JP2007242432A - Charged particle beam device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve operability in exploring the optimum setting value by dynamically controlling a change speed (change amount per unit time) of the setting value of a control target device in a charged particle beam device. <P>SOLUTION: A graphic user interface 32 is provided with a slider having a marker installed so that a user is able to carry out moving operation of its position. The change speed of the device setting value changes according to a displacement amount of the marker from the reference position. If the user makes the moving operation of a marker position on the slider active, the obtained displacement amount of the marker from the reference position is converted into a value of the change speed by a conversion means 35. A command based on this converted value is transmitted to a device 31 by a set constant time interval. While the moving operation of the marker position is active, treatment of transmitting the renewed command based on the re-obtained displacement amount of the marker from the reference position to the device 31 is continued. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a charged particle beam apparatus that irradiates a sample with a charged particle beam and observes, analyzes, and processes the sample. In particular, the charged particle beam apparatus is equipped when a charged particle beam apparatus is controlled using a computer. The present invention relates to a technology for controlling various devices.

  A transmission electron microscope (hereinafter abbreviated as TEM), which is a typical charged particle beam apparatus, has a high spatial resolution, and is therefore widely used for evaluating materials in a very small region. The electron microscope is characterized by not only high spatial resolution but also many types of information. For example, a transmission electron microscope mode that obtains a transmission electron microscope image for observing the contrast of electrons transmitted by irradiating a sample with an electron beam having a relatively large beam diameter, or scanning a sample by narrowing down the electron beam and transmitting the electron microscope image There is a scanning transmission electron microscope mode to obtain In addition, in the case of a crystalline sample, the diffraction mode for obtaining a diffraction pattern can be obtained by changing the use condition of the electron lens. Furthermore, it is also possible to perform elemental analysis and chemical state analysis by adding an X-ray analyzer and an electron spectrometer.

  Since there are various usages as described above, it is important to correctly set the electron lens constituting the TEM to conditions suitable for the purpose of use and quickly adjust the microscope image to appropriate brightness and contrast. It is also important to find a place where observation is desired on the sample and set the position accurately. In recent years, most devices are equipped with an operation system using a computer, and automation is being promoted to improve operability, but there are many complicated operations that an operator must perform according to various usages. .

  FIG. 1 shows a schematic configuration example of a TEM. However, the number and positional relationship of each device such as an electron lens, a deflector, and a detector may be different from those of an actual apparatus, and the D / A and A / D converters are also omitted. In FIG. 1, an electron beam 3 generated from an electron gun 2 disposed in a mirror 1 is accelerated by an accelerating tube (not shown), converged by a focusing lens system 4, and irradiated onto a sample 7. The lens diaphragm 5 is provided to shield a large aberration portion on the outer periphery of the electron beam. The lens diaphragm 5 has a plurality of openings having different hole diameters, and a hole diameter corresponding to various modes is selected, and the controller 13 sets the opening on the optical axis. The deflector 6 is provided for scanning an electron beam on the sample, and the electron beam is deflected by a magnetic field generated from the coil by an excitation current supplied from a power source 14. By changing the magnitude of the deflection, the magnification of the scanned image changes.

  The electron beam that has passed through the sample passes through the imaging lens system 9 and is detected by the CCD camera 10. In an actual apparatus, a fluorescent plate and a film (not shown) are often arranged. A desired high voltage is applied to the electron gun 2 from the power source 11. Excitation current is supplied from the lens power supply 12 and the power supply 16 to the irradiation lens system 4 and the imaging lens system 9, and the magnification of the lens is changed by changing the excitation current. The CCD camera 10 is driven by the control unit 17 and is set at a predetermined position as necessary. A signal detected by the CCD camera 10 is sent to the image processing unit 18. A power source, a control unit, an image processing unit, and the like are connected to a control arithmetic processing unit 20, a display unit 21 such as a liquid crystal monitor, and an input unit 22 such as a keyboard and a mouse via an interface 19.

  In the prior art, one of the typical factors that make the operation of a TEM as shown in FIG. 1 difficult is that many devices such as electronic lenses and detectors to be controlled have a very wide dynamic range. It is caused by having a "response (slow response)". In such a device, since the dynamic range is wide, the set value (for example, the absolute value of the excitation current flowing through the lens coil) must be frequently changed frequently. At the same time, a small set value change is also necessary for fine adjustment. Furthermore, the response time is delayed depending on various factors.

