JP2007225312A - Reflection characteristic measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive reflection characteristic measuring apparatus of simple constitution capable of correcting accurately fluctuation of sample face irradiation light, and having high measurement stability. <P>SOLUTION: A sample face reflected light component 1s is mainly made to incident into a single channel polychromator 8, by retreating a light transmission-diffusible diffusion plate chopper 5 (optical path changing means) from a reference face 1r, and one part (reflected light 2r) of illumination light reflected by a glass plate 4 (partial reflecting face) and light-path-changed by the diffusion plate chopper 5 is mainly made to incident into the single channel polychromator 8, by inserting the diffusion plate chopper 5 into the reference face 1r. A reflection characteristic of a sample face 1 with the corrected fluctuation of the illumination light from a light source 2 is calculated by a control part 9, based on outputs from the single channel polychromator 8 in the insertion and in the retreat of the diffusion plate chopper 5. <P>COPYRIGHT: (C)2007,JPO&amp;INPIT

Description

  The present invention relates to a reflection characteristic measuring apparatus for measuring a reflection characteristic of a sample surface from a spectral characteristic of reflected light in a predetermined direction when the sample surface is illuminated from a predetermined direction, in particular, illuminating the sample surface from a direction at 45 ° from the normal line. The present invention relates to a 45/0 geometry reflection characteristic measuring apparatus that receives reflected light components in the normal direction.

  As a first conventional example, in the reflection characteristic measuring apparatus 900 of 45/0 geometry shown in FIG. 15, the sample surface 901 has a plurality of light sources (for example, light sources 902 and 903) arranged in a direction of 45 ° from the normal 901n. ). A component 901 s (referred to as sample light 901 s) of the sample surface reflected light from which the illumination light is reflected by the sample surface 901 is converged and incident on the entrance slit of the single channel polychromator 906 by the reflecting mirror 904 and the lens 905, and is spectrally separated. Intensity is measured. The spectral reflectance coefficient of the sample surface 901 is obtained from the measured spectral intensity of the sample surface reflected light.

  As a second conventional example, a reflection characteristic measuring apparatus 920 having a 45/0 geometry shown in FIG. 16 uses a double channel polychromator 921 and makes the sample light 901 s incident on the sample light slit of the double channel polychromator 921. A part of the light beam of the light source 902 (reference light 902r) is incident on the reference light slit of the double channel polychromator 921 as light, and each spectral intensity is measured.

As a third conventional example, in a reflection characteristic measuring apparatus 940 having a 45/0 geometry shown in FIG. 17, a reflecting mirror 941 that bends the optical axis of the reference light 902r to be orthogonal to the optical axis of the sample light 901s, and its intersection Thus, a reflecting mirror chopper 942 for inserting the reflecting mirror 941 at an angle of 45 ° between both optical axes, a chopper driving motor 943 for driving the reflecting mirror chopper 942, and a relay lens 944 are provided. In this configuration, when the reflecting mirror 941 is inserted into the optical path (optical axis) by the reflecting mirror chopper 942, the reference light 902 r passes through the relay lens 944 and the sample light 901 s passes through the relay lens 944 when the reflecting mirror 941 retracts from the optical path. The light enters the meter 906.
JP 2003-075257 A

  However, in the first conventional example, the configuration is simple and the cost is low, but since there is no reference optical system for monitoring the spectral intensity of the illumination light, the temporal change in the spectral intensity of the illumination light over time. Cannot be corrected, and high-precision measurement cannot be performed. Further, in the second conventional example, since the fluctuation of the illumination light is corrected based on the spectral intensity measurement value of the reference light 902r from the light source 902, the measurement stability is superior to that of the first conventional example, but double Since the channel polychromator 921 and the reference optical system for guiding the reference light 902r to the reference light slit are required, there is a problem that the cost increases. Further, as in the second conventional example, when the reference light 902r is taken from one of a plurality of light sources, or when the light flux in a direction different from the sample surface illumination light is used as the reference light, the reference light is the illumination light. There is a problem that it is impossible to accurately monitor fluctuations in the system. The third conventional example is configured to overcome the disadvantages of the first and second conventional examples. In this conventional example, although the single channel polychromator 906 can be used, the configuration becomes complicated and the reflection becomes difficult. A small allowable error in the position and angle of the mirror 941 and the reflector 941 inserted into the light beam by the reflector chopper 942 is a factor that increases the cost.

  The present invention has been made in view of the above problems, and can accurately correct (monitor) fluctuations in illumination light on the sample surface, has high measurement stability, and has a simple configuration and a low cost. It aims at realizing.

  The reflection characteristic measuring apparatus according to the present invention includes an illumination unit that illuminates a sample surface from a predetermined angle with respect to a sample surface normal, and a sample in the sample surface normal direction in which illumination light from the illumination unit is reflected by the sample surface A light receiving means for receiving the surface reflected light; an optical path changing means for changing the optical path for the reference surface incident light configured to be inserted into and withdrawn from the reference surface on the optical path of the incident light to the light receiving means; A symmetrical surface of the sample surface and the reference surface, a partially reflecting surface for reflecting a part of the illumination light by the illumination means toward the reference surface, insertion and retraction operations of the optical path changing means, and the illumination means Control operation means for calculating output information of the light receiving means, and the light receiving means mainly receives the reflected light from the sample surface when retracted from the reference surface of the optical path changing means. When the optical path changing means is inserted into the reference surface, a part of the illumination light whose optical path has been changed by the optical path changing means so as to be reflected by the partial reflection surface and incident on the light receiving means is mainly received. The control calculation unit calculates a reflection characteristic of the sample surface in which the variation of the illumination light is corrected based on output information of the light receiving unit when the optical path changing unit is inserted and retracted. .

  According to the above configuration, the sample surface is reflected from the sample surface normal direction by the illuminating means, and the illumination light from the illuminating means is reflected on the sample surface by the light receiving means. Light is received. The optical path of the reference surface incident light is changed by the optical path changing means configured to be inserted into and retracted from the reference surface on the optical path of the incident light to the light receiving means. A part of the illumination light from the illumination unit is reflected toward the reference surface by the partial reflection surface that is a symmetrical surface of the sample surface and the reference surface, and the control operation unit inserts and retracts the optical path changing unit and the illumination unit. The lighting operation is controlled, and the output information of the light receiving means is processed. When the light path changing means is retracted from the reference surface, the sample surface reflected light is mainly received, and when the light path changing means is inserted into the reference surface, it is reflected by the partially reflecting surface and incident on the light receiving means. Thus, a part of the illumination light whose optical path is changed by the optical path changing means is mainly received. Then, based on the output information of the light receiving means when the optical path changing means is inserted and retracted, the control calculation means calculates the reflection characteristic of the sample surface in which the variation of the illumination light is corrected.

  In the above configuration, the optical path changing means is preferably a transmission diffusion surface that transmits and diffuses light. According to this, the light path changing means is a transmission diffusion surface that transmits and diffuses light.

