JP2007195375A - Coil component, method for manufacturing the same, micro generator, and power generating unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coil component which can be used in various fields such as a generator, measuring instruments or the like including an NMR or the like, a micro generator having the coil component, a power generating unit, and a method for manufacturing the coil component. <P>SOLUTION: The coil component 35 has a substrate 351 and a plurality of coils 352 arranged on the substrate 351. Each coil 352 is spirally formed and has a micro coil 352A with its center axis extending along the surface of the substrate 351, and a core 352B arranged along the center axis of the micro coil 352A and having a surrounding portion surrounded by the micro coils 352A. The center axis of the micro coil 352A of each coil 352 and the core 352B are substantially in parallel with each other. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a coil component, a micro-generator, a power generator, and a method for manufacturing a coil component.

Conventionally, there has been proposed a coil component in which a through hole is formed in a substrate, a conductive material is disposed in the front and back surfaces of the substrate and in the through hole, and a coil is formed.
However, in this coil component, the power loss increases due to the presence of the through hole. Further, it takes time and effort to form the through hole.
Thus, a coil component has been proposed in which a coil is formed on a substrate so that the central axis direction of the coil is parallel to the substrate surface without forming a through hole (see, for example, Patent Document 1).
In the technique described in Patent Document 1, since it is not necessary to form a through hole, the trouble of forming the through hole can be saved and power loss due to the through hole can be prevented.

JP 2001-52947 A

2. Description of the Related Art In recent years, a coil component having a small power loss as described in Patent Document 1 is used to generate power by electromagnetic induction, or to measure the state of a sample by passing a current through the coil and irradiating the sample with a magnetic field from the coil. It is considered to be used in various fields such as measuring instruments.
For example, it is desired to use the coil component described in Patent Document 1 for a generator to output power more efficiently. In order to increase the power generation efficiency, it is preferable to increase the number of turns of the coil. However, in the coil component described in Patent Document 1, the space on the substrate surface is limited, and the number of turns of the coil is increased. Is difficult.
Further, in a measuring instrument such as NMR, it is desired to measure a number of minute regions of a sample and measure the characteristics of the sample. However, in the coil component described in Patent Document 1, the minute region of the sample is measured. It is difficult to measure multiple points.

  An object of the present invention is to provide a coil component that can be used in various fields such as a generator and a measuring instrument such as NMR, a micro-generator having the coil component, a power generation apparatus, and a method for manufacturing the coil component. It is.

  According to the present invention, it has a substrate and a plurality of coil portions arranged on the substrate, each of the coil portions is formed in a spiral shape, and its central axis extends along the surface of the substrate, A coil component having conductive microcoils in which the central axes are substantially parallel to each other is provided.

According to this configuration, a plurality of coil portions having microcoils are arranged in parallel on the substrate. Therefore, for example, by using the coil component of the present invention for a measuring instrument such as NMR, a sample can be irradiated with a magnetic field from each microcoil, and a large number of minute regions can be measured. Furthermore, since the microcoils of each coil part are arranged so that the central axes are substantially parallel to each other, it is more accurate when measuring a large number of micro areas than when the microcoils are randomly arranged. It becomes possible to measure.
Moreover, when the coil part of this invention is used for a generator, since the several coil part which has a micro coil on the board | substrate is arrange | positioned in parallel, a some micro coil may receive the change of magnetic flux simultaneously. it can. Thereby, the same state as the state in which the number of turns of the microcoil is virtually increased can be created. Therefore, according to the present invention, it is possible to provide a coil component that can use a limited space on the substrate and increase power generation efficiency.

At this time, one end of the microcoil of each coil part is on the same plane orthogonal to the substrate surface, the plurality of coil parts are N rows and M columns (N is an integer of 2 or more, M is It is preferable that the substrate is laminated on the substrate in the form of an integer of 1 or more.
Here, the coil parts are stacked in a matrix, and one end of the microcoil of each coil part is located on the same plane orthogonal to the substrate surface, and the positions of the end parts of each microcoil are aligned. ing.
Thus, for example, if the coil component is used in a generator and the coil component is arranged so that one end of each microcoil on the substantially same plane orthogonal to the substrate surface faces the magnet side, the magnet and The distance between each microcoil can be kept substantially constant, and a part of the microcoils can be prevented from being located at a position far away from the magnet. When some microcoils are extremely far from the magnet, the power generation efficiency of some microcoils will be reduced. In the present invention, the distance of each microcoil from the magnet is substantially constant. Therefore, it is possible to prevent a decrease in power generation efficiency of the generator.
In addition, when the coil component is used in a measuring instrument such as NMR, the position of each microcoil from the sample can be made substantially coincident, and each minute region of the sample can be accurately measured.

Furthermore, it is preferable that an insulating layer exists between one coil part and the other coil part which are laminated | stacked among the said coil parts.
By laminating the coil parts via the insulating layer, contact between the laminated coil parts can be prevented.

The coil section includes a plurality of first conductor films arranged in parallel in a predetermined pattern on the substrate, and the first conductor films across the first conductor films, and both ends of each first conductor film. A magnetic core that extends along the surface of the substrate and a plurality of second conductor films that are arranged in parallel in a predetermined pattern on the core, the microcoil The second conductor film exposes one end of the first conductor film of the first conductor film on one side of the core and the other adjacent to the first conductor film. It is preferable that the first conductor film is configured by connecting an end portion exposed on the other side of the core portion.
Moreover, it is preferable that the edge part of a 1st conductor film and the edge part of a 2nd conductor film are directly joined, Furthermore, the 1st conductor film and the 2nd conductor film are comprised with the same material. It is more preferable.
By directly joining the first conductor film and the second conductor film, power loss due to the presence of the through hole can be suppressed as compared to the case of connecting via the conductor film formed in the through hole.

Furthermore, it is preferable that the outer peripheral surface of the core is covered with an insulating film, and the microcoil surrounds the periphery of the insulating film.
When the core and the microcoil are in direct contact, alloying may occur and the resistance value of the microcoil may increase.
On the other hand, by covering the outer peripheral surface of the core portion with an insulating film, alloying between the core portion and the microcoil can be prevented, and an increase in the resistance value of the microcoil can be prevented.

The insulating film is preferably any one of a SiN film, a boron carbonitride film, a diamond-like carbon film, an AlN film, and a nanodiamond film.
When a current flows through the micro coil of the coil component, the micro coil generates heat. When the insulating film is any one of a SiN film, a boron carbonitride film, a diamond-like carbon film, an AlN film, and a nano diamond film, and a film having high thermal conductivity, the heat of the microcoil can be radiated. In particular, in the present invention, since a plurality of coil portions are arranged on the substrate, it is difficult for the heat of the microcoil to be dissipated, but the insulating film is an SiN film, boron carbonitride film, diamond-like carbon film, AlN. By using either the film or the nanodiameter film, the heat of the microcoil can be reliably radiated.

Here, it is preferable that the insulating film covers the outer peripheral surface of the core portion through a barrier film.
Furthermore, the barrier film is preferably a TiN film or a TaN film.
By providing the barrier film, adhesion between the core and the insulating film can be improved. Thereby, peeling of the insulating film can be prevented.

