonded to the ceramic by causing a redox reaction with the ceramic to generate a reaction phase. This method does not require metallization treatment on the surface of ceramics and can be joined by a single heat treatment, and since it does not matter what kind of ceramics it is widely applied to brazing ceramics and ceramics to metals. ing.

Ｍｏ−Ｍｎ法や活性金属ろう付け法は、いずれも真空ないし雰囲気ろう付けである。   Both the Mo—Mn method and the active metal brazing method are vacuum or atmospheric brazing.

また、最近、特許文献１に示すような反応性大気ろう付け法（Reactive Air Brazing）が開発されている。この方法は、セラミックスと大気中でＡｌ酸化物層を形成する耐熱金属とを大気中で接合する方法である。この方法は、ＡｇにＣｕＯを添加したろう材を用いたもので、大気中で接合できるという利点がある。
ＵＳ２００３／０１３２２７０Ａ１ Recently, a reactive air brazing method as shown in Patent Document 1 has been developed. This method is a method in which ceramics and a refractory metal that forms an Al oxide layer in the air are joined in the air. This method uses a brazing material in which CuO is added to Ag, and has an advantage that it can be joined in the atmosphere.
US2003 / 0132270A1

ところで、固体電解質型燃料電池（Solid Oxide Fuel Cells、ＳＯＦＣ）は、現在広く開発が進められている技術である。ＳＯＦＣにおける発電には、１０７３Ｋ近辺の高温下で固体電解質の両側に夫々水素と酸素を供給する必要がある。従って、ＳＯＦＣには、１０７３Ｋ近辺の高温下で、燃料となる水素と空気を遮蔽するセパレータ等の部材が必要とされる。しかし、ＳＯＦＣで使用される部材であるセラミックス同士、あるいはセラミックスと金属の接合に着目した場合、次の課題が挙げられる。   Incidentally, solid oxide fuel cells (SOFCs) are a technology that is currently being widely developed. For power generation in the SOFC, it is necessary to supply hydrogen and oxygen to both sides of the solid electrolyte at a high temperature around 1073K, respectively. Therefore, the SOFC requires a member such as a separator that shields hydrogen and air as fuel at a high temperature around 1073K. However, when attention is focused on ceramics, which are members used in SOFC, or between ceramics and metal, the following problems are raised.

上記Ｍｏ−Ｍｎ法では、金属層を形成させるために１７７３Ｋという高温でかつ加熱雰囲気の制御が求められ、工程も複雑である上に、接合用の再加熱には真空加熱する必要がある。また、上記活性金属ろう付け法では、接合時に真空加熱を必要とする。いずれの方法においても、用いられるろうは、ＳＯＦＣで期待される１０７３Ｋといった高温耐酸化性を持たない。   In the Mo-Mn method, a high temperature of 1773 K and control of the heating atmosphere are required to form a metal layer, the process is complicated, and it is necessary to vacuum heat for reheating for bonding. Further, the above active metal brazing method requires vacuum heating at the time of bonding. In either method, the wax used does not have the high temperature oxidation resistance as expected at 1073 K for SOFC.

また、上記反応性大気ろう付け法の場合、大気中で接合可能な優れた接合法である一方、次の課題を有する。
１）金属材料がＡｌ２Ｏ３皮膜を作る金属に限られる。
２）ＳＯＦＣで期待される、高温（１０７３Ｋ）における水素雰囲気、あるいは水素と大気間の遮蔽に用いると、接合部が気密性、接合強度を失う。この理由は、接合に寄与するＣｕの酸化物が還元されて反応層の効果を失うこと、及び還元されたＣｕがろう材主成分であるＡｇとの共晶反応（１０５３Ｋ）により溶解するためである。 Moreover, in the case of the said reactive air brazing method, while it is the outstanding joining method which can be joined in air | atmosphere, it has the following subject.
1) The metal material is limited to a metal that forms an Al 2 O 3 film.
2) When used in a hydrogen atmosphere at a high temperature (1073 K) expected for SOFC or shielding between hydrogen and air, the joint loses hermeticity and strength. The reason for this is that the oxide of Cu that contributes to bonding is reduced and loses the effect of the reaction layer, and the reduced Cu is dissolved by eutectic reaction (1053K) with Ag, which is the main component of the brazing filler metal. is there.

