JP2007229611A - Steam spray nozzle structure - Google Patents

Steam spray nozzle structure Download PDF

Info

Publication number
JP2007229611A
JP2007229611A JP2006053983A JP2006053983A JP2007229611A JP 2007229611 A JP2007229611 A JP 2007229611A JP 2006053983 A JP2006053983 A JP 2006053983A JP 2006053983 A JP2006053983 A JP 2006053983A JP 2007229611 A JP2007229611 A JP 2007229611A
Authority
JP
Japan
Prior art keywords
nozzle
steam
peripheral wall
steam injection
nozzle structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006053983A
Other languages
Japanese (ja)
Other versions
JP4777797B2 (en
Inventor
Kenichi Kurimasa
健一 栗正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Display Corp
Original Assignee
Kyocera Display Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Display Corp filed Critical Kyocera Display Corp
Priority to JP2006053983A priority Critical patent/JP4777797B2/en
Publication of JP2007229611A publication Critical patent/JP2007229611A/en
Application granted granted Critical
Publication of JP4777797B2 publication Critical patent/JP4777797B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Nozzles (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a steam spray nozzle removing dust including finger print or human body secrete like sweat causing galvanic corrosion, and providing sufficient satisfactory washing effect. <P>SOLUTION: An inner nozzle 3 is disposed with a spray port 3a facing the inside of an outer nozzle 2, and a gap space part 4 generating a negative pressure is formed between an outer peripheral wall 3b of the inner nozzle 3 and an inner peripheral wall 2c of the outer nozzle 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、蒸気を噴射して洗浄を行なう洗浄装置の蒸気噴射ノズル構造であって、特に、液晶表示パネルの製造工程における基板洗浄に好適な蒸気噴射ノズル構造に関する。   The present invention relates to a vapor injection nozzle structure of a cleaning apparatus that performs cleaning by jetting steam, and more particularly to a vapor injection nozzle structure that is suitable for substrate cleaning in a manufacturing process of a liquid crystal display panel.

液晶表示パネルの製造工程における基板の洗浄としては、従来は、溶剤を浸した綿棒で払拭する方法が採用されていたが、この方法によっては汗や唾液などの人体分泌物を完全に除去することが困難であり、また、端子形成部に形成された端子を傷つけ、破損させてしまうことがあった。さらに、液晶表示パネルを構成する2枚の基板を貼り合わせるシール部材のシール際などには、前記綿棒が行き届かず、払拭洗浄できないという問題があった。   Conventionally, a method of wiping with a cotton swab dipped in a solvent has been used to clean the substrate in the manufacturing process of the liquid crystal display panel. However, this method completely removes human secretions such as sweat and saliva. In some cases, the terminal formed in the terminal forming portion is damaged and damaged. Further, when sealing a sealing member for bonding two substrates constituting the liquid crystal display panel, there is a problem that the cotton swab is not delivered and cannot be wiped and washed.

そこで、近年は、洗浄対象の基板に対し、溶剤を含ませた蒸気を噴射させて非接触で洗浄する洗浄方法が採用されている(例えば、特許文献1参照)。   Therefore, in recent years, a cleaning method has been adopted in which a substrate containing a substrate to be cleaned is sprayed with a solvent-containing vapor to perform non-contact cleaning (see, for example, Patent Document 1).

特開2004−49405号公報JP 2004-49405 A

前述した従来の蒸気を噴射させる洗浄方法は、唾液やシリコーン汚染などに対しては洗浄効果が高く、シール際の洗浄も容易に行うことができるが、指紋や汗等を完全に除去することが困難であり、洗浄後に皮膚片が残留し、その残留した皮膚片が電食の原因となることがあった。   The conventional method of spraying steam as described above has a high cleaning effect against saliva and silicone contamination, and can be easily cleaned at the time of sealing, but it can completely remove fingerprints, sweat, etc. It was difficult, and a piece of skin remained after washing, and the remaining piece of skin sometimes caused electric corrosion.

そこで、本発明は、電食の原因となっている指紋や汗等の人体分泌物を含む塵埃を除去し、十分満足の得られる洗浄効果を得ることのできる蒸気噴射ノズル構造を提供することを目的とするものである。   Therefore, the present invention provides a vapor jet nozzle structure that can remove dust containing human secretions such as fingerprints and sweat, which cause electric corrosion, and obtain a sufficiently satisfactory cleaning effect. It is the purpose.