  In the above configuration, it is preferable that the transmission diffusion surface is a chopper blade configured to be rotationally driven, and the chopper blade is formed of a diffusion plate that transmits and diffuses incident light to the blade. According to this, the transmission diffusion surface is a chopper blade configured to be rotationally driven, and the chopper blade is a diffusion plate that transmits and diffuses incident light to the blade.

  In the above configuration, the transmission diffusion surface diffuses incident light in a direction of approximately 45 ° with respect to the normal line of the transmission diffusion surface, and includes in-plane diffusion including the optical axis of the incident light and the normal line of the transmission diffusion surface. A non-uniform transmission diffusion surface that transmits and diffuses so that the component is larger than the out-of-plane diffusion component is preferable. According to this, the transmission diffusion surface has incident light in the direction of approximately 45 ° with respect to the normal line of the transmission diffusion surface, and the in-plane diffusion component including the optical axis of the incident light and the normal line of the transmission diffusion surface is the surface. A non-uniform transmission diffusion surface that diffuses and diffuses so as to be larger than the outer diffusion component.

  In the above configuration, the control calculation means uses the output information of the light receiving means at the time of insertion and retraction of the transmission diffusion surface and information on a correction coefficient given in advance, and the illumination at the time of insertion of the transmission diffusion surface. It is preferable to perform an arithmetic process for correcting the influence of the sample surface reflected light incident on the transmission diffusion surface together with a part of the light, and to calculate the reflection characteristics of the sample surface in which the variation of the illumination light is corrected. According to this, the control calculation means uses the output information of the light receiving means at the time of insertion and withdrawal of the transmission diffusion surface and the information of the correction coefficient given in advance, together with a part of the illumination light at the time of insertion of the transmission diffusion surface. A calculation process for correcting the influence of the sample surface reflected light incident on the transmission diffusion surface is performed, and the reflection characteristic of the sample surface in which the variation of the illumination light is corrected is calculated.

  Further, in the above configuration, the control calculation means uses the output information of the light receiving means at the time of insertion of the transmission diffusion surface averaged with respect to the wavelength, and the output information of the light reception means at the time of retracting the transmission diffusion surface, It is preferable to calculate a reflection characteristic of the sample surface in which the variation of the illumination light is corrected. According to this, the fluctuation of the illumination light is corrected using the output information of the light receiving means when the transmission diffusing surface is inserted and the output information of the light receiving means when the transmission diffusing surface is retracted, which is moving averaged with respect to the wavelength. The reflection characteristics of the sample surface thus obtained are calculated.

  The reflection characteristic measuring apparatus according to the present invention includes an integrating sphere that includes a light source, a sample opening, and a measurement opening, and an integrating sphere illumination unit that diffusely illuminates the sample surface disposed in the sample opening. A light receiving means for receiving the sample-surface reflected light in a predetermined direction formed by reflecting the diffuse illumination light from the integrating sphere illumination means through the measurement aperture, and a reference surface in the vicinity of the measurement aperture. A transmission diffusing surface configured to be insertable and retractable, a control arithmetic means for controlling the insertion and withdrawal operations of the transmission diffusing surface and the illumination operation of the integrating sphere illuminating means, and calculating the output information of the light receiving means; The light-receiving means mainly receives the sample-surface reflected light when the transmission diffusion surface is retracted from the reference surface, and is inserted from the measurement opening when the transmission diffusion surface is inserted into the reference surface. A part of the diffuse illumination light incident on the light is mainly received, and the control calculation means corrects fluctuations of the diffuse illumination light based on output information of the light reception means when the transmission diffusion surface is inserted and retracted. The reflection characteristic of the sample surface is calculated.

  According to the above configuration, the sample surface disposed in the sample opening is diffusely illuminated by the integrating sphere illumination means including an integrating sphere having a light source, a sample opening, and a measurement opening. Sample-surface reflected light in a predetermined direction formed by reflecting diffused illumination light from the integrating sphere illumination means on the sample surface is received through the measurement aperture. Further, the transmission diffusion surface is configured to be able to be inserted and retracted with respect to the reference surface in the vicinity of the measurement aperture, and the control operation means controls the insertion and withdrawal operation of the transmission diffusion surface and the illumination operation of the integrating sphere illumination means. In addition, the output information of the light receiving means is processed. When the light diffusing surface is retracted from the reference surface by the light receiving means, the sample-surface reflected light is mainly received, and when inserted into the reference surface of the transmissive diffusing surface, the diffused illumination light incident on the transmissive diffusing surface from the measurement opening A part of the light is mainly received. Then, based on the output information of the light receiving means when the transmission diffusion surface is inserted and retracted, the control calculation means calculates the reflection characteristic of the sample surface in which the variation of the diffuse illumination light is corrected.

  Further, in the above configuration, it is preferable that the sample opening and the measurement opening are positioned at a substantially opposite electrode of the integrating sphere, and the light source is positioned in the vicinity of a substantially symmetrical plane between the sample opening and the measurement opening. . According to this, the sample opening and the measurement opening are arranged in a substantially counter electrode of the integrating sphere, and the light source is arranged in the vicinity of the substantially symmetrical plane of the sample opening and the measurement opening.

  According to the first aspect of the present invention, the fluctuation of the sample surface illumination light can be accurately corrected based on the reference light information having a high correlation with the sample surface illumination light, and a highly stable measurement is possible. . In addition, a single-channel polychromator can be used as the light receiving means, and the optical path change for taking in the reference light is performed by inserting the optical path changing means into the reference surface, thereby simplifying the configuration and reducing the cost. .

  According to the second aspect of the present invention, the optical path change for taking in the reference light by the optical path changing means is inserted into the reference plane of the transmission diffusion surface having a wide allowable range of position and angle without using a special optical system. Therefore, a low-cost measuring device can be realized with a simpler configuration.

  According to the third aspect of the present invention, insertion and retraction of the transmission diffusion surface with respect to the reference surface can be easily realized with a simple configuration of a chopper in which the blade is formed of a diffusion plate.

  According to the fourth aspect of the present invention, the illumination light incident on the non-uniform transmission diffusion surface can be efficiently incident on the light receiving means by the non-uniform transmission diffusion surface.

  According to the invention described in claim 5, it is possible to measure with high accuracy by removing the influence of the sample surface reflected light mixed in the reference light.

  According to the sixth aspect of the present invention, the S / N of the output of the light receiving means when the transmission diffusion surface is inserted can be improved, and as a result, the accuracy of the reflection characteristic measurement value on the sample surface can be improved. Note that the S / N improvement by moving average with respect to the wavelength can be applied only when the wavelength dependency of the output of the light receiving means at the time of insertion of the transmissive diffusion surface is monotonous and gentle, but is generally used as a light source of a reflection characteristic measuring apparatus. When a typical incandescent light source is used as a light source, the spectral distribution of illumination light is monotonous and gentle, and the sample surface reflection light mixed therein may have a steep spectral distribution, but the transmission diffusion surface when the transmission diffusion surface is inserted Since the ratio of the sample-surface reflected light to the incident light is small compared to the illumination light, the wavelength dependence of the incident light is sufficiently monotonous and gentle, and satisfies the above conditions.

