JP2007173336A - Function supply method, exposure method, exposure apparatus, measuring/inspection method, measuring/inspection apparatus, function supply system, program, recording medium, and providing condition determining method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve production efficiency of a device by quickly changing processing procedures in cooperation of a plurality of kinds of device manufacturing processing apparatuses and processing details of each apparatus. <P>SOLUTION: On the basis of license information of a customer loaded from a customer license management data base in step 401, in steps 403 to 412 it is judged whether or not there are existent restriction conditions, use circumstances, custom support, custom service or the like. If there is existent any, then the number of counts thereof is calculated. In the next step 419, the number of accumulated counts is calculated, in the next step 421 sales prices are calculated, and in step 423 the sales prices are noticed to customers. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a function supply method, an exposure method, an exposure apparatus, a measurement / inspection method, a measurement / inspection apparatus, a function supply system, a program, a recording medium, and a provision condition determination method, and more specifically, a plurality of device manufacturing processing apparatuses Function supply method and system for supplying a support function for supporting processing operations across the substrate, an exposure method and apparatus for exposing a predetermined pattern on a substrate, a measurement / inspection method and apparatus for performing a predetermined measurement or inspection relating to a device manufacturing process, A program for causing a computer system to supply support information used to execute the support function to a support system that supplies a support function for supporting a processing operation across a plurality of device manufacturing processing apparatuses, and the program is recorded Provided when providing information for data processing related to recorded recording media and device manufacturing processing It relates to the provision condition determining method of determining the matter.

  Conventionally, in order to reflect the measurement / inspection results of the measuring / inspection device that measures and inspects the device to be processed most quickly in the processing of the processing device that processes the device, data communication between these devices Should be possible. However, between these devices, file formats such as recipe files and measurement result files, communication message formats such as stream functions, communication protocol formats such as HSMS [TCP / IP], SECS-I [RS232C], etc. Therefore, in order to enable data communication of each device, it is necessary to modify each device.

  On the other hand, if we try to respond quickly to the occurrence and maintenance of failures in each device manufacturing processing equipment, the introduction of new equipment, etc., the processing procedures in the cooperative operation of multiple types of device manufacturing processing equipment and the processing contents of each device will be promptly However, each device manufacturing processing equipment is designed under a unique specification built on a unified standard that should be the basis for system integration, and the processing details are described. The file format of individual recipe files is not uniform among devices, so that each device manufacturing processor operates independently according to individual recipe files under a fixed and simple processing procedure. Is the current situation. Under such circumstances, it has been difficult to flexibly change the cooperative operation across a plurality of devices.

  The disadvantages as described above are not desirable for device productivity, and there is a demand for improvement on these disadvantages.

  According to a first aspect of the present invention, there is provided a function supply method for supplying a support function for supporting a processing operation across a plurality of device manufacturing processing apparatuses, wherein the support system for executing the support function includes the plurality of support functions. Including a step of providing support information used to execute a support function for supporting processing operations across device manufacturing processing apparatuses in a form readable by the support system, separately from the support system, The function supply method is characterized in that the support function can be executed by causing the support system to read the support information provided separately.

  According to this, support information used for executing a support function for supporting a processing operation that supports a processing operation across a plurality of device manufacturing processing apparatuses by a support system that executes the support function in a form that the support system can read, Since it is provided separately from the support system, even if the processing operation across multiple device manufacturing processing apparatuses is changed, the processing operation is supported by using the support information corresponding to the changed processing operation using a common support function It becomes possible.

  According to a second aspect of the present invention, in an exposure method for exposing a predetermined pattern on a substrate, the support system receives the support information executed by the support system using the support information provided by the function supply method of the present invention. An exposure method comprising exposing the predetermined pattern onto a substrate. In such a case, the exposure is performed in response to the support information provided by the function supply method of the present invention, so that the productivity of the device manufacturing process including the exposure process is improved.

  According to a third aspect of the present invention, in an exposure apparatus that is connected to the support system and exposes a predetermined pattern on a substrate, the support system uses the support information provided by the function supply method of the present invention. An exposure apparatus that exposes the predetermined pattern on a substrate in response to a support function to be executed. In such a case, the exposure is performed in response to the support information provided by the function supply method of the present invention, so that the productivity of the device manufacturing process including the exposure process is improved.

  According to a fourth aspect of the present invention, in the measurement / inspection method for performing a predetermined measurement or inspection related to device manufacturing processing, the support system executes the support information provided by the function supply method of the present invention. The measurement / inspection method is characterized by receiving the support information and performing the predetermined measurement or inspection. In such a case, since measurement / inspection is performed in response to the support information provided by the function supply method of the present invention, the productivity of the device manufacturing process including the measurement / inspection process is improved.

  According to a fifth aspect of the present invention, in the measurement / inspection apparatus that is connected to the support system and performs predetermined measurement or inspection related to device manufacturing processing, the support information provided by the function supply method of the present invention is The measurement / inspection apparatus according to claim 1, wherein the predetermined measurement or inspection is performed in response to a support function executed by the support system. In such a case, since the measurement / inspection is performed in response to the support information provided by the function supply method of the present invention, the device manufacturing process includes a measurement / inspection process when performing a predetermined measurement or inspection related to the device manufacturing process. Productivity is improved.

  From a sixth viewpoint, the present invention is a function supply system that supplies a support function for supporting a processing operation across a plurality of device manufacturing processing apparatuses, and is connected to the support system that executes the support function. Distribution of support information used by the support system to execute a support function for supporting processing operations across the plurality of device manufacturing processing apparatuses in a form readable by the support system It is the function supply system characterized by having a part.

  According to this, support information used for executing a support function for supporting a processing operation that supports a processing operation across a plurality of device manufacturing processing apparatuses by a support system that executes the support function in a form that the support system can read, Since it is provided separately from the support system, even if the processing operation across multiple device manufacturing processing apparatuses is changed, the processing operation is supported by using the support information corresponding to the changed processing operation using a common support function It becomes possible.

  According to a seventh aspect of the present invention, a support system for supplying a support function for supporting a processing operation across a plurality of device manufacturing processing apparatuses is supplied with support information used for executing the support function. A program to be executed by a computer system, wherein specific support information selected from a plurality of support information prepared in advance is distributed to the computer system in a form readable by the support system separately from the support system It is a program characterized by including a process.

  According to this, support information used for executing a support function for supporting a processing operation that supports a processing operation across a plurality of device manufacturing processing apparatuses by a support system that executes the support function in a form that the support system can read, Since it is provided separately from the support system, even if the processing operation across multiple device manufacturing processing apparatuses is changed, the processing operation is supported by using the support information corresponding to the changed processing operation using a common support function It becomes possible.

  According to an eighth aspect, the present invention is a recording medium that records the program of the present invention in a state that can be read and executed by a computer system.

  According to a ninth aspect of the present invention, there is provided a providing condition determining method for determining a providing condition when providing information for data processing related to a device manufacturing process, and the data of the data processed using the information A provision condition determination characterized by executing a predetermined calculation based on at least one of an amount and a type of target data processed in the data processing, and determining the provision condition according to the predetermined calculation result Is the method.

  According to this, it is possible to appropriately determine the information provision condition according to the calculation result of the predetermined calculation based on the amount of data to be processed and the type of target data.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

  FIG. 1 shows a schematic configuration of an example of a network system 3000 according to an embodiment of the present invention. As shown in FIG. 1, the network system 3000 manufactures manufacturing lines of a plurality of device manufacturers that manufacture electronic devices, device manufacturing processing apparatuses and software that operate on the manufacturing lines, and delivers them to the device manufacturers. This is a system constructed by connecting a manufacturer (hereinafter referred to as an apparatus manufacturer) with a communication network. The purpose of the network system 3000 is to improve the efficiency of transactions and the like performed between a device manufacturer and an apparatus manufacturer by data communication via the communication network.

  In this embodiment, the network system 3000 mainly includes a support system (a communication server described later) having a data communication support function that enables data communication between different types of devices operated by device manufacturers, Provision price (fee) when a license agreement is made to buy or sell data files or program files used by a support system (a management controller described later) having a cooperative operation control function that enables cooperative operations, and use of those files. ) Is a system for determining.

  As shown in FIG. 1, a network system 3000 includes three customer systems 1000 including production lines and network terminals of three customer manufacturers, customer A, customer B, and customer C, a communication network 1500, and device manufacturing. The license server 2000 includes a manufacturer's license server 2000 and a database 2500 referred to by the license server 2000. The communication network 1500 can be the Internet. In this case, it is desirable to encrypt communication data to be transmitted. Further, the communication network 1500 may be a dedicated line connecting the device manufacturer and the device manufacturer.

  The customer system 1000 is built in a device manufacturing factory of a device manufacturer that is a customer including a device manufacturing line including a plurality of types of device manufacturing processing apparatuses for manufacturing devices and a computer terminal that can be connected to the communication network 1500. It is a device manufacturing system.

  As shown in FIG. 2, the customer system 1000 includes an exposure apparatus 100, a track 200, a communication server 150, a management controller 160, a device manufacturing processing apparatus group 900, and a host system 600. Yes.

[Exposure equipment]
The exposure apparatus 100 is an apparatus that transfers a device pattern to a wafer coated with a photoresist. An exposure apparatus 100 includes an illumination system that emits exposure illumination light, a stage that holds a reticle on which a device pattern illuminated by the illumination light is formed, a projection optical system that projects a device pattern illuminated by the illumination light, etc. , A stage for holding a wafer to be exposed, a control system thereof, and the like. The exposure apparatus 100 drives each of the above stages with respect to the illumination light for exposure, and repeats the relative synchronous scanning of the reticle and the wafer and the stepping of the wafer, thereby changing the device pattern on the reticle to a plurality of different patterns on the wafer. Transcribed to the area. That is, the exposure apparatus 100 is a scanning exposure (step-and-scan) type exposure apparatus.