前述した目的を達成するため、本発明の蒸気噴射ノズル構造は、蒸気を洗浄対象物に噴射するための蒸気噴射ノズル構造であって、外ノズル内に噴射口を臨ませてなる内ノズルが配設されており、前記内ノズルの外周壁と外ノズルの内周壁との間には、負圧を生じさせるための間隙空間部が形成されていることを特徴とする。また、前記内ノズルおよび外ノズルは同心の円筒形状であることが好ましい。   In order to achieve the above-described object, the steam injection nozzle structure of the present invention is a steam injection nozzle structure for injecting steam onto an object to be cleaned, and an inner nozzle formed with an injection port facing the outer nozzle. A gap space for generating a negative pressure is formed between the outer peripheral wall of the inner nozzle and the inner peripheral wall of the outer nozzle. The inner nozzle and the outer nozzle are preferably concentric cylindrical shapes.

本発明の蒸気噴射ノズル構造によれば、内ノズルの噴射口から噴射される蒸気を前記間隙空間部に発生している負圧により外ノズルの内周壁に沿って引くことで、外ノズルの噴射口から噴射される蒸気を拡散させることなく、洗浄対象物方向へ加速度をつけて直線的に押し出し、高い衝撃力を以て洗浄対象物に向けて噴射させることが可能となる。   According to the vapor injection nozzle structure of the present invention, the injection of the outer nozzle is performed by drawing the vapor injected from the injection port of the inner nozzle along the inner peripheral wall of the outer nozzle by the negative pressure generated in the gap space. Without diffusing the steam sprayed from the mouth, it is possible to push it out linearly with acceleration in the direction of the object to be cleaned and to inject it toward the object to be cleaned with a high impact force.

このように構成され、作用する本発明の蒸気噴射ノズル構造によれば、除去が困難である指紋や汗等の人体分泌物を含む塵埃を除去し、十分満足の得られる洗浄効果を得ることができる。   According to the vapor jet nozzle structure of the present invention configured and operated in this manner, it is possible to remove dust including human secretions such as fingerprints and sweat that are difficult to remove, and to obtain a sufficiently satisfactory cleaning effect. it can.

本発明の蒸気噴射ノズル構造は、円筒状とされた外ノズル2内に蒸気の噴射口3aを臨ませた内ノズル3が前記外ノズル2と同心に配設されており、前記内ノズル3の外周壁3bと外ノズル2の内周壁cとの間には、内ノズル3の噴射口3aから外ノズル2内に噴射された蒸気により負圧を生じさせるための間隙空間部4が形成されている。前記内ノズル3と外ノズル2とを同心とすることで、間隙空間部4が周方向で均一となり、蒸気の噴射力をさらに向上させることができる。   In the steam injection nozzle structure of the present invention, an inner nozzle 3 facing a steam injection port 3a is arranged concentrically with the outer nozzle 2 in a cylindrical outer nozzle 2, and the inner nozzle 3 Between the outer peripheral wall 3b and the inner peripheral wall c of the outer nozzle 2, there is formed a gap space portion 4 for generating a negative pressure by the steam injected into the outer nozzle 2 from the injection port 3a of the inner nozzle 3. Yes. By making the inner nozzle 3 and the outer nozzle 2 concentric, the gap space portion 4 becomes uniform in the circumferential direction, and the steam injection force can be further improved.

図1は、本発明の蒸気噴射ノズル構造を有する蒸気噴射ノズル1の第1実施形態を説明するための要部断面図であり、図2は図1のII−II断面図である。   FIG. 1 is a cross-sectional view of an essential part for explaining a first embodiment of a steam spray nozzle 1 having a steam spray nozzle structure of the present invention, and FIG. 2 is a cross-sectional view taken along the line II-II in FIG.

本実施形態の蒸気噴射ノズル1は、図示しない蒸気製造装置の給気ホースの先端部に配設されたノズルを前記内ノズル3とし、この内ノズル3に対して、着脱可能に形成された円筒状のアタッチメントが前記外ノズル2として内ノズル3の外周に嵌着されている。   The steam injection nozzle 1 of the present embodiment uses a nozzle disposed at the tip of an air supply hose of a steam production apparatus (not shown) as the inner nozzle 3, and is a cylinder formed detachably with respect to the inner nozzle 3. A shaped attachment is fitted on the outer periphery of the inner nozzle 3 as the outer nozzle 2.

