JP2007253062A - Dry ice snow jetting nozzle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dry ice snow jetting nozzle which is capable of easily modifying the size of a part of a jetting pipeline without newly remaking the whole. <P>SOLUTION: The nozzle itself 14 is provided with a first jetting pipeline material 21, a second pipeline material 22 and a third jetting pipeline material 23 so that they are dividable. An orifice part 17 to throttle the flow rate of liquefied carbon dioxide that is pressurized is installed to the first jetting pipeline material 21. A swelling part 18 to produce dry ice snow by rapidly reducing the pressure of the liquefied carbon dioxide is installed to the second jetting pipeline material 22. A throttling part 19 to rectify the dry ice snow is installed to the third jetting pipeline material 23. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a dry ice snow ejection nozzle used for converting liquefied carbon dioxide into dry ice snow and ejecting it to an object to be cleaned.

  For example, in the field of manufacturing semiconductors and liquid crystal panels, dry ice fine particles (dry ice snow) are generated by rapidly depressurizing liquefied carbon dioxide, and this is sprayed onto the object to be cleaned (work) at a high pressure for cleaning. Is used. In this case, a method of spraying dry ice snow at a high pressure by spraying dry ice snow on a pressurized carrier gas (for example, nitrogen gas or argon gas) is generally performed.

However, in this method, since the carrier gas is also sprayed onto the object to be cleaned together with the dry ice snow, the carrier gas may have an adverse effect on the object to be cleaned as an impurity. Therefore, in recent years, a method has been considered in which liquefied carbon dioxide itself is pressurized and ejected from an ejection nozzle (for example, see Patent Document 1).
Japanese Patent Laid-Open No. 2005-42619

  By the way, conditions (spout conditions) such as the generation state and spout speed of the dry ice snow spouted from the spout nozzle are the cross-sectional area (diameter dimension), length dimension, orifice diameter, etc. of the spout nozzle. Varies with dimensions. In particular, in the case of a method in which liquefied carbon dioxide is pressurized and ejected from the ejection nozzle, the size of each part of the ejection nozzle can be reduced by adjusting the flow rate and flow rate of the carrier gas and changing the ejection conditions of the dry ice snow. The effect on dry ice snow generation is significant. In addition, there is a situation in which required dry ice snow ejection conditions differ depending on the object to be cleaned.

  Therefore, an ejection nozzle is manufactured by changing the dimensions of each part of the ejection pipe according to the required dry ice snow ejection conditions. However, in the conventional ejection nozzle, even if the dimensions of a part of the ejection pipeline are changed, the entire nozzle has to be newly recreated.

  The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a dry ice snow ejection nozzle capable of easily changing the size of a part of the ejection pipeline without recreating the whole. There is to do.

  A dry ice snow ejection nozzle according to the present invention includes a nozzle body connected to a pressurized liquefied carbon dioxide supply line and having an ejection pipeline that ejects the liquefied carbon dioxide as dry ice snow by rapidly depressurizing the liquefied carbon dioxide. In the dry ice snow ejection nozzle, the ejection pipe line includes a conveyance unit that conveys the liquefied carbon dioxide, an orifice unit that is located downstream of the conveyance unit and restricts the flow rate of the pressurized liquefied carbon dioxide, An expansion part located on the downstream side of the orifice part to rapidly depressurize the liquefied carbon dioxide to form dry ice snow, and a throttle part located on the downstream side of the expansion part to rectify the dry ice snow And the nozzle body includes a first ejection pipe member having the transport section and the orifice section, and a second ejection pipe member having the expansion section. , Characterized in that it is composed of a third ejection conduit member having the narrowed portion.

  According to the present invention, an orifice part that restricts the flow rate of pressurized liquefied carbon dioxide is provided in the first jet pipe member, and the expansion part that generates dry ice snow by reducing the pressure of the liquefied carbon dioxide having a reduced flow rate. Is provided in the second jet pipe member, and the throttle part for rectifying the generated dry ice snow is provided in the third jet pipe member. Therefore, the first jet pipe member, the second jet pipe member, and By exchanging a part of the third ejection pipe member, the dimensions of the orifice part, the expansion part, and the throttle part can be changed for each part. Thereby, according to the discharge conditions of the dry ice snow requested | required, the dimension of a part of ejection pipe line can be changed easily, without making the whole new.