  According to the seventh aspect of the present invention, the optical path change for taking in the reference light can be performed by inserting a transmission diffusing surface having a wide allowable range of position and angle into the reference surface without using a special optical system. In addition, since a single channel polychromator can be used as the light receiving means, the configuration becomes simple and the cost can be reduced.

  According to the eighth aspect of the present invention, the sample surface illumination light and the reference surface incident light have a high correlation, and the reference light having a high correlation with the sample surface illumination light can be obtained. Thereby, the change of diffuse illumination light can be correct | amended correctly, and a highly stable measurement is attained.

(Overall description of the reflection characteristic measuring device)
FIG. 1 is a schematic sectional view showing an example of a reflection characteristic measuring apparatus according to the present invention. As shown in FIG. 1, in the reflection characteristic measuring apparatus 100, a predetermined number of sample surfaces 1 of a measurement sample are arranged on a circumference centered on a normal (sample surface normal) 1n of the sample surface 1, for example. Illumination is performed from a direction inclined at an angle of about 45 ° with respect to the sample surface normal 1n (hereinafter referred to as a direction of 45 °) by illumination light (illumination light I ₀ described later) from the light source 2 formed of an incandescent bulb. A component 1s in the sample surface normal 1n direction (hereinafter referred to as a sample surface reflected light component) of reflected light (sample surface reflected light) of the sample surface illuminated by the light source 2 passes through the reflecting mirror 6 and is single-channeled by the objective lens 7. For example, the spectral intensity in the wavelength region of about 360 to 700 nm is measured at a wavelength interval of 10 nm (about 10 nm pitch).

  On the other hand, the diffusion plate chopper 5 that is rotated by the rotational drive of the drive motor 10 is positioned on the optical path of the incident light to the single channel polychromator 8 (here, the position near the incident surface of the objective lens 7 on the optical path). A diffuser plate that diffuses the sample-surface reflected light component 1s is intermittently inserted into the reference surface 1r. By the way, the diffusion plate chopper 5 is a diffusion plate disk (chopper) in which a part of a circular diffusion plate that transmits and diffuses (diffuses and transmits) incident light, for example, is cut out, and is shown in a top view of FIG. In this way, it is composed of two diffusion plate blades 5d (blades) that divide the entire circumference into, for example, four equal parts and a notch 5e. As the diffusion plate chopper 5 rotates about the rotation center 5x, the diffusion plate blades 5d and the cutout portions 5e are alternately inserted (arranged) in the light beam incident on the objective lens 7. However, the diffusion plate chopper 5 does not have to be formed by cutting out a part of the diffusion plate. In short, the light is transmitted through the portion where the light is transmitted and diffused, such as the diffusion plate blade 5d, and the cut portion 5e. Any configuration may be used as long as it includes a portion that is not transmitted and diffused.

  A glass plate 4 orthogonal to the sample surface normal 1n is disposed at a substantially midpoint position between the sample surface 1 and the reference surface 1r. That is, the sample surface 1 and the reference surface 1r are symmetrical (mirror image) with respect to the glass plate 4. The glass plate 4 reflects about 20% of the radiated light beam 2a of the light source 2 by the two surfaces of the front and back surfaces of the glass plate 4 (about 10% on the front surface and about 10% on the back surface, the total of the front and back surfaces. The remaining 80% is transmitted. The reflected light 2r from the glass plate 4 of the light source 2 is directed to the reference surface 1r, and the transmitted light 2s illuminates the sample surface 1.

  In a state where the diffuser plate chopper 5 is rotated and the diffuser plate blade 5d is inserted into the reference surface 1r, the diffuser blade 5d is illuminated by the reflected light 2r, and a sample of diffused light transmitted by the diffuser blade 5d of the reflected light 2r is sampled. The component in the vicinity of the surface normal 1n (the normal direction of the diffuser blade 5d is the same direction as the sample surface normal 1n) passes through the reflecting mirror 6 and the objective lens 7 as reference light, and the entrance slit of the single channel polychromator 8 Is incident on. At the same time, the sample surface reflected light component 1s of the sample surface normal 1n of the sample surface reflected light passes through the glass plate 4 and reaches the diffusion plate blade 5d, and is mixed into the transmitted diffused light, that is, the reference light.

  On the other hand, in a state where the diffuser blade 5d is retracted from the reference surface 1r, the sample surface reflected light component 1s of the sample surface normal 1n of the sample surface reflected light is directly transmitted through the reflector 6 (diffused and diffused by the diffuser blade 5d). 1) It enters the objective lens 7. At this time, the reflected light 2r from the glass plate 4 is not transmitted and diffused because there is no diffusing plate blade 5d, and thus no component of the transmitted diffused light near the sample surface normal 1n direction is generated. The optical path change (optical path switching) from the reflection direction to the sample surface normal 1n is not performed, and the reference surface 1r passes through the reference surface 1n (the optical axis in the sample surface normal 1n direction) at about 45 °. Therefore, the light does not enter the objective lens 7 and the single channel polychromator 8.

  The control unit 9 includes a ROM (Read Only Memory) that stores each control program and the like, a RAM (Random Access Memory) that stores data for arithmetic processing and control processing, and a CPU that reads and executes the control program and the like from the ROM (Central processing unit) and the like, and controls the operation of the reflection characteristic measuring apparatus 100 as a whole. The control unit 9 controls the illumination operation of the light source 2 via the illumination drive circuit 2d, and drives and controls the drive motor 10 (for example, a pulse motor) via the motor control circuit 10d to rotate the diffusion plate chopper 5. The control unit 9 controls the single channel polychromator 8, and outputs of the single channel polychromator 8 when the diffusion plate blade 5 d is inserted and retracted by the rotation of the diffusion plate chopper 5 as reference signal data and sample signal data, respectively. receive. The controller 9 calculates the reflectance coefficient (spectral reflectance coefficient) of the sample in which the variation of the light source 2 is corrected from the received reference signal and sample signal data. The method for calculating the reflectance coefficient will be described in detail later. The control unit 9 receives a measurement start signal from a predetermined operation unit (not shown) connected to the control unit 9 and starts the measurement (control) operation.