  As a technique for solving the problem that a comfortable response cannot be obtained because the response of various devices constituting the charged particle beam apparatus is slow, for example, the techniques of Patent Document 1 and Patent Document 2 are disclosed. In Patent Document 1, in a scanning electron microscope (hereinafter abbreviated as “SEM”), processing that requires responsiveness such as focus adjustment of an electron lens is generated by dedicated control conversion means, and does not require high-speed response. In the processing, it is generated by an SEM control program that is an application program of a computer to solve the problem of slow device responsiveness. Further, for example, in Patent Document 2, in the SEM sample moving apparatus, in order to achieve both operability when moving a long distance at high speed and when moving a short distance near the observation field, position control mode and speed control are performed. A technique for improving operability by enabling selection of a mode is disclosed.

Japanese Patent No. 3201926 JP-A-8-180826

Regarding the above-mentioned problem that “the response of various devices constituting the charged particle beam device is slow and a comfortable response cannot be obtained”, from the viewpoint of system design for device control, as a factor for delaying the response time, The following items are considered.
Delay due to control signal communication:
(A) Minimum necessary delay that does not vary in time series depending on communication distance (b) Necessary minimum delay that does not vary in time series that depends on physical characteristics such as bandwidth and number of relays of communication medium Delay due to time-varying communication depending on the traffic situation of the medium (d) Delay due to physical characteristics of the delay device varying in time series depending on the load on the processor that relays or processes the communication
(A) Delay of a fixed time depending on the timing of changing the IO setting value that depends on the synchronization process (b) Delay of a fixed time that depends on the complexity of the calculation process (c) Reflection on the physical characteristics depending on the change of a certain amount Delay due to time (C-1) Reflection time is relatively fast: Current / voltage value control, time required for magnetic field generation, etc. (C-2) Reflection time is relatively slow: Motor control The delay time is classified into a fixed amount and a variable time depending on various factors. In particular, current / voltage control for lenses, deflectors, etc., and motor control for stages, diaphragms, etc., take a certain amount of time for the device to physically reflect a certain amount of change on itself, so the control interface can (Command) is sent, the device physically reflects the change in itself, and the “response waiting time” until a response is returned increases in proportion to the change width.

  As a result, the more the device setting value with a “wide dynamic range” is changed, the more the update speed for displaying the change on the control interface side is “continuous” (about 30 times / second or more) for the user. It becomes inevitable that it becomes “discrete” (about 30 times / second or less). Obviously, the more discrete the operation feedback is, the more difficult it is to find an unknown optimal setting.

Here, a typical graphic user interface (hereinafter abbreviated as “GUI”) and an operation method conventionally used for controlling such a device will be described.
(1) “Position Jump method” is a method in which a user inputs a valid value, and the input value is reflected in the device setting value as an absolute value or a relative value. FIG. 6 is a schematic diagram for explaining this method, and shows an operation screen for setting the excitation currents of the two lenses. 50 is an entire GUI operation screen (display device screen or operation window), 51 is a microscope image display unit, and 52 is a mouse pointer. When the lens 1 is selected with the mouse, a numerical value for setting the lens 1 excitation current can be input to the input box 53a. For example, “20” is input using a keyboard or the like.

  The advantage of this method is that “setting value can be changed greatly” or “directly changing to a specific setting value” can be performed quickly with few steps. However, it is effective only when the value to be set and the result are known or predictable. Since only “discrete change confirmation” can be performed, it is not possible to confirm the change status on the way. In other words, “when the value to be set and its result cannot be predicted in advance” is a blind search for searching for the optimum set value, and takes time.

  (2) The “Position Scroll method” allows the user to dynamically set the value corresponding to the marker displayed on the slider at a certain time interval as an absolute value to the device via a slider or similar GUI component. It is a reflected method. FIG. 7 is a schematic diagram for explaining this method, and shows an operation screen for setting excitation currents of two lenses. Reference numerals 55a and 55b denote selection boxes for selecting an operation target. The lens 1 of 55a is selected, and the position marker 58 on the slider 57 is dragged (moved) left and right with the mouse. The position of the position marker 58 corresponds to the set value of the excitation current of the lens 1.