  The control system of the exposure apparatus includes an exposure amount control system that controls the intensity (exposure amount) of illumination light, synchronous control of both stages, and autofocus / leveling control that matches the wafer surface within the depth of focus of the projection optical system ( A stage control system that simply performs focus control) is provided below.

  The exposure amount control system performs feedback control for controlling the exposure amount to match the target value based on detection values of various exposure amount sensors capable of detecting the exposure amount. The stage control system performs feedback control based on the measurement value of the interferometer that measures the position of the stage, thereby realizing position control and speed control of both stages. The exposure apparatus 100 is provided with a multipoint AF (autofocus) sensor that detects a focus / leveling shift on the wafer surface at a plurality of detection points. The stage control system detects the wafer surface height from, for example, nine detection points (9 channels) among the plurality of detection points of the multipoint AF sensor, and displays the wafer surface corresponding to the exposure area on the image of the projection optical system. Focus control is realized by performing feedback control that matches the surface.

  In the exposure apparatus 100, a two-dimensional coordinate system related to synchronous control of both stages is an XY coordinate system (the synchronous scanning direction is the Y axis), and a coordinate axis parallel to the optical axis of the projection optical system is Z. Stage control is performed under the XYZ coordinate system. In the following, among the stage control systems, a control system that performs synchronous control of both stages is referred to as a synchronous control system, and a control system that controls the rotation of the stage position (wafer surface) around the Z position, the X axis, and the Y axis. The focus control system will be described.

  In the exposure apparatus 100, several factors defining the operation of each control system are converted into control parameters, and these values can be set freely.

  On the wafer W, there are a plurality of regions where the device pattern is transferred and formed. This area is called a shot area. A wafer mark is attached to each shot area. The wafer mark is a mark whose position information can be detected from its shape and the like. For example, the wafer mark is shown as a line and space mark. In addition to the shape of the wafer mark, a box mark, a cross mark, or the like may be employed.

  In the exposure apparatus 100, it is necessary to accurately overlay and expose the device pattern on the reticle on the shot area on the wafer W. In order to realize accurate overlay exposure, it is necessary to accurately grasp the position of each shot area. The wafer mark is provided in order to grasp the position of each shot area (the center position). Since the wafer mark is transferred and formed together with the device pattern of the shot area to which the wafer mark is attached, their positional relationship on the wafer W is substantially fixed. If the position of the mark is known, the center of the shot area is determined. You can see the position.

  In order to measure the position of the wafer mark, the exposure apparatus 100 is provided with an alignment system for measuring the position of the wafer mark. In this alignment system, a waveform relating to a wafer surface including a wafer mark, for example, a waveform corresponding to the unevenness of the wafer surface is photoelectrically detected using an alignment sensor provided inside. By this photoelectric detection, waveform data corresponding to the wafer surface including this wafer mark can be obtained. In the alignment system, a waveform (mark waveform) corresponding to the mark is extracted from the detected waveform data, and the position of the mark waveform is detected based on the extraction result. In the alignment system, the position of the wafer mark in the XY coordinate system is calculated based on the position of the detected mark waveform and the position of the detection visual field of the alignment sensor. In exposure apparatus 100, the transfer position of the device pattern is determined based on the calculation result.

  In order to perform accurate overlay exposure of device patterns, the position information of all shot areas on the wafer may be measured, but this may affect the throughput. Therefore, the exposure apparatus 100 employs a global alignment technique that limits the wafer marks to be actually measured and statistically estimates the arrangement of shot areas on the wafer from the measurement results of the measured wafer mark positions. . In the exposure apparatus 100, as this global alignment, a so-called EGA method in which a deviation of an actual shot arrangement from a designed shot arrangement is expressed by an X, Y polynomial and a statistical calculation is performed to obtain an appropriate coefficient in the polynomial. Wafer alignment is adopted. In the EGA-type wafer alignment, first, several shot areas for measuring a measurement target wafer mark are selected. The selected shot area is called a sample shot. In the alignment system, the position of a wafer mark (sample mark) attached to the sample shot is measured. Such a measurement operation is hereinafter referred to as EGA measurement.

  In the EGA type wafer alignment, a correction amount representing the XY position coordinates of each shot region is estimated by a statistical calculation based on the measurement result of the EGA measurement, that is, the position information of several sample marks. Such an operation is hereinafter referred to as an EGA operation. The EGA wafer alignment is disclosed in, for example, Japanese Patent Application Laid-Open No. 61-44429, and the detailed description thereof is omitted.

  The exposure apparatus 100 is also provided with an adjustment device capable of adjusting the aberration of the projection optical system and an illuminance unevenness sensor.

[truck]
The track 200 is disposed in contact with a chamber (not shown) surrounding the exposure apparatus 100. The track 200 mainly carries in / out wafers with respect to the exposure apparatus 100.

[Coater / Developer]
In the track 200, a coater / developer (C / D) 110 for applying and developing a resist is provided. The C / D 110 applies and develops a photoresist on the wafer. The C / D 110 can operate independently of the exposure apparatus 100 and the measurement / inspection instrument 120. The C / D 110 is disposed along the transport line of the track 200. Therefore, this transfer line enables wafer transfer between the exposure apparatus 100, the C / D 110, and the measuring / inspecting instrument 120.

[Measurement and inspection equipment]
In the track 200, a composite measurement / inspection instrument 120 capable of performing various measurements / inspections on the wafer before and after the exposure of the wafer by the exposure apparatus 100 (that is, before and after) is provided. Yes. The measurement / inspection instrument 120 includes a pre-measurement / inspection instrument that performs measurement before exposure and a post-measurement / inspection instrument that performs measurement after exposure.

  The pre-measurement / inspection instrument performs measurement for optimizing the exposure conditions in the exposure apparatus 100 before the wafer is transferred to the exposure apparatus 100. The measurement contents of the pre-measurement / inspector include, for example, alignment-related parameters, pre-alignment-related parameters, wafer flatness, reticle flatness, wafer temperature, wafer film thickness, reticle temperature, etc. Includes wafer film inspection, wafer defect / foreign matter inspection, reticle defect / foreign matter inspection, and the like. Note that the pre-alignment is rough alignment based on the wafer outer shape performed by the exposure apparatus 100 before wafer alignment. The measurement / inspection device 120 can output the results of the pre-measurement / inspection to the outside via a communication network in the system. The measuring / inspecting instrument 120 can operate independently of the exposure apparatus 100 and the C / D 110. Here, the wafer film inspection includes inspection of the film thickness, film thickness unevenness, film defect, foreign matter, scratch, etc. of the film formed on the wafer.

  On the other hand, the post-measurement / inspection instrument 120 of the measurement / inspection instrument 120 is such that the resist pattern on the wafer after exposure (post-exposure) transferred by the exposure apparatus 100 and developed by the C / D 110, overlay error, projection optics System aberration and illumination unevenness are measured, and wafer film inspection, wafer defect / foreign particle inspection, reticle defect / foreign particle inspection, etc. are performed.

  The measurement / inspection instrument 120 may have a function of analyzing the measurement / inspection results. For example, there may be a function of optimizing the parameters of the exposure apparatus 100 based on the measurement / inspection results. In this way, it is possible to set data relating to optimized parameters in the exposure apparatus 100, and to perform feedforward parameter correction and feedback parameter correction from the measuring / inspection device 120 to the exposure apparatus 100. Note that the measurement / inspection instrument 120 does not have to be able to perform all the above-described measurements, and it is sufficient that at least one measurement can be performed. In the measurement / inspection instrument 120, a part of the measurement function may be made optional. Those measurement functions may be enabled by custom correspondence described later.

  Incidentally, the exposure apparatus 100, the track 110, and the measuring / inspecting instrument 120 are connected in-line to each other. Here, the in-line connection means that the apparatuses and the processing units in each apparatus are connected via a transfer device that automatically transfers a wafer such as a robot arm or a slider. With this in-line connection, the wafer transfer time between the exposure apparatus 100 and the C / D 110 can be remarkably shortened.

  The exposure apparatus 100, the track 110, and the measuring instrument 120 that are connected in-line can be regarded as one substrate processing apparatus (100, 110, 120) as a whole. A substrate processing apparatus (100, 110, 120) applies a photosensitive agent such as a photoresist to a wafer, and projects and exposes a mask or reticle pattern image onto the wafer coated with the photosensitive agent. An exposure process and a development process for developing the wafer after the exposure process are performed.

  That is, in the customer system 1000, a plurality of exposure apparatuses 100, tracks 110, and measuring / inspecting instruments 120 are provided. Each substrate processing apparatus (100, 110, 120) and device manufacturing processing apparatus group 900 is installed in a clean room in which temperature and humidity are controlled. In addition, data communication can be performed between devices via a predetermined communication network (for example, LAN: Local Area Network). This communication network is a so-called intranet communication network provided for a customer's factory, business office or company.

  In the substrate processing apparatus (100, 110, 120), a plurality of wafers (for example, 20 wafers) are processed as one unit (referred to as a lot). In the customer system 1000, wafers are processed and commercialized using one lot as a basic unit.

  In this customer system 100, the measurement / inspection instrument 120 is placed in the track 200 and connected in-line with the exposure apparatus 100 and the C / D 110. However, the measurement / inspection instrument 120 is arranged outside the track 200. The exposure apparatus 100 and the C / D 110 may be configured offline.

