JP2007169706A - Electroplating solution and electroplating method for forming amorphous gold-nickel based alloy plated film - Google Patents
Electroplating solution and electroplating method for forming amorphous gold-nickel based alloy plated film Download PDFInfo
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本発明は、アモルファス金−ニッケル系合金めっき皮膜を析出、形成することができる電気めっき液及び電気めっき方法に関する。 The present invention relates to an electroplating solution and an electroplating method capable of depositing and forming an amorphous gold-nickel alloy plating film.
電子部品の一部としてのコネクター、小型リレー、プリント配線板などの高信頼性電気接点材料としては、いわゆる硬質金めっき膜が現在広く使われている。硬質金めっき膜は極めて小さな金の微結晶(20〜30nm)からなり、その硬度は170〜200kgmm-2(ヌープ硬度)に達する。接点材料の良好な耐摩耗性を得るために必要なこのような高い硬度は、粒径の小さな結晶粒が大量に結合することによって得られている。
一方、近年の電子部品の小型化に伴い、電気接点の大きさも微小化しつつあり、近い将来には、接点の大きさが硬質金の結晶粒の大きさと対比されるまでになるものと考えられる。このような微細な接点上の金めっき膜は、それを構成する結晶粒の全数が少ないために、大きい接点で得られるような硬度が保持できなくなるものと推察される。このようなナノメータレベルの大きさになっても物性が影響を受けない微細構造としては、結晶性ではなく、アモルファス構造が理想的である。
また、接点材料として有用であるためには、接点同士が接触したときの電気抵抗が低くなければならない。しかも、接点材料の使用環境下での安定性が必要であることを考え合わせると、アモルファス構造を持った金、又は金合金が望ましい。
A so-called hard gold plating film is currently widely used as a highly reliable electrical contact material such as a connector, a small relay, and a printed wiring board as a part of an electronic component. The hard gold plating film is composed of extremely small gold crystallites (20 to 30 nm), and the hardness reaches 170 to 200 kgmm −2 (Knoop hardness). Such a high hardness necessary for obtaining good wear resistance of the contact material is obtained by bonding a large amount of crystal grains having a small grain size.
On the other hand, with the recent miniaturization of electronic components, the size of electrical contacts is also becoming smaller, and in the near future, the size of contacts will be compared with the size of hard gold crystal grains. . The gold plating film on such a fine contact is presumed to be unable to maintain the hardness obtained with a large contact because the total number of crystal grains constituting it is small. As a fine structure whose physical properties are not affected even when such a nanometer level size is reached, an amorphous structure is ideal instead of crystallinity.
Also, in order to be useful as a contact material, the electrical resistance when the contacts come into contact with each other must be low. Moreover, considering that the stability of the contact material under the usage environment is necessary, gold or a gold alloy having an amorphous structure is desirable.
なお、本発明に関連する先行技術文献情報としては、以下のものがある。
本発明は、上記事情に鑑みなされたもので、高硬度で接触抵抗の小さいアモルファス構造の金−ニッケル合金めっき皮膜を形成することができるアモルファス金−ニッケル系合金電気めっき液及び電気めっき方法を提供することを目的とする。 The present invention has been made in view of the above circumstances, and provides an amorphous gold-nickel alloy electroplating solution and an electroplating method capable of forming an amorphous gold-nickel alloy plating film having high hardness and low contact resistance. The purpose is to do.
