JP4552927B2 - Discharge lamp holding mechanism - Google Patents

Description

  The present invention relates to a discharge lamp holding mechanism. In particular, the present invention relates to a discharge lamp holding mechanism that is difficult to attach to a holder due to its physically large size and large current.

In recent years, an exposure technique using a short arc type mercury lamp as a light source for photolithography is used in the fields of semiconductor and liquid crystal exposure and other fine processing.
Mercury lamps that efficiently emit light with a wavelength of 365 nm (i-line), which is sensitive to photoresist, are used for photolithography exposure, and light with a wavelength of 350 nm to 450 nm is emitted for exposure of liquid crystals and printed circuit boards. A mercury lamp is used. In the mercury lamp, mercury is enclosed as a luminescent substance, and a rare gas such as argon, krypton, or xenon is enclosed as a starting gas.

  Such a mercury lamp constitutes an optical system in combination with a concave reflecting mirror as disclosed in, for example, JP-A-9-213129.

The exposure apparatus tends to have a shorter processing time (throughput) while an area to be exposed becomes larger. The mercury lamp, which is a light source, also tends to increase the amount of exposure by increasing the input.
However, an increase in lamp input results in a physical enlargement of the lamp, which complicates the work of assembling the reflecting mirror.

  In particular, when the lamp becomes large, it becomes difficult for the operator to hold the lamp in terms of dimensions and weight. For example, in the case of a structure in which a lamp is held by being suspended as shown in the above-mentioned JP-A-9-213129, it is necessary to perform fixing work such as screwing while holding the lamp in a suspended state. Furthermore, when the lamp is enlarged, the reflecting mirror is also enlarged. In the above operation, the base of the lamp is inserted from the inner space of the reflecting mirror, passed through the top opening, and fixed by a holding mechanism outside the top opening.

  In this fixing work, it is necessary to hold one end of the lamp in the inner space of the reflecting mirror and at the same time to perform fixing work such as screwing outside the top opening of the reflecting mirror. In this case, the lamp must be held with one hand and screwed with the other hand. When the lamp becomes large, this work is held with one hand, and sometimes the lamp is dropped or the reflection mirror is damaged.

  Furthermore, a reliable power supply configuration must be formed in the work of fixing the discharge lamp and the holding mechanism. This is because current supply becomes insufficient if the electrical connection of the power supply leads and power supply lines is insufficient.

JP-A-9-213129

  The problem to be solved by the present invention is to provide a discharge lamp holding mechanism that can be easily attached to a device even if the lamp is enlarged.

The discharge lamp holding mechanism of the present invention is a discharge lamp holding mechanism comprising a discharge lamp having a cap attached to one end thereof and a lamp holder that holds the discharge lamp so as to be detachable and suspended. The discharge lamp cap has a lamp-side temporary fixing mechanism that engages with the holder-side temporary fixing mechanism, and a lamp-side that engages with the holder-side main fixing mechanism. The holder side main fixing mechanism is a holder side screw mechanism formed on the inner wall of the rotating part of the lamp holder, and the lamp side main fixing mechanism is a base formed on the side surface of the terminal end of the base. It is a side screw mechanism, and when the base of the discharge lamp is inserted into the lamp holder and the base is rotated, the holder-side temporary fixing mechanism and the lamp-side temporary holding mechanism are engaged, and both are temporarily fixed. After that, by rotating the rotating part of the lamp holder, the holder side screw mechanism and the base side screw mechanism are screwed together, and both of them are fixed, and the end part on the starting point side of the thread of the holder side screw mechanism And / or an end face on the screw start point side of the cap side screw mechanism is formed with an edge surface from the top of the screw thread toward the screw bottom.
Further, the edge surface of the end portion on the starting point side of the thread of the holder side screw mechanism is inclined toward the direction of the thread of the adjacent holder side screw mechanism.
Alternatively, the edge surface of the end portion on the starting point side of the screw thread of the base-side screw mechanism is inclined toward the direction of the screw thread of the adjacent base-side screw mechanism.

