JP2007285985A - Method and device for inspecting coating state of adhesive or oil repellent film - Google Patents

Method and device for inspecting coating state of adhesive or oil repellent film Download PDF

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JP2007285985A
JP2007285985A JP2006116312A JP2006116312A JP2007285985A JP 2007285985 A JP2007285985 A JP 2007285985A JP 2006116312 A JP2006116312 A JP 2006116312A JP 2006116312 A JP2006116312 A JP 2006116312A JP 2007285985 A JP2007285985 A JP 2007285985A
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light
adhesive
visible light
inspected
oil repellent
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Takeshi Kojima
丈志 小島
Junpei Ito
淳平 伊藤
Kazuo Kayama
一夫 香山
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Nidec Corp
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Nidec Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To precisely inspect the state of the adhesive or oil repellent film applied to the surface of an inspection target even if the matrix of the inspection target comprises a metal or resin having gloss in a case that the visible emission of the adhesive or oil repellent film irradiated with ultraviolet rays from a light source is detected by a CCD camera to inspect the coating state of the adhesive or the oil repellent film on the inspection target. <P>SOLUTION: A first filter 7, which permits ultraviolet rays to transmit but cuts off visible light, is attached to the light source 2 and a second filter 8, which cuts off ultraviolet rays but permits visible light to transmit, is attached to the camera 4. Herein, from a viewpoint of more enhancing inspection precision, the camera 4 is arranged at a position separated in an almost vertical direction with respect to the surface to be inspected of the inspection target 1 and a dichroic mirror 3a, which permits visible light to transmit and reflects ultraviolet rays, is arranged between the inspection target 1 and the camera 4 to make the irradiation direction of the inspection target 1 with ultraviolet rays and the optical axis of the camera 4 coaxial. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、接着剤又は撥油膜の塗布状態検査方法および塗布状態検査装置に関するものである。   The present invention relates to an application state inspection method and an application state inspection apparatus for an adhesive or an oil repellent film.

近年、電子機器の小型・軽量化には目覚ましいものがある。これら小型・軽量化した電子機器を組み立て検査を、従来のような目視による検査に頼っていたのでは検査精度が向上しない。また、電子機器の小型・軽量化に伴って、組み立て工程を自動化する動きがあり、これに合わせて検査工程も自動化されつつある。   In recent years, electronic devices have been remarkably reduced in size and weight. If the assembly and inspection of these small and light electronic devices is relied on visual inspection as in the past, the inspection accuracy will not be improved. As electronic devices become smaller and lighter, there is a movement to automate the assembly process, and the inspection process is being automated accordingly.

検査精度を向上させるとともに、製品検査を自動化するために、例えば特許文献1では、被検査対象物に塗布する接着剤として蛍光剤を含有させたものを用い、被検査対象物に紫外線を照射し、接着剤から発せられる蛍光をカメラなどの検出器で検出して、接着剤の塗布位置や塗布量を検査する技術が提案されている。
特開平5−331438号公報
In order to improve the inspection accuracy and to automate the product inspection, for example, in Patent Document 1, an adhesive containing a fluorescent agent is used as an adhesive applied to the inspection object, and the inspection object is irradiated with ultraviolet rays. A technique has been proposed in which fluorescence emitted from an adhesive is detected by a detector such as a camera to inspect the application position and amount of the adhesive.
JP-A-5-331438

しかしながら、母材が光沢のある金属や樹脂からなる被検査対象物の表面に接着剤を塗布した場合、被検査対象物に照射された紫外線が被検査対象物の表面で乱反射する。これにより、乱反射した紫外線の一部が、接着剤からの発光と共に検出器で検出されることがあり、接着剤塗布状態の検査精度が低下するおそれがあった。接着剤などの塗布異常を逃すと、例えばスピンドルモータなどの小型モータの場合には製品性能に重大な支障が生じることがある。   However, when an adhesive is applied to the surface of an object to be inspected whose base material is made of a glossy metal or resin, the ultraviolet rays applied to the object to be inspected are irregularly reflected on the surface of the object to be inspected. As a result, some of the irregularly reflected ultraviolet rays may be detected by the detector together with the light emission from the adhesive, which may reduce the inspection accuracy of the adhesive application state. If an application abnormality such as an adhesive is missed, for example, in the case of a small motor such as a spindle motor, a serious problem may occur in product performance.

本発明はこのような従来の問題に鑑みてなされたものであり、その目的とするところは、母材が光沢のある金属や樹脂からなる被検査対象物の場合であっても、その表面に塗布された接着剤や撥油剤の状態を精度よく検査できる方法および装置を提供することにある。   The present invention has been made in view of such a conventional problem, and the object of the present invention is on the surface even if the base material is an object to be inspected made of a glossy metal or resin. An object of the present invention is to provide a method and an apparatus capable of accurately inspecting the state of an applied adhesive or oil repellent.

