JP2007326208A - Workpiece fixing jig and machining method using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece fixing jig which strongly fixing a workpiece to be machined and easily removing the workpiece after the machining. <P>SOLUTION: A workpiece fixing sheet 10 comprises: a PET sheet 11 as a base body; and a workpiece fixing agent 12 coated on the PET sheet 11 to fix the workpiece when the workpiece fixing agent is fused and coagulated according to a temperature, and a difference between a fusion start temperature and a fusion end temperature of the workpiece fixing agent 12 is not more than 5°C. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a workpiece fixing jig that can firmly fix a workpiece to be processed and can be easily removed after processing, and a processing method using the workpiece fixing jig.

  Conventionally, when processing workpieces (hereinafter referred to as workpieces) made of ceramics, clay, glass, metal, etc., such as plate shapes, three-dimensional irregular shapes, and thin plate shapes, the workpieces are affixed to an adhesive tape and fixed. And processing.

  As a pressure-sensitive adhesive tape for fixing the work in this way, there is a heat release sheet that can remove the work by heat. Such a heat release sheet is made of, for example, polyethyltetratate, and a foaming material that foams by heat is mixed in the adhesive. For example, since the foaming agent mixed in the adhesive material foams at 90 ° C., 120 ° C., and 150 ° C., the foaming agent expands by heating the heat-release sheet at the above temperature after processing the workpiece. The workpiece can be removed from the seat.

  In addition to the thermal release sheet, there is a PET sheet from which a fixed workpiece can be removed by ultraviolet rays. In the pressure-sensitive adhesive applied to such a PET sheet, a component that deteriorates the adhesive strength by irradiation with ultraviolet rays is mixed. For this reason, by irradiating the PET sheet with ultraviolet rays after processing the workpiece, the adhesive strength of the adhesive is reduced and the workpiece can be removed from the sheet.

  However, when removing the workpiece from the adhesive tape, the adhesive adheres to the workpiece due to the adhesive force of the adhesive, and even if the workpiece is removed from the adhesive tape, the adhesive may not be completely removed from the workpiece. In such a case, since the adhesive applied to the adhesive tape is an organic material, the adhesive remaining on the workpiece is removed by washing the workpiece with an organic solvent such as alcohol, acetone, benzene, or toluene. Is required. However, when the workpiece is weak against an organic solvent such as a ceramic sheet, the workpiece may be broken by being washed with the organic solvent. As described above, when the pressure-sensitive adhesive is removed using an organic solvent, handling and disposal of the organic solvent are complicated, and the cost is increased.

  In addition, when peeling a workpiece | work from an adhesive sheet, if a workpiece | work is 1 mm or less in thickness, a workpiece | work may deform | transform or be damaged by the adhesive force of an adhesive.

  Also, even if the workpiece can be fixed with an adhesive that is a member for fixing the workpiece, if the adhesion between the PET sheet and the adhesive is weak, the adhesive will peel off from the PET sheet during processing, making it impossible to process. There is a possibility that.

  In view of the above points, it is a first object of the present invention to provide a workpiece fixing jig that can easily remove a workpiece after the workpiece is fixed and processed, and a processing method using the workpiece fixing jig. A second object is to improve the adhesion between the PET sheet and a member for fixing the workpiece.

  In order to achieve the above object, the first feature of the present invention is characterized in that the temperature difference between the melting start temperature and the melting end temperature of the workpiece fixing agent applied to the matrix (11) is 5 ° C. or less.

  In this way, a workpiece fixing jig is configured by applying a workpiece fixing agent that can complete melting and solidification with a temperature change of 5 ° C. or less to the base. Thereby, while changing a temperature, a workpiece | work can be easily fixed to a workpiece | work fixing jig, and a workpiece | work can be easily peeled from a workpiece | work fixing jig. Since the adhesive is not used when fixing the workpiece in this way, the workpiece can be easily removed.

  The work fixing agent is melted and uniformly adhered to the surface of the work and solidified, whereby the work can be reliably fixed to the work fixing jig. For this reason, it can prevent that a workpiece | work moves from a base body in the case of a process, and can perform a highly accurate process with respect to a workpiece | work.

  In this case, the melting start temperature and the melting end temperature of the workpiece fixing agent can be set within a range of 18 ° C to 100 ° C.

  By providing such a temperature range, the workpiece can be fixed in accordance with the material of the workpiece to be processed. In order to realize such a melting start temperature or melting end temperature range, it is preferable to mix a powder material such as alumina, carbon, iron, SUS, SiC, Si, or silicon nitride into paraffin or polyethylene glycol.

  Further, the workpiece fixing agent can be composed of paraffin or polyethylene glycol as a main component.

  As described above, a workpiece fixing agent containing paraffin or polyethylene glycol as a main component is used. By increasing the purity of these paraffin or polyethylene glycol, the temperature difference between the melting start temperature and the melting end temperature can be reduced, and 5 ° C. or less can be realized as described above.

  Furthermore, as paraffin, the paraffin which combined the normal paraffin and non-normal paraffin shown in the following (1)-(5) can also be used. In addition,% of the composition ratio is all by weight. Further, the temperature difference between the melting start temperature and the melting end temperature of the paraffin is preferably 5 ° C. or less as described above, but is preferably a smaller temperature difference. Below, it shows about the thing with the small temperature difference.

(1) Paraffin composed of the total components of normal paraffin 88.999% and the balance non-normal paraffin “Composition of normal paraffin”
C18 normal paraffin: 0.08%
Normal paraffin with 19 carbon atoms: 0.41%
Normal paraffin having 20 carbon atoms: 1.76%
Normal paraffin having 21 carbon atoms: 5.61%
Normal paraffin with 22 carbon atoms: 10.66%
Normal paraffin having 23 carbon atoms: 14.76%
C24 normal paraffin: 14.50%
Normal paraffin having 25 carbon atoms: 12.42%
Normal paraffin having 26 carbon atoms: 9.08%
Normal paraffin having 27 carbon atoms: 6.58%
Normal paraffin having 28 carbon atoms: 4.04%
Normal paraffin with 29 carbon atoms: 2.88%
Normal paraffin with 30 carbon atoms: 2.09%
C 31 normal paraffin: 1.50%
C32 normal paraffin: 1.02%
C33 normal paraffin: 0.72%
C34 normal paraffin: 0.37%
C35 normal paraffin: 0.24%
Normal paraffin with 36 carbon atoms: 0.14%
Normal paraffin with 37 carbon atoms: 0.08%
Normal paraffin with 38 carbon atoms: 0.05%
As described above, the total component of normal paraffin is 89.99%, and the balance is non-normal paraffin.

  The average carbon number of the paraffin having the composition (1) is 24.74, and the standard deviation of the molecular weight distribution is 2.86. The smaller the standard deviation, the sharper the molecular weight distribution. In addition, the paraffin having the composition (1) has a maximum molecular weight of 534 and a minimum molecular weight of 254. Accordingly, the molecular weight distribution width is 280.

  The melting start temperature of the paraffin having the composition (1) is 50.4 ° C., and the melting end temperature is 51.7 ° C. Therefore, the temperature difference between the melting start temperature and the melting end temperature can be set to a slight value of 1.3 ° C.

(2) Paraffin consisting of 88.64% total components of normal paraffin and the remaining non-normal paraffin “Composition of normal paraffin”
C18 normal paraffin: 0.07%
Normal paraffin with 19 carbon atoms: 0.28%
Normal paraffin having 20 carbon atoms: 1.10%
Normal paraffin having 21 carbon atoms: 3.38%
Normal paraffin having 22 carbon atoms: 6.92%
Normal paraffin having 23 carbon atoms: 10.86%
Normal paraffin having 24 carbon atoms: 12.67%
Normal paraffin having 25 carbon atoms: 12.74%
Normal paraffin with 26 carbon atoms: 11.17%
Normal paraffin having 27 carbon atoms: 9.18%
Normal paraffin having 28 carbon atoms: 6.43%
Normal paraffin with 29 carbon atoms: 4.73%
Normal paraffin with 30 carbon atoms: 3.01%
Normal paraffin with 31 carbon atoms: 2.16%
Normal paraffin with 32 carbon atoms: 1.42%
C33 normal paraffin: 0.98%
C34 normal paraffin: 0.55%
C35 normal paraffin: 0.36%
Normal paraffin with 36 carbon atoms: 0.22%
Normal paraffin with 37 carbon atoms: 0.15%
Normal paraffin with 38 carbon atoms: 0.11%
Normal paraffin with 39 carbon atoms: 0.09%
Normal paraffin with 40 carbon atoms: 0.06%
As described above, the total of normal paraffin components is 88.64%, and the balance is non-normal paraffin.