  The advantage of this method is that “continuous change confirmation” is possible. However, for devices with “slow response”, the response of the device is not in time for the interface change, and when trying to perform real-time control, there is a “conflict between the actual setting value of the device and the value of the input / display device”. The problem is that it can be confusing because it happens frequently. This problem may be solved by setting the device value only after the scroll position change is completed, but this method is substantially the same as the “Position Jump method”. It will have the same problem as “method”. In other words, this solution loses the “continuous change confirmation” which is an advantage of this method. For this reason, this method is rarely used for device control of electron optical system devices having a “wide dynamic range” and “slow response”.

  (3) The “Step Control method” is a unit of change operation (eg, using the arrow buttons) from a fixed number of change width registrations (eg, “1, 3, 10, 30, 100” or “Cause, Fine”). By selecting in advance the change range corresponding to each click (for each click of the knob, etc.), the user can change the speed of increase / decrease of the set value according to the situation, so that both coarse adjustment and fine adjustment It is a corresponding method. FIG. 8 is a schematic diagram for explaining this method, and shows an operation screen for setting the excitation currents of the two lenses. Reference numerals 54a and 54b denote operation boxes for operating the lenses 1 and 2 by the “Step Control method”, respectively. If the box 56a for selecting the change width 30 in the change width selection box 56 is selected and the right triangular arrow 54a is clicked with the mouse, for example, the excitation current set value of the lens 1 is increased by “30”. Can do.

  The advantage of this method is that you can use fine step widths for fine adjustment of device setting values, and adjust the setting values while checking changes in real time. Since it is possible to move a set value at a stretch by using, it is a method that can be flexibly adapted to the operation at that time. However, in this method, the step setting and setting value change are different GUI operations, so the change width that is appropriate for the “response waiting time” and “discretion degree of change confirmation” is smoothly selected during change control. It is not possible to do. Despite these problems, this method has the most widespread use as a device control GUI for electron optical systems having a “wide dynamic range” and “slow response”.

  In an actual apparatus, there are many cases where the above three methods are appropriately combined in accordance with a device for controlling. FIG. 9 shows an example of a schematic diagram that combines operations for setting the excitation currents of two lenses. The lens 1 is selected at 55a, and the change width is selected at 56a. When the mouse 52 is used to click the triangular arrow 59b by one click, the excitation current setting value of the lens 1 can be increased by “30”. The excitation current can be set by moving the position marker 58, or the set value can be directly input from the input box 53. FIG. 10 shows another combination example. 57a is a slider whose setting value can be changed with [Coarse] (coarse spacing), and 57b with [Fine] (fine spacing).

  As shown above, even when the three basic methods of “Position Jump”, “Position Scroll”, and “Step Control” are improved, or when these methods are combined, step setting and Since the setting value change is operated using different GUIs, it is not possible to smoothly select the appropriate “change width” for “response waiting time” and “discretion degree of change confirmation” during the change control of the setting value. There is a problem.

  The present invention has been made to solve the above problems, and its purpose is to search for an optimum setting value of a device having a “wide dynamic range” and a “slow response”. In the operation, the operability is improved by introducing a method (hereinafter referred to as “Speed Control method”) in which the setting value is varied by directly and dynamically controlling the variable range of the setting.

In order to solve the above problems, the present invention provides:
A charged particle beam apparatus that irradiates a sample with a charged particle beam and observes and / or analyzes and / or processes the sample,
At least one device to be controlled provided in the charged particle beam device for controlling the charged particle beam device;
Operating means for controlling the device by changing a setting value of the device,
The operation means includes
A slider on a graphic user interface having markers provided so that the user can move the position;
A pointing device for performing a position movement operation of the marker;
Confirmation means for confirming that the slider is operable;
An acquisition means for acquiring a displacement amount from a reference position of the marker on the slider according to an instruction from the confirmation means;
Conversion means for converting a displacement amount from a reference position of the marker acquired by the acquisition means into a change speed of the set value;
Communication means for communicating with the device to control the device based on the change speed converted by the conversion means;
The setting value of the device is changed while performing a speed changing operation for changing the changing speed of the setting value by the operation means.

