JP2007283761A - Film peeling method - Google Patents

Film peeling method Download PDF

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JP2007283761A
JP2007283761A JP2007067106A JP2007067106A JP2007283761A JP 2007283761 A JP2007283761 A JP 2007283761A JP 2007067106 A JP2007067106 A JP 2007067106A JP 2007067106 A JP2007067106 A JP 2007067106A JP 2007283761 A JP2007283761 A JP 2007283761A
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film
sheet material
substrate
peeling method
film peeling
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JP5012112B2 (en
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Takafumi Tsukahara
隆文 塚原
Tsunaichi Takizawa
綱一 瀧沢
Takeshi Kawai
毅 川合
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Showa Denko Materials Co Ltd
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Hitachi Chemical Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a film peeling method which enables the peeling of a film certainly from a substrate even if thickness of a sheet material including a substrate and a film sticking on one side or both sides of the substrate is very thin. <P>SOLUTION: A sheet material including a substrate having via holes filled up with conductive paste and a protective film sticking on one side or both sides of the substrate is held so that the thickness direction may be approximately perpendicular with the vertical direction, and the protective film is peeled from the substrate in the condition. According to this, even if it is a case that the thickness of the sheet material is very thin, since the condition that the sheet material is slackened under its own weight is suppressed, the crease of the substrate, the removal of the paste or the like is inhibited and the protective film can be certainly peeled from the substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、例えば、IVH(Interstitial Via Hole)付き多層印刷配線板の製造工程等において使用されるフィルム剥離方法に関する。   The present invention relates to a film peeling method used in, for example, a manufacturing process of a multilayer printed wiring board with IVH (Interstitial Via Hole).

一例として、IVH付き多層印刷配線板は、次のように作製される。まず、ガラス布或いはアラミド繊維布等の基材の表裏両面にプラスチックフィルムを加熱・圧着してシート材を得る。続いて、プラスチックフィルムが表裏両面に貼付された基材の所定の位置にレーザ光線の照射等によって貫通穴を形成し、その貫通穴に印刷等によって導電性ペーストを充填する。その後、プラスチックフィルムを基材から剥離して、導電性ペーストが充填されたビアホールを有する基材を得る。そして、その基材を用いて、銅張積層板又は多層基板の工法や回路パターンニング等によってIVH付き多層印刷配線板を作製する。   As an example, a multilayer printed wiring board with IVH is manufactured as follows. First, a sheet material is obtained by heating and pressure-bonding a plastic film on both front and back surfaces of a substrate such as glass cloth or aramid fiber cloth. Subsequently, through holes are formed by laser beam irradiation or the like at predetermined positions of the base material on which the plastic film is adhered to both the front and back surfaces, and the conductive paste is filled into the through holes by printing or the like. Thereafter, the plastic film is peeled from the base material to obtain a base material having a via hole filled with a conductive paste. And the multilayer printed wiring board with IVH is produced by the construction method, circuit patterning, etc. of a copper clad laminated board or a multilayer board | substrate using the base material.

上述したプラスチックフィルムの剥離は、次のようなフィルム剥離方法によって行われるのが従来一般的である(例えば、特許文献1参照)。すなわち、シート材を水平に保持した状態で移送させ、シート材の先端の非接触部分を真空吸引し、プラスチックフィルムをめくりあげて基材の先端を露出させる。続いて、基材の先端を取出しチャックで狭持し、プラスチックフィルムと基材とを同期した所定の速度で移動させることでプラスチックフィルムを基材から剥離する。
特許第3473337号公報
Conventionally, the above-described peeling of the plastic film is generally performed by the following film peeling method (see, for example, Patent Document 1). That is, the sheet material is transported while being held horizontally, the non-contact portion at the front end of the sheet material is vacuum-sucked, the plastic film is turned up, and the front end of the base material is exposed. Subsequently, the tip of the substrate is taken out and held by a chuck, and the plastic film is peeled from the substrate by moving the plastic film and the substrate at a predetermined synchronized speed.
Japanese Patent No. 3473337

