JP2007324044A - Scanning charged particle beam device, image display method of same, and scanning microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scanning charged particle beam device, an image display method of the same, and the scanning microscope suitable for easily conducting evaluation, control, and adjustment for reducing an effect of image trouble caused by vibration. <P>SOLUTION: A cycle of a vertical scanning signal corresponding to a period for obtaining one image has a first half cycle (a first period) and a second half cycle (a second period) of one cycle in sine wave vibration. In order to compare a difference between the respective images, the image is displayed in an odd number field and an even number field of interlace scanning display. Thereby, a direction and magnitude the image shakes by the vibration can be simultaneously displayed by comparing the images obtained in the first period and second period with respect to an equal viewing field. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a scanning charged particle beam apparatus, an image display method therefor, and a scanning microscope that are suitable for facilitating the adjustment for reducing the influence of image disturbance due to vibration and reducing the influence of image disturbance due to vibration. About.

  Examples of the scanning charged particle beam apparatus include a scanning electron microscope (SEM), a scanning transmission electron microscope (STEM), and an ion beam processing apparatus. An apparatus using these is a scanning tunneling microscope.

  In a scanning electron microscope, an electron beam as a probe is scanned on a sample, and secondary electrons generated from the sample are detected along with this scanning.

  In a scanning transmission electron microscope, an electron beam as a probe is scanned on a sample, and electrons transmitted through the sample are detected along with this scanning.

  The ion beam processing apparatus is a device that can narrow the ion beam and irradiate a desired position on the sample surface to process the sample. By scanning the surface of the sample with the ion beam, secondary electrons generated at the time of ion collision are generated. The surface shape can be microscopically observed by detecting the amount. For example, there is a scanning ion microscope (SIM) function of a focused ion beam apparatus (FIB).

  In a scanning tunneling microscope, a sample and a probe as a probe are brought close to each other at a very short distance, and both are relatively two-dimensionally scanned to detect a current flowing through the probe. Display is in progress.

  Scanning charged particle beam devices and devices using these devices are observed when probes or samples such as electron beams are vibrated due to the effects of magnetic field vibrations, mechanical vibrations, sound waves, voltages, and current vibrations inside and outside the device. Shake or bend in the image. Further, in an observation image obtained by performing image integration in order to obtain a clear image, an image failure such that the observation image is blurred and resolution is deteriorated occurs.

  In general, in order to reduce the influence of these vibrations, an electromagnetic shield, a mechanical shield, a vibration isolation mechanism, or the like is applied to reduce the influence of vibration.

  Another method is to measure magnetic field vibrations, mechanical vibrations, and vibrations of sound waves, so that the observed images and processing are not obstructed. A method has been devised in which an electron beam is deflected by a deflector or a separately provided deflector so as to eliminate bending in the observed image.

As a method for facilitating such adjustment for correction, the horizontal scanning signal period is synchronized with the vibration period or an integral multiple thereof, and the phase of the vibration applied to the scanning region is adjusted to match the vibration. There have been devised a method of stopping the shaking, or a method of rotating the horizontal scanning direction in accordance with the direction of vibration so that the vibration becomes continuous and easy to see (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 10-22317 (paragraphs 0006-0020, FIG. 2)

  However, in the method for facilitating the adjustment, there is a problem that it is difficult to determine the direction in which vibration is received, and the direction and magnitude (vibration amount) in which vibration is received cannot be known at the same time. For this reason, the method of changing the scanning direction so that image obstruction is easy to see requires a sample having a linear pattern in the vertical direction and the horizontal direction. The step of switching the scanning direction according to the direction is necessary, and the problem is that the adjustment step increases by alternately changing or repeating the scanning direction and the image defect reduction adjustment, and the adjustment takes time. It was.

  Further, when evaluating and adjusting the influence of minute vibrations, a special sample having a fine and precise linear pattern that looks straight even when the observation magnification is increased is required. Furthermore, since the judgment is based on a slight bend of the linear pattern, it is difficult to confirm visually, and the evaluation and adjustment operations are burdensome. In addition, since there are some bends in the linear pattern, it is difficult to determine whether the bend is a bend caused by vibration or a pattern by visual observation or image processing. As described above, the conventional method has the above-described problems in terms of the number of evaluation and adjustment steps and accuracy.

