JP2000077890A - Magnetic shielding room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lightweight magnetic shielding room having arbitrary size and shape. SOLUTION: One or a plurality of magnetic shielding sheets 9 having laminated structure, in which the film of a soft magnetic amorphous alloy having thickness of 100 μm or less and a polymer film having a thickness of 1 mm or less are laminated as a magnetic shielding material, are arranged on one surface or both surfaces of the surface of a wall material consisting of a non- magnetic substance partitioning a magnetic shielding space as a magnetic shielding material, either group of an Fe-B-Si-Cu group, a Co-Fe-Si-B group, a Co-Fe-Ni-Si-B group or an Fe-Cu-Nb-Si-B group is used as the soft magnetic amorphous alloy, and a ultrafine crystalline structure has the magnitude of the crystal grain boundary of the soft magnetic amorphous alloy of 100 nm or less. Accordingly, the magnetic shielding room can be manufactured at a low cost in a short time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to various inspection devices,
TECHNICAL FIELD The present invention relates to a magnetic shield room used for a physical and chemical instrument, a magnetic field measuring apparatus, particularly a biomagnetic field measuring apparatus for measuring a weak magnetic field generated from a living body.

[0002]

2. Description of the Related Art Conventionally, a magnetic shield room for reducing the influence of external magnetic noise and shielding an external magnetic field measures a weak magnetic field generated from a living body in addition to an electron microscope using an electron beam, an electronic drawing apparatus, and the like. It is used for a biomagnetic field measuring device and the like. Also, a magnetic resonance imaging device (MRI)
Uses a magnetically shielded room to shield the magnetic field from the device from leaking to the outside. The structure of these magnetically shielded rooms is described in, for example, D.S. Cohen,
J. APPl. Phys. , 1295-1296, 38
(1967); O. Kelha, et. al. , I
EEE Trans. Magn. , 260-270, 1
8 (1982).

[0003] The basic structure of a magnetic shield room is as follows.
A magnetically shielded space is defined by fastening a permalloy plate of high permeability of an Fe-Ni alloy containing 35 to 80% of Ni to a box-shaped structural frame made of aluminum, stainless steel or the like without any gap. The permalloy laid on the wall was used as the first layer, and several layers were further superposed to further increase the magnetic shielding rate. Usually, two layers of permalloy having a thickness of 1 mm are stacked to have a thickness of 2 mm as a first layer, and further, a second layer of permalloy is provided at an interval of 10 mm or more. Similarly, the shielding ratio was increased by increasing the third and fourth layers. Also, in general, a thickness of 1 mm to
A wall made of an aluminum plate of about 10 mm was provided between layers of permalloy.

[0004]

In the structure of the magnetically shielded room, permalloy having a high magnetic permeability is used as a magnetically shielding material, and a structure surrounding the space to be magnetically shielded is employed. In the prior art, the permalloy plate is required to have a thickness of about 1 mm, and it is necessary to cut and bend parts in accordance with the assembly structure of the magnetic shield room. A large number of permalloy parts are first temporarily assembled into a magnetic shield structure, and dimensions and the like are adjusted and confirmed. When the temporary assembly is completed, it is necessary to recover the deterioration of the magnetic permeability of Permalloy that occurred during the processing of the parts, put the processed Permalloy parts into an electric furnace, heat treat them, and return the magnetic permeability to the initial magnetic permeability again. It was recovering to a near value. After a part shape processing step, a provisional assembly dimension adjustment step, and a heat treatment step, finally, an assembling operation was performed at the installation location.

However, a large number of permalloy parts are required, and the dimensions of the permalloy parts change during the heat treatment process.
At the time of reassembly, there is a problem in that the combination becomes poor, the bolt hole position for tightening is shifted, and correction processing or the like is often required. In addition, there is a problem that time and cost are significantly increased in order to freely form a magnetically shielded room having an arbitrary size and shape.

A magnetic shield room using multiple layers of permalloy has a thickness of about 1 permalloy used for each layer.
mm or more, and even a magnetically shielded room with a size of about 2m x 2m x 2m can reach a weight of about 1 ton. Further, in order to obtain a magnetic shielding rate of about 1/1000, a single-layer structure is not sufficient and a multilayer structure is necessary. A general magnetic shield room weighs several tons, and the installation place is restricted. If there is a problem that often.

An object of the present invention is to solve the above-mentioned problems of the prior art, and to provide a magnetically shielded room capable of manufacturing a lightweight magnetically shielded room having an arbitrary size and shape in a short time and at low cost. Is to do.

