JP2007232131A - Vibration eliminating mount - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent displacement of a coil spring in a horizontal direction, maintaining damping performance in vertical/horizontal directions with a stopper whose frictional resistance is small enough toward the displacement in the vertical direction of the coil spring. <P>SOLUTION: The vibration eliminating mount has a combination of the coil spring 2, a vibration control material 3 and a stopper 5. The coil spring 2 is exclusively used for a function to support the load of the table for the vibration eliminating mount and vibration control material. The vibrating control material 3 is a viscoelastic body, is formed as a film over the entire length of the coil spring 2 by being spread on a surface of wire rods of the coil spring 2, and does not work as a resistance for the load on the coil spring 2. The vibration control material 3 converts exclusively vibration energy propagated from one end of the coil spring 2 to the other end accompanying with the vibration of the structure, and attenuates the vibration energy. The stopper 5 prevents the displacement in the horizontal direction by contacting at least a part of the coil spring 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a vibration isolation mount that prevents the influence of extraneous vibrations on precision equipment mounted on a table.

  When it is not desired to transmit the extraneous vibration transmitted through the floor to precise equipment, a vibration isolation mechanism (vibration isolation mount) is used to install the equipment. In devices where accuracy of 1 μm or less is a problem, such as IC exposure machines that form circuit patterns of electronic devices used in computers and communication equipment, and three-dimensional measuring instruments that read circuit patterns, the effects of self-excited vibration and external vibrations There is a high need for prevention, and the performance of the vibration isolation mechanism that attenuates vibration transmitted from the floor to the equipment is an important factor that affects the performance of the machine.

  Conventionally, a structure incorporating an air spring has been used as a vibration isolation mechanism. In particular, by using a diaphragm type air spring having a natural frequency of 1 to 2 kHz, the function of the vibration isolation mechanism is realized by a system of the air spring and the mass of devices supported by the air spring.

  The advantage of using an air spring is that an auxiliary tank is attached and an orifice is placed between the air spring and the tank, so that attenuation due to the viscous resistance of air can be obtained, and the resonance peak at the natural frequency is lowered. This makes it possible to suppress the vibration of the support load due to disturbance.

  On the other hand, as an anti-vibration mechanism that obtains an anti-vibration function in the vertical and horizontal directions without using an expensive air spring, an apparatus (vibration isolation mount) using a combination of a coil spring and a damping material is known. . For example, as shown in FIG. 8, this device uses a combination of a coil spring 31 as an elastic body and a columnar viscoelastic body (epoxy resin) 32 as a damping material, and the viscoelastic body 32 is turned into a coil spring 31. The flange 33 is attached to both ends of the viscoelastic body 32 and both ends of the coil spring 31, and the elastic center in the load direction acting on the composite of the coil spring 31 and the viscoelastic body 32 is viscoelastic. The body is encased in the body and both are tightened together with screws.

  If this apparatus is used for vibration isolation support of a machine instrument, a great vibration damping effect can be obtained with respect to an external force applied in the horizontal direction (lateral direction) and the vertical direction (longitudinal direction) (see Patent Document 1).

By the way, when the structure of the vibration isolation mount shown in FIG. 8 is used, the load applied to the vibration isolation mount is supported by the coil spring, but the resistance from the viscoelastic body 32 as the vibration damping material cannot be ignored. The greater the deflection stroke of the coil spring, the greater the resistance of the damping material, resulting in a substantially elastic body, and the load is supported by the coil spring and the viscoelastic body. The amount of compression changes and the damping effect changes. For this reason, particularly in the case of a vibration isolation mount that supports a light load, there arises a problem that the ratio of load sharing by the viscoelastic body increases and the vibration isolation performance changes greatly.

  In order to maintain the vibration isolation and vibration isolation performance of the vibration isolation mount that supports such a light load, the inventor first used a flexible viscoelastic body as a vibration damping material, and exclusively used for vibration of the table or floor. Along with this, the vibration energy propagating from one end of the coil spring to the other end is converted into heat energy to attenuate the vibration energy, and the compression direction of the coil spring is almost influenced by the resistance of the viscoelastic body. An anti-vibration mount was proposed (see Patent Document 2).