  The present invention has been made in view of the circumstances as described above, and is suitable for making it easy to make an adjustment to reduce the influence of image disturbance due to vibration and to evaluate the effect of vibration. An object of the present invention is to provide a charged particle beam device, an image display method thereof, and a scanning microscope.

  In the present invention, different periods of a first half cycle (first period) and a second half period (second period) within a predetermined period (for example, a period of image shaking due to vibration) for the same field of view. By comparing the acquired images with each other, the direction and size of the image swaying by vibration are displayed at the same time.

  In the display method, an image of the first half period (first period) of the image shaking period and an image of the second half period (second period) are displayed in an overlapping manner so that they can be compared. is there. For example, in sinusoidal shaking, images of the first period and the second period are displayed in a superimposed manner and compared.

  In addition, the frequency of vibration (or the period of vibration) is specified by changing a predetermined scanning period so that a shift between the two images affected by the vibration becomes large.

  According to the present invention, it is possible to display an image of the first half cycle and the second half cycle of a predetermined cycle in the same field of view. Therefore, in order to reduce the influence of image failure due to vibration and the effect of image failure due to vibration. Can be easily adjusted.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<< First Embodiment >>
In the present embodiment, the period for acquiring an image is set to be a first half period (first period) and a second half period (second period) in one period in sinusoidal image fluctuation, An example will be described in which images can be displayed in odd and even fields of interlaced scanning display so that the differences between the images can be compared. As an adjustment method for reducing image shake, an example of a method for correcting an electron beam with a scanning deflector so as to eliminate bending in an observation image based on a detection signal that detects vibration will be described.

  FIG. 1 is a configuration diagram showing an example of a scanning electron microscope of the present invention. An electron beam EB that is an electron beam is used as a probe. The electron beam EB generated from the electron gun 1 is converged finely by the converging lens 2, scanned and deflected two-dimensionally by the deflector 4, and focused on the sample 7 on the sample stage 6 by the objective lens 3. The electron beam EB is deflected by the deflector 4 and irradiated onto a desired minute region on the sample 7. In the scanning electron microscope, charged particles such as secondary electrons and reflected electrons generated from the vicinity of the surface of the sample 7 are detected by the detector 5, and the detected signal intensity is displayed as an image in synchronization with the scanning deflection of the deflector 4. By displaying on the device 17, it is possible to perform an enlarged observation with a SEM (Scanning Electron Microscope) image reflecting the shape of a minute region irradiated with the beam.

  The scanning signal generated by the scanning signal generation unit 13 is sent to the deflector driving unit 12. The deflector 4 is driven according to the scanning signal, and the electron beam EB is raster scanned. After the detection signal detected by the detector 5 is amplified by the amplifier 14, the image processing unit 15 forms a sample image by the amplified detection signal in synchronization with the scanning signal generation unit 13, and an image display 17 is displayed. The image memory 16 stores the sample image formed by the image processing unit 15, and the stored image is used for image calculation and image display.

  The scanning electron microscope is provided with a vibration detector 8 such as an accelerometer. Vibration that impedes the image is detected by the vibration detector 8, and the vibration measuring instrument 18 analyzes the waveform shape and frequency of the vibration, and the information is sent to the control unit 11. The scanning signal generation unit 13 is configured to be able to adjust the scanning period, and is controlled so as to generate a scanning signal related to a predetermined period of vibration based on information such as the period of vibration. Further, the scanning signal generator 13 is configured so that a signal for correcting image shake due to vibration can be superimposed on the operation signal output to the deflector 4 via the deflector driver 12, and the vibration waveform and frequency Control is performed so as to correct the vibration based on such information. The predetermined period is a period of a disturbance component that causes image shaking. For example, there are commercial frequencies of commercial power sources and integer multiples thereof.