[0008]

According to the magnetic shield room and the method for manufacturing the magnetic shield room of the present invention, instead of permalloy used in the prior art, a metal film such as a polymer film, conductive copper or aluminum is used. , Thickness 1
A magnetic shield sheet having a laminated structure in which a soft magnetic amorphous alloy having a high magnetic permeability of not more than 00 μm was bonded.
This laminated magnetic shield sheet has a thickness of several hundred μm.
m, which is easy to bend and cut, and can be handled like ordinary wallpaper. Unlike a permalloy, the magnetic permeability of a soft magnetic amorphous alloy does not deteriorate even with a slight deformation as in the case of permalloy.

In the prior art, the magnetic shield space is defined by using a permalloy plate as a main part of the wall structure. In the present invention, however, the main structure of the magnetic shield room is made of a non-magnetic material such as aluminum. The magnetic shield sheet was simply attached to the wall of the main structure. With this structure, the degree of freedom of the shape of the magnetic shield room is increased, and if the magnetic shield space of any shape is defined by a non-magnetic material, the magnetic shield sheet can be attached only to the magnetic shield space. A room can be made. By forming the magnetic shield sheet into multiple layers, it is possible to realize a magnetic shield rate equivalent to that of a permalloy having a thickness of about 1 mm. Simply adhering a plurality of magnetic shield sheets saturates the magnetic shielding rate. Therefore, the number of sheets that are closely adhered as the first layer is limited to 10 sheets or less, and further, a gap material having a thickness of 10 mm or more is used. A second-layer magnetic shield sheet is further laminated with the gap wall material interposed therebetween.

In the present invention, Fe-B-Si-Cu based, C
o-Fe-Si-B system, Co-Fe-Ni-Si-B
A thin film of a soft magnetic amorphous alloy having an ultrafine crystal structure having a crystal grain size of 100 nm or less, which is made of any one of a Fe-Cu-Nb-Si-B system and a polymer sheet, is adhered. Use a durable, flexible, high-permeability magnetic shield sheet.

In the wall of the magnetically shielded room, it is necessary to form a through hole through which a cable of an electronic device installed inside passes. The provision of this through hole lowers the magnetic shielding efficiency, so a tubular through hole made of a non-magnetic material is provided. The magnetic shield sheet was inserted into the through hole so that the open end of the cylindrical magnetic shield pipe formed by rolling the magnetic shield sheet faced inside and outside the magnetic shield room. The length of the pipe in the major axis direction was set to be at least twice the diameter so that the magnetic shield pipe had a shielding effect. Further, in order to provide a large through hole, a partition plate for fixing and partitioning the magnetic shield pipe is provided so that a large number of magnetic shield pipes having a specified length and diameter can be inserted.

Further, since the electromagnetic shielding characteristics are deteriorated by providing the through-hole, a non-magnetic and conductive metal such as aluminum or copper is used as the wall material defining the magnetic shield space and the material of the through-hole. Was. Further, a magnetic shield sheet with a metal film was used as a magnetic shield pipe provided inside the through hole. In particular, as the metal film side of the magnetic shield sheet with metal film is rounded so that the metal film side is the outer surface of the magnetic shield pipe, it can be in electrical contact with the through hole and the electromagnetic shield part of the magnetic shield room, so the whole shield room Electromagnetic shielding can be increased.

Since the structure of the magnetic shield room of the prior art cannot be freely changed due to its manufacturing method, it has been designed to have high versatility. Therefore, the magnetic shield room is designed as a magnetic shield room that matches the shape of the equipment installed inside. Did not. However, in the present invention, the floor wall material of the magnetically shielded room is connected to the measuring instrument installed in the magnetically shielded room by bolts and the like, and has a structure that is detachable and also serves as a support for the measuring instrument. The supporting floor surface of the heavy equipment that takes up space and the entire floor of the magnetically shielded room can be shared, realizing space saving.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG. 1 is a perspective view of a magnetic shield room of a first embodiment, and FIG. 2 shows a wall structure of the magnetic shield room of the first embodiment. It is sectional drawing. As shown in FIGS. 1 and 2, the magnetic shield room 1 is composed of a wall structure having a wall having a thickness of 10 cm or more, and an inner wall 2 shown by a dotted line in FIG. 1 and an outer wall shown by a solid line in FIG. 2, a magnetic shield layer 9 is provided to form a magnetic shield space in the magnetic shield room, as shown in FIG. In the magnetically shielded room, a measurement or inspection device such as an electron microscope or a biomagnetic measurement device that operates by shielding external magnetism is installed. On one side of the magnetically shielded room, a door 4 for a user of the apparatus to enter and exit is provided. The frame 5 for holding the walls and the door of the magnetically shielded room, and other configurations shown in FIG. 2 will be described in detail below.

