JP2002365036A - Feed mechanism for stage - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a feed mechanism for a stage which enhances operability and by which a measuring operation can be performed simply. SOLUTION: An operation-part mainframe 20 is attached to the front of the stage 3. A feed screw shaft 21 whose outer circumference is threaded and a changeover shaft 22 at which a coarse-adjustment changeover sleeve 40 comprising a cam is installed are arranged in parallel at the inside of the mainframe 20, and they are supported by the mainframe 20 so as to be rotatable. A coarse- adjustment changeover handle 31 which turns the changeover shaft 22 and a fine-adjustment feed handle 32 which turns the screw shaft 21 are installed side by side on the right side of the mainframe 20. Two leaf springs 12 to which feed nuts 13 engaged with the screw shaft 21 are fixed respectively at the inside are attached to a fixation member 2 by sandwiching the shafts 21, 22. The leaf springs 12 are deformed to a direction in which the feed nuts 13 and the feed screw shaft 21 are engaged and separated by the cam which is turned together with the changeover shaft 22. Consequently, the coarse adjustment and the fine adjustment of the stage 3 can be changed over.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stage support mechanism for feeding a stage.

[0002]

2. Description of the Related Art A measuring microscope includes a stage feed mechanism for moving a stage on which a measurement object is mounted with respect to a fixed member in order to move a measurement site of the measurement object to an observation position. Is provided. As shown in FIGS. 6 and 7, a conventional feed stage feed mechanism is a feed screw shaft rotatable on a stage 100 via a frame 101 and supported in parallel to the moving direction of the stage 100. 120 and the feed screw shaft 120
And a feed screw shaft 120 provided via a bracket 111 on the fixing member 110 side.
And a half nut 140 as a nut member that can be meshed with the nut.

When the feed handle 130 is operated with one hand (right hand), the feed screw shaft 120 rotates, and the half nut 14 meshed with the feed screw shaft 120 is rotated.
The stage 100 moves in the direction along the feed screw shaft 120 with respect to the fixed member 110 in cooperation with the zero (fine movement).
Is done. However, when the stage 100 is to be largely moved (coarsely moved), the stage 100 is rotated by the rotation of the feed screw shaft 120.
Such a mechanism for moving the feed handle 130
The number of operations must be increased, which is very inefficient.

Therefore, in order to improve this point, the half nut 140 is moved in a direction (vertical direction) perpendicular to the axial direction of the feed screw shaft 120, and the engagement and disengagement of the feed screw shaft 120 and the half nut 140 are performed. And a floating lever 150 that enables Thus, when the floating lever 150 is operated with the other hand (left hand), the half nut 140 and the feed screw shaft 120 are disengaged, and the stage 100 is in a free state. By moving the handle 130, the stage 100 can be roughly moved.

[0005]

As described above, the stage 10
Floating lever 15 switches between coarse and fine movement
0, but the feed handle 130 for fine movement and the floating lever 150 for coarse movement are separated from each other. The user has to take his eyes off once and check the position of the floating lever 150, which causes a problem that the operability is poor and the measurement operation is complicated. In addition, such a problem is not limited to the measuring microscope, but also applies to other measuring instruments having a stage-feeding mechanism such as a measuring projector.

An object of the present invention is to provide a stage feed mechanism capable of improving operability and simplifying a measurement operation.

[0007]

According to a first aspect of the present invention, there is provided a stage-feeding mechanism for moving a stage on which an object to be measured is mounted with respect to a fixed member. A feed screw shaft rotatable on one of the above-mentioned stage and the fixed member and supported in parallel to the moving direction of the above-mentioned stage,
A feed handle for rotating the feed screw shaft, a nut member provided on one of the other side of the stage and the fixing member, the nut member being meshable with the feed screw shaft, and the nut member being meshed with the feed screw shaft. And an engagement / disengagement means for disengagement, wherein an operating portion of the engagement / disengagement means is disposed near the feed handle.