本発明によれば、紫外線照射によって可視発光する接着剤を塗布した被検査対象物、又は紫外線照射によって可視発光する発光物質を含有させた撥油剤を塗布した被検査対象物に、光源から紫外線を照射し、前記の接着剤又は撥油剤の可視発光を検出部材で検出して、前記の接着剤又は撥油剤の被検査対象物への塗布状態を検査する方法であって、紫外線を透過し可視光を遮断する第1フィルタを前記光源に取り付け、且つ紫外線を遮断し可視光を透過する第2フィルタを前記検出部材に取り付け、前記光源から可視光が放射されるのを防止し、且つ前記検出部材に紫外線が入射するのを防止して検査精度を高めたことを特徴とする接着剤又は撥油膜の塗膜状態検査方法が提供される。   According to the present invention, ultraviolet light from a light source is applied to an object to be inspected coated with an adhesive that emits visible light when irradiated with ultraviolet light, or an object to be inspected coated with an oil repellent containing a luminescent material that emits visible light when irradiated with ultraviolet light. Irradiating and detecting the visible light emission of the adhesive or oil repellent with a detection member, and inspecting the application state of the adhesive or oil repellent to the object to be inspected. A first filter that blocks light is attached to the light source, and a second filter that blocks ultraviolet light and transmits visible light is attached to the detection member to prevent visible light from being emitted from the light source, and the detection There is provided a coating state inspection method for an adhesive or an oil-repellent film, characterized in that ultraviolet rays are prevented from entering a member to improve inspection accuracy.

接着剤としてはエポキシ系接着剤及びアクリル系接着剤の少なくとも一方使用するのが好ましい。   As the adhesive, it is preferable to use at least one of an epoxy adhesive and an acrylic adhesive.

また本発明によれば、紫外線照射によって発光する接着剤を塗布した被検査対象物、又は紫外線照射によって発光する発光物質を含有させた撥油剤を塗布した被検査対象物に紫外線を照射する光源と、この光源に取り付けられた、紫外線を透過し可視光を遮断する第1フィルタと、前記の接着剤又は撥油剤の可視発光を検出する検出部材と、この検出部材に取り付けられた紫外線を遮断し可視光を透過する第2フィルタとを備えたことを特徴とする塗布状態検査装置が提供される。   Further, according to the present invention, a light source for irradiating ultraviolet rays onto an object to be inspected coated with an adhesive that emits light by ultraviolet irradiation, or an object to be inspected coated with an oil repellent containing a luminescent material that emits light by ultraviolet irradiation. A first filter attached to the light source that transmits ultraviolet rays and blocks visible light; a detection member that detects visible light emission of the adhesive or oil repellent; and blocks ultraviolet rays attached to the detection member. An application state inspection device is provided, comprising: a second filter that transmits visible light.

ここで検査精度を一層向上させる観点から、被検査対象物の被検査面に対して略垂直方向に離隔した位置に検出部材を配置し、被検査対象物と検出部材との間に、可視光を透過し紫外線を反射する光学部材を配置し、出射した紫外線が光学部材で反射して被検査対象物に照射するように光源を配置するのが好ましい。あるいは検出部材と光源の配置を前述のものとは逆にした構成、すなわち被検査対象物の被検査面に対して略垂直方向に離隔した位置に光源を配置し、被検査対象物と光源との間に、紫外線を透過し可視光を反射する光学部材を配置し、この光学部材で反射した可視光が入射するように検出部材を配置するのが好ましい。   Here, from the viewpoint of further improving the inspection accuracy, a detection member is arranged at a position substantially perpendicular to the surface to be inspected of the object to be inspected, and visible light is interposed between the object to be inspected and the detection member. It is preferable to dispose an optical member that transmits light and reflects ultraviolet light, and to dispose the light source so that the emitted ultraviolet light is reflected by the optical member and irradiates the object to be inspected. Alternatively, the configuration in which the arrangement of the detection member and the light source is reversed from that described above, that is, the light source is arranged at a position substantially perpendicular to the surface to be inspected of the object to be inspected. It is preferable that an optical member that transmits ultraviolet light and reflects visible light is disposed between them, and the detection member is disposed so that visible light reflected by the optical member is incident thereon.

本発明の塗膜状態検査方法及び塗膜状態検査装置では、紫外線を透過し可視光を遮断する第1フィルタを光源に取り付け、且つ紫外線を遮断し可視光を透過する第2フィルタを検出部材に取り付け、光源から可視光が放射されるのを防止し、且つ検出部材に紫外線が入射するのを防止したので、紫外線による接着剤又は撥油剤の可視発光を検出部材で精度よく検知することができる。これにより、製品検査を自動化することができるようになった。   In the coating film state inspection method and the coating film state inspection apparatus of the present invention, a first filter that transmits ultraviolet light and blocks visible light is attached to a light source, and a second filter that blocks ultraviolet light and transmits visible light is used as a detection member. Mounting and preventing visible light from being emitted from the light source and preventing ultraviolet light from entering the detection member, it is possible to accurately detect the visible light emission of the adhesive or the oil repellent by the ultraviolet light by the detection member. . As a result, product inspection can be automated.

接着剤としてはエポキシ系接着剤及びアクリル系接着剤の少なくとも一方使用すると、蛍光剤を含有させることなく紫外線で発光するので簡便性が向上する。   When at least one of an epoxy-based adhesive and an acrylic-based adhesive is used as the adhesive, since light is emitted by ultraviolet rays without containing a fluorescent agent, convenience is improved.