Furthermore, it is preferable that the conducting wire which connects the edge parts of a microcoil is arrange | positioned between the said microcoils of a some coil part.
When the coil component is used for a generator or the like, the microcoil is connected by a conducting wire, thereby being connected to each microcoil. Thereby, the same state as the state in which the number of windings of the microcoil is virtually increased can be created, and when the coil component is used for the generator, the power generation efficiency can be reliably increased.

Furthermore, according to the present invention, the rotating shaft, a plurality of magnets arranged around the rotating shaft and rotating together with the rotating shaft, and a trajectory formed by rotationally driving the plurality of magnets are opposed to each other. There is also provided a micro-generator which is any one of the coil components described above.
According to such a micro power generator, since the coil component described above is provided, a micro power generator with high power generation efficiency can be obtained.

Here, each of the magnets is magnetized at opposite ends in a direction orthogonal to the rotation axis,
The coil component is disposed on the opposite side of the rotation axis with the magnet interposed therebetween, and the rotation axis and the center axis of the microcoil of the coil component are disposed substantially orthogonal to each other. preferable.
According to this configuration, the magnet is magnetized so that both ends in the direction orthogonal to the rotation axis are magnetized to different polarities, and the rotation axis and the central axis of the micro coil of the coil component are orthogonal to each other. Is arranged.
Therefore, by rotating the rotating shaft, the direction of the magnetic flux passing through the microcoil changes and power is generated.

At this time, each of the magnets has a substantially U-shaped planar shape, and both end portions of the U shape are magnetized with different polarities, and both end portions of the U shape face the coil component side. Preferably it is.
According to this configuration, since the magnet is a plane U-shape, the magnetic flux from the end of the magnet passes through the microcoil along the central axis of the microcoil, and the magnetic flux is more efficiently transferred to the microcoil. It will pass inside. Thereby, power generation can be performed more efficiently.

In the micro power generator according to the present invention, the magnets are magnetized at opposite ends in a direction parallel to the rotation axis, and the adjacent magnets have polarities at adjacent ends. The coil component is arranged such that a center axis of the microcoil is substantially parallel to the rotation axis, and an end of the microcoil is one end of the both ends of the magnet. It may be arranged so as to face the part.
According to this structure, it arrange | positions so that the center axis | shaft of a microcoil may become substantially parallel to a rotating shaft,
Furthermore, the end portion of the microcoil is opposed to one end portion of both end portions of the magnet in a direction parallel to the rotation axis. Accordingly, the magnetic flux from the end of the magnet passes through the microcoil along the central axis of the microcoil. And since the polarities of the adjacent end portions of the adjacent magnets are different from each other, the direction of the magnetic flux from the end portion of the magnet changes along the central axis of the microcoil by rotating the rotation shaft. It becomes.
Thereby, electric power can be generated more efficiently.

  In addition, according to the present invention, it is possible to provide a power generation apparatus having a plurality of any of the micro-generators described above.

Further, according to the present invention, on the substrate, there is provided a magnetic core extending along the surface of the substrate, and a conductive microcoil formed in a spiral shape so as to surround the periphery of the core. A method of manufacturing a coil component having a plurality of coil portions, the step of forming a plurality of first conductor films arranged in parallel in a predetermined pattern on the substrate, and the first conductor film on the first conductor film, A step of providing the core portion so as to traverse one conductor film and exposing both end portions of each first conductor film; and a plurality of second conductor films arranged in parallel in a predetermined pattern on the core portion. And forming an end portion exposed on one side of the core portion of the first conductor film of the first conductor film by the second conductor film, and another adjacent to the first conductor film. By connecting the exposed end of the first conductor film to the other side of the core, A step of forming a coil, a step of covering the coil portion formed by each of the steps with an insulating layer, the step of forming the first conductor film, the step of providing a core, and the step of forming a microcoil. And a step of laminating another coil portion on the insulating layer.
According to this method, the above-described coil component can be manufactured. Moreover, since the coil part is coat | covered with the insulating layer, the contact between the laminated coil parts can be prevented.

  ADVANTAGE OF THE INVENTION According to this invention, the coil components which can be used in various fields, such as generators, measuring instruments, such as NMR, the micro generator which has this coil components, a generator, and the manufacturing method of coil components are provided. .

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same reference numerals are given to the same components, and the description will be omitted as appropriate.
(First embodiment)
FIG. 1 is an exploded perspective view of the power generation device 10 of the present embodiment.
The power generation device 10 includes a plurality of micro power generators 3, a base body 1, and a base body 2 disposed on the base body 1. The plurality of micro generators 3 are arranged in a matrix.
As shown in FIGS. 1 and 3, each micro-generator 3 includes a rotating unit 32 that rotates around the rotation axis X, and a plurality of magnets 33 that are arranged around the rotation axis X and that are rotated together with the rotation axis X. And a plurality of coil parts 35 disposed at positions facing the trajectory formed by the plurality of magnets 33 being rotationally driven, and a drive unit 36 for rotationally driving the rotary unit 32 about the rotation axis X. Have.

First, the structure of the base | substrate 1, the rotation part (rotor) 32, and the coil components (stator) 35 is demonstrated.
As shown in FIG. 1, a plurality of substantially cylindrical first holes 11 are formed in a matrix in the base 1. A ring-shaped receiving portion 12 is installed in each first hole 11 as shown in the plan view of FIG. The receiving portion 12 is supported by a plurality of (for example, four) ribs 13 extending from the inner surface of the first hole 11 toward the center of the first hole 11.
In addition, a plurality of square tube-shaped second holes 14 are formed in the base body 1 so as to surround the first holes 11.
FIG. 2 is a partially enlarged view of the base 1 and is a plan view showing one first hole 11 and a second hole 14 surrounding the first hole 11.

A rotating body 31 as shown in FIGS. 3 and 4 is accommodated in the first hole 11 of the base 1 having such a structure. FIG. 3 is an exploded perspective view of the rotator 31, and FIG. 4 is a plan view showing a state in which the rotator 31 is accommodated in each first hole 11.
The rotating body 31 includes a rotating unit 32, a plurality of (for example, four) magnets 33 disposed around the rotating unit 32, and a casing 34 that houses the rotating unit 32 and the magnet 33.
The rotating part 32 has a hollow cylindrical part 321 and a pair of shaft parts 323 connected to the cylindrical part 321. The rotating body 31 is rotationally driven with the axis passing through the pair of shaft portions 323 of the rotating portion 32 as the rotation axis X.

A rib 321 </ b> A is disposed in the hollow cylindrical portion 321 of the rotating portion 32. The ribs 321 </ b> A intersect at the center of the cylindrical portion 321. Each shaft portion 323 extends from the intersecting position of the rib 321A.
Of the pair of shaft portions 323, one shaft portion 323A is formed such that the tip is pointed like a triangular pyramid. The one shaft portion 323A is fitted to the drive shaft 361 of the drive portion 36, which will be described in detail later.
Further, of the pair of shaft portions 323, the other shaft portion 323 </ b> B is fitted into the receiving portion 12 formed in the first hole 11 via the ball bearing B.