本発明者らは、上記目的を達成するため鋭意検討を行った結果、シアン化金塩、水溶性ニッケル塩、クエン酸又はその塩を特定の割合で含有する電気めっき液を用い、特定の陰極電流密度で電気めっきを行うことにより、金属成分中の組成がAu31at%,Ni69at%〜Au60at%,Ni40at%となる範囲でアモルファス金−ニッケル系合金めっき皮膜が形成されることを知見した。
As a result of intensive studies to achieve the above object, the present inventors have used a specific cathode using an electroplating solution containing a gold cyanide salt, a water-soluble nickel salt, citric acid or a salt thereof in a specific ratio. It has been found that by performing electroplating at a current density, an amorphous gold-nickel alloy plating film is formed in a range where the composition in the metal component is Au 31 at%, Ni 69 at% to
即ち、本発明者らは、先に微細結晶を有さない均質なアモルファス相で形成された金−ニッケル系アモルファス合金めっき皮膜を得ることができる電気めっき液を提案した(特願2005−28523号)。この電気めっき液は、シアン化金塩を金基準で0.01〜0.1mol/dm3の濃度、ニッケル塩をニッケル基準で0.02〜0.2mol/dm3の濃度、及びタングステン酸塩をタングステン基準で0.1〜0.5mol/dm3の濃度で含有するもので、これにより金及びニッケルを含む金属成分を97.5質量%以上、及び炭素を2.5質量%以下で含有すると共に、上記金属成分中の金及びニッケルの組成が、金及びニッケルの総量として98質量%以上、かつ金/ニッケル=2.2〜5.0(質量比)である金−ニッケル系アモルファス合金めっき皮膜を得ることができるものであるが、上記めっき液はタングステン酸塩の添加を必須とするものである。 That is, the present inventors previously proposed an electroplating solution capable of obtaining a gold-nickel-based amorphous alloy plating film formed of a homogeneous amorphous phase having no fine crystals (Japanese Patent Application No. 2005-28523). ). This electroplating solution has a gold cyanide salt concentration of 0.01 to 0.1 mol / dm 3 on a gold basis, a nickel salt concentration of 0.02 to 0.2 mol / dm 3 on a nickel basis, and a tungstate salt. Is contained at a concentration of 0.1 to 0.5 mol / dm 3 on the basis of tungsten, thereby containing metal components including gold and nickel at 97.5% by mass or more and carbon at 2.5% by mass or less. In addition, a gold-nickel amorphous alloy in which the composition of gold and nickel in the metal component is 98% by mass or more as a total amount of gold and nickel and gold / nickel = 2.2 to 5.0 (mass ratio) A plating film can be obtained, but the plating solution requires the addition of tungstate.
これに対し、本発明者らは、更に検討を進めた結果、シアン化金塩、水溶性ニッケル塩、錯化剤としてのクエン酸又はその塩の割合を特定比率で選定して特定陰極電流密度で電気めっきを行うことにより、タングステン酸塩を添加することなしに、アモルファス金−ニッケル系合金めっき皮膜が析出、形成することを見出すと共に、この電気めっき液から得られたアモルファス金−ニッケル系合金めっき皮膜の硬度が高く、また接触抵抗が通常の硬質金めっきの値と同等に低いことを確認し、本発明をなすに至った。 On the other hand, as a result of further investigation, the present inventors have selected a specific cathode current density by selecting a specific ratio of a gold cyanide salt, a water-soluble nickel salt, a citric acid as a complexing agent or a salt thereof. By performing electroplating, it was found that an amorphous gold-nickel alloy plating film was deposited and formed without adding tungstate, and an amorphous gold-nickel alloy obtained from this electroplating solution It was confirmed that the hardness of the plating film was high and the contact resistance was as low as the value of normal hard gold plating, and the present invention was made.
従って、本発明は、シアン化金塩を金基準で0.01〜0.1モル/dm3、水溶性ニッケル塩をニッケル基準で0.017〜0.67モル/dm3、及びクエン酸又はその塩を含有し、金とニッケル濃度の比(Au/Ni)がモル比として0.15〜0.6、クエン酸又はその塩とニッケル濃度の比(Cit/Ni)がモル比として1〜3であり、pHが3〜11であることを特徴とするAu:Niの比率が原子比として31:69〜60:40であるアモルファス金−ニッケル系合金めっき皮膜を形成する電気めっき液を提供する。更に、本発明は、被めっき物を陰極として上記電気めっき液に浸漬し、温度20〜90℃、陰極電流密度3mA/cm2以上10mA/cm2未満又は20mA/cm2を超え200mA/cm2の範囲で電気めっきを行うことを特徴とする、Au:Niの原子比率が31:69〜60:40であるアモルファス金−ニッケル系合金めっき皮膜を形成する電気めっき方法を提供する。
Accordingly, the present invention relates to a gold cyanide salt of 0.01 to 0.1 mol / dm 3 on a gold basis, a water-soluble nickel salt of 0.017 to 0.67 mol / dm 3 on a nickel basis, and citric acid or It contains the salt, gold to nickel concentration ratio (Au / Ni) as a molar ratio of 0.15-0.6, citric acid or its salt to nickel concentration ratio (Cit / Ni) as a molar ratio of 1 to 1 3. An electroplating solution for forming an amorphous gold-nickel alloy plating film with an Au: Ni ratio of 31:69 to 60:40 as the atomic ratio is 3 and has a pH of 3 to 11 To do. Furthermore, the present invention is immersed in the electroplating solution to be plated as a cathode, the
本発明によれば、高硬度で接触抵抗の低いアモルファス金−ニッケル系合金めっき皮膜を形成することができ、リレー等の電気・電子部品の接点材料として有用である。 According to the present invention, an amorphous gold-nickel alloy plating film having high hardness and low contact resistance can be formed, which is useful as a contact material for electrical / electronic parts such as relays.