[Device manufacturing processing equipment group]
The device manufacturing processing apparatus group 900 includes a CVD (Chemical Vapor Depositon) apparatus 910, an etching apparatus 920, and CMP (Chemical Mechanical Polishing) which performs a chemical mechanical polishing and planarizes the wafer. : Chemical mechanical polishing) apparatus 930 and oxidation / ion implantation apparatus 940 are provided. The CVD apparatus 910 is an apparatus that generates a thin film on a wafer, and the CMP apparatus 920 is a polishing apparatus that planarizes the surface of the wafer by chemical mechanical polishing. The etching apparatus 920 is an apparatus that etches the developed wafer. The oxidation / ion implantation apparatus 940 forms an oxide film on the surface of the wafer or implants impurities into a predetermined position on the wafer. It is a device. Also, a plurality of CVD apparatuses 910, etching apparatuses 920, CMP apparatuses 930, and oxidation / ion implantation apparatuses 940 are provided in the same manner as the exposure apparatus 100 and the like, and a transfer path for enabling transfer of wafers between them is provided. Is provided. In addition, the device forming apparatus group 900 includes apparatuses that perform probing processing, repair processing, dicing processing, packaging processing, bonding processing, and the like.

[Communication server]
The communication server 150 is a server having a communication support function that supports data communication between the exposure apparatus 100, the measurement / inspection instrument 120, and the like with different communication specifications. In the customer system 1000, the data communication function of the communication server 150 enables data communication between different types of devices without modifying the data communication function of each device.

  FIG. 3 shows a schematic configuration of the communication server 150. In FIG. 3, one exposure apparatus 100 and one measurement / inspection instrument 120 are logically connected via the communication server 150. As shown in FIG. 3, the communication server 150 includes a control unit 53, transmission / reception units 51 and 52, a conversion definition file registration unit 54, and a conversion recipe file registration unit 55.

  When data communication is performed in each device, the conversion of the data is required at the file stage, that is, a file format such as a recipe file of each device or a file in which measurement results in the measurement / inspection device 120 are described (file Format) and message stage, that is, a communication message such as a stream function, and a protocol stage, that is, a communication protocol such as HSMS and SECS-I (both are communication protocols defined by the SEMI standard). Therefore, as shown in FIG. 3, the control unit 53 is provided with three conversion units: a file format conversion unit 53a, a communication message conversion unit 53b, and a communication protocol conversion unit 53c.

Data conversion in each of the conversion units 53a to 53c is performed with reference to the conversion definition file. The conversion definition file is a file that defines data conversion rules between device manufacturing processing apparatuses that perform data communication, and is registered in the conversion definition file registration unit 54. Referring to this file, the data sent from one device manufacturing processing apparatus (for example, measuring / inspecting instrument 120) is converted into data that can be recognized by the other device manufacturing processing apparatus (for example, exposure apparatus 100). Can do. For even conversion definition file, file format conversion definition file _541, the communication message conversion definition file _542, it is necessary three definitions of a communication protocol conversion definition file 54 _3.

Information on the three types of conversion definition files used for one data communication from one device to another is collected in a conversion recipe file. These conversion recipe files 55 ₁ , 55 ₂ , 55 ₃ ,... Are registered in the conversion recipe file registration unit 55 for each combination of device manufacturing processing apparatuses that actually perform data communication. In the conversion recipe files 55 ₁ , 55 ₂ , 55 ₃ ,..., A target connected device name and a conversion definition file name are specified. When performing data conversion, each conversion unit 53a, 53b, 53c of the control unit 53 in the communication server 150 opens a file of a conversion recipe file corresponding to a combination of two device manufacturing processing apparatuses that perform data communication. check the device name of the source and destination of the data, conversion definition file 54 ₁ required for the conversion, 54 _2, 54 ₃ identify the file name, file open the respective conversion definition file the file name as a key Then, the data is converted according to the data conversion rules described in the conversion definition file.

  In the communication server 150, data transmitted from the transmission source is received by the transmission / reception units 51 and 52, and the format of the device manufacturing processing apparatus of the transmission source is described as the data received by the control unit 53 as described above. Decode according to the conversion definition file. Then, the data obtained as a result of the decoding is converted according to the conversion definition file so as to be compatible with the device manufacturing processing apparatus of the transmission destination, and the converted data from the transmission / reception units 51 and 52 is transmitted to the transmission destination. To do. Thereby, data communication between the device manufacturing processing apparatuses becomes possible. In the following, it is assumed that data communication between devices in the customer system 1000 is performed via the communication server 150. According to the data communication function of the communication server 150, data communication between any devices in the customer system 1000 is possible only by changing the conversion definition file according to the data transmission source and transmission destination.

  Note that the software for realizing the data communication function in the communication server 150 is supplied and installed in advance from the apparatus manufacturer. In the communication server 150 according to the present embodiment, data conversion is performed by referring to the conversion definition file. However, instead of the conversion definition file, a conversion such as a dynamic link library that actually performs conversion processing is performed. Data conversion from the transmission source to the transmission destination may be realized by registering the program and calling and executing the conversion program from the data communication function software.

[Management controller]
Returning to FIG. 2, the management controller 160 centrally manages the exposure process performed by the exposure apparatus 100, and manages the C / D 110 and the measurement / inspection instrument 120 in the track 200 and controls their cooperative operation. Do. As such a controller, for example, a personal computer can be adopted. The management controller 160 receives information indicating the progress of processing and operations, and information indicating processing results and measurement / inspection results from each device through a communication network in the customer system 1000 (via the communication server 150). Then, the status of the entire production line of the customer system 1000 is grasped, and management and control of each apparatus are performed so that the exposure process and the like are appropriately performed. Control of the cooperative operation between the exposure apparatus 100 and the measurement / inspection instrument 120 is realized by executing a control application program that operates on the computer. FIG. 4 shows a schematic configuration of software of the management controller 160 centering on the control application program. As illustrated in FIG. 4, the management controller 160 includes transmission / reception units 61 and 62, a control unit 63, and a storage device 64.

A plurality of cooperative recipe files 65 ₁ , 65 ₂ , 65 ₃ , 65 ₄ ,... Are stored in the storage device 64 of the management controller 160. The linked recipe file 65 _n is a script file in which processing procedures over a plurality of types of device manufacturing processing apparatuses, that is, the exposure apparatus 100 and the measurement / inspection instrument 120 are described in a predetermined script language.

The file reading unit 63 ₁ reads the cooperative recipe file designated from the host 600 via the transmission / reception unit 61 into the memory. File analysis unit 63 ₂ analyzes the linkage recipe file loaded in memory one line per line. Control command generating section 63 _3, according to the analytical content, to create a control command to each device. Based on this control command, the management controller 160 outputs various control signals via the transmission / reception unit 62 to cause the various devices in the customer system 1000 to operate in cooperation.

That is, the management controller 160, according to the processing routine this is described in conjunction recipe file 65 _1, the plurality of types of device manufacturing processing apparatus (100, 110, 120) cooperative work. The cooperative operation of the apparatus described in this linkage recipe file 65 ₁ or the like, it is possible to efficiently operate a series of device fabrication processes. For example, before and after the wafer by the exposure apparatus 100, the measurement / inspection device 120 performs measurement on the wafer and, based on the measurement result, adjusts the exposure process in the exposure apparatus 100 if necessary. if describing the processing procedure in the recipe file ₆₅₁ or the like, so that the optimization of the exposure process of the exposure apparatus 100 can be realized quickly.

  Since the management controller 160 can perform various cooperative operations across a plurality of devices, a cooperative recipe file is prepared for each cooperative operation. That is, in the management controller 160, various cooperative operations can be realized in the same customer system 1000 only by changing the cooperative recipe file executed by the control unit 63. The software of the control unit 63 that performs control based on the cooperation recipe file by the management controller 160 is supplied and installed in advance.

[Host system]
A host system (hereinafter referred to as “host”) 600 is a main host computer that manages and controls the entire customer system 1000 and controls the exposure apparatus 100, the track 110, the measurement / inspection instrument 120, and the device manufacturing processing apparatus group 900. is there. For the host 600, for example, a personal computer can be employed. The host 600 and other devices are connected via a wired or wireless communication network or a dedicated communication line, and can perform data communication with each other via the communication server 150. Yes. By this data communication, the host 600 realizes overall control of this system.

[Device manufacturing process]
An example of a device manufacturing process performed under the control of the host 600 will be described. As shown in FIG. 5, first, a film is formed on a wafer in the CVD apparatus 910, the wafer is transferred to the C / D 110, and a resist is applied on the wafer in the C / D 110 (step S11).

  Next, the wafer is transferred to the measurement / inspection instrument 120, and various pre-measurements as described above are performed in the measurement / inspection instrument 120 (step S12). Here, when the parameters of the exposure apparatus 100 are optimized, the exposure apparatus 100 transfers data necessary for parameter optimization to the measurement / inspection instrument 120 ([1]). The measurement / inspection device 120 optimizes parameters based on the measurement / inspection results to the exposure apparatus 100, and transmits data relating to the optimized parameters to the exposure apparatus 100 ([2]). The exposure apparatus 100 sets an optimum parameter value based on the data.

  Subsequently, the wafer is transferred to the exposure apparatus 100, and the circuit pattern on the reticle is transferred onto the wafer by the exposure apparatus 100 (step S13). At this time, the exposure apparatus 100 monitors the exposure amount, synchronization accuracy, and focus trace data during measurement shot exposure and stores them in an internal memory. Next, the wafer is transferred to the C / D 110 and developed by the C / D 110 (step S14).