FIG. 3 is a perspective view showing the structure of the frame for holding the walls and the door of the magnetically shielded room of the first embodiment. The frame 5 is made of hollow aluminum made of a non-magnetic material. As a material of the frame 5, in addition to aluminum, a non-magnetic metal such as stainless steel, wood, plastic or the like can be used. By making the frame 5 hollow, the magnetic shield room could be reduced in weight. In addition, a gap (interval) between the inner wall 2 and the outer wall 3 can be defined by the frame 5, and a magnetic shield material attached to the inner wall 2 and the outer wall 3 is held.

FIG. 4 is a perspective view showing the minimum frame unit structure of the rectangular frame of the magnetic shield room of the first embodiment. FIG. 5 is a perspective view of the multi-lattice type frame of the magnetic shield room of the first embodiment. It is a perspective view which shows the minimum frame unit structure. The frame 5 for forming the basic structure of the magnetically shielded room shown in FIG. 3 can be disassembled into the minimum frame unit shown in FIGS. The frame structure of the entire magnetic shield room shown in FIG. 2 can be manufactured by connecting the minimum frame units.

The minimum frame unit shown in FIG. The magnetic shield holding panel 7 is attached from both sides so as to match the size of the minimum surface formed by the frame 6. The minimum frame unit shown in FIG. 5 has a structure of a multi-lattice type frame 8, and the magnetic shield holding panel 7 is attached to each minimum surface or each maximum surface formed by each lattice. The space as the magnetically shielded room is defined by combining the wall materials including the minimum frame units described above. After the basic structure of the magnetic shield room is completed, the magnetic shield material is attached to both the inner and outer walls.

FIG. 6 is a sectional view showing the detailed structure of the wall of the magnetically shielded room of the first embodiment. The magnetic shield holding panel 7 is used for the inner wall and the outer wall, and the frame 5 is used.
Attached to. Using a magnetic shield sheet 10 having a size of 60 cm × 60 cm, the magnetic shield sheet 10 was bonded to the surface of the magnetic shield holding panel 7 without any gap. Panel 7 for holding magnetic shields on inner and outer walls
In this case, three sheets are bonded to each other, but a large number of sheets can be further bonded to increase the magnetic shielding ratio. As a method of laminating the magnetic shield sheet 10, take about 1cm of glue allowance,
Adhere so that adjacent magnetic sheets overlap in the peripheral part. Since the magnetic shield sheet 10 is thin, a frame 11 for holding the magnetic shield sheet made of a non-magnetic metal or plastic material is applied as shown in FIG.
Tightened. Finally, a decorative panel 13 was attached to protect the inner and outer surfaces of the magnetically shielded room and to provide a clean feeling.

FIG. 7 is a sectional view showing the structure of the magnetic shield sheet of the first embodiment. One magnetic shield sheet 10 has a multilayer structure, the soft magnetic amorphous alloy layer 20 has a thickness of 20 μm, and a specific maximum magnetic permeability of 5000.
0 or more of Fe-Cu-Nb-Si-B system (Fe73.
(5%, Cu 1%, Nb 3%, Si 13.5%, B 9%)
, And has an ultrafine crystal structure with a grain boundary size of 100 nm or less. A polymer film 22 having a thickness of 70 μm is attached to both surfaces of the soft magnetic amorphous alloy layer 20 by an adhesive layer 21.

When a magnetic shield material having a thickness of about 10 μm to 100 μm is used and a film having a thickness of about 20 μm to 200 μm is used, the work of attaching and bending the magnetic shield material becomes easy. In the case of the magnetic shield room where the permalloy plates of the prior art were stacked, the gap between the permalloy plates was different in each part due to deformation during heat treatment and combination, and it was difficult to completely adhere them. . However, in the present invention, since a thin sheet-shaped magnetic shield material that can be freely bent is used, uniform adhesion can be ensured by adhesion.