In the present invention, the communication means includes:
Transmitting means for transmitting an instruction based on the change speed to the device;
A timer that is activated by the transmission unit when the transmission unit transmits the command to the device, and that notifies that the update time has passed every predetermined time interval,
After the transmission means transmits the command to the device, the timer sends a signal notifying that a predetermined time has elapsed to the confirmation means, and whether the confirmation means is in an operable state of the slider. If the slider is in an operable state, the acquisition unit re-acquires the displacement amount from the reference position, the conversion unit re-converts the displacement amount to a change speed, and The transmission means continues the process of retransmitting the updated command to the device. When the slider is not in an operable state, it stops the timer operation and then stops the process necessary for retransmitting the updated command. It is characterized by that.

In the present invention, the communication means includes:
Transmitting means for transmitting an instruction based on the change speed set by the setting means to the device;
Receiving means for receiving a response from the device to the command;
When the receiving means receives a response from the device, the confirmation means checks whether or not the slider is operable. If the slider is operable, the acquisition means The amount of displacement from the reference position is re-acquired, the amount of displacement is reconverted to the change speed by the conversion means, the transmission means continues the process of retransmitting the updated command to the device, and the slider can be operated. If it is not in a state, processing necessary for retransmitting the updated instruction is stopped.

  Further, the present invention comprises an input means for directly inputting the setting value of the device on the graphic user interface and / or a changing means for the user to change the setting value while fixing the changing speed, The device is controlled using input means and / or change means.

According to the present invention,
A charged particle beam apparatus that irradiates a sample with a charged particle beam and observes and / or analyzes and / or processes the sample,
At least one device to be controlled provided in the charged particle beam device for controlling the charged particle beam device;
Operating means for controlling the device by changing a setting value of the device,
The operation means includes
A slider on a graphic user interface having markers provided so that the user can move the position;
A pointing device for performing a position movement operation of the marker;
Confirmation means for confirming that the slider is operable;
An acquisition means for acquiring a displacement amount from a reference position of the marker on the slider according to an instruction from the confirmation means;
Conversion means for converting a displacement amount from a reference position of the marker acquired by the acquisition means into a change speed;
Communication means for communicating with the device to control the device based on the change speed converted by the conversion means;
Since the setting value of the device is changed while performing a speed changing operation for changing the changing speed of the setting value by the operating means.
When searching for the optimal setting value of a device with a “wide dynamic range” and “slow response”, the setting value change operation and the setting value change speed change operation can be controlled simultaneously in a single operation. Therefore, it is possible to smoothly control the “change width” appropriate to the “response waiting time” and “discrete degree of change confirmation” at that time. Therefore, even when it is necessary to frequently change the setting value to change the setting value in order to search for the appropriate setting conditions for the device to be controlled, click the separate operation buttons. The switching operation can be performed continuously without having to do so. Therefore, the operability of the charged particle beam apparatus with complicated operations can be greatly improved.

  The embodiment of the present invention differs depending on the characteristics of the device to be controlled. The characteristics of each device can be broadly classified according to the speed setting. Examples of the case where the target device does not have a speed setting include the power supply value of the lens and deflector, the contrast and brightness of the charged particle signal detector, and a representative example of the case where there is a speed setting is sample stage control. Furthermore, when there is no speed setting, due to the difference in communication means, a method of reflecting the change width in the device setting value at a constant time interval (herein called “fixed interval control method”) and the control target device It is divided into a method of waiting for a response and transmitting a command corresponding to the change width (herein called “best effort control method”).

  Note that the “Speed Control” of the device control method “Speed Control method” in the present invention is to dynamically control the change range to be automatically applied to the device setting value change at a certain time interval (fixed interval or response waiting). That is, it means changing the change speed (change amount per unit time). The “Speed value” refers to the change speed of the device setting value determined by the time interval and the change width for automatically changing the device setting value.

Hereinafter, embodiments of the present invention will be described for each of the above systems with reference to the drawings. In the following description, an example in which the present invention is implemented in a transmission electron microscope (TEM) will be described. However, the scope of the present invention is not limited by this, and application to other charged particle beam apparatuses is also possible. . Furthermore, although an example of one-dimensional control of a single device will be described here, the present invention can be applied to control of two or more dimensions when there are X and Y directions such as a deflector. In addition, in each figure, the same code | symbol is attached | subjected in order to avoid duplication of description to what performs the same or similar operation | movement.
(Embodiment 1)
First, an embodiment in the case of the “fixed interval control method” will be described. As specific examples of the fixed interval, for example, 30 times / second, 15 times / second, 10 times / second, and the like can be considered. As will be described in detail later, if this setting is made, the device setting value can be changed by sending a command with the current change width as a parameter at the set fixed interval regardless of whether there is a response from the device. Update. This method is effective for controlling a device having a response time that does not vary in time series or a device having a relatively short response time. In an actual apparatus, it can be applied to, for example, most electron lenses or deflectors.