  Thereafter, the wafer is transferred to the measurement / inspection instrument 120. Then, the measurement / inspection device 120 performs post-measurement / inspection on the wafer (step S15). Here, for example, from the resist image formed on the wafer, its line width and overlay error, aberration of the projection optical system of the exposure apparatus 100, illumination unevenness, and foreign matter and defects on the pattern are inspected. .

  The measurement / inspection instrument 120 performs analysis on the measurement / inspection results based on information from the exposure apparatus 100. As shown in FIG. 5, the measurement / inspection instrument 120 sends various data (control trace data, parameters, processing results, and data relating to the current apparatus state) to the exposure apparatus 100 as necessary in the course of analysis. Transfer request [1] ′ (exposure apparatus 100 sends various data to measurement / inspection instrument 120 in response to the request ([2] ′)), and issues an analysis result to exposure apparatus 100 ([ 3] '). In addition, after the measurement / inspection apparatus 120 acquires various data, the exposure apparatus 100 may promptly delete the trace data stored therein.

  On the other hand, the wafer is transferred from the measurement / inspection instrument 120 to the etching apparatus 920, where etching is performed in the etching apparatus 920, impurity diffusion, aluminum deposition wiring processing, film formation is performed in the CVD apparatus 910, and the CMP apparatus 930 is performed. Then, planarization, ion implantation by the oxidation / ion implantation apparatus 940, and the like are performed as necessary (step S16). In this manner, a series of processes such as film formation / resist application (step S11) to etching and the like (step S16) are repeatedly executed for the number of processes, whereby circuit patterns are stacked on the wafer to form a semiconductor device. (Step S1).

  After the repetition process is completed, the probing process (step S17) and the repair process (step S18) are performed in the device manufacturing processing apparatus group 900. In step S17, when a memory failure is detected, for example, in step S18, replacement with a redundant circuit is performed. The measurement / inspection instrument 120 can also send information such as the detected location of the line width abnormality to a device that performs probing processing and repair processing. In the measuring / inspecting instrument 120, the portion where the line width abnormality has occurred on the wafer can be excluded from the processing target of the probing process and the repair process in units of chips. Thereafter, a dicing process (step S19), a packaging process, and a bonding process (step S20) are executed, and a product chip is finally completed. In addition, you may make it perform the post-measurement process of step S15 after the etching of step S16 as needed. In this case, line width and overlay measurement are performed on the etching image of the wafer.

  The wafer process flow shown in FIG. 5 is merely an example, and the flow can be changed as appropriate. For example, pre-measurement / inspection is not necessarily performed, and post-measurement / inspection processing is not necessarily performed. In the present embodiment, a continuous processing procedure including a pre-measurement / inspection process performed by the measurement / inspection instrument 120, an exposure process performed by the exposure apparatus 100, and a post-measurement / inspection process performed by the measurement / inspection instrument 120. Are registered in the storage device 64 of the management controller 160, and the management controller 160 selects one of the linked recipe files, and in accordance with the description contents of the linked recipe file, the exposure apparatus 100, the measuring / inspecting instrument 120, To work together. Such a cooperative operation is exemplified by the following sequence.

(1) EGA measurement optimization sequence A sequence in which EGA measurement is performed by prior measurement / inspection to select sample marks on the wafer, and EGA measurement is performed in the exposure apparatus 100 according to the selection result. (2) Focus step correction sequence Sequence that measures focus step by measurement / inspection and reflects the focus step on focus control in exposure apparatus 100 (3) Alignment optimization sequence Measurement of overlay error by post-measurement / inspection (4) Exposure line width optimization sequence Measure exposure line width by post-measurement / inspection, the measurement result, control trace data, Control parameters and based on control parameters In addition to this, a sequence for adjusting the exposure apparatus 100 can be combined with various sequences depending on the contents of measurement / inspection in the measurement / inspection instrument 120.

  As described above, in the customer system 1000, for example, data communication between the exposure apparatus 100 and the measurement / inspection instrument 120 is realized by data conversion based on information defined in the conversion definition file in the communication server 150. Yes. In addition, the cooperative operation between the exposure apparatus 100 and the measurement / inspection instrument 120 is realized by a processing procedure described in a cooperative recipe file in the management controller 150. Since these files are required for each combination of data communication apparatuses and for each linked operation, when a new exposure apparatus or measurement / inspection instrument is introduced into the customer system 1000, a new file is created accordingly. Necessary.

  Incidentally, the host 600 corresponds to the computer terminal of the customer system 1000 of FIG. That is, the host 600 is connected to the communication network 1500 and can communicate with the license server 2000 via the communication network 1500 as shown in FIG. The host 600 communicates with the license server 2000, and includes a new data conversion definition file and a linked recipe file that are applied to data communication and linked operations with the exposure apparatus 100 and the measurement / inspection instrument 120, or improved files. Received file package information (for example, information about the specification of the file of the corresponding device, etc.). Based on this information, the configuration of the apparatus in the customer system 1000 is changed (for example, a new exposure apparatus or measurement / inspection instrument is incorporated), and the person in charge of the production line needs to purchase a new file package. The customer system 1000 (host 600) inquires the license server 2000 via the communication network 1500 about the offer price. When this inquiry is made, the license server 2000 performs a process of determining a provision price of a new file package when the inquiring user is targeted for sale, and the result is determined by the customer system 1000 of the inquiring user. Notify A customer (for example, a production manager or the like) who receives this at the host 600 and looks at the provided price evaluates the provided price of the file package and considers whether or not to purchase it. Finally, when a new file package is to be purchased from the license server 2000, an intention to purchase (settlement) is sent to the license server, and the license server 2000 is notified to the license server 2000 via the communication network 1500. A transfer request is made and a file package is received from the license server 2000. Note that the purchased file package is not limited to online distribution. For the distribution, a method of recording on a recording medium such as an optical disk and sending the recording medium may be used.

  The host 600 decompresses the distributed file package, sends the decompressed conversion definition file to the communication server 150, and sends the decompressed cooperative recipe file to the management controller 160. When the communication server 150 receives the new conversion definition file and conversion recipe file, the communication server 150 registers the conversion definition file in the conversion definition file registration unit 54, creates a conversion recipe file corresponding to the conversion definition file, and converts the conversion recipe file 55. Register with. Upon receiving the cooperative recipe file, the management controller 160 registers the cooperative recipe file in the storage device 64.

[License server]
The license server 2000 is, for example, a server installed in a factory of an apparatus manufacturer that provides the data conversion function and the cooperative operation control function, and is installed in the exposure apparatus 100 installed in a customer-side system such as a semiconductor manufacturer. This is a server that manages conversion definition files or linked recipe files to be upgraded, upgrades, and sells and supplies new conversion definition files or linked recipe files. More specifically, when the license server 2000 receives a product price inquiry request from each customer system 1000, the count number obtained from the license information of the product to be purchased and the license information of the customer registered in the license server. The discount rate (privilege) is determined based on the information, the customer is notified of the sales price, and the product is supplied to the customer system 1000.

  The license server 2000 includes a customer license management processing unit 310, a usage status management processing unit 320, a sales condition setting processing unit 330, a database system 340, a restriction setting unit 350, a transmission / reception unit 360, a distribution unit 370, A file package 380 is included.

[Database system]
First, the configuration of the database system 340 will be described. The database system 340 is a system composed of a plurality of databases that organize and integrate mutually related data to facilitate searching. The database system 340 includes a customer license management database 341, a sales condition: count number setting database 342, a usage status monitoring database 343, and a sales condition: discount rate setting database 344.

[Customer License Management Database]
The customer license management database 341 is a database for managing customer licenses. The customer license management database 341 is a database in which information including usage conditions and the like is stored as purchase history information for software (licenses) purchased by the customer in the past. The customer license is granted for each customer (for example, customers A, B, and C in FIG. 1) and for each product. Also, depending on the customer, a plurality of the same products may be purchased. In that case, a plurality of license numbers are given to the customer license for the same customer and the same product. As a result, the customer license management database 341 manages customer licenses for each customer, product name, and license number.

  The management contents of the customer license include the contract contents (contract conditions) exchanged at the time of sale with the license, the use conditions (constraint conditions) of the conversion definition file and linkage recipe file, the incidental conditions (custom support, customer service), It is roughly divided into four conditions of usage record (use amount) monitoring condition. The customer license management database 341 is registered in the form of whether the setting of these four conditions is ON (with setting) or OFF (without setting).

  FIG. 7 shows the management contents of the customer license management database 341 in a table format. As shown in FIG. 7, in the customer license management database 341, (customer ID, product name, license number) is registered as a key. For each key, that is, for each customer ID (A, B), product name (CnvDLL01, CnvDLL02), and license number (A0001, A0002, B0001), there are provided items of constraint conditions, contract conditions, and usage to be monitored. ON and OFF are set.

  More specifically, FIG. 7 shows an upgrade license that can receive an upgrade service as an item of contract contents at the time of sale. In addition, as a restriction condition item, use period, expiration date, upper limit of conversion time for data conversion, upper limit of conversion number of data conversion, upper limit of file input / output times, upper limit of CPU processing time, function to disable use The presence or absence of is shown. Further, as ancillary conditions, custom correspondence, customer service, and the like are shown. Examples of custom support include special measurement / inspection sequences in the measurement / inspection instrument 120 for specific users, the addition of functions that can implement data processing, etc., and customer service as needed to provide information on various devices There are additional services for specific users, such as trouble support and operational consulting. In addition, conversion time, conversion count, file input / output count, CPU processing time, and usage count of each function are shown as usage amounts to be monitored. Here, it is possible to set constraint conditions for the data conversion time, the number of conversions, and the conversion amount separately for each file format / communication message / communication protocol.

