JP2007279969A - 温度調整装置及びその方法 - Google Patents

温度調整装置及びその方法 Download PDF

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Publication number
JP2007279969A
JP2007279969A JP2006104326A JP2006104326A JP2007279969A JP 2007279969 A JP2007279969 A JP 2007279969A JP 2006104326 A JP2006104326 A JP 2006104326A JP 2006104326 A JP2006104326 A JP 2006104326A JP 2007279969 A JP2007279969 A JP 2007279969A
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Japan
Prior art keywords
temperature
installation mechanism
temperature adjustment
lens
adjusted
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Withdrawn
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JP2006104326A
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English (en)
Japanese (ja)
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JP2007279969A5 (https=
Inventor
Maki Hosoda
真希 細田
Kotaro Tsui
浩太郎 堆
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Canon Inc
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Canon Inc
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Priority to JP2006104326A priority Critical patent/JP2007279969A/ja
Publication of JP2007279969A publication Critical patent/JP2007279969A/ja
Publication of JP2007279969A5 publication Critical patent/JP2007279969A5/ja
Withdrawn legal-status Critical Current

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JP2006104326A 2006-04-05 2006-04-05 温度調整装置及びその方法 Withdrawn JP2007279969A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006104326A JP2007279969A (ja) 2006-04-05 2006-04-05 温度調整装置及びその方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006104326A JP2007279969A (ja) 2006-04-05 2006-04-05 温度調整装置及びその方法

Publications (2)

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JP2007279969A true JP2007279969A (ja) 2007-10-25
JP2007279969A5 JP2007279969A5 (https=) 2009-05-21

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ID=38681366

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JP2006104326A Withdrawn JP2007279969A (ja) 2006-04-05 2006-04-05 温度調整装置及びその方法

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JP (1) JP2007279969A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103631289A (zh) * 2013-11-29 2014-03-12 北京卫星环境工程研究所 太阳模拟器用拼接准直镜的温度控制系统

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103631289A (zh) * 2013-11-29 2014-03-12 北京卫星环境工程研究所 太阳模拟器用拼接准直镜的温度控制系统
CN103631289B (zh) * 2013-11-29 2016-05-18 北京卫星环境工程研究所 太阳模拟器用拼接准直镜的温度控制系统

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