本発明は上述した課題を解決するためなされたもので、大気中で簡便に接合でき、且つ接合した部材同士が１０７３Ｋという高温保持後や１０７３Ｋの水素還元雰囲気中で安定した接合気密性を有する接合体及びセラミックス接合用ろう材を提供することを目的とする。   The present invention has been made in order to solve the above-described problems, and can be easily joined in the atmosphere, and the joined members have stable hermeticity after being held at a high temperature of 1073K or in a hydrogen reducing atmosphere of 1073K. It is an object to provide a brazing material and a brazing material for bonding ceramics.

本発明の接合体は、セラミックス同士またはセラミックスと金属を、Ａｇ,および非還元性金属の酸化物または非還元性金属の少なくとも一方からなるろう材でろう付けしたことを特徴とする。
本発明のろう材は、Ａｇ：７０〜９９．６ｗｔ％と、非還元性の酸化物または非還元性金属の少なくともいずれか一方：０．４〜３０ｗｔ％と、残部としての不可避的不純物からなることを特徴とする。 The joined body of the present invention is characterized in that ceramics or ceramics and metal are brazed with a brazing material composed of at least one of Ag and a non-reducing metal oxide or non-reducing metal.
The brazing filler metal of the present invention comprises Ag: 70 to 99.6 wt%, at least one of non-reducing oxide or non-reducing metal: 0.4 to 30 wt%, and the inevitable impurities as the balance. It is characterized by that.

本発明によれば、大気中で簡便に接合でき、且つ接合した部材同士が１０７３Ｋという高温保持後や１０７３Ｋの水素還元雰囲気中で安定した接合気密性を有する接合体及び接合用ろう材が得られる。   According to the present invention, it is possible to obtain a joined body and a brazing material that can be easily joined in the atmosphere and have stable joint airtightness after the joined members are kept at a high temperature of 1073K or in a hydrogen reducing atmosphere of 1073K. .

以下、本発明について更に詳しく説明する。
本発明の接合体に係るろう材は、セラミックス同士またはセラミックスと金属を接合するために使用するもので、大気中で溶解しても酸化しないＡｇを必須成分とし、この他に、非還元性金属の酸化物、あるいは非還元性金属、あるいは前記酸化物と非還元性金属の両者を含む場合がある。具体的には、ろう材としては、例えば主成分となるＡｇ及び非還元性金属からなり、非還元性金属が大気中の接合過程で酸化物になるものが好ましい。ろう材は、母材となるセラミックス同士あるいはセラミックスと金属の間に設置され、Ａｇの融点近傍ないしＡｇの融点以上まで大気中で加熱すると、ろう材の主成分であるＡｇは酸化することなく溶解する。 Hereinafter, the present invention will be described in more detail.
The brazing material according to the joined body of the present invention is used for joining ceramics or ceramics and metal, and contains Ag which does not oxidize even when dissolved in the atmosphere as an essential component. In some cases, these oxides, non-reducing metals, or both the above-described oxides and non-reducing metals are included. Specifically, the brazing material is preferably composed of, for example, Ag as a main component and a non-reducing metal, and the non-reducing metal becomes an oxide during the joining process in the atmosphere. The brazing material is placed between the ceramics as the base material or between the ceramic and the metal, and when heated in the atmosphere to near the melting point of Ag or above the melting point of Ag, Ag, which is the main component of the brazing material, dissolves without being oxidized. To do.

