JP2007263671A - Coating inspection device - Google Patents

Coating inspection device Download PDF

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JP2007263671A
JP2007263671A JP2006087774A JP2006087774A JP2007263671A JP 2007263671 A JP2007263671 A JP 2007263671A JP 2006087774 A JP2006087774 A JP 2006087774A JP 2006087774 A JP2006087774 A JP 2006087774A JP 2007263671 A JP2007263671 A JP 2007263671A
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image
workpiece
image processing
coating
illumination light
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Nobuhisa Nishioki
暢久 西沖
Toshibumi Noto
俊文 能登
Narikazu Ogiura
成和 扇浦
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Tateyama Machine Co Ltd
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Tateyama Machine Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating inspection device capable of easily and accurately inspecting a defective product by extracting the film forming irregularity of the coating, which is applied to the surface of the tip used in the edge of a tool, with high precision. <P>SOLUTION: The coating inspection device has an illuminator 24 for irradiating the surface of the work 12 being the tip used in the edge of the tool with illumination light, a prism body 22 composed of a pair of prisms 18 and 19 for permitting the illumination light of the illuminator 24 and the half mirror 20 positioned in the prism body 22 and is equipped with a support part 16 for supporting a work 12, the reflection plate 14 positioned on the back side of the work 12 and having an reflecting surface 14a for irregularly reflecting the illumination light, a camera 26 for photographing the work 12 illuminated by the illuminator 24 through the prism body 22 and an image processor 30 for extracting the photographed image 38 of the work 12 photographed by the camera 26 and comparing the same with a reference image 36 to subject the same to image processing. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明は、工具の刃先に取り付けるスローアウェイチップなどのチップ状工具の、コーティングの製膜ムラを検査するコーティング検査装置に関する。   The present invention relates to a coating inspection apparatus for inspecting coating film formation unevenness of a tip-shaped tool such as a throw-away tip attached to a cutting edge of a tool.

工具の刃先を形成するスローアウェイチップには、適宜の厚みを有し略菱形や略正方形、又は略正三角形等に形成され、形状や寸法が異なる極めて多くの品種が存在する。また、スローアウェイチップは、切りくずの排出促進のためのチップブレーカに代表されるような切削機能確保のための固有の形状に形成され、チップの表面には、耐久性向上のために表面処理としてコーティングが施されている品種がある。コーティングとしては、CVD法により、炭化チタンや窒化チタン、またはアルミナを被覆するものや、PVD法により窒化チタンやその他チタン系の被膜を形成するものがある。さらに、スローアウェイチップは、粉体焼結製法によって作られる製品が多く、形状寸法に数10μm程度の誤差を有することもある。   There are a great many types of throw-away tips that form the cutting edge of a tool, which have an appropriate thickness and are formed in a substantially diamond shape, a substantially square shape, a substantially regular triangle shape, or the like, and have different shapes and dimensions. In addition, the throw-away tip is formed in a unique shape to ensure the cutting function as represented by the tip breaker for promoting chip discharge, and the tip surface is surface-treated to improve durability. There are varieties that are coated. As the coating, there are those that coat titanium carbide, titanium nitride, or alumina by CVD, and those that form titanium nitride or other titanium-based films by PVD. Furthermore, many throw-away tips are manufactured by a powder sintering method, and the shape dimension may have an error of about several tens of μm.

この場合、チップ表面のコーティング材の製膜ムラは、コーティングに求められる耐久正等の機能を低下させるだけでなく、外観上も良くないものであった。従って、製膜ムラのあるチップは、不良品として区別し抽出しなければならず、この検査は、多品種の製品毎に微妙な判断が求められ、従来目視による製膜ムラの判定が行われていた。
特開平10−202478号公報
In this case, the film formation unevenness of the coating material on the chip surface not only deteriorates the functions such as durability required for coating but also does not improve the appearance. Therefore, chips with uneven film formation must be identified and extracted as defective products, and this inspection requires delicate judgment for each of a wide variety of products, and conventional film formation unevenness is determined by visual inspection. It was.
Japanese Patent Laid-Open No. 10-202478

上記従来の方法の目視によりコーティングの製膜ムラなどを有する不良品の抽出を行う場合では、表面形状または模様が、一部のみ微妙に違う多種類の製品の場合、微細な製膜ムラを有する不良品の抽出が難しいものであった。そのため、不良品を見落としたりすることがあった。   In the case of extracting defective products having coating film formation unevenness by visual observation of the above conventional method, in the case of many types of products with slightly different surface shapes or patterns, there are fine film formation unevenness. It was difficult to extract defective products. As a result, defective products may be overlooked.