FIG. 8 is a sectional view showing the structure of the magnetic shield sheet with copper foil of the first embodiment. In addition to the magnetic shield sheet shown in FIG. 7, one side of the polymer film 22 shown in FIG. 7 may be replaced with a copper foil 23 as shown in FIG. By using the copper foil-attached magnetic shield sheet 24, the frame 5, the minimum frame unit (rectangular frame 6, the multi-lattice frame 8), and the magnetic shield holding panel 7 can be used without using copper. By using the copper foil 23 of the magnetic shield sheet with a foil, an electromagnetic shielding function can also be obtained. That is, the frame 5 and the minimum frame unit can be manufactured using wood.

FIG. 9 is a front view showing the structure of a through-hole or a vent provided on the wall of the magnetic shield room of the first embodiment. FIG. 10 is a front view showing the structure of the magnetic shield room of the first embodiment. It is sectional drawing which shows the structure of the through-hole or vent provided. A through-hole is formed by the through-pipe frame 30 made of copper, penetrating the inner wall and the outer wall of the magnetic shield room.

The through pipe frame 30 is provided with a copper partition plate 31 for partitioning the inside of the through pipe. The magnetic shield pipe 32 formed by rolling the magnetic shield sheet described above was inserted into each of the small sections formed by the partition plate 31. With this structure, air can be taken in from outside or a cable for electronic equipment can be passed without deteriorating the magnetic shielding rate. Further, the magnetic shield pipe 3 formed by using the magnetic shield sheet with copper foil 24 described in FIG. 8 so that the copper foil side is the outer surface of the pipe.
The copper foil of No. 2 and the partition plate 31 can be brought into electrical contact with each other to provide a function of radio wave shielding.

(Second Embodiment) FIG. 11 is a sectional view showing a wall structure of a magnetic shield room according to a second embodiment. The magnetic shield layer 9 is provided on the inner wall of the main structure of the magnetic shield room.
It has a structure to overlap.

That is, the magnetic shield layer 9 on the outer wall of the magnetic shield room shown in FIG. 2 is arranged inside the main structure of the magnetic shield room.

FIG. 12 is a sectional view showing details of the wall structure of the laminated structure of the magnetic shield room of the second embodiment. The magnetic shield sheets 10 are adhered to the entire inner wall of the main structure of the magnetic shield room such that the peripheries of the magnetic shield sheets 10 overlap. Further, the second and third sheets are multilayered so as to overlap the first magnetic shield sheet, so that the magnetic shield ratio can be further increased. This number can be any number. Second
In the third embodiment, after three sheets are stacked, the first magnetic shield layer composed of three layers is arranged by pressing with the magnetic shield gap board 40.

On the magnetic shield gap board 40,
Similarly to the first magnetic shield layer, a second magnetic shield layer composed of three layers is formed. Simply stacking the magnetic shield sheets will saturate the shielding ratio. Therefore, by using the magnetic shield gap board 40, saturation of the shielding ratio can be prevented and a high shielding ratio can be obtained. Finally, decorative panels 13 were attached to the surfaces of the inner and outer walls to protect the magnetic shield sheet. As in the first embodiment, a magnetic shield sheet 24 with copper foil can be used as the magnetic shield sheet.

In assembling a magnetically shielded room according to the prior art, it is necessary to attach a magnetically shielded material to the inside and outside of the entire floor, so that a complicated process was required to make the flooring material for the magnetically shielded room. That is, when the floor area of the magnetic shield room is large, even if the magnetic shield material is attached to the inside and outside of the floor material in advance, it cannot be carried into the room due to the limitation of the size of the entrance of the room. . For this reason, in the prior art, after previously laying a magnetic shielding material on the installation location of the magnetic shield room,
Make a frame for the floor of the magnetic shield room, and finally,
The magnetic shield material inside the magnetic shield room was overlapped. That is, after assembling the floor portion, the side portion and the ceiling portion are assembled. As described above, in the prior art, the assembling process of the magnetically shielded room is complicated, and not only the material cost, but also the assembling labor is expensive and it takes a long time. The number of installations was also limited.

However, in the present invention, like a prefabricated building, a magnetic shield sheet, which is flexible and can be cut with scissors, is simply attached to a wall panel having a basic structure of a magnetic shield. Because it can be manufactured, the assembling process can be greatly shortened, and it can be easily and inexpensively manufactured.