The discharge lamp holding mechanism according to the present invention has the above-described configuration, so that the discharge lamp base is inserted into an insertion hole of a lamp holder (hereinafter also simply referred to as “holder”), and the base is rotated. The holder-side temporary fixing mechanism provided inside and the lamp-side temporary fixing mechanism provided on the base engage with each other, so that the holder-side temporary fixing mechanism can be suspended without dropping even if the hand is released. In this state, by operating the holder and the lamp main fixing mechanism from the outside of the top of the reflecting mirror, both can be firmly fixed. That is, in the work for attaching to and detaching from the lamp, there is no need for the difficulty of holding the lamp with one hand and fixing the lamp with the other hand as in the prior art.
Further, when the discharge lamp base and the lamp holder are permanently fixed, the holder side screw mechanism and the base side screw mechanism are screwed together by rotating the rotating part of the lamp holder. Since the edge on the screw thread start point side and / or the screw thread start point edge of the cap side screw mechanism is formed with an edge surface from the screw thread top to the screw bottom, the screw thread is surely Since the screw bottoms are screwed together, the discharge lamp cap can be screwed into the lamp holder and fixed securely without hindrance.

Hereinafter, the discharge lamp holding mechanism of the present invention will be described.
FIG. 1 shows a discharge lamp holding mechanism according to the present invention.
The discharge lamp 10 (hereinafter also simply referred to as “lamp”) passes through the top opening of the reflection mirror 20 and is attached to the lamp holder 30 (hereinafter also simply referred to as “holder”). Here, the lamp 10 and the holder 30 are referred to as a discharge lamp holding mechanism, and the lamp 10, the reflection mirror 20, and the holder 30 are referred to as a light source device. The reflection mirror 20 and the holder 30 are fixed to an exposure apparatus or the like by a mechanism not shown.

FIG. 2 is a view showing only the lamp 10. For example, it has an arc tube portion 11 made of quartz glass at a substantially center, and is integrally formed so that rod-shaped sealing portions 12 extend at both ends thereof. .
The arc tube portion 11 has a spherical shape or a spindle shape elongated in the tube axis direction (vertical direction in the drawing). An airtight space is formed inside the arc tube portion 11 and mercury as a luminescent material, xenon or argon as a starting gas. Is enclosed. In addition, the anode 13 and the cathode 14 are disposed opposite to each other inside the arc tube portion 11, and the interval between the tips is formed as a discharge gap. The discharge gap is also the distance between the electrodes, and is, for example, about 5 mm. A cap-shaped base 40 is attached to the tip of the sealing portion 12. Note that a cap-shaped base is also attached to the tip of the lower sealing portion in the figure, but this base is not essential in the present invention.
The lamp 10 has a vertical arrangement in which one of the electrodes is located above and the other electrode is located below. In this embodiment, the cathode is arranged below and the anode is arranged above.

  Returning to FIG. 1, the reflecting mirror 20 is formed by coating a reflecting surface of a glass base material with a multilayer film, for example, and has a concave shape as a whole and reflects the emitted light from the lamp 10 satisfactorily. In many cases, an elliptical condensing mirror is used as the reflecting mirror 20. In this case, it is necessary to make the arc of the discharge lamp 10 coincide with the first focal point of the reflecting mirror 20. Since this arc is generally formed between the discharge gaps, the lamp is installed so that an appropriate point between the discharge gaps is at the first focal point of the reflection mirror 20. The direction of the mirror is shown as open at the bottom, but there are also those that are open at the top (holder side).

In recent years, the lamp 10 and the reflection mirror 20 have become larger. As described above, the discharge lamp holding mechanism of the present invention is particularly useful when the size of the lamp or the reflecting mirror is increased.
As for numerical values of the lamp 10, the lamp power is rated value 3KW to 40KW, the lamp current is rated value 50A to 200A, and the maximum outer diameter of the arc tube portion 11 (diameter perpendicular to the direction in which the electrode extends) is 50 mm. ~ 250mm. The weight of the lamp is 0.5 kg to 10 kg.
As for numerical examples of the reflection mirror 20, the front opening is 300 mm to 1000 mm, and the depth in the direction in which the lamp extends is 200 mm to 800 mm.

