JP2007281123A - Test equipment of tab - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable TAB test equipment which judges pieces by their images and punches a hole, in an NG piece to punch a hole efficiently in each of NG pieces which are continuous due to flaws, printing failures, etc. <P>SOLUTION: The TAB test equipment is equipped with a transfer means of transferring TAB, an image acquisition means for acquiring each piece of TAB as an image, a judging means for judging whether the piece is good or not on the basis for its image, and a punching means for punching a hole in an NG piece. A viewing station visually judges whether a piece following the NG piece is an NG piece or not when the NG piece that has been judged NG by the judging means is transferred, an NG range input means is provided which inputs information as to a range in which NG pieces continue, and the transfer means transfers the NG piece judged by the judging means to the viewing station. After the information as to an NG range is inputted, the NG pieces present within the inputted range are successively and continuously transferred to a punching position, and the punching means punches a hole continuously in each of the NG pieces which are successively transferred. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a TAB inspection apparatus that inspects TAB defects and the like, and belongs to the technical field of article inspection.

  In recent years, as a small and thin package of an IC chip, TAB has been developed in which a copper foil or the like is bonded to a belt-like film and a circuit pattern is formed by photoetching or the like. In TAB, a large number of circuit patterns are repeatedly formed at a constant pitch, and an apparatus for inspecting defects such as disconnection in a circuit pattern region corresponding to one chip (hereinafter, the unit of the pattern is referred to as “piece”) Various types have been proposed.

  For example, the inspection apparatus disclosed in Patent Document 1 includes a transfer unit that transfers TAB, and acquires a light source that illuminates TAB on the transfer path by the transfer unit, and an image of the TAB that is illuminated by the light source. And a CCD camera. In this apparatus, the CCD camera acquires an image for each piece of TAB, and the one piece image acquired by the camera is compared with a reference image stored in advance, so that the piece is an OK piece or It is determined to be an NG piece, and if it is an NG piece, a punch hole is formed by a punching device (hereinafter simply referred to as “punching”).

  By the way, in the apparatus described in Patent Document 1, when punching an NG piece, the NG piece is transferred to a corresponding position of the punching device (hereinafter referred to as “punch position”) and punched each time an NG piece is detected. Thereafter, the transfer means is controlled so that the next piece of the NG piece is returned to the imaging position. In such a configuration, when the NG pieces are continuous, the inspection efficiency is poor because the NG pieces are reciprocated between the punch position and the imaging position one by one.

  In order to deal with such a problem, there is an inspection apparatus disclosed in a previous application (Japanese Patent Application No. 2005-195824) by the present applicant.

  In this inspection apparatus, when NG pieces are continuously detected, the inspection is continued, and when an OK piece following the NG piece is detected, one or a plurality of NG pieces are transferred to the punch position, and these NG pieces are continuously punched. When the detection of the OK piece is used as a trigger for punching the NG piece as described above, the NG determination is made when there is a problem that the OK piece is determined to be an NG piece due to an abnormality of the apparatus or the like. However, it is impossible to detect anomalies. Therefore, in order to detect such an abnormality early, when the NG determination is continued a predetermined number of times (for example, 5 times), the apparatus is temporarily stopped to notify the operator of the abnormality.

  And in the apparatus stopped in this way, when an abnormality of the apparatus is discovered by the operator, the apparatus is repaired. However, there is no abnormality in the apparatus, and an NG piece having a defect or the like is predetermined. When it is confirmed that the NG pieces are continuous, the NG pieces are transferred to the punch position and continuously punched, and the subsequent pieces of these NG pieces are positioned at the imaging position, and the inspection is resumed. Will be.

JP 2000-182061 A

  By the way, in a pre-process for manufacturing a TAB, a scratch or a printing defect may be formed over a plurality of continuous pieces due to some trouble (for example, a scratch of 10 m for a TAB having a length of 80 m). . In such a case, since a larger number of NG pieces continue than the predetermined number of times, the apparatus is configured to stop once when the predetermined number of NG pieces continue as described above. Each time a piece is detected, the apparatus is temporarily stopped, and an operator must deal with it one by one, resulting in poor work efficiency.

  Therefore, the present invention determines whether each piece of TAB is good or bad by image processing, and in a TAB inspection apparatus that forms punch holes in the NG piece, there are NG pieces continuously due to scratches on the TAB surface, printing defects, etc. Sometimes, it is an object to efficiently form punch holes in these NG pieces.

  In order to solve the above problems, the present invention is configured as follows.