また本発明の塗布状態検査装置において、被検査対象物の被検査面に対して略垂直方向に離隔した位置に検出部材を配置し、被検査対象物と検出部材との間に、可視光を透過し紫外線を反射する光学部材を配置し、出射した紫外線が前記光学部材で反射して被検査対象物に照射するように前記光源を配置すると、被検査対象物への紫外線の照射方向と検出部材の光軸が同軸上となるので、被検査対象物の被検査面に凹凸がある場合であっても凹凸による影が生じず検査精度を一層向上させることができるようになる。検出部材と光源の配置を上記と逆にしても同様に、検査精度を一層向上させることができるようになる。   In the application state inspection apparatus of the present invention, the detection member is disposed at a position substantially perpendicular to the surface to be inspected of the object to be inspected, and visible light is transmitted between the object to be inspected and the detection member. When an optical member that transmits and reflects ultraviolet light is disposed, and the light source is disposed such that the emitted ultraviolet light is reflected by the optical member and irradiates the inspection object, the irradiation direction and detection of the ultraviolet light on the inspection object are detected. Since the optical axis of the member is on the same axis, even if there is unevenness on the surface to be inspected, there is no shadow due to the unevenness, and the inspection accuracy can be further improved. Even if the arrangement of the detection member and the light source is reversed, the inspection accuracy can be further improved.

以下、本発明に係る塗膜検査方法及び塗膜検査装置について図に基づいて説明する。なお、本発明はこれらの実施形態に何ら限定されるものではない。   Hereinafter, a coating film inspection method and a coating film inspection apparatus according to the present invention will be described with reference to the drawings. The present invention is not limited to these embodiments.

図1に、本発明に係る塗膜検査装置の一実施形態を示す。図1の塗膜検査装置は、下面開口の箱状ケース6内に、被検査対象物1を載置する載置台5と、載置台5の垂直上方に配置された被検査対象物1からの可視光を受光するCCDカメラ(検出部材、以下「カメラ」と記す)4と、載置台5とカメラ4との間に配置された、紫外線を反射し可視光を透過するダイクロイックミラー(光学部材)3aと、ダイクロイックミラー3aと略同一水平面上に配置された紫外線又は紫外線を含む光を発する光源2とを備えてなる。そして光源2には、紫外線を透過し可視光を遮断する第1フィルタ7が取り付けられ、カメラ4には、紫外線を遮断し可視光を透過する第2フィルタ8が取り付けられている。また箱状ケース6によって外部光が内部へ入射することが防止されている。   FIG. 1 shows an embodiment of a coating film inspection apparatus according to the present invention. The coating film inspection apparatus in FIG. 1 includes a mounting table 5 on which an inspection target object 1 is placed in a box-shaped case 6 having an opening on the lower surface, and an inspection target object 1 arranged vertically above the mounting table 5. A CCD camera (detection member, hereinafter referred to as “camera”) 4 that receives visible light, and a dichroic mirror (optical member) that is disposed between the mounting table 5 and the camera 4 and reflects ultraviolet light and transmits visible light. 3a and the dichroic mirror 3a and the light source 2 which emits the light which contains the ultraviolet-ray or an ultraviolet-ray arrange | positioned on the substantially the same horizontal surface. The light source 2 is provided with a first filter 7 that transmits ultraviolet light and blocks visible light, and the camera 4 is mounted with a second filter 8 that blocks ultraviolet light and transmits visible light. The box-like case 6 prevents external light from entering the inside.

このような構成の塗膜検査装置において、紫外線を透過し可視光を遮断する第1フィルタ7によって、光源2からは紫外線のみが出射される。一般に”ブラックライト”と呼ばれる紫外線を放射する光源であっても、放射される光の中には可視光域が不可避的に含まれているが、本発明の検査装置では、図2に示す透過率を有する第1フィルタ7を光源2に取り付けているので、光源2から放射される可視光は第1フィルタ7で遮断され紫外線のみが出射するようになる。光源2から水平方向に出射した紫外線は、紫外線の進行方向に対して45度に傾けられたダイクロイックミラー3aで反射して下方向へ進み、載置台5上に載置された被検査対象物1に当たる。なお、ここで使用するダイクロイックミラー3aは紫外線を反射し可視光を透過するものである。   In the coating film inspection apparatus having such a configuration, only the ultraviolet rays are emitted from the light source 2 by the first filter 7 that transmits ultraviolet rays and blocks visible light. In general, even a light source that emits ultraviolet rays called “black light” inevitably includes a visible light region, but the inspection apparatus of the present invention transmits the light shown in FIG. Since the first filter 7 having a rate is attached to the light source 2, visible light emitted from the light source 2 is blocked by the first filter 7 and only ultraviolet rays are emitted. The ultraviolet light emitted from the light source 2 in the horizontal direction is reflected by the dichroic mirror 3a inclined at 45 degrees with respect to the traveling direction of the ultraviolet light, proceeds downward, and the inspection object 1 placed on the mounting table 5 is inspected. It hits. The dichroic mirror 3a used here reflects ultraviolet rays and transmits visible light.

被検査対象物1には、紫外線照射によって可視発光する接着剤、又は紫外線照射によって可視発光する発光物質を含有させた撥油剤(いずれも不図示)が塗布されている。被検査対象物1に紫外線が照射されると、これらの接着剤又は撥油剤が可視発光する。   The inspection object 1 is coated with an adhesive that emits visible light when irradiated with ultraviolet rays or an oil repellent (not shown) containing a light-emitting substance that emits visible light when irradiated with ultraviolet rays. When the test object 1 is irradiated with ultraviolet rays, these adhesives or oil repellents emit visible light.