3 shows a state where the light source device shown in FIG. 1 is viewed from a direction different from that in FIG. 1, and a part of the reflection mirror 20 is cut away to express the internal structure of the reflection mirror 20.
The top opening 21 of the reflecting mirror 20 needs at least a size that allows the sealing portion 12 or the base 40 of the lamp 10 to pass. If the top opening 21 is too large, the emitted light of the lamp 10 leaks from the top opening 21 and the light utilization efficiency decreases.

FIG. 4 shows an enlarged structure of the base of the discharge lamp according to the present invention, in particular, the base 40 attached to the holder 30.
The base 40 includes a cap-shaped overall body 41, a terminal end portion 42 formed at an end portion of the total body 41, and a protruding portion 43 extending from the center of the terminal end portion 42. The whole body 41, the terminal portion 42, and the protruding portion 43 are physically composed of one member, and are made of a conductive member such as brass.

  The entire body 41 is a part that is fitted into the end of the sealing part 12 made of quartz glass. The entire body 41 has a cap shape, and is inserted and mounted so as to cover the sealing portion 12. The entire body 41 itself is one part of the power feeding path by being electrically connected to the power feeding mechanism inside the sealing portion 12. Part.

  The terminal portion 42 forms a terminal surface 42a that forms an electrical connection structure with the outside of the lamp by making surface contact with the holder. Moreover, although the terminal part 42 showed what was formed larger diameter than the whole body 41, the thing of the same diameter and a small diameter may be sufficient. The end face 42a is formed in a plane perpendicular to the axis of the discharge lamp, facilitating contact with the holder and formation of an electrical path. A hole 42b described later is formed in the end surface 42a. Further, a cap-side screw mechanism 42c described later is formed on the side surface of the terminal portion 42.

  The protruding portion 43 corresponds to a tip portion when being inserted into the holder, and includes a tip small diameter portion 43a, a tip tapered portion 43b, and a columnar portion 43c. The cylindrical portion 43c is formed with a fishhook-shaped groove portion 44. As will be described later, the groove portion 44 forms a meshing mechanism with the holder.

FIG. 5 shows an enlarged structure of the holder 30 according to the present invention.
The holder 30 is composed of a rod-shaped center body 31 and a rotating part 32 located at the tip thereof. The central body 31 and the rotating part 32 are configured by combining physical separate members. For example, the central body 31 has a low electrical resistance such as copper or brass, or an electric material such as nickel, silver or gold on the base material. The rotating portion 32 is made of stainless steel, nickel-plated brass, or the like, which is wear resistant, oxidation resistant, chemical resistant, or the like.

  The center body 31 is configured inside the insertion hole 311 for inserting the tip end portion 43 of the base, the holder side contact portion 312 in surface contact with the terminal end surface 42a of the base when the base is inserted, and the holder side contact portion 312. The anti-rotation rod 313 is formed. The insertion hole 311 is a part formed by drilling in the central body 31, and a protrusion 315 that extends in the inner diameter direction of the insertion hole 311 is formed therein. The holder side contact portion 312 is also a part formed by cutting the central body 31 and is a part of the central body 31. The anti-rotation rod 313 is formed by providing a cavity in the holder side contact portion 312 and being disposed therein, and is physically separate from the central body 31. The central body 31 is a part that suspends and supports the discharge lamp when the discharge lamp is mounted, and is a part that has a function for achieving temporary fixation at the time of mounting. Furthermore, after the base is mounted, it also becomes a part that forms part of the power feeding path. The center body 31 is formed of a conductive member such as copper, brass, or the like, or a base material coated with nickel, silver, gold, or the like.

The rotating part 32 is attached to the tip of the central body 31 and is manually rotated around the central body 31 by a human in the attaching / detaching operation of the base. A holder-side screw mechanism 321 is formed on the inner wall of the rotating portion 32 for permanent fixing when a base is inserted.
In addition, for example, knurl processing is performed on the outer surface of the rotating unit 32 so that manual rotation operation can be easily performed. The rotating part 32 is a part that achieves the main fixing with the base, and is made of a material such as stainless steel or brass plated with nickel.

  The outer side (upper side in the figure) of the central body 31 is not shown, but the feeder line is connected to a part of the central body. Alternatively, a power feeding mechanism is connected to a part of the central body.