(Measurement timing chart)
FIG. 3 is a timing chart regarding the reflection characteristic measurement operation of each part of the reflection characteristic measuring apparatus 100. In this embodiment, the diffusion plate chopper 5 rotates twice for each measurement by the illumination light of the light source 2, and the diffusion plate blade 5d and the notch 5e are inserted into the reference surface 1r four times with this rotation. . The control unit 9 receives the measurement start signal 201, turns on the light source 2 (increases the light output level indicated by reference numeral 202), activates the drive motor 10, and rotates the diffusion plate chopper 5. A portion denoted by reference numeral 203 indicates a section in which the notch 5e is inserted (arranged) in the reference surface 1r, and a portion denoted by reference numeral 204 indicates a section in which the diffusion plate blade 5d is inserted in the reference surface 1r. When the notch 5e is inserted, the sample light indicated by reference numeral 205 (sample light Is described later) is supplied to the single channel polychromator 8 and when the diffuser blade 5d is inserted, the reference light indicated by reference numeral 206 (reference light Ir described later) is applied to the single channel polychromator 8. Incident. Here, four incidents are respectively represented by Is1 to Is4 and Ir1 to Ir4. The control unit 9 waits for the light output of the light source 2 and the rotation of the diffusion plate chopper 5 to be stable, that is, after a rising period indicated by reference numerals 207 and 208, continuously captures spectral data from the single channel polychromator 8.

  The control unit 9 integrates the data by eliminating the transient state of the diffusion plate blade 5d and the notch portion 5e inserted by the mask information by the chopper position detection means (not shown) for detecting the rotational position of the diffusion plate chopper 5, Sample light data Ds1 to Ds4 indicated by reference numeral 209 and reference light data Dr1 to Dr4 indicated by reference numeral 210 for each insertion of the diffusion plate blade 5d and the notch 5e are obtained, and further, as final sample light data and reference light data, The integrated value Ds of the sample light data Ds1 to Ds4 and the integrated value Dr of the reference light data Dr1 to Dr4 are obtained.

(Principle of correction of illumination light fluctuation)
Next, the principle of correction of illumination light fluctuation will be described. The sample light Is and the reference light Ir in the following description are replaced with the integrated value Ds of the sample light data and the integrated value Dr of the reference light data, which are the respective measured values.

The notches 5e during insertion of the incident light to the single-channel polychromator 8 (a sample light Is), not only the sample surface reflected light, a portion of the illumination light I ₀ are mixed, whereas, diffusion In the incident light when the plate blade 5d is inserted, not only the illumination light I ₀ (not only the 20% reflected light of the illumination light I _{0 by} the glass plate 4) but also part of the sample surface reflected light is mixed. Yes. From this, the sample light Is and the reference light Ir can be expressed by the following equations (1) and (2). Note that the “part of the illumination light I ₀ ” in the former is, for example, scattered and reflected on the surface of the member or the cover body for fixing the position of the sample in the vicinity of the outer periphery of the sample surface 1, and passes through several paths. This is so-called stray light other than the sample-surface reflected light incident on the channel polychromator 8 and represents the second term (I ₀ * b _S ) on the right side of the equation (1). The latter “illumination light I ₀ ” indicates the second term (I ₀ * b _r ) on the right side of the equation (2).

Is = I ₀ * R * a _S + I ₀ * b _S (1)
Ir = I ₀ * R * _ar + I ₀ * b _r (2)
However, I ₀ : Illumination light, R: Reflectivity coefficients a _S and b _{S of the} sample: Coefficients a _r and b _r representing the contribution of the sample surface reflected light I ₀ * R and the illumination light I _{0 to} the sample light Is: A coefficient representing the contribution of the sample surface reflected light I ₀ * R and the illumination light I _{0 to} the reference light Ir, and the symbol “*” indicates multiplication (the same applies hereinafter).

Here, before explaining the correction of illumination light fluctuation by the reflection characteristic measuring apparatus 100 according to the present invention, the conventional correction (see the reflection characteristic measuring apparatus 920 shown in FIG. 16) will be described. The above formulas (1) and (2) are basically the same as before, but conventionally, the contribution of the sample surface reflected light to the reference light can be ignored (a _r ≈0, that is, I ₀ * R * a _r ≒ 0) Therefore, equation (2) is expressed by the following equation (3). This is because the reference light 902r from the light source 902 is directly incident on the double channel polychromator 921.
Ir = I ₀ * b _r (3)

At this time, the ratio r between the sample light Is and the reference light Ir is expressed by the following equation (4).
r (= Is / Ir) = R * a _S / b _r + b _S / b _r (4)

  In order to remove the second term on the right side (contribution of illumination light mixed in the sample light) in the above equation (4), dark calibration is performed prior to measurement.

<Dark calibration>
Measure the sample light (the sample light in this case is (Is) ₀ ) and the reference light (the reference light in this case is (Ir) ₀ ) in the absence of the sample (R = 0), and the ratio r _{Find 0} . The _{r 0} is expressed by the following equation (5).
r ₀ = (Is) ₀ / (Ir) ₀ = b _S / b _r (5)

<Measurement of sample x>
The sample light (sample light in this case is assumed to be sample x and the reflectance coefficient of this sample x is assumed to be Rx) and the sample light (in this case, the sample light is assumed to be (Is) x) and the reference light (the reference light in this case is referred to as the reference light) (Ir) and x) and the measured by determining the ratio _{r X.} Then, as shown in the following equation (6), the calculation of r _X -r ₀ (the correction of r _X using r ₀ obtained in the dark calibration as described above, that is, the calculation of r _X -r ₀ is performed. Dark correction).
_{r X -r 0 = (Is)} x / (Ir) x- (Is) 0 / (Ir) 0
= Rx * a _S / b _r (6)

From the above equation (6), the reflectance coefficient Rx is obtained as shown in the following equation (7).
Rx = (r _X −r ₀ ) * C (7)
However, C: Calibration coefficient (= b _r / a _S )
This calibration coefficient C is obtained by white calibration.

<White calibration>
The r _W of a white reference surface having a known reflectance coefficient Rw is measured, and the calibration coefficient C is obtained by the following equation (8).
_{C = R W / (r W} -r 0) ··· (8)

Next, the principle of correction in the present invention will be described. In the technique of the present invention, since the contribution a _r of the sample light to the reference light cannot be ignored, the ratio r of the sample light to the reference light is expressed by the following equation (9).
r = Is / Ir = (R * a _S + b _S ) / (R * a _r + b _r )
= (R + B _S ) / (R * A _r + B _r ) (9)
However, A _r = a _r / a _S , B _r = b _r / a _S , B _S = b _S / a _S , and in order to convert the ratio r into the reflectance coefficient R, these constants A _r , B _r and _{B S} must be known. First, _Ar is determined by dark calibration and white calibration performed immediately thereafter.