In the present invention, for example, when a feed screw shaft is provided on a mounting table, a nut member is provided on a fixed member side, and an eyepiece is provided above the mounting table. After operating the meshing / separating means with one hand (right hand) to mesh the feed screw shaft and the nut member, look into the eyepiece, and operate the feed handle with the right hand in the state of looking through the eyepiece. Since the feed screw shaft rotates, the mounting table can be finely moved in the direction along the feed screw shaft in cooperation with the nut member meshed with the feed screw shaft. In addition, with the right hand slightly shifted while operating through the eyepiece lens in this manner and operating the operating portion of the meshing / separating means arranged near the feed handle to disengage the feed screw shaft and the nut member, Since the stage is in the free state, the stage can be roughly moved with the right hand in the direction along the feed screw axis. Further, when the stage is in the free state, the meshing / separating means is operated with the right hand,
When the feed handle is operated by slightly shifting the right hand after the feed screw shaft is engaged with the nut member, the stage can be finely moved in the same manner as described above. In this way, with the right hand (one hand) while looking through the eyepiece, it is possible to switch between fine movement and coarse movement in addition to fine movement and coarse movement of the stage. Work can be simplified.

Here, the meshing / separating means is disposed on one of the article table and the fixing member in parallel with the feed screw shaft, and is rotated by an operation of the operating portion. And two leaf springs, each of which is supported by one of the above-mentioned stage and the fixing member with the feed screw shaft interposed therebetween and each having the nut member, and provided on the switching shaft according to the rotation of the switching shaft. And a cam for deforming the two leaf springs in a direction in which the nut member meshes with and disengages from the feed screw shaft. According to such a configuration, when the operating portion of the meshing / separating means is operated, the switching shaft rotates, the cam moves in accordance with the rotation of the switching shaft, and the nut member and the feed screw shaft mesh and disengage. The two leaf springs are deformed in the direction. In this manner, the meshing and disengaging of the nut member and the feed screw shaft can be easily switched only by operating the operating portion of the meshing and disengaging means.

A switch handle rotatably provided on the feed screw shaft near the feed handle and having a gear portion centered on the feed screw shaft;
A gear attached to the switching shaft and meshing with the gear portion, by operating the switching handle,
It is preferable that the switching shaft is configured to be rotatable via the gear. In such a configuration, when the switching handle is rotated, the switching shaft rotates through meshing between the gear portion of the switching handle and the gear. Therefore, the switching shaft can be surely rotated with a relatively simple structure. Further, since the switching handle in addition to the feed handle is also rotatable with respect to the feed screw axis, each handle rotates about the same axis. For this reason, for example, the hands hung on these handles can be smoothly moved back and forth while looking through the eyepiece, and the switching operation between the coarse movement and the fine movement of the stage can be performed quickly and reliably.

Further, it is preferable that a pitch of the nut member is formed smaller than a pitch of the feed screw shaft. At this time, it is more preferable that the pitch of the nut members is half the pitch of the feed screw shaft. Here, when the feed screw shaft and the nut member are engaged,
When the vertices of the screw threads of the feed screw shaft and the nut member are slightly shifted from each other, the mounting table is shifted by the pitch of the nut member. As a result, a shock is also applied to the measurement object on the stage, and if the shock is strong, the measurement object is displaced. However, in the present invention, since the pitch of the nut member is formed smaller than the pitch of the feed screw shaft, the above-described impact is reduced by reducing the displacement width of the mounting table, thereby preventing the displacement of the measurement object. it can. For this reason, there is no need to perform the positioning operation again and perform the measurement again, so that the measuring operation can be performed efficiently.

Preferably, the inner diameter of the nut member is larger than the outer diameter of the feed screw shaft. According to such a configuration, in the feed screw shaft and the nut member, the contact portion between the sliding tooth surfaces becomes smaller, so that even if the parallelism between the moving direction of the mounting table and the direction of the feed screw shaft is shifted. Since the two leaf springs are deformed to absorb the shift, the feed screw shaft and the feed nut can be reliably engaged. That is, the reason why the inner diameter of the nut member is made larger than the outer diameter of the feed screw shaft is that, when the diameter is the same, the feed screw shaft and the nut must be parallel to the movement of the mounting table. The engagement with the member becomes worse,
Trouble occurs in fine movement. In the present invention, since the inner diameter of the nut member is larger than the outer diameter of the feed screw shaft, even if the movement of the stage and the parallelism of the nut member are slightly misaligned, for example, the leaf spring is deformed in the vertical direction. In addition, since the front-rear direction is meshed with the feed screw shaft by the nut member, this can also be handled by deformation of the leaf spring.