Hereinafter, an embodiment in which the present invention is applied to an electronic component cleaning apparatus will be described with reference to the drawings.
First, in FIG. 2, in a substantially rectangular box-shaped cleaning chamber 1, a stage 3 for placing a work 2 such as a liquid crystal panel substrate to be cleaned is arranged in the width direction of the cleaning chamber 1 and the cleaning chamber 1. It is provided to be movable in the depth direction. The cleaning chamber 1 is provided with an entrance (not shown) for taking in and out the workpiece 2 and a door (not shown) for opening and closing the entrance, and by closing the door, The cleaning chamber 1 can be sealed. When the cleaning chamber 1 is hermetically sealed, the inside of the cleaning chamber 1 can be decompressed by a vacuum pump (not shown) and filled with carbon dioxide from a vaporizer (not shown) that vaporizes liquefied carbon dioxide. It is possible. An exhaust port 4 is provided at the bottom of the cleaning chamber 1, and when the exhaust port 4 is opened, the carbon dioxide gas filled in the cleaning chamber 1 is exhausted.

  A spray nozzle 5 (corresponding to a dry ice snow spray nozzle) is disposed in the cleaning chamber 1. A pressurizing device 6 having a plunger type pump (not shown), for example, is connected to the ejection nozzle 5 via a hose 7. A cylinder 8 that is a supply source of liquefied carbon dioxide is connected to the pressurizing device 6 via a hose 9. Thereby, the supply line 10 of the liquefied carbon dioxide from the cylinder 8 through the pressurizing device 6 to the ejection nozzle 5 is constituted, and the liquefied carbon dioxide in the cylinder 8 is pressurized by driving the pressurizing device 6. It is supplied to the ejection nozzle 5.

  Next, the configuration of the ejection nozzle 5 will be described with reference to FIG. The ejection nozzle 5 includes a nozzle mounting portion 13 having a hose connection port 11 and a nozzle mounting port 12, and a nozzle body 14 mounted on the nozzle mounting port 12. The hose connection port 11 and the nozzle mounting port 12 communicate with each other, and the hose 7 described above is connected to the hose connection port 11. Further, the nozzle mounting portion 13 is provided with a fixing pipe mounting hole 15 provided with fixing screws 15a and 15b. The ejection nozzle 5 has a fixing pipe (not shown) provided in the cleaning chamber 1 inserted through the fixing pipe mounting hole 15 so that the tip of the ejection nozzle 5 faces the stage 3 (work 2). It is disposed in the cleaning chamber 1 in a state of being fixed with fixing screws 15a and 15b.

  Next, the configuration of the nozzle body 14 will be described in detail with reference to FIGS. The nozzle body 14 includes a transport unit 16, an orifice unit 17 located on the downstream side of the transport unit 16 (the tip side of the nozzle body 14), an expansion unit 18 located on the downstream side of the orifice unit 17, An ejection pipe 20 having a throttle part 19 located on the downstream side of the expansion part 18 is provided.

  The transport unit 16 is a pipe formed in a circular cross section having substantially the same diameter from the upstream side to the downstream side of the jet pipe 20, and transports the liquefied carbon dioxide supplied from the supply line 10 described above. The diameter of the orifice portion 17 (orifice diameter) is formed to be smaller than the diameter of the conveyance portion 16, and the flow rate of the liquefied carbon dioxide conveyed from the conveyance portion 16 is reduced. The expansion part 18 is formed so as to gradually increase in diameter from the upstream side to the downstream side of the ejection pipe 20, and suddenly depressurizes the liquefied carbon dioxide whose flow rate is reduced by the orifice part 17 to dry ice. Make it snow. The throttle part 19 is formed so as to gradually decrease in diameter from the upstream side to the downstream side of the ejection pipe line 20, and rectifies the dry ice snow generated by the expansion part 18.

As shown in FIG. 4, the nozzle main body 14 includes a first jet pipe member 21, a second jet pipe member 22, and a third jet pipe member 23, and is divided into each member. It is possible.
The first ejection pipe member 21 includes a mounting portion 24 that is mounted on the nozzle mounting port 12 and a connecting portion 25 that connects the second ejection pipe member 22. On the inner peripheral surface of the mounting portion 24, a female screw portion 21a capable of screwing a male screw portion (not shown) of the nozzle mounting port 12 is provided. The connecting portion 25 has a smaller outer diameter than the mounting portion 24, and the conveying portion 16 and the orifice portion 17 are provided therein. The connecting portion 25 includes a columnar portion 25a and a conical portion 25b located on the downstream side of the columnar portion 25a. A male screw portion 21b is provided on the outer peripheral surface of the columnar portion 25a. It has been.

