JP2007204776A - Apparatus for treating sheet and method for manufacturing sheet using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for treating a sheet, which can secure satisfactory treatment quality while maintaining such desirable sealability as not to cause liquid spill, with an inexpensive and simple apparatus structure, and to provide a method for manufacturing the sheet using the same. <P>SOLUTION: The apparatus for treating the sheet comprises: a treatment tank 31 which accommodates a treatment liquid 14 therein and is provided with an inlet and an outlet for the sheet; and two nip rolls 41 and 42 for nipping the sheet 32 arranged in the vicinities of an inlet and/or outlet of the treatment tank. The two rolls 41 and 42 are arranged so as to form gaps of 0.03 mm to 1 mm between an outer wall surface 39 of the treatment tank and themselves respectively. The outer wall surface 39 is arranged so as to form an angle of 60 degrees to 120 degrees against the transportation direction of the sheet. The method for manufacturing the sheet includes using the apparatus. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a sheet processing apparatus and a sheet manufacturing method using the same.

  An apparatus for processing a sheet using a processing liquid for continuously conveyed sheets, for example, a plurality of plating tanks containing a plating liquid as a processing liquid on the surface of a continuously conveyed plastic film. In the sheet processing apparatus in which a predetermined plating process is performed by passing, for example, slit-shaped inlets and outlets for sheet running are provided in each plating tank, but a large amount of plating solution is contained in the tank. In general, a liquid seal is applied so as not to flow out to the outside.

  FIG. 1 shows an example of an apparatus for performing copper (Cu) plating on a plastic film 1 (for example, a polyimide film) as a base material as an example of such an apparatus. FIG. 1 is a plan view schematically showing a schematic configuration of a sheet processing apparatus. The film 1 conveyed from the unwinding unit 2 in the base material traveling direction is fed by the feeding unit 3 (feeding process) and then subjected to a plating process (plating process) by the plating unit 5 including the plating tank 4. The The power feeding step and the plating step are sequentially repeated a plurality of times to form a plating layer having a target thickness, and after a predetermined plating layer is formed, the winding unit 6 winds up. In the power feeding unit 3, for example, as shown in FIG. 2, a power feeding roll 13 (for example, made of surface copper) is formed between the transport roll 11 (for example, made of surface SUS) and the transport roll 12 (for example, made of surface SUS). And is fed to the plating surface 10 of the film 1. In the plating unit 5, for example, as shown in FIG. 3, the film 1 is continuously passed through a plating tank 4 containing a plating solution 14 (for example, copper sulfate) and a copper lump 15. In order to suppress the outflow amount of the plating solution 14 to the outside, a liquid sealing mechanism is provided at the inlet and outlet of the plating tank 4. It is known to use a pair of liquid seal rolls 7 as shown in FIG. 3 for this liquid seal mechanism (for example, Patent Documents 1 to 5). In the sheet processing apparatus of FIG. 1, the film 1 is conveyed from the unwinding unit 2 to the winding unit 6 while maintaining the width direction in a substantially vertical direction. The uniformity of plating is ensured (hereinafter, conveying while keeping the sheet width direction substantially vertical) is called vertical conveyance).

  In order to ensure the liquid sealing property at the inlet and / or outlet of the plating tank 4 as the processing tank, a mechanism as shown in FIG. That is, along the inner wall surface of the treatment tank 4 at the inlet and / or outlet of the plating tank 4 filled with the plating solution 14, or as shown in the example shown in FIG. A small chamber 29 is formed, and two (a pair of) surfaces of sponge rolls 21 are provided inside the outer wall surface 25 to nip the base material 22 to which both sponge rolls 21 are conveyed, and the sponge The roll 21 is arranged so as to be close to the wall surface A (25), and liquid sealing is performed. (A relatively large gap is formed between the wall surface B (26)). In this case, the clearance between the rolls 21 is fixed. Note that the wall surfaces A and B refer to the surface on which the lead lines are exposed in FIG.

  Further, in Patent Document 2, slits 84 and 85 are formed on both end walls of the plating tank 81 as shown in FIG. 8, and two seal rolls 82 are disposed on the inner side of the wall. There has been proposed a liquid leakage prevention device in a continuous plating apparatus, which is arranged in a sandwiched state, is movable in a direction perpendicular to the axis, and has a circumferential surface that is detachable. For example, a soft vinyl chloride + groove structure is adopted on the roll surface. The seal roll 82 can be separated from and attached to the tank wall surfaces 86 and 87, and is in close contact with the sheet 80 by frictional force, and is further in close contact with the wall surfaces 86 and 87 by hydraulic pressure.