ろう材の添加物は、酸化物、金属に関わらず、酸化物の形態となり、母材となるセラミックスと金属側の酸化物に析出する。これにより、セラミックス同士あるいはセラミックスと金属が接合される。また、ろう材の添加物は、その酸化物の融点が１０７３Ｋ近辺以上であることが好ましい。更に、ろう材の添加物は、その酸化物が１０７３Ｋ近辺で水素により還元されないことが好ましい。即ち、酸化物の融点が１０７３Ｋ近辺よりも低いＢ２Ｏ３やＢｉ２Ｏ３といった酸化物を含まないことが好ましい。更には、融点は１０７３Ｋ以上であるＣｕの酸化物も、１０７３Ｋ近辺の水素中では還元されてＣｕになるので、本発明の添加物には含まない。 Regardless of the oxide or metal, the additive of the brazing material is in the form of an oxide, and is deposited on the ceramic as the base material and the oxide on the metal side. Thereby, ceramics or ceramics and a metal are joined. Moreover, it is preferable that the additive of the brazing filler metal has a melting point of about 1073K or more. Furthermore, it is preferable that the additive of the brazing filler metal is not reduced by hydrogen in the vicinity of 1073K. That is, it is preferable not to include an oxide such as B 2 O 3 or Bi 2 O 3 whose melting point is lower than around 1073K. Furthermore, Cu oxide having a melting point of 1073 K or more is not contained in the additive of the present invention because it is reduced to Cu in hydrogen around 1073 K to become Cu.

本発明において、セラミックス同士あるいはセラミックスと金属とを接続する接合部を構成する，いわゆる「ろう付け部分」は、高温大気中あるいは高温水素中で、良好な気密性を保持することが好ましい。ここで、「ろう付け部分」は、母材との反応層となる酸化物層とＡｇから構成される。ところで、接合部のＡｇは高温大気中で酸化されない。また、母材との反応層となる酸化物層も、既に安定な酸化物となっていることから、それ以上の酸化による劣化を示すことはない。一方、高温水素中においては、前記接合部で母材との反応層となる酸化物は、水素で還元されない酸化物である特徴をもつ。従って、高温水素中においても、還元により気密性に支障をきたすことはない。   In the present invention, it is preferable that a so-called “brazing portion” constituting a joint portion connecting ceramics or ceramics and a metal maintains good airtightness in high-temperature air or high-temperature hydrogen. Here, the “brazing portion” is composed of an oxide layer serving as a reaction layer with the base material and Ag. By the way, Ag at the joint is not oxidized in the high temperature atmosphere. In addition, the oxide layer serving as a reaction layer with the base material is already a stable oxide, and therefore does not show further deterioration due to oxidation. On the other hand, in high-temperature hydrogen, the oxide that becomes the reaction layer with the base material at the junction is an oxide that is not reduced by hydrogen. Therefore, even in high-temperature hydrogen, reduction does not hinder airtightness.

本発明において、セラミックスとしては、例えばジルコニア、安定化ジルコニア、アルミナ、マグネシア、ステアタイト、フォルステライト、ムライト、チタニア、シリカ、サイアロン等の酸化物セラミックスが挙げられる。また、母材となる金属としては、例えばステンレス、あるいは耐熱性ステンレス、Ｎｉ基耐熱合金等の耐熱金属が挙げられる。このうち、耐熱金属は接合体がＳＯＦＣのような高温で使用される場合に好ましい。   In the present invention, examples of the ceramic include oxide ceramics such as zirconia, stabilized zirconia, alumina, magnesia, steatite, forsterite, mullite, titania, silica, and sialon. Moreover, as a metal used as a base material, for example, a heat-resistant metal such as stainless steel, heat-resistant stainless steel, Ni-base heat-resistant alloy, or the like can be given. Among these, a refractory metal is preferable when the joined body is used at a high temperature such as SOFC.

本発明において、非還元性金属の酸化物としては、例えばＳｉＯ２、Ｔｉ酸化物、Ｖ２Ｏ５、ＮｉＯ、Ａｌ２Ｏ３、Ｃｒ２Ｏ３、ＭｇＯ、Ｍｎ酸化物、ＣａＯ、ＺｎＯ、Ｙ２Ｏ３、ＢａＯの少なくとも１つが挙げられる。 In the present invention, examples of the non-reducing metal oxide include SiO 2 , Ti oxide, V 2 O 5 , NiO, Al 2 O 3 , Cr 2 O 3 , MgO, Mn oxide, CaO, ZnO, and Y. Examples thereof include at least one of 2 O 3 and BaO.