  Such a rotating part 32 is accommodated in the housing 34. An opening having a diameter smaller than the diameter of the cylindrical portion 321 is formed on the bottom surface of the housing 34, and the other shaft portion 323B protrudes from the opening.

The magnet 33 is fitted between the outer peripheral surface of the cylindrical portion 321 of the rotating unit 32 and the inner peripheral surface of the housing 34.
The magnet 33 is substantially U-shaped in a plane, and both end portions (both end portions of the U shape) in the direction orthogonal to the rotation axis X of the rotating portion 32 are magnetized with different polarities. The magnet 33 is disposed so that both end portions of the U-shape face the opposite side (coil component 35 side) from the rotating portion 32. The magnet 33 extends in a long shape along the rotation axis X.
Here, the magnet 33 is a permanent magnet, for example, a neodymium magnet. The outer surface of the magnet 33 is preferably coated with a water resistant resin.

As shown in FIGS. 1, 2, and 4, a coil component 35 is accommodated in the second hole 14 of the base 1. The coil component 35 is fixed in the second hole 14 with an adhesive and serves as a stator.
As shown in the schematic diagram of FIG. 5, the coil component 35 includes a substrate 351 and a plurality of coil portions 352 integrated and arranged on the substrate 351. FIG. 5 schematically shows a cross section of the coil component 35.
Each coil part 352 is formed in a spiral shape and has a central axis (an axis passing through the center of the portion surrounded by the first conductor film 352A1 and the second conductor film 352A2 in FIG. 5) along the depth direction in FIG. 5. A microcoil 352A extending along the surface of the substrate 351, and a core 352B disposed along the central axis of the microcoil 352A and surrounded by the microcoil 352A. Further, the central axis of the microcoil 352A and the core part 352B of each coil part 352 are substantially parallel to each other. That is, the coil part 352 is arranged in parallel on the substrate 351.

  The substrate 351 is, for example, a silicon substrate. A silicon oxide film 351A is formed on the surface of the substrate 351.

  The coil part 352 includes a microcoil 352A, a core part 352B, and other various films (barrier film 352C, barrier film 352D, barrier film 352E, insulating film 352F, barrier film 352G). On the silicon oxide film 351A, a barrier film 352C containing TiN, TaN or the like is formed. Further, a first conductor film 352A1 constituting a part of the microcoil 352A is formed in a predetermined pattern on the barrier film 352C. The first conductor film 352A1 is, for example, a Cu film.

On the first conductor film 352A1, a barrier film 352D having the same pattern as the first conductor film 352A1 is formed. Examples of the barrier film 352D include a TiN film and a TaN film.
A core portion 352B covered with the barrier film 352E and the insulating film 352F is disposed on the barrier film 352D. The core portion 352B is covered with an insulating film 352F through a barrier film 352E.

Examples of the barrier film 352E include a TiN film and a TaN film.
The insulating film 352F is preferably a good heat dissipation film with high heat dissipation, for example, a film having a thermal conductivity of 10 (W / mk) or more.
As the insulating film 352F, for example, a SiN film, a BCN film (boron carbonitride film), a DLC film (diamond-like carbon film), an AlN film, and a nanodiameter film are preferable.
Further, a Low-k film (refers to a film having a relative dielectric constant of 3.3 or less. For example, organic films such as SiOC, MSQ (methylsilsesquioxane), benzocyclobutene, HSQ (hydroxysilsesquioxane), etc. )) Or the like.

Here, the core portion 352B extends along the surface of the substrate 351, and the width dimension in the short side direction (lateral direction in FIG. 5) is shorter than the width dimension of the first conductor film 352A1. Moreover, the shape of the cross section orthogonal to the longitudinal direction (depth direction of FIG. 5) of the core part 352B is a substantially square shape. The core part 352B is made of a material with high magnetic permeability (a material with a magnetic permeability of 100 or more), and is made of a metal magnetic material (for example, an iron core (magnetic permeability 1000 to 5000) or permalloy (a magnetic permeability of about 100000)). is there.
The diameter of the core part 352B is, for example, preferably 0.1 μm or more and 200 μm or less, and more preferably 1 μm or more and 20 μm or less.
On the insulating film 352F surrounding the core portion 352B, a second conductor film 352A2 constituting another part of the microcoil 352A is formed in a predetermined pattern. The second conductor film 352A2 is, for example, a Cu film. By alternately connecting the second conductor film 352A2 and the first conductor film 352A1, the microcoil 352A is configured.
Here, the diameter of the microcoil 352A is, for example, preferably 0.5 μm or more and 500 μm or less, and more preferably 5 μm or more and 50 μm or less.
Furthermore, the second conductor film 352A2 is covered with a barrier film 352G. Examples of the barrier film 352G include a TiN film and a TaN film.

A plurality of coil portions 352 having the above-described configuration are arranged on the substrate 351. In the cross section orthogonal to the central axis of the microcoil 352A, the plurality of coil portions 352 have N rows and M columns (both N and M). The layers are stacked in an integer of 2 or more, for example, 4 columns, 4 rows. The vertical direction (direction orthogonal to the substrate surface) in FIG. 5 is a column, and the horizontal direction (direction parallel to the substrate surface) is a row. Here, the plurality of coil portions 352 are arranged in four rows and four columns, but the present invention is not limited to this. For example, the coil portions 352 are arranged in one row (N is N). An integer of 2 or more). Further, the coil portions 352 may be arranged in a single row and a plurality of columns on the substrate 351 (M is an integer of 2 or more).
Further, at least one end portion of the microcoil 352A of each coil portion 352 is on substantially the same plane orthogonal to the surface of the substrate 351.
Here, each coil part 352 is in a state of being embedded in the insulating layer 353. That is, the coil portions 352 adjacent in the in-plane direction of the substrate 351 and in the thickness direction of the substrate 351 are covered with the insulating layer 353 so as not to contact each other. In other words, it can be said that the coil portion 352 is stacked with the insulating layer 353 interposed therebetween.

When the coil component 35 having the above configuration is inserted into the second hole 14, the coil component 35 is disposed on the opposite side of the rotation axis X of the rotating body 31 with the magnet 33 interposed therebetween (FIG. 1). reference). The distance between the coil component 35 and the opposing magnet 33 is, for example, about 0.1 mm.
In addition, the coil component 35 is disposed so that one end of each microcoil 352A on the substantially same plane orthogonal to the surface of the substrate 351 faces the rotating body 31 side.
Furthermore, the coil component 35 is disposed at a position facing a locus formed by the plurality of magnets 33 being rotationally driven. Furthermore, the center axis of each microcoil 352 </ b> A of the coil component 35 is orthogonal to the rotation axis X of the rotating body 31.
In FIG. 1, the microcoil 352A is exposed from the surface of the insulating layer 353 of the coil component 35 so that the position of the microcoil 352A can be easily understood. Is completely embedded in. Further, when the coil component 35 is fitted into the second hole 14, the substrate 351 of the coil component 35 may be positioned at the bottom of the second hole 14, and the substrate 351 is disposed in the second hole 14. You may make it contact | abut to 14 side walls.