  Further, in FIG. 7, types of apparatuses that perform data communication and cooperative operations (exposure apparatus 100, measurement / inspection instrument 120, prober, repair apparatus, etc.), the number of apparatuses that perform data communication and cooperative operations, data communication and cooperative operations. Combinations of devices that perform the above are also set as constraint conditions. Further, the limitation of measurement / inspection content performed by the measurement / inspection instrument 120 (restricting the execution of the above-described examples of the pre-measurement inspection and the post-measurement / inspection content) is set as a constraint condition.

  In addition, as the usage amount, the communication time of the apparatus, the number of communication times, the communication data amount, the data amount of the measurement / inspection result in the measurement / inspection instrument 120, the data type (measured sample mark number, shot number, wafer number, The amount of data for each lot) is also exemplified as an item. In addition, the number of feed-forward corrections, the number of feedback corrections, the amount of feed-forward correction data, the amount of feedback correction data, etc. from the measurement / inspection device 120 to the exposure apparatus 100 based on the pre-measurement / inspection results can be used. .

  The setting contents of the customer license management database 341 are referred to when the sales condition setting processing unit 310 performs processing for determining the sales price of the file package. The contents of the customer license management database 341 are updated by the customer license management processing unit 310 every time a file package license is sold.

[Sales conditions: Count setting database]
Sales condition: count number setting database 342 is a database for registering sales conditions and discount counts for calculating sales prices as sales conditions in association with each other. More specifically, the sales condition: count number setting database 342 is a database in which condition contents such as use conditions for each product and the discount count number for the condition contents are recorded.

  FIG. 8 shows an example of registered contents of the sales condition: count number setting database 342. As shown in FIG. 8, the sales condition: count number setting database 342 includes, for each product, a count number per license, an upgrade license count number, a count number for each constraint, a custom correspondence and a customer service count number. In addition, a unit time for each usage amount and a count number per unit number of times are set.

  The setting contents for each product correspond to the items in the customer license management database 341, and the count number indicates the discount rate of the product with respect to the sales conditions such as the privilege or the constraint condition. For example, “Upgrade version is free for 2 years as an upgrade license”, “3 years as a usage period”, “Up to December 2006 as a usage period”, “10000 hours as a data conversion time limit”, “Maximum number of data conversion times” As 3,000 times ”,“ file input / output upper limit as 10,000 times ”,“ CPU processing time as upper limit as 5000 hours ”,“ prohibited function “report file output function” ”,“ custom measurement results for each customer ” A count number assigned to the sales conditions for each product such as “reading file format” or “one year free online support as customer service” is set.

  In addition, in the sales condition: count number setting database 342, the unit used for conversion to the count number is set for each product for the amount of monitoring target usage. For example, “1000 hours as the unit time of data conversion”, “1000 times as the unit number of data conversion”, “3000 times as the number of file input / output units”, “1000 hours as the CPU processing unit time”, or “each function A count number representing one unit of the usage amount is set for each product, such as “5000 times as the number of usage units”.

  Further, as shown in FIG. 8, the sales condition: count number setting database 342 also includes, as the usage amount, the communication time of the device, the number of communication times, the communication data amount, and the measurement by the measurement / inspection instrument 120. The data amount of the inspection result and the data amount for each data type (measured sample mark number, shot number, wafer number, lot number, etc.) are also exemplified as items. In addition, the number of feed-forward corrections, the number of feedback corrections, the amount of feed-forward correction data, the amount of feedback correction data, etc. from the measurement / inspection device 120 to the exposure apparatus 100 based on the pre-measurement / inspection results can be used. .

  The contents of the sales condition: count number setting database 342 are referred to in order to obtain the purchase record and the count number for the use condition. That is, the count number for the content of each constraint condition item set in the conversion definition file and the linked recipe file (license) purchased by each customer detected with reference to the customer license management database 341 is the sales condition: count number It is detected with reference to the setting database 342. Note that the sales condition: the condition content of the sales condition for each product stored in the count number setting database 342 and the count number for the condition content are transmitted via a computer terminal (not shown) connected to the license server 2000. It is input in advance by an operator of the apparatus manufacturer.

Usage monitoring database
The usage status monitoring database 343 is a database that records the count number based on the usage amount of the monitoring result for each usage amount item to be monitored (monitored) of each license. The usage amount for each license is appropriately monitored by a usage status management processing unit 320 described later. The usage status management processing unit 320 refers to the count per unit time or unit count of each usage amount set in the sales condition: count number setting database 342, converts the monitor value into the count number, and uses the usage status. Store in the management database 343. FIG. 9 shows an example of information stored in the usage status management database 343. As shown in FIG. 9, the usage monitoring database 343 includes data conversion time, data conversion count, file input / output count, CPU processing time, and the like for each customer ID, product name, and license number (that is, for each license). The usage amount of each function is converted into a count number and stored.

  Further, as shown in FIG. 9, the usage amount includes the communication time of the apparatus, the number of communication times, the communication data amount, the data amount of the measurement / inspection result in the measurement / inspection instrument 120, and the data type (measured sample mark). (Number of shots, number of wafers, number of wafers, number of lots, etc.). Further, the number of feed forward corrections, the number of feedback corrections, the amount of feed forward correction data, the amount of feedback correction data, etc. from the measurement / inspection device 120 to the exposure apparatus 100 based on the prior measurement / inspection results are used as the conversion count number of the usage amount. can do.

  Sales condition: Discount rate setting database 344 is a database in which the cumulative value of the calculated count number and the score when the customer purchases (upgrades) the license of the file package are registered. Sales conditions: Discount rate setting database 344 is composed of two tables. One is a discount level table in which the discount level for each cumulative count is registered, and the other is a discount rate table in which the discount rate (privilege) for each product discount level is registered. 10A and 10B show registration examples of a discount level table and a discount rate table.

  In the example shown in FIG. 10A, the discount level is set in four stages. The registered contents of the two tables are input in advance by an operator or the like via a terminal device (not shown) of the license server 2000 or the like. Note that there may be any number of discount level stages, and the discount level and the discount rate may be obtained, for example, using an arithmetic expression in which the calculation result is proportional to the cumulative count.

[Customer license management processing section]
The customer license management processing unit 310 provides information on the presence / absence of setting of the contract condition at the time of sale of the license of the file package sold, the constraint condition, the incidental condition, and the usage monitoring for each customer, product, and license number. Are registered in the customer license management database 341.

[Usage status management processing section]
The usage status management processing unit 320 monitors (monitors) the usage amount for each license, converts this into a count number, and registers it in the usage status monitoring database 343. The usage amount management processing unit 320 monitors the usage amount with respect to data conversion time, data conversion count, file input / output count, CPU processing time, usage count of each function, and the like. Conversion to the count number is performed with reference to the sales condition: unit time for each usage item stored in the count number setting database 342, the count number per unit number, and the like.

[Sales condition setting processing section]
When selling the license for the file package to the customer, the sales condition setting processing unit 330 determines a privilege such as a discount rate in consideration of various factors such as use conditions and determines a sales condition such as a sales price. The sales condition setting processing unit 330 refers to the customer license management database 341 and the sales condition: count number setting database 342, and calculates the count numbers for various items of purchase results, use conditions (use constraint conditions), and sales contract conditions. To detect. In addition, the sales condition setting processing unit 330 refers to the usage status monitoring database 343 and the sales condition: count number setting database 342 to detect the count number for the usage record. The sales condition setting processing unit 330 totals these detected count numbers, and further refers to the sales condition: count number setting database 342 to determine the count number corresponding to the type and number of licenses of the file package to be sold. In addition, the cumulative count is calculated. The sales condition setting processing unit 330 refers to the sales condition: discount rate setting database 344 based on the accumulated count number, and determines the final offer price (privilege) of the file.

[Sales flow]
Next, the flow of the license sales process for the conversion definition file and the linked recipe file using the network system 3000 according to the present embodiment will be described. Here, the flow of the sales (version upgrade) of the conversion definition file and the linked recipe file will be described focusing on the process of determining the sales price. As shown in FIG. 11, first, when a software provider (device manufacturer) intends to sell a new file package, information about the file package is sent to the customer system 1000 via the communication network 1500, for example. Distribute (step 501). Each customer of the customer system 1000 considers purchase or version upgrade of the file package based on the information distributed to the customer system 1000 and provides more detailed information and price information as necessary. In response, an inquiry is made to the license server 2000 via the communication network 1500 (step 503). Hereinafter, when the inquiry includes a sales price inquiry, the price determination process (step 505) is started in the sales determination setting processing unit 330 of the license server 2000 shown in the flowchart of FIG.

  As shown in FIG. 12, first, when the license server 2000 receives a price inquiry from the customer system 1000, in step 401, the license server 2000 stores the past purchase amount from the customer license management database 341 (see FIG. 7). The purchase history information that is the license information of the file package is loaded. In the customer license management database 341, as described above, for each customer ID, product name, and license number, the upgrade license, each restriction condition, incidental condition (custom support, customer service), and each usage monitoring setting are registered. ing.

  In the next step 403, it is determined whether or not there is any restriction condition for each license owned by the customer by referring to the restriction condition information of the purchase history information. If there is a constraint condition, if this determination is affirmed, in step 405, the constraint condition setting information of each product of the customer is loaded from the sales condition: count number setting database 342 (see FIG. 8), The count number for each constraint condition of each product owned by the customer (set to ON) is read, and the total count number for all constraint conditions is calculated.

  In the next step 407, the sales decision setting processing unit 330 refers again to the loaded purchase history information, and determines whether or not each license owned by the customer is set to monitor some usage amount. When the usage amount monitoring is set, in step 409, the count number conversion value for the usage amount of the monitoring target of each license of the customer is loaded from the usage state monitoring database 343 illustrated in FIG. The total number of counts for the total usage of each license is calculated.