  According to the vibration isolation mount described in Patent Document 2, even if the load acting on the vibration isolation mount changes and a large stroke displacement occurs in the deflection of the coil spring, the vibration isolation mount is affected by the resistance of the vibration damping material. Stable vibration isolation performance can be exerted without being subjected to vibration. In addition, the vibration damping material can be a viscoelastic body processed into a band, spiral or hollow bellows, etc. The vibration isolation mount's vibration isolation / vibration performance is the same as the band used for the vibration suppression material. By changing the width, thickness, and hardness of the viscoelastic body, and by using the helical viscoelastic body, by changing the shape, cross-sectional area, helical length, and viscoelastic properties of the helical shear surface Furthermore, when a bellows-like hollow viscoelastic body is used, it can be easily adjusted by changing the bellows shape, film thickness, number of wrinkles, and viscoelastic properties.

  However, since the viscoelastic body is incorporated in the vibration isolation mount as a separate component independent of the coil spring, a certain amount of strength is required as an independent component to follow the expansion and contraction displacement of the coil spring. The strength required as an independent component is a resistance to the expansion and contraction displacement of the coil spring, which affects the magnitude of the deflection deformation stroke of the coil spring and consequently affects the vibration isolation performance of the vibration isolation mount. There is a problem.

  In order to solve such a problem, the inventor further converts vibration energy propagating from one end of the coil spring to the other end to heat energy without causing almost any resistance to the expansion and contraction displacement of the coil spring. Has been developed (see Patent Document 3). In short, this vibration isolation mount has the purpose of exerting the vibration isolation performance of the vibration isolation mount without being influenced by the magnitude of the deflection deformation stroke of the coil spring, as shown in FIG. This is intended to be realized by forming a damping material 42 over the entire length of the coil spring 41 by placing a viscoelastic body on the surface of the wire material of the coil spring 41 installed in the coil spring 41.

According to the vibration isolation mount described in Patent Document 3, since the damping material 42 is mounted integrally with the wire of the coil spring 41, the expansion / contraction displacement of the coil spring 41 is transmitted to the damping material 42 as it is, and the coil spring 41 The vibration energy propagating from one end to the other end is converted into thermal energy, and the vibration energy of the coil spring can be effectively attenuated. However, since the coil spring is soft, a large amount of vibration is generated even if a slight force is applied in the horizontal direction, which makes it difficult to set the device on a table supported by such a vibration isolation mount. Even during use of the device, it is extremely inconvenient from the viewpoint of work efficiency that the table touches with a slight impact such as a human hand.
JP 63-30628 A Japanese Patent Application No. 2005-21752 Japanese Patent Application No. 2005-142282

  The problem to be solved is that when a soft spring is used for the anti-vibration mount that supports the table, if an impact is applied to the table, the spring will oscillate greatly, making it difficult to install equipment on the table. In addition, if a large roll occurs during the use of the equipment, operations such as measurement and observation are hindered.

  The main feature of the present invention is to prevent the horizontal displacement of the coil spring while maintaining the damping performance in the vertical and horizontal directions with a stopper having a small frictional resistance against the displacement of the coil spring in the vertical direction.

  According to the vibration isolation mount of the present invention, the ring-shaped stopper supported by the vibration damping material is brought into light contact with the inner diameter of the coil spring whose surface is subjected to vibration damping treatment. Displacement (rolling) can be prevented, and the vertical displacement of the coil spring (pitch) can be prevented by sliding between the coil spring and the stopper and the vibration damping effect of the damping material supporting the stopper. The deterioration of the vibration isolation / vibration isolation performance can be reduced.

By using a stopper with low frictional resistance supported by a footrest made of damping material, the purpose of preventing the horizontal displacement of the coil spring and not reducing the vibration isolation / vibration performance in the vertical direction It was realized. Prior to the description of the embodiment, the vibration isolation mechanism of the vibration isolation mount will be described below. FIG. 1 shows the vibration isolation mechanism of the vibration isolation mount. In FIG. 1, when only the coil spring is used for the vibration isolation mount, the resonance frequency f0 in the vertical direction is approximately expressed by Expression (1).
f0 = 5 / √ Deflection (cm) (1)

Further, the vibration transmissibility (unit dB) representing the performance of the vibration isolation mount in the combination of the coil spring and the damping material is expressed by the equation (2), where U is the upper end of the vibration isolation mount and D is the lower end. is there.
dB = 20 log U vibration / D vibration (2)

  A curve X represents the vibration transfer characteristic of the coil spring 2 when the resonance frequency of the coil spring 2 is f0. The damping characteristic of the coil spring rises sharply at the resonance frequency f0, and thereafter changes from the amplification region AZ to the attenuation region DZ with a surging waveform as the vibration frequency Hz increases. As shown by the curve X, the vibration isolation mount using only the coil spring has a fatal defect that not only the surging waveform appears in the frequency characteristic of the attenuation region but also the resonance magnification is high.