  FIG. 6 schematically shows the principle of both mechanisms when the base 40 (discharge lamp) is mounted on the holder 30. (A) to (e) represent movements of the base and the holder, respectively, and the base is attached to the holder as the process proceeds from (a) to (e). Conversely, when the base is detached from the holder, the procedure goes from (e) to (a). In addition, the holder 30 shows sectional drawing.

(A) shows a state immediately before the base 40 is inserted into the holder 30.
(B) shows a state in which the base 40 is inserted into the holder 30. Specifically, the protrusion 43 of the base enters the insertion hole 311 of the center body 31. At this time, the protrusion 43 is guided to the insertion hole 311 of the center body 31 relatively easily. This is because, as described above, the distal end small diameter portion 43a has a small diameter, and the distal end tapered portion 43b is tapered.
Further, since the outer diameter of the protrusion 43 is substantially equal to the inner diameter of the insertion hole 311, the protrusion 40 is inserted into the insertion hole, so that the base 40 is transverse to the holder 30 (in the direction perpendicular to the longitudinal direction of the discharge lamp). The position of the horizontal direction on the paper surface is determined.
When the protrusion 43 is inserted into the insertion hole 311, the protrusion 315 exists inside the insertion hole 43, so that the protrusion 43 collides with the protrusion 315, preventing further entry. There is. In this case, the base 40 is rotated to allow further insertion into the insertion hole 311 when the projection 315 is positioned in the groove 44 of the base. The insertion of the protruding portion 43 is stopped due to the relationship between the projection 315 in the insertion hole 311 and the groove portion 44, and at this time, the terminal surface 42 a of the base 40 comes into surface contact with the contact surface 312 a of the holder side contact portion 312 of the holder 30. In addition, the protrusion 315 in the drawing extends from the side surface where the insertion hole 311 is omitted, and should be omitted as the structure of the sectional view, but in the drawing, in order to understand the engagement with the groove 44. Only the protrusion 315 is represented.

  (C) shows a state in which the base 40 is temporarily fixed to the holder 30. By rotating the base 40 from the state (b), the groove 44 changes the traveling direction with respect to the protrusion 315. The relationship between the protrusion 315 and the groove 44 will be described in detail with reference to FIG. By rotating the base 40 and releasing the hand, the base 40 slightly falls, but the end point of the groove 44 and the protrusion 315 are engaged with each other as shown in the figure. In this state, even if the discharge lamp 10 is released, the discharge lamp 10 is suspended from the holder 30 without falling.

(D) shows the state which starts the operation | movement for carrying out permanent fixing of the nozzle | cap | die 40 and the holder 30. FIG. Screw mechanisms (321, 42c) respectively formed on a part of the inner wall of the rotating part 32 of the holder 30 and the side part of the terminal end part 42 of the base are engaged with each other. The holder 30 is provided with an anti-rotation pin 313 and is inserted into a hole 42 b provided in the end face 42 a of the base 40. This is because the base itself is not rotated by the rotation of the rotating portion 32.
(E) shows a state in which the permanent fixing of the base 40 and the holder 30 is completed. By turning the rotating portion 32 of the holder 30 from the temporarily fixed state shown in (c) above, the screw structure works, and the force with which the contact surface 312a of the holder side contact portion 312 and the end surface 42a of the base 40 are pressed becomes strong. Both are firmly fixed (main fixing).

  FIG. 7 shows the same state as FIG. 6, viewed from a different angle. Specifically, FIG. 6 shows a state viewed from the side, whereas FIG. 7 shows a state viewed obliquely from above. Similar to FIG. 6, the holder 30 has a half-section structure. The states of FIGS. 6A to 6E and the states of FIGS. 7A to 7E directly correspond to each other.

