JP2007298465A - Test sequence determination method, device, and program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a test sequence determination method capable of preventing a throughput of a test from getting low caused by fluctuation of a fraction defective in test items in every production lot, as to test sequence determination for a device, saying in detail, when a test for the device such as a semiconductor and a magnetic head comprises the plurality of test items. <P>SOLUTION: An individual index in the every test item is found based on the fraction defective of the test item and a test time thereof, the test items with an assigned correlation are grouped, a group index is found in a group, based on the individual indexes in the test items within the group, and the group and single test items are mixed to determine a test sequence, based on the group index of the group and the individual indexes of the test items not grouped. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  Regarding device test order determination, more specifically, in order to prevent a decrease in test throughput due to fluctuations in the defect rate for test items for each production lot when testing devices such as semiconductors and magnetic heads consists of multiple test items It relates to the optimization of the test order.

  In testing of devices manufactured in large quantities, such as semiconductor elements and magnetic head elements used in magnetic disk devices, a plurality of items are tested, and if all the test items pass, they are generally shipped as non-defective products. In such a case, a test is not performed for each test item, but a plurality of items are tested in a predetermined order for one device. Furthermore, here, a single test is applied to a plurality of test items, and a comprehensive judgment is made regardless of the pass / fail judgment result for each item. There is a method in which the test item is passed only when all the test items are passed.

  The former method is generally called a pilot test and is often performed in order to grasp device characteristics and failure factors. FIG. 8 shows a pilot test method. Since all the test items (here, the test items up to A-J) are tested regardless of whether they are good or bad, it is possible to obtain the defect rate and test time for each test item. On the other hand, the latter method is performed in a shipping test for mass-produced devices. FIG. 9 is a flowchart showing the test method. That is, when it is determined that the device is defective, the test for the device is terminated and the test for the next device is started. This has the effect of minimizing test time loss and preventing waste. However, which test item is defective depends on the production lot, and it is impossible to know in advance, and it is difficult to estimate how much test time is wasted.

  For example, if the first test item is determined to be defective, the test time after that can be saved, but if the last test item is determined to be defective, the previous test item is determined. The time required for is wasted. If it is known that the last test item is defective, the test item is tested first, so that waste of test time can be prevented. However, it is difficult to predict which test item is defective for each device manufacturing lot.

  For this reason, the test order is generally determined from the one with a high defect rate based on the experience of the person in charge and from the one with the short test time if the defect rate is comparable. The test order determined in this way is not changed at present unless the order is once determined. These reasons are considered to be due to the absence of an evaluation index for determining the test order based on what criteria, and the time required for determining the test order.

  In addition to the test methods described above, there is a test method in which a retest is performed on a test object when a specific test item becomes defective. This may be retested if the accuracy of the values measured in the test is subtle. In this case, for example, it is determined that the test is defective in the first test, and the subsequent test is not performed. However, when the test item is a specific test item, a retest is performed.

Proposal for automatically generating a control program that determines the test sequence and programs the inspection flow based on the failure frequency measured for each test item and the time required for the test as a method for automatically determining the optimal test sequence (For example, Patent Document 1).
JP-A-5-297065

  As described above, the test order is fixed in order from the one with the highest defect rate and the one with the smallest test time based on the experience of the tester. For this reason, when the cause of defects fluctuates depending on the production lot, it is not necessarily a rational test sequence, which is a problem. Further, no consideration has been given to the case where there is a correlation between test items in the conventional method.