[0013]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a feed mechanism for a stage according to the present invention. FIG. 1 is a cross-sectional view of a part of the measuring microscope 1 of the present embodiment viewed from above.
FIG. 3 is a vertical sectional view taken along the line II-II of FIG. 1, and FIG.
FIG. 4 is a longitudinal sectional view taken along the line III, FIG. 4 is a sectional view of a main part of the measuring microscope 1 viewed from the left side, and FIG. is there.

As shown in FIG. 1, a measuring microscope 1 has a fixed member 2 and a substantially rectangular parallelepiped mounting table which is disposed above the fixed member 2 and on which an object to be measured (not shown) is placed. 3
And an operation unit 4 attached to the front surface of the mounting table 3 and moving the mounting table 3 with respect to the fixed member 2.

The operation unit 4 is screwed to the front surface of the stage 3 and has a hollow, substantially rectangular parallelepiped operation unit body 20.
An operation handle 3 arranged on the right side of the operation unit body 20
0.

Two shafts rotatably supported by the operation section main body 20 are disposed inside the operation section main body 20. These two shafts are connected to the left and right side surfaces 2 of the operation unit body 20.
0L and 20R, the front shaft is a feed screw shaft 21, and the rear shaft is a switching shaft 22.
It is.

The feed screw shaft 21 is provided at the left end of the feed screw shaft main body 23 whose outer diameter is threaded so as to have an outer diameter of 10 mm and a pitch of 1 mm. A left shaft member 24 rotatably supported with respect to the left side surface 20L and a right end of the feed screw shaft main body 23, and the operation unit main body 2
And a right shaft member 25 rotatably supported with respect to the right side surface 20R and protruding toward the operation handle 30 through the right side surface 20R.

As shown in FIG. 4, the switching shaft 22 extends along the shaft 22 from the intermediate portion to the left end thereof.
Notches 22A, 22A,
22B are formed. Here, as shown in FIGS. 3 and 4, a coarse movement switching sleeve 40 is attached to a portion having the notches 22A and 22B on the outer periphery of the switching shaft 22.

As shown in FIG. 3, the coarse motion switching sleeve 40 is a cylindrical resin member provided with a space through which the switching shaft 22 passes, and has a circular shape on the cylindrical internal side. Notches 22A, 22A are located symmetrically with respect to the center.
Protrusions 40A and 40B (FIG. 4) engaging with B are formed. That is, the projections 40A, 40B and the notches 22A, 2
2B to engage the coarse movement switching sleeve 40 with the switching shaft 2
2, the coarse movement switching sleeve 40 can slide in the axial direction with the rotation thereof being restricted with respect to the switching shaft 22. Further, the coarse movement switching sleeve 40
In FIG. 3, the left side portion in FIG. 3 swells outward, and the swelling portion is a cam 41. Here, as shown in FIG. 4, the cam 41 has a substantially elliptical shape having a smooth curved cross section. The portion of coarse movement switching sleeve 40 that is inserted into feed nut holder 11 is cylindrical portion 4.
2.

The operation handle 30, as shown in an enlarged view in FIG. 5, is a part operated by a user's hand to move the stage 3 to a predetermined position.
The coarse movement switching handle 31 is provided on the right side of the right side surface 20R of the “0” as an operation part of the meshing / separating means, and the fine movement feed handle 32 is provided on the right side of the coarse movement switching handle 31.

The coarse movement switching handle 31 is connected to the right shaft member 25.
, Which is rotatably provided about the outer sleeve 25A as a rotation axis, in other words, about the right shaft member 25 as a rotation center, and has a substantially cylindrical coarse movement switching handle having a gear portion 33A about the right shaft member 25 as a center. The main body 33 and the switching shaft 22
Is mounted on the right end and rotates coaxially with the switching shaft 22,
And a spur gear 34 meshing with the gear portion 33A.

Here, when the coarse motion switching handle main body 33 rotates, the spur gear 34 is rotated by the rotation of the coarse motion switching handle main body 33 through the engagement of the gear portion 33A of the coarse motion switching handle main body 33 and the spur gear 34. Rotates in the opposite direction, and the switching shaft 22 fixed to the spur gear 34 rotates.

The fine feed handle 32 has a knob 32
A is rotatably provided. Fine movement feed handle 32
Is a substantially cylindrical handle whose center portion is screwed to the right end of the right shaft member 25, and is rotatable around the right shaft member 25 as a rotation axis. That is, the knob 3
When the fine feed handle 32 is rotated through 2A,
The feed screw shaft 21 will rotate. The fine-motion feed handle 32 and the coarse-motion switching handle main body 33 are formed in a columnar shape having substantially the same size, and the height positions of the upper and lower end surfaces thereof are substantially equal.