  First, the invention described in claim 1 of the present application is a transfer means that feeds a strip-shaped TAB formed of a large number of pieces at a constant pitch from a reel and transfers it on a predetermined transfer path, and is transferred by the transfer means. An image acquisition means for acquiring each piece of the TAB as an image, a determination means for processing the image acquired by the acquisition means and comparing it with a reference image registered in advance, and the transfer path A TAB inspection apparatus having a punching means provided on the NG piece to form a punch hole in the NG piece, wherein the NG piece determined by the determination means is transferred onto the transfer path and continues to the NG piece A visual station is provided to determine whether or not the piece is an NG piece by visual inspection of the operator, and the NG pieces are continuous by visual judgment at the visual station. NG range input means for inputting information of the continuous range and a transfer control means for controlling the transfer means when it is determined that the transfer control means is determined by the determination means. The NG pieces are transferred to the viewing station, and after the information on the range in which the NG pieces are continuous is input by the NG range input means, the NG pieces in the input range are sequentially and sequentially transferred to the corresponding positions of the punch means. The punching means continuously forms punch holes in the NG pieces sequentially transferred by the transferring means.

  Further, in the invention described in claim 2, in the TAB inspection apparatus according to claim 1, the transfer control means transfers the NG piece determined by the determination means and the subsequent piece to a viewing station. The NG range input means is provided with control means for controlling the transfer means and indicating the front and rear pieces of the NG piece when the NG pieces transferred to the viewing station are continuous. A range in which NG pieces whose front ends and rear ends are instructed by the instruction means is taken in is taken.

  The invention according to claim 3 is the TAB inspection apparatus according to claim 1, wherein the NG range input means inputs information on the length or number of pieces of TAB in which NG pieces are continuous. Features.

  First, according to the first aspect of the present invention, a strip-shaped TAB comprising a large number of pieces provided at a constant pitch is fed out from a reel and transferred on a predetermined transfer path by the transfer means, and the image acquisition means. Thus, an image of each piece of the TAB being transferred is acquired, and it is determined that the piece is an OK piece or an NG piece by comparing this image with a pre-registered reference image.

  When it is determined that the OK piece is determined by the determination means, the transfer of the TAB is continued by the transfer means, and the same determination is performed for the subsequent pieces. However, when it is determined as the NG piece, the NG piece is visually checked. The transfer means is controlled so as to be transferred to the station, and whether or not the piece following the NG piece is an NG piece at the viewing station is determined by visual observation of the operator. And as a result of the visual determination by the operator, when it is determined that the NG pieces are continuous, information on the continuous range is input by the NG range input means, and thereafter, the NG pieces in the input range are punched means The punched holes are continuously formed by the punching means for the transferred NG pieces. For example, as a result of the visual determination, if a scratch or a printing defect formed from the NG piece determined by the determination unit to the subsequent piece is confirmed, information on the range of the TAB corresponding to these scratches is obtained. Since it is input, punch holes are continuously formed in the NG pieces within this range.

  As described above, according to the present invention, when an NG piece is determined by image processing, whether or not the NG piece continues is confirmed by visual observation. Since punch holes are continuously formed by the punch means without reciprocating between the position and the punch position, the efficiency of inspection is realized.

  According to a second aspect of the present invention, the transfer control means transfers the NG piece determined by the determination means and the subsequent piece to the viewing station and NG transferred to the viewing station. When the pieces are continuous, the front and rear pieces of the NG piece are indicated by the indicating means. The NG range input means takes in a range in which NG pieces whose front end and rear end are instructed by the instruction means are continuous.

  For example, when scratches, printing defects, etc. are formed across multiple pieces, after the front end of the NG piece is instructed by the instruction means, the operator performs fixed point observation of the TAB surface transferred by the visual station. If the scratch or the like is not confirmed, the rear end of the NG piece is instructed by the instruction means. As a result, NG pieces within a range where scratches and the like exist are specified, and these NG pieces are successively transferred to the corresponding positions of the punch means in succession, and are successively transferred to the sequentially transferred NG pieces by the punch means. Since punch holes are formed, inspection efficiency can be improved.

  According to a third aspect of the present invention, the NG range input means inputs information on the length or number of pieces of TABs in which NG pieces are continuous. For example, when scratches or the like are formed over a plurality of pieces, the operator performs a visual determination on the NG piece and its subsequent pieces after the NG piece determined by the determination means is transferred to the visual station. The length of the TAB or the number of pieces corresponding to the scratch or the like is input.

  Then, the NG pieces included in the range of the TAB length or the number of pieces are successively transferred sequentially to the corresponding positions of the punch means, and punch holes are continuously formed in the transferred NG pieces by the punch means. As a result, the inspection efficiency is improved.

  Hereinafter, a first embodiment of the present invention will be described.

  A TAB inspection apparatus 1 according to the present embodiment shown in FIG. 1 performs pass / fail judgment of each piece X... X of a strip-shaped TAB as shown in FIG. TAB has a constant circuit pattern (hereinafter referred to as “piece X”) for each chip on a strip-shaped film tape T provided with perforations P... P at a constant pitch along both ends in the width direction. It is provided repeatedly at a pitch.

  As shown in FIG. 1, the inspection apparatus 1 guides a machine casing 2, an unwinding reel 10 provided on the machine casing 2 for unwinding the TAB, and a TAB fed out from the unwinding reel 10. Guide rollers 11, 11, a plurality of sprocket wheels 12 a to 12 e that are provided to prevent meandering of the TAB and engage with the perforations P... P of the TAB, and first to third drives that rotate and transfer the TAB. It has rollers 13a to 13c and a take-up reel 14 for winding TAB.