また、特許文献1に開示されている工具の刃先に使用するスローアウェイチップの検査装置では、レーザ光を走査させてスローアウェイチップの切刃の形状的欠陥を検出し、切刃の欠損などを判別している。しかし、この方法ではスローアウェイチップ表面のコーティングの製膜ムラは、抽出できないものであった。また、一般に、画像処理により検査するには、カメラによりチップ表面を撮像する必要があり、その場合には、チップ表面に照明ムラや影がまったくない照明が可能なドーム形状の照明器具が最適である。しかし、この場合、検体を規定位置に正確にセットさせる必要があり、構造が複雑な上、動作制御が容易ではなかった。   Further, in the throw-away tip inspection apparatus used for the cutting edge of a tool disclosed in Patent Document 1, a laser beam is scanned to detect a shape defect of the throw-away tip's cutting edge, and the cutting edge is not damaged. Judging. However, the film formation unevenness of the coating on the throwaway tip surface cannot be extracted by this method. In general, in order to inspect by image processing, it is necessary to image the chip surface with a camera. In that case, a dome-shaped luminaire that can illuminate the chip surface without any illumination unevenness or shadow is optimal. is there. However, in this case, it is necessary to accurately set the specimen at the specified position, and the structure is complicated and the operation control is not easy.

この発明は、上記従来技術の問題に鑑みて成されたもので、工具の刃先に使用するチップの表面に施されたコーティングの製膜ムラを、高い精度で抽出して、不良品の検査を容易且つ正確に可能なコーティング検査装置を提供することを目的とする。   The present invention has been made in view of the above-mentioned problems of the prior art. By extracting the film formation unevenness of the coating applied to the surface of the tip used for the cutting edge of the tool with high accuracy, the defective product is inspected. It is an object of the present invention to provide a coating inspection apparatus capable of being easily and accurately.

この発明は、工具の刃先に用いるチップであるワーク表面のコーティングの製膜ムラを検査するコーティング検査装置であって、照明光を照射する照明装置と、前記照明装置の照明光を透過させる一対のプリズムから成るプリズム体と、前記プリズム体内に位置したハーフミラーと、前記照明装置からの照明光がハーフミラーを介して照射される位置で前記ワークを支持した支持部と、前記ワークの背面側に位置し前記照明光を乱反射する反射面を有した反射板と、前記照明装置により照明された前記ワークを前記プリズム体を介して撮像するカメラと、前記カメラにより撮像された前記ワークの輪郭や表面像から成る撮像画像を抽出し、基準像と比較して画像処理する画像処理装置とを備えたコーティング検査装置である。   The present invention is a coating inspection apparatus for inspecting film formation unevenness of a workpiece surface coating that is a tip used for a cutting edge of a tool, and includes a pair of an illuminating apparatus that irradiates illumination light and a light that transmits the illumination light of the illuminating apparatus. A prism body composed of prisms, a half mirror located in the prism body, a support portion that supports the workpiece at a position where illumination light from the illumination device is irradiated through the half mirror, and a back side of the workpiece A reflector having a reflecting surface that is positioned and diffusely reflects the illumination light, a camera that images the workpiece illuminated by the illumination device through the prism body, and the contour and surface of the workpiece imaged by the camera A coating inspection apparatus including an image processing apparatus that extracts a captured image including an image and performs image processing in comparison with a reference image.

前記画像処理装置は、前記カメラの取得画像を光の3原色の各成分に分離して、各成分画像各々に対して画像処理するコーティング検査装置である。   The image processing apparatus is a coating inspection apparatus that separates an image acquired by the camera into each component of the three primary colors of light and performs image processing on each component image.

