JP2007329150A - Magnetic shield room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic shield room for performing efficient shielding to terrestrial magnetism. <P>SOLUTION: In the magnetic shield room for demarcating a magnetic shielded space by surrounding using a magnetic shield member mainly made of a Co group amorphous alloy lamination member; a soft magnetic material joint shell plate and a soft magnetic material joint inner plate are arranged so that they straddle over the butting edges of the magnetic shield member, and the soft magnetic material joint shell plate and the soft magnetic material joint inner plate are clamped by a penetrating nonmagnetic bolt member, so that the butting edge of the Co group amorphous alloy lamination member of each magnetic shield member is clamped via a resin film. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a magnetic shield room in which, for example, a biomagnetic field measurement device that measures a weak magnetic field generated from the heart or brain for use in diagnosis, various physics and chemistry equipment, or a semiconductor processing device that uses an electron beam is installed. It is.

  In a biomagnetic field measuring apparatus that measures a weak magnetic field generated from a human body by SQUID or the like, the detected magnetic field intensity is as weak as about 10 minus 10 Tesla (T), and thus the geomagnetism of about 30 micro Tesla (μT) is It becomes a big obstacle. For this reason, there is a need for a magnetic shield room that attenuates geomagnetism by at least 50 dB. The magnetic shield material required for this is a Fe-Ni alloy high-permeability permalloy plate or silicon steel plate, or a soft magnetic alloy thin film having an ultrafine crystal structure with a crystal grain size of 100 nm or less. Magnetic laminates have been proposed in which polymer sheets are stacked and bonded together.

As an example of the basic structure of a magnetic shield room, a high-permeability Fe-Ni alloy (permalloy) plate or silicon steel plate is used as a magnetic shield member for a box-type structural frame made of aluminum or the like as a wall material or flooring material. However, there are some which define a magnetic shield space by fixing a contact plate with a bolt or the like so as to close these gaps (see, for example, Patent Document 1). In addition, instead of a permalloy plate, it is also proposed to use a magnetic shield sheet material in which a thin film of a soft magnetic alloy having an ultrafine crystal structure having a crystal grain size of 100 nm or less and a polymer sheet are stacked and bonded as a magnetic shield member. (For example, refer to Patent Document 2). Patent Document 3 describes a joint structure of a radio wave shield room that has many differences from a magnetic shield room.
JP-A-2003-056095 (Claim 1, FIGS. 1 to 5) JP 2000-077780 A (Page 3, FIG. 6) JP 2004-100242 A (Claim 1, FIGS. 1 to 6)

  The magnetic shield room disclosed in Patent Document 1 uses a structure having a high magnetic permeability permalloy plate as a magnetic shield member and surrounding a space to be magnetically shielded in a single or multiple manner. In this case, the permalloy plate needs to have a thickness of about 1 mm, and parts processing such as cutting and bending is performed in accordance with the assembly structure of the magnetic shield room. However, although the permalloy plate does not affect the mechanical strength due to the external force applied during component processing, it has a drawback that the magnetic properties are extremely deteriorated. In addition, the magnetic properties of the permalloy plate are also greatly reduced when an external force due to an earthquake or the like is applied to the magnetic shield room after installation. In addition, a magnetic shield room using a permalloy plate requires a thickness of the permalloy to be used is about 1 mm or more, and even a magnetic shield room having a size of about 2 m × 2 m × 2 m reaches a weight of several hundred kg or more. . Furthermore, in order to increase the magnetic shield rate, the single enclosure room structure of the permalloy plate is not sufficient, and a multiple enclosure room structure is required. In this case, the magnetic shield room will weigh more than 1 ton. In addition, there is a problem in that it is difficult to move the magnetic shield room in the hospital. On the other hand, in the magnetic shield room disclosed in Patent Document 2, instead of a permalloy plate as a magnetic shield member, a soft magnetic alloy thin film having an ultrafine crystal structure with a crystal grain size of 100 nm or less and a polymer sheet are stacked. A bonded magnetic shield sheet material is used. In this case, unlike the permalloy plate, the magnetic properties are not deteriorated even if a slight external force is applied, but the alloy portion having an ultrafine crystal structure is weak in mechanical strength and easily breaks due to the external force. In the event of an earthquake or the like, mechanical failure may occur in the alloy part having an ultrafine crystal structure inside even though it does not appear to have an influence on the appearance.