  For example, when the test item A is defective, the test item B is also defective. The correlation will be described in detail with reference to FIG. FIG. 9A shows the data distribution of the test item A and the test item B, and no correlation is found in the data value of the test item B with respect to the data value of the test item A. On the other hand, FIG. 9B shows the data distribution of the test item A and the test item C. In this case, if the data value of the test item A is large, the data value of the test item C is also large, and the correlation is shown. It shows that there is. In such a case, generally, when one of the test items is high, the other tends to be high. However, even if one test item is defective even if it is in a correlation, it does not necessarily result in a failure in the other test item, and it means that there is a high probability of being defective. Further, for example, not only between the test item A and the test item C but also between other test items, there may be a correlation between them due to another factor. In determining the test order, it is possible to expect an improvement in test throughput by taking such correlation into consideration. Further, there has been no method for rationally determining the test order in comparison with the test in the case where retesting is performed in the past.

  The method proposed in Patent Document 1 automatically determines the test order based on the information of the defect occurrence frequency classification and the test time, and generates a control program. Although it is possible to cope with the defect rate that varies depending on the production lot and to effectively determine the test order, the correlation between the test items is not taken into consideration here either.

  An object of the present invention is to provide a test order determination method, a test order determination apparatus, and a test order determination program for improving the throughput of a test by obtaining an optimal solution for the test order by paying attention to the correlation between test items. . In addition, a method for determining an optimal test order for retesting is also provided.

The test order determination method, test order determination apparatus, and test order determination program of the present invention are configured as follows.
(1) 1st invention 1st invention is a test which does not carry out the subsequent test when it is determined to be defective, grouping test items that are correlated, and test items that are not grouped with the group ( That is, this is a method for determining the test order with respect to a single test item having no correlation.

  FIG. 1 shows the principle of the first invention, and comprises an individual index calculation procedure 10, a grouping procedure 20, a group index calculation procedure 30, and a test order determination procedure 40.

  The individual index calculation procedure 10 obtains an individual index for each test item based on the defect rate and test time for each test item. The individual index is an index for determining the test order. Further, the defect rate and test time for the test items are measured in advance.

  In the grouping procedure 20, a test item having a correlation is designated from all the test items, and the designated test items are grouped. One or more groups are created.

  The group index calculation procedure 30 determines a group index for each group based on the individual index of the test item in the group determined in the individual index calculation procedure 10. The group index is an index for determining the test order as a group.

  The test order determination procedure 40 determines the test order using a group index for a group and an individual index for a test item that has not been grouped to mix the group and the test items that have not been grouped. For the order of the test items in the group, the test order is determined based on the individual index.

According to the first invention, a group of correlated test items and a single test item having no correlation are mixed with each other according to an index determined for each, so that the test order is determined. Can be tested in an appropriate test sequence.
(2) 2nd invention 2nd invention is based on the pilot data which is the result of having taken out the predetermined number from the device of a test object, and having tested about all the test items with respect to the test item. is there.

According to the second invention, even if the cause of failure differs depending on the production lot, it is possible to determine the test order reflecting the data of the result of the pilot test.
(3) Third Invention The third invention is a test order determining apparatus according to the first invention.
(4) Fourth Invention The fourth invention is a test order determination program according to the first invention.
(5) Fifth Invention The fifth invention is a test sequence for a test in which a device determined to be defective in a specific test item is retested and a device determined to be defective in a test item other than the specified is rejected. FIG. 2 is a diagram for explaining the principle of the invention.

  As shown in FIG. 2, the fifth invention is composed of a normal test sequence procedure 1 and a retest sequence procedure 2. The normal test sequence procedure 1 determines the order of tests performed on all devices. The retest order procedure 2 determines the order to be performed on the retest target device.

  The normal test sequence procedure 1 is the same as the test sequence determination method of the first invention. Therefore, the description here is redundant and will be omitted.

  The retest order procedure 2 includes a retest grouping procedure 50 and a retest order determination procedure 60. The retest grouping procedure 50 designates a specific test item from all the test items, and the designated test item is designated. The test item is a retest group. The test items other than the specific test items are grouped in the grouping procedure 20 shown in the normal test order determination procedure 1.