FIG. 13 is a diagram showing a process of manufacturing a magnetically shielded room according to the prior art, and FIG. 14 is a diagram showing a process of manufacturing a magnetically shielded room according to the second embodiment.
As shown in FIG. 13, in a conventional magnetic shield room manufacturing process, a frame and a base panel which are a basic structure of a magnetic shield room using permalloy are manufactured.
Further, a permalloy rolled sheet conforming to the shape of the magnetic shield room is cut and cut in accordance with the shape of each part, and parts processing such as bending and drilling holes for mounting bolts is performed.
To confirm the dimensions of each part of Permalloy, perform temporary assembly and adjust. After the adjustment, the permalloy components are restored by the heat treatment to the magnetic permeability deteriorated by the processing.

On the other hand, as shown in FIG. 14, in the manufacturing process of the magnetic shield room of the present invention, the frame 5, the minimum frame unit (rectangular frame 6, multi-lattice frame 8), base A panel (panel frame 7 for holding a magnetic shield) and the like are manufactured. The magnetic shield sheet can be used for a basic structure of an arbitrary shape regardless of the basic structure of the magnetic shield sheet. The production is completed only by sticking the magnetic shield sheet to the basic structure and cutting unnecessary portions.

As described above, in the magnetic shield room of the present invention, the processing, provisional assembly and heat treatment of the magnetic shield, which are required in the prior art, are not required, so that the production period can be greatly reduced. Since the number of parts was reduced, the cost was significantly reduced.

(Third Embodiment) FIG. 15 is a perspective view showing a schematic configuration of a biomagnetism measuring apparatus using a shield room according to the present invention. A biomagnetometer that measures a magnetocardiogram (a magnetic field generated from the heart of an adult, a child, or a fetus) uses a plurality of magnetic sensors including a quantum interference device (SQUID). In order to remove the influence of environmental magnetic noise, magnetocardiography is performed inside the magnetically shielded room 1. Examinee 41
Lays on the bed 42 and is inspected. The SQUID and its SQUID are placed above the chest of the subject 41 and above the abdomen of the mother.
A dewar 43 filled with a liquid He and containing a plurality of magnetic sensors in which a detection coil connected to D is integrated is housed. Dewar 43 is held by support stand 44. The support stand 44 is attached to the frame of the floor panel 45 of the magnetic shield room 1 and is fixed stably.

The liquid He is continuously replenished from the automatic replenishing device 46 outside the magnetically shielded room 1 into the dewar 43 through the transformer tube 47. The output from the magnetic sensor is FLL (Flux Locked) that outputs a voltage proportional to the magnetic field strength detected by the detection coil.
(Loop) circuit 48. FFL circuit is SQ
A change in biomagnetism input to the SQUID is canceled via the feedback coil so as to keep the output of the UID constant. By converting the current passed through the feedback coil into a voltage, a voltage output proportional to a change in the biomagnetic signal can be obtained. The voltage output is amplified by an amplifier filter circuit 49, and after a frequency band is selected by a filter,
It is converted and taken into the computer 50. In the computer, various types of arithmetic processing are executed, the results of the arithmetic processing are displayed on a display, and the results are output by a printer.

FIG. 16 is a perspective view showing the structure of a Dewar support stand according to the third embodiment, and FIG. 17 is a sectional view showing a structure for mounting the lower part of the support stand.
The support stand 44 is fixed to the support stand 44 so that the dewar 43 does not drop. Further, the support stand 44 is integrated with the floor panel 45 of the magnetically shielded room so that the dewar 43 does not vibrate or shift.
It is firmly and detachably fixed to the floor panel 45. As shown in FIG. 17, a pedestal portion 60 of the support stand 44,
The frame 5 in the magnetically shielded room is a support bolt 61
It is connected and fixed so that it can be detached firmly. Support bolt 6
In order to allow the support bolts 60 to pass through, holes are formed in the wall material of the floor of the magnetic shield room and the magnetic shield sheet so that the support bolts 60 can pass therethrough. As shown in FIG. 16, since the floor area of the magnetically shielded room is sufficiently large, the pedestal portion 60 for fixing the support stand 44 to the floor can be small. Therefore, the space in the magnetically shielded room can be widely used.

The magnetic shield room of the present invention is a magnetic shield room in which a space is surrounded by a high magnetic permeability material having a relative maximum magnetic permeability of 10,000 or more, and is made of wood, plastic, aluminum, which defines the magnetic shield space. A film of a soft magnetic amorphous alloy having a high magnetic permeability and a thickness of 100 μm or less and a polymer film having a thickness of 1 mm or less are bonded to one or both surfaces of a wall material of a non-magnetic material such as copper as a magnetic shielding material. One or more sheets of magnetic shield sheet having a laminated structure, for example,
Deploy.