<Dark calibration>
The sample light (Is) ₀ and the reference light (Ir) ₀ are measured in the absence of the sample (R = 0) to obtain the ratio r ₀ (see the following formulas (10), (11) and (12)) .
(Is) ₀ = I ₀ * b _S (10)
(Ir) ₀ = I ₀ * b _r (11)
r ₀ = (Is) ₀ / (Ir) ₀ = B _S / B _r (12)

<White calibration>
Subsequently, a sample light of a white reference surface having a known reflectance coefficient Rw (the sample light in this case is (Is) w) and a reference light (the reference light in this case is (Ir) w) Measure (see formulas (13) and (14) below).
(Is) w = I ₀ * Rw * a _S + I ₀ * b _S (13)
_{(Ir) w = I 0 *} Rw * a r + I 0 * b r ··· (14)

If there is no change in the illumination light I ₀ between the two measurements of the dark calibration and the white calibration, the sample light (Is) ₀ data and the reference light (Ir) ₀ data at the time of dark calibration are respectively reduced (dark the corrected) sample light of the white reference plane (is) w and (Ir) ratio _{r W} of w ', can be obtained _{a r} from the following equation (15).
_{r W '= [(Is)} w- (Is) 0] / [(Ir) w- (Ir) 0]
= A _S / _ar = 1 / A _r (15)

B _r and B _S can be obtained by a ratio r _W shown in the following equation (16) in which dark correction is performed for white calibration performed prior to measurement.
r _W = (Is) w / (Ir) w = (Rw + B _S ) / (Rw * A _r + B _r ) (16)

Since A _r is known, from the equation (12) and Equation (16), the following (17), can be obtained _{B r} and _{B S} as shown in (18).
B _r = Rw * (1−A _r * r _W ) / (r _W −r ₀ ) (17)
B _S = r ₀ * B _r (18)

<Measurement of sample x>
The ratio r _X of the sample x expressed by the above equation (9) is converted into the reflectance coefficient Rx by the following equation (19) using the A _r , B _r and B _S obtained above.
_{Rx = (r X * B r} -B S) / (1-r X * A r) ··· (19)

Request _{A r (10) ~ (15} ) equation, a change of the illumination light between the dark calibration and white calibration performed continuously is assumed that negligible, incandescent bulbs, as in this embodiment The light source such as has a very small change in a short time and satisfies this assumption. The spectral reflectance coefficient can be obtained by obtaining the reflectance coefficient Rx for each wavelength. In addition, after obtaining the constants A _r , B _r and B _S by the above, it is possible to correct a change in the system including the processing circuit due to a temperature change or the like by performing white calibration in the related art. it can. In this case, the reflectance coefficient Rx of the sample is obtained by the following equation (20) using the calibration coefficient C.
_{Rx = C * (r X *} B r -B S) / (1-r X * A r) ··· (20)

The calibration coefficient C is calculated from the reflectance coefficient Rw ′ obtained by the above equation (19) by measuring a white reference surface having a known reflectance coefficient Rw and the following known reflectance coefficient Rw (21) It is calculated by the formula.
C = Rw / Rw ′ (21)

(Explanation of measurement operation flow)
<Overall flow>
FIG. 4 is a flowchart showing an overall flow of the reflection characteristic measurement operation by the reflection characteristic measuring apparatus according to the present invention. The reflection characteristic measuring apparatus according to the present invention reaches the sample measurement through the steps shown in the overall flow. In this flow, the conventional white calibration (white recalibration) is used together, and the spectral reflectance coefficient Rx (λ) of the sample is obtained by the above equation (20). First, the three constants A _r , B _r and B _S in the above equation (19) are obtained and stored for each wavelength (step S1). These constants are necessary when calculating the spectral reflectance coefficient Rx (λ) of the sample by the above equation (20). Next, white recalibration is performed (step S2). Then, the sample is measured (step S3).

<Basic measurement routine>
FIG. 5 is a flowchart showing an example of the basic measurement operation. In any of the dark calibration, the white calibration, and the sample measurement, the spectral intensities Is (λ) and Ir (λ) of the sample light and the reference light are measured by a basic measurement routine (corresponding to steps S22, S32, and S62 described later). . First, the control unit 9 receives the measurement start signal, turns on the light source 2, and starts rotating the diffusion plate chopper 5 (step S11). After a time required for stabilization of the illumination light and the rotation of the diffusion plate chopper 5 (step S12), after these have stabilized, the output of the single channel polychromator 8 when the diffusion plate blade 5d is retracted from the reference surface 1r. To measure and store the spectral intensity Is (λ) of the sample light (step S13). Further, the spectral intensity Ir (λ) of the reference light is measured from the output of the single channel polychromator 8 when the diffusing plate blade 5d is inserted into the reference surface 1r (step S14). The spectral intensity Ir (λ) of the reference light is subjected to a moving average along the wavelength, and the result is changed to Ir (λ), which is stored (step S15). The light source 2 is turned off and the rotation of the diffusion plate chopper 5 is stopped (step S16).

  In the following description, in order to avoid complications, the above Is (λ) and Ir (λ) are referred to as Is and Ir, respectively. In addition, the other symbolized amounts are based on this, and in actuality, these amounts are all obtained for each wavelength.

<Dark calibration routine>
FIG. 6 is a flowchart illustrating an example of the dark calibration operation. Dark calibration is performed when a constant is set. First, an optical trap that absorbs illumination light almost completely is disposed on the sample mounting surface (step S21). By the basic measurement routine, spectral intensities Is and Ir of the sample reflected light and the reference light are obtained (step S22). These Is and Ir are stored as (Is) ₀ and (Ir) ₀ , respectively (step S23). Then, the ratio r ₀ (= (Is) ₀ / (Ir) ₀ ) is obtained and stored (step S24).

<White calibration routine>
FIG. 7 is a flowchart showing an example of the white calibration operation. White calibration is performed when a constant is set and when a sample is measured. First, a white reference sample having a known spectral reflectance coefficient Rw is placed on the sample placement surface (step S31). By the basic measurement routine, spectral intensities Is and Ir of the sample reflected light and the reference light are obtained (step S32). These Is and Ir are stored as (Is) w and (Ir) w, respectively (step S33). Then, the ratio r _W (= (Is) w / (Ir) w) is obtained and stored (step S34).

<Constant setting flow>
FIG. 8 is a flowchart showing an example of the constant setting operation. First, dark calibration is performed by the dark calibration routine to obtain (Is) ₀ , (Ir) ₀ and r ₀ (step S 41). Subsequently performs white calibration by the white calibration routine, get (Is) w, (Ir) w and _{r W} (step S42). Next, the ratio r _W ′ is obtained by r _W ′ = [(Is) w− (Is) ₀ ] / [(Ir) w− (Ir) ₀ ] (see the above equation (15)) (step S43). Then, the three constants A _r , B _r and B _S are obtained and stored according to the following equations, and the initial value “1” of the calibration coefficient C is stored (step S44).
A _r = 1 / r _W ′; this equation is defined as equation (15) ′ (see equation (15) above)
B _r = Rw * (1−A _r * r _W ) / (r _W −r ₀ ) (see the above equation (17))
B _S = r ₀ * B _r (see the above equation (18))
C = 1

<White recalibration flow>
FIG. 9 is a flowchart showing an example of the white recalibration operation. The white recalibration is to correct a change in the system after setting the constant, and the above equation (19) is used by using the known spectral reflectance coefficient of the white reference sample and the set constants A _r , B _r and B _S. The calibration coefficient C is obtained and stored from the ratio of the measured value of the white reference sample to the measured spectral reflectance coefficient of the white reference sample. White recalibration for correcting short-term changes is performed more frequently than constant setting for setting a constant specific to the optical system. First, the white calibration by the white calibration routine, get _{r W} (step S51). Next, the reflectance coefficient Rw ′ at that time is obtained by Rw ′ = (r _W * B _r −B _S ) / (1−r _W * A _r ) (see the above equation (19)) (step S52). Then, the calibration coefficient C is obtained and stored by C = Rw / Rw ′ (see the above equation (21)) (step S53).