本発明において、非還元性金属としては、Ｔｉ，Ｎｉ，Ａｌ，Ｃｒ，Ｍｇ，ＴｉＡｌ合金，ＴｉＮｉ合金，ＴｉＣｒ合金，ＮｉＣｒ合金の少なくとも１つの金属が挙げられる。   In the present invention, the non-reducing metal includes at least one metal of Ti, Ni, Al, Cr, Mg, TiAl alloy, TiNi alloy, TiCr alloy, and NiCr alloy.

本発明において、ＳｉＯ２、Ｔｉ酸化物、Ｖ２Ｏ５、ＮｉＯ、Ａｌ２Ｏ３、Ｃｒ２Ｏ３、ＭｇＯ、Ｎｂ酸化物、ＣａＯ、ＺｎＯ、Ｙ２Ｏ３、ＢａＯの少なくとも１つの非還元性金属の酸化物と、Ｔｉ，Ｎｉ，Ａｌ，Ｃｒ，Ｍｇ，ＴｉＡｌ合金，ＴｉＮｉ合金，ＴｉＣｒ合金，ＮｉＣｒ合金の少なくとも１つの金属とが用いられる場合がある。 In the present invention, at least one non-reduction of SiO 2 , Ti oxide, V 2 O 5 , NiO, Al 2 O 3 , Cr 2 O 3 , MgO, Nb oxide, CaO, ZnO, Y 2 O 3 , BaO In some cases, a conductive metal oxide and at least one metal of Ti, Ni, Al, Cr, Mg, TiAl alloy, TiNi alloy, TiCr alloy, and NiCr alloy are used.

本発明のろう材を用いてセラミックス同士あるいはセラミックスと金属の接合を行えば、従来の活性金属ろう付け法やＭｏ−Ｍｎ法では得られない大気中での接合が可能となり、非常に安価でかつ簡便に接合することができる。また、本発明によれば、従来の活性金属ろう付け法やＭｏ−Ｍｎ法では得られない、１０７３Ｋといった高温における耐酸化性を有する接合体が得られる。これにより、１０７３Ｋ近辺での稼動が考えられるＳＯＦＣにおいて必要とされる、１０７３Ｋ近辺における水素／空気の遮蔽接合部に本発明の接合体を適用することが可能となる。   If the brazing material of the present invention is used to bond ceramics to each other or ceramics to metal, bonding in the atmosphere that cannot be obtained by the conventional active metal brazing method or Mo-Mn method is possible, and it is very inexpensive and It can be simply joined. In addition, according to the present invention, a joined body having oxidation resistance at a high temperature of 1073 K, which cannot be obtained by the conventional active metal brazing method or the Mo—Mn method, can be obtained. As a result, the joined body of the present invention can be applied to a hydrogen / air shielding joint in the vicinity of 1073K, which is required in an SOFC that can be operated in the vicinity of 1073K.

以下に実施例を示すが、本発明は特に本実施例に限定されるものではない。
（実施例１）
図１を参照する。金属部材として、耐熱性フェライト系ステンレスＺＭＧ２３２（日立金属製、φ８とφ６の段つき貫通穴を設けた外径φ１４厚み１０ｍｍの円筒１）を用いた。円筒１のφ６段つき穴側には、予め外径φ６、内径φ４の耐熱Ｎｉ基合金（インコネル６００）２を、ＢＮｉ5（ＪＩＳ規格）ろうで真空ろう付けした。なお、図中の符番３は、ＢＮｉ5によるろう付け部を示す。また、セラミックスとしては、安定化ジルコニア（外径φ１４、内径φ８、厚み３ｍｍ）のリングを用いた。 Examples are shown below, but the present invention is not particularly limited to these Examples.
Example 1
Please refer to FIG. As the metal member, heat-resistant ferritic stainless steel ZMG232 (manufactured by Hitachi Metals, cylinder 1 having an outer diameter of φ14 and a thickness of 10 mm provided with stepped through holes of φ8 and φ6) was used. A heat-resistant Ni-based alloy (Inconel 600) 2 having an outer diameter of φ6 and an inner diameter of φ4 was vacuum brazed with BNi5 (JIS standard) brazing in advance to the φ6 stepped hole side of the cylinder 1. Note that reference numeral 3 in the figure indicates a brazed portion made of BNi5. As the ceramic, a ring of stabilized zirconia (outer diameter φ14, inner diameter φ8, thickness 3 mm) was used.