In order to clarify the principle of the present invention, the principle of the comparative example will be described first.
FIG. 2 is an explanatory diagram showing vibration waveforms and scanning timing according to a comparative example. Here, an example is shown in which the period of the vertical scanning signal corresponding to one screen is synchronized with the vibration period.

  FIG. 3 is an explanatory diagram illustrating an image affected by vibration according to a comparative example. FIG. 3A shows a case where there is a vibration in the horizontal direction with respect to the straight line pattern of the vertical pattern. When not affected by vibration, a linear pattern is obtained. When affected by vibration, the linear pattern is bent and reflected in the shape of the vibration waveform in one cycle of the vertical scanning signal. . Since the vertical scanning is synchronized with the period of vibration, the same position is always bent in the same area in the observation region, and the shaking appears to be stationary. In this example of the vertical pattern, the vertical pattern appears to bend in the horizontal direction when it receives vibration in the horizontal direction with respect to the vertical pattern. However, as shown in FIG. 3B, the pattern does not appear to bend with respect to vibration in the vertical direction with respect to the vertical pattern. Thus, the influence of vibration cannot always be confirmed depending on the comparative example. Therefore, as a countermeasure, for vertical vibration, as shown in FIG. 3C, the field of view is moved to the position of the horizontal pattern, and the pattern is bent by rotating the scanning direction by 90 °. Since it is visible, the influence of vibration in the vertical direction is confirmed.

  FIG. 4 is an explanatory diagram showing a vibration waveform and scanning timing according to the present embodiment. Here, the period of the vertical scanning signal corresponding to the period for acquiring one image is defined as the first half period (first period) and the second half period (second period) in one period in the sinusoidal vibration. Here is an example. Images can be displayed in the odd and even fields of the interlaced scanning display so that the differences between the images can be compared.

  FIG. 5 is an explanatory diagram showing an image affected by vibration according to the present embodiment. FIG. 5A shows a case where a horizontal vibration is applied to a vertical linear pattern. When not affected by vibration, a linear pattern is obtained, but when affected by vibration, the period of the first half of the vibration waveform is influenced by one period of the vertical scanning signal. The image is displayed in an odd field, and the straight line pattern is bent and reflecting the vibration. In addition, an image when it is affected by vibration in the latter half of one cycle is displayed in the even field, and the linear pattern reflects the vibration and is bent in the direction opposite to that in the first half. When each image is displayed in the odd field and the even field of the interlaced scanning display, both fields are displayed as if they are superimposed. In the example of the vertical pattern, when the vertical pattern is subjected to vibration in the horizontal direction, the vertical pattern appears to bend in the horizontal direction. However, since the pattern is bent and cannot be seen with respect to the vibration in the vertical direction, the influence of the vibration cannot be confirmed. For this reason, with respect to the vibration in the vertical direction, the vibration in the vertical direction is examined using a horizontal pattern.

  As shown in FIG. 5B, the vertical vibration of the horizontal pattern can be confirmed by moving the visual field to the position of the horizontal pattern and rotating the scanning direction by 90 ° as in the comparative example. When not affected by vibration, a linear pattern is obtained, but when affected by vibration, the period of the first half of the vibration waveform is influenced by one period of the vertical scanning signal. The image is displayed in an odd field, and the straight line pattern is bent and reflecting the vibration. In addition, an image when it is affected by vibration in the latter half of one cycle is displayed in the even field, and the linear pattern reflects the vibration and is bent in the direction opposite to that in the first half. When each image is displayed in the odd field and the even field of the interlaced scanning display, both fields are displayed as if they are superimposed. In the example of the horizontal pattern, when the horizontal pattern is subjected to vibration in the vertical direction, the horizontal pattern appears to bend in the vertical direction.