The fixing member 2 includes a substantially rectangular parallelepiped fixing table 10 arranged below the mounting table 3 and a feed nut holder 11 attached to the front surface of the fixing table 10 via a bracket 10A.

As shown in FIG. 1, the feed nut holder 11 is screwed to the upper surface of a bracket 10A projecting downward. On the upper and lower surfaces of the feed nut holder 11, two substantially rectangular leaf springs 12 (12A, 1A) are provided.
2B) are fixed. A half nut-shaped feed nut 13 (13A, 13B) as a nut member is screwed to an opposing surface (inner surface) of the two leaf springs 12, respectively.

The feed nut holder 11 is shown in FIGS.
As shown in FIG. 4, the thickness dimension (vertical dimension in FIG.
And the length (width) in the left-right direction is substantially the same as the length in the left-right direction of the cylindrical portion 42 of the coarse motion switching sleeve 40. And a through hole 14 through which a feed screw shaft 21 and a switching shaft 22 to which a coarse movement switching sleeve 40 is mounted are respectively inserted in the left and right directions.
15 (FIGS. 2 and 3) are formed before and after. The feed nut holder 11 has a bulging portion 11A that bulges (projects) upward from the upper surface thereof in an inverted L shape, and a bulge portion 11B that bulges downward from the lower surface in the same manner. (See FIGS. 2 and 3).

As shown in FIG. 3, only the cylindrical portion 42, not the cam 41, of the coarse motion switching sleeve 40 mounted on the switching shaft 22 is inserted into the insertion hole 14. For this reason, the cam 41 having a larger sectional area than the cylindrical portion 42 is not inserted into the insertion hole 14 and is located on the left side of the feed nut holder 11.

The two leaf springs 12 are opposed to each other with the feed screw shaft 21 and the switching shaft 22 interposed therebetween, and the length in the left-right direction is the same as the length in the left-right direction of the coarse movement switching sleeve 40. It is almost the same.

The upper leaf spring 12A of the two leaf springs 12 has a bulging portion 1 at the right end in FIG.
1A, the right end side of the leaf spring 12A and the bulging portion 1A.
1A is fixed with three screws. Similarly, the lower leaf spring 12B and the right end of the leaf spring 12B
1B is fixed with three screws.

The two leaf springs 12 (12A, 12A)
On the left front side in FIG. 1 of the inner surface of B), there are provided two feed nuts 13 (13A, 13B) which can mesh with the screw on the outer peripheral side of the feed screw shaft 21 and have an inner diameter of 12 mm and a pitch of 0.5 mm. Each screw is fixed.

As described above, although the feed nut holder 11 and the two leaf springs 12 are screwed (fixed ends) on the right ends of the two leaf springs 12, the two leaf springs 12 are fixed. It is not fixed on the left end side. For this reason, the left ends (free ends) of the two leaf springs 12 can be deformed vertically. Also, the coarse movement switching sleeve 4
The outer peripheral surface of the No. 0 cam 41 abuts on the upper left end (the upper free end) of the inner surface of the two leaf springs 12.

Therefore, when the coarse motion switching handle main body 33 is operated, the switching shaft 22 rotates via the spur gear 34, and the coarse motion switching sleeve 40 rotates with the rotation of the switching shaft 22. Then, on the left side of the two leaf springs 12,
The dimension between the two leaf springs 12 is expanded from the dimension of the short axis portion of the cam 41 to the dimension of the long axis portion. When the dimension between the two leaf springs 12 increases in this manner, the engagement between the feed screw shaft 21 and the feed nut 13 is released, and the mounting table 3 and the operation unit 4 move the shaft 21 ,
A free state in which the robot can move freely in a direction along the line 22 is obtained. Note that, at normal time, the coarse movement switching handle body 33 is
It is set at a position where the feed screw shaft 21 and the feed nut 13 mesh with each other.

