JP2007233283A5 - - Google Patents

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Publication number
JP2007233283A5
JP2007233283A5 JP2006058091A JP2006058091A JP2007233283A5 JP 2007233283 A5 JP2007233283 A5 JP 2007233283A5 JP 2006058091 A JP2006058091 A JP 2006058091A JP 2006058091 A JP2006058091 A JP 2006058091A JP 2007233283 A5 JP2007233283 A5 JP 2007233283A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006058091A
Other languages
Japanese (ja)
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JP2007233283A (en
JP5066815B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2006058091A priority Critical patent/JP5066815B2/en
Priority claimed from JP2006058091A external-priority patent/JP5066815B2/en
Publication of JP2007233283A publication Critical patent/JP2007233283A/en
Publication of JP2007233283A5 publication Critical patent/JP2007233283A5/ja
Application granted granted Critical
Publication of JP5066815B2 publication Critical patent/JP5066815B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006058091A 2006-03-03 2006-03-03 Reflective diffraction grating Expired - Fee Related JP5066815B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006058091A JP5066815B2 (en) 2006-03-03 2006-03-03 Reflective diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006058091A JP5066815B2 (en) 2006-03-03 2006-03-03 Reflective diffraction grating

Publications (3)

Publication Number Publication Date
JP2007233283A JP2007233283A (en) 2007-09-13
JP2007233283A5 true JP2007233283A5 (en) 2008-07-31
JP5066815B2 JP5066815B2 (en) 2012-11-07

Family

ID=38553902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006058091A Expired - Fee Related JP5066815B2 (en) 2006-03-03 2006-03-03 Reflective diffraction grating

Country Status (1)

Country Link
JP (1) JP5066815B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5303889B2 (en) * 2007-10-03 2013-10-02 株式会社島津製作所 Replica diffraction grating
JP5007196B2 (en) 2007-10-22 2012-08-22 株式会社日立メディアエレクトロニクス Optical pickup device
JP5214232B2 (en) * 2007-12-20 2013-06-19 Ａｓｔｉ株式会社 Plastic microstructure manufacturing method
CN103499851B (en) * 2013-09-29 2015-06-10 清华大学深圳研究生院 Glaring concave grating manufacture method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414913A (en) * 1987-07-08 1989-01-19 Nec Corp Controller for gas composition
JPH06222207A (en) * 1993-01-26 1994-08-12 Dainippon Printing Co Ltd Optical sheet, surface light source, and display device
JPH07261010A (en) * 1994-03-18 1995-10-13 Shimadzu Corp Replica diffraction grating
JPH09145936A (en) * 1995-11-20 1997-06-06 Sutaaraito Kogyo Kk Panel for surface light source
JPH10133023A (en) * 1996-10-30 1998-05-22 Mitsubishi Chem Corp Surface light source device
JPH11202112A (en) * 1998-01-19 1999-07-30 Dainippon Printing Co Ltd Diffraction optical element
JP2000039581A (en) * 1998-07-22 2000-02-08 Asahi Glass Co Ltd Information display device
JP2002357706A (en) * 2001-06-01 2002-12-13 Keiwa Inc Optical sheet and back light unit using the same
JP2003233736A (en) * 2002-02-08 2003-08-22 Konfootokukku Kk Candy ordering device, order entry method, and candy
SG112034A1 (en) * 2003-11-06 2005-06-29 Asml Netherlands Bv Optical element, lithographic apparatus comprising such optical element and device manufacturing method

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