  However, in such a liquid seal mechanism, the liquid pressure at the inlet and / or outlet is lowered by the outflow of liquid, so that the roll 21 bends in the direction of the wall surface A (25) (shown by an arrow in FIG. 4) due to the liquid pressure difference. There is a fear. If the roll 21 bends in the direction of the wall surface A (25), the roll 21 comes into strong contact with the wall surface A (25), rotation failure of the roll 21 occurs, the surface of the roll 21 and the substrate 22 rub against each other, and the substrate 22 Or cause damage to the product. Patent Document 2 has a similar problem.

  Various improvement is proposed with respect to the conventional general technique containing such a problem (for example, patent documents 3-5).

  In Patent Document 3, as shown in FIG. 9, the plates to be processed are outside of at least one of the inlet and outlet of the processing bath through which the processing plate is conveyed so that the processing surface is parallel to the direction of gravity. A sealing housing 94 having a U-shaped cross section that is open toward the surface, and a sealing plate 95 that abuts on the opposite side of the processing plate 90 of the drive seal roll 92 that contacts the processing plate 90 in each sealing housing 94; In addition, there has been proposed a liquid leakage prevention mechanism for a plating apparatus, in which long air balloons 96 are arranged above and below to press the seal plate 95 against the drive seal roll 92. This proposal is intended to improve the previous problem that the amount of liquid leakage from the gap between the tank wall and the seal roll is large and that the liquid leakage deteriorates due to wear. The seal roll 92 is driven, and the roll shaft end position is changed by a long hole so that the pressure contact force to the plate 90 can be adjusted. Neoprene rubber, vinyl chloride, “Teflon (registered trademark)” or the like is used on the roll surface.

  In Patent Document 4, as shown in FIG. 10, an apparatus that conveys and processes a workpiece 100 so that a surface to be processed is parallel to the direction of gravity, and a vertical slit 104 provided on an end wall of a processing tank 101. A device has been proposed in which a pair of rods or tubes 102 arranged in a loose manner is formed, and the rod 102 is pressure-bonded to the workpiece 100 with hydraulic pressure. In addition, a configuration in which the rod 102 has a cylindrical cross section, a configuration in which the seal is disposed in a separate compartment (sluice chamber) from the processing tank 101, a configuration in which the seal is made of plastic, and the like have been proposed. This proposal is intended to improve the disadvantage that the previous elastic compression (roll position fixing) + drive system cannot sufficiently prevent the outflow of liquid and the apparatus becomes complicated. . It is described that the rolls are brought into close contact with each other by a hydraulic pressure and are also brought into close contact with a wall surface having a slit, so that a good sealing property can be secured even with a free roll.

In Patent Document 5, as shown in FIG. 11, a slit 114 perpendicular to the side wall of the processing tank is provided, and a roll pair 112 is arranged vertically inside the processing tank close to the slit 114, and the roll pair 112 is composed of magnets 115 and 116. There has been proposed a liquid leakage prevention mechanism for a plating apparatus characterized in that they are attracted to each other by magnetic force. Also proposed is a configuration in which rolls are housed in separate compartments in the treatment tank, one roll contains a magnet, the other contains a magnetic material, and the polarity of the magnets built in both rolls is reversed. Has been. This proposal aims to remedy the shortcoming that the rolls are pressure-bonded to each other or to the wall surface by hydraulic pressure, so that the sealing performance fluctuates due to hydraulic pressure fluctuation and the sealing performance becomes insufficient. Although the roll is also pressed against the wall surface in the workpiece transfer direction, it is described that the sealing performance is maintained, but there is no description about rotation failure due to contact with the wall surface.
JP 2003-147582 A JP-A-2-182895 Japanese Patent Laid-Open No. 8-239797 JP-T 9-505638 JP 2002-275681 A