Here, the feed mechanism for a stage according to the present invention comprises a feed screw shaft 21, a fine-motion feed handle 32, a feed nut 13, and a meshing / separating means. The meshing / separating means includes a coarse movement switching handle 31, a switching shaft 22,
Two leaf springs 12 and cam 41 of coarse movement switching sleeve 40
It is composed of

In such a measuring microscope 1, the measuring object is fixed at a predetermined position of the mounting table 3, and the mounting table 3, ie, the measuring object is positioned and fixed while looking through an eyepiece (not shown). The operation will be described. First, when the fine-adjustment feed handle 32 is operated with one hand, for example, the right hand (finger) while looking through the eyepiece, the feed screw shaft 21 rotates, and thus the cooperation with the feed nut 13 meshed with the feed screw shaft 21. As a result, the stage 3 is slightly moved along the feed screw shaft 21. At this time, if the operation of the fine movement feed handle 32 is stopped at a predetermined position, the stage 3 is positioned at that position.

Here, when it is desired to coarsely move the stage 3 while looking through the eyepiece, first, the right hand on the fine feed handle 32 is moved to the coarse movement switching handle body 33 on the left side. It moves and performs the rotation operation of the coarse movement switching handle main body 33. When such a rotation operation is performed, the feed screw shaft 21 and the feed nut 13 are detached by the cam 41 of the coarse movement switching sleeve 40, and the stage 3 is in a free state. Then, the stage 3 can be roughly moved with the right hand on the handle. That is, fine movement and coarse movement can be switched with one-hand operation.

When the stage 3 is in a free state, the stage 3
When it is desired to slightly move the feed screw shaft 21, the feed screw shaft 21 and the feed nut 13 are engaged with each other by rotating the coarse movement switching handle body 33 with the right hand in the opposite direction to that described above.
From the free state to the meshing state. Thereafter, when the fine hand feed handle 32 is operated by slightly shifting the right hand to the right, the stage 3 is slightly moved in the same manner as described above.

Here, when the stage 3 is changed from the free state to the fixed state, the feed screw shaft 21 and the feed nut 13
Changes from the disengaged state to the engaged state. At this time, the apex of the thread of the feed screw shaft 21 and the feed nut 13
The peak of the peak may be hit, and the stage 3 is shifted by the pitch of the feed nut 13 from this state.
Also in this case, since the shift amount is one half of the conventional one, the impact applied to the measurement target on the stage 3 is small, and therefore, the position shift of the measurement target can be suppressed. By the above operation, the stage 3, that is, the measurement target is positioned and fixed.

According to the present embodiment, the following effects can be obtained. (1) Since the coarse-motion switching handle 31 and the fine-motion feed handle 32 are arranged adjacent to each other, it is possible to perform the fine-motion coarse-motion operation of the stage 3 with only the right hand even while looking through the eyepiece. Since the switching operation between the fine movement and the coarse movement can be performed, the operability of the measuring microscope 1 can be improved and the measuring operation can be simplified.

(2) The fine feed handle 32 and the coarse switching handle body 33 rotate about the same axis, and the height positions of the upper and lower surfaces of the fine feed handle 31 and the coarse switching handle body 33 are the same. So,
Fine movement feed handle 31 and coarse movement switching handle main body 33
Can be moved smoothly. For this reason, the switching operation between the coarse movement and the fine movement can be performed quickly and reliably even while looking through the eyepiece.

(3) When the coarse movement switching handle main body 33 is operated, the switching shaft 22 rotates through the engagement of the gear portion 33A of the coarse movement switching handle main body 33 and the spur gear 34, and the switching shaft 22 The cam 41 moves according to the rotation, and the feed nut 13 is moved.
The two leaf springs 12 are deformed in a direction in which the and the feed screw shaft 21 are engaged and disengaged. In this manner, the meshing and disengagement between the feed nut 13 and the feed screw shaft 21 can be easily switched only by operating the coarse movement switching handle main body 33.
In addition, the switching shaft 22 can be surely rotated with such a relatively simple structure.

(4) Since the pitch of the feed nut 13 is set to be half the pitch of the feed screw shaft 21, the pitch of the feed nut 13 and the pitch of the feed screw shaft 21 are made equal to each other as in the conventional case. Feed screw shaft 21 and feed nut 1
Since the shift width of the stage 3 when the stage 3 is shifted from the free state to the meshing state is reduced, the impact on the stage 3 generated when such a shift occurs is reduced. For this reason, it is possible to prevent the displacement of the object to be measured with respect to the mounting table 3, and to further simplify the measuring operation.