  FIG. 11 shows a schematic diagram of a GUI when the present invention is implemented as an example. Reference numeral 67 denotes a slider for performing an operation according to the “Speed Control system” in the present invention, and 68 denotes a speed marker operated by a pointing device to perform an operation (speed changing operation) for changing a “Speed value”. When the user drags (moves) the speed marker 68 on the slider 67 with the mouse 52, the “Speed value” is changed. If the speed marker 68 is dragged to the left and right with the center as the reference position, the “Speed value” increases according to the amount of displacement from the center, and the current value of the change width (or “Speed value”) may be displayed on the display unit 70. Is displayed. The “Speed value” is set to increase as the position of the speed marker 68 is closer to the left and right ends of the slider 67. Normally, the setting value increases when the speed marker 68 is on the right side of the center, and decreases when the speed marker 68 is on the left side. The current value of the set value is indicated by an increase / decrease in the current value display portion 71a in which a part of the set value display bar 71 is filled. Therefore, when the set value is to be increased rapidly, the speed marker 68 may be dragged to a position close to the right end of the slider 67. When the speed marker 68 is to be decreased slightly, the speed marker 68 is slightly to the left of the center of the slider 67. Drag it to a position. This switching simply drags the speed marker 68 on the slider 67, and indicates that the setting value changing operation is performed continuously with one mouse operation simultaneously with the speed changing operation.

  FIG. 12 is a schematic diagram showing an example of a GUI that combines the “Speed Control system” of the present invention and the operation of the conventional system. In FIG. 12, triangular arrows 69a and 69b move together with the speed marker 68. For example, when the triangular arrow 69a is clicked with a mouse, the set value is increased by the minimum value of “Speed value” (conventional “Step Control method”). Equivalent to the above). Further, the method of operating by directly inputting “20” into the input box 53 using a keyboard or the like is the conventional “Position Jump method”. In other words, by combining the “Speed Control system” of the present invention and the conventional system, it is possible to realize operability that takes advantage of both advantages.

  FIG. 4 is an example of a block diagram showing the functional configuration of each component in the control system based on the “fixed interval control method” for realizing the GUI operation shown in FIG. 11. In FIG. 4, 31 is a device to be controlled, 32 is a GUI including a window system in a computer, a pointing device, a keyboard, and the like, 33 is that the user has activated the speed change operation of the slider 67 in the GUI 32 (operable state). Confirmation means 34 for confirming, 34 is an acquisition means for acquiring the displacement amount from the reference position of the marker position according to the change speed from the GUI 32, 35 is according to the displacement amount from the reference position of the marker position acquired by the acquisition means 34 Conversion means for converting to change speed, 36 is a transmission means for transmitting a command based on the change speed converted by the conversion means 35 to the device 31, and 37 is transmitted when the transmission means 36 transmits the command to the device 31. Tie activated by means 36 Chromatography, 40 is a storage means for storing setting conditions of GUI32 initializing when starting the transmission electron microscope.

  That is, when performing a setting value changing operation for setting the operation state of the device 31 by the “fixed interval control method”, an operation means for performing an operation of changing the setting value by directly dynamically controlling the variable range of the setting. K1 includes a GUI 32, a confirmation unit 33, an acquisition unit 34, a conversion unit 35, a transmission unit 36, and a timer 37.