  As described above, it is known to ensure sealing performance by bringing a roll and a wall surface into contact with each other. However, according to the knowledge of the present inventors, in the above-described sealing mechanism, the contact pressure between the roll and the wall surface must be increased if the sealing performance is to be improved, but if the contact pressure is increased, the roll A complete liquid seal cannot be achieved due to the technical contradiction that it does not rotate, scratches the sheet, and also wears the roll surface. Even if these seal mechanisms are used practically, that is, at a contact pressure that does not cause great wear on the roll surface, the inner wall of the treatment tank and the small chamber (or sluice chamber) provided outside the treatment tank A system (Patent Documents 1, 2, 4, 5) in which a roll is brought into contact with an inner wall surface (a wall surface that is substantially parallel to the outer wall surface of the processing tank and faces the processing tank side) or a wall surface that is substantially parallel to the substrate transport direction In the method in which the roll is brought into contact (Patent Document 3), the processing liquid that flows out and scatters from the sealing portion with the wall surface interferes with the base material and flutters the base material. There is a risk of causing scratches between them. In addition, in order not to be affected by the processing liquid that has flowed out and scattered, the distance from the sheet entrance / exit of the processing tank to another roll such as the front and rear transport rolls must be taken sufficiently, and in a plating apparatus having a plurality of processing tanks, This was the cause of increasing the size of the device.

  In addition, if the roll and the wall are positively contacted, there is a risk that the web may be damaged due to poor roll rotation or the roll surface may be worn and the sealing performance may be impaired. Even if it is made (Patent Documents 1, 4, and 5), there is a risk that scratches due to defective rotation of the roll occur as described above, or the roll surface is worn and the sealing performance may be impaired.

  Furthermore, although the rotation failure is eliminated by rotating the roll (for example, Patent Document 3), the cost of the apparatus increases, so that the plating apparatus that requires a large number of rolls as shown in FIG. 1 is fatal. May be a disadvantage.

  As described above, it is also known to use a pair of rolls for the liquid sealing method of the plating tank in the vertical conveyance plating process. However, according to the knowledge of the present inventors, the method in which the rolls are brought into close contact with each other with hydraulic pressure (Patent Documents 1, 2, and 4), particularly because the sealing performance is not stable due to fluctuations in the hydraulic pressure, so that sufficient sealing performance is ensured. Can not do it. Moreover, the method (patent document 5) which makes rolls closely_contact | adhere with the magnet embedded inside has the following problems. (1) Since the adhesive force also changes when the distance between the axes changes due to the change in roll diameter with time or the variation in web thickness, the sealing performance is not stable over time. (2) The roll structure is complicated and the cost is increased. (3) If the adhesion is too strong, the web will be damaged due to poor rotation of the seal roll.

  Accordingly, an object of the present invention is to secure a good processing quality while maintaining a desired sealing property against liquid leakage with an inexpensive and simple apparatus configuration, and in a preferred form, is compact compared to a conventional processing apparatus. Another object of the present invention is to provide a sheet processing apparatus and a sheet manufacturing method using the same.

  In order to solve the above-described problems, a sheet processing apparatus according to the present invention includes a processing tank in which a processing liquid is accommodated and provided with an inlet and an outlet of the sheet, and an outside of the inlet and / or outlet of the processing tank. A sheet processing apparatus including two nip rolls provided to nip a sheet along a wall surface of the sheet, wherein the outer wall surface is 60 ° or more and 120 ° or less with respect to the sheet conveyance path. The two nip rolls are provided so as to form an angle, and are arranged so as to form a gap of 0.03 mm or more and 1 mm or less between each of the outer wall surfaces. Consists of things.

  In such a sheet processing apparatus according to the present invention, a sheet conveying roll is provided on the opposite side of the processing tank with the two nip rolls interposed therebetween, and the two nip roll side outer peripheral surfaces of the conveying roll are provided. The distance from the two nip rolls to the outer peripheral surface on the transport roll side can be 5 mm or more and 400 mm or less. When the distance is 5 mm or less, the treatment liquid leaking from between the nip rolls may adhere to the transport roll, which may not be preferable. Moreover, when the distance is 400 mm or more, the space of the apparatus becomes large, which may not be preferable.

  According to a preferred embodiment of the present invention, the position adjustment for adjusting the gap between the outer wall surface of each of the inlet and outlet portions of the processing tank and the outer peripheral surface of the nip roll in the vicinity of the end bearing of each nip roll. A sheet processing apparatus having a mechanism is provided.

  According to a preferred embodiment of the present invention, there is provided a sheet processing apparatus, wherein the sheet processing apparatus comprises an apparatus for plating a sheet.

  Moreover, according to the preferable form of this invention, the processing apparatus of the sheet | seat which passes the said processing tank is provided, keeping the width direction of the said sheet | seat in a substantially gravity direction.