紫外線照射によって可視発光する接着剤としては、例えばエポキシ系接着剤やアクリル系接着剤が挙げられる。もちろんこれ以外にも、紫外線照射によって可視発光するものであれば特に限定はない。また撥油剤に含有させる発光物質としては従来公知のものを使用できる。例えば、フルオレセインナトリウム(ウラニン)、ビス(トリアシルアミノスチルベン)ジスルホン酸誘導体、クマリンジスルホン酸誘導体またはビススチルビフェニール誘導体などの蛍光染料;ウラニン、エオシン、ジアミノチルベン、チオフラビンT、ローダミンB、インターナショナルオレンジなどの有機蛍光顔料;タングステン酸カルシウム、鉛含有珪酸バリウム、ユーロピウム含有燐酸ストロンチウム、ユーロピウム含有イットリア、セリウム含有イットリア、銅あるいは銀、錫、マンガン、砒素、アルミニウム、カドミウムの一種あるいは複数含有硫化亜鉛、マンガン含有ガリウム酸マグネシウム、フッ化マグネシウム、フッ化カルシウム、酸素欠損酸化亜鉛、ユーロピウム含有酸化亜鉛、セリウム含有酸化亜鉛、セシウム含有酸化亜鉛、マンガンあるいは砒素含有珪酸亜鉛、ビスマス含有硫化亜鉛カドミウム、ビスマス含有硫化カルシウムストロンチウムなどの無機蛍光顔料が挙げられる。撥油剤への発光物質の含有量に特に限定はないが、0.001〜1.0重量%の範囲が好ましい。   Examples of adhesives that emit visible light when irradiated with ultraviolet rays include epoxy adhesives and acrylic adhesives. Of course, there is no particular limitation as long as it emits visible light when irradiated with ultraviolet rays. Moreover, a conventionally well-known thing can be used as a luminescent substance contained in an oil repellent. For example, fluorescent dyes such as sodium fluorescein (uranin), bis (triacylaminostilbene) disulfonic acid derivatives, coumarin disulfonic acid derivatives or bistilbiphenyl derivatives; uranin, eosin, diaminotilbene, thioflavin T, rhodamine B, international orange Organic fluorescent pigments: Calcium tungstate, lead-containing barium silicate, europium-containing strontium phosphate, europium-containing yttria, cerium-containing yttria, copper or silver, tin, manganese, arsenic, aluminum, cadmium, one or more zinc sulfide, manganese-containing Magnesium gallate, magnesium fluoride, calcium fluoride, oxygen deficient zinc oxide, europium-containing zinc oxide, cerium-containing zinc oxide, cesium-containing Zinc, manganese or arsenic-containing zinc silicate, bismuth-containing zinc sulfide cadmium, and inorganic fluorescent pigments such as bismuth-containing calcium sulfide, strontium. The content of the luminescent substance in the oil repellent is not particularly limited, but is preferably in the range of 0.001 to 1.0% by weight.

紫外線照射による接着剤や撥油剤の可視発光の一部は上方に進み、ダイクロイックミラー3aを透過して第2フィルタ8に至る。第2フィルタ8は紫外線を遮断し可視光を透過するので、図3に示すように、光源2から放射され第1フィルタ7を透過した紫外光(ピーク波長365nm)と、紫外光照射による接着剤又は撥油剤の可視発光(ピーク波長443nm)のうち、接着剤又は撥油剤の可視光のみがカメラ4に入射し、紫外光などのいわゆるノイズ光がカメラ4へ入射することが防止される。これにより、被検査対象物表面の接着剤や撥油剤の塗布位置や塗布状態が画像上ではっきりと認識できるようになる。   Part of the visible light emission of the adhesive and the oil repellent by ultraviolet irradiation proceeds upward, passes through the dichroic mirror 3a, and reaches the second filter 8. Since the second filter 8 blocks ultraviolet rays and transmits visible light, as shown in FIG. 3, ultraviolet light (peak wavelength 365 nm) emitted from the light source 2 and transmitted through the first filter 7 and an adhesive by ultraviolet light irradiation. Alternatively, of the visible light emission (peak wavelength 443 nm) of the oil repellent, only the visible light of the adhesive or the oil repellent is incident on the camera 4 and so-called noise light such as ultraviolet light is prevented from entering the camera 4. Thereby, the application position and application state of the adhesive and the oil repellent on the surface of the object to be inspected can be clearly recognized on the image.

図4に、被検査対象物1の一例としての動圧軸受装置の断面図を示す。図4の動圧軸受装置はいわゆるフルフィル構造の軸受装置であって、スリーブ部材12は中空円筒状をなし、上端部および下部には中空円筒の内径よりも大径に形成された溝部122,123がそれぞれ形成され、下端部には溝部123より大径の嵌合溝部124がさらに形成されている。   FIG. 4 shows a cross-sectional view of a hydrodynamic bearing device as an example of the object 1 to be inspected. The hydrodynamic bearing device of FIG. 4 is a so-called full-fill bearing device, in which the sleeve member 12 has a hollow cylindrical shape, and groove portions 122 and 123 formed at the upper end portion and the lower portion have a larger diameter than the inner diameter of the hollow cylinder. And a fitting groove 124 having a larger diameter than the groove 123 is further formed at the lower end.