  A curve Y indicates the characteristics of the vibration isolation mount that is adjusted to a desirable vibration isolation performance by combining a damping material with a coil spring. As shown in FIG. 1, when a damping material is combined with a coil spring, the damping curve Y of the vibration isolation mount is higher than the characteristic curve X of the vibration isolation mount with only the coil spring, even if the resonance frequency f0 'increases. If a characteristic curve in which the surging waveform disappears and the resonance magnification is reduced is drawn, it can be evaluated that the vibration transfer characteristic of the vibration isolation performance is excellent.

  With respect to the resonance magnification, it is possible to further reduce the resonance magnification by increasing the damping performance of the damping material. However, if the resonance magnification is too low, Δf = f0′−f0 increases, resulting in a vibration frequency. This causes a problem that the damping region becomes shallow (the absolute value of the damping becomes small) and the damping performance deteriorates.

  Further, in order to lower the resonance frequency in the curve Y by the above equation (1), the amount of deflection in the vertical direction of the coil spring is increased. However, if the amount of deflection is increased and the resonance frequency is lowered, the resonance magnification increases, and the coil spring becomes softer in the horizontal direction (the restoring force in the horizontal direction becomes weaker), resulting in slight vibration. It will shake greatly. However, the resonance magnification of the raised coil spring can be lowered by combining the damping material with the coil spring as described above. However, by combining the damping material, the coil spring can reduce the gravity of the damping material. It is affected by the direction resistance, so that the deflection is reduced and the attenuation characteristic in the vertical direction is lowered.

  This problem is particularly significant for vibration isolation mounts that serve to protect lightweight structures from floor vibrations. Soft coil springs must be used to increase the amount of deflection and lower the resonance frequency. This is because, in order not to deteriorate the damping characteristic in the vertical direction, the influence of the resistance in the gravity direction of the damping material must be prevented as much as possible.

  The present invention is characterized in that a soft spring having a large deflection is used as the coil spring, and that the horizontal and vertical damping characteristics are maintained, and that large horizontal shaking and vibration can be avoided.

  Embodiments of the present invention will be described below with reference to the drawings. 2A and 2B, a vibration isolation mount M according to the present invention includes a combination of a pair of flanges 1a and 1b, a coil spring 2 as an elastic body, a vibration damping coat 3, and a stopper 5. Is. The pair of flanges 1a and 1b are arranged above and below the coil spring 2, the upper flange 1a serves as a support for a structure such as a table, and the lower flange 1b is the floor or table of the vibration isolation mount M. It will be an installation stand for such as. In the center of the upper and lower flanges 1a and 1b, screw holes 1c are opened for bolting to the structure, floor or table, respectively.

  The coil spring 2 is an elastic support body of the table T to be vibration-isolated or vibration-proof, and is installed between the opposing surfaces of both the flanges 1a and 1b. The damping coating 3 does not provide resistance in the direction of gravity as a support to the load and vibration acting on the coil spring 2, but exclusively from one end of the coil spring 2 to the other end due to vibration of the table T or floor. It converts the propagating vibrational energy into thermal energy, and has a function to attenuate the vibrational energy. The damping coating 3 also uses a viscoelastic body in the present invention.

  The so-called viscoelastic body is used for the vibration-damping coat 3 because the viscoelastic body is a substance that not only the magnitude of stress but also its increasing speed greatly affects the increasing speed of strain (Science Univ. Dictionary P.1059 Maruzen Co., Ltd.) This is because it has the property of being issued by a company. The material having such properties includes a vibration damping material mainly composed of an epoxy resin (refer to Japanese Patent Publication No. 7-64917). However, the material of the vibration damping coating 3 is not limited to this, and is a viscoelastic body. The material used, such as neoprene rubber, can be applied. The vibration-damping coat 3 needs to be attached to the surface of the coil spring 2 and connected to the upper end and the lower end thereof.