本発明のアモルファス金−ニッケル系合金電気めっき液は、シアン化金塩、水溶性ニッケル塩、クエン酸又はその塩を含有する。 The amorphous gold-nickel alloy electroplating solution of the present invention contains a gold cyanide salt, a water-soluble nickel salt, citric acid or a salt thereof.
この場合、シアン化金塩としては、シアン化金カリウム、シアン化金ナトリウム、シアン化金リチウム等が挙げられ、その濃度は金基準で0.01〜0.1モル/dm3であり、例えばKAu(CN)2を用いた場合、2.9〜29g/dm3とすることができる。 In this case, examples of the gold cyanide salt include potassium gold cyanide, sodium gold cyanide, lithium gold cyanide and the like, and the concentration thereof is 0.01 to 0.1 mol / dm 3 on a gold basis. When KAu (CN) 2 is used, it can be 2.9 to 29 g / dm 3 .
水溶性ニッケル塩としては、硫酸ニッケル、硝酸ニッケル等が挙げられ、その濃度はニッケル基準で0.017〜0.67モル/dm3であり、例えばNiSO4・6H2Oを用いた場合、4.5〜176g/dm3とすることができる。 Examples of the water-soluble nickel salt include nickel sulfate and nickel nitrate, and the concentration thereof is 0.017 to 0.67 mol / dm 3 on the basis of nickel. For example, when NiSO 4 .6H 2 O is used, 4 0.5 to 176 g / dm 3 .
この場合、金とニッケル濃度の割合は、モル比としてAu/Ni=0.15〜0.6であることが好ましく、この範囲外ではアモルファス構造が得難いものである。 In this case, the ratio of gold and nickel concentration is preferably Au / Ni = 0.15 to 0.6 as a molar ratio, and it is difficult to obtain an amorphous structure outside this range.
本発明のめっき液は、錯化剤としてクエン酸又はそのナトリウム塩、カリウム塩、アンモニウム塩等の水溶性塩を含有する。その濃度は、クエン酸濃度(Cit)とニッケルの比率がモル比としてCit/Ni=1〜3、特に1.2〜2.0の範囲となる量である。クエン酸濃度が低すぎると、めっき液が分解するおそれがあり、クエン酸濃度が高すぎると、アモルファス構造が得られない。 The plating solution of the present invention contains citric acid or a water-soluble salt such as a sodium salt, potassium salt or ammonium salt as a complexing agent. The concentration is such that the ratio of citric acid concentration (Cit) to nickel is in the range of Cit / Ni = 1-3, especially 1.2-2.0, as a molar ratio. If the citric acid concentration is too low, the plating solution may be decomposed. If the citric acid concentration is too high, an amorphous structure cannot be obtained.
なお、上記めっき液には、必要に応じ、他の錯化剤として酒石酸、りんご酸等、更にホウ酸等の緩衝剤などを本発明の効果を損なわない範囲で添加してもよい。 If necessary, the plating solution may contain other complexing agents such as tartaric acid, malic acid and the like, and buffering agents such as boric acid as long as the effects of the present invention are not impaired.
また、めっき液のpHは3〜11、好ましくは5〜9である。 Moreover, pH of a plating solution is 3-11, Preferably it is 5-9.