一方、軸部材11は、軸部111と、軸部111の下端に形成されたスラストプレート部112とからなる。軸部材11のスラストプレート部112がスリーブ部材12の溝部123に装着するまで、スリーブ部材12の中空部に軸部111が挿通され、スラストブッシュ部材14がスリーブ部材12の嵌合溝部124に嵌着されて、スリーブ部材12の下側開口が封止されている。   On the other hand, the shaft member 11 includes a shaft portion 111 and a thrust plate portion 112 formed at the lower end of the shaft portion 111. The shaft portion 111 is inserted into the hollow portion of the sleeve member 12 until the thrust plate portion 112 of the shaft member 11 is fitted in the groove portion 123 of the sleeve member 12, and the thrust bush member 14 is fitted into the fitting groove portion 124 of the sleeve member 12. Thus, the lower opening of the sleeve member 12 is sealed.

他方、スリーブ部材12の上側開口には、軸部111に嵌通させた環状のシール部材15が、その上面とスリーブ部材12の上端面とが同一面となるように溝部122に装着固定されている。そして、スリーブ部材12、スラストブッシュ部材14と、軸部材11との間の微少間隙には潤滑油(不図示)が充填されている。   On the other hand, in the upper opening of the sleeve member 12, an annular seal member 15 fitted in the shaft portion 111 is mounted and fixed to the groove portion 122 so that the upper surface thereof and the upper end surface of the sleeve member 12 are flush with each other. Yes. A minute gap between the sleeve member 12, the thrust bush member 14, and the shaft member 11 is filled with lubricating oil (not shown).

スリーブ部材12の中空部内周面には軸方向の離隔位置に2つの動圧発生溝121a,121bが形成され、これによりスリーブ部材12と軸部材11との間に一対のラジアル軸受部が形成されている。またスリーブ部材12の溝部123の底面にも動圧発生溝121cが形成されており、この動圧発生溝121cとスラストブッシュ部材14に形成された動圧発生溝141と、軸部材11のスラストプレート部112との間に一対のスラスト軸受部が形成されている。   Two dynamic pressure generating grooves 121a and 121b are formed in the axially spaced positions on the inner peripheral surface of the hollow portion of the sleeve member 12, whereby a pair of radial bearing portions are formed between the sleeve member 12 and the shaft member 11. ing. A dynamic pressure generating groove 121c is also formed on the bottom surface of the groove portion 123 of the sleeve member 12. The dynamic pressure generating groove 121c, the dynamic pressure generating groove 141 formed in the thrust bush member 14, and the thrust plate of the shaft member 11 are formed. A pair of thrust bearing portions is formed between the portions 112.

このような構成の動圧軸受装置において、軸部材11が回転すると、スリーブ部材12、スラストブッシュ部材14と、軸部材11との微少隙間に保持されている潤滑油(不図示)が動圧発生溝121a,121b,121c,141の溝パターンに沿って押圧されて潤滑油中に局部的な高圧部分が生じて、一対のラジアル軸受部において軸部材11のラジアル方向の荷重を支持し、一対のスラスト軸受部において軸部材11のスラスト方向の荷重を支持するようになる。   In the dynamic pressure bearing device having such a configuration, when the shaft member 11 rotates, the lubricating oil (not shown) held in the minute gap between the sleeve member 12, the thrust bush member 14 and the shaft member 11 generates dynamic pressure. Pressed along the groove pattern of the grooves 121a, 121b, 121c, and 141, a local high-pressure portion is generated in the lubricating oil, and the radial load of the shaft member 11 is supported in the pair of radial bearing portions. The thrust bearing portion supports the load in the thrust direction of the shaft member 11.

この動圧軸受装置において、潤滑油のシールは、環状のシール部材15と軸部テーパ面117とで構成されるテーパシール部13で行われる。このテーパシール部13には、回転によって発生する遠心力等により潤滑油が漏れ出すことを防止するために、撥油剤が塗布され、撥油膜が形成されている。この撥油剤には発光物質が含有されており、図1に示した検査装置を用いることによって、この撥油剤の塗布状態を画像認識できるようになる。例えば軸部材11の外周面への撥油剤の塗布状態が良好な場合には、動圧軸受装置1の上方に配置されたカメラ4には、図5に示すように、撥油剤が塗布されている部分が帯状の発光円となって映る。他方、撥油剤の塗布状態が悪い場合には、例えば帯状の円の一部が薄くなったり、あるいは欠けたりする。また必要以外の部分に撥油剤が塗布されていたときもカメラ4の画像から認識できる。   In this dynamic pressure bearing device, the sealing of the lubricating oil is performed by the taper seal portion 13 constituted by the annular seal member 15 and the shaft portion taper surface 117. The taper seal portion 13 is coated with an oil repellent to form an oil repellent film in order to prevent the lubricating oil from leaking out due to centrifugal force generated by rotation. The oleophobic agent contains a luminescent material, and the application state of the oleophobic agent can be image-recognized by using the inspection apparatus shown in FIG. For example, when the oil repellant is well applied to the outer peripheral surface of the shaft member 11, the camera 4 disposed above the fluid dynamic bearing device 1 is coated with the oil repellant as shown in FIG. The part that appears is a band-like light emission circle. On the other hand, when the application state of the oil repellent is poor, for example, a part of the belt-like circle is thinned or chipped. Further, even when an oil repellent is applied to a portion other than necessary, it can be recognized from the image of the camera 4.