図２に示すように、円筒１ａ，１ｂとリング４間に、Ａｇ−１重量％ＴｉＡｌ−０．６重量％Ｃｒろうを設置し、大気中で１２４３Ｋに加熱することによりろう付けを行った。なお、図２中の符番５は、円筒１ａ，１ｂとリング４の接合部を示す。ろう材は、７５μｍ以下の粉末を混合し、有機溶剤、有機バインダーでペースト化させたものを用いた。   As shown in FIG. 2, brazing was performed by installing an Ag-1 wt% TiAl-0.6 wt% Cr brazing between the cylinders 1 a, 1 b and the ring 4 and heating to 1243 K in the atmosphere. In addition, the number 5 in FIG. 2 shows the junction part of cylinder 1a, 1b and the ring 4. In FIG. The brazing material used was a mixture of powders of 75 μm or less and pasted with an organic solvent and an organic binder.

得られた接合品（接合体）６の気密性を調べるため、Ｈｅリーク試験を実施したところ、１０−１１Ｐａ・ｍ３／ｓｅｃの優れた気密性を有することが確認された。また、接合品を１０７３Ｋ×１００Ｈ大気中で加熱し、冷却後のＨｅリーク試験を実施したところ、接合後と同様に１０−１１Ｐａ・ｍ３／ｓｅｃの気密性を有しており、接合サンプルの良好な耐酸化性が確認された。更に、高温耐水素性を調べるため、図３に示すように、接合品の内部に水素を流した状態で、１０７３Ｋ大気中に６Ｈ保持した。冷却後の気密性を調べたところ、１０−８Ｐａ／ｓｅｃ台の優れた気密性を示した。これは、漏れ量の単位ｓｃｃｍに換算すると、１０−６ｓｃｃｍであり、良好な気密性を示すことがわかる。 In order to investigate the airtightness of the obtained joined article (joined body) 6, a He leak test was carried out, and it was confirmed that it had an excellent airtightness of 10 −11 Pa · m 3 / sec. Further, when the joined product was heated in the atmosphere of 1073K × 100H and subjected to the He leak test after cooling, it had an airtightness of 10 −11 Pa · m 3 / sec as after the joining, Good oxidation resistance was confirmed. Furthermore, in order to investigate high temperature hydrogen resistance, as shown in FIG. 3, it was kept at 1073K in the atmosphere with hydrogen flowing inside the bonded product. When the airtightness after cooling was examined, it showed excellent airtightness on the order of 10 −8 Pa / sec. This is 10 −6 sccm when converted to the unit sccm of the leakage amount, which shows that good airtightness is exhibited.

接合後のろう付け後、大気酸化試験後、対水素試験後、夫々の試料を接合面に対し垂直に切断し、その切断面を、走査電子顕微鏡（日本電子株式会社製の商品名：ＪＳＭ−７０００Ｆ）のＥＤＸ（エネルギー分散型Ｘ線分析）を用いて面分析を行った。対水素試験後の面分析結果として、二次電子像（図４）、０特性Ｘ線像（図５）、Ｚｒ特性Ｘ線像（図６）Ｔｉ特性Ｘ線像（図７）及びＣｒ特性Ｘ線像（図８）を示す。図４〜図８で判るように、ジルコニアとろう材がＴｉ，Ｃｒを含む反応層を介して接合されており、この反応層により、接合と気密性が保たれていることが確認された。   After brazing after bonding, after atmospheric oxidation test, after hydrogen test, each sample was cut perpendicularly to the bonding surface, and the cut surface was scanned with a scanning electron microscope (trade name: JSM- manufactured by JEOL Ltd.). Surface analysis was performed using 7000F) EDX (energy dispersive X-ray analysis). As the surface analysis results after the hydrogen test, secondary electron image (FIG. 4), zero characteristic X-ray image (FIG. 5), Zr characteristic X-ray image (FIG. 6) Ti characteristic X-ray image (FIG. 7) and Cr characteristic An X-ray image (FIG. 8) is shown. As can be seen from FIG. 4 to FIG. 8, it was confirmed that zirconia and the brazing material were bonded via a reaction layer containing Ti and Cr, and that the bonding and airtightness were maintained by this reaction layer.