しかしながら、従来一般的なフィルム剥離方法にあっては、シート材の移送方向に対して垂直方向(幅方向)におけるシート材の両縁部(例えば、10〜15mm程度)をローラ又はチャックで挟持し、シート材を水平に保持した状態でシート材を移送させるため、幅方向に十分な張力をかけることができず、シート材が自重によって弛んだ状態となってしまう。このようなシート材の弛みは、100μm以下というようにシート材の厚さが薄くなるほど、剛性の低下によって顕著となることが確認されている。   However, in the conventional general film peeling method, both edges (for example, about 10 to 15 mm) of the sheet material in the direction perpendicular to the sheet material transfer direction (width direction) are sandwiched between rollers or chucks. Since the sheet material is transferred in a state where the sheet material is held horizontally, a sufficient tension cannot be applied in the width direction, and the sheet material is loosened by its own weight. It has been confirmed that such loosening of the sheet material becomes more conspicuous due to a decrease in rigidity as the thickness of the sheet material is reduced to 100 μm or less.

そして、シート材が弛んだ状態でプラスチックフィルムを基材から剥離すると、姿勢が不安定であるため、剥離時の幅方向への張力が不均一となり、その結果、基材に折れが発生したり、ビアホール内の導電性ペーストがプラスチックフィルムと一緒にもっていかれる現象(以下、「ペースト取られ」という)が発生したりする問題がある。また、シート材が弛んだ状態では、基材の先端を取出しチャックで狭持することができない問題もある。   And when the plastic film is peeled from the base material in a state where the sheet material is loose, the posture is unstable, so the tension in the width direction at the time of peeling becomes uneven, and as a result, the base material may be broken. There is a problem that the conductive paste in the via hole is taken along with the plastic film (hereinafter referred to as “paste removal”). Further, when the sheet material is slack, there is a problem that the tip of the base material cannot be taken out and held by the chuck.

そこで、本発明は、このような事情に鑑みてなされたものであり、基材と、基材の片面又は両面に貼付されたフィルムとを備えるシート材の厚さが極めて薄い場合であっても、基材からフィルムを確実に剥離することができるフィルム剥離方法を提供することを目的とする。   Therefore, the present invention has been made in view of such circumstances, and even when the thickness of a sheet material including a base material and a film attached to one or both surfaces of the base material is extremely thin. An object of the present invention is to provide a film peeling method capable of reliably peeling a film from a substrate.

上記目的を達成するために、本発明に係るフィルム剥離方法は、基材と、基材の片面又は両面に貼付されたフィルムとを備えるシート材を、その厚さ方向が鉛直方向と略垂直となるように保持し、その状態で基材からフィルムを剥離することを特徴とする。   In order to achieve the above object, a film peeling method according to the present invention is a sheet material comprising a substrate and a film attached to one or both sides of the substrate, the thickness direction of which is substantially perpendicular to the vertical direction. It hold | maintains so that a film may be peeled from a base material in the state.

このフィルム剥離方法によれば、シート材の厚さが極めて薄い場合であっても、シート材が自重によって弛んだ状態となることが抑止されるため、基材の折れやペースト取られ等の発生を防止して、基材からフィルムを確実に剥離することができる。   According to this film peeling method, even when the thickness of the sheet material is extremely thin, the sheet material is restrained from being loosened by its own weight, so that the base material is broken or the paste is removed. And the film can be reliably peeled from the substrate.

本発明に係るフィルム剥離方法においては、シート材の保持は、少なくとも対向する二辺をチャックすることで行われてもよいし、真空吸着によって行われてもよい。   In the film peeling method according to the present invention, the holding of the sheet material may be performed by chucking at least two opposite sides, or may be performed by vacuum suction.