<Sample measurement flow>
FIG. 10 is a flowchart illustrating an example of the sample measurement operation. Sample measurement is usually performed after white recalibration. When the measurement is performed after setting the constant, the calibration coefficient C = 1 (initial value). First, a sample is placed on the sample mounting surface (step S61). Spectral intensities Is and Ir of the sample reflected light and the reference light are obtained by the basic measurement routine (step S62). A ratio r _X (= Is / Ir) is obtained from Is and Ir (step S63). Then, the reflectance coefficient Rx of the sample is obtained by Rx = C * (r _X * B _r −B _S ) / (1−r _X * A _r ) (see the above equation (20)) and output (step) S64).

  In the above embodiment, the optical path change for taking in the reference light is performed by using the diffuser plate chopper 5 (50). In short, if the optical path change (optical path conversion) is possible, the diffuser plate Any configuration, not limited to a chopper, may be used. For example, a prism or mirror (or a combination thereof) capable of changing an optical path (switching the direction of a light beam) using light reflection or light refraction. An optical system (optical path changing means) configured by In this case, in FIG. 1, when the optical system is inserted into the reference surface 1r, the optical path of the reflected light 2r by the glass plate 4 of the light source 2 is changed by the optical system, and the reflecting mirror 6 and the objective are used as reference light. When the light enters the entrance slit of the single channel polychromator 8 through the lens 7 and the optical system is retracted from the reference surface 1r, the reflected light 2r passes through the reference surface 1r at an angle of about 45 ° as described above. The light does not enter the objective lens 7 and the single channel polychromator 8.

  As described above, according to the reflection characteristic measuring apparatus 100 (200, 300) according to the present embodiment, the sample surface 1 is illuminated by the light source 2 from a predetermined angle (about 45 ° in this case) with respect to the sample surface normal 1n. The single channel polychromator 8 (light receiving means) receives the sample surface reflected light (sample surface reflected light component 1s) in the direction of the sample surface normal 1n, in which the illumination light from the light source 2 is reflected by the sample surface 1. The optical path is changed with respect to the incident light on the reference surface by the optical path changing means (diffuser plate chopper 5) configured to be inserted into and retracted from the reference surface 1r on the optical path of the incident light to the single channel polychromator 8. A part (reflected light 2r) of the illumination light (radiated light beam 2a) from the light source 2 is reflected toward the reference surface 1r by the glass plate 4 which is a symmetrical surface of the sample surface 1 and the reference surface 1r. The optical path changing means insertion / retraction operation and the illumination operation of the light source 2 are controlled, and the output information of the single channel polychromator 8 is processed. The single-channel polychromator 8 mainly receives sample surface reflected light when the optical path changing means is retracted from the reference surface 1r, and is directed toward the reference surface 1r by the glass plate 4 when the optical path changing means is inserted into the reference surface 1r. Part of the illumination light whose optical path has been changed by the optical path changing means so as to be reflected and incident on the single channel polychromator 8 (reflected light 2r; specifically, the reflected light 2r has its optical path changed and reflected. The light is incident on the mirror 6 and is mainly received in the normal direction of the optical path changing means, that is, the component in the sample surface normal 1n direction. Then, based on the output information of the single channel polychromator 8 at the time of insertion and retraction of the optical path changing means, the control unit 9 corrects the variation of the illumination light (radiated light beam 2a), that is, the variation of the sample surface illumination light. A reflection characteristic of 1 is calculated.

  Thereby, based on the reference light information highly correlated with the sample surface illumination light, the fluctuation of the sample surface illumination light can be accurately corrected, and a highly stable measurement is possible. In addition, a single-channel polychromator 8 can be used as the light receiving means, and the optical path change for taking in the reference light is performed by inserting the optical path changing means into the reference surface 1r, thereby simplifying the configuration and reducing the cost. Can do.

  Further, since the optical path changing means is a transmission diffusing surface for transmitting and diffusing light, the optical path changing for taking in the reference light by the optical path changing means does not use a special optical system, and the allowable range of position and angle is wide. The measurement can be performed by inserting the transmission diffusion surface into the reference surface, and a low-cost measuring device can be realized with a simpler configuration.

  Further, as shown in FIG. 2, the transmission diffusion surface is the diffusion plate blade 5d of the diffusion plate chopper 5 configured to be rotationally driven, and the diffusion plate blade 5d of the diffusion plate chopper 5 corresponds to the diffusion plate blade 5d. Since the diffusion plate transmits and diffuses incident light, insertion and retraction of the transmission diffusion surface with respect to the reference surface 1r can be easily realized with a simple configuration of the diffusion plate chopper 5 in which the blade is formed of a diffusion plate.

  Further, as shown in FIG. 11, the transmission diffusion surface transmits incident light (for example, incident light 20c, 22c) in a direction substantially 45 ° with respect to the normal line of the transmission diffusion surface, and the optical axis of the incident light and the transmission diffusion surface. Since the non-uniform transmission diffusion surface diffuses and diffuses so that the in-plane diffusion component including the normal line 521 is larger than the out-of-plane diffusion component, the non-uniform transmission diffusion surface impinges on the non-uniform transmission diffusion surface. The illuminated light can be efficiently incident on the single channel polychromator 8.

Further, the control unit 9 outputs the output information of the single-channel polychromator 8 at the time of insertion and withdrawal of the transmission diffusion surface and the correction coefficient (the calibration coefficient C and the constants A _r , B _r and B _S, etc.) given in advance. Using the information, a calculation process is performed to correct the influence of the sample surface reflected light incident on the transmission diffusion surface together with a part of the illumination light when the transmission diffusion surface is inserted, and the sample surface 1 in which the fluctuation of the illumination light is corrected Therefore, it is possible to remove the influence of the sample surface reflected light mixed in the reference light and perform highly accurate measurement.

  In addition, the reflection characteristic measuring apparatus 300 according to the present invention is disposed in the sample opening 301a by integrating sphere illumination means including an integrating sphere 301 including a light source 302, a sample opening 301a, and a measurement opening 301b. The sample surface 1 is diffusely illuminated, and the sample channel reflected light (sample surface reflected light component in a predetermined direction) is formed by the diffuse illumination light from the integrating sphere illumination unit reflected by the single sphere polychromator 8 (light receiving unit). 1s) is received through the measurement opening 301b. Further, the transmission diffusion surface is configured to be able to be inserted and retracted with respect to the reference surface 1r in the vicinity of the measurement opening 301b, and the control unit 9 performs the insertion and withdrawal operations of the transmission diffusion surface and the illumination operation of the integrating sphere illumination means. While being controlled, the output information of the single channel polychromator 8 is processed. The single-channel polychromator 8 mainly receives sample surface reflected light when the transmission diffusion surface is retracted from the reference surface 1r, and is inserted from the measurement opening 301b into the transmission diffusion surface when the transmission diffusion surface is inserted into the reference surface 1r. A part of the diffuse illumination light incident on is mainly received. Then, based on the output information of the single channel polychromator 8 at the time of insertion and retraction of the transmission diffusion surface, the control unit 9 calculates the reflection characteristics of the sample surface 1 in which the variation of the diffuse illumination light is corrected.