Here, the manufacturing method of the coil component 35 is demonstrated with reference to FIGS.
First, the substrate 351 is thermally oxidized to form a silicon oxide film 351A on the surface of the substrate 351.
Next, for example, a TaN film, a Cu film, and a TiN film are stacked on the silicon oxide film 351A. Then, a resist mask M having a predetermined pattern (a pattern arranged in parallel at a predetermined interval) is formed on the stacked body of TaN film, Cu film, and TiN film, and the stacked body of TaN film, Cu film, and TiN film is selected. To remove. For example, a stacked body of a TaN film, a Cu film, and a TiN film is formed into a predetermined pattern by wet etching using a concentrated HF liquid or dry etching. As a result, a plurality of barrier films 352C, first conductor films 352A1, and barrier films 352D arranged in parallel in a predetermined pattern are formed (see FIGS. 6A and 6B). 6 (B) is a plan view, and FIG. 6 (A) is a cross-sectional view in the AA direction of FIG. 6 (B).
Here, the thickness of the barrier film 352C is, for example, 10 nm to 100 nm, the first conductor film 352A1 is 0.1 μm to 5 μm, and the barrier film 352D is 10 to 100 nm.

Next, as shown in FIG. 7A, an SiN film 352F1 and further a TiN film 352E1 are formed over the barrier film 352D. The SiN film 352F1 and the TiN film 352E1 are stacked so as to cover the entire surface of the substrate 351.
The SiN film 352F1 constitutes a part of the insulating film 352F described above, and the TiN film 352E1 constitutes a barrier film 352E. The thickness of the SiN film 352F1 is, for example, 50 nm to 100 nm, and the thickness of the TiN film 352E1 is, for example, 10 nm to 100 nm.
Here, the SiN film 352F1 can be formed by, for example, a CVD method, and the TiN film 352E1 can be formed by sputtering.

  Thereafter, as shown in FIG. 7B, an Fe film 352B1 is formed so as to cover the entire surface of the substrate 351. The Fe film 352B1 becomes the core part 352B. The Fe film 352B1 can be formed by sputtering. Note that the Fe film 352B1 may be formed by vapor deposition or plating.

  Then, a mask M having a predetermined pattern is formed on the Fe film 352B1. The width of the mask M is narrower than the widths of the barrier film 352C, the first conductor film 352A1, and the barrier film 352D. The mask M extends in a long shape in a direction intersecting with the barrier film 352C, the first conductor film 352A1, and the barrier film 352D.

Thereafter, as shown in FIG. 8A, the Fe film 352B1 and the TiN film 352E1 are selectively removed. Here, the Fe film 352B1 and the TiN film 352E1 are wet-etched with sodium hexametaphosphate (HMP) and nitric acid. Thereby, the core part 352B is formed.
Further, the SiN film 352F1 is selectively removed by dry etching.
Thus, as shown in the plan view of FIG. 8B, the SiN film 352F1, the TiN film 352E1, and the core portion 352B are provided so as to cross the barrier film 352C, the first conductor film 352A1, and the barrier film 352D. Note that the width of the core portion 352B in the short side direction is narrower than that of the SiN film 352F1. Further, both end portions of the barrier film 352C, the first conductor film 352A1, and the barrier film 352D are exposed from both sides of the core portion 352B.

  Next, as shown in FIG. 9A, a TiN film 352E2 is formed by sputtering. The TiN film 352E2 is formed so as to cover the entire surface of the substrate 351. The TiN film 352E2 constitutes a part of the barrier film 352E.

Next, a mask M is formed in a portion corresponding to the upper portion of the core portion 352B in the TiN film 352E2. Thereafter, as shown in FIG. 9B, the TiN film 352E2 is selectively removed. Here, it is removed by wet etching using HF. Thereby, the barrier film 352E covering the core portion 352B is completed.
Next, after removing the mask M, an SiN film 352F2 is formed on the entire surface of the substrate 351 as shown in FIG. 9C. The SiN film 352F2 constitutes the insulating film 352F together with the SiN film 352F1.

  Further, as shown in FIG. 10A, a mask M is formed in a portion corresponding to the upper portion of the core portion 352B, and as shown in FIG. 10B, the SiN film 352F2, the SiN film 352F1, and the barrier are formed. The film 352D is selectively removed. Here, dry etching using a CF-based gas is performed. Thereby, an insulating film 352F that covers the periphery of the core portion 352B is formed. Further, by removing the SiN film 352F1 and the barrier film 352D, the end portion of the first conductor film 352A1 is exposed.

Next, as shown in FIG. 10C, a Cu film 352A3 and further a TiN film 352G1 are stacked on the entire surface of the substrate 351. Thereafter, a mask having a predetermined pattern (a pattern that is inclined with respect to the longitudinal direction of the core portion 352B and arranged in parallel at a predetermined interval) is formed on the TiN film 352G1, and the Cu film 352A3 and the TiN film 352G1 are selectively removed. To do. Thus, as shown in FIGS. 11A and 11B, a plurality of second conductor films 352A2 and barrier films 352G arranged in parallel in a predetermined pattern are formed, and the microcoil 352A is completed. As shown in FIG. 11B, the second conductor film 352A2 and the first conductor film 352A1 have different inclination directions with respect to the longitudinal direction of the core portion 352B, and the second conductor film 352A2 and the first conductor film 352A1 are directly bonded. Has been.
More specifically, the second conductor film 352A2 exposes one end of the first conductor film 352A1 of the first conductor film 352A1 on one side of the core portion 352B, and one first conductor film 352A1. That is, the end portion exposed to the other side of the core portion 352B of the other first conductor film 352A1 adjacent to is directly connected.
The first conductor film 352A1, the second conductor film 352A2, and the core part 352B may be subjected to anticorrosion treatment. As the anticorrosive, benzotriazole or a derivative thereof can be used as the type of anticorrosive.

Here, the manufacturing procedure has been described by taking up one coil portion 352, but a plurality of first-layer coil portions 352 immediately above the substrate 351 can be simultaneously formed on the substrate 351 by the above-described procedure.
Next, when the second layer coil portion 352 is formed, the first layer coil portion 352 is embedded with an insulating layer 353 as shown in FIG. For example, a polyimide film as the insulating layer 353 is applied on the coil portion 352 of the first layer. The surface of the insulating layer 353 is flattened, and a thin insulating film (silicon oxide film 351A) is formed as a base layer on the insulating layer 353. Then, a second layer coil portion 352 is formed on the silicon oxide film 351A by the above-described procedure. By repeating such an operation, the coil component 35 is completed.

Next, the configurations of the base 2 and the drive unit 36 will be described in detail.
As shown in FIG. 1, the substrate 2 has a plurality of circular holes 21 formed in a matrix. As shown in FIG. 12, each hole 21 is provided with a ring-shaped receiving portion 22. The receiving portion 22 is supported by a plurality of ribs 23 extending from the inner surface of the hole 21 toward the center of the hole 21.