Here, based on FIG. 2, the operation | movement flow of this invention by a fixed interval control system is demonstrated for every step.
Step S1: When the apparatus is started, first, the stored setting condition for “Speed Control” is read from the storage device 40, and the GUI 32 and the device 31 are initialized. If there is no previously saved setting condition, the default setting condition prepared in advance is used.
Step S2: If necessary, the user changes the setting condition of the GUI 32 and saves it in the storage device 40. As described above, the setting conditions stored here are read when the apparatus is activated next time.
Step S3: The confirmation unit 33 waits until an event (an operation for making the speed marker 68 draggable with the pointing device) that activates “Speed Control” by the user operating the GUI 32 occurs.
Step S4: When an event for activating “Speed Control” occurs, the control process is started and the process proceeds to Step S6. If there is a device stop command while waiting for an event to occur, the device is stopped.
Step S5: Based on the instruction from the confirmation unit 33, the acquisition unit 34 acquires the displacement amount of the current speed marker 68 from the reference position from the GUI 32.
Step S6: The conversion means 35 calculates the change speed with respect to the displacement (eg, pixel unit) from the reference position of the acquired speed marker using a “Speed change function” (described later) selected by the user in advance. Unit conversion necessary for device control is performed.
Step S7: The transmitting means 36 transmits a command corresponding to the “Speed value” to the corresponding device 31 using the converted “Speed value” (usually a relative change amount with respect to the set value) as a parameter.
Step S8: The transmission means 36 starts the timer 37 with the update interval (a constant interval for transmitting the command) selected by the user in advance as a parameter.
Step S9: The confirmation unit 33 waits for a timer event (notification for notifying that time has passed after the update interval) sent from the timer 37 after the set interval.
Step S10: When the timer event occurs, the confirmation means 33 confirms whether “Speed Control” is still active (whether the user continues to drag the speed marker 68). If it is not active, the process proceeds to step S11. If it is active, the control process is continued and the process proceeds to step S12.
Step S11: The confirmation means 33 stops the timer 37, stops the control process, and proceeds to step S3.
Step S <b> 12: The acquisition unit 34 acquires the displacement amount of the current speed marker 68 from the reference position from the GUI 32 again.
Step S13: The conversion means 35 recalculates the change speed with respect to the amount of displacement of the acquired speed marker from the reference position, and performs unit conversion necessary for device control.
Step S <b> 14: The transmission unit 36 retransmits the updated command to the device 31 using the converted “Speed value” as a parameter. After the retransmission, the process returns to step S9 and the control process is continued.
The above is the description of the operation flow in FIG.

Here, the “Speed changing function” in step S6 will be described. As described in FIG. 11, the “Speed value” increases as the position of the speed marker 68 is closer to the left and right ends of the slider 67, but the amount of change in the “Speed value” from the center toward the end is “ It depends on “Speed change function”. The amount of change in “Speed value” for one change unit of mouse movement (for example, one pixel) can be defined as follows using, for example, a linear function, an inverse function of a logarithmic function, a quadratic exponential function, or the like. it can.
Linear function: “Speed value” = coefficient × 1 change unit Inverse function of logarithmic function: “Speed value” = coefficient × 1 / log (change unit)
Quadratic exponential function: “Speed value” = coefficient × (1 change unit) × (1 change unit)
These functions may be displayed as a menu by, for example, right-clicking the mouse so that the user can select them. Further, the change amount of the selected function may be displayed with a gradient on the slider so that the user can grasp it sensuously. Further, the variable range (maximum value and minimum value) of the change amount of the “Speed value” may be selectable by the user.

(Embodiment 2)
Next, an embodiment in the case of the “best effort control method” (sometimes referred to as start-stop synchronization method) will be described. After sending a command with the current “Speed value” as a parameter, it waits for processing until it receives a response from the device, and when it receives a response, it automatically resends the command with the speed value at that time as a parameter This is a control method. This method has the advantage that it can dynamically respond to the response time of a device that varies in time series, and can always use the shortest response time that the device can execute at any given time. This method is effective for controlling a device having a response time variable in time series or a device having a relatively long response time. In an actual apparatus, the present invention can be applied to, for example, luminance adjustment and contrast adjustment of a detector output signal of charged particles.

  The “best effort control method” GUI has the same function as the “fixed interval control method” GUI shown in FIG. 11, and the device to be controlled is merely changed to, for example, luminance and contrast. In order to avoid duplication, an example of a GUI that implements the “best effort control method” is omitted, and if reference is necessary, it will be described with reference to FIG.

  FIG. 5 is an example of a block diagram showing the functional configuration of each component in the control system based on the “best effort control method”. In FIG. 5, 31 is a device, 32 is GUI, 33 is confirmation means, 34 is acquisition means, 35 is conversion means, 36 is transmission means, 38 is reception means for receiving a response from the device 31, and 40 is storage Means.

  That is, when performing a setting value changing operation for setting the operation state of the device 31 by the “best effort control method”, an operation means for performing an operation for changing the setting value by directly dynamically controlling the variable range of the setting. K2 includes a GUI 32, a confirmation unit 33, an acquisition unit 34, a conversion unit 35, a transmission unit 36, and a reception unit 38.