FIG. 8 schematically shows a meshing mechanism of the protrusion 315 formed on the holder and the groove portion 44 formed on the base.
(A) shows the positional relationship of the groove part 44 and the protrusion 315 in the state of FIG. 6 (a) and FIG. 7 (a). Since the base 40 is not inserted into the holder 30, the protrusion 315 and the groove 44 are not engaged. The arrow indicates the direction in which the base 40 moves, and the groove 44 also moves in the direction of the arrow in accordance with the movement of the base 40.
(B) shows a state in which the wall 44a of the groove 44 collides with the protrusion 315 and the base 40 cannot be moved further upward. This state corresponds to FIG. 6B and FIG. 7B, and the base is moved in the rotation direction (arrow direction in the figure).
(C) represents a state in which the wall 44b of the groove 44 collides with the protrusion 315 and the base 40 cannot be moved further in the rotational direction. This state corresponds to an intermediate state between FIGS. 6B and 6C and FIGS. 7B and 7C.
(D) shows a state in which the wall 44c of the groove 44 collides with the protrusion 315 by dropping by letting go of the discharge lamp. The arrow indicates the direction in which the discharge lamp falls. The wall 44c of the groove 44 collides with the protrusion 315, so that the discharge lamp 10 does not fall. That is, temporary fixing of the discharge lamp (base 40) and the holder 30 is achieved. This state corresponds to FIG.
(E) shows the state in which the holder 30 and the base 40 are permanently fixed by rotating the rotating portion 32 of the holder 30. As described above, the screw mechanism 321 is provided on the inner wall of the rotating portion 32 and the screw mechanism 42c is provided on the side surface of the terminal end portion 42 of the base. As the rotating part 32 rotates, the base 30 is relatively raised.

As described above, the discharge lamp holding mechanism according to the present invention is temporarily fixed to such an extent that the discharge lamp does not fall by simply inserting and rotating the discharge lamp cap into the holder. By releasing the discharge lamp in this state, it can be fixed by simply moving the holder.
For this reason, unlike the prior art, there is no complicated operation of holding the discharge lamp with one hand and mounting with the other hand, for example, screwing, and the mounting operation can be performed extremely safely. This is particularly useful when the discharge lamp is enlarged.

  Here, in the above embodiment, the “holder-side temporary fixing mechanism” is the protrusion 315 provided in the insertion hole 311 of the center body 31, and the “holder-side temporary fixing mechanism” is the holder provided in the rotating portion 32. The side screw mechanism 321 corresponds. The “lamp-side temporary fixing mechanism” is a groove 44 provided in the protruding portion 43, and the “lamp-side main fixing mechanism” corresponds to a base-side screw mechanism 42 c formed on the side surface of the terminal end portion 42 of the base. In addition, a screw | thread can be suitably selected according to conditions, such as a metric screw, a trapezoidal screw, a multi-thread screw, a right screw, and a left screw.

  Moreover, by comprising with the nozzle | cap | die 40 electroconductive member, electric coupling | bonding can be simultaneously performed only by carrying out permanent fixation to the holder 30. FIG. However, the base 40 is not limited to a conductive member, and may be formed of an insulating member such as ceramic. In this case, it is necessary to provide a structure in which an electrical contact is provided on the tip surface of the protrusion 43 of the base 40 so that electrical contact can be made inside the insertion hole 311 of the center body 31 of the holder 30.

The end surface 42a of the end portion 42 of the base 40 is formed perpendicular to the longitudinal direction of the discharge lamp.
This is to form a strong contact relationship with the holder simply by pressing the discharge lamp upward.

  The discharge lamp holding structure of the present invention is suitable for a lamp having a rated current of 50 A or more, particularly 70 A or more, and a large lamp having a weight of 0.5 kg or more, particularly 1.0 kg or more. For a size with a rated current of 50A or more (especially 70A or more) and a weight of 0.5Kg or more (especially 1.0Kg or more), holding the lamp with one hand and fixing the lamp and holder with the other hand Because it becomes difficult to do.

When the discharge lamp 10 is removed from the holder 30, the above mounting procedure may be reversed. That is, first, the rotating part 32 of the holder 30 is turned to be in a temporarily fixed state to a temporarily fixed state.
Next, the discharge lamp 10 is lightly lifted (moved in a direction in which it is pressed into the holder 30) to change from the state of FIG. 6 (e) to the state of (d). From this state, the base 40 (discharge lamp) is rotated in the rotation direction to obtain the state shown in FIG. 7B, and then the discharge lamp 10 is pulled down and detached from the holder.