  The average carbon number of the paraffin having the composition (2) is 25.61, the standard deviation of the molecular weight distribution is 3.05, the maximum molecular weight is 562, and the minimum molecular weight is 254. Accordingly, the molecular weight distribution width 366 is obtained. The melting start temperature of the paraffin having the composition (2) is 52.5 ° C., and the melting end temperature is 53.7 ° C. Therefore, the temperature difference between the melting start temperature and the melting end temperature can be set to a slight value of 1.2 ° C.

(3) Paraffin consisting of 89.57% total of normal paraffin components and the rest non-normal paraffin “Composition of normal paraffin”
Normal paraffin with 19 carbon atoms: 0.09%
Normal paraffin with 20 carbon atoms: 0.34%
Normal paraffin with 21 carbon atoms: 1.31%
C22 normal paraffin: 3.50%
Normal paraffin having 23 carbon atoms: 7.09%
Normal paraffin with 24 carbon atoms: 10.36%
Normal paraffin with 25 carbon atoms: 12.57%
Normal paraffin having 26 carbon atoms: 12.68%
Normal paraffin having 27 carbon atoms: 11.75%
Normal paraffin having 28 carbon atoms: 8.80%
Normal paraffin having 29 carbon atoms: 6.99%
Normal paraffin with 30 carbon atoms: 4.74%
C 31 normal paraffin: 3.41%
C32 normal paraffin: 2.42%
C33 normal paraffin: 1.70%
C34 normal paraffin: 0.93%
C35 normal paraffin: 0.54%
Normal paraffin with 36 carbon atoms: 0.25%
Normal paraffin with 37 carbon atoms: 0.10%
As described above, the total component of normal paraffin is 89.57%, and the balance is non-normal paraffin.

  The paraffin having the composition (3) has an average carbon number of 26.56, a standard deviation of the molecular weight distribution of 2.94, a maximum molecular weight of 520, and a minimum molecular weight of 268. Accordingly, the molecular weight distribution width is 252. The melting start temperature of the paraffin having the composition (3) is 54.6 ° C., and the melting end temperature is 55.6 ° C. Therefore, the temperature difference between the melting start temperature and the melting end temperature can be set to a slight value of 1.0 ° C.

(4) Paraffin composed of 71.11% total of normal paraffin components and the remaining non-normal paraffin “Composition of normal paraffin”
C23 normal paraffin: 0.08%
Normal paraffin having 24 carbon atoms: 0.16%
Normal paraffin with 25 carbon atoms: 0.39%
Normal paraffin with 26 carbon atoms: 0.87%
Normal paraffin with 27 carbons: 1.52%
C 28 normal paraffin: 1.99%
Normal paraffin with 29 carbon atoms: 2.68%
C30 normal paraffin: 3.14%
C 31 normal paraffin: 3.71%
C32 normal paraffin: 3.94%
Normal paraffin having 33 carbon atoms: 4.07%
C34 normal paraffin: 4.37%
C35 normal paraffin: 4.94%
C36 normal paraffin: 5.49%
Normal paraffin with 37 carbon atoms: 6.00%
Normal paraffin with 38 carbon atoms: 5.44%
Normal paraffin with 39 carbon atoms: 4.50%
C 40 normal paraffin: 3.71%
Normal paraffin having 41 carbon atoms: 3.01%
C42 normal paraffin: 2.53%
Normal paraffin having 43 carbon atoms: 1.94%
Normal paraffin having 44 carbon atoms: 1.55%
C45 normal paraffin: 1.06%
C 46 normal paraffin: 0.84%
47 normal carbon paraffin: 0.58%
48 normal carbon paraffin: 0.45%
Normal paraffin with 49 carbons: 0.33%
Normal paraffin with 50 carbon atoms: 0.32%
Normal paraffin with 51 carbon atoms: 0.26%
Normal paraffin with 52 carbons: 0.21%
Normal paraffin with 53 carbon atoms: 0.19%
Normal paraffin with 54 carbon atoms: 0.17%
Normal paraffin with 55 carbon atoms: 0.15%
Normal paraffin with 56 carbon atoms: 0.13%
Normal paraffin with 57 carbon atoms: 0.11%
Normal paraffin with 58 carbon atoms: 0.09%
Normal paraffin with 59 carbon atoms: 0.08%
C 60 normal paraffin: 0.06%
C 61 normal paraffin: 0.05%
As described above, the total component of normal paraffin is 71.11%, and the balance is non-normal paraffin.

  The paraffin having the composition (4) has an average carbon number of 36.34, a standard deviation of the molecular weight distribution of 5.70, a maximum molecular weight of 856, and a minimum molecular weight of 324. Accordingly, the molecular weight distribution width is 532. The melting start temperature of the paraffin of this composition (4) is 72.1 ° C., and the melting end temperature is 73.4 ° C. Therefore, the temperature difference between the melting start temperature and the melting end temperature can be set to a slight value of 1.3 ° C.

(5) Paraffin composed of 75.78% total of normal paraffin components and the rest non-normal paraffin “Composition of normal paraffin”
Normal paraffin with 29 carbon atoms: 0.08%
Normal paraffin with 30 carbon atoms: 0.23%
Normal paraffin with 31 carbon atoms: 0.69%
C32 normal paraffin: 1.36%
C33 normal paraffin: 1.77%
C 34 normal paraffin: 2.02%
Normal paraffin with 35 carbons: 2.21%
Normal paraffin with 36 carbon atoms: 2.41%
Normal paraffin with 37 carbon atoms: 3.02%
Normal paraffin with 38 carbon atoms: 3.58%
Normal paraffin with 39 carbon atoms: 3.52%
40 normal carbon paraffin: 3.94%
Normal paraffin having 41 carbon atoms: 4.13%
C42 normal paraffin: 5.15%
Normal paraffin having 43 carbon atoms: 4.95%
Normal paraffin having 44 carbon atoms: 5.54%
C45 normal paraffin: 4.55%
C 46 normal paraffin: 4.71%
47 normal carbon paraffin: 3.53%
48 normal carbon paraffin: 3.08%
Normal paraffin having 49 carbon atoms: 2.38%
C 50 normal paraffin: 2.16%
Normal paraffin with 51 carbon atoms: 1.68%
Normal paraffin with 52 carbons: 1.35%
Normal paraffin with 53 carbon atoms: 1.21%
54 normal carbon paraffin: 1.00%
Normal paraffin with 55 carbon atoms: 0.85%
Normal paraffin with 56 carbon atoms: 0.80%
Normal paraffin with 57 carbon atoms: 0.63%
C 58 normal paraffin: 0.59%
Normal paraffin with 59 carbon atoms: 0.49%
C 60 normal paraffin: 0.41%
Normal paraffin with 61 carbons: 0.34%
Normal paraffin with 62 carbons: 0.38%
Normal paraffin with 63 carbon atoms: 0.36%
64 normal carbon paraffin: 0.30%
C 65 normal paraffin: 0.23%
66 normal carbon paraffin: 0.15%
As described above, the total component of normal paraffin is 75.78%, and the balance is non-normal paraffin.