本発明のめっき方法は、上記めっき液に被めっき物を陰極として浸漬して電気めっきを行うものである。この場合、めっき液の温度は20〜90℃、特に50〜70℃とすることが好ましく、陰極電流密度(Dk)は3mA/cm2以上10mA/cm2未満とするか、20mA/cm2を超え200mA/cm2以下とする。好ましくは30〜150mA/cm2である。Dk50mA/cm2以上ではめっき皮膜中の金/ニッケルは浴組成の比率に比例する。電流密度が低くなるとニッケルが多く析出し、Dk10〜20mA/cm2ではアモルファスとなる組成から外れる。更に、低電流密度になると金の析出割合が増し、再びアモルファス領域に入る。
In the plating method of the present invention, electroplating is performed by immersing an object to be plated in the above plating solution as a cathode. In this case, the temperature of the plating solution is preferably 20 to 90 ° C., particularly preferably 50 to 70 ° C., and the cathode current density (D k ) is 3 mA / cm 2 or more and less than 10 mA / cm 2 , or 20 mA / cm 2. Exceeding 200 mA / cm 2 . Preferably it is 30-150 mA / cm < 2 >. When
なお、陽極としては、白金、白金被覆チタン等の不溶性陽極やニッケル等の可溶性陽極を使用することができる。また、撹拌は特に必要としないが、カソードロッキング等の緩やかな撹拌を行ってもよい。 As the anode, an insoluble anode such as platinum or platinum-coated titanium or a soluble anode such as nickel can be used. Further, although stirring is not particularly required, gentle stirring such as cathode locking may be performed.
本発明のめっき液を用いて得られるめっき皮膜は、アモルファスな金−ニッケル合金であり、この場合、その割合は原子比(atomic%)としてAu:Ni=31:69〜60:40である。質量比としてはAu/Niが1.5〜5.0であり、金とニッケルの総含有量が97質量%以上、特に98質量%以上で、非金属成分として炭素、窒素を含んでもよく、その含有量がC2.5質量%以下、N0.5質量%以下である。 The plating film obtained by using the plating solution of the present invention is an amorphous gold-nickel alloy. In this case, the ratio is Au: Ni = 31: 69 to 60:40 as an atomic ratio (atomic%). As the mass ratio, Au / Ni is 1.5 to 5.0, the total content of gold and nickel is 97 mass% or more, particularly 98 mass% or more, and may contain carbon and nitrogen as non-metallic components, Its content is C2.5 mass% or less and N 0.5 mass% or less.
以下、実施例と比較例を示し、本発明を具体的に説明するが、本発明は下記の実施例に制限されるものではない。なお、下記の例において、各分析、測定の方法及び条件は、以下のとおりである。また、質量%をwt%と記す。 EXAMPLES Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated concretely, this invention is not restrict | limited to the following Example. In the following examples, the methods and conditions for each analysis and measurement are as follows. Moreover, mass% is described as wt%.
XRD
理学電機社製 RINT−TTRによる:CuKα(50kV/200mA)
金属組成
理学電機工業 RIX2100による:蛍光X線法
ヌープ硬さ
JIS Z 2251に準じて測定:荷重49.0mN(HK0.005) 荷重保持時間5秒
接触抵抗
山崎精機製電気接点シミュレータCRS−112−ALによる:四端子法で、荷重1N、印加電流10mAの条件で測定
XRD
RINT-TTR manufactured by Rigaku Corporation: CuKα (50 kV / 200 mA)
Metal composition Rigaku Denki Kogyo RIX2100: X-ray fluorescence method
Knoop hardness Measured according to JIS Z 2251: Load 49.0 mN (HK0.005) Load holding time 5 seconds
Contact resistance Using electrical contact simulator CRS-112-AL manufactured by Yamazaki Seiki: Measured under the conditions of a load of 1 N and an applied current of 10 mA by the four-terminal method.