  Here, based on FIG. 3, the operation | movement flow of this invention by a best effort control system is demonstrated for every step. Steps performing the same or similar operations as those in the flow of FIG. Note that the “Speed changing function” in step S6 is the same as that in the “fixed interval control method”, and thus the description thereof is omitted. The speed marker has the same function as the speed marker of the GUI shown in FIG.

Step S1: When the apparatus is started, first, the stored setting condition for “Speed Control” is read from the storage device 40, and the GUI 32 and the device 31 are initialized. If there is no previously saved setting condition, the default setting condition prepared in advance is used.
Step S2: If necessary, the user changes the setting condition of the GUI 32 and saves it in the storage device 40. As described above, the setting conditions stored here are read when the apparatus is activated next time.
Step S3: The confirmation unit 33 waits until an event (an operation for making the speed marker 68 draggable with the pointing device) that activates “Speed Control” by the user operating the GUI 32 occurs.
Step S4: When an event for activating “Speed Control” occurs, the control process is started and the process proceeds to Step S6. If there is a device stop command while waiting for an event to occur, the device is stopped.
Step S5: Based on the instruction from the confirmation unit 33, the acquisition unit 34 acquires the displacement amount of the current speed marker 68 from the reference position from the GUI 32.
Step S6: The conversion means 35 calculates the value of the change speed with respect to the displacement (for example, pixel unit) of the acquired speed marker from the reference position using the “Speed change function” selected in advance by the user, Performs unit conversion necessary for device control.
Step S7: The transmitting means 36 transmits a command corresponding to the “Speed value” to the corresponding device 31 using the converted “Speed value” (usually a relative change amount with respect to the set value) as a parameter.
Step S20: The receiving means 38 waits for a response from the device 31 to the command sent by the sending means 36 (notification notifying that it is ready to receive the next command). When the receiving means 38 receives the response from the device 11, the receiving means 38 notifies the confirmation means to that effect.
Step S21: The confirmation unit 33 confirms whether “Speed Control” is still active (whether the user continues to drag the speed marker 68). If it is not active, the process proceeds to step S3. If it is active, the control process is continued and the process proceeds to step S22.
Step S <b> 22: The acquiring unit 34 acquires again the displacement amount from the reference position of the current speed marker 68 from the GUI 32.
Step S23: The conversion means 35 recalculates the value of the change speed for the acquired speed marker position and performs unit conversion necessary for device control.
Step S24: The transmission means 36 retransmits the updated command to the device 31 using the converted “Speed value” as a parameter. After the retransmission, the process returns to step S20 and the control process is continued.
The above is the description of the operation flow in FIG.

  In the above description of the embodiment, the case where the target device does not have the speed setting has been described. However, when the target device originally has the speed setting like the sample stage control, for example, the position of the speed marker 68 in FIG. By making it correspond to the speed setting value of the device, the present invention can be applied as in the first or second embodiment.

  Various modifications can be made to the GUI for executing the present invention illustrated in FIG. For example, the slider may be arranged to be operated up and down instead of right and left. Further, for example, whether or not to display the speed marker change width display unit 70 may be selected by a right-click menu of the mouse. Further, for example, the speed marker change width display section 70 is a display bar similar to the set value display bar 71, and the current value display section of the change width is not simply displayed in length (or height). It is also possible to divide the display bar into several parts, assign colors to each part, and display the current value in colors up to the relevant part.

  In the GUI of FIG. 11, an example in which the “Step Control method” and the “Position Jump method” of the conventional method are combined with the “Speed Control method” of the present invention is shown, but it is not necessary to be limited to this. It is easy to make a combination that incorporates the advantages of the other conventional method “Position Scroll method” and belongs to the technical scope of the present invention.

  As described above, in the operation to search for the optimal setting value of a device with a “wide dynamic range” and “response (slow response)”, the setting value can be set by directly controlling the variable width. By changing the setting value and changing the setting value changing speed simultaneously by one operation on the GUI, it is possible to improve the operability.