  As a result, the optical path for taking in the reference light can be changed by inserting the transmission diffusing surface having a wide position and angle tolerance into the reference surface 1r without using a special optical system, and as a light receiving means. Since the single channel polychromator 8 can be used, the configuration becomes simple and the cost can be reduced.

  In addition, since the sample opening 301a and the measurement opening 301b are disposed substantially at the counter electrode of the integrating sphere 301, and the light source 302 is disposed in the vicinity of the substantially symmetrical surface 310s of the sample opening 301a and the measurement opening 301b, the sample The surface illumination light and the reference surface incident light are highly correlated, and a reference light having a high correlation with the sample surface illumination light can be obtained, whereby the change of the diffuse illumination light can be accurately corrected, Highly stable measurement is possible.

In addition, this invention can take the aspect of (A)-(D) below.
(A) In the above embodiment, the amount of light incident on the diffusion plate (diffusion plate blade 5d) as the reference light is about 20% of the illumination light, and the S / N of the reference light measurement value is lower than the sample reflection light measurement value. It can happen that the accuracy of the reflectance coefficient measurement is lowered. If the spectral distribution of the reference light is monotonous and the wavelength dependence of the change is gradual, the S / N is improved by moving average along the wavelength, that is, by moving the spectral distribution measurement value over the wavelength. Can do. In the above embodiment, since the visible light source is an incandescent bulb, the condition that the spectral distribution of the reference light is monotonous is satisfied, but the sample light to be mixed can have a steep wavelength dependence, so that the S / N based on the moving average is obtained. Improvements can lead to large measurement errors. However, even if sample reflected light is mixed in the reference light, the wavelength dependence is moderate when the ratio is small, so that the moving average can improve the S / N. In consideration of this, in the reflection characteristic measuring apparatus 100 (200, 300), the control unit 9 performs a moving average with respect to the wavelength, that is, a single channel polychromator 8 at the time of insertion of a transmission diffusion surface in which the spectral distribution measurement value is moved with respect to the wavelength. , And the reflection information of the sample surface 1 in which the fluctuation of the illumination light is corrected are calculated using the output information of the sample channel 1 and the output information of the single channel polychromator 8 when the transmission diffusion surface is retracted. It is possible to improve the S / N of the output of the single channel polychromator 8 at the time of inserting the surface, and to improve the accuracy of the reflection characteristic measurement value of the sample surface 1.

  (B) Instead of the diffusion plate (diffusion plate blade 5d) of the diffusion plate chopper 50, for example, non-uniform diffusion plates (non-uniform diffusion surfaces) having diffusion characteristics as shown in FIG. 11, that is, diffusion plate blades 51d and 52d are used. The diffusion plate chopper 50 shown in FIG. 12 may be used. The diffusing plate blade in the diffusing plate chopper 50 (which will be described here using the diffusing plate blade 52d) is incident light on the diffusing plate blade 52d as shown in a top view indicated by reference numeral 510 and a side view indicated by reference numeral 520 in FIG. That is, the incident light 20c and 22c from the direction of approximately 45 ° with respect to the normal line 521 of the diffusion plate blade 52d is diffused in a so-called elliptical shape so as to be large in the specific direction 52a and small in the direction orthogonal thereto. (This state of diffusion is represented by a circle indicated by reference numeral 52e, for example). However, the specific direction refers to an in-plane direction (in-plane) including, for example, the optical axis (incident direction) of the incident light 20c and 22c and the normal line (normal direction) of the diffusion plate blade 52d (transmission diffusion surface). Direction).

  Therefore, in the diffusion plate chopper 50 using the diffusion plate blades 51d and 52d made of this non-uniform diffusion plate, as shown in the top view of FIG. 12, four visible light sources 20 to 23 are arranged in four directions orthogonal to each other. When the two diffusion plate blades 51d and 52d are inserted into the reference surface 1r, the long axis of elliptical diffusion (referred to as the long axes 51a and 52a) is incident light according to the rotation of the diffusion plate chopper 50. 20c, 22c or the direction of the incident light 21c, 23c (so that the long axis 52a matches the incident light 20c and 22c so that the long axis 51a matches the incident light 21c and 23c). By arranging the non-uniform diffuser plate, incident light 20c to 23c on the diffuser plate is efficiently incident on the objective lens 7 and further on the single channel polychromator 8. Door can be. However, unlike the case of using the normal diffusion plate described above, it is necessary to stop the elliptical diffusion axis (long axis) substantially in line with the direction of visible light, and strict control of the diffusion plate chopper 50 is necessary. It becomes.

  (C) In the reflection characteristic measuring apparatus 100, as shown in FIG. 13, the reference surface 1r is disposed between the objective lens 7 and the single channel polychromator 8 (the reference surface 1r is the position of the objective lens 7 in the incident light optical path). Reflection characteristic measurement in which the diffusion plate chopper 5 is arranged so that the diffusion plate blade 5d is inserted into and retracted from the reference surface 1r, similarly to the reflection characteristic measurement device 100. The apparatus 200 may be used. In FIG. 13, only one light source 2 is shown on the right side in the figure. However, the present invention is not limited to this, and the same configuration as that of the reflection characteristic measuring apparatus 100 is provided.

  (D) The technique in the above embodiment can be applied to a reflection characteristic measuring apparatus 300 that performs integrating sphere illumination as shown in FIG. In this case, the radiated light beam 302a of the light source 302 controlled by the control unit 9 through the control circuit 102d is diffused by the integrating sphere 301 having an inner wall (for example, an inner wall coated with white paint) having high reflectivity and high diffusion characteristics. The sample surface 1 disposed in the sample opening 301a of the integrating sphere 301 is illuminated by the multiple reflected light as the diffuse illumination light 302s. A sample surface reflected light component 1s that is substantially parallel to the sample surface normal 1n of the reflected light from the illuminated sample surface passes through the measurement opening 301b that is positioned substantially at the counter electrode of the sample opening 301a, and the reflecting mirror 6 and the objective lens. 7 and converges and enters the single channel polychromator 8. In this modification (D), the vicinity of the measurement opening 301b becomes the reference surface 1r, and the diffusion plate chopper 5 is positioned immediately after the measurement opening 301b (the rear position on the reflecting mirror 6 side closest to the measurement opening 301b). The diffusion plate blade 5d) is inserted and retracted. In this case as well, as in the modified embodiment (C), the diffuse illumination light 302r incident on the diffuser plate is inserted when the diffuser plate is inserted, and the sample reflected light is mainly applied to the objective lens 7 and the single channel polychromator 8 when the diffuser plate is retracted. Incident. As shown in FIG. 14, the sample illumination light (diffuse illumination light 302s) and the sample illumination light (diffuse illumination light 302s) are arranged by arranging the light source 302 in the vicinity of the substantially symmetrical plane 310s of the sample opening 301a and the measurement opening 301b located at the substantially counter electrode. Reference surface incident light (diffuse illumination light 302r) with high correlation can be obtained.