  Further, along the TAB transfer path, a static eliminating machine 15 that removes static electricity on the TAB surface, a dust removing device 16 that removes dust on the TAB surface by air suction action, a magnetic powder removing magnet 17 that removes metallic foreign matter on the TAB surface, An adhesive roll 18 that contacts the surface of the TAB and removes foreign matter, a photoelectric sensor 19 that detects the downstream edge of each piece X of the TAB, and a first and second that continuously acquire a linear image in the width direction of the TAB. Line sensors 20, 21, a first projector 22 that illuminates the TAB obliquely from above, a second projector 23 that illuminates the TAB from the back surface, and a microscope for the operator to view an enlarged image of the TAB surface 24, a punching device 25 for forming punch holes in the TAB, and a dust removing roll 26 that contacts the TAB surface and removes dust on the surface. In addition, first and second inspection monitors 27 and 28 for displaying images and the like acquired by the first and second line sensors 20 and 21 are provided above the machine casing 2.

  On the other hand, the TAB and the protective sheet S are wound around the unwinding reel 10, and the protective sheet S is separated at the same time when the TAB is unwound from the unwinding reel 10. . A plurality of guide rollers 29a to 29d for guiding the separated protective sheet S and a dancer roller 30 provided between the central guide rollers 29b and 29c for optimizing the tension of the protective sheet S by its own weight are provided. The protective sheet S guided by these is simultaneously wound when the TAB is taken up by the take-up reel 10, and the TAB and the protective sheet S are stacked on the take-up reel 14.

  Further, the sprocket wheel 12d provided between the microscope 24 and the punching device 25 is an encoder 12d ′ (see FIG. 5) that acquires information on the transfer distance and transfer speed of the TAB based on the information on the rotation amount of the wheel 12d. 3). The first driving roller 13a on the upstream side among the first to third driving rollers 13a to 13c performs feedback control of the rotational speed based on the information on the transfer speed acquired by the encoder 12d '. Yes. Further, the second and third drive rollers 13b and 13c on the downstream side of the first drive roller 13a are set to a rotation speed that optimizes the TAB tension.

  Pressing rollers 13a 'to 13c' for pressing the TAB from above are provided above the first to third driving rollers 13a to 13c. The pressing rollers 13a 'to 13c' are configured to press both ends in the width direction where the TAB perforations P ... P are provided, and act to optimize the TAB tension.

  On the other hand, as shown in FIG. 3, the inspection apparatus 1 includes a transport controller 100 and an image controller 110 that exchange signals with each other. The transport controller 100 inputs signals from the encoder 12d ′, the photoelectric sensor 19, and the keyboard 101, the touch panel 102, etc., on which an operator inputs data, the first to third drive rollers 13a to 13c, and the punch A control signal is output to the device 25 or the like. The image controller 110 receives signals from the encoder 12d ', the first and second line sensors 20, 21 and the like, and outputs control signals to the first and second inspection monitors 27 and 28, etc. It is like that.

  The first projector 22 is arranged to irradiate light from obliquely above the TAB being transferred, and the first line sensor 20 continuously reflects the reflected light of the TAB by the illumination of the first projector 22. To detect automatically. The second projector 23 is arranged so as to irradiate light from below the TAB being transferred, and the second line sensor 21 transmits the transmitted light of the TAB by the illumination of the second projector 23. It is designed to detect continuously. The image controller 110 combines the TAB width direction linear images acquired from the first and second line sensors 20 and 21 to create a one-piece image.

  Further, a reference image of piece X is stored in the memory 100a built in the image controller 110, and the reference image and the one piece image acquired by the first and second line sensors 20, 21 are stored. By comparison, the existence of defects (hereinafter referred to as “NG”) or non-existence (hereinafter referred to as “OK”) of each piece X is determined.

  On the other hand, the determination result is input to the transfer controller 100, and the transfer control of the TAB is performed accordingly. When both pieces of images acquired by the first and second line sensors 20 and 21 are determined to be OK, the inspection for the piece X is finished and the inspection of the subsequent piece X is started. The piece X for which one or both of them are determined to be NG is transferred to a corresponding position of the microscope 24 (hereinafter referred to as “microscope position”) or a corresponding position of the punch device 25 (hereinafter referred to as “punch position”). The inspection for the piece X is temporarily interrupted.

  At the start of inspection, the photoelectric sensor 19 detects the downstream edge of the leading piece X provided on the film tape T. Then, the piece X is transferred from the position detected by the photoelectric sensor 19 to the reference position upstream by a predetermined distance, and the setting of the initial TAB position is completed. Also, the operator inputs information such as the pitch of each piece X of the TAB in advance through the touch panel 102, and based on these information, the distance from the reference position to the first and second line sensors 20, 21; A distance from the reference position to the microscope position, a distance from the reference position to the punch position, and the like are calculated. Based on the transfer distance information obtained by the encoder 12d ′, the image acquisition start timing by the first and second line sensors 20 and 21, the image acquisition end timing, the punch timing by the punch device 25, and the like are calculated. .