本実施形態において、前記内ノズル3は、例えば、金属材等により形成されており、噴射口3aとなる部分の外周壁3bを該内ノズル3と同心の円筒状に切欠いて、外向きのフランジ部3dが形成された形状とされている。   In the present embodiment, the inner nozzle 3 is formed of, for example, a metal material, and the outer peripheral wall 3b of the portion serving as the injection port 3a is cut out in a cylindrical shape concentric with the inner nozzle 3 so as to have an outward flange. It is the shape in which the part 3d was formed.

また、前記外ノズル2は、例えば、プラスチック樹脂材等により形成されており、前記内ノズル3の先端部を外ノズル2内の中心部に位置させるようにして、前記内ノズル3の外周に嵌着されている。   The outer nozzle 2 is formed of, for example, a plastic resin material, and is fitted to the outer periphery of the inner nozzle 3 so that the tip of the inner nozzle 3 is positioned at the center of the outer nozzle 2. It is worn.

これにより、本実施形態の蒸気噴射ノズル1は、内ノズル3と外ノズル2とを有する2重構造とされ、前記内ノズル3の外周壁3bと外ノズル2の内周壁2cとの間に、内ノズル2に形成された前記外向きのフランジ部3dによって間隙空間部4が形成され、本発明の蒸気噴射ノズル構造を有するものとなる。   Thereby, the steam injection nozzle 1 of the present embodiment has a double structure having the inner nozzle 3 and the outer nozzle 2, and between the outer peripheral wall 3b of the inner nozzle 3 and the inner peripheral wall 2c of the outer nozzle 2, A gap space portion 4 is formed by the outward flange portion 3d formed in the inner nozzle 2, and has the steam injection nozzle structure of the present invention.

そして、本実施形態の蒸気噴射ノズル1によれば、前述の蒸気噴射ノズル構造を有することにより、図3に示すように、内ノズル3の噴射口3aから噴射される蒸気を前記間隙空間部4に発生している負圧により外ノズル2の内周壁2cに沿って引くことで、外ノズル2の噴射口2aから噴射される蒸気を、外ノズル2の噴射口2aを通過直後に拡散させることなく、洗浄対象物方向へ加速度をつけて直線的に押し出し、高い衝撃力を以て洗浄対象物に向けて噴射させることが可能となる。また、蒸気をより直線的に押し出すために、外ノズル2の内周壁2cは平滑な面であることが好ましい。抵抗をなるべく少なくすることで層流が発生しやすくなるためである。   And according to the vapor injection nozzle 1 of this embodiment, by having the above-mentioned vapor injection nozzle structure, as shown in FIG. 3, the vapor | steam injected from the injection port 3a of the inner nozzle 3 is said gap | interval space part 4. The vapor injected from the injection port 2a of the outer nozzle 2 is diffused immediately after passing through the injection port 2a of the outer nozzle 2 by being drawn along the inner peripheral wall 2c of the outer nozzle 2 by the negative pressure generated in the nozzle 2 Instead, it is possible to extrude linearly with acceleration in the direction of the object to be cleaned and to inject toward the object to be cleaned with a high impact force. In order to extrude the steam more linearly, the inner peripheral wall 2c of the outer nozzle 2 is preferably a smooth surface. This is because laminar flow is likely to occur by reducing the resistance as much as possible.

このようにして気流の調整がされた蒸気を用いることにより、従来の蒸気洗浄の方法では除去が困難であった指紋や汗等の人体分泌物を含む塵埃を除去し、十分満足の得られる洗浄効果を得ることができる。   By using the steam whose airflow has been adjusted in this way, dust containing human secretions such as fingerprints and sweat, which has been difficult to remove by the conventional steam cleaning method, is removed, and sufficient cleaning can be obtained. An effect can be obtained.