(5) If the inner diameter of the feed nut 13 and the outer diameter of the feed screw shaft 21 are the same, the direction of movement of the stage 3 and the direction of the feed screw shaft 21 are exactly parallel. Otherwise, the engagement between the feed screw shaft 21 and the feed nut 13 is deteriorated, and the fine movement of the stage 3 is likely to be hindered. Therefore, in the present embodiment, the feed nut 13
Of the feed screw shaft 21 (10 mm)
m), the contact portion between the sliding tooth surfaces of the feed screw shaft 21 and the feed nut 13 is reduced, so that the direction of movement of the mounting table 3 and the direction of the feed screw shaft 21 are parallel. Even if it is displaced, the two leaf springs 12 deform and absorb this displacement, so that the feed screw shaft 21 and the feed nut 13 can be reliably engaged. That is,
The reason why the inner diameter (12 mm) of the feed nut 13 is made larger than the outer diameter (10 mm) of the feed screw shaft 21 is that the feed screw shaft 21 is made parallel to the movement of the mounting table 3 if the diameter is the same. If not, the engagement between the feed screw shaft 21 and the feed nut 13 becomes poor, and the fine movement feed is hindered. In the present embodiment, the feed nut 1
3, the inner diameter of the plate 3 is increased, so that even if the movement of the stage 3 and the parallelism of the feed nut 13 are slightly misaligned, the leaf spring 12 can be deformed in the vertical direction and the feed screw can be moved in the front-rear direction. Since the shaft 21 is meshed with the feed nut 13, this can also be handled by deforming the leaf spring 12.

(6) Since the coarse movement switching sleeve 40 is made of resin, the projections 40A, 40B and the like can also be formed integrally, and post-processing is not required unlike the case of metal, so that it is easy. It can be manufactured and the manufacturing cost can be reduced. Further, when the stage 3 is moved, a sliding motion occurs between the switching shaft 22 and the coarse motion switching sleeve 40. Since the coarse motion switching sleeve 40 is made of resin as described above,
Smooth sliding can be achieved.

(7) The cam 4 of the coarse movement switching sleeve 40
Since 1 is an elliptical shape having a smooth curved surface, the cam 4
The outer peripheral surface of one slides smoothly along the two leaf springs 12. Therefore, the switching shaft 22 can be easily rotated with a small force. In other words, by rotating the switching shaft 22 with a constant force, the two leaf springs 12 can be smoothly expanded according to the rotation angle of the switching shaft 22. For this reason, the impact on the stage 3 can be reduced, so that the operability during measurement can be further improved.

It should be noted that the present invention is not limited to the above-described embodiment, but includes other configurations that can achieve the object of the present invention, and also includes the following modifications and the like.
For example, in the above-described embodiment, the pitch of the feed nut 13 is set to a half of the pitch of the feed screw shaft 21. However, the present invention is not limited to this, and may be another ratio such as 1/3 or 1/4.
If the engagement between the feed screw shaft 21 and the feed nut 13 can be ensured, the pitches may be equal. However, if the pitch of the feed nut 13 is smaller than half the pitch of the feed screw shaft 21, a problem that the engagement between the feed nut 13 and the feed screw shaft 21 is reduced easily occurs. If the pitch is larger than half of the pitch of the feed screw shaft 21, a problem that the displacement of the stage 3 becomes large easily occurs. However, in the case of the above-described embodiment, there is an advantage that these two points fall within the allowable ranges, respectively, and these two points can be sufficiently satisfied.
Although the pitch of the feed nut 13 may be larger than the pitch of the feed screw shaft 21, the position of the stage 3 is likely to shift, so the pitch of the feed nut 13 is set to
It is better to make the pitch smaller than 1.

In the above embodiment, the feed nut 13 has an inner diameter of 12 mm, and the feed screw shaft 21 has an outer diameter of 10 mm.
However, if the feed nut 13 and the feed screw shaft 21 can mesh with each other and the stage 3 can be moved reliably, the feed nut 1
The dimensions of 3 and the feed screw shaft 21 are not particularly limited.

In the above embodiment, the feed nut 13 is provided with a female thread. However, the present invention is not limited to this, and the feed nut 13 may be formed as a parallel serration. However, the embodiment has an advantage that the engagement between the feed nut 13 and the feed screw shaft 21 is ensured, and the power can be transmitted smoothly.