  By the way, at the start of inspection, regarding the handling of the piece X determined to be NG, as shown in FIG. 4, “microscope mode” and “punch mode” can be selected on the mode selection screen of the touch panel 102.

  Here, the control when the microscope mode is selected by the operator will be described with reference to the flowchart of FIG.

First, N is initialized to zero in step S1, and TAB is continuously transferred at a predetermined speed in step S2. In step S3, it is determined whether or not it is an image acquisition timing. If the image acquisition timing is reached, the process proceeds to step S4, and an image of one piece is acquired by each of the first and second line sensors 20 and 21. Next In step S5, it is determined whether N ≠ 0. If N = 0, the process proceeds to step S6 to determine whether the piece is good or bad. At this time, the image acquired in step S4 is compared with the reference image, and when these images are substantially the same and an OK determination is made, the process returns to step S2 and the determination is performed in the same manner for the next piece. . If a difference between the acquired image and the reference image is recognized in step S6 and an NG determination is made, the process proceeds to step S7, N + 1 is substituted for N, and the process returns to step S2.

  On the other hand, when N ≠ 0 in step S5, that is, in a state where an NG piece has already been detected once or more, the process proceeds to step S8, and the quality of the piece is determined as in step S6. If an OK determination is made here, a first NG process described later is executed. If an NG determination is made, the process proceeds to step S9, N + 1 is substituted for N, and the process proceeds to step S10. In step S10, it is determined whether or not N = 5. When N ≠ 5, that is, when the NG determination is continuously performed 1 to 4 times, the process returns to step S2, and when N = 5, that is, 5 When it is determined that the NG determination has been repeated twice, the process proceeds to step S11, and a second NG process described later is executed.

  As shown in FIG. 6, in the first NG process, after the TAB feed is temporarily stopped in step S21, the NG piece is positioned at a microscope position at a high speed in step S22. Here, when there are a plurality of NG pieces, the most downstream NG piece is positioned at the microscope position. In step S23, 1 is substituted for i.

  At this time, as shown in FIG. 7, the touch panel 102 displays a microscope check screen on which “OK”, “NG”, “next piece”, and “stop” can be selected. In step S24, the operator visually determines the NG piece at the microscope position, and inputs an inspection result by pressing OK or NG on the touch panel 102. In step S25, it is determined whether i = N. If it is determined in this determination that i.noteq.N, when the operator presses the "next piece" in step S26, TAB is sent for one piece and i + 1 is substituted for i in step S27. Then, the process returns to step S24, and the same determination is made on the subsequent NG piece by visual observation of the operator.

  If it is determined in step S25 that i = N, the process proceeds to step S28 to select a restart method. At this time, the touch panel 102 displays three types of restart methods as shown in FIG. 8 and can be selected by the operator.

  In step S28, when “Resume inspection from NG piece (NG piece re-inspection)” is selected in the re-inspection, that is, the restart method selection screen of the touch panel 102, the NG piece is positioned at the reference position at a high speed in step S29. Returning to step S2 of the flowchart of FIG.

  The TAB feed operation when this re-examination is selected will be described with reference to FIG. Here, a case where an OK piece is detected after an NG piece has been detected twice in succession will be described as an example. In this figure, undetermined pieces are shaded.

  First, as shown in FIG. 9A, when each piece X1 to X3 passes the line sensors 20 and 21, the NG piece X1 on the downstream side is moved to the microscope position at a high speed as shown in FIG. 9B. Let Then, as shown in FIG. 9C, as a result of sequentially performing the visual determination of the pieces X1 and X2 with the microscope 24, the operator wants to perform the pass / fail determination again by the image processing. When is selected, as shown in FIG. 9D, the piece X1 is moved to the reference position at a high speed, and the pieces X1 to X3 are re-inspected.

  In step S28, if “punch NG piece and resume inspection from next piece” is selected on the restart method selection screen on touch panel 102, the NG piece is positioned at the punch position at high speed in step S30. To do. In step S31, the NG piece is punched, and in step S32, the OK piece is positioned at the reference position at a high speed. When a plurality of NG pieces are detected, the NG piece on the downstream side is positioned at the punch position, and after punching on this NG piece, a TAB is sent for one piece and the next NG piece is punched. To do.

  The TAB feed operation when this punch execution is selected will be described with reference to FIG. In this case as well, a case where an OK piece is detected after two consecutive NG pieces are detected will be described as an example.