The drive unit 36 is for rotating the rotary body 31 accommodated in the first hole 11 of the base 1. As shown in FIG. 12, the drive unit 36 includes a drive shaft 361, a hub 362 connected to one end of the drive shaft 361, and a plurality of blades connected to the hub 362. And a propeller portion 363. The diameter of the propeller portion 363 is 1 mm or less, for example, about 100 μm. The other end of the drive shaft 361 is inserted into the receiving portion 22 in the hole 21.
In addition, a triangular pyramid-shaped hole 361A for inserting the shaft portion 323A of the rotating portion 32 is formed at the other end portion of the drive shaft 361. By inserting the shaft portion 323 </ b> A of the rotating portion 32 into the hole 361 </ b> A, the driving portion 36 is connected to the rotating portion 32. When wind or the like hits the propeller portion 363, the drive shaft 361 is rotated by the wind or the like. Due to the rotational drive of the drive shaft 361, the rotating part 32 is also rotationally driven, and the rotating body 31 rotates in the first hole 11. The magnetic flux from the magnet 33 of the rotating body 31 passes through the microcoil 352A along the central axis of the microcoil 352A. When the rotating body 31 rotates, the magnet 33 rotates, so that the central axis of the microcoil 352A is rotated. Crosses the magnetic flux from the magnet 33. That is, the direction of the magnetic flux passing through the microcoil 352A changes. As a result, each micro generator 3 generates power.
The drive unit 36 can be integrally formed by an optical modeling method. Some stereolithography methods are described in the following papers.
S. Maruo and K. Ikuta: Submicron stereolithography for the production of freely movable mechanisms by using single-photon polymerization, Sensors and Actuators A, vol. 100, No. 1 (2002) pp.70-76.

Next, the assembly procedure of the power generator 10 will be described.
A description will be given with reference to FIG.
First, the rotating body 31 is prepared. At this time, after housing the rotating part 32 in the housing 34, the magnet 33 is fitted between the outer peripheral surface of the cylindrical part 321 of the rotating unit 32 and the inner peripheral surface of the housing 34.
Next, the rotating body 31 is inserted into the first hole 11 of the base 2. Further, the coil component 35 is fitted into the second hole 14. When the coil component 35 is fitted into the second hole 14, the substrate 351 of the coil component 35 may be positioned at the bottom of the second hole 14. You may make it contact | abut to a side wall. In the present embodiment, the coil component 35 may be arranged so that the central axis of the microcoil 352A of the coil component 35 is orthogonal to the rotation axis X. Note that when the coil component 35 is fitted into the second hole 14, a micro operation robot such as a manipulator may be used.
Next, the base body 2 in which the drive unit 36 is fitted and the base body 1 in which the rotating body 31 and the coil part 352 are fitted are overlapped. Then, the shaft portion 323 </ b> A of the rotating portion 32 is inserted into the hole 361 </ b> A of the drive shaft 361 of the drive portion 36. Thereby, the assembly of the power generation device 10 is completed.

Next, the effect of this embodiment is demonstrated.
A plurality of coil portions 352 are arranged in parallel on the substrate 351 of the coil component 35 of the micro generator 3, and the central axis of each microcoil 352 </ b> A of the coil component 35 is orthogonal to the rotation axis X of the rotating body 31. ing. In addition, the coil component 35 is disposed at a position opposite to the locus formed by the plurality of magnets 33 being rotationally driven, and the magnet 33 has a different end at a direction orthogonal to the rotation axis X. Is magnetized.
In such a micro-generator 3, by rotating the magnet 33, a plurality of microcoils 352A on the substrate 351 are subjected to a change in magnetic flux at the same time. Thereby, the same state as the state in which the number of turns of the microcoil 352A is virtually increased can be created. In the present embodiment, sufficient reactance can be ensured in a limited space on the substrate 351, and the power generation efficiency of the micro power generator 3 can be increased.

Here, the effect of installing a plurality of coil parts on a board | substrate is demonstrated with reference to FIG. 13 and FIG.
First, a substrate having a width of 500 μm and a depth of 200 μm is assumed, and a state in which the coil portion is disposed on the substrate is assumed.
For example, FIG. 13A shows a core portion having a thickness of 1 μm and a width of 495 μm, and a micro coil spirally wound around the core portion. The number of turns of the microcoil is 100.
In FIG. 13B, core portions having a thickness of 1 μm and a width of 10 μm are arranged in parallel. Around each core portion, a 100-turn microcoil is wound. Further, the interval between the coil portions is 1 μm. On the substrate, 38 coil portions are arranged.
In FIG. 13C, core portions having a thickness of 1 μm and a width of 1 μm are arranged in parallel. Around each core portion, a 100-turn microcoil is wound. Further, the interval between the coil portions is 1 μm. On the substrate, 124 coil portions are arranged.

  FIG. 14 shows the relationship between the number of coil portions having 100-turn microcoils and reactance. In FIG. 14, it is assumed that the coil portions are not stacked as shown in FIG. 13.

Here, the reactance is expressed by the following Equation 1.
(Formula 1)
_{L = μ 0 μ r n ·} nSl
Here, μ ₀ indicates the magnetic permeability of the core portion, and μ _r indicates the resistivity of the microcoil. n is the number of turns of the microcoil, S is the cross-sectional area of the core, and l is the length of the core.

  As shown in FIG. 14, as the number of coil portions increases, the number of turns is virtually increased by connecting the coil portions in series, and the reactance increases. Thereby, power generation efficiency can be improved efficiently. If the number of coil portions is increased too much, the cross-sectional area of the core portion becomes small, and the value of the cross-sectional area of the core portion becomes dominant, so that the reactance is considered to decrease to a certain extent.

In the present embodiment, a plurality of coil portions 352 are stacked in a matrix on the substrate 351. As a result, not only the microcoil 352A adjacent in the in-plane direction of the substrate 351 but also the microcoil 352A adjacent in the thickness direction of the substrate 351 is subjected to a change in magnetic flux at the same time. Therefore, more microcoils 352A can surely receive the change in magnetic flux at the same time. Therefore, the power generation efficiency of the micro power generator 3 can be increased.
Furthermore, a plurality of coil portions 352 are arranged in parallel on the substrate 351 of the coil component 35, and the microcoil 352 </ b> A of each coil portion 352 faces the magnet 33. Therefore, for example, compared with the case where the coil part 352 is arrange | positioned in series, the distance of each coil part 352 and the magnet 33 can be shortened. Thereby, the power generation efficiency of the micro power generator 3 can be increased.

  Moreover, since the micro power generator 3 of the present embodiment includes a plurality of magnets 33 and a plurality of coil components 35 having a plurality of coil portions 352, power generation can be performed more efficiently.

In addition, the coil portions 352 are stacked in a matrix, and at least one end of the microcoil 352A of each coil portion 352 is positioned on the same plane orthogonal to the surface of the substrate 351, so that the micro portion of each coil portion 352 is arranged. The position of the end of the coil 352A is matched. The coil component 35 is arranged so that one end of each microcoil 352A on the substantially same plane orthogonal to the surface of the substrate 351 faces the rotating body 31 side.
Thereby, the distance between the magnet 33 and each microcoil 352A when the magnet 33 and the microcoil 352A are opposed to each other can be set to a substantially constant distance, and the microcoil 352A extremely far away from the magnet 33 can be obtained. Therefore, the power generation efficiency can be increased.