また図4の動圧軸受装置では、スラストブッシュ部材14がスリーブ部材12の嵌合溝部124に嵌着された後、嵌着部分は熱硬化性のエポキシ系接着剤Bでさらに封止される。この接着剤Bの嵌着部分への塗布状態も図1に示した検査装置を用いることによって画像認識できるようになる。具体的には、スラストブッシュ部材14が上面となるように、図4の動圧軸受装置1を上下逆して載置台に載置し、紫外線を照射して接着剤Bの塗布状態をカメラ4で観察する。前述の撥油剤の場合と同様に、接着剤Bの塗布状態が良好な場合は、帯状の発光円が画面に映し出される一方、接着剤Bの塗布状態が悪い場合は、帯状の円の一部が薄くなったり、欠けていたりする。このように、本発明の検査装置によれば、カメラ4へ入射していたノイズ光が確実に防止され、被検査対象物表面の接着剤や撥油剤の塗布位置や塗布状態が画像上ではっきりと認識できるようになる。   4, after the thrust bush member 14 is fitted into the fitting groove 124 of the sleeve member 12, the fitting portion is further sealed with a thermosetting epoxy adhesive B. The application state of the adhesive B to the fitting portion can be recognized by using the inspection apparatus shown in FIG. Specifically, the dynamic pressure bearing device 1 of FIG. 4 is placed upside down on the mounting table so that the thrust bushing member 14 is on the upper surface, and the application state of the adhesive B is irradiated with ultraviolet rays to the camera 4. Observe at. As in the case of the above-described oil repellent, when the application state of the adhesive B is good, a belt-like light emitting circle is displayed on the screen, while when the adhesive B is poorly applied, a part of the belt-like circle is displayed. Is thin or missing. As described above, according to the inspection apparatus of the present invention, the noise light incident on the camera 4 is reliably prevented, and the application position and application state of the adhesive and the oil repellent on the surface of the inspection object are clearly displayed on the image. Can be recognized.

図6に、本発明に係る検査装置の他の実施形態を示す。図6の検査装置が、図1に示した検査装置と異なる点は、カメラ4と光源2の配置を逆にした点にある。すなわち図6の検査装置では、載置台5の垂直上方に光源2が配置され、載置台5と光源2との間にダイクロイックミラー3bが配置されている。そして、ダイクロイックミラー3bと略同一水平面上にカメラ4が配置されている。また前記実施形態と同様に、光源2には、紫外線を透過し可視光を遮断する第1フィルタ7が取り付けられ、カメラ4には、紫外線を遮断し可視光を透過する第2フィルタ8が取り付けられている。   FIG. 6 shows another embodiment of the inspection apparatus according to the present invention. 6 differs from the inspection apparatus shown in FIG. 1 in that the arrangement of the camera 4 and the light source 2 is reversed. That is, in the inspection apparatus of FIG. 6, the light source 2 is disposed vertically above the mounting table 5, and the dichroic mirror 3 b is disposed between the mounting table 5 and the light source 2. And the camera 4 is arrange | positioned on the substantially the same horizontal surface as the dichroic mirror 3b. Similarly to the previous embodiment, the light source 2 is provided with a first filter 7 that transmits ultraviolet light and blocks visible light, and the camera 4 is mounted with a second filter 8 that blocks ultraviolet light and transmits visible light. It has been.

このような構成の塗膜検査装置において、紫外線を透過し可視光を遮断する第1フィルタ7によって、光源2からは紫外線のみが出射される。光源2から下方へ出射した紫外線は、ダイクロイックミラー3bを透過してさらに下方へ進み、載置台5上に載置された被検査対象物1を照射する。なお、ここで使用するダイクロイックミラー3bは前述のものとは異なって、紫外線を透過し可視光を反射するものである。被検査対象物1に紫外線が照射されると、被検査対象物1上に塗布されている接着剤又は撥油剤(いずれも不図示)が可視発光する。   In the coating film inspection apparatus having such a configuration, only the ultraviolet rays are emitted from the light source 2 by the first filter 7 that transmits ultraviolet rays and blocks visible light. The ultraviolet rays emitted downward from the light source 2 pass through the dichroic mirror 3 b and travel further downward, and irradiate the object 1 to be inspected placed on the mounting table 5. Note that the dichroic mirror 3b used here is different from the dichroic mirror 3b described above and transmits ultraviolet light and reflects visible light. When the inspection object 1 is irradiated with ultraviolet light, an adhesive or an oil repellent (not shown) applied on the inspection object 1 emits visible light.

紫外線照射による接着剤や撥油剤の可視発光の一部は上方に進み、ダイクロイックミラー3bで反射して第2フィルタ8に至る。第2フィルタ8は紫外線を遮断し可視光を透過するので、可視光のみがカメラ4に入射し、いわゆるノイズ光のカメラ4への入射が防止される。これにより、前記実施形態と同様に、被検査対象物表面の接着剤や撥油剤の塗布位置や塗布状態が画像上ではっきりと認識できるようになる。   Part of the visible light emission of the adhesive and the oil repellent by ultraviolet irradiation proceeds upward, is reflected by the dichroic mirror 3b, and reaches the second filter 8. Since the second filter 8 blocks ultraviolet rays and transmits visible light, only visible light is incident on the camera 4 and so-called noise light is prevented from entering the camera 4. Thereby, similarly to the above-described embodiment, the application position and application state of the adhesive or the oil repellent on the surface of the object to be inspected can be clearly recognized on the image.