The figure which shows the example of schematic structure of a transmission electron microscope. The figure for demonstrating the operation | movement flow of Embodiment 1 (fixed space | interval control system) of this invention. The figure for demonstrating the operation | movement flow of Embodiment 2 (best effort control system) of this invention. The figure for demonstrating the function structure of Embodiment 1 (fixed space | interval control system) of this invention. The figure for demonstrating the function structure of Embodiment 2 (best effort control system) of this invention. The schematic diagram for demonstrating the example of the GUI of a conventional system ("Position Jump system"). The schematic diagram for demonstrating the example of the GUI of a conventional system ("Position Scroll system"). The schematic diagram for demonstrating the example of the GUI of a conventional system ("Step Control system"). The schematic diagram for demonstrating the example of GUI which combined the conventional system. The schematic diagram for demonstrating the example of the other GUI which combined the conventional system. The schematic diagram for demonstrating the example of GUI which implements this invention. The schematic diagram for demonstrating the example of GUI which combined the system of this invention, and the conventional system.

Explanation of symbols

(Those that perform the same or similar operations are denoted by a common reference.)
K1, K2 Operating means 1 Mirror body 2 Electron gun 3 Electron beam 4 Irradiation lens system 5 Lens diaphragm 6 Deflector 7 Sample 8 Sample stage 9 Imaging lens system 10 CCD camera 11, 12, 14, 16 Power supply 13, 15, 17 Control unit 18 Image processing unit 19 Interface 20 Control processing unit 21 Display unit 22 Input unit 31 Device 32 Graphic user interface (GUI)
33 confirmation means 34 acquisition means 35 conversion means 36 transmission means 37 timer 38 reception means 40 storage device 50 operation screen 51 microscope image display section 52 mouse pointer 53, 53a, 53b input box 54a, 54b operation box 55a, 55b selection box 56 change Width selection box 57, 67 Slider 58 Position marker 59a, 59b Triangular arrow 68 Speed marker 69a, 69b Triangular arrow 70 Change width display portion 71 Set value display bar 71a Current value display portion

Claims (4)

A charged particle beam apparatus that irradiates a sample with a charged particle beam and observes and / or analyzes and / or processes the sample,
At least one device to be controlled provided in the charged particle beam device for controlling the charged particle beam device;
Operating means for controlling the device by changing a setting value of the device,
The operation means includes
A slider on a graphic user interface having markers provided so that the user can move the position;
A pointing device for performing a position movement operation of the marker;
Confirmation means for confirming that the slider is operable;
An acquisition means for acquiring a displacement amount from a reference position of the marker on the slider according to an instruction from the confirmation means;
Conversion means for converting a displacement amount from a reference position of the marker acquired by the acquisition means into a change speed of the set value;
Communication means for communicating with the device to control the device based on the change speed converted by the conversion means;
The charged particle beam apparatus, wherein the setting value of the device is changed while performing a speed changing operation for changing the changing speed of the setting value by the operating means. The communication means includes
Transmitting means for transmitting an instruction based on the change speed to the device;
A timer that is activated by the transmission unit when the transmission unit transmits the command to the device, and that informs that an update time has passed every predetermined time interval,
After the transmission means transmits the command to the device, the timer sends a signal notifying that a predetermined time has elapsed to the confirmation means, and whether the confirmation means is in an operable state of the slider. If the slider is in an operable state, the acquisition unit re-acquires the displacement amount from the reference position, the conversion unit re-converts the displacement amount to a change speed, and The transmission means continues the process of retransmitting the updated command to the device. When the slider is not in an operable state, it stops the timer operation and then stops the process necessary for retransmitting the updated command. The charged particle beam apparatus according to claim 1, wherein: The communication means includes
Transmitting means for transmitting an instruction based on the change speed set by the setting means to the device;
Receiving means for receiving a response from the device to the command;
When the receiving means receives a response from the device, the confirmation means checks whether or not the slider is operable. If the slider is operable, the acquisition means The amount of displacement from the reference position is re-acquired, the amount of displacement is reconverted to the change speed by the conversion means, the transmission means continues the process of retransmitting the updated command to the device, and the slider can be operated. 2. The charged particle beam apparatus according to claim 1, wherein when it is not in a state, processing necessary for re-transmission of the updated command is stopped. On the graphic user interface, an input means for directly inputting the setting value of the device by the user and / or a changing means for changing the setting value by the user while fixing the changing speed are provided, and the input means and / or The charged particle beam apparatus according to claim 1, wherein the device is controlled using a changing unit.

Images