本発明に係るフィルム剥離方法は、シート材の厚さが10μm〜100μmである場合や、基材の厚さが5μm〜60μmである場合に特に有効である。   The film peeling method according to the present invention is particularly effective when the thickness of the sheet material is 10 μm to 100 μm or when the thickness of the base material is 5 μm to 60 μm.

本発明に係るフィルム剥離方法においては、基材は、樹脂に含浸された繊維で形成されている場合や、プリプレグである場合があり、基材がプリプレグである場合には、プリプレグは、導電性部材が充填された貫通穴を有する場合がある。また、フィルムは、プラスチックフィルムである場合や、ポリエチレンフィルムである場合がある。   In the film peeling method according to the present invention, the substrate may be formed of fibers impregnated with a resin or may be a prepreg. When the substrate is a prepreg, the prepreg is conductive. The member may have a filled through hole. The film may be a plastic film or a polyethylene film.

本発明によれば、基材と、基材の片面又は両面に貼付されたフィルムとを備えるシート材の厚さが極めて薄い場合であっても、基材からフィルムを確実に剥離することができる。   According to the present invention, even when the thickness of a sheet material including a base material and a film attached to one or both sides of the base material is extremely thin, the film can be reliably peeled from the base material. .

以下、本発明の好適な実施形態について、図面を参照して詳細に説明する。   DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

本実施形態におけるフィルム剥離方法は、例えば、IVH付き多層印刷配線板の製造工程等において使用され、次のように実施される。すなわち、導電性ペーストが充填されたビアホールを有する基材と、その基材の片面又は両面に貼付(添付)された保護フィルムとを備えるシート材を、その厚さ方向が鉛直方向と略垂直となるように保持し、その状態で基材から保護フィルムを剥離する。   The film peeling method in this embodiment is used, for example, in a manufacturing process of a multilayer printed wiring board with IVH, and is performed as follows. That is, a sheet material including a base material having a via hole filled with a conductive paste and a protective film attached (attached) to one or both surfaces of the base material, the thickness direction of the base material being substantially perpendicular to the vertical direction. The protective film is peeled off from the substrate in this state.

このとき、シート材の保持は、チャッキング装置を用いて、少なくとも対向する二辺(例えば、基材の上下二辺)をチャックすることで行われることが好ましい。更に、シート材の保持は、鉛直方向に立設された真空吸着台を用いて、真空吸着によって行われることがより好ましい。これらによれば、シート材の厚さ方向が鉛直方向と略垂直となるようにシート材を確実に保持することができる。   At this time, the holding of the sheet material is preferably performed by chucking at least two opposite sides (for example, upper and lower sides of the base material) using a chucking device. Further, the holding of the sheet material is more preferably performed by vacuum suction using a vacuum suction stand erected in the vertical direction. According to these, the sheet material can be reliably held so that the thickness direction of the sheet material is substantially perpendicular to the vertical direction.

上述したフィルム剥離方法によれば、シート材の厚さが極めて薄い場合であっても、シート材が自重によって弛んだ状態となることが抑止されるため、基材の折れやペースト取られ等の発生を防止して、基材から保護フィルムを確実に剥離することができる。   According to the film peeling method described above, even when the thickness of the sheet material is extremely thin, the sheet material is prevented from being loosened by its own weight, so that the base material is bent or the paste is removed, etc. Generation | occurrence | production can be prevented and a protective film can be peeled reliably from a base material.

ところで、シート材を水平に保持した場合におけるシート材の自重による弛みは、100μm以下というようにシート材の厚さが薄くなるほど、剛性の低下によって顕著となることが確認されている。そのため、上述したフィルム剥離方法は、シート材の厚さが10μm〜100μmである場合や、基材の厚さが5μm〜60μmである場合に特に有効である。   By the way, it has been confirmed that the looseness due to the weight of the sheet material when the sheet material is held horizontally becomes more conspicuous due to the decrease in rigidity as the thickness of the sheet material is reduced to 100 μm or less. Therefore, the film peeling method described above is particularly effective when the thickness of the sheet material is 10 μm to 100 μm or when the thickness of the base material is 5 μm to 60 μm.