Moreover, in this embodiment, since the coil part 352 is coat | covered with the insulating layer 353, the contact between adjacent coil parts 352 can be prevented.
Further, since the coil portion 352 is embedded by the insulating layer 353, the surface of the insulating layer 353 is flattened, and the upper coil portion 352 is provided on the insulating layer 353, the upper coil portion 352 is inclined and formed. Can be prevented.

Further, the insulating film 352F and the barrier film 352E exist between the core part 352B of the coil part 352 and the microcoil 352A of the present embodiment.
When the core portion 352B and the microcoil 352A are in direct contact with each other, alloying may occur and the resistance value of the microcoil 352A may increase.
In this embodiment, since the periphery of the core portion 352B is covered with the insulating film 352F and the barrier film 352E, alloying of the core portion 352B and the microcoil 352A is prevented, and an increase in the resistance value of the microcoil 352A is prevented. be able to.
In addition, since the adhesion between the insulating film 352F and the core portion 352B is not good, the periphery of the core portion 352B is covered with the barrier film 352E, and then covered with the insulating film 352F, so that the insulating film 352F is prevented from peeling off. Can do.
Similarly, since the adhesion between the insulating film 352F and the first conductor film 352A1 constituting the microcoil 352A is not good, a barrier film 352D is provided on the first conductor film 352A1, and the insulating film 352F is provided on the barrier film 352D. By providing, peeling of the insulating film 352F can be prevented.

  Further, since the microcoil 352A generates heat, the insulating film 352F is made of any of a material such as a SiN film, a BCN film (boron carbonitride film), a DLC film (diamond-like carbon film), an AlN film, or a nanodiamond film. Thus, the heat of the microcoil 352A can be dissipated. In particular, in the present embodiment, since the plurality of coil portions 352 are arranged on the substrate 351, the heat of the microcoil 352A is hardly dissipated. However, the insulating film 352F is made of a SiN film, a BCN film (carbonitriding). By using any one of a boron film), a DLC film (diamond-like carbon film), an AlN film, and a nano diamond film, the heat of the microcoil 352A can be reliably radiated.

In the present embodiment, since the magnet 33 of the micro power generator 3 is a plane U shape, the magnetic flux from the end of the magnet 33 passes through the microcoil 352A along the central axis of the microcoil 352A. Thus, the magnetic flux passes through the microcoil 352A more efficiently. Thereby, power generation can be performed more efficiently.
Further, in the present embodiment, the magnet 33 is magnetized to have opposite ends (U-shaped end portions) in the direction orthogonal to the rotation axis X of the rotating portion 32 with different polarities, and is elongated along the rotating axis X. It extends to. Therefore, the area through which the magnetic flux from the magnet 33 passes can be made relatively large, so that more microcoils 352A can reliably receive a change in the magnetic flux at the same time. Therefore, the power generation efficiency of the micro power generator 3 can be reliably increased.

Furthermore, in the present embodiment, the first hole 11 for accommodating the rotating body 31 in the base 1 and the second hole 14 provided around the first hole 11 for inserting the coil component 35 are formed. Yes. When assembling the micro power generator 3, it is only necessary to insert the coil component 35 having the plurality of coil portions 352 into the second hole 14 and insert the rotating body 31 into the first hole 11. The machine 3 can be easily assembled.
In addition, after the plurality of rotating bodies 31 and the plurality of coil components 35 are inserted into the base body 1, the base body 2 into which the plurality of drive units 36 are inserted and the base body 1 are overlapped, and the drive shaft 361 of the drive unit 36 is overlapped. The assembly of the power generation apparatus 10 is completed simply by inserting the shaft portion 323A of the rotating portion 32 into the hole 361A. According to such an assembling process, a plurality of micro-generators 3 can be assembled at the same time to obtain the power generation device 10, so that no effort is required for manufacturing the power generation device 10.

  Furthermore, in the coil component 35 of the present embodiment, the first conductor film 352A1 and the second conductor film 352A2 are directly joined and are not connected via a through hole, so that generation of power loss due to the through hole is prevented. be able to.

In addition, the power generation apparatus 10 according to the present embodiment includes a plurality of micro power generators 3. Each micro power generator 3 can generate electric power when wind, water flow, or the like hits the propeller unit 363. Therefore, for example, if the power generation device 10 is attached to a moving object such as a bird or fish, power can be generated as the moving object moves. Therefore, as shown in FIG. 15, by attaching the power generation device 10 and the sensor device and communication device driven by the power generation device 10 to a moving object such as a bird or a fish, ecological changes or Remote sensing of environmental changes. Electric power from the power generation apparatus 10 is supplied to the sensor device and the communication device. The sensor signal detected by the sensor device is transmitted to the relay system and the GPS system by the communication device. And it is possible to remotely sense ecological changes and environmental changes through the global environmental information management system.
Furthermore, since the diameter of the propeller portion 363 of the micro power generator 3 of the present embodiment is about 100 μm, power can be generated even with a slight wind flow or water flow.
Further, since the power generation apparatus 10 includes a plurality of micro power generators 3, it can supply power to small electronic devices such as sensors. Thereby, utilization of a dry cell etc. can be reduced and it is useful for environmental load reduction.

(Second embodiment)
A second embodiment will be described with reference to FIG. FIG. 16 is a partially enlarged view of the base 1 and shows one rotating body 31 and a coil component 35 arranged around the rotating body 31.
In the said embodiment, although the magnet 33 was planar U shape, the magnet 43 is planar substantially rectangular shape in this embodiment.
Both end portions of the rotating portion 32 of the magnet 43 in the direction orthogonal to the rotation axis X are magnetized with different polarities. Further, like the magnet 33, the magnet 43 extends in a long shape along the rotation axis X.
Other structures are the same as those in the above embodiment.
According to this embodiment, the same effects as those of the embodiment can be obtained.

(Third embodiment)
This embodiment will be described with reference to FIG.
FIG. 17A shows a perspective view of the micro-generator 5, and FIG. 17B shows a magnet 53 and a holding member 54. Further, FIG. 17C shows the coil component 35 and the holding member 55.
The micro power generator 5 includes a plurality of magnets 53 that are rotationally driven, and a plurality of coil components 35 that are disposed at positions facing a trajectory formed when the plurality of magnets 53 are rotationally driven.
The magnet 53 is a rod-shaped magnet embedded in the ring-shaped holding member 54. The holding member 54 is made of resin, and the magnet 53 is embedded in the ring-shaped holding member 54 along the circumference. One end of the magnet 53 is exposed from the surface of the holding member 54.
The magnets 53 are magnetized at opposite ends in a direction parallel to the rotation axis X, and the polarities of the adjacent end portions of the adjacent magnets 53 are different from each other. That is, from the surface of the holding member 54, the N pole and the S pole of the magnet 53 are alternately exposed.