  Accordingly, an object of the present invention is to provide a magnetic shield room that solves the above-mentioned problems, is strong against external force, is lightweight, and can be used to effectively shield geomagnetism of about 30 microtesla (μT). That is. In particular, it is an object of the present invention to provide a magnetic shield room having an improved joint structure of a magnetic shield member that defines a magnetic shield space.

  As a technical means for achieving the above object, there is provided a magnetic shield room which is surrounded by a magnetic shield member mainly composed of a Co-based amorphous alloy laminated member to define a magnetic shield space, and a butt end portion of the magnetic shield member At least a pair of soft magnetic material joint plates are arranged so as to straddle each other, and the pair of soft magnetic materials so that the butt end of the Co-based amorphous alloy laminated member of each magnetic shield member is sandwiched via a resin film We propose a magnetically shielded room characterized by tightening material joint plates.

  Preferably, the Co-based amorphous alloy laminated member is formed by superimposing a knitted magnetic shield material obtained by plain weaving of a Co-based amorphous alloy ribbon-shaped material, and using a material that is lapped with the resin film. To do.

  The Co-based amorphous alloy laminated member is formed by laminating a plurality of Co-based amorphous alloy ribbon-shaped materials in the ribbon width direction and laying them flat, and stacking them in the plate thickness direction, The resin film may be lapped.

  The Co-based amorphous alloy preferably has a coercive force (Hc) of 0.4 A / m or less, a saturation magnetostriction constant of 10 to the sixth power or less, and a maximum DC magnetic permeability of 10,000 or more.

  Preferably, the alloy component of the Co-based amorphous alloy has a composition formula: (Co1-xy-zFexMnyNiz) 100-ab-cMaSibBc [where M is Ti, Zr, Hf, V, Nb, Ta, Cr, At least one element selected from Mo, W, Cu, Ag, Au, Y, and a rare earth element], and x is 0 to 0.1, y is 0 to 0.1, z Is 0 to 0.2, a is 0 to 6, b is 8 to 18, c is 7 to 18, and (b + c) is 18 to 30.

  The pair of soft magnetic material joint plates are a soft magnetic material joint outer plate and the soft magnetic material joint inner plate, and each soft magnetic material joint plate is a laminated plate of a Co-based amorphous alloy laminated member and a reinforcing plate. It is preferable. In this case, it is preferable that the reinforcing plate is a nonmagnetic stainless steel plate.

  It is preferable that the Co-based amorphous alloy is heat-treated so that the maximum temperature is 300 ° C. to 480 ° C.

  As the magnetic shield member, a knitted magnetic shield material obtained by plain weaving a Co-based amorphous alloy ribbon-shaped material is preferably laminated and lapped (WRAP), but specifically, for example, one ribbon-shaped Co A plurality of knitted magnetic shield materials that are plain woven using a base amorphous alloy base material like warp and the other ribbon-shaped Co base amorphous alloy base material like weft so that there is substantially no gap And heat treatment to give a maximum temperature of 300 ° C. to 480 ° C. with pressure applied in the laminating direction, to form a magnetic laminate, and then cover each side with a resin sheet, and two opposite edges In FIG. 2, the sheet is extended from the edge of the magnetic laminate, and the sheets of the extended part are joined to each other to perform lapping. The laminated body of knitted magnetic shield materials plain woven by this lapping process is sandwiched from both sides by a resin sheet. As the sheet used for the lapping treatment, a PET (polyethylene terephthalate) resin sheet or the like can be used. As a method for joining the resin sheets, various means such as joining with an adhesive or heat-pressing can be employed.

  In the magnetic shield room of the present invention, since the magnetic shield space is defined by the magnetic shield member mainly composed of the Co-based amorphous alloy laminated member, unlike the case of using an alloy having an ultrafine crystal structure, Even if some external force is applied, the mechanical strength of the alloy is large and there is almost no breakage. Even in the event of an earthquake or the like, mechanical failure hardly occurs in the amorphous alloy portion that plays the role of a magnetic shield.