  FIG. 5C shows a case where a horizontal vibration is applied to the circular pattern. When not affected by vibration, a circular pattern can be obtained, but when affected by vibration, one cycle of the vertical scanning signal is affected by vibration in the first half of the vibration waveform. The image is displayed in the odd field, and the circular pattern is displayed on the right side from the center reflecting the vibration. In addition, an image when the second half of the cycle is affected by the vibration is displayed in the even field, and the circular pattern reflects the vibration and is displayed on the left side from the center in the opposite direction to the first half. When each image is displayed in the odd field and the even field of the interlaced scanning display, both fields are displayed as if they are superimposed. In FIG.5 (c), it can confirm that the circular pattern vibrates to the right and left of drawing.

  FIG. 5D shows a case where the circular pattern is subjected to vibration in the diagonally right direction. When not affected by vibration, a circular pattern can be obtained, but when affected by vibration, one cycle of the vertical scanning signal is affected by vibration in the first half of the vibration waveform. An image is displayed in an odd field, and a circular pattern is displayed on the upper right side from the center reflecting vibration. In addition, the image when it is affected by the vibration of the second half of one cycle is displayed in the even field, and the circular pattern is displayed diagonally to the left from the center in the opposite direction to that of the first half, reflecting the vibration. . When each image is displayed in the odd field and the even field of the interlaced scanning display, both fields are displayed as if they are superimposed. In FIG.5 (d), it can confirm that the circular pattern is vibrating in the diagonally right direction of drawing.

  As shown in FIG. 5, when the pattern is a linear pattern or a circular pattern from the beginning, the direction of vibration can be recognized even in an image affected by vibration according to the comparative example, but the pattern shape is found. If not, it cannot be determined whether or not the image is vibrated. Further, when the pattern becomes fine, when the linear pattern is curved, it cannot be determined whether or not the image is curved due to vibration. On the other hand, in the image affected by the vibration according to the present invention, it is possible to determine that the image is shaken due to vibration because the image of the odd field is different from the image of the even field. That is, in FIG. 5A and FIG. 5B, by observing the odd field image and the even field image, it can be determined that the fluctuation of the linear pattern is the fluctuation of the image due to the vibration. Further, in FIGS. 5C and 5D, by observing the odd-numbered field image and the even-numbered field image, it can be determined that the swing of the circular pattern is the swing of the image due to the vibration. Further, as shown in FIGS. 5C and 5D, the direction and the size of the vibration are simultaneously recognized by determining a pattern that is not a linear pattern, for example, a circular pattern image. Can do.

The operation will be described below.
FIG. 6 is a flowchart showing a method for reducing the fluctuation of the sample image due to disturbance. The vibration that causes an obstacle to the image is detected by the vibration detector 8, and the vibration measuring device 18 detects the vibration period of the disturbance and sets the vibration period to a predetermined period (step S31). The control unit 11 instructs the scanning signal generation unit 13 to synchronize the vertical scanning signal with a half cycle of a predetermined cycle. Receiving the instruction, the scanning signal generator 13 generates a scanning signal based on a predetermined cycle (step S32).

  The image processing unit 15 forms a sample image by the detector signal amplified by the amplifier 14 in synchronization with the scanning signal generation unit 13. The image processing unit 15 causes the image display unit 17 to obtain the difference between the images acquired in the first half cycle (first period) and the second half cycle (second period) of the image shaking period due to disturbance vibration. The images are displayed in the odd and even fields of the interlaced scanning display (step S33). The odd field and even field images are preferably displayed in different colors so that each image can be identified.

  The image processing unit 15 detects the center of gravity position of a specific pattern that can be easily identified in the first period and the second period, and compares the center of gravity position to obtain the center of the image shaking, and the direction of the image shaking The size is obtained as image shake information. The image processing unit 15 displays the obtained image shake information of the center coordinates, direction, and magnitude of the image shake on the image display 17 (step S34). Here, the position of the center of gravity is used as the position of the specific pattern, but it may be the center position.

  The control unit 11 determines whether the magnitude of the image shake obtained by the image processing unit 15 is within a predetermined value (step S35). If the image shake is within a predetermined value, the process is terminated. If the magnitude of the image shake is not within the predetermined value, the process proceeds to step S36.

