JP2007209927A - Vibrator for ultrasonic cleaning - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that the bar-shaped horn of current ultrasonic generating apparatuses tends to damage to-be-cleaned articles having a fine pattern because of unevenness of ultrasonic waves generated on slopes. <P>SOLUTION: An expanded part 7a is formed at one end of the bar-shaped horn 7, and a piezoelectric vibrator 8 is mounted on the expanded part 7a. The other end of the horn 7 is cut obliquely at a position more distant than the focus point of the horn 7 to form a slope 7b. A hollow part 7c is formed at an appropriate point on the central axis between the piezoelectric vibrator 8 and the slope 7b of the horn 7. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an ultrasonic cleaning vibrator configured such that ultrasonic waves from a piezoelectric vibrator are not concentrated on the center of an inclined surface by a hollow portion formed in a rod-shaped horn.

  Conventionally, as shown in FIGS. 3 and 4, one end of the rod-shaped horn 1 is cut obliquely to form an inclined surface 1 a, and a huge portion 1 b is formed at the other end of the rod-shaped horn 1. The vibrator case 3 is fixed to the enormous portion 1b of the rod-shaped horn 1 with the screw 6 via the packing 4 so as to cover the piezoelectric vibrator 2, and the end of the vibrator case 3 is attached. There has been proposed an ultrasonic cleaning device in which a cable 5 penetrates the part and a cord 5a of the cable 5 is connected to the piezoelectric vibrator 2.

  In the conventional ultrasonic cleaning apparatus configured as described above, the inclined surface 1a of the rod-shaped horn 1 is mounted so as to face the object to be cleaned 9 such as a substrate with a minute gap therebetween, and the inclined surface 1a of the rod-shaped horn 1 is cleaned. When the cleaning liquid 11 is introduced from the cleaning liquid inlet 10 between the minute gaps of the body 9 and an oscillation output is applied to the piezoelectric vibrator 2 from an oscillator (not shown), the ultrasonic wave irradiated from the piezoelectric vibrator 2 is a rod-shaped horn. It is possible to clean the dirt and dirt adhering to the surface of the body 9 to be cleaned through the cleaning liquid 11 transmitted to the inclined surface 1a and flowing between the inclined surface 1a and the body 9 to be cleaned. .

In the bar-shaped horn 1 of this conventional ultrasonic cleaning apparatus, as shown in FIG. By making the intersection between the central axis of the transmission body and the center of the ultrasonic radiation surface and making the angle of the inclined surface 1a to be 100 to 170 degrees, the inclined surface 1a can be uniformly and softly formed. Although ultrasonic waves with high intensity can be generated, the uniformity of ultrasonic waves generated on the inclined surface 1a is insufficient, and the intensity of the central portion is large. There was a problem that damage was generated in the object to be cleaned.
Japanese Patent Application No. 2005-153369

  The problem to be solved is that the conventional horn of a ultrasonic cleaning apparatus has a problem that the ultrasonic wave generated on the inclined surface is not uniform, so that the object to be cleaned having a fine pattern is damaged.

  In the present invention, the attachment end portion is attached with a piezoelectric vibrator at one end, the inclined surface is formed as a surface that emits ultrasonic waves at the other end, and the rod-shaped horn is a central axis between the piezoelectric vibrator and the inclined surface. It is formed by an ultrasonic wave propagating body provided with a hollow portion formed above, and ultrasonic waves irradiated from the piezoelectric vibrator are dispersedly irradiated onto the inclined surface by the hollow portion, and the inclined surface is cleaned with a fine pattern. The object to be cleaned is washed by flowing a cleaning liquid from the side of the inclined surface.

  In the ultrasonic cleaning apparatus of the present invention, a hollow portion is formed on the central axis of the rod-shaped horn, an inclined surface is formed at a position far from the focal position of the rod-shaped horn, and the ultrasonic wave irradiated from the piezoelectric vibrator is the hollow portion. Dispersed and distributedly irradiated on the inclined surface, ultrasonic waves generated at the center of the inclined surface can be further reduced, and the ultrasonic wave on the inclined surface is made uniform, thereby damaging the object to be cleaned. There is no advantage.

  In the present invention, a piezoelectric vibrator is attached to the attachment end of the rod-shaped horn, and a hollow portion is formed on the central axis of the rod-shaped horn, thereby dispersing and irradiating ultrasonic waves emitted from the piezoelectric vibrator. As a result, the intensity distribution of the ultrasonic wave applied to the inclined surface at the other end of the rod-shaped horn is made uniform so that the object to be cleaned is not damaged.

