JP2007262581A - Surface treatment layer for turbo-molecular pump - Google Patents

Surface treatment layer for turbo-molecular pump Download PDF

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JP2007262581A
JP2007262581A JP2007120846A JP2007120846A JP2007262581A JP 2007262581 A JP2007262581 A JP 2007262581A JP 2007120846 A JP2007120846 A JP 2007120846A JP 2007120846 A JP2007120846 A JP 2007120846A JP 2007262581 A JP2007262581 A JP 2007262581A
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surface treatment
molecular pump
electroless
plating layer
layer
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JP4508208B2 (en
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Tomoaki Okamura
知明 岡村
Toyoaki Yasui
豊明 安井
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Mitsubishi Heavy Industries Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface treatment layer for a turbo-molecular pump which is high in plasma-resistance as well as corrosion-resistance and thermal emission, and furthermore, can be realized at a low cost. <P>SOLUTION: The surface treatment layer formed in an inner part of the turbo-molecular pump is a double layer 24 comprising an electroless Ni plating layer 22 and an electroless black color Ni plating layer 23 which are formed on the surface of a base material 21 comprising aluminum or an aluminum alloy. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、半導体製造設備の排気ラインなどにおいて使用されるターボ分子ポンプ用表面処理層に関する。   The present invention relates to a surface treatment layer for a turbo molecular pump used in an exhaust line of a semiconductor manufacturing facility.

この種のターボ分子ポンプの概略構造を図３に示す。ターボ分子ポンプは、ケーシング１の上部に吸気口２、ケーシング１の下部に排気口３を設け、ロータ４に設けた動翼５をケーシング１に設けた静翼６間の空間内で高速回転させることにより、排気作用を発揮させて吸気口２側を高真空にするものである。７は駆動用のモータである。   A schematic structure of this type of turbomolecular pump is shown in FIG. The turbo molecular pump is provided with an intake port 2 in the upper part of the casing 1 and an exhaust port 3 in the lower part of the casing 1, and the rotor blade 5 provided in the rotor 4 is rotated at high speed in the space between the stationary blades 6 provided in the casing 1. As a result, the exhaust action is exerted to make the intake port 2 side into a high vacuum. Reference numeral 7 denotes a driving motor.

このターボ分子ポンプでは通常、翼材として、軽量、低コスト、強度などの面からアルミニウム合金が用いられている。しかし、アルミニウム合金は、半導体製造工程で排出される塩素ガスなど腐食性ガス環境下では著しく腐食するため、優れた耐食処理を表面に施す必要がある。また、翼材に不可欠なもう一つの条件として、熱放射性（放射率）が高いことが挙げられる。その理由は、通常の対流による熱放散を期待できない高真空下で、ロータの高速回転により発生する大量の熱を放射で逃がす必要があるからである。   In this turbo molecular pump, an aluminum alloy is usually used as a blade material from the viewpoints of light weight, low cost, strength, and the like. However, since aluminum alloys corrode significantly in a corrosive gas environment such as chlorine gas discharged in the semiconductor manufacturing process, it is necessary to perform excellent corrosion resistance treatment on the surface. In addition, another requirement indispensable for the wing material is high thermal radiation (emissivity). The reason is that a large amount of heat generated by high-speed rotation of the rotor needs to be released by radiation under a high vacuum where heat dissipation due to normal convection cannot be expected.

従来、アルミニウム合金よりなるターボ分子ポンプ用の内部部品の表面処理技術として、以下に示すような種々のものが知られている。   Conventionally, various types of surface treatment techniques for internal parts of turbomolecular pumps made of an aluminum alloy are known as shown below.

（１）基材表面に陽極酸化処理により酸化皮膜を形成するもの。
（２）基材表面に無電解Ｎｉめっき層を形成するもの。
（３）基材表面に無電解Ｎｉめっき層を形成し、その上にエポキシ層を形成するもの。
（４）基材表面にセラミック等の微粒子を分散させた無電解Ｎｉ分散めっき層を形成するもの。
（５）基材表面に無電解黒色Ｎｉめっき層を形成するもの。 (1) An oxide film is formed on the surface of a base material by anodization.
(2) An electroless Ni plating layer is formed on the substrate surface.
(3) An electroless Ni plating layer is formed on the substrate surface, and an epoxy layer is formed thereon.
(4) Forming an electroless Ni-dispersed plating layer in which fine particles such as ceramic are dispersed on the surface of a substrate.
(5) An electroless black Ni plating layer is formed on the substrate surface.