The second ejection pipe member 22 has a substantially cylindrical shape as a whole, and includes a concave portion 26 having a shape corresponding to the coupling portion 25 and a coupling portion 27 with the third ejection pipeline member 23. Yes. On the inner peripheral surface of the recess 26, a female screw portion 22a into which the male screw portion 21b of the first ejection pipe member 21 (connecting portion 25) can be screwed is provided. The expansion portion 18 is provided inside the connecting portion 27, and a male screw portion 22 b is provided on the outer peripheral surface of the connecting portion 27.
The third ejection pipe member 23 includes a concave portion 28 having a shape corresponding to the connecting portion 27 and the throttle portion 19. On the inner peripheral surface of the recess 28, a female screw portion 23a into which the male screw portion 22b of the second ejection pipe member 22 (connecting portion 27) can be screwed is provided. The throttle portion 19 is provided so as to protrude downstream from the recess 28.

  And the connection part 25 of the 1st ejection pipeline member 21 enters into the recessed part 26 of the 2nd ejection pipeline member 22, and the internal thread part 22a of the 2nd ejection pipeline member 22 of the 1st ejection pipeline member 21 When the male screw portion 21b is screwed (by screwing), the first jet pipe member 21 and the second jet pipe member 22 are detachably connected. Further, the connecting portion 27 of the second ejection conduit member 22 enters the recess 28 of the third ejection conduit member 23 and enters the female screw portion 23 a of the third ejection conduit member 23. By screwing the male screw portion 22b, the second ejection pipe member 22 and the third ejection pipe member 23 are detachably connected. Thereby, the nozzle main body 14 shown in FIG. 1 is manufactured. In this case, the boundary portion between the orifice portion 17 and the expansion portion 18 and the boundary portion between the expansion portion 18 and the throttle portion 19 are designed so as to be smoothly connected without unevenness, and the orifice portion 17, the expansion portion 18, and The surface of the narrowed portion 19 is precisely polished. For example, rubber seal members 29 and 30 are disposed at the upstream end and the downstream end of the second ejection pipe member 22.

  By the way, when the workpiece 2 is washed by spraying dry ice snow, there are circumstances in which required dry ice snow ejection conditions (conditions such as the dry ice snow generation state and ejection speed) differ depending on the workpiece 2. . And the ejection conditions of dry ice snow change with the dimension and shape of each part of the ejection pipeline 20. For example, the flow rate of the dry ice snow changes depending on the size of the orifice diameter of the orifice portion 17 (shape of the orifice portion 17), and the particle size of the dry ice snow changes depending on the size (shape) of the expansion portion 18, The flow velocity of snow varies depending on the size (shape) of the throttle portion 19.

  In the present embodiment, as described above, the orifice portion 17 is provided in the first jet pipe member 21, the expansion portion 18 is provided in the second jet pipe member 22, and the throttle portion 19 is the third jet pipe. It is provided on the road member 23. Therefore, the required dry ice snow is obtained by exchanging a part of the first jet pipe member 21, the second jet pipe member 22 and the third jet pipe member 23 constituting the nozzle body 14. It is possible to cope with different jetting conditions.

5 and 6 show an example in which the second ejection pipe member 22 is replaced with another second ejection pipe member 31 in the nozzle main body 14 described above.
The expansion part 32 of the second ejection pipe member 31 is formed with a shorter dimension (length dimension) in the direction from the upstream side to the downstream side than the expansion part 18 of the second ejection pipe member 22. Yes. And the connection part 25 of the 1st ejection pipeline member 21 enters into the recessed part 33 of the 2nd ejection pipeline member 31, and the internal thread part 31a of the 2nd ejection pipeline member 31 of the 1st ejection pipeline member 21 When the male screw portion 21 b is screwed, the connecting portion 34 of the second ejection pipe member 31 enters the recess 28 of the third ejection pipe member 23 and enters the female screw portion 23 a of the third ejection pipe member 23. The nozzle body 35 shown in FIG. 5 is manufactured by screwing the male thread portion 31b of the second ejection pipe member 31.