図7に、本発明に係る検査装置のさらに他の実施形態を示す。前記2つの実施形態では、被検査対象物1への紫外線照射方向をカメラ4の光軸と同軸とした、いわゆる同軸落射照明であったが、図7の検査装置は、紫外線照射方向をカメラ4の光軸と異なる方向としている。すなわち、載置台5の垂直上方にカメラ4を配置し、載置台5の斜め上方に光源2を配置して、被検査対象物1に対して斜め上方から紫外線を照射し、被検査対象物の表面に塗布されている接着剤又は撥油剤の可視発光を被検査対象物1の垂直上方のカメラ4で撮影する。   FIG. 7 shows still another embodiment of the inspection apparatus according to the present invention. In the two embodiments described above, so-called coaxial epi-illumination in which the ultraviolet irradiation direction on the inspection object 1 is coaxial with the optical axis of the camera 4, the inspection apparatus of FIG. The direction is different from the optical axis. That is, the camera 4 is disposed vertically above the mounting table 5, the light source 2 is disposed obliquely above the mounting table 5, and ultraviolet light is irradiated obliquely from above the object 1 to be inspected. The visible light emission of the adhesive or oil repellent applied on the surface is photographed by the camera 4 vertically above the object 1 to be inspected.

このような構成の検査装置では、光源2からの紫外線の照射光路とカメラ4の光軸とが異なるので、紫外線と可視光とを分離するためのダイクロイックミラーが不要となる。一方、紫外線を斜め方向から照射するため、被検査対象物1の被検査面に凹凸がある場合は影が形成され検査死角が生じる。したがって、被検査対象物1の被検査面に凹凸がある場合は特に、同軸落射照明である前記2つの実施形態に示す検査装置を用いることが推奨される。   In the inspection apparatus having such a configuration, since the irradiation path of the ultraviolet rays from the light source 2 and the optical axis of the camera 4 are different, a dichroic mirror for separating the ultraviolet rays from the visible light becomes unnecessary. On the other hand, since ultraviolet rays are irradiated from an oblique direction, if there are irregularities on the surface to be inspected 1, a shadow is formed and an inspection blind spot occurs. Therefore, it is recommended to use the inspection apparatus shown in the two embodiments, which are coaxial epi-illumination, particularly when the surface to be inspected 1 has irregularities.

本発明に係る検査方法および検査装置の一例を示す概説図である。It is an outline figure showing an example of the inspection method and inspection device concerning the present invention. 第1フィルタの透過率曲線を示す図である。It is a figure which shows the transmittance | permeability curve of a 1st filter. 第2フィルタの透過率曲線を示す図である。It is a figure which shows the transmittance | permeability curve of a 2nd filter. 被検査対象物の一例としての動圧軸受装置の垂直断面図例である。It is an example of a vertical sectional view of a fluid dynamic bearing device as an example of an object to be inspected. 図4の動圧軸受装置を、図1の検査装置で検査したときのカメラ画像例である。It is an example of a camera image when the dynamic pressure bearing apparatus of FIG. 4 is inspected by the inspection apparatus of FIG. 本発明に係る検査方法および検査装置の他の例を示す概説図である。It is an outline figure showing other examples of the inspection method and inspection device concerning the present invention. 本発明に係る検査方法および検査装置のさらに他の例を示す概説図である。It is an outline figure showing other examples of the inspection method and inspection device concerning the present invention.

符号の説明Explanation of symbols

1 被検査対象物
2 光源
3a,3b ダイクロイックミラー
4 カメラ(検出部材)
5 載置台
6 箱状ケース
7 第1フィルタ
8 第2フィルタ
13 テーパシール部
DESCRIPTION OF SYMBOLS 1 Target object 2 Light source 3a, 3b Dichroic mirror 4 Camera (detection member)
5 Mounting Table 6 Box-shaped Case 7 First Filter 8 Second Filter 13 Tapered Seal Part

Claims (5)