  The paraffin having the composition (5) has an average carbon number of 43.69, a standard deviation of molecular weight distribution of 6.81, a maximum molecular weight of 926, and a minimum molecular weight of 408. Therefore, the molecular weight distribution width is 518. The melting start temperature of the paraffin having the composition (5) is 86.2 ° C., and the melting end temperature is 87.9 ° C. Therefore, the temperature difference between the melting start temperature and the melting end temperature can be set to a slight value of 1.7 ° C.

  Moreover, the following can be used as polyethylene glycol. For example, polyethylene glycol having an average molecular weight of 1540 has a melting start temperature: 46 ° C. and a melting end temperature: 47.2 ° C. Therefore, the temperature difference between the melting start temperature and the melting end temperature can be set to a slight value of 1.2 ° C.

  Polyethylene glycol having an average molecular weight of 4000 has a maximum molecular weight of 5464, a minimum value of 1689, a number average molecular weight Mn: 2866, a weight average molecular weight Mw: 2935, a Z average molecular weight Mz: 3004, a molecular weight distribution dispersity (1 Mw / Mn: 1.0238, Mz / Mw: 1.0237. The polyethylene glycol having an average molecular weight of 4000 has a melting start temperature: 55.1 ° C. and a melting end temperature: 56.4 ° C. Therefore, the temperature difference between the melting start temperature and the melting end temperature can be set to a very small value of 1.3 ° C.

  Further, the base material can be a sheet-like material made of plastic, and the workpiece fixing jig can be configured by applying a workpiece fixing agent to one or both sides of the sheet.

  In this way, for example, a metal foil or a fragile ceramic sheet can be easily and firmly fixed and processed. Further, as described above, it can be easily removed.

  As the sheet-like base material, a sheet-like base material provided with a groove (11a) can be used, and a workpiece fixing agent is applied to the sheet-like base material so as to fill the groove. A sheet can be constructed.

  Thus, by providing a groove in the sheet-like base material and applying the work fixing agent so as to fill the groove, the contact area between the sheet-like base material and the work fixing agent can be improved, The degree of adhesion between the mother body and the workpiece fixing agent can be improved. That is, it can prevent that a workpiece | work fixing agent peels from a sheet-like base material.

  The groove of the sheet-shaped base is formed by roughening the surface of the base with a sandpaper (for example, No. 10 to 1000) or a cutting tool. The groove shape may be a linear shape, a curved shape, a dot shape, a wavy shape, a cross shape (lattice shape), a slanted cross shape (shaded shape), a three-direction overlapping shape, or the like.

  In addition, the work fixing jig can be constituted by an adhesive (13) or a hot melt material provided between the sheet-shaped base and the work fixing agent. Thus, by applying the adhesive or hot melt material to the sheet-like base material, the adhesive force between the adhesive or hot melt material and the sheet-like base material can be improved, and the work fixing agent is a sheet-like base material. It can be prevented from peeling off the mother body. Here, an acrylic pressure-sensitive adhesive is used as a material for the pressure-sensitive adhesive, and it may be crosslinked with heat, ultraviolet rays or the like. If there is no cross-linking, the coating material (work fixing agent) and the pressure-sensitive adhesive may be mixed and the intended function may not be obtained.

  As described above, in the case where an adhesive or a hot melt material is provided between the sheet-shaped base and the workpiece fixing agent, the temperature at which only the workpiece fixing agent melts when the workpiece is removed from the sheet-shaped base after processing the workpiece. The workpiece can be easily removed from the workpiece fixing jig simply by pouring hot water. Of course, the workpiece can be removed by a method in which the workpiece fixing jig is heated to a temperature at which only the workpiece fixing agent melts.

  In addition, when removing a workpiece | work from the workpiece | work fixing jig comprised including an adhesive and a hot-melt material, when a coating material mixes in a to-be-adhered agent, since a to-be-adhered material may be contaminated, it is unpreferable. Therefore, it is preferable to heat at a temperature at which only the workpiece fixing agent melts.

  Further, in the workpiece fixing jig, a workpiece fixing agent is provided on the adhesive or hot melt material on the sheet-like base material, and the other workpiece fixing agent having a melting start temperature lower than that of the workpiece fixing agent on the workpiece fixing agent. (14) may be provided. That is, for example, a work fixing agent on a pressure sensitive adhesive or hot melt material that melts at a high temperature, or another work fixing agent that melts at a low temperature is provided on a work fixing agent that melts at a high temperature. Can be laminated.

  This allows adhesives and hot melt materials to be coated with high-temperature type work fixing agents, preventing components that make up adhesives and hot melt materials from adhering to the workpiece or being mixed into the workpiece. can do.

  As the low-temperature type work fixing agent, the one having the above composition (2) can be used for those that melt at 53 ° C. In this case, the low-temperature type work fixing agent starts melting at 52.5 ° C. and ends at 53.7 ° C. Moreover, the thing of the said composition (3) can be used about the low temperature type work fixing agent which melt | dissolves at 55 degreeC. In this case, the low-temperature type work fixing agent starts melting at 54.6 ° C. and ends at 55.6 ° C.

  As the high-temperature type work fixing agent, those having the above composition (4) can be used for those that melt at 72 ° C. In this case, the high-temperature type work fixing agent starts melting at 72.1 ° C. and ends at 73.4 ° C. Moreover, the thing of the said composition (5) can be used about the high temperature type work fixing agent which melt | dissolves at 86 degreeC. In this case, the high-temperature type work fixing agent starts melting at 86.2 ° C. and ends at 87.9 ° C.

  In the second feature of the present invention, a workpiece (40) is placed on a workpiece fixing jig (10) coated with a workpiece fixing agent (12) that melts or solidifies at a temperature difference of 5 ° C. The workpiece fixing agent is melted by heating to the melting end temperature, and the workpiece fixing agent is solidified by lowering the temperature of the workpiece fixing jig to the melting start temperature. Then, the workpiece is processed, and after the workpiece is processed, the workpiece fixing jig is heated to the melting end temperature, and the workpiece is removed from the workpiece fixing jig.

  In this way, the workpiece is fixed with a workpiece fixing agent that can complete melting and solidification with a temperature change of 5 ° C. or less. Thereby, a workpiece | work can be easily fixed to a workpiece | work fixing jig only by changing the temperature of a workpiece | work fixing jig, ie, a workpiece | work fixing agent. In such a state, since the workpiece is firmly fixed to the workpiece fixing agent, the workpiece does not move from the base during processing. Therefore, the workpiece can be machined with high accuracy.

  In addition, since the workpiece fixing agent melts and solidifies according to the temperature, the workpiece can be fixed to the workpiece fixing jig, so that the workpiece composed of a fragile material can be easily fixed and processed. . Furthermore, when the workpiece is removed from the workpiece fixing jig, the workpiece fixing agent is melted and completely removed from the workpiece. Therefore, for example, the workpiece fixing agent can be easily peeled off from the workpiece simply by pouring hot water.

  As described above, the workpiece fixing jig described above can be used when processing a workpiece.

  In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, the same or equivalent parts are denoted by the same reference numerals in the drawings.

(First embodiment)
The workpiece fixing sheet shown in the present embodiment is for fixing a workpiece to be processed, such as ceramics, clay, glass, metal (aluminum, iron, copper, brass, etc.), resin, etc., with a fixing agent that melts and solidifies at a temperature. It is.

  FIG. 1 is a plan view of a workpiece fixing sheet as a workpiece fixing jig according to the first embodiment of the present invention. As shown in this figure, the workpiece fixing sheet 10 includes a PET sheet 11 as a base and a workpiece fixing agent 12 applied to the PET sheet 11. In this embodiment, the workpiece fixing agent 12 is applied to one side of the PET sheet 11, but the workpiece fixing agent 12 may be applied to both sides of the PET sheet 11.

  The PET sheet 11 is a sheet-like material formed of a resin such as polyester. As shown in FIG. 1, in this embodiment, the PET sheet 11 has a rectangular shape, and the length in the major axis direction is, for example, 15 cm and the width is, for example, 10 cm. The thickness of the PET sheet 11 is 100 μm, for example. The PET sheet 11 is preferably one that can withstand the temperature at which the workpiece fixing agent 12 is melted.