（実施例２）
実施例１と同様の実験を、Ａｇ−０．７重量％ＳｉＯ２−０．３重量％ＣａＯ−０．７ＢａＯ重量％のろう材を用いて実施した。実施例１と同様に、ろう付け後、大気酸化試験後、対水素試験後においても、良好な気密性を示した。 (Example 2)
The same experiment as in Example 1 was performed using a brazing material of Ag-0.7 wt% SiO 2 -0.3 wt% CaO—0.7 BaO wt%. Similar to Example 1, good airtightness was exhibited even after brazing, after atmospheric oxidation test, and after hydrogen test.

（実施例３）
実施例２と同様の実験を、セラミックスとしてＭｇＯを用いて実施したところ、各試験において、良好な気密性が確認された。 (Example 3)
When an experiment similar to that of Example 2 was performed using MgO as ceramics, good airtightness was confirmed in each test.

（比較例１）
実施例１の組み合わせの部材に対し、活性金属ろう付け法を適用した。ろう材はＢＡｇ8(ＪＩＳ規格)＋Ｔｉ箔、接合条件は、２×１０−４Ｔｏｒｒ以上の高真空中、１１０３Ｋ×１ｈｒ加熱とした。得られた接合品を１０７３Ｋ大気中に保持したところ、１ｈｒ加熱保持した時点で、接合部が剥離していた。 (Comparative Example 1)
The active metal brazing method was applied to the combination member of Example 1. The brazing material was BAg8 (JIS standard) + Ti foil, and the bonding conditions were heating at 1103 K × 1 hr in a high vacuum of 2 × 10 −4 Torr or more. When the obtained bonded product was held in the atmosphere of 1073K, the bonded portion was peeled off when heated and held for 1 hr.

（比較例２）
比較例１と同様に、実施例１の組み合わせの部材に対し、活性金属ろう付け法を適用した。ろう材は、ＢＮｉ5(ＪＩＳ規格)＋Ｔｉ箔、接合条件は２×１０−４Ｔｏｒｒ以上の高真空中、１４２３Ｋ×１ｈｒ加熱とした。得られた接合品を１０７３Ｋ大気中に保持したところ、１０ｈｒ加熱した時点で、接合部が剥離していた。 (Comparative Example 2)
Similarly to Comparative Example 1, the active metal brazing method was applied to the combination member of Example 1. The brazing material was BNi5 (JIS standard) + Ti foil, and the joining conditions were heating at 1423 K × 1 hr in a high vacuum of 2 × 10 −4 Torr or more. When the obtained bonded product was held in the atmosphere of 1073K, the bonded portion was peeled off when heated for 10 hours.

（比較例３）
実施例１の組み合わせの部材に対し、特許文献１の反応性大気ろう付け法を適用した。ろう材は、Ａｇ−２重量％Ｃｕとし、大気中１２７３Ｋ×３０分保持することで接合した。得られた接合品の内側に水素を流した状態で１０７３Ｋ高温大気中に保持する耐水素試験を実施したところ、１ｈｒ保持した時点で、接合部が剥離していた。これは、ＣｕＯ接合層の還元と、１０５３ｋのＡｇ−Ｃｕの共晶反応による溶融のためと思われる。 (Comparative Example 3)
The reactive atmospheric brazing method of Patent Document 1 was applied to the combination member of Example 1. The brazing material was Ag-2 wt% Cu, and was joined by holding in the atmosphere at 1273 K × 30 minutes. When a hydrogen resistance test was performed in which hydrogen was allowed to flow inside the obtained bonded product and kept in a high temperature atmosphere at 1073 K, the bonded portion was peeled off when held for 1 hr. This seems to be due to the reduction of the CuO bonding layer and the melting due to the eutectic reaction of 1053k Ag—Cu.