  4, 5, 6, 7, and 8, the outer diameter of the base 40 is 40 mm, the protruding length of the protruding portion 43 is 20 mm, the outer diameter is 10 mm, and the rotating portion of the holder 30. The outer diameter of 32 is 45 mm, and the width of the groove 44 is about 2 mm. The protrusion 315 is made of, for example, stainless steel and is formed by being inserted into the inner wall surface of the insertion hole 311. As shown in the embodiment, only one set of the protrusion 315 and the groove 44 may be provided, but a plurality of sets may be provided in the circumferential direction of the protrusion 43.

  The discharge lamp holding mechanism according to the present invention is not limited to the structures shown in FIGS. 4, 5, 6, 7, and 8. Various structures can be adopted as the specific structure. Specifically, by inserting the lamp cap into the holder and rotating the holder, it is possible to achieve a suspended state (temporary fixing) even if the lamp is released, and then the base and the holder are firmly fixed (main fixing) ) Any structure can be applied. For example, as shown in the embodiment, the groove portion 44 does not need to have a substantially fishhook shape, and other structures can be adopted as long as the effects of the present invention can be achieved.

Next, the cap screw mechanism 42c of the lamp cap 40 will be described in detail.
FIG. 9 is a perspective view of the base 40 as viewed from the end of the starting point side of the screw thread from a position obliquely above the entire body 41 at a position deviating from the rotation center axis of the base 40. FIG. 9 shows a part of the base 40 for easy understanding of the base-side screw mechanism 42c, and FIG.
FIG. 10 is an enlarged perspective view of the end portion on the starting point side shown in FIG. 9, and FIG. 10 is a perspective view of the base viewed from the same position as FIG.

The base-side screw mechanism 42c is a male screw and includes a screw thread A and a screw bottom a.
The thread A has a top A1, and is a thread side A2 from the top A1 toward the screw bottom a.

Then, as shown in FIG. 10, the end AA on the starting point side of the thread A is a direction intersecting the thread side A2, and the edge surface A3 is formed from the top A1 toward the thread bottom a. Yes.
When forming the screw thread A, the end of the screw thread A usually has a structure in which the height of the screw thread A is gradually lowered to coincide with the screw bottom a. The edge surface A3 of the present invention is not formed.

FIG. 11 is an explanatory diagram for explaining the end AA on the starting point side of the thread A, and FIG. 11A is a screw viewed from the direction of the arrow e, which is a direction orthogonal to the thread side surface A2 shown in FIG. FIG. 11B is a plan view of the end AA on the start point side of the thread A, and FIG. 11B is a side view of the end AA on the start point side of the thread A viewed from the direction of the top A1 of the thread shown in FIG. . In addition, in FIG.11 (b), the thread A adjacent to the thread AA is also described.
As shown in FIG. 11A, the thread side surface A2 is parallel to the paper surface, the edge surface A3 extends in a direction intersecting with the paper surface, and the edge surface A3 extends in a direction intersecting with the thread side surface A2. Existing.
Further, as shown in FIG. 11 (b), the edge surface A3 is inclined toward the adjacent thread A, and the edge surface A3 is directed toward the adjacent thread A. It has become.

Next, the holder side screw mechanism 321 of the lamp holder 30 will be described in detail.
FIG. 12 is a perspective view of the lamp holder 30 at a position deviating from the rotation center axis of the lamp holder 30 and looking up at the end of the screw thread starting point side obliquely below the contact surface 312a of the holder side contact portion. is there.
FIG. 12 shows a part of the rotating portion 32 of the lamp holder 30 in order to make the holder side screw mechanism 321 easy to understand. FIG.
FIG. 13 is an enlarged perspective view of the end portion on the starting point side of the screw thread, specifically, a position deviated from the rotation center axis of the lamp holder 30 and inside the rotating portion 32 on the holder side. It is the expansion perspective view which looked down at the edge part by the side of the starting point of a screw thread from the direction of contact surface 312a of a contact part.

The holder-side screw mechanism 321 is a female screw and includes a screw thread B and a screw bottom b.
The thread B has a top B1, and a surface from the top B1 toward the screw bottom b is a thread side B2.