  First, as shown in FIG. 10 (a), when each piece X1 to X3 passes through the line sensors 20, 21, the NG piece X1 on the downstream side is moved to the microscope position at a high speed as shown in FIG. 10 (b). Let Then, as shown in FIG. 10 (c), the pieces X1 and X2 are sequentially visually determined by the microscope 24. As a result, it is determined that the pieces X1 and X2 are certainly NG, and the operator performs punching on the touch panel 102. 10 (d), the piece X1 is moved to the punch position at a high speed and punched into the pieces X1 and X2, and then the OK piece X3 is moved as shown in FIG. 10 (e). Position at high speed at the reference position.

  Furthermore, when “no punching and restart inspection from OK piece without punching NG piece” is selected on the restart method selection screen of touch panel 102 in step S28, the OK piece is quickly positioned at the reference position in step S33. To do.

  The TAB feed operation when this punching is selected will be described with reference to FIG. In this case as well, a case where an OK piece is detected after two consecutive NG pieces are detected will be described as an example.

  First, as shown in FIG. 11 (a), when each piece X1 to X3 passes the line sensors 20 and 21, the NG piece X1 on the downstream side is moved to the microscope position at a high speed as shown in FIG. 11 (b). Let Then, as shown in FIG. 11C, as a result of sequentially performing the visual determination of the pieces X1 and X2 with the microscope 24, it is determined that the pieces X1 and X2 are OK, and the operator does not punch on the touch panel 102. When selected, as shown in FIG. 11D, the OK piece X3 is positioned at a high speed at the reference position without punching these pieces X1 and X2.

  Next, the second NG process will be described. As shown in the flowchart of FIG. 12, the TAB feed is temporarily stopped in step S41, and the NG piece is positioned at the microscope position in step S42. Then, in step S32, OK / NG as a result of the visual determination for this NG piece is inputted by operating the touch panel 102 of the display screen shown in FIG. 7, and the TAB for one piece is obtained in step S44 by pressing the “next piece”. send. At this time, the next piece of the NG piece is positioned at the microscope position. In step S45, it is determined whether or not a stop signal has been input in response to the operator pressing the “stop” button on the touch panel 102. If no stop signal has been input, the process returns to step S43 and the same. When a stop signal is input, the process proceeds to step S46 to select a restart method.

  In step S46, when “Resume inspection from NG piece (NG piece re-inspection)” is selected on the re-inspection, that is, the restart method selection screen of touch panel 102, the NG piece is positioned at the reference position at a high speed in step S47. Returning to step S2 of the flowchart of FIG.

  The TAB feed operation when this re-examination is selected will be described with reference to FIG. First, as shown in FIG. 13A, when the pieces X1 to X5 pass through the line sensors 20 and 21, the NG piece X1 on the downstream side is moved to the microscope position at a high speed as shown in FIG. 13B. Let And as shown in FIG.13 (c), as a result of carrying out the visual determination of piece X1-X5 sequentially with the microscope 24, it is said that it would like to perform the quality determination by image processing again, and "stop" is displayed on a microscope check screen. When the re-examination is selected on the restart method selection screen as shown in FIG. 13 (d), the piece X1 is moved to the reference position at a high speed and the pieces X1 to X5 are re-inspected. Execute. In this example, the stop signal is input at the time when the pieces X1 to X5 are visually determined. However, the pieces X1 to X5 are re-established after visually determining four or six or more NG pieces. An inspection may be performed.

  In step S46, if “punch NG piece and resume inspection from next piece” is selected on the restart method selection screen on touch panel 102, the NG piece is positioned at the punch position at high speed in step S48. To do. In step S49, the NG piece is punched, and in step S50, the piece subsequent to the NG piece is positioned at a high speed at the reference position. When punching a plurality of NG pieces, the NG piece on the downstream side is positioned at the punch position, and after punching into this NG piece, one piece of TAB is sent to punch the next NG piece. Punch NG pieces continuously.

  The TAB feed operation when this punch execution is selected will be described with reference to FIG. First, as shown in FIG. 14A, when each piece X1 to X5 passes through the line sensors 20, 21, the NG piece X1 on the downstream side is moved to the microscope position at a high speed as shown in FIG. 14B. Let And as shown in FIG.14 (c), as a result of carrying out the visual determination of piece X1-X5 sequentially with the microscope 24, the crack d over several pieces was discovered and the NG piece exists also in the upstream of piece X5. Since it was predicted that the “next piece” is pressed, the visual determination is continued. Then, since the end of the scratch d is confirmed in the piece X6 and it is confirmed that the scratch d does not exist in the piece X7, “Stop” is pressed. Then, when punching is selected by the operator on the touch panel 102, as shown in FIG. 14D, the piece X1 is moved to the punch position at a high speed and punched into the pieces X1 to X6. ), The piece X7 is positioned at a high speed at the reference position.

  Furthermore, if “no punching and restart inspection from OK piece without punching NG piece” is selected on the restart method selection screen of touch panel 102 in step S46, the OK piece is quickly positioned at the reference position in step S33. To do.