  Regarding the joint structure of the magnetic shield member according to the present invention, for example, a soft magnetic material joint outer plate and a soft magnetic material joint inner plate are disposed so as to straddle the butted ends of the magnetic shield member, and each of the magnetic shield member Co The butt end portion of the base amorphous alloy laminated member is clamped by a nonmagnetic bolt member penetrating the soft magnetic material joint outer plate and the soft magnetic material joint inner plate so as to be sandwiched through the resin film. By doing in this way, even if it tightens with a nonmagnetic bolt member, it is prevented that a resin film becomes a buffer material and a Co group amorphous alloy lamination member is damaged. As this resin film, the resin film used in the lapping process can be used as it is. Since the soft magnetic material joint outer plate and the soft magnetic material joint inner plate are passed through and tightened with a non-magnetic bolt member, the Co-based amorphous alloy laminated member disposed in each magnetic shield member, There is no need to drill a bolt hole, and there is no fear of damage to the Co-based amorphous alloy laminated member that often occurs due to the bolt hole formation.

  Permalloy plates can be used for the soft magnetic joint outer plate and the soft magnetic joint inner plate, but in terms of magnetic shielding properties and weight reduction, a Co-based amorphous material that has been perforated before heat treatment It is preferable to use a laminated plate of an alloy laminated member and a nonmagnetic reinforcing plate.

  As the nonmagnetic reinforcing plate, a nonmagnetic stainless steel plate or an aluminum plate can be used, but it is preferable to use a nonmagnetic stainless steel plate having high mechanical strength.

  The magnetic shield room of the present invention is excellent in mechanical strength, lightweight, excellent in magnetic shield characteristics, and can attenuate geomagnetism of about 30 microtesla (μT) by at least 50 dB. Even when an external force such as an earthquake is applied, the magnetic characteristics of the Co-based amorphous alloy laminated member are hardly deteriorated. A soft magnetic material joint outer plate and a soft magnetic material joint inner plate are arranged so as to straddle the butt ends of the magnetic shield members, and the butt ends of the Co-based amorphous alloy laminated members of each magnetic shield member are resin films. And is tightened with a non-magnetic bolt member penetrating the soft magnetic material joint outer plate and the soft magnetic material joint inner plate, so that the resin film serves as a buffer material and becomes a Co-based amorphous alloy. Damage to the laminated member is prevented. Moreover, it is not necessary to make a bolt hole for the Co-based amorphous alloy laminated member disposed in each magnetic shield member. Since both the soft magnetic material joint outer plate and the soft magnetic material joint inner plate conduct the magnetic flux, the magnetic resistance at the butt portion of the magnetic shield member is small and the magnetic shield effect is large.

  One of the features of the present invention is that a Co-based amorphous alloy is used as a magnetic material for shielding geomagnetism of about 30 microtesla (μT). Magnetic materials for shielding magnetism include silicon steel plate, permalloy, Fe-based amorphous alloy, Co-based amorphous alloy, and soft magnetic Fe-based alloy having an ultrafine crystal structure with a crystal grain size of 100 nm or less There are soft magnetic Co-based alloys with ultrafine crystal structures with crystal grain sizes of 100 nm or less, but silicon steel plates and Fe-based amorphous alloys shield low-frequency magnetism or static magnetism of 1 kHz or less. Therefore, since the magnetic permeability is too small, it is necessary to use a plate having a considerably large thickness, which makes the weight too large and is not practical.

  The permeability of soft magnetic alloys with an ultrafine crystal structure with crystal grains of 100 nm or less is considerably larger than that of silicon steel plates and Fe-based amorphous alloys, and shields low-frequency magnetism or static magnetism of 1 kHz or less. Although it is a preferable material in terms of magnetic properties, an alloy having an ultrafine crystal structure is obtained because it undergoes a heat treatment step at a temperature close to the crystallization temperature in order to produce an amorphous alloy ribbon by crystallization. The mechanical strength is relatively weak and it is easily broken by external force. In the case of an earthquake or the like, the alloy having an ultrafine crystal structure may break the material even if it does not appear to have an influence.