前記照明装置は、照明光が拡散面を介して前記プリズムに照射される。前記プリズムの照射面がワーク幅の少なくとも2倍以上の幅に形成されているものである。さらに、前記プリズムの照射面からワーク表面までの間隔を、前記プリズム照射面幅の4分の1以下で使用されるようにすると良い。   In the illumination device, illumination light is applied to the prism via a diffusion surface. The irradiation surface of the prism is formed to be at least twice as wide as the workpiece width. Furthermore, it is preferable that the distance from the irradiation surface of the prism to the workpiece surface is used at a quarter or less of the width of the prism irradiation surface.

また、前記反射板の反射面は白色系の色であり、前記画像処理装置は、前記基準像と撮像画像の比較に際して、前記反射面からの反射光により、各像の明るさや色合いの調整を行うものである。   The reflecting surface of the reflecting plate is a white color, and the image processing device adjusts the brightness and hue of each image by the reflected light from the reflecting surface when comparing the reference image and the captured image. Is what you do.

この発明のコーティング検査装置によれば、スローアウェイチップ等のチップ部品の検査において、画像処理により製膜ムラが容易且つ正確に抽出できるものである。そして、抽出された製膜ムラから、不良品の検出がより正確にできるものである。   According to the coating inspection apparatus of the present invention, film formation unevenness can be easily and accurately extracted by image processing in inspection of chip parts such as a throw-away chip. And the defective product can be detected more accurately from the extracted film formation unevenness.

以下、この発明のコーティング検査装置の一実施形態について、図1〜図3を基にして説明する。この実施形態のコーティング検査装置10は、切削などに使用する工具へ取り付けるスローアウェイチップなどのワーク12について、その表面に施されたコーティングの製膜ムラ検査に使用されるものである。このコーティング検査装置10には、図1に示すように、図示しない固定具により基盤等に固定された反射板14が設けられ、反射板14の表面は、乱反射可能に粗面に形成された白色系の反射面14aとして形成されている。反射面14aの中央には、検査対象であるワークを支持可能に図示しないチャックを端部に備えた支持部16が立設されている。この支持部16の図示しないチャックには、例えば適宜に厚みを有する略正三角形に形成されたワーク12が載置される。   Hereinafter, an embodiment of a coating inspection apparatus according to the present invention will be described with reference to FIGS. The coating inspection apparatus 10 according to this embodiment is used for film formation unevenness inspection of a coating applied to the surface of a workpiece 12 such as a throw-away tip attached to a tool used for cutting or the like. As shown in FIG. 1, the coating inspection apparatus 10 is provided with a reflecting plate 14 fixed to a base or the like by a fixing tool (not shown), and the surface of the reflecting plate 14 is a white surface having a rough surface capable of irregular reflection. It is formed as a reflection surface 14a of the system. At the center of the reflection surface 14a, a support portion 16 is provided which has a chuck (not shown) at its end so as to be able to support a workpiece to be inspected. On the chuck (not shown) of the support portion 16, for example, the workpiece 12 formed in a substantially equilateral triangle having an appropriate thickness is placed.

ワーク12の上方には、断面が直角二等辺三角形に形成された三角柱状の一対のプリズム18,19と、その一斜面に形成されたハーフミラー20とから成るプリズム体22が設けられている。プリズム体22は、一対のプリズム18,19の断面形状において直角三角形の斜辺に相当する斜面同士が対面して合わせられ、一対のプリズム18,19の一斜面にハーフミラー20が形成されている。プリズム体22は、支持部16に固定したワーク12の上面と、ハーフミラー20の面の延長線の成す角度が約45度の位置に配置されている。   Above the workpiece 12, a prism body 22 is provided that includes a pair of triangular prisms 18 and 19 having a cross section of a right isosceles triangle and a half mirror 20 formed on one inclined surface thereof. In the prism body 22, the slopes corresponding to the oblique sides of the right triangle in the cross-sectional shape of the pair of prisms 18 and 19 face each other, and a half mirror 20 is formed on one slope of the pair of prisms 18 and 19. The prism body 22 is arranged at a position where an angle formed by an extension line of the upper surface of the work 12 fixed to the support portion 16 and the surface of the half mirror 20 is about 45 degrees.

