JP2007327773A - Feed mechanism for stage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a feed mechanism for a stage in which a measurement object is never displaced in changing over coarse movement of the stage to fine movement thereof and vice versa, and the stage is smoothly moved. <P>SOLUTION: This feed mechanism for a stage includes: a frictional movement mechanism having a feed shaft 21 supported rotatably to one side of the stage and a fixed member and in parallel to the movement direction of the stage, a fine-movement handle rotating the feed shaft 21, and a plurality of rollers 74 mounted rotatably to the other side of the stage and the fixed member to make rotating axes thereof cross the feed shaft 21; and a changeover means for bringing the rollers 74 into contact with and separating them from the feed shaft 21. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a loading mechanism for a loading table for feeding the loading table.

In order to move the measurement site of the measurement object to the observation position, the measurement microscope is provided with a carriage support mechanism for moving the stage on which the measurement object is placed with respect to the fixed member. Yes.
As shown in FIGS. 9 and 10, the conventional feed mechanism for a platform is a feed screw shaft that is rotatable on the platform 100 via a frame 101 and supported parallel to the moving direction of the platform 100. 120, a feed handle 130 for rotating the feed screw shaft 120, and a half nut 140 as a nut member that is provided on the fixed member 110 side via a bracket 111 and can be engaged with the feed screw shaft 120. .

As a result, when the feed handle 130 is operated with one hand (right hand), the feed screw shaft 120 rotates, so that the stage 100 is fixed in cooperation with the half nut 140 meshed with the feed screw shaft 120. The member 110 is moved (finely moved) in the direction along the feed screw shaft 120.
However, when it is desired to largely move (coarsely move) the stage 100, in such a mechanism that moves the stage 100 by rotating the feed screw shaft 120, the number of operations of the feed handle 130 must be increased. Not very efficient.

Therefore, in order to improve this point, the half nut 140 is moved in a direction (vertical direction) orthogonal to the axial direction of the feed screw shaft 120, and the feed screw shaft 120 and the half nut 140 can be engaged and disengaged. A floating lever 150 is provided.
Accordingly, when the floating lever 150 is operated with the other hand (left hand), the half nut 140 and the feed screw shaft 120 are detached, and the stage 100 is in a free state. If the handle 130 is moved, the stage 100 can be roughly moved.

  As described above, the coarse movement and the fine movement of the stage 100 are switched by operating the floating lever 150. However, since the feed handle 130 for the fine movement and the floating lever 150 for the coarse movement are separated from each other, the measurement is performed. At the time of measurement with a microscope, it is necessary to check the position of the floating lever 150 by removing the eyepiece from the eyepiece lens that has been peeked for observation or measurement, so that the operability is poor and the measurement work is complicated. there were.

  Therefore, the inventor of the present application has proposed a feed mechanism for a platform that is provided with a switching operation unit for coarse and fine movements of the platform in the vicinity of the feed handle (Patent Document 1).

JP 2002-365036 A

However, the loading mechanism for the loading table of Patent Document 1 moves the loading table by the cooperation of the feed shaft and the half nut, as in the conventional one, and the following problems are associated with this. It has occurred.
When switching the platform from coarse to fine, the top of the thread crest and the top of the half nut may engage, but in such a case, the half nut moves in the axial direction of the screw shaft. Both mesh completely. Thereby, an impact is applied to the measurement object on the stage, and if the impact is strong, the measurement object may be displaced.
Moreover, if the surface of the screw is rough, the smoothness of the movement of the mounting table is lost.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a feed mechanism for a platform, in which the measurement object is not displaced when switching between coarse movement and fine movement of the stage, and the movement of the stage is smooth.

  The carriage support mechanism according to the present invention is a carriage support mechanism for moving a stage on which a measurement target is placed with respect to a fixed member, and is a friction drive that moves the stage up and down. And a switching means for switching the table to the coarse movement and the fine movement, and the friction drive mechanism is rotatable on either the table or the fixed member and is movable relative to the movement direction of the table. A plurality of feed shafts that are supported in parallel with each other, a feed handle that rotates the feed shaft, a plurality of the shafts and the rotation axis that can rotate on the other one of the table and the fixing member. And the switching means makes the roller contact and disengage from the feed shaft.

  According to the present invention, a feed shaft that is rotatable on one of the stage and the fixing member and supported in parallel with the moving direction of the stage, a feed handle that rotates the feed axis, and the stage A friction drive mechanism that has a plurality of rollers that are rotatable on either the base or the fixed member and that have a feed shaft and a rotation axis intersect with each other moves the stage back and forth. Unlike the feed mechanism, it is not affected by the surface roughness of the screw, and the movement of the stage is smooth.

  Further, since the switching means makes the roller contact and disengage from the feed shaft, and thereby the coarse movement and fine movement of the mounting table are switched, no impact is applied to the measurement object on the mounting table. . In other words, unlike a conventional feed mechanism that uses a screw shaft and nut, the thread crest and the nut crest do not engage with each other after shifting, so no impact occurs and the object to be measured Things do not shift.

  In the present invention, the switching means is a switch that is arranged on either the table or the fixing member so as to be parallel to and rotatable with respect to the feed shaft, and causes the rollers to contact and leave the feed shaft during rotation. It is preferable that an operation part for rotating the shaft and the switching shaft is provided, and the operation part is provided in the vicinity of the feed handle.

  According to such a configuration, the switching means is disposed on either the mounting table or the fixed member so as to be parallel to and rotatable with respect to the feed shaft, and when the roller rotates, the switching shaft makes contact with and separates from the feed shaft. And an operation unit for rotating the switching shaft, and the operation unit is provided in the vicinity of the feed handle. For example, the feed shaft is provided on the stage and the plurality of rollers are provided on the fixed member. When an eyepiece is provided above the pedestal, operate the operating part of the switching means with one hand (right hand), bring it into contact with the feed shaft, then look into the eyepiece and look into it. When the feed handle is operated with the right hand in the state where the feed shaft is operated, the feed shaft rotates, so that the stage can be finely moved in the direction along the feed shaft by cooperating with the rollers abutting on the feed shaft. it can.

In addition, when the eyepiece is looked into the eyepiece as described above and the right hand is slightly shifted and the operation part of the switching means arranged near the feed handle is operated to disengage the feed shaft, the stage is free. Since it will be in a state, a platform can be coarsely moved in the direction along a feed axis with the right hand as it is.
Furthermore, when the stage is in a free state, if the switching means is operated with the right hand to bring the feed shaft into contact with the platform, the right handle is moved slightly and the feed handle is operated in the same manner as described above. The stage can be finely moved.
In this way, with the right hand (one hand) while looking through the eyepiece, in addition to fine movement and coarse movement of the stage, switching between fine movement and coarse movement can be performed, improving operability and measuring. Easy work.

  In the present invention, the switching means includes a switching shaft disposed on one of the table and the fixed member in parallel with the feed shaft so as to be rotatable, an operation section for rotating the switching shaft, and the switching Two support blocks which are provided so as to be openable and closable with respect to each other across the shaft and the feed shaft and are supported by either one of the above-mentioned mounting base and the fixing member, and each having the rollers, and the switching shaft provided on the switching shaft And a cam that changes the distance between the two support blocks in a direction in which the rollers abut against and separate from the feed shaft in accordance with the rotation of the roller.

  According to such a configuration, the switching means includes a switching shaft disposed on one of the stage and the fixed member so as to be parallel and rotatable with the feed shaft, an operation unit for rotating the switching shaft, and the switching shaft. And two support blocks which are provided on the other side of the mounting table and the fixed member and have rollers, respectively, and the rollers are provided in accordance with the rotation of the switching shaft. And a cam for changing the distance between the two support blocks in the direction of contact with and separating from the feed shaft, so that when the operation portion of the switching means is operated, the switching shaft rotates, The cam moves in response to the rotation, and the distance between the two support blocks is changed in the direction in which the rollers and the feed shaft come into contact with and separate from each other. In this way, the contact and separation between the roller and the feed shaft can be easily switched by simply operating the operating portion of the switching means.

  In the present invention, the two support blocks include the roller, and the feed shaft side end surface is coupled by a fulcrum leaf spring in the juxtaposition direction of the feed shaft and the switching shaft, and the switching shaft side portion Is preferably urged in the direction of the switching axis by the clamping force generating means.

According to such a configuration, the two support blocks have the rollers, and in the direction in which the feed shaft and the switching shaft are arranged in parallel, the feed shaft side end surface is coupled by the fulcrum leaf spring, and the switching shaft side portion is clamped. Since the force generating means biases in the switching axis direction, when the mounting table is finely moved, the feeding shaft is firmly brought into contact with the clamping force that biases both support blocks in the switching axis direction. Therefore, the rotation of the feed shaft can be reliably transmitted to the rollers.
Further, when coarsely moving the mounting table, both support blocks are opened up and down with the fulcrum leaf spring as a fulcrum, and the feed shaft can be separated.

In the present invention, it is preferable that the rollers are provided on both end surfaces of the support block in the axial direction of the feed shaft.
According to such a configuration, since the rollers are provided on both end faces of the support block in the axial direction of the feed shaft, the feed shaft comes into contact with the rollers at two front and rear positions, and the feed shaft is rotated. It can be reliably transmitted to the rollers.

  In the present invention, the switching means includes a switching shaft disposed on one of the table and the fixed member in parallel with the feed shaft so as to be rotatable, an operation section for rotating the switch shaft, and the feed A collet that is provided on the outer periphery of the shaft so as to be expandable / contractable and is supported by either the mounting base or the fixing member, and having the roller, and the roller with respect to the feed shaft according to the rotation of the switching shaft And a collet tightening member that expands and contracts the collet in the direction in which the collet comes into contact with and leaves.

  According to the present invention, the switching means includes a switching shaft disposed on one of the stage and the fixed member so as to be parallel and rotatable with the feed shaft, an operation unit that rotates the switch shaft, and an outer periphery of the feed shaft. And a collet that is supported by one of the mounting table and the fixing member and has a roller, and a collet in a direction in which the roller abuts and separates from the feed shaft in accordance with the rotation of the switching shaft. A collet tightening member that expands and contracts, so that when the operation portion of the switching means is operated, the switching shaft rotates, and the collet tightening member moves in accordance with the rotation of the switching shaft, and the roller and the feed shaft contact each other. And the collet is expanded and contracted in the direction of separation. In this way, the contact and separation between the roller and the feed shaft can be easily switched simply by operating the operating portion of the switching means.

  In the present invention, the operation unit is rotatably provided on the feed shaft in the vicinity of the feed handle and has a gear handle centered on the feed shaft, and is attached to the switch shaft, and the gear It is preferable that the switching shaft is configured to be rotatable via the gear by operation of the switching handle.

According to such a configuration, the operation unit is rotatably provided on the feed shaft in the vicinity of the feed handle and has a gear handle centered on the feed shaft, and is attached to the switch shaft. Since the meshing gear is provided and the switching shaft is configured to be rotatable via the gear by the operation of the switching handle, the switching shaft can be reliably rotated while having a relatively simple structure.
In addition to the feed handle, the switching handle is also rotatable with respect to the feed shaft, so that each handle rotates about the same axis. For this reason, for example, even while looking into the eyepiece lens, the hand on these handles can be smoothly moved back and forth, and the switching operation between the coarse movement and the fine movement of the mounting table can be performed quickly and reliably.

DESCRIPTION OF EMBODIMENTS Hereinafter, an embodiment of a loading mechanism according to the present invention will be described with reference to the drawings.
The mounting table feed mechanism 1 of the present embodiment is provided in a measurement microscope.
FIG. 1 is a perspective view of a part of the measurement microscope according to the present embodiment as viewed obliquely from above, and FIG. 2 is a cross-sectional view of the stage table feed mechanism 1 as viewed from above.

  As shown in FIG. 1, the measurement microscope includes a microscope body (not shown), a fixing member 2 fixed to the microscope body, an upper side of the fixing member 2, and a measurement object (not shown). A substantially rectangular parallelepiped mounting table 3 placed on the front surface of the mounting table 3 and moving the mounting table 3 relative to the fixed member 2 is provided.

  The loading table feed mechanism 1 includes a holding frame 20 screwed to the front surface of the loading table 3, and a drive control unit 70 provided inside the holding frame 20 and fixed to the fixing member 2 via the bracket 10. And an operation handle 30 disposed on the right side of the holding frame 20.

The holding frame 20 includes left and right brackets 20 </ b> L and 20 </ b> R fixed to the front surface of the mounting table 3. A feed shaft 21 and a switching shaft 22 are supported on the brackets 20L and 20R so as to be rotatable in parallel with each other.
The feed shaft 21 is a cylindrical shaft member that protrudes through the bracket 20R to the operation handle 30 side. The switching shaft 22 is a cylindrical shaft member that extends from the middle portion to the left end side of the switching shaft 22. Notches 22A and 22B are formed along the axial direction at positions symmetrical with respect to the central axis.

FIG. 3 is a perspective view of the drive control unit 70. FIG. 4 is a cross-sectional view of the drive control unit 70 as viewed from the left.
The drive control unit 70 includes a substantially rectangular base material 71 fixed to the fixing member 2 via the bracket 10, two parallel leaf springs 72 provided on the upper and lower surfaces of the base material 71, and the parallel plates And two support blocks 73 respectively supported by the springs 72.

The portion of the base 71 that protrudes from the bracket 10 has a small thickness in the direction of the switching shaft 22. Two side portions (not shown) are provided on the side surface of this portion, and a feed shaft 21 is inserted into one hole portion, and a switching shaft 22 is inserted into the other hole portion. In the vicinity of the hole portion through which the feed shaft 21 of the base material 71 is inserted, the thickness in the direction of the switching shaft 22 is further reduced.
The parallel leaf spring 72 has a rectangular plate shape, and is arranged so that its long side is parallel to the feed shaft 21, one end portion is on each of the upper and lower surfaces of the thin portion 71 </ b> A of the base material 71, and the other end side is a substantially rectangular parallelepiped shape. Screwed to the support block 73.

  The support block 73 is arranged so that the long side of the upper surface is perpendicular to the feed shaft 21 when viewed from above, and has two concave grooves 73A and 73B parallel to the feed shaft 21 on the inner surfaces facing each other. . The switching shaft 22 and the feed shaft 21 are inserted through the concave grooves 73A and 73B. A recessed portion 73C deeper than the recessed groove 73A is provided at an intermediate portion of the recessed groove 73A provided so as to sandwich the switching shaft 22, and the recessed portion 73C has a substantially elliptical cross section and a smooth curved surface. The cam 23 which has is fitted. The recessed portion 73 </ b> C is formed so as to substantially match the contour shape of the cam 23 when the minor axis of the elliptical end surface of the cam 23 faces the vertical direction.

  The cam 23 is a cylindrical resin member provided with a space for passing the switching shaft 22 on the inner side, and the switching shaft 22 is located at a symmetrical position across the center of the circle on the cylindrical inner side. Protrusions 23A and 23B that engage with the notches 22A and 22B are formed. That is, by engaging the projections 23A and 23B with the notches 22A and 22B and attaching the cam 23 to the switching shaft 22, the cam 23 can slide in the axial direction in a state in which the rotation of the switching shaft 22 is restricted. It is like that.

The support block 73 includes a roller 74 that abuts the feed shaft 21, a fulcrum leaf spring 75 that couples the end surfaces on the feed shaft 21 side of the upper and lower support blocks 73, and the switching shaft 22 of the upper and lower support blocks 73. And clamping force generating means 76 for biasing the side portion toward the switching shaft 22 side.
Two rollers 74 are provided near the left side and right side feed shafts 21 of the upper support block 73, and two rollers 74 are provided near the left side and right side feed shafts 21 of the lower support block 73. . The three rollers 74 on the left side surface and the right side surface are arranged so that each center forms an equilateral triangle whose center of gravity is the axis of the feed shaft 21 when viewed from the front.

  The roller 74 is a bearing 741 fixed to the support block 73 with a bolt 742. A resin disc-like spacer (not shown) is provided between the bearing 741 and the bolt 742 and between the bearing 741 and the support block 73, and the bearing 741 is rotatably fixed to the support block 73 and the feed shaft 21. Abut. Here, the rotation axis of the bearing 741 is arranged so as to intersect with the axis of the feed shaft 21, and the angles at which the rotation axes of the six bearings 741 intersect with the axis of the feed shaft 21 are all equal.

  When the feed shaft 21 is rotated by operating the operation handle 30, the bearings 741 of the rollers 74 that are in contact with the feed shaft 21 rotate. The rotational axes of the six bearings 741 are all equal to the axis of the feed shaft 21. Therefore, the feed shaft 21 is advanced and retracted in the axial direction by the rotation of the bearing 741.

The fulcrum leaf spring 75 is screwed to the end surface of the support block 73 on the feed shaft 21 side at two points to couple the support blocks 73 together.
The clamp force generating means 76 includes three spring holes 761 provided at the end of the lower support block 73 on the switching shaft 22 side, and three coil force generating coil springs 762 inserted into the spring holes 761. And three bolts 763 that lock the coil spring 762 and are screwed into the upper support block 73.
The coil force generating coil spring 762 has one end locked to a spring hooking portion 764 provided on the upper end surface of the spring hole 761 and the other end locked to a spring hooking portion 765 that is the head of the bolt 763. , 765 are biased away from each other. That is, the clamping force generation means 76 urges the upper and lower support blocks 73 toward the switching shaft 22 side.

From the above, the two upper and lower support blocks 73 can open the opposite side, that is, the portion on the switching shaft 22 side in the vertical direction with the fulcrum leaf spring 75 as a fulcrum. Further, the outer peripheral surface of the cam 23 is in contact with the depressed portion 73 </ b> C of the upper and lower support blocks 73.
Accordingly, when the operation handle 30 is operated to rotate the switching shaft 22, the cam 23 in contact with the recessed portions 73 </ b> C of the two upper and lower support blocks 73 rotates with the rotation of the switching shaft 22. In the portion 73C, the distance between the upper and lower support blocks 73 is expanded from the dimension of the short axis portion of the cam 23 to the dimension of the long axis portion.

  When the interval between the two support blocks 73 is increased, the contact between the feed shaft 21 and the bearing 741 at 74 is released, and the table 3 and the table-feeding mechanism 1 are It becomes a free state in which it can move freely in the direction along the feed shaft 21 and the switching shaft 22.

FIG. 5 is a cross-sectional view of the operation handle 30.
The operation handle 30 is a part where a user's hand is placed and operated to move the stage 3 to a predetermined position, and is provided on the right side of the bracket 20R of the holding frame 20. A coarse motion switching handle 31 serving as an operating portion of the switching means 5 for switching between motion and fine motion, and a fine motion feed handle 32 provided on the right side of the coarse motion switching handle 31 are configured.

The coarse motion switching handle 31 is provided so as to be rotatable about the feed shaft 21 and has a substantially cylindrical coarse motion switching handle body 33 having a gear portion 33A centered on the feed shaft 21 and the switching shaft 22. A spur gear 34 that is attached to the right end and rotates coaxially with the switching shaft 22 and meshes with the gear portion 33A.
Here, when the coarse motion switching handle main body 33 rotates, the spur gear 34 is opposite to the rotation of the coarse motion switching handle main body 33 through the meshing of the gear portion 33A of the coarse motion switching handle main body 33 and the spur gear 34. Rotating in the direction, the switching shaft 22 fixed to the spur gear 34 rotates.

The fine feed handle 32 is rotatably provided with a knob portion 32A. The fine feed handle 32 is a substantially cylindrical handle whose center is screwed to the right end of the feed shaft 21 and is rotatable about the feed shaft 21 as a rotation axis. That is, when the fine feed handle 32 is rotated via the knob portion 32A, the feed shaft 21 is rotated.
The fine movement feed handle 32 and the coarse movement switching handle body 33 are formed in a columnar shape having substantially the same size, and the height positions of the upper and lower end surfaces thereof are substantially equal.
In the normal state, the coarse motion switching handle body 33 is set at a position where the bearing 741 of the feed shaft 21 and 74 abuts.

In the above configuration, the feed shaft 21, the fine feed handle 32 that rotates the feed shaft 21, and the rollers 74 constitute the friction drive mechanism 4 that moves the stage 3 forward and backward.
Further, the switching shaft 22, the coarse motion switching handle 31 for rotating the switching shaft 22, the drive controller 70 excluding the rollers 74, that is, the base material 71, the two parallel leaf springs 72, and the two support blocks 73, The cam 23, the fulcrum leaf spring 75, and the clamping force generating means 76 constitute the switching means 5 for switching the mounting table 3 between coarse movement and fine movement.
In other words, the carriage support mechanism 1 according to the present invention includes a friction drive mechanism 4 that moves the stage 3 forward and backward, and a switching unit 5 that switches the stage 3 between coarse movement and fine movement.

In a measurement microscope equipped with such a mounting table feed mechanism 1, the measuring object is fixed at a predetermined position on the mounting table 3, and while looking through an eyepiece (not shown), the mounting table 3, that is, the measuring object is moved. An operation for positioning and fixing will be described.
For example, when the fine feed handle 32 is operated with the right hand (finger), the feed shaft 21 rotates, so that the stage 3 is finely moved along the feed shaft 21 in cooperation with the rollers 74 that are in contact with the feed shaft 21. To do. At this time, if the operation of the fine feed handle 32 is stopped at a predetermined position, the stage 3 is positioned at that position.

  Here, when it is desired to coarsely move the mounting table 3 while looking into the eyepiece, first, the right hand hung on the fine movement feed handle 32 is moved to the left coarse movement switching handle body 33, and Rotation operation of the coarse motion switching handle body 33 is performed. When such a rotation operation is performed, the feed shaft 21 and 74 are separated by the cam 23, and the stage 3 is brought into a free state. Then, the stage 3 can be coarsely moved with the right hand on the coarse movement switching handle body 33. That is, it is possible to switch between fine movement feed and coarse feed with one-hand operation.

  When the stage 3 is free and the stage 3 is to be moved finely, first, the coarse movement switching handle body 33 is rotated with the right hand in the direction opposite to that described above, and the feed shaft 21 is rotated. However, 74 is brought into contact, and the stage 3 is changed from the free state to the contact state. Thereafter, when the right hand is slightly shifted to the right and the fine movement feed handle 32 is operated, the stage 3 is finely moved in the same manner as described above.

Here, when the stage 3 is changed from the free state to the fixed state, the feed shaft 21 or 74 changes from the detached state to the abutted state. At this time, unlike the conventional stage feed mechanism using a screw shaft and a nut, the thread crest and the nut crest are engaged with each other. The impact applied to the measurement object on 3 is not applied, and therefore the position displacement of the measurement object does not occur.
By the above operation, the stage 3, that is, the measurement object is positioned and fixed.

According to the present embodiment, there are the following effects.
(1) The feed shaft 21 supported by the stage 3, the fine feed handle 32 for rotating the feed shaft 21, and the support block 73 are provided so as to be rotatable and the feed shaft 21 and the rotation axis intersect. Since the friction drive mechanism 4 having a plurality of rollers 74 advances and retracts the stage 3, the stage 3 is not affected by the surface roughness of the screw unlike the conventional stage feed mechanism. The movement is smooth.

  (2) Since the switching means 5 causes the roller 74 to abut and disengage from the feed shaft 21 and thereby the coarse movement and the fine movement of the stage 3 are switched, an impact is applied to the measurement object on the stage 3. Will not be added. That is, unlike a conventional feed mechanism using a screw shaft and a nut, a thread crest and a nut crest are not engaged after being engaged with each other, so that no impact is generated. Therefore, the position shift of the measurement object with respect to the mounting table 3 can be prevented.