  Permalloy has a problem that the magnetic characteristics are extremely deteriorated due to an external force applied during processing, and that the magnetic characteristics are greatly deteriorated when an external force due to an earthquake or the like is applied to the magnetic shield room. In order to recover the characteristics of the permalloy plate having deteriorated magnetic characteristics, it is necessary to take measures such as heat treatment again. In addition, the magnetic shield room using a permalloy plate requires a permalloy thickness of about 1 mm or more, and even a magnetic shield room with a size of about 2 m × 2 m × 2 m sometimes reaches a weight of 1 ton or more. There is a problem of end.

  A magnetic laminate used in a large-volume magnetic shield room that uses a magnetocardiograph for checking the health of the heart has a large area and a necessary plate thickness (for example, 320 μm). However, at present, the ribbon-shaped Co-based amorphous alloy is long (for example, 30,000 m), but the ribbon width is about 200 mm at the maximum and the plate thickness is about 20 μm to 50 μm at the maximum. You can only get things. In order to obtain a Co-based amorphous alloy laminated member having a large area and a necessary plate thickness, a large number of ribbons are arranged in the width direction and the end portions in the width direction are joined to form a large area thin plate. Therefore, it is necessary to devise such that these thin plates are superposed in multiple layers and the layers are bonded with a resin or the like.

  As another means, for example, if a plain ribbon weave is used as a cast or heat-treated long ribbon spool of Co-based amorphous alloy, it has a thickness about twice that of the ribbon. Then, a knitted magnetic shield material having a wide width as desired and a long length (for example, 30,000 m) is obtained. A dedicated knitting machine based on the same principle as that of a normal cloth weaving machine can efficiently produce a knitted magnetic shield material. Since the elasticity of the Co-based amorphous alloy is greater before heat treatment, it is made into a knitted magnetic shield material by a special loom, and then laminated on a tray and heat treated (usually at 300 to 480 ° C, 1-2 It is good to heat for a long time. After the heat treatment, the obtained laminate is wrapped (WRAP) with a sheet of resin or the like, and the extended portion of the sheet is subjected to thermocompression bonding or the like. By performing these operations continuously, a long magnetic shield member can be manufactured. When constructing a magnetic shield room, a long magnetic shield member can be cut and used. By performing the heat treatment, the maximum direct-current permeability of the Co-based amorphous alloy can be further increased, and the magnetic shield performance can be further improved.

  In order to increase the efficiency of the magnetic shield, when weaving plainly, use a plurality of ribbons as one warp, and similarly use a plurality of ribbons as the other weft. By knitting plain so that there is no gap, it is also possible to obtain a knitted magnetic shield member whose plate thickness is about four times or more the ribbon plate thickness. By laminating the knitted magnetic shield material thus created in the thickness direction, a magnetic laminate having a thickness 10 to 60 times the ribbon thickness can be easily obtained. After the heat treatment, resin sheets or the like are respectively disposed on both surfaces of the magnetic laminate directly or indirectly via an Al plate, for example, extending from the edges of the laminate at at least two opposite edges in the width direction, The sheets of the extension part are joined partially or entirely to form a magnetic shield member. Such a magnetic shield member has sufficient magnetic shielding characteristics when used for a wall material of a magnetic shield room. When the magnetic shield members are jointed, a soft magnetic material joint outer plate and a soft magnetic material joint inner plate are arranged so as to straddle the butted ends of the magnetic shield members, and Co is wrapped on each magnetic shield member. The butt end of the base amorphous alloy laminated member is clamped with a non-magnetic bolt member penetrating the soft magnetic joint outer plate and the soft magnetic joint inner plate so as to be sandwiched through the resin film used for the lapping process. Can be jointed.

  As the magnetic laminate, it is preferable that the Co-based amorphous alloy ribbon material has a multilayer structure of 15 layers or more in order to obtain sufficient magnetic shield characteristics. Compared with the permalloy magnetic shield plate, the magnetic laminate of the present invention formed by superimposing Co-based amorphous alloy ribbon material exhibits a magnetic shielding effect superior to that of the permalloy magnetic shield plate while being lightweight. Can do. The same situation applies when a magnetic shield member incorporating a magnetic laminate for defining a magnetic shield space is arranged in multiple layers as a wall material to maximize the magnetic shield effect. By combining a lightweight metal material such as aluminum as a framework member, the entire magnetic shield room can be reduced in weight.