  The TAB feeding operation when the punching is selected will be described with reference to FIG. 15. First, as shown in FIG. 15A, when each piece X1 to X5 passes through the line sensors 20, 21, As shown in FIG. 15B, the NG piece X1 on the downstream side is moved to the microscope position at high speed. And as shown in FIG.15 (c), as a result of carrying out the visual determination of piece X1-X5 sequentially with the microscope 24, it is judged that piece X1-X5 is OK and the restart method selection screen of the touch panel 102 by an operator is shown. When not punching is selected, as shown in FIG. 15D, these pieces X1 to X5 are not punched and the subsequent piece X6 is positioned at the reference position at a high speed.

  Next, processing when the punch mode is selected by the operator will be described with reference to the flowchart of FIG. Note that steps SS61 to S68, S70, and S71 in this flowchart are the same as steps S1 to S8, S10, and S11 in the flowchart of FIG.

  In the flowchart of FIG. 16, when it is determined in step S68 that the piece is an OK piece, the process proceeds to step S69, and the punching process shown in the flowchart of FIG. 17 is performed. In this punching process, the TAB feed is temporarily stopped in step S81, and the NG piece is positioned at the punch position at a high speed in step S82. In step S83, 1 is substituted for j, and in step S84, the NG piece is punched. Next, in step S85, it is determined whether j = N. If j = N, one piece of TAB is sent in step S86, j + 1 is substituted for j in step S87, and the process returns to step S84. Punch the next NG piece.

  If it is determined in step S71 that N = 5, the process proceeds to step S72 to perform the third NG process. The third NG process is performed according to the flowchart of FIG. 18, but steps S91 to S101 are the same processes as steps S41 to S51 of the second NG process shown in FIG. In the third NG process, re-inspection is selected in step S96, and after the NG piece is positioned at the reference position at a high speed in step S97, the process returns to step S62 in the flowchart of FIG.

  Thus, when NG pieces are detected five times in succession, the same control is performed regardless of the microscope mode or the punch mode.

  As described above, a strip-shaped TAB having a large number of pieces arranged at a constant pitch is unwound from the unwinding reel 10 and transferred, and the line sensors 20 and 21 display an image of each piece X of the TAB being transferred. It is determined that the piece X is an OK piece or an NG piece by comparing this image with a reference image registered in advance by the image controller 110.

  When the image controller 110 determines that it is an OK piece, the transfer of the TAB is continued and the same determination is performed for the subsequent pieces. However, when it is determined that the NG piece is the NG piece, the NG piece is positioned at the microscope position. The NG piece and the subsequent piece are judged to be OK or NG by visual inspection of the operator. And the result of the visual determination by an operator is input by operation of the touch panel 102, and an NG piece is transferred to a punch position. As a result of the visual determination here, if scratches or printing defects formed from the NG piece to the subsequent piece are confirmed, the pieces are continuously inspected until they are not confirmed, and confirmed here. The formed NG pieces are continuously punched.

  As described above, when an NG piece is determined by image processing, details of the abnormal state (scratches, printing failure, etc.) are visually confirmed for this NG piece and subsequent pieces, and the NG piece is continuously detected. In the subsequent case, since the punch holes are continuously formed by the punching device 25 without reciprocating the piece between the reference position and the punch position, the efficiency of the inspection is realized.

  Next, second to fourth embodiments of the present invention will be described. In this embodiment, the NG piece processing method is different from that of the first embodiment, and the apparatus configuration is the same. Therefore, the same components are denoted by the same reference numerals.

  First, the second embodiment is different in the microscope mode processing. In this case, as shown in the flowchart of FIG. 19, TAB is sent at a predetermined speed in step S111, and it is determined whether or not it is an image acquisition timing in step S112. If it is the image acquisition timing, the process proceeds to step S113, and an image is acquired by the line sensors 20 and 21 for one piece, and whether or not the piece is good is determined in step S114. In this determination, when it is determined that it is an OK piece, the process returns to step S111 and the same image determination is performed for the next piece. If it is determined in step S114 that the piece is an NG piece, the process proceeds to step S115, and the fourth NG process is executed.

  The fourth NG process is performed according to the flowchart of FIG. First, in step S121, the TAB feeding is temporarily stopped, and in step S122, the NG piece is positioned at the microscope position at high speed. Then, in step S123, OK / NG as a result of the visual determination for the NG piece is input on the microscope check screen of the touch panel 102 shown in FIG. 7, and when “next piece” is pressed in step S124, one piece worth is obtained. TAB is sent to position the next piece at the microscope position. In step S125, it is determined whether or not a stop signal is input by pressing the “stop” operation. If no stop signal is input, the process returns to step S123 to visually determine the piece at the microscope position. .

  If it is determined in step S125 that a stop signal has been input, a restart method is selected in step S126. Here, when the re-inspection is selected, the process proceeds to step S127 to position the NG piece at the reference position at high speed. When the execution of punching is selected, the NG piece is positioned at the punch position at a high speed in step S128, and the NG piece is punched in step S129. Here, when a plurality of NG pieces are present, punching is performed sequentially from the downstream side. When the punching is completed, in step S130, the piece subsequent to the NG piece is positioned at a high speed at the reference position.

