JP2007317769A - Magnetic shield member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic shield member which can be used so as to shield effectively earth magnetism of about 30 micro tesla(μT), and also which can be manufactured easily while having lightweight and strength against external force. <P>SOLUTION: A thin alloy belt 2 is wound around core materials 1a and 1b, and at least one part of the wound thin alloy belt 2 is cut in the axial direction. The magnetic shield member is used, comprising the core materials 1a and 1b, and the thin alloy belt 2 provided in the side surface. In case of using a member composed of two or more materials for the core materials 1a and 1b, the member can be used as a magnetic shield member consisting of the respective core material members 1a and 1b, and the thin alloy belt 2 by separating the core materials 1a and 1b after cutting the thin alloy belt 2. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a magnetic shield member for use in, for example, a biomagnetic field measurement apparatus that measures a weak magnetic field generated from a living body using a SQUID or the like, various physics and chemistry instruments, or a semiconductor processing apparatus that uses an electron beam. .

  In a biomagnetic field measuring apparatus that measures a weak magnetic field generated from the heart or brain by SQUID or the like, the detected magnetic field strength is as weak as about 10 minus 10 Tesla (T), and therefore, about 30 micro Tesla (μT). Geomagnetism is a major obstacle. For this reason, a magnetic shield device that attenuates the geomagnetism by at least 50 dB is required. As a magnetic shield member required for this, a high-permeability permalloy plate or silicon steel plate, which is an Fe-Ni alloy, or a soft magnetic alloy thin film having an ultrafine crystal structure with a crystal grain size of 100 nm or less and Magnetic laminated members in which polymer sheets are stacked and bonded have been proposed.

As an example of the basic structure of the magnetic shield device, a box-type structural frame made of aluminum or the like is used as a magnetic shield member with a high-permeability permalloy plate or silicon steel plate made of Fe-Ni alloy as a wall material or flooring material. In some cases, the magnetic shield space is defined by fixing with bolts or the like (see, for example, Patent Document 1). In addition, instead of a permalloy plate, it is also proposed to use a magnetic shield sheet material in which a thin film of a soft magnetic alloy having an ultrafine crystal structure having a crystal grain size of 100 nm or less and a polymer sheet are stacked and bonded as a magnetic shield member. (For example, refer to Patent Document 2). In addition, as a method of manufacturing a magnetic shield plate in which an amorphous ribbon is adhered to the surface of a plate-shaped core material, one end of the amorphous ribbon pulled out from the roll is bonded to the core material, and the core material is rotated to make the amorphous core into the core material. A method of winding is also proposed.
Japanese Patent Laid-Open No. 5-183288 (2nd page, FIG. 1) JP 2000-077780 A (Page 3, FIG. 6) JP-A-6-140785 (page 3, FIG. 1)

The magnetic shield device disclosed in Patent Document 1 uses a high permeability permalloy plate as a magnetic shield member, and has a structure surrounding a space to be magnetically shielded. In this case, the permalloy plate needs to have a thickness of about 1 mm, and parts processing such as cutting and bending is performed in accordance with the assembly structure of the magnetic shield device. However, although the permalloy plate does not affect the mechanical strength due to the external force applied during component processing, it has a drawback that the magnetic properties are extremely deteriorated. In addition, the magnetic properties of the permalloy plate are greatly reduced even when an external force such as an earthquake is applied to the magnetic shield device after installation. In addition, a magnetic shield device using a permalloy plate requires a permalloy thickness of about 1 mm or more for each layer, and even a magnetic shield device having a size of about 2 m × 2 m × 2 m reaches a weight of several hundred kg or more. End up. Furthermore, in order to increase the magnetic shield rate, the single layer structure of the permalloy plate is not sufficient, and a multilayer structure is necessary. In this case, the magnetic shield device becomes a weight of 1 ton or more, and the magnetic shield There is a problem that the movement of the apparatus is difficult.
On the other hand, in the magnetic shield device disclosed in Patent Document 2, instead of a permalloy plate as a magnetic shield member, a thin film of a soft magnetic alloy having an ultrafine crystal structure with a crystal grain size of 100 nm or less and a polymer sheet are stacked. A bonded magnetic shield sheet material is used. Unlike the permalloy plate, the magnetic shield device in this case does not deteriorate the magnetic properties even when a slight external force is applied, but the process for stacking the thin film and the polymer sheet is complicated, and the manufacturing cost increases. There is a problem that the cost is higher than that using a permalloy plate.