  Moreover, the workpiece | work fixing agent 12 fixes a workpiece | work, and is comprised by what has a paraffin as a main component. And as FIG. 1 shows, the workpiece | work fixing agent 12 is the state apply | coated uniformly on the said PET sheet | seat 11 and solidified. The thickness of the workpiece fixing agent 12 can be designed freely, for example, several μm to 3 mm. In addition, what has paraffin as a main component includes what is comprised only with paraffin.

  For example, when cutting raw PZT (piezo) as a workpiece, the content of paraffin is, for example, 40 to 100% by weight, and the content of powder of alumina (particle diameter: nanoparticle to several mm) is, for example, 0 to 60% by weight. A workpiece fixing agent 12 is suitable.

  In other cases, when the conductive sheet is cut, the content of paraffin is 40 to 99% by weight, and the content of carbon powder (carbon material with good electrical conductivity, particle diameter: nanoparticles to several mm) is 1. ˜60% by weight of work fixative 12 is suitable.

  In the present embodiment, the work fixing agent 12 has a melting start temperature (melting point) of 53 ° C. and a melting end temperature of 55 ° C. to 58 ° C. That is, the workpiece fixing agent 12 has a temperature range of 2 ° C. to 5 ° C. for melting and solidifying. For this reason, the workpiece fixing agent 12 can be easily melted and solidified only by changing the temperature at which the workpiece fixing agent 12 is heated by only 2 to 5 ° C. It is preferable to melt and solidify the workpiece fixing agent 12 with a slight temperature difference. For this reason, the temperature difference between the melting start temperature and the melting end temperature is preferably 2 ° C.

  Therefore, the workpiece fixing agent 12 is in a state of solidifying and adhering to the PET sheet 11 at room temperature (for example, 27 ° C.), and when the workpiece fixing sheet 10 is heated above the melting point of the workpiece fixing agent 12, When the temperature rises from 2 ° C to 5 ° C only from the temperature, it melts and solidifies when the temperature falls below the melting point.

  Although it demonstrates in detail in the method of processing a workpiece | work, after fixing a workpiece | work to the workpiece fixing sheet 10 and processing in this embodiment, hot water (about 100 degreeC) is poured into the workpiece fixing sheet 10 and a workpiece fixing agent. 12 is melted to remove the workpiece from the workpiece fixing sheet 10. At room temperature (27 ° C.), the workpiece fixing agent 12 is solidified on the PET sheet 11 so that it can be carried and stored. For this reason, melting | fusing point of the workpiece | work fixing agent 12 in this embodiment is set to 53 degreeC higher than room temperature and lower than the temperature of hot water.

  Also, add an additive that dissolves the paraffin material completely in hot water (one that can dissolve paraffin in hot water and keep it dissolved in the liquid even when the temperature is low). In this case, it is possible to avoid the current situation that the workpiece fixing agent 12 is solidified, floats on the water, and forms a film on the water surface.

  The temperature difference between the melting start temperature and the melting end temperature can be set according to the molecular weight distribution (in other words, purity) of paraffin contained in the workpiece fixing agent 12. Paraffin materials are described by the molecular formula of CnHm (n and m are arbitrary integers). In a material that melts at a low temperature, the number of C (that is, n) is small, and as the number of C increases, the melting temperature increases. Further, when a large number and a small number of C are mixed, the melting temperature can be widened, and as a result, the melting temperature can be widened. As for the purity of the paraffin material that melts at a low temperature, for example, when it is desired to melt at a temperature difference of 2 ° C. near room temperature, a material having a molecular weight distribution range of about 50 to 3000 is used. Moreover, in the purity of the paraffin material which melt | dissolves at 50 degreeC vicinity, a thing with a molecular weight distribution width of 100-10000 is used. Furthermore, in the purity of the paraffin material that melts at around 90 ° C., a molecular weight distribution width of 500 to 100,000 is preferable.

  The method of narrowing the molecular weight distribution range is by refining the material. When the purification is performed with high accuracy, the molecular weight distribution width is reduced. However, if the molecular weight distribution width is reduced, the amount of material obtained after purification becomes small, resulting in poor yield and high cost.

  When the molecular weight distribution width is narrow, the purity becomes high and the melting temperature width becomes small, so that melting and solidification can occur in a narrow temperature range.

  Moreover, melting | fusing point of the workpiece | work fixing agent 12 can be set between 18-100 degreeC, for example by mixing powder materials, such as an alumina, carbon, iron, SUS, SiC, Si, and silicon nitride, in paraffin. Thus, the material added to paraffin can be set according to the material of the workpiece to be fixed.

  For example, when fixing a PZT raw sheet, as described above, the content of paraffin is 40 to 100% by weight, and the content of powder of alumina (particle diameter: nanoparticle to several mm) is 0 to 60% by weight. Is suitable.

  When the hardness is required, it is suitable that the content of paraffin is 40 to 100% by weight and the content of powder of SiC (particle diameter: nanoparticle to several mm) is 0 to 60% by weight.

  When fixing a metal material, the content of paraffin is 0 to 100% by weight, and the content of powder of SUS (particle diameter: nanoparticle to several mm) is 0 to 60% by weight.

  In the case of fixing the glass, those having a paraffin content of 40 to 100% by weight and a glass (particle diameter: nanoparticle to several mm) powder content of 0 to 60% by weight are suitable.

  When fixing the ceramic fired material, it is suitable that the content of paraffin is 40 to 100% by weight and the content of powder of the same material (particle diameter: nanoparticle to several mm) as the fixing material is 0 to 60% by weight.

  When fixing paper or the like, a paraffin content of 100% by weight is suitable.

  As the workpiece fixing agent 12 as described above, a catamel chuck (trade name, registered trademark, Thermofix, US registered trademark) can be used. The above is the configuration of the workpiece fixing sheet 10 according to the present embodiment.

  Next, a method for manufacturing the workpiece fixing sheet 10 will be described with reference to the drawings. FIG. 2 is a diagram showing how the workpiece fixing sheet 10 is manufactured.

  First, the coating device 20 that manufactures the workpiece fixing sheet 10 will be described. As shown in FIG. 2, the coating apparatus 20 includes a feeding roll 21 and a take-up roll 22, a roll driving apparatus (not shown) that drives the rolls 21 and 22, and a work fixing agent 12 melted in the PET sheet 11. A nozzle 23 to be applied, a nozzle driving device (not shown) for driving the nozzle 23, and a bank member 24 for controlling the thickness of the workpiece fixing agent 12 while blocking the melted workpiece fixing agent 12 ejected from the nozzle 23. And a height adjusting device (not shown) that adjusts the height of the bank member 24.

  Then, a PET sheet 11 having a thickness of, for example, 100 μm is prepared, and a PET sheet 11 wound around a feeding roll 21 is prepared. The feeding roll 21 is installed in the coating apparatus 20 and the PET sheet 11 is wound around the winding roll 22 as shown in FIG. Further, since the gap between the surface of the PET sheet 11 and the tip of the bank member 24 becomes the thickness of the workpiece fixing agent 12, the height of the bank member 24 is adjusted to be a constant height from the PET sheet 11. By adjusting the height of the bank member 24, the workpiece fixing agent 12 having a thickness of several μm to 3 mm can be formed.

  Then, the surface temperature of the PET sheet 11 on which the melted workpiece fixing agent 12 is applied is heated to the melting point or higher. For example, the feeding roll 21 may be heated to a temperature higher than the melting point of the workpiece fixing agent 12 (53 ° C. or higher in this embodiment). Further, in order to solidify the melted work fixing agent 12 and take up the PET sheet 11 with the take-up roll 22, the take-up roll 22 side is set to be lower than the melting point of the work fixing agent 12. It is preferable.