（比較例４）
比較例３と全く同じ接合体を作製した上で、Ａｇ−Ｃｕの共晶温度より低い温度１０２３Ｋでの耐水素試験を実施した。その結果、２ｈｒ保持した時点で既に接合部が剥離していた。これは、ＣｕＯ接合層の還元により、接合を保ち続けることができなくなったためと思われる。 (Comparative Example 4)
After the same bonded body as Comparative Example 3 was produced, a hydrogen resistance test was performed at a temperature 1023K lower than the eutectic temperature of Ag-Cu. As a result, the joint had already peeled when it was held for 2 hours. This seems to be because the bonding cannot be maintained due to the reduction of the CuO bonding layer.

下記表１は、上記実施例１〜３及び比較例１〜４の結果を示す。   Table 1 below shows the results of Examples 1 to 3 and Comparative Examples 1 to 4.

Figure 2007331026
Figure 2007331026

なお、この発明は、上記実施例のような金属部材とセラミックスの接合に限らず、セラミックス同士の接合に適用できる。また、ろう材の組み合わせも上記実施例に記載したものに限らず、［発明を実施するための最良の形態］で述べた様々な材料を用いることができる。更に、加熱条件も上記実施例に記載されたものに限らず、本発明の要旨を変更しない範囲で適宜組み合わせることができる。   The present invention is not limited to the joining of metal members and ceramics as in the above embodiment, but can be applied to joining ceramics. The combination of the brazing materials is not limited to that described in the above embodiment, and various materials described in [Best Mode for Carrying Out the Invention] can be used. Furthermore, the heating conditions are not limited to those described in the above embodiments, and can be appropriately combined within a range not changing the gist of the present invention.

図１は、本発明の実施例１に係る金属部材の説明図を示す。FIG. 1 is an explanatory view of a metal member according to Embodiment 1 of the present invention. 図２は、本発明の実施例１に係るろう付け品の説明図を示す。FIG. 2 is an explanatory diagram of the brazed product according to the first embodiment of the present invention. 図３は、図２のろう付け品の高温耐水素性を調べるための説明図を示す。FIG. 3 is an explanatory diagram for examining the high-temperature hydrogen resistance of the brazed product of FIG. 図４は、本発明の実施例１に係るろう付け品を接合面に対し垂直に切断し、その切断面を走査電子顕微鏡で撮影した二次電子像を示す。FIG. 4 shows a secondary electron image obtained by cutting the brazed product according to Example 1 of the present invention perpendicularly to the joint surface and photographing the cut surface with a scanning electron microscope. 図５は、同走査電子顕微鏡による０特性Ｘ線像を示す。FIG. 5 shows a zero characteristic X-ray image by the scanning electron microscope. 図６は、同走査電子顕微鏡によるＺｒ特性Ｘ線像を示す。FIG. 6 shows a Zr characteristic X-ray image by the scanning electron microscope. 図７は、同走査電子顕微鏡によるＴｉ特性Ｘ線像を示す。FIG. 7 shows a Ti characteristic X-ray image by the scanning electron microscope. 図８は、同走査電子顕微鏡によるＣｒ特性Ｘ線像を示す。FIG. 8 shows a Cr characteristic X-ray image by the scanning electron microscope.

符号の説明Explanation of symbols

１，１ａ，１ｂ…円筒、２…耐熱Ｎｉ基合金、３…ろう付け部、４…リング、５…接合部、６…接合品（接合体）。   DESCRIPTION OF SYMBOLS 1, 1a, 1b ... Cylindrical, 2 ... Heat-resistant Ni base alloy, 3 ... Brazing part, 4 ... Ring, 5 ... Joining part, 6 ... Joined article (joined body).