プリズム体22の一方のプリズム18の入射面18aに対向して、拡散照明光をワーク12方向へ照射可能に形成された照明装置24が、図示しない固定具により取り付けられている。照明装置24は、拡散面を介して照明光がプリズム体22に入射し、ハーフミラー20の反射面で照明光が90°下方に屈曲する位置に設けられている。プリズム体22のワーク12の上面と対面する照射面18bは、ワーク12の最大外径の2倍以上の幅に形成されている。また、ワーク12上面と対面するプリズム体22の照射面18bとの間隔は、照射面18bの幅の4分1以下に形成されている。   An illuminating device 24 formed so as to be able to irradiate diffused illumination light in the direction of the workpiece 12 is attached by a fixture (not shown) so as to face the incident surface 18a of one prism 18 of the prism body 22. The illuminating device 24 is provided at a position where the illumination light is incident on the prism body 22 through the diffusion surface and the illumination light is bent 90 ° downward on the reflection surface of the half mirror 20. The irradiation surface 18 b of the prism body 22 facing the upper surface of the work 12 is formed to have a width that is twice or more the maximum outer diameter of the work 12. In addition, the distance between the irradiation surface 18b of the prism body 22 facing the work 12 upper surface is formed to be equal to or less than one quarter of the width of the irradiation surface 18b.

プリズム体22の他方のプリズム19は、一側面がワーク12の上面と平行に位置して、ワーク12の中心と同軸上に中心が位置している。そして、プリズム体22のプリズム19の上方には、ハーフミラー20越しにワーク12を撮像可能にカラーCCDカメラ等のカメラ26が図示しない固定具により取り付けられている。   The other prism 19 of the prism body 22 has one side surface located parallel to the upper surface of the work 12 and the center located coaxially with the center of the work 12. A camera 26 such as a color CCD camera is attached above the prism 19 of the prism body 22 by a fixture (not shown) so that the workpiece 12 can be imaged through the half mirror 20.

カメラ26には、撮像した画像情報を伝送する信号ケーブル28が接続され、信号ケーブル28の他端はパソコンなどの画像処理装置30に接続されている。画像処理装置30には、映像ケーブル32を介して表示装置34が接続されている。画像処理装置30は、カメラ26により撮像した画像をRGBの光の3原色毎の信号に分離し、各色の信号毎に後述する画像処理を行う処理プログラムを備えている。   A signal cable 28 for transmitting captured image information is connected to the camera 26, and the other end of the signal cable 28 is connected to an image processing device 30 such as a personal computer. A display device 34 is connected to the image processing device 30 via a video cable 32. The image processing apparatus 30 includes a processing program that separates an image captured by the camera 26 into signals for each of the three primary colors of RGB light, and performs image processing to be described later for each color signal.

次に、この実施形態の処理動作について説明する。まず、支持部16の図示しないチャックに、例えば切削工具のスローアウェイチップなどのワーク12を支持させる。そして、ワーク12に対してその上方から、照明装置24の拡散照明光を、プリズム18を透過しハーフミラー20で反射させて照射する。このとき、照射光は、同時にワーク12下方の反射板14の反射面14aに反射して乱反射光となり、下方からもワーク12が照らし出される。これにより、ワーク12の輪郭が確実に撮像可能となる。また、反射面14aは、後述する基準像36と撮像画像38の比較検査の際に、色バランスと明度の基準となる。   Next, the processing operation of this embodiment will be described. First, a workpiece 12 such as a throw-away tip of a cutting tool is supported on a chuck (not shown) of the support unit 16. Then, the diffused illumination light from the illumination device 24 is irradiated onto the workpiece 12 from above by being reflected by the half mirror 20 through the prism 18. At this time, the irradiation light is simultaneously reflected on the reflecting surface 14a of the reflecting plate 14 below the work 12 to be irregularly reflected light, and the work 12 is also illuminated from below. Thereby, the outline of the workpiece 12 can be reliably imaged. The reflective surface 14a serves as a reference for color balance and lightness in a comparative inspection between a reference image 36 and a captured image 38, which will be described later.