  A sheet manufacturing method according to the present invention includes a method of processing a sheet using the sheet processing apparatus as described above.

  In the present invention, the “nip roll” refers to a roll for sandwiching a sheet between two rolls and applying linear pressure to the sheet.

  In the present invention, when the angles formed by the two wall surfaces with respect to the sheet conveyance path are 60 ° or less and 120 ° or more, the treatment liquid scattered from the seal portion may be attached to the sheet, which is not preferable. is there. In the present invention, the angle formed by the wall surface with respect to the sheet conveyance path refers to an angle formed by the tangential direction of the roll with respect to the sheet conveyance path at a portion where the gap between the wall surface and the roll is the narrowest. When two rolls form a gap of 0.03 mm or less with respect to the outer wall surface of the processing tank (the outer surface of the wall that actually stores the processing liquid), The roll and the wall surface may come into contact with each other, which may not be preferable. In addition, when a gap of 1 mm or more is formed, a large amount of processing liquid may flow out of the processing layer, which is not preferable. In addition, the said gap means what measured the narrowest part in the roll axial direction range in use condition.

  According to the sheet processing apparatus of the present invention, between the outer peripheral surface of the roll and the outer wall surface of the processing tank provided at an angle of 60 ° or more and 120 ° or less with respect to the sheet conveying direction, 0.03 mm or more and 1 mm. Since the seal part having the following gap is formed, it is possible to prevent the treatment liquid that has flowed out and scattered from the seal part from interfering with the base material. Since the hydraulic pressure is not applied in the direction of the outer wall surface, the roll does not bend in the direction of the outer wall surface. Good sealing performance against liquid leakage is ensured, and the occurrence of scratches on the sheet due to roll rotation failure due to roll contact and the deterioration of sealing performance due to wear on the roll surface are prevented, and the sealing performance is improved. For example, the cost of the processing liquid circulation system is reduced (for example, the pump capacity can be reduced).

  Further, as described above, the processing liquid flowing out from the seal portion does not scatter in the sheet conveying direction, so that the front nip roll from the nip roll side outer peripheral surface of another roll provided on the opposite side of the processing tank across the nip roll. Since the distance to the outer peripheral surface of the other roll side can be 5 mm or more and 400 mm or less, for example, in a sheet processing apparatus having a large number of processing tanks such as a plating processing apparatus, the space of the entire apparatus can be reduced. The device price can be reduced.

  Moreover, according to the preferable form which concerns on this invention, since the position adjustment mechanism for adjusting the clearance gap between the outer wall surface of a processing tank and a roll outer peripheral surface is provided in the said 2 rolls, the outer diameter of a roll Since the gap can be adjusted regardless of the accuracy and the diameter change due to wear on the outer peripheral surface of the roll, stable sealing performance can be maintained.

  The present invention is particularly suitable when the processing apparatus is a plating apparatus. For example, the present invention is particularly suitable for a plating apparatus where the surface represented by copper plating is relatively soft and easily scratches. Since the plating apparatus requires a large number of treatment tanks as described above, the most cost-effective benefits of the present invention can be obtained. In particular, it is suitable when the sheet passes vertically through the processing tank, and the slits shown in FIG. 3 are inevitable at the sheet inlet / outlet of the processing tank. You will get the most benefit of the effect.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

5A, FIG. 5B, FIG. 6 and FIG. 7 show two roll installation portions at the outlet of the processing tank of the sheet processing apparatus according to one embodiment of the present invention. When the present invention is applied to a plating processing apparatus in which a sheet as shown in FIG. 1 is conveyed in a vertical form, that is, a plating processing apparatus that passes through each processing tank while the width direction of the sheet is maintained in a direction substantially parallel to the gravity direction. Is shown. 5A is a schematic plan view when the apparatus is viewed from above in the direction of gravity, FIG. 6 is a schematic vertical front view when viewed from the sheet conveyance direction, and FIG. 7 is a view when viewed from the normal direction of the sheet processing surface. It is a schematic longitudinal cross-sectional view.
The overall configuration of the plating apparatus is as shown in FIG.

  In FIG. 5A, the processing tank 31 shows the processing tank (plating tank) 31 by which the plating liquid 14 as a processing liquid is supplied and is filled, and the plastic film as a base material sheet is provided in each of the plurality of processing tanks 31 provided. 32 are sequentially passed. For example, as described above, for example, copper is plated on the polyimide film (thickness: about 38 μm, for example) (final plating thickness: about 8 μm, for example). This film is conveyed vertically as described above from the aspects of handling properties, uniformity of plating treatment, maintainability, and the like. Therefore, FIG. 5A is a schematic perspective plan view of the roll installation unit viewed from above.