In the above embodiment, the coarse movement switching sleeve 40 having the cam 41 between the two leaf springs 12 is provided.
Is provided, and the cam 41 when the switching shaft 22 rotates causes the two leaf springs 12 to be deformed. However, the mechanical structure is not limited to this.
A magnet or the like is installed on the two leaf springs 12 so that a magnetic repulsion action or an attraction action is generated.
May be deformed. In short, if the switching between the engagement and disengagement of the feed nut 13 and the feed screw shaft 21 can be reliably performed, the structure may be mechanical, magnetic, or even electrical, It is possible to do.

In the above-described embodiment, the operation unit 4 provided with the feed screw shaft 21 and the like is installed on the stage 3, and the feed nut holder 11 is mounted on the fixed stage 10 below the stage 3. However, conversely, the operation unit 4 may be installed on the fixed base 10 and the feed nut holder 11 may be attached to the mounting base 3.

In the above embodiment, the measuring microscope 1 is used for a measuring microscope. However, the present invention is not limited to this. For example, the measuring microscope 1 may be used for other measuring instruments such as a measuring projector.

[0051]

As described above, according to the stage feed mechanism of the present invention, the operability can be improved and the measuring operation can be simplified.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a part of a measuring microscope according to an embodiment of the present invention as viewed from above.

FIG. 2 is a vertical sectional view taken along line II-II in FIG.

FIG. 3 is a vertical sectional view taken along line III-III in FIG.

FIG. 4 is a sectional view of a main part of the measuring microscope according to the embodiment as viewed from the left side.

FIG. 5 is an enlarged cross-sectional view of a main part of the operation unit in the embodiment as viewed from the front.

FIG. 6 is a cross-sectional view of a part of a conventional measuring microscope viewed from above.

FIG. 7 is a sectional view of a main part of the conventional measuring microscope viewed from the right side.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Measuring microscope 2 Fixed member 3 Mounting table 4 Operation part 4 10 Fixed table 10A Bracket 11 Feed nut holder 12 (12A, 12B) Two leaf springs 13 (13A, 13B) Feed nut 21 as a nut member 21 Feed screw shaft 22 Switching shaft 31 Coarse movement switching handle as operating part of meshing / separating means 32 Fine movement feeding handle as feed handle 33 Coarse movement switching handle main body 33A Gear part 34 Spur gear as gear 40 Coarse movement switching sleeve 41 Cam 100 Mounting table 110 Fixing member 120 Feed screw shaft 130 Rotating handle 140 Half nut 150 Floating lever

Claims (6)

[Claims] An object stage feed mechanism for moving a stage on which a measurement object is mounted with respect to a fixed member, wherein the mechanism is rotatable to one of the stage and the fixed member. A feed screw shaft supported in parallel with the moving direction of the stage, a feed handle for rotating the feed screw shaft, and the feed screw shaft provided on one of the other side of the stage and the fixed member; A nut member capable of meshing with the feed screw shaft; and an engaging and disengaging means for engaging and disengaging the nut member with respect to the feed screw shaft. The operating portion of the engaging and disengaging means is disposed near the feed handle. A feed mechanism for a stage. 2. The loading mechanism according to claim 1, wherein said engaging and disengaging means is arranged on one of said loading table and a fixing member in parallel with said feed screw axis, and said operation is performed. A switching shaft that is rotated by the operation of the part, two leaf springs each supported by one of the above-mentioned stage and the fixed member with the switching shaft and the feed screw shaft interposed therebetween, each having the nut member, And a cam provided on the switching shaft and deforming the two leaf springs in a direction in which the nut member meshes with and disengages from the feed screw shaft in accordance with rotation of the switching shaft. Feed mechanism for stage. 3. The feed mechanism for a stage according to claim 2, wherein the operation unit is rotatably provided on the feed screw shaft near the feed handle, and has a gear centered on the feed screw shaft. A switching handle having a portion, and a gear attached to the switching shaft and meshing with the gear portion. The switching shaft is configured to be rotatable via the gear by operating the switching handle. A feed mechanism for a stage. 4. The feed mechanism for a stage according to claim 1, wherein a pitch of the nut member is smaller than a pitch of the feed screw shaft. Loading stage feed mechanism. 5. The feed mechanism according to claim 4, wherein a pitch of the nut members is half of a pitch of the feed screw shaft. 6. The mounting table feed mechanism according to claim 2, wherein an inner diameter of the nut member is formed larger than an outer diameter of the feed screw shaft. mechanism.