実施例:
蒸気噴射ノズル1の前記内ノズル3の内径寸法をφ4mm(変更可能寸法φ3〜5mm)、前記内ノズル3の噴射口3aの外径寸法をφ5.5mm(変更可能寸法φ5〜9mm)、前記内ノズル3の噴射口3aの長さ寸法を6mm(変更可能寸法4〜8mm)、外向きのフランジ部3dの外径寸法及び前記外ノズル2の内径寸法をφ7mm(変更可能寸法5〜9mm)とし、前記内ノズル3の先端部を、外ノズル2の先端部から8mm(変更可能寸法5〜10mm)程、内側に位置させるように構成した。
Example:
The inner diameter of the inner nozzle 3 of the steam injection nozzle 1 is φ4 mm (changeable size φ3 to 5 mm), the outer diameter of the injection port 3 a of the inner nozzle 3 is φ5.5 mm (changeable size φ5 to 9 mm), The length of the injection port 3a of the nozzle 3 is 6 mm (changeable size 4 to 8 mm), the outer diameter of the outward flange 3d and the inner diameter of the outer nozzle 2 are 7 mm (changeable size 5 to 9 mm). The tip of the inner nozzle 3 is configured to be positioned on the inner side by about 8 mm (changeable size 5 to 10 mm) from the tip of the outer nozzle 2.

そして、その蒸気噴射ノズル1を用い、蒸気圧力を0.3MPa、洗浄対象物としての液晶表示パネルの端子面に対する仰角を30°、離間距離を10mmとする条件下で蒸気を噴射して、液晶表示パネルの洗浄を試みたところ、従来の方法では残留していた皮膚片の塵埃までも除去することができ、十分満足の得られる洗浄効果を得ることができた。   Then, using the vapor injection nozzle 1, vapor is injected under the conditions that the vapor pressure is 0.3 MPa, the elevation angle with respect to the terminal surface of the liquid crystal display panel as the object to be cleaned is 30 °, and the separation distance is 10 mm. Attempts were made to clean the display panel, and it was possible to remove even dust on the skin pieces remaining in the conventional method, and a sufficiently satisfactory cleaning effect could be obtained.

また、図4は、本発明の蒸気噴射ノズル構造を有する蒸気噴射ノズル1の第2実施形態を説明するための要部断面図である。以下、第1実施形態の蒸気噴射ノズル1と異なる構成点のみを説明する。   Moreover, FIG. 4 is principal part sectional drawing for demonstrating 2nd Embodiment of the steam injection nozzle 1 which has the steam injection nozzle structure of this invention. Hereinafter, only the configuration points different from the vapor injection nozzle 1 of the first embodiment will be described.

この第2実施形態の蒸気噴射ノズル1は、前記内ノズル3の先端部は、例えば、金属材等により形成されており、噴射口3aとなる部分は円筒状に形成されている。   In the steam injection nozzle 1 of the second embodiment, the tip of the inner nozzle 3 is formed of, for example, a metal material, and the portion that becomes the injection port 3a is formed in a cylindrical shape.

また、前記外ノズル2は、例えば、プラスティック樹脂材等により形成されており、円筒状とされた本体の後端部には、内向きのフランジ部2dが形成されている。そして、前記内ノズル3の先端部を外ノズル2内の中心部に位置させるようにして、前記内向きのフランジ部2dの内径端面を以て、前記内ノズル3の外周に嵌着されている。   The outer nozzle 2 is formed of, for example, a plastic resin material, and an inward flange portion 2d is formed at the rear end portion of the cylindrical main body. The inner nozzle 3 is fitted on the outer periphery of the inner nozzle 3 with the inner diameter end face of the inward flange portion 2d so that the tip of the inner nozzle 3 is positioned at the center of the outer nozzle 2.

これにより、本実施形態の蒸気噴射ノズル1は、内ノズル3と外ノズル2とを有する2重構造とされ、前記内ノズル3の外周壁3bと外ノズル2の内周壁2cとの間には、外ノズル2に形成された前記内向きのフランジ部2dによって間隙空間部4が形成され、本発明の蒸気噴射ノズル構造を有するものとなる。   As a result, the steam injection nozzle 1 of the present embodiment has a double structure having the inner nozzle 3 and the outer nozzle 2, and is between the outer peripheral wall 3 b of the inner nozzle 3 and the inner peripheral wall 2 c of the outer nozzle 2. A gap space portion 4 is formed by the inward flange portion 2d formed in the outer nozzle 2, and has the steam injection nozzle structure of the present invention.

そして、本実施形態の蒸気噴射ノズル1によっても、本発明の蒸気噴射ノズル構造を有することにより、前述のように、従来の蒸気洗浄の方法では除去が困難であった指紋や汗等の人体分泌物を含む塵埃を除去し、十分満足の得られる洗浄効果を得ることができる。また、本実施形態においても、外ノズル2の内周壁2cは溝などが形成されていない平滑な面であることが好ましい。   The steam spray nozzle 1 of the present embodiment also has the steam spray nozzle structure of the present invention, so that, as described above, human secretion such as fingerprints and sweat that was difficult to remove by the conventional steam cleaning method. Dust containing objects can be removed, and a sufficiently satisfactory cleaning effect can be obtained. Also in the present embodiment, the inner peripheral wall 2c of the outer nozzle 2 is preferably a smooth surface on which no groove or the like is formed.