しかし、上述した（１）〜（５）の技術のうち、（１）は、安価で放射率が高いものの、空孔が無数にあるため脱ガスが多く耐食性が弱い欠点がある。
（２）は、耐食性は高いものの、放射率が低い欠点がある。
（３）は、エポキシ層の付加により、放射率及び耐食性は高くできるものの、プラズマ環境に弱い欠点がある。
（４）は、放射率及び耐食性は高いものの、コストがかかる欠点がある。
（５）は、放射率は高いものの、耐食性が劣る欠点がある。 However, among the above-described techniques (1) to (5), although (1) is inexpensive and has high emissivity, there are a number of voids, and therefore there is a drawback in that degassing is large and corrosion resistance is weak.
Although (2) has high corrosion resistance, it has a drawback of low emissivity.
Although (3) can increase emissivity and corrosion resistance by adding an epoxy layer, it has a disadvantage that it is weak in the plasma environment.
Although (4) has high emissivity and corrosion resistance, it has a drawback of cost.
Although (5) has a high emissivity, it has a drawback of poor corrosion resistance.

このように、上述した従来の技術は一長一短あり、ターボ分子ポンプ用の内部部品の材料として、最適な条件を充分満足するまでには至っていなかった。   As described above, the above-described conventional technique has advantages and disadvantages, and has not yet fully satisfied the optimum conditions as a material for internal parts for a turbo molecular pump.

本発明は、上記事情を考慮し、高い耐食性・熱放射性を持つと共に耐プラズマ性も高く、しかも安価に実現し得るターボ分子ポンプ用表面処理層を提供することを目的とする。   In view of the above circumstances, an object of the present invention is to provide a surface treatment layer for a turbo molecular pump that has high corrosion resistance and thermal radiation, high plasma resistance, and can be realized at low cost.

参考例にかかるターボ分子ポンプ用表面処理層は、ターボ分子ポンプの内部部品に形成された表面処理層であって、フッ素化合物及びケイフッ化アンモニウムを含む処理液に、アルミニウムまたはアルミニウム合金よりなる基材を浸漬して、７０〜１００℃の温度範囲で処理することにより、前記基材表面にフッ素化合物の皮膜を形成してなることを特徴とする。   A surface treatment layer for a turbo molecular pump according to a reference example is a surface treatment layer formed on an internal part of a turbo molecular pump, and a base material made of aluminum or an aluminum alloy in a treatment liquid containing a fluorine compound and ammonium silicofluoride. And a film of a fluorine compound is formed on the surface of the base material by treatment in a temperature range of 70 to 100 ° C.

ターボ分子ポンプの内部部品に形成された表面処理層には、高い耐食性と高い熱放射性を持たせることが必要であるが、アルミニウムまたはアルミニウム合金よりなる基材の表面に、上記の処理によってフッ素化合物の皮膜を形成することにより、耐食性と放射率とを共に高めたターボ分子ポンプ用表面処理層を得ることができる。因みに、放射率εは０．７〜０．８程度に設定することができる。また、上記の皮膜は、厚さを非常に薄く（約３μｍ）することが可能であり、部品の寸法変化を少なくできる。従って、予め皮膜厚さを考慮して基材の寸法設計をする必要がなくなる。また、上記の皮膜は、ポーラスではないので、反応性ガスに接しても脱ガスの心配がない。また、酸素プラズマに対する耐久度も高いし、前述の処理液に浸漬するだけで皮膜形成できるから、極めて簡単且つ安価に実現し得る。   The surface treatment layer formed on the internal part of the turbo molecular pump needs to have high corrosion resistance and high heat radiation. By forming this film, it is possible to obtain a surface treatment layer for a turbo molecular pump that has both improved corrosion resistance and emissivity. Incidentally, the emissivity ε can be set to about 0.7 to 0.8. Further, the above-mentioned film can be made very thin (about 3 μm), and the dimensional change of the parts can be reduced. Therefore, it is not necessary to design the dimensions of the substrate in consideration of the film thickness in advance. Further, since the above film is not porous, there is no fear of degassing even when it comes in contact with the reactive gas. Moreover, since the durability against oxygen plasma is high, and a film can be formed only by immersing in the above-described processing solution, it can be realized extremely easily and inexpensively.

本発明のターボ分子ポンプ用表面処理層は、ターボ分子ポンプの内部部品に形成された表面処理層であって、アルミニウムまたはアルミニウム合金よりなる基材の表面に、無電解Ｎｉめっき層と無電解黒色Ｎｉめっき層の２層重ねの皮膜を形成してなることを特徴とする。   The surface treatment layer for a turbo molecular pump according to the present invention is a surface treatment layer formed on an internal part of the turbo molecular pump, and an electroless Ni plating layer and an electroless black color are formed on the surface of a substrate made of aluminum or an aluminum alloy. It is characterized by forming a two-layered film of Ni plating layers.

ターボ分子ポンプの内部部品に形成された表面処理層には、高い耐食性と高い熱放射性を持たせることが必要であるが、アルミニウムまたはアルミニウム合金よりなる基材の表面に、無電解Ｎｉめっき層と無電解黒色Ｎｉめっき層の２層重ねの皮膜を形成することにより、耐食性と放射率とを共に高めたターボ分子ポンプ用表面処理層を得ることができる。この場合は、耐食性は主に無電解Ｎｉめっき層で受け持ち、熱放射性は無電解黒色Ｎｉめっき層で受け持つ。即ち、無電解Ｎｉめっき層の熱放射率の低さを無電解黒色Ｎｉめっき層が補い、無電解黒色Ｎｉめっき層の耐食性の低さを無電解Ｎｉめっき層が補うことになり、両者の長所を生かすことができる。また、両層とも金属めっき層であるから、従来のようにエポキシ樹脂をコーティングした場合と違い、酸素プラズマ等のプラズマ環境にも強くなる上、安価なコーティングが可能である。   The surface treatment layer formed on the internal parts of the turbo molecular pump needs to have high corrosion resistance and high heat radiation, but the electroless Ni plating layer is formed on the surface of the substrate made of aluminum or aluminum alloy. By forming a two-layered film of the electroless black Ni plating layer, a surface treatment layer for a turbo molecular pump with improved corrosion resistance and emissivity can be obtained. In this case, corrosion resistance is mainly handled by the electroless Ni plating layer, and thermal radiation is handled by the electroless black Ni plating layer. In other words, the electroless Ni plating layer compensates for the low thermal emissivity of the electroless Ni plating layer, and the electroless Ni plating layer compensates for the low corrosion resistance of the electroless black Ni plating layer. Can be used. In addition, since both layers are metal plating layers, unlike the conventional case of coating with an epoxy resin, it is resistant to a plasma environment such as oxygen plasma and inexpensive coating is possible.

以上説明したように、参考例にかかるターボ分子ポンプ用表面処理層は、フッ素化合物及びケイフッ化アンモニウムを含む処理液に、アルミニウムまたはアルミニウム合金よりなる基材を浸漬して、７０〜１００℃の温度範囲で処理することにより、前記基材表面にフッ素化合物の皮膜を形成してなるものであるため、耐食性と放射率とを共に高めることができる。しかも、前記の皮膜を薄くできるので、部品の寸法変化を少なくでき、予め皮膜厚さを考慮して基材の寸法設計をする必要がなくなる。また、前記の皮膜はポーラスではないので、反応性ガスに接しても脱ガスの心配がない。また、酸素プラズマに対する耐久度も高いし、前述の処理液に浸漬するだけで皮膜形成できるから、極めて簡単且つ安価に実現し得る利点がある。   As described above, the surface treatment layer for the turbo molecular pump according to the reference example is obtained by immersing a base material made of aluminum or an aluminum alloy in a treatment liquid containing a fluorine compound and ammonium silicofluoride, and a temperature of 70 to 100 ° C. By treating within the range, a film of a fluorine compound is formed on the surface of the substrate, so that both corrosion resistance and emissivity can be improved. In addition, since the film can be thinned, the dimensional change of the parts can be reduced, and it is not necessary to design the dimensions of the base material in advance by considering the film thickness. Moreover, since the said film | membrane is not porous, there is no worry of degassing even if it contacts with reactive gas. Moreover, since the durability against oxygen plasma is high and a film can be formed only by immersing in the above-described processing solution, there are advantages that can be realized extremely easily and inexpensively.

本発明のターボ分子ポンプ用表面処理層は、アルミニウムまたはアルミニウム合金よりなる基材の表面に、無電解Ｎｉめっき層と無電解黒色Ｎｉめっき層の２層重ねの皮膜を形成してなるものであるため、耐食性と放射率とを共に高めることができる。また、両層とも金属めっき層であるから、酸素プラズマ等のプラズマ環境にも強くなる上、安価なコーティングが可能である。   The surface treatment layer for a turbo molecular pump of the present invention is formed by forming a two-layered film of an electroless Ni plating layer and an electroless black Ni plating layer on the surface of a base material made of aluminum or an aluminum alloy. Therefore, both corrosion resistance and emissivity can be improved. In addition, since both layers are metal plating layers, they are resistant to a plasma environment such as oxygen plasma and can be coated inexpensively.

以下、本発明の実施形態を図面に基づいて説明する。実施形態として示す表面処理層は、半導体製造システムで使用するターボ分子ポンプの動翼あるいは静翼を構成するものである。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. The surface treatment layer shown as an embodiment constitutes a moving blade or a stationary blade of a turbo molecular pump used in a semiconductor manufacturing system.

参考例として示す表面処理層は、フッ素化合物及びケイフッ化アンモニウムを含む処理液（加熱水溶液）に、アルミニウムまたはアルミニウム合金よりなる基材を浸漬して、７０〜１００℃の温度範囲で処理することにより、図１に示すように、アルミニウムまたはアルミニウム合金よりなる基材１１の表面にフッ素化合物の皮膜１２を形成してなるものである。   The surface treatment layer shown as a reference example is obtained by immersing a base material made of aluminum or an aluminum alloy in a treatment liquid (heated aqueous solution) containing a fluorine compound and ammonium silicofluoride and treating it in a temperature range of 70 to 100 ° C. As shown in FIG. 1, a fluorine compound film 12 is formed on the surface of a base material 11 made of aluminum or an aluminum alloy.

ここで使用する処理液（加熱水溶液）としては、水１００重量部に対し、フッ素化合物０．１〜２０重量部（好ましくは０．２〜１５重量部）、及び、ケイフッ化アンモニウム０．０５〜１５重量部（好ましくは０．１〜１０重量部）を含むものを使用するのがよい。また、フッ素化合物としては、ケイフッ化アンモニウム（（ＮＨ４）２ＳｉＦ６）を除くフッ素化合物を使用するものとし、ケイフッ化塩、特にケイフッ化マグネシウムＭｇＳｉＦ６・６Ｈ２Ｏを用いるのが好ましい。その他には、ケイフッ化亜鉛（ＺｎＳｉＦ６・６Ｈ２Ｏ）、ケイフッ化カリウム（Ｋ２ＳｉＦ６），ケイフッ化ソーダ（Ｎａ２ＳｉＦ６），ケイフッ化マンガン（ＭｎＳｉＦ６・６Ｈ２Ｏ）等のケイフッ化塩、ホウフッ化塩、フッ化ジルコニウム塩またはフッ化チタン塩などが挙げられる。これらのフッ素化合物の中でも、ケイフッ化塩が好ましく用いられ、特にケイフッ化マグネシウム、ケイフッ化マンガン等が好ましく用いられる。 As the treatment liquid (heating aqueous solution) used here, 0.1 to 20 parts by weight (preferably 0.2 to 15 parts by weight) of a fluorine compound and 0.05 to 0.05 part of ammonium silicofluoride with respect to 100 parts by weight of water. It is good to use what contains 15 weight part (preferably 0.1-10 weight part). Further, as the fluorine compound, a fluorine compound other than ammonium silicofluoride ((NH 4 ) 2 SiF 6 ) is used, and it is preferable to use a silicofluoride salt, particularly magnesium fluorosilicate MgSiF 6 · 6H 2 O. Other examples include silicon fluoride such as zinc silicofluoride (ZnSiF 6 .6H 2 O), potassium silicofluoride (K 2 SiF 6 ), sodium silicofluoride (Na 2 SiF 6 ), manganese silicofluoride (MnSiF 6 · 6H 2 O), and the like. Salt, borofluoride, zirconium fluoride, titanium fluoride, and the like. Among these fluorine compounds, silicofluoride salts are preferably used, and magnesium silicofluoride, manganese silicofluoride, and the like are particularly preferably used.

