JP2007242587A - Discharge lamp retention mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lamp holder capable of easily mounting even a larger-sized lamp. <P>SOLUTION: The mechanism consists of a discharge lamp with a base loaded at one end and a lamp holder holding the discharge lamp in free detachment so as to be hung down. The lamp holder has a holder-side temporary fixing mechanism and a proper fixing mechanism, and the base of the discharge lamp has a lamp-side temporary fixing mechanism engaged with the holder-side temporary fixing mechanism, so that, by inserting the base of the discharge lamp into the lamp holder to turn the base, the holder-side temporary fixing mechanism and the lamp-side temporary holding mechanism are made engaged with each other to temporarily fix the both, and later, the holder-side proper fixing mechanism and a lamp-side proper fixing mechanism are operated to properly fix both the holder and the lamp. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a discharge lamp holding mechanism. In particular, the present invention relates to a discharge lamp holding mechanism that is difficult to attach to a holder due to its physically large size and large current.

In recent years, an exposure technique using a short arc type mercury lamp as a light source for photolithography is used in the fields of semiconductor and liquid crystal exposure and other fine processing.
Mercury lamps that efficiently emit light with a wavelength of 365 nm (i-line), which is sensitive to photoresist, are used for photolithography exposure, and light with a wavelength of 350 nm to 450 nm is emitted for exposure of liquid crystals and printed circuit boards. A mercury lamp is used. In the mercury lamp, mercury is enclosed as a luminescent substance, and a rare gas such as argon, krypton, or xenon is enclosed as a starting gas.
Such a mercury lamp constitutes an optical system in combination with a concave reflecting mirror as disclosed in, for example, JP-A-9-213129.

The exposure apparatus tends to have a shorter processing time (throughput) while an area to be exposed becomes larger. The mercury lamp, which is a light source, also tends to increase the amount of exposure by increasing the input.
However, an increase in lamp input results in a physical enlargement of the lamp, which complicates the work of assembling the reflecting mirror.
In particular, when the lamp becomes large, it becomes difficult for the operator to hold the lamp in terms of dimensions and weight. For example, in the case of a structure in which a lamp is held by being suspended as shown in the above-mentioned JP-A-9-213129, it is necessary to perform fixing work such as screwing while holding the lamp in a suspended state. Furthermore, when the lamp is enlarged, the reflecting mirror is also enlarged. In the above operation, the base of the lamp is inserted from the inner space of the reflecting mirror, passed through the top opening, and fixed by a holding mechanism outside the top opening. In this fixing work, it is necessary to hold one end of the lamp in the inner space of the reflecting mirror and at the same time to perform fixing work such as screwing outside the top opening of the reflecting mirror. In this case, the lamp must be held with one hand and screwed with the other hand. When the lamp becomes large, this work is held with one hand, and sometimes the lamp is dropped or the reflection mirror is damaged.
Furthermore, a reliable power supply configuration must be formed in the work of fixing the discharge lamp and the holding mechanism. This is because current supply becomes insufficient if the electrical connection of the power supply leads and power supply lines is insufficient.
JP-A-9-213129

  The problem to be solved by the present invention is to provide a lamp holder that can be easily mounted even with a large-sized lamp.

  In order to solve the above problems, a discharge lamp holding mechanism according to the present invention comprises a discharge lamp having a cap attached to one end thereof, and a lamp holder that holds the discharge lamp in a detachable manner, The lamp holder has a holder-side temporary fixing mechanism and a holder-side main fixing mechanism, and the discharge lamp base is engaged with the lamp-side temporary fixing mechanism and the holder-side main fixing mechanism. The lamp-side main fixing mechanism is inserted into the lamp holder, and the base is rotated to engage the holder-side temporary fixing mechanism and the lamp-side temporary holding mechanism. The fixing is performed, and then the holder-side main fixing mechanism and the lamp-side main fixing mechanism are operated to fix both of them.

  Furthermore, the base of the discharge lamp is made of a conductive member, and is electrically fixed to the lamp holder, whereby the end face of the base and the end face of the lamp holder are brought into contact to form an electric power feeding mechanism.

  Furthermore, the end face of the base of the discharge lamp is disposed substantially perpendicular to the longitudinal direction of the discharge lamp.

  Further, the discharge lamp has a rated current of 50 A or more.

The discharge lamp holding mechanism according to the present invention has the above-described configuration, so that the discharge lamp base is inserted into an insertion hole of a lamp holder (hereinafter also simply referred to as “holder”), and the base is rotated. The holder-side temporary fixing mechanism provided inside and the lamp-side temporary fixing mechanism provided on the base engage with each other, so that the holder-side temporary fixing mechanism can be suspended without dropping even if the hand is released. In this state, by operating the holder and the lamp main fixing mechanism from the outside of the top of the reflecting mirror, both can be firmly fixed.
That is, in the work for attaching to and detaching from the lamp, there is no need for the difficulty of holding the lamp with one hand and fixing the lamp with the other hand as in the prior art.
Further, the base is made of a conductive member, and the upper end surface of the base is in contact with the holder in the entire region, so that an electric power feeding structure can be configured.

FIG. 1 shows the discharge lamp holding mechanism in a state in which the discharge lamp 10 is mounted on the lamp holder 30 attached to the holder 50 of the exposure apparatus and both are fixed.
The discharge lamp 10 (hereinafter also simply referred to as “lamp”) passes through the top opening of the reflection mirror 20 and is attached to the lamp holder 30 (hereinafter also simply referred to as “holder”). Here, the lamp 10 and the holder 30 are referred to as a discharge lamp holding mechanism, and the lamp 10, the reflection mirror 20, and the holder 30 are referred to as a light source device. The holder 30 is fixed to the holding table 50 of the exposure apparatus, for example, by screwing. The holding base 50 is provided with an auxiliary fixing point 51 at a position deviated from the axis center of the holder 30. The holder 30 is also fixed to the fixing point 51 as an auxiliary. The reflecting mirror 20 is fixed to an exposure apparatus or the like by a mechanism not shown.

FIG. 2 is a drawing showing only the lamp 10 in a state before the discharge lamp 10 is fixed to the lamp holder 30. For example, the arc tube portion 11 made of quartz glass is provided at the approximate center, and rod-shaped at both ends thereof. The sealing portion 12 is integrally formed so as to extend. The arc tube portion 11 has a spherical shape or a spindle shape elongated in the tube axis direction (vertical direction in the drawing). An airtight space is formed inside the arc tube portion 11 and mercury as a luminescent material, xenon or argon as a starting gas. Is enclosed. In addition, the anode 13 and the cathode 14 are disposed opposite to each other inside the arc tube portion 11, and the interval between the tips is formed as a discharge gap. The discharge gap is also the distance between the electrodes, and is, for example, about 5 mm. A cap-shaped base 40 is attached to the tip of the sealing portion 12. Note that a cap-shaped base is also attached to the tip of the lower sealing portion in the figure, but this base is not essential in the present invention.
The lamp 10 has a vertical arrangement in which one of the electrodes is located above and the other electrode is located below. In this embodiment, the cathode is arranged below and the anode is arranged above.

  Returning to FIG. 1, the reflecting mirror 20 is formed by coating a reflecting surface of a glass base material with a multilayer film, for example, and has a concave shape as a whole and reflects the emitted light from the lamp 10 satisfactorily. In many cases, an elliptical condensing mirror is used as the reflecting mirror 20. In this case, it is necessary to make the arc of the discharge lamp 10 coincide with the first focal point of the reflecting mirror 20. Since this arc is generally formed between the discharge gaps, the lamp is installed so that an appropriate point between the discharge gaps is at the first focal point of the reflection mirror 20. The direction of the mirror is shown as open at the bottom, but there are also those that are open at the top (holder side).

In recent years, the lamp 10 and the reflection mirror 20 have become larger. As described above, the discharge lamp holding mechanism of the present invention is particularly useful when the size of the lamp or the reflecting mirror is increased.
As for numerical values of the lamp 10, the lamp power is rated value 3KW to 40KW, the lamp current is rated value 50A to 200A, and the maximum outer diameter of the arc tube portion 11 (diameter perpendicular to the direction in which the electrode extends) is 50 mm. ~ 250mm. The weight of the lamp is 0.5 kg to 10 kg.
As for numerical examples of the reflection mirror 20, the front opening is 300 mm to 1000 mm, and the depth in the direction in which the lamp extends is 200 mm to 800 mm.

3 shows a state where the light source device shown in FIG. 1 is viewed from a direction different from that in FIG. 1, and a part of the reflection mirror 20 is cut away to express the internal structure of the reflection mirror 20.
The top opening 21 of the reflecting mirror 20 needs at least a size that allows the sealing portion 12 or the base 40 of the lamp 10 to pass. If the top opening 21 is too large, the emitted light of the lamp 10 leaks from the top opening 21 and the light utilization efficiency decreases.

FIG. 4 shows an enlarged structure of the base of the discharge lamp according to the present invention, in particular, the base 40 attached to the holder 30.
The base 40 includes a cap-shaped overall body 41, a terminal end portion 42 formed at an end portion of the total body 41, and a protruding portion 43 extending from the center of the terminal end portion 42. The whole body 41, the terminal portion 42, and the protruding portion 43 are physically composed of one member, and are made of a conductive member such as brass.

  The entire body 41 is a part that follows the end of the sealing part 12 made of quartz glass. The entire body 41 has a cap shape and is attached by being inserted so as to cover the sealing portion 12, and the entire body 41 itself is one part of the power feeding path by being electrically connected to the power feeding mechanism inside the sealing portion 12. Part.

  The terminal portion 42 forms a terminal surface 42a that forms an electrical connection structure with the outside of the lamp by making surface contact with the holder. Moreover, although the terminal part 42 showed what was formed larger diameter than the whole body 41, the thing of the same diameter and a small diameter may be sufficient. The end face 42a is formed in a plane perpendicular to the axis of the discharge lamp, facilitating contact with the holder and formation of an electrical path. A hole 42b described later is formed in the end surface 42a. Further, a screw mechanism 42c, which will be described later, is formed on the side surface of the terminal portion 42.

  The protruding portion 43 corresponds to a tip portion when being inserted into the holder, and includes a tip small diameter portion 43a, a tip tapered portion 43b, and a columnar portion 43c. The cylindrical portion 43c is formed with a fishhook-shaped groove portion 44. As will be described later, the groove portion 44 forms a meshing mechanism with the holder.

FIG. 5 shows an enlarged structure of the holder 30 according to the present invention.
The holder 30 is composed of a rod-shaped center body 31 and a rotating part 32 located at the tip thereof. The central body 31 and the rotating part 32 are configured by physically combining different members. For example, the central body 31 has a low electrical resistance such as copper or brass, or an electric material such as nickel, silver or gold on the base material. The rotating part 32 is made of stainless steel, nickel-plated brass or the like, which has wear resistance, oxidation resistance, chemical resistance, and the like.

  The center body 31 is configured inside the insertion hole 311 for inserting the tip end portion 43 of the base, the holder side contact portion 312 in surface contact with the terminal end surface 42a of the base when the base is inserted, and the holder side contact portion 312. The anti-rotation rod 313 is formed. The insertion hole 311 is a part formed by drilling in the central body 31, and a protrusion 315 that extends in the inner diameter direction of the insertion hole 311 is formed therein. The holder side contact portion 312 is also a part formed by cutting the central body 31 and is a part of the central body 31. The anti-rotation rod 313 is provided with a cavity in the holder side contact portion 312 and disposed therein via a spring 316, and is physically separate from the central body 31. The central body 31 is a part that suspends and supports the discharge lamp when the discharge lamp is mounted, and is a part that has a function for achieving temporary fixation at the time of mounting. Furthermore, after the base is mounted, it also becomes a part that forms part of the power feeding path. The central body 31 is formed from a conductive member such as copper, brass, or the like, or a base material coated with nickel, silver, gold, or the like.

  The rotating part 32 is attached to the tip of the central body 31 and is manually rotated around the central body 31 by a human in the attaching / detaching operation of the base. A screw mechanism 321 is formed on the inner wall of the rotating portion 32 for permanent fixing when a base is inserted. For example, a knurling process is performed on the outer surface of the rotating portion 32 so that manual rotation is easy. The rotating part 32 is a part that achieves the main fixing with the base, and is made of a material such as stainless steel or brass plated with nickel. The center body 31 is formed with a mark 314 that indicates the position of the rotating portion 32 when the rotating portion 32 and the base 40 are permanently fixed. The mark 314 may be anything that can be visually recognized, such as a linear notch provided in the central body 31 or a color applied in a linear shape. Further, as shown in FIG. 8, a notch 322 that does not affect the screw mechanism 321 is provided in the rotating part 32 so as to be directed upward from the lower end of the rotating part 32 so that the inside of the rotating part 32 can be seen. You can also Further, as shown in FIG. 9, a pin 317 is provided on the side surface of the central body 31, an L-shaped groove 323 is provided on the upper end portion of the rotating part 32, and the pin 317 is engaged with the groove 323. Can also be held upward. Moreover, a thread can be provided in the side surface of the center body 31 and the upper end part of the rotation part 32, and it can be screwed together and the rotation part 32 can be hold | maintained upwards.

  The outer side (upper side in the figure) of the central body 31 is not shown, but the feeder line is connected to a part of the central body. Alternatively, a power feeding mechanism is connected to a part of the central body.

FIG. 6 is a view in which a pressing portion 33 is provided on the holder 30 shown in FIG.
The pressing portion 33 has a flat spring 331 and a mark 332, and is attached between the central body 31 and the rotating portion 32. A flat spring 331 is provided so that a pressing force works as the rotating unit 32 moves up and down. The pressing portion 33 is formed with a mark 332 that indicates the position of the rotating portion 32 when the rotating portion 32 and the base 40 are permanently fixed. The mark 332 may be any mark that can be visually recognized, such as a line notch provided or a line coated with color. In addition, although the thing using the flat spring 331 was shown here, a crimping coil spring can also be used.

  FIG. 7 schematically shows the principle of both mechanisms when the base 40 (discharge lamp) is mounted on the holder 30. (A) to (e) represent movements of the base and the holder, respectively, and the base is attached to the holder as the process proceeds from (a) to (e). Conversely, when the base is detached from the holder, the procedure goes from (e) to (a). In addition, the holder 30 shows sectional drawing.

(A) shows a state immediately before the base 40 is inserted into the holder 30.
(B) shows a state in which the base 40 is inserted into the holder 30. Specifically, the protrusion 43 of the base enters the insertion hole 311 of the center body 31. At this time, the protrusion 43 is guided to the insertion hole 311 of the center body 31 relatively easily. This is because, as described above, the distal end small diameter portion 43a has a small diameter, and the distal end tapered portion 43b is tapered. Further, since the outer diameter of the protrusion 43 is substantially equal to the inner diameter of the insertion hole 311, the protrusion 40 is inserted into the insertion hole, so that the base 40 is transverse to the holder 30 (in the direction perpendicular to the longitudinal direction of the discharge lamp). The position of the horizontal direction on the paper surface is determined. When the protrusion 43 is inserted into the insertion hole 311, the protrusion 315 exists inside the insertion hole 43, so that the protrusion 43 collides with the protrusion 315, preventing further entry. There is. In this case, the base 40 is rotated to allow further insertion into the insertion hole 311 when the projection 315 is positioned in the groove 44 of the base. The insertion of the protruding portion 43 is stopped due to the relationship between the projection 315 in the insertion hole 311 and the groove portion 44. At this time, the terminal surface 42a of the base 40 comes into surface contact with the contact surface 312a of the holder side contact portion 312 of the holder 30. In addition, the protrusion 315 in the drawing extends from the side surface where the insertion hole 311 is omitted, and should be omitted as the structure of the cross-sectional view, but in the drawing, in order to understand the engagement with the groove 44. Only the protrusion 315 is represented.

(C) shows a state in which the base 40 is temporarily fixed to the holder 30. By rotating the base 40 from the state (b), the groove 44 changes the traveling direction with respect to the protrusion 315. The relationship between the protrusion 315 and the groove 44 will be described in detail with reference to FIG. By rotating the base 40 and releasing the hand, the base 40 falls slightly, but the end point of the groove 40 and the projection 315 are engaged to be in the state shown in the figure. In this state, even if the discharge lamp 10 is released, the discharge lamp 10 is suspended from the holder 30 without falling.

FIG. 8 shows a state in which the base 40 is temporarily fixed to the holder 30 provided with the notch 322 in the rotating part 32.
According to the structure of the holder 30 of the present invention, the rotating part 32 is positioned below due to its own weight, and when the base 40 is inserted, it is pushed up in contact with the end face 42 a of the base 40. For this reason, there is no gap between the rotating part 32 and the end face 42 a of the base 40. Temporary fixing is performed by engaging the protrusion 315 of the holder 30 with the groove portion 44 of the base 40 inside the holder 30, so that the operator cannot confirm the completion of temporary fixing visually. If the temporary fixing fails and the hand is released from the lamp 10, the lamp 10 falls and bursts, which is dangerous.

  Therefore, a notch 322 that does not affect the screw mechanism 321 is provided in the rotating part 32 so that the contact part between the holder 30 and the base 40 can be seen from the notch 322. When the temporary fixing is completed, the protrusion 315 of the holder 30 is locked to the groove portion 44 of the base 40, and the discharge lamp 10 is suspended from the holder 30, so that a gap is formed between the holder-side contact portion 312 and the end surface 42a. . The operator can release the hand from the lamp 10 after viewing the gap from the notch 322 and visually confirming the completion of temporary fixing.

FIG. 9 shows a state in which the base 40 is temporarily fixed to the holder 30 provided with a mechanism for locking the rotating portion 32.
This is another embodiment for visually confirming the completion of temporary fixing. The pin 317 is engaged with the groove 323 so that the rotating portion 32 is previously held upward so that the holder side contact portion 312 and the end surface 42a can be seen. After completing the temporary fixing, the pin 317 can be removed from the groove 323 and the rotating part 32 can be rotated.

Returning to FIG. 7, (d) shows a state in which an operation for fixing the base 40 and the holder 30 is started. Screw mechanisms (321, 42c) respectively formed on a part of the inner wall of the rotating part 32 of the holder 30 and the side part of the terminal end part 42 of the base are engaged with each other. The anti-rotation pin 313 provided on the holder 30 is inserted into a hole 42 b provided on the terminal surface 42 a of the base 40. This is because the base itself is not rotated by the rotation of the rotating portion 32.
(E) shows a state in which the permanent fixing of the base 40 and the holder 30 is completed. By turning the rotating portion 32 of the holder 30 from the temporarily fixed state shown in (c) above, the screw structure works, and the force with which the contact surface 312 of the holder side contact portion 312 and the end surface 42a of the base 40 are pressed becomes strong. Both are firmly fixed (main fixing). Further, the holder 30 is also fixedly fixed to the fixing point 51 shown in FIG. 1, so that the holder 30 is rotated by rotating the rotating portion 32 and the like, and the screwing of the holder 30 is loosened to loosen the holding base 50. It is suppressed from coming off. The operator can confirm that the main fixing is completed by rotating the rotating unit 32 until the mark 314 indicating the position of the rotating unit 32 in the main fixing state is seen.

  However, when the metal is screwed together and fixed as in the rotating part 32 and the central body 31, the load is applied only after the screw is fully tightened, so that the operator cannot sense that the screw is gradually tightened. . Therefore, as shown in FIG. 6, it is also possible to provide the pressing portion 33 so that the repulsive force works when the rotating portion 32 is tightened, and the repulsive force is generated by the flat spring 331 being crushed. When the rotating unit 32 is rotated from the state of FIG. 6A, the screw mechanism 321 is screwed into the base, and the rotating unit 32 is lowered to be in the state of FIG. 6B. When the rotating part 32 is lowered until the mark 332 provided on the pressing part 33 is visible, the flat spring 331 is crushed. A load is generated as the repulsive force, and the operator can recognize that the rotating portion 32 is tightened.

  FIG. 10 shows the same state as FIG. 7, viewed from another angle. Specifically, FIG. 7 shows a state viewed from the side, whereas FIG. 10 shows a state viewed obliquely from above. As in FIG. 7, the holder 30 has a half-section structure. The states of FIGS. 7A to 7E and the states of FIGS. 10A to 10E directly correspond to each other.

FIG. 11 schematically shows a meshing mechanism of the protrusion 315 formed on the holder and the groove portion 44 formed on the base.
(A) shows the positional relationship of the groove part 44 and the processus | protrusion 315 in the state of Fig.7 (a) and Fig.10 (a). Since the base 40 is not inserted into the holder 30, the protrusion 315 and the groove 44 are not engaged. The arrow indicates the direction in which the base 40 moves, and the groove 44 also moves in the direction of the arrow in accordance with the movement of the base 40.
(B) shows a state in which the wall 44a of the groove 44 collides with the protrusion 315 and the base 40 cannot be moved further upward. This state corresponds to FIG. 7B and FIG. 10B, and the base is moved in the rotation direction (arrow direction in the figure).
(C) represents a state in which the wall 44b of the groove 44 collides with the protrusion 315 and the base 40 cannot be moved further in the rotational direction. This state corresponds to an intermediate state between FIGS. 7B and 7C and FIGS. 10B and 10C.
(D) shows a state in which the wall 44c of the groove 44 collides with the protrusion 315 by dropping by letting go of the discharge lamp. The arrow indicates the direction in which the discharge lamp falls. The wall 44c of the groove 44 collides with the protrusion 315, so that the discharge lamp 10 does not fall. That is, temporary fixing of the discharge lamp (base 40) and the holder 30 is achieved. This state corresponds to FIG.
(E) shows the state in which the holder 30 and the base 40 are permanently fixed by rotating the rotating portion 32 of the holder 30. As described above, the screw mechanism 321 is provided on the inner wall of the rotating portion 32, and the screw mechanism 42c is provided on the outer surface of the terminal end portion 42 of the base. Therefore, both screw mechanisms are firmly fixed by being engaged with each other. As the rotating part 32 rotates, the base 30 is relatively raised.

As described above, the discharge lamp holding mechanism according to the present invention is temporarily fixed to such an extent that the discharge lamp does not fall by simply inserting and rotating the discharge lamp cap into the holder. By releasing the discharge lamp in this state, it can be fixed by simply moving the holder.
For this reason, unlike the prior art, there is no complicated operation of holding the discharge lamp with one hand and mounting with the other hand, for example, screwing, and the mounting operation can be performed extremely safely. This is particularly useful when the discharge lamp is enlarged.

  Here, in the above embodiment, the “holder-side temporary fixing mechanism” is a protrusion 315 provided in the insertion hole 311 of the center body 31, and the “holder-side temporary fixing mechanism” is a screw provided on the rotating portion 32. The mechanism 321 corresponds. The “lamp-side temporary fixing mechanism” is a groove 44 provided in the protruding portion 43, and the “lamp-side temporary fixing mechanism” corresponds to a screw mechanism 42 c formed on the side portion of the terminal end portion 42 of the base. In addition, a screw | thread can be suitably selected according to conditions, such as a metric screw, a trapezoidal screw, a multi-thread screw, a right screw, and a left screw.

  Moreover, by comprising with the nozzle | cap | die 40 electroconductive member, electric coupling | bonding can be simultaneously performed only by carrying out permanent fixation to the holder 30. However, the base 40 is not limited to a conductive member, and may be formed of an insulating member such as ceramic. In this case, it is necessary to provide a structure in which an electrical contact is provided on the tip surface of the protrusion 43 of the base 40 so that electrical contact can be made inside the insertion hole 311 of the center body 31 of the holder 30.

  The end surface 42a of the end portion 42 of the base 40 is formed perpendicular to the longitudinal direction of the discharge lamp. This is to form a strong contact relationship with the holder simply by pressing the discharge lamp upward.

  The discharge lamp holding structure of the present invention is suitable for a lamp having a rated current of 50 A or more, particularly 70 A or more, and a large lamp having a weight of 0.5 kg or more, particularly 1.0 kg or more. For a size with a rated current of 50A or more (especially 70A or more) and a weight of 0.5Kg or more (especially 1.0Kg or more), holding the lamp with one hand and fixing the lamp and holder with the other hand Because it becomes difficult to do.

When the discharge lamp 10 is removed from the holder 30, the above mounting procedure may be reversed. That is, first, the rotating part 32 of the holder 30 is turned to be in a temporarily fixed state to a temporarily fixed state.
Next, the discharge lamp 10 is lightly lifted (moved in a direction in which it is pressed into the holder 30) to change from the state of FIG. From this state, the base 40 (discharge lamp) is rotated in the rotation direction to the state shown in FIG. 10B, and then the discharge lamp 10 is pulled down and detached from the holder.

  4, 5, 7, 10, and 11, the outer diameter of the base 40 is 40 mm, the protruding length of the protruding portion 43 is 20 mm, the outer diameter is 10 mm, and the rotating portion of the holder 30. The outer diameter of 32 is 45 mm, and the width of the groove 44 is about 2 mm. The protrusion 315 is made of, for example, stainless steel and is formed by being inserted into the inner wall surface of the insertion hole 311. As shown in the embodiment, only one set of the protrusion 315 and the groove 44 may be provided, but a plurality of sets may be provided in the circumferential direction of the protrusion 43.

  The discharge lamp holding mechanism according to the present invention is not limited to the structure shown in FIGS. 4, 5, 7, 10, and 11, and various structures can be adopted as the specific structure. Specifically, by inserting the lamp cap into the holder and rotating the holder, it is possible to achieve a suspended state (temporary fixing) even if the lamp is released, and then the base and the holder are firmly fixed (main fixing) ) Any structure can be applied. For example, as shown in the embodiment, the groove portion 44 does not need to have a substantially fishhook shape, and other structures can be adopted as long as the effects of the present invention can be achieved.

  As described above, the discharge lamp holding mechanism according to the present invention is temporarily fixed to such an extent that the discharge lamp does not fall by simply inserting and rotating the discharge lamp cap into the holder. By releasing the discharge lamp in this state, it can be fixed by simply moving the holder. For this reason, unlike the prior art, there is no complicated operation of holding the discharge lamp with one hand and mounting with the other hand, for example, screwing, and the mounting operation can be performed extremely safely. This is particularly useful when the discharge lamp is enlarged.

1 shows a light source device having a discharge lamp holding mechanism according to the present invention. 1 shows a discharge lamp according to the present invention. 1 shows a light source device having a discharge lamp holding mechanism according to the present invention. 1 shows a base of a discharge lamp according to the present invention. 1 shows a discharge lamp holder according to the present invention. 1 shows a discharge lamp holder according to the present invention. The principle of driving the discharge lamp holder and the cap according to the present invention is shown. 1 shows a discharge lamp holder and a base according to the present invention. 1 shows a discharge lamp holder and a base according to the present invention. The principle of driving the discharge lamp holder and the cap according to the present invention is shown. The principle of driving the discharge lamp holder and the cap according to the present invention is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Discharge lamp 11 Light emission part 12 Sealing part 20 Reflection mirror 30 Holder 31 Central body 315 Protrusion 32 Rotation part 40 Base 41 Whole body 42 Termination part 43 Projection part 44 Groove part

Claims (4)

A discharge lamp holding mechanism comprising a discharge lamp having a cap attached to one end thereof and a lamp holder that holds the discharge lamp so as to be detachable and suspended;
The lamp holder has a holder side temporary fixing mechanism and a holder side main fixing mechanism,
The discharge lamp cap has a lamp-side temporary fixing mechanism that engages with the holder-side temporary fixing mechanism, and a lamp-side main fixing mechanism that engages with the holder-side main fixing mechanism,
By inserting the base of the discharge lamp into the lamp holder and rotating the base, the holder-side temporary fixing mechanism and the lamp-side temporary holding mechanism are engaged, and both are temporarily fixed. A discharge lamp holding mechanism characterized in that a fixing mechanism and a lamp side main fixing mechanism are operated to fix both of them.   The base of the discharge lamp is composed of a conductive member, and is electrically fixed to the lamp holder so that the end face of the base and the end face of the lamp holder are brought into contact with each other to form an electric power feeding mechanism. Discharge lamp holding mechanism.   3. The discharge lamp holding mechanism according to claim 2, wherein an end face of the base of the discharge lamp is formed perpendicular to the longitudinal direction of the discharge lamp. The discharge lamp holding mechanism according to claim 1, wherein the discharge lamp has a rated current of 50 A or more.

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