  In the next step 411, it is determined whether or not there is a custom correspondence by referring again to the loaded purchase history information. Only when this determination is affirmed, in step 413, the sales decision setting processing unit 330 loads the custom correspondence information of each product of the customer from the sales condition: count number setting database 342, and calculates the total number of counts. To do.

  In the next step 415, it is determined whether or not there is customer service by referring again to the loaded purchase history information. Only when this determination is affirmed, in step 417, the customer service information of each product of the corresponding customer is loaded from the sales condition: count number setting database, and the total number of counts is calculated.

  In the next step 419, for each product of the customer, the license count, the constraint count, the usage count, and the total of the custom response and customer service count are calculated, and the cumulative count To do.

  In the next step 421, the license server 2000 derives a discount rate from the sales condition: discount rate setting database 344 based on a value obtained by adding the cumulative count number to the total count number of the newly purchased license. Calculate the selling price of.

  When the sales price is calculated, in the next step 423 (step 507 in FIG. 11), the calculated sales price of the newly purchased file package license is sent to the customer system 1000 via the communication network 1500 via the transmission / reception unit 360. Notify and finish the process.

  Returning to FIG. 11, the customer considers whether or not to purchase a new file package for the notified price, and if so, notifies the license server 2000 of a notification to that effect (step 509). . The restriction setting unit 350 of the license server 2000 writes information on the constraint condition in the header part of each conversion definition file of the file package (step 511). The license server 2000 distributes the file package to the customer system 1000 via the communication network 1500 (step 513).

  The host 600 of the customer system 1000 decompresses the distributed file package, of which the cooperative recipe file is sent to the management controller 160 and the conversion definition file is sent to the communication server 150. The management controller 160 registers the cooperative recipe file in the storage device 64, and the communication server 150 registers the conversion definition file in the conversion definition file registration unit 54 and converts the call for the conversion definition file. A recipe file is created and registered in the conversion recipe file registration unit 55.

  Thereafter, the communication server 150 performs data conversion with reference to a new conversion definition file as necessary. Further, the management controller 160 refers to a new cooperative recipe file as needed, and causes various device manufacturing processing apparatuses to perform a cooperative operation.

  As described above, in the conversion definition file or the linked recipe file, information on the constraint condition is described in the header portion. When the communication server 150 and the management controller 160 apply and refer to the conversion definition file or the linkage recipe file, the communication server 150 and the management controller 160 first analyze the constraint conditions described in the header part, and those files conflict with the constraint conditions. That is, it is determined whether or not it is unusable, and if it is unusable, a warning is issued to call the operator's attention.

  Regarding the constraint conditions, the information is included in the header part of the conversion definition file and the linked recipe file itself, and the license information is described in the file package in addition to the linked recipe file and the conversion definition file. The license file may be included, and the restriction may be realized by the communication server 150 or the management controller 160 referring to the license file. In addition, the USB protect key is distributed to customers at the same time as the file package is supplied, and information on the constraint conditions is included in the USB protect key, and the server communication function and cooperative operation control function realize the constraints that have become the constraint conditions. You may make it do.

  Further, the communication server 150 or the management controller 160 monitors the usage status of the conversion definition file and the linked recipe file, and notifies the license server 2000 via the host 600.

  As described above in detail, according to the present embodiment, the communication server 150 connects two or more device manufacturing processing apparatuses, and transmits data transmitted from any of the apparatuses to the data transmission source. In this embodiment, as the support information of the data conversion function, the information of the transmission source is received. The license server 2000 provides the communication server 150 with a conversion definition file used to convert information received from the device manufacturing processing apparatus into information suitable for the device manufacturing processing apparatus of the transmission source.

  That is, according to the present embodiment, the communication server 150 that executes the data conversion function uses the conversion definition file used to execute the data conversion function for supporting the processing operation across a plurality of device manufacturing processing apparatuses. Since the communication server 150 is provided in a readable form and separately from the communication server 150, even if the processing operation across a plurality of device manufacturing processing apparatuses is changed, the common data conversion function of the communication server 150 By simply changing the conversion definition file, it is possible to support the processing operation, and even if the change cycle of processing operation across multiple device manufacturing processing devices is shortened, the conversion definition file that matches the change Can be supplied at low cost.

  Further, according to the present embodiment, the management controller 160 as a cooperative recipe server includes a plurality of cooperative recipe files based on cooperative recipe files in which information for controlling cooperative device manufacturing processing across multiple types of device manufacturing processing apparatuses is described. In this embodiment, a cooperation recipe file is provided from the license server 2000 to the management controller 160 as support information used for executing this cooperation operation control function. .

  That is, the management controller 160 as a cooperative recipe server that executes the cooperative operation control function manages the cooperative recipe file used to execute the cooperative operation control function for supporting the processing operation across a plurality of device manufacturing processing apparatuses. Since the controller 160 is readable and provided separately from the management controller 160, even if the processing operation across a plurality of device manufacturing processing apparatuses is changed, the function of the management controller 160 only changes the cooperative recipe file. It is possible to support the processing operation, and even if the change cycle of the processing operation across a plurality of device manufacturing processing apparatuses is shortened, it is possible to supply a coordinated recipe file corresponding to the change at a low cost. .

  In other words, according to the present embodiment, even if data conversion processing between devices and the cooperative operation of the devices are changed due to introduction of new devices, reconnection, etc., it is possible to efficiently manufacture devices only by providing an inexpensive file. Therefore, it is possible to suitably cope with a variety of small-quantity production. In addition, even in small-quantity production and mass production, the cooperative operation of multiple devices is changed according to the device manufacturing yield status and device operation status (failure, operation status, maintenance status, etc.) The present invention can be suitably applied when a need arises.

  Further, according to the present embodiment, the information amount of information processed by the communication server 150 or the management controller 160 using the support information as the information related to the use mode of the support information such as the conversion definition file or the cooperation recipe file, Information on at least one of the types of target data processed by the communication server 150 and the management controller 160 and the type of device manufacturing processing apparatus that generates the target data of that type is collected and collected. Support information is provided according to the information regarding the use mode. If it does in this way, it will become possible to provide the support information in the optimum state according to the usage status, that is, the information relating to the use state.

  For example, the provision price when providing support information can be determined according to the collected information on the use mode. In this way, the device manufacturer can purchase the data file at an appropriate price, perform data communication between devices, and link operation, thereby improving device productivity.

  In order to realize the determination of the offer price according to such a usage mode, the license server 2000 of the device manufacturer receives information on the usage mode transmitted by a specific user using the communication server 150 or the management controller 160. The provision price when providing support information to the specific user who has transmitted the information on the usage mode is determined based on the received information on the usage mode.

  Further, according to the present embodiment, the license server 2000 acquires information related to past purchase records by a specific user using the support system from the customer license management database 341, and specifies the information based on the acquired information related to purchase records. A provision price when providing support information to a user is determined. In this way, the willingness to purchase support information is promoted by the specific user, and the functions directly linked to the improvement in device productivity can be fully utilized.

  In the license server 2000, the amount of information that can be processed by the communication server 150 and the management controller 160 using the support information, the type of target data that can be processed by the communication server 150 and the management controller 160 using the support information, and the target data For at least one of the types of device manufacturing processing apparatuses that generate the device, the support information in which restrictions are set according to the collected information on the usage mode is provided. If the restriction is set in this way, the use mode of the support information can be controlled by the user.

  More specifically, at least the amount of information that can be processed by the communication server 150 and the management controller 160 using the support information, and at least the type of target data that can be processed by the communication server 150 and the management controller 160 using the support information. For one, the support information set with the restriction according to the collected information on the usage mode is provided, and the offer price when the support information is provided is determined according to the restriction of the provided support information. If it does in this way, it will become possible to provide a support information for a suitable price according to the restriction | limiting according to the restriction | limiting of a user's use of support information.

  In addition, the license server 2000 uses the amount of information that can be processed by the support system using the support information, the type of target data that can be processed by the support system using the support information, and the target data as information about the usage mode of the support information. The use restriction can be set in the support information for at least one type of device manufacturing apparatus to be generated, and the price for providing the support information is determined based on the restriction set in the support information. In this way, the license server 2000 realizes determination of an appropriate provision price.

  In addition, according to the present embodiment, information related to past purchase results is acquired by a specific user using the communication server 150 and the management controller 160, and specified based on the acquired information related to purchase results in addition to the above restrictions. A provision price when providing support information to a user is determined. In this way, in addition to the usage mode, a price corresponding to the usage rate of the specific user is set, so that the willingness to purchase support information by the specific user is promoted, and the function directly linked to the improvement of device productivity is fully provided. To be able to use it.

  Further, according to the present embodiment, the license server 2000 receives information related to the usage mode transmitted by the specific user who uses the support system, and provides support information to the specific user who transmitted the information related to the usage mode. The offer price at the time of doing is determined based on the received information regarding the use mode. As described above, when determining the provision price of the support information, it is possible to automatically recognize the necessary usage mode and determine the provision price.

  Further, according to the present embodiment, since the file package is provided via the Internet (communication network 1500), it is possible to save the trouble of providing the file package.

  In addition, according to the present embodiment, the communication server 150 or the management controller 160 supports a series of device manufacturing processes including the exposure process using the file provided from the license server 2000, so that the productivity of the device manufacturing process is improved. Can be made.

  Note that the support functions of the communication server 150 and the management controller 160 do not have to be provided by an apparatus independent of the exposure apparatus 100 and the measurement / inspection instrument 120, and may be provided by them.