  The TAB feed operation when the punch execution is selected will be described with reference to FIG. 21. First, as shown in FIG. 21A, the piece X1 passes through the line sensors 20 and 21, and is judged NG. Then, as shown in FIG. 21B, the NG piece X1 is moved to the microscope position at high speed. And as shown in FIG.21 (c), as a result of performing visual determination of the piece X1 with the microscope 24, the damage | wound d following a subsequent piece is discovered and it is estimated that the NG piece exists in the upstream of the piece X1. Therefore, the “next piece” is pushed and visual determination is continued. As a result of sequentially inspecting the pieces, it is confirmed that the end of the flaw d is present in the piece X4 and that the flaw d does not exist in the piece X5. Next, when punching is selected on the restart method selection screen of the touch panel 102 by the operator, as shown in FIG. 21 (d), the piece X1 is moved to the punch position at a high speed, and the pieces X1 to X4 are punched. After that, as shown in FIG. 21 (e), the piece X5 is positioned at the reference position at a high speed.

  In this embodiment, when at least one NG piece is determined by image processing, the operator makes a visual determination on the NG piece, and the subsequent pieces of the NG piece are also visually determined according to the result of the visual inspection. Is done. Therefore, when there are scratches or printing defects formed over a plurality of continuous pieces, continuous NG pieces can be detected efficiently, and these NG pieces are continuously punched. The working efficiency is improved without the NG piece reciprocating between the reference position and the microscope position.

  Next, a third embodiment will be described. This embodiment is different from the first embodiment in the display screen of the microscope check on the touch panel 102, and performs NG piece processing according to the operation of this screen.

  That is, as shown in FIG. 22, the display screen of the microscope check can select “TAB feed start” and “TAB feed stop”, and when “TAB feed stop” is selected, it is shown in FIG. The restart method selection screen appears. In this case, instead of the second to fourth NG processes, a fifth NG process described below is performed.

  In the fifth NG process, as shown in the flowchart of FIG. 23, the TAB feed is temporarily stopped in step S141, and the NG piece is positioned at the microscope position at a high speed in step S142. In step S143, it is determined whether or not the “TAB feed start” on the touch panel 102 has been pressed by the operator. If the operator presses the TAB, the TAB is continuously transferred at a predetermined speed in step S144. Measure the feed amount. In step S145, it is determined whether or not “TAB feed stop” has been pushed. If not pushed, the process returns to step S144 to continue measuring the TAB feed amount. In step S146, an NG range is set. The NG range here is the range of the feed amount measured in step S144, and the pieces included in this range are determined as NG pieces.

  Then, the process proceeds to step S147, and when re-examination is selected on the restart method selection screen in FIG. 8, the process proceeds to step S148, and the NG piece at the most downstream of the NG pieces is positioned at the reference position at high speed. In this flowchart, (III) corresponds to (I) of the second NG process, (II) of the third NG control, and (end) of the fourth NG control.

  If punch execution is selected in step S147, the NG piece is positioned at the punch position at high speed in step S149, and all the pieces included in the range are continuously punched in step S150. In step S151, the piece following the NG piece is positioned at a high speed at the reference position. Furthermore, when not punching is selected in step S147, the piece following the NG piece is positioned at a high speed at the reference position in step S152.

  In this embodiment, after the NG piece is positioned at the microscope position, the operator presses “TAB feed start” on the microscope check screen of the touch panel 102 and observes the surface of the TAB continuously transferred. Meanwhile, the subsequent TAB is determined. And when there are scratches, printing defects, etc. across multiple pieces, when the scratches are no longer confirmed, the "TAB feed stop" is pressed, and this specifies the range where the scratches etc. exist . And the piece contained in this range is punched as an NG piece. Even with such a method, continuous NG pieces are efficiently detected, and the inspection efficiency is improved by continuously punching the NG pieces.

  Next, a fourth embodiment will be described. This embodiment differs from the third embodiment in the display screen of the microscope check on the touch panel 102.

  That is, as shown in FIG. 24, the “microscope check display screen” is selected from “numbers 1 to 9 (keypad)”, “TAB length”, “number of pieces”, “re-input”, and “setting complete”. It is possible. Then, when “TAB length” or “number of pieces” is pressed, a numeric value can be input and displayed on the adjacent blank using the numeric keypad, and “setting is completed” in a state where a number is input to one of them. When is pressed, a restart method selection screen is displayed. In this case, instead of the second to fourth NG processes, a sixth NG process described below is performed.

  In the sixth NG process, as shown in the flowchart of FIG. 25, the TAB feed is temporarily stopped in step S161, and the NG piece is positioned at the microscope position at a high speed in step S162. In this state, the operator confirms the details and tendency of the defect by visually determining the NG piece with the microscope 24 and visually determines the subsequent piece without using the microscope 24. When a scratch or the like formed over a plurality of pieces is confirmed, a range including these pieces is input on the microscope check screen of the touch panel 102. Here, the length from the NG piece to the upstream side, or the number of subsequent pieces including the NG piece is input.