なお、基材は、樹脂に含浸された繊維で形成されている場合や、プリプレグである場合があり、基材がプリプレグである場合には、プリプレグは、導電性の樹脂等の導電性部材が充填された貫通穴を有する場合がある。また、保護フィルムは、プラスチックフィルムである場合や、ポリエチレンフィルムである場合がある。これらの場合にも、上述したフィルム剥離方法を好適に使用することが可能である。   The base material may be formed of fibers impregnated with a resin or may be a prepreg. When the base material is a prepreg, the prepreg is made of a conductive member such as a conductive resin. May have filled through holes. The protective film may be a plastic film or a polyethylene film. Also in these cases, the above-described film peeling method can be preferably used.

[実施例1]
図1に示されるように、厚さ:50μm、外形寸法:512mm×612mmのプリプレグ(基材)1に、厚さ:21μm、外形寸法:514mm×612mmのプラスチックフィルム(フィルム)2を加熱・圧着してシート材を得た。その後、シート材に形成したビアホール(貫通穴)3に導電性ペースト(導電性部材)を充填して導電性ペースト入りのシート材4を作製した。
[Example 1]
As shown in FIG. 1, a plastic film (film) 2 having a thickness of 21 μm and an outer dimension of 514 mm × 612 mm is heated and pressure-bonded to a prepreg (base material) 1 having a thickness of 50 μm and an outer dimension of 512 mm × 612 mm. Thus, a sheet material was obtained. Then, the conductive paste (conductive member) was filled in the via hole (through hole) 3 formed in the sheet material to produce a sheet material 4 containing the conductive paste.

続いて、シート材4の上下二辺(対向する二辺)においてプリプレグ1からプラスチックフィルム2の一部2aを10mm程度剥離してチャッキング代を設け、チャッキング装置5を用いてチャッキング代をチャックして、シート材4を鉛直方向下向きに懸垂させた。これにより、シート材4は、その自重によって真っ直ぐに垂れ下がった。その状態において、シート材4に対して仰角45℃の角度でプリプレグ1からプラスチックフィルム2を剥離したところ、プリプレグ1の折れ等が発生することなく安定的に剥離を実施することができた。   Subsequently, on the two upper and lower sides (two opposite sides) of the sheet material 4, a part 2 a of the plastic film 2 is peeled from the prepreg 1 by about 10 mm to provide a chucking allowance. After chucking, the sheet material 4 was suspended vertically downward. Thereby, the sheet | seat material 4 hung down straight with the dead weight. In this state, when the plastic film 2 was peeled from the prepreg 1 at an elevation angle of 45 ° C. with respect to the sheet material 4, the prepreg 1 could be peeled stably without causing breakage or the like.

[実施例2]
図2に示されるように、実施例1と同様のシート材4を準備し、鉛直方向に立設された真空吸着台6を用いて、シート材4の周縁部を吸着パッド7によって真空吸着することでシート材4を保持した。その状態において、シート材4に対して仰角45℃の角度でプリプレグ1からプラスチックフィルム2を剥離したところ、プリプレグ1の折れ等が発生することなく安定的に剥離を実施することができた。この真空吸着台6を用いる方法は、チャッキング装置5を用いる方法のようにチャッキング代を設ける必要がないため、より好適である。
[Example 2]
As shown in FIG. 2, a sheet material 4 similar to that of Example 1 is prepared, and the peripheral edge of the sheet material 4 is vacuum-sucked by a suction pad 7 using a vacuum suction stand 6 erected in the vertical direction. Thus, the sheet material 4 was held. In this state, when the plastic film 2 was peeled from the prepreg 1 at an elevation angle of 45 ° C. with respect to the sheet material 4, the prepreg 1 could be peeled stably without causing breakage or the like. The method using the vacuum suction table 6 is more preferable because it does not require a chucking allowance unlike the method using the chucking device 5.