なお、本発明の蒸気噴射ノズル構造を有する蒸気噴射ノズル1は、図5に示すように、前記内ノズル3と外ノズル2とを一体に形成することも可能である(第3実施形態)。   In the steam injection nozzle 1 having the steam injection nozzle structure of the present invention, the inner nozzle 3 and the outer nozzle 2 can be integrally formed as shown in FIG. 5 (third embodiment).

なお、本発明は、前述した実施の形態に限定されるものではなく、必要に応じて種々の変更が可能である。   In addition, this invention is not limited to embodiment mentioned above, A various change is possible as needed.

例えば、蒸気噴射ノズル構造を有する蒸気噴射ノズルの各部材の材料や寸法等は、前述した材料や寸法に限らない。また、本発明の蒸気噴射ノズル構造を有する蒸気噴射ノズルを用いた洗浄条件も、前述の実施例の洗浄条件に限らない。   For example, the materials, dimensions, and the like of each member of the steam injection nozzle having the steam injection nozzle structure are not limited to the materials and dimensions described above. Further, the cleaning conditions using the steam injection nozzle having the steam injection nozzle structure of the present invention are not limited to the cleaning conditions of the above-described embodiment.

本発明の蒸気噴射ノズル構造を有する蒸気噴射ノズルの第1実施形態を説明する要部断面図Cross-sectional view of relevant parts for explaining a first embodiment of a steam spray nozzle having a steam spray nozzle structure of the present invention. 図1のII−II断面図II-II sectional view of FIG. 本発明の蒸気噴射ノズル構造を有する蒸気噴射ノズルにおける蒸気噴射イメージ(作用)を示す説明図Explanatory drawing which shows the steam injection image (action) in the steam injection nozzle which has the steam injection nozzle structure of this invention. 本発明の蒸気噴射ノズル構造を有する蒸気噴射ノズルの第2実施形態を説明する要部断面図Sectional drawing of the principal part explaining 2nd Embodiment of the steam injection nozzle which has the steam injection nozzle structure of this invention. 本発明の蒸気噴射ノズル構造を有する蒸気噴射ノズルの第3実施形態を説明する要部断面図Sectional drawing of the principal part explaining 3rd Embodiment of the steam injection nozzle which has the steam injection nozzle structure of this invention.

符号の説明Explanation of symbols

1 蒸気噴射ノズル
2 外ノズル
2a (外ノズルの)噴射口
2c (外ノズルの)内周壁
2d (外ノズルの内向き)フランジ部
3 内ノズル
3a (内ノズルの)噴射口
3b (内ノズルの)外周壁
3d (内ノズルの外向き)フランジ部
4 間隙空間部
DESCRIPTION OF SYMBOLS 1 Steam injection nozzle 2 Outer nozzle 2a (Outside nozzle) Outlet 2c (Outside nozzle) Inner peripheral wall 2d (Outside nozzle inward) Flange part 3 Inner nozzle 3a (Inner nozzle) Outlet 3b (Inside nozzle) Outer peripheral wall 3d (outward of the inner nozzle) flange portion 4 gap space portion

Claims (2)

蒸気を洗浄対象物に噴射するための蒸気噴射ノズル構造であって、外ノズル内に噴射口を臨ませてなる内ノズルが配設されており、前記内ノズルの外周壁と外ノズルの内周壁との間には、負圧を生じさせるための間隙空間部が形成されていることを特徴とする蒸気噴射ノズル構造。 A steam injection nozzle structure for injecting steam onto an object to be cleaned, wherein an inner nozzle having an injection port facing the outer nozzle is disposed, and an outer peripheral wall of the inner nozzle and an inner peripheral wall of the outer nozzle A steam injection nozzle structure in which a gap space for generating a negative pressure is formed between the two. 前記内ノズルおよび外ノズルはともに同心の円筒形状である請求項1に記載の蒸気噴射ノズル構造。
The steam injection nozzle structure according to claim 1, wherein the inner nozzle and the outer nozzle are both concentric cylindrical shapes.
JP2006053983A 2006-02-28 2006-02-28 Steam injection nozzle structure Expired - Fee Related JP4777797B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006053983A JP4777797B2 (en) 2006-02-28 2006-02-28 Steam injection nozzle structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006053983A JP4777797B2 (en) 2006-02-28 2006-02-28 Steam injection nozzle structure