  Based on the image shake information, the control unit 11 instructs the scan signal generation unit 13 to correct the scan signal so that the image shake in the observation image is reduced. Upon receiving the instruction, the scanning signal generation unit 13 generates a scanning signal corrected so as to reduce the image fluctuation in consideration of the direction and magnitude of the image fluctuation (step S36). The image processing unit 15 forms a sample image by the detector signal amplified by the amplifier 14 in synchronization with the scanning signal generation unit 13, and displays the corrected image (step S37).

  Note that the determination of whether or not the magnitude of the image shake in step S35 is within a predetermined value may be made by the operator (inspector) of the scanning electron microscope visually determining the image displayed on the image display unit 17. . In this case, referring to the image shake information in step S36, the operator inputs the direction and magnitude of the image shake to the control unit 11 from an input device (not shown), and instructs the correction of the scanning signal. . If the operator does not need to check the image shake image, the image display 17 (step S33) and the image shake information display (step S34) by the control unit 11 may be omitted. .

  According to the present embodiment, since the images of the first period and the second period are compared and displayed, the control unit 11 or the operator obtains image shake information of the direction and magnitude of the vibration. Can do. For this reason, the control unit 11 or the operator makes adjustments so as to reduce the influence of vibration, so that movement between patterns can be performed by separately adjusting the vertical direction and the horizontal direction, which are performed in the comparative example. Adjustments can be made without switching the scanning direction.

  In addition, according to the present embodiment, vertical and horizontal linear patterns are unnecessary, and image fluctuation evaluation and management are performed by image processing or observation of image fluctuations of a specific pattern that is easy to identify among circuit patterns. Adjustment can be simplified.

  Furthermore, according to the present embodiment, since the deviation of images in the same field of view is compared rather than the linearity of the displayed pattern, it is easy to recognize minute fluctuations, and a sample that has been precisely linearly processed is also available. It is not necessary, and precise evaluation, management, and adjustment can be easily performed by image recognition or visual inspection.

  In the present embodiment, the images are displayed in an interlaced scan display so that the difference between images acquired in different periods (first period and second period) of the period of image shaking in the period of vibration can be compared. Although the display can be performed in the odd field and the even field, an image obtained by superimposing the respective images may be displayed by distinguishing a portion where each image and the two images overlap with each other by color. Thus, by identifying by color, it becomes easy to understand the direction and magnitude of vibration.

  Further, as an adjustment method for reducing the shake of the sample image, in this embodiment, the deflector 4 deflects the electron beam EB based on the detection signal that detects the vibration so that the bending in the observation image is eliminated. However, the electron beam EB may be deflected and corrected by a vibration countermeasure deflector different from the deflector 4. According to this, when there is no vibration, the sample 7 is scanned by the deflector 4, and when the vibration is recognized, the vibration countermeasure deflector is activated to prevent the image from shaking. it can.

  As an adjustment method to reduce the fluctuation of the sample image, the image fluctuation information is obtained based on the detection signal that detects the vibration, and the electron beam is deflected by the scanning deflector so that the bending in the observation image is eliminated. However, it may be corrected by a canceller that generates vibrations that cancel out these vibrations based on the image shake information so that no trouble occurs in the observed image or processing.

<< Second Embodiment >>
FIG. 7 is a flowchart showing a method for reducing the fluctuation of the sample image after specifying the vibration period of the disturbance. In step S31 of FIG. 6, vibration that impedes the image is detected by the vibration detector 8, and the vibration measuring device 18 obtains the vibration period of the disturbance. However, the period of the disturbance component that causes the image shake may not be clear. In this case, it is necessary to estimate a predetermined period as the vibration period. The second embodiment is characterized in that the predetermined period is estimated from the acquired image. FIG. 7 shows a case where step S31 is changed to step S41 as compared with the flowchart of FIG. The same number is attached | subjected about the step of the same operation | movement.