  The anti-vibration mount M of the present invention is intended for vibration isolation or anti-vibration of a relatively light structure, so that a thin wire is used for the coil spring 2 and the coating of the vibration damping coating 3 may be very thin. . In order to form the damping coating 3 on the surface of the wire rod of the coil spring 2, the coil spring 2 is immersed in the paste of the viscoelastic body so that the viscoelastic paste is attached to the surface of the wire rod of the coil spring 2 and solidified. By repeating the process, the film can be placed on the film having the required thickness. Alternatively, a viscoelastic tube may be coated on the coil spring 2, and further, a viscoelastic powder may be applied to the coil spring 2. can get.

  Furthermore, using a mold, the coil spring is set in a compressed state, and the viscoelastic paste is poured into the cavity of the mold so that the viscoelastic body is placed only on the outer periphery of the coil spring with a certain thickness. it can. In the present invention, it is necessary to keep the mutual frictional resistance small in order to make it easy to slip between the contact surfaces of the stopper and the coil spring.

  Since the surface friction resistance of the viscoelastic body is large in a normal case, if the surface of the coil spring 2 is covered with the viscoelastic body, the sliding with respect to the stopper 5 is deteriorated, and the initial purpose may not be achieved. However, such a problem can be solved by placing the damping coating 3 only on the outer peripheral side of the coil spring 2 and exposing the surface of the wire on the inner peripheral surface side of the coil spring 2 to the outside. That is, the wire exposed on the surface is brought into contact with the stopper 5 installed in the space in the coil spring 2 to ensure vertical sliding.

  FIG. 3 shows an example of a method of forming a film of the damping coating 3 only on the outer peripheral side of the coil spring using a mold. In FIG. 3 (a), in a state where the coil spring 2 is compressed until the upper wire and the lower wire of the coil spring 2 are in contact with each other, this is expressed by the molding die 4 which is shaped like the inner diameter of the coil spring. It is set in the cavity, and the viscoelastic paste 3a is filled in the space between the inner periphery and the outer periphery of the coil spring 2 in the cavity of the mold 4 and solidified.

  After the paste 3a is solidified, the coil spring 2 is removed, and the solidified film of the viscoelastic material placed on the inner and outer circumferences of the wire of the coil spring 2 is formed along the wire of the coil spring 2 as shown in FIG. Disconnect. As a result, as shown in FIG. 3 (c), a coil spring 2 having a damping performance is obtained by providing a coating of the damping coating 3 having a certain thickness on the outer periphery of the wire rod of the coil spring 2.

  In the present invention, the stopper 5 is incorporated concentrically with the coil spring 2 at a fixed position between the flanges 1a and 1b so as to allow slight contact with the inner diameter of the coil spring. It is what. In this embodiment, the stopper 5 is a ring having a small surface frictional resistance, such as polyacetal resin, and is supported on a cylindrical leg base 5a fixed to the lower flange 1a.

  The pedestal 5a is integrally formed of a damping material such as a viscoelastic body and is fixed around the bolt hole 1c of the flange 1a. In the present invention, the stopper is not necessarily a perfect annular ring. However, when the coil spring is displaced (rolling) in an arbitrary direction on a horizontal plane, the stopper is a perfect ring that is not interrupted. It goes without saying that it is desirable.

  FIGS. 4A and 4B are views showing a state where the four corners of the table T are supported by the vibration isolation mount M of the present invention and the devices L mounted on the table T are vibration-isolated and supported. One flange 1a is placed on the floor (or table) as an installation base, and the table T is supported on the other flange 1b as a support base. The example of FIG. 4 is an example of installation on a table T having a rectangular bottom surface.

  Further, by arranging the vibration isolation mount M at a position on the diagonal line of the table T, the balance of the vibration isolation characteristics in the horizontal direction is ensured. The weight of the table T is applied to the vibration isolation mount M, and the coil spring 2 bends according to the weight received as a weight support and reduces its height. The vibration energy propagating from one end of the coil spring 2 to the other end that does not become a resistance to the load acting on the coil spring 2, that is, the deflection, following the expansion and contraction displacement, is generated exclusively due to the vibration of the table T or the floor. The vibration energy is attenuated by converting to thermal energy.

  When the equipment L is set on the table T, or when the equipment L on the table T is handled for measurement, observation, etc., the table T is touched by the hand or the equipment is in contact with the table T. When an impact is applied to T, vibration and shaking are likely to occur. However, the displacement due to the horizontal shake and shake is blocked by the stopper 5 in the inner diameter and stopped.