照明装置24に照明されたワーク12の輪郭及び表面像は、プリズム18からハーフミラー20、及びプリズム19を透過して、カメラ26に撮像される。カメラ26に撮像されたワーク12の画像は、画像処理装置30に画像データとして取り込まれる。取り込まれた画像データは、画像処理装置30により検査され判定処理される。   The outline and surface image of the work 12 illuminated by the illumination device 24 are transmitted through the half mirror 20 and the prism 19 from the prism 18 and imaged by the camera 26. The image of the workpiece 12 picked up by the camera 26 is taken into the image processing apparatus 30 as image data. The captured image data is inspected and determined by the image processing device 30.

次に、この実施形態の検査方法について説明する。図2に示すように、画像処理装置30は、ワーク12を撮像したカメラ26からワーク12の輪郭及び表面像から成る撮像画像38を取得する(S1)。このとき、ワーク12の撮像画像38は、RGBの光の3原色毎のデータに分けられる。また前もって、画像処理装置30は、検査対象のワーク12の画像に対する照合用に、各3原色毎にあらかじめ基準像36を撮像し記憶しておく。   Next, the inspection method of this embodiment will be described. As illustrated in FIG. 2, the image processing apparatus 30 acquires a captured image 38 including the outline and surface image of the workpiece 12 from the camera 26 that has captured the workpiece 12 (S <b> 1). At this time, the captured image 38 of the workpiece 12 is divided into data for each of the three primary colors of RGB light. Further, in advance, the image processing apparatus 30 captures and stores a reference image 36 for each of the three primary colors in advance for comparison with the image of the workpiece 12 to be inspected.

続いて、例えば、図3に示すように、検査対象のワーク12の画像に対する照合用に、各3原色毎にあらかじめ用意された基準像36の明度をネガポジ反転し、検査対象ワーク12をカメラ26により撮像した撮像画像38を、3原色毎に分離し、各分離した各色毎に基準像36と重ね合わせて、各色毎に差分をとり各画素の平均をとる。これにより、各色毎の基準像36と撮像画像38との比較での差異成分の抽出(S2)が行われる。   Subsequently, for example, as shown in FIG. 3, the brightness of the reference image 36 prepared in advance for each of the three primary colors is negative-positive inverted for collation with the image of the workpiece 12 to be inspected, and the workpiece 12 to be inspected is detected by the camera 26. The picked-up image 38 picked up by the above is separated for each of the three primary colors, and is superposed on the reference image 36 for each of the separated colors, and the difference is taken for each color and the average of each pixel is taken. Thereby, extraction of the difference component in the comparison between the reference image 36 for each color and the captured image 38 is performed (S2).

また、画像の比較に際して、基準像36と撮像画像38の両方に共通して背景として映る白色系の反射面14aを基準として、色バランスを取る。   Further, when the images are compared, a color balance is obtained with reference to the white reflection surface 14a reflected as a background common to both the reference image 36 and the captured image 38.

基準像36と撮像画像38との比較処理により、各色毎に、基準像36と検査対象の撮像画像38の共通の明度値の画素データは全て打ち消しあって、中間濃度となり、明度が異常な画素値は差異成分として異なるコントラストとして残る。そして、図3に示すように、差異成分から得られた差分像40を二値化して、差異成分が規定範囲値内にあるか否かを画像処理装置30により判定する(S3)。この場合、差異成分が規定範囲内にあれば、差分像40は、ほぼ中間明度の白い画像となるが、基準像36と異形の差異成分を有する場合は、コーティングムラ部分等が黒い画像となり、この黒い面積が、規定範囲値を越えると不良品として区別する。   Through comparison processing of the reference image 36 and the captured image 38, pixel data having a common brightness value between the reference image 36 and the captured image 38 to be inspected are canceled for each color, resulting in an intermediate density and abnormal brightness. The value remains as a different component as a different contrast. Then, as shown in FIG. 3, the difference image 40 obtained from the difference component is binarized, and the image processing apparatus 30 determines whether or not the difference component is within the specified range value (S3). In this case, if the difference component is within the specified range, the difference image 40 is a white image with almost intermediate brightness, but if the difference component is different from the reference image 36, the uneven coating portion is a black image, If this black area exceeds the specified range value, it is distinguished as a defective product.