  In the retest order determination procedure 60, the group index calculation procedure 30 shown in the normal test order procedure 1 is performed on the groups other than the retest group, and the retest group is set to the head of the test order. The test order determination procedure 40 shown in the normal test order procedure 1 is performed on the group excluding the test items and the test items not grouped. For the test items in the retest group, the test order is determined by the individual index.

  According to the fifth invention, the test of the test item of the retest group can be performed first on the device to be retested, and thereafter the test can be performed in the test order considering the correlation. When the test accuracy is delicate, it is possible to determine an optimal test sequence in which retests are first performed for those test items.

  According to the first aspect of the present invention, it is possible to provide a method for automatically determining an optimum test order in consideration of test items having a correlation.

  According to the second invention, since the individual index is determined based on the result of the pilot test, it is possible to provide a method for automatically determining the test order reflecting these even if the cause of failure differs depending on the production lot. .

  According to the third aspect of the invention, it is possible to provide a test order determining apparatus that determines an optimal test order having the same effect as that of the first aspect of the invention.

  According to the fourth invention, it is possible to provide a test order determination program for determining an optimal test order having the same effect as that of the first invention.

  According to the fifth aspect of the present invention, there is provided a test sequence determination method for determining an optimal test sequence between a test item of a retest group, a test item of a correlated group, and an independent test item even in a test to be retested. Can be provided.

  An embodiment of the present invention will be described with reference to FIGS.

  FIG. 3 shows an example of the overall configuration showing the relationship between a test apparatus equipped with the test order determination program of the present invention, an input / output apparatus, and a device under test. The test apparatus 100 includes a test order determination program, stores data such as a defect rate and a test time for a test item that is a pilot test result, and a control apparatus 110 that exchanges data with other apparatuses and issues commands by commands. It comprises an external storage device 130 and a measuring device 140 for testing devices. Further, the test apparatus 100 is connected to an output apparatus 200 for displaying test results and the like, and an input apparatus 300 for instructing test start instructions and correlated test items and retest items by a tester. The device under test 400 is, for example, a magnetic head element to be tested, and various test items are measured by the measuring device 140. FIG. 3 shows a part related to the determination of the test order according to the present invention, and a part related to the original test of the test apparatus is omitted. Further, the test order determination device listed as the third invention corresponds to the control device 110 of FIG.

  Next, a method for determining the test order will be described with reference to FIG. As shown in FIG. 4, in this embodiment, it is assumed that there are test items up to AV (A-V surrounded by a square is a test item). The defect rate and test time for each test item are listed above the test items. The individual index is obtained by the following formula, and the result is also shown.

Individual index = Defect rate × 10 / Test time
For example, the defect rate of the test item A is 2, the test time is 1, and 20 is obtained from the above formula as the individual index. The units of the defect rate and the test time are “%” and “second”, respectively.

  Next, the correlated test items are grouped. It is assumed that there is a correlation between the test items in FIG. For example, test items A, F, L, and P are correlated. In addition, test items C, H, J, N, R, and S, and test items D, I, J, O, and T are also correlated. When these are grouped as correlation group 1, correlation group 2, and correlation group 3, they are shown in the middle of FIG. 4 (correlation group corresponds to the group described above). Test items that are not correlated are shown on the right side of the correlation group as uncorrelated test items. That is, test items B, E, G, M, Q, U, and V. Further, in the middle of FIG. 4, the defect rate, test time, and individual index are shown as they are in a form corresponding to each test item. The individual index for each test item in the correlation group is added to obtain a total index, and the value is also shown (the group total index corresponds to the above-described group index). In addition, the uncorrelated test item general indicator uses the value of the individual indicator as it is.

  Next, it arranges from the thing with the big value of a comprehensive index. The result is in the order of correlation group 2, correlation group 1, test item E, correlation group 3, test item B, and thereafter test items U, Q, M, and G. Further, in the correlation group, the test items are arranged in descending order of individual indicators. The order obtained in this way is the determination order shown in the lowermost part of FIG. 4 (the determination order indicates that the tests are sequentially performed from the left toward the right).