  Since the stopper 5 is only lightly in contact with the coil spring 2, the horizontal resonance magnification of the coil spring 2 is lowered and the resonance frequency is slightly increased, but the horizontal vibration isolation and vibration isolation performance is greatly hindered. First, the stopper 5 provides a great resistance against shaking or shaking caused by shaking of the table or on-board equipment or contact of equipment. On the other hand, with respect to the vertical vibration of the coil spring 2, the coil spring 2 is lightly in contact with the stopper 5, and therefore the vibration of the coil spring 2 is transmitted to the stopper 5. It is attenuated by the viscoelastic body of the supporting base 5a, and there is little deterioration of the anti-vibration / anti-vibration performance against the vertical vibration.

  In other words, it exhibits high vibration control performance due to the combined effect of the coil spring 2 and the vibration control coat 3 for fine vibrations that are subject to vibration isolation / vibration prevention, and for large horizontal vibrations and vibrations. The displacement is prevented by the stopper 5.

In the above embodiment, the distinction between the upper and lower sides is exclusively for convenience of explanation, and either side of the flanges 1a and 1b may be installed on the floor or the table top. Therefore, contrary to the illustrated example, when the flange 1b to which the leg base 4a of the stopper 5 is attached is used as the table attachment surface on the upper stage side, the stopper 5 is suspended from above.
(Experimental example)

Experimental examples of the present invention are shown below.
(Experimental example 1)
The experiment is shown in FIG. 5 using a vibration isolation mount M in which the paste of the viscoelastic material placed on the outer peripheral surface side of the coil spring shown in Table 1 is solidified and the coating of the damping paste 3 is formed over the entire length of the coil spring. In this way, the four corners of the vibration isolation table 6 are supported (4 mounts), a sample 7 also serving as a weight is placed thereon, the load applied to the vibration isolation mount M is adjusted, and the vibration sensor 8 is used in the horizontal direction and The vibration characteristics in the vertical direction were measured. In the experiment, the vibration-damping coat used a mold to deposit a solid material of viscoelastic paste to a thickness of about 0.8 mm only on the outer peripheral side of the coil spring. The following composition was used for the viscoelastic paste.

Composition of viscoelastic paste The paste of the composition containing the following (a)-(c) was used for the viscoelastic paste (refer to Japanese Patent Publication No. 7-64917).
(A) 100 parts by weight of epoxy resin (b) A curing agent containing 0.5 equivalent of a functional group that reacts with an epoxy group with respect to 1 equivalent of epoxy group contained in the epoxy resin,
(C) 40 to 500 parts by weight of a liquid polysulfide oligomer having a number average molecular weight of 200 to 1090,
The stopper uses a polyacetal resin ring with an outer diameter of 11.8 mm and an inner diameter of 7 mm. The ring is supported on the flange by a cylindrical footrest in which the viscoelastic paste is solidified and installed in the space of the coil spring. did.
As Comparative Example 1, the same measurement was performed using a vibration isolation mount having the same structure as the experimental example and having no stopper.

(Experimental result)
FIG. 6 shows the vibration characteristics of the anti-vibration mount of Comparative Example 1 (deflection of the anti-vibration mount 7 mm, load 10.6 kg / 4 mount) that does not use the stopper that supports the inner diameter of the coil spring. 6A shows the vibration characteristics in the horizontal direction, and FIG. 6B shows the vibration characteristics in the vertical direction. As clearly shown in FIG. 6, the peak value at a sharp resonance point is shown at around 8 Hz and around 6.1 Hz in the vertical direction.

  FIG. 7 shows the vibration characteristics of the anti-vibration mount of Experimental Example 1 (the deflection of the anti-vibration mount is 7 mm, the load is 10.3 kg / 4 mount) in which the inner diameter of the coil spring is supported by a stopper. FIG. 7A shows the vibration characteristics in the horizontal direction, and FIG. 7B shows the vibration characteristics in the vertical direction. As shown in FIG. 7, a sharp peak at the resonance point was formed in the horizontal direction at a slightly higher frequency of about 5.0 Hz than in Comparative Example 1, and in the vertical direction at about 7 Hz. As apparent from FIG. Further, it was recognized that the peak value in the horizontal direction, that is, the resonance magnification, was lowered to a practical range as compared with Comparative Example 1. Table 2 shows the values of the resonance frequency f0 and the attenuation dB in the horizontal direction and the vertical direction.