  Further, from another viewpoint, this embodiment exemplifies a provision condition determination method for determining provision conditions when information is provided for data processing related to device manufacturing processing. In this method, the provided price is calculated based on at least one of the data amount of the data processed using the information and the type of target data processed in the data processing. The price for providing support information is determined according to the results. In this way, the provision price of information can be appropriately determined according to the amount of data to be processed and the type of target data.

  Further, from another point of view, this embodiment is used to process data output from at least one device of a plurality of types of device manufacturing processing apparatuses, regarding a device manufacturing process using a plurality of types of device manufacturing processing apparatuses. It is possible to provide a provision condition determination method for determining a provision condition of support information when providing information to be provided. According to this method, the provision price is determined by executing the calculation for calculating the provision price of the support information based on the type of the device manufacturing processing apparatus that outputs the data processed using the information.

  From another point of view, the present embodiment is a provision condition determination method for determining provision conditions when providing information for data processing related to device manufacturing processing to a specific user. In this method, an operation for calculating a provision price of support information based on a past purchase record by a specific user is executed, and the provision price is determined according to the result.

  In addition, according to the present embodiment, a transmission process (step 507 in FIG. 11) for transmitting the determined provided price to the customer system 1000 (host 600) of the specific user via the communication network 1500, and the specific user An order receiving step (step 509 in FIG. 11) for receiving information related to the order for the provision condition of new support information transmitted from the host 600 of FIG. In this way, it is possible to automatically place an order, so that the sales contract can be made more efficient.

  Further, according to the present embodiment, after the order receiving process is performed, the providing process (step 513 in FIG. 11) of providing new support information to the information processing apparatus of the specific user via the communication network 1500 is performed. In addition. According to this, since a new file package can be automatically provided to the customer, the processing becomes efficient.

  In addition, according to the present embodiment, a distribution step (step 501 in FIG. 11) for distributing information on new support information to an information processing apparatus of a specific user via the communication network 1500, and information on the specific user An estimate request receiving step (step 503 in FIG. 11) for receiving information related to an estimate request for a provision condition for new support information transmitted from the processing apparatus, and a decision step ( Step 505) of FIG. 11 is performed. In this way, the customer can obtain information about the new file package corresponding to the new device without any effort, and the license server 2000 can provide only the customer who is interested in the new file. Since the estimation is performed, the load on the license server 2000 is also reduced.

  In the above embodiment, the apparatus that performs data communication is the exposure apparatus 100 and the measurement / inspection instrument 120, but the present invention is not limited to this. For example, the present invention can also be applied to provision of a conversion definition file that supports data communication such as each device of the C / D 110 and the device manufacturing processing apparatus group 900. Similarly, the cooperative operation is not limited to the exposure apparatus and the measurement / inspection device, but also provides a cooperative recipe file for performing the cooperative operation including the C / D 110 and the device manufacturing processing apparatus group 900. Of course, the present invention can be applied.

  Moreover, in the said embodiment, although it was set as the file package containing both a conversion definition file and a cooperation recipe file, it should just contain either one. Further, the present invention can be applied to any file that is used for a support function for supporting a processing operation across a plurality of devices.

  In this embodiment, the data conversion file and the linked recipe file are distributed, and the communication server 150 creates the conversion recipe file based on the received data conversion file. However, the support information for distributing the conversion recipe file is used as support information. Of course, it may be included.

  Further, the present invention can be applied not only to sales contracts but also to price determination in rental contracts and lease contracts.

  Further, the sales conditions determined by the method according to the above embodiment are not limited to discounts on the purchase price of software. For example, other benefits such as “provided free customer service” and “cancellation or relaxation of usage constraint conditions” may be set. Thus, the present invention is not limited to the method of reflecting the sales conditions.

  In addition, the present invention is applicable to sales of products related to software that performs data conversion of data relating to device manufacturing.

  In the present embodiment, the exposure apparatus 100 is a step-and-scan type exposure apparatus, but is not limited thereto, and may be a step-and-repeat type or other type of exposure apparatus. As represented by this, the various apparatuses are not limited to those types. The present invention is not limited to a semiconductor manufacturing process, and can be applied to a manufacturing process of a display including a liquid crystal display element. Line width in all device manufacturing processes, including the process of transferring the device pattern onto the glass plate, the manufacturing process of the thin film magnetic head, the manufacturing process of the imaging device (CCD, etc.), micromachine, organic EL, DNA chip, etc. Of course, the present invention can be applied to management.

  The present invention is a function supply method for supplying a support function for supporting a processing operation across a plurality of device manufacturing processing apparatuses for manufacturing a certain device. In this function supply method, support information used to execute a support function for supporting a processing operation across a plurality of device manufacturing processing apparatuses by a support system that executes the support function in a form that can be read by the support system. Provided separately from the support system. In this way, it is possible to perform various processing operations across a plurality of device manufacturing processing apparatuses only by supplying the support function separately, and the process is flexible, and efficient high-mix low-volume production is possible.

  As described above, the function supply method, exposure method, exposure apparatus, measurement / inspection method, measurement / inspection apparatus, function supply system, program, recording medium, and provision condition determination method of the present invention are suitable for device manufacturing. Yes.

1 is a schematic configuration diagram of a network system according to an embodiment of the present invention. It is a schematic block diagram of the customer system which concerns on one Embodiment of this invention. It is a logical block diagram of a communication server. It is a logical block diagram of a management controller. It is a figure which shows the flow of a wafer process. It is a figure which shows schematic structure of a license server. It is a figure which shows an example of the registration content of a license management database. It is a figure which shows an example of a count number setting database. It is a figure which shows an example of a usage condition monitoring database. FIG. 10A is a diagram showing discount levels in the discount rate setting database, and FIG. 10B is a diagram showing discount rates in the discount rate setting database. It is a transmission / reception chart showing the flow of data transmission / reception between the license server and the host. It is a flowchart which shows the flow of license sales.

Explanation of symbols

51, 52 ... transceiver unit, 53 ... control unit, 53a ... file format conversion section, 53b ... communication message conversion unit, 53c ... communication protocol conversion unit, 54 ... conversion definition file registration section, 54 _1, 54 _2, 54 ₃ ... Conversion definition file, 55 ... Conversion recipe file registration part, 55 ₁ , 55 ₂ , 55 ₃ ... Conversion recipe file, 61, 62 ... Transmission / reception part, 63 ... Control part, 64 ... Storage device, 65 ₁ , 65 ₂ , 65 ₃ , 65 ₄ ... Cooperative recipe file, 100 ... Exposure apparatus, 110 ... Coater / developer, 120 ... Measuring / inspection instrument, 140 ... Analysis apparatus, 150 ... Communication server, 160 ... Management controller, 200 ... Truck, 310 ... Sales Condition setting processing unit 320 ... Customer license management processing unit 330 ... Usage status management processing unit 340 ... Database system 341 ... customer license management database, 342 ... sales condition: count number setting database, 343 ... usage status monitoring database, 344 ... sales condition: discount rate setting database, 350 ... restriction setting unit, 360 ... transmission / reception unit, 370 ... distribution , 380... File package, 600... Host system, 900... Device manufacturing processing apparatus group, 910... CVD apparatus, 920... Etching apparatus, 930 ... CMP apparatus, 940. Communication network, 2000 ... license server, 2500 ... database, 3000 ... network system.

Claims (42)