  A slit 35 is provided at the inlet or outlet of the treatment tank 31 along the width direction of the base material so that the base material 32 can travel and pass. The width of the slit 35 can be arbitrarily set, but a clearance of about 5 mm to 15 mm can be provided with respect to the base material so that the base material may be shaken by the flow of the plating solution 14 in the processing tank and not contact the edge of the slit portion. It is preferable to do so. In the case of the plating process, the traveling speed is very slow, for example, 1 m / min.

  In addition, two rolls 41 and 42 that form a nip portion 40 with respect to the base sheet 32 are disposed outside the inlet or outlet of the processing tank 31. In the present embodiment, the roll surface portion 43 of each roll 41, 42 is formed of rubber (for example, EPDM). Moreover, in this embodiment, both rolls 41 and 42 have the same outer diameter. The two rolls 41 and 42 and the outer wall surface C (39) of the plating tank are basically kept in a non-contact state. Since the runout accuracy of the rubber roll is about 0.03 mm at most, a gap of 0.03 mm or more is required between the roll outer peripheral surface and the wall surface C (39) in order to maintain a non-contact state, but the gap is large. If it is too much, the outflow amount of the plating solution 14 will increase, the plating solution level in the plating tank will decrease, or a higher capacity pump will be required, so the gap needs to be 1 mm or less. Therefore, at least one seal portion 44 having a gap of 0.03 mm or more and 1 mm or less is formed between the outer peripheral surface of each of the rolls 41 and 42 and the wall surface C (39). In the present embodiment, seal portions 44 are formed at two locations between the outer peripheral surfaces of the rolls 41 and 42 and the wall surface C (39). However, when the runout accuracy of the rubber roll can be improved by improving the processing accuracy of the rubber roll and the rotation accuracy of the bearings attached to both ends of the rubber roll, it is more preferable to narrow the gap in accordance with the runout accuracy.

  5B, the wall surfaces C (39) forming the gaps with the rolls 41 and 42 have an angle θ of 60 ° to 120 ° with respect to the substrate conveyance direction. As a result, the plating solution 50 flowing out of the processing tank 31 flows out in substantially the same direction as the wall surface C (39), that is, in the direction of 60 ° to 120 ° with respect to the substrate conveyance direction, which may hinder the conveyance of the substrate. Absent. In the present embodiment, as shown in FIG. 5A, the wall surface C is provided substantially perpendicular to the substrate transport direction.

  In order to form the nip portion 40, in this embodiment, mechanical pressing means is provided as pressing means for pressing one roll 41 toward the other roll 42. In this embodiment, this mechanical pressing means is composed of a ball plunger 45 that can push and pull the ball portion at the tip. As shown in FIG. 6, the ball plunger 45 is provided on both ends of the roll 41 in the axial direction, and the ball housings 45 at both ends of the roll 41 can be pressed by the ball portions 45a at the tip, thereby The roll 41 can be pressed toward the other roll 42.

  Further, it is preferable not to provide a chamber with a small volume like the small chamber 24 in the conventional liquid seal configuration shown in FIG. When such a chamber is provided, the base material 22 flutters due to the interference of the plating solution 50 that has flowed out and scattered as described above, and scratches are caused by sliding with the transport rolls disposed before and after the treatment tank. There is a fear. However, as long as the chamber does not form the flow path of the plating solution 14 as described above (for example, the capacity is large), the chamber may be provided. For example, in this embodiment shown in FIG. 5A, since the plating solution 14 flows out in a direction substantially perpendicular to the substrate conveyance direction, the partition wall 38 is provided so that the flowing plating solution 50 does not scatter widely. Since there is no portion filled with the plating solution 14 inside and outside the nip portion 40, interference due to scattering of the plating solution 14 does not occur.

  In FIG. 5A, the upper and lower surfaces of the rolls 41 and 42 in the roll axial direction prevent the outflow of the processing liquid 14 from above and below, for example, as shown in FIG. Except for the long hole structure, it is sealed by the upper and lower walls 37a and 37b.