Next, the operation of the above configuration will be described.
First, a nozzle body (here, for example, the nozzle body 14 described above) corresponding to the type of the workpiece 2 is mounted on the nozzle mounting portion 13. Then, the workpiece 2 is inserted into the cleaning chamber 1 from the entrance of the cleaning chamber 1 and placed on the stage 3. Then, the door of the entrance / exit is closed, the inside of the cleaning chamber 1 is sealed, and the pressure is reduced to about 10 Pa. Thereby, the inside of the cleaning chamber 1 becomes a low dew point environment in which the dew point is −40 ° C. or lower.

  When the pressurization device 6 is driven in this state, pressurized liquefied carbon dioxide is supplied from the supply line 10 to the ejection nozzle 5. The liquefied carbon dioxide supplied to the ejection nozzle 5 is throttled when passing through the orifice portion 17 after being transported to the transport portion 16 of the ejection pipe line 20. The liquefied carbon dioxide whose flow rate is reduced is depressurized when passing through the inflating section 18, thereby forming fine particles and forming dry ice snow. The dry ice snow is ejected from the tip of the ejection nozzle 5 while being rectified in the throttle portion 19.

  The dry ice snow ejected from the ejection nozzle 5 is sprayed toward the workpiece 2 placed on the stage 3, whereby the workpiece 2 is cleaned. At this time, the entire surface of the workpiece 2 is cleaned by the stage 3 moving in the cleaning chamber 1 in the width direction and the depth direction of the cleaning chamber 1. The dry ice snow sprayed on the work 2 is sublimated into the carbon dioxide gas in the cleaning chamber 1. When the cleaning of the workpiece 2 is completed, the carbon dioxide gas in the cleaning chamber 1 is exhausted from the exhaust port 4 and the workpiece 2 is taken out from the cleaning chamber 1. Thereby, a series of cleaning processes of the workpiece 2 is completed.

  If the type of the workpiece 2 to be cleaned thereafter is different from that of the previously cleaned workpiece 2, the entire nozzle body or a part of the nozzle body is replaced. For example, when the required dry ice snow particle size is different, the nozzle body 35 in which the second ejection pipe member 22 is replaced with the second ejection pipe member 31 is mounted on the nozzle mounting portion 13. In the ejection nozzle 5 equipped with the nozzle body 35, the volume of the expansion part 32 that depressurizes the liquefied carbon dioxide whose flow rate is reduced is reduced compared to the volume of the expansion part 18 of the nozzle body 14 described above. The mode of decompression of the squeezed liquefied carbon dioxide is different, and the particle size of the generated dry ice snow changes compared to the particle size when the nozzle body 14 is mounted.

  As described above, according to the present embodiment, the orifice portion 17 that restricts the flow rate of the pressurized liquefied carbon dioxide is provided in the first ejection pipe member 21 to reduce the pressure of the liquefied carbon dioxide that has been reduced in flow rate. The expansion part 18 (expansion part 32) for generating dry ice snow is provided in the second jet pipe member 22 (second jet pipe member 31), and the throttle part 19 for rectifying the generated dry ice snow is provided in the first 3 is provided in the ejection line member 23 of the third. Accordingly, by providing a plurality of types of pipes having different pipe shapes for each of the first to third ejection pipe members, various types can be obtained simply by changing the combination of the first to third ejection pipe members. The ejection nozzle 5 corresponding to the ejection conditions can be easily configured.

  In addition, a connection portion between the first ejection pipe member 21 and the second ejection pipeline member 22 (second ejection pipeline member 31) and the second ejection pipeline member 22 (second ejection pipeline member 31). ) And the third ejection pipe member 23 are connected to the female screw portions (21a, 22a, 31a, 23a) provided on one side and the male screw portions (21b, 22b, 31b) provided on the other side. Therefore, the connection between the members becomes strong, and the strength of the entire nozzle body 14 (nozzle body 35) can be increased.

  In addition, the connecting portion 25 of the first jet pipe member 21 enters the recess 26 of the second jet pipe member 22, and the connecting portion 27 of the second jet pipe member 22 (second jet pipe member 31). Since the connecting portion 34) enters the recess 28 of the third jetting pipe member 23, the first to third jetting pipe members can be connected without any substantial gap. Thereby, it is possible to prevent the ejection nozzle 5 from being damaged by a load from high-pressure liquefied carbon dioxide or dry ice snow flowing in the ejection pipeline 20. Further, the ejection pipe line 20 can be formed without any gap, and the liquefied carbon dioxide or dry ice snow flowing through the ejection pipe line 20 can be prevented from leaking.