A function supply method for supplying a support function for supporting a processing operation across a plurality of device manufacturing processing apparatuses,
The support system that can be used by the support system to read support information used to execute a support function for supporting a processing operation across the plurality of device manufacturing processing apparatuses. Including a process to be provided separately from,
A function supply method characterized in that the support function can be executed by causing the support system to read the support information provided separately from the support system. The support system includes:
Two or more device manufacturing processing apparatuses are connected, and information transmitted from one of the two or more device manufacturing processing apparatuses is received in conformity with the device manufacturing processing apparatus that is the transmission source of the information. A communication server that transmits information adapted to the device manufacturing processing apparatus of the transmission destination,
As the support information used for executing the support function, the communication server converts the information received from the transmission source device manufacturing processing apparatus into information suitable for the transmission source device manufacturing processing apparatus. The function supply method according to claim 1, wherein conversion information to be used is provided. The support system includes:
Based on a cooperative recipe file that describes information for controlling cooperative device manufacturing processing across multiple types of device manufacturing processing devices, a cooperative recipe server that operates multiple types of device manufacturing processing devices in a coordinated manner,
The function supply method according to claim 1, wherein the cooperation recipe file is provided as the support information used for executing the support function. As information regarding the usage mode of the support information, the amount of information processed by the support system using the support information, the type of target data processed by the support system using the support information, and the target of the type Collecting information on at least one of the types of device manufacturing processing equipment that generates the data;
The function supply method according to claim 2, wherein the support information is provided according to the collected information on the usage mode.   The function supply method according to claim 4, wherein a provision price at the time of providing the support information is determined according to the collected information on the use mode.   Obtaining information related to past purchase results by a specific user who uses the support system, and determining a provision price when providing the support information to the specific user based on the acquired information related to the purchase result The function supply method according to claim 5. Receiving information on the usage mode transmitted by a specific user using the support system;
6. The provision price for providing the support information to the specific user who has transmitted the information on the usage mode is determined based on the received information on the usage mode. Function supply method.   At least one of the amount of information that can be processed by the support system using the support information, the type of target data that can be processed by the support system using the support information, and the type of device manufacturing processing apparatus that generates the target data The function supply method according to claim 4, further comprising: providing support information in which restrictions are set according to the collected information on the usage mode. The amount of information that can be processed by the support system using the support information, and at least one of the types of target data that can be processed by the support system using the support information, according to the collected information on the use mode Provide support information with restrictions, and
5. The function supply method according to claim 4, wherein a provision price at the time of providing the support information is determined according to the restriction of the support information to be provided. As information related to the usage mode of the support information, the amount of information that can be processed by the support system using the support information, the type of target data that can be processed by the support system using the support information, and the target data are generated. A limit is set on the support information regarding at least one type of device manufacturing apparatus to be
The function supply method according to claim 2, wherein a price for providing the support information is determined based on a restriction set in the support information. Obtaining information on past purchases by a specific user using the support system;
The function supply method according to claim 10, further comprising considering the acquired information related to the purchase result and determining a provision price when the support information is provided to the specific user. Receiving information on the usage mode transmitted by a specific user using the support system;
The provision price at the time of providing the support information to the specific user who has transmitted the information on the usage mode is determined based on the received information on the usage mode. The function supply method described.   4. The function supply method according to claim 2, wherein the support information is provided via the Internet. In an exposure method for exposing a predetermined pattern to a substrate,
The support information executed by the support system is received using the support information provided by the function supply method according to any one of claims 1 to 13, and the predetermined pattern is exposed on a substrate. Exposure method. An exposure apparatus connected to the support system for exposing a predetermined pattern on a substrate,
A support function executed by the support system is received using the support information provided by the function supply method according to claim 1, and the predetermined pattern is exposed on a substrate. An exposure apparatus. In a measurement / inspection method for performing a predetermined measurement or inspection related to device manufacturing processing,
It receives the support information which the support system performs using the support information provided by the function supply method according to any one of claims 1 to 13, and performs the predetermined measurement or inspection, Measurement / inspection method. In the measurement / inspection apparatus connected to the support system and performing a predetermined measurement or inspection related to the device manufacturing process,
It receives the support function which the support system performs using the support information provided by the function supply method according to any one of claims 1 to 13, and performs the predetermined measurement or inspection, Measuring and inspection equipment. In a function supply system that supplies a support function for supporting a processing operation across a plurality of device manufacturing processing apparatuses,
Connected to a support system that executes the support function, the support system reads support information used by the support system to execute a support function for supporting a processing operation across the plurality of device manufacturing processing apparatuses. A function supply system comprising a distribution unit for distributing to the support system in a possible form. The support system includes:
Two or more device manufacturing processing apparatuses are connected, and information transmitted from one of the two or more device manufacturing processing apparatuses is received in conformity with the device manufacturing processing apparatus that is the transmission source of the information. A communication server for transmitting information to a device manufacturing processing apparatus as a transmission destination,
The distribution unit converts information received from the transmission source device manufacturing processing apparatus into information suitable for the transmission source device manufacturing processing apparatus as the support information used for executing the support information. 19. The function supply system according to claim 18, wherein the conversion information used by the communication server is distributed to the network. The support system includes:
Based on a cooperative recipe file that describes information for controlling cooperative device manufacturing processing across multiple types of device manufacturing processing devices, a cooperative recipe server that operates multiple types of device manufacturing processing devices in a coordinated manner,
The function supply system according to claim 18, wherein the distribution unit distributes the continuous recipe file as the support information used to execute the support information. As information regarding the usage mode of the support information, at least the amount of information processed using the support system, the type of target data processed by the support system, and the type of device manufacturing apparatus that generates the target data An information collecting unit that collects information related to one,
21. The function supply according to claim 19 or 20, wherein the distribution unit distributes the support information to the support system according to information on the usage mode collected by the information collection unit of the usage mode. system.   The function supply system according to claim 21, wherein a provision price for providing the support information is determined in accordance with information on the use mode collected by the information collecting unit of the use mode. A recording device for recording information related to past purchases by a specific user using the support system;
23. The provision price for providing the support information to the specific user is determined based on information on a past purchase record by the specific user recorded in the recording device. Function supply system. A receiving unit for receiving information on the usage mode transmitted by a specific user using the support system;
23. The provision price for providing the support information to the specific user who has transmitted the information on the usage mode is determined based on the information on the usage mode received by the receiving unit. Function supply system described in. According to the information on the usage mode collected by the usage mode information collection unit, the amount of information of the support information that can be processed using the support system, the type of target data that can be processed by the support system, and A restriction setting unit for restricting the distributed support information with respect to at least one type of device manufacturing processing apparatus that generates the target data;
The function distribution system according to claim 21, wherein the distribution unit distributes the support information restricted by the restriction setting unit to the support system. The amount of information that can be processed by the support system using the support information according to the information about the use mode collected by the information collector of the use mode, and the object that can be processed by the support system using the support information A restriction setting unit that restricts the distributed support information with respect to at least one of the type of data and the type of device manufacturing processing apparatus that generates the target data;
The function supply system according to claim 21, further comprising a price determination unit that determines a price when the support information is provided based on the restriction. As information regarding the usage mode of the support information, the amount of information that can be processed by the support system using the support information, the type of target data that can be processed by the support system using the support information, and the target data are generated. A restriction setting unit for setting a restriction on the support information regarding at least one type of device manufacturing processing apparatus;
21. The function supply system according to claim 19 or 20, further comprising a price determination unit that determines a price when providing support information with the restriction set based on the restriction. A recording unit for recording information on past purchase results by a specific user using the support system;
28. The price determination unit according to claim 27, further comprising: a price determination unit that determines a price when the support information is provided based on information on a past purchase record by the specific user recorded in the recording unit. Function supply system. A receiving unit that receives information on the usage mode transmitted by a specific user using the support system;
And a price determination unit that determines a provided price when the support information is provided to the specific user who has transmitted the information on the usage mode based on the received information on the usage mode. Item 19. The function supply system according to Item 19 or 20. A support system that supplies a support function for supporting processing operations across a plurality of device manufacturing processing apparatuses, a program that causes a computer system to supply support information used to execute the support function,
A program comprising: processing for distributing specific support information selected from a plurality of support information prepared in advance to the computer system in a form that can be read by the support system separately from the support system. The support system includes:
Two or more device manufacturing processing apparatuses are connected, and information transmitted from one of the two or more device manufacturing processing apparatuses is received in conformity with the device manufacturing processing apparatus that is the transmission source of the information. A communication server that transmits information adapted to the device manufacturing processing apparatus of the transmission destination,
The distribution process converts the information received from the transmission source device manufacturing processing apparatus into information suitable for the transmission destination device manufacturing processing apparatus as the support information used to execute the support function. 31. The program according to claim 30, wherein the conversion information used by the communication server is distributed. The support system includes:
Based on a cooperative recipe file that describes information for controlling cooperative device manufacturing processing across multiple types of device manufacturing processing devices, a cooperative recipe server that operates multiple types of device manufacturing processing devices in a coordinated manner,
The program according to claim 30, wherein the cooperation recipe file is distributed as the support information used to execute the support function. As information regarding the usage mode of the support information, the amount of information processed by the support system using the support information, the type of target data processed by the support system using the support information, and the target of the type A process of collecting information about at least one of the types of device manufacturing processing equipment that generates the data;
The program according to claim 31 or 32, further comprising: a process of providing the support information according to the collected information on the usage mode.   34. The program according to claim 33, further comprising a process of determining a provision price when the support information is provided in accordance with information on the utilization aspect collected by the utilization aspect information collection unit. A process of receiving information on the usage mode transmitted by a specific user using the support system;
And a process of determining a provision price when providing the support information to the specific user who has transmitted the information on the usage mode based on the information on the usage mode received by the receiving unit. The program according to claim 34. A process of receiving information on the usage mode transmitted by a specific user using the support system;
The provision price for providing the support information to the specific user who has transmitted the information on the usage mode is determined based on the information on the usage mode received by the receiving unit. The program described in.   A recording medium for recording the program according to any one of claims 30 to 36 in a state in which the program is read and executed by a computer system. A provision condition determining method for determining provision conditions when providing information for data processing related to device manufacturing processing,
A predetermined calculation is executed based on at least one of a data amount of the data processed using the information and a type of target data processed by the data processing, and the provision is performed according to the predetermined calculation result A providing condition determining method, characterized by determining a condition. Information provision conditions for providing information used to process data output from at least one of the plurality of types of device manufacturing processing apparatuses regarding device manufacturing processing using a plurality of types of device manufacturing processing apparatuses A provision condition determination method for determining
The predetermined condition is executed based on a type of a device manufacturing processing apparatus that outputs the data processed using the information, and the provision condition is determined according to the predetermined calculation result. The providing condition determination method described. A provision condition determination method for determining provision conditions when providing information for data processing related to device manufacturing processing to a specific user,
The provision condition determination method according to claim 38, wherein a predetermined calculation is executed based on a past purchase record by the specific user, and the provision condition is determined according to the predetermined calculation result. The provided information is:
Two or more device manufacturing processing apparatuses are connected, and information transmitted from one of the two or more device manufacturing processing apparatuses is received in conformity with the device manufacturing processing apparatus that is the transmission source of the information. Information used by the communication server that transmits information adapted to the device manufacturing processing apparatus of the transmission destination,
The communication server is conversion information used for converting information received from the transmission source device manufacturing processing apparatus into information suitable for the transmission destination device manufacturing processing apparatus. The provision condition determination method according to any one of 38 to 40. The provided information is:
Information used by a cooperative recipe server that operates a plurality of types of device manufacturing processing apparatuses in a coordinated manner based on a cooperative recipe file that describes information for controlling cooperative device manufacturing processing across multiple types of device manufacturing processing apparatuses. And
The provision condition determination method according to any one of claims 38 to 40, wherein the cooperation recipe file is provided.

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