[実施例1]
KAu(CN)2を0.035mol/dm3、NiSO4・6H2Oを0.076mol/dm3、クエン酸を0.076mol/dm3含有し、アンモニア水によりpHを6に調整した電気めっき液を用い、温度70℃、電流密度150mA/cm2で純度99.96%の銅板に金−ニッケルアモルファス合金めっき皮膜(膜厚5μm)を形成した。なお、アノードには白金板を用い、めっき中のめっき浴撹拌は行わなかった。
得られた合金めっき皮膜の構造をXRDにより、組成を蛍光X線により解析した。XRDパターンは図1に示すようにブロードでアモルファス構造をとっていることがわかる。皮膜の金属成分解析結果は表1に示すとおりであり、金73wt%、ニッケル27wt%であった。
[Example 1]
KAu (CN) 2 and 0.035mol / dm 3, NiSO 4 · 6H 2 O and 0.076 mol / dm 3, citric acid 0.076 mol / dm 3 and containing, electroplating was adjusted to pH 6 with aqueous ammonia Using the solution, a gold-nickel amorphous alloy plating film (film thickness: 5 μm) was formed on a copper plate having a temperature of 70 ° C. and a current density of 150 mA / cm 2 and a purity of 99.96%. A platinum plate was used as the anode, and the plating bath was not stirred during plating.
The structure of the obtained alloy plating film was analyzed by XRD, and the composition was analyzed by fluorescent X-rays. It can be seen that the XRD pattern has a broad and amorphous structure as shown in FIG. The metal component analysis results of the coating are as shown in Table 1, and were 73 wt% gold and 27 wt% nickel.
[実施例2]
クエン酸濃度を0.143mol/dm3とした以外は、実施例1と同じ条件でめっきを行った。得られためっき膜のXRDパターンは図1に示すようにブロードで、アモルファス構造をとっていた。皮膜の金属成分解析結果は表1に示すとおりであり、金75wt%、ニッケル25wt%であった。更に、めっき皮膜のヌープ硬度及び接触抵抗を測定したところ、ヌープ硬度は460kg/mm2、接触抵抗は1.9mΩであった。なお、ヌープ硬度測定は、めっき厚みを30μmとして測定した。
[Example 2]
Plating was performed under the same conditions as in Example 1 except that the citric acid concentration was 0.143 mol / dm 3 . The XRD pattern of the obtained plating film was broad as shown in FIG. 1 and had an amorphous structure. The metal component analysis results of the coating are as shown in Table 1 and were 75 wt% gold and 25 wt% nickel. Furthermore, when the Knoop hardness and contact resistance of the plating film were measured, the Knoop hardness was 460 kg / mm 2 and the contact resistance was 1.9 mΩ. The Knoop hardness was measured with a plating thickness of 30 μm.
[実施例3]
電流密度を50mA/cm2とした以外は実施例2と同じ条件にてめっきを行った。得られためっき膜のXRDパターンは図1に示すようにブロードで、アモルファス構造をとっていた。皮膜の金属成分解析結果は表1に示すとおりであり、金72wt%、ニッケル28wt%であった。
[Example 3]
Plating was performed under the same conditions as in Example 2 except that the current density was 50 mA / cm 2 . The XRD pattern of the obtained plating film was broad as shown in FIG. 1 and had an amorphous structure. The metal component analysis results of the coating are as shown in Table 1, and were gold 72 wt% and nickel 28 wt%.
[実施例4]
NiSO4・6H2Oを0.057mol/dm3、クエン酸濃度を0.143mol/dm3、電流密度を100mA/cm2とした以外は実施例1と同じ条件にてめっきを行った。得られためっき膜のXRDパターンは図1に示すようにブロードで、アモルファス構造をとっていた。皮膜の金属成分解析結果は表1に示すとおりであり、金79wt%、ニッケル21wt%であった。
[Example 4]
Plating was performed under the same conditions as in Example 1 except that NiSO 4 .6H 2 O was 0.057 mol / dm 3 , the citric acid concentration was 0.143 mol / dm 3 , and the current density was 100 mA / cm 2 . The XRD pattern of the obtained plating film was broad as shown in FIG. 1 and had an amorphous structure. The metal component analysis results of the film are as shown in Table 1, and were 79 wt% gold and 21 wt% nickel.
[実施例5]
電流密度を5A/cm2とした以外は実施例1と同じ条件にてめっきを行った。得られためっき膜のXRDパターンはブロードで、アモルファス構造をとっていた。皮膜の金属成分解析結果は表1に示すとおりであり、金64wt%、ニッケル36wt%であった。
[Example 5]
Plating was performed under the same conditions as in Example 1 except that the current density was 5 A / cm 2 . The obtained plating film had a broad XRD pattern and an amorphous structure. The metal component analysis results of the coating are as shown in Table 1, and were 64 wt% gold and 36 wt% nickel.