この実施形態のコーティング検査装置10によれば、照明装置24の拡散照明光がワーク12に対して均一に照射され、ワーク12の表面画像を陰影無く正確に撮像することができる。さらに、反射板14の反射面14aによりワーク12の背面側から照明され、ワーク12の輪郭がきれいに撮像可能であり、画像処理における位置合わせやその後のデータの重畳等においても正確な処理が可能となる。これにより、製膜ムラを容易且つ正確に画像処理により抽出できるものである。特に、ワーク12上面と相対するプリズム体22の照射面18bは、ワーク上面の2倍以上の幅に形成され、照射面18bとワーク12上面の間隔は、照射面18bの幅の4分の1以下に形成される。そのため、ワーク12に影を形成することなく、照明可能なものである。そして、画像処理により微妙な製膜ムラも容易に抽出することができ、不良品の検出が正確にできるものである。さらに、カメラ26の撮像画像は、カラー画像を使用するため、コーティングの材質による色合いの変化にも対応可能であり、検査対象となるワークの種類の制約が少ないものである。   According to the coating inspection apparatus 10 of this embodiment, the diffuse illumination light of the illumination device 24 is uniformly irradiated onto the workpiece 12, and the surface image of the workpiece 12 can be accurately captured without a shadow. Further, the back surface of the workpiece 12 is illuminated by the reflecting surface 14a of the reflecting plate 14, the contour of the workpiece 12 can be imaged beautifully, and accurate processing can be performed in alignment in image processing and subsequent data superposition. Become. Thereby, film formation unevenness can be extracted easily and accurately by image processing. In particular, the irradiation surface 18b of the prism body 22 facing the upper surface of the work 12 is formed to have a width that is at least twice that of the upper surface of the work, and the interval between the irradiation surface 18b and the upper surface of the work 12 is a quarter of the width of the irradiation surface 18b. Formed below. Therefore, it is possible to illuminate the work 12 without forming a shadow. Further, subtle unevenness in film formation can be easily extracted by image processing, and defective products can be detected accurately. Further, since the captured image of the camera 26 uses a color image, it can cope with a change in hue due to the material of the coating, and there are few restrictions on the type of workpiece to be inspected.

また、反射板14の反射面14aを色バランスと明度の基準としているので、照明光源の劣化や外乱光などにより検査画像の色バランスや明度が狂ってしまっても、補正が容易且つ正確に可能である。即ち、基準像36と撮像画像38の両方に共通して反射面14aが背景として映るので、同じ白色系の反射面14aを基準として色バランスを取ることにより、それの色合いや明るさが基準像36と撮像画像38の二像間で同じになるようにすれば良く、調整が容易である。   In addition, since the reflecting surface 14a of the reflecting plate 14 is used as a reference for color balance and brightness, correction can be performed easily and accurately even if the color balance or brightness of the inspection image is distorted due to deterioration of the illumination light source or disturbance light. It is. That is, since the reflection surface 14a is reflected as a background in common to both the reference image 36 and the captured image 38, the color balance and the brightness of the same white-based reflection surface 14a are used as the reference image. It is sufficient that the two images 36 and 38 are the same, and adjustment is easy.

なお、この発明のコーティング検査装置は上記実施形態に限定されるものではなく、照明する照明装置の反射板のサイズ、形状、及び照度は、支持部に支持された検査対象のワークの大きさに合わせて適宜設定可能である。また、大きなワークを撮像する際、分割して画像データを取り込んで、画像処理装置により合成して1つの画像データとしても良い。さらに、各部材の形状や素材など適宜変更可能である。   In addition, the coating inspection apparatus of this invention is not limited to the said embodiment, The size of the reflector of the illuminating device to illuminate, a shape, and illumination intensity are the magnitude | sizes of the workpiece | work of the test object supported by the support part. It can be set as appropriate. Further, when a large workpiece is imaged, the image data may be divided and captured and combined by an image processing apparatus to form one image data. Furthermore, the shape and material of each member can be appropriately changed.

