JP2007175784A5 - - Google Patents

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Publication number
JP2007175784A5
JP2007175784A5 JP2005373427A JP2005373427A JP2007175784A5 JP 2007175784 A5 JP2007175784 A5 JP 2007175784A5 JP 2005373427 A JP2005373427 A JP 2005373427A JP 2005373427 A JP2005373427 A JP 2005373427A JP 2007175784 A5 JP2007175784 A5 JP 2007175784A5
Authority
JP
Japan
Prior art keywords
end portion
groove portions
main roller
wire saw
interval
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005373427A
Other languages
English (en)
Japanese (ja)
Other versions
JP4828935B2 (ja
JP2007175784A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005373427A priority Critical patent/JP4828935B2/ja
Priority claimed from JP2005373427A external-priority patent/JP4828935B2/ja
Publication of JP2007175784A publication Critical patent/JP2007175784A/ja
Publication of JP2007175784A5 publication Critical patent/JP2007175784A5/ja
Application granted granted Critical
Publication of JP4828935B2 publication Critical patent/JP4828935B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005373427A 2005-12-26 2005-12-26 ワイヤーソー装置を用いた切断方法 Expired - Fee Related JP4828935B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005373427A JP4828935B2 (ja) 2005-12-26 2005-12-26 ワイヤーソー装置を用いた切断方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005373427A JP4828935B2 (ja) 2005-12-26 2005-12-26 ワイヤーソー装置を用いた切断方法

Publications (3)

Publication Number Publication Date
JP2007175784A JP2007175784A (ja) 2007-07-12
JP2007175784A5 true JP2007175784A5 (https=) 2008-07-31
JP4828935B2 JP4828935B2 (ja) 2011-11-30

Family

ID=38301481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005373427A Expired - Fee Related JP4828935B2 (ja) 2005-12-26 2005-12-26 ワイヤーソー装置を用いた切断方法

Country Status (1)

Country Link
JP (1) JP4828935B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101659089B (zh) * 2008-08-28 2012-02-15 上海九晶电子材料股份有限公司 一种多线切割机导轮开槽方法
FR2947831B1 (fr) * 2009-07-09 2012-02-03 Saint Gobain Ct Recherches Suspension de grains abrasifs

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3074006B2 (ja) * 1990-09-25 2000-08-07 株式会社日平トヤマ ワイヤーソー装置
JPH07117043A (ja) * 1993-10-28 1995-05-09 Kyocera Corp 半導体基板の形成方法
JPH09290417A (ja) * 1996-04-27 1997-11-11 Nippei Toyama Corp ワイヤソー及びワーク加工方法
JPH1044142A (ja) * 1996-08-01 1998-02-17 Citizen Watch Co Ltd マルチワイヤーソー
JPH11123649A (ja) * 1997-10-27 1999-05-11 Taiheiyo Cement Corp ワイヤーソー用多溝ローラ
JPH11123648A (ja) * 1997-10-27 1999-05-11 Taiheiyo Cement Corp ワイヤーソー用多溝ローラ
JP2000005999A (ja) * 1998-06-24 2000-01-11 Tokyo Seimitsu Co Ltd ワイヤソーのグルーブローラ
JP2005014157A (ja) * 2003-06-26 2005-01-20 Toshiba Ceramics Co Ltd マルチワイヤソー

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