[比較例1]
図3に示されるように、実施例1と同様のシート材4を準備し、シート材4の左右二辺でプリプレグ1からプラスチックフィルム2の一部2aを10mm程度剥離してチャッキング代を設け、チャッキング装置5を用いてチャッキング代をチャックして、612mm幅の間隔をあけてシート材4を支持台8上に水平に載置した。その状態において、シート材4に対して仰角45℃の角度でプリプレグ1からプラスチックフィルム2を剥離した。このとき、チャッキング装置5に張力をかけず、端部を抑える程度にした。これは、従来の剥離搬送保持方法の「コンベアの張力をかけない状態」を再現するためである。
[Comparative Example 1]
As shown in FIG. 3, a sheet material 4 similar to that of Example 1 is prepared, and a portion 2a of the plastic film 2 is peeled from the prepreg 1 by about 10 mm on the left and right sides of the sheet material 4 to provide a chucking allowance. Then, the chucking allowance was chucked using the chucking device 5, and the sheet material 4 was placed horizontally on the support base 8 with an interval of 612 mm. In this state, the plastic film 2 was peeled from the prepreg 1 at an angle of elevation of 45 ° C. with respect to the sheet material 4. At this time, tension was not applied to the chucking device 5 and the end portion was suppressed. This is to reproduce the “state in which no conveyor tension is applied” in the conventional peeling conveyance holding method.

次に、実施例1及び比較例1のフィルム剥離方法を使用して、それぞれ50枚のシート材4に対して剥離実験を行った。評価は、50枚のプリプレグ1における折れの発生率、及び4000個のビアホール3におけるペースト取られの発生率で行った。その結果を表1に示す。   Next, using the film peeling methods of Example 1 and Comparative Example 1, peeling experiments were performed on 50 sheet materials 4 respectively. The evaluation was performed based on the rate of occurrence of folding in 50 prepregs 1 and the rate of occurrence of paste removal in 4000 via holes 3. The results are shown in Table 1.

Figure 2007283761
Figure 2007283761

表1に示されるように、折れの発生率については、実施例1のフィルム剥離方法では0%であったのに対し、比較例1のフィルム剥離方法では4%であった。また、ペースト取られの発生率については、実施例1のフィルム剥離方法では0.06%であったのに対し、比較例1のフィルム剥離方法では1.8%であり、実施例1のフィルム剥離方法の30倍であることが明らかになった。   As shown in Table 1, the occurrence rate of folds was 0% in the film peeling method of Example 1, whereas it was 4% in the film peeling method of Comparative Example 1. Also, the rate of occurrence of paste removal was 0.06% in the film peeling method of Example 1, whereas it was 1.8% in the film peeling method of Comparative Example 1, and the film of Example 1 It became clear that it was 30 times the peeling method.

実施例1のフィルム剥離方法を示す概略図である。1 is a schematic view showing a film peeling method of Example 1. FIG. 実施例2のフィルム剥離方法を示す概略図である。6 is a schematic view showing a film peeling method of Example 2. FIG. 比較例1のフィルム剥離方法を示す概略図である。It is the schematic which shows the film peeling method of the comparative example 1.

符号の説明Explanation of symbols

1…プリプレグ(基材)、2…プラスチックフィルム(フィルム)、3…ビアホール(貫通穴)、4…シート材。   DESCRIPTION OF SYMBOLS 1 ... Prepreg (base material), 2 ... Plastic film (film), 3 ... Via hole (through hole), 4 ... Sheet material.