紫外線照射によって可視発光する接着剤を塗布した被検査対象物、又は紫外線照射によって可視発光する発光物質を含有させた撥油剤を塗布した被検査対象物に、光源から紫外線を照射し、前記の接着剤又は撥油剤の可視発光を検出部材で検出して、前記の接着剤又は撥油剤の被検査対象物への塗布状態を検査する方法であって、
紫外線を透過し可視光を遮断する第1フィルタを前記光源に取り付け、且つ紫外線を遮断し可視光を透過する第2フィルタを前記検出部材に取り付け、前記光源から可視光が放射されるのを防止し、且つ前記検出部材に紫外線が入射するのを防止して検査精度を高めたことを特徴とする接着剤又は撥油膜の塗布状態検査方法。
An object to be inspected coated with an adhesive that emits visible light when irradiated with ultraviolet light or an object to be tested coated with an oil repellent containing a luminescent material that emits visible light when irradiated with ultraviolet light is irradiated with ultraviolet light from a light source, and the above-mentioned adhesion is performed. A method of detecting visible light emission of an agent or an oil repellent agent with a detection member and inspecting an application state of the adhesive or the oil repellent agent on an inspection object,
A first filter that transmits ultraviolet light and blocks visible light is attached to the light source, and a second filter that blocks ultraviolet light and transmits visible light is attached to the detection member to prevent visible light from being emitted from the light source. And a method for inspecting the application state of the adhesive or oil repellent film, wherein ultraviolet rays are prevented from entering the detection member to improve inspection accuracy.
前記接着剤がエポキシ系接着剤及びアクリル系接着剤の少なくとも一方である請求項1記載の塗膜状態検査方法。   The coating state inspection method according to claim 1, wherein the adhesive is at least one of an epoxy adhesive and an acrylic adhesive. 紫外線照射によって可視発光する接着剤を塗布した被検査対象物又は紫外線照射によって可視発光する発光物質を含有させた撥油剤を塗布した被検査対象物に紫外線を照射する光源と、この光源に取り付けられた、紫外線を透過し可視光を遮断する第1フィルタと、前記の接着剤又は撥油剤の可視発光を検出する検出部材と、この検出部材に取り付けられた紫外線を遮断し可視光を透過する第2フィルタとを備えたことを特徴とする塗布状態検査装置。   A light source that irradiates ultraviolet light onto an object to be inspected that is coated with an adhesive that emits visible light when irradiated with ultraviolet light, or an object that is coated with an oil repellent containing a luminescent material that emits light that is visible when irradiated with ultraviolet light. A first filter that transmits ultraviolet light and blocks visible light; a detection member that detects visible light emission of the adhesive or the oil repellent; and a first filter that blocks ultraviolet light attached to the detection member and transmits visible light. An application state inspection apparatus comprising two filters. 被検査対象物の被検査面に対して略垂直方向に離隔した位置に前記検出部材を配置し、被検査対象物と前記検出部材との間に、可視光を透過し紫外線を反射する光学部材を配置し、出射した紫外線が前記光学部材で反射して被検査対象物に照射するように前記光源を配置した請求項3記載の塗膜状態検査装置。   An optical member that arranges the detection member at a position separated in a direction substantially perpendicular to the surface to be inspected of the object to be inspected, and transmits visible light and reflects ultraviolet light between the object to be inspected and the detection member. The coating film state inspection apparatus according to claim 3, wherein the light source is disposed such that the emitted ultraviolet light is reflected by the optical member and irradiated to the object to be inspected. 被検査対象物の被検査面に対して略垂直方向に離隔した位置に前記光源を配置し、被検査対象物と前記光源との間に、紫外線を透過し可視光を反射する光学部材を配置し、この光学部材で反射した可視光が入射するように前記検出部材を配置した請求項3記載の塗膜状態検査装置。   The light source is disposed at a position substantially perpendicular to the surface to be inspected of the inspection object, and an optical member that transmits ultraviolet light and reflects visible light is disposed between the inspection object and the light source. The coating film state inspection apparatus according to claim 3, wherein the detection member is arranged so that visible light reflected by the optical member is incident thereon.
JP2006116312A 2006-04-20 2006-04-20 Method and device for inspecting coating state of adhesive or oil repellent film Withdrawn JP2007285985A (en)

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US8331649B2 (en) 2008-06-04 2012-12-11 Samsung Electronics Co., Ltd. LED testing apparatus and testing method thereof
KR20130107546A (en) * 2012-03-22 2013-10-02 삼성테크윈 주식회사 Apparatus and method for inspect component
KR101496936B1 (en) * 2014-02-18 2015-03-02 주식회사 프로텍 Adhesive dispensing test method and apparatus
KR20170103455A (en) * 2016-03-04 2017-09-13 도쿄엘렉트론가부시키가이샤 Droplet inspection apparatus, droplet inspection method, and computer storage medium
JP7452185B2 (en) 2020-03-30 2024-03-19 東洋製罐株式会社 Inspection device and method for containers with coating film

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JP2009128260A (en) * 2007-11-27 2009-06-11 Seiko Instruments Inc Inspection apparatus, inspection method, manufacturing apparatus of rolling bearing, and manufacturing method of the rolling bearing
US8331649B2 (en) 2008-06-04 2012-12-11 Samsung Electronics Co., Ltd. LED testing apparatus and testing method thereof
JP2011117848A (en) * 2009-12-03 2011-06-16 Samsung Led Co Ltd Led inspection device and led inspection method
KR20130107546A (en) * 2012-03-22 2013-10-02 삼성테크윈 주식회사 Apparatus and method for inspect component
KR101716217B1 (en) * 2012-03-22 2017-03-14 한화테크윈 주식회사 Apparatus and Method for inspect component
KR101496936B1 (en) * 2014-02-18 2015-03-02 주식회사 프로텍 Adhesive dispensing test method and apparatus
KR20170103455A (en) * 2016-03-04 2017-09-13 도쿄엘렉트론가부시키가이샤 Droplet inspection apparatus, droplet inspection method, and computer storage medium
KR102514229B1 (en) * 2016-03-04 2023-03-24 도쿄엘렉트론가부시키가이샤 Droplet inspection apparatus, droplet inspection method, and computer storage medium
JP7452185B2 (en) 2020-03-30 2024-03-19 東洋製罐株式会社 Inspection device and method for containers with coating film

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