  FIG. 7 shows a schematic longitudinal cross-sectional view of the roll installation part as viewed from the normal direction of the substrate surface. The plating solution 14 that has flowed out of the processing tank 31 is stored in the auxiliary tank 48, and is transferred to the processing tank 31 by the pump 49. Returned. Further, if both ends of the rolls 41 and 42 are provided with screws 47 as position adjusting mechanisms for adjusting the gap between the outer wall surface C (39) of the processing tank and the rolls 41 and 42, the rolls 41 and 42 This is preferable because the gap can be adjusted regardless of the diameter accuracy. As shown in FIG. 7, in this embodiment, screws 47 as position adjustment mechanisms are provided at both ends of the rolls 41 and 42.

  In the sheet processing apparatus configured as described above, since the outflow direction of the processing liquid 50 that flows out and scatters from the seal portion is substantially perpendicular to the base material transport direction, it is possible to prevent the base material from fluttering. The distance to the next or previous transport roll (shown by L in FIG. 1) that could not be made shorter than about 400 mm due to the scattering of the processing liquid in the substrate transport direction is indicated as nip roll. It can be shortened to a limit value (about 5 mm as a realistic design value) at which the transport roll does not contact, and the apparatus space can be reduced and the apparatus price can be reduced.

  Further, the seal portion 44 having a good sealing property against liquid leakage is formed by the specific narrow gap as described above while the outer peripheral surface of the rolls 41 and 42 and the processing tank wall surface are kept in a non-contact state. Therefore, the generation | occurrence | production of the damage | wound to the sheet | seat resulting from the roll rotation defect by the contact with a processing tank wall surface and the rolls 41 and 42 is prevented. In the conventional apparatus, as shown in FIG. 4, the roll 21 is easily bent in the direction of the wall surface A (25) having the slits 28b due to the hydraulic pressure (indicated by an arrow), and contact at this portion is likely to occur. In the embodiment shown, the gap between the roll and the processing tank wall surface is ensured by providing the gap with the wall surface C (39) within the specific range so as to ensure good sealing performance in this portion. The influence of the roll deflection on the sealing performance can be kept small while avoiding the above.

  In addition, by providing a screw 47 as a position adjusting mechanism for adjusting the gap between the wall surface C (39) and the outer peripheral surface of the roll at the ends of the rolls 41 and 42, a stable sealing performance can be obtained regardless of the outer diameter accuracy. Even when the outer diameter of the roll decreases due to wear, the gap can be easily adjusted, that is, good sealing performance can be restored.

  In addition, the rolls 41 and 42 are brought into close contact with each other with a ball plunger 45 as a mechanical pressing means, so that the rolls 41 and 42 are excellent regardless of changes in roll diameter with time and fluctuations in the thickness of the base sheet, although they are extremely simple pressing mechanisms. Sealability can be maintained, and stable sealability can be maintained over time. Therefore, it is possible to eliminate the roll rotation failure (scratch prevention) due to insufficient adhesion or strong adhesion. In addition, since the sealing performance is stable, liquid leakage from the wall surface, the outer peripheral surface of the roll, and between the rolls can be reduced, and the fluttering of the base sheet 32 due to the dynamic pressure of the liquid can be reduced. It can be stably conveyed while maintaining.

  Further, by configuring the roll pressing means with mechanical pressing means, in particular, the ball plunger 45, the nip portion 40 having a desired uniform nip pressure can be easily formed even when the roll diameter changes with time. .

  Therefore, by using a sheet processing apparatus that can realize such a good sealing property without any inconvenience, it becomes possible to stably manufacture a sheet with excellent processing quality.

  In the present embodiment, the rolls 41 and 42 are free rolls, and the roll and the film can be synchronized without providing any additional equipment for driving, so that it is possible to prevent scratches on the sheet due to poor rotation. . Further, even when a driving device such as a motor is connected to the rolls 41 and 42 and used as a driving roll, the sheet can be stably conveyed inside and outside the processing tank without flickering, so that the plating quality of the sheet can be improved. Further, since the drive roll (not shown) for sheet conveyance that has been separately installed can be reduced, there is also an effect of reducing the cost of the apparatus. When a driving device such as a motor is connected to only one of the rolls 41 and 42, a high-quality plated sheet can be obtained without controlling the synchronization between the rolls.

The present invention is suitable when the sheet is a plastic film, and is particularly suitable for plating treatment, but its application range is not limited thereto.

