JP2007311814A5 - - Google Patents

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Publication number
JP2007311814A5
JP2007311814A5 JP2007168842A JP2007168842A JP2007311814A5 JP 2007311814 A5 JP2007311814 A5 JP 2007311814A5 JP 2007168842 A JP2007168842 A JP 2007168842A JP 2007168842 A JP2007168842 A JP 2007168842A JP 2007311814 A5 JP2007311814 A5 JP 2007311814A5
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JP
Japan
Prior art keywords
neck
substrate
ngupin
neck portion
flow tee
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007168842A
Other languages
English (en)
Japanese (ja)
Other versions
JP4611348B2 (ja
JP2007311814A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007168842A priority Critical patent/JP4611348B2/ja
Priority claimed from JP2007168842A external-priority patent/JP4611348B2/ja
Publication of JP2007311814A publication Critical patent/JP2007311814A/ja
Publication of JP2007311814A5 publication Critical patent/JP2007311814A5/ja
Application granted granted Critical
Publication of JP4611348B2 publication Critical patent/JP4611348B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2007168842A 2007-06-27 2007-06-27 基板支持装置、基板処理装置及び基板処理方法 Expired - Lifetime JP4611348B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007168842A JP4611348B2 (ja) 2007-06-27 2007-06-27 基板支持装置、基板処理装置及び基板処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007168842A JP4611348B2 (ja) 2007-06-27 2007-06-27 基板支持装置、基板処理装置及び基板処理方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001163031A Division JP4042350B2 (ja) 2001-05-30 2001-05-30 基板支持装置

Publications (3)

Publication Number Publication Date
JP2007311814A JP2007311814A (ja) 2007-11-29
JP2007311814A5 true JP2007311814A5 (cg-RX-API-DMAC7.html) 2008-07-03
JP4611348B2 JP4611348B2 (ja) 2011-01-12

Family

ID=38844308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007168842A Expired - Lifetime JP4611348B2 (ja) 2007-06-27 2007-06-27 基板支持装置、基板処理装置及び基板処理方法

Country Status (1)

Country Link
JP (1) JP4611348B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100991195B1 (ko) * 2008-01-14 2010-11-01 주식회사 코미코 기판 지지 유닛 및 이를 포함하는 기판 처리 장치
JP5951095B1 (ja) 2015-09-08 2016-07-13 株式会社日立国際電気 基板処理装置、半導体装置の製造方法、プログラム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2806650B2 (ja) * 1991-08-19 1998-09-30 東京エレクトロン株式会社 温度調整装置

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