このような処理液を用いることによって、アルミニウムまたはアルミニウム合金の表面に、均一な薄さの耐食性及び熱放射性に優れた皮膜を形成することができる。因みに、放射率εは０．７〜０．８程度に設定することができる。また、上記の皮膜は、厚さを非常に薄く（約３μｍ）することが可能であり、部品の寸法変化を少なくできる。従って、予め皮膜厚さを考慮して基材の寸法設計をする必要がなくなる。また、上記の皮膜は、ポーラスではない（空孔を持たない）ので、反応性ガスに接しても脱ガスの心配がない。また、酸素プラズマに対する耐久度も高いし、前述の処理液に浸漬するだけで皮膜形成できるから、極めて簡単且つ安価にターボ分子ポンプ用として優れた表面処理層を提供し得る。   By using such a treatment liquid, a uniform thin film having excellent corrosion resistance and thermal radiation can be formed on the surface of aluminum or an aluminum alloy. Incidentally, the emissivity ε can be set to about 0.7 to 0.8. Further, the above-mentioned film can be made very thin (about 3 μm), and the dimensional change of the parts can be reduced. Therefore, it is not necessary to design the dimensions of the substrate in consideration of the film thickness in advance. Further, since the above film is not porous (has no pores), there is no fear of degassing even when it comes into contact with the reactive gas. Moreover, since the durability against oxygen plasma is high, and a film can be formed just by immersing in the above-mentioned treatment solution, an excellent surface treatment layer for a turbo molecular pump can be provided very easily and inexpensively.

なお、前記処理液において、フッ素化合物が０．１重量部未満の場合、あるいはケイフッ化アンモニウムが０．０５重量部未満の場合には、反応が遅くなり、処理時間が長くなってしまうので好ましくない。一方、フッ素化合物が２０重量部を超える場合、あるいはケイフッ化アンモニウムが１５重量部を超える場合には、溶解が困難となるため好ましくない。   In the treatment liquid, when the fluorine compound is less than 0.1 parts by weight, or when the ammonium silicofluoride is less than 0.05 parts by weight, the reaction becomes slow and the treatment time becomes long. . On the other hand, when the fluorine compound exceeds 20 parts by weight, or when the ammonium silicofluoride exceeds 15 parts by weight, dissolution becomes difficult, which is not preferable.

また、アルミニウムまたはアルミニウム合金よりなる基材を浸漬する際の処理液の温度は、通常７０℃〜１００℃の範囲内であり、好ましくは７５℃〜９９℃の範囲内、より好ましくは８０℃〜９８℃の範囲内に設定するのが望ましい。処理液の温度が７０℃未満であるような温度の低い場合には、反応が遅くなり、処理時間が長くなってしまうので好ましくない。一方、処理液の温度が１００℃を超えてしまうような高い温度の場合には、処理液の蒸発が多くなってしまうので好ましくない。処理時間については、成膜反応は約１分間程度で終了するため、２分間程度の浸漬を行えば、表面処理としては十分である。但し、この皮膜は保護作用があるので、一旦成膜した後は３０分以上浸漬しておいても何ら問題は生じない。   In addition, the temperature of the treatment liquid when dipping a substrate made of aluminum or an aluminum alloy is usually within a range of 70 ° C to 100 ° C, preferably within a range of 75 ° C to 99 ° C, more preferably 80 ° C to It is desirable to set within the range of 98 ° C. When the temperature of the treatment liquid is low such that it is less than 70 ° C., the reaction becomes slow and the treatment time becomes long. On the other hand, when the temperature of the processing liquid is high such that it exceeds 100 ° C., evaporation of the processing liquid increases, which is not preferable. Regarding the processing time, since the film formation reaction is completed in about 1 minute, soaking for about 2 minutes is sufficient for the surface treatment. However, since this film has a protective action, no problem arises even if it is immersed for 30 minutes or more after it is once formed.

本発明の実施形態として示す表面処理層は、図２に示すように、アルミニウムまたはアルミニウム合金よりなる基材２１の表面に、無電解Ｎｉめっき層２２と無電解黒色Ｎｉめっき層２３の２層重ねの皮膜２４を形成してなるものである。この表面処理層においては、下地に無電解Ｎｉめっき層２２を形成し、その上に無電解黒色Ｎｉめっき層２３を形成する。   As shown in FIG. 2, the surface treatment layer shown as an embodiment of the present invention is a two-layer stack of an electroless Ni plating layer 22 and an electroless black Ni plating layer 23 on the surface of a base material 21 made of aluminum or an aluminum alloy. The film 24 is formed. In this surface treatment layer, an electroless Ni plating layer 22 is formed on the base, and an electroless black Ni plating layer 23 is formed thereon.