1 is a schematic plan view of a sheet plating apparatus to which the present invention is applicable. FIG. 2 is an enlarged plan view of a power feeding unit of the apparatus in FIG. 1. FIG. 2 is an enlarged schematic cross-sectional view of a conventional plating portion of the apparatus of FIG. 1. It is a schematic block diagram of the liquid seal part in a prior art. It is a general | schematic partial cross-sectional view of the roll installation part of the processing tank of the processing apparatus of the sheet | seat which concerns on one Embodiment of this invention. It is the schematic which showed the angle | corner which the wall surface of FIG. 5A makes with respect to a sheet conveyance path | route. It is a general | schematic fragmentary longitudinal cross-section when the roll installation part of FIG. 5A is seen from a base material conveyance direction. It is a general | schematic fragmentary longitudinal cross-section when the roll installation part of FIG. 5A is seen from a perpendicular | vertical direction with respect to a base-material conveyance direction. It is a schematic block diagram of the liquid seal part in another prior art. It is a schematic block diagram of the liquid seal part in another prior art. It is a schematic block diagram of the liquid seal part in another prior art. It is a schematic block diagram of the liquid seal part in another prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Plastic film as a base sheet 2 Unwinding part 3 Feeding part 4 Plating tank 5 as a processing tank 5 Plating part 6 Winding part 7 Seal roll 10 Plating surfaces 11, 12 Conveyance roll 13 Feeding roll 14 Plating liquid as a processing liquid 15 Copper mass 21 Sponge roll 22 Base material 24 Small chamber 25 Wall surface A
26 Wall B
27 Wall C
28a, 28b Slit 31 Treatment tank (plating tank)
32 Plastic film 35 as substrate sheet Slit 36 Gap 37a, 37b Upper and lower walls 38 Partition 39 Wall C as treatment tank wall
40 Nip part 41, 42 Roll 43 Roll surface part 44 Seal part 45 Ball plunger 45a as mechanical pressing means Ball part 46 at the tip 46 Bearing housing 47 Screw as position adjusting mechanism 48 Auxiliary tank 49 Pump 50 Outflow and scattering from seal part Processing solution (plating solution)
80 Substrate sheet 81 Plating tank 82 Seal roll 83 Treatment liquid 84, 85 Slit 86, 87 Plating tank wall surface 90 Processed plate 91 Treatment tank 92 Seal roll 93 Treatment liquid 94 Housing 95 Seal plate 96 Air balloon 100 Work 101 Treatment tank 102 Rod (or tube)
103 Processing liquid 104 Slit 110 Processed plate 111 Processing tank 112 Seal roll 113 Processing liquid 114 Slit 115, 116 Magnet

Claims (6)

  A processing tank containing a processing liquid and provided with an inlet and an outlet of the sheet, and two nip rolls provided for nipping the sheet along a wall surface outside the inlet and / or outlet of the processing tank The outer wall surface is provided so as to form an angle of 60 ° or more and 120 ° or less with respect to the sheet conveyance path, and the two nip rolls are: A sheet processing apparatus, wherein the sheet processing apparatus is arranged so as to form a gap of 0.03 mm or more and 1 mm or less between the outer wall surfaces.   Another roll contacting the sheet is provided on the opposite side of the processing tank across the two nip rolls, and the separate nip rolls from the two nip roll side outer peripheral surfaces of the separate rolls. The sheet processing apparatus according to claim 1, wherein a distance to the outer peripheral surface of the roll is 5 mm or more and 400 mm or less. The sheet processing apparatus according to claim 1, further comprising a position adjusting mechanism for adjusting a gap between the outer wall surface and the outer peripheral surfaces of the two nip rolls.   The sheet processing apparatus according to claim 1, wherein the sheet processing apparatus is an apparatus for plating a sheet. The sheet processing apparatus according to any one of claims 1 to 4, wherein the sheet is passed through the processing tank while maintaining a width direction of the sheet in a substantially gravity direction. The unwinding step in which the sheet is unwound from the unwinding step, and the processing liquid in the processing tank while nipping the sheet with two nip rolls provided along the outer wall surface of the inlet and / or outlet of the processing tank A sheet manufacturing method comprising a processing step for processing a sheet and a winding step in which the sheet is wound in a winding process, wherein an outer wall surface of the processing tank is connected to the sheet conveyance path. The two nip rolls are arranged so as to form a gap of 0.03 mm or more and 1 mm or less between the outer wall surfaces. A method for producing a sheet, characterized in that the sheet is processed using a sheet processing apparatus.

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