As shown in FIG. 13, the end BB on the starting point side of the thread B is a direction intersecting with the thread side surface B2, and an edge surface B3 is formed from the top B1 toward the thread bottom b. Yes.
When forming the screw thread B, the end of the screw thread B usually has a structure in which the height of the screw thread B is gradually lowered to match the screw bottom b. In such a case, The edge surface B3 of the present invention is not formed.

FIG. 14 is an explanatory diagram for explaining the end BB on the starting point side of the screw thread B, and FIG. 14 (a) shows the screw viewed from the direction of the arrow e, which is a direction orthogonal to the screw thread side surface B2 shown in FIG. 14B is a plan view of the end portion BB on the start point side of the thread B, and FIG. 14B is a side view of the end portion BB on the start point side of the thread thread B viewed from the direction B1 of the thread shown in FIG. . In addition, in FIG.14 (b), the screw thread B adjacent to the screw thread BB is also described.
As shown in FIG. 14A, the thread side surface B2 is parallel to the paper surface, the edge surface B3 extends in a direction intersecting with the paper surface, and the edge surface B3 extends in a direction intersecting with the thread side surface B2. Existing.
Further, as shown in FIG. 14B, the edge surface B3 is inclined in the direction of the adjacent thread B, and the edge surface B3 is directed in the direction of the adjacent thread B. It has become.

  In the present invention, since the end AA on the starting point side of the thread A of the cap-side screw mechanism 42c has the edge surface A3, when the rotating portion 32 of the lamp holder 30 rotates, the edge surface A3 is on the holder side. The end portion BB on the starting point side of the screw thread B of the holder side screw mechanism 321 is collided with the end portion BB on the starting point side of the screw thread B of the screw mechanism 321, and further, the rotating portion 32 is rotated. The base 32 indicated by the arrow g direction moves in a direction in which the base 32 is screwed into engagement, and the top A1 of the screw thread A of the base-side screw mechanism 42c is easily engaged with the screw bottom b of the holder-side screw mechanism 321. The discharge lamp cap can be screwed into the lamp holder and fixed securely.

  Alternatively, in the present invention, since the end portion BB on the starting point side of the thread B of the holder side screw mechanism 321 has the edge surface B3, when the rotating portion 32 of the lamp holder 30 rotates, the edge surface B3 Colliding with the end AA on the starting point side of the thread A of the cap side screw mechanism 42c, and further rotating the rotating part 32, the end BB on the starting point side of the thread B on the holder side screw mechanism 321 is shown in FIG. 13, the base 32 indicated by the arrow g in FIG. 13 moves in a direction in which the base 32 is screwed into engagement, and the top A 1 of the screw thread A of the base side screw mechanism 42 c is easily engaged with the screw bottom b of the holder side screw mechanism 321. The base of the discharge lamp can be screwed into the lamp holder and fixed securely without obstruction.

Furthermore, as shown in FIGS. 10 and 11, since the edge surface A3 of the end AA on the starting point side of the thread A of the cap-side screw mechanism 42c is inclined toward the direction of the adjacent thread A, When the rotating portion 32 of the holder 30 rotates, the edge surface B3 or the thread side surface B2 of the holder-side screw mechanism 321 collides with the edge surface A3, and when the rotating portion 32 further rotates, the edge of the holder-side screw mechanism 321 The surface B3 or the thread side surface B2 is adjacent to the end portion AA of the base-side screw mechanism 42c, which is a direction in which the rotating portion 32 indicated by the arrow g in FIG. 10 is screwed along the surface of the edge surface A3. Move in the direction of the other thread A.
As a result, the end BB on the starting point side of the screw thread B of the holder-side screw mechanism 321 is a screw bottom a between the screw thread A adjacent to the end AA on the starting point side of the screw thread A of the cap-side screw mechanism 42c. The top B1 of the screw thread B on the holder side is reliably guided to the screw bottom a of the screw mechanism 42c on the base side, and the base of the discharge lamp can be smoothly and smoothly used without any obstacle. It can be fixed by screwing.