  When multiple layers of magnetic laminates that define the magnetic shield space are arranged as wall materials, for example, foamed polystyrene is applied to the gaps between the walls to increase the mechanical strength of the magnetic shield room. The air conditioning efficiency of the room interior space can be increased. By setting the total number of laminated Co-based amorphous alloy ribbon materials arranged in the wall material to 30 or more, the geomagnetism of about 30 microtesla (μT) can be easily attenuated by at least 50 dB. In a magnetic shield room required for magnetoencephalographs and other devices that require higher shield efficiency (performance), increase the number of layers to more than 30 layers, or use multiple shield arrangements of three or more layers. Thus, it is possible to obtain the necessary shielding efficiency (performance), and such a method is possible by utilizing the present invention.

Hereinafter, embodiments of the present invention will be further described with reference to the drawings.
FIG. 1 is a partial cross-sectional perspective view showing a joint portion of a magnetic shield member of a magnetic shield room according to the present invention, in which a heat-treated Co-based amorphous alloy laminated member 11 is lapped with a resin film 12. A soft magnetic permalloy alloy joint outer plate 41 and a soft magnetic permalloy alloy joint inner plate 42 are arranged on the upper and lower surfaces of the butted ends of the shield member 1 and the magnetic shield member 10, and a nonmagnetic stainless bolt 31 and a nonmagnetic stainless nut. By spiraling 32, the magnetic shield member 1 and the magnetic shield member 10 are clamped and clamped by the outer plate 41 and the inner plate 42. Since the resin film 12 used for the lapping process is interposed between the Co-based amorphous alloy laminated member 11 and the non-magnetic stainless bolt 31 or the non-magnetic stainless nut 32, the strength is slightly reduced by heat treatment. It is possible to prevent the base amorphous alloy laminated member 11 from being broken by mechanical stress generated by tightening screw parts such as the nut 32 and the bolt 31. A magnetic shield space is formed by pasting the jointed magnetic shield members as walls, floors, and ceiling materials. By using nonmagnetic stainless bolts and nonmagnetic stainless nuts for the joints of these magnetic shield members, magnetic leakage at the joints of the magnetic shield members is prevented, while soft magnetic materials such as permalloy alloys are used on the joint inner plate and joint outer plate. By using this, the magnetic resistance at the joint can be reduced and the magnetic shielding effect can be enhanced.

  FIG. 2 is a schematic cross-sectional view showing a joint portion where the magnetic shield members of the magnetic shield room according to the present invention intersect at right angles. The heat-treated Co-based amorphous alloy laminated members 52 and 62 are made of resin films 55 and 65, respectively. A soft magnetic joint outer plate 90 and a soft magnetic joint inner plate 80 are disposed on the outer and inner surfaces of the butt end portions of the magnetic shield member 5 and the magnetic shield member 6 that have been lapped, and a nonmagnetic stainless bolt 301 and a nonmagnetic stainless nut 302 are provided. By spiraling, the magnetic shield member 5 and the magnetic shield member 6 are clamped and clamped by the outer plate 90 and the inner plate 80. As the soft magnetic joint outer plate 90 and the soft magnetic joint inner plate 80, a soft magnetic material having a structure in which Co-based amorphous alloy laminated members 82 and 92 are sandwiched by permalloy alloy reinforcing plates 83 and 84 or the like is used. . Since the resin films 55 and 65 used for the lapping process are interposed between the nonmagnetic stainless steel bolt 301 or the nonmagnetic stainless steel nut 302, the Co-based amorphous alloy laminated member 52 whose strength is slightly decreased by the heat treatment. , 62 can be prevented from being broken by mechanical stress generated by tightening screw parts such as the nut 302 and the bolt 301. The magnetic shield member thus jointed is used at the corner of the room to form a magnetic shield space together with the magnetic shield member that is attached as a wall, floor, or ceiling material. By using non-magnetic stainless bolts and non-magnetic stainless nuts for the joints of these magnetic shield members, magnetic leakage at the joints of the magnetic shield members is prevented, while the joint inner plate and joint outer plate are made of Co-based amorphous By using a soft magnetic material formed by sandwiching a porous alloy laminated member with a reinforcing plate such as a permalloy alloy or nonmagnetic stainless steel, the magnetic resistance at the joint can be reduced and the magnetic shielding effect can be enhanced.