  (3) When the coarse motion switching handle main body 33 is rotated, the switching shaft 22 rotates through the meshing of the gear portion 33A of the coarse motion switching handle main body 33 and the spur gear 34, and according to the rotation of the switching shaft 22 The cam 23 moves, and a space between the upper and lower support blocks 73 is opened in a direction in which the roller 74 and the feed shaft 21 come into contact with and separate from each other. In this manner, the contact and separation between the roller 74 and the feed shaft 21 can be easily switched by simply rotating the coarse motion switching handle main body 33. In addition, the switching shaft 22 can be reliably rotated while having a relatively simple structure.

  (4) Since the coarse motion switching handle 31 and the fine motion feed handle 32 are arranged adjacent to each other, even when the eyepiece lens is looked into, in addition to the fine motion coarse motion operation of the mounting table 3 with only the right hand. Therefore, the switching operation between fine movement and coarse movement can be performed, so that the operability in the measurement microscope can be improved and the measurement work can be simplified.

  (5) The fine movement feed handle 32 and the coarse movement switching handle body 33 are rotated about the same axis, and the height positions of the upper and lower surfaces of the fine movement feeding handle 32 and the coarse movement switching handle body 33 are the same. As a result, the hands hung on the fine movement feed handle 32 and the coarse movement switching handle body 33 can be moved smoothly. For this reason, it is possible to quickly and reliably perform the switching operation between the coarse movement and the fine movement while looking into the eyepiece.

  (6) At the time of switching between coarse movement and fine movement, a sliding motion occurs between the switching shaft 22 and the cam 23. However, since the cam 23 is made of resin, smooth sliding can be achieved.

  (7) Since the cam 23 has an elliptical shape with a smooth curved surface, the outer peripheral surface of the cam 23 slides smoothly along the support block 73. For this reason, the switching shaft 22 can be easily rotated with a small force. In other words, by rotating the switching shaft 22 with a constant force, the interval between the two support blocks 73 can be smoothly expanded according to the rotation angle of the switching shaft 22. For this reason, an impact is not applied to the mounting table 3, and the operability during measurement can be further improved.

  (8) The two support blocks 73 have rollers 74, and in the direction in which the feed shaft 21 and the switching shaft 22 are arranged in parallel, the end surface on the feed shaft 21 side is coupled by a fulcrum leaf spring, and the portion on the switching shaft 22 side Is urged in the direction of the switching shaft 22 by the clamping force generating means 76. Therefore, when the mounting table 3 is finely moved, the feed shaft 21 is moved by the clamping force that urges both the support blocks 73 in the direction of the switching shaft 22. 74 is firmly in contact with the roller 74, so that the rotation of the feed shaft 21 can be reliably transmitted to the roller 74. When coarsely moving the stage 3, both support blocks 73 are opened up and down with the fulcrum leaf spring 75 as a fulcrum, and the feed shaft 21 and 74 can be detached.

  (9) Since the rollers 74 are provided on both end faces of the support block 73 in the axial direction of the feed shaft 21, the feed shaft 21 comes into contact with the rollers 74 at two front and rear positions, and the feed shaft 21 rotates. Can be reliably transmitted to the rollers 74.

In addition, this invention is not limited to the said embodiment, Including other structures etc. which can achieve the objective of this invention, the deformation | transformation etc. which are shown below are also contained in this invention.
(I) The configuration of the drive control unit 70 is not limited to the configuration of the embodiment.
For example, it is good also as a structure as shown in FIG.
In FIG. 6, the feed shaft 21, the switching shaft 22, and the rollers 74 have the same configuration as in the above embodiment.

The drive control unit 70 includes a base plate 77 fixed to the bracket 10 provided on the fixing member 2, a collet 78 provided on the outer periphery of the feed shaft 21 so as to be able to expand and contract, and supported by the base plate 77 and having rollers 74. A collet fastening member 79 for expanding and contracting the collet 78 is provided.
The substrate 77 is a strip-shaped member whose end on the switching shaft 22 side is fixed to the bracket 10. On the side surface of the portion protruding from the bracket 10, a hole 77A for rotatably engaging the cylindrical spur gear 791 and a hole 77B for inserting the feed shaft 21 are provided.

The collet 78 is a substantially cylindrical member provided on the outer periphery of the feed shaft 21 so as to be able to expand and contract, and the right end surface is fixed to the substrate 77.
Three rollers 74 are provided on the left end surface of the collet 78. The relationship between the roller 74 and the feed shaft 21 is the same as in the above embodiment. Further, the collet 78 has two tapered portions 782 and 783 whose diameter increases toward the left side toward the outer peripheral surface, a male screw 784 at the end on the substrate 77 side, and parallel to the feed shaft 21 from the left end surface to the vicinity of the male screw 784. It has three slits 785 provided. The three slits 785 are provided at a position where the three rollers 74 are rotated 60 degrees around the feed shaft 21 as viewed from the left end surface of the collet 78. That is, the rollers 74 and slits 785 are alternately provided on the circumference of the left end face of the collet 78.