このようにアルミニウム基材２１の表面に、無電解Ｎｉめっき層２２と無電解黒色Ｎｉめっき層２３の２層重ねの皮膜２４を形成することにより、耐食性と放射率とを共に高めた表面処理層を提供することができる。この場合、無電解Ｎｉめっき層２２の熱放射率の低さを無電解黒色Ｎｉめっき層２３が補い、無電解黒色Ｎｉめっき層２３の耐食性の低さを無電解Ｎｉめっき層２２が補うことができるので、両者の長所を生かした、耐食性と放射率の高いターボ分子ポンプ用の材料を得ることができる。また、両層とも金属めっき層であるから、従来のようにエポキシ樹脂をコーティングした場合と違い、酸素プラズマ等のプラズマ環境にも強くなる上、安価なコーティングが可能である。   Thus, by forming the two-layered film 24 of the electroless Ni plating layer 22 and the electroless black Ni plating layer 23 on the surface of the aluminum base material 21, the surface treatment layer that improves both the corrosion resistance and the emissivity. Can be provided. In this case, the electroless Ni plating layer 22 may compensate for the low thermal emissivity of the electroless Ni plating layer 22, and the electroless Ni plating layer 22 may compensate for the low corrosion resistance of the electroless black Ni plating layer 23. Therefore, it is possible to obtain a material for a turbo molecular pump that takes advantage of both and has high corrosion resistance and high emissivity. In addition, since both layers are metal plating layers, unlike the conventional case of coating with an epoxy resin, it is resistant to a plasma environment such as oxygen plasma and inexpensive coating is possible.

参考例の表面処理層の拡大断面図である。It is an expanded sectional view of the surface treatment layer of a reference example. 本発明の実施形態の表面処理層の拡大断面図である。It is an expanded sectional view of the surface treatment layer of the embodiment of the present invention. ターボ分子ポンプの概略構成図である。It is a schematic block diagram of a turbo molecular pump.

符号の説明Explanation of symbols

１１，２１ アルミニウムまたはアルミニウム合金よりなる基材
１２ フッ素化合物の皮膜
２２ 無電解Ｎｉめっき層
２３ 無電解黒色Ｎｉめっき層
２４ ２層重ねの皮膜 11, 21 Base material made of aluminum or aluminum alloy 12 Fluorine compound coating 22 Electroless Ni plating layer 23 Electroless black Ni plating layer 24 Double layer coating

Claims (1)

ターボ分子ポンプの内部部品である動翼または静翼に形成された表面処理層であって、アルミニウムまたはアルミニウム合金よりなる基材の表面に、無電解Ｎｉめっき層と無電解黒色Ｎｉめっき層の２層重ねの皮膜を形成してなることを特徴とするターボ分子ポンプ用表面処理層。   A surface treatment layer formed on a moving blade or a stationary blade, which is an internal component of a turbo molecular pump, on the surface of a substrate made of aluminum or an aluminum alloy, an electroless Ni plating layer and an electroless black Ni plating layer. A surface treatment layer for a turbo molecular pump, characterized by forming a layered film.
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WO2011024261A1 (en) * 2009-08-26 2011-03-03 株式会社島津製作所 Turbo-molecular pump and method of manufacturing rotor
JP2015229949A (en) * 2014-06-04 2015-12-21 株式会社島津製作所 Turbo molecular pump
JP2022032773A (en) * 2020-08-14 2022-02-25 株式会社島津製作所 Turbo molecular pump

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JP2001193686A (en) * 2000-01-14 2001-07-17 Shimadzu Corp Vacuum pump

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Publication number Priority date Publication date Assignee Title
WO2011024261A1 (en) * 2009-08-26 2011-03-03 株式会社島津製作所 Turbo-molecular pump and method of manufacturing rotor
KR101395446B1 (en) * 2009-08-26 2014-05-14 가부시키가이샤 시마쓰세사쿠쇼 Turbo-molecular pump and method of manufacturing rotor
JP5676453B2 (en) * 2009-08-26 2015-02-25 株式会社島津製作所 Turbomolecular pump and rotor manufacturing method
US10024327B2 (en) 2009-08-26 2018-07-17 Shimadzu Corporation Turbomolecular pump, and method of manufacturing rotor
JP2015229949A (en) * 2014-06-04 2015-12-21 株式会社島津製作所 Turbo molecular pump
US10161404B2 (en) 2014-06-04 2018-12-25 Shimadzu Corporation Turbo-molecular pump
JP2022032773A (en) * 2020-08-14 2022-02-25 株式会社島津製作所 Turbo molecular pump
JP7428101B2 (en) 2020-08-14 2024-02-06 株式会社島津製作所 turbo molecular pump

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