  By doing in this way, since the test items with correlation can be tested collectively, the test can be performed more rationally and the throughput can be improved.

  Next, a method for determining the retest order will be described. In the retest, after testing in the order of determination shown in FIG. 4, a retest is performed on a device that has failed in a specific test item. The specific test items are shaded in the upper test items of FIG. That is, the test items G, K, L, T, and U are specific test items. When this specific test item is designated by the person in charge, the designated test item is set as a retest group and is placed at the top of the retest test sequence. And the order after it calculates | requires the comprehensive parameter | index of the correlation group except a specific test item, and a non-correlated test item, and arranges in an order from the thing with this bigger total parameter | index. FIG. 5 shows the ordering in this way. Since there are no specific test items in the test items in the correlation group 2 in FIG. 5, the correlation group 2 is composed of the same test items as in FIG. Since the correlation group 1 and the correlation group 3 include specific test items, they are removed and the overall index becomes smaller, and the test item E, which is a single test item, has a higher order.

  Since the test is performed first from the test items of the retest group having a high defect probability, the test can be performed efficiently.

  Next, the test order determination described with reference to FIG. FIG. 6 also shows that a pilot test is performed to obtain a defect rate and a test time.

  First, n devices for pilot test are taken out from the devices under test as samples. All the test items are performed on the n samples, and the defect rate and the time required for the test are measured. The measurement result (that is, pilot data) is stored in the external storage 130 (S100, S110).

  Based on the failure rate and test time for each test item stored in the external storage 130, the value of the individual index (failure rate × 10 / test time) is calculated. The calculated individual index is stored corresponding to the test item in the external storage 130. (S120).

  Subsequently, the correlated test items specified by the tester are grouped. In the grouping, a group number for identifying the group is given to each test item stored in the external storage 130 (S130).

  The individual indicators within the grouped group are added to obtain a total indicator for the group. This is obtained for each group and stored in the external storage 130 (S140).

  For individual test items that have not been grouped, the individual indicators are taken as the overall indicators, and the overall indicators including the group's overall indicators are compared and arranged in descending order of the overall indicators. As a result, the group and the single test item are ordered. Next, the individual indicators of the test items in the group are arranged in descending order in each group, and the order in the group is determined. The determined order is stored in the external storage (S150, S160).

  Next, an example of data stored in the external storage device 130 in the flow of FIG. 6 will be described. The data example shown in FIG. 7 includes fields including “Defect rate”, “Test time”, “Individual index”, “Group”, “Comprehensive index”, “Order”, and “Specific item” with “Test item” as a key. It consists of. For example, in the test item A, the defect rate is 2%, the test time is 1 second, the individual index is 20, the general index of the group 1 is 80, and the determined test order is the eighth.

  “Specific items” did not appear in the flow of FIG. 6, but were specified by the tester when determining the order of retests. “1” is a specific test item and “0” is not specific. Indicates that this is a test item. That is, the test item A is a non-specific test item. In addition, “0” in the group field indicates a single test item having no correlation.

  As a method of causing the test person to specify the test items having the correlation, for example, all the test items may be displayed on the output device 200 and the person in charge may be selected from them. Also, specific test items can be designated in the same manner.