The collet fastening member 79 has a cylindrical spur gear 791 that is rotatably engaged with the substrate 77 and a cylindrical spur gear 792 that is provided so as to cover the outer periphery of the collet 78.
The cylindrical spur gear 791 is a cylindrical resin member provided with a space for passing the switching shaft 22 on the inner side, and at a symmetrical position with the center of the circle on the inner side of the cylindrical shape, Protrusions 791A and 791B that engage with the notches 22A and 22B of the switching shaft 22 are formed. That is, the cylindrical spur gear 791 is attached to the switching shaft 22 so as to engage the protrusions 791A, 791B with the notches 22A, 22B, and the cylindrical spur gear 791 is restricted in rotation with respect to the switching shaft 22. In this state, it is possible to slide in the axial direction of the switching shaft 22.
The cylindrical spur gear 791 has a gear portion 793 on the outer periphery.

  The cylindrical spur gear 792 is a cylindrical member provided so as to cover the outer periphery of the collet 78, and has a gear portion 794 that meshes with the gear portion 793 of the cylindrical spur gear 791 on the outer peripheral surface thereof. The cylindrical spur gear 792 has, on its inner peripheral surface, a female screw 795 that is screwed into the male screw 784 of the collet 78 and a circumferential tapered surface 792A that increases in diameter toward the left. The tapered surface 792A is formed so as to contact the two tapered portions 782, 783 of the collet 78.

  In the case of the platform feed mechanism 1 having such a drive control unit 70, when the coarse motion switching handle body 33 is rotated, the switching shaft 22 is rotated, and the cylindrical spur gear is rotated according to the rotation of the switching shaft 22. 791 rotates, and further, the cylindrical spur gear 792 rotates via a gear portion 794 that meshes with the gear portion 793 of the cylindrical spur gear 791. Then, since the female screw 795 of the cylindrical spur gear 792 and the male screw 784 of the collet 78 are screwed together, the cylindrical spur gear 792 is advanced and retracted relative to the collet 78 in the axial direction of the feed shaft 21. Further, since the tapered surface 792A of the cylindrical spur gear 792 is in contact with the two tapered portions 782 and 783 of the collet 78, and the collet 78 has the slit 785, the cylindrical spur gear 792 moves forward and backward. The collet 78 is expanded and contracted in a direction in which the feed shaft 21 comes into contact with and leaves the feed shaft 21.

  In this manner, the contact and separation between the roller 74 and the feed shaft 21 can be easily switched by simply operating the coarse motion switching handle body 33, and the same effect as in the above embodiment can be obtained. In addition, the number of components is small compared to the configuration of the drive control unit 70 of the embodiment, and the cost can be suppressed.

(Ii) The configuration of the clamping force generation means 76 is not limited to the configuration of the above embodiment.
The clamping force generation means 76 only needs to bias the two support blocks 73 toward the switching shaft 22, and may be configured as shown in FIGS.
7 and 8, portions of the drive control unit 70 other than the clamping force generation means 76 have the same configuration as that of the above embodiment.

The clamp force generating means 76 includes three spring holes 761 provided at the end of the upper surface of the lower support block 73 on the switching shaft 22 side, and three clamp force generating coils inserted into the spring holes 761. It has a spring 762 and three bolts 763 that lock the coil spring 762 and are screwed into the upper support block 73.
The coil force generating coil spring 762 has one end locked to a spring hooking portion 764 provided on the lower end surface of the spring hole 761 and the other end locked to a spring hooking portion 765 provided on the lower end surface of the bolt 763. 764 and 765 are urged toward each other. That is, the clamping force generation means 76 urges the upper and lower support blocks 73 toward the switching shaft 22 side. Therefore, even in the mounting table feed mechanism 1 including the clamping force generation means 76 having such a configuration, The same effect as the embodiment can be obtained.

(Iii) In the above-described embodiment, the switching shaft 22 provided with the cam 23 is disposed between the two support blocks 73, and the two support blocks 73 are formed by the cam 23 when the switching shaft 22 rotates. However, the present invention is not limited to this. For example, a magnet or the like is installed on the two support blocks 73 so as to generate a magnetic repulsion action or an attraction action. The interval between the support blocks 73 may be increased.
In short, as long as the contact between the roller 74 and the feed shaft 21 can be switched reliably, the structure may be mechanical, magnetic, or electrical. It can be done.