  The control part 11 calculates | requires the vibration period of a disturbance by vibration period sweep analysis (step S41). In the vibration period sweep analysis, the image shift between the first period and the second period changes the predetermined period of scanning to obtain a period in which the image fluctuation becomes large, and the movement of the image fluctuation is stationary. It is to obtain the vibration period. For example, the predetermined period is changed between 20 ms (frequency 50 Hz) to 5 ms (frequency 200 Hz). The image processing unit 15 forms a sample image by the detector signal amplified by the amplifier 14 in synchronization with the scanning signal generation unit 13, and the center of gravity of a specific pattern easily distinguishable between the first period and the second period The position is detected and the center of gravity is compared. From this comparison result, the center of image shake is obtained, and the direction and magnitude of the image shake are obtained as image shake information. A predetermined period in which the magnitude of the image fluctuation is large and the position of the center of gravity of the image is stable is determined within the set predetermined period (step S41). When the predetermined period is obtained, the process proceeds to step S32. Hereinafter, since it is the same content as FIG. 6, description is abbreviate | omitted.

  According to the present embodiment, since the vibration period of the disturbance is obtained by vibration period sweep analysis, the vibration period of the disturbance is estimated even when the period of the disturbance component causing the image shake is not clear. be able to.

  In the embodiment described above, the scanning microscope which is one of the scanning charged particle beam apparatuses using the electron beam (electron beam) EB as the probe for scanning on the sample has been described. The scanning microscope includes a scanning electron microscope (SEM) and a scanning transmission electron microscope (STEM). However, the scanning probe is not necessarily limited to the electron beam. As the probe, an ion beam that is a charged particle beam may be used. Such a scanning microscope includes a scanning ion microscope (SIM) of a focused ion beam apparatus (FIB).

  Further, the method of displaying image fluctuation according to the present invention can be similarly applied to a scanning type similar apparatus. For example, an energy dispersive X-ray spectrometer (EDX) using SEM, a length measuring device such as a semiconductor pattern, and an inspection device such as a semiconductor pattern can be mentioned. A scanning tunneling microscope using a mechanical probe is an example of the probe.

  INDUSTRIAL APPLICABILITY The present invention can be used for a scanning microscope, an ion beam device, and similar devices that use a scanning probe for observing living things, materials, semiconductor integrated circuits, and the like. In addition, in the field of microstructural applications such as magnetic recording / reproducing heads, magneto-optical recording / reproducing heads, and micromachines (MEMS), inspection and analysis of multi-layer thin film structures and microstructures on the order of nanometers to micrometers Applicable to manufacturing and equipment used for it.

It is a block diagram which shows an example of the scanning electron microscope of this invention. It is explanatory drawing which shows the vibration waveform and scanning timing by a comparative example. It is explanatory drawing which shows the image which received the influence of the vibration by a comparative example. It is explanatory drawing which shows the vibration waveform and scanning timing by this invention. It is explanatory drawing which shows the image which received the influence of the vibration by this invention. It is a flowchart which shows the method of reducing the fluctuation | variation of the sample image by a disturbance. It is a flowchart which shows the method of reducing the fluctuation | variation of a sample image, after specifying the vibration period of a disturbance.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electron gun 2 Converging lens 3 Objective lens 4 Deflector 5 Detector 6 Sample stage 7 Sample 8 Vibration detector 11 Control part 12 Deflector drive part 13 Scan signal generation part 14 Amplifier 15 Image processing part 16 Image memory 17 Image display 18 Vibration measuring instrument EB Electron beam

Claims (20)