  Further, the boundary part between the orifice part 17 and the expansion part 18 (expansion part 32) and the boundary part between the expansion part 18 (expansion part 32) and the throttle part 19 are designed so as to be smoothly connected without irregularities. Further, it is possible to prevent the dry ice snow from being clogged in the ejection pipe line 20 (particularly, the expansion part 18 and the expansion part 32). Moreover, since the surfaces of the orifice part 17, the expansion part 18 (expansion part 32) and the throttle part 19 are precisely polished, dry ice snow can be smoothly injected.

In addition, this invention is not limited only to above-described embodiment, It can deform | transform or expand as follows.
In the above-described embodiment, the case where the particle diameter of the dry ice snow is changed by changing the length dimension of the inflating portion 18 is exemplified, but not limited to this, the orifice diameter dimension of the orifice portion 17 is changed. Thus, the flow rate of the dry ice snow can be changed, and the flow rate of the dry ice snow can be changed by changing the size of the throttle portion 19.

The first jet pipe member 21, the second jet pipe member 22 (second jet pipe member 31), and the third jet pipe member 23 may not be configured to be removable (detachable). For example, at the time of manufacturing the ejection nozzle 5, these members may be fixed.
Further, when the ejection nozzle 5 is manufactured, a part of the first to third ejection pipe members is exchanged instead of newly recreating the entire nozzle body according to the required dry ice snow ejection conditions. Thus, it is possible to manufacture the ejection nozzle 5 (nozzle body) by changing the dimensions of a part of the ejection pipeline 20 (the orifice portion 17, the expansion portion 18, the expansion portion 32, and the throttle portion 19).

The seal members 29 and 30 can be made of, for example, nitrile rubber (NBR) or Teflon (registered trademark).
The carbon dioxide gas exhausted from the exhaust port 4 may be collected, impurities may be removed by a filter or the like, and then the cleaning chamber 1 may be filled again.

1 is a longitudinal side view showing an internal configuration of a nozzle body according to an embodiment of the present invention. Overall configuration diagram showing the state of cleaning the workpiece using the ejection nozzle External view schematically showing the ejection nozzle Vertical side view of the nozzle body divided Longitudinal side view of nozzle body with second jet line member replaced Longitudinal side view of the nozzle body with the second ejection pipe member replaced

Explanation of symbols

  In the drawing, 5 is an ejection nozzle (dry ice snow ejection nozzle), 10 is a supply line, 14 and 35 are nozzle bodies, 16 is a transport section, 17 is an orifice section, 18 and 32 are expansion sections, 19 is a throttle section, 20 Is a first jet pipe member, 21 and 31 are second jet pipe members, 23 is a third jet pipe member, 21a, 22a, 23a and 31a are female screw portions, 21b, Reference numerals 22b and 31b denote male screw portions.

Claims (2)

In a dry ice snow ejection nozzle that is connected to a pressurized liquefied carbon dioxide supply line and has a nozzle body having a jet pipe that ejects dry liquefied carbon dioxide by rapidly depressurizing the liquefied carbon dioxide,
The ejection pipe line is located on a downstream side of the orifice unit, a conveyance unit that conveys the liquefied carbon dioxide, an orifice unit that is located downstream of the conveyance unit and restricts the flow rate of the pressurized liquefied carbon dioxide, and The liquefied carbon dioxide is rapidly reduced in pressure to form dry ice snow, and an expansion part located downstream of the expansion part and rectifying the dry ice snow is configured.
The nozzle body is
A first jet pipe member having the transport section and the orifice section;
A second ejection pipe member having the expansion portion;
A dry ice / snow jet nozzle comprising a third jet pipe member having the throttle portion. The first jet pipe member and the second jet pipe member, the second jet pipe member and the third jet pipe member are each configured to be detachably connected,
The connecting portion between the first jet pipe member and the second jet pipe member and the connecting portion between the second jet pipe member and the third jet pipe member are both the female screw portion and the female screw. The dry ice snow ejection nozzle according to claim 1, further comprising a male screw part that can be screwed into the part.

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