  FIG. 1 is a side view of an ultrasonic cleaning vibrator according to an embodiment of the present invention. A huge portion 7a is formed at one end of a rod-shaped horn 7, and a piezoelectric vibrator 8 is attached to the huge portion 7a. One end of the rod-shaped horn 7 is cut obliquely at a position far from the focal position of the rod 7 to form an inclined surface 7b, and the central axis of the rod-shaped horn 7 between the piezoelectric vibrator 8 of the rod-shaped horn 7 and the inclined surface 7b. A hollow portion 7c is formed at an appropriate position above.

  In the ultrasonic cleaning vibrator of this embodiment configured as described above, the ultrasonic wave emitted from the piezoelectric vibrator 8 is radiated from the ultrasonic vibrator 8 that is out of the hollow portion as shown in FIG. The ultrasonic waves B <b> 1 and B <b> 2 are irradiated linearly on the inclined surface 7 b, and the ultrasonic wave B <b> 3 radiated from a portion slightly deviated from the central portion of the piezoelectric vibrator 8 is reflected by the hollow portion 7 c of the rod-shaped horn 7. In addition, a part of the ultrasonic wave B4 reflected by the side surface of the rod-shaped horn 7 and irradiated to the end of the inclined surface 7b and reflected by the hollow part 7c is above the hollow part 7c. The ultrasonic waves B5 and B6 reflected and irradiated to the enormous portion 7a of the rod-shaped horn 7 and radiated at the relatively central portion of the piezoelectric vibrator 8 are reflected and inclined by the side surface in the vicinity of the hollow portion 7c of the rod-shaped horn 7. The pressure is applied such that the surface 7c is irradiated and the inclined surface 7b is irradiated. Since the ultrasonic waves B1 to B6 radiated from the body vibrator 8a are distributed and irradiated onto the inclined surface 7b, the ultrasonic waves generated at the center of the inclined surface 7b can be further reduced, and the uniformity of the ultrasonic waves on the inclined surface 7b. By improving the above, there is an advantage that the object to be cleaned is not damaged.

  In the ultrasonic cleaning apparatus of this embodiment configured as described above, the inclined surface 7b of the rod-shaped horn 7 is attached to the object to be cleaned such as a substrate with a minute gap therebetween, and the inclined surface 7b of the rod-shaped horn 7 is attached. When a cleaning liquid is introduced between the minute gaps of the object to be cleaned and an oscillation output from an oscillator (not shown) is applied to each of the plurality of piezoelectric vibrators 8, the ultrasonic wave irradiated from the piezoelectric vibrator 8 is converted into a rod-shaped horn 7. The dirt and dirt adhering to the surface of the object to be cleaned can be cleaned via the cleaning liquid that is transmitted to the inclined surface 7b and flows between the inclined surface 7b and the object to be cleaned.

  In the above embodiment, the hollow portion formed in the rod-shaped horn 7 may be a spherical hollow portion or an oval hollow portion.

It is a side view of the vibrator for ultrasonic cleaning of the example of the present invention. It is a figure for demonstrating the operation | movement of the ultrasonic wave irradiated from one ultrasonic transducer | vibrator of the rod-shaped horn of FIG. It is a side view of the conventional ultrasonic substrate apparatus. It is a side view of the ultrasonic cleaning apparatus of FIG. It is a figure for demonstrating operation | movement of the ultrasonic wave irradiated from the ultrasonic transducer | vibrator of the conventional ultrasonic substrate apparatus.

Explanation of symbols

7 Bar-shaped horn 7a Enlarged part 7b Inclined surface 7c Hollow part 8 Piezoelectric vibrator

Claims (4)

  An attachment end having a piezoelectric vibrator attached to one end, an inclined surface formed as a surface for emitting ultrasonic waves to the other end, and a central axis between the piezoelectric vibrator and the inclined surface It is composed of a rod-shaped horn formed by an ultrasonic wave propagation body provided with a hollow portion, and ultrasonic waves irradiated from the piezoelectric vibrator are dispersedly irradiated onto the inclined surface by the hollow portion, and the inclined surface is formed into a fine pattern. An ultrasonic cleaning vibrator, wherein the ultrasonic cleaning vibrator is mounted so as to be opposed to the object to be cleaned, keeping a minute interval, and flowing the cleaning liquid from the side of the inclined surface to clean the object to be cleaned.   The ultrasonic cleaning vibrator according to claim 1, wherein the hollow portion formed in the rod-shaped horn is a spherical body.   The ultrasonic cleaning vibrator according to claim 1, wherein the hollow portion formed in the rod-shaped horn is an ellipsoid.   The ultrasonic cleaning vibrator according to claim 1, wherein the rod-shaped horn is made of quartz.

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