  The assembly process of the magnetic shield room can be further simplified by fixing the magnetic shield member to a lightweight metal frame member made of aluminum and creating a large number of magnetic shield panel members for the magnetic shield room. By arranging the magnetic shield members double in the wall thickness direction and, for example, applying a foamed polystyrene plate between them, the mechanical strength of the magnetic shield panel can be increased and the heat insulation effect can be increased without increasing the weight. In addition, the magnetic shield effect can be further enhanced. When the magnetic shield members are arranged in a double layer, the gap in the wall thickness direction is preferably 10 mm to 200 mm, so that the efficiency of the magnetic shield can be remarkably increased.

  A magnetic shield space is defined by these magnetic shield members, and the inner peripheral wall is preferably finished with a decorative material. The magnetic shield room using the present invention can be formed by a construction method in which a room skeleton is formed with a framework member of a light metal material made of aluminum like an ordinary house, and then the magnetic shield member is bonded to the skeleton.

  A magnetocardiograph or magnetoencephalograph is installed in the magnetic shield space of the magnetic shield room formed in this way, the magnetic field generated from the heart or brain is measured using SQUID, and the distribution of current flowing through the heart or brain is used as an image. The health state of the living body can be grasped by means such as capturing. One side of the magnetic shield room is provided with a door (not shown) used for entering and exiting people or carrying medical equipment.

  As the light metal frame member, an aluminum material is suitable, but other light metal materials such as a magnesium material can also be used. It is the same as ordinary construction that weight can be reduced without reducing strength by making the frame member hollow. Light metal frame members increase the overall strength of the magnetic shield room.

  After forming the skeleton of the magnetic shield room with the frame member, the magnetic shield member of the present invention can be bonded to form the inner wall and the outer wall to define the magnetic shield space. Alternatively, a frame member can be used to form a frame of a panel member, which is prepared in advance and a magnetic shield member is bonded to both sides of the panel to form a magnetic shield room. In order to protect the outer surface of the magnetic shield room and provide a clean feeling, it is preferable to arrange the decorative plate as an outer surface finishing material.

  Ribbon-shaped Co-based amorphous alloy base materials generally have a thickness of 8 μm to 80 μm, usually 16 μm to 40 μm, by injecting a melt of Co-based alloy onto the surface of a rapidly rotating cooling roll. Obtained as an amorphous alloy. The width is generally 5 mm to 200 mm. The Co-based amorphous alloy sheet has a magnetic permeability of about 80,000 or more at 1 kHz. The alloy composition is preferably the composition formula: (Co1-xy-zFexMnyNiz) 100-ab-cMaSibBc [where M is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Cu, Ag. , Au, Y, at least one element selected from rare earth elements], and x is 0 to 0.1, a is 0 to 6, and (b + c) is 18 to 30, y is 0 to 0.2, b is 8 to 18, z is 0 to 0.13, and c is 7 to 18. The Co-based amorphous alloy sheet used in the present invention has no crystal grain boundaries and has a completely amorphous metal structure. The Co-based amorphous alloy base material has a coercive force (Hc) of 0.001 Oe or less, a magnetostriction of 10 minus 6 or less, and a DC maximum permeability of 10,000 or more. A shield member is obtained.

  The wall of the magnetic shield room using the present invention is provided with a through hole or a vent hole, and can take in air from the outside or pass cables for electronic devices. The through hole can also be formed by inserting a tube formed by rolling the magnetic shield member of the present invention. In this way, air can be taken in and cables can be passed without deteriorating the magnetic shield rate.

  A magnetic shield member using a Co-based amorphous alloy instead of permalloy that has been used in the prior art generally depends on the laminated structure, but generally has a magnetic permeability of 80 μm to 300 μm and a high magnetic permeability. Become. This magnetic shield member is lighter than Permalloy, has a high magnetic shield rate, and does not deteriorate in magnetic properties or mechanical strength even when an external force is applied. Even if you encounter the movement of a magnetic shield room or an earthquake, it's okay. It is easy to bend and cut, and can be handled like wallpaper.

In the prior art, a magnetic shield space was defined using a permalloy plate as a main member of the wall structure. However, in the present invention, a light metal material such as aluminum is used as a frame member of the magnetic shield room, and the magnetic shield is used. If the magnetic shield member of the present invention is used after defining the space, a magnetic shield room can be easily constructed.
Since the Co-based amorphous alloy ribbon is multi-layered, it is possible to realize a magnetic shield rate equal to or higher than that of a permalloy having a thickness of about 1 mm. The number of Co-based amorphous alloy ribbons to be stacked is preferably 10 or more, and more preferably a multilayer structure having 20 to 50 layers.

  The magnetic shield room using the permalloy of the prior art as the magnetic shield plate is heavy and difficult to assemble and move, but the magnetic shield room using the present invention is lightweight and adapts to changing the installation location in the hospital it can. Further, it is strong against external forces in terms of magnetic characteristics and mechanical strength, and its manufacturing method can be simplified. The installation of the through-hole connecting the equipment installed inside and the outside or the installation of the door are also easy to cut, so the construction is easy. Since the assembly of the room with bolts, adhesives, etc. is easy, the industrial applicability is high. Since the magnetic shield room of the present invention is lightweight, the floor strength is not so necessary, so that the option of selecting the structure and material is expanded.

The partial cross-section perspective schematic diagram which shows the magnetic shield member joint part of the magnetic shield room of this invention. The cross-sectional schematic diagram which shows the joint part which the magnetic shielding member of the magnetic shielding room of this invention crosses at right angle.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Magnetic shield member, 3 ... Nonmagnetic stainless steel bolt, 11 ... Co-based amorphous alloy laminated member, 12 ... Resin film, 41 ... Soft magnetic material joint board, 83 ... Reinforcement board

Claims (8)

A magnetic shield room that is surrounded by a magnetic shield member mainly composed of a Co-based amorphous alloy laminated member and defines a magnetic shield space, and at least a pair of soft magnetic materials straddling the butted ends of the magnetic shield member A magnetic shield comprising: a joint plate disposed; and the pair of soft magnetic material joint plates are clamped so as to sandwich a butt end portion of a Co-based amorphous alloy laminated member of each magnetic shield member via a resin film Room. The Co-based amorphous alloy laminated member is formed by superposing knitted magnetic shield materials obtained by plain weaving of a Co-based amorphous alloy ribbon-shaped material, and is lapped with the resin film. Item 1. A magnetic shield room according to item 1. The Co-based amorphous alloy laminated member is formed by abutting a plurality of Co-based amorphous alloy ribbon-shaped materials in the ribbon width direction and laying them flat, and stacking them in the plate thickness direction, The magnetic shield room according to claim 1, wherein the magnetic film is lapped with the resin film. 2. The magnetic shield according to claim 1, wherein the Co-based amorphous alloy has a coercive force (Hc) of 0.4 A / m or less, a saturation magnetostriction constant of 10 minus 6 or less, and a DC maximum permeability of 10,000 or more. Room. The alloy component of the Co-based amorphous alloy has a composition formula: (Co1-xy-zFexMnyNiz) 100-ab-cMaSibBc [where M is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W , Cu, Ag, Au, Y, and at least one element selected from rare earth elements], and x is 0 to 0.1, y is 0 to 0.1, and z is 0 to 0. 2. The magnetic shield room according to claim 1, wherein 0.2, a is 0 to 6, b is 8 to 18, c is 7 to 18, and (b + c) is 18 to 30. The pair of soft magnetic material joint plates are a soft magnetic material joint outer plate and the soft magnetic material joint inner plate, and each soft magnetic material joint plate is a laminated plate of a Co-based amorphous alloy laminated member and a reinforcing plate. The magnetic shield room according to claim 1. The magnetic shield room according to claim 6, wherein the reinforcing plate is a nonmagnetic stainless steel plate. The magnetic shield room according to claim 1, wherein the Co-based amorphous alloy is heat-treated at a maximum temperature of 300 ° C to 480 ° C.

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