The magnetic shield room of the present invention is a magnetic shield room in which a space is surrounded by a high magnetic permeability material having a relative maximum magnetic permeability of 10,000 or more. , Aluminum, copper and other non-magnetic wall material, toward the inside of the magnetic shield space, on the surface of the non-magnetic wall material, a plurality of layers, for example, from the magnetic shield sheet placed and attached A first magnetic shield layer, a gap wall material that forms a gap (interval) with a nonmagnetic material having a thickness of 10 mm or more, and a plurality of magnetic shields that are stacked, for example, adhered and arranged on the gap wall material. A second magnetic shield layer comprising a soft magnetic amorphous alloy having a high magnetic permeability and a thickness of 100 μm or less; Having a layered structure by bonding the following polymer film 1mm is. Furthermore, the magnetic shield room of the present invention has the following features.

(1) As a soft magnetic amorphous alloy, F
e-B-Si-Cu system, Co-Fe-Si-B system, Co
-Fe-Ni-Si-B system, Fe-Cu-Nb-Si-
A magnetic shield sheet having an ultrafine crystal structure in which the size of the crystal grain boundary of the soft magnetic amorphous alloy is 100 nm or less is used.

(2) At least one magnetic shield sheet has a thickness of 1 mm on one side of the soft magnetic amorphous alloy film.
A magnetic shield sheet with a metal film having a multilayer structure in which the following polymer films are bonded together, and the other of the soft magnetic amorphous alloys is bonded to a metal foil having a thickness of 100 μm or less such as copper or aluminum having conductivity.

(3) A magnetic shield pipe in which a tubular through hole made of a non-magnetic material such as wood, plastic, aluminum, or copper penetrates an arbitrary wall, and a magnetic shield sheet is rolled into the inside of the through hole to form a cylindrical shape. The magnetic shield pipe is arranged such that both open ends of the magnetic shield pipe face the inside and outside of the magnetic shield room, and the length of the magnetic shield pipe in the major axis direction is at least twice as large as the diameter. One or more of them are inserted into the through holes.

(4) A partition plate is disposed inside the through hole, and a magnetic shield pipe is disposed in a space defined by the partition plate.

(5) A non-magnetic and conductive metal such as aluminum or copper is used as a wall material defining the magnetic shield space and a material of the through hole, and a magnetic shield pipe provided inside the through hole is used. A magnetic shield sheet with a metal film is used, and the magnetic shield sheet with a metal film is rounded so that the metal film side is the outer surface of the magnetic shield pipe, and is in electrical contact with the through hole. That is, a non-magnetic and conductive metal is used as the material of the wall material that defines the magnetic shield space and the material of the through-hole that penetrates the non-magnetic wall material, and the soft magnetic amorphous alloy film of the magnetic shield sheet is used. Instead of a polymer film on one side, using a magnetic shield sheet with a metal film formed by bonding a conductive metal film, the outer surface was formed to be the metal film of the magnetic shield sheet with a metal film. The magnetic shield pipe is arranged inside the through hole, and the through hole and the metal film are in electrical contact.

(6) The floor wall material of the magnetically shielded room can be connected to and detached from a measuring device installed in the magnetically shielded room by bolts or the like, and the floor wall material also serves as a support for the measuring device. That is, a part of the device installed in the magnetic shield room is detachably fixed to the floor wall material having the performance of the magnetic shield in the magnetic shield room. For example, a support stand for fixing a dewar storing a plurality of magnetic sensors of a biomagnetic field measuring device to a floor wall material having the performance of a magnetic shield in a magnetic shield room is integrated with a floor panel of the magnetic shield room. In addition, it is firmly detachably fixed.