In addition to the above examples, the following additional notes are disclosed.
(Appendix 1)
A test order determination method for testing devices to be tested in a predetermined order of test items, and rejecting the devices when judged as defective.
Based on the defect rate and test time for each test item, an individual index calculation procedure for obtaining an individual index for determining the test order for each test item,
A grouping procedure in which correlated test items are designated from among all the test items, and the designated test items are grouped;
Based on the individual index of the test items in the group, a group index calculation procedure for obtaining a group index for each group to determine the test order as a group;
A group index is determined for the group and a test order is determined by mixing the group and the untested test items based on individual indices for the test items that are not grouped. A test order determination method comprising: a test order determination procedure for determining a test order for each test item according to the individual index.
(Appendix 2)
The defect rate and the test time for the test items are pilot data obtained by taking a predetermined number from the test target device and performing a test on all the test items.
The test order determining method according to supplementary note 1, wherein:
(Appendix 3)
A test order determination device that tests a device to be tested in a predetermined test item order and rejects the device when it is determined to be defective.
An individual index calculating means for obtaining an individual index for determining the test order for each test item based on the defect rate and test time for each test item;
A test item that is correlated among all the test items is designated, and a grouping means for grouping the designated test items;
A group index calculation means for obtaining a group index for each group to determine a test order as a group based on the individual index of the test items in the group;
A group index is determined for the group and a test order is determined by mixing the group and the untested test items based on individual indices for the test items that are not grouped. Test order determining means for determining the test order for the test items according to the individual index,
A test order determination apparatus characterized by comprising:
(Appendix 4)
A computer of the test sequence determination device;
A test order determination program of a test order determination apparatus that tests a device to be tested in a predetermined test item order and rejects the device when it is determined to be defective.
A computer of the test sequence determination device;
An individual index calculating means for obtaining an individual index for determining the test order for each test item based on the defect rate and test time for each test item;
A test item that is correlated among all the test items is designated, and a grouping means for grouping the designated test items;
A group index calculation means for obtaining a group index for each group to determine a test order as a group based on the individual index of the test items in the group;
A group index is determined for the group and a test order is determined by mixing the group and the untested test items based on individual indices for the test items that are not grouped. Test order determining means for determining the test order for the test items according to the individual index,
Test order determination program to function as.
(Appendix 5)
Test the devices under test in the order of the specified test items. If a device is determined to be defective for a specific test item, the device is retested. If the device is determined to be defective for a non-specific test item, the device is rejected. A test order determination method comprising:
A normal test sequence procedure for determining the order of tests to be performed on all devices to be tested, and a retest sequence procedure for determining the sequence of tests to be performed on devices to be retested,
The normal test sequence procedure is:
Based on the defect rate and test time for each test item, an individual index calculation procedure for obtaining an individual index for determining the test order for each test item,
A grouping procedure in which correlated test items are designated from among all the test items, and the designated test items are grouped;
Based on the individual index of the test items in the group, a group index calculation procedure for obtaining a group index for each group to determine the test order as a group;
A group index is determined for the group and a test order is determined by mixing the group and the untested test items based on individual indices for the test items that are not grouped. The test item consists of a test order determination procedure for determining the test order according to the individual index,
The retest sequence procedure is:
A retest grouping procedure in which a specific test item is designated from among all test items, the designated test item is set as a retest group, and test items other than the specific test item are grouped in the grouping procedure;
The group index calculation procedure is performed for the group excluding the retest group, the retest group is set to the top of the test order, and the test items that are not grouped and the test items that are not grouped are described above. A test order determination procedure for performing a test order determination procedure, and determining a test order for the test items in the retest group according to the individual indicator.
A test order determining method characterized by comprising:
(Appendix 6)
The individual index is a product of the defect rate for each test item and the reciprocal of the test time.The group index is an added value of the individual index for each test item in the group.
The test order determining method according to supplementary note 1, wherein:
(Appendix 7)
The test order determination method according to appendix 1, wherein the test order determination procedure determines a test order from a value of the individual index and the value of the group index.
(Appendix 8)
The test order determination procedure and the retest order determination procedure determine the test order from the values of the individual index and the group index that are large,
The test order determination method according to supplementary note 6, wherein the test order is determined.