  Thereafter, when each of the rolls 21 and 22 is driven, the PET sheet 11 is fed from the feed roll 21 and is taken up by the take-up roll 22. In such a state, the workpiece fixing agent 12 is heated to the melting point or higher, and the workpiece fixing agent 12 is sprayed onto the PET sheet 11 from the nozzle 23. The melted workpiece fixing agent 12 sprayed onto the PET sheet 11 moves together with the PET sheet 11 that is fed out. At this time, since the workpiece fixing agent 12 is blocked by the bank member 24, the workpiece fixing agent 12 moves together with the PET sheet 11 at a thickness between the PET sheet 11 and the tip of the bank member 24. In this way, the workpiece fixing agent 12 is applied on the PET sheet 11.

  Then, the melted workpiece fixing agent 12 is cooled to a melting point or lower before being wound around the winding roll 22 on the PET sheet 11 and solidified, and is wound around the winding roll 22 together with the PET sheet 11. As described above, since the work fixing agent 12 sharply changes in the state of melting and solidification in a range of only 2 ° C. to 5 ° C., an apparatus for cooling and solidifying the molten work fixing agent 12 is not required. In the process of winding the PET sheet 11, it becomes below the melting point and solidifies. That is, it is only necessary to heat only the side for injecting the workpiece fixing agent 12 (only the nozzle 23 side) to the melting point of the workpiece fixing agent 12 or higher. In addition, since the solidified workpiece fixing agent 12 is firmly fixed to the PET sheet 11, even if the coagulated workpiece fixing agent 12 is taken up together with the PET sheet 11 by the take-up roll 22, it does not peel off from the PET sheet 11. Furthermore, since the workpiece fixing agent 12 is not adhesive, the workpiece fixing agent 12 does not stick to the PET sheet 11 even when the workpiece fixing sheet 10 is wound around the winding roll 22.

  Subsequently, the workpiece fixing sheet 10 shown in FIG. 1 is completed by cutting the PET sheet 11 wound around the winding roll 22 at regular intervals.

  Next, a method for fixing a workpiece and a processing method using the workpiece fixing sheet 10 manufactured as described above will be described with reference to the drawings. FIG. 3 is a diagram illustrating a state in which the workpiece is fixed to the workpiece fixing sheet 10 and the workpiece is processed.

  First, the workpiece fixing sheet 10 is set on the base 30, and the workpiece 40 is placed on the workpiece fixing sheet 10. Examples of the workpiece 40 that is a workpiece include ceramics, clay, glass, metal (aluminum, iron, copper, brass, etc.), resin, and the like. Further, the shape of the workpiece 40 may be a plate shape, a sheet shape, a three-dimensional irregular shape, or the like that is to be processed and can be installed on the workpiece fixing sheet 10. The sheet-like material includes a ceramic raw sheet, a glass raw sheet, a piezo raw sheet, a capacitor raw sheet, and the like.

  Then, the base 30 is heated with a heater or the like (not shown). In the present embodiment, the heating temperature of the base 30 is preferably 55 ° C. to 58 ° C., which is the melting end temperature of the workpiece fixing agent 12. When the workpiece fixing sheet 10 is heated through the base 30 in this manner, the workpiece fixing agent 12 is melted, so that the molten workpiece fixing agent 12 is in close contact with the surface of the workpiece 40.

Thereafter, when the temperature of the base 30 is lowered below the melting point, the workpiece fixing agent 12 is solidified and the workpiece 40 is fixed on the workpiece fixing sheet 10. Bonding strength of the work fixing agent 12, if the thickness of the workpiece fixing agent 12, for example, 5 [mu] ^m, since it is ^{7kgf / cm 2 ~20kgf / cm 2} , it is possible to firmly fix the workpiece 40.

  Further, even a three-dimensional irregular shape having irregularities on the surface of the workpiece 40 can be firmly fixed. That is, when the workpiece fixing agent 12 is solid, only the convex portion of the irregularities of the workpiece 40 is in contact with the workpiece fixing agent 12, but by melting the workpiece fixing agent 12, the workpiece 40 is melted. It can also be soaked into the concave part. Thereby, when the workpiece fixing agent 12 is solidified, the workpiece fixing agent 12 can be brought into universal contact with the surface of the workpiece 40 to be fixed, and a strong fixing force can be obtained. That is, the workpiece 40 can be firmly fixed regardless of the surface shape of the workpiece 40.

  At this time, since the workpiece fixing agent 12 is completely solidified, the workpiece 40 can be prevented from moving with respect to the workpiece fixing sheet 10, and the workpiece 40 can be reliably fixed. Therefore, even if the workpiece 40 is cut at a fine interval (for example, an interval of 0.1 mm or the like), the workpiece 40 does not move.

  After fixing the workpiece 40 to the workpiece fixing sheet 10 as described above, the workpiece 40 is processed. In the present embodiment, the workpiece 40 is cut using a diamond grindstone 50 having a thickness of 0.3 mm that rotates at a rotational speed of 2700 rpm. At this time, the workpiece fixing agent 12 is also cut together with the workpiece 40. In this embodiment, when the workpiece 40 is cut with the diamond grindstone 50, only the surface is cut without completely cutting the PET sheet 11, but the PET sheet 11 is also cut completely with the workpiece 40. It doesn't matter.

  In addition to the above-described cutting processing, examples of processing on the workpiece 40 include grinding processing, polishing processing, drilling with a drill, and cutting with a knife.

  After processing the workpiece 40, the workpiece 40 is removed from the workpiece fixing sheet 10. Specifically, since the workpiece fixing agent 12 is melted and solidified depending on the temperature, the workpiece 40 is poured by pouring hot water having a temperature higher than the melting end temperature (55 ° C. to 58 ° C.) of the workpiece fixing agent 12 into the workpiece 40. The workpiece fixing agent 12 adhered to the substrate is peeled off. In addition, you may immerse the workpiece | work 40 in hot water. In this case, if the surfactant is introduced into the hot water, the workpiece fixing agent 12 can be dissolved in the aqueous solution.

  Thus, when peeling the workpiece | work fixing agent 12, since the specific gravity of the workpiece | work fixing agent 12 is smaller than water (for example, 0.8-0.9), the workpiece | work fixing agent 12 floats on water (hot water). For this reason, the workpiece | work 40 can be wash | cleaned easily. As a method for further promoting the cleaning effect, there are a method of introducing a cleaning agent as described above, in addition to ultrasonic cleaning and ultrafine bubble cleaning.

  As described above, the machining of the workpiece 40 is completed. And the workpiece | work fixing agent 12 can be utilized any number of times by collect | recovering and recycling or reusing the workpiece | work fixing agent 12 removed from the workpiece | work 40. FIG. 3, the PET sheet 11 cannot be reused because the surface of the PET sheet 11 is scraped by the diamond grindstone 50, but the work fixing agent 12 attached to the work 40 and the PET sheet 11 is not possible. Can be recycled and reused by melting and recovering. Further, by forming the workpiece fixing agent 12 thick, the workpiece fixing agent 12 is cut together with the workpiece 40, and the PET sheet 11 is not cut, so that the PET sheet 11 can be reused. Absent.

  As described above, in the present embodiment, the workpiece fixing sheet as a workpiece fixing jig is applied to the base PET sheet 11 with the workpiece fixing agent 12 that can complete melting and solidification with a temperature change of 5 ° C. or less. 10 is configured. Thereby, the workpiece | work 40 can be easily fixed to the workpiece | work fixing sheet 10 only by changing the temperature of the workpiece | work fixing sheet 10 at least 5 degreeC. Similarly, the workpiece 40 can be easily peeled from the workpiece fixing sheet 10 by changing the temperature of the workpiece fixing sheet 10 by at least 5 ° C. In the case of peeling in this way, the workpiece fixing agent 12 can be easily removed from the workpiece 40 by simply pouring hot water as described above. In addition, paraffin can be disperse | distributed in a liquid if a dispersing agent is put in hot water. If a dispersant is not added, care must be taken because when the liquid falls below the melting temperature, it floats on the liquid surface, solidifies, and stretches the film.