  The magnetic shield plate disclosed in Patent Document 3 is capable of efficiently winding a roll-shaped amorphous ribbon around a plaster board in a continuous process, so that significant labor savings can be realized, and the greatest advantage is that the manufacturing cost is reduced. . However, Patent Document 3 only describes winding an alloy ribbon around a plate-shaped core material at the end, which is not an optimal shape for use in a magnetic shield room, and there is room for improvement.

  Accordingly, the object of the present invention is to solve the above-mentioned problems, to be strong against external force and lightweight, easy to manufacture, and to be used to effectively shield geomagnetism of about 30 microtesla (μT). It is to provide a shield member.

  In order to achieve the above object, the present invention provides an alloy ribbon wound around a core material, and at least a part of the wound alloy ribbon is cut in the axial direction. A magnetic shield member characterized by comprising an alloy ribbon provided on a side surface is employed.

  In the present invention, the core material is preferably plate-shaped, and the alloy ribbon is preferably cut at the end of the plate-shaped core material. The plate-like core material can be a stack of a plurality of members. As this core material, one having an end formed in a corner shape having a curvature can be employed. Further, this end portion may be removed by cutting at once with the wound alloy ribbon. The core material preferably has a thickness of 30 mm or more. Moreover, it is preferable to comprise the core material so that the inside is hollow.

  Further, the core material has a columnar shape, and may be a combination of a plurality of members having an arc column shape or a fan column shape.

  As the alloy ribbon, those using an amorphous alloy ribbon-shaped material are preferable, and those using a Co-based amorphous alloy ribbon-shaped material are particularly preferable. These alloy ribbons are manufactured in a strip shape by roll quenching. Generally, it is obtained as an amorphous alloy having a thickness of 8 μm to 80 μm, usually 16 μm to 40 μm. The width is generally 5 mm to 200 mm. The alloy ribbon is wound and stored in a roll shape. When winding around the core material, one end is pulled out from this roll-like state. In the roll wound with the alloy ribbon, the torque is controlled so that a constant tension is always applied to the alloy ribbon. As the core material rotates, the alloy ribbon drawn from the roll is wound, and a magnetic shield member can be easily manufactured.

  The Co-based amorphous alloy ribbon preferably has a coercive force (Hc) of 0.4 A / m or less, a saturation magnetostriction constant of 10 minus 6 or less, and a DC maximum permeability of 10,000 or more. For example, the alloy component of the Co-based amorphous alloy has the composition formula: (Co1-xy-zFexMnyNiz) 100-ab-cMaSibBc [where M is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, At least one element selected from W, Cu, Ag, Au, Y, and a rare earth element], and x is 0 to 0.1, y is 0 to 0.1, and z is 0. 0.2, a is 0 to 6, b is 8 to 18, c is 7 to 18, and (b + c) is 18 to 30. For the winding of the Co-based amorphous alloy ribbon around the core material, only a few layers are described in the examples for the sake of explanation, but the internal space has a magnetic shield with a size of about 2 m × 2 m × 2 m The device is preferably 20 layers or more, more preferably 30 layers or more, and it is possible to provide a magnetic shield device capable of attenuating geomagnetism of about 30 microtesla (μT) by at least 50 dB.

  The amorphous alloy ribbon is preferably subjected to an annealing treatment by performing a heat treatment at a maximum temperature of 300 ° C. to 480 ° C. while being wound around the core material. Amorphous alloys become brittle when annealed. Therefore, after annealing, the magnetic shield member is covered with a resin sheet such as PET (polyethylene terephthalate) around the wound amorphous alloy ribbon, or with a non-magnetic material similar to the core material. It is preferable to prevent breakage from. In order to efficiently perform the heat treatment of the amorphous alloy thin plate, it is preferable that the tray containing the magnetic laminate is multi-staged and placed in a heat treatment furnace.