[比較例1]
クエン酸濃度を0.357mol/dm3とした以外は実施例1と同じ条件でめっきを行った。得られた皮膜の金属成分分析結果は表1に示すように金75wt%、ニッケル25wt%であったが、XRDパターンは図2に示すように2θ=38°付近にAu(111)又はAu−Ni固溶体に由来する微小なピークが認められ、アモルファス構造から外れていることがわかった。
[Comparative Example 1]
Plating was performed under the same conditions as in Example 1 except that the citric acid concentration was 0.357 mol / dm 3 . The metal component analysis results of the obtained film were 75 wt% gold and 25 wt% nickel as shown in Table 1, but the XRD pattern was Au (111) or Au-- around 2θ = 38 ° as shown in FIG. A minute peak derived from the Ni solid solution was observed, and it was found that it was out of the amorphous structure.
[比較例2]
クエン酸濃度を0.257mol/dm3とした以外は実施例1と同じ条件でめっきを行った。得られた皮膜の金属成分分析結果は表1に示すように金76wt%、ニッケル24wt%であったが、XRDパターンは図2に示すように比較的に鋭いピークが認められ、アモルファス構造から外れていると判断した。
[Comparative Example 2]
Plating was performed under the same conditions as in Example 1 except that the citric acid concentration was 0.257 mol / dm 3 . The metal component analysis results of the obtained film were 76 wt% gold and 24 wt% nickel as shown in Table 1, but the XRD pattern showed a relatively sharp peak as shown in Fig. 2 and deviated from the amorphous structure. It was judged that.
[比較例3]
電流密度を10mA/cm2とした以外は実施例3と同じ条件にてめっきを行った。得られためっき皮膜の金属成分分析結果は表1に示すように金49wt%、ニッケル51wt%であり、XRDパターンには図2に示すように2θ=45°付近にNi(111)又はAu−Ni固溶体に由来するピークが認められた。また、2θ=39°付近にAu(111)又はAu−Ni固溶体に由来するピークが認められ、アモルファス構造はとっていないことがわかった。
[Comparative Example 3]
Plating was performed under the same conditions as in Example 3 except that the current density was 10 mA / cm 2 . The metal component analysis results of the obtained plating film are 49 wt% gold and 51 wt% nickel as shown in Table 1, and the XRD pattern shows Ni (111) or Au− around 2θ = 45 ° as shown in FIG. A peak derived from the Ni solid solution was observed. Further, a peak derived from Au (111) or Au—Ni solid solution was observed in the vicinity of 2θ = 39 °, and it was found that an amorphous structure was not taken.
[比較例4]
電流密度10mA/cm2とした以外は実施例4と同じ条件にてめっきを行った。得られためっき皮膜の金属成分分析結果は表1に示すように金87wt%、ニッケル13wt%であり、XRDパターンには図2に示すように2θ=38°付近にAu(111)又はAu−Ni固溶体に由来するピークが認められ、アモルファス構造はとっていないことがわかった。
[Comparative Example 4]
Plating was performed under the same conditions as in Example 4 except that the current density was 10 mA / cm 2 . The metal component analysis results of the obtained plating film are 87 wt% gold and 13 wt% nickel as shown in Table 1. As shown in FIG. 2, the XRD pattern shows Au (111) or Au− around 2θ = 38 °. A peak derived from the Ni solid solution was observed, and it was found that an amorphous structure was not taken.
以上のめっき液組成、電流密度、得られためっき皮膜中の金属成分組成を表1,2に示す。 Tables 1 and 2 show the above plating solution composition, current density, and metal component composition in the obtained plating film.
Claims (2)
Immersed in an electroplating solution of claim 1, wherein the object to be plated as a cathode, the temperature 20 to 90 ° C., the cathode current density 3mA / cm 2 or more 10 mA / cm 2 or less than 20 mA / cm 2, greater 200 mA / cm 2 range An electroplating method for forming an amorphous gold-nickel alloy plating film having an Au: Ni atomic ratio of 31:69 to 60:40, characterized in that electroplating is performed.
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