  Conventionally, for example, an object to be processed with an adhesive applied to a heat release sheet or a PET sheet is fixed. However, since the adhesive does not completely solidify, for example, when a workpiece is processed with a rotating grindstone or the like. When the edge of the grindstone hits the workpiece, the workpiece may move. In particular, the smaller the cutting width of the workpiece, the larger the workpiece moves when the edge of the grindstone hits the workpiece. Thereby, there was a possibility that the workpiece could not be processed with high accuracy. However, the workpiece 40 can be firmly fixed to the workpiece fixing sheet 10 by the workpiece fixing agent 12 being melted and closely adhered to the surface of the workpiece 40 and solidified as in this embodiment. Thereby, it can prevent that the workpiece | work 40 moves from the workpiece | work fixed sheet | seat 10 in the case of a process, and can process a workpiece | work 40 with high precision.

  Furthermore, as described above, in this embodiment, the work 40 is not fixed with an adhesive as in the prior art, but the work is repeatedly fixed and melted and solidified with a slight temperature difference (2 ° C. to 5 ° C.). Agent 12 is used. For this reason, the material of the sheet | seat (PET sheet 11 in this embodiment) used as the base | substrate which apply | coated the adhesive like an adhesive tape is not limited.

(Second Embodiment)
In the present embodiment, only the parts different from the first embodiment will be described. The present embodiment is characterized in that the application pattern of the workpiece fixing agent 12 applied to the PET sheet 11 in the workpiece fixing sheet 10 has a stripe shape.

  FIG. 4 is a plan view of a workpiece fixing sheet according to the second embodiment of the present invention. As shown in this figure, in the workpiece fixing sheet 10 in this embodiment, the workpiece fixing agent 11 is applied in a stripe shape on the PET sheet 11 and solidified. The stripe width of the workpiece fixing agent 11 can be freely designed. For example, the workpiece fixing agent 11 may be applied in the vertical direction or the horizontal direction with a width of 0.05 mm to several tens mm and an interval of 0.1 mm to several mm. preferable.

  FIG. 5 is a diagram showing how the workpiece fixing sheet 10 shown in FIG. 4 is manufactured. In the present embodiment, the height adjusting device (not shown) that adjusts the height of the bank member 24 in the coating apparatus 20 drives the bank member 24, thereby bringing the tip of the bank member 24 into contact with the PET sheet 11 at a constant cycle, for example. Or move away. Thereby, as shown in FIG. 5, a portion on which the workpiece fixing agent 12 is applied and a portion on which the workpiece fixing agent 12 is not applied are provided on the PET sheet 11. Therefore, the striped workpiece fixing agent 12 shown in FIG. 4 is formed.

  By forming the strip-shaped workpiece fixing agent 12 in the PET sheet 11 as described above, the workpiece fixing agent 12 becomes PET due to stress applied to the workpiece fixing agent 12 when the PET sheet 11 is bent or wound. The peeling from the sheet 11 can be prevented. Thus, the layout of the workpiece fixing agent 12 can be freely changed.

(Third embodiment)
In the present embodiment, only different portions from the above embodiments will be described. The present embodiment is characterized in that grooves are formed in the PET sheet 11 constituting the workpiece fixing sheet 10.

  FIG. 6 is a plan view of the PET sheet 11 according to the third embodiment. FIG. 7 is a cross-sectional view taken along the line AA in FIG.

  In the PET sheet 11 shown in FIG. 6A, lattice-shaped grooves 11a are formed by forming scratches in the longitudinal direction of the PET sheet 11 and in a direction perpendicular to the longitudinal direction. In the present embodiment, the groove 11a is formed on one surface side of the PET sheet 11 as shown in FIG. 7, and the depth of the groove 11a is, for example, 1 μm to 500 μm.

  Such a groove | channel 11a is formed by roughening the one surface side of PET sheet 11 with sandpaper (for example, No. 10-1000), for example. That is, the lattice-like groove 11a shown in FIG. 6A is formed by rubbing one side of the PET sheet 11 with the sandpaper in the longitudinal direction and the direction perpendicular to the longitudinal direction.

  Further, in the PET sheet 11 shown in FIG. 6B, a wavy groove 11 a is formed in the longitudinal direction of the PET sheet 11. Further, in the PET sheet 11 shown in FIG. 6C, grooves 11 a are formed in diagonal lines in a direction of, for example, 45 ° with respect to the longitudinal direction of the PET sheet 11.

  Each groove 11a of each PET sheet 11 shown in FIGS. 6 (b) and 6 (c) is formed by rubbing the surface of the PET sheet 11 with a sandpaper in a wavy or oblique manner, similarly to the method using the sandpaper. Form.

  Specifically, the groove 11 a is formed on one surface side of the PET sheet 11 by winding sandpaper around a roll, rotating the roll, and rubbing the roll on the surface of the PET sheet 11.

  That is, by rotating a roll around which sandpaper is wound and rubbing in the longitudinal direction of the PET sheet 11 and the direction perpendicular to the longitudinal direction, the lattice-shaped grooves 11a shown in FIG. can do.

  Further, by driving the roll around which the sandpaper is wound in the rotation axis direction of the roll and rotating the roll so that the sandpaper is rubbed against the PET sheet 11, the wavy groove 11a shown in FIG. Can be formed.

  Further, the roll is rotated so that the direction of the rotation axis of the roll around which the sandpaper is wound and the longitudinal direction of the PET sheet 11 have an acute angle or an obtuse angle, and the sandpaper is rubbed against the PET sheet 11. In FIG. 6C, the oblique groove 11a shown in FIG. 6C can be formed.

  In addition, you may make it roughen the PET sheet | seat 11 directly with sandpaper, without winding sandpaper around a roll.

  After forming the grooves 11a in the PET sheet 11 in this manner, the melted work fixing agent 12 is applied onto the PET sheet 11 by the method shown in FIGS. The workpiece fixing sheet 10 is formed.

  As described above, by providing the grooves 11 a in the PET sheet 11, the surface area on one side of the PET sheet 11 is ensured. Then, by applying the workpiece fixing agent 12 to the PET sheet 11 so as to fill the groove 11a, a contact area between the one surface side of the PET sheet 11 and the workpiece fixing agent 12 can be secured, and the PET sheet 11 and the workpiece fixing agent 12 are secured. Improve adhesion with Thereby, the fixing force of the PET sheet 11 and the workpiece fixing agent 12 can be improved, and the workpiece fixing agent 12 can be prevented from being peeled off from the PET sheet 11.

(Fourth embodiment)
In the present embodiment, only different portions from the above embodiments will be described. The present embodiment is characterized in that an adhesive 13 is provided between the PET sheet 11 and the workpiece fixing agent 12 in order to improve the adhesion between the PET sheet 11 and the workpiece fixing agent 12.

  FIGS. 8A and 8B are views showing the workpiece fixing sheet 10 according to the fourth embodiment, in which FIG. 8A is a plan view of the workpiece fixing sheet 10 and FIG. 8B is a sectional view taken along line BB in FIG.

  As shown in FIG. 8B, the workpiece fixing sheet 10 according to the present embodiment includes a PET sheet 11, an adhesive 13 applied on the PET sheet 11, and a workpiece fixing applied on the adhesive 13. And an agent 12.

  The pressure-sensitive adhesive 13 is for firmly fixing the workpiece fixing agent 12 to the PET sheet 11. In the present embodiment, an adhesive such as an acrylic glue, a cellulose glue, or an epoxy glue is used as the adhesive 13, and the PET sheet 11 is uniformly applied to a thickness of, for example, 1 μm to 200 μm.