(Iv) In the above embodiment, the holding frame 20 provided with the feed shaft 21 and the like is installed on the mounting table 3, and the feed drive control unit 70 is attached to the fixing member 2 on the lower side of the mounting table 3. Conversely, the holding frame 20 may be installed on the fixing member 2 and the feed drive control unit 70 may be attached to the mounting table 3.

(V) In the above-described embodiment, the stage feed mechanism 1 is used for a measurement microscope. However, the present invention is not limited thereto, and may be used for a projector, for example.

(Vi) In the above-described embodiment, the roller 74 is the bearing 741 fixed to the support block 73 with the bolt 742, but is not limited thereto. A so-called twist roller mechanism is generally applicable.

  The present invention can be used as a loading mechanism for loading a loading table.

The perspective view which looked at a part of measuring microscope of this embodiment from diagonally upward. Sectional drawing which looked at the feed mechanism for mounting bases of this embodiment from the top. The perspective view of the drive control part of this embodiment. Sectional drawing which looked at the drive control part of this embodiment from the left side. The sectional view which looked at the operation handle of this embodiment from the upper part. Sectional drawing which shows the modification of the drive control part of the feed mechanism for mounting bases of this embodiment. The perspective view which shows the modification of the clamping force generation | occurrence | production means of the platform mounting mechanism of this embodiment. Sectional drawing which shows the modification of the clamping force generation | occurrence | production means of the stage feed mechanism of this embodiment. Sectional drawing which looked at a part of conventional measuring microscope from the upper part. Sectional drawing which looked at the principal part of the said conventional measuring microscope from the right side.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Feeding mechanism for mounting bases 2 Fixed member 3 Mounting base 10 Bracket 20 Holding frame 21 Feeding shaft 22 Switching shaft 23 Cam 30 Operation handle 31 Coarse motion switching handle 32 Fine motion feeding handle 70 Drive control part 71 Base material 72 Parallel leaf spring 73 support block 74 roller 75 fulcrum leaf spring 76 clamping force generating means

Claims (7)

A mounting mechanism for moving the mounting table on which the measurement object is mounted with respect to the fixed member.
A friction drive mechanism for advancing and retreating the table, and switching means for switching the table to coarse movement and fine movement;
The friction drive mechanism includes a feed shaft that is rotatable on one of the table and the fixing member, and is supported in parallel with the moving direction of the table, a feed handle that rotates the feed shaft, A plurality of rollers provided on the other side of the mounting table and the fixing member so as to be rotatable and the feed shaft and the rotation axis intersect with each other;
The loading table feed mechanism according to claim 1, wherein the switching means causes the rollers to abut against and separate from the feed shaft. In the mounting mechanism according to claim 1,
The switching means includes a switching shaft that is arranged on either the table or the fixing member so as to be parallel to and rotatable with respect to the feed shaft, and causes the rollers to abut against and separate from the feed shaft during rotation. An operation unit for rotating the switching shaft,
2. The platform feed mechanism according to claim 1, wherein the operation section is provided in the vicinity of the feed handle. In the mounting mechanism according to claim 1,
The switching means includes a switching shaft that is disposed on one of the table and the fixing member so as to be parallel and rotatable with the feed shaft, an operation unit that rotates the switch shaft, the switching shaft, and the feed shaft. Two support blocks each provided with the above-mentioned rollers and supported by either one of the above-mentioned mounting base and the above-mentioned fixing member, which can be opened and closed with the shaft interposed therebetween, and according to the rotation of the switching shaft provided on the switching shaft And a cam for changing the distance between the two support blocks in a direction in which the rollers abut against and separate from the feed shaft. The stage feed mechanism according to claim 3,
The two support blocks have the rollers, and in the direction in which the feed shaft and the switching shaft are arranged side by side, the feed shaft side end surface is coupled by a fulcrum leaf spring, and the switching shaft side portion generates a clamping force. The platform feed mechanism, wherein the platform is biased in the direction of the switching axis by means. The stage feed mechanism according to claim 4,
2. The platform feed mechanism according to claim 1, wherein the rollers are provided on both end faces of the support block in the axial direction of the feed shaft. In the mounting mechanism according to claim 1,
The switching means includes a switching shaft arranged parallel to the feed shaft and rotatable on one of the table and the fixing member, an operation unit for rotating the switch shaft, and an outer periphery of the feed shaft. A collet provided so as to be able to be expanded and contracted and supported by either the mounting base or the fixing member and having the roller; and the roller abuts against the feed shaft according to the rotation of the switching shaft; And a collet fastening member that expands and contracts the collet in the direction of detachment. In the platform feed mechanism according to any one of claims 1 to 6,
The operation portion is rotatably provided on the feed shaft in the vicinity of the feed handle, and has a gear handle centered on the feed shaft, and is attached to the switch shaft and meshes with the gear portion. With gears,
The platform feed mechanism, wherein the switching shaft is configured to be rotatable via the gear by operation of the switching handle.

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