  Accordingly, in the present invention, the coil spring 2 generated by using a soft coil spring is given the function of exclusively supporting the weight of the structure including the table to be vibration-isolated and vibration-isolated. The film of the damping coating 3 placed on the wire along the wire has a function of damping vibration energy by converting vibration energy propagating from one end of the coil spring to the other end to heat energy. In contrast, the vertical vibration isolation / anti-vibration characteristics are not impaired simply by sliding the coil spring smoothly on the surface of the stopper, and the horizontal direction is high against external micro vibrations. Although attenuation characteristics can be obtained, the stopper acts as a resistance to large fluctuations and fluctuations, and the amplitude fluctuation can be suppressed.

  The present invention is a problem caused by the use of a soft spring, particularly in the case of vibration isolation and vibration isolation of a relatively lightweight structure, such as precision equipment having a small weight, in particular, an impact applied in the horizontal direction, vibration due to vibration, In order to prevent the influence of shaking, it can be widely used as a vibration isolator for small measuring instruments, small microscopes, and other ultra-precision instruments.

It is a figure which shows the vibration characteristic of a vibration isolation mount. (A) is a partial cross-sectional side view of the vibration isolation mount according to the present invention, and (b) is a cross-sectional view taken along line AA of (a). (A) shows the example which puts a viscoelastic body on a coil spring using a shaping | molding die, (a) is sectional drawing of a shaping | molding die, (b) is the coil which integrally formed the solidified material of the viscoelastic body paste. Sectional drawing of a spring, (c) is a figure which shows the state which cut | disconnected the solidified material of the viscoelastic body paste along the wire of a coil spring. (A) is the side view which shows the example which supported the table with the vibration isolating mount by this invention, (b) is the figure which looked at a mode that the table was supported from the bottom face side of the table. It is a figure which shows the point of experiment. (A) is a graph of the vibration characteristics in the horizontal direction of Comparative Example 1, and (b) is a graph of the vibration characteristics in the vertical direction. (A) is a graph of the vibration characteristics in the horizontal direction of Experimental Example 1, and (b) is a graph of the vibration characteristics in the vertical direction. It is a figure which shows the structure of the anti-vibration mount described in patent document 1. FIG. It is a figure which shows the structure of the anti-vibration mount described in patent document 3. FIG.

Explanation of symbols

M Anti-vibration mount 1a, 1b Flange 1c Screw hole 2 Coil spring 3 Damping coat 3a Paste 4 Mold 5 Stopper 5a Leg base 6 Vibration isolator 7 Sample 8 Vibration sensor L Equipment T Table

Claims (6)

A vibration isolation mount having a combination of a coil spring, a vibration damping coating, and a stopper,
The coil spring has the function of supporting the load of the table that should be exclusively isolated and anti-vibrated.
The damping coating is a viscoelastic coating that is placed on the surface of the wire over the entire length of the coil spring and does not resist the load acting on the coil spring. The vibration energy propagating from one end of the other to the other end is converted into thermal energy to have a function to attenuate the vibration energy,
The anti-vibration mount according to claim 1, wherein the stopper is in contact with at least a part of the coil spring to prevent horizontal displacement.   2. The stopper is installed within the inner diameter of the coil spring, and prevents the displacement of the coil spring from occurring in any horizontal direction to suppress the horizontal vibration of the coil spring. Anti-vibration mount described in 1.   The damping coating is arranged on the outer peripheral side of the coil spring, and the wire rod exposed on the inner peripheral surface side of the coil spring is brought into contact with the stopper to ensure the vertical slip of the coil spring. The anti-vibration mount according to claim 2, wherein the anti-vibration mount is provided. The coil spring is installed between opposing surfaces of upper and lower flanges,
The upper flange serves as a support for the structure, and the lower flange serves as a mounting table on the floor or table of the vibration isolation mount.
The stopper is attached to a pedestal installed on the lower flange or the upper flange,
The vibration isolation mount according to claim 1 or 2, wherein the footrest is formed of a viscoelastic body and attenuates vibrations received from the coil spring even when the coil spring and the stopper are in contact with each other.   4. The vibration isolation mount according to claim 3, wherein the stopper is a ring, is supported by the leg base, and is disposed concentrically with the coil spring and within the inner diameter thereof. In the upper and lower flanges, a screw hole for screwing a mounting bolt is opened at the center,
The vibration isolation mount according to claim 4, wherein the leg base has a cylindrical shape and is attached to a flange surface around the screw hole.

Images