  As the core material, for example, a material formed from a resin, an aluminum alloy, a stainless steel, or the like can be used. If a highly conductive material such as copper or aluminum alloy is used for the core material, it is possible to provide a shielding effect by an eddy current against an AC disturbance magnetic field. Moreover, you may comprise so that a magnetic-shielding characteristic may be improved using a silicon steel plate or a permalloy.

The alloy ribbon is preferably provided with an adhesive layer on at least one surface so as to be bonded when wound around the core material. It is also possible to wind around the core material while applying an adhesive to the alloy ribbon, or to apply a thermoplastic resin to the alloy ribbon in advance and wind around the core material after passing between the hot rolls. The magnetic shield material can be obtained.
Further, the magnetic shield material of the present invention can be obtained by applying a heat treatment in the thickness direction of the alloy ribbon wound around the core material using a manufacturing method such as HIP or hot press without providing an adhesive layer. You can also.

  In the present invention, by adopting a magnetic shield member composed of a core material and an alloy ribbon provided on the side surface, even if some external force is applied, the mechanical strength of the alloy is high so that it does not break. And easy to manufacture. Further, an alloy ribbon is wound around a core material, and at least a part of the wound alloy ribbon is cut in the circumferential direction. As a wall material that magnetically shields in a wide range such as a magnetic shield room, the magnetic shield characteristic is higher than that of a plate, and a preferable shape is obtained.

  In addition, the magnetic shield member of the present invention preferably has a plate shape as a preferred shape for magnetic shield room use, and the alloy ribbon is cut so that the gap is formed at the end of the plate-like core material. .

  The plate-like core material is preferably a laminate of a plurality of members. If the core material is simply a single plate, a single magnetic shield member can simply be used as a single wall material. By manufacturing a plate-shaped core material by stacking a plurality of members, if the alloy ribbon is cut at the end of the magnetic shield member, the alloy ribbon bonded to the back surface and the surface is separated into separate magnetic shields. Can be used as a member. As a result, a magnetic shield member having a substantially doubled area can be manufactured in a single manufacturing process as compared with the prior art, and a significant labor saving can be realized.

  As the magnetic shield member of the present invention using the above plate-like core material, one having an end formed in a corner shape having a curvature can be adopted. By making the end a corner shape, the local bending stress applied to the alloy ribbon is reduced. As a result, even if the annealing process for improving the magnetic properties is performed and the alloy ribbon becomes brittle, the possibility of the alloy ribbon being damaged is reduced, and a magnetic shield member having high mechanical strength can be obtained.

  Moreover, the edge part of a plate-shaped core material can be removed by cutting at once with the wound alloy ribbon. For example, in the case of a single-plate plate-shaped core material, the end surface of the magnetic shield member can be easily aligned by cutting the core material and the alloy ribbon at the end portions. In addition, if the core material is a stack of a plurality of plate-like members, it is possible to easily manufacture magnetic shield members for the back surface and the front surface by cutting at both ends wound with an alloy ribbon. Can do.

  The core material preferably has a thickness of 30 mm or more. When used as a wall material in a magnetic shield room, as shown in FIG. 8, if a magnetic gap is formed between an inner wall and an outer wall by dividing the alloy shield layer of an alloy ribbon, the shielding characteristics are improved. If the core material has the same width as the desired inner and outer walls, the alloy ribbon is wound around the core material, and if the alloy ribbon is cut at the end of the core material, the magnetic structure of the double structure is left as it is. Can be used as a shield room wall material.

  Moreover, it is preferable to comprise the core material so that the inside is hollow. As described above, the wall material of the double-structure magnetic shield room can be a hollow and lightweight wall material. Moreover, if it is hollow, the magnetic shield member for two sheets of a back surface and a surface can be easily manufactured only by cut | disconnecting and deleting the leg part which connects a surface and a back surface with an alloy ribbon.

  Further, the core material has a columnar shape, and may be a combination of a plurality of members having an arc column shape or a fan column shape. For example, as shown in FIG. 8, in order to manufacture a magnetic shield member as a wall material of a general double-structure magnetic shield room, a plate-like magnetic shield member having four sides and each of the four sides are magnetically formed. A magnetic shield member for a corner is required for connection. If the corner magnetic shield member has an angular shape, the magnetic characteristics change due to bending strain, and desired shield characteristics cannot be obtained. Further, as described above, the alloy ribbon becomes brittle during the annealing process, and therefore, it is easily damaged at this corner. For this reason, it is preferable that the magnetic shield member for corners has a gently bent shape. For this reason, if the core material is formed into a columnar shape and a combination of a plurality of arc columnar or fan columnar members, the wound alloy ribbon is cut so that each core member can be divided. A magnetic shield member for a corner as shown in FIG. As shown in FIG. 7, if it can be divided into four 90 ° portions, a magnetic shield member for four corners can be obtained in one manufacturing cycle. Further, the core material may not be a combination of a plurality of arc columnar or fan columnar members, but may be an integral shape or may be cut and divided.

  The magnetic shield device made according to the present invention is excellent in mechanical strength, lightweight, excellent in magnetic characteristics, and can attenuate geomagnetism of about 30 microtesla (μT) by at least 50 dB. Even when an external force such as an earthquake is applied, the magnetic properties of the Co-based amorphous alloy base material hardly deteriorate. Moreover, it can be manufactured easily, and the members are the minimum necessary, and the manufacturing cost is low. According to the present invention, a panel member of a magnetic laminate is prepared in advance, and this is attached to a structural frame and combined, and the laminated bridge member is arranged thereon, whereby the manufacturing process of the magnetic shield device can be simplified and the assembly time can be reduced. I can do it as soon as possible.

A Co-based amorphous alloy was used as a magnetic material for shielding geomagnetism of about 30 microtesla (μT).
The magnetic laminate used in a large-volume magnetic shield device that uses a magnetocardiograph to check the health of the heart has a large area and a large thickness to simplify the work. At present, the ribbon-shaped Co-based amorphous alloy is long (for example, 30,000 m), but the ribbon width is about 200 mm at the maximum, and the plate thickness is about 20 μm to 50 μm at the maximum. You can only get In order to make a magnetic laminate having a large area and a large plate thickness, by arranging a large number of ribbons in the width direction and joining the end portions in the width direction to form a large area thin plate, and A magnetic laminate having a large plate thickness can be obtained. When constructing the magnetic shield device, it can be cut and used. By performing the heat treatment, the maximum direct-current permeability of the Co-based amorphous alloy can be further increased, and the magnetic shield performance can be further improved.

  As the magnetic laminate, it is preferable that the Co-based amorphous alloy ribbon material has a multilayer structure of 15 layers or more in order to obtain sufficient magnetic shield characteristics. Compared with a permalloy magnetic shield plate, the magnetic laminate of the present invention formed by superimposing Co-based amorphous alloy ribbons can exhibit a magnetic shield effect higher than that of permalloy while being lightweight. The same situation applies when a magnetic shield member incorporating a magnetic laminate for defining a magnetic shield space is arranged in multiple layers as a wall material to maximize the magnetic shield effect. When manufacturing a magnetic shield room, the weight of the entire magnetic shield room can be reduced by combining a lightweight metal material such as aluminum as a frame member.

  When multiple layers of magnetic laminates that define the magnetic shield space are arranged as wall materials, for example, foam materials such as polystyrene foam are applied to the gaps between the walls to provide a vibration damping effect, and the shield room itself The magnetic noise generated by vibration can be reduced, the mechanical strength of the magnetic shield room can be increased, and the air conditioning efficiency of the magnetic shield room internal space can be increased. By setting the total number of laminated Co-based amorphous alloy ribbon materials arranged in the wall material to 30 or more, the geomagnetism of about 30 microtesla (μT) can be easily attenuated by at least 50 dB. For magnetic shield devices required for magnetoencephalographs and other devices that require higher shield efficiency (performance), increase the number of layers to more than 30 layers, or use multiple shield arrangements of three or more layers. Thus, it is possible to obtain the necessary shield efficiency (performance), and such a method is possible by applying the present technology.

Hereinafter, embodiments of the present invention will be further described with reference to the drawings.
FIG. 1 shows the manufacturing process of the magnetic shield member of the present invention. The magnetic shield member of the present invention is one in which an alloy ribbon is wound around the core material 1. In this embodiment, the core material 1 is a combination of two substantially plate-like members. The core material was manufactured from an aluminum alloy. The core materials 1a and 1b are detachable, and the state in which both members are connected is 150mm in thickness, 1050mm in width, and 1050mm in height (perpendicular to the paper surface) in which the end portion has a constant arc shape. It is formed in a plate shape. Further, the inside of the core material was provided with a leg portion so as to be hollow for weight reduction, and was formed to be hollow. A Co-based amorphous alloy ribbon 2 (width 100 mm, thickness 50 μm) wound around the roll 3 is passed through this core material through a hot roll 6 a, and one end of the Co-based amorphous alloy ribbon 2 is connected to the core material 1. Affixed to the side. Thereafter, the core material was rotated as shown in FIG. 1A, and wound around the core material 1 while pulling out the Co-based amorphous alloy ribbon 2 from the roll 3. The Co-based amorphous alloy ribbon 2 is coated with a thermoplastic resin on one side. By passing between the hot rolls, the thermoplastic resin is softened and cooled while being wound around the core material 1. Thereby, the Co-based amorphous alloy ribbon 2 is bonded to the surface of the core material 1 and the outer peripheral side of the previously wound Co-based amorphous alloy ribbon.
The roll 3 gradually moves in the height direction with respect to the core material 1 and changes the position where the Co-based amorphous alloy ribbon 2 is drawn. As a result, the Co-based amorphous alloy ribbon 2 is wound around the core material 1 at a predetermined width as shown in FIG. In this way, the Co-based amorphous alloy ribbon 2 was wound so as to have a thickness of 40 layers on the entire surface of the core material.
The core material 1 around which the Co-based amorphous alloy ribbon 2 is wound is cut at both ends at a position indicated by a broken line shown in FIG. Both ends of the core material 1 are arc-shaped portions as described above, and are cut into a shape suitable as a linear wall material as shown in FIG.
Thereafter, the core material 1a and the core material 1b are separated, the magnetic shield member made of the core material 1a and the 40-layer Co-based amorphous alloy ribbon 2, and the core material 1b and the 40-layer Co-based amorphous alloy. Two magnetic shield members of the magnetic shield member made of the ribbon 2 are obtained.

  FIG. 2 is an example in the case of using a Co-based amorphous alloy ribbon that has not been applied to the surface and has been manufactured by roll cooling. Reference numeral 3 denotes a roll obtained by winding the Co-based amorphous alloy ribbon, and reference numeral 4 denotes a double-sided adhesive resin tape roll that is attached to one surface of the alloy ribbon and serves as an adhesive layer. The resin tape had a thickness of about 10 μm and the same width as the alloy ribbon. As shown in FIG. 2, the Co-based amorphous alloy ribbon 2 and the resin tape are respectively drawn out from the alloy ribbon roll 3 and the resin tape roll 4, and are bonded to each other through a pressure-bonding roll to form a belt. The Co-based amorphous alloy ribbon 2 with one surface serving as an adhesive layer is wound by rotating the core material 1a and the core material 1b in the same manner as described above. Since it can be fixed more reliably than resin coating such as thermoplastic resin, and a heat source is not required when the alloy ribbon is wound around the core material, construction equipment is simple. The manufacturing process is the same as described above. After the alloy ribbon is wound around the core material, the end surface of the core material is cut off, and the core material 1a and the core material 1b are separated. Thus, the magnetic shield member made of the core material 1a and the 40-layer Co-based amorphous alloy ribbon 2 and the magnetic shield member made of the core material 1b and the 40-layer Co-based amorphous alloy ribbon 2 A sheet of magnetic shield member is obtained.

  As the core material 1, the structure shown in FIG. The core material of FIG. 3 includes a rectangular parallelepiped plate-shaped member 1, a discard jig 5 a that can be attached to and detached from the plate-shaped member, and a discard jig 5 b. If only the alloy ribbon is cut at the end, and this removable detachable jig 5a and detachable jig 5b are taken out, no extra sagging portion is required for the core material, and the material cost is reduced and cutting is possible. Even if a difficult material is used as a core material, it is easy to process. It is preferable that the core material 1 is also formed by stacking a plurality of plate-like members so that the front surface and the back surface can be freely used on the wall surface of the magnetic shield room.

FIG. 4 schematically shows a specific example when the alloy ribbon 2 is wound around the core material 1. In FIG. 4, the core material 1 is shown in a cross-sectional view taken along the rotation axis of the core material 1 when the alloy ribbon is wound as shown in FIGS. 1 and 2.
In FIG. 4 (a), a step-like jig is provided at the end of the core material 1, and the end of the alloy ribbon is wound around each step of the jig. Although only four layers are shown in the figure, it is actually preferable to have a multilayer of about 40 layers. The jig provided at the end portion is not stepped but may simply have an inclined surface. In this way, when the alloy ribbon 2 is wound around the core material 1, the winding is shifted to facilitate the flow of the magnetic flux from the alloy ribbon having a magnetic flux to the lateral or laterally upper and lower alloy ribbons, thereby improving the magnetic shield characteristics. To do. After winding 40 layers of alloy ribbon next to the jig, the alloy ribbon is cut. Thereafter, the end portions of the alloy ribbon are bonded so as to be adjacent to the side of the 40-layer alloy ribbon layer, and wound in the same manner. This is repeated to form an alloy ribbon layer of 40 layers on the entire surface of the plate-like core material 1.
Further, as another method of winding the alloy ribbon 2, one end of the alloy ribbon is bonded to the end portion of the plate-like core material 1 and wound slightly obliquely, and the alloy ribbon 2 is wound around the core material once. The magnetic shield member is formed so as to be shifted by the width of 1 mm, and has a layer of alloy ribbon for the entire surface. Thereafter, the alloy ribbon 2 is similarly wound so as to deviate by a predetermined width from the position of each of the first alloy ribbons wound, and a second layer is formed. This is repeated to form a magnetic shield member having an alloy ribbon layer in which 40 layers are formed while each layer is slightly shifted.
If it is an alloy ribbon with a width of 30 mm or more, it can be manufactured without using the jig 8 provided in the core material 1. Moreover, as shown in FIG.4 (b), it can also be set as the magnetic shielding member by which the edge part of the wound alloy ribbon was cut | disconnected in the position shown with a broken line, and 40 layers were formed in the whole surface.

  Moreover, what comprised integrally with the plate-shaped surface core material and back surface core material, and the edge part which bridges this can be employ | adopted for the core material 1c. The core 1c is substantially hollow 7 at the center, and after winding the alloy ribbon 2 into a predetermined layer, the end is cut off and separated to obtain two magnetic shield members. Since the core material 1c is an integrated type, the strength is higher than that obtained by stacking a plurality of plate-shaped core materials, and even if an impact is applied to the alloy ribbon when it is wound, the alloy ribbon is wound around the core material. High safety when turning.

  By fixing these magnetic shield members to a lightweight metal frame member made of aluminum to form a magnetic shield room panel member, the assembly process of a magnetic shield device such as a magnetic shield room can be simplified. Such panel members are doubled in the wall thickness direction, and, for example, a polystyrene foam plate is applied between them to increase the mechanical strength of the panel with almost no increase in weight, and the shield room itself vibrates. The magnetic noise generated by doing so can be reduced, and the heat insulation effect can be enhanced. The gap between the magnetic shield members to be arranged is preferably 10 mm to 200 mm, so that the efficiency of the magnetic shield is enhanced by combining the two magnetic laminates.

  A magnetic shield space is defined by these magnetic shield members, and the inner peripheral wall is preferably finished with a decorative material. A magnetic shield room utilizing the present invention can be formed by a simple construction method in which a room skeleton is formed with a framework member made of a light metal material of aluminum like a normal house, and then the magnetic shield member is bonded to the skeleton.

Moreover, as shown in FIG. 6, the magnetic shield member used for each part for magnetic shield rooms is easily obtained by using a core material in multiple types of shapes. FIG. 6 is a schematic diagram relating to a magnetic shield member for use in a corner of a magnetic shield room. The core material 1d is formed by combining four fan-shaped members having a central angle of 90 degrees into a cylindrical shape. The center of the fan-shaped member is formed in a hollow shape.
The cylindrical core material 1d is rotated and the alloy ribbon 2 is wound in the same manner as in FIGS. 1 and 2 to form the same number of layers as the alloy ribbon provided on the other plate-shaped magnetic shield members.
After winding the alloy ribbon 2, the laminated body of the alloy ribbon 2 is cut so that the core material 1d is separated into the respective fan-shaped members. In this way, a magnetic shield member whose side surface has a gentle curve is obtained. If necessary, the legs extending in the radial direction other than the gentle side surfaces can be cut.

Further, as shown in FIG. 7, a substantially ladder-shaped core material 1e with rounded ends is used, and the alloy ribbon 2 is wound in the same manner as in FIGS. 1 and 2, and other plate-like magnetic shield members are used. The number of layers is the same as that of the alloy ribbon provided in.
After the alloy ribbon 2 is wound, the front and back surfaces of the core material 1e are cut at different broken line positions, and an integrated magnetic shield member having one side wider than the other side can be manufactured. The magnetic shield member thus manufactured can be used as a wall material for a magnetic shield room as shown in FIG. One side is wide, so if it is used as a wall material between the corners of the shield room, it is easy to create a wall shape with a double-walled magnetic shield room and the outer alloy ribbon layer protruding to the corner side. Can be formed.
When this is combined with a magnetic shield member shown in FIG. 6 where the side surface has a gentle curve, and a corner portion is formed, a magnetic shield room having a wall shape with a high shielding characteristic, in which magnetic flux easily flows around, can be formed.

  A magnetocardiograph or magnetoencephalograph is installed in the magnetic shield space of the magnetic shield room formed in this way, and the magnetic field generated from the heart or brain is measured by using SQUID, etc., and the distribution of current flowing through the heart or brain is used as an image. The health state of the living body can be grasped by means such as capturing. On one side of the magnetic shield device, a door (not shown) used for entering / exiting a person or carrying in medical equipment is provided.

  As the light metal frame member, an aluminum material is suitable, but other light metal materials such as a magnesium material can also be used. It is the same as ordinary construction that weight can be reduced without reducing strength by making the frame member hollow. The light metal frame member increases the overall strength of the magnetic shield device.

  After forming the skeleton of the magnetic shield room with the frame member, the magnetic shield member of the present invention is bonded to form the inner wall and the outer wall to define the magnetic shield space. Alternatively, a frame member can be used to form a frame of a panel member, which is prepared in advance and a magnetic shield member is bonded to both sides of the panel to form a magnetic shield room. In order to protect the outer surface of the magnetic shield room and provide a clean feeling, it is preferable to arrange the decorative plate as an outer surface finishing material.

  The wall of the magnetic shield room using the present invention is provided with a through hole or a vent hole, and can take in air from the outside or pass cables for electronic equipment. The through hole can also be formed by inserting a tube formed by rolling the magnetic shield member of the present invention. In this way, air can be taken in and cables can be passed without deteriorating the magnetic shield rate.

It is a figure explaining the manufacturing process of the magnetic shielding member of this invention. It is a figure which shows one form which winds an alloy thin strip around a core material. It is an example of the magnetic shielding member of this invention. It is a figure which shows the form of the alloy ribbon wound around a core material. It is an example of the magnetic shielding member of this invention. It is an example of the magnetic shielding member of this invention. It is an example of the magnetic shielding member of this invention. It is an example of the magnetic shielding room using the magnetic shielding member of this invention.

Explanation of symbols

1 core material, 2 alloy ribbon, 3 alloy ribbon roll, 4 resin roll for bonding, 5 throwing jig, 6 roll

Claims (8)

An alloy ribbon is wound around the core material, and at least a part of the wound alloy ribbon is cut in the axial direction, and includes a core material and an alloy ribbon provided on a side surface of the core material. A magnetic shield member. The magnetic shield member according to claim 1, wherein the core material is plate-shaped, and the alloy ribbon is cut at an end portion of the plate-shaped core material. 3. The magnetic shield member according to claim 1, wherein the plate-shaped core member is formed by stacking a plurality of members. The magnetic shield member according to claim 3, wherein the core member is formed in a corner shape with an end portion having a curvature. The magnetic shield member according to claim 3, wherein the alloy ribbon and the end portion of the plate-like core material are cut at a time. The magnetic shield member according to claim 3, wherein the core member has a thickness of 30 mm or more. The magnetic shield member according to claim 3, wherein the core member is configured to be hollow inside. The magnetic shield member according to claim 1, wherein the core member has a cylindrical shape, and a plurality of members each having an arc column shape or a fan column shape are combined.

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