  And the said adhesive 13 is apply | coated to the one surface side of PET sheet 11 which is not shown in figure as shown to Fig.8 (a), For example, the workpiece fixing agent 12 whose thickness is 1 micrometer-1 mm on this adhesive 13 is shown. Is applied. Here, in the case of the acrylic pressure-sensitive adhesive 13, it is preferable to crosslink with heat, ultraviolet rays or the like. If there is no crosslinking, the coating material (work fixing agent 13) and the pressure-sensitive adhesive 13 are mixed, and the intended function cannot be obtained. By crosslinking, the coating material (work fixing agent 13) can be firmly fixed and the intended function can be exhibited.

  In the workpiece fixing sheet 10 having such a configuration, the peeling strength of T peeling was examined. T peeling means that the workpiece fixing sheet 10 of the workpiece fixing sheet 10 is heated and melted, and the workpiece fixing sheet 10 is attached to a fixing base, and then the workpiece fixing sheet 10 is peeled off from the end portion. The peel strength is a force necessary for peeling the workpiece fixing sheet 10 from the fixing base.

  The strength of such T peeling was examined for the workpiece fixing sheet 10 not provided with the adhesive 13 and the workpiece fixing sheet 10 provided with the adhesive 13. As a result, the peeling strength of T peeling of the workpiece fixing sheet 10 not provided with the adhesive 13 was 0.1 N, whereas the peeling strength of T peeling of the workpiece fixing sheet 10 provided with the adhesive 13 was 0. 2N-10N. Also from such an experimental result, it turns out that the adhesive 13 has made the PET sheet 11 and the workpiece | work fixing agent 12 adhere firmly.

  As shown in this embodiment, when using a workpiece fixing sheet 10 in which an adhesive 13 is provided between a PET sheet 11 and a workpiece fixing agent 12, when fixing the workpiece to the workpiece fixing agent 12, the workpiece fixing agent 12 is used. When the workpiece is peeled from the workpiece fixing agent 12 by heating at a temperature at which only the workpiece fixing agent 12 is melted, the workpiece is removed from the workpiece fixing sheet 10 by pouring hot water at a temperature at which only the workpiece fixing agent 12 is melted into the workpiece and the workpiece fixing agent 12. Peel off. In addition, a workpiece | work can be removed also by heating to the temperature which only the workpiece | work fixing agent 12 fuse | melts.

  As described above, the pressure-sensitive adhesive 13 is applied to one side of the PET sheet 11, and the workpiece fixing agent 12 is applied on the pressure-sensitive adhesive 13. Thereby, the adhesive force of the PET sheet 11 and the adhesive 13 can be improved, and it can prevent that the workpiece | work fixing agent 12 peels from the PET sheet 11. FIG.

(Fifth embodiment)
In the present embodiment, only parts different from the fourth embodiment will be described. The present embodiment is characterized in that a hot melt material is used instead of the pressure-sensitive adhesive 13 used in the fourth embodiment.

  That is, a hot melt material is employed instead of the pressure-sensitive adhesive 13 shown in FIGS. This hot melt material has the same function as the pressure-sensitive adhesive 13. In this embodiment, rosin or epoxy resin is used as the hot melt material.

  The hot melt material is heated and melted, and then applied to the PET sheet 11 and hardens when cooled. Thereafter, the workpiece fixing agent 12 is applied on the hot melt material. In this way, the workpiece fixing sheet 10 similar to that shown in FIGS. 8A and 8B is formed.

  Also in this embodiment, when the peel strength of T peel similar to that of the fourth embodiment was examined, it was possible to obtain the same peel strength as that of the fourth embodiment.

  Also in this embodiment, when fixing the workpiece to the workpiece fixing agent 12, the workpiece fixing agent 12 is heated at a temperature at which only the workpiece fixing agent 12 melts, and when the workpiece is peeled from the workpiece fixing agent 12, only the workpiece fixing agent 12 is melted. The workpiece is peeled from the workpiece fixing sheet 10 by pouring hot water to the workpiece and the workpiece fixing agent 12.

  As described above, a hot melt material can be used as the work fixing agent 12 that is firmly fixed to the PET sheet 11.

(Sixth embodiment)
In the present embodiment, only parts different from the fourth and fifth embodiments will be described. In this embodiment, the workpiece fixing sheet 10 is characterized in that a plurality of workpiece fixing agents 12 having different melting start temperatures are stacked on the PET sheet 11. That is, the workpiece fixing agent 12 is provided on the pressure-sensitive adhesive 13 or hot melt material on the PET sheet 10, and another workpiece fixing agent is provided on the workpiece fixing agent 12. Hereinafter, an example in which the pressure-sensitive adhesive 13 is provided on the PET sheet 11 will be described.

  FIG. 10 shows a cross-sectional view of the workpiece fixing sheet 10 according to the present embodiment, and is a view corresponding to the BB cross section of FIG. As shown in this figure, an acrylic adhesive 13 is applied on a PET sheet 11, and a work fixing agent 12 that melts at a high temperature type, for example, 72 ° C. or 86 ° C., is applied on the adhesive 13. . Furthermore, a workpiece fixing agent 14 that melts at 53 ° C. or 55 ° C., for example, is applied on the workpiece fixing agent 12.

  In this case, it is desirable that the pressure-sensitive adhesive 13 does not change due to heat when the work fixing agent 12 that melts at 72 ° C. or 86 ° C. is applied onto the pressure-sensitive adhesive 13.

  When the low temperature type work fixing agent 14 is applied, the underlying high temperature type work fixing agent 12 does not deteriorate or dissolve. If the difference in melting start temperature between the two fixing agents 12 and 14 is 15 ° C. or more, the high-temperature workpiece fixing agent 12 does not dissolve when the low-temperature workpiece fixing agent 14 is applied, and the low-temperature workpiece fixing agent 14 is neatly applied. Can do.

  The properties of the fixing agents 12 and 14 are as follows. For the low-temperature workpiece fixing agent 14 that melts at 53 ° C., when using the composition (2) shown in the means for solving the problem, the low-temperature workpiece fixing agent 14 melts at 52.5 ° C. And melting ends at 53.7 ° C. Moreover, about the low-temperature workpiece | work fixing agent 14 which melt | dissolves at 55 degreeC, when the thing of the composition (3) shown in the column of the means for solving a subject is used, melting | fusing starts at 54.6 degreeC, 55.6 Melting is complete at ° C.

  Further, in the high-temperature work fixing agent 12, when melting at 72 ° C., when using the composition (4) shown in the means for solving the problem, melting starts at 72.1 ° C., Melting is complete at 73.4 ° C. Moreover, about the high temperature workpiece | work fixing agent 12 melt | dissolved at 86 degreeC, when the thing of the composition (5) shown in the column of the means for solving a problem is used, melting | fusing starts at 86.2 degreeC, and 87.9. Melting is complete at ° C.

  The advantages of combining the high-temperature and low-temperature type work fixing agents 12 and 14 as described above will be described.

  As shown in this embodiment, assuming that the workpiece is bonded with the workpiece fixing agents 12 and 14 and the workpiece is processed, when the workpiece is removed from the PET sheet 11 after the workpiece is processed, the workpiece fixing agent 12, Although the PET sheet 11 can be removed by pouring hot water at a temperature at which only 14 melts to melt the workpiece fixing agents 12 and 14, depending on the situation, the acrylic resin constituting the adhesive 13 may adhere to the workpiece. , May be mixed in the workpiece.

  On the other hand, in this embodiment, since the workpiece fixing agent 14 on the side in close contact with the workpiece is a low temperature type and the workpiece fixing agent 12 on the side in close contact with the adhesive 13 is a high temperature type, this low temperature type workpiece fixing agent. When hot water having a temperature at which 14 is melted but the high temperature type workpiece fixing agent 12 is not melted, the low temperature type workpiece fixing agent 14 is melted, and the high temperature type workpiece fixing agent 14 is not melted.

  Therefore, since the adhesive 13 is covered with the high-temperature type work fixing agent 14, the components constituting the adhesive 13, in this embodiment, the acrylic resin component adheres to or mixes with the workpiece. Can be prevented. In particular, in the case of Si semiconductors and various sensors that extremely dislike impurities as workpieces, it is preferable to use workpiece fixing jigs using stacked workpiece fixing agents 12 and 14 as in this embodiment.