  Then, the process proceeds to step S164, and when re-inspection is selected on the restart method selection screen in FIG. 8, the process proceeds to step S165, and the most downstream NG piece within the range is positioned at the reference position. In this flowchart, (III) corresponds to (I) of the second NG process, (II) of the third NG control, and (end) of the fourth NG control.

  If punch execution is selected in step S164, the NG piece is positioned at the punch position at high speed in step SS166, and continuously in all the pieces included in the range input in step S164 in step S167. Punch. In step S168, the piece subsequent to the NG piece is positioned at a high speed at the reference position. Furthermore, when not punching is selected in step S164, the piece subsequent to the NG piece is positioned at a high speed at the reference position in step S169.

  In this embodiment, after the NG piece is positioned at the microscope position, the operator observes the subsequent piece of the NG piece, and if scratches or printing defects over a plurality of pieces are confirmed, The approximate TAB length such as the scratch or the approximate number of pieces is input on the microscope check screen of the touch panel 102. Then, the pieces included in the range of the TAB length or the number of pieces are punched as NG pieces. Even by such a method, continuous NG pieces are efficiently detected, and the inspection efficiency is improved by continuously punching the NG pieces.

  The present invention relates to an inspection apparatus for determining whether a TAB is good or not, and can efficiently form punch holes in continuous NG pieces, and is therefore widely suitable for the semiconductor manufacturing industry.

It is a front view of the inspection apparatus which concerns on the 1st Embodiment of this invention. It is explanatory drawing of TAB. It is a system diagram of an inspection device. It is a mode selection screen of a touch panel. It is a flowchart of control in microscope mode. It is a flowchart of a 1st NG process. It is a microscope check screen of a touch panel. It is a restart method selection screen of a touch panel. It is an operation figure at the time of reexamination selection of the 1st NG processing. It is an operation | movement figure at the time of the punch execution selection of a 1st NG process. It is an operation | movement figure at the time of selection without punching of 1st NG processing. It is a flowchart of a 2nd NG process. It is an operation figure at the time of reexamination selection of the 2nd NG processing. It is an operation | movement figure at the time of the punch execution selection of a 2nd NG process. It is an operation | movement figure at the time of selection without punching of a 2nd NG process. It is a flowchart of control in punch mode. It is a flowchart of a punch process. It is a flowchart of a 3rd NG process. It is a flowchart of the control in the microscope mode which concerns on 2nd Embodiment. It is a flowchart of the 4th NG process. It is an operation | movement figure at the time of the punch execution selection of a 2nd NG process. It is a microscope check screen of the touch panel which concerns on 3rd Embodiment. It is a flowchart of the 5th NG process. It is a microscope check screen of the touch panel which concerns on 4th Embodiment. It is a flowchart of a 6th NG process.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 10 Unwinding reel 13a-13c Drive roller 20 1st line sensor 21 2nd line sensor 24 Microscope 25 Punch apparatus 100 Transfer controller 102 Touch panel 110 Image controller

Claims (3)

A transfer means for feeding a strip-shaped TAB formed of a large number of pieces at a constant pitch from a reel and transferring it on a predetermined transfer path, and an image acquisition means for acquiring each piece of TAB transferred by the transfer means as an image A determination unit that processes the image acquired by the acquisition unit and compares the image with a reference image registered in advance, and determines whether the piece is good or bad, and is provided on the transfer path to form a punch hole in the NG piece A TAB inspection apparatus having punch means,
On the transfer path, an NG piece determined by the determination means is transferred, and a visual station for determining whether or not the piece following the NG piece is an NG piece is provided by an operator,
NG range input means for inputting information of the continuous range when it is determined that the NG pieces are continuous by visual determination at the visual station;
A transfer control means for controlling the transfer means,
The transfer control means transfers the NG piece determined by the determination means to a viewing station, and after the information on the range where the NG piece continues is input by the NG range input means, the NG piece in the input range is input. Controlling the transfer means to sequentially and sequentially transfer to the corresponding position of the punch means;
The TAB inspection apparatus, wherein the punch means continuously forms punch holes in the NG pieces sequentially transferred by the transfer means. The TAB inspection apparatus according to claim 1,
The transfer control unit controls the transfer unit to transfer the NG piece determined by the determination unit and the subsequent piece to the viewing station, and
When the NG pieces transferred to the viewing station are continuous, there are provided indication means for indicating the front and rear end pieces of the NG piece,
The NG inspection apparatus according to claim 1, wherein the NG range input means takes in a range in which NG pieces whose front end and rear end are instructed by the instruction means are continuous. The TAB inspection apparatus according to claim 1,
The said NG range input means inputs the information of the length or number of pieces of TAB with which NG piece continues, The inspection apparatus of TAB characterized by the above-mentioned.

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