Further, the magnetic field measuring apparatus of the present invention has a built-in magnetometer having a detection coil for detecting a magnetic field emitted from an inspection object and a SQUID, a display means for displaying the strength of the detected magnetic field, and a magnetometer. Holding means for holding the dewar, an object to be inspected, and the holding means are arranged inside the magnetically shielded room, and a part of the holding means is detachably fixed to the floor of the magnetically shielded room, and the floor of the magnetically shielded room Is characterized by being constituted by a magnetic shield material using one or more magnetic shield sheets in which a polymer film is superposed on both surfaces of a soft magnetic amorphous alloy film, and at least one sheet The magnetic shield sheet is characterized in that a conductive metal foil is bonded in place of the polymer film on one side of the soft magnetic amorphous alloy film. The configurations of (1) and (2) above are used as the configurations of the soft magnetic amorphous alloy film and the polymer film. With this magnetic field measurement device, the magnetic shield room can be manufactured in a short time at a low cost and with a simple configuration, and the holding means for holding the dewar with a built-in magnetometer can be attached to and detached from the floor of the magnetic shield room. In particular, the configuration is suitable for a magnetically shielded room used in a biomagnetic field measuring apparatus for measuring a weak magnetic field generated from a living body.

[0045]

As described above, with the structure of the magnetic shield room of the present invention, the number of parts can be reduced, the manufacturing process can be simplified, the assembling time is short, and an inexpensive shield room can be provided. In addition, the design of the components required for the magnetic shield, which has conventionally taken the most trouble in designing, can be simplified, and it is only necessary to attach the magnetic shield material, so that a magnetic shield room having a free shape can be designed.

[Brief description of the drawings]

FIG. 1 is a perspective view of a magnetic shield room according to a first embodiment of the present invention.

FIG. 2 is a sectional view showing the wall structure of the magnetically shielded room according to the first embodiment of the present invention.

FIG. 3 is a perspective view showing a structure of a frame of a magnetic shield room according to the first embodiment of the present invention.

FIG. 4 is a perspective view showing a minimum frame unit structure of a rectangular frame of the magnetic shield room according to the first embodiment of the present invention.

FIG. 5 is a perspective view showing a minimum frame unit structure of the multi-lattice frame of the magnetic shield room according to the first embodiment of the present invention.

FIG. 6 is a sectional view showing a detailed structure of a wall of the magnetic shield room according to the first embodiment of the present invention.

FIG. 7 is a sectional view showing the structure of the magnetic shield sheet according to the first embodiment of the present invention.

FIG. 8 is a sectional view showing the structure of the magnetic shield sheet with copper foil according to the first embodiment of the present invention.

FIG. 9 is a front view showing the structure of a through hole provided in the wall of the magnetic shield room according to the first embodiment of the present invention.

FIG. 10 is a sectional view showing the structure of a through hole provided in the wall of the magnetically shielded room according to the first embodiment of the present invention.

FIG. 11 is a sectional view showing a wall structure of a magnetically shielded room according to a second embodiment of the present invention.

FIG. 12 is a sectional view showing details of a wall structure of a magnetic shield room according to a second embodiment of the present invention.

FIG. 13 is a view showing a manufacturing process of a magnetically shielded room according to a conventional technique.

FIG. 14 is a diagram showing a manufacturing process of the magnetically shielded room according to the second embodiment of the present invention.

FIG. 15 is a perspective view showing a schematic configuration of a biomagnetism measuring apparatus using a shield room according to a third embodiment of the present invention.

FIG. 16 is a perspective view showing a configuration of a Dewar support stand according to a third embodiment of the present invention.

FIG. 17 is a cross-sectional view showing a structure of attaching a lower portion of a support stand according to a third embodiment of the present invention.

[Explanation of symbols]

1 ... magnetic shield room, 2 ... inner wall, 3 ... outer wall, 4 ...
Door: 5: Frame, 6: Rectangular frame, 7: Panel for holding magnetic shield, 8: Multi-lattice frame, 9: Magnetic shield layer, 10: Magnetic shield sheet, 11: Frame for holding magnetic shield sheet, 12: Panel Tightening screws, 13: decorative panel, 20: soft magnetic amorphous alloy layer, 21: adhesive layer, 22: polymer film, 23: copper foil, 24: magnetic shield sheet with copper foil, 30: through pipe frame, 31: partition plate , 32 ... magnetic shield pipe, 4
0: magnetic shield gap board, 41: subject, 42
... bed, 43 ... dewa, 44 ... support stand, 45 ...
Floor panel, 46: automatic replenishing device, 47: transfer tube, 48: FLL circuit, 49: amplifier filter circuit, 50: computer, 60: base of support stand, 61
... support bolts.

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Akihiko Kamtori 1-280 Higashi Koigakubo, Kokubunji-shi, Tokyo Inside the Central Research Laboratory, Hitachi, Ltd. In the Measurement Instruments Division (72) Inventor Hiroyuki Suzuki 882 Ma, Hitachinaka-shi, Ibaraki Pref.Hitachi, Ltd.Measurement Equipment Division (72) Inventor Shoji Kondo 882-Homo, Hitachinaka-shi, Ibaraki Hitachi, Ltd. F term in business division (reference) 2G017 AA01 AC01 AD32 4C027 AA10 CC00 FF01 FF02 HH02 HH03 KK00 KK01 KK03 5E321 AA42 AA44 AA45 BB25 BB44 BB55 CC16 GG05 GG07

Claims (10)

[Claims] A magnetic shield material is provided on one or both sides of the surface of a non-magnetic wall material defining a magnetic shield space,
A film of a soft magnetic amorphous alloy having a thickness of 100 μm or less;
A magnetic shield room, wherein one or more magnetic shield sheets having a laminated structure in which a polymer film having a thickness of 1 mm or less is laminated are arranged. 2. A non-magnetic wall material defining a magnetic shield space, and a plurality of magnetic shield sheets arranged on the surface of the non-magnetic wall material toward the inside of the magnetic shield space. First magnetic shield layer and a thickness of 10 m
and a second magnetic shield layer comprising a gap wall material forming a gap with m or more non-magnetic materials, and the magnetic shield sheet disposed on the gap wall material in a plurality of layers. A magnetic shield room, wherein the magnetic shield sheet has a laminated structure in which a soft magnetic amorphous alloy film having a thickness of 100 μm or less is bonded to a polymer film having a thickness of 1 mm or less. 3. The magnetically shielded room according to claim 1, wherein the soft magnetic amorphous alloy is Fe-B-Si-Cu, Co-Fe-Si-B.
System, Co-Fe-Ni-Si-B system, Fe-Cu-Nb
A magnetic shield room, characterized in that the soft magnetic amorphous alloy has an ultrafine crystal structure having a crystal grain size of 100 nm or less, using any one of Si-B based systems. 4. The magnetic shield room according to claim 1, wherein at least one magnetic shield sheet is made of a conductive material instead of the polymer film on one side of the soft magnetic amorphous alloy film. A magnetic foil having a thickness of 100 μm or less. 5. The magnetically shielded room according to claim 1, wherein the non-magnetic wall material penetrates.
A tubular through hole made of a non-magnetic material is provided, and a magnetic shield pipe formed from the cylindrical magnetic shield sheet inside the through hole, an open end of the magnetic shield pipe,
To face the inside and outside of the magnetic shield space,
One or more of the magnetic shield pipes are inserted into the through holes so that the length of the magnetic shield pipe in the major axis direction is at least twice the diameter of the magnetic shield pipe. Magnetic shield room. 6. The magnetic shield room according to claim 5, wherein a partition plate is disposed inside the through-hole, and the magnetic shield pipe is disposed in a space defined by the partition plate. Magnetic shield room. 7. The magnetic shield room according to claim 1, wherein a wall material defining the magnetic shield space and a material of a through hole penetrating the nonmagnetic wall material are non-magnetic materials. A magnetic shield with a metal film formed by bonding a conductive metal film instead of the polymer film on one side of the soft magnetic amorphous alloy film of the magnetic shield sheet using a magnetic and conductive metal Using a sheet, a magnetic shield pipe formed so that the outer surface becomes the metal film of the magnetic shield sheet with the metal film is disposed inside the through hole, and the through hole and the metal film are disposed. A magnetically shielded room, wherein the magnetically shielded room is in electrical contact. 8. The magnetically shielded room according to claim 1 or 2, wherein a part of a device installed in the magnetically shielded room is detachably fixed to a floor wall material of the magnetically shielded room. A magnetically shielded room characterized by being performed. 9. A magnetometer having a detection coil and a SQUID for detecting a magnetic field emitted from an object to be inspected, a display means for displaying the strength of the detected magnetic field, and a holding device for holding a dewar incorporating the magnetometer. Means, the inspection object, and the holding means are arranged inside a magnetically shielded room,
A part of the holding means is detachably fixed to a floor surface of the magnetic shield room, and a wall surface including the floor surface of the magnetic shield room has a polymer film laminated on both surfaces of a soft magnetic amorphous alloy film. A magnetic field measuring device comprising a magnetic shield material using one or more sheets. 10. The magnetic field measuring apparatus according to claim 9, wherein at least one of the magnetic shield sheets is a conductive metal foil instead of the polymer film on one side of the soft magnetic amorphous alloy film. A magnetic field measuring apparatus characterized by laminating a magnetic field.