(Other embodiments)
Although the workpiece fixing agent 12 was applied to the PET sheet 11 as a mother body, cloth, paper, hemp, non-woven fabric, metal foil, metal sheet, etc. were used as jigs for fixing the workpiece 40 as the mother body to which the workpiece fixing agent 12 was applied. Can be used.

  The size of the workpiece fixing sheet 10 is an example, and may be any size. That is, after the workpiece fixing agent 12 is applied to the PET sheet 11, the PET sheet 11 may be cut so as to have the size of the PET sheet 11 corresponding to the size of the workpiece to be processed. Further, for example, the workpiece fixing sheet 10 may be in a roll shape without being cut.

  The workpiece fixing agent 12 is composed of paraffin as a main component, but may be composed of polyethylene glycol as a main component.

  In the workpiece fixing sheet 10, the workpiece fixing agent 12 is applied to only one side of the PET sheet 11, but the workpiece fixing agent 12 may be applied to both sides of the PET sheet 11.

  In the third embodiment, the description has been given of the PET sheet 11 provided with the lattice-like, wavy, and oblique grooves 11a. However, the form of the grooves 11a is not limited thereto. For example, the groove 11a may have a shape such as a straight shape, a curved shape, a dot shape, a wavy shape, a cross shape (for example, a lattice shape), a slanted cross shape (for example, a slanted shape), and a three-direction overlapping shape. Moreover, when forming the groove | channel 11a, you may use a cutting tool etc. not only in the sandpaper shown by the said embodiment.

  You may make it apply | coat the adhesive 13 and hot-melt material which were shown by 4th, 5th embodiment to PET sheet 11 in which the groove | channel 11a shown by the said 3rd Embodiment was formed. That is, the pressure-sensitive adhesive 13 and the hot melt material can be applied so as to fill the groove 11a in the PET sheet 11.

  When the workpiece fixing agent 12 is applied to the PET sheet 11, the molten workpiece fixing agent 12 is sprayed from the nozzle 23, but the workpiece fixing sheet 10 is manufactured by a method of printing the workpiece fixing agent 12 on the PET sheet 11. It doesn't matter if you do. In such a case, as shown in FIG. 9, it is possible to apply a dot-shaped work fixing agent 12 on the PET sheet 11. The size and shape of the dots can be designed freely.

  The application pattern of the workpiece fixing agent 12 is not limited to the dots and stripes as described above, and may be, for example, a mesh pattern, a diagonal pattern, a wave pattern, or a combination thereof. Further, the thickness of the workpiece fixing agent 12 may not be uniform on the PET sheet 11.

  In each of the above-described embodiments, the work sheet fixing sheet 10 is formed by winding the PET sheet 11 around the rolls 21 and 22. However, when the work fixing sheet 10 is manufactured, the rolls 21 and 22 may not be used. For example, the workpiece fixing sheet 10 can be formed by applying (or printing) a melted workpiece fixing agent 12 to the surface of the PET sheet 11 cut into a certain size. When the base is not in the form of a sheet like the PET sheet 11, a work fixing jig for fixing the work can be formed by a method of spraying the molten work fixing agent 12 directly onto the base.

It is a top view of the workpiece | work fixing sheet which concerns on 1st Embodiment of this invention. It is the figure which showed a mode that the workpiece fixing sheet shown by FIG. 1 was manufactured. It is the figure which showed a mode that a workpiece | work was fixed to a workpiece | work fixing sheet | seat, and a workpiece | work is processed. It is a top view of the workpiece | work fixing sheet which concerns on 2nd Embodiment of this invention. It is the figure which showed a mode that the workpiece fixing sheet shown by FIG. 4 was manufactured. It is a top view of a PET sheet concerning a 3rd embodiment, (a) is a top view which formed a lattice-like groove on the surface of a PET sheet, (b) is a top view which formed a wave-like groove on the surface of a PET sheet (C) is the top view which formed the groove | channel of the oblique line shape in the surface of PET sheet. It is AA sectional drawing of Fig.6 (a). It is the figure which showed the workpiece | work fixing sheet which concerns on 4th Embodiment, (a) is a top view of a workpiece | work fixing sheet, (b) is BB sectional drawing of (a). In other embodiment, it is a top view of the workpiece | work fixing sheet | seat which apply | coated the dot-shaped workpiece | work fixing agent on the PET sheet | seat. It is sectional drawing of the workpiece fixing sheet which concerns on 6th Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Work fixing sheet, 11 ... PET sheet, 11a ... Groove, 12, 14 ... Work fixing agent, 13 ... Adhesive, 20 ... Coating apparatus, 23 ... Nozzle, 40 ... Workpiece.

Claims (16)

With mother (11),
A workpiece fixing jig that has a workpiece fixing agent (12) that is applied to the mother body and fixes the workpiece (40) by melting and solidifying depending on the temperature,
A workpiece fixing jig, wherein a temperature difference between a melting start temperature and a melting end temperature of the workpiece fixing agent is 5 ° C. or less. The workpiece fixing jig according to claim 1, wherein the melting start temperature and the melting end temperature of the workpiece fixing agent are within a range of 18 ° C to 100 ° C. The workpiece fixing jig according to claim 1, wherein the workpiece fixing agent is made of paraffin or polyethylene glycol as a main component. The workpiece according to any one of claims 1 to 3, wherein the base is a sheet-like material made of plastic, and the workpiece fixing agent is applied to one side or both sides of the sheet. fixing jig. The workpiece fixing according to claim 4, wherein a groove (11a) is provided in the sheet-shaped base body, and the workpiece fixing agent is applied to the sheet-shaped base body so as to fill the groove. jig. The workpiece fixing jig according to claim 4 or 5, wherein an adhesive (13) is provided between the sheet-shaped base and the workpiece fixing agent. The work fixing jig according to claim 4 or 5, wherein a hot melt material is provided between the sheet-shaped base and the work fixing agent. The workpiece fixing jig according to claim 6 or 7, wherein another workpiece fixing agent (14) having a melting start temperature lower than that of the workpiece fixing agent is provided on the workpiece fixing agent. With mother (11),
A workpiece fixing agent (12) that is applied to the mother body and fixes the workpiece (40) by melting and solidifying depending on the temperature;
A processing method using a workpiece fixing jig (10) in which a temperature difference between a melting start temperature and a melting end temperature of the workpiece fixing agent is 5 ° C. or less,
Placing the workpiece on the workpiece fixing jig, and heating the workpiece fixing jig to the melting end temperature to melt the workpiece fixing agent;
Lowering the temperature of the workpiece fixing jig below the melting start temperature to solidify the workpiece fixing agent;
Machining the workpiece;
Heating the workpiece fixing jig to the melting end temperature and removing the workpiece from the workpiece fixing jig. The processing method according to claim 9, wherein the work fixing agent is one having the melting start temperature and the melting end temperature in a range of 18 ° C. to 100 ° C. 11. The processing method according to claim 9, wherein a material mainly composed of paraffin or polyethylene glycol is used as the workpiece fixing agent. 12. The method according to claim 9, wherein a sheet-like material made of plastic is used as the base material, and the workpiece fixing agent is applied to one or both surfaces of the sheet. The processing method described in one. As the sheet-shaped matrix, a sheet-shaped matrix having a groove (11a) is used, and the sheet-shaped matrix is coated with the workpiece fixing agent so as to fill the groove. The processing method according to claim 12. The processing method according to claim 12 or 13, wherein as the workpiece fixing jig, a workpiece in which an adhesive (13) is provided between the sheet-like base and the workpiece fixing agent is used. 14. The processing method according to claim 12, wherein the workpiece fixing jig includes a hot melt material provided between the sheet-shaped base and the workpiece fixing agent. 16. The workpiece fixing jig, wherein the workpiece fixing agent is provided with another workpiece fixing agent (14) having a melting start temperature lower than that of the workpiece fixing agent. The processing method described.

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