The coil component 35 is inserted into a ring-shaped holding member 55. A hole for inserting the coil component 35 is formed in the holding member 55, and the plurality of coil components 35 are arranged so as to draw an arc. The coil component 35 is inserted into the holding member 55 so that the central axis of the microcoil 352A is parallel to the central axis of the ring-shaped holding member 55.
The holding member 54 into which the magnet 53 is inserted is opposed to the holding member 55 into which the coil component 35 is inserted (here, the surface of the holding member 54 where the end of the magnet 53 is exposed, the coil component 35, When the holding members 54 and 55 are made to face each other so that they face each other), the end of the microcoil 352A of the coil component 35 is one of the ends (in the direction parallel to the rotation axis X of the magnet 53) ( It faces the end portion exposed from the surface of the holding member 54. The distance between the end of the magnet 53 exposed from the surface of the holding member 54 and the coil component 35 is 1 to 50 μm.
Further, the central axis of the microcoil 352A is substantially parallel to the rotation axis X.

In such a micro-generator 5, the holding member 55 in which the coil component 35 is inserted is inserted into the bottom of the first hole of the base in which the same first hole as in the first embodiment is formed.
On the other hand, a holding member 54 in which a magnet 53 is embedded is inserted between the rotating unit 32 of the first embodiment and the housing 34 to constitute a rotating body. And this rotary body is inserted in the 1st hole of a base | substrate.
Next, as in the first embodiment, the base body 2 in which the drive unit 36 is fitted and the base body in which the rotating body and the coil component 35 are fitted are overlapped.
The magnet 53 is rotated by the rotation of the rotating body driven by the drive unit 36. Then, the direction of the magnetic flux passing through the microcoil 352A changes. Thereby, electric power generation is performed by each generator 5.

According to this embodiment, the same effects as those of the above-described embodiments can be obtained, and the following effects can be obtained.
In the generator 5 of this embodiment, the coil component 35 is disposed so that the central axis of the microcoil 352A is substantially parallel to the rotation axis X, and the end of the microcoil 352A is in a direction parallel to the rotation axis X. Of the both end portions of the magnet 53, one end portion is opposed. Accordingly, the magnetic flux from the end of the magnet 53 passes through the microcoil 352A along the central axis of the microcoil 352A. Since the polarities of the adjacent end portions of the adjacent magnets 53 are different from each other, the direction of the magnetic flux from the end portion of the magnet 53 is along the central axis of the microcoil 352A by rotating the rotation axis X. Will change.
Thereby, electric power can be generated more efficiently.

  In this embodiment, since the holding member 54 with the magnet 53 inserted is arranged on the holding member 55 with the coil component 35 inserted, the distance between the microcoil 352A and the magnet 53 is arranged. Can be very close. Thereby, power generation efficiency can be further improved.

  Furthermore, in the present embodiment, the end of the magnet 53 only needs to be exposed from the surface of the holding member 54, and it is not necessary to increase the length of the magnet 53. Therefore, since the length dimension of the magnet 53 can be shortened, the load at the time of rotating the magnet 53 can be reduced.

(Reference form)
A reference embodiment will be described with reference to FIGS. 18 and 19.
The micro generator 6 shown in FIG.
The rotation axis X, the plurality of magnets 33 that are arranged around the rotation axis X, and that rotate together with the rotation axis X, and the positions that are formed opposite to the trajectory formed when the plurality of magnets 33 are rotationally driven are arranged. Coil part 65,
The coil component 65 includes a substrate 651 and a plurality of coil portions 652 provided on the substrate 651.
Each of the coil portions 652 is a micro power generator having a spiral shape, a conductive microcoil having a central axis extending along the surface of the substrate 651 and the central axes being substantially parallel to each other.
In the micro power generator 6, when the magnet 33 is rotationally driven, the central axis of the micro coil crosses the magnetic flux.

Below, the detail of the micro generator 6 is demonstrated.
FIG. 19 shows a coil component 65 of the micro power generator 6.
The coil component 65 includes a substrate 651 and a plurality of coil portions 652.
The substrate 651 is made of a ferromagnetic metal, and a plurality of through holes 651A are provided at a predetermined interval.
The coil portion 652 is a microcoil, and includes a first conductor film 652A provided in a predetermined pattern on the surface of the substrate 651, a second conductor film 652B provided in a predetermined pattern on the back surface of the substrate 651, and a through hole. And a third conductor film (not shown) provided in 651A.
The first conductor film 652A, the second conductor film 652B, and the third conductor film are, for example, Cu films.
As shown in FIG. 18, the configuration of the micro power generator 6 other than the coil component 65 is the same as that of the first embodiment.
When the coil component 65 is inserted into the second hole 14 of the base body 1, the coil component 65 is disposed on the opposite side of the rotation axis X of the rotating body 31 with the magnet 33 interposed therebetween. In addition, the coil component 65 is disposed at a position facing a locus formed by the plurality of magnets 33 being rotationally driven. Furthermore, the central axis of each microcoil of the coil component 65 is orthogonal to the rotational axis X of the rotating body 31.

Even when the coil component 65 having such a configuration is used, the same effects as those of the first embodiment can be obtained.
In addition, although the example which replaced the coil component 35 of the micro generator of 1st embodiment with the coil component 65 was demonstrated here, the coil component 35 of 2nd embodiment and 3rd embodiment was replaced with the coil component 65. Also good.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the coil component 35 of each of the above embodiments, the plurality of coil portions 352 are stacked in a matrix on the substrate 351, but may not be stacked.
Further, although the microcoils 352A of the coil portions 352 of the coil component 35 of each of the embodiments are not connected to each other, as shown in FIG. 20, a conducting wire 37 for connecting the ends of the microcoils 352A is provided. May be. The microcoil 352A is connected in series by connecting the microcoil 352A with the conducting wire 37. Thereby, the same state as the state in which the number of turns of the microcoil 352A is virtually increased can be created, and the power generation efficiency can be reliably increased.
As shown in FIG. 20, each row may be connected in series by a conducting wire 37, and each row may be connected in parallel by a conducting wire 38.
Whether to connect in series or in parallel may be appropriately determined in consideration of wiring resistance.

  Furthermore, in each said embodiment, although the coil component 35 was used for the micro generator, the coil component concerning this invention is not restricted to what is used for a micro generator. For example, you may use for measuring instruments, such as NMR. When the coil component of the present invention is used in a measuring instrument such as NMR, the following advantages can be mentioned.

A plurality of coil portions having microcoils are arranged in parallel on the coil component substrate. Therefore, for example, by using the coil component of the present invention for a measuring instrument such as NMR, a large number of minute regions can be measured. Furthermore, since the microcoils of each coil part are arranged so that the central axes are substantially parallel to each other, it is more accurate when measuring a large number of micro areas than when the microcoils are randomly arranged. It becomes possible to measure.

-In addition, in the coil component of the present invention, the coil portions are stacked in a matrix, and one end of the microcoil of each coil portion is positioned on the same plane perpendicular to the substrate surface. The end positions are aligned. Therefore, the position of each microcoil from the sample can be made substantially coincident, and each minute region of the sample can be accurately measured.

  Furthermore, a free electron laser, a magnetic recording device, a high frequency integrated circuit element, a vacuum microdevice, etc. can be used for the coil component of the present invention. Furthermore, you may use the coil component of this invention for the other magnetic sensor (device which senses a magnetic signal) different from NMR mentioned above.

  Further, in each of the embodiments described above, the power generation device 10 is assembled by superimposing the base body 2 in which the drive unit 36 is fitted and the base body 1 in which the rotating body 31 and the coil part 352 are fitted, but this is not limitative. For example, the power generation device may be assembled by attaching the driving unit 36 to each rotating body 31 without providing the base body 2.