It is a principle diagram of the first invention. It is a principle figure of 5th invention. It is an example of the whole configuration. It is an example of the order determination of a test item. It is an example of determining the order of test items in the case of a retest. It is an example of a flow of test order determination. It is an example of data stored in an external storage. It is an example of the defect data according to the test item by a pilot test. It is a conventional device test example. It is an example of data distribution of a test item and correlation.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Normal test sequence procedure 2 Retest sequence procedure 10 Individual index calculation procedure 20 Grouping procedure 30 Group index calculation procedure 40 Test sequence determination procedure 50 Retest grouping procedure 60 Retest sequence determination procedure 100 Test apparatus 110 Control apparatus 120 Test sequence determination program 130 External Storage Device 140 Measuring Device 200 Output Device 300 Input Device 400 Device Under Test

Claims (5)

A test order determination method for testing devices to be tested in a predetermined order of test items, and rejecting the devices when judged as defective.
Based on the defect rate and test time for each test item, an individual index calculation procedure for obtaining an individual index for determining the test order for each test item,
A grouping procedure in which correlated test items are designated from among all the test items, and the designated test items are grouped;
Based on the individual index of the test items in the group, a group index calculation procedure for obtaining a group index for each group to determine the test order as a group;
A group index is determined for the group and a test order is determined by mixing the group and the untested test items based on individual indices for the test items that are not grouped. A test order determination method comprising: a test order determination procedure for determining a test order for each test item according to the individual index. The defect rate and the test time for the test items are pilot data obtained by taking a predetermined number from the test target device and performing a test on all the test items.
The test order determination method according to claim 1, wherein: A test order determination device that tests a device to be tested in a predetermined test item order and rejects the device when it is determined to be defective.
An individual index calculating means for obtaining an individual index for determining the test order for each test item based on the defect rate and test time for each test item;
A test item that is correlated among all the test items is designated, and a grouping means for grouping the designated test items;
A group index calculation means for obtaining a group index for each group to determine a test order as a group based on the individual index of the test items in the group;
A group index is determined for the group and a test order is determined by mixing the group and the untested test items based on individual indices for the test items that are not grouped. Test order determining means for determining the test order for the test items according to the individual index,
A test order determination apparatus characterized by comprising: A test order determination program of a test order determination apparatus that tests a device to be tested in a predetermined test item order and rejects the device when it is determined to be defective.
A computer of the test sequence determination device;
An individual index calculating means for obtaining an individual index for determining the test order for each test item based on the defect rate and test time for each test item;
A test item that is correlated among all the test items is designated, and a grouping means for grouping the designated test items;
A group index calculation means for obtaining a group index for each group to determine a test order as a group based on the individual index of the test items in the group;
A group index is determined for the group and a test order is determined by mixing the group and the untested test items based on individual indices for the test items that are not grouped. Test order determining means for determining the test order for the test items according to the individual index,
Test order determination program to function as. Test the devices under test in the order of the specified test items. If a device is determined to be defective for a specific test item, the device is retested. If the device is determined to be defective for a non-specific test item, the device is rejected. A test order determination method comprising:
A normal test sequence procedure for determining the order of tests to be performed on all devices to be tested, and a retest sequence procedure for determining the sequence of tests to be performed on devices to be retested,
The normal test sequence procedure is:
Based on the defect rate and test time for each test item, an individual index calculation procedure for obtaining an individual index for determining the test order for each test item,
A grouping procedure in which correlated test items are designated from among all the test items, and the designated test items are grouped;
Based on the individual index of the test items in the group, a group index calculation procedure for obtaining a group index for each group to determine the test order as a group;
A group index is determined for the group and a test order is determined by mixing the group and the untested test items based on individual indices for the test items that are not grouped. The test item consists of a test order determination procedure for determining the test order according to the individual index,
The retest sequence procedure is:
A retest grouping procedure in which a specific test item is designated from among all test items, the designated test item is set as a retest group, and test items other than the specific test item are grouped in the grouping procedure;
The group index calculation procedure is performed for the group excluding the retest group, the retest group is set to the top of the test order, and the test items that are not grouped and the test items that are not grouped are described above. A test order determination procedure for performing a test order determination procedure, and determining a test order for the test items in the retest group according to the individual indicator.
A test order determining method characterized by comprising:

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