It is a schematic structure sectional view showing an example of a reflective characteristic measuring device concerning the present invention. It is a top view which shows an example of a diffusion plate blade. It is a timing chart regarding the reflection characteristic measurement operation | movement of each part of the said reflection characteristic measuring apparatus. It is a flowchart which shows the whole flow of the reflection characteristic measurement operation | movement by the said reflection characteristic measuring apparatus. It is a flowchart which shows an example of a basic measurement operation | movement. It is a flowchart which shows an example of dark proofreading operation | movement. It is a flowchart which shows an example of white calibration operation | movement. It is a flowchart which shows an example of a constant setting operation | movement. It is a flowchart which shows an example of white recalibration operation | movement. It is a flowchart which shows an example of sample measurement operation | movement. It is a schematic diagram for demonstrating the modification of a diffusion plate blade. It is a schematic diagram for demonstrating the modification of a diffusion plate blade. It is schematic structure sectional drawing which shows the deformation | transformation aspect of a reflection characteristic measuring apparatus. It is schematic structure sectional drawing which shows the deformation | transformation aspect of a reflection characteristic measuring apparatus. It is a figure which shows the conventional reflection characteristic measuring apparatus. It is a figure which shows the conventional reflection characteristic measuring apparatus. It is a figure which shows the conventional reflection characteristic measuring apparatus.

Explanation of symbols

1 Sample surface 1n Sample surface normal 1r Reference surface 1s Sample surface reflected light component (sample surface reflected light)
2 Light source (illumination means)
2a, 302a Radiant beam 2d Illumination drive circuit 2r Reflected light (part of illumination light reflected on the partially reflecting surface according to claim 1)
2s Transmitted light 4 Glass plate (partial reflection surface)
5 Diffusion plate chopper (transmission diffusion surface, chopper, optical path changing means)
5d diffusion plate blade (blade, transmission diffusion surface)
5e Notch 6 Reflector 7 Objective lens 8 Single channel polychromator (light receiving means)
9 Control unit (control calculation means)
10 drive motor 10d motor control circuit 50 diffusion plate chopper (chopper, non-uniform transmission diffusion surface)
100, 200, 300 Reflection characteristic measuring device 301 Integrating sphere (integrating sphere illumination means)
301a Sample opening 301b Measurement opening 302 Light source (integral sphere illumination means)
310s plane of symmetry (symmetric plane of claim 8)

Claims (8)

Illuminating means for illuminating the sample surface from a predetermined angle with respect to the sample surface normal,
A light receiving means for receiving the sample surface reflected light in the normal direction of the sample surface reflected by the illumination surface by the illumination means;
An optical path changing unit configured to change an optical path for the reference surface incident light configured to be inserted into and retracted from a reference surface on an optical path of the incident light to the light receiving unit;
A partially reflective surface that is a symmetrical surface of the sample surface and the reference surface, and reflects a part of the illumination light from the illumination means toward the reference surface;
The optical path changing means is inserted and retracted and the lighting means is controlled to control the lighting operation, and the control calculating means for calculating the output information of the light receiving means,
The light receiving means mainly receives the sample-surface reflected light when retracted from the reference surface of the optical path changing means, and is reflected by the partial reflection surface and inserted into the reference surface of the optical path changing means. Mainly receiving a part of the illumination light whose optical path has been changed by the optical path changing means so as to be incident on the means,
The control calculation means calculates the reflection characteristic of the sample surface in which the variation of the illumination light is corrected based on the output information of the light receiving means when the optical path changing means is inserted and withdrawn. measuring device.   2. The reflection characteristic measuring apparatus according to claim 1, wherein the optical path changing means is a transmission diffusion surface that transmits and diffuses light.   3. The reflection characteristic measuring apparatus according to claim 2, wherein the transmission diffusing surface is a chopper blade configured to be rotationally driven, and includes a diffusion plate that transmits and diffuses incident light to the blade.   The transmission diffusing surface has incident light in a direction of approximately 45 ° with respect to the normal line of the transmission diffusion surface, and an in-plane diffusion component including the optical axis of the incident light and the normal line of the transmission diffusion surface diffuses out of plane. 4. The reflection characteristic measuring apparatus according to claim 2, wherein the reflection characteristic measuring surface is a non-uniform transmission diffusion surface that diffuses and diffuses so as to be larger than a component.   The control calculation means uses the output information of the light receiving means at the time of insertion and retraction of the transmission diffusion surface and information on a correction coefficient given in advance, together with a part of the illumination light at the time of insertion of the transmission diffusion surface. 5. The reflection characteristic of the sample surface in which the fluctuation of the illumination light is corrected is calculated by performing arithmetic processing for correcting the influence of the sample surface reflected light incident on the transmission diffusion surface. The reflection characteristic measuring apparatus described in 1.   The control calculation means uses the output information of the light receiving means when the transmission diffusing surface is inserted and the output information of the light receiving means when the transmission diffusing surface is retracted, which is moving averaged with respect to wavelength, to change the illumination light. The reflection characteristic measuring apparatus according to claim 2, wherein the reflection characteristic of the corrected sample surface is calculated. An integrating sphere illuminating means configured to diffusely illuminate a sample surface disposed in the sample opening, the integrating sphere including a light source, a sample opening, and a measurement opening;
Light receiving means for receiving the sample surface reflected light in a predetermined direction formed by reflecting the diffuse illumination light by the integrating sphere illuminating means on the sample surface through the measurement aperture;
A transmission diffusion surface configured to be inserted into and retracted from a reference surface in the vicinity of the measurement opening;
Controlling the insertion and retraction operation of the transmission diffusion surface and the illumination operation of the integrating sphere illumination means, and a control calculation means for calculating the output information of the light receiving means,
The light receiving means mainly receives the sample-surface reflected light when the transmission diffusion surface is retracted from the reference surface, and enters the transmission diffusion surface from the measurement opening when the transmission diffusion surface is inserted into the reference surface. Mainly receiving a part of the diffuse illumination light,
The control calculation means calculates the reflection characteristic of the sample surface in which the variation of the diffuse illumination light is corrected based on the output information of the light receiving means when the transmission diffusion surface is inserted and retracted Characteristic measuring device. The sample opening and the measurement opening are located at substantially the opposite electrode of the integrating sphere,
8. The reflection characteristic measuring apparatus according to claim 7, wherein the light source is positioned in the vicinity of a substantially symmetrical plane between the sample opening and the measurement opening.

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