Alternatively, as shown in FIGS. 13 and 14, the edge surface B3 of the end BB on the starting point side of the thread B of the holder-side screw mechanism 321 is inclined toward the direction of the adjacent thread B. When the rotating portion 32 of the holder 30 rotates, the edge surface B3 collides with the edge surface A3 or the thread side surface A2 of the base-side screw mechanism 42c, and when the rotating portion 32 further rotates, the edge surface B3 becomes the edge surface. A3 or the screw thread side surface A2 is crossed and the rotating part 32 shown by the arrow g direction in FIG.
As a result, the end BB on the starting point side of the screw thread B of the holder-side screw mechanism 321 is a screw bottom a between the screw thread A adjacent to the end AA on the starting point side of the screw thread A of the cap-side screw mechanism 42c. The top B1 of the screw thread B on the holder side is reliably guided to the screw bottom a of the screw mechanism 42c on the base side, and the base of the discharge lamp can be smoothly and smoothly used without any obstacle. It can be fixed by screwing.

1 shows a light source device having a discharge lamp holding mechanism according to the present invention. 1 shows a discharge lamp according to the present invention. 1 shows a light source device having a discharge lamp holding mechanism according to the present invention. 1 shows a base of a discharge lamp according to the present invention. 1 shows a discharge lamp holder according to the present invention. The principle of driving the discharge lamp holder and the cap according to the present invention is shown. The principle of driving the discharge lamp holder and the cap according to the present invention is shown. The principle of driving the discharge lamp holder and the cap according to the present invention is shown. It is a perspective view which shows the state of the screw thread of the nozzle | cap | die side screw mechanism formed in the side surface of the termination | terminus part of the nozzle | cap | die of the discharge lamp which concerns on this invention. It is an expansion perspective view of the edge part by the side of the starting point of the screw thread of the cap of the discharge lamp concerning the present invention. It is the top view and side view of the edge part by the side of the starting point of the screw thread of a nozzle | cap | die side screw mechanism. It is a perspective view which shows the state of the screw thread of the holder side screw mechanism formed in the inner wall of the rotation part of the lamp holder which concerns on this invention. It is an expansion perspective view of the edge part by the side of the starting point of the thread of the lamp holder which concerns on this invention. It is the top view and side view of the edge part by the side of the starting point of the thread of a lamp holder side screw mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Discharge lamp 11 Light emission part 12 Sealing part 20 Reflection mirror 30 Holder 31 Central body 315 Protrusion 32 Rotation part 40 Base 41 Whole body 42 Termination part 43 Projection part 44 Groove part

Claims (3)

A discharge lamp holding mechanism comprising a discharge lamp having a cap attached to one end thereof and a lamp holder that holds the discharge lamp so as to be detachable and suspended;
The lamp holder has a holder side temporary fixing mechanism and a holder side main fixing mechanism,
The discharge lamp cap has a lamp-side temporary fixing mechanism that engages with the holder-side temporary fixing mechanism, and a lamp-side main fixing mechanism that engages with the holder-side main fixing mechanism,
The holder side main fixing mechanism is a holder side screw mechanism formed on the inner wall of the rotating part of the lamp holder,
The lamp-side main fixing mechanism is a base-side screw mechanism formed on the side surface of the terminal end of the base,
By inserting the base of the discharge lamp into the lamp holder and rotating the base, the holder-side temporary fixing mechanism and the lamp-side temporary fixing mechanism are engaged, and both are temporarily fixed. By rotating the rotating part, the holder-side screw mechanism and the base-side screw mechanism are screwed together, and both are permanently fixed,
The end of the screw side of the holder side screw mechanism and / or the end of the base side of the screw side of the cap side screw mechanism is formed with an edge surface from the top of the screw thread toward the screw bottom. A discharge lamp holding mechanism.   2. The discharge lamp according to claim 1, wherein an edge surface of an end portion on a starting point side of the screw thread of the holder side screw mechanism is inclined toward a screw thread direction of an adjacent holder side screw mechanism. Retention mechanism.   2. The discharge lamp according to claim 1, wherein an edge surface of an end portion on a starting point side of the thread side of the base-side screw mechanism is inclined toward the direction of the thread of the adjacent base-side screw mechanism. Retention mechanism.

Images