Claims (10)

基材と、前記基材の片面又は両面に貼付されたフィルムとを備えるシート材を、その厚さ方向が鉛直方向と略垂直となるように保持し、その状態で前記基材から前記フィルムを剥離することを特徴とするフィルム剥離方法。   A sheet material comprising a substrate and a film attached to one or both sides of the substrate is held so that the thickness direction is substantially perpendicular to the vertical direction, and the film is removed from the substrate in that state. A film peeling method characterized by peeling. 前記シート材の保持は、少なくとも対向する二辺をチャックすることで行われることを特徴とする請求項1記載のフィルム剥離方法。   2. The film peeling method according to claim 1, wherein the holding of the sheet material is performed by chucking at least two opposite sides. 前記シート材の保持は、真空吸着によって行われることを特徴とする請求項1記載のフィルム剥離方法。   The film peeling method according to claim 1, wherein the holding of the sheet material is performed by vacuum suction. 前記シート材の厚さは10μm〜100μmであることを特徴とする請求項1〜3のいずれか一項記載のフィルム剥離方法。   The thickness of the said sheet | seat material is 10 micrometers-100 micrometers, The film peeling method as described in any one of Claims 1-3 characterized by the above-mentioned. 前記基材の厚さは5μm〜60μmであることを特徴とする請求項1〜4のいずれか一項記載のフィルム剥離方法。   The thickness of the said base material is 5 micrometers-60 micrometers, The film peeling method as described in any one of Claims 1-4 characterized by the above-mentioned. 前記基材は、樹脂に含浸された繊維で形成されていることを特徴とする請求項1〜5のいずれか一項記載のフィルム剥離方法。   The film peeling method according to any one of claims 1 to 5, wherein the substrate is formed of fibers impregnated with a resin. 前記基材はプリプレグであることを特徴とする請求項1〜5のいずれか一項記載のフィルム剥離方法。   The film peeling method according to claim 1, wherein the substrate is a prepreg. 前記プリプレグは、導電性部材が充填された貫通穴を有することを特徴とする請求項7記載のフィルム剥離方法。   8. The film peeling method according to claim 7, wherein the prepreg has a through hole filled with a conductive member. 前記フィルムはプラスチックフィルムであることを特徴とする請求項1〜8のいずれか一項記載のフィルム剥離方法。   The film peeling method according to claim 1, wherein the film is a plastic film. 前記フィルムはポリエチレンフィルムであることを特徴とする請求項1〜8のいずれか一項記載のフィルム剥離方法。   The film peeling method according to any one of claims 1 to 8, wherein the film is a polyethylene film.
JP2007067106A 2006-03-20 2007-03-15 Film peeling method Expired - Fee Related JP5012112B2 (en)

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Cited By (1)

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KR101011257B1 (en) * 2009-12-29 2011-01-26 주식회사 이에스디웍 Multilayer sheet for protection of lcd panels

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JP2000338844A (en) * 1999-03-19 2000-12-08 Dainippon Printing Co Ltd Method and device for manufacturing hologram photographic dry plate
JP2002329974A (en) * 2001-05-01 2002-11-15 Nitto Denko Corp Wiring board and method of manufacturing the same
JP2003298029A (en) * 2002-03-28 2003-10-17 Seiko Epson Corp Apparatus and method for exfoliation transfer, semiconductor device and ic card
JP2004322998A (en) * 2003-04-23 2004-11-18 Hyundai Motor Co Ltd Automatic peeling device for door glass sun-cut film of scrapped automobile

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JP2000338844A (en) * 1999-03-19 2000-12-08 Dainippon Printing Co Ltd Method and device for manufacturing hologram photographic dry plate
JP2002329974A (en) * 2001-05-01 2002-11-15 Nitto Denko Corp Wiring board and method of manufacturing the same
JP2003298029A (en) * 2002-03-28 2003-10-17 Seiko Epson Corp Apparatus and method for exfoliation transfer, semiconductor device and ic card
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101011257B1 (en) * 2009-12-29 2011-01-26 주식회사 이에스디웍 Multilayer sheet for protection of lcd panels

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