  Furthermore, in the third embodiment, one end of the magnet 53 is exposed from the surface of the holding member 54, but the end of the magnet 53 may not be exposed from the surface of the holding member 54. When the magnetic flux density from the magnet 53 is high, the magnet 53 may be completely embedded in the resin holding member 54.

It is a disassembled perspective view which shows the electric power generating apparatus concerning 1st embodiment of this invention. It is the elements on larger scale of the base | substrate of an electric power generating apparatus. It is a disassembled perspective view of a rotary body. It is the top view which showed the state in which the rotary body was accommodated in the 1st hole of the base | substrate. It is the figure which showed the cross section of the coil components typically. It is sectional drawing which shows the manufacturing process of coil components. It is sectional drawing which shows the manufacturing process of coil components. It is sectional drawing which shows the manufacturing process of coil components. It is sectional drawing which shows the manufacturing process of coil components. It is sectional drawing which shows the manufacturing process of coil components. It is sectional drawing which shows the manufacturing process of coil components. It is a perspective view which shows a drive part. It is a figure which shows the state which installed the several coil part on the board | substrate. It is a figure which shows the relationship between the number of coil parts which have a microcoil of 100 turns, and reactance. It is a figure which shows the state which performs remote sensing using a power generator. It is a top view which shows the principal part of the micro generator concerning 2nd embodiment of this invention. (A) is a perspective view of the micro generator concerning a third embodiment of the present invention, (B) is a figure showing a magnet and a holding member, and (C) shows a coil component and a holding member. FIG. It is a top view which shows the principal part of the micro generator in a reference form. It is a top view which shows the coil components of the micro generator in a reference form. It is a figure which shows the coil components concerning the modification of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate 2 Substrate 3 Micro generator 5 Micro generator 6 Micro generator 10 Power generator 11 First hole 12 Receiving part 13 Rib 14 Second hole 21 Hole 22 Receiving part 23 Rib 31 Rotating body 32 Rotating part 33 Magnet 34 Housing 35 Coil part 36 Drive part 37 Conductor 38 Conductor 43 Magnet 53 Magnet 54 Holding member 55 Holding member 65 Coil part 321 Tubular part 321A Rib 323 Shaft part 323A Shaft part 323B Shaft part 351 Substrate 351A Silicon oxide film 352 Coil part 352A Microcoil 352A1 First conductor film 352A2 Second conductor film 352A3 Cu film 352B Core part 352B1 Fe film 352C Barrier film 352D Barrier film 352E Barrier film 352E1 TiN film 352F Insulating film 352F1 SiN film 352G Barrier film 352G1 TiN film 353 Insulating layer 36 361A holes 362 hub 363 propeller 651 substrate 651A through hole 652 coil portion 652A first conductive film 652B second conductor film

Claims (16)

A substrate,
A plurality of coil portions disposed on the substrate;
Each coil part is
A coil component having a conductive microcoil which is formed in a spiral shape and whose central axis extends along the surface of the substrate and whose central axes are substantially parallel to each other. The coil component according to claim 1,
One end of the microcoil of each coil part is on the same plane orthogonal to the substrate surface, the plurality of coil parts are N rows and M columns (N is an integer of 2 or more, M is 1 or more) Coil components arranged in layers on the substrate in an integer) matrix. The coil component according to claim 2,
The coil component which has an insulating layer between one coil part laminated | stacked among the said coil parts, and the other coil part. The coil component according to any one of claims 1 to 3,
The coil portion includes a plurality of first conductor films arranged in parallel in a predetermined pattern on the substrate,
Crossing each first conductor film on the first conductor film, arranged so that both end portions of each first conductor film are exposed, and a core portion of a magnetic body extending along the substrate surface;
A plurality of second conductor films arranged in parallel in a predetermined pattern on the core,
The microcoil is adjacent to the one first conductor film and an end exposed on one side of the core of the first conductor film of the first conductor film by the second conductor film. The coil component which is comprised by connecting the edge part exposed to the other side of the said core part of the other 1st conductor film to do. The coil component according to claim 4,
The coil part which the edge part of said 1st conductor film and the edge part of said 2nd conductor film are directly joined. The coil component according to claim 4 or 5,
A coil component in which an outer peripheral surface of the core is covered with an insulating film, and the microcoil surrounds the periphery of the insulating film. The coil component according to claim 6,
The coil component, wherein the insulating film is one of a SiN film, a boron carbonitride film, a diamond-like carbon film, an AlN film, and a nanodiamond film. The coil component according to claim 6 or 7,
The said insulating film is a coil component which has covered the outer peripheral surface of the said core part through the barrier film | membrane. The coil component according to claim 8, wherein
The coil component, wherein the barrier film is a TiN film or a TaN film. The coil component according to any one of claims 1 to 9,
The coil component by which the conducting wire which connects the edge parts of a microcoil is arrange | positioned between the said microcoils of these coil parts. A rotation axis;
A plurality of magnets arranged around the rotating shaft and rotating together with the rotating shaft;
A coil component disposed at a position opposite to a trajectory formed by rotationally driving the plurality of magnets;
The micro power generator according to claim 1, wherein the coil component is a coil component according to claim 1. The micro generator according to claim 11,
Each magnet is magnetized with different polarities at both ends in a direction perpendicular to the rotation axis,
The coil component is disposed on the opposite side of the rotating shaft across the magnet, and the rotating shaft is disposed so that the central axis of the micro coil of the coil component is substantially orthogonal. Machine. The micro power generator according to claim 12,
Each of the magnets has a substantially U-shaped plane, and both ends of the U-shaped magnets are magnetized with different polarities,
A micro-generator in which both end portions of the U-shape are directed to the coil component side. The micro generator according to claim 11,
Each magnet is magnetized at opposite ends in a direction parallel to the rotation axis, and adjacent magnets have different polarities at adjacent ends,
The coil component is disposed so that a central axis of the microcoil is substantially parallel to the rotation axis, and an end of the microcoil is opposed to one end of the both ends of the magnet. Micro-generator arranged as follows.   A power generator having a plurality of the micro power generators according to claim 11. A coil in which a plurality of coil portions having a magnetic core portion extending along the surface of the substrate and a conductive microcoil formed in a spiral shape so as to surround the periphery of the core portion are provided on the substrate. A method of manufacturing a component,
Forming a plurality of first conductor films arranged in parallel in a predetermined pattern on the substrate;
Providing the core on the first conductor film so as to traverse the first conductor film and to expose both ends of each first conductor film;
A plurality of second conductor films arranged in parallel in a predetermined pattern are formed on the core part, and one of the core parts of the first conductor film of the first conductor film is formed by the second conductor film. The micro coil is formed by connecting an end exposed on the other side and an end exposed on the other side of the core of the other first conductive film adjacent to the first first conductive film. And a process of
A step of covering the coil portion formed by each step with an insulating layer;
A method of manufacturing a coil component, comprising: repeating the step of forming the first conductor film, the step of providing a core portion, and the step of forming a microcoil, and laminating another coil portion on the insulating layer. .