Scanning means for two-dimensionally scanning the probe on the sample, control means for changing the period of the vertical scanning signal supplied to the scanning means in synchronization with a predetermined half cycle of the vibration measured or estimated, and the sample Detecting means for detecting a signal obtained by scanning the upper probe, image processing means for image processing a sample image obtained in synchronization with deflection of the probe from the signal detected by the detecting means, and Display means for displaying an image processed by the image processing means,
The image processing means displays on the display means an image of the sample image of the same field of view acquired during a period between the first half cycle and the second half cycle of the predetermined cycle. apparatus. The scanning charged particle beam apparatus according to claim 1, wherein the predetermined period is a period of a disturbance component that causes image shaking. The scanning charged particle beam device according to claim 2, wherein the period of the disturbance component is a period of a commercial power source or an integer multiple of a period of the commercial power source. 2. The scanning charged particle beam apparatus according to claim 1, wherein the image processing unit superimposes and displays the image of the sample image of the first half cycle and the second half cycle on the display unit. 2. The image processing unit displays the image of the sample image in the first half cycle and the second half cycle on the display unit as an odd field and an even field in interlaced scanning display. Scanning charged particle beam device. The image processing unit superimposes the images of the sample images of the first half cycle and the second half cycle, identifies each image and a common portion of the superimposed images with different colors, and displays them on the display unit. The scanning charged particle beam apparatus according to claim 1. The image processing means compares the position of a predetermined portion of the image of the sample image in the first half cycle and the second half cycle, and acquires the direction and magnitude of the shake of the sample image. The scanning charged particle beam apparatus according to claim 1. The scanning charged particle beam apparatus according to claim 7, wherein the image processing unit displays the direction and magnitude of shaking of the sample image on the display unit. 9. The scanning charged particle beam apparatus according to claim 7, wherein the control unit adjusts the predetermined period so that the magnitude of the swing is equal to or greater than a predetermined value. The control means superimposes a scanning signal for correcting image shaking caused by vibration on a scanning signal supplied to the scanning means based on the direction and magnitude of shaking of the sample image. The scanning charged particle beam apparatus according to claim 7 or 8. The control means includes an image shake caused by vibration by a vibration preventing means for generating a vibration for canceling a vibration of a disturbance component causing the image shake based on a direction and a magnitude of the shake of the sample image. The scanning charged particle beam device according to claim 7 or 8, wherein 12. The scanning charged particle beam apparatus according to claim 1, wherein the scanning charged particle beam apparatus is a scanning microscope in which the probe is an electron beam and the electron beam is scanned on a sample. The scanning charged particle beam apparatus described. 12. The scanning charged particle beam apparatus according to claim 1, wherein the scanning charged particle beam apparatus is a scanning microscope in which the probe is an ion beam and the ion beam is scanned on a sample. The scanning charged particle beam apparatus described. The scanning according to any one of claims 1 to 11, wherein the scanning charged particle beam device is an analysis device that performs energy analysis to detect characteristic X-rays emitted from the sample surface. Type charged particle beam equipment. The scanning charged particle beam apparatus according to claim 1, wherein the scanning charged particle beam apparatus is a length measuring apparatus that measures a length from an image of the sample image. The scanning charged particle beam apparatus according to any one of claims 1 to 11, wherein the scanning charged particle beam apparatus is an inspection apparatus that inspects a sample from an image of the sample image. In an image display method of a scanning charged particle beam apparatus that raster scans a probe on a sample, supplies a signal obtained based on the scan to a display device, and displays a sample image on the display device.
Synchronizing the period of the vertical scanning signal of the raster scanning with a half period of a predetermined period of vibration measured or estimated,
An image display method for a scanning charged particle beam apparatus, comprising: displaying an image of the sample image acquired during a period between a first half cycle and a second half cycle of the predetermined cycle. The image display method of the scanning charged particle beam apparatus according to claim 17, wherein the predetermined period is a period of a disturbance component causing image fluctuation. The image display method of the scanning charged particle beam device according to claim 18, wherein the period of the disturbance component is a period of a commercial power source or an integer multiple of a period of the commercial power source. Scanning means for two-dimensionally scanning the probe on the sample, control means for changing the period of the vertical scanning signal supplied to the scanning means in synchronization with a predetermined half cycle of the vibration measured or estimated, and the sample Detecting means for detecting a signal obtained by scanning the upper probe, image processing means for image processing a sample image obtained in synchronization with deflection of the probe from the signal detected by the detecting means, and Display means for displaying an image processed by the image processing means,
The image processing means displays on the display means an image of the sample image of the same field of view acquired during a period between the first half cycle and the second half cycle of the predetermined cycle,
The probe is a probe, and the probe is scanned over a sample.

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