Claims (8)

セラミックス同士またはセラミックスと金属を、Ａｇ,および非還元性金属の酸化物または非還元性金属の少なくとも一方からなるろう材でろう付けしたことを特徴とする接合体。 A joined body, wherein ceramics or ceramics and a metal are brazed with a brazing material composed of at least one of Ag and a non-reducing metal oxide or a non-reducing metal. ろう材が主成分であるＡｇと非還元性金属からなり、非還元性金属が大気中の接合過程で酸化物になることを特徴とする請求項１記載の接合体。 2. The joined body according to claim 1, wherein the brazing material is composed of Ag as a main component and a non-reducing metal, and the non-reducing metal becomes an oxide during the joining process in the atmosphere. 前記酸化物は、ＳｉＯ２、Ｔｉ酸化物、Ｖ２Ｏ５、ＮｉＯ、Ａｌ２Ｏ３、Ｃｒ２Ｏ３、ＭｇＯ、Ｍｎ酸化物、ＣａＯ、ＺｎＯ、Ｙ２Ｏ３、ＢａＯの少なくとも１つを含むことを特徴とする請求項１記載の接合体。 The oxide is at least one of SiO 2 , Ti oxide, V 2 O 5 , NiO, Al 2 O 3 , Cr 2 O 3 , MgO, Mn oxide, CaO, ZnO, Y 2 O 3 and BaO. The joined body according to claim 1, further comprising: 前記非還元性金属は、Ｔｉ，Ｎｉ，Ａｌ，Ｃｒ，Ｍｇ，ＴｉＡｌ合金，ＴｉＮｉ合金，ＴｉＣｒ合金，ＮｉＣｒ合金の少なくとも１つを含むことを特徴とする請求項１記載の接合体。 The joined body according to claim 1, wherein the non-reducing metal includes at least one of Ti, Ni, Al, Cr, Mg, TiAl alloy, TiNi alloy, TiCr alloy, and NiCr alloy. ＳｉＯ２、Ｔｉ酸化物、Ｖ２Ｏ５、ＮｉＯ、Ａｌ２Ｏ３、Ｃｒ２Ｏ３、ＭｇＯ、Ｎｂ酸化物、ＣａＯ、ＺｎＯ、Ｙ２Ｏ３、ＢａＯの少なくとも１つの酸化物と、Ｔｉ，Ｎｉ，Ａｌ，Ｃｒ，Ｍｇ，ＴｉＡｌ合金，ＴｉＮｉ合金，ＴｉＣｒ合金，ＮｉＣｒ合金の少なくとも１つの金属とが用いられることを特徴とする請求項１記載の接合体。 At least one oxide of SiO 2 , Ti oxide, V 2 O 5 , NiO, Al 2 O 3 , Cr 2 O 3 , MgO, Nb oxide, CaO, ZnO, Y 2 O 3 , BaO, and Ti, The joined body according to claim 1, wherein at least one metal of Ni, Al, Cr, Mg, TiAl alloy, TiNi alloy, TiCr alloy, and NiCr alloy is used. セラミックスとろう材の界面に酸化物相が析出していることを特徴とする請求項１乃至５いずれか記載の接合体。 The joined body according to any one of claims 1 to 5, wherein an oxide phase is precipitated at an interface between the ceramic and the brazing material. セラミックスと金属との接合であり、金属が耐熱金属であることを特徴とする請求項１乃至６いずれか記載の接合体。 The joined body according to any one of claims 1 to 6, wherein the joined body is a ceramic and a metal, and the metal is a refractory metal. Ａｇ：７０〜９９．６ｗｔ％と、非還元性の酸化物または非還元性金属の少なくともいずれか一方：０．４〜３０ｗｔ％と、残部としての不可避的不純物からなることを特徴とする接合用ろう材。 Ag: 70 to 99.6 wt%, at least one of non-reducing oxide or non-reducing metal: 0.4 to 30 wt%, and unavoidable impurities as the balance, for bonding Brazing material.
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