この発明の一実施形態のコーティング検査装置を示す概略側面図である。It is a schematic side view which shows the coating inspection apparatus of one Embodiment of this invention. この実施形態のコーティング検査装置の工程を示すフロー図である。It is a flowchart which shows the process of the coating inspection apparatus of this embodiment. この実施形態のコーティング検査装置の検査に用いる基準像と検査像、及び差分像を示す抽出模式図である。It is an extraction schematic diagram which shows the reference | standard image used for a test | inspection of the coating inspection apparatus of this embodiment, a test | inspection image, and a difference image.

符号の説明Explanation of symbols

10 コーティング検査装置
12 ワーク
14 反射板
14a 反射面
16 支持部
18,19 プリズム
20 ハーフミラー
22 プリズム体
24 照明装置
26 カメラ
30 画像処理装置
34 表示装置
36 基準像
38 撮像画像
DESCRIPTION OF SYMBOLS 10 Coating test | inspection apparatus 12 Work piece 14 Reflecting plate 14a Reflecting surface 16 Support part 18, 19 Prism 20 Half mirror 22 Prism body 24 Illuminating device 26 Camera 30 Image processing apparatus 34 Display apparatus 36 Reference image 38 Captured image

Claims (5)

工具の刃先に用いるチップであるワーク表面のコーティングの製膜ムラを検査するコーティング検査装置において、照明光を照射する照明装置と、前記照明装置の照明光を透過させる一対のプリズムから成るプリズム体と、前記プリズム体内に位置したハーフミラーと、前記照明装置からの照明光がハーフミラーを介して照射される位置で前記ワークを支持した支持部と、前記ワークの背面側に位置し前記照明光を乱反射する反射面を有した反射板と、前記照明装置により照明された前記ワークを前記プリズム体を介して撮像するカメラと、前記カメラにより撮像された前記ワークの撮像画像を抽出し基準像と比較して画像処理する画像処理装置とを備えたことを特徴とするコーティング検査装置。   In a coating inspection apparatus that inspects film formation unevenness of a workpiece surface coating that is a tip used as a cutting edge of a tool, an illumination apparatus that irradiates illumination light, and a prism body that includes a pair of prisms that transmit illumination light from the illumination apparatus; A half mirror positioned in the prism body, a support unit that supports the workpiece at a position where illumination light from the illumination device is irradiated through the half mirror, and a back surface of the workpiece that is configured to transmit the illumination light. A reflecting plate having a reflecting surface that diffusely reflects, a camera that images the workpiece illuminated by the illumination device via the prism body, and a captured image of the workpiece imaged by the camera is extracted and compared with a reference image And an image processing apparatus for image processing. 前記画像処理装置は、前記カメラの取得画像を光の3原色の各成分に分離して、各成分画像各々に対して画像処理する請求項1記載のコーティング検査装置。   The coating inspection apparatus according to claim 1, wherein the image processing apparatus separates an image acquired by the camera into components of three primary colors of light and performs image processing on each of the component images. 前記照明装置は、照明光が拡散面を介して前記プリズムに照射される請求項1記載のコーティング検査装置。   The coating inspection apparatus according to claim 1, wherein the illumination device irradiates the prism with illumination light through a diffusion surface. 前記プリズムの照射面がワーク幅の少なくとも2倍以上の幅に形成されている請求項1記載のコーティング検査装置。   The coating inspection apparatus according to claim 1, wherein an irradiation surface of the prism is formed to be at least twice as wide as a workpiece width. 前記反射板の反射面は白色系の色であり、前記画像処理装置は、前記基準像と撮像画像の比較に際して、前記反射面からの反射光により、各像の明るさや色合いの調整を行う請求項1記載のコーティング検査装置。
The reflecting surface of the reflecting plate is a white color, and the image processing device adjusts the brightness and hue of each image by reflected light from the reflecting surface when comparing the reference image and the captured image. The coating inspection apparatus according to Item 1.
JP2006087774A 2006-03-28 2006-03-28 Coating inspection device Pending JP2007263671A (en)

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