Publications (2)

Publication Number Publication Date
JP2007229611A true JP2007229611A (en) 2007-09-13
JP4777797B2 JP4777797B2 (en) 2011-09-21

Family

ID=38550739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006053983A Expired - Fee Related JP4777797B2 (en) 2006-02-28 2006-02-28 Steam injection nozzle structure

Country Status (1)

Country Link
JP (1) JP4777797B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009090254A (en) * 2007-10-11 2009-04-30 Jatco Ltd Nozzle
JP2014069100A (en) * 2012-09-27 2014-04-21 Furusho Electric Industry Co Ltd Washing apparatus with rapid-cooling nozzle
CN105195357A (en) * 2015-09-16 2015-12-30 湖南中航精工有限公司 Multifunctional cleaning gun

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62104899A (en) * 1985-10-31 1987-05-15 日産化学工業株式会社 Sterilizing detergent
JPH074398A (en) * 1993-03-08 1995-01-10 Mitsubishi Heavy Ind Ltd Steam jet pump
JP2001334180A (en) * 2000-05-26 2001-12-04 Dainippon Screen Mfg Co Ltd Steam jetting nozzle and substrate cleaning device using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62104899A (en) * 1985-10-31 1987-05-15 日産化学工業株式会社 Sterilizing detergent
JPH074398A (en) * 1993-03-08 1995-01-10 Mitsubishi Heavy Ind Ltd Steam jet pump
JP2001334180A (en) * 2000-05-26 2001-12-04 Dainippon Screen Mfg Co Ltd Steam jetting nozzle and substrate cleaning device using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009090254A (en) * 2007-10-11 2009-04-30 Jatco Ltd Nozzle
JP2014069100A (en) * 2012-09-27 2014-04-21 Furusho Electric Industry Co Ltd Washing apparatus with rapid-cooling nozzle
CN105195357A (en) * 2015-09-16 2015-12-30 湖南中航精工有限公司 Multifunctional cleaning gun

Also Published As

Publication number Publication date
JP4777797B2 (en) 2011-09-21

Similar Documents

Publication Publication Date Title
JP4777797B2 (en) Steam injection nozzle structure
JP2008093080A (en) Nozzle of powder spray device for dental care
KR101599214B1 (en) Ultrasonic cleaning apparatus for large area
CN102773240A (en) Post-CMP wafer cleaning apparatus
US20070284459A1 (en) High-Pressure Liquid Atomisation Nozzle for a Machine for Cleaning Optical Lenses or Other Substrates
JP4808147B2 (en) Coating die cleaning device
JP2016031412A (en) Apparatus and method for washing off adhesive of pellicle of photomask
JP2017217621A (en) Pipe attachment removal device and method
WO2003080254A3 (en) Spray gun cleaning arrangements
JP3529598B2 (en) Rotary atomizing type coating equipment
JP2003214427A5 (en)
CN2759608Y (en) Compressed gas nozzle for cleaning optical elements
JPWO2016013256A1 (en) Cleaning fine mist generating device, oral cleaning device, nozzle, cleaning method for oral cavity, and cleaning fine mist generating method for cleaning fine mist generating device
KR101956364B1 (en) Cleaning device of oral cavity
JP5917610B2 (en) Substrate processing equipment
KR20180111358A (en) Nozzle for recycling steam
JPS5986226A (en) Cleaning device for thin plate material
CN202762687U (en) Screen cleaning and wiping machine
JP2005052708A (en) Nozzle cleaning device
JP2005019272A (en) Cleaning method and cleaning device of safety valve chest of control valve type lead-acid battery
JP5579219B2 (en) Nozzle device and spray device
JP2018080083A (en) Method for manufacturing glass tube
JPH0852443A (en) Cleaning method using ultrapure water
CN108940632A (en) A kind of hydraulic giant
KR102252226B1 (en) Nozzle module for skin management apparatus

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090224

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20101105

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101109

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110106

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110531

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110630

R150 Certificate of patent or registration of utility model

Ref document number: 4777797

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140708

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140708

Year of fee payment: 3

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140708

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees