JP2007274660A5 - - Google Patents

Download PDF

Info

Publication number
JP2007274660A5
JP2007274660A5 JP2006142658A JP2006142658A JP2007274660A5 JP 2007274660 A5 JP2007274660 A5 JP 2007274660A5 JP 2006142658 A JP2006142658 A JP 2006142658A JP 2006142658 A JP2006142658 A JP 2006142658A JP 2007274660 A5 JP2007274660 A5 JP 2007274660A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006142658A
Other versions
JP4963193B2 (ja
JP2007274660A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006142658A priority Critical patent/JP4963193B2/ja
Priority claimed from JP2006142658A external-priority patent/JP4963193B2/ja
Priority to DE102007000117.9A priority patent/DE102007000117B4/de
Priority to US11/681,324 priority patent/US7609133B2/en
Publication of JP2007274660A publication Critical patent/JP2007274660A/ja
Publication of JP2007274660A5 publication Critical patent/JP2007274660A5/ja
Application granted granted Critical
Publication of JP4963193B2 publication Critical patent/JP4963193B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006142658A 2006-03-07 2006-05-23 圧電薄膜デバイス Active JP4963193B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006142658A JP4963193B2 (ja) 2006-03-07 2006-05-23 圧電薄膜デバイス
DE102007000117.9A DE102007000117B4 (de) 2006-03-07 2007-02-27 Piezoelektrische Dünnschichtvorrichtung
US11/681,324 US7609133B2 (en) 2006-03-07 2007-03-02 Piezoelectric thin film device having an additional film outside an excitation region

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006061439 2006-03-07
JP2006061439 2006-03-07
JP2006142658A JP4963193B2 (ja) 2006-03-07 2006-05-23 圧電薄膜デバイス

Publications (3)

Publication Number Publication Date
JP2007274660A JP2007274660A (ja) 2007-10-18
JP2007274660A5 true JP2007274660A5 (ja) 2009-04-23
JP4963193B2 JP4963193B2 (ja) 2012-06-27

Family

ID=38438516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006142658A Active JP4963193B2 (ja) 2006-03-07 2006-05-23 圧電薄膜デバイス

Country Status (3)

Country Link
US (1) US7609133B2 (ja)
JP (1) JP4963193B2 (ja)
DE (1) DE102007000117B4 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7893793B2 (en) * 2006-08-25 2011-02-22 Panasonic Corporation Film bulk acoustic wave resonator and method for manufacturing the same
JP4870541B2 (ja) * 2006-12-15 2012-02-08 太陽誘電株式会社 圧電薄膜共振器およびフィルタ
US7802466B2 (en) * 2007-11-28 2010-09-28 Sierra Sensors Gmbh Oscillating sensor and fluid sample analysis using an oscillating sensor
US8456257B1 (en) * 2009-11-12 2013-06-04 Triquint Semiconductor, Inc. Bulk acoustic wave devices and method for spurious mode suppression
EP2533422A3 (en) * 2010-01-28 2013-07-17 Murata Manufacturing Co., Ltd. Tunable filter
US8791776B2 (en) * 2011-01-19 2014-07-29 Wei Pang Acoustic wave resonator having a gasket
JP6166170B2 (ja) * 2013-12-16 2017-07-19 日本碍子株式会社 複合基板及びその製法
WO2015152036A1 (ja) * 2014-03-31 2015-10-08 株式会社村田製作所 超音波センサ
JP6368298B2 (ja) * 2015-12-14 2018-08-01 太陽誘電株式会社 圧電薄膜共振器、フィルタおよびデュプレクサ
CN109889173B (zh) * 2018-12-26 2022-07-12 天津大学 柔性基底薄膜体声波滤波器的连接结构
KR20220050550A (ko) * 2020-10-16 2022-04-25 경희대학교 산학협력단 정전 발전기
WO2023139839A1 (ja) * 2022-01-18 2023-07-27 株式会社村田製作所 圧電デバイス

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3585418A (en) * 1969-07-22 1971-06-15 Clevite Corp Piezoelectric resonators and method of tuning the same
US5617065A (en) * 1995-06-29 1997-04-01 Motorola, Inc. Filter using enhanced quality factor resonator and method
CA2283887C (en) * 1998-01-16 2003-11-25 Mitsubishi Denki Kabushiki Kaisha Film bulk acoustic wave device
JPH11340775A (ja) * 1998-05-26 1999-12-10 Tdk Corp 圧電振動子
US6150703A (en) * 1998-06-29 2000-11-21 Trw Inc. Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials
JP2000357931A (ja) * 1999-06-16 2000-12-26 Victor Co Of Japan Ltd 複合圧電基板振動子の製造方法
FI107660B (fi) * 1999-07-19 2001-09-14 Nokia Mobile Phones Ltd Resonaattorirakenne
US6424237B1 (en) * 2000-12-21 2002-07-23 Agilent Technologies, Inc. Bulk acoustic resonator perimeter reflection system
JP2003318695A (ja) 2002-04-26 2003-11-07 Toko Inc 圧電薄膜共振子およびその製造方法
JP3986400B2 (ja) 2002-09-09 2007-10-03 富士通メディアデバイス株式会社 フィルタ、フィルタ装置及びその製造方法
JP3879643B2 (ja) * 2002-09-25 2007-02-14 株式会社村田製作所 圧電共振子、圧電フィルタ、通信装置
JP4128836B2 (ja) 2002-09-27 2008-07-30 Ｔｄｋ株式会社 薄膜圧電共振子、それを用いたフィルタ及びデュプレクサ
ATE515108T1 (de) * 2003-09-12 2011-07-15 Panasonic Corp Abstimmbarer dünnschicht-volumenwellen-resonator, herstellungsmethode dafür, filter, mehrschichtiges zusammengesetztes elektronisches bauelement und kommunikationsvorrichtung
DE102005004435B4 (de) * 2005-01-31 2006-10-19 Infineon Technologies Ag Baw-resonator
KR100622398B1 (ko) * 2005-07-18 2006-09-12 삼성전자주식회사 필름 벌크 음향 공진기 및 그 제조 방법

Similar Documents

Publication Publication Date Title
BRPI0720064A2 (ja)
BRMU8603216U8 (ja)
BRPI0715824A8 (ja)
JP2007274660A5 (ja)
BRPI0713487A2 (ja)
BR122016023444A2 (ja)
CH2121272H1 (ja)
AT504380A8 (ja)
BY9789C1 (ja)
CN300725930S (zh) 童装(3813)
CN300727566S (zh) Mp4播放器(d01)
CN300730180S (zh) 高压清洗机(apw-vp)
CN300729834S (zh) 汽车手制动防尘罩座(f)
CN300731062S (zh) 拖鞋(3413)
CN300729528S (zh) 软米包装拎袋
CN300729376S (zh) 包装套盒(Artecospe普通版-成人用)
CN300728967S (zh) 菜架
CN300728612S (zh) 拖鞋(3131)
CN300728599S (zh) 拖鞋(3104)
CN300728579S (zh) 拖鞋(3329)
CN300728466S (zh) 超声波美容仪
CN300728465S (zh) 敲击按摩器
CN300728045S (zh) 玩具(14)
